A vacuum pump unit

Abstract

The application provides a vacuum pump unit, comprising a vacuum pump main body and a shell assembly, the shell assembly comprising a motor base, a shell base and an air inlet base, the motor base being provided with a mounting chamber for mounting a motor component; the shell base comprising an outer cover plate, an inner jacket and a bottom sealing plate horizontally arranged between the outer cover plate and the inner jacket, the bottom surface of the bottom sealing plate being provided with a shaped groove in communication with the inner side of the inner jacket, when the shell base is fixed to the motor base, the bottom of the shaped groove is closed and forms a flow space for gas flow; a left-hand screw rod and a right-hand screw rod are arranged on the inner side of the inner jacket, and the air inlet base is fixed to the top of the inner jacket as an air inlet interface; a connecting pipeline as an air outlet interface is fixedly connected to the outer side of the motor base, the connecting pipeline being in communication with the shaped groove; the side surface of the shell base is further provided with a blowing pipeline in communication with the shaped groove. Based on this, the situation that particulate impurities are left between the two screw rods during the working of the vacuum pump unit can be reduced, so that the vacuum pump unit can maintain a good service life.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of air pressure control, and particularly relates to a vacuum pump unit. BACKGROUND

[0002] The working principle of the vacuum pump unit is mainly based on mechanical transmission and gas dynamics principle. Through the reciprocating or rotating movement of core components such as pistons, rotors or screws, the volume of the pump cavity is changed to realize the suction, compression and discharge of gas, so as to form a vacuum environment in a closed system.

[0003] The vacuum pump unit includes a horizontal vacuum pump unit, a vertical vacuum pump unit and the like. When the vertical vacuum pump unit is used to extract gas, the particulate impurities mixed in the gas will be sucked into the interior of the vertical vacuum pump unit. Taking a double-screw vacuum pump unit as an example, the particulate impurities are accumulated between the two screws and are difficult to discharge, which is easy to cause the wear of the screws and weaken the sealing effect. Moreover, with the accumulation of the particulate impurities, the two screws may be stuck, which is not conducive to maintaining the service life of the vacuum pump unit and needs to be improved. SUMMARY

[0004] Therefore, the present application provides a vacuum pump unit, which can reduce the particulate impurities accumulated between the two screws during the working of the vacuum pump unit, so as to facilitate the maintenance of the service life of the vacuum pump unit.

[0005] The vacuum pump unit provided by the present application adopts the following technical scheme:

[0006] The vacuum pump unit comprises a vacuum pump main body and a shell assembly arranged outside the vacuum pump main body. The vacuum pump main body comprises a left-hand screw, a right-hand screw and two groups of motor components. The left-hand screw and the right-hand screw are respectively fixedly connected to the output ends of the two groups of motor components. The shell assembly comprises a motor seat, a shell seat and an air inlet seat. The motor seat is provided with a vertical installation chamber. The motor components are fixedly installed in the installation chamber.

[0007] The shell seat comprises an outer cover plate, an inner clamping sleeve and a bottom sealing plate horizontally arranged between the outer cover plate and the inner clamping sleeve. The bottom surface of the bottom sealing plate is provided with a shaped groove in communication with the inner side of the inner clamping sleeve. When the shell seat is fixed to the motor seat, the bottom of the shaped groove is closed and forms a flow space for the gas flow. The left-hand screw and the right-hand screw are arranged on the inner side of the inner clamping sleeve. The air inlet seat is fixed to the top of the inner clamping sleeve as an air inlet interface.

[0008] The outer side of the motor seat is fixedly connected with a connecting pipeline as an air outlet interface. The connecting pipeline is in communication with the shaped groove. The side surface of the shell seat is further provided with a blowing pipeline in communication with the shaped groove. The blowing pipeline and the exhaust pipeline are arranged on two opposite side surfaces of the shell assembly.

[0009] Optionally, the vacuum pump unit further comprises a unit frame, an inner bottom wall of the unit frame is fixed with a circuit bottom plate, a closed control chamber is formed between the circuit bottom plate and the unit frame, a control element for controlling the vacuum pump unit is installed inside the control chamber, and a first nitrogen filling pipe for filling nitrogen into the control chamber is connected to the outer side of the circuit bottom plate;

[0010] The motor seat is fixed to the top of the circuit bottom plate, the inner bottom of the motor seat has a structure cavity, a linkage structure for synchronously rotating the two motor components is installed inside the structure cavity, the circuit bottom plate is provided with a first through hole in communication with the structure cavity, and the inner top wall of the structure cavity is provided with a second through hole in communication with the mounting chamber.

[0011] Optionally, the motor component comprises a motor stator fixed to the inner side of the mounting chamber, a motor rotor rotationally fitted to the motor stator, and a bearing seat for fixing the motor rotor, a nitrogen flow channel is jointly provided between the motor rotor, the bearing seat and the corresponding left-handed screw / right-handed screw, one end of the nitrogen flow channel is in communication with the structure cavity, and the other end of the nitrogen flow channel is in communication with the flow space; the nitrogen pressure in the nitrogen flow channel is greater than the gas pressure inside the flow space.

[0012] Optionally, the bearing seat is fixedly installed on the top of the motor seat, and the bearing seat is provided with an integrally formed clamping ring which is fitted to the inner side of the mounting chamber; an annular pad plate is embedded on the outer peripheral surface of the clamping ring, the top surface of the motor seat is provided with an embedded groove in communication with the mounting chamber, and the annular pad plate is fixed to the inner bottom wall of the embedded groove by fasteners to realize vertical positioning of the bearing seat.

[0013] Optionally, the nitrogen flow channel comprises a first channel formed in the motor seat and a second channel formed in the bearing seat, one end of the first channel penetrates through to the inner top wall of the structure cavity, and the other end of the first channel penetrates through to the inner bottom wall of the embedded groove; a support ring is protrudingly provided on the bottom of the annular pad plate, the annular pad plate is suspended by the support ring, and a first air gap is formed between the annular pad plate and the inner wall of the embedded groove and between the annular pad plate and the bearing seat;

[0014] The second channel comprises a first inner hole formed on the outer side surface of the clamping ring and a second inner hole formed on the outer side surface of the bearing seat, the first inner hole is in communication with the first air gap, and the first inner hole and the second inner hole are in communication with each other; the right-handed screw is fixed to the motor rotor and partially sleeved on the bearing seat, a second air gap is formed between the right-handed screw and the bearing seat, and the bottom of the second air gap is in communication with the flow space; a damping structure is provided between the bearing seat and the right-handed screw, for forcing the nitrogen in the second inner hole to enter the flow space through the second air gap.

[0015] Optionally, the damping structure comprises a plurality of piston rings embedded on the outer peripheral side of the bearing seat, the number of piston rings located above the gas outlet end of the second inner hole is greater than the number of piston rings located below the gas outlet end of the second inner hole.

[0016] Optionally, the nitrogen flow channel further comprises a third inner hole formed in the top surface of the bearing seat, the first inner hole, the second inner hole and the third inner hole are in communication with each other; the third air gap is formed between the bearing seat and the motor rotor, and the third air gap is in communication with the second air gap;

[0017] The outer diameter of the clamping ring is matched with the inner diameter of the mounting chamber, and in the fixed state, a closed transition space is formed between the clamping ring and the motor stator; the middle part of the motor rotor is provided with a communication passage, one end of the communication passage is in communication with the third air gap, and the other end of the communication passage is in communication with the transition space, and the outer side surface of the motor base is connected with a second nitrogen filling pipe in communication with the transition space.

[0018] Optionally, the motor rotor comprises a first shaft segment, a second shaft segment and a third shaft segment with the outer diameter size gradually decreasing, the first shaft segment is used for matching and sleeving with the right-handed screw rod, the second shaft segment is located on the inner side of the bearing seat and forms the third air gap with the inner circumferential wall of the bearing seat, and the third shaft segment is mounted on the inner side of the clamping ring through the bearing; the second shaft segment and the inner bottom wall of the bearing seat are spaced from each other to form a negative pressure area, and the width of the negative pressure area is greater than the width of the third air gap.

[0019] Optionally, the outer cover plate and the inner cover plate are spaced from each other to form a cooling space, and the top of the outer cover plate is fixed with a cover plate for closing the cooling space; the bottom of the cover plate is fixed with a heat exchange coil, the heat exchange coil is arranged on the outer circumferential side of the inner jacket, and the two ends of the heat exchange coil are jointly connected with a circulation system for circulating water.

[0020] Optionally, the motor base and the mounting chamber have a partitioned cooling chamber, the two opposite side surfaces of the motor base are respectively provided with an open mouth in communication with the cooling chamber, and a side sealing plate is matched and mounted at the open mouth; the side surface of the motor base is provided with a cooling inlet pipe and a cooling outlet pipe in communication with the cooling chamber, and the cooling inlet pipe and the cooling outlet pipe are jointly connected to the circulation system.

[0021] In summary, the present application has at least one of the following beneficial technical effects:

[0022] 1. The inlet seat is provided as an air inlet of the vacuum pump body and connected with a pipeline to be vacuumized, and the connecting pipeline is provided as an air outlet of the vacuum pump body, the gas in the inlet seat can be pumped to the flow space and discharged through the connecting pipeline by controlling the synchronous rotation of the left-handed screw rod and the right-handed screw rod, so that the vacuumizing effect is achieved.

[0023] 2. When the vacuum pump unit is in operation, the particle impurities mixed in the air being pumped out will accumulate in the flow space. At this time, the positive pressure air is continuously blown into the inside of the flow space through the blowing pipeline, so that the particle impurities in the flow space can be blown out through the connecting pipeline, thereby reducing the wear and jamming phenomenon of the vacuum pump unit in operation. Moreover, the positive pressure provided by the blowing pipeline is beneficial to the discharge of the gas in the flow space, which can ensure the vacuum pumping effect of the vacuum pump unit to a certain extent, and has the effect of energy saving and consumption reduction.

[0024] 3. Nitrogen is filled into the inside of the control chamber through the first nitrogen filling pipeline. As an inert gas, the nitrogen can play a protective role on the control elements inside the control chamber. At the same time, the nitrogen enters the inside of the structure chamber through the first through port and enters the inside of the mounting chamber through the second through port, which can respectively protect the linkage structure and the motor component, so as to ensure that the vacuum pump unit has a good service life.

[0025] 4. Nitrogen is filled into the inside of the transition space through the second nitrogen filling pipeline. After the nitrogen passes through the communication gas path, the third gas gap and the third inner hole in turn, it can be confluent with the nitrogen of the first inner hole. The confluent nitrogen can be discharged through the second inner hole and enter the flow space, so as to discharge the particle impurities and wet gas between the bearing seat and the motor rotor and between the bearing seat and the right-handed screw, thereby enabling the vacuum pump unit to maintain a good service life.

[0026] 5. Water is circulated and added to the cooling area and the cooling chamber through the circulating mechanism, which can have a cooling effect on the vacuum pump unit, so as to keep the temperature of the vacuum pump unit within a suitable range, and also be beneficial to keeping the vacuum pump unit in good service life. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 is a schematic diagram of the overall structure of the embodiment;

[0028] Figure 2 is a schematic diagram of the overall structure of the embodiment, mainly embodying the specific structure of the unit frame and the shell assembly;

[0029] Figure 3 is a schematic diagram of the overall structure of the embodiment in another direction, mainly embodying the specific structure of the vacuum pump main body and the shell assembly;

[0030] Figure 4 is a schematic diagram of the structure of the motor seat, the annular gasket and the fastener in the embodiment;

[0031] Figure 5 is Figure 3 is an enlarged view of A in

[0032] Figure 6 is a schematic diagram of the structure of the two bearing seats in the embodiment;

[0033] Figure 7 is a top view of the housing seat in this embodiment;

[0034] Figure 8 is a bottom view of the housing seat in this embodiment;

[0035] Figure 9 is Figure 5 an enlarged view at B in FIG. 4;

[0036] Figure 10 is a partial sectional view of the motor seat in this embodiment, mainly showing the structure of the first passage;

[0037] Figure 11 is a partial sectional view of the bearing seat, motor stator and motor rotor in this embodiment, mainly showing the structure of the transition space.

[0038] Explanation of reference numerals: 1, main body of vacuum pump; 11, left-hand screw; 12, right-hand screw; 121, second air gap; 13, motor stator; 14, motor rotor; 141, communication air passage; 142, first shaft section; 143, second shaft section; 144, third shaft section; 145, negative pressure area; 15, bearing seat; 151, clamping ring; 152, inner recessed ring groove; 153, cutout portion; 154, third air gap; 155, damping structure; 156, piston ring; 16, annular gasket plate; 161, half ring plate; 162, fastener; 163, support ring; 164, first air gap; 17, transition space;

[0039] 2, housing assembly; 21, motor seat; 211, mounting chamber; 212, structural cavity; 213, embedded groove; 214, connecting pipeline; 215, second through-opening; 216, cooling chamber; 218, side sealing plate; 22, housing seat; 221, outer cover plate; 222, inner clamping sleeve; 223, bottom sealing plate; 224, formed groove; 225, exhaust pipeline; 226, air blowing pipeline; 227, cooling space; 228, cover plate; 229, heat exchange coil; 23, air inlet seat; 24, flow space; 25, second nitrogen filling pipe;

[0040] 3, unit frame; 31, circuit bottom plate; 311, first through-opening; 32, control chamber; 33, circuit cover plate; 34, first nitrogen filling pipe; 4, linkage structure; 5, nitrogen flow channel; 51, first passage; 511, shunt pipe; 52, second passage; 53, first inner hole; 54, second inner hole; 55, third inner hole; 6, circulation system; 61, cooling inlet pipe; 62, cooling outlet pipe. DETAILED DESCRIPTION

[0041] The following will be described in detail in combination with the accompanying drawings. Figure 1 - the accompanying drawings Figure 11 The present application will be further described in detail.

[0042] The embodiment of the present application discloses a vacuum pump unit.

[0043] Referring to Figure 1 , Figure 2 A vacuum pump unit comprises a unit frame 3, a vacuum pump body 1 and a shell assembly 2, wherein the unit frame 3 is fixedly arranged on the ground foundation, the inner bottom wall of the unit frame 3 is fixedly provided with a circuit bottom plate 31, the cross-sectional shape of the circuit bottom plate 31 is in a U shape, and in the fixed state, the circuit bottom plate 31 and the unit frame 3 can form a closed control chamber 32, and the control chamber 32 can be internally provided with control elements (not shown in the figure) for controlling the vacuum pump unit, such as a circuit board, a control valve, a speed regulator and the like. An operation window is formed in the surface of the circuit bottom plate 31, and the internal control elements can be installed or disassembled through the operation window; the top surface of the circuit bottom plate 31 is detachably fixedly provided with a circuit cover plate 33, the circuit cover plate 33 normally blocks the operation window, and the control chamber 32 can be kept in a closed state.

[0044] Referring to Figure 3 The vacuum pump body 1 comprises a left-hand screw rod 11, a right-hand screw rod 12 and two groups of motor components, the left-hand screw rod 11 and the right-hand screw rod 12 are respectively fixedly connected to the output ends of the two groups of motor components, and the left-hand screw rod 11 and the right-hand screw rod 12 are locally meshed and driven. It should be noted that the connection mode of the left-hand screw rod 11 and the motor component is the same as that of the right-hand screw rod 12, and in the embodiment, the connection mode of the right-hand screw rod 12 is taken as an example for description, and the connection mode of the left-hand screw rod 11 and the motor component will not be described herein.

[0045] Specifically, the motor component comprises a motor stator 13, a motor rotor 14 and a bearing seat 15; referring back to Figure 2 The shell assembly 2 comprises a motor seat 21, a shell seat 22 and an air inlet seat 23, wherein the motor seat 21 is fixedly installed on the top of the circuit bottom plate 31; referring to Figure 4 The middle part of the motor seat 21 is provided with a vertical through installation chamber 211, the number of the installation chambers 211 is two, the two motor stators 13 are respectively fixedly installed in the two installation chambers 211, and the motor rotor 14 is rotationally arranged on the inner side of the motor stator 13. The inner bottom part of the motor seat 21 has a structure cavity 212, the structure cavity 212 is in communication with the two installation chambers 211; the structure cavity 212 is internally provided with a linkage structure 4 for synchronously rotating the two motor components, and the specific structure of the linkage structure 4 is a conventional design in the field and is not the focus of protection of the present application, so it will not be described herein.

[0046] Referring to Figure 5The bearing seat 15 is fixedly installed on the top of the motor base 21, and the bottom of the bearing seat 15 is provided with an integral clamping ring 151, the outer diameter of the clamping ring 151 is equal to the inner diameter of the installation chamber 211, so that the clamping ring 151 can be matched and installed on the inner side of the installation chamber 211. In addition, the outer circumferential surface of the clamping ring 151 is provided with an inner concave ring groove 152, and the annular backing plate 16 is installed in the inner concave ring groove 152. The annular backing plate 16 includes two half ring plates 161. The top surface of the motor base 21 is provided with an embedded groove 213, which is in communication with each installation chamber 211, and the shape and size of the embedded groove 213 are larger than those of the installation chamber 211. In the fixed state, the two half ring plates 161 can be located in the embedded groove 213, and the half ring plate 161 is fixed to the inner bottom wall of the embedded groove 213 by the fastener 162, thereby realizing the vertical positioning of the bearing seat 15. In the embodiment, the fastener 162 is threaded through the structure cavity 212 to the embedded groove 213 and is screwed with the half ring plate 161.

[0047] Referring to Figure 6 It should be noted that the side surface of the bearing seat 15 in the embodiment is also provided with a cutout portion 153, and the two bearing seats 15 between the two groups of motor components are abutted with each other through the cutout portion 153, thereby realizing the circumferential rotational positioning of the bearing seat 15. Then, the vertical positioning of the annular backing plate 16 can stably fix the bearing seat 15 on the top of the motor base 21.

[0048] Referring to Figure 7 The shell seat 22 is fixed to the top of the motor base 21. The shell seat 22 specifically includes an outer cover plate 221, an inner clamping sleeve 222, and a bottom sealing plate 223 transversely arranged between the outer cover plate 221 and the inner clamping sleeve 222, and the three are integrally formed. Referring to Figure 3 The inner side of the inner clamping sleeve 222 is hollow, and the shape of the inner clamping sleeve 222 is matched with the shape of the two installation chambers 211. In the fixed state, the two installation chambers 211 can be commonly opposite to the inner side of the inner clamping sleeve 222. The left-handed screw rod 11 and the right-handed screw rod 12 are commonly installed on the inner side of the inner clamping sleeve 222 and locally meshed, and the left-handed screw rod 11 and the right-handed screw rod 12 are respectively fixed to the motor rotors 14 of the two groups of motor components. Each motor rotor 14 is arranged on the inner side of the motor stator 13, and each motor rotor 14 is fixed with the bearing seat 15. The left-handed screw rod 11 and the right-handed screw rod 12 are respectively fixedly sleeved on the top end of the motor rotor 14. When the motor rotor 14 rotates, the left-handed screw rod 11 / right-handed screw rod 12 can rotate with the motor rotor 14.

[0049] Referring to Figure 8 The bottom sealing plate 223 of the shell seat 22 is provided with a formed groove 224 on the bottom surface, and the formed groove 224 is in communication with the inner side of the inner clamping sleeve 222. Back to Figure 2When the shell seat 22 is fixed to the motor seat 21, the bottom of the shaped groove 224 is blocked by the motor seat 21 and the bearing seat 15, and is in a closed state, thereby forming the flow space 24. The outer side of the motor seat 21 is fixedly connected with the connecting pipeline 214, and the connecting pipeline 214 is in communication with the shaped groove 224, so that in the fixed state, the connecting pipeline 214 can be in communication with the flow space 24 to serve as a gas outlet interface. The air inlet seat 23 is fixed to the top of the inner jacket 222, and the inner side of the air inlet seat 23 has the same shape as the inner jacket 222. The air inlet seat 23 is arranged to serve as an air inlet interface of the vacuum pump body 1 and is connected with a pipeline that needs to be vacuumized. By controlling the synchronous rotation of the left-handed screw rod 11 and the right-handed screw rod 12, the gas on the inner side of the air inlet seat 23 can be pumped to the flow space 24 and discharged through the connecting pipeline 214, thereby achieving the vacuumizing effect.

[0050] The side surface of the shell seat 22 is connected with the air blowing pipeline 226, which is in communication with the shaped groove 224 and in communication with the flow space 24 in the fixed state. The air blowing pipeline 226 and the exhaust pipeline 225 are arranged on the two opposite side surfaces of the shell assembly 2. It can be seen that when the vacuum pump set is operated, the particulate impurities mixed in the evacuated air will fall into and accumulate in the flow space 24 under the action of gravity. At this time, the positive pressure air is continuously blown into the inner side of the flow space 24 through the air blowing pipeline 226, so that the particulate impurities in the flow space 24 can be blown out through the connecting pipeline 214, thereby reducing the wear and tear and the jamming phenomenon of the vacuum pump set during operation. At the same time, since the air blowing pipeline 226 is connected to the flow space 24, it will not affect the vacuumizing effect of the inner side of the inner jacket 222, and the positive pressure provided by the air blowing pipeline 226 is beneficial to the discharge of the gas in the flow space 24, which can ensure the vacuumizing effect of the vacuum pump set to a certain extent and has the effect of energy saving and consumption reduction.

[0051] Referring to Figure 2 , the circuit bottom plate 31 is provided with a first through port 311 in communication with the structure cavity 212. Referring to Figure 4 , the inner top wall of the structure cavity 212 is provided with a second through port 215 in communication with the mounting chamber 211. Referring to Figure 1 , the top of the circuit bottom plate 31 is vertically connected with a first nitrogen filling pipe 34, through which nitrogen can be filled into the control chamber 32, thereby protecting various control elements in the control chamber 32. Nitrogen enters the inside of the structure cavity 212 through the first through port 311 and enters the inside of the mounting chamber 211 through the second through port 215, which can respectively protect the linkage structure 4 and the motor components, so as to ensure that the vacuum pump set has a good service life.

[0052] In addition, referring to Figure 5A nitrogen flow channel 5 is provided between the motor rotor 14, the bearing housing 15 and the corresponding left-hand screw 11 / right-hand screw 12. One end of the nitrogen flow channel 5 is connected to the structural cavity 212, and the other end of the nitrogen flow channel 5 is connected to the flow space 24. The nitrogen pressure in the nitrogen flow channel 5 is greater than the gas pressure inside the flow space 24. The following explanation will still take the right-hand screw 12 as an example.

[0053] Reference Figure 5 , Figure 9 In this embodiment, a support ring 163 protrudes from the bottom of the semi-ring plate 161. The support ring 163 is located on the inner edge of the semi-ring plate 161 and is integrally formed with the semi-ring plate 161. When the semi-ring plate 161 is fixed to the motor base 21 by fasteners 162, the support ring 163 abuts against the inner bottom wall of the mounting groove 213. The setting of the support ring 163 makes the semi-ring plate 161 suspended. At this time, the semi-ring plate 161 and the inner wall of the mounting groove 213, and the semi-ring plate 161 and the bearing seat 15 can be spaced apart and form a first air gap 164.

[0054] A right-hand screw 12 is fixedly sleeved on the top of the motor rotor 14, and the right-hand screw 12 is partially sleeved on the bearing housing 15; a second air gap 121 exists between the right-hand screw 12 and the bearing housing 15, and the bottom of the second air gap 121 is connected to the flow space 24; a third air gap 154 ​​exists between the bearing housing 15 and the motor rotor 14, and the third air gap 154 ​​is connected to the second air gap 121. In addition, a damping structure 155 is provided between the bearing housing 15 and the right-hand screw 12. The damping structure 155 includes a plurality of piston rings 156 embedded on the outer periphery of the bearing housing 15, and all piston rings 156 are equidistantly arranged along the axial direction of the bearing housing 15.

[0055] Reference Figure 10 The nitrogen flow channel 5 includes a first channel 51 and a second channel 52. The first channel 51 is located in the motor base 21. One end of the first channel 51 extends to the top wall of the structural cavity 212 and is connected to a diversion pipe 511. The other end of the first channel 51 extends to the bottom wall of the mounting groove 213. As the first nitrogen filling pipe 34 gradually fills the control chamber 32 with nitrogen, the nitrogen fills the control chamber 32 and the structural cavity 212 and can then enter the mounting groove 213 through the first channel 51, and then enter the interior of the first air gap 164.

[0056] Back Figure 5 The second channel 52 is disposed in the bearing housing 15. The second channel 52 specifically includes a first inner hole 53, a second inner hole 54, and a third inner hole 55, which are interconnected. (See also...) Figure 9 The first inner hole 53 is formed on the outer side of the mounting ring 151, and the first inner hole 53 is connected to the first air gap 164.

[0057] Back to Figure 5 , the second inner hole 54 is arranged on the outer side of the bearing seat 15, and the second inner hole 54 can be in communication with the second air gap 121. In this embodiment, the communication between the second inner hole 54 and the outer side of the bearing seat 15 is provided as the gas outlet end of the second inner hole 54. The number of piston rings 156 located above the gas outlet end of the second inner hole 54 is greater than the number of piston rings 156 located below the gas outlet end of the second inner hole 54. Based on this, when the nitrogen gas enters the first air gap 164 through the first channel 51, enters the second air gap 121 along the first inner hole 53 and the second inner hole 54, the resistance to the upward flow of the nitrogen gas is greater than the resistance to the downward movement of the nitrogen gas, thereby guiding the nitrogen gas into the flow space 24 and being discharged from the connecting pipeline 214 along with the gas.

[0058] The third inner hole 55 is arranged on the top surface of the bearing seat 15, and the third inner hole 55 is in communication with the third air gap 154. Referring to Figure 11 , in this embodiment, the outer diameter of the clamping ring 151 is equal to the inner diameter of the mounting chamber 211. In the fixed state, the clamping ring 151 and the motor stator 13 can form a closed transition space 17. The outer side of the motor seat 21 is connected with the second nitrogen charging pipe 25, which can be in communication with the transition space 17 and is also used to charge nitrogen into the transition space 17.

[0059] The middle part of the motor rotor 14 is provided with a communication passage 141, one end of the communication passage 141 is in communication with the third air gap 154, and the other end of the communication passage 141 is in communication with the transition space 17. When the second nitrogen charging pipe 25 charges nitrogen into the transition space 17, the nitrogen can enter the third air gap 154 through the communication passage 141, and enter the second air gap 121 along the third air gap 154. At this time, the nitrogen can fill the second air gap 121, thereby forming an air barrier to limit the upward flow of nitrogen from the gas outlet end of the second inner hole 54. In addition, the nitrogen can enter the third inner hole 55 and flow together with the nitrogen in the first inner hole 53. The nitrogen after flowing together is discharged through the second inner hole 54 and enters the flow space 24, which can discharge the particulate impurities and wet gas between the bearing seat 15 and the motor rotor 14 and between the bearing seat 15 and the right-handed screw 12, and is more conducive to maintaining a good service life of the vacuum pump set.

[0060] In addition, referring to Figure 5 , the motor rotor 14 of the present application comprises a first shaft segment 142, a second shaft segment 143 and a third shaft segment 144 arranged in sequence from top to bottom, and the outer diameters of the first shaft segment 142, the second shaft segment 143 and the third shaft segment 144 are successively reduced. The first shaft segment 142 is used to match and connect with the right-handed screw 12, the second shaft segment 143 is located on the inner side of the bearing seat 15 and forms the third air gap 154 with the inner wall of the bearing seat 15, and the third shaft segment 144 is mounted on the inner side of the clamping ring 151 through a bearing.

[0061] In the embodiment, the second shaft segment 143 and the inner bottom wall of the bearing seat 15 are spaced apart from each other to form a negative pressure area 145, and the width of the negative pressure area 145 is greater than the width of the third air gap 154; based on this, when the nitrogen enters the third air gap 154 and moves to the second air gap 121, a negative pressure effect can be formed inside the negative pressure area 145, and if there is a small particle impurity inside the negative pressure area 145, the particle impurity can move to a position close to the outer peripheral wall of the negative pressure area 145 under the action of negative pressure suction, and the particle impurity can also be prevented from being stuck between the motor rotor 14 and the bearing seat 15 to cause the motor to be stuck, thereby ensuring smooth operation of the vacuum pump set.

[0062] Back to Figure 3 , the outer cover plate 221 and the inner jacket 222 are spaced apart from each other to form a cooling space 227, the outer cover plate 221 is bolted to the top of the cover plate 228, and the cover plate 228 can close the cooling space 227; the heat exchange coil 229 is fixed to the bottom of the cover plate 228, the heat exchange coil 229 is made of copper pipe and has good heat exchange capacity; the heat exchange coil 229 is arranged around the outer peripheral side of the inner jacket 222, and the two ends of the heat exchange coil 229, i.e., the water inlet end and the water outlet end of the heat exchange coil 229, are connected to the circulation system 6, water can be circulated into the heat exchange coil 229 through the circulation system 6, and then the temperature of the cooling space 227 is reduced by heat absorption, thereby achieving the effect of cooling the entire vacuum pump set. It should be noted that the circulation system 6 is a conventional design for those skilled in the art, and is not the focus of the present application, so it will not be described here.

[0063] In addition, the motor seat 21 is provided with a cooling chamber 216, and the cooling chamber 216 is partitioned from the mounting chamber 211; the two opposite sides of the motor seat 21 are respectively provided with an opening, each opening is in communication with the cooling chamber 216, and a side sealing plate 218 is matched and installed at the opening, so that the inside of the cooling chamber 216 is in a closed state; referring to Figure 4 , the side of the motor seat 21 is provided with a cooling inlet pipe 61 and a cooling outlet pipe 62 which are in communication with the cooling chamber 216, and the cooling inlet pipe 61 and the cooling outlet pipe 62 are connected to the circulation system 6. The cooling chamber 216 can also achieve the effect of cooling the vacuum pump set, which is beneficial to maintaining the service life of the vacuum pump set.

[0064] The above is a preferred embodiment of the present application, which does not limit the protection scope of the present application, therefore: any equivalent changes made on the basis of the structure, shape, principle of the present application should be covered within the protection scope of the present application.

Claims

1. A vacuum pump package comprising a vacuum pump body and a housing assembly disposed outside the vacuum pump body, wherein, The vacuum pump body comprises a left screw rod, a right screw rod and two sets of motor components, and the left screw rod and the right screw rod are fixedly connected to the output ends of the two sets of motor components; characterized in that the shell assembly comprises a motor base, a shell base and an air inlet base, the motor base is provided with a vertical through installation chamber, and the motor component is fixedly installed in the installation chamber; The shell base comprises an outer cover plate, an inner clamping sleeve and a bottom sealing plate horizontally arranged between the outer cover plate and the inner clamping sleeve, the bottom surface of the bottom sealing plate is provided with a shaped groove in communication with the inner side of the inner clamping sleeve, when the shell base is fixed to the motor base, the bottom of the shaped groove is closed and forms a flow space for gas flow; the left screw rod and the right screw rod are arranged on the inner side of the inner clamping sleeve, and the air inlet base is fixed to the top of the inner clamping sleeve as an air inlet interface; The outer side of the motor base is fixedly connected with a connecting pipeline as an air outlet interface, the connecting pipeline is in communication with the shaped groove; the side surface of the shell base is further provided with a blowing pipeline in communication with the shaped groove, and the blowing pipeline and the exhaust pipeline are separately arranged on the two opposite side surfaces of the shell assembly; the inner bottom of the motor base has a structure cavity; The motor component comprises a motor stator fixedly arranged on the inner side of the installation chamber, a motor rotor rotatably arranged on the motor stator and a bearing seat for fixing the motor rotor, and a nitrogen flow channel is arranged between the motor rotor, the bearing seat and the corresponding left screw rod / right screw rod, one end of the nitrogen flow channel is in communication with the structure cavity, and the other end of the nitrogen flow channel is in communication with the flow space; the nitrogen pressure in the nitrogen flow channel is greater than the gas pressure in the flow space; The bearing seat is fixedly installed on the top of the motor base, and the bearing seat is provided with an integrally formed clamping ring, and the clamping ring is matched and installed on the inner side of the installation chamber; the outer peripheral surface of the clamping ring is embedded with an annular pad plate, the top surface of the motor base is provided with an embedded groove in communication with the installation chamber, and the annular pad plate is fixed to the inner bottom wall of the embedded groove by a fastener to realize vertical positioning of the bearing seat; The nitrogen flow channel comprises a first channel arranged in the motor base and a second channel arranged in the bearing seat, one end of the first channel penetrates into the inner top wall of the structure cavity, and the other end of the first channel penetrates into the inner bottom wall of the embedded groove; the bottom of the annular pad plate is provided with a support ring, the annular pad plate is suspended by the support ring, and a first air gap is formed between the annular pad plate and the inner wall of the embedded groove and between the annular pad plate and the bearing seat; The second channel comprises a first inner hole arranged on the outer side surface of the clamping ring and a second inner hole arranged on the outer side surface of the bearing seat, the first inner hole is in communication with the first air gap, and the first inner hole and the second inner hole are in communication with each other; the right screw rod is fixed to the motor rotor and partially sleeved on the bearing seat, a second air gap is formed between the right screw rod and the bearing seat, and the bottom of the second air gap is in communication with the flow space; a damping structure is arranged between the bearing seat and the right screw rod, for forcing the nitrogen in the second inner hole to enter the flow space through the second air gap.

2. Vacuum pumping package according to claim 1, characterized in that: The vacuum pump unit further comprises a unit frame, an inner bottom wall of the unit frame is fixed with a circuit bottom plate, a closed control chamber is formed between the circuit bottom plate and the unit frame, control elements for controlling the vacuum pump unit are installed inside the control chamber, and a first nitrogen filling pipe for filling nitrogen into the control chamber is connected to the outside of the circuit bottom plate; The motor base is fixed on the top of the circuit bottom plate, a linkage structure for synchronously rotating the two motor components is installed inside the cavity, the circuit bottom plate is provided with a first opening communicating with the cavity, and the inner top wall of the cavity is provided with a second opening communicating with the mounting chamber.

3. Vacuum pumping package according to claim 2, characterized in that: The damping structure comprises a plurality of piston rings embedded on the outer circumferential side of the bearing seat, the number of piston rings above the gas outlet end of the second inner hole is greater than the number of piston rings below the gas outlet end of the second inner hole.

4. The vacuum pump package of claim 2, wherein: The nitrogen flow channel further comprises a third inner hole opened on the top surface of the bearing seat, the first inner hole, the second inner hole and the third inner hole are in communication with each other, and a third air gap is formed between the bearing seat and the motor rotor, the third air gap is in communication with the second air gap. The outer diameter of the clamping ring is matched with the inner diameter of the mounting chamber, and a closed transition space is formed between the clamping ring and the motor stator in the fixed state, the middle part of the motor rotor is provided with a communication passage, one end of the communication passage is in communication with the third air gap, the other end of the communication passage is in communication with the transition space, and the outer side surface of the motor base is connected with a second nitrogen filling pipe in communication with the transition space.

5. Vacuum pumping package according to claim 4, characterized in that: The motor rotor comprises a first shaft segment, a second shaft segment and a third shaft segment with gradually decreasing outer diameters, the first shaft segment is used for matching and sleeving with the right-handed screw rod, the second shaft segment is located inside the bearing seat and forms the third air gap with the inner circumferential wall of the bearing seat, and the third shaft segment is installed inside the clamping ring through the bearing; the second shaft segment and the inner bottom wall of the bearing seat are spaced apart from each other to form a negative pressure area, and the width of the negative pressure area is greater than the width of the third air gap.

6. The vacuum pump package of claim 1, wherein: The outer cover plate and the inner cover plate are spaced apart from each other to form a cooling space, a cover plate is fixed on the top of the outer cover plate to close the cooling space, a heat exchange coil pipe is fixed on the bottom of the cover plate, the heat exchange coil pipe is arranged on the outer circumferential side of the inner jacket, and both ends of the heat exchange coil pipe are connected with a circulation system for circulating water.

7. Vacuum pumping package according to claim 6, characterized in that: The motor base and the mounting chamber have a partitioned cooling chamber, the two opposite side surfaces of the motor base are respectively provided with openings in communication with the cooling chamber, and side sealing plates are matched and installed at the openings, and the side surface of the motor base is provided with a cooling inlet pipe and a cooling outlet pipe in communication with the cooling chamber, and the cooling inlet pipe and the cooling outlet pipe are connected with the circulation system.

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