Self-powered multi-dimensional force composite sensor, assembling method and application thereof

Abstract

The application discloses a self-powered multi-dimensional force composite sensor and an assembling method and application thereof, relates to the technical field of force sensors, and comprises a force sensor base, a force perception transmission layer and a cross torque transmission frame arranged in sequence from bottom to top, wherein the force sensor base is internally provided with piezoelectric sensors and a plurality of triboelectric sensors, the bottom of the force perception transmission layer is provided with a comb tooth contact array at a position corresponding to the triboelectric sensors, and the top of the cross torque transmission frame is provided with a direction perception column. The self-powered multi-dimensional force composite sensor has self-powered sensing functions based on triboelectric nanogenerators and piezoelectric nanogenerators, has the advantages of good dynamic response, the ability to perceive tiny force, a wide response frequency band and the like.

Description

TECHNICAL FIELD

[0001] The application relates to a self-powered multi-dimensional force composite sensor and an assembling method and application thereof, and belongs to the technical field of force sensors. BACKGROUND

[0002] Intelligent robots, as a product of the deep integration of new-generation information technology and manufacturing industry, are reshaping the global industrial landscape. With the continuous progress of 3D visual perception / cognition, force sensor technology and the deep integration with new-generation information technologies such as industrial internet, cloud computing and big data, the intelligence level of the next generation of robots will be further improved, and the perception ability to the outside world will be further enhanced, which can complete dynamic and complex missions, realize multi-robot cooperation, and work with humans.

[0003] Sensors are the core components of robots to perceive the external environment, which are equivalent to the "five senses" of humans. Through the collaborative work of multi-modal perception systems such as visual sensors, force sensors and tactile sensors, robots can obtain environmental information to provide data support for decision control.

[0004] Robot perception and control technology is the core element to promote the intelligent operation of robots. In order to complete complex tasks, robots must have the ability to perceive and recognize the surrounding environment and work objects, which requires effective fusion of information from different dimensions (from simple two-dimensional data to complex three-dimensional or even higher-dimensional data), so as to realize efficient and accurate environmental perception and target recognition. Based on the acquisition of environmental information, robots also need to combine intelligent planning, decision-making algorithms and adaptive control technologies to dynamically adjust their behavior and make precise actions and responses. This series of processes collectively form the basis of intelligent operation of robots, enabling them to complete complex tasks in a changing environment.

[0005] Current robot intelligent perception systems usually focus on visual perception, using visual sensors to obtain real spatial information of the surrounding environment in complex three-dimensional scenes, and performing preprocessing, registration fusion, model reconstruction and other processes to provide two-dimensional and three-dimensional information in the working environment of robots, greatly improving the autonomous decision-making and planning capabilities of robots. However, in special operating situations such as rescue, explosive ordnance disposal and defect detection, a large number of human intervention operations are still required, which puts high requirements on the on-site perception of operators. Visual perception can only feed back sensory information to the operator in the form of vision, but lacks more intuitive display of environmental conditions.

[0006] The development of flexible sensing technology enables robots to perceive information more closely to real-world conditions. In terms of flexible sensing, there are four main sensing forms: piezoresistive, capacitive, triboelectric, and piezoelectric. Among them, resistive sensors are favored due to their simple structure and low cost. They can quickly respond to force changes and are suitable for dynamic measurement, but in high-precision measurement, complex circuits may be needed to improve sensitivity, and they are easily affected by environmental factors such as humidity and temperature. Capacitive sensors stand out with their high sensitivity and non-contact measurement capabilities, maintaining good linearity over a wide range, making them suitable for high-precision measurement. However, their structure is relatively complex, and they are more expensive and susceptible to electromagnetic interference. Piezoelectric sensors can directly convert mechanical energy into electrical energy without the need for external power sources, offering high sensitivity and fast dynamic response. However, their output signals may exhibit nonlinearity and are sensitive to temperature changes. Triboelectric sensors generate electricity through the triboelectric effect, offering high sensitivity and fast dynamic response, with a wide range of material options. However, their output stability may be affected by the surface state of the material and environmental humidity.

[0007] These issues limit the practicality of single sensors in multiple environments, and the aforementioned sensors require continuous power supply to maintain their operation. Triboelectric and piezoelectric sensors have self-powered characteristics, allowing them to directly convert mechanical energy into electrical signals, making them more suitable for use in environments with strong uncertainty and no continuous power supply.

[0008] In terms of force sensing, the corresponding parameters change through the action of force to achieve the collection and processing of force signals. However, single force signal output makes it difficult to achieve direct reaction to the environment in which the robot is located, resulting in a significant decrease in the robot's self-adaptation ability to the environment. With the development of today's sensors towards integration, miniaturization, and intelligence, integrating different force information sensors into one will be the main research direction of future force sensors.

[0009] In summary, the current force sensors designed have relatively single functions, low device integration, and narrow application range. For example, in earthquake rescue, robots need to accurately perceive the small changes of obstacles while adapting to complex mechanical environments (such as rubble). However, traditional force sensors are weak in distinguishing force and multi-dimensional force perception, making them unable to adapt to complex and dynamically changing post-disaster environments. Another example is in the industrial field, where collaborative robots need to accurately perceive force to ensure safety, avoid collisions, and achieve high-precision assembly and complex operations. However, current force sensors cannot meet the high-precision requirements of the industry and cannot simultaneously achieve multi-dimensional force integration. SUMMARY

[0010] The self-powered multi-dimensional force composite sensor has the advantages of good dynamic response, ability of sensing tiny force, wide response frequency band, etc.

[0011] To achieve the above object, the present application is implemented by the following technical scheme:

[0012] In the first aspect, the present application provides a self-powered multi-dimensional force composite sensor, which comprises, from bottom to top, a force sensor base, a force sensing and transferring layer and a cross torque transferring frame.

[0013] Further, the force sensor base is provided with a plurality of grooves, and the piezoelectric sensor and the triboelectric sensor are embedded in the grooves.

[0014] Further, the number of the grooves is five, which includes one square groove and four fan-shaped grooves, the square groove is arranged at the middle of the force sensor base and is used for embedding the piezoelectric sensor, and the fan-shaped grooves are arranged around the square groove and are used for embedding the triboelectric sensor.

[0015] Further, the triboelectric sensor comprises two pieces of nickel cloth which are adhered to each other, the upper nickel cloth is provided with a polyvinyl chloride butyral film, the polyvinyl chloride butyral film is in frictional contact with the comb tooth contact array (5) to generate electric charges, the nickel cloth is used as an electrode layer to collect the electric charges, and a wire is arranged between the two pieces of nickel cloth.

[0016] The piezoelectric sensor comprises a piezoelectric device, and the positive and negative electrodes of the piezoelectric device are respectively connected with wires.

[0017] Further, the wires of the triboelectric sensor and the piezoelectric sensor all pass through the force sensor base and are connected with an external sensor electric charge amplification module.

[0018] Further, the end face of the direction sensing column away from the cross torque transferring frame is spherical.

[0019] Further, the force sensor base, the comb tooth contact array, the force sensing and transferring layer, the cross torque transferring frame and the direction sensing column all adopt a silicone rubber elastomer.

[0020] In the second aspect, the present application further provides an assembling method of the self-powered multi-dimensional force composite sensor.

[0021] The force sensor base, the comb tooth contact array, the force sensing transmission layer, the cross torque transmission frame and the direction sensing column are obtained by 3D printing using a silicone elastomer solution, wherein the cross torque transmission frame and the direction sensing column are an integral structure.

[0022] The comb tooth contact array is bonded to the bottom of the force sensing transmission layer.

[0023] Two pieces of nickel cloth are bonded, a wire is inserted between the two pieces of nickel cloth, and a polyvinyl chloride butyronitrile film is bonded to the surface of the upper layer of nickel cloth to obtain a triboelectric sensor.

[0024] The triboelectric sensor and the piezoelectric sensor are embedded in the force sensor base, so that the position of the triboelectric sensor corresponds to the comb tooth contact array.

[0025] The wires of the triboelectric sensor and the piezoelectric sensor are connected to an external sensor charge amplification module through the force sensor base.

[0026] The force sensor base is bonded to the lower surface edge of the force sensing transmission layer, and the cross torque transmission frame is bonded to the upper surface of the force sensing transmission layer to obtain a self-powered multi-dimensional force composite sensor.

[0027] Further, the silicone elastomer is a platinum gold cured silicone.

[0028] In a third aspect, the application also provides an application of the self-powered multi-dimensional force composite sensor, wherein the self-powered multi-dimensional force composite sensor is bonded to the bottom of a robot foot end, and the direction and size of the force applied to the robot foot end by the external environment are monitored through the self-powered multi-dimensional force composite sensor.

[0029] Compared with the prior art, the application has the following beneficial effects:

[0030] The self-powered multi-dimensional force composite sensor provided by the application has a simple and compact structure, the constituent materials are flexible and stretchable, the triboelectric effect and the piezoelectric effect are combined, the sensing signals are mutually compensated, the multi-dimensional force information fusion function is realized in a single device, the detection sensitivity and precision are improved, and the synchronous sensing function of dynamic and static information is achieved.

[0031] The application realizes the sensing function based on the triboelectric nanogenerator by bonding the elastomer contact structure around the piezoelectric sensor, realizes the multi-element sensing function by combining the sensing based on the triboelectric nanogenerator and the piezoelectric sensing, and decouples the piezoelectric signal and the triboelectric signal to read the information of the applied multi-dimensional normal force and tangential force.

[0032] The columnar spherical contact structure of the direction sensing column can be slightly deformed when stressed, can quickly reflect the size of the stress, greatly improves the sensitivity of the sensor, and is more sensitive to the force in a specific direction, while having a certain inhibitory effect on the interference force in other directions, ensuring the correctness of the judgment of the force directionality;

[0033] The comb tooth contact array structure can more obviously conduct the force compared to other structures when the sensor is stressed, and the contact of the contact and the triboelectric nanogenerator is more, thereby realizing the amplification of the friction force.

[0034] The cross torque transmission frame structure helps to realize high-precision measurement of complex torque field environment through multi-directional torque sensing and anti-torque coupling. BRIEF DESCRIPTION OF DRAWINGS

[0035] Figure 1 It is an explosion structure schematic diagram of a self-powered multi-dimensional force composite sensor in an embodiment of the present application;

[0036] Figure 2 It is a nickel cloth structure schematic diagram of a triboelectric sensor of a self-powered multi-dimensional force composite sensor in an embodiment of the present application;

[0037] Figure 3 It is a structure schematic diagram of a force sensor base of a self-powered multi-dimensional force composite sensor in an embodiment of the present application;

[0038] Figure 4 It is a structure schematic diagram of a comb tooth contact array of a self-powered multi-dimensional force composite sensor in an embodiment of the present application;

[0039] Figure 5 It is a force transmission schematic diagram of a self-powered multi-dimensional force composite sensor being applied with a normal force in an embodiment of the present application;

[0040] Figure 6 It is a charge movement schematic diagram of a self-powered multi-dimensional force composite sensor being applied with a normal force in an embodiment of the present application;

[0041] Figure 7 It is a force transmission schematic diagram of a self-powered multi-dimensional force composite sensor being applied with a tangential force in an embodiment of the present application;

[0042] In the figure: 1-force sensor base, 2-piezoelectric sensor, 3-triboelectric sensor, 4-force sensing transmission layer, 5-comb tooth contact array, 6-cross torque transmission frame, 7-direction sensing column. DETAILED DESCRIPTION

[0043] The present application will be further described below in conjunction with the drawings. The following embodiments are only used to more clearly illustrate the technical solutions of the present application, and cannot be used to limit the protection scope of the present application.

[0044] Embodiment 1

[0045] As Figure 1 shown, the embodiment of the present application provides a self-powered multi-dimensional force composite sensor, which comprises a force sensor base 1 and a force perception transmission layer 4, in combination Figure 3 , the force sensor base 1 is provided with a plurality of grooves, in this embodiment, there are five grooves in total, which are divided into a square groove and four fan-shaped grooves, the square groove is arranged in the middle of the force sensor base 1, and the fan-shaped grooves are arranged around the square groove. The piezoelectric sensor 2 is placed in the square groove, and the triboelectric sensor 3 is placed in the fan-shaped groove.

[0046] The upper part of the force perception transmission layer 4 is provided with a cross torque transmission frame 6, and the center of the side of the cross torque transmission frame 6 away from the force perception transmission layer 4 is provided with a direction sensing column 7. The bottom of the force perception transmission layer 4 is provided with a comb tooth contact array 5, it should be noted that, in combination Figure 4 , the position of the comb tooth contact array 5 corresponds to the triboelectric sensor 3.

[0047] In some embodiments, the force sensor base 1, the comb tooth contact array 5, the force perception transmission layer 4, the cross torque frame 6 and the direction sensing column 7 are all made of silicone elastomer.

[0048] As Figure 2 shown, the triboelectric sensor 3 utilizes the charge transfer generated by the contact of two different materials, which is composed of two pieces of nickel cloth and a copper wire. The two pieces of nickel cloth are adhered to each other, and a copper wire with a diameter of 0.2 mm is placed in the middle. The surface of the upper nickel cloth is provided with a polyvinyl chloride butyral film, which is in contact with the comb tooth contact array 5 to generate charges and transfer the charges to the nickel cloth. The two pieces of nickel cloth act as electrode layers to collect the charges.

[0049] The working principle of this embodiment is that the direction sensing column 7 is in contact with the external environment, in combination Figure 5 and Figure 6 , when a normal force is applied on the direction sensing column 7, the direction sensing column 7 senses the force of the external environment and transmits the force to the comb tooth contact array 5 through the cross torque transmission frame 6. The comb tooth contact array 5 (made of silicone, which is electronegative) and the polyvinyl chloride butyral film are in frictional contact with each other to generate charges. The nickel cloth acts as an electrode layer to collect the generated charges and outputs a triboelectric signal through the copper wire. At the same time, the piezoelectric sensor 2 also outputs a piezoelectric signal under pressure.

[0050] In combination Figure 7When a tangential force is applied on the direction sensing column 7, at this time, the direction sensing column 7 is subjected to the tangential force and transmits the force to the comb tooth contact array 5 through the cross torque transmission frame 6, the comb tooth contact array 5 is caused to have different contact areas with the two opposite frictional electric sensors 3 due to the tangential force direction, therefore, the frictional electric signals output by the four frictional electric sensors 3 are different in size, at the same time, the piezoelectric sensor 2 is subjected to pressure and also outputs a piezoelectric signal, but the piezoelectric signal when the tangential force is applied is smaller than that when the normal force is applied.

[0051] The force sensor base 1 is provided with a through hole, the wires of the frictional electric sensor 3 and the piezoelectric sensor 2 pass through the through hole on the force sensor base 1 and are connected with an external sensor charge amplification module, so that the frictional electric signals output by the four frictional electric sensors 3 and the piezoelectric signals output by the piezoelectric sensor 2 are amplified through the external sensor charge amplification module, and finally the direction and size of the applied force are obtained through decoupling, the decoupling method is force synthesis, which is a prior art and will not be described in detail here.

[0052] Embodiment 2

[0053] The embodiment also provides an assembling method of the self-powered multi-dimensional force composite sensor of embodiment 1, which comprises the following steps:

[0054] Firstly, in the embodiment, three different types of platinum cured silicone gels are used as the silicone elastomer solution, the three types of platinum cured silicone gels are Ecoflex 00-50, Dragon Skin 30 and Ecoflex GEL2, specifically, the Ecoflex 00-50 is used to prepare the force sensing transmission layer, the Dragon Skin 30 is used to prepare the force sensor base 1, the comb tooth contact array 5, the cross torque transmission frame 6 and the direction sensing column 7, and the Ecoflex GEL2 is used as the connecting layer for connecting the two parts prepared above.

[0055] After the platinum cured silicone gels of respective types are mixed, the pre-mixed silicone elastomer solution is quickly stirred with a glass rod for 10-20 seconds, the silicone elastomer solution is then left to stand for about 5-10 min to remove air in the silicone elastomer solution, and then the silicone elastomer solution is poured into a 3D printing mold for static curing, after the curing is completed, the cured part is taken out, and the force sensor base 1, the comb tooth contact array 5, the force sensing transmission layer 4, the cross torque transmission frame 6 and the direction sensing column 7 are obtained, wherein the cross torque transmission frame 6 and the direction sensing column 7 are an integrated structure.

[0056] The comb tooth contact array 5 is adhered to the bottom of the force sensing transmission layer 4.

[0057] Two pieces of nickel cloth are adhered, a metal wire is inserted between the two pieces of nickel cloth, and a polyvinyl chloride butyral film is adhered to the surface of the upper layer of nickel cloth, and the frictional electric sensor 3 is obtained.

[0058] The triboelectric sensor 3 and the piezoelectric sensor 2 are embedded in the corresponding positions in the force sensor base 1, so that the position of the triboelectric sensor 3 corresponds to the array of comb tooth contacts 5.

[0059] The lead wires of the triboelectric sensor 3 and the piezoelectric sensor 2 are connected with the external sensor charge amplification module through the force sensor base 1.

[0060] Finally, the force sensor base 1 is bonded with the lower surface edge of the force sensing transfer layer 4, and the cross torque transfer frame 6 is bonded with the upper surface of the force sensing transfer layer 4, and the whole is left to stand for 3-5h to obtain the self-powered multi-dimensional force composite sensor.

[0061] Example 3

[0062] The embodiment provides an application of the self-powered multi-dimensional force composite sensor of example 1, and the self-powered multi-dimensional force composite sensor is bonded to the bottom of the robot foot end, specifically, the lower surface of the force sensor base 1 is bonded to the bottom of the robot foot end.

[0063] When the external environment applies force to the direction sensing column of the self-powered multi-dimensional force composite sensor, the self-powered multi-dimensional force composite sensor generates a triboelectric signal and a piezoelectric signal and transmits them to the outside, and the direction and size of the applied force are obtained after decoupling after amplification by the external sensor charge amplification module.

[0064] The above only describes the preferred embodiments of the present application, and it should be noted that for ordinary skilled in the art, without departing from the technical principles of the present application, several improvements and modifications can be made, and these improvements and modifications should be considered as the protection scope of the present application.

Claims

1. A method for assembling a self-powered multidimensional force composite sensor, characterized in that, The self-powered multidimensional force composite sensor includes a force sensor base (1), a force sensing and transmission layer (4), and a cross torque transmission frame (6) arranged sequentially from bottom to top. The force sensor base (1) contains a piezoelectric sensor (2) and multiple triboelectric sensors (3). The bottom of the force sensing and transmission layer (4) is provided with a comb tooth contact array (5) corresponding to the triboelectric sensor (3). The top of the cross torque transmission frame (6) is provided with a direction sensing column (7). The assembly method includes: Force sensor base (1), comb contact array (5), force sensing and transmission layer (4), cross torque transmission frame (6) and direction sensing column (7) are obtained by 3D printing using silicone rubber elastomer solution. Among them, the cross torque transmission frame (6) and direction sensing column (7) are an integrated structure. The comb tooth contact array (5) is bonded to the bottom of the force sensing transmission layer (4); Two pieces of nickel cloth are bonded together, and a wire is inserted between them. A polyvinyl chloride butadiene nitrile film is bonded to the surface of the upper nickel cloth to obtain a triboelectric sensor (3). The triboelectric sensor (3) and the piezoelectric sensor (2) are embedded in the force sensor base (1) so that the position of the triboelectric sensor (3) corresponds to the comb tooth contact array (5); The wires of the triboelectric sensor (3) and the piezoelectric sensor (2) are passed through the force sensor base (1) and connected to the external sensor charge amplification module; The force sensor base (1) is bonded to the lower surface edge of the force sensing and transmission layer (4), and the cross torque transmission frame (6) is bonded to the upper surface of the force sensing and transmission layer (4) to obtain a self-powered multidimensional force composite sensor.

2. The assembly method of the self-powered multidimensional force composite sensor according to claim 1, characterized in that, The force sensor base (1) has multiple grooves, and the piezoelectric sensor (2) and triboelectric sensor (3) are embedded in the grooves.

3. The assembly method of the self-powered multidimensional force composite sensor according to claim 2, characterized in that, The number of grooves is five, which are divided into one square groove and four fan-shaped grooves. The square groove is located in the middle of the force sensor base (1) and is used to embed the piezoelectric sensor (2). The fan-shaped grooves surround the square groove and are used to embed the triboelectric sensor (3).

4. The assembly method of the self-powered multidimensional force composite sensor according to claim 1, characterized in that, The triboelectric sensor (3) includes two pieces of nickel cloth bonded together. A polyvinyl chloride butadiene nitrile film is provided on the surface of the upper nickel cloth. The polyvinyl chloride butadiene nitrile film generates charge through frictional contact with the comb tooth contact array (5). The nickel cloth is used as an electrode layer to collect the charge. A wire is provided between the two pieces of nickel cloth. The piezoelectric sensor (2) includes a piezoelectric device, and the positive and negative poles of the piezoelectric device are respectively connected to wires.

5. The assembly method of the self-powered multidimensional force composite sensor according to claim 4, characterized in that, The wires of the triboelectric sensor (3) and the piezoelectric sensor (2) both pass through the force sensor base (1) and are connected to the external sensor charge amplification module.

6. The assembly method of the self-powered multidimensional force composite sensor according to claim 1, characterized in that, The end face of the direction sensing column (7) away from the cross torque transmission frame (6) is spherical.

7. The assembly method of the self-powered multidimensional force composite sensor according to claim 1, characterized in that, The force sensor base (1), comb contact array (5), force sensing and transmission layer (4), cross torque transmission frame (6) and direction sensing column (7) are all made of silicone rubber elastomer.

8. The assembly method of the self-powered multidimensional force composite sensor according to claim 1, characterized in that, The silicone rubber elastomer solution is platinum-cured silicone.

9. An application of a self-powered multidimensional force composite sensor obtained by the assembly method of the self-powered multidimensional force composite sensor as described in any one of claims 1 to 8, characterized in that, The self-powered multidimensional force composite sensor is attached to the bottom of the robot's foot. The direction and magnitude of the force applied to the robot's foot by the external environment are monitored by the self-powered multidimensional force composite sensor.

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