Spectrometer device

Abstract

The invention relates to a spectrometer device, which comprises a first displacement table, a second displacement table and a sample table, and is characterized in that the first displacement table is arranged on a position sensitive detector and is used for enabling the position sensitive detector to move along X, Y and Z directions; a plurality of third displacement tables are arranged on the second displacement table, and the second displacement table is used for enabling the third displacement tables to move in the Z direction; a crystal is arranged on each third displacement table, and the third displacement tables are used for enabling the crystals on the third displacement tables to move in the X direction and rotate around the Z axis; a sample support is arranged on the sample table and is used for fixing a sample; the position sensitive detector is located above the sample support, all the crystals are arranged around the sample support, and each crystal is a cylindrical curved crystal; the sample is used for receiving incident X-rays and generating fluorescence under the irradiation of the incident X-rays, the fluorescence is transmitted to each crystal and subjected to Bragg diffraction on each crystal, the position sensitive detector is used for receiving diffracted light of each crystal to obtain a fluorescence image, and light spots formed by the diffracted light of each crystal exist in the fluorescence image.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of electron-optical instrument, more particularly to a spectrometer device. BACKGROUND

[0002] High energy resolution fluorescence detected X-ray absorption fine structure (HERFD-XAFS) is a high-resolution absorption spectroscopy technique based on synchrotron X-ray, which significantly improves the energy resolution by optimizing the fluorescence signal detection method, so as to more accurately reveal the electronic structure and local atomic arrangement information of the material.

[0003] With the help of high-resolution emission spectrometer or absorption spectrometer, in the emission spectrum test, a certain specific fluorescence spectrum is selected, recorded and integrated, the incident X-ray energy is adjusted to cover the XANES (X-ray absorption near edge structure) or EXAFS (extended X-ray absorption fine structure) range, and high-resolution fluorescence detected X-ray absorption fine structure (HERFD-XAFS) can be obtained. However, the existing spectrometer device has low collection efficiency for fluorescence signals, most of the fluorescence photons cannot be effectively detected, resulting in weak signal intensity and poor signal-to-noise ratio; especially in the case of low concentration sample or weak fluorescence signal, this problem is more prominent, which seriously affects the quality of the spectrum and the analyzability of the data.

[0004] Therefore, the skilled in the art urgently needs a spectrometer device with higher collection efficiency to accurately obtain the fine structure information of the material. SUMMARY

[0005] The present application aims to provide a spectrometer device which can greatly improve the solid angle and thus improve the signal collection efficiency.

[0006] In order to achieve the above purpose, the present application provides a spectrometer device, comprising a first displacement table, a second displacement table, a sample table and a position sensitive detector, the position sensitive detector is arranged on the first displacement table, the first displacement table is used for moving the position sensitive detector in X, Y and Z directions; a plurality of third displacement tables are arranged on the second displacement table, the second displacement table is used for moving each third displacement table in Z direction; a crystal is arranged on each third displacement table, each third displacement table is used for moving the crystal thereon in X direction and rotating around Z axis; a sample holder is arranged on the sample table, the sample holder is used for fixing a sample; the position sensitive detector is located above the sample holder, each crystal is arranged around the sample holder, each crystal is a cylindrical bent crystal; the sample is used for receiving incident X-ray and generating fluorescence under the irradiation of the incident X-ray, the fluorescence is transmitted to each crystal to occur Bragg diffraction on each crystal, and the position sensitive detector is used for receiving the diffraction light of each crystal to obtain a fluorescence image, wherein the diffraction light of each crystal forms a spot in the fluorescence image.

[0007] Optionally, the crystals are arranged along a circumferential direction of an arc.

[0008] Optionally, different positions of each crystal correspond to different Bragg angles, and the Bragg angles of the different positions of each crystal are arranged to change with movement of the position-sensitive detector along the Z direction and / or movement of the crystals along the Z direction.

[0009] Optionally, the size and brightness of the light spot formed by the diffraction light of each crystal on the position-sensitive detector change with movement of the crystal along the X direction, and the transverse position of the light spot formed by the diffraction light of each crystal on the position-sensitive detector changes with rotation of the crystal around the Z axis.

[0010] Optionally, the light spots formed by the diffraction light of the crystals on the position-sensitive detector are located at the same position or at different positions but in an optimal state.

[0011] Optionally, the first displacement stage comprises a first X-direction moving stage, a first Y-direction moving stage, and a first Z-direction moving stage, the first Y-direction moving stage is arranged on the first X-direction moving stage, the first Z-direction moving stage is arranged on the first Y-direction moving stage, the position-sensitive detector is arranged on the first Z-direction moving stage, the first X-direction moving stage is used to move the first Y-direction moving stage along the X direction, the first Y-direction moving stage is used to move the first Z-direction moving stage along the Y direction, and the first Z-direction moving stage is used to move the position-sensitive detector along the Z direction.

[0012] Optionally, each third displacement stage comprises a second X-direction moving stage and a Z-direction rotating stage, the Z-direction rotating stage is arranged on the second X-direction moving stage, the crystal is arranged on the Z-direction rotating stage, the second X-direction moving stage is used to move the Z-direction rotating stage along the X direction, and the Z-direction rotating stage is used to rotate the crystal around the Z axis.

[0013] Optionally, an arc-shaped support is arranged on the second displacement stage, and each third displacement stage is arranged on the arc-shaped support in sequence; each crystal is fixed on the third displacement stage by a crystal support.

[0014] Optionally, the crystals are five in number, the radius of curvature of each crystal is 250 mm, and the size of the crystal surface of each crystal is 100 mm×25 mm.

[0015] Optionally, the calibration method of the fluorescence image comprises: detecting a characteristic spectral line of the standard sample to obtain a fluorescence image of the characteristic spectral line of the standard sample; acquiring a pixel position of the characteristic peak of the standard sample on the fluorescence image; For each pixel position on the fluorescence image, the energy of the pixel position is determined based on the pixel position and the Bragg angle corresponding to the characteristic peak of the standard sample.

[0016] The spectrometer device of the present application adopts multiple crystals to collect fluorescence of the sample, has a larger solid angle and higher collection efficiency; the third displacement table only needs to adjust the crystals through two dimensions to realize focusing of the light spot, has a simpler structure and lower cost. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 A structural schematic diagram of one view of the spectrometer device according to an embodiment of the present application; Figure 2 A structural schematic diagram of another view of the spectrometer device according to an embodiment of the present application; Figure 3 A physical model schematic diagram of a von Hamos spectrometer; Figure 4 An image of Fe2O3 Kb emission spectrum on a position-sensitive detector, wherein the left side is obtained by focusing of diffraction of two crystals, and the right side is obtained by focusing of diffraction of four crystals; Figure 5A Si(444) crystal elastic scattering peak and fitting curve when the Bragg angle is 80.7° at 8017.5 eV; Figure 5B Si(444) crystal elastic scattering peak in the range of 8017-8120 eV; Figure 5C Cu Ka XES spectra collected at different incident X-ray dose levels; Figure 6A Kb-RIXS spectrum of LMCN; Figure 6B Comparison of Mn HERFD-XANES spectrum and conventional XANES spectrum of LMCN; Figure 7 Kb emission spectrum of Fe foil and Fe2O3 collected based on five crystals of Si(531); Figure 8 Cu Kα spectrum line diagram with a collection time of 0.2 seconds. DETAILED DESCRIPTION

[0018] The preferred embodiments of the present application are described below in conjunction with the accompanying drawings.

[0019] As Figure 1 and Figure 2As shown, the embodiment of the present application provides a spectrometer device, which comprises a first displacement table 100, a second displacement table 200, a sample table 300 and a position sensitive detector 400, the position sensitive detector 400 is arranged on the first displacement table 100, the first displacement table 100 is used for moving the position sensitive detector 400 along the X, Y and Z directions, so as to adjust the X, Y and Z directions of the position sensitive detector 400; the second displacement table 200 is provided with a plurality of third displacement tables 500, the second displacement table 200 is used for moving each third displacement table 500 along the Z direction; each third displacement table 500 is provided with a crystal 600, and each third displacement table 500 is used for moving the crystal 600 thereon along the X direction and rotating around the Z axis; the sample table 300 is provided with a sample holder 700, and the sample holder 700 is used for fixing a sample; the position sensitive detector 400 is located above the sample holder 700, each crystal 600 is arranged around the sample holder 700, each crystal 600 is a cylindrical bent crystal (the generatrix of the cylindrical bent crystal extends along the Z direction), each crystal 600 is arranged in a circumferential direction along an arc of a circle in sequence, and a spliced crystal is formed, and the spliced crystal is equivalent to a larger cylindrical bent crystal. The sample is used for being irradiated by incident X rays, after the incident X rays irradiate on the sample, the energy level electrons of the to-be-detected element in the sample are excited and fluorescent light (i.e. characteristic X rays) is emitted, the fluorescent light is transmitted to each crystal 600 and Bragg diffraction occurs on each crystal 600, and the position sensitive detector 400 is used for receiving the diffraction light of each crystal 600, so as to obtain the spot image of the diffraction light of each crystal 600.

[0020] The principle of the spectrometer device of the embodiment of the present application is based on the principle of the wavelength dispersion von Hamos spectrometer of the cylindrical bent crystal, and the physical model of the von Hamos spectrometer is as shown in the figure. Figure 3 As shown, the sample 10 and the detector 20 are arranged on the central axis of the cylindrical bent crystal 30, after the incident X rays irradiate on the sample, the fluorescent light is generated, the angle between the sample point and the generatrix direction of the cylindrical bent crystal 30 is the Bragg angle, different positions of the cylindrical bent crystal 30 correspond to different Bragg angles, that is, each position of the cylindrical bent crystal 30 in the generatrix direction can diffract the X rays of the corresponding energy and transmit them to different positions of the detector 20, so as to realize the wavelength dispersion spectroscopy of the fluorescent spectral line. And the circumferential direction of each position of the generatrix can focus the fluorescent spectral line of the same energy, so as to improve the signal collection efficiency of the spectrometer.

[0021] In order to reduce the elastic scattering and improve the signal-to-noise ratio, the direction of the sample and the incident X rays is 45°, and the distribution of each component of the von Hamos spectrometer is determined by the energy corresponding to the Bragg angle of the target characteristic spectral line. (1) Wherein, X C is the distance from the sample point to the midpoint on the central axis of the cylindrical bent crystal 30,R R is the radius of curvature of the cylindrically bent crystal 30, q B is the Bragg angle corresponding to the target X-ray fluorescence energy, and correspondingly, the position of the recorded point of the sample 10 to target spectral line on the detector X D =2 X C Based on equation (1), assuming a cylindrically bent crystal with Si(444) crystal plane and a radius of curvature of 250 mm, for the Cu K al fluorescence spectral line with a collected energy of 8046 eV, the corresponding Bragg angle is 79.57°, and the distance from the sample 10 to the midpoint on the central axis of the cylindrically bent crystal 30 is 47.2 mm, and the corresponding distance from the sample 10 to the detector 20 is 94.4 mm. If the von Hamos spectrometer is applied to disperse X-rays by wavelength, the dispersion at each energy point can be derived by the following equation: (2) wherein x is the distance of the distribution of the X-ray at a certain energy on the detector 20. For the X-ray fluorescence spectral line with an energy of 8046 eV and the detector with a pixel size of 172 um in the dispersion direction, the theoretical dispersion capability is 0.5 eV / pixel.

[0022] A great advantage of the von Hamos configuration spectrometer is that it can cover a wide range of fluorescence spectral line energy, and the available range of capabilities covered by it is determined by the length of the crystal and the relative positions of the spectrometer components: (3) , (4) wherein, E Range Bmin is the Bragg angle corresponding to the minimum energy covered by the spectrometer, q B is the Bragg angle corresponding to the target X-ray fluorescence energy, L L is the length of the cylindrically bent crystal, R R is the radius of curvature of the cylindrically bent crystal, q 1 Bmin is the Bragg angle corresponding to the minimum energy covered by the spectrometer, q 2 Bmax is the Bragg angle corresponding to the maximum energy covered by the spectrometer. Similarly, for the X-ray fluorescence spectral line with a central energy of 8046 eV, assuming the length of the cylindrically bent crystal is 100 mm, the energy range covered is 577 eV (7910-8487 eV), which is sufficient to detect characteristic spectral lines or even fluorescence spectral lines of different elements.

[0023] The curved direction of the cylindrical bent crystal can focus the fluorescent spectrum lines of the same energy. Compared with the planar crystal, the cylindrical bent crystal has a larger collection angle, effectively increasing the signal collection efficiency, and is related to the width of the focusing direction of the cylindrical bent crystal and the relative position of the spectrometer components determined by the characteristic spectrum line energy. According to the formula derived by Uwe Bergmann et al., the solid angle of the von Hamos spectrometer is proportional to the sine value of the Bragg angle, and the collection efficiency can be calculated by the following formula: (5) wherein n is the aperture angle of the cylindrical bent crystal, s is the vertical size of the incident X-ray spot. The meaning of formula (5) is the collection efficiency ratio of the cylindrical bent crystal and the planar crystal. For the bent crystal with an aperture angle of 0.2 rad, when the spot size of the incident X-ray is 100 mm x 200 mm (vertical x horizontal), the collection efficiency ratio of the fluorescent spectrum line with an energy of 8046 eV is about 500, which proves the high collection efficiency of the von Hamos spectrometer.

[0024] Each crystal 600 of the spectrometer device of the embodiment of the present application corresponds to the cylindrical crystal in the von Hamos spectrometer, the more the number of crystals 600, the larger the solid angle, and the higher the collection efficiency. However, too many crystals 600 may interfere with the incident X-ray, so various factors need to be considered to obtain the optimal number of crystals 600.

[0025] By adjusting the Z-direction position of the position sensitive detector 400 through the first displacement table 100 and / or adjusting the Z-direction position of each crystal 600 through the second displacement table 200, the Bragg angle of different positions of each crystal 600 can be adjusted, so that the fluorescent spectrum lines of different energies can be collected. By adjusting the X-direction position of each crystal 600 through the third displacement table 500, the sample can be located on the central axis of the spliced crystal (also the central axis of the crystal 600), and by adjusting the X-direction and Y-direction positions of the position sensitive detector 400 through the first displacement table 100, the position sensitive detector 400 can be located directly above the sample, so that the position sensitive detector 400 can also be located on the central axis; when the sample and the position sensitive detector 400 are located on the central axis of each crystal 600, the spot formed by each crystal 600 on the position sensitive detector 400 will be focused to the minimum. By rotating the crystal 600 around the Z-axis through the third displacement table 500, the position of the spot in the transverse direction can be adjusted.

[0026] After the Z-directional positions of the position sensitive detector 400 and the crystals 600 are fixed, the Bragg angles of the different positions of the crystals 600 are also fixed. Then, the third displacement stages 500 can be used to move and rotate the crystals 600 along the X-direction, so as to focus the light spots formed by the diffraction lights of the crystals 600 on the position sensitive detector 400 on the same point or to focus the light spots formed by the diffraction lights of the crystals 600 on the position sensitive detector 400 on different points in the best state (the light spots are the brightest and smallest). If the light spots of the diffraction lights of the crystals 600 are focused on the same point, the data collection and processing can be directly performed, and the collection efficiency can be improved.

[0027] The first displacement stage 100 can include a first X-directional moving stage, a first Y-directional moving stage and a first Z-directional moving stage. The first Y-directional moving stage is arranged on the first X-directional moving stage, and the first Z-directional moving stage is arranged on the first Y-directional moving stage. The position sensitive detector 400 is arranged on the first Z-directional moving stage. The first X-directional moving stage is used to move the first Y-directional moving stage arranged thereon along the X-direction. The first Y-directional moving stage is used to move the first Z-directional moving stage arranged thereon along the Y-direction. The first Z-directional moving stage is used to move the position sensitive detector 400 arranged thereon along the Z-direction. In this way, the X-directional movement of the position sensitive detector 400 can be realized by the first X-directional moving stage. The Y-directional movement of the position sensitive detector 400 can be realized by the first Y-directional moving stage. The Z-directional movement of the position sensitive detector 400 can be realized by the first Z-directional moving stage.

[0028] Each third displacement stage 500 can include a second X-directional moving stage and a Z-directional rotating stage. The Z-directional rotating stage is arranged on the second X-directional moving stage, and the crystal 600 is arranged on the Z-directional rotating stage. The second X-directional moving stage is used to move the Z-directional rotating stage arranged thereon along the X-direction. The Z-directional rotating stage is used to rotate the crystal 600 around the Z-axis. In this way, the third displacement stage 500 can move the crystal 600 along the X-direction by the second X-directional moving stage and rotate the crystal 600 around the Z-axis by the Z-directional rotating stage.

[0029] The second displacement stage 200 can be provided with an arc-shaped support 800, and each third displacement stage 500 can be arranged on the arc-shaped support 800 in sequence. Each crystal 600 can be fixed on the third displacement stage 500 by a crystal support.

[0030] For example, the position sensitive detector 400 can be a Pilatus 100K-M plane detector, and the pixel size is 172mm´172mm. The radius of curvature of each crystal 600 is 250mm, and the radius of curvature of the spliced crystal is also 250mm. The crystal face size of the crystal 600 is 100mm×25mm (focusing×dispersion). The number of the crystals 600 is five, that is, the spectrometer device includes five crystals 600. The normal line of the middle crystal 600 is perpendicular to the direction of the incident X-ray.

[0031] The crystal 600 can be replaced with different crystals as needed to test different elements. For example, a Si (531) crystal is needed when testing Fe, and a Si (444) crystal is needed when testing Cu. When replacing the crystal, the original crystal is first removed from the third displacement stage 500, and then the new crystal is installed on the third displacement stage 500. The Z-direction position of the sensitive position detector 400 is then adjusted by the first displacement stage 100, and the Z-direction position of each crystal 600 is adjusted by the second displacement stage 200, so that the Bragg angle of the crystal 600 corresponds to the Bragg angle of the spectrum line of the element to be tested. Since the installation tolerance of the crystal 600, the radius of curvature error of the crystal itself, the thickness error of the crystal, and the like will affect the shape and position of the focused light spot, the X-direction position and the angle around the Z-axis of each crystal 600 also need to be adjusted by the third displacement stage 500 to optimize the light spot (so that the light spots of each crystal 600 are focused together or at different positions but in the best state).

[0032] As shown in Figure 4 In one collection, different crystals 600 will diffract the fluorescence into similar light spot shapes, and differences in crystal orientation and surface type errors will cause slight changes in the light spot image on the detector; by making slight adjustments to the crystal orientation, the light spots of multiple crystals 600 can be focused to the same point on the position-sensitive detector 400. The focused light spot image obtained can be aligned with the position of the single light spot produced by each crystal 600, proving the effectiveness of the crystal motion control mechanism of the spectrometer device of the present application.

[0033] In order to evaluate the energy resolution of the spectrometer device, the elastic scattering peak was collected. As shown in Figure 5A At 8017.5 eV (Bragg angle of 80.7°), using 5 Si (444) crystals, the energy resolution of 1.2 eV was obtained by measuring the full width at half maximum (FWHM). In order to further clarify the stability of the energy resolution of the spectrometer device at different Bragg angles, the elastic scattering peak in the range of 80.7° to 77.7° Bragg angle was detected, and the FWHM gradually increased from 1.2 eV at 80.7° to 1.6 eV at 77.7° (as shown in Figure 5B It is worth noting that under the same conditions, the amplitude of the increase in FWHM with the decrease in Bragg angle in the spectrometer device of the present application is smaller than that of the spherical bent crystal spectrometer. This enhanced performance can be attributed to the compact structure of the spectrometer device, which is conducive to the detection of low Bragg angle spectrum lines and can maintain a high energy resolution.

[0034] In order to further illustrate the time resolution advantage of the spectrometer device, the XES spectrum line under different detector integration times was systematically detected, thereby simulating different incident photon fluxes. As shown in Figure 5CAs shown in the figure, the Cu Ka line excited by different photon numbers exhibits different signal-to-noise ratios. 7 At 100 phs / s, the spectrum shows negligible noise, indicating that the spectrometer can achieve time resolution on the order of seconds or even milliseconds when probed with a high-flux radiation source such as a diffraction-limited storage ring or a free-electron laser.

[0035] In order to verify the performance of the spectrometer in practical applications, a series of RIXS, HERFD-XANES and XES detections were carried out. In the RIXS detection, the commercial lithium battery cathode material Li 1.2 Ni 0.13 Co 0.13 Mn 0.54 O2 (LMCN) was used as the sample and the Kb-RIXS spectrum of Mn was tested, such as Figure 6A The test process is to use incident X-rays of different energies to irradiate LMCN, then collect a spectrum at each incident energy, and combine the XES spectral lines at all incident energies to obtain the RIXS spectrum. By obtaining a profile curve for a fixed emission energy, such as a fixed Kb 1,3 Peak, along the incident energy profile, can obtain high-resolution absorption spectrum (HERFD-XANES), such as Figure 6B shown. Figure 6B In the figure, the red line represents the Mn HERFD-XANES spectrum of LMCN, and the blue line represents the conventional XANES. It can be seen that the HERFD-XANES has a narrower broadening and higher intensity in important features such as the edge front peak and shoulder peak.

[0036] In addition, the Kb XES lines of Fe foil and Fe2O3 were detected, especially the VtC-XES lines (such as Figure 7 ), further demonstrating the capability of this set of spectrometers in low transition probability spectral lines.

[0037] There are two ways to calibrate the X-ray fluorescence image obtained by the position sensitive detector in the spectrometer device: (1) Detect the characteristic spectral lines of the standard sample of the corresponding element, such as the Ka1 spectrum of Cu foil. Since its theoretical fluorescence energy is clear, the energy value corresponding to each position on the PSD can be determined. Figure 8 The lower middle part is the Cu foil Kα spectrum line fluorescence spot image directly obtained in the position sensitive detector. The spot with large intensity is the Kα1 spectrum line, and the smaller one is the Kα2 spectrum line. Figure 8 The intensity of the upper middle peak is obtained by integrating directly from the white dotted line in the spot image. The ratio of the two peaks is close to 2:1, which corresponds to the transition probability of the Cu foil Kα line. Assume that the Bragg angle corresponding to the fluorescence energy of the Cu foil Kα1 line is q0 The energy corresponding to each pixel point on the position sensitive detector can be calculated as follows: (6) Where n is the pixel number difference between the position on the position sensitive detector and the Bragg angle q 0 The corresponding position difference is the pixel number difference, p is the pixel size of the dispersion direction PSD, h is the Planck constant, c is the light speed, and d is the interplanar spacing. Based on the above formula, the energy values at each position on the PSD are obtained by calculating the Cu foil Kα1 spectral line fluorescence energy. Theoretically, the pixel difference between the Kα1 spectral line fluorescence spot and the Kα2 spectral line fluorescence spot should be 42, and the actually measured pixel difference is 41, with an error of 2.38%.

[0038] (2) Calibration by elastic scattering peak. The characteristic of elastic scattering is that the energy of the incident X-ray is the same as that of the emitted X-ray fluorescence. Therefore, when detecting the Kα spectrum of the Cu sample, the energy of the incident X-ray is set to the Kα1 spectral line energy of the Cu foil, and then the elastic scattering peak spot can be obtained after a long exposure, and the energy is also equal to the Kα1 spectral line energy. According to formula (6), the energy values of each pixel point on the PSD can be obtained. The advantage of calibration by elastic scattering peak is that it does not need to replace the standard sample, which ensures the stability of the structure in the detection. Especially for in-situ emission spectrum detection, since the size of the in-situ cell does not match the size of the conventional sample holder, the calibration by elastic scattering peak can avoid the error caused by the fine adjustment of the sample point.

[0039] The spectrometer device of the embodiment of the present application adopts multiple crystals 600 to collect the fluorescence of the sample, the solid angle is larger, and the collection efficiency is higher; the third displacement table 500 only needs to adjust the crystal 600 through two adjustment dimensions to realize spot focusing, the structure is simpler, and the cost is lower.

[0040] The above is only a preferred embodiment of the present application, and is not intended to limit the scope of the present application. The above embodiment of the present application can be variously changed. Any simple, equivalent changes and modifications made according to the content of the claims and description of the present application fall within the scope of protection of the present application. The present application is not described in detail.

Claims

1. A spectrometer device, characterized in that: The apparatus comprises a first translation stage, a second translation stage, a sample stage, and a position-sensitive detector, wherein the position-sensitive detector is disposed on the first translation stage and is used to move the position-sensitive detector in the X, Y, and Z directions; a plurality of third translation stages are disposed on the second translation stage and are used to move each third translation stage in the Z direction; each third translation stage is provided with a crystal and each third translation stage is used to move the crystal thereon in the X direction and rotate about the Z axis; a sample holder is disposed on the sample stage and is used to fix the sample; the position-sensitive detector is located above the sample holder and is surrounded by the crystals, each of which is a cylindrical curved crystal; the sample is used to receive incident X-rays and generate fluorescence under the irradiation of the incident X-rays. The fluorescence is transmitted to each crystal and Bragg diffracts on each crystal; the position-sensitive detector is used to receive the diffracted light from each crystal to obtain a fluorescence image, wherein the fluorescence image includes a light spot formed by the diffracted light from each crystal.

2. The spectrometer device according to claim 1, characterized in that The crystals are arranged in sequence along the circumference of an arc.

3. The spectrometer device according to claim 1, characterized in that Different positions of each crystal correspond to different Bragg angles, and the Bragg angles of different positions of each crystal are set to change with the movement of the position sensitive detector along the Z direction and / or the movement of each crystal along the Z direction.

4. The spectrometer device according to claim 1, characterized in that The size and brightness of the light spot formed by the diffracted light of each crystal on the position-sensitive detector change as the crystal moves along the X direction, and the lateral position of the light spot formed by the diffracted light of each crystal on the position-sensitive detector changes as the crystal rotates around the Z axis.

5. The spectrometer device according to claim 4, characterized in that The light spots formed on the position-sensitive detector by the diffracted light of each crystal are located at the same position or at different positions but in an optimal state.

6. The spectrometer device according to claim 1, characterized in that The first translation stage includes a first X-axis moving stage, a first Y-axis moving stage, and a first Z-axis moving stage. The first Y-axis moving stage is arranged on the first X-axis moving stage, the first Z-axis moving stage is arranged on the first Y-axis moving stage, and the position-sensitive detector is arranged on the first Z-axis moving stage. The first X-axis moving stage is used to move the first Y-axis moving stage along the X direction, the first Y-axis moving stage is used to move the first Z-axis moving stage along the Y direction, and the first Z-axis moving stage is used to move the position-sensitive detector along the Z direction.

7. The spectrometer device according to claim 1, characterized in that Each of the third translation stages includes a second X-axis moving stage and a Z-axis rotation stage. The Z-axis rotation stage is arranged on the second X-axis moving stage, and the crystal is arranged on the Z-axis rotation stage. The second X-axis moving stage is used to move the Z-axis rotation stage along the X-axis, and the Z-axis rotation stage is used to rotate the crystal around the Z-axis.

8. The spectrometer device according to claim 1, characterized in that The second translation stage is provided with an arc-shaped bracket, and each third translation stage is sequentially provided on the arc-shaped bracket; each crystal is fixed on the third translation stage via a crystal bracket.

9. The spectrometer device according to claim 1, characterized in that There are five crystals, each of which has a curvature radius of 250 mm and a crystal face size of 100 mm×25 mm.

10. The spectrometer device according to claim 1, characterized in that The fluorescence image calibration method includes: Detecting the characteristic spectral lines of the standard sample to obtain a fluorescence image of the characteristic spectral lines of the standard sample; Obtain the pixel position of the characteristic peak of the standard sample on the fluorescence image; For each pixel position on the fluorescence image, the energy of the pixel position is determined based on the Bragg angle corresponding to the pixel position of the characteristic peak of the standard sample and the characteristic peak of the standard sample.

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