Quantitative liquid conveying device with purification function and method

Abstract

The invention belongs to the technical field of liquid conveying, and particularly relates to a quantitative liquid conveying device and method with a purification function, the conveying device comprises a liquid metering pump, two mutually independent pump cavities are arranged in the liquid metering pump, and a filter is arranged on a pipeline between the two pump cavities; the interior of each pump cavity is divided into a pump liquid cavity and a hydraulic cavity which are independent from each other through an isolating membrane, the pump liquid cavity of one pump cavity is communicated with the liquid inlet and an inlet of the filter through pipelines, and the pump liquid cavity of the other pump cavity is communicated with an outlet of the filter through a pipeline; the pump liquid cavity of the other pump cavity is respectively communicated with the waste discharge port and the nozzle through two branches divided from the other pipeline, and the other outlet of the filter is communicated with the waste discharge port through the pipeline. The liquid suction process and the liquid discharging process can be carried out at the same time, and the working efficiency is improved; the filter is arranged between the two pump cavities in the liquid metering pump, and the cleanliness of pumped liquid can be improved through the purification function of the filter.

Description

Technical Field

[0001] The present invention belongs to the technical field of liquid transportation, and in particular relates to a quantitative liquid transportation device and method with a purification function. Background Art

[0002] A pump is a fluid machine that transports or pressurizes liquids. It transfers the mechanical energy of a prime mover or other external energy to the liquid, increasing its energy. Currently, positive displacement pumps are commonly used. These pumps rely on the periodic volume fluctuations of a sealed working space containing the liquid, increasing the liquid's pressure and forcing it out. Therefore, positive displacement pumps not only have excellent self-priming properties but also maintain a stable flow rate despite load changes. Positive displacement pumps are currently primarily categorized as reciprocating pumps and rotor pumps. Existing positive displacement pumps utilize traditional mechanical structures, with multiple components for transmission and connection. This makes the pump structure complex and difficult to disassemble, leading to maintenance challenges.

[0003] Positive displacement pumps of conventional design, such as reciprocating piston pumps (e.g. Figure 1 As shown in the figure, an inlet 33 and an outlet 35 are respectively provided on the pump body 32. A one-way valve A34 that can only flow to the inner cavity is provided between the inlet 33 and the inner cavity of the pump body 32, and a one-way valve B36 that can only flow to the outlet 35 is provided between the inner cavity of the pump body 32 and the outlet 35. During operation, the push rod 30 drives the piston 31 to move back and forth in the inner cavity of the pump body 32, which causes a large amount of friction, and the friction surface is in direct contact with the pumped liquid, which will bring two problems: 1) particles generated by friction will contaminate the pumped liquid; 2) friction generates heat, which affects the temperature of the pumped liquid. The above two problems are unacceptable in specific application scenarios, such as the transportation of ultra-clean process liquids in semiconductor processing, the titration of reaction liquids in precision biochemical experiments, etc.

[0004] To solve the above problems, Figure 2 As shown, existing liquid metering pumps often use a bellows-shaped bellows 37 as the deformable body. This bellows 37 is pushed by a push rod 30 to expand and contract, changing the volume of the pump body 32 and thereby achieving the liquid pumping function. Bellows 37 is typically made of high-performance resin materials such as PTFE (polytetrafluoroethylene) or PP (polypropylene). However, this structure suffers from low pumping accuracy. Improving accuracy requires further control methods, which is difficult and not adaptable. This is particularly true in applications where upstream and downstream flow resistance is relatively large, leading to problems such as high system damping and delayed response.

[0005] To solve Figure 2 The problem with the solution shown is that Figure 3In the illustrated scheme, the pump chamber is divided into a relatively independent hydraulic chamber 39 and a pump fluid chamber A41 by an isolation diaphragm A40. The interior of hydraulic cylinder A18 is connected to hydraulic chamber A39 via a hydraulic line A38. A motor A20 and a rotatably mounted lead screw A19 are fixed to hydraulic cylinder A18. The output end of motor A20 is connected to one end of lead screw A19, the other end of which is threadedly connected to the piston in hydraulic cylinder A18. Pump fluid chamber A41 is connected to inlet 33 and outlet 35, respectively. A check valve A34 is installed in the line connecting inlet 33, restricting flow to pump fluid chamber A41. A check valve B36 is installed in the line connecting outlet 35, restricting flow to outlet 35. Motor A20 drives lead screw A19 to rotate, and the reciprocating motion of the piston is achieved by a screw assembly between lead screw A19 and the piston. This solution has the advantages of high quantitative accuracy of piston reciprocating pumps and the frictionless characteristics of bellows pumps. At the same time, it uses a more flexible isolation diaphragm A40 to replace the bellows-shaped bellows 37, which reduces system damping and improves output response characteristics.

[0006] To improve Figure 3 The flexibility of the solution in terms of functional implementation is further improved by adjusting the one-way valve A34 at the inlet 33 to an actively controlled pneumatic on-off valve D11 and the one-way valve B36 at the outlet 35 to an actively controlled pneumatic on-off valve E12. In this way, the inlet 33 and outlet 35 are no longer strictly distinguished, so the application has better flexibility. Figure 4 shown.

[0007] Of course, there are also similar Figure 3 and Figure 4 The design of the scheme shown is mainly to change the hydraulic chamber A39 into a pneumatic chamber 47, and accordingly cancel the hydraulic cylinder A18, the screw A19 and the motor A20. The pneumatic chamber A47 is connected to one interface of the three-way solenoid valve A1 through the pneumatic pipeline 46, and the other two interfaces of the three-way solenoid valve A1 are connected to the compressed air source and the vacuum source respectively. Figure 5 This solution is relatively simple in structure, but due to the compressibility of gas, quantitative determination is often inaccurate. To achieve precise quantitative determination, the control system is relatively complex.

[0008] although Figure 4 The solution shown is a relatively good technical solution, but the following problems still exist:

[0009] (1) When the flow resistance coefficient and viscosity of the upstream pipeline of the pump chamber are large, the suction process takes a long time and the working cycle is very long, so the efficiency is low.

[0010] (2) In the absence of force feedback link, in the process of liquid absorption, the pipeline is prone to cavitation and bubble due to pressure drop, and bubble is not allowed in many application scenarios, such as photoresist precise pumping in semiconductor lithography manufacturing process.

[0011] (3) In the application scenario of ultra-clean pumping, the pipeline pollution needs to be flushed with clean liquid for a long time to make the whole pipeline path clean, which will cause a lot of waste.

[0012] (4) The residual liquid and bubbles in the pump cavity can only be pumped out through the outlet, and the liquid pumping end point is not allowed in many application scenarios, and only bypass can be added in the downstream pipeline, which also increases the complexity of pipeline system design. SUMMARY

[0013] In view of the above problems existing in the prior art volumetric pump, the purpose of the present application is to provide a quantitative liquid delivery device and method with purification function.

[0014] The purpose of the present application is achieved by the following technical solutions:

[0015] A structure of the quantitative liquid delivery device of the present application comprises a liquid quantitative pump, the liquid quantitative pump has pump cavity C and pump cavity A which are independent of each other, a filter is arranged on the pipeline between the pump cavity C and the pump cavity A, the pump cavity C is divided into an air pressure cavity and a pump liquid cavity C by a separation membrane C, the pump cavity A is divided into a hydraulic cavity A and a pump liquid cavity A by a separation membrane A, the pump liquid cavity C is communicated with a liquid inlet and an inlet of the filter through a pipeline, the pump liquid cavity A is communicated with an outlet of the filter through a pipeline, the pump liquid cavity A is communicated with a waste outlet and a nozzle through two branches of another pipeline, and another outlet of the filter is communicated with the waste outlet through a pipeline; the pipeline between the pump cavity C and the liquid inlet, the pipeline between the pump cavity C and the filter, the pipeline between the filter and the pump cavity A, the pipeline between the pump cavity A and the waste outlet, the pipeline between the pump cavity A and the nozzle, and the pipeline between the filter and the waste outlet are respectively provided with air control on-off valves, each air control on-off valve is respectively controlled by a three-way electromagnetic valve connected thereto, the air pressure cavity is communicated with the three-way electromagnetic valve through an air pressure pipeline, each three-way electromagnetic valve has two air source ports which are respectively communicated with compressed air and vacuum, and the hydraulic cavity A is connected with a hydraulic driving mechanism through a hydraulic pipeline A.

[0016] Wherein: the hydraulic drive mechanism includes a hydraulic cylinder A, a screw A and a motor A, the hydraulic chamber A is connected to the interior of the hydraulic cylinder A through a hydraulic pipeline A; the screw A is rotatably installed on the cylinder body of the hydraulic cylinder A, the motor A is fixed on the cylinder body of the hydraulic cylinder A, one end of the screw A is connected to the output end of the motor A, and the other end of the screw A is threadedly connected to the piston inside the hydraulic cylinder A, the motor A drives the screw A to rotate, and then drives the piston threadedly connected to the screw A to move back and forth, so as to pressurize the hydraulic oil in the hydraulic cylinder A to the hydraulic chamber A or suck the hydraulic oil from the hydraulic chamber A back to the hydraulic chamber A; a pressure detection sensor A for detecting internal pressure is installed on the hydraulic cylinder A.

[0017] The delivery method of the quantitative liquid delivery device with purification function of the present invention comprises:

[0018] Liquid aspiration in the liquid aspiration chamber: switch the three-way solenoid valve connected to the air pressure chamber to vacuum, open the air-controlled on-off valve between the pump chamber C and the liquid inlet, and close the air-controlled on-off valve between the pump chamber C and the filter. The pump liquid chamber C is in a negative pressure state, and liquid is aspirated from the liquid inlet into the pump liquid chamber C;

[0019] Discharge of liquid from the suction chamber: Close the air-controlled on-off valve between the pump chamber C and the liquid inlet, and the air-controlled on-off valve between the filter and the pump chamber A. Open the air-controlled on-off valve between the pump chamber C and the filter, and the air-controlled on-off valve between the filter and the waste outlet. Switch the three-way solenoid valve connected to the pump chamber C to compressed air. The pump chamber C is in a positive pressure state, and the liquid in the pump chamber C is discharged outward through the inlet and another outlet of the filter and the waste outlet.

[0020] The pump liquid chamber sucks liquid: the air-controlled on-off valve between the pump chamber C and the liquid inlet, the air-controlled on-off valve between the filter and the waste outlet, the air-controlled on-off valve between the pump chamber A and the waste outlet, and the air-controlled on-off valve between the pump chamber A and the nozzle are all closed, and the air-controlled on-off valve between the pump chamber C and the filter, and the air-controlled on-off valve between the filter and the pump chamber A are all opened; the hydraulic drive mechanism sucks the hydraulic oil from the hydraulic chamber A back into the hydraulic cylinder A in the hydraulic drive mechanism, and switches the three-way solenoid valve connected to the air pressure chamber to compressed air. The pump liquid chamber C is in a positive pressure state, and the liquid in the pump liquid chamber C enters the pump liquid chamber A through the inlet and an outlet of the filter;

[0021] Liquid discharge from the pump liquid chamber: the air-controlled on-off valve between the filter and the waste outlet, the air-controlled on-off valve between the filter and the pump chamber A, and the air-controlled on-off valve between the pump chamber A and the nozzle are all closed, and the air-controlled on-off valve between the pump chamber A and the waste outlet is opened. The hydraulic drive mechanism pressurizes the hydraulic oil in the hydraulic cylinder A into the hydraulic chamber A, and the pump liquid chamber A is in a positive pressure state. The liquid in the pump liquid chamber A is discharged outward through the waste outlet;

[0022] Pumping out the liquid from the pump cavity: close the air-controlled on-off valve between the filter and the pump cavity A, and the air-controlled on-off valve between the pump cavity A and the waste outlet, and open the air-controlled on-off valve between the pump cavity A and the nozzle; the hydraulic drive mechanism pressurizes the hydraulic oil in the hydraulic cylinder A into the hydraulic cavity A, and the pump cavity A is in a positive pressure state, and the liquid in the pump cavity A is quantitatively pumped out through the nozzle.

[0023] Among them: after the quantitative liquid pumping is completed, it also includes liquid back suction in the pump liquid chamber, that is, the air-controlled on-off valve between the filter and the pump chamber A, and the air-controlled on-off valve between the pump chamber A and the waste outlet are closed, and the air-controlled on-off valve between the pump chamber A and the nozzle is opened. The hydraulic drive mechanism sucks the hydraulic oil in the hydraulic chamber A back into the hydraulic cylinder A, the pump liquid chamber A is in a negative pressure state, and the liquid remaining at the nozzle is reversely sucked back into the pump liquid chamber A.

[0024] It also includes self-cleaning of the pump body, i.e.

[0025] Step A, after completing multiple aspiration and discharge of liquid from the aspiration chamber, perform a single aspiration of the aspiration chamber, and then connect the liquid inlet to the liquid outlet;

[0026] Step B, performing liquid discharge from the pump cavity;

[0027] Step C, simultaneously pumping out the liquid from the pump cavity and absorbing the liquid from the suction cavity;

[0028] Step D, simultaneously performing liquid aspiration in the pump chamber and liquid discharge in the aspiration chamber;

[0029] Steps A to D are executed cyclically, and the pump body is self-cleaned through the filter.

[0030] Another structure of the quantitative liquid delivery device of the present invention includes a liquid metering pump, wherein the liquid metering pump has a pump chamber B and a pump chamber A that are independent of each other, a filter is provided on the pipeline between the pump chamber B and the pump chamber A, the pump chamber B is separated into a hydraulic chamber B and a pump liquid chamber B that are independent of each other by an isolation membrane B, the pump chamber A is separated into a hydraulic chamber A and a pump liquid chamber A that are independent of each other by an isolation membrane A, the pump liquid chamber B is connected to a liquid inlet and an inlet of the filter respectively through pipelines, the pump liquid chamber A is connected to an outlet of the filter through a pipeline, the pump liquid chamber A is connected to a waste outlet and a nozzle respectively through two branches separated from another pipeline, the The other outlet of the filter is connected to the waste outlet through a pipeline; the pipeline between the pump chamber B and the liquid inlet, the pipeline between the pump chamber B and the filter, the pipeline between the filter and the pump chamber A, the pipeline between the pump chamber A and the waste outlet, the pipeline between the pump chamber A and the nozzle, and the pipeline between the filter and the waste outlet are respectively provided with an air-controlled on-off valve, and each of the air-controlled on-off valves is controlled to switch by the connected three-way solenoid valve, and each of the three-way solenoid valves has two air source ports, which are respectively connected to compressed air and vacuum; the hydraulic chamber A is connected to the hydraulic drive mechanism A through hydraulic pipeline A, and the hydraulic chamber B is connected to the hydraulic drive mechanism B through hydraulic pipeline B.

[0031] Wherein: the hydraulic drive mechanism A includes a hydraulic cylinder A, a screw A and a motor A, the hydraulic chamber A is connected to the interior of the hydraulic cylinder A through a hydraulic pipeline A; the screw A is rotatably mounted on the cylinder body of the hydraulic cylinder A, the motor A is fixed on the cylinder body of the hydraulic cylinder A, one end of the screw A is connected to the output end of the motor A, and the other end of the screw A is threadedly connected to the piston inside the hydraulic cylinder A, the motor A drives the screw A to rotate, and then drives the piston threadedly connected to the screw A to move back and forth, so as to pressurize the hydraulic oil in the hydraulic cylinder A into the hydraulic chamber A or suck the hydraulic oil from the hydraulic chamber A back into the hydraulic cylinder A; a pressure detection sensor for detecting the internal pressure is installed on the hydraulic cylinder A A; the hydraulic drive mechanism B includes a hydraulic cylinder B, a screw B and a motor B. The hydraulic chamber B is connected to the interior of the hydraulic cylinder B through a hydraulic pipeline B; the screw B is rotatably installed on the cylinder body of the hydraulic cylinder B, and the motor B is fixed on the cylinder body of the hydraulic cylinder B. One end of the screw B is connected to the output end of the motor B, and the other end of the screw B is threadedly connected to the piston inside the hydraulic cylinder B. The motor B drives the screw B to rotate, and then drives the piston threadedly connected to the screw B to move back and forth, so as to pressurize the hydraulic oil in the hydraulic cylinder B to the hydraulic chamber B or suck the hydraulic oil from the hydraulic chamber B back to the hydraulic cylinder B; a pressure detection sensor B for detecting internal pressure is installed on the hydraulic cylinder B.

[0032] The delivery method of the quantitative liquid delivery device with purification function of the present invention comprises:

[0033] Liquid suction in the liquid suction chamber: the air-controlled on-off valve between the pump chamber B and the liquid inlet is opened, and the air-controlled on-off valve between the pump chamber B and the filter is closed; the hydraulic oil in the hydraulic chamber B is sucked back into the hydraulic cylinder B in the hydraulic driving mechanism B through the hydraulic driving mechanism B, the pump liquid chamber B is in a negative pressure state, and liquid is sucked into the pump liquid chamber B from the liquid inlet;

[0034] Discharge of liquid from the suction chamber: Close the air-controlled on-off valve between the pump chamber B and the liquid inlet, and the air-controlled on-off valve between the filter and the pump chamber A. Open the air-controlled on-off valve between the pump chamber B and the filter, and the air-controlled on-off valve between the filter and the waste outlet. Pressurize the hydraulic oil in the hydraulic cylinder B to the hydraulic chamber B through the hydraulic drive mechanism B. The pump chamber B is in a positive pressure state, and the liquid in the pump chamber B is discharged outward through the inlet and another outlet of the filter and the waste outlet.

[0035] Liquid suction in the pump liquid chamber: the air-controlled on-off valve between the pump chamber B and the liquid inlet, the air-controlled on-off valve between the filter and the waste outlet, the air-controlled on-off valve between the pump chamber A and the waste outlet, and the air-controlled on-off valve between the pump chamber A and the nozzle are all closed, and the air-controlled on-off valve between the pump chamber B and the filter, and the air-controlled on-off valve between the filter and the pump chamber A are all opened; the hydraulic drive mechanism B presses the hydraulic oil in the hydraulic cylinder B into the hydraulic chamber B, and the hydraulic drive mechanism A sucks the hydraulic oil from the hydraulic chamber A back into the hydraulic cylinder A in the hydraulic drive mechanism A; the pump liquid chamber B is in a positive pressure state, and the liquid in the pump liquid chamber B enters the pump liquid chamber A through the inlet and an outlet of the filter;

[0036] Liquid discharge from the pump liquid chamber: the air-controlled on-off valve between the filter and the waste outlet, the air-controlled on-off valve between the filter and the pump chamber A, and the air-controlled on-off valve between the pump chamber A and the nozzle are all closed, and the air-controlled on-off valve between the pump chamber A and the waste outlet is opened. The hydraulic drive mechanism A pressurizes the hydraulic oil in the hydraulic cylinder A into the hydraulic chamber A, and the pump liquid chamber A is in a positive pressure state. The liquid in the pump liquid chamber A is discharged outward through the waste outlet;

[0037] Pumping out the liquid from the pump cavity: close the air-controlled on-off valve between the filter and the pump cavity A, and the air-controlled on-off valve between the pump cavity A and the waste outlet, and open the air-controlled on-off valve between the pump cavity A and the nozzle; the hydraulic drive mechanism A pressurizes the hydraulic oil in the hydraulic cylinder A into the hydraulic cavity A, and the pump cavity A is in a positive pressure state, and the liquid in the pump cavity A is quantitatively pumped out through the nozzle.

[0038] Among them: after the quantitative liquid pumping is completed, it also includes liquid back suction in the pump liquid chamber A, that is, the air-controlled on-off valve between the filter and the pump chamber A, and the air-controlled on-off valve between the pump chamber A and the waste outlet are closed, and the air-controlled on-off valve between the pump chamber A and the nozzle is opened. The hydraulic drive mechanism A sucks the hydraulic oil in the hydraulic chamber A back into the hydraulic cylinder A, the pump liquid chamber A is in a negative pressure state, and the liquid remaining at the nozzle is reversely sucked back into the pump liquid chamber A.

[0039] It also includes self-cleaning of the pump body, i.e.

[0040] Step A, after completing multiple aspiration and discharge of liquid from the aspiration chamber, perform a single aspiration of the aspiration chamber, and then connect the liquid inlet to the liquid outlet;

[0041] Step B, performing liquid discharge from the pump cavity;

[0042] Step C, simultaneously pumping out the liquid from the pump cavity and absorbing the liquid from the suction cavity;

[0043] Step D, simultaneously performing liquid aspiration in the pump chamber and liquid discharge in the aspiration chamber;

[0044] Steps A to D are executed cyclically, and the pump body is self-cleaned through the filter.

[0045] The advantages and positive effects of the present invention are:

[0046] 1. The liquid aspiration and liquid discharge processes of the present invention can be carried out simultaneously, thereby improving work efficiency; a filter is provided between the two pump chambers of the liquid metering pump, and the purification function of the filter can improve the cleanliness of the pumped liquid.

[0047] 2. The waste liquid and bubbles in the pump cavity of the present invention can be discharged through the waste outlet.

[0048] 3. After the liquid inlet and the liquid outlet are connected in the present invention, the liquid metering pump itself has a self-cleaning function.

[0049] 4. The present invention can realize the back-suction function of the pumped liquid; when pumping liquid containing volatile organic solvents, there will be residue at the end of the nozzle. After a long time, the solvent evaporates and the solute will dry up at the nozzle; after the pumping is completed, through this function, the liquid remaining near the nozzle due to surface tension is reversely sucked back into the pipeline, which can effectively avoid the drying problem. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] Figure 1 It is a schematic diagram of the internal structure of an existing piston reciprocating pump;

[0051] Figure 2 This is a schematic diagram of the internal structure of a pump cavity of an existing liquid metering pump;

[0052] Figure 3 This is another structural schematic diagram of the pump chamber of an existing liquid metering pump;

[0053] Figure 4 This is another structural diagram of the pump chamber of an existing liquid metering pump;

[0054] Figure 5 This is another structural diagram of the pump chamber of an existing liquid metering pump;

[0055] Figure 6 Structure diagram of the quantitative liquid delivery device of the present application;

[0056] Figure 7 Structure diagram of the quantitative liquid delivery device of the present application;

[0057] Figure 8 Structure diagram of the pump cavity B of the quantitative liquid delivery device of the present application;

[0058] Figure 9 Structure diagram of the pump cavity B of the quantitative liquid delivery device of the present application; Figure 6 、 Figure 7 Structure diagram of the pump cavity B of the quantitative liquid delivery device of the present application;

[0059] Wherein: 1 is three-way electromagnetic valve A, 2 is three-way electromagnetic valve B, 3 is three-way electromagnetic valve C, 4 is three-way electromagnetic valve D, 5 is three-way electromagnetic valve E, 6 is three-way electromagnetic valve F, 7 is three-way electromagnetic valve G, 8 is air control on-off valve A, 9 is air control on-off valve B, 10 is air control on-off valve C, 11 is air control on-off valve D, 12 is air control on-off valve E, 13 is air control on-off valve F, 14 is pump cavity C, 15 is filter, 16 is pump cavity A, 17 is pressure detection sensor A, 18 is hydraulic cylinder A, 19 is screw A, 20 is motor A, 21 is pump cavity B, 22 is pressure detection sensor B, 23 is hydraulic cylinder B, 24 is screw B, 25 is motor B, 26 is pressure detection sensor C, 27 is pressure detection sensor D, 28 is pressure detection sensor E, 29 is nozzle, 30 is push rod, 31 is piston, 32 is pump body, 33 is inlet, 34 is one-way valve A, 35 is outlet, 36 is one-way valve B, 37 is bellows-shaped expansion bag, 38 is hydraulic pipeline A, 39 is hydraulic cavity A, 40 is isolation membrane A, 41 is pump liquid cavity A, 42 is hydraulic pipeline B, 43 is hydraulic cavity B, 44 is isolation membrane B, 45 is pump liquid cavity B, 46 is air pressure pipeline, 47 is air pressure cavity, 48 is isolation membrane C, 49 is pump liquid cavity C. DETAILED DESCRIPTION

[0060] The present application will be further described in detail below with reference to the accompanying drawings.

[0061] Example 1

[0062] As Figures 4-6 and Figure 8As shown, the quantitative liquid delivery device of this embodiment includes a liquid quantitative pump, which has a pump chamber C14 and a pump chamber A16 that are independent of each other. A filter 15 is provided on the pipeline between the pump chamber C16 and the pump chamber A16; the pump chamber C14 is separated into an independent air pressure chamber 47 and a pump liquid chamber C49 by an isolation membrane C48, and the pump chamber A16 is separated into an independent hydraulic chamber A39 and a pump liquid chamber A41 by an isolation membrane A40. The pump liquid chamber C49 is connected to the liquid inlet and the inlet of the filter 15 through pipelines, respectively. The liquid chamber A41 is connected to an outlet of the filter 15 through a pipeline, and the two branches of the pump liquid chamber A41 are connected to the waste outlet and the nozzle 29 respectively through another pipeline. The other outlet of the filter 15 is connected to the waste outlet through a pipeline; the pipeline between the pump chamber C14 and the liquid inlet, the pipeline between the pump chamber C14 and the filter 15, the pipeline between the filter 15 and the pump chamber A16, the pipeline between the pump chamber A16 and the waste outlet, the pipeline between the pump chamber A16 and the nozzle 29, and the pipeline between the filter 15 and the waste outlet They are respectively provided with air-controlled on-off valves, and each air-controlled on-off valve is controlled by the connected three-way solenoid valve. That is, an air-controlled on-off valve A8 is provided on the pipeline between the pump chamber C14 and the liquid inlet, and the air-controlled on-off valve A8 is controlled by the connected three-way solenoid valve B2. An air-controlled on-off valve B9 is provided on the pipeline between the pump chamber C14 and the filter 15, and the air-controlled on-off valve B9 is controlled by the connected three-way solenoid valve C3. An air-controlled on-off valve C10 is provided on the pipeline between the filter 15 and the waste outlet, and the air-controlled on-off valve C10 is controlled by the connected three-way solenoid valve The pipeline between the filter 15 and the pump chamber A16 is equipped with a pneumatic on / off valve D11, which is controlled by the connected three-way solenoid valve E5. The pipeline between the pump chamber A16 and the waste outlet is equipped with a pneumatic on / off valve E12, which is controlled by the connected three-way solenoid valve F6. The pipeline between the pump chamber A16 and the nozzle 29 is equipped with a pneumatic on / off valve F13, which is controlled by the connected three-way solenoid valve G7. The pneumatic chamber 47 is connected to the three-way solenoid valve A1 via the pneumatic pipeline 46. Each three-way solenoid valve has two air source ports, one for compressed air and one for vacuum. Specifically, three-way solenoid valve A1 has two air source ports connected to compressed air A and vacuum, respectively. Three-way solenoid valves B2 through G7 each have one air source port connected to compressed air B, and the other air source ports of three-way solenoid valves B2 through G7 each connect to vacuum. In this embodiment, the compressed air pressure of three-way solenoid valve A1 is lower than that of three-way solenoid valves B2 through G7, which facilitates the shutoff operation of air-controlled on-off valves A8 and B9.In this embodiment, a pressure detection sensor E28 is provided on the pipeline connecting the compressed air A and the gas source port, a pressure detection sensor D27 is provided on the pipeline connecting the compressed air B and the gas source port, and a pressure detection sensor C26 is provided on the pipeline connecting the vacuum and the gas source port. The pressure detection sensor C26, the pressure detection sensor D27 and the pressure detection sensor E28 ensure that the device can operate correctly.

[0063] Hydraulic chamber A39 of pump chamber A16 is connected to a hydraulic drive mechanism via a hydraulic line A38. The hydraulic drive mechanism of this embodiment includes a hydraulic cylinder A18, a lead screw A19, and a motor A20. Hydraulic chamber A39 communicates with the interior of hydraulic cylinder A18 via a hydraulic line A38. Lead screw A19 is rotatably mounted on the cylinder body of hydraulic cylinder A18. Motor A20 is fixed to the cylinder body of hydraulic cylinder A18. One end of lead screw A19 is connected to the output end of motor A20, and the other end of lead screw A19 is threadedly connected to a piston inside hydraulic cylinder A18. Motor A20 drives lead screw A19 to rotate, which in turn drives the piston threadedly connected to lead screw A19 to reciprocate, thereby pressurizing the hydraulic oil in hydraulic cylinder A18 into hydraulic chamber A39 or drawing the hydraulic oil back from hydraulic chamber A39 to hydraulic chamber A39. Hydraulic cylinder A18 is equipped with a pressure sensor A17 for detecting internal pressure. Pressure sensors A17, C26, D27, and E28, as well as motor A20, are each connected to a control system. Pressure sensors A17, C26, D27, and E28 transmit detected signals to the control system, which then controls the driving speed of motor A20. The control system of this embodiment is conventional technology and will not be described in detail here.

[0064] The method for using the quantitative liquid delivery device with purification function in this embodiment includes:

[0065] Liquid aspiration from the liquid aspiration chamber: Switch the three-way solenoid valve A1 connected to the air pressure chamber 47 to vacuum mode, open the air-controlled on-off valve A8 between the pump chamber C14 and the liquid inlet, and close the air-controlled on-off valve B9 between the pump chamber C14 and the filter 15. The pump liquid chamber C49 is in a negative pressure state, and liquid is aspirated from the liquid inlet into the pump liquid chamber C49.

[0066] Discharge of liquid from the suction chamber: Close the air-controlled on-off valve A8 between the pump chamber C14 and the liquid inlet, and the air-controlled on-off valve D11 between the filter 15 and the pump chamber A16. Open the air-controlled on-off valve B9 between the pump chamber C14 and the filter 15, and the air-controlled on-off valve C10 between the filter 15 and the waste outlet. Switch the three-way solenoid valve A1 connected to the pump chamber C14 to the compressed air A. The pump liquid chamber C49 is in a positive pressure state, and the liquid in the pump liquid chamber C49 is discharged outward through the inlet and another outlet of the filter 15 and the waste outlet.

[0067] Liquid is sucked from the pump cavity: the air-controlled on-off valve A8 between the pump cavity C14 and the liquid inlet, the air-controlled on-off valve C10 between the filter 15 and the waste outlet, the air-controlled on-off valve E12 between the pump cavity A16 and the waste outlet, and the air-controlled on-off valve F13 between the pump cavity A16 and the nozzle 29 are all closed, and the air-controlled on-off valve B9 between the pump cavity C14 and the filter 15, and the air-controlled on-off valve D11 between the filter 15 and the pump cavity A16 are all opened; the motor A20 drives the screw A19 to rotate, and the hydraulic oil is pumped from the hydraulic cavity A3 to the hydraulic cavity A4. 9 is sucked back into the hydraulic cylinder A18 in the hydraulic drive mechanism, and the three-way solenoid valve A1 connected to the air pressure chamber 47 is switched to the compressed air A, so that the pump liquid chamber C49 is in a positive pressure state. The liquid in the pump liquid chamber C49 enters the pump liquid chamber A41 through the inlet and an outlet of the filter 15. During this process, it is necessary to detect the pressure detection sensor A17, set the pressure threshold, and control the driving speed of the motor A20 to prevent the pressure in the hydraulic cylinder A18 from falling below the threshold, and to avoid cavitation in the hydraulic pipeline A38 due to excessively low pressure.

[0068] Liquid discharge from the pump cavity: Close the air-controlled on-off valve C10 between the filter 15 and the waste outlet, the air-controlled on-off valve D11 between the filter 15 and the pump cavity A16, and the air-controlled on-off valve F13 between the pump cavity A16 and the nozzle 29. Open the air-controlled on-off valve E12 between the pump cavity A16 and the waste outlet. The motor A20 drives the screw A19 to rotate, pressing the hydraulic oil in the hydraulic cylinder A18 into the hydraulic cavity A39. The pump cavity A41 is in a positive pressure state, and the liquid in the pump cavity A41 is discharged outward through the waste outlet. During this process, it is necessary to detect the pressure detection sensor A17, set the pressure threshold, and control the driving speed of the motor A20 to prevent the pressure in the hydraulic cylinder A18 from exceeding the threshold, thereby preventing the air-controlled on-off valve C10 / air-controlled on-off valve D11 and the air-controlled on-off valve F13 from leaking due to excessive pressure.

[0069] Pumping out the liquid from the pump cavity: close the air-controlled on-off valve D11 between the filter 15 and the pump cavity A16, and the air-controlled on-off valve E12 between the pump cavity A16 and the waste outlet, and open the air-controlled on-off valve F13 between the pump cavity A16 and the nozzle 29; the motor A20 drives the screw A19 to rotate, pressurizing the hydraulic oil in the hydraulic cylinder A18 to the hydraulic cavity A39, and the pump cavity A41 is in a positive pressure state. The liquid in the pump cavity A41 is quantitatively pumped out through the nozzle 29; during the process, it is necessary to detect the pressure detection sensor A17, set the pressure threshold, and control the driving speed of the motor A20 to prevent the pressure in the hydraulic cylinder A18 from exceeding the threshold, so as to prevent the air-controlled on-off valve D11 and the air-controlled on-off valve E12 from leaking due to excessive pressure.

[0070] After the quantitative liquid pumping is completed, the liquid in the pump cavity is also sucked back, that is, Figure 9As shown, the air-controlled on-off valve D11 between the filter 15 and the pump chamber A16 and the air-controlled on-off valve E12 between the pump chamber A16 and the waste outlet are closed, and the air-controlled on-off valve F13 between the pump chamber A16 and the nozzle 29 is opened. The motor A20 drives the screw A19 to rotate, and the hydraulic oil in the hydraulic chamber A39 is sucked back into the hydraulic cylinder A18. The pump liquid chamber A41 is in a negative pressure state, and the liquid remaining at the nozzle 29 is reversely sucked back into the pump liquid chamber A41. During the process, it is necessary to detect the pressure detection sensor A17, set the pressure threshold, and control the driving speed of the motor A20 to avoid cavitation in the hydraulic pipeline A38 due to too low pressure. At the same time, the rotation angle of the motor A20 is controlled to control the back-suction amount.

[0071] In addition, it also includes the self-cleaning of the pump body, that is,

[0072] Step A, after completing multiple aspiration and discharge of liquid from the aspiration chamber, perform a single aspiration of the aspiration chamber, and then connect the liquid inlet to the liquid outlet;

[0073] Step B, performing liquid discharge from the pump cavity;

[0074] Step C, simultaneously pumping out the liquid from the pump cavity and absorbing the liquid from the suction cavity;

[0075] Step D, simultaneously performing liquid aspiration in the pump chamber and liquid discharge in the aspiration chamber;

[0076] Steps A to D are executed cyclically to achieve self-cleaning of the pump body through the filter 15 .

[0077] In this embodiment, the liquid sucked through the liquid inlet may be photoresist liquid.

[0078] Example 2

[0079] like Figure 4 、 Figure 7 and Figure 8As shown, the quantitative liquid delivery device of this embodiment includes a liquid metering pump, which has a mutually independent pump chamber B21 and a pump chamber A16. A filter 15 is provided on the pipeline between the pump chamber B21 and the pump chamber A16; the pump chamber B21 is separated into a mutually independent hydraulic chamber B43 and a pump liquid chamber B45 by an isolation membrane B44, and the pump chamber A16 is separated into a mutually independent hydraulic chamber A39 and a pump liquid chamber A41 by an isolation membrane A40. The pump liquid chamber B45 is connected to the liquid inlet and the inlet of the filter 15 respectively through pipelines. The pump liquid chamber A41 is connected to an outlet of the filter 15 through a pipeline, and the two branches of the pump liquid chamber A41 through another pipeline are respectively connected to the waste outlet and the nozzle 29, and the other outlet of the filter 15 is connected to the waste outlet through a pipeline; the pipeline between the pump chamber B21 and the liquid inlet, the pipeline between the pump chamber B21 and the filter 15, the pipeline between the filter 15 and the pump chamber A16, the pipeline between the pump chamber A16 and the waste outlet, the pipeline between the pump chamber A16 and the nozzle 29, and the pipeline between the filter 15 and the waste outlet The pipelines are respectively provided with air-controlled on-off valves, and each air-controlled on-off valve is controlled by the connected three-way solenoid valve. That is, the pipeline between the pump chamber B21 and the liquid inlet is provided with an air-controlled on-off valve A8, and the air-controlled on-off valve A8 is controlled by the connected three-way solenoid valve B2. The pipeline between the pump chamber B21 and the filter 15 is provided with an air-controlled on-off valve B9, and the air-controlled on-off valve B9 is controlled by the connected three-way solenoid valve C3. The pipeline between the filter 15 and the waste outlet is provided with an air-controlled on-off valve C10, and the air-controlled on-off valve C10 is controlled by the connected three-way solenoid valve C3. The connected three-way solenoid valve D4 controls the on / off switch. The pipeline between the filter 15 and the pump chamber A16 is equipped with an air-controlled on / off valve D11, which is controlled by the connected three-way solenoid valve E5. The pipeline between the pump chamber A16 and the waste outlet is equipped with an air-controlled on / off valve E12, which is controlled by the connected three-way solenoid valve F6. The pipeline between the pump chamber A16 and the nozzle 29 is equipped with an air-controlled on / off valve F13, which is controlled by the connected three-way solenoid valve G7. Each three-way solenoid valve has two air source ports, one for compressed air and one for vacuum. Specifically, one air source port of each of the three-way solenoid valves B2 through G7 is connected to compressed air, while the other air source ports of each of the three-way solenoid valves B2 through G7 are connected to vacuum. In this embodiment, a pressure detection sensor D27 is provided on the pipeline connecting the compressed air and the gas source port, and a pressure detection sensor C26 is provided on the pipeline connecting the vacuum and the gas source port. The pressure detection sensor C26 and the pressure detection sensor D27 ensure that the device can operate correctly.

[0080] The hydraulic chamber A39 of the pump chamber A16 is connected to the hydraulic drive mechanism A through a hydraulic pipeline A38. The hydraulic drive mechanism A of this embodiment includes a hydraulic cylinder A18, a screw A19 and a motor A20. The hydraulic chamber A39 is connected to the interior of the hydraulic cylinder A18 through a hydraulic pipeline A38; the screw A19 is rotatably installed on the cylinder body of the hydraulic cylinder A18, and the motor A20 is fixed on the cylinder body of the hydraulic cylinder A18. One end of the screw A19 is connected to the output end of the motor A20, and the other end of the screw A19 is threadedly connected to the piston inside the hydraulic cylinder A18. The motor A20 drives the screw A19 to rotate, thereby driving the piston threadedly connected to the screw A19 to move back and forth, thereby pressing the hydraulic oil in the hydraulic cylinder A18 to the hydraulic chamber A39 or sucking the hydraulic oil from the hydraulic chamber A39 back to the hydraulic chamber A39; a pressure detection sensor A17 for detecting internal pressure is installed on the hydraulic cylinder A18.

[0081] The hydraulic chamber B43 of the pump chamber B21 is connected to the hydraulic drive mechanism B through a hydraulic pipeline B42. The hydraulic drive mechanism B of this embodiment includes a hydraulic cylinder B23, a screw B24 and a motor B25. The hydraulic chamber B43 is connected to the interior of the hydraulic cylinder B23 through a hydraulic pipeline B42; the screw B24 is rotatably installed on the cylinder body of the hydraulic cylinder B23, and the motor B25 is fixed on the cylinder body of the hydraulic cylinder B23. One end of the screw B24 is connected to the output end of the motor B25, and the other end of the screw B24 is threadedly connected to the piston inside the hydraulic cylinder B23. The motor B25 drives the screw B24 to rotate, thereby driving the piston threadedly connected to the screw B24 to move back and forth, thereby pressing the hydraulic oil in the hydraulic cylinder B23 to the hydraulic chamber B43 or sucking the hydraulic oil from the hydraulic chamber B43 back to the hydraulic cylinder B23; a pressure detection sensor B22 for detecting internal pressure is installed on the hydraulic cylinder B23.

[0082] In this embodiment, pressure detection sensor A17, pressure detection sensor B22, pressure detection sensor C26, pressure detection sensor D27, motor A20, and motor B25 are each connected to a control system. Pressure detection sensor A17, pressure detection sensor B22, pressure detection sensor C26, and pressure detection sensor D27 transmit detected signals to the control system, which then controls the drive speeds of motors A20 and B25, respectively. The control system of this embodiment is conventional technology and will not be described in detail here.

[0083] The method for using the quantitative liquid delivery device with purification function in this embodiment includes:

[0084] Liquid suction in the liquid suction chamber: Open the air-controlled on-off valve A8 between the pump chamber B21 and the liquid inlet, and close the air-controlled on-off valve B9 between the pump chamber B21 and the filter 15; the motor B25 drives the screw B24 to rotate, sucking the hydraulic oil in the hydraulic chamber B43 back into the hydraulic cylinder B23 in the hydraulic drive mechanism B. The pump liquid chamber B45 is in a negative pressure state, and liquid is sucked into the pump liquid chamber B45 from the liquid inlet; during the liquid suction process, it is necessary to detect the pressure detection sensor B22, set the pressure threshold, and control the driving speed of the motor B25 to prevent the pressure in the hydraulic cylinder B23 from falling below the threshold;

[0085] Discharge of liquid from the suction chamber: Close the air-controlled on-off valve A8 between the pump chamber B21 and the liquid inlet, and the air-controlled on-off valve D11 between the filter 15 and the pump chamber A16. Open the air-controlled on-off valve B9 between the pump chamber B21 and the filter 15, and the air-controlled on-off valve C10 between the filter 15 and the waste outlet. The motor B25 drives the screw B24 to rotate, pressing the hydraulic oil in the hydraulic cylinder B23 into the hydraulic chamber B43. The pump liquid chamber B45 is in a positive pressure state, and the liquid in the pump liquid chamber B45 is discharged outward through the inlet and another outlet of the filter 15 and the waste outlet. During the process, it is necessary to detect the pressure detection sensor B22, set the pressure threshold, and control the driving speed of the motor B25 to prevent the pressure in the hydraulic cylinder B23 from falling below the threshold, so as to prevent the air-controlled on-off valve A8 and the air-controlled on-off valve D11 from leaking due to excessive pressure.

[0086] Liquid is sucked from the pump cavity: the air-controlled on-off valve A8 between the pump cavity B21 and the liquid inlet, the air-controlled on-off valve C10 between the filter 15 and the waste outlet, the air-controlled on-off valve E12 between the pump cavity A16 and the waste outlet, and the air-controlled on-off valve F13 between the pump cavity A16 and the nozzle 29 are all closed, and the air-controlled on-off valve B9 between the pump cavity B21 and the filter 15, and the air-controlled on-off valve D11 between the filter 15 and the pump cavity A16 are all opened; the motor B25 drives the screw B24 to rotate, pressurizing the hydraulic oil in the hydraulic cylinder B23 to the hydraulic cavity B43, and the motor A20 drives the screw A19 to rotate, sucking the hydraulic oil from the hydraulic cavity A39 back to the hydraulic drive mechanism A In the hydraulic cylinder A18; the pump liquid chamber B45 is in a positive pressure state, and the liquid in the pump liquid chamber B45 enters the pump liquid chamber A41 through the inlet and an outlet of the filter 15; during the process, it is necessary to detect the pressure detection sensor B22, set the pressure threshold, and control the driving speed of the motor B25 to prevent the pressure in the hydraulic cylinder B23 from being lower than the threshold, so as to prevent the air-controlled on-off valve A8 and the air-controlled on-off valve D11 from leaking due to excessive pressure; at the same time, it is necessary to detect the pressure detection sensor A17, set the pressure threshold, and control the driving speed of the motor A20 to prevent the pressure in the hydraulic cylinder A18 from being lower than the threshold, so as to prevent cavitation in the hydraulic pipeline A38 due to excessively low pressure;

[0087] Liquid discharge from the pump cavity: Close the air-controlled on-off valve C10 between the filter 15 and the waste outlet, the air-controlled on-off valve D11 between the filter 15 and the pump cavity A16, and the air-controlled on-off valve F13 between the pump cavity A16 and the nozzle 29. Open the air-controlled on-off valve E12 between the pump cavity A16 and the waste outlet. The motor A20 drives the screw A19 to rotate, pressing the hydraulic oil in the hydraulic cylinder A18 into the hydraulic cavity A39. The pump cavity A41 is in a positive pressure state, and the liquid in the pump cavity A41 is discharged outward through the waste outlet. During this process, it is necessary to detect the pressure detection sensor A17, set the pressure threshold, and control the driving speed of the motor A20 to prevent the pressure in the hydraulic cylinder A18 from exceeding the threshold, thereby preventing the air-controlled on-off valve C10 / air-controlled on-off valve D11 and the air-controlled on-off valve F13 from leaking due to excessive pressure.

[0088] Pumping out the liquid from the pump cavity: close the air-controlled on-off valve D11 between the filter 15 and the pump cavity A16, and the air-controlled on-off valve E12 between the pump cavity A16 and the waste outlet, and open the air-controlled on-off valve F13 between the pump cavity A16 and the nozzle 29; the motor A20 drives the screw A19 to rotate, pressurizing the hydraulic oil in the hydraulic cylinder A18 to the hydraulic cavity A39, and the pump cavity A41 is in a positive pressure state. The liquid in the pump cavity A41 is quantitatively pumped out through the nozzle 29; during the process, it is necessary to detect the pressure detection sensor A17, set the pressure threshold, and control the driving speed of the motor A20 to prevent the pressure in the hydraulic cylinder A18 from exceeding the threshold, so as to prevent the air-controlled on-off valve D11 and the air-controlled on-off valve E12 from leaking due to excessive pressure.

[0089] After the quantitative liquid pumping is completed, the liquid in the pump cavity A is also sucked back, that is, Figure 9 As shown, the air-controlled on-off valve D11 between the filter 15 and the pump chamber A16 and the air-controlled on-off valve E12 between the pump chamber A16 and the waste outlet are closed, and the air-controlled on-off valve F13 between the pump chamber A16 and the nozzle 29 is opened. The motor A20 drives the screw A19 to rotate, and the hydraulic oil in the hydraulic chamber A39 is sucked back into the hydraulic cylinder A18. The pump liquid chamber A41 is in a negative pressure state, and the liquid remaining at the nozzle 29 is reversely sucked back into the pump liquid chamber A41. During the process, it is necessary to detect the pressure detection sensor A17, set the pressure threshold, and control the driving speed of the motor A20 to avoid cavitation in the hydraulic pipeline A38 due to too low pressure. At the same time, the rotation angle of the motor A20 is controlled to control the back-suction amount.

[0090] In addition, it also includes the self-cleaning of the pump body, that is,

[0091] Step A, after completing multiple aspiration and discharge of liquid from the aspiration chamber, perform a single aspiration of the aspiration chamber, and then connect the liquid inlet to the liquid outlet;

[0092] Step B, performing liquid discharge from the pump cavity;

[0093] Step C, liquid pumping chamber liquid pumping and liquid suction chamber liquid suction are performed simultaneously;

[0094] Step D, liquid pumping chamber liquid suction and liquid suction chamber liquid pumping are performed simultaneously.

[0095] Steps A to D are performed in a cycle, and the self-cleaning of the pump body is realized through the filter 15.

[0096] The liquid sucked by the liquid inlet of the embodiment can be photoresist liquid.

Claims

1. A quantitative liquid delivery device with a purification function, comprising a liquid quantitative pump, characterized in that: The liquid metering pump comprises a pump chamber C (14) and a pump chamber A (16) which are independent of each other. A filter (15) is provided on the pipeline between the pump chamber C (14) and the pump chamber A (16). The pump chamber C (14) is divided into an air pressure chamber (47) and a pump liquid chamber C (49) which are independent of each other by an isolation membrane C (48). The pump chamber A (16) is divided into a hydraulic chamber A (39) and a pump liquid chamber A (41) which are independent of each other by an isolation membrane A (40). The pump liquid chamber C (49) is communicated with a liquid inlet and an inlet of the filter (15) respectively through pipelines. The pump liquid chamber A (41) is communicated with an outlet of the filter (15) through a pipeline. The pump liquid chamber A (41) is communicated with a waste outlet and a nozzle (29) respectively through two branches branched from another pipeline. Another outlet of the filter (15) is connected to the waste outlet through a pipeline; the pipeline between the pump chamber C (14) and the liquid inlet, the pipeline between the pump chamber C (14) and the filter (15), the pipeline between the filter (15) and the pump chamber A (16), the pipeline between the pump chamber A (16) and the waste outlet, the pipeline between the pump chamber A (16) and the nozzle (29), and the pipeline between the filter (15) and the waste outlet are respectively provided with air-controlled on-off valves, each of the air-controlled on-off valves is controlled to switch by the connected three-way solenoid valve, the pneumatic chamber (47) is connected to the three-way solenoid valve through the pneumatic pipeline (46), and each of the three-way solenoid valves has two air source ports, which are respectively connected to compressed air and vacuum; the hydraulic chamber A (39) is connected to the hydraulic drive mechanism through the hydraulic pipeline A (38).

2. The quantitative liquid delivery device with purification function according to claim 1, characterized in that: The hydraulic drive mechanism includes a hydraulic cylinder A (18), a screw A (19) and a motor A (20). The hydraulic chamber A (39) is connected to the interior of the hydraulic cylinder A (18) through a hydraulic pipeline A (38). The screw A (19) is rotatably mounted on the cylinder body of the hydraulic cylinder A (18). The motor A (20) is fixed on the cylinder body of the hydraulic cylinder A (18). One end of the screw A (19) is connected to the output end of the motor A (20). The other end of the screw A (19) is threadedly connected to the piston inside the hydraulic cylinder A (18). The motor A (20) drives the screw A (19) to rotate, thereby driving the piston threadedly connected to the screw A (19) to move back and forth, thereby pressing the hydraulic oil in the hydraulic cylinder A (18) into the hydraulic chamber A (39) or sucking the hydraulic oil from the hydraulic chamber A (39) back into the hydraulic chamber A (39). A pressure detection sensor A (17) for detecting internal pressure is installed on the hydraulic cylinder A (18).

3. A method for delivering a quantitative liquid delivery device with a purification function according to claim 1 or 2, characterized in that: include Liquid suction in the liquid suction chamber: the three-way solenoid valve connected to the air pressure chamber (47) is switched to vacuum, the air-controlled on-off valve between the pump chamber C (14) and the liquid inlet is opened, the air-controlled on-off valve between the pump chamber C (14) and the filter (15) is closed, the pump liquid chamber C (49) is in a negative pressure state, and liquid is sucked from the liquid inlet into the pump liquid chamber C (49); Discharging the liquid from the suction chamber: the air-controlled on-off valve between the pump chamber C (14) and the liquid inlet, and the air-controlled on-off valve between the filter (15) and the pump chamber A (16) are all closed, the air-controlled on-off valve between the pump chamber C (14) and the filter (15), and the air-controlled on-off valve between the filter (15) and the waste outlet are all opened, and the three-way solenoid valve connected to the pump chamber C (14) is switched to compressed air, the pump liquid chamber C (49) is in a positive pressure state, and the liquid in the pump liquid chamber C (49) is discharged outward through the inlet and another outlet of the filter (15) and the waste outlet; The pump liquid chamber sucks liquid: the air-controlled on-off valve between the pump chamber C (14) and the liquid inlet, the air-controlled on-off valve between the filter (15) and the waste outlet, the air-controlled on-off valve between the pump chamber A (16) and the waste outlet, and the air-controlled on-off valve between the pump chamber A (16) and the nozzle (29) are all closed, and the air-controlled on-off valve between the pump chamber C (14) and the filter (15), and the air-controlled on-off valve between the filter (15) and the pump chamber A (16) are all opened; the hydraulic drive mechanism sucks the hydraulic oil from the hydraulic chamber A (39) back into the hydraulic cylinder A (18) in the hydraulic drive mechanism, switches the three-way solenoid valve connected to the air pressure chamber (47) to compressed air, and the pump liquid chamber C (49) is in a positive pressure state. The liquid in the pump liquid chamber C (49) enters the pump liquid chamber A (41) through the inlet and an outlet of the filter (15); Liquid discharge from the pump liquid chamber: the air-controlled on-off valve between the filter (15) and the waste outlet, the air-controlled on-off valve between the filter (15) and the pump chamber A (16), and the air-controlled on-off valve between the pump chamber A (16) and the nozzle (29) are all closed, and the air-controlled on-off valve between the pump chamber A (16) and the waste outlet is opened, and the hydraulic drive mechanism pressurizes the hydraulic oil in the hydraulic cylinder A (18) into the hydraulic chamber A (39), and the pump liquid chamber A (41) is in a positive pressure state, and the liquid in the pump liquid chamber A (41) is discharged outward through the waste outlet; Pumping out the liquid from the pump liquid chamber: the air-controlled on-off valve between the filter (15) and the pump chamber A (16), and the air-controlled on-off valve between the pump chamber A (16) and the waste outlet are closed, and the air-controlled on-off valve between the pump chamber A (16) and the nozzle (29) is opened; the hydraulic drive mechanism presses the hydraulic oil in the hydraulic cylinder A (18) into the hydraulic chamber A (39), the pump liquid chamber A (41) is in a positive pressure state, and the liquid in the pump liquid chamber A (41) is quantitatively pumped out through the nozzle (29).

4. The conveying method according to claim 3, characterized in that: After the quantitative liquid pumping is completed, the pump liquid chamber liquid is also sucked back, that is, the air-controlled on-off valve between the filter (15) and the pump chamber A (16) and the air-controlled on-off valve between the pump chamber A (16) and the waste outlet are closed, and the air-controlled on-off valve between the pump chamber A (16) and the nozzle (29) is opened. The hydraulic drive mechanism sucks the hydraulic oil in the hydraulic chamber A (39) back into the hydraulic cylinder A (18), and the pump liquid chamber A (41) is in a negative pressure state. The liquid remaining at the nozzle (29) is reversely sucked back into the pump liquid chamber A (41).

5. The conveying method according to claim 3, characterized in that: It also includes self-cleaning of the pump body, i.e. Step A, after completing multiple aspiration and discharge of liquid from the aspiration chamber, perform a single aspiration of the aspiration chamber, and then connect the liquid inlet to the liquid outlet; Step B, performing liquid discharge from the pump cavity; Step C, simultaneously pumping out the liquid from the pump cavity and absorbing the liquid from the suction cavity; Step D, simultaneously performing liquid aspiration in the pump chamber and liquid discharge in the aspiration chamber; Steps A to D are executed cyclically, and the pump body is self-cleaned through the filter (15).

6. A quantitative liquid delivery device with a purification function, comprising a liquid quantitative pump, characterized in that: The liquid metering pump comprises a pump chamber B (21) and a pump chamber A (16) which are independent of each other. A filter (15) is provided on the pipeline between the pump chamber B (21) and the pump chamber A (16). The pump chamber B (21) is divided into a hydraulic chamber B (43) and a pump liquid chamber B (45) which are independent of each other by an isolation membrane B (44). The pump chamber A (16) is divided into a hydraulic chamber A (39) and a pump liquid chamber A (41) which are independent of each other by an isolation membrane A (40). The pump liquid chamber B (45) is communicated with a liquid inlet and an inlet of the filter (15) respectively through pipelines. The pump liquid chamber A (41) is communicated with an outlet of the filter (15) through a pipeline. The pump liquid chamber A (41) is communicated with a waste outlet and a nozzle (29) respectively through two branches branched from another pipeline. Another outlet of the device (15) is connected to the waste outlet through a pipeline; the pipeline between the pump chamber B (21) and the liquid inlet, the pipeline between the pump chamber B (21) and the filter (15), the pipeline between the filter (15) and the pump chamber A (16), the pipeline between the pump chamber A (16) and the waste outlet, the pipeline between the pump chamber A (16) and the nozzle (29), and the pipeline between the filter (15) and the waste outlet are respectively provided with air-controlled on-off valves, each of the air-controlled on-off valves is controlled by the connected three-way solenoid valve, and each of the three-way solenoid valves has two air source ports, which are connected to compressed air and vacuum respectively; the hydraulic chamber A (39) is connected to the hydraulic drive mechanism A through the hydraulic pipeline A (38), and the hydraulic chamber B (43) is connected to the hydraulic drive mechanism B through the hydraulic pipeline B (42).

7. The quantitative liquid delivery device with purification function according to claim 6, characterized in that: The hydraulic drive mechanism A comprises a hydraulic cylinder A (18), a screw A (19) and a motor A (20), wherein the hydraulic chamber A (39) is connected to the interior of the hydraulic cylinder A (18) through a hydraulic pipeline A (38); the screw A (19) is rotatably mounted on the cylinder body of the hydraulic cylinder A (18), the motor A (20) is fixed on the cylinder body of the hydraulic cylinder A (18), one end of the screw A (19) is connected to the output end of the motor A (20), and the screw A (19) is connected to the output end of the motor A (20). The other end is threadedly connected to the piston inside the hydraulic cylinder A (18), and the motor A (20) drives the screw A (19) to rotate, thereby driving the piston threadedly connected to the screw A (19) to move back and forth, thereby pressing the hydraulic oil in the hydraulic cylinder A (18) into the hydraulic chamber A (39) or sucking the hydraulic oil from the hydraulic chamber A (39) back into the hydraulic cylinder A (18); a pressure detection sensor A (17) for detecting internal pressure is installed on the hydraulic cylinder A (18); The hydraulic drive mechanism B comprises a hydraulic cylinder B (23), a screw B (24) and a motor B (25). The hydraulic chamber B (43) is connected to the interior of the hydraulic cylinder B (23) through a hydraulic pipeline B (42). The screw B (24) is rotatably mounted on the cylinder body of the hydraulic cylinder B (23). The motor B (25) is fixed on the cylinder body of the hydraulic cylinder B (23). One end of the screw B (24) is connected to the output end of the motor B (25). The screw B (24) The other end of the screw is threadedly connected to the piston inside the hydraulic cylinder B (23), and the motor B (25) drives the screw B (24) to rotate, thereby driving the piston threadedly connected to the screw B (24) to move back and forth, thereby pressing the hydraulic oil in the hydraulic cylinder B (23) into the hydraulic chamber B (43) or sucking the hydraulic oil from the hydraulic chamber B (43) back to the hydraulic cylinder B (23); a pressure detection sensor B (22) for detecting the internal pressure is installed on the hydraulic cylinder B (23).

8. A method for delivering a quantitative liquid delivery device with a purification function according to claim 6 or 7, characterized in that: include Liquid suction in the liquid suction chamber: the air-controlled on-off valve between the pump chamber B (21) and the liquid inlet is opened, and the air-controlled on-off valve between the pump chamber B (21) and the filter (15) is closed; the hydraulic oil in the hydraulic chamber B (43) is sucked back into the hydraulic cylinder B (23) in the hydraulic driving mechanism B through the hydraulic driving mechanism B, the pump liquid chamber B (45) is in a negative pressure state, and liquid is sucked into the pump liquid chamber B (45) from the liquid inlet; Discharging the liquid from the suction chamber: the air-controlled on-off valve between the pump chamber B (21) and the liquid inlet, and the air-controlled on-off valve between the filter (15) and the pump chamber A (16) are all closed, and the air-controlled on-off valve between the pump chamber B (21) and the filter (15), and the air-controlled on-off valve between the filter (15) and the waste outlet are all opened, and the hydraulic oil in the hydraulic cylinder B (23) is pressed into the hydraulic chamber B (43) through the hydraulic drive mechanism B, and the pump liquid chamber B (45) is in a positive pressure state, and the liquid in the pump liquid chamber B (45) is discharged outward through the inlet and another outlet of the filter (15) and the waste outlet; Pump liquid chamber suction: the air-controlled on-off valve between the pump chamber B (21) and the liquid inlet, the air-controlled on-off valve between the filter (15) and the waste outlet, the air-controlled on-off valve between the pump chamber A (16) and the waste outlet, and the air-controlled on-off valve between the pump chamber A (16) and the nozzle (29) are all closed, and the air-controlled on-off valve between the pump chamber B (21) and the filter (15), and the air-controlled on-off valve between the filter (15) and the pump chamber A (16) are all opened; the hydraulic drive mechanism B presses the hydraulic oil in the hydraulic cylinder B (23) into the hydraulic chamber B (43), and the hydraulic drive mechanism A sucks the hydraulic oil from the hydraulic chamber A (39) back into the hydraulic cylinder A (18) in the hydraulic drive mechanism A; the pump liquid chamber B (45) is in a positive pressure state, and the liquid in the pump liquid chamber B (45) enters the pump liquid chamber A (41) through the inlet and an outlet of the filter (15); Liquid discharge from the pump liquid chamber: the air-controlled on-off valve between the filter (15) and the waste outlet, the air-controlled on-off valve between the filter (15) and the pump chamber A (16), and the air-controlled on-off valve between the pump chamber A (16) and the nozzle (29) are all closed, and the air-controlled on-off valve between the pump chamber A (16) and the waste outlet is opened, and the hydraulic drive mechanism A pressurizes the hydraulic oil in the hydraulic cylinder A (18) into the hydraulic chamber A (39), and the pump liquid chamber A (41) is in a positive pressure state, and the liquid in the pump liquid chamber A (41) is discharged outward through the waste outlet; Pumping out the liquid from the pump liquid chamber: the air-controlled on-off valve between the filter (15) and the pump chamber A (16), and the air-controlled on-off valve between the pump chamber A (16) and the waste outlet are closed, and the air-controlled on-off valve between the pump chamber A (16) and the nozzle (29) is opened; the hydraulic drive mechanism A pressurizes the hydraulic oil in the hydraulic cylinder A (18) into the hydraulic chamber A (39), and the pump liquid chamber A (41) is in a positive pressure state, and the liquid in the pump liquid chamber A (41) is quantitatively pumped out through the nozzle (29).

9. The conveying method according to claim 8, characterized in that: After the quantitative liquid pumping is completed, the pump liquid chamber A also includes liquid back suction, that is, the air-controlled on-off valve between the filter (15) and the pump chamber A (16), and the air-controlled on-off valve between the pump chamber A (16) and the waste outlet are closed, and the air-controlled on-off valve between the pump chamber A (16) and the nozzle (29) is opened. The hydraulic drive mechanism A sucks the hydraulic oil in the hydraulic chamber A (39) back into the hydraulic cylinder A (18), and the pump liquid chamber A (41) is in a negative pressure state. The liquid remaining at the nozzle (29) is reversely sucked back into the pump liquid chamber A (41).

10. The conveying method according to claim 8, characterized in that: It also includes self-cleaning of the pump body, i.e. Step A, after completing multiple aspiration and discharge of liquid from the aspiration chamber, perform a single aspiration of the aspiration chamber, and then connect the liquid inlet to the liquid outlet; Step B, performing liquid discharge from the pump cavity; Step C, simultaneously pumping out the liquid from the pump cavity and absorbing the liquid from the suction cavity; Step D, simultaneously performing liquid aspiration in the pump chamber and liquid discharge in the aspiration chamber; Steps A to D are executed cyclically, and the pump body is self-cleaned through the filter (15).

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