Waste gas dry adsorption device and filter material service life detection method

Abstract

The invention relates to a waste gas dry adsorption device and a filter material service life detection method, the waste gas dry adsorption device comprises: a filter material barrel, two ends of which are provided with a gas inlet and a gas outlet; the filter material packed bed is arranged in the filter material barrel, is positioned between the gas inlet and the gas outlet, and is used for adsorbing target gas in the waste gas; the waste gas detection unit is used for detecting the concentration of the target gas at the gas inlet and the concentration of the target gas at two preset detection positions on the filter material packed bed, and the distances between the two preset detection positions and the gas inlet are different; the processing unit is located outside the filter material barrel, the processing unit is in signal connection with the waste gas concentration detection unit, and the processing unit is used for determining the use state of the filter material packed bed in the filter material barrel according to the concentration of the target gas at the gas inlet and the concentrations of the target gas at the two preset detection positions. The waste gas dry adsorption device can more accurately predict the use state of the filter material packed bed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, in particular to a waste gas dry adsorption device and filter material life detection method. BACKGROUND

[0002] Arsine / phosphine is an indispensable process gas in the manufacture of N-doped silicon-based chips, gallium arsenide (GaAs) chips, gallium arsenic phosphide (GaAsP) chips and compound semiconductor chips. These chip types will apply arsenic during the manufacturing process to form the required N-doped region through epitaxial growth, ion implantation and diffusion processes. The arsenic-containing waste gas generated by the above process production links is usually treated using an arsenic-containing waste gas dry adsorption device (Local Scrubber). The target gas in the waste gas is efficiently removed by filter dry adsorption to ensure that the exhaust gas meets environmental standards, protect the environment and human health, and improve process safety and stability. The filter material used in dry adsorption has a service life. Due to the uncertainty of the production process and the uncertainty of the filter material performance, the actual service life of the filter material usually has great uncertainty. There is no good way to predict the service life of the filter material of the dry adsorption equipment at present. It can only be displayed and informed when the equipment is close to the end of life by adding sensors or color-changing balls at the outlet, which will affect the normal production to some extent or cause adverse effects on production costs and environmental protection. SUMMARY

[0003] The present application provides a waste gas dry adsorption device and filter material life detection method, which can more accurately predict the use state of the filter material packed bed, and is beneficial to improve the operation efficiency of the normal production process and is beneficial to environmental protection.

[0004] To achieve the above purpose, the present application provides the following technical solutions:

[0005] A waste gas dry adsorption device, comprising:

[0006] A filter material barrel, the filter material barrel has an air inlet and an air outlet at both ends;

[0007] A filter material packed bed, the filter material packed bed is arranged in the filter material barrel and located between the air inlet and the air outlet, and the filter material packed bed is used for adsorbing target gas in the waste gas;

[0008] A waste gas detection unit, the waste gas detection unit is used for detecting the concentration of the target gas at the air inlet and the concentration of the target gas at two preset detection positions on the filter material packed bed, and the distances of the two preset detection positions from the air inlet are different;

[0009] A processing unit is located outside the filter barrel, the processing unit is in signal connection with the waste gas detection unit, and the processing unit is used for determining the use state of the filter filling bed in the filter barrel according to the concentration of the target gas at the air inlet and the concentrations of the target gas at the two preset detection positions.

[0010] Optionally, three gas detection sensors are included, the three gas detection sensors including one first gas detection sensor and two second gas detection sensors;

[0011] The first gas sensor is located at the air inlet and is used for detecting the concentration of the target gas at the air inlet.

[0012] The two second gas detection sensors are respectively located at the two preset detection positions, and the second gas detection sensor is used for detecting the concentration of the target gas at the preset detection position where the second gas detection sensor is located.

[0013] The first gas detection sensor and the second gas detection sensor are in signal connection with the processing unit.

[0014] Optionally, two gas-permeable containers are included, the two gas-permeable containers are respectively located at the two preset detection positions, and the gas-permeable container is provided with a gas-permeable hole.

[0015] The two second gas detection sensors are respectively located in the two gas-permeable containers.

[0016] Optionally, a first connecting channel and two second connecting channels are further included.

[0017] The first end of the first connecting channel is located at the air inlet, and the second end of the first connecting channel extends out of the filter barrel.

[0018] The two second connecting channels correspond to the two gas-permeable containers one by one, the first end of the second connecting channel is in communication with the corresponding gas-permeable container, and the second end of the second connecting channel extends out of the filter barrel.

[0019] The first gas detection sensor is connected with a first connecting line, and the first connecting line is connected with the processing unit by penetrating through the first connecting channel.

[0020] The second gas detection sensor is connected with a second connecting line, and the second connecting line is connected with the processing unit by penetrating through the second connecting channel.

[0021] Optionally, the waste gas detection unit includes one gas detection sensor.

[0022] Three external sampling chambers are arranged outside the filter barrel, one of the external sampling chambers is in communication with the gas inlet, and the other two external sampling chambers are in communication with two preset detection positions respectively, and the gas detection sensor is used for detecting the concentration of the target gas in the three external sampling chambers respectively.

[0023] Optionally, the gas detection sensor is a photoionization sensor.

[0024] Optionally, the processing unit is configured to:

[0025] determine the processing efficiency of the target gas at the preset detection position at the previous time according to the concentration of the target gas at the gas inlet and the concentration of the target gas at the preset detection position at the previous time;

[0026] determine the processing efficiency of the target gas at the preset detection position at the current time according to the concentration of the target gas at the gas inlet and the concentration of the target gas at the preset detection position at the current time;

[0027] determine the ratio of the used time length of the filter filling bed at the current time to the total use time length of the filter filling bed according to the processing efficiency of the target gas at different preset detection positions at the same time and the processing efficiency of the target gas at the same preset detection position at different times.

[0028] Optionally, the processing unit is configured to:

[0029] determine the processing efficiency of the target gas at the preset detection position according to the following formula:

[0030]

[0031] wherein, C0 is the concentration of the target gas at the gas inlet, C is the concentration of the target gas at a position of the filter filling bed, and η is the processing efficiency of the position of the filter filling bed.

[0032] Optionally, the two preset detection positions include a first detection position and a second detection position, the filter bed thickness between the first detection position and the first end of the filter filling bed is a first bed thickness, the filter bed thickness between the second detection position and the first end of the filter filling bed is a second bed thickness, the first end of the filter filling bed is adjacent to the gas inlet, and the process of the filter filling bed adsorbing the target gas conforms to the Bohart-Adams model.

[0033] the processing unit is configured to:

[0034] determine the used time length of the filter filling bed at the current time and the total use time length of the filter filling bed according to the following formula:

[0035]

[0036] t1-t0=k1;

[0037]

[0038] wherein, k BA is a Bohart-Adams model concentration parameter, N0 is the maximum adsorption capacity of the adsorbent per unit volume of the filter material packed bed, u is the flow rate of the exhaust gas at the gas inlet, L1 is the first bed thickness, L2 is the second bed thickness, L w is the bed thickness of the filter material packed bed, η1 is the treatment efficiency of the target gas at the first detection position at the current time, η2 is the treatment efficiency of the target gas at the second detection position at the current time, η ′ 1 is the treatment efficiency of the target gas at the first detection position at the previous time, η lw is the minimum treatment efficiency of the filter material packed bed, t0 is the service time of the filter material packed bed at the current time, t1 is the service time of the filter material packed bed at the previous time, k1 is the time difference between the current time and the previous time, t tlv is the total service time of the filter material packed bed.

[0039] The application also provides a filter material life monitoring method, which applies any one of the waste gas dry adsorption devices provided in the above technical solutions, and the method comprises the following steps.

[0040] obtaining the concentration of the target gas at the gas inlet and the concentrations of the target gas at the two preset detection positions;

[0041] determining the service state of the filter material packed bed in the filter material barrel according to the concentration of the target gas at the gas inlet and the concentrations of the target gas at the two preset detection positions.

[0042] Optionally, the method comprises the following steps.

[0043] determining the treatment efficiency of the target gas at the preset detection position at the previous time according to the concentration of the target gas at the gas inlet and the concentration of the target gas at the preset detection position at the previous time;

[0044] determining the treatment efficiency of the target gas at the preset detection position at the current time according to the concentration of the target gas at the gas inlet and the concentration of the target gas at the preset detection position at the current time;

[0045] determining the ratio of the service time of the filter material packed bed at the current time to the total service time of the filter material packed bed according to the treatment efficiencies of the target gas at different preset detection positions at the same time and the treatment efficiencies of the target gas at the same preset detection position at different times.

[0046] Optionally, comprising:

[0047] The processing efficiency of the target gas at the preset detection position is determined according to the following formula:

[0048]

[0049] Wherein, C0 is the concentration of the target gas at the gas inlet, C is the concentration of the target gas at a position of the filter material packed bed, and η is the processing efficiency of the filter material packed bed at the position.

[0050] Optionally, the two preset detection positions comprise a first detection position and a second detection position, the filter bed thickness between the first detection position and the first end of the filter material packed bed is a first bed thickness, the filter bed thickness between the second detection position and the first end of the filter material packed bed is a second bed thickness, and the first end of the filter material packed bed is adjacent to the gas inlet.

[0051] The filter material life monitoring method comprises:

[0052] The length of time that the filter material packed bed has been used and the total length of time that the filter material packed bed has been used at the current time are determined according to the following formula:

[0053]

[0054] t1-t0=k1;

[0055]

[0056] Wherein, k BA is a Bohart-Adams model concentration parameter, N0 is the maximum adsorption capacity of the adsorbent per unit volume in the filter material packed bed, u is the flow rate of the exhaust gas at the gas inlet, L1 is the first bed thickness, L2 is the second bed thickness, L w is the bed thickness of the filter material packed bed, η1 is the processing efficiency of the target gas at the first detection position at the current time, η2 is the processing efficiency of the target gas at the second detection position at the current time, η ′ 1 is the processing efficiency of the target gas at the first detection position at the previous time, η lw is the minimum processing efficiency of the filter material packed bed, t0 is the length of time that the filter material packed bed has been used at the current time, t1 is the length of time that the filter material packed bed has been used at the previous time, k1 is the time difference between the current time and the previous time, t tlv is the total length of time that the filter material packed bed has been used.

[0057] The embodiment of the present application provides a waste gas dry adsorption device and a filter material life detection method. BRIEF DESCRIPTION OF DRAWINGS

[0058] Figure 1 A structure schematic diagram of the waste gas dry adsorption device provided by the embodiment of the present application is provided.

[0059] Figure 2 A working state diagram of the waste gas dry adsorption device provided by the embodiment of the present application is provided.

[0060] Figure 3 A flow schematic diagram of the filter material life detection method provided by the embodiment of the present application is provided.

[0061] Icon:

[0062] 1-filter material barrel; 11-inlet; 12-outlet; 2-filter material packed bed; 3-waste gas detection unit; 31-first gas detection sensor; 32-second gas detection sensor; 4-air-permeable container; 51-first connecting channel; 52-second connecting channel. DETAILED DESCRIPTION

[0063] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0064] Please refer to Figure 1 The embodiment of the present application provides a waste gas dry adsorption device, which comprises:

[0065] The filter material barrel 1 has an inlet 11 and an outlet 12 at two ends of the filter material barrel 1.

[0066] The filter filling bed 2 is arranged in the filter barrel 1 and between the air inlet 11 and the air outlet 12, and is used for adsorbing the target gas in the exhaust gas.

[0067] The exhaust gas detection unit 3 is used for detecting the concentration of the target gas at the air inlet 11 and the concentration of the target gas at two preset detection positions on the filter filling bed 2, and the distances of the two preset detection positions from the air inlet 11 are different.

[0068] The processing unit is located outside the filter barrel 1, is in signal connection with the exhaust gas detection unit 3, and is used for determining the use state of the filter filling bed 2 in the filter barrel 1 according to the concentration of the target gas at the air inlet 11 and the concentration of the target gas at the two preset detection positions.

[0069] In the exhaust gas dry adsorption device provided by the embodiment of the present application, the filter barrel 1, the filter filling bed 2 in the filter barrel 1, the exhaust gas detection unit 3 and the processing unit outside the filter barrel 1 are provided, the exhaust gas detection unit 3 can detect the concentration of the target gas in the exhaust gas at the air inlet and the concentration of the target gas at two preset detection positions on the filter filling bed 2, the processing unit is in signal connection with the exhaust gas detection unit 3, and the processing unit can determine the use state of the filter filling bed 2 in the filter barrel 1 according to the concentration of the target gas in the exhaust gas at the air inlet and the concentration of the target gas at the two preset detection positions. In the exhaust gas dry adsorption device, the concentration of the target gas in the exhaust gas can be detected at multiple positions such as the air inlet 11 of the filter barrel 1 and the preset detection positions on the filter filling bed 2, and the use state of the filter filling bed 2 can be more accurately predicted according to the values of the concentrations of the target gas at multiple positions in the filter barrel 1, so that the operation benefit of the normal production process can be improved and the environmental protection can be facilitated.

[0070] Specifically, the target gas in the exhaust gas can be arsine or phosphine gas, or other gas, which is not limited here and is determined according to the actual situation.

[0071] In the working process of the exhaust gas dry adsorption device, the exhaust gas can be input into the filter barrel 1 from the air inlet 11, the target gas in the exhaust gas is adsorbed by the filter filling bed 2 in the filter barrel 1, the exhaust gas is purified and treated, and the treated exhaust gas can be discharged into the atmosphere from the air outlet 12, the use state of the filter filling bed 2 is accurately detected, the operation benefit of the normal production process can be improved, and the environmental protection can be facilitated.

[0072] Specifically, the number of the preset detection positions can be greater than or equal to two, which is not limited here and is determined according to the actual situation. The exhaust gas detection unit 3 can detect the concentration of the target gas at each preset detection position.

[0073] In the embodiment of the present application, the waste gas dry adsorption device can include three gas detection sensors, which can include a first gas detection sensor 31 and two second gas detection sensors 32; wherein the first gas sensor is located at the air inlet 11 for detecting the concentration of the target gas at the air inlet 11; two second gas detection sensors 32 are respectively located at two preset detection positions, and the second gas detection sensor 32 is used to detect the concentration of the target gas at the preset detection position; the first gas detection sensor 31 and the second gas detection sensor 32 are signal connected with the processing unit.

[0074] The waste gas dry adsorption device described above can detect the concentration of the target gas at the air inlet 11 and the concentration of the target gas at the preset detection position in real time through the setting of the first gas detection sensor 31 and the two second gas detection sensors 32, and has a simple structure and is easy to set.

[0075] In the embodiment of the present application, the waste gas dry adsorption device can further include two gas-permeable containers 4, which are respectively located at two preset detection positions, and the gas-permeable container 4 has a gas-permeable hole; two second gas detection sensors 32 are respectively located in the two gas-permeable containers 4.

[0076] In the waste gas dry adsorption device described above, the gas-permeable container 4 is arranged at the preset detection position, and the waste gas filtered by the filter material around the gas-permeable container 4 can enter the gas-permeable container 4 through the gas-permeable hole, and the second gas detection sensor 32 can detect the concentration of the target gas in the gas-permeable container 4, so that the gas-permeable container 4 can provide a space for the second gas detection sensor 32 to detect the concentration of the target gas, facilitating the detection of the concentration of the target gas.

[0077] In the embodiment of the present application, the waste gas dry adsorption device can further include a first connecting channel 51 and two second connecting channels 52; wherein the first end of the first connecting channel 51 is located at the air inlet 11, and the second end of the first connecting channel 51 extends out of the filter barrel 1; the two second connecting channels 52 correspond to the two gas-permeable containers 4 one by one, the first end of the second connecting channel 52 is in communication with the corresponding gas-permeable container 4, and the second end of the second connecting channel 52 extends out of the filter barrel 1.

[0078] Specifically, the second end of the first connecting channel 51 and the second connecting channel 52 can extend out of the filter barrel 1 by penetrating the side wall of the filter barrel 1.

[0079] Specifically, the first gas detection sensor 31 is connected with a first connecting line, and the first connecting line is connected with the processing unit by penetrating the first connecting channel 51; the second gas detection sensor 32 is connected with a second connecting line, and the second connecting line is connected with the processing unit by penetrating the second connecting channel 52.

[0080] The first connecting line on the first gas detection sensor 31 is connected with the processing unit through the first connecting line channel 51, and the second connecting line on the second gas detection sensor 32 is connected with the processing unit through the second connecting line channel 52, so that the first gas detection sensor 31 and the second gas detection sensor 32 in the filter barrel 1 are signal-connected with the processing unit outside the filter barrel 1, and the structure is simple and easy to manufacture.

[0081] Specifically, the breathable container 4, the first connecting line channel 51 and the second connecting line channel 52 can be quartz glass.

[0082] In the embodiment of the present application, the waste gas detection unit 3 can also only include one gas detection sensor; and the waste gas dry adsorption device can also include three external sampling cabins located outside the filter barrel 1, one of which is communicated with the gas inlet 11, and the other two are respectively communicated with two preset detection positions, and the gas detection sensor is used to detect the concentration of the target gas in the three external sampling cabins.

[0083] In the waste gas dry adsorption device, part of the waste gas at the gas inlet and the two preset detection positions can be introduced into the external sampling cabin, the waste gas at the gas inlet and the two preset detection positions can be sampled, one gas detection sensor can be used to detect the gas in the three external sampling cabins in sequence, the concentration of the target gas at the gas inlet and the concentration of the target gas at the two preset detection positions can be detected, the time-sharing multiplexing of the gas detection sensor can be realized, the use of the gas detection sensor can be reduced, and the cost can be saved.

[0084] In the embodiment of the present application, the gas detection sensor can be a photoionization sensor (PID), or can also be other gas detection sensors, which is not limited here and is determined according to the actual situation.

[0085] In the embodiment of the present application, the processing unit can be used for:

[0086] According to the concentration of the target gas at the gas inlet and the concentration of the target gas at the preset detection position at the previous moment, the processing efficiency of the target gas at the preset detection position at the previous moment is determined;

[0087] According to the concentration of the target gas at the gas inlet and the concentration of the target gas at the preset detection position at the current moment, the processing efficiency of the target gas at the preset detection position at the current moment is determined;

[0088] According to the processing efficiency of the target gas at different preset detection positions at the same time and the processing efficiency of the target gas at the same preset detection position at different moments, the ratio of the use time length of the filter filling bed at the current moment to the total use time length of the filter filling bed is determined.

[0089] The waste gas dry adsorption device, the processing unit determines the ratio of the used time length of the filter material packed bed at the current time to the total use time length of the filter material packed bed according to the processing efficiency of the target gas at different preset detection positions at the same time and the processing efficiency of the target gas at the same preset detection position at different times, can monitor the use state of the filter material packed bed in real time, and when the ratio of the used time length of the filter material packed bed at the current time to the total use time length of the filter material packed bed is 1, the filter material packed bed can be replaced, the service life of the filter material packed bed is accurately monitored, which is beneficial to improve the operation efficiency of the normal production process, and is also beneficial to compare the performance of the filter material and thus realize the optimized selection of the filter material.

[0090] Specifically, the waste gas detection unit can detect the concentration of the target gas at the gas inlet and at the preset detection position every interval, which can realize real-time monitoring of the use state of the filter material packed bed.

[0091] In the embodiment of the application, the processing unit can be used for:

[0092] The processing efficiency of the target gas at the preset detection position is determined according to the following formula:

[0093]

[0094] Wherein, C0 is the concentration of the target gas at the gas inlet, unit: mg / L, C is the concentration of the target gas at any position of the filter material packed bed, unit: mg / L, and η is the processing efficiency of the filter material packed bed at the position.

[0095] Specifically, the two preset detection positions can include a first detection position and a second detection position. Based on the formula If the concentration of the target gas in the waste gas at the gas inlet is unchanged, the processing efficiency of the target gas at the first detection position at the current time is C1 is the concentration of the target gas at the first detection position at the current time, the processing efficiency of the target gas at the second detection position at the current time is C2 is the concentration of the target gas at the second detection position at the current time, the processing efficiency of the target gas at the first detection position at the previous time is C2 ′ C1 is the concentration of the target gas at the first detection position at the current time, the processing efficiency of the target gas at the second detection position at the previous time is C2 ′ C2 is the concentration of the target gas at the second detection position at the previous time.

[0096] In the embodiment of the application, the process of the filter material packed bed adsorbing the target gas can conform to the Bohart-Adams model.

[0097] The Bohart-Adams model is mainly used to describe the breakthrough behavior in the adsorption process of the filter material packed bed, especially for the irreversible rectangular isotherm adsorption process. The rectangular isotherm adsorption process usually occurs in the case that there are a large number of active sites on the surface of the adsorbent (filter material). When the adsorbate (target gas) contacts these active sites, it will be quickly adsorbed until all the active sites are occupied. The Bohart-Adams model assumes that the adsorption process is a first-order reaction, and the adsorption isotherm is a rectangular (irreversible) isotherm, which means that the adsorption process is irreversible, and the adsorption capacity of the adsorbent will not further increase after reaching saturation. Chemical adsorption usually involves the formation of chemical bonds, and the adsorption process has high selectivity and irreversibility. Therefore, the Bohart-Adams model is usually used to describe chemical adsorption. The adsorption of arsane or phosphane gas on the adsorbent is irreversible chemical adsorption, and there are a large number of active sites on the surface of the adsorbent. When the adsorbate (arsane or phosphane) contacts these active sites, it will be quickly adsorbed until all the active sites are occupied. Therefore, the Bohart-Adams model can be used to describe the dry adsorption of arsane or phosphane gas in the embodiments of the present application.

[0098] Specifically, the core formula of the Bohart-Adams model is an exponential equation, and its simplified form can be as follows:

[0099]

[0100] wherein C0 is the concentration of the target gas at the inlet, with the unit of mg / L; C is the concentration of the target gas at any position of the filter material packed bed at time t, with the unit of mg / L; L is the bed thickness between the position of the filter material packed bed and the first end of the filter material packed bed, with the unit of cm; k BA is the Bohart-Adams model concentration parameter, with the unit of L / (mg·min); N0 is the maximum adsorption capacity of the adsorbent per unit volume in the filter material packed bed, with the unit of mg / L; u is the flow rate of the exhaust gas at the inlet, with the unit of cm / min.

[0101] In the embodiments of the present application, the two preset detection positions include a first detection position and a second detection position, the filter bed thickness between the first detection position and the first end of the filter material packed bed is a first bed thickness, and the filter bed thickness between the second detection position and the first end of the filter material packed bed is a second bed thickness. The first end of the filter material packed bed is adjacent to the inlet. Specifically, the first bed thickness can be greater than the second bed thickness; or the first bed thickness L1 is less than the second bed thickness L2, as shown in the following figure: Figure 2 which is not limited here and is determined according to the actual situation. The first bed thickness L1, the second bed thickness L2 and the bed thickness L w of the filter material packed bed can be known numerical values.

[0102] Based on the formula In formula (1) It can be expressed as Substituting this relationship into formula (1), and after sorting it out, it can be expressed as:

[0103]

[0104] Based on the above formula (2), in the embodiment of the present invention, the processing unit is further configured to:

[0105] The usage time of the filter material packed bed at the current moment and the total usage time of the filter material packed bed are determined according to the following formula:

[0106]

[0107] t1-t0=k1 (6);

[0108]

[0109] Among them, k BA is the concentrated parameter of the Bohart-Adams model, N0 is the maximum adsorption capacity per unit volume of the adsorbent in the filter bed, u is the flow rate of the exhaust gas at the air inlet, L1 is the first bed thickness, L2 is the second bed thickness, L w is the thickness of the filter bed, η1 is the treatment efficiency of the target gas at the first detection position at the current moment, η2 is the treatment efficiency of the target gas at the second detection position at the current moment, and η ′ 1 is the processing efficiency of the target gas at the first detection position at the previous moment, η lw is the minimum treatment efficiency of the filter material packed bed, t0 is the usage time of the filter material packed bed at the current moment, t1 is the usage time of the filter material packed bed at the previous moment, k1 is the time difference between the current moment and the previous moment, t tlv The total usage time of the filter media packed bed.

[0110] For η1 and η1 ， is the treatment efficiency of the target gas at the same preset detection position at different times. The time difference between the two is k1, which is known. After substituting k1 into formula (2), we can get the above formulas (3) and (5). Substituting formulas (3) and (5) into formula (6), we can get:

[0111]

[0112] Arranging formula (8) yields:

[0113]

[0114] For the processing efficiency of the target gas at the same time at different preset detection positions η1 and η2, after substituting them into formula (2), formula (3) and formula (4) can be obtained, and formula (3) and formula (4) can be obtained:

[0115]

[0116] After arranging formula (10), formula (11) can be obtained:

[0117]

[0118] In formula (11), a and b are respectively simplified as a and b, and a is simplified as a ′ x and y are regarded as variables to be determined.

[0119] Formula (9) and formula (11) can form an equation group:

[0120] Solving the equation group (12) can obtain:

[0121]

[0122] The specific values of x and y can be calculated.

[0123] And substituting the specific values of x and y calculated in formula (13) into formula (3), the specific value of the used time length t0 of the filter material packed bed at the current time can be obtained, and the used time length t0 is:

[0124]

[0125] Suppose that the maximum concentration of the target gas allowed at the outlet of the filter material packed bed is C tlv , then under the condition that the concentration of the target gas at the inlet is C0, the minimum processing efficiency of the filter material packed bed is η lw , Substituting the value of η lw and the values of x and y calculated in formula (13) into formula (7), the specific value of the total use time length t tlv of the filter material packed bed can be obtained, and the total use time length t tlv :

[0126]

[0127] Then the ratio of the used time length of the filter material packed bed at the current time to the total use time length of the filter material packed bed is ​​​The life ratio of the filter material filling bed that has been used can be calculated in real time, so that the use state of the filter material filling bed can be monitored in real time, and when the ratio of the used time length of the filter material filling bed to the total use time length of the filter material filling bed at the current moment is 1, the filter material filling bed can be replaced, the service life of the filter material filling bed is accurately monitored, the operation efficiency of the normal production process is improved, and the performance of the filter material is compared, so that the filter material is optimally selected.

[0128] Specifically, the processing unit can be a computer device.

[0129] The embodiment of the present application also provides a filter material life monitoring method, and any one of the waste gas dry adsorption devices provided in the above technical solutions can be applied, such as Figure 3 As shown in the figure, the filter material life monitoring method comprises the following steps.

[0130] S301: Obtain the concentration of the target gas at the air inlet and the concentration of the target gas at two preset detection positions.

[0131] S302: Determine the use state of the filter material filling bed in the filter material barrel according to the concentration of the target gas at the air inlet and the concentration of the target gas at the two preset detection positions.

[0132] In the filter material life monitoring method provided by the embodiment of the present application, the concentration values of the target gas at multiple positions such as the air inlet and the two preset detection positions on the filter material filling bed in the filter material barrel can be used to more accurately predict the use state of the filter material filling bed, so that the operation efficiency of the normal production process is improved and environmental protection is facilitated.

[0133] In the embodiment of the present application, the filter material life monitoring method can specifically comprise the following steps.

[0134] Determine the processing efficiency of the target gas at the preset detection position at the previous moment according to the concentration of the target gas at the air inlet and the concentration of the target gas at the preset detection position at the previous moment.

[0135] Determine the processing efficiency of the target gas at the preset detection position at the current moment according to the concentration of the target gas at the air inlet and the concentration of the target gas at the preset detection position at the current moment.

[0136] Determine the ratio of the used time length of the filter material filling bed to the total use time length of the filter material filling bed at the current moment according to the processing efficiency of the target gas at different preset detection positions at the same time and the processing efficiency of the target gas at the same preset detection position at different moments.

[0137] In the embodiment of the present application, the filter material life monitoring method can specifically comprise the following steps.

[0138] Determine the processing efficiency of the target gas at the preset detection position according to the following formula:

[0139]

[0140] Wherein, eta is the processing efficiency of the target gas at the preset detection position, C0 is the concentration of the target gas at the air inlet, and C is the concentration of the target gas at the preset detection position.

[0141] In the embodiment of the application, the two preset detection positions include a first detection position and a second detection position, the filter bed thickness between the first detection position and the first end of the filter packed bed is a first bed thickness, the filter bed thickness between the second detection position and the first end of the filter packed bed is a second bed thickness, and the first end of the filter packed bed is adjacent to the air inlet.

[0142] The filter life monitoring method specifically includes:

[0143] The used time length of the filter packed bed at the current moment and the total used time length of the filter packed bed are determined according to the following formula:

[0144]

[0145] t1-t0=k1;

[0146]

[0147] Wherein, k BA is a Bohart-Adams model concentration parameter, N0 is the maximum adsorption capacity of the adsorbent per unit volume in the filter packed bed, u is the flow rate of the exhaust gas at the air inlet, L1 is the first bed thickness, L2 is the second bed thickness, L w is the bed thickness of the filter packed bed, eta1 is the processing efficiency of the target gas at the first detection position at the current moment, eta2 is the processing efficiency of the target gas at the second detection position at the current moment, eta ′ 1 is the processing efficiency of the target gas at the first detection position at the previous moment, eta lw is the minimum processing efficiency of the filter packed bed, t0 is the used time length of the filter packed bed at the current moment, t1 is the used time length of the filter packed bed at the previous moment, k1 is the time difference between the current moment and the previous moment, t tlv is the total used time length of the filter packed bed.

[0148] Obviously, those skilled in the art can make various modifications and variations to the embodiments of the application without departing from the spirit and scope of the application. Thus, if these modifications and variations of the application belong to the scope of the claims of the application and their equivalents, the application also intends to include these modifications and variations.

Claims

1. A waste gas dry adsorption device, characterized in that: include: A filter barrel, wherein both ends of the filter barrel have an air inlet and an air outlet; A filter material packed bed, the filter material packed bed is arranged in the filter material barrel and located between the air inlet and the air outlet, and the filter material packed bed is used to adsorb the target gas in the exhaust gas; an exhaust gas detection unit, the exhaust gas detection unit being used to detect the concentration of the target gas at the air inlet and at two preset detection positions on the filter material packed bed, the two preset detection positions being at different distances from the air inlet; A processing unit is located outside the filter barrel and is signal-connected to the exhaust gas detection unit. The processing unit is used to determine the usage status of the filter material filling bed in the filter barrel based on the concentration of the target gas at the air inlet and the concentration of the target gas at the two preset detection positions.

2. The exhaust gas dry adsorption device according to claim 1, characterized in that: The device comprises three gas detection sensors, wherein the three gas detection sensors include a first gas detection sensor and two second gas detection sensors; The first gas sensor is located at the air inlet and is used to detect the concentration of the target gas at the air inlet; The two second gas detection sensors are respectively located at the two preset detection positions, and the second gas detection sensors are used to detect the concentration of the target gas at the preset detection positions where the second gas detection sensors are located; The first gas detection sensor and the second gas detection sensor are signal-connected to the processing unit.

3. The exhaust gas dry adsorption device according to claim 2, characterized in that: It comprises two breathable containers, the two breathable containers are respectively located at the two preset detection positions, and the breathable containers have breathable holes; The two second gas detection sensors are respectively located in the two gas permeable containers.

4. The exhaust gas dry adsorption device according to claim 3, characterized in that: Also includes a first connection channel and two second connection channels; The first end of the first connecting channel is located at the air inlet, and the second end of the first connecting channel extends out of the filter material barrel; The two second connecting channels correspond to the two air-permeable containers one by one, the first ends of the second connecting channels are connected to the corresponding air-permeable containers, and the second ends of the second connecting channels extend out of the filter material barrel; The first gas detection sensor is connected to a first connecting line, and the first connecting line is connected to the processing unit by passing through the first connecting channel; The second gas detection sensor is connected to a second connecting line, and the second connecting line is connected to the processing unit by passing through the second connecting channel.

5. The exhaust gas dry adsorption device according to claim 1, characterized in that: The exhaust gas detection unit includes a gas detection sensor; It also includes three external sampling chambers located outside the filter barrel, one of the external sampling chambers is connected to the air inlet, and the other two external detection chambers are respectively connected to the two preset detection positions, and the gas detection sensor is used to detect the concentration of the target gas in the three external sampling chambers respectively.

6. The exhaust gas dry adsorption device according to claim 2 or 5, characterized in that: The gas detection sensor is a photoionization sensor.

7. The exhaust gas dry adsorption device according to claim 1, characterized in that: The processing unit is used for: determining a treatment efficiency of the target gas at the preset detection position at a previous moment according to the concentration of the target gas at the air inlet and the concentration of the target gas at the preset detection position at a previous moment; determining a treatment efficiency of the target gas at the preset detection position at the current moment according to the concentration of the target gas at the air inlet and the concentration of the target gas at the preset detection position at the current moment; According to the processing efficiency of the target gas at different preset detection positions at the same time and the processing efficiency of the target gas at the same preset detection position at different times, the ratio of the usage time of the filter material packed bed at the current moment to the total usage time of the filter material packed bed is determined.

8. The exhaust gas dry adsorption device according to claim 7, characterized in that: The processing unit is used for: Determine the processing efficiency of the target gas at the preset detection position according to the following formula; Wherein, C0 is the concentration of the target gas at the air inlet, C is the concentration of the target gas at any position of the filter material packed bed, and η is the treatment efficiency at that position of the filter material packed bed.

9. The exhaust gas dry adsorption device according to claim 8, characterized in that: The two preset detection positions include a first detection position and a second detection position, a filter material bed thickness between the first detection position and the first end of the filter material packed bed is a first bed thickness, and a filter material bed thickness between the second detection position and the first end of the filter material packed bed is a second bed thickness, the first end of the filter material packed bed is adjacent to the air inlet, and a process of adsorbing the target gas by the filter material packed bed conforms to the Bohart-Adams model; The processing unit is used for: Determine the usage time of the filter material packed bed and the total usage time of the filter material packed bed at the current moment according to the following formula; t1-t0=k1; Among them, k BA is the concentrated parameter of the Bohart-Adams model, N0 is the maximum adsorption capacity per unit volume of the adsorbent in the filter material packed bed, u is the flow rate of the exhaust gas at the air inlet, L1 is the first bed thickness, L2 is the second bed thickness, L w is the bed thickness of the filter material packed bed, η1 is the treatment efficiency of the target gas at the first detection position at the current moment, η2 is the treatment efficiency of the target gas at the second detection position at the current moment, η ′ 1 is the processing efficiency of the target gas at the first detection position at the previous moment, η lw is the minimum processing efficiency of the filter material packed bed, t0 is the usage time of the filter material packed bed at the current moment, t1 is the usage time of the filter material packed bed at the previous moment, k1 is the time difference between the current moment and the previous moment, t tlv The total usage time of the filter media packed bed.

10. A filter material life monitoring method, characterized in that: Using the exhaust gas dry adsorption device according to any one of claims 1 to 9, the method comprises: Acquiring the concentration of the target gas at the air inlet and the concentration of the target gas at the two preset detection positions; The usage status of the filter material packed bed in the filter material barrel is determined according to the concentration of the target gas at the air inlet and the concentration of the target gas at the two preset detection positions.

11. The filter material life monitoring method according to claim 10, wherein: include: determining a treatment efficiency of the target gas at the preset detection position at a previous moment according to the concentration of the target gas at the air inlet and the concentration of the target gas at the preset detection position at a previous moment; determining a treatment efficiency of the target gas at the preset detection position at the current moment according to the concentration of the target gas at the air inlet and the concentration of the target gas at the preset detection position at the current moment; According to the processing efficiency of the target gas at different preset detection positions at the same time and the processing efficiency of the target gas at the same preset detection position at different times, the ratio of the usage time of the filter material packed bed at the current moment to the total usage time of the filter material packed bed is determined.

12. The filter material life monitoring method according to claim 11, wherein: include: Determine the processing efficiency of the target gas at the preset detection position according to the following formula; Wherein, C0 is the concentration of the target gas at the air inlet, C is the concentration of the target gas at any position of the filter material packed bed, and η is the treatment efficiency at that position of the filter material packed bed.

13. The filter material life monitoring method according to claim 12, wherein: The two preset detection positions include a first detection position and a second detection position, the filter material bed thickness between the first detection position and the first end of the filter material packed bed is a first bed thickness, the filter material bed thickness between the second detection position and the first end of the filter material packed bed is a second bed thickness, and the first end of the filter material packed bed is adjacent to the air inlet; The filter material life monitoring method comprises: Determine the usage time of the filter material packed bed and the total usage time of the filter material packed bed at the current moment according to the following formula; t1-t0=k1; Among them, k BA is the concentrated parameter of the Bohart-Adams model, N0 is the maximum adsorption capacity per unit volume of the adsorbent in the filter material packed bed, u is the flow rate of the exhaust gas at the air inlet, L1 is the first bed thickness, L2 is the second bed thickness, L w is the bed thickness of the filter material packed bed, η1 is the treatment efficiency of the target gas at the first detection position at the current moment, η2 is the treatment efficiency of the target gas at the second detection position at the current moment, η ′ 1 is the processing efficiency of the target gas at the first detection position at the previous moment, η lw is the minimum processing efficiency of the filter material packed bed, t0 is the usage time of the filter material packed bed at the current moment, t1 is the usage time of the filter material packed bed at the previous moment, k1 is the time difference between the current moment and the previous moment, t tlv The total usage time of the filter media packed bed.

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