Semiconductor ultra-pure fluid integrated control module and manufacturing method thereof

Abstract

The invention relates to the technical field of valves, in particular to a semiconductor ultra-pure fluid integrated control module and a manufacturing method thereof.The semiconductor ultra-pure fluid integrated control module comprises a control unit, a sealing unit, a runner cavity and a sealing seat; the control units are arranged on the valve seat in a linear array mode, and two rows of control units are symmetrically arranged on the two sides of the distribution channel. The sealing unit is connected with the control unit; the flow channel cavities are symmetrically formed in the valve seat and are connected with the distribution channel; the sealing seat is arranged in the runner cavity; line sealing is improved to be plane sealing matched with rigid and flexible PTFE materials so as to enhance abrasion resistance and fatigue resistance, the sliding labyrinth sealing plate, the diaphragm block and the labyrinth sealing bag jointly form multi-layer redundant sealing, meanwhile, the drainage hole communicated with the labyrinth sealing bag is designed, and when sealing leakage of the diaphragm block occurs, the sealing effect of the diaphragm block is improved. Leaked fluid enters the labyrinth sealing bag through the drainage hole, so that the labyrinth sealing bag is expanded, and pressure self-adaptive compensation sealing protection is formed; the problem that single-line sealing of the PTFE diaphragm valve is prone to abrasion, deformation and failure is solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of valves, in particular to a semiconductor ultra-high purity fluid integrated control module and a manufacturing method thereof. BACKGROUND

[0002] In the process of semiconductor manufacturing, precise and non-polluted control and transmission of process fluids such as high-purity chemicals and special gases are required to ensure the yield of semiconductor products. Valve assemblies used in semiconductor manufacturing processes must have good corrosion resistance, high sealing performance and ultra-high cleanliness.

[0003] In the process of semiconductor manufacturing, valves are used to realize functions such as liquid dispensing, liquid discharging, liquid feeding, flow control and liquid reversing. In order to more efficiently and simply control the feeding and transmission of chemical liquids, the prior art proposes to integrate multiple function valves into one assembly or system. The multi-channel integrated valve mainly integrates multiple valve units, uses independent or linked operation of each valve unit to realize system control and adjustment, and uses a diaphragm valve for each valve unit to realize on-off by contact control between the diaphragm and the annular valve seat. This sealing method belongs to single-line sealing. In order to ensure the sealing effect, the diaphragm needs to be pressed by increasing the driving force, and then the excessive closing pressure will cause permanent deformation and mechanical fatigue of the diaphragm, thereby shortening the effective life of the valve. In the process of semiconductor manufacturing, in order to ensure good chemical stability, low permeability, good heat resistance and non-adhesion, polytetrafluoroethylene (PTFE) material with excellent chemical inertness is usually used to make the valve body. The inherent softness and low mechanical strength of PTFE material make it more prone to wear and deformation during repeated cyclic loading and unloading, and the particles in the polishing liquid used in the semiconductor manufacturing process also cause wear on the surface of the diaphragm, further leading to sealing failure.

[0004] In view of the above, in order to overcome the above technical problems, the present application designs a semiconductor ultra-high purity fluid integrated control module and a manufacturing method thereof. SUMMARY

[0005] The present application provides a semiconductor ultra-high purity fluid integrated control module and a manufacturing method thereof, which solves the problem of easy wear and deformation failure of PTFE diaphragm valve single-line sealing. The line sealing is improved to flat sealing with rigid and flexible PTFE material combination to enhance wear resistance and fatigue resistance. A sliding labyrinth sealing plate is provided, which together with the diaphragm block and the labyrinth sealing capsule forms a multi-layer redundant sealing. A leakage hole communicating with the labyrinth sealing capsule is designed. When the diaphragm block leaks, the leaked fluid enters the labyrinth sealing capsule through the leakage hole, causing it to expand and form a pressure self-adaptive compensation sealing protection.

[0006] To achieve the above object, the present application provides the following technical solutions:

[0007] A semiconductor ultrahigh-purity fluid integrated control module, comprising a valve seat and a distribution channel, further comprising a control unit, a sealing unit, a flow channel cavity and a sealing seat; the control unit is linearly arrayed on the valve seat and symmetrically arranged with two rows on both sides of the distribution channel; the sealing unit is connected with the control unit, and the control unit moves upward or downward to drive the sealing unit to move upward or downward; the flow channel cavity is symmetrically arranged in the valve seat and connected with the distribution channel; the sealing seat is arranged in the flow channel cavity, and when the sealing unit leaks, fluid enters the sealing seat to make it expand to abut the inner ring of the sealing unit to form a pressure self-adaptive compensation sealing protection.

[0008] Preferably, the control unit comprises a valve body, a first air duct, a second air duct, a valve duct, a valve core and a return spring; the valve body is installed on the valve seat and linearly arrayed on the valve seat; the first air duct and the second air duct are respectively arranged in the upper part and the lower part of the valve body; the valve duct is arranged in the valve body; the valve core is slidably installed in the valve duct; and the return spring is connected between the valve core and the valve body.

[0009] In the above scheme, compressed air is introduced into the first air duct and the second air duct to drive the valve core to slide, when sealing and flow cutting is needed, compressed air is introduced into the first air duct to drive the valve core to slide downward against the elastic force of the return spring, at this time the valve core will drive the sealing unit to abut the sealing seat to form a sealing effect; when fluid flow is needed, compressed air is introduced into the second air duct to disconnect the first air duct, at this time the valve core will move upward under the action of the compressed air in the second air duct and the elastic force of the return spring, thereby driving the sealing unit to move upward to disconnect the contact with the sealing seat, and thus enabling the fluid to flow.

[0010] Preferably, the sealing unit comprises a diaphragm block, a sealing plate groove, a labyrinth sealing plate and a sealing plate disc spring; the diaphragm block is threadedly connected with the valve core; the sealing plate groove is arranged at the bottom of the diaphragm block; the labyrinth sealing plate is slidably installed in the sealing plate groove, and the lower part of the labyrinth sealing plate is provided with an inner labyrinth ring and an outer labyrinth ring; and the sealing plate disc spring is connected between the labyrinth sealing plate and the sealing plate groove.

[0011] In the above scheme, the multi-layer sealing structure is formed by the membrane block and the labyrinth sealing plate, and the leakage occurs only when all the multi-layer structures fail, which can improve the sealing effect. When one of the sealing surfaces is worn, the other sealing surfaces will still maintain the sealing effect. The labyrinth sealing plate can guide the fluid flowing into the failure position and dissipate energy, so that the impact force generated by the subsequent sealing layer is reduced, preventing the failure of the subsequent sealing layer. In addition, the sealing surface of the labyrinth sealing plate is the lower end surface of the inner and outer labyrinth rings, so the fluid entering the sliding position of the labyrinth sealing plate will not cause sealing failure, on the contrary, it can enhance the downward pressure of the labyrinth sealing plate, further improving the sealing reliability.

[0012] Preferably, the membrane block comprises an elastic part and a sealing part; the elastic part is connected with the valve channel; the sealing part is connected with the elastic part, the lower surface of the sealing part is a plane structure, the side wall is an arc structure, and the radius of the sealing part gradually increases in the downward axial direction.

[0013] In the above scheme, the plane sealing is used to replace the original line sealing of the diaphragm valve, which can further enhance the sealing effect. Compared with the form of line sealing, the face sealing increases the contact area, which can effectively prevent the crushing of the sealing surface, thereby reducing the possibility of sealing failure. In the sealing state, the elastic part will deform, and the downward bending arc formed at this time can guide the fluid, so that the fluid can flow downward. The side wall of the sealing part is an arc structure, and the radius of the lower end is large, which can form a downward pressure on the sealing part, further enhancing the sealing effect.

[0014] Preferably, the sealing seat comprises a fixed seat, a sealing ring, a sealing disc spring, a flow hole and a labyrinth sealing capsule; the fixed seat is connected with the flow channel cavity, the outer diameter of the fixed seat is equal to the outer diameter of the outer labyrinth ring, and the inner diameter of the fixed seat is equal to the inner diameter of the inner labyrinth ring; the sealing ring is installed on the fixed seat; the sealing disc spring is connected between the bottom of the fixed seat and the sealing ring; the flow hole is opened on the side wall of the top of the fixed seat; the labyrinth sealing capsule is connected with the top of the fixed seat, and the labyrinth sealing capsule is a hollow structure with a "C" shaped cross section.

[0015] In the above scheme, under the action of the sealing disc spring, on the one hand, the sealing disc spring is directly fixedly connected with the sealing ring, and the sealing ring is fixedly connected with the bottom of the fixed seat, which can form a completely sealed state, thereby preventing the fluid from leaking from the sliding position of the inner wall of the sealing ring. On the other hand, the sealing disc spring can push the sealing ring upward, thereby ensuring that the sealing ring and the sealing part can maintain a stable fitting state under the sealing state. Even if the sealing part moves up a small distance under unstable air pressure or fluid impact, the sealing disc spring can also push the sealing ring upward a small distance to ensure the fitting between the two, thereby ensuring the sealing property.

[0016] Preferably, the distribution channel comprises a main flow channel and a branch flow channel; the main flow channel is arranged in the center of the valve seat; the branch flow channel is arranged on the upper part of both sides of the main flow channel, and the cross section formed by the main flow channel and the branch flow channel is V-shaped, and the tail part of the branch flow channel is connected with the flow channel cavity.

[0017] In the above scheme, when the fluid enters the flow channel cavity through the branch flow channel, the fluid will first reach the upper part of the flow channel cavity under the guidance of the V-shaped structure, so as to avoid directly impacting the sealing position, reduce the fluid impact and fluid pressure at the sealing position, and further reduce the possibility of sealing failure, and cooperate with the structure that the lower surface of the sealing part is a planar structure, the side wall is an arc-shaped structure, and the radius of the sealing part gradually increases in the downward axial direction, so that the fluid downward pressure can effectively act on the sealing part, and the pressing effect of the sealing part is ensured.

[0018] Preferably, the leakage hole is a conical structure, and the radius of the leakage hole gradually decreases in the direction of the center of the fixed seat; the labyrinth sealing capsule is made of fluororubber.

[0019] In the above scheme, the leakage hole can guide the fluid to the labyrinth sealing capsule when leakage occurs, the fluid pressure will cause the labyrinth sealing capsule to expand, and a close-fitting effect with the bottom of the labyrinth sealing plate will be generated, so that leakage protection can be achieved, and the size of the sealing force is proportional to the leakage pressure, the larger the leakage pressure is, the more the labyrinth sealing capsule expands, the tighter the sealing is, and self-adaptive positive feedback is achieved.

[0020] A semiconductor ultrahigh-purity fluid integrated control module manufacturing method is suitable for any of the semiconductor ultrahigh-purity fluid integrated control modules, and specifically comprises:

[0021] S1: performing multiple stress relief annealing treatments on the PTFE material, and then standing in a constant temperature environment for more than two weeks to release the internal stress of the material;

[0022] S2: performing dry cutting without cutting fluid on the annealed and stood PTFE material in a ten-thousand-level dust-free room by using a numerical control machine tool, machining the valve seat, the control unit, the sealing unit and the sealing seat by using high-speed steel cutters, and machining the distribution channel and the flow channel cavity in the valve seat by using a diamond cutter;

[0023] S3: performing surface finishing treatment on the machined structures by using high-mesh ultra-fine sandpaper to remove micro burrs, and then performing multiple cleaning and drying treatments;

[0024] S4: assembling the valve seat, the control unit, the sealing unit and the sealing seat in the ten-thousand-level dust-free room.

[0025] Compared with the prior art, the semiconductor ultrahigh-purity fluid integrated control module manufacturing method has the following beneficial effects:

[0026] 1. This solution improves the traditional diaphragm valve's linear seal to a flat seal, significantly increasing the contact area between the diaphragm block and the fixed seat. This effectively disperses closing pressure, avoids stress concentration that can lead to seal surface damage, creep, and permanent deformation, and significantly improves the durability and wear resistance of the main seal. It also utilizes a combination of rigid and flexible materials: M112 flexible PTFE is used in the elastic portion to ensure excellent fatigue resistance, while M111 rigid PTFE is used in the sealing portion to ensure a smooth and wear-resistant contact surface, ensuring that the valve maintains excellent sealing performance even after millions of cycles.

[0027] 2. The present invention adopts a multi-layer sealing structure composed of diaphragm blocks and built-in sliding labyrinth sealing plates. Even if the main sealing surface fails due to wear or particulate matter, the subsequent inner labyrinth ring and outer labyrinth ring can still provide an effective sealing barrier. Leakage will not occur until all the multi-layer structures fail. At the same time, the labyrinth sealing plates can also guide and dissipate the energy of the leaked fluid, reducing the impact on the subsequent sealing layers, thereby significantly extending the effective service life and operational stability of the valve as a whole, and avoiding the risk of single-point sealing failure.

[0028] 3. The present invention provides a labyrinth sealing bag connected to the leakage hole. When the diaphragm block seal leaks, the leaking fluid will be automatically introduced into the labyrinth sealing bag. The pressure of the fluid itself will drive the labyrinth sealing bag to expand, making it fit tightly with related components, forming an active and reliable compensating seal. The sealing force is proportional to the leakage pressure, achieving an adaptive positive feedback effect of "the more it leaks, the tighter it becomes". It can automatically handle small leaks without external intervention, greatly improving the safety redundancy and sealing protection capabilities of the valve under harsh working conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0030] Figure 1 It is the overall structural diagram of the present invention;

[0031] Figure 2 Schematic diagram of the internal structure of the valve body of the present invention;

[0032] Figure 3 is a cross-sectional view of the present invention;

[0033] Figure 4 for Figure 3 A magnified view of the structure at center A;

[0034] Figure 5 for Figure 4 A magnified view of the structure at point B in the middle;

[0035] Figure 6 for Figure 5 A magnified view of the structure at point C in the middle;

[0036] Figure 7 This is a diagram of the sealing and shutoff state of the present invention;

[0037] Figure 8 This is a state diagram of the present invention when leaking;

[0038] Figure 9 It is a production flow chart of the present invention.

[0039] In the figure: 1. Valve seat; 2. Distribution channel; 21. Main channel; 22. Branch channel; 3. Control unit; 31. Valve body; 32. First air channel; 33. Second air channel; 34. Valve channel; 35. Valve core; 36. Return spring; 4. Sealing unit; 41. Diaphragm block; 411. Elastic part; 412. Sealing part; 42. Sealing plate groove; 43. Labyrinth sealing plate; 431. Inner labyrinth ring; 432. Outer labyrinth ring; 44. Sealing plate disc spring; 5. Flow channel cavity; 6. Sealing seat; 61. Fixed seat; 62. Sealing ring; 63. Sealing disc spring; 64. Leakage hole; 65. Labyrinth sealing bag. DETAILED DESCRIPTION

[0040] In order to better understand the above technical solution, the above technical solution will be described in detail below with reference to the accompanying drawings and specific implementation methods.

[0041] See also Figures 1 to 9 The present invention provides a semiconductor ultra-high purity fluid integrated control module and a manufacturing method thereof, and the technical solution is as follows:

[0042] As a specific embodiment of the present invention, refer to Figure 1 and Figure 2 , a semiconductor ultra-high purity fluid integrated control module, including a valve seat 1 and a distribution channel 2, and also including a control unit 3, a sealing unit 4, a flow channel cavity 5 and a sealing seat 6; the control unit 3 is arranged in a linear array on the valve seat 1, and two rows are symmetrically arranged on both sides of the distribution channel 2; the sealing unit 4 is connected to the control unit 3, and when the control unit 3 moves up or down, it drives the sealing unit 4 to move up or down together; the flow channel cavity 5 is symmetrically opened in the valve seat 1 and connected to the distribution channel 2; the sealing seat 6 is arranged in the flow channel cavity 5, and when the sealing unit 4 leaks, the fluid enters the sealing seat 6, causing it to expand and abut against the inner ring of the sealing unit 4 to form a pressure-adaptive compensating sealing protection.

[0043] As a specific embodiment of the present application, with reference to Figure 2 , Figure 3 and Figure 7 , the control unit 3 comprises a valve body 31, a first air passage 32, a second air passage 33, a valve passage 34, a valve core 35 and a return spring 36; the valve body 31 is installed on the valve seat 1 and arranged linearly on the valve seat 1; the first air passage 32 and the second air passage 33 are respectively formed in the upper and lower parts of the valve body 31; the valve passage 34 is formed in the valve body 31; the valve core 35 is slidingly installed in the valve passage 34; and the return spring 36 is connected between the valve core 35 and the valve body 31. By introducing compressed air into the first air passage 32 and the second air passage 33, the valve core 35 is driven to slide. When sealing and cutting off fluid is needed, compressed air is introduced into the first air passage 32 to drive the valve core 35 to slide downward against the elastic force of the return spring 36. At this time, the valve core 35 will drive the sealing unit 4 to abut against the sealing seat 6 to form a sealing effect. When fluid needs to flow, compressed air is introduced into the second air passage 33 to cut off the air supply of the first air passage 32. At this time, the valve core 35 will move upward under the action of the compressed air in the second air passage 33 and the elastic force of the return spring 36, thereby driving the sealing unit 4 to move upward and cut off the contact with the sealing seat 6, so that the fluid can flow.

[0044] As a specific embodiment of the present application, with reference to Figure 3 , Figure 4 and Figure 5 , the sealing unit 4 comprises a diaphragm block 41, a sealing plate groove 42, a labyrinth sealing plate 43 and a sealing plate disc spring 44; the diaphragm block 41 is threadedly connected with the valve core 35; the sealing plate groove 42 is formed in the bottom of the diaphragm block 41; the labyrinth sealing plate 43 is slidingly installed in the sealing plate groove 42, and the lower part of the labyrinth sealing plate 43 is provided with an inner labyrinth ring 431 and an outer labyrinth ring 432; and the sealing plate disc spring 44 is connected between the labyrinth sealing plate 43 and the sealing plate groove 42. The diaphragm block 41 and the labyrinth sealing plate 43 form a multi-layer sealing structure. Leakage will occur only when all the multi-layer structures fail, which can improve the sealing effect. When one of the sealing surfaces is worn, the other sealing surfaces will still maintain the sealing effect. The labyrinth sealing plate 43 can guide the fluid flowing into the failure position and dissipate energy, so as to reduce the impact force on the subsequent sealing layer and prevent the subsequent sealing layer from failing. In addition, the sealing surface of the labyrinth sealing plate 43 is the lower end surface of the inner labyrinth ring 431 and the outer labyrinth ring 432, so that the fluid entering the sliding position of the labyrinth sealing plate 43 will not cause sealing failure, on the contrary, the labyrinth sealing plate 43 can enhance the downward pressure to further improve the sealing reliability.

[0045] As a specific embodiment of the present application, with reference to Figure 4 and Figure 5The diaphragm block 41 comprises an elastic part 411 and a sealing part 412; the elastic part 411 is connected with the valve channel 34; the sealing part 412 is connected with the elastic part 411, the lower surface of the sealing part 412 is a plane structure, the side wall is an arc structure, and the radius of the sealing part 412 gradually increases in the direction of the axis downward. By using the plane sealing to replace the linear sealing of the original diaphragm valve, the sealing effect can be further enhanced, and compared with the form of linear sealing, the plane sealing increases the contact area, which can effectively prevent the crushing of the sealing surface, thereby reducing the possibility of sealing failure. In the sealing state, the elastic part 411 will be deformed, at this time, the downward bending arc formed can form a flow guiding effect on the fluid, so that the fluid can flow downward, and the side wall of the sealing part 412 is an arc structure, and the radius of the lower end is large, so that the fluid can form a downward pressure on the sealing part 412, further enhancing the sealing effect; the elastic part 411 adopts PTFE with a large gold mark of M112, the PTFE material with this mark is a flexible material, has excellent fatigue resistance, can realize millions of times of opening and closing deformation, and has good anti-creeper property, even if in the closed state for a long time, the elastic part 411 can also restore to the original state, the sealing part 412 adopts PTFE with a large gold mark of M111, has stronger rigidity, can ensure that the sealing surface is flat, wear-resistant and hard, and will not be crushed and deformed, thereby ensuring good sealing.

[0046] As a specific embodiment of the present application, reference is made to Figure 5 、 Figure 6 、 Figure 7 and Figure 8The sealing seat 6 includes a fixed seat 61, a sealing ring 62, a sealing disc spring 63, a leakage hole 64 and a labyrinth sealing bag 65; the fixed seat 61 is connected to the flow channel cavity 5, the outer diameter of the fixed seat 61 is equal to the outer diameter of the outer labyrinth ring 432, and the inner diameter of the fixed seat 61 is equal to the inner diameter of the inner labyrinth ring 431; the sealing ring 62 is installed on the fixed seat 61; the sealing disc spring 63 is connected between the bottom of the fixed seat 61 and the sealing ring 62; the leakage hole 64 is opened on the top side wall of the fixed seat 61; the labyrinth sealing bag 65 is connected to the top of the fixed seat 61, and the labyrinth sealing bag 65 is a hollow structure with a "C" cross-section that is connected to the leakage hole 64. Under the action of the sealing disc spring 63, on the one hand, since the sealing disc spring 63 is directly fixedly connected to the sealing ring 62 and the sealing ring 62 is fixedly connected to the bottom of the fixing seat 61, a completely sealed state can be formed, thereby preventing the fluid from leaking from the sliding position of the inner wall of the sealing ring 62. On the other hand, the sealing disc spring 63 can push the sealing ring 62 upward, thereby ensuring that the sealing ring 62 and the sealing part 412 can maintain a stable fit state in the sealed state. Even if the sealing part 412 moves up a short distance due to unstable air pressure or fluid impact, the sealing disc spring 63 can push the sealing ring 62 upward a short distance to ensure the fit between the two, thereby ensuring the sealing performance; when it is necessary to ensure that the lower surface of the sealing part 412 and the sealing ring 62 fit together during the processing, the sealing ring 62 can move downward a short distance under the action of pressure. At the same time, when the processing depth of the sealing plate groove 42 needs to ensure that the sealing ring 62 and the sealing part 412 fit together, the bottom of the inner labyrinth ring 431 and the outer labyrinth ring 432 at the bottom of the labyrinth sealing plate 43 can fit together with the upper surface of the fixing seat 61.

[0047] As a specific embodiment of the present invention, refer to Figure 3 and Figure 4 The distribution channel 2 includes a main channel 21 and a branch channel 22; the main channel 21 is opened at the center of the valve seat 1; the branch channel 22 is opened at the upper part of both sides of the main channel 21, and the cross-section formed with the main channel 21 is "V"-shaped, and the tail of the branch channel 22 is connected to the channel cavity 5. When the fluid enters the channel cavity 5 through the branch channel 22, it will first reach the upper position of the channel cavity 5 under the guidance of the "V"-shaped structure, and avoid directly impacting the sealing position, reducing the fluid impact and fluid pressure at the sealing position, thereby reducing the possibility of sealing failure, and can cooperate with the structure of "the lower surface of the sealing part 412 is a flat structure, the side wall is an arc structure, and the radius of the sealing part 412 gradually increases in the axial downward direction", so that the downward pressure of the fluid can effectively act on the sealing part 412, ensuring the compression effect of the sealing part 412.

[0048] As a specific embodiment of the present invention, refer to Figure 6 、 Figure 7 and Figure 8The leakage hole 64 is a conical structure, and the radius of the leakage hole 64 gradually decreases towards the center of the fixing base 61; the labyrinth sealing bag 65 is made of fluororubber. The leakage hole 64 can guide the fluid to the labyrinth sealing bag 65 when leakage occurs, and the fluid pressure will make the labyrinth sealing bag 65 expand and tightly fit the bottom of the labyrinth sealing plate 43, so as to realize leakage protection, and the size of the sealing force is proportional to the leakage pressure, the greater the leakage pressure, the more the labyrinth sealing bag 65 expands, the tighter the sealing, and the adaptive positive feedback is realized; the fluororubber material has high chemical inertness and fatigue resistance, and can resist most strong acids, strong bases, solvents and oxidizing agents in the semiconductor process, and when it is driven to expand by internal pressure, it can perfectly fill any microscopic scratches, pits or processing marks like a soft gasket, so as to form a high-airtightness surface seal.

[0049] As a specific embodiment of the present application, reference is made to Figure 9 A semiconductor ultrahigh-purity fluid integrated control module manufacturing method, suitable for any of the above-mentioned semiconductor ultrahigh-purity fluid integrated control modules, specifically comprising:

[0050] S1: The PTFE material is subjected to multiple stress relief annealing treatment, and then is placed in a constant temperature environment for more than two weeks to release the internal stress of the material;

[0051] S2: The PTFE material after annealing and standing is subjected to dry cutting without cutting fluid in a ten-thousand-level clean room using a numerical control machine tool, a high-speed steel cutter is used to process the valve seat 1, the control unit 3, the sealing unit 4 and the sealing seat 6, and a diamond cutter is used to process the distribution channel 2 and the flow passage cavity 5 in the valve seat 1;

[0052] S3: High-mesh ultra-fine sandpaper is used to perform surface finishing treatment on the processed structures to remove microscopic burrs, and then multiple cleaning and drying treatments are performed;

[0053] S4: The valve seat 1, the control unit 3, the sealing unit 4 and the sealing seat 6 are assembled in a ten-thousand-level clean room.

[0054] Working process: When the valve needs to be closed (sealed and shut off): the external control system introduces compressed air into the first air channel 32, and at the same time cuts off the ventilation of the second air channel 33. The compressed air enters the upper part of the valve body 31 and acts on the top of the valve core 35, generating a downward driving force. This driving force overcomes the upward preload of the return spring 36, pushing the valve core 35 to slide smoothly downward in the valve channel 34. Since the diaphragm block 41 in the sealing unit 4 is threadedly connected to the valve core 35, the downward sliding of the valve core 35 will drive the entire sealing unit 4 to move downward synchronously. Finally, the flat sealing surface below the sealing portion 412 of the diaphragm block 41 fits tightly with the sealing ring 62 on the fixed seat 61. In this process, the flexible deformation of the elastic portion 411 enables the sealing portion 412 to descend smoothly, forming a stable and reliable flat seal, thereby completely blocking the flow of fluid in the flow channel cavity 5 and completing the closing action of the valve.

[0055] When the valve needs to be opened (fluid circulation), the external control system introduces compressed air into the second air channel 33, while simultaneously disconnecting and exhausting the gas in the first air channel 32. The compressed air enters the lower portion of the valve body 31 and acts on the lower and middle portion of the valve core 35, generating an upward driving force. This upward pneumatic driving force, combined with the elastic force of the return spring 36 itself, pushes the valve core 35 upward to overcome frictional resistance. The upward movement of the valve core 35 also drives the sealing unit 4 upward, completely disengaging the sealing surface of the sealing portion 412 from the sealing ring 62, forming an open fluid channel between the two. At this point, the fluid can flow smoothly through the flow channel cavity 5, completing the valve opening action;

[0056] In the leakage state, when the sealing portion 412 and the sealing ring 62 produce tiny leakage due to long-term use or wear of grinding liquid particles, the leaked high-pressure fluid will be guided out through the leakage hole 64 opened on the top side wall of the fixed seat 61. The leakage hole 64 is designed to be a conical structure with a radius gradually decreasing toward the center of the circle, which can further pressurize the fluid, so that the leaked fluid is collected and guided into the labyrinth sealing bag 65 connected thereto. The labyrinth sealing bag 65 is made of highly elastic fluororubber material. When the hollow bag is filled with the introduced leakage fluid, the fluid pressure will cause it to expand rapidly. The expanded labyrinth sealing bag 65 will fit tightly to the bottom of the labyrinth sealing plate 43 to form a flexible, adaptive compensating seal. The greater the leakage pressure, the more the labyrinth sealing bag 65 expands, and the stronger the sealing force, thereby realizing intelligent adaptive positive feedback.

[0057] In the event that both the outer labyrinth ring 432 and the labyrinth sealing bag 65 fail, the leaked fluid will have its kinetic energy effectively dissipated in the tortuous sealing path formed by the outer labyrinth ring 432, the labyrinth sealing bag 65 and the inner labyrinth ring 431, and the pressure will be gradually attenuated to prevent most of the fluid from continuing to leak. Moreover, when the fluid enters the upper area of ​​the labyrinth sealing plate 43, the fluid pressure will also act on the labyrinth sealing plate 43, increasing its downward pressure and making it fit more tightly against the fixing seat 61, thereby further improving its sealing reliability.

[0058] The basic principles, main features, and advantages of the present invention are shown and described above. It should be understood by those skilled in the art that the present invention is not limited to the foregoing embodiments. The foregoing embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention as claimed, which is defined by the appended claims and their equivalents.

Claims

1. A semiconductor ultra-high purity fluid integrated control module, comprising a valve seat (1) and a distribution channel (2), characterized in that: The valve seat (2) further comprises a control unit (3), a sealing unit (4), a flow channel cavity (5) and a sealing seat (6); the control unit (3) is arranged in a linear array on the valve seat (1), and two rows are symmetrically arranged on both sides of the distribution channel (2); the sealing unit (4) is connected to the control unit (3), and when the control unit (3) moves upward or downward, it drives the sealing unit (4) to move upward or downward together; the flow channel cavity (5) is symmetrically opened in the valve seat (1) and connected to the distribution channel (2); the sealing seat (6) is arranged in the flow channel cavity (5), and when the sealing unit (4) leaks, the fluid enters the sealing seat (6) to cause it to expand and abut against the inner ring of the sealing unit (4) to form a pressure-adaptive compensating sealing protection.

2. The semiconductor ultra-high purity fluid integrated control module according to claim 1, characterized in that: The control unit (3) comprises a valve body (31), a first air channel (32), a second air channel (33), a valve channel (34), a valve core (35) and a return spring (36); the valve body (31) is mounted on the valve seat (1) and arranged in a linear array on the valve seat (1); the first air channel (32) and the second air channel (33) are respectively opened in the upper part and the lower part of the valve body (31); the valve channel (34) is opened inside the valve body (31); the valve core (35) is slidably mounted in the valve channel (34); and the return spring (36) is connected between the valve core (35) and the valve body (31).

3. The semiconductor ultra-high purity fluid integrated control module according to claim 2, characterized in that: The sealing unit (4) comprises a diaphragm block (41), a sealing plate groove (42), a labyrinth sealing plate (43) and a sealing plate disc spring (44); the diaphragm block (41) is threadedly connected to the valve core (35); the sealing plate groove (42) is provided at the bottom of the diaphragm block (41); the labyrinth sealing plate (43) is slidably installed in the sealing plate groove (42), and the lower part of the labyrinth sealing plate (43) is provided with an inner labyrinth ring (431) and an outer labyrinth ring (432); the sealing plate disc spring (44) is connected between the labyrinth sealing plate (43) and the sealing plate groove (42).

4. The semiconductor ultra-high purity fluid integrated control module according to claim 3, characterized in that: The diaphragm block (41) includes an elastic portion (411) and a sealing portion (412); the elastic portion (411) is connected to the valve channel (34); the sealing portion (412) is connected to the elastic portion (411), the lower surface of the sealing portion (412) is a planar structure, the side wall is an arc structure, and the radius of the sealing portion (412) gradually increases in the axial downward direction.

5. The semiconductor ultra-high purity fluid integrated control module according to claim 3, characterized in that: The sealing seat (6) includes a fixed seat (61), a sealing ring (62), a sealing disc spring (63), a leakage hole (64) and a labyrinth sealing capsule (65); the fixed seat (61) is connected to the flow channel cavity (5), the outer diameter of the fixed seat (61) is equal to the outer diameter of the outer labyrinth ring (432), and the inner diameter of the fixed seat (61) is equal to the inner diameter of the inner labyrinth ring (431); the sealing ring (62) is installed on the fixed seat (61); the sealing disc spring (63) is connected between the bottom of the fixed seat (61) and the sealing ring (62); the leakage hole (64) is opened on the top side wall of the fixed seat (61); the labyrinth sealing capsule (65) is connected to the top of the fixed seat (61), and the labyrinth sealing capsule (65) is a hollow structure with a "C"-shaped cross section that is connected to the leakage hole (64).

6. The semiconductor ultra-high purity fluid integrated control module according to claim 1, characterized in that: The distribution channel (2) includes a main channel (21) and a branch channel (22); the main channel (21) is opened at the center of the valve seat (1); the branch channel (22) is opened at the upper part of both sides of the main channel (21), and the cross section formed with the main channel (21) is "V" shaped, and the tail of the branch channel (22) is connected to the channel cavity (5).

7. The semiconductor ultra-high purity fluid integrated control module according to claim 5, characterized in that: The leakage hole (64) is a conical structure, and the radius of the leakage hole (64) gradually decreases toward the center of the fixed seat (61); the labyrinth sealing bag (65) is made of fluororubber.

8. A method for manufacturing a semiconductor ultra-high purity fluid integrated control module, characterized by: Applicable to the semiconductor ultra-high purity fluid integrated control module according to any one of claims 1 to 7 above, specifically: S1: The PTFE material is subjected to multiple stress relief annealing treatments, and then left to stand in a constant temperature environment for more than two weeks to release the internal stress of the material; S2: In a Class 10,000 clean room, a CNC machine tool is used to perform dry cutting of the annealed and stationary PTFE material without cutting fluid, and a high-speed steel tool is used to machine the valve seat (1), the control unit (3), the sealing unit (4) and the sealing seat (6), and a diamond tool is used to machine the distribution channel (2) and the flow channel cavity (5) in the valve seat (1); S3: Use high-grit ultra-fine sandpaper to perform surface finishing on each machined structure to remove micro-burrs, followed by multiple cleaning and drying processes; S4: Assemble the valve seat (1), the control unit (3), the sealing unit (4) and the sealing seat (6) in a Class 10,000 clean room.

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