Glass composition

Abstract

The invention provides a glass composition with high light transmittance. The invention relates to a glass composition which comprises the following components in percentage by weight: 46-57.5% of SiO2; 2 to 10 percent of B2O3; 14 to 26 percent of Al2O3; 1 to 8% of ZnO; 1 to 8 percent of CaO; and 4.5 to 14.5 percent of MgO, wherein the content of SiO2 / MgO is 3.5 to 10.0 percent. Through reasonable component design, the glass composition obtained by the invention has relatively high light transmittance.

Description

TECHNICAL FIELD

[0001] The present application relates to a glass composition, in particular to a glass composition with high light transmittance. BACKGROUND

[0002] The materials commonly used for chip packaging carriers at present mainly include monocrystalline silicon wafers, metal materials and ceramic materials. The monocrystalline silicon wafers have the advantages of high mechanical strength, high thermal expansion coefficient, high packaging yield and the like, and are widely used at present. However, the monocrystalline silicon wafers have the fatal defect of being difficult to peel off after temporary bonding. The metal materials have high strength, but need high-temperature temporary bonding when bonding with the monocrystalline silicon wafers, which can easily cause damage to the circuit layer on the surface of the silicon wafers. The ceramic materials also need high-temperature bonding. Glass has obvious advantages in light transmittance, chemical properties, mechanical properties, electrical properties and manufacturing and processing costs compared with other materials (such as metal, crystal and ceramic), and has been gradually applied to semiconductor packaging and semiconductor process applications in recent years.

[0003] When glass is applied to the field of semiconductor packaging, ultraviolet laser peeling technology is usually used. The ultraviolet laser peeling technology has the advantages of high yield and low cost compared with traditional peeling technology, but the carrier glass needs to have high transmittance in the ultraviolet light band. The higher the light transmittance of glass in the ultraviolet light band, the higher the efficiency of debonding in the packaging process, and the smaller the risk of warping of the packaged wafer. At the same time, if the visible light transmittance of the glass is high, the optical detection equipment in the packaging process can also achieve higher efficiency and higher precision detection. SUMMARY

[0004] Based on the above reasons, the technical problem to be solved by the present application is to provide a glass composition with high light transmittance.

[0005] The technical solution adopted by the present application to solve the technical problem is:

[0006] (1) A glass composition, the components of which are represented by weight percentage, containing: SiO2: 46-57.5%; B2O3: 2-10%; Al2O3: 14-26%; ZnO: 1-8%; CaO: 1-8%; MgO: 4.5-14.5%, wherein SiO2 / MgO is 3.5-10.0.

[0007] (2) The glass composition according to (1), further comprising, in terms of weight percentage: ZrO2: 0 to 3%; and / or TiO2: 0 to 3%; and / or BaO: 0 to 5%; and / or SrO: 0 to 5%; and / or Ln2O3: 0 to 5%; and / or Nb2O5: 0 to 3%; and / or WO3: 0 to 3%; and / or Ta2O5: 0 to 3%; and / or GeO2: 0 to 3%; and / or Rn2O: 0 to 3%; and / or fining agent: 0 to 2%, the Rn2O being one or more of Li2O, Na2O, K2O, the Ln2O3 being one or more of La2O3, Y2O3, Gd2O3, and the fining agent being one or more of Sb2O3, SnO2, CeO2.

[0008] (3) A glass composition comprising, in terms of weight percentage, SiO2, B2O3, Al2O3, ZnO, CaO, and MgO, wherein SiO2 / MgO is 3.5 to 10.0, and the glass composition has a light transmittance T550 of 88.0% or more and a light transmittance T355 of 85.0% or more. 550nm 355nm

[0009] (4) The glass composition according to (3), comprising, in terms of weight percentage: SiO2: 46 to 57.5%; and / or B2O3: 2 to 10%; and / or Al2O3: 14 to 26%; and / or ZnO: 1 to 8%; and / or CaO: 1 to 8%; and / or MgO: 4.5 to 14.5%; and / or ZrO2: 0 to 3%; and / or TiO2: 0 to 3%; and / or BaO: 0 to 5%; and / or SrO: 0 to 5%; and / or Ln2O3: 0 to 5%; and / or Nb2O5: 0 to 3%; and / or WO3: 0 to 3%; and / or Ta2O5: 0 to 3%; and / or GeO2: 0 to 3%; and / or Rn2O: 0 to 3%; and / or fining agent: 0 to 2%, the Rn2O being one or more of Li2O, Na2O, K2O, the Ln2O3 being one or more of La2O3, Y2O3, Gd2O3, and the fining agent being one or more of Sb2O3, SnO2, CeO2.

[0010] (5) The glass composition according to any one of (1) to (4), comprising, in terms of weight percentage, one or more of the following seven cases:

[0011] 1) Al2O3 / SiO2 is 0.28 to 0.52, preferably Al2O3 / SiO2 is 0.32 to 0.50, more preferably Al2O3 / SiO2 is 0.35 to 0.45;

[0012] ​​2) (MgO + ZnO) / Al2O3 is 0.25 to 1.4, preferably (MgO + ZnO) / Al2O3 is 0.30 to 1.2, more preferably (MgO + ZnO) / Al2O3 is 0.40 to 1.0, further preferably (MgO + ZnO) / Al2O3 is 0.50 to 0.90;

[0013] 3) MgO / ZnO is 0.8 to 8.0, preferably MgO / ZnO is 1.0 to 6.0, more preferably MgO / ZnO is 1.2 to 4.0, further preferably MgO / ZnO is 1.5 to 3.0;

[0014] 4) (CaO + BaO) / B2O3 is 0.20 to 3.5, preferably (CaO + BaO) / B2O3 is 0.30 to 2.0, more preferably (CaO + BaO) / B2O3 is 0.40 to 1.5, further preferably (CaO + BaO) / B2O3 is 0.50 to 1.0;

[0015] 5) ZnO / B2O3 is 0.2 to 3.0, preferably ZnO / B2O3 is 0.3 to 2.0, more preferably ZnO / B2O3 is 0.4 to 1.5, further preferably ZnO / B2O3 is 0.55 to 1.2;

[0016] 6) SiO2 / (MgO + ZnO) is 2.2 to 7.5, preferably SiO2 / (MgO + ZnO) is 2.5 to 7.0, more preferably SiO2 / (MgO + ZnO) is 3.0 to 5.5, further preferably SiO2 / (MgO + ZnO) is 3.2 to 4.5;

[0017] 7) SiO2 / MgO is 4.0 to 8.0, preferably SiO2 / MgO is 4.5 to 7.0, more preferably SiO2 / MgO is 5.0 to 6.5.

[0018] (6) The glass composition according to any one of (1) to (4), the components of which are expressed in weight percent, wherein: Ln2O3 / ZnO is 0.5 or less, preferably Ln2O3 / ZnO is 0.3 or less, more preferably Ln2O3 / ZnO is 0.2 or less, further preferably Ln2O3 / ZnO is 0.1 or less; and / or Rn2O / Al2O3 is 0.18 or less, preferably Rn2O / Al2O3 is 0.15 or less, more preferably Rn2O / Al2O3 is 0.1 or less, further preferably Rn2O / Al2O3 is 0.05 or less; and / or Rn2O / MgO is 0.5 or less, preferably Rn2O / MgO is 0.3 or less, more preferably Rn2O / MgO is 0.2 or less, further preferably Rn2O / MgO is 0.1 or less, the Rn2O being one or more of Li2O, Na2O, K2O, the Ln2O3 being one or more of La2O3, Y2O3, Gd2O3.

[0019] (7) The glass composition according to any one of (1) to (4), the components of which are expressed in weight percent, wherein: SiO2: 48 to 56%, preferably SiO2: 50 to 55%; and / or B2O3: 3 to 9%, preferably B2O3: 4 to 8%; and / or Al2O3: 16 to 25%, preferably Al2O3: 18 to 23%; and / or ZrO2: 0 to 2%, preferably ZrO2: 0 to 1%; and / or TiO2: 0 to 2%, preferably TiO2: 0 to 1%; and / or ZnO: 2 to 7%, preferably ZnO: 3 to 6.5%; and / or BaO: 0 to 3.5%, preferably BaO: 0.5 to 2%; and / or SrO: 0 to 3%, preferably SrO: 0 to 1%; and / or CaO: 1.5 to 7%, preferably CaO: 2 to 5%; and / or MgO: 6 to 13%, preferably MgO: 7 to 12%; and / or Ln2O3: 0 to 3%, preferably Ln2O3: 0 to 1%; and / or Nb2O5: 0 to 2%, preferably Nb2O5: 0 to 1%; and / or WO3: 0 to 2%, preferably WO3: 0 to 1%; and / or Ta2O5: 0 to 2%, preferably Ta2O5: 0 to 1%; and / or GeO2: 0 to 2%, preferably GeO2: 0 to 1%; and / or Rn2O: 0 to 2%, preferably Rn2O: 0 to 1%; and / or fining agent: 0 to 1%, preferably fining agent: 0 to 0.5%, the Rn2O being one or more of Li2O, Na2O, K2O, the Ln2O3 being one or more of La2O3, Y2O3, Gd2O3, the fining agent being one or more of Sb2O3, SnO2, CeO2.

[0020] (8) The glass composition according to any one of (1) to (4), which does not contain Zr02; and / or does not contain Ti02; and / or does not contain SrO; and / or does not contain La203; and / or does not contain Y203; and / or does not contain Gd203; and / or does not contain Nb205; and / or does not contain W03; and / or does not contain Ta205; and / or does not contain Ge02; and / or does not contain Li20; and / or does not contain Na20; and / or does not contain K20; and / or does not contain P205; and / or does not contain Fe203; and / or does not contain F.

[0021] (9) The glass composition according to any one of (1) to (4), which has a coefficient of thermal expansion a 20 / 300℃ of 31 x 10 -7 / K to 45 x 10 -7 / K, preferably 33 x 10 -7 / K to 42 x 10 -7 / K, more preferably 35 x 10 -7 / K to 40 x 10 -7 / K; and / or an acid resistance stability D A of Class 2 or more, preferably Class 1; and / or a water resistance stability D W of Class 2 or more, preferably Class 1; and / or a refractive index n d of 1.51 to 1.58, preferably 1.52 to 1.57, more preferably 1.53 to 1.56; and / or an Abbe number v d of 57 to 63, preferably 58 to 62, more preferably 59 to 61.5; and / or a Young's modulus E of 83 GPa or more, preferably 85 GPa or more, more preferably 87 GPa or more; and / or a transformation temperature T g of 700°C or more, preferably 710°C or more, more preferably 720°C or more, further preferably 725 to 745°C; and / or a density p of 2.90 g / cm 3 or more, preferably 2.80 g / cm 3 or more, more preferably 2.70 g / cm 3 or more; and / or a viscosity at 1400°C of 170 to 220 dPaS, preferably 180 to 210 dPaS, more preferably 185 to 205 dPaS; and / or a light transmittance T 550nm at 550 nm of 88.0% or more, preferably 89.0% or more, more preferably 90.0% or more; and / or a light transmittance T 355nm at 355 nm of 85.0% or more, preferably 87.0% or more, more preferably 89.0% or more; and / or a dielectric constant of 3.5 to 8.0, preferably 4.0 to 7.5, more preferably 5.0 to 6.7; and / or a surface resistance of 6.5 x 1012 ~ 9.8 x 10 12 Ω, preferably 7.5 x 10 12 ~ 9.2 x 10 12 Ω, more preferably 7.8 x 10 12 ~ 8.8 x 10 12 Ω; and / or the Knoop hardness H K is 500 x 10 7 Pa or more, preferably 520 x 10 7 Pa or more, more preferably 540 x 10 7 Pa or more.

[0022] (10) A packaging container made of the glass composition described in any one of (1) to (9).

[0023] (11) A glass element made of the glass composition described in any one of (1) to (9).

[0024] (12) An apparatus containing the glass composition described in any one of (1) to (9), or containing the glass element described in (11).

[0025] The present application has the advantageous effect that the glass composition obtained by the present application has a high light transmittance by a rational component design. DETAILED DESCRIPTION

[0026] Hereinafter, the embodiments of the glass composition of the present application will be described in detail, but the present application is not limited to the following embodiments, and can be implemented by appropriately changing within the scope of the object of the present application. Further, as for the repeatedly described parts, although there are appropriately omitted descriptions, the gist of the present application is not limited thereby. In the present specification, the glass composition of the present application will be sometimes simply referred to as glass.

[0027] [GLASS COMPOSITION]

[0028] Hereinafter, the range of each component of the glass composition of the present application will be described. In the present application, if not otherwise specified, the content, the total content, and the entire content of each component are all expressed in terms of weight percentage (wt%), i.e., the content, the total content, and the entire content of each component are expressed in terms of weight percentage with respect to the total amount of the glass substance converted into the composition of oxides. Here, the "composition converted into oxides" means that, in the case where the oxides, complex salts, and hydroxides, etc. used as raw materials for the composition components of the glass composition of the present application are decomposed and converted into oxides upon melting, the total amount of the oxides is taken as 100%.

[0029] Unless otherwise indicated herein, the numerical values listed in this application are inclusive of the ends, and the terms "at least" and "up to" encompass the specific value stated and all integers and fractions within the range defined by the method. The term "and / or" as used herein is inclusive, e.g., "A and / or B" means only A, only B, or both A and B.

[0030] <Essential and Optional Components>

[0031] SiO2 is the main component of the glass skeleton, and has an important influence on the high temperature viscosity and the coefficient of thermal expansion of the glass. If the content of SiO2 is less than 46%, the coefficient of thermal expansion of the glass increases, and it is difficult to achieve the desired coefficient of thermal expansion of the application, and the transition temperature and the resistance to devitrification decrease. If the content of SiO2 exceeds 57.5%, the high temperature viscosity of the glass becomes large, which is not conducive to obtaining large-size high-quality glass. Therefore, in the present application, the content of SiO2 is 46% to 57.5%, preferably 48% to 56%, and more preferably 50% to 55%.

[0032] Al2O3 can improve the Young's modulus of the glass, which is conducive to improving the warping and cracking resistance of the glass, and can also reduce the coefficient of thermal expansion of the glass and adjust the dielectric constant of the glass. In the present application, the content of Al2O3 is more than 14% to achieve the above effects. However, if the content of Al2O3 is too high, the melting property of the glass decreases and the anti-crystallization performance decreases. Therefore, in the present application, the content of Al2O3 is 14% to 26%, preferably 16% to 25%, and more preferably 18% to 23%.

[0033] In some embodiments, the ratio of the content of Al2O3 to the content of SiO2, Al2O3 / SiO2, is controlled in the range of 0.28 to 0.52, which can improve the Young's modulus of the glass while achieving a suitable coefficient of thermal expansion. Therefore, it is preferred that Al2O3 / SiO2 is 0.28 to 0.52, more preferably Al2O3 / SiO2 is 0.32 to 0.50, and further preferably Al2O3 / SiO2 is 0.35 to 0.45.

[0034] B2O3 can improve the melting property and the resistance to devitrification of the glass. In the present application, the content of B2O3 is more than 2% to achieve the above effects. However, if the content of B2O3 exceeds 10%, it is difficult to achieve the desired range of the coefficient of thermal expansion of the glass. Therefore, in the present application, the content of B2O3 is 2% to 10%, preferably 3% to 9%, and more preferably 4% to 8%.

[0035] ZnO can improve the melting property of the glass and adjust the high temperature viscosity of the glass. However, if the content of ZnO is too high, the transition temperature of the glass decreases, the glass is not suitable for use in high temperature environment, and the chemical stability of the glass decreases. Therefore, the content of ZnO is 1-8%, preferably 2-7%, and more preferably 3-6.5%.

[0036] In some embodiments, the ratio of the content of ZnO to the content of B2O3, ZnO / B2O3, is controlled in the range of 0.2-3.0, which can improve the acid resistance of the glass while preventing the hardness of the glass from decreasing. Therefore, ZnO / B2O3 is preferably 0.2-3.0, more preferably ZnO / B2O3 is 0.3-2.0, further preferably ZnO / B2O3 is 0.4-1.5, and more further preferably ZnO / B2O3 is 0.55-1.2.

[0037] MgO can improve the light transmittance of the glass, decrease the density of the glass, and make the glass have suitable dielectric constant. However, if the content of MgO is too high, the chemical stability of the glass decreases. Therefore, the content of MgO in the present application is 4.5-14.5%, preferably 6-13%, and more preferably 7-12%.

[0038] In some embodiments, the ratio of the content of SiO2 to the content of MgO, SiO2 / MgO, is controlled in the range of 3.5-10.0, which can improve the light transmittance of the glass while obtaining better dielectric constant. Therefore, SiO2 / MgO is preferably 3.5-10.0, more preferably SiO2 / MgO is 4.0-8.0, further preferably SiO2 / MgO is 4.5-7.0, and more further preferably SiO2 / MgO is 5.0-6.5.

[0039] In some embodiments, the ratio of the content of MgO to the content of ZnO, MgO / ZnO, is controlled in the range of 0.8-8.0, which can make the glass have better dielectric constant while preventing the density of the glass from increasing. Therefore, MgO / ZnO is preferably 0.8-8.0, more preferably MgO / ZnO is 1.0-6.0, further preferably MgO / ZnO is 1.2-4.0, and more further preferably MgO / ZnO is 1.5-3.0.

[0040] In some embodiments, controlling the ratio (MgO+ZnO) / Al2O3 between the combined content of MgO and ZnO (MgO+ZnO) and the content of Al2O3 ((MgO+ZnO) / Al2O3)) within a range of 0.25 to 1.4 can improve the glass's water resistance while maintaining good high-temperature viscosity. Therefore, (MgO+ZnO) / Al2O3 is preferably 0.25 to 1.4, more preferably 0.30 to 1.2, further preferably 0.40 to 1.0, and even more preferably 0.50 to 0.90.

[0041] In some embodiments, controlling the ratio of the SiO2 content to the total MgO and ZnO content (MgO + ZnO) (SiO2 / (MgO + ZnO)) within a range of 2.2 to 7.5 can improve the hardness of the glass while preventing deterioration in the acid resistance of the glass. Therefore, SiO2 / (MgO + ZnO) is preferably 2.2 to 7.5, more preferably 2.5 to 7.0, further preferably 3.0 to 5.5, and even more preferably 3.2 to 4.5.

[0042] CaO can improve the Young's modulus and meltability of glass without significantly increasing the thermal expansion coefficient and density. However, if its content is too high, the glass's anti-vitrification performance will decrease. Therefore, the CaO content is 1-8%, preferably 1.5-7%, and more preferably 2-5%.

[0043] SrO can adjust the high-temperature viscosity and meltability of glass, but if its content is too high, the chemical stability of the glass will be reduced. Therefore, the SrO content is 0-5%, preferably 0-3%, and more preferably 0-1%. In some embodiments, it is further preferred that SrO is not contained.

[0044] BaO can increase the refractive index of glass and adjust the surface resistance and high-temperature viscosity of glass. However, if its content is too high, the thermal expansion coefficient and density of the glass increase. Therefore, the BaO content in the present invention is 0-5%, preferably 0-3.5%, and more preferably 0.5-2%.

[0045] In some embodiments, the ratio between the total content of CaO, BaO and the content of B2O3, (CaO+BaO) / B2O3, is controlled in the range of 0.20-3.5, so that the glass has a good transition temperature and surface resistance. Therefore, it is preferred that (CaO+BaO) / B2O3 is in the range of 0.20-3.5, more preferably (CaO+BaO) / B2O3 is in the range of 0.30-2.0, further preferably (CaO+BaO) / B2O3 is in the range of 0.40-1.5, and more further preferably (CaO+BaO) / B2O3 is in the range of 0.50-1.0.

[0046] ZrO2 can increase the refractive index and chemical stability of the glass, reduce the thermal expansion coefficient of the glass, and optimize the high temperature viscosity. However, when the content of ZrO2 is too high, the resistance to devitrification of the glass decreases, and the ultraviolet light transmittance decreases. Therefore, the content of ZrO2 is in the range of 0-3%, preferably in the range of 0-2%, and more preferably in the range of 0-1%. In some embodiments, it is further preferred that the glass does not contain ZrO2.

[0047] TiO2 can increase the refractive index and dispersion of the glass, and adjust the thermal expansion coefficient of the glass. However, when the content of TiO2 exceeds 3%, the light transmittance of the glass decreases rapidly, and the thermal expansion coefficient of the glass is difficult to meet the design requirements. Therefore, the content of TiO2 is in the range of 0-3%, preferably in the range of 0-2%, and more preferably in the range of 0-1%. In some embodiments, it is further preferred that the glass does not contain TiO2.

[0048] Ln2O3 (Ln2O3 is one or more of La2O3, Y2O3, Gd2O3) can increase the resistance to devitrification and refractive index of the glass. However, when the content of Ln2O3 is too high, the ultraviolet light transmittance of the glass decreases, and the transition temperature is difficult to meet the design requirements. Therefore, the content of Ln2O3 is in the range of 0-5%, preferably in the range of 0-3%, and more preferably in the range of 0-1%. In some embodiments, it is further preferred that the glass does not contain La2O3; and / or does not contain Y2O3; and / or does not contain Gd2O3.

[0049] In some embodiments, the ratio between the content of Ln2O3 and the content of ZnO, Ln2O3 / ZnO, is controlled to be less than 0.5, so that the glass has a good high temperature viscosity while preventing the anti-crystallization performance of the glass from deteriorating. Therefore, it is preferred that Ln2O3 / ZnO is less than 0.5, more preferably Ln2O3 / ZnO is less than 0.3, further preferably Ln2O3 / ZnO is less than 0.2, and more further preferably Ln2O3 / ZnO is less than 0.1.

[0050] Nb2O5 is a high refractive and high dispersive component, which can increase the refractive index and resistance to devitrification of the glass, and decrease the thermal expansion coefficient of the glass. However, if the content of Nb2O5 is too high, the ultraviolet transmittance of the glass decreases, and the thermal expansion coefficient of the glass is too low. Therefore, the content of Nb2O5 is 0-3%, preferably 0-2%, and more preferably 0-1%. In some embodiments, it is further preferred that Nb2O5 is not contained.

[0051] WO3 is a high refractive and high dispersive component, which can increase the refractive index and resistance to devitrification of the glass. However, if the content of WO3 is too high, the visible light transmittance of the glass decreases. Therefore, the content of WO3 is 0-3%, preferably 0-2%, and more preferably 0-1%. In some embodiments, it is further preferred that WO3 is not contained.

[0052] Ta2O5 can increase the refractive index of the glass. However, if the content of Ta2O5 is high, the cost of the glass increases greatly, and the melting performance of the glass becomes poor, and the density increases. Therefore, the content of Ta2O5 is 0-3%, preferably 0-2%, and more preferably 0-1%. In some embodiments, it is further preferred that Ta2O5 is not contained.

[0053] GeO2 can increase the refractive index and resistance to devitrification of the glass. However, the control of the cost of the raw materials of the glass is not good when GeO2 is contained in the glass, and the chemical stability of the glass decreases when the content of GeO2 is high. Therefore, the content of GeO2 is 0-3%, preferably 0-2%, and more preferably 0-1%. In some embodiments, it is further preferred that GeO2 is not contained.

[0054] Rn2O (Rn2O is one or more of Li2O, Na2O, K2O) can decrease the melting temperature and density of the glass. However, if the content of Rn2O is high, the transition temperature of the glass decreases. On the other hand, when the glass containing Rn2O is used as a carrier, alkali metal ions Li + , Na + , K + may enter the single crystal silicon substrate, and contaminate the chip circuit. Therefore, the content of Rn2O in the present application is 0-3%, preferably 0-2%, and more preferably 0-1%. In some embodiments, it is further preferred that Li2O is not contained; and / or Na2O is not contained; and / or K2O is not contained.

[0055] In some embodiments, the ratio of the content of Rn2O to the content of Al2O3, Rn2O / Al2O3, is controlled to be below 0.18, so that the glass has a good thermal expansion coefficient, and the Young's modulus of the glass does not become poor. Therefore, it is preferred that Rn2O / Al2O3 is below 0.18, more preferably Rn2O / Al2O3 is below 0.15, further preferably Rn2O / Al2O3 is below 0.1, and more further preferably Rn2O / Al2O3 is below 0.05.

[0056] In some embodiments, the ratio Rn20 / MgO between the content of Rn20 and the content of MgO is controlled to be 0.5 or less, which can allow the glass to have a good thermal expansion coefficient while preventing the high-temperature viscosity of the glass from deteriorating. Therefore, it is preferable that Rn20 / MgO be 0.5 or less, more preferable that Rn20 / MgO be 0.3 or less, further preferable that Rn20 / MgO be 0.2 or less, and still further preferable that Rn20 / MgO be 0.1 or less.

[0057] In the present application, one or more components of Sb203, Sn02, and Ce02 are contained as fining agents in an amount of 0 to 2% to improve the fining effect of the glass. It is preferable that the content of the fining agent be 0 to 1%, and more preferable that the content of the fining agent be 0 to 0.5%.

[0058] <Components not to be contained>

[0059] P205easily generates microphases in the glass, which scatter a portion of short wavelengths, making it difficult to achieve the designed transmittance. Therefore, in some embodiments, it is preferable that P205not be contained.

[0060] Fe203causes the glass to be colored, which is not preferable for the glass to have an excellent light transmittance. Therefore, in some embodiments, it is preferable that Fe203not be contained.

[0061] F (fluorine) lowers the transition temperature of the glass, and volatilizes during the glass melting process, causing the glass components to become unstable and the quality of the glass to deteriorate. Therefore, in some embodiments, it is preferable that F not be contained.

[0062] In the glass of the present application, even if transition metals such as V, Cr, Mn, Fe, Co, Ni, Cu, Ag, and Mo are contained in small amounts, alone or in combination, the glass is colored, and absorbs specific wavelengths in the visible region, thereby weakening the property of the present application to improve the visible light transmittance. Therefore, for glasses that have a requirement for the transmittance of the visible region, it is preferable that the above components not be contained in practice.

[0063] Oxides of Th, Cd, Tl, Os, Be, and Se have a tendency to be controlled in use as harmful chemical substances in recent years, and measures for environmental protection are necessary not only in the manufacturing process of the glass, but also in the processing process and disposal after the product is manufactured. Therefore, in the case where the influence on the environment is considered, it is preferable that they not be contained in practice except for inevitable mixing. Thus, the glass becomes practically free of substances that pollute the environment. Therefore, even if no special measures for environmental countermeasures are taken, the glass of the present application can be manufactured, processed, and disposed of.

[0064] In order to achieve environmental friendliness, the glass of the present invention preferably does not contain As2O3 and PbO.

[0065] The "does not contain" and "0%" recorded herein means that the compound, molecule or element is not intentionally added as a raw material to the glass of the present invention. However, as raw materials and / or equipment for producing glass, there may be certain impurities or components that are not intentionally added, which may be contained in small amounts or trace amounts in the final glass. Such situations are also within the scope of protection of the patent of the present invention.

[0066] Next, the properties of the glass composition of the present invention will be described.

[0067] <Refractive Index and Abbe Number>

[0068] The refractive index of the glass composition (n d ) and Abbe number (ν d ) According to the national standard GB / T 7962.

[0069] 1-2010》.

[0070] In some embodiments, the refractive index (n d ) has a lower limit of 1.51, preferably 1.52, and more preferably 1.53. In some embodiments, the refractive index (n d ) is 1.58, preferably 1.57, and more preferably 1.56.

[0071] In some embodiments, the Abbe number (ν d ) is 57, preferably 58, and more preferably 59. In some embodiments, the Abbe number (ν d ) is 63, preferably 62, and more preferably 61.5.

[0072] <Coefficient of Thermal Expansion>

[0073] Thermal expansion coefficient of glass composition (α 20 / 300℃ ) Data was tested at 20-300°C according to the method specified in the national standard "GB / T 7962.16-2010." The thermal expansion coefficient of the glass composite should not be too high or too low. It needs to be thermally matched with the encapsulation medium (such as resin material) to prevent excessive differences in thermal expansion coefficients, which can cause stress rise in the interface layer and lead to cracking.

[0074] In some embodiments, the coefficient of thermal expansion (α 20 / 300℃ ) is 31×10 -7 / K~45×10 -7 / K, preferably 33×10-7 / K~42×10 -7 / K, more preferably 35×10 -7 / K~40×10 -7 / K.

[0075] <Acid action stability>

[0076] The acid action stability (D A ) of the glass composition is tested according to the method specified in the national standard GB / T 17129 (powder method). The acid action stability is sometimes referred to simply as acid resistance or acid stability in this specification. The better the acid resistance of the glass composition, the less likely the glass is to fail in the application process if there is a strong acidic environment.

[0077] In some embodiments, the acid action stability (D A ) of the glass composition of the present application is Class 2 or better, preferably Class 1.

[0078] <Water action stability>

[0079] The water action stability (D W ) of the glass composition is tested according to the method specified in the national standard GB / T 17129 (powder method). The water action stability is sometimes referred to simply as water resistance or water stability in this specification. The better the water resistance of the glass composition, the less likely the glass is to be eroded by water in the application process. In particular, the glass composition has excellent water resistance, which can avoid water erosion in the packaging process. If the water resistance of the glass is poor, it may cause the glass transmittance to decrease, reducing the debonding efficiency, and in severe cases, the carrier plate may be broken and fail.

[0080] In some embodiments, the water action stability (D W ) of the glass composition of the present application is Class 2 or better, preferably Class 1.

[0081] <Young's modulus>

[0082] The Young's modulus (E) of the glass composition is calculated using the longitudinal wave velocity and the transverse wave velocity of the ultrasonic wave, according to the following formula.

[0083] The following formula is used to calculate:

[0084]

[0085] wherein G = V S 2 p

[0086] In the formula:

[0087] E is the Young's modulus, Pa;

[0088] G is the shear modulus, Pa;

[0089] V T V is the longitudinal wave velocity, m / s;

[0090] V S V is the transverse wave velocity, m / s;

[0091] ρ is the density of the glass, g / cm 3 .

[0092] The greater the Young's modulus of the glass composition, the less likely it is to deform during application. In particular, the greater the Young's modulus of the glass composition, the less likely it is to warp and break at the stress link in the packaging process. In some embodiments, the Young's modulus (E) of the glass composition of the present application is 83 GPa or more, preferably 85 GPa or more, and more preferably 87 GPa or more.

[0093] <Transition temperature>

[0094] The transition temperature (T g ) of the glass composition is tested according to the method specified in the national standard GB / T 7962.16-2010.

[0095] If the transition temperature of the glass composition is low, the heat resistance of the glass decreases, and softening deformation easily occurs in high-temperature processes. If the transition temperature of the glass is too high, it will cause design difficulties in the heat resistance of precision annealing equipment, resulting in a decrease in the reliability of the precision annealing equipment. In particular, when a large-diameter glass blank is precision annealed, it needs to be kept at a temperature near the transition temperature for a long time. If the transition temperature is too high, the reliability of the precision annealing equipment will be greatly reduced.

[0096] In some embodiments, the transition temperature (T g ) of the glass composition of the present application is 700℃ or more, preferably 710℃ or more, more preferably 720℃ or more, and further preferably 725-745℃.

[0097] <Density>

[0098] The density (ρ) of the glass composition is tested according to the method specified in the national standard GB / T 7962.20-2010. The lower the density of the glass composition, the more beneficial it is to achieve lightweight at the application terminal. In particular, the lower the density of the glass composition, the lower the weight that the support equipment in the packaging process has to bear, and the higher the precision and efficiency can be achieved.

[0099] In some embodiments, the density (ρ) of the glass composition of the present application is 2.90 g / cm 3 or less, preferably 2.80 g / cm 3 or less, and more preferably 2.70 g / cm3 The following.

[0100] <Viscosity>

[0101] The viscosity of the glass composition is tested by using THETA Rheotronic II high temperature viscometer with a rotational method, the numerical unit is dPaS (poise), the smaller the value, the smaller the viscosity. The glass composition needs to have a suitable high temperature viscosity to prevent the glass from producing stripes and / or crystallization during the forming process. The glass composition of the present application has a suitable high temperature viscosity, which can manufacture large-diameter glass compositions.

[0102] In some embodiments, the viscosity of the glass composition of the present application at 1400℃ is 220 dPaS or less, preferably 210 dPaS or less, more preferably 205 dPaS or less.

[0103] In some embodiments, the viscosity of the glass composition of the present application at 1400℃ is 170 dPaS or more, preferably 180 dPaS or more, more preferably 185 dPaS or more.

[0104] <Light transmittance>

[0105] The light transmittance of the glass composition is tested according to the following method: the glass sample to be tested is processed to a certain thickness and the opposite surfaces are polished to be parallel, and the method is tested according to the method specified in the national standard GB / T 7962.12-2010. In the present application, the glass composition is processed to a thickness of 1±0.1mm, and the light transmittance (T 550nm ) at 550nm and the light transmittance (T 355nm ) at 355nm are tested. The higher the light transmittance of the glass composition at 550nm, the more efficient and accurate detection of the optical detection equipment in the packaging process can be achieved; the higher the light transmittance of the glass composition at 355nm, the higher the efficiency of debonding in the packaging process, and the smaller the risk of warping of the packaged wafer.

[0106] In some embodiments, the light transmittance (T 550nm ) of the glass composition of the present application at 550nm is 88.0% or more, preferably 89.0% or more, more preferably 90.0% or more.

[0107] In some embodiments, the light transmittance (T 355nm ) of the glass composition of the present application at 355nm is 85.0% or more, preferably 87.0% or more, more preferably 89.0% or more.

[0108] <Dielectric constant>

[0109] The dielectric constant of the glass composition is tested according to the method specified in the national standard GB / T 7265.1-1987, and the data in the present application are tested under the condition of 1.8 GHz.

[0110] In some embodiments, the lower limit of the dielectric constant of the glass composition of the present application is 3.5, preferably 4.0, and more preferably 5.0.

[0111] In some embodiments, the upper limit of the dielectric constant of the glass composition of the present application is 8.0, preferably 7.5, and more preferably 6.7.

[0112] <surface resistance>

[0113] The surface resistance of the glass composition refers to the quotient of the direct current voltage applied to two electrodes on a surface of the glass and the steady-state current flowing through the two electrodes after a certain period of time, and the unit is ohm (Ω), which is tested by a volume surface resistivity tester.

[0114] In some embodiments, the lower limit of the surface resistance of the glass composition of the present application is 6.5×10 12 Ω, preferably 7.5×10 12 Ω, and more preferably 7.8×10 12 Ω.

[0115] In some embodiments, the upper limit of the surface resistance of the glass composition of the present application is 9.8×10 12 Ω, preferably 9.2×10 12 Ω, and more preferably 8.8×10 12 Ω.

[0116] <Knoop hardness>

[0117] The Knoop hardness (H K ) of the glass composition is tested according to the test method specified in the national standard GB / T 7962.18-2010.

[0118] In some embodiments, the Knoop hardness (H K ) of the glass composition of the present application is 500×10 7 Pa or more, preferably 520×10 7 Pa or more, and more preferably 540×10 7 Pa or more.

[0119] The glass composition of the present application can be used to manufacture packaging carriers (substrate materials) for semiconductor processes due to its excellent performance.

[0120] The glass composition of the present application can be used to manufacture various glass elements, and can provide various lenses, prisms, and the like, which are glass elements having high optical value. As examples of lenses, various lenses such as a concave meniscus lens, a convex meniscus lens, a lenticular lens, a biconcave lens, a plano-convex lens, a plano-concave lens, and the like, in which the lens surface is a spherical surface or an aspherical surface, can be given.

[0121] The glass composition of the present application, and the glass element can be used to manufacture various devices (devices described in the present application include instruments, apparatuses, and the like), such as imaging devices, sensors, microscopes, medical technology, digital projection, communication, optical communication technology / information transmission, optics / illumination in the automotive field, photolithography technology, excimer lasers, wafers, computer chips, and integrated circuits and electronic devices including such circuits and chips, or video recording devices and apparatuses used in the field of in-vehicle and monitoring security.

[0122] [Manufacturing method]

[0123] The manufacturing method of the glass composition of the present application is as follows: the glass composition of the present application uses carbonates, nitrates, sulfates, hydroxides, oxides, fluorides, and the like as raw materials, and after being compounded by a conventional method, the compounded charge is put into a melting furnace at 1300 to 1500°C to be melted, and after being clarified, stirred, and homogenized, a homogeneous molten glass without bubbles and undissolved substances is obtained, which is cast in a mold and annealed to be formed. The person skilled in the art can appropriately select the raw materials, the process method, and the process parameters according to the actual needs.

[0124] [Examples]

[0125] In order to further clearly illustrate and describe the technical solutions of the present application, the following non-limiting examples are provided.

[0126] In this example, the glass composition having the composition shown in Tables 1 to 3 is obtained by the manufacturing method of the glass composition described above. In addition, the properties of each glass are measured by the test methods described in the present application, and the measurement results are shown in Tables 1 to 3.

[0127] Table 1.

[0128]

[0129]

[0130]

[0131] Table 2.

[0132]

[0133]

[0134] Table 3.

[0135]

[0136]

Claims

1. A glass composition, characterized in that Its components, expressed in weight percentage, include: SiO2: 46-57.5%; B2O3: 2-10%; Al2O3: 14-26%; ZnO: 1-8%; CaO: 1-8%; MgO: 4.5-14.5%, wherein SiO2 / MgO is 3.5-10.

0.

2. The glass composition according to claim 1, wherein Its components, expressed in weight percentage, further contain: ZrO2: 0-3%; and / or TiO2: 0-3%; and / or BaO: 0-5%; and / or SrO: 0-5%; and / or Ln2O3: 0-5%; and / or Nb2O5: 0-3%; and / or WO3: 0-3%; and / or Ta2O5: 0-3%; and / or GeO2: 0-3%; and / or Rn2O: 0-3%; and / or a clarifier: 0-2%, wherein the Rn2O is one or more of Li2O, Na2O, and K2O, the Ln2O3 is one or more of La2O3, Y2O3, and Gd2O3, and the clarifier is one or more of Sb2O3, SnO2, and CeO2.

3. A glass composition characterized in that The components include SiO2, B2O3, Al2O3, ZnO, CaO and MgO, and the components are expressed in weight percentage, wherein SiO2 / MgO is 3.5 to 10.0, and the light transmittance of the glass composition at 550nm is T 550nm The light transmittance at 355 nm is 88.0% or more. 355nm It is more than 85.0%.

4. The glass composition according to claim 3, wherein The composition is expressed in weight percentage and contains: SiO2: 46-57.5%; and / or B2O3: 2-10%; and / or Al2O3: 14-26%; and / or ZnO: 1-8%; and / or CaO: 1-8%; and / or MgO: 4.5-14.5%; and / or ZrO2: 0-3%; and / or TiO2: 0-3%; and / or BaO: 0-5%; and / or SrO: 0-5%; and / or Ln2O3: 0-5% ; and / or Nb2O5: 0-3%; and / or WO3: 0-3%; and / or Ta2O5: 0-3%; and / or GeO2: 0-3%; and / or Rn2O: 0-3%; and / or clarifier: 0-2%, wherein Rn2O is one or more of Li2O, Na2O, and K2O, Ln2O3 is one or more of La2O3, Y2O3, and Gd2O3, and the clarifier is one or more of Sb2O3, SnO2, and CeO2.

5. The glass composition according to any one of claims 1 to 4, characterized in that Its components are expressed in weight percentage and meet one or more of the following 7 conditions: 1) Al2O3 / SiO2 is 0.28 to 0.52, preferably Al2O3 / SiO2 is 0.32 to 0.50, and more preferably Al2O3 / SiO2 is 0.35 to 0.45; 2) (MgO + ZnO) / Al2O3 is 0.25 to 1.4, preferably (MgO + ZnO) / Al2O3 is 0.30 to 1.2, more preferably (MgO + ZnO) / Al2O3 is 0.40 to 1.0, and further preferably (MgO + ZnO) / Al2O3 is 0.50 to 0.90; 3) MgO / ZnO is 0.8 to 8.0, preferably MgO / ZnO is 1.0 to 6.0, more preferably MgO / ZnO is 1.2 to 4.0, and further preferably MgO / ZnO is 1.5 to 3.0; 4) (CaO + BaO) / B2O3 is 0.20 to 3.5, preferably (CaO + BaO) / B2O3 is 0.30 to 2.0, more preferably (CaO + BaO) / B2O3 is 0.40 to 1.5, and further preferably (CaO + BaO) / B2O3 is 0.50 to 1.0; 5) ZnO / B2O3 is 0.2 to 3.0, preferably ZnO / B2O3 is 0.3 to 2.0, more preferably ZnO / B2O3 is 0.4 to 1.5, and further preferably ZnO / B2O3 is 0.55 to 1.2; 6) SiO2 / (MgO+ZnO) is 2.2 to 7.5, preferably SiO2 / (MgO+ZnO) is 2.5 to 7.0, more preferably SiO2 / (MgO+ZnO) is 3.0 to 5.5, and further preferably SiO2 / (MgO+ZnO) is 3.2 to 4.5; 7) SiO2 / MgO is 4.0 to 8.0, preferably SiO2 / MgO is 4.5 to 7.0, and more preferably SiO2 / MgO is 5.0 to 6.

5.

6. The glass composition according to any one of claims 1 to 4, characterized in that The composition is expressed in weight percentage, wherein: Ln2O3 / ZnO is less than 0.5, preferably Ln2O3 / ZnO is less than 0.3, more preferably Ln2O3 / ZnO is less than 0.2, further preferably Ln2O3 / ZnO is less than 0.1; and / or Rn2O / Al2O3 is less than 0.18, preferably Rn2O / Al2O3 is less than 0.15, more preferably Rn2O / Al2O3 is less than 0.1, further preferably Preferably, Rn2O / Al2O3 is less than 0.05; and / or Rn2O / MgO is less than 0.5, preferably Rn2O / MgO is less than 0.3, more preferably Rn2O / MgO is less than 0.2, and further preferably Rn2O / MgO is less than 0.1, and the Rn2O is one or more of Li2O, Na2O, and K2O, and the Ln2O3 is one or more of La2O3, Y2O3, and Gd2O3.

7. The glass composition according to any one of claims 1 to 4, characterized in that The components are expressed in weight percentage, wherein: SiO2: 48-56%, preferably SiO2: 50-55%; and / or B2O3: 3-9%, preferably B2O3: 4-8%; and / or Al2O3: 16-25%, preferably Al2O3: 18-23%; and / or ZrO2: 0-2%, preferably ZrO2: 0-1%; and / or TiO2: 0-2%, preferably TiO2: 0-1%; and / or ZnO: 2-7%, preferably ZnO: 3-6.5%; and / or BaO: 0-3.5%, preferably BaO: 0.5-2%; and / or SrO: 0-3%, preferably SrO: 0-1%; and / or CaO: 1.5-7%, preferably CaO: 2-5%; and / or MgO: 6-13%, preferably MgO: 7- 12%; and / or Ln2O3: 0-3%, preferably Ln2O3: 0-1%; and / or Nb2O5: 0-2%, preferably Nb2O5: 0-1%; and / or WO3: 0-2%, preferably WO3: 0-1%; and / or Ta2O5: 0-2%, preferably Ta2O5: 0-1%; and / or GeO2: 0-2%, preferably GeO2: 0-1%; and / or Rn2O: 0-2%, preferably Rn2O: 0-1%; and / or clarifier: 0-1%, preferably clarifier: 0-0.5%, wherein Rn2O is one or more of Li2O, Na2O, and K2O, Ln2O3 is one or more of La2O3, Y2O3, and Gd2O3, and the clarifier is one or more of Sb2O3, SnO2, and CeO2.

8. The glass composition according to any one of claims 1 to 4, characterized in that Its components do not contain ZrO2; and / or do not contain TiO2; and / or do not contain SrO; and / or do not contain La2O3; and / or do not contain Y2O3; and / or do not contain Gd2O3; and / or do not contain Nb2O5; and / or do not contain WO3; and / or do not contain Ta2O5; and / or do not contain GeO2; and / or do not contain Li2O; and / or do not contain Na2O; and / or do not contain K2O; and / or do not contain P2O5; and / or do not contain Fe2O3; and / or do not contain F.

9. The glass composition according to any one of claims 1 to 4, characterized in that The thermal expansion coefficient α of the glass composition 20 / 300℃ 31×10 -7 / K~45×10 -7 / K, preferably 33×10 -7 / K~42×10 -7 / K, more preferably 35×10 -7 / K~40×10 -7 / K; and / or acid resistance stability D A 2 or more, preferably 1; and / or water resistance stability D W Two or more types, preferably one type; and / or a refractive index n d 1.51 to 1.58, preferably 1.52 to 1.57, more preferably 1.53 to 1.56; and / or Abbe number ν d 57 to 63, preferably 58 to 62, more preferably 59 to 61.5; and / or Young's modulus E is 83 GPa or more, preferably 85 GPa or more, more preferably 87 GPa or more; and / or transition temperature T g 700°C or higher, preferably 710°C or higher, more preferably 720°C or higher, further preferably 725-745°C; and / or density ρ is 2.90 g / cm 3 Below, preferably 2.80g / cm 3 Below, more preferably 2.70g / cm 3 and / or a viscosity of 170 to 220 dPaS at 1400°C, preferably 180 to 210 dPaS, more preferably 185 to 205 dPaS; and / or a light transmittance of 550 nm, T 550nm 88.0% or more, preferably 89.0% or more, more preferably 90.0% or more; and / or the light transmittance T at 355 nm 355nm 85.0% or more, preferably 87.0% or more, more preferably 89.0% or more; and / or a dielectric constant of 3.5 to 8.0, preferably 4.0 to 7.5, more preferably 5.0 to 6.7; and / or a surface resistivity of 6.5×10 12 ~9.8×10 12 Ω, preferably 7.5×10 12 ~9.2×10 12 Ω, more preferably 7.8×10 12 ~8.8×10 12 Ω; and / or Knoop hardness H K 500×10 7 Pa or more, preferably 520×10 7 Pa or more, more preferably 540×10 7 Pa and above.

10. A packaging carrier, characterized in that Made from the glass composition according to any one of claims 1 to 9.

11. Glass element, characterized in that Made from the glass composition according to any one of claims 1 to 9.

12. A device, characterized in that: A glass element comprising the glass composition according to any one of claims 1 to 9, or comprising the glass element according to claim 11.

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