Sheet base material ultrasonic scanning gantry carrying mechanism

Abstract

The invention relates to the technical field of transportation equipment, in particular to a flaky base material ultrasonic scanning gantry carrying mechanism which comprises a portal frame, a clamping jaw used for clamping a base material is arranged on the portal frame, the clamping jaw comprises a jaw frame, and a suction cup used for sucking the upper surface of the base material is vertically arranged on the jaw frame. A side claw used for clamping the side edge of a base material is horizontally connected to the claw frame in a sliding mode, a vertically-arranged micro-motion crawler belt is arranged on the side, facing the base material, of the side claw, a plurality of grooves used for clamping the side edge of the base material are formed in the outer wall of the micro-motion crawler belt, and the grooves are horizontally and evenly formed in the outer wall of the micro-motion crawler belt. According to the scheme, through the arrangement of the micro-motion crawler belt, the side claws and the suction cups are combined, the accuracy and stability of the sheet-shaped base materials in the transportation process can be guaranteed, and the base materials can be protected and prevented from being damaged.

Description

Technical Field

[0001] The present application relates to the technical field of transportation equipment, and in particular to a sheet substrate ultrasonic scanning gantry transport mechanism. Background Art

[0002] The Scanning Ultrasonic Trace (SAT) test uses pure water as a medium to transmit ultrasonic signals, and detects the differences in reflection rate and energy between high-frequency ultrasonic waves and materials of different densities.

[0003] Ultrasonic scanning microscopes have a wide range of applications and can perform scanning and analysis on a variety of materials, such as chips, profiles, plates, etc. Currently, for sample handling, a robot is usually used to clamp and transport the sample.

[0004] Currently, there are two common types of handling manipulators: the claw-type and the suction cup-type. Gripper-type manipulators grip and transfer samples by their sides and are generally suitable for thicker samples. The lateral movement distance of the lateral jaws of a gripper-type manipulator is typically fixed. After gripping a sample, regardless of its initial position, the sample and manipulator maintain a coaxial, aligned position. However, gripper-type manipulators have limited stability when gripping thinner samples due to their smaller contact area.

[0005] The suction cup manipulator uses a suction cup to absorb and clamp the surface of the sample, and is usually suitable for samples with a large surface area and thin thickness. The suction cup can increase the contact area with the sample and increase the gripping force, thereby ensuring stability during transportation. However, when the suction cup manipulator grabs the sample, the initial position of the sample requires high precision. If the initial position of the sample is not directly opposite the suction cup manipulator, the suction cup can still absorb the sample due to the large surface area of ​​the sample. That is, when the sample has a certain position offset in the initial position, the suction cup manipulator can still grab the sample, but at this time the sample is not directly opposite the suction cup manipulator. When the suction cup manipulator lowers the sample to another workstation, different samples will be in different positions, which is inconvenient for the next workstation process.

[0006] If a gripper-type robot and a suction cup-type robot are combined to transport sheet samples, there must be a sequence between the two actions. If the suction cup absorbs the sample first, the sample is already fixed, and the gripper can easily damage the sample side when gripping and adjusting the sample position. If the gripper first grips and adjusts the sample side, and then the suction cup is used to absorb the sample, the center of the substrate will arch upward when the gripper clamps the substrate around the substrate due to the suction force of the suction cup, causing the substrate to deform and affect the substrate quality. Alternatively, the substrate can move upward as a whole, and the side of the substrate will constantly rub against the side grippers, which can easily damage the edge of the substrate. Summary of the Invention

[0007] To solve the above problems, the application provides a sheet-shaped substrate ultrasonic scanning gantry conveying mechanism.

[0008] The sheet-shaped substrate ultrasonic scanning gantry conveying mechanism provided by the application adopts the following technical scheme: The sheet-shaped substrate ultrasonic scanning gantry conveying mechanism comprises a gantry, a clamping jaw for clamping a substrate is arranged on the gantry, the clamping jaw comprises a jaw frame, a suction cup for adsorbing the upper surface of the substrate is vertically arranged on the jaw frame, a side jaw for clamping the side edge of the substrate is horizontally and slidingly connected to the jaw frame, a micro-motion track is vertically arranged on the side of the side jaw facing the substrate, a plurality of grooves for clamping the side edge of the substrate are arranged on the outer wall of the micro-motion track, and the grooves are horizontally and uniformly arranged on the outer wall of the micro-motion track.

[0009] By adopting the above technical scheme, when the clamping jaw clamps the substrate, the side jaw clamps the side edge of the substrate. Since the movement stroke of the side jaw is fixed, when the side jaw clamps the substrate, the initial position of the substrate can be corrected even if there is deviation, so that the substrate is opposite to the clamping jaw after clamping by the side jaw, thereby correcting the position of the clamping jaw. After clamping by the side jaw, the suction cup adsorbs the upper surface of the substrate, thereby improving the clamping force of the substrate and ensuring the stability during transportation. When the suction cup adsorbs the substrate, the substrate itself is thin in material and light in quality. In the case that ordinary clamping jaws clamp the periphery of the substrate, the central part of the substrate will arch upward, thereby causing deformation of the substrate and affecting the quality of the substrate. Or the whole substrate moves upward, the side edge of the substrate constantly rubs against the side jaw, and the edge of the substrate is easily damaged.

[0010] Therefore, the combination of conventional suction cups and clamping jaws is easy to cause damage to the substrate and affect the quality of the substrate. In the application, when the side jaw clamps the substrate, the micro-motion track contacts the side edge of the substrate, the grooves limit the side edge of the substrate, and when the substrate is adsorbed by the suction cup, the side edge of the substrate moves upward synchronously, and the micro-motion track rotates under the driving of the substrate, so that the micro-motion track and the side edge of the substrate remain relatively stationary, thereby protecting the side edge of the substrate. The scheme of the application combines the side jaw and the suction cup by arranging the micro-motion track, which can ensure the accuracy and stability of the sheet-shaped substrate during transportation, and can also protect the substrate from damage.

[0011] Preferably, a horizontal buffer groove is arranged on the side of the side jaw facing the substrate, a buffer block is horizontally and slidingly connected in the buffer groove, the micro-motion track is mounted on the buffer block and one side of the micro-motion track extends out of the opening of the buffer groove, and a buffer spring is arranged between the buffer block and the buffer groove.

[0012] By adopting the above technical solution, when the side claws clamp the substrate, the buffer block squeezes the buffer spring, and the buffer spring provides buffering protection for the substrate to prevent damage to the side of the substrate.

[0013] Preferably, a vertical mounting groove is provided on the buffer block, and mounting blocks are slidably connected to both ends of the mounting groove. The mounting block is connected to the end of the mounting groove by a mounting spring, and a mounting wheel is rotatably connected to the mounting block, and the micro-track is wound around the two mounting wheels.

[0014] By adopting this technical solution, both ends of the micro-motion track are connected to mounting wheels, which are movably connected to the buffer block via the mounting block. When the side of the substrate contacts and squeezes the micro-motion track, the micro-motion track deforms, changing its tension and transmitting the pressure to the mounting wheel. The mounting wheel then transmits the pressure to the mounting spring via the mounting block, thereby balancing the tension of the micro-motion track.

[0015] Preferably, a plurality of strip-shaped protrusions are fixed to the outer wall of the micro-motion track, and grooves are formed between the protrusions.

[0016] By adopting the above technical solution, when the side of the substrate contacts the micro-motion track, the protrusions clamp the substrate and support the bottom of the substrate, thereby improving the stability of the substrate when sliding up and down.

[0017] Preferably, the protrusion includes an upper surface and a lower guide surface, the upper surface includes a horizontal supporting surface and an inclined upper guide surface, one end of the supporting surface is fixedly connected to the micro-motion track, and the other end is connected to the upper guide surface, the end of the upper guide surface away from the supporting surface is inclined downward and connected to the end of the lower guide surface, the lower guide surface is inclined, and the end of the lower guide surface close to the micro-motion track is located below the other end and is fixedly connected to the micro-motion track.

[0018] By adopting the above technical solution, when the micro-motion track contacts the substrate, if the substrate is facing the end of the protrusion, the substrate contacts the upper guide surface or the lower guide surface, the inclined upper guide surface or the lower guide surface guides the substrate, leads it into the groove, and supports the bottom of the substrate through the support surface, thereby improving the stability of the substrate clamping.

[0019] Preferably, the connection between the support surface and the upper guide surface is rounded.

[0020] By adopting the above technical solution, the rounded corners protect the substrate.

[0021] Preferably, a conveyor belt for conveying the substrate is further included, the conveyor belt includes two parallel belt bodies, a clamping gap for accommodating the side claws is formed between the two belt bodies, an adjustment seat is provided at the end of the conveyor belt, and the adjustment seat is horizontally slidably connected with adjustment plates located on both sides of the conveyor belt, and the sliding direction of the adjustment plate is perpendicular to the sliding direction of the side claws.

[0022] By adopting the above technical solution, the conveyor belt transports the substrate. When the substrate is transported to the end of the conveyor belt, the two adjustment plates move toward each other to adjust and correct the lateral position of the substrate. The side claws are located in the clamping gap to clamp the substrate, thereby adjusting and correcting the longitudinal position of the substrate. The two cooperate with each other to correct the horizontal position of the substrate to ensure the accuracy of the substrate.

[0023] Preferably, a vertical ventilation pipe is provided on the claw frame, an elastic bellows is provided at the lower end of the ventilation pipe, and the suction cup is installed at the lower end of the bellows.

[0024] By adopting the above technical solution, the suction cup absorbs the substrate, the substrate moves upward, and the bellows contracts to buffer the moving distance of the substrate, thereby ensuring the stability of substrate transportation.

[0025] In summary, this application has the following beneficial technical effects: The micro-motion crawler clamps the side of the substrate, which can not only adjust the horizontal position of the substrate, but also move up and down synchronously with the substrate, thereby protecting the side of the substrate and preventing the substrate from being damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the overall structure of the embodiment; Figure 2 2 is a schematic structural diagram of the clamping jaws in the embodiment; Figure 3 2 is a schematic structural diagram of the side claws in the embodiment; Figure 4 2 is a schematic structural diagram of the micro-motion track in the embodiment.

[0027] Description of reference numerals: 1. Gantry; 11. Clamping rod; 2. Clamping claw; 3. Claw frame; 31. Ventilation pipe; 32. Bellows; 4. Suction cup; 5. Side claw; 51. Buffer groove; 52. Buffer block; 521. Mounting groove; 522. Mounting block; 523. Mounting spring; 524. Mounting wheel; 53. Buffer spring; 6. Micro-motion track; 61. Groove; 62. Protrusion; 621. Support surface; 622. Upper guide surface; 623. Lower guide surface; 7. Conveyor belt; 71. Belt body; 72. Clamping gap; 73. Adjustment seat; 74. Adjustment plate. DETAILED DESCRIPTION

[0028] The present application is further described in detail below in conjunction with all the accompanying drawings.

[0029] Example The present application discloses an ultrasonic scanning gantry transport mechanism for sheet substrates, referring to Figure 1 , including a gantry 1 and a conveyor belt 7, the gantry 1 is horizontally slidably connected to a vertically arranged clamping rod 11, and the clamping rod 11 is vertically slidably connected to a clamping claw 2 for clamping the substrate.

[0030] Reference Figure 1 The conveyor belt 7 is used to transport the substrate. It comprises two parallel belts 71, with a clamping gap 72 formed between the two belts 71 to accommodate the side claws 5. The width of the substrate is greater than the width of the clamping gap 72. Adjustment seats 73 are provided at the ends of the conveyor belt 7. Adjustment plates 74 are horizontally slidably connected to the adjustment seats 73, located on both sides of the conveyor belt 7. The adjustment plates 74 are connected to drive cylinders, and the sliding direction of the adjustment plates 74 is perpendicular to the conveying direction of the conveyor belt 7. When the output shafts of the two drive cylinders are fully extended at the same time, the distance between the two adjustment plates 74 is equal to the width of the substrate.

[0031] Reference Figure 1 The substrate is transported to the end by the conveyor belt 7. Two adjustment plates 74 are extended by the driving cylinder to push the two sides of the substrate, thereby adjusting the horizontal position of the substrate. After adjustment, the driving cylinder retracts and the adjustment plates 74 release the substrate. The clamping jaws 2 then remove the substrate.

[0032] Reference Figure 1 and Figure 2 The clamping jaw 2 includes a clamping frame 3, on which a vent pipe 31 is vertically mounted. The lower end of the vent pipe 31 is provided with an elastic bellows 32. The lower end of the bellows 32 is mounted with a suction cup 4 for adsorbing the upper surface of the substrate. The suction cup 4 adsorbs the upper surface of the substrate, ensuring the suction force of the suction cup 4 on the substrate, thereby improving the stability of the clamping jaw 2 in transporting the substrate.

[0033] Reference Figure 2 and Figure 3 The claw frame 3 is horizontally slidably connected to a vertically arranged side claw 5, and the side claws 5 are arranged in pairs on both sides of the claw frame 3. The two side claws 5 are controlled by two cylinders respectively, and the two side claws 5 move synchronously toward or away from each other, and the movement direction of the side claws 5 is perpendicular to the movement direction of the adjustment plate 74.

[0034] Reference Figure 2 and Figure 3 The side claws 5 extend from the clamping gap 72 to clamp the two sides of the substrate and adjust the longitudinal position of the substrate in the horizontal direction to ensure that the substrate is aligned with the claw frame 3. The side claws 5 cooperate with the adjustment plate 74 to ensure the position accuracy of the substrate and the claw frame 3.

[0035] Reference Figure 2 and Figure 3 The side claw 5 faces the substrate and defines a horizontal buffer groove 51. A buffer block 52 is horizontally slidably connected within the buffer groove 51, with a buffer spring 53 connected between the buffer block 52 and the buffer groove 51. A vertical mounting groove 521 is defined in the buffer block 52. Mounting blocks 522 are slidably connected to each end of the mounting groove 521. Mounting blocks 522 are connected to the ends of the mounting groove 521 via mounting springs 523. Mounting wheels 524 are rotatably connected to the mounting blocks 522, with a fine-motion track 6 looped between the two mounting wheels 524. The fine-motion track 6 extends from the opening of the buffer groove 51 to contact the side of the substrate.

[0036] Reference Figure 3 and Figure 4 A plurality of horizontally arranged strip-shaped protrusions 62 are fixed on the fine-motion track 6, and grooves 61 for clamping the side edges of the substrate are formed between the protrusions 62.

[0037] Reference Figure 3 and Figure 4 When the side claws 5 clamp the substrate, the fine track 6 contacts the side of the substrate, and the side of the substrate is embedded in the groove 61. The buffer spring 53 provides buffering protection for the substrate. When the substrate presses the fine track 6, the fine track 6 transmits the pressure to the mounting spring 523, thereby adjusting its own tension.

[0038] Reference Figures 2 to 4 The side claws 5 grip the sides of the substrate and adjust its position. The suction cups 4 then absorb and secure the upper surface of the substrate. The substrate moves upward under suction, simultaneously driving the micro-motion tracks 6 on both sides upward. The micro-motion tracks 6 are fixed relative to the sides of the substrate, protecting the substrate from damage.

[0039] Reference Figures 2 to 4 The protrusion 62 includes an upper surface and a lower guide surface 623. The upper surface includes a horizontal support surface 621 and an inclined upper guide surface 622. One end of the support surface 621 is fixedly connected to the fine track 6, and the other end is connected to the upper guide surface 622. The connection between the support surface 621 and the upper guide surface 622 is rounded.

[0040] Reference Figures 2 to 4 The end of the upper guide surface 622 away from the support surface 621 is tilted downward and connected to the end of the lower guide surface 623. The lower guide surface 623 is tilted, and the end of the lower guide surface 623 close to the micro-track 6 is located below the other end and is fixedly connected to the micro-track 6.

[0041] Reference Figures 2 to 4When the fine-motion track 6 contacts the substrate, if the substrate is facing the end of the protrusion 62, the substrate contacts the upper guide surface 622 or the lower guide surface 623, and the inclined upper guide surface 622 or the lower guide surface 623 guides the substrate and introduces it into the groove 61, and supports the bottom of the substrate through the support surface 621, thereby improving the stability of clamping the substrate.

[0042] The operating principle of a gantry transport mechanism for ultrasonic scanning of sheet substrates in this embodiment is as follows: a conveyor belt 7 transports the substrate to the end, an adjustment plate 74 clamps and adjusts the substrate before releasing it, and the clamping jaws 2, under the manipulation of the gantry 1, move to the substrate. The clamping jaws 2 are lowered, the side jaws 5 clamp the substrate, the micro-motion crawler 6 contacts the side of the substrate, and the suction cups 4 secure the substrate by suction. The clamping jaws 2 are lowered by the manipulation of the gantry 1, and the substrate is transported to the next workstation.

[0043] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A sheet-like substrate ultrasonic scanning gantry transport mechanism, comprising a gantry (1), wherein the gantry (1) is provided with a clamping claw (2) for clamping the substrate, characterized in that: The clamping claw (2) comprises a claw frame (3), a suction cup (4) for adsorbing the upper surface of a substrate is vertically provided on the claw frame (3), a side claw (5) for clamping the side of the substrate is horizontally slidably connected to the claw frame (3), a vertically arranged micro-motion track (6) is provided on the side of the side claw (5) facing the substrate, and a plurality of grooves (61) for clamping the side of the substrate are provided on the outer wall of the micro-motion track (6), and the grooves (61) are horizontally and evenly opened on the outer wall of the micro-motion track (6).

2. The ultrasonic scanning gantry transport mechanism for sheet substrates according to claim 1, characterized in that: The side claw (5) is provided with a horizontal buffer groove (51) on the side facing the substrate, a buffer block (52) is horizontally slidably connected in the buffer groove (51), the micro-motion track (6) is mounted on the buffer block (52) and one side of the micro-motion track (6) extends out from the opening of the buffer groove (51), and a buffer spring (53) is provided between the buffer block (52) and the buffer groove (51).

3. The sheet-like substrate ultrasonic scanning gantry transport mechanism according to claim 2, characterized in that: The buffer block (52) is provided with a vertical mounting groove (521), and the two ends of the mounting groove (521) are respectively slidably connected with mounting blocks (522), and the mounting block (522) is connected to the end of the mounting groove (521) via a mounting spring (523). The mounting block (522) is rotatably connected with a mounting wheel (524), and the micro-motion track (6) is wound around the two mounting wheels (524).

4. The ultrasonic scanning gantry transport mechanism for sheet substrates according to claim 1, characterized in that: A plurality of strip-shaped protrusions (62) are fixed on the outer wall of the micro-motion crawler (6), and grooves (61) are formed between the protrusions (62).

5. The ultrasonic scanning gantry transport mechanism for sheet substrates according to claim 4, characterized in that: The protrusion (62) includes an upper surface and a lower guide surface (623), the upper surface includes a horizontal support surface (621) and an inclined upper guide surface (622), one end of the support surface (621) is fixedly connected to the micro-motion track (6), and the other end is connected to the upper guide surface (622), one end of the upper guide surface (622) away from the support surface (621) is inclined downward and connected to the end of the lower guide surface (623), the lower guide surface (623) is inclined, and one end of the lower guide surface (623) close to the micro-motion track (6) is located below the other end and is fixedly connected to the micro-motion track (6).

6. The sheet-like substrate ultrasonic scanning gantry transport mechanism according to claim 5, characterized in that: The connection between the support surface (621) and the upper guide surface (622) is rounded.

7. The sheet-like substrate ultrasonic scanning gantry transport mechanism according to claim 1, characterized in that: The invention also includes a conveyor belt (7) for conveying a substrate, wherein the conveyor belt (7) includes two belt bodies (71) parallel to each other, and a clamping gap (72) for accommodating the side claws (5) is formed between the two belt bodies (71). An adjustment seat (73) is provided at the end of the conveyor belt (7), and an adjustment plate (74) located on both sides of the conveyor belt (7) is horizontally slidably connected to the adjustment seat (73), and the sliding direction of the adjustment plate (74) is perpendicular to the sliding direction of the side claws (5).

8. The sheet-like substrate ultrasonic scanning gantry transport mechanism according to claim 1, characterized in that: The claw frame (3) is provided with a vertical ventilation pipe (31), the lower end of the ventilation pipe (31) is provided with an elastic bellows (32), and the suction cup (4) is installed at the lower end of the bellows (32).

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