Sleeve type gas filter element and high-flow metal filter element gas filter

Abstract

The invention provides a sleeve type gas filter element which comprises an inner pipe and an outer pipe, the outer pipe is arranged outside the inner pipe in a sleeving mode, an annular channel is formed between the outer pipe and the inner pipe, and the inner pipe and the outer pipe are both prepared by sintering metal powder so that metal filter membranes can be formed on the surfaces of the inner pipe and the outer pipe; two opposite ends between the annular channel and an inner channel formed in the inner pipe are sealed structures, and the other two ends of the annular channel and the inner channel formed in the inner pipe are open ends, so that to-be-filtered gas enters the annular channel after being filtered by the pipe walls of the outer pipe and the inner pipe from the exterior of the outer pipe or the interior of the inner pipe; and the gas is output from the opening end of the annular channel, so that gas filtration is realized. The two-way gas inlet function of the metal filter membrane is utilized, the pipe walls of the inner pipe and the outer pipe are adopted for filtering at the same time, the filtering area is greatly increased, filtered gas is output through the opening end of the annular channel, in other words, the gas is designed to flow into a larger channel to be output, and gas pressure loss is effectively reduced.

Description

Technical Field

[0001] The present application relates to the technical field of gas filtration, and in particular to a sleeve-type gas filter element and a large-flow metal filter element gas filter. Background Art

[0002] Gas is widely used in industrial production. Various gases need to be filtered before use to ensure that the gas meets the purity requirements. Therefore, the filter area and filter accuracy of the filter have an important impact on the gas filtration efficiency.

[0003] There are various types of gas filters on the market, among which Mott gas filters are common gas filters. Figure 1 and 2 As shown, the Mott filter consists of an air inlet 14, an air outlet 14, and a filter element 12 composed of numerous filter tubes. Dozens of thin metal filter tubes (22 mm in diameter) are densely welded side by side to a filter element welding plate 13. This shows that the filter housing is congested and occupies a large space. Furthermore, the excessive number of metal filter tubes, their high density, high welding density, and small tube pores lead to a complex welding process with numerous repetitions, a high risk of weld leakage, and extremely difficult integrity testing. Furthermore, individual filter elements are highly likely to be damaged and irreparable.

[0004] Furthermore, for gas filtration, the metal filter tube is a single-tube structure, with the tube wall acting as a filter membrane. Gas is filtered from the inside out or the outside in. When the gas flow rate is high, the filter area of ​​the metal filter tube is severely insufficient, and filtration cannot meet the required requirements. Conversely, when the gas flow rate is low, the pressure loss when the gas passes through the filter tube is large, and the gas filtration requirements cannot be met. Summary of the Invention

[0005] In view of this, the embodiments of this specification provide a sleeve-type gas filter element and a large-flow metal filter element gas filter, which adopts an inner and outer sleeve method to effectively expand the filtration area within a limited space, and technically solves the problem of minimizing the pressure loss before and after the gas passes through the metal filter membrane to ensure the stability of the gas delivery pressure.

[0006] This manual provides the following technical solutions:

[0007] In the first aspect, the present specification provides a sleeve-type gas filter element, comprising: an inner tube and an outer tube, the outer tube being sleeved on the outside of the inner tube and forming an annular channel between the outer tube and the inner tube, the inner tube and the outer tube being both prepared by sintering metal powder so as to form a metal filter membrane on their surfaces; the two opposite ends between the annular channel and the inner channel formed inside the inner tube are sealed structures and the other two ends are open ends, so that the gas to be filtered enters the annular channel after being filtered from the outside of the outer tube or the inside of the inner tube through the tube walls of the outer tube and the inner tube, and is output from the open end of the annular channel, thereby realizing gas filtration.

[0008] In combination with the first aspect, in one possible implementation, the inner diameter of the outer tube is 1.1 to 2.5 times the outer diameter of the inner tube to balance the size of the inner tube and the space size of the annular channel; and / or, the inner tube and the outer tube are concentrically arranged to ensure uniform gas distribution in the annular channel.

[0009] In combination with the first aspect, in one possible implementation, the outer tube and / or the inner tube are prepared by sintering a microporous filter metal material, and the microporous filter metal material includes at least the following: stainless steel or pure nickel, nickel alloy, Inconel, metal titanium and high-purity alumina; in the sintering preparation process, the pressure loss value of the gas filtration is adjusted by controlling the porosity to 30-40%.

[0010] In combination with the first aspect, in a possible implementation, the sleeve-type gas filter element further includes: an inner sealing cover, which is arranged at the open end of the annular channel and is used to seal the end surface corresponding to the inner tube; an outer sealing cover, which is arranged at the open end of the inner channel and is connected to the inner tube and the outer tube, and is used to seal the end surface corresponding to the annular channel.

[0011] In combination with the first aspect, in a possible implementation, the sleeve-type gas filter element further includes: a connecting ring, disposed at an open end of the annular channel, for connecting the inner tube and the outer tube.

[0012] In the second aspect, the present specification provides a large-flow metal filter element gas filter, comprising: a plurality of sleeve-type gas filter elements arranged in a combined structure; a cylinder body, used to encapsulate the plurality of sleeve-type gas filter elements, with an air inlet and an air outlet formed at both ends respectively; wherein, the sleeve-type gas filter element is the sleeve-type gas filter element described in any of the above-mentioned schemes, the air inlet is connected to the outside of the inner tube and the outer tube, and the air outlet is connected to the annular channel between the outer tube and the inner tube.

[0013] In combination with the second aspect, in one possible implementation, the air inlet and / or the air outlet are arranged at a preset distance from the corresponding ends of the inner tube and the outer tube to form an air inlet area and an air outlet area between the air inlet and the air outlet and the ends of the inner tube and the outer tube, and the air outlet area is provided with a partition for sealing the gap space formed between the multiple sleeve-type gas filter elements, so that the filtered gas is output through the open end of the annular channel of each sleeve-type gas filter element.

[0014] In combination with the second aspect, in a possible implementation, a plurality of the sleeve-type gas filter elements are connected in parallel and fixed in the cylinder by plane welding.

[0015] In combination with the second aspect, in a possible implementation, the large-flow metal filter element gas filter further includes: a first fixing plate, arranged in the air inlet area, for fixing the first end of the sleeve-type gas filter element; and / or a second fixing plate, arranged in the air outlet area and fixed on the partition, for fixing the second ends of multiple sleeve-type gas filter elements.

[0016] Compared with the prior art, the beneficial effects that can be achieved by at least one of the above technical solutions adopted in this specification include at least:

[0017] The present application adopts a double-layer structure of an inner tube and an outer tube prepared by sintering metal powder, and the outer tube is sheathed on the outside of the inner tube to form an annular channel between the outer tube and the inner tube. The two opposite ends of the inner channel formed between the annular channel and the inner tube are set as sealed structures and the other two ends are set as open ends. In this way, the gas to be filtered is filtered from the outside of the outer tube or the inside of the inner tube through the metal filter membrane on the tube wall of the outer tube and the inner tube, enters the annular channel, and is output from the open end of the annular channel, thereby achieving gas filtration. The two-way air intake function of the metal filter membrane is utilized, and the tube walls of the inner tube and the outer tube are used for simultaneous filtration, which greatly increases the filtration area. The filtered gas is output from the open end of the annular channel, that is, the gas is designed to flow into a larger channel for output, effectively reducing gas pressure loss. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0019] Figure 1 This is a schematic diagram of the gas filter structure in the prior art Figure 1 .

[0020] Figure 2This is a schematic diagram of the gas filter structure in the prior art Figure 2 .

[0021] Figure 3 It is a structural schematic diagram of the sleeve-type gas filter element provided in this application.

[0022] Figure 4 It is a schematic diagram of the gas flow direction of the sleeve-type gas filter element provided in this application.

[0023] Figure 5 This is an exploded view of the structure of the large-flow metal filter element gas filter provided by this application.

[0024] Figure 6 This is a schematic diagram of the gas flow inside the high-flow metal filter element gas filter provided by this application.

[0025] Figure 7 It is a longitudinal cross-sectional view of the high-flow metal filter element gas filter provided by the present application.

[0026] Figure 8 This is a schematic diagram of the first end of the filter element of the large-flow metal filter element gas filter provided by the present application.

[0027] Figure 9 This is a schematic diagram of the second end of the filter element of the large-flow metal filter element gas filter provided by the present application.

[0028] Figure 10 This is a calculation diagram of the total area of ​​openings for air intake upstream of the filter area of ​​the large-flow metal filter element gas filter provided by this application.

[0029] Figure 11 This is a cross-sectional area calculation diagram of the filter area of ​​the large-flow metal filter element gas filter provided in this application.

[0030] Figure 12 This is a calculation diagram of the total area of ​​openings for gas outlet downstream of the filter area of ​​the large-flow metal filter element gas filter provided by this application. DETAILED DESCRIPTION

[0031] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0032] The following describes the embodiments of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the features in the following embodiments and embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative work are within the scope of protection of this application.

[0033] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on this application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement an apparatus and / or practice a method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this apparatus and / or practice this method.

[0034] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The illustrations only show components related to the present application and are not drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component can be changed at will, and the component layout type may also be more complicated.

[0035] The following describes the technical solutions provided by various embodiments of the present application in conjunction with the accompanying drawings.

[0036] <Example 1>

[0037] like Figure 3 and Figure 4 As shown, this embodiment 1 provides a sleeve-type gas filter element for achieving gas filtration. The sleeve-type gas filter element comprises: an inner tube 1 and an outer tube 2.

[0038] The inner tube 1 and the outer tube 2 are both prepared by sintering metal powder so that metal filter membranes are formed on their surfaces to achieve a filtering effect on the gas.

[0039] The inner tube 1 has an outer diameter D1, and the outer tube 2 has an inner diameter D2, where D2>D1. The outer tube 2 is inserted into the outer portion of the inner tube 1, forming an annular channel between the outer tube 2 and the inner tube 1; and the inner tube 1 also forms an inner channel.

[0040] The two opposite ends of the annular channel and the inner channel are sealed and the other two ends are open. Figure 4 From the perspective of the center, the right end face of the annular channel is a sealed structure and the left end face is an open end; the left end face of the inner channel is a sealed structure and the right end face is an open end, thereby achieving gas drainage. In this way, after the gas to be filtered enters from the outside of the outer tube 2 or the inside of the inner tube 1, it is filtered by the walls of the outer tube 2 and the inner tube 1, enters the annular channel, and is discharged from the open end of the annular channel, thereby achieving gas filtration (the flow path of the gas, such as Figure 4 (indicated by black and white arrows).

[0041] In summary, this embodiment 1 adopts a double-layer nested structure of an inner tube 1 and an outer tube 2 prepared by sintering metal powder, and utilizes the two-way air intake function of the metal filter membrane. The tube walls of the inner tube 1 and the outer tube 2 are used for simultaneous filtration, which greatly increases the filtration area within the same volume space. The filtered gas is output from the open end of the annular channel, that is, the gas is designed to flow into a larger channel for output, thereby effectively reducing the gas pressure loss.

[0042] In one embodiment, to ensure sufficient space within the annular channel to reduce pressure loss while also facilitating the manufacture of the inner tube 1, the inner diameter of the outer tube 2 is set to 1.1 to 2.5 times the outer diameter of the inner tube 1, thereby balancing the inner tube size with the annular channel space. Furthermore, the inner tube 1 and outer tube 2 can be arranged concentrically to ensure uniform gas distribution within the annular channel.

[0043] In one embodiment, the outer tube 2 and / or the inner tube 1 are both sintered from a microporous filter metal material. The microporous filter metal material includes at least one of the following: stainless steel, pure nickel, nickel alloys, Inconel, titanium, and high-purity alumina. Furthermore, during the sintering process, the porosity is controlled to 30-40% to adjust the pressure drop during gas filtration and ensure that the sleeve-type gas filter element passes integrity testing.

[0044] That is to say, in the sintering preparation process, the porosity of the metal filter membrane obtained after molding is controlled at 30-40% to ensure the porosity of the metal filter membrane, so as to filter the particulate impurities and the like in the gas to be filtered. Here, what needs to be considered is the balance between the porosity and the filtration accuracy. If the porosity is too low, although the benefit is higher filtration accuracy, the gas pressure loss is large, which is not worth the loss. Through the particle retention test, it was found that: this embodiment can effectively remove particles with an accuracy of 0.0015um and a filtration efficiency of LRV9 by controlling the porosity at 30-40%, preferably controlling the porosity at close to 40%, with a reasonable pressure loss, a good gas filtration effect, and improved filtration accuracy.

[0045] In another embodiment, Figure 3 and Figure 4 As shown, the sleeve-type gas filter element further includes: an outer sealing cover 3 and an inner sealing cover 4.

[0046] The inner cover 4 is arranged at the opening end of the annular channel and is used to seal the corresponding end face of the inner tube 1 (i.e. Figure 4 The outer cover 3 is provided at the open end of the inner channel and is connected to the inner tube 1 and the outer tube 2 to seal the end face corresponding to the annular channel (i.e. Figure 4 The outer cover 3 and the inner cover 4 are used to seal the end faces of the annular channel and the inner channel, which has a simple structure and is easy to install.

[0047] In a specific embodiment, in order to achieve the connection and fixation of the inner tube 1 and the outer tube 2, the sleeve-type gas filter element also includes a connecting ring 11, which is arranged at the open end of the annular channel and is used to connect the inner tube 1 and the outer tube 2. It has a simple structure and is easy to install.

[0048] <Example 2>

[0049] like Figure 5 As shown, based on the structure and function of the sleeve-type gas filter element of Example 1, this Example 2 further provides a high-flow metal filter element gas filter, which uses multiple sleeve-type gas filter elements described above to filter high-flow gas. Specifically, the high-flow metal filter element gas filter includes multiple sleeve-type gas filter elements described above and a barrel 5.

[0050] Multiple sleeve-type gas filter elements are arranged in a combined structure; a cylinder 5 encloses all of the sleeve-type gas filter elements. Specifically, the cylinder 5 comprises an air inlet section, a barrel, and an air outlet section, all of which are fixedly connected to encapsulate the sleeve-type gas filter elements. An air inlet 6 and an air outlet 7 are formed at each end of the cylinder 5.

[0051] In practical applications, the air inlet section and the air outlet section have an air inlet 6 and an air outlet 7 with a diameter of 150A respectively, to ensure that the pressure loss of air flow in and out is small, and the connection method can be welding or flange connection to the cylinder body.

[0052] The structure and function of each sleeve-type gas filter element are the same as those in Example 1 and will not be described in detail here.

[0053] The air inlet 6 is connected to the outside of the inner tube 1 and the outer tube 2, thereby directing the gas into the inner channel inside the inner tube 1 or to the outside of the outer tube 2, so that the gas can be filtered through the tube walls of the inner tube 1 and the outer tube 2. The air outlet 7 is connected to the annular channel between the outer tube 2 and the inner tube 1, thereby outputting the filtered gas to the outside.

[0054] In another embodiment, Figure 6 As shown, the air inlet 6 and / or the air outlet 7 are spaced a predetermined distance from the corresponding ends of the inner tube 1 and the outer tube 2, so as to form an air inlet area 51 and an air outlet area 53 between the air inlet 6 and the air outlet 7 and the ends of the inner tube 1 and the outer tube 2. The area between the air inlet area 51 and the air outlet area 53 forms a filtering area 52. By providing the air area 51 and the air outlet area 53 to collect the gas to be filtered and the filtered gas, stable gas transportation can be ensured throughout the filtering process.

[0055] Furthermore, if Figure 6 and Figure 7 As shown, a partition 8 is provided within the gas outlet area 53 to seal the interstices between the multiple sleeve-type gas filter elements, allowing filtered gas to be discharged through the open end of the annular channel of each sleeve-type gas filter element. In other words, the partition 8 effectively seals the gaps between the outer tubes 2 of adjacent sleeve-type gas filter elements, as well as the gap between the outermost sleeve-type gas filter element and the barrel 5, ensuring that filtered gas is discharged only through the annular channel formed between the inner tube 1 and outer tube 2 of each sleeve-type gas filter element, guaranteeing that only filtered gas is discharged.

[0056] In a specific embodiment, in order to prevent the filter element tube from shaking after a large flow of gas enters the cylinder 5, as shown in FIG. Figure 5 As shown, the large-flow metal filter element gas filter further includes: a first fixing plate 9 and / or a second fixing plate 10.

[0057] The first fixing plate 9 is disposed in the air inlet area 51 for fixing the first end of the sleeve-type gas filter element. The second fixing plate 10 is disposed in the air outlet area 53 and fixed on the partition plate 8 for fixing the second ends of the plurality of sleeve-type gas filter elements.

[0058] In addition, multiple sleeve-type gas filter elements are connected in parallel and fixed in the cylinder 5 by plane welding, which ensures the stable connection of the sleeve-type gas filter elements on the one hand and maximizes the filtering area within a certain space on the other hand. Figure 8 and Figure 9As shown, all the sleeve-type gas filter elements are welded and fixed with mesh plates to ensure that the filter elements do not shake during airflow operation.

[0059] The sleeve-type gas filter element and the high-flow metal filter element gas filter based on the above-mentioned Examples 1 and 2 have been widely used in high-purity gas, specialty gas applications, and ultra-high-purity gas in semiconductor process applications. They have huge market and application potential, are widely used, and have a promising market prospect. The following actual cases are used to illustrate this:

[0060] The specifications of the selected sleeve-type gas filter element are: outer tube inner diameter Φ46mm, inner tube outer diameter Φ30mm, total length 650mm, and 19 sleeve-type gas filter elements are combined in parallel to form a filter element group.

[0061] Here, it should be noted that the manufacturing process for this large-flow metal filter element gas filter is roughly as follows: the sleeve-type gas filter element is connected in parallel to the first fixed plate and the second fixed plate by welding, and finally inserted into the cylinder body and the head assembly is welded on both ends; welding is performed according to the requirements of the pressure vessel to complete the manufacturing.

[0062] First, the annular filtration effective area is calculated based on the inner diameter of the 19 outer tubes Φ46: 1.784m2, and the filtration area is calculated based on the outer diameter of the inner tube Φ30: 1.163m2. In this way, the total filter area of ​​the sleeve-type gas filter element is (1.784m2+1.163m2), which is 1.652 times that of the one without the sleeve; that is, the filtration area is increased by 0.652 times within a certain effective space!

[0063] Secondly, calculate the casing flow rate. If the inlet pressure is 8 barg and the flow rate enters the filter at 16 m / s @ 25 degrees Celsius, since the flow rate of each casing gas filter element can reach 440 Nm3 / H, the 19-piece filter element group can reach 440*19=8360 Nm3 / H, that is, the design flow rate of the entire filter can reach 8000 Nm3 / H. The flow rate of each filter element is calculated as follows:

[0064] Q=ΠD2 / 4C×10-6×3600×V×(P+1.033) / 1.033×273.15 / (0273.15+T)

[0065] Where D represents the inner diameter (mm), V represents the flow rate (m / s), and P represents the pressure (kg / cm 2 ), T represents temperature (℃), Q represents flow rate (Nm 3 / H).

[0066] Since airflow requires as much space as possible and as little obstacles as possible, such as Figure 10 、 Figure 11 and Figure 12As shown, the opening ratios of the upstream and downstream sides of the filter element group are calculated as follows:

[0067] Upstream of the filter area of ​​the gas filter, the ratio of the total area of ​​the openings for air intake to the cross-sectional area of ​​the filter area of ​​the gas filter is 38365.9mm 2 / 75476.76mm 2 =50.83%, that is, the opening rate of the upstream of the filtration zone is 50.83%.

[0068] Downstream of the filter area of ​​the gas filter, the ratio of the total opening area for gas outlet to the cross-sectional area of ​​the filter area of ​​the gas filter element is 16056.08mm 2 / 75476.76mm 2 =21.27%, that is, the opening rate of the downstream of the filtration zone is 21.27%.

[0069] Since the opening area of ​​the downstream pipe outlet of the gas filter = 20005.79mm 2 , which is larger than the downstream opening area of ​​16056.08mm 2 , so that it does not constitute a bottleneck in the airflow outlet, and the additional pipeline pressure loss between the inlet and outlet is reduced as much as possible to ensure that there is no channel resistance.

[0070] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present application should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A sleeve-type gas filter element, characterized in that: include: An inner tube and an outer tube, wherein the outer tube is sleeved on the outside of the inner tube and forms an annular channel with the inner tube, and the inner tube and the outer tube are both prepared by sintering metal powder to form a metal filter membrane on their surfaces; The two opposite ends of the annular channel and the inner channel formed inside the inner tube are sealed structures and the other two ends are open ends, so that the gas to be filtered enters the annular channel from the outside of the outer tube or the inside of the inner tube after being filtered through the tube walls of the outer tube and the inner tube, and is output from the open end of the annular channel, thereby realizing gas filtration.

2. The sleeve-type gas filter element according to claim 1, characterized in that: The inner diameter of the outer tube is 1.1 to 2.5 times the outer diameter of the inner tube, so as to balance the size of the inner tube and the space size of the annular channel; and / or, The inner tube and the outer tube are concentrically arranged so that the gas in the annular channel is evenly distributed.

3. The sleeve-type gas filter element according to claim 2, characterized in that: The outer tube and / or the inner tube are made by sintering a microporous filter metal material, and the microporous filter metal material includes at least the following: stainless steel or pure nickel, nickel alloy, Inconel, titanium and high-purity alumina; In the sintering preparation process, the pressure loss value of gas filtration is adjusted by controlling the open porosity to 30-40%.

4. The sleeve-type gas filter element according to claim 1, characterized in that: Also includes: An inner sealing cover is provided at the open end of the annular channel and is used to seal the corresponding end surface of the inner tube; An outer sealing cover is provided at the open end of the inner channel, connected to the inner tube and the outer tube, and is used for sealing the end surface corresponding to the annular channel.

5. The sleeve-type gas filter element according to claim 4, characterized in that: Also includes: A connecting ring is provided at the open end of the annular channel and is used to connect the inner tube and the outer tube.

6. A large flow metal filter element gas filter, characterized in that: include: Multiple sleeve-type gas filter elements are arranged in a combined structure; A cylinder body, used for encapsulating the plurality of sleeve-type gas filter elements, with an air inlet and an air outlet formed at both ends respectively; Wherein, the sleeve-type gas filter element is the sleeve-type gas filter element according to claims 1 to 5, The air inlet is communicated with the outside of the inner tube and the outer tube, and the air outlet is communicated with the annular channel between the outer tube and the inner tube.

7. The large flow metal filter element gas filter according to claim 6, characterized in that: The air inlet and / or the air outlet are spaced a preset distance from the corresponding ends of the inner tube and the outer tube, so as to form an air inlet area and an air outlet area between the air inlet and the air outlet and the ends of the inner tube and the outer tube, The gas outlet area is provided with a partition plate for sealing the gap space formed between the plurality of the sleeve-type gas filter elements, so that the filtered gas is output through the open end of the annular channel of each sleeve-type gas filter element.

8. The large flow metal filter element gas filter according to claim 7, characterized in that: A plurality of the sleeve-type gas filter elements are connected in parallel and fixed in the cylinder body by plane welding.

9. The large flow metal filter element gas filter according to claim 7, characterized in that: Also includes: a first fixing plate, disposed in the air inlet area, for fixing the first end of the sleeve-type gas filter element; and / or The second fixing plate is arranged in the gas outlet area and fixed on the partition plate, and is used for fixing the second ends of the plurality of sleeve-type gas filter elements.

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