Preparation method of electrostatic chuck with high volume resistivity

Abstract

The invention discloses a preparation method of a high volume resistivity electrostatic chuck, and belongs to the technical field of electrostatic chucks, and the preparation method comprises the following steps: burdening: burdening 97-99 parts of aluminum nitride, 0.1-1.5 parts of Y2O3, 0.1-0.5 part of MgO, 0.1-0.5 part of CaO or 0.1-1 part of TiO2, adding 12-14 wt% of a binder, 0.4-0.6 wt% of a dispersant and 28-32 wt% of an ethanol solvent, and mixing; ball milling: the material-ball ratio is 1: 1.5, the time is 21-29 hours, and the rotating speed is 90-110 rpm; the air inlet temperature is set to be 135 DEG C, the air outlet temperature is set to be 85 DEG C, the rotating speed of an atomizing disc is set to be 6000 rpm, the oxygen concentration is set to be 1.0%, and the rotating speed of a feeding pump is set to be 50 rpm; dry pressing: the pressure is 5-20 MPa, and the pressure holding time is 1-5 min; glue discharging is carried out after dry pressing, the glue discharging temperature is 450-550 DEG C, the heating rate is 0.2 DEG C / min, and the heat preservation time is 5-8 h at the highest temperature; sintering: sintering after glue discharging; and performance detection is carried out after grinding and sample preparation.

Description

Technical Field

[0001] The present invention relates to the technical field of electrostatic chucks, and in particular to a method for preparing an electrostatic chuck with high volume resistivity. Background Art

[0002] Aluminum nitride has a series of excellent properties such as high thermal conductivity, low dielectric constant and dielectric loss, excellent insulation properties, and a thermal expansion coefficient similar to that of silicon. It is used in electrostatic chucks. Electrostatic chucks adsorb wafers through external voltage. The higher the volume resistivity, the weaker the adsorption force. For electrostatic chuck heaters, it is usually required to operate at a temperature of 600°C. However, as the temperature increases, the volume resistivity of aluminum nitride ceramics will decrease, the adsorption force of the electrostatic chuck will increase, the charge will be difficult to release, and the detachment time will be poor. Therefore, further improving the volume resistivity of electrostatic chucks at high temperatures has become an important issue that needs to be solved. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a method for preparing an electrostatic chuck with high volume resistivity, which can improve the volume resistivity of the electrostatic chuck at high temperature.

[0004] In order to solve the above technical problems, the technical solution of the present invention is:

[0005] A method for preparing a high volume resistivity electrostatic chuck comprises:

[0006] Ingredients: including 97-99 parts of aluminum nitride, 0.1-1.5 parts of Y2O3, 0.1-0.5 parts of MgO, 0.1-0.5 parts of CaO or 0.1-1 parts of TiO2, and then adding 12-14wt% of a binder, 0.4-0.6wt% of a dispersant, and 28-32wt% of an ethanol solvent and mixing;

[0007] Ball milling: The material-to-ball ratio during ball milling is 1:1.5, the ball milling time is 21-29 hours, and the speed during ball milling is 90-110 rpm;

[0008] Spray granulation: The ball-milled slurry was subjected to spray granulation, with the air inlet temperature set at 135°C, the air outlet temperature set at 85°C, the atomizing disk speed set at 6000 rpm, the oxygen concentration set at 1.0%, and the feed pump speed set at 50 rpm;

[0009] Dry pressing: The pressure of dry pressing is 5-20MPa, the holding time is 1-5min, and dry pressing is performed;

[0010] Debinding: Debinding is carried out after dry pressing. The debinding temperature is 450-550℃, the heating rate is 0.2℃ / min, and the holding time at the highest temperature is 5-8h;

[0011] Sintering: After debinding, sintering is carried out. The maximum sintering temperature is 1700-1900°C, the heating rate is 3°C / min, and the holding time at the maximum temperature is 3-5 hours to form a sintered body of the electrostatic chuck.

[0012] Grinding sample preparation: Use grinding equipment to grind the surface of the sintered body, and then cut it into shape;

[0013] Performance testing: Conduct high-temperature volume resistivity testing.

[0014] Preferably, the ingredients include: 97-99 parts of aluminum nitride, 0.5-1 part of Y2O3, 0.1-0.2 parts of MgO, 0.1-0.2 parts of CaO, and then 13wt% of a binder, 0.5wt% of a dispersant, and 30wt% of an ethanol solvent are added and mixed.

[0015] Preferably, the ingredients include: 97-99 parts of aluminum nitride, 0.5-1 part of Y2O3, 0.1-0.2 parts of MgO, 0.2-0.5 parts of CaO, and then 13wt% of a binder, 0.5wt% of a dispersant, and 30wt% of an ethanol solvent are added and mixed.

[0016] Preferably, the ingredients include: 97-99 parts of aluminum nitride, 0.5-1 part of Y2O3, 0.3-0.5 parts of MgO, 0.1-0.2 parts of TiO2, and then 13wt% of a binder, 0.5wt% of a dispersant, and 30wt% of an ethanol solvent are added and mixed.

[0017] Preferably, the ingredients include: 97-99 parts of aluminum nitride, 1-1.5 parts of Y2O3, 0.3-0.5 parts of MgO, 0.5-1 parts of TiO2, and then 13wt% of a binder, 0.5wt% of a dispersant, and 30wt% of an ethanol solvent are added and mixed.

[0018] The technical solution of the present application can further increase the volume resistivity of the aluminum nitride electrostatic chuck. The increase in volume resistivity can suppress leakage current, thereby significantly increasing the service life of the electrostatic chuck. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a comparison chart of the volume resistivity of Examples 2 to 8 of the present invention. DETAILED DESCRIPTION

[0020] The following is a further description of specific embodiments of the present invention in conjunction with the accompanying drawings. It should be noted that the description of these embodiments is intended to facilitate understanding of the present invention and does not constitute a limitation of the present invention. In addition, the technical features involved in the various embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

[0021] Example 1

[0022] A method for preparing a high volume resistivity electrostatic chuck comprises:

[0023] Ingredients: including 97-99 parts of aluminum nitride, 0.1-1.5 parts of Y2O3, 0.1-0.5 parts of MgO, 0.1-0.5 parts of CaO or 0.1-1 parts of TiO2, and then adding 12-14wt% of a binder, 0.4-0.6wt% of a dispersant, and 28-32wt% of an ethanol solvent and mixing;

[0024] Specifically, the materials used to prepare the high volume resistivity electrostatic chuck include: aluminum nitride, Y2O3, MgO, CaO or TiO2, as well as a binder, a dispersant, and an ethanol solvent. The above materials are mixed into a slurry and then ball milled in the next step;

[0025] Ball milling: The material-to-ball ratio during ball milling is 1:1.5, the ball milling time is 21-29 hours, and the speed during ball milling is 90-110 rpm;

[0026] Specifically, the ball milling stage can be performed for 21 hours, 29 hours, or 25 hours, and the speed during ball milling can be 90 rpm, 110 rpm, or 100 rpm to complete the ball milling.

[0027] Spray granulation: The ball-milled slurry was subjected to spray granulation, with the air inlet temperature set at 135°C, the air outlet temperature set at 85°C, the atomizing disk speed set at 6000 rpm, the oxygen concentration set at 1.0%, and the feed pump speed set at 50 rpm to complete the spray granulation;

[0028] Dry pressing: The pressure of dry pressing is 5-20MPa, the holding time is 1-5min, and dry pressing is performed;

[0029] Specifically, dry pressing is performed after spray granulation. The dry pressing pressure can be selected as 5MPa or 20MPa, or can be set to 12.5MPa. The time for maintaining the pressure after pressurization can be 1min, 5min, or 3min to complete the dry pressing molding.

[0030] Debinding: Debinding is carried out after dry pressing. The debinding temperature is 450-550℃, the heating rate is 0.2℃ / min, and the holding time at the highest temperature is 5-8h;

[0031] Specifically, after dry pressing, the green body is placed in a debinding furnace for debinding. The debinding conditions are set. The debinding temperature is set to 450°C or 550°C, or 500°C. The heating rate during debinding is set to 0.2°C / min, that is, the debinding temperature is raised to 450°C to 550°C at a rate of 0.2°C / min. The specific maximum temperature can be 450°C, 550°C, or 500°C. Within the range of 450°C to 550°C, after reaching the above maximum temperature, the temperature is maintained at the temperature for 5 to 8 hours, specifically 5 hours, 8 hours, or 6 hours or 7 hours.

[0032] Sintering: After debinding, sintering is carried out. The maximum sintering temperature is 1700-1900°C, the heating rate is 3°C / min, and the holding time at the maximum temperature is 3-5 hours to form a sintered body of the electrostatic chuck.

[0033] Specifically, the green body is sintered after debinding, and the maximum sintering temperature ranges from 1700 to 1900°C. The specific maximum sintering temperature can be 1700°C, 1900°C, or 1800°C. The heating rate is set to 3°C / min. After reaching the maximum temperature, the holding time is 3h or 5h. After reaching the maximum temperature, the holding time can also be 4h to sinter to form an electrostatic chuck sintered body.

[0034] Grinding sample preparation: Use grinding equipment to grind the surface of the sintered body, and then cut it into shape. Specifically, the surface of the sintered body is grinded by a grinder to make its surface quality meet the requirements, and then cut into the required shape after grinding;

[0035] Performance testing: Conduct high-temperature volume resistivity testing. Specifically, conduct high-temperature volume resistivity testing on the sintered body after grinding and cutting.

[0036] The technical solution of the present application can further increase the volume resistivity of the aluminum nitride electrostatic chuck. The increase in volume resistivity can suppress leakage current, thereby significantly increasing the service life of the electrostatic chuck.

[0037] In some embodiments, the ingredients for preparing a high volume resistivity electrostatic chuck include: 97-99 parts aluminum nitride, 0.5-1 part Y2O3, 0.1-0.2 parts MgO, 0.1-0.2 parts CaO, and then adding 13wt% of a binder, 0.5wt% of a dispersant, and 30wt% of an ethanol solvent for mixing.

[0038] In some embodiments, the ingredients for preparing a high volume resistivity electrostatic chuck include: 97-99 parts of aluminum nitride, 0.5-1 part of Y2O3, 0.1-0.2 parts of MgO, 0.2-0.5 parts of CaO, and then adding 13wt% of a binder, 0.5wt% of a dispersant, and 30wt% of an ethanol solvent for mixing.

[0039] In some embodiments, the ingredients for preparing a high volume resistivity electrostatic chuck include: 97-99 parts of aluminum nitride, 0.5-1 parts of Y2O3, 0.3-0.5 parts of MgO, 0.1-0.2 parts of TiO2, and then adding 13wt% of a binder, 0.5wt% of a dispersant, and 30wt% of an ethanol solvent for mixing.

[0040] In some embodiments, the ingredients for preparing a high volume resistivity electrostatic chuck include: 97-99 parts of aluminum nitride, 1-1.5 parts of Y2O3, 0.3-0.5 parts of MgO, 0.5-1 parts of TiO2, and then adding 13wt% of a binder, 0.5wt% of a dispersant, and 30wt% of an ethanol solvent for mixing.

[0041] Example 2

[0042] A method for preparing a high volume resistivity electrostatic chuck comprises:

[0043] Ingredients: including 97-99 parts of aluminum nitride, 0.1-0.5 parts of Y2O3, 0.1-0.2 parts of MgO, and then adding 13wt% of binder, 0.5wt% of dispersant, and 30wt% of ethanol solvent and mixing;

[0044] Specifically, the materials for preparing the high volume resistivity electrostatic chuck of this embodiment include: a mixture of 97 parts or 99 parts of aluminum nitride, 0.1 parts or 0.5 parts of Y2O3, 0.1 parts or 0.2 parts of MgO, and 13 wt% of a binder, 0.5 wt% of a dispersant, and 30 wt% of an ethanol solvent;

[0045] Ball milling: The material-to-ball ratio during ball milling is 1:1.5, the ball milling time is 21h or 29h, and the speed during ball milling is 90rpm or 110rpm;

[0046] Spray granulation: The ball-milled slurry was subjected to spray granulation, with the air inlet temperature set at 135°C, the air outlet temperature set at 85°C, the atomizing disk speed set at 6000 rpm, the oxygen concentration set at 1.0%, and the feed pump speed set at 50 rpm;

[0047] Dry pressing: The pressure of dry pressing is 5MPa or 20MPa, the holding time is 1min or 5min, and dry pressing is performed;

[0048] Debinding: Debinding is carried out after dry pressing. The debinding temperature is 450℃ or 550℃, the heating rate is 0.2℃ / min, and the holding time at the highest temperature is 5h or 8h;

[0049] Sintering: After debinding, sintering is performed. The maximum sintering temperature is 1700°C or 1900°C, the heating rate is 3°C / min, and the holding time at the maximum temperature is 3h or 5h to form a sintered body of the electrostatic chuck.

[0050] Grinding sample preparation: Use grinding equipment to grind the surface of the sintered body, and then cut it into shape;

[0051] Performance testing: Conduct high-temperature volume resistivity testing.

[0052] Example 3

[0053] A method for preparing a high volume resistivity electrostatic chuck comprises:

[0054] Ingredients: including 97-99 parts of aluminum nitride, 0.5-1 part of Y2O3, 0.1-0.2 parts of MgO, and then adding 13wt% of binder, 0.5wt% of dispersant, and 30wt% of ethanol solvent and mixing;

[0055] Specifically, the ingredients for preparing the high volume resistivity electrostatic chuck in this embodiment include: 97 parts or 99 parts of aluminum nitride, 0.5 parts or 1 parts of Y2O3, 0.1 parts or 0.2 parts of MgO, and then adding 13wt% of a binder, 0.5wt% of a dispersant, and 30wt% of an ethanol solvent and mixing them;

[0056] Ball milling: The material-to-ball ratio during ball milling is 1:1.5, the ball milling time is 21h or 29h, and the speed during ball milling is 90rpm or 110rpm;

[0057] Spray granulation: The ball-milled slurry was subjected to spray granulation, with the air inlet temperature set at 135°C, the air outlet temperature set at 85°C, the atomizing disk speed set at 6000 rpm, the oxygen concentration set at 1.0%, and the feed pump speed set at 50 rpm;

[0058] Dry pressing: The pressure of dry pressing is 5MPa or 20MPa, or 15MPa, and the holding time is 1min or 5min, or 3min, dry pressing molding;

[0059] Debinding: Debinding is carried out after dry pressing. The debinding temperature is 450 or 550°C, the heating rate is 0.2°C / min, and the holding time at the highest temperature is 5h or 8h;

[0060] Sintering: After debinding, sintering is performed. The maximum sintering temperature is 1700°C or 1900°C, the heating rate is 3°C / min, and the holding time at the maximum temperature is 3h or 5h to form a sintered body of the electrostatic chuck.

[0061] Grinding sample preparation: Use grinding equipment to grind the surface of the sintered body, and then cut it into shape;

[0062] Performance testing: Conduct high-temperature volume resistivity testing.

[0063] Example 4

[0064] A method for preparing a high volume resistivity electrostatic chuck comprises:

[0065] Ingredients: including 97-99 parts of aluminum nitride, 1-1.5 parts of Y2O3, 0.3-0.5 parts of MgO, and then adding 13wt% of binder, 0.5wt% of dispersant, and 30wt% of ethanol solvent and mixing;

[0066] Specifically, the ingredients for preparing the high volume resistivity electrostatic chuck in this embodiment include: 97 parts or 99 parts of aluminum nitride, 1 part or 1.5 parts of Y2O3, 0.3 parts or 0.5 parts of MgO, 13 wt% of a binder, 0.5 wt% of a dispersant, and 30 wt% of an ethanol solvent.

[0067] Ball milling: The material-to-ball ratio during ball milling is 1:1.5, the ball milling time is 21h or 29h, and the speed during ball milling is 90rpm or 110rpm;

[0068] Spray granulation: The ball-milled slurry was subjected to spray granulation, with the air inlet temperature set at 135°C, the air outlet temperature set at 85°C, the atomizing disk speed set at 6000 rpm, the oxygen concentration set at 1.0%, and the feed pump speed set at 50 rpm;

[0069] Dry pressing: The pressure of dry pressing is 5MPa or 20MPa, the holding time is 1min or 5min, and dry pressing is performed;

[0070] Debinding: Debinding is carried out after dry pressing. The debinding temperature is 450℃ or 550℃, the heating rate is 0.2℃ / min, and the holding time at the highest temperature is 5h or 8h;

[0071] Sintering: After debinding, sintering is performed. The maximum sintering temperature is 1700°C or 1900°C, the heating rate is 3°C / min, and the holding time at the maximum temperature is 3h or 5h to form a sintered body of the electrostatic chuck.

[0072] Grinding sample preparation: Use grinding equipment to grind the surface of the sintered body, and then cut it into shape;

[0073] Performance testing: Conduct high-temperature volume resistivity testing.

[0074] Example 5

[0075] A method for preparing a high volume resistivity electrostatic chuck comprises:

[0076] The ingredients include: 97-99 parts of aluminum nitride, 0.5-1 part of Y2O3, 0.1-0.2 parts of MgO, 0.1-0.2 parts of CaO, 13 wt% of a binder, 0.5 wt% of a dispersant, and 30 wt% of an ethanol solvent, and the mixture is mixed;

[0077] Specifically, the ingredients for preparing the high volume resistivity electrostatic chuck in this embodiment include: 97 parts or 99 parts of aluminum nitride, 0.5 parts or 1 parts of Y2O3, 0.1 parts or 0.2 parts of MgO, 0.1 parts or 0.2 parts of CaO, 13 wt% of a binder, 0.5 wt% of a dispersant, and 30 wt% of an ethanol solvent.

[0078] Ball milling: The material-to-ball ratio during ball milling is 1:1.5, the ball milling time is 21h or 29h, and the speed during ball milling is 90rpm or 110rpm;

[0079] Spray granulation: The ball-milled slurry was subjected to spray granulation, with the air inlet temperature set at 135°C, the air outlet temperature set at 85°C, the atomizing disk speed set at 6000 rpm, the oxygen concentration set at 1.0%, and the feed pump speed set at 50 rpm;

[0080] Dry pressing: The pressure of dry pressing is 5MPa or 20MPa, the holding time is 1min or 5min, and dry pressing is performed;

[0081] Debinding: Debinding is carried out after dry pressing. The debinding temperature is 450℃ or 550℃, the heating rate is 0.2℃ / min, and the holding time at the highest temperature is 5h or 8h;

[0082] Sintering: After debinding, sintering is performed. The maximum sintering temperature is 1700°C or 1900°C, the heating rate is 3°C / min, and the holding time at the maximum temperature is 3h or 5h to form a sintered body of the electrostatic chuck.

[0083] Grinding sample preparation: Use grinding equipment to grind the surface of the sintered body, and then cut it into shape;

[0084] Performance testing: Conduct high-temperature volume resistivity testing.

[0085] Example 6

[0086] A method for preparing a high volume resistivity electrostatic chuck comprises:

[0087] The ingredients include: 97-99 parts of aluminum nitride, 0.5-1 part of Y2O3, 0.1-0.2 parts of MgO, 0.2-0.5 parts of CaO, 13 wt% of a binder, 0.5 wt% of a dispersant, and 30 wt% of an ethanol solvent, and the mixture is mixed;

[0088] Specifically, the ingredients for preparing the high volume resistivity electrostatic chuck in this embodiment include: 97 parts or 99 parts of aluminum nitride, 0.5 parts or 1 parts of Y2O3, 0.1 parts or 0.2 parts of MgO, 0.2 parts or 0.5 parts of CaO, 13 wt% of a binder, 0.5 wt% of a dispersant, and 30 wt% of an ethanol solvent.

[0089] Ball milling: The material-to-ball ratio during ball milling is 1:1.5, the ball milling time is 21h or 29h, and the speed during ball milling is 90rpm or 110rpm;

[0090] Spray granulation: The ball-milled slurry was subjected to spray granulation, with the air inlet temperature set at 135°C, the air outlet temperature set at 85°C, the atomizing disk speed set at 6000 rpm, the oxygen concentration set at 1.0%, and the feed pump speed set at 50 rpm;

[0091] Dry pressing: The pressure of dry pressing is 5MPa or 20MPa, the holding time is 1min or 5min, and dry pressing is performed;

[0092] Debinding: Debinding is carried out after dry pressing. The debinding temperature is 450℃ or 550℃, the heating rate is 0.2℃ / min, and the holding time at the highest temperature is 5h or 8h;

[0093] Sintering: After debinding, sintering is performed. The maximum sintering temperature is 1700°C or 1900°C, the heating rate is 3°C / min, and the holding time at the maximum temperature is 3h or 5h to form a sintered body of the electrostatic chuck.

[0094] Grinding sample preparation: Use grinding equipment to grind the surface of the sintered body, and then cut it into shape;

[0095] Performance testing: Conduct high-temperature volume resistivity testing.

[0096] Example 7

[0097] A method for preparing a high volume resistivity electrostatic chuck comprises:

[0098] The ingredients include: 97-99 parts of aluminum nitride, 0.5-1 part of Y2O3, 0.3-0.5 parts of MgO, 0.1-0.2 parts of TiO2, 13 wt% of a binder, 0.5 wt% of a dispersant, and 30 wt% of an ethanol solvent are added and mixed;

[0099] Specifically, the ingredients for preparing the high volume resistivity electrostatic chuck in this embodiment include: 97 parts or 99 parts of aluminum nitride, 0.5 parts or 1 parts of Y2O3, 0.3 parts or 0.5 parts of MgO, 0.1 parts or 0.2 parts of TiO2, 13 wt% of a binder, 0.5 wt% of a dispersant, and 30 wt% of an ethanol solvent.

[0100] Ball milling: The material-to-ball ratio during ball milling is 1:1.5, the ball milling time is 21h or 29h, and the speed during ball milling is 90rpm or 110rpm;

[0101] Spray granulation: The ball-milled slurry was subjected to spray granulation, with the air inlet temperature set at 135°C, the air outlet temperature set at 85°C, the atomizing disk speed set at 6000 rpm, the oxygen concentration set at 1.0%, and the feed pump speed set at 50 rpm;

[0102] Dry pressing: The pressure of dry pressing is 5MPa or 20MPa, the holding time is 1min or 5min, and dry pressing is performed;

[0103] Debinding: Debinding is carried out after dry pressing. The debinding temperature is 450℃ or 550℃, the heating rate is 0.2℃ / min, and the holding time at the highest temperature is 5h or 8h;

[0104] Sintering: After debinding, sintering is performed. The maximum sintering temperature is 1700°C or 1900°C, the heating rate is 3°C / min, and the holding time at the maximum temperature is 3h or 5h to form a sintered body of the electrostatic chuck.

[0105] Grinding sample preparation: Use grinding equipment to grind the surface of the sintered body, and then cut it into shape;

[0106] Performance testing: Conduct high-temperature volume resistivity testing.

[0107] Example 8

[0108] A method for preparing a high volume resistivity electrostatic chuck comprises:

[0109] The ingredients include: 97-99 parts of aluminum nitride, 1-1.5 parts of Y2O3, 0.3-0.5 parts of MgO, 0.5-1 parts of TiO2, 13 wt% of a binder, 0.5 wt% of a dispersant, and 30 wt% of an ethanol solvent are added and mixed;

[0110] Specifically, the ingredients for preparing the high volume resistivity electrostatic chuck in this embodiment include: 97 or 99 parts of aluminum nitride, 1 or 1.5 parts of Y2O3, 0.3 or 0.5 parts of MgO, 0.5 or 1 part of TiO2, 13 wt% of a binder, 0.5 wt% of a dispersant, and 30 wt% of an ethanol solvent.

[0111] Ball milling: The material-to-ball ratio during ball milling is 1:1.5, the ball milling time is 21h or 29h, and the speed during ball milling is 90rpm or 110rpm;

[0112] Spray granulation: The ball-milled slurry was subjected to spray granulation, with the air inlet temperature set at 135°C, the air outlet temperature set at 85°C, the atomizing disk speed set at 6000 rpm, the oxygen concentration set at 1.0%, and the feed pump speed set at 50 rpm;

[0113] Dry pressing: The pressure of dry pressing is 5MPa or 20MPa, the holding time is 1min or 5min, and dry pressing is performed;

[0114] Debinding: Debinding is carried out after dry pressing. The debinding temperature is 450℃ or 550℃, the heating rate is 0.2℃ / min, and the holding time at the highest temperature is 5h or 8h;

[0115] Sintering: After debinding, sintering is performed. The maximum sintering temperature is 1700°C or 1900°C, the heating rate is 3°C / min, and the holding time at the maximum temperature is 3h or 5h to form a sintered body of the electrostatic chuck.

[0116] Grinding sample preparation: Use grinding equipment to grind the surface of the sintered body, and then cut it into shape;

[0117] Performance testing: Conduct high-temperature volume resistivity testing.

[0118] refer to Figure 1 The electrostatic chucks prepared in the above embodiments 2 to 8 were subjected to high-temperature volume resistivity testing. According to the test results of the above embodiments 2 to 8, the ceramic substrates obtained in embodiment 5 (0.5 to 1 parts of Y2O3, 0.1 to 0.2 parts of MgO, and 0.1 to 0.2 parts of CaO) and embodiment 7 (0.5 to 1 parts of Y2O3, 0.3 to 0.5 parts of MgO, and 0.1 to 0.2 parts of TiO2) had the highest volume resistivity performance. The above two schemes can be selected when preparing an electrostatic chuck with high volume resistivity.

[0119] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. It is apparent to those skilled in the art that various changes, modifications, substitutions, and variations to these embodiments may be made without departing from the principles and spirit of the present invention, and the changes still fall within the scope of protection of the present invention.

Claims

1. A method for preparing a high volume resistivity electrostatic chuck, characterized in that: include: Ingredients: including 97-99 parts of aluminum nitride, 0.1-1.5 parts of Y2O3, 0.1-0.5 parts of MgO, 0.1-0.5 parts of CaO or 0.1-1 parts of TiO2, and then adding 12-14wt% of a binder, 0.4-0.6wt% of a dispersant, and 28-32wt% of an ethanol solvent and mixing; Ball milling: The material-to-ball ratio during ball milling is 1:1.5, the ball milling time is 21-29 hours, and the speed during ball milling is 90-110 rpm; Spray granulation: The ball-milled slurry was subjected to spray granulation, with the air inlet temperature set at 135°C, the air outlet temperature set at 85°C, the atomizing disk speed set at 6000 rpm, the oxygen concentration set at 1.0%, and the feed pump speed set at 50 rpm; Dry pressing: The pressure of dry pressing is 5-20MPa, the holding time is 1-5min, and dry pressing is performed; Debinding: Debinding is carried out after dry pressing. The debinding temperature is 450-550℃, the heating rate is 0.2℃ / min, and the holding time at the highest temperature is 5-8h; Sintering: After debinding, sintering is carried out. The maximum sintering temperature is 1700-1900°C, the heating rate is 3°C / min, and the holding time at the maximum temperature is 3-5 hours to form a sintered body of the electrostatic chuck. Grinding sample preparation: Use grinding equipment to grind the surface of the sintered body, and then cut it into shape; Performance testing: Conduct high-temperature volume resistivity testing.

2. The method for preparing a high volume resistivity electrostatic chuck according to claim 1, characterized in that: The ingredients include: 97-99 parts of aluminum nitride, 0.5-1 part of Y2O3, 0.1-0.2 parts of MgO, 0.1-0.2 parts of CaO, 13wt% of a binder, 0.5wt% of a dispersant, and 30wt% of an ethanol solvent, and the mixture is mixed.

3. The method for preparing a high volume resistivity electrostatic chuck according to claim 1, wherein: The ingredients include: 97-99 parts of aluminum nitride, 0.5-1 part of Y2O3, 0.1-0.2 parts of MgO, 0.2-0.5 parts of CaO, 13 wt% of a binder, 0.5 wt% of a dispersant, and 30 wt% of an ethanol solvent, and the mixture is mixed.

4. The method for preparing a high volume resistivity electrostatic chuck according to claim 1, wherein: The ingredients include: 97-99 parts of aluminum nitride, 0.5-1 part of Y2O3, 0.3-0.5 parts of MgO, 0.1-0.2 parts of TiO2, and then 13wt% of a binder, 0.5wt% of a dispersant, and 30wt% of an ethanol solvent are added and mixed.

5. The method for preparing a high volume resistivity electrostatic chuck according to claim 1, wherein: The ingredients include: 97-99 parts of aluminum nitride, 1-1.5 parts of Y2O3, 0.3-0.5 parts of MgO, 0.5-1 parts of TiO2, and then 13wt% of a binder, 0.5wt% of a dispersant, and 30wt% of an ethanol solvent are added and mixed.

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