Grinding fluid mixing and uniform volatilization equipment

Abstract

The invention relates to grinding fluid mixing and uniform volatilization equipment. The grinding fluid mixing and uniform volatilization equipment comprises a supporting frame, a shell and a barrel shaking mechanism arranged in the supporting frame. The barrel shaking mechanism comprises a fixing frame, a front fixing door plate, a back fixing plate, a first limiting sensor, a top pressing assembly and a second limiting sensor. The fixing frame is used for fixing and limiting the grinding fluid barrel and can rotate along the horizontal axis, and a roller frame is arranged at the bottom of the fixing frame. The two front fixing door plates are hinged to one side of the fixing frame, and a holding buckle assembly used for locking and fixing is arranged between the two front fixing door plates. The back fixing plate is arranged on the other side of the fixing frame. The first limiting sensor is arranged on the front fixed door plate and used for detecting whether the clasping buckle assembly is locked in place or not. The top pressing assembly is arranged on the top plate of the fixing frame and used for pressing and fixing the tops of the grinding fluid barrels of different models. The second limiting sensor is arranged on the fixing frame side plate and used for detecting whether the top pressing assembly is pressed in place or not.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of polishing liquid mixing, in particular to a polishing liquid mixing and uniformizing device. BACKGROUND

[0002] In the chemical mechanical planarization (CMP) process, the core role of the polishing liquid is to realize high-precision planarization through physical and chemical interaction between the solid particles in the polishing liquid and the workpiece surface. However, due to the large difference in particle density in the polishing liquid, sedimentation or agglomeration easily occurs during storage and transportation, resulting in stratification of the liquid phase components and affecting the polishing uniformity and yield.

[0003] In order to maintain the uniform dispersion of solid particles in the polishing liquid and prevent sedimentation and agglomeration, most factories currently use a method of placing a full polishing liquid barrel on an inclined frame and manually pushing it to roll back and forth to mix. This method is not only time-consuming and labor-intensive, but also unstable in mixing effect. Moreover, the polishing liquid barrel is prone to bumping, wear and tear during rolling, and even liquid leakage and secondary pollution. SUMMARY

[0004] The purpose of the present application is to provide a polishing liquid mixing and uniformizing device that can fix the entire polishing liquid barrel in the support frame and rotate it as a whole by setting a fixed frame that can rotate along the horizontal axis, cooperating with the clamping buckle assembly and the top pressing assembly, so that the polishing liquid in the barrel is naturally mixed under the action of gravity and centrifugal force. This fundamentally eliminates the impact and friction on the barrel body, eliminates the need for manual pushing, greatly improves the mixing uniformity and work efficiency, and avoids liquid leakage and secondary pollution.

[0005] To achieve the above purpose, the present application provides a polishing liquid mixing and uniformizing device, which comprises a support frame, an outer shell arranged outside the support frame, and a barrel shaking mechanism arranged in the support frame and used to drive the polishing liquid barrel to rotate and stir, the barrel shaking mechanism comprising: A fixed frame for fixing and limiting the polishing liquid barrel and rotatable along the horizontal axis, the fixed frame being provided at the bottom with a roller frame; Two front fixed door plates hingedly arranged on one side of the fixed frame, a clamping buckle assembly for locking and fixing being arranged between the two front fixed door plates; A back fixed plate arranged on the other side of the fixed frame, the front fixed door plate cooperating with the back fixed plate to lock and fix the polishing liquid barrel around the side; A first limiting sensor arranged on the front fixed door plate for detecting whether the clamping buckle assembly is locked in place; A top pressing assembly arranged on the top plate of the fixed frame for pressing and fixing the top of the polishing liquid barrel of different models; A second limiting sensor is arranged on the side plate of the fixing frame to detect whether the top pressing assembly is pressed in place.

[0006] Optionally, the polishing liquid mixing and uniformizing device further comprises a driving mechanism, wherein the driving mechanism comprises: Two fixed vertical plates are arranged on the two sides of the fixing frame, and the fixed vertical plates comprise a first fixed vertical plate and a second fixed vertical plate. A driving motor is arranged, and a speed reducer is arranged on the movable end of the driving motor, the speed reducer is arranged on the first fixed vertical plate, the movable end of the speed reducer is connected to the one side plate of the fixing frame through a first rotating shaft, and a first fixed bearing seat is arranged on the first fixed vertical plate and sleeved on the first rotating shaft. A second rotating shaft is connected to the other side plate of the fixing frame, a second fixed bearing seat is arranged on the second fixed vertical plate, and the second fixed bearing seat is sleeved on the second rotating shaft.

[0007] Optionally, a third limiting sensor for recording original point information is arranged on the second fixed vertical plate, a positioning rod is arranged on the second rotating shaft, and the third limiting sensor cooperates with the positioning rod to position the original point of the fixing frame.

[0008] Optionally, a slip ring support is arranged on the second fixed vertical plate, and an electric slip ring connected to the second rotating shaft is arranged on the slip ring support.

[0009] Optionally, the front fixed door plate comprises a first fixed door plate and a second fixed door plate, and the embracing buckle assembly comprises: A U-shaped groove is connected to the first fixed door plate at one end, a fixed cylinder is arranged at the other end of the U-shaped groove, a connecting rod that can move back and forth is arranged in the fixed cylinder, a fixed clamping block is arranged at the end of the connecting rod that extends into the U-shaped groove, and a handle is arranged at the other end of the connecting rod. A fixed clamping groove is arranged on the second fixed door plate, and the fixed clamping groove cooperates with the fixed clamping block to preliminarily lock the two front fixed door plates.

[0010] Optionally, the embracing buckle assembly further comprises: A anti-falling spring lock is arranged on the upper part of the U-shaped groove, anti-falling clamping grooves are arranged on the two side plates of the U-shaped groove arranged transversely, and the anti-falling spring lock is arranged to be automatically clamped into the anti-falling clamping groove for secondary locking after the fixed clamping groove and the fixed clamping block are clamped in place. A first sensing support is arranged on the lower part of the U-shaped groove, the first limiting sensor is arranged on the first sensing support and corresponds to the position of the anti-falling spring lock, and the first limiting sensor cooperates with the anti-falling spring lock to detect whether the embracing buckle assembly is locked in place.

[0011] Optionally, the top pressing assembly comprises: a pressing plate, which is adjustably arranged on the top plate of the fixed frame; an adjusting screw, one end of which is rotatably connected to the pressing plate, and the other end of which extends upward through the top plate of the fixed frame, wherein a screw nut is arranged on the top plate of the fixed frame, and the other end of the adjusting screw is threadedly connected to the screw nut; a limiting rod, one end of which is connected to the pressing plate, and the other end of which extends upward through the top plate of the fixed frame.

[0012] Optionally, the pressing plate is provided with an inductive sheet on the side facing the side plate of the fixed frame, and the second limiting sensor is arranged on the side plate of the fixed frame, and the second limiting sensor cooperates with the inductive sheet to detect whether the top pressing assembly is pressed in place.

[0013] The present application has the beneficial effect that: by arranging the fixed frame rotatable along the horizontal axis, cooperating with the clamping buckle assembly and the top pressing assembly, the entire polishing liquid barrel is fixed in the support frame and is flipped and circulated as a whole, so that the polishing liquid in the barrel is naturally mixed under the action of gravity and centrifugal force, which fundamentally eliminates the impact and friction on the barrel body, without manual pushing, which greatly improves the mixing uniformity and operation efficiency, and avoids liquid leakage and secondary pollution.

[0014] The above description is only a summary of the technical solutions of the present application, in order to more clearly understand the technical means of the present application, and to implement the content of the description, the following will be described in detail with the preferred embodiments of the present application and with the help of the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 FIG. 1 is a first schematic structural view of a barrel shaking mechanism of a polishing liquid mixing and uniformizing device according to an embodiment of the present application; Figure 2 FIG. 2 is a second schematic structural view of a barrel shaking mechanism of a polishing liquid mixing and uniformizing device according to an embodiment of the present application; Figure 3 FIG. 3 is a schematic structural view of a clamping buckle assembly of a barrel shaking mechanism of a polishing liquid mixing and uniformizing device according to an embodiment of the present application; Figure 4 FIG. 4 is a schematic structural view of a support frame of a polishing liquid mixing and uniformizing device according to an embodiment of the present application; Figure 5 FIG. 5 is a first schematic structural view of an outer shell of a polishing liquid mixing and uniformizing device according to an embodiment of the present application; Figure 6A second schematic structural view of a housing of a polishing liquid mixing and uniformity device according to an embodiment of the present application; In the figure: 1, support frame; 11, reinforcing plate; 12, motor mounting plate; 13, triangular foot; 2, housing; 21, maintenance door; 22, anti-breaking door bar; 23, electric control cabinet door; 24, motor maintenance window; 25, heat dissipation louver; 26, junction box; 27, boom; 28, emergency stop button; 3, rocking barrel mechanism; 31, fixed frame; 32, front fixed door plate; 321, first fixed door plate; 322, second fixed door plate; 33, back fixed plate; 34, first limit sensor; 35, top compression assembly; 351, compression plate; 352, adjusting screw; 353, limit rod; 354, inductive sheet; 36, second limit sensor; 37, roller frame; 38, clamping buckle assembly; 381, U-shaped groove; 3811, anti-falling buckle groove; 382, fixed buckle groove; 383, fixed cylinder; 384, connecting rod; 385, fixed buckle block; 386, handle; 387, anti-falling spring lock; 388, first sensing bracket; 39, driving mechanism; 391, fixed vertical plate; 3911, first fixed vertical plate; 3912, second fixed vertical plate; 3913, wire tube; 392, driving motor; 393, second rotating shaft; 3931, positioning rod; 394, speed reducer; 395, first rotating shaft; 396, first fixed bearing seat; 397, second fixed bearing seat; 398, third limit sensor; 399, slip ring bracket; 3991, electric slip ring. DETAILED DESCRIPTION

[0016] The technical solutions of the present application will be described clearly and completely below with reference to the drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0017] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0018] In the description of the present application, it is to be noted that the terms "mounting", "connecting", "connection" should be understood broadly unless otherwise specifically defined and limited, for example, can be fixed connection, can also be detachable connection, or integrally connected; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through intermediate medium, can be internal communication of two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances. In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0019] Please refer to Figures 1 to 6 A kind of polishing liquid mixing equipment shown in a preferred embodiment of the present application includes support frame 1, shell 2 arranged outside support frame 1 and shake barrel mechanism 3 for driving polishing liquid barrel to rotate and stir, which is arranged in support frame 1.The shake barrel mechanism 3 includes fixed frame 31, front fixed door plate 32, back fixed plate 33, first limit sensor 34, top compression assembly 35 and second limit sensor 36.The fixed frame 31 is used to fix the limit polishing liquid barrel and can rotate along the horizontal axis, and the fixed frame 31 bottom is provided with roller stand 37.Two front fixed door plates 32 are hingedly arranged on one side of fixed frame 31, and a clamping buckle assembly 38 for locking is arranged between the two front fixed door plates 32.The back fixed plate 33 is arranged on the other side of the fixed frame 31, and the front fixed door plate 32 cooperates with the back fixed plate 33 to lock and fix the side of the polishing liquid barrel.The first limit sensor 34 is arranged on the front fixed door plate 32, for detecting whether the clamping buckle assembly 38 is locked in place.The top compression assembly 35 is arranged on the top plate of the fixed frame 31, for compressing and fixing the top of the polishing liquid barrel of different models.The second limit sensor 36 is arranged on the side plate of the fixed frame 31, for detecting whether the top compression assembly 35 is compressed in place.

[0020] According to the scheme of the embodiment of the present application, by arranging the fixed frame 31 that can rotate along the horizontal axis, cooperating with the clamping buckle assembly 38 and the top compression assembly 35, the entire polishing liquid barrel is fixed in the support frame and is turned over and circulated as a whole, so that the polishing liquid in the barrel is naturally mixed under the action of gravity and centrifugal force, which fundamentally eliminates the impact and friction on the barrel body, without manual pushing, greatly improving the mixing uniformity and operation efficiency, and avoiding liquid leakage and secondary pollution.

[0021] The following will be described in detail with specific embodiments: Further, please refer to Figure 1 And Figure 2The mixing device of the polishing liquid further comprises a driving mechanism 39, which comprises a fixed vertical plate 391, a driving motor 392 and a second rotating shaft 393. Two fixed vertical plates 391 are arranged on the two sides of the fixed frame 31 respectively, and the fixed vertical plate 391 comprises a first fixed vertical plate 3911 and a second fixed vertical plate 3912. The driving motor 392 is provided with a speed reducer 394 on the movable end, the speed reducer 394 is arranged on the first fixed vertical plate 3911, the movable end of the speed reducer 394 is connected with the side plate of the fixed frame 31 through a first rotating shaft 395, and the first fixed vertical plate 3911 is provided with a first fixed bearing seat 396 which is sleeved on the first rotating shaft 395. The second rotating shaft 393 is connected with the other side plate of the fixed frame 31, the second fixed vertical plate 3912 is provided with a second fixed bearing seat 397 which is sleeved on the second rotating shaft 393. Through the transmission of the driving motor 392, the speed reducer 394 and the rotating shaft, the stable driving of the fixed frame 31 is realized, the smooth and reliable overturning process is ensured, the vibration and eccentric torque are reduced through the bearing seat positioning. In the embodiment, the rotating speed and the rotating time of the fixed frame 31 can be controlled according to different types of polishing liquid, so that the polishing liquid can be fully mixed and uniform.

[0022] Further, referring to Figure 2 , the first fixed vertical plate 3912 is provided with a third limit sensor 398 for recording the original point information, the second rotating shaft 393 is provided with a positioning rod 3931, and the third limit sensor 398 cooperates with the positioning rod 3931 to position the fixed frame 31 at the original point. In this way, when the fixed frame 31 is not positioned during overturning, it can return to the initial original point for repositioning, so as to ensure the running accuracy of the overturning cycle, and the number of turns can also be checked.

[0023] Referring to Figure 2 , the first fixed vertical plate 3912 is provided with a slip ring bracket 399, and the slip ring bracket 399 is provided with an electric slip ring 3991 connected with the second rotating shaft 393. Referring to Figure 1 , the side plate of the fixed frame 31 is provided with a wire tube 3913 for fixing and guiding the sensor wire, and the electric slip ring 3991 can guide the wire and feedback the number of turns of the fixed frame 31.

[0024] Specifically, referring to Figure 1 and Figure 3The front fixed door plates 32 comprise a first fixed door plate 321 and a second fixed door plate 322. The embracing buckle assembly 38 comprises a U-shaped groove 381 and a fixed buckle groove 382. One end of the U-shaped groove 381 is connected with the first fixed door plate 321, and the other end of the U-shaped groove 381 is provided with a fixed cylinder 383. The fixed cylinder 383 is internally provided with a connecting rod 384 which can move back and forth. One end of the connecting rod 384 which extends into the U-shaped groove 381 is provided with a fixed clamping block 385, and the other end of the connecting rod 384 is provided with a handle 386. The fixed buckle groove 382 is arranged on the second fixed door plate 322, and the fixed buckle groove 382 cooperates with the fixed clamping block 385 to preliminarily lock the two front fixed door plates 32. The embracing buckle assembly 38 further comprises an anti-disengagement spring lock 387 and a first sensing bracket 388. The anti-disengagement spring lock 387 is arranged on the upper portion of the U-shaped groove 381, and the two side plates of the transversely arranged U-shaped groove 381 are correspondingly provided with anti-disengagement clamping grooves 3811. The anti-disengagement spring lock 387 is arranged to be automatically clamped into the anti-disengagement clamping grooves 3811 after the fixed buckle groove 382 and the fixed clamping block 385 are engaged in place to achieve secondary locking. The first sensing bracket 388 is arranged on the lower portion of the U-shaped groove 381, and the first limit sensor 34 is arranged on the first sensing bracket 388 and corresponds to the locking block position of the anti-disengagement spring lock 387. The first limit sensor 34 cooperates with the locking block of the anti-disengagement spring lock 387 to detect whether the embracing buckle assembly 38 is locked in place. The preliminary locking is achieved by the engagement of the fixed clamping block 385 and the fixed buckle groove 382, which has a compact structure and is easy to operate. After the preliminary locking, the locking block of the anti-disengagement spring lock 387 is automatically clamped downward into the anti-disengagement clamping groove 3811 to achieve secondary locking, and the first limit sensor 34 monitors the locking state to realize buckle state feedback and safety double protection. In this embodiment, a screw rod is arranged between the U-shaped groove and the first fixed door plate 321, which can be used to adjust the position of the U-shaped groove to adapt to grinding liquid barrels of different sizes.

[0025] See Figure 1 and Figure 2The top pressing assembly 35 includes a pressing plate 351, an adjusting screw 352, and a limiting rod 353. The pressing plate 351 is adjustably arranged on the top plate of the fixed frame 31. One end of the adjusting screw 352 is rotatably connected with the pressing plate 351, and the other end of the adjusting screw 352 extends upward through the top plate of the fixed frame 31, and a screw nut is arranged on the top plate of the fixed frame 31, and the other end of the adjusting screw 352 is threadedly connected with the screw nut. One end of the limiting rod 353 is connected with the pressing plate 351, and the other end of the limiting rod 353 extends upward through the top plate of the fixed frame 31. The pressing plate 351 is provided with an inductive sheet 354 on the side facing the side plate of the fixed frame 31, and the second limiting sensor 36 is arranged on the side plate of the fixed frame 31, and the second limiting sensor 36 cooperates with the inductive sheet 354 to detect whether the top pressing assembly 35 is pressed in place. According to different barrel heights, the height of the pressing plate 351 is adjusted by the adjusting screw 352 to press different sizes of polishing liquid barrels, so as to ensure that the barrel does not relatively displace during the overturning process. When the pressing plate 351 reaches the predetermined position, the inductive sheet 354 triggers the second limiting sensor 36, and a pressing in place signal is fed back, so as to prevent the barrel from being overturned due to the looseness, and to ensure the safety of personnel and equipment.

[0026] In particular, please refer to Figure 4 The support frame 1 is entirely welded from Q235 carbon steel, and the structure is composed of various cross-section steel materials: the main load-bearing beam uses a rectangular tube with a size of 100x80mm and 100x50mm and a plate thickness of 5mm, and the secondary load-bearing and connecting plate uses a rectangular tube with a size of 80x80mm and a plate thickness of 5mm and a size of 50x50mm and a plate thickness of 2mm. A reinforcing plate 11 is installed between the fixed vertical plate 391 and the support frame 1 to prevent flexural deformation. The motor mounting plate 12 is arranged on the first fixed vertical plate 3911 to ensure the positioning accuracy of the motor and the speed reducer 394. Lifting triangular supports 13 are arranged around the bottom of the skeleton, and universal wheels are arranged at the bottom of the supports to quickly adjust the height of the machine body and align with the on-site acid pushing platform. Square support reinforcements are additionally arranged at positions in the support frame 1 that bear large overturning torques. All exposed welds and cut sections are polished and rusted, and the surface of the overall support frame 1 is sprayed with a corrosion-resistant coating to improve corrosion resistance, expand the safety margin, and reduce the risk of metal ion pollution of the polishing liquid.

[0027] Please refer to Figure 5 and Figure 6The device shell 2 is made of 5mm thick engineering-grade white polypropylene plate, which is entirely wrapped outside the framework, can resist the corrosion of the grinding liquid and is easy to clean and maintain. Large-sized maintenance doors 21 are arranged on the front and back of the shell 2, and transparent PVC observation windows are arranged on the door leaves, so as to monitor the internal running condition in real time. A break-proof door stopper 22 is arranged on the top of the maintenance door 21, to prevent the door leaf from being accidentally opened during the overturning or maintenance process. An electric control cabinet door 23 and a motor maintenance window 24 are arranged on the side of the shell 2, to facilitate the maintenance and replacement of the PLC, frequency converter and motor. An oil-resistant and dust-proof sealing strip is arranged on the edge of all door leaves, to prevent liquid from splashing in. Heat dissipation louvers 25 are arranged on the top surface and both sides of the shell 2, to realize passive convection heat dissipation. All electrical cables are arranged in a closed junction box 26, to avoid the leakage hidden danger caused by the top surface opening. The operation panel and touch screen are installed on an adjustable height suspension arm 27, to facilitate the visual angle and use habit of different operators. An emergency stop button 28 is arranged on the diagonal of the machine body, to ensure that the power can be quickly cut off no matter where the operation is performed. The overall shell 2 realizes full-closed protection, which not only ensures the safety of personnel, but also isolates the external dust and moisture from the internal elements.

[0028] During installation of the device, the height of the screw foot is first adjusted, so that the working plane of the roller line is flush with the platform of the acid pushing vehicle on site. During use, the grinding liquid barrel is pushed into the device together with the acid pushing vehicle, the break-proof door stopper 22 is removed, the front maintenance door 21 is opened and the wheels of the acid pushing vehicle are locked. After the fixed chain on the acid pushing vehicle is removed, the grinding liquid barrel is pushed into the center of the rocking barrel mechanism 3, the barrel body is locked by the clamping buckle assembly 38, and then the top pressing mechanism is adjusted to press the top of the barrel body. The first and second limit sensors 36 detect whether the barrel body is locked in place. After detection, the front maintenance door 21 is closed and the break-proof door stopper 22 is lowered, and the device starts to rotate at the set rotation speed and time. After the operation is completed, under the action of the third limit sensor 398, the fixing frame 31 returns to the initial positioning position, the pressing mechanism and the clamping buckle assembly 38 are loosened in the reverse order, the front maintenance door 21 is pushed open, the grinding liquid barrel is taken out, and one mixing operation is completed. Continuous operation can be realized by repeating the above process.

[0029] The technical features of the above-described embodiments can be combined in any manner. To make the description concise, all possible combinations of the technical features in the above-described embodiments are not described, but as long as the combinations of the technical features do not conflict, they should be considered within the scope of the present disclosure.

[0030] The above-described embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the scope of the patent. It should be pointed out that for ordinary skilled persons in the art, some modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A grinding liquid mixing and homogenizing device, characterized in that: The invention comprises a support frame, a shell arranged outside the support frame, and a barrel shaking mechanism arranged inside the support frame and used to drive the grinding liquid barrel to rotate and stir. The barrel shaking mechanism comprises: A fixed frame, used to fix the limited grinding liquid barrel and can rotate along the horizontal axis, and a roller frame is provided at the bottom of the fixed frame; Two front fixed door panels are hingedly arranged on one side of the fixing frame, and a clamping buckle assembly for locking and fixing is provided between the two front fixed door panels; A back fixing plate is provided on the other side of the fixing frame, and the front fixing door plate cooperates with the back fixing plate to lock and fix the circumference of the grinding liquid barrel; a first limit sensor, disposed on the front fixed door panel, for detecting whether the holding buckle assembly is locked in place; A top pressing assembly is provided on the top plate of the fixing frame and is used to press and fix the tops of grinding liquid barrels of different models; A second limit sensor is provided on the side plate of the fixing frame and is used to detect whether the top pressing assembly is pressed into place.

2. The grinding liquid mixing and homogenizing device according to claim 1, characterized in that: Also included is a driving mechanism, the driving mechanism comprising: Two fixed vertical plates, respectively arranged on both sides of the fixing frame, the fixed vertical plates including a first fixed vertical plate and a second fixed vertical plate; A drive motor, wherein a reducer is provided on the movable end of the drive motor, the reducer is provided on the first fixed vertical plate, the movable end of the reducer is connected to a side plate of the fixed frame via a first rotating shaft, and the first fixed vertical plate is provided with a first fixed bearing seat sleeved on the first rotating shaft; The second rotating shaft is connected to the other side plate of the fixing frame. The second fixed vertical plate is provided with a second fixed bearing seat, and the second fixed bearing seat is sleeved on the second rotating shaft.

3. The grinding liquid mixing and homogenizing device according to claim 2, characterized in that: The second fixed vertical plate is provided with a third limit sensor for recording origin information, the second rotating shaft is provided with a positioning rod, and the third limit sensor cooperates with the positioning rod to perform origin positioning on the fixing frame.

4. The grinding liquid mixing and homogenizing device according to claim 2, characterized in that: A slip ring bracket is provided on the second fixed vertical plate, and an electric slip ring connected to the second rotating shaft is provided on the slip ring bracket.

5. The grinding liquid mixing and homogenizing device according to claim 1, characterized in that: The front fixed door panel includes a first fixed door panel and a second fixed door panel, and the holding buckle assembly includes: A U-shaped groove, one end of the U-shaped groove is connected to the first fixed door panel, the other end of the U-shaped groove is provided with a fixed cylinder, a connecting rod that can move back and forth is provided in the fixed cylinder, the end of the connecting rod extending into the U-shaped groove is provided with a fixed block, and the other end of the connecting rod is provided with a handle; A fixed card slot is provided on the second fixed door panel, and the fixed card slot cooperates with the fixed card block to perform primary locking on the two front fixed door panels.

6. The grinding liquid mixing and homogenizing device according to claim 5, characterized in that: The holding buckle assembly further includes: An anti-slip spring lock is arranged on the upper part of the U-shaped groove, and anti-slip grooves are correspondingly provided on the two side plates of the transversely arranged U-shaped groove. The anti-slip spring lock is configured to automatically snap into the anti-slip groove for secondary locking after the fixed groove and the fixed card block are engaged in place; The first sensing bracket is arranged at the lower part of the U-shaped groove, the first limit sensor is arranged on the first sensing bracket and corresponds to the position of the anti-off spring lock block, and the first limit sensor cooperates with the anti-off spring lock block to detect whether the clamping buckle assembly is locked in place.

7. The grinding liquid mixing and homogenizing device according to claim 1, characterized in that: The top pressing assembly comprises: A pressing plate, which is adjustable in height and is arranged on the top plate of the fixing frame; An adjusting screw, one end of which is rotatably limitedly connected to the pressing plate, and the other end of which extends upward through the top plate of the fixing frame. A lead screw nut is provided on the top plate of the fixing frame, and the other end of which is threadedly connected to the lead screw nut; A limiting rod, one end of which is connected to the pressing plate, and the other end of which passes through the top plate of the fixing frame and extends upward.

8. The grinding liquid mixing and homogenizing device according to claim 7, characterized in that: A sensing piece is provided on the side of the pressing plate facing the side plate of the fixing frame. The second limit sensor is provided on the side plate of the fixing frame. The second limit sensor cooperates with the sensing piece to detect whether the top pressing assembly is pressed into place.

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