Graphite boat for improving high frequency

Abstract

The invention relates to a graphite boat for improving high frequency, and belongs to the field of photovoltaic cell production equipment. The whole mounting plate is U-shaped and comprises a mounting bottom plate, baffles are arranged at the two ends of the mounting bottom plate, and a supporting plate is arranged on the mounting bottom plate; the supporting plate is mounted on the mounting bottom plate through a flexible supporting structure, and the supporting plate is used for placing a boat piece; the mounting pieces are movably arranged on the two sides in the mounting plate in a sleeving manner; the boat piece is arranged between the two mounting pieces and comprises a first boat piece and a second boat piece; one end of the first boat piece is provided with a through connecting groove, and one end of the second boat piece is provided with a connecting tenon which is movably sleeved in the connecting groove; and the clamping mechanisms are symmetrically arranged on the two sides of the mounting piece. In this way, the sliding rod is driven through the inclined face of the triangular plate, vertical pressure is converted into horizontal clamping force, and shaking during manual maintenance is avoided. And the maintenance stability can be improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the field of photovoltaic cell production equipment, and particularly relates to a graphite boat for improving high frequency. BACKGROUND

[0002] The graphite boat is a kind of high-temperature bearing device commonly used in solar cell manufacturing, and is widely used in photovoltaic cells, especially in the processes such as film plating, diffusion, annealing, etc. of PERC, TOPCon and back contact (BC) cells. Its main function is to bear the silicon wafer for heat treatment in a high-temperature environment, and to provide necessary support, limiting and stability during the process. A typical graphite boat usually includes boat pieces, support members, limiting members and other structural parts, and the material thereof is usually high-purity graphite to adapt to complex thermal field and chemical environment.

[0003] With the increase of the size of the photovoltaic cell and the improvement of the production rhythm, some graphite boats adopt a lengthened boat piece structure. This design may cause thermal deformation during high-temperature use, especially for the graphite boats with a length greater than 1200 mm. After the deformation of the boat leaves, the positioning accuracy of the silicon wafer is affected, and the probability of high-frequency dropping of the silicon wafer in the boat is increased, resulting in rework and yield loss. At the same time, during the assembly and clamping of the graphite boat, due to the insufficient compactness of the structure connection or the insufficient contact area of the clamping surface, the boat body may produce slight shaking in the working state, affecting the uniformity of the film layer and the stability of the equipment operation.

[0004] Based on this, the present application proposes a graphite boat for improving high frequency. SUMMARY

[0005] The purpose of the present application is to provide a graphite boat for improving high frequency, and to improve the high frequency caused by film plating dropping and wafer warping.

[0006] To solve the above technical problems, the present application is realized by the following technical scheme: A graphite boat for improving high frequency, comprising: A mounting plate, which is in a U shape and comprises a mounting bottom plate, the two ends of the mounting bottom plate are provided with baffle plates, and a support plate is arranged on the mounting bottom plate; The support plate is installed on the mounting bottom plate through a flexible support structure, and the support plate is used for placing a boat piece; Mounting pieces movably sleeved on the two sides of the mounting plate; The boat piece is arranged between the two mounting pieces and comprises first boat pieces and second boat pieces arranged alternately; The first boat piece is provided with a through connecting groove at one end facing the second boat piece, The second boat piece is provided with a connecting tenon movably sleeved in the connecting groove at one end facing the first boat piece; A clamping mechanism is arranged on the two sides of the mounting piece and is symmetrically arranged. Advantages

[0007] The present disclosure provides constant damping by spring and telescopic rod system while the clamping plate contacts the boat body in a large area, absorbs high-frequency energy, and suppresses the occurrence of high-frequency vibration; The present disclosure converts vertical pressure into horizontal clamping force by driving the slide rod with the inclined surface of the triangular plate, avoiding shaking during manual maintenance, and increasing the stability of maintenance; The present disclosure evenly distributes the clamping force to each section of the boat piece, prevents micro-deformation of the mortise and tenon joint due to stress concentration, protects the split boat piece, and avoids boat leaf deformation.

[0008] Of course, implementing any product of the present application does not necessarily require achieving all the advantages described above at the same time. BRIEF DESCRIPTION OF DRAWINGS

[0009] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0010] Figure 1 The structural schematic diagram of the embodiment of the present disclosure; Figure 2 The structural schematic diagram of the first boat piece of the embodiment of the present disclosure; Figure 3 The structural schematic diagram of the enlarged structure at A of the embodiment of the present disclosure; Figure 4 The structural schematic diagram of the internal structure of the mounting plate of the embodiment of the present disclosure; Figure 5 The structural schematic diagram of the clamping mechanism of the embodiment of the present disclosure.

[0011] In the figure: 1, mounting piece; 2, mounting plate; 201, mounting groove; 3, first boat piece; 301, connecting groove; 4, second boat piece; 401, link mortise; 5, backing plate; 6, ceramic rod; 601, ceramic gasket; 602, ceramic nut; 7, support plate; 701, limiting plate; 702, spring; 703, telescopic rod; 704, slide rod; 8, clamping plate; 801, triangular plate; 802, slide groove; 803, connecting rod; 804, connecting plate; 9, mounting hole. DETAILED DESCRIPTION

[0012] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of the present application.

[0013] The present disclosure aims to solve the problem that the existing graphite boat is prone to thermal deformation during high-temperature application, especially the problem of film coating warping of the graphite boat with a total length greater than 1200mm. To this end, the present disclosure provides an improved high-frequency graphite boat, which comprises two mounting pieces, a plurality of groups of first boat pieces and second boat pieces are alternately arranged between the two mounting pieces, forming a segmented combined structure to improve overall load stability and thermal stress adaptability. The first boat piece and the second boat piece are detachably connected through a mortise and tenon structure, the connection is precise, and the structural rigidity is enhanced. A spacer plate is arranged between each boat piece for controlling the spacing and absorbing thermal stress to prevent the boat piece from warping or being damaged at high temperature; the boat body is assembled and fixed by a ceramic fastening assembly, which has high temperature resistance and maintenance convenience. In addition, the graphite boat is provided with a linkage mechanism for clamping and limiting, which can generate a horizontal clamping force under the action of a vertical external force to realize stable positioning of the graphite boat, reduce the shaking or deviation of the graphite boat during operation due to vibration or stress change, and thus improve the stability of the film coating process and the reliability of the equipment operation.

[0014] As shown in Figure 1 An improved high-frequency graphite boat comprises two mounting pieces 1, and a boat piece is arranged in the middle of the two mounting pieces 1.

[0015] The mounting piece 1 is in the form of a sheet structure and is movably sleeved in the mounting plate 2; The mounting plate 2 is in the form of a U shape and comprises a mounting bottom plate 21, wherein the two ends of the mounting bottom plate 21 are provided with baffles 22, and a support plate 7 is arranged on the mounting bottom plate 21; The support plate 7 is used for placing the boat piece; It can be understood that the mounting mode of the support plate 7 and the mounting bottom plate 21 can be realized by a spring, an air cylinder, a sliding rail, a flexible connecting belt, a buffer pad, a hinged structure or other mechanisms that can realize elastic connection.

[0016] The boat piece comprises alternately arranged first boat pieces 3 and second boat pieces 4; The first boat piece 3 is provided with a through connecting groove 301 at one end facing the second boat piece 4, The second boat piece 4 is provided with a connecting tenon 401 movably sleeved in the connecting groove 301 at one end facing the first boat piece 3; When installed, the first boat piece 3 and the second boat piece 4 are connected end to end, the connecting tenon 401 is arranged in the connecting groove 301 to complete the fixing, As Figure 4 shown, the graphite boat includes a clamping mechanism arranged on both sides of the mounting piece 1 and arranged symmetrically.

[0017] The embodiment of the present disclosure avoids the problem that the assembled boat piece is too long and is prone to bending and deformation, thereby causing the silicon wafer to be scratched, the wafer to be dropped and warped, and the graphite boat to be high-frequency. The graphite boat is convenient to assemble and disassemble and is relatively simple to use. The clamping mechanism is used for clamping and fixing the side surface of the graphite boat, and can limit the graphite boat to prevent the graphite boat from shaking during maintenance of the graphite boat, thereby preventing the progress of the maintenance work from being affected.

[0018] As Figures 4-5 shown, in some embodiments, the clamping mechanism includes a clamping mechanism for laterally clamping and fixing the boat piece. The mounting plate 2 is provided with a mounting groove 201 on both sides. A connecting rod 803 is movably arranged on the mounting groove 201. Both ends of the connecting rod 803 are rotatably arranged on the inner wall of the mounting groove 201 through a bearing seat.

[0019] The middle part of the connecting rod 803 is fixedly connected with a connecting plate 804. The top end of the connecting plate 804 is connected with a clamping plate 8 through a hinged manner. The clamping plate 8 can swing relative to the connecting plate 804, thereby providing a certain elastic buffer when the boat piece is compressed.

[0020] In some disclosures, the bottom end of the connecting plate 804 is provided with a driving device. When clamping is needed, the driving device drives the connecting plate 804 to rotate around the connecting rod 803 by applying pressure to the bottom end of the connecting plate 804, thereby driving the clamping plate 8 to move to one side of the mounting piece 1. The driving mode can be a spring, a sliding block, a screw rod, an electric drive, a pneumatic drive, etc.

[0021] In some disclosures, the bottom end of the connecting plate 804 is fixedly provided with a triangular plate 801, and the triangular plate 801 is located below the supporting plate 7. The side surface of the triangular plate 801 abuts against the supporting plate 7. When the supporting plate 7 moves downward, the triangular plate 801 is driven by abutting against the inclined surface of the triangular plate 801.

[0022] By arranging the above-mentioned clamping mechanism, reliable clamping can be achieved on both sides of the boat piece, the clamping contact area is significantly increased, and the clamping stability is improved. The modular design makes the assembly and disassembly of the boat piece more convenient, facilitates maintenance and replacement, and improves the overall applicability and operation convenience of the graphite boat.

[0023] It can be understood that the first boat piece 3 and the second boat piece 4 can be arranged in a corresponding number to obtain boat pieces of different sizes according to needs. Specifically, as Figure 3 , Figure 4As shown, the first boat pieces 3 and the second boat pieces 4 are respectively provided in five groups; Furthermore, to ensure a secure connection between the first and second boat pieces 3 and 4, mounting holes 9 are uniformly defined on the sides of the first and second boat pieces 3 and 4. The mounting plate 1 also has holes on its side that match the mounting holes 9, and the dimensions of the mounting holes 9 match the dimensions of the ceramic rods 6. Thus, the mounting plate 1, the first and second boat pieces 3 and 4 are securely connected together via the ceramic rods 6 and ceramic nuts 602, forming a graphite boat.

[0024] like Figure 3 、 Figure 4 As shown, in some embodiments, the mounting plate 1, the first boat plate 3, and the second boat plate 4 are movably mounted on the surface of a ceramic rod 6. A ceramic nut 602 is threadedly connected to one end of the ceramic rod 6 for fastening the mounting plate 1, the first boat plate 3, and the second boat plate 4. A ceramic washer 601 is movably mounted between the ceramic rod 6 and the ceramic nut 602. The ceramic washer 601 prevents the ceramic nut 602 from damaging the side of the mounting plate 1 during the tightening process.

[0025] Furthermore, pads 5 are provided at both ends of the connection between the first and second boats 3, 4. Pads 5 are flexibly mounted on ceramic rods 6. Pads 5 limit the lateral spacing between the first and second boats 3, 4. This arrangement prevents lateral displacement of the boats due to thermal expansion during high-temperature treatment, ensuring a stable relative position between the boats. Furthermore, the flexural fit between pads 5 and ceramic rods 6 facilitates assembly and disassembly, improving the convenience of equipment maintenance and cleaning.

[0026] It is understandable that in order to avoid the situation where the graphite boat shakes, Figure 4 、 5 As shown, limiting plates 701 are fixedly installed on both sides of the top surface of the support plate 7, and the bottom surface of the graphite boat can be limited by the two limiting plates 701.

[0027] like Figure 4 、 5 As shown, in some embodiments, slide bars 704 are provided on both sides of the support plate 7, and the two slide bars 704 are symmetrically mounted on both sides of the support plate 7. The inclined surface of the triangular plate 801 matches the position of the slide bars 704, and a sliding groove 802 matching the slide bars 704 is provided in the middle of the inclined surface of the triangular plate 801.

[0028] By sliding the slide bar 704 inside the slide groove 802, the clamping plate 8 hinged on the top of the connecting plate 804 can be brought into contact with the side of the graphite boat to achieve the purpose of clamping and fixing. like Figures 4-5As shown, the mounting base plate 21 is elastically connected to the support plate 7 through a plurality of springs 702, so that the support plate 7 can move in the vertical or horizontal direction and absorb vibration, reduce wafer warping, and thus improve the stability and uniformity of the overall coating process.

[0029] Further, the inner ring of the spring 702 is provided with a telescopic rod 703, and the two ends of the telescopic rod 703 are fixedly connected to the bottom surface of the support plate 7 and the bottom surface of the mounting plate 2, respectively. The telescopic rod 703 can prevent the spring 702 from bending during stretching and compression.

[0030] In some embodiments, the assembly process of the graphite boat includes the following steps: S1: Insert the connecting tenon 401 at one end of the second wafer 4 into the connecting groove 301 at the corresponding end of the first wafer 3, so that the two form a combined structure connected end to end; S2: Provide a spacer 5 at the connection between the first wafer 3 and the second wafer 4 and at both ends thereof, respectively, for spacing and absorbing thermal stress; S3: Pass the ceramic rod 6 through the through hole positions of the mounting piece 1, the first wafer 3, the second wafer 4, and each spacer 5 in sequence; S4: After the ceramic spacer 601 is sleeved on the threaded end of the ceramic rod 6, tighten the ceramic nut 602, so as to realize reliable fastening of the overall structure and complete the preliminary assembly of the graphite boat.

[0031] S5: After the graphite boat is assembled, it can be placed on the top surface of the support plate 7 on the mounting base plate 21. At this time, the self-weight of the graphite boat will compress the spring 702, causing the support plate 7 to move downward and drive the slide rods 704 on both sides thereof to slide outward in the sliding groove 802 on the inclined surface of the triangular plate 801, thereby pushing the triangular plate 801 to rotate and drive the connecting rod 803 to swing, causing the clamping plate 8 to move inward and finally tightly fit the side surface of the graphite boat and complete the clamping and fixing operation.

[0032] The linkage clamping structure adopted by the present disclosure can automatically realize the limiting and stable positioning of the graphite boat without additional manual adjustment, significantly improving the convenience and stability of the operation. In this way, it not only avoids the shaking or position deviation of the graphite boat during maintenance or handling, but also further ensures the reliability of the equipment operation and the uniformity of the coating quality during the coating process.

[0033] In some embodiments, the total length of the graphite boat is set to 1200-1500 mm, which is composed of two end mounting pieces 1 and alternatingly arranged first boat pieces 3 and second boat pieces 4 in the middle part 5. The length of each group of boat pieces is 200-300 mm, which can be adjusted according to actual needs. The width of the boat piece is 150-200 mm, which provides sufficient clamping contact area, and the thickness is 10-15 mm to ensure good mechanical strength and thermal stability.

[0034] In order to realize modular assembly, one end of the second boat piece 4 is provided with a connecting tenon 401 with a width of 30-40 mm. The corresponding first boat piece 3 is provided with a connecting groove 301, and the gap between the tenon and the groove is controlled to be 0.05-0.1 mm, which can effectively avoid loose connection and at the same time ensure good bonding strength and rigidity.

[0035] Further, the depth of the tenon-groove 301 is designed to be 45-65 mm, preferably the length of the tenon plus 5-10 mm, to avoid the risk of falling out under the conditions of thermal expansion and contraction.

[0036] A spacer plate 5 is arranged between adjacent boat pieces. The thickness of the spacer plate 5 is 5-8 mm, which is used to control the spacing of the boat pieces and absorb part of the thermal stress, and the center hole diameter is selected to be 6-13 mm to adapt to the installation of the ceramic rod 6. The outer dimensions of the spacer plate are preferably 150 mm x 150 mm, which not only provides sufficient installation space, but also helps to disperse stress and buffer the structure. The spacer plate material can use graphite-ceramic laminated composite material, the two surfaces are 1 mm thick high-purity graphite layer to ensure low friction contact with the boat piece; the middle layer is 6 mm thick porous silicon carbide ceramic which uses its microporous structure to absorb thermal expansion stress. Not only can it prolong the service life of the spacer plate by more than 3 times, but also can reduce the risk of transverse displacement of the boat piece The length of the clamping plate 8 is designed to be 150-200 mm, covering most of the side area of the graphite boat, increasing the contact area, improving the clamping stability, and effectively preventing the graphite boat from shaking or position deviation during use. The length of the sliding groove 802 used in cooperation is 100 mm, and the inclination angle is set to 30°, which can provide sufficient clamping stroke to ensure the reliability of the clamping action and the uniform distribution of the clamping force.

[0037] The free length of the spring 702 used in the clamping structure is 150 mm, and the telescopic rod 703 forms a constant elastic support system, which can provide stable pre-pressure and buffering effect when the graphite boat is stressed.

[0038] Such arrangement provides constant damping through the large-area contact of the clamping plate 8 with the boat body and the spring 702 plus telescopic rod 703 system, absorbs high-frequency energy, and suppresses the occurrence of high-frequency vibration; The triangular plate 801 drives the sliding rod 704 with an inclined surface, which converts the vertical pressure into horizontal clamping force to avoid shaking during manual maintenance. It can increase the stability of maintenance. The clamping force is uniformly distributed to each section of the boat piece, preventing micro-deformation of the mortise and tenon joint due to stress concentration, and protecting the split boat piece from deformation.

[0039] In summary, the specific setting of the above structural parameters makes the graphite boat in the embodiment have excellent module assembly characteristics, thermal stress adaptability, vibration suppression capability and maintenance stability, which are significantly better than the existing whole graphite boat structure, and are suitable for high-frequency coating and other high-demand application scenarios.

[0040] In the description of the present specification, the description referring to the terms "one embodiment", "an example", "a specific example" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0041] The preferred embodiments of the application disclosed above are only used to help explain the application. The preferred embodiments do not describe all the details and limit the application to the specific embodiments described. Obviously, many modifications and changes can be made according to the content of the present specification. The present specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the application, so that those skilled in the art can well understand and utilize the application. The application is limited only by the claims and their full scope and equivalents.

Claims

1. A graphite boat for improving high frequency, characterized in that: include; The mounting plate is U-shaped as a whole and includes a mounting base plate, baffles are provided at both ends of the mounting base plate, and a support plate is provided on the mounting base plate; The support plate is installed on the installation base plate through a flexible support structure, and the support plate is used to place the boat piece; Mounting pieces, movably mounted on both sides of the mounting plate; The boat piece is arranged between the two mounting pieces and includes a first boat piece and a second boat piece which are alternately arranged; The first boat piece has a connecting groove extending through one end thereof toward the second boat piece. The second boat piece is provided with a connecting tenon movably sleeved inside the connecting groove at one end thereof facing the first boat piece; The clamping mechanism is arranged on both sides of the mounting plate and is symmetrically arranged.

2. The graphite boat for improving high frequency according to claim 1, characterized in that: The clamping mechanism comprises: Connecting rod, movably mounted on both sides of the mounting plate; The middle part of the connecting rod is fixedly connected to a connecting plate, and the top end is hingedly connected to a clamping plate; A triangular plate is fixedly provided at the bottom end of the connecting plate. The triangular plate is located below the supporting plate, and the side surfaces of the triangular plate are in contact with the supporting plate.

3. The graphite boat for improving high frequency according to claim 2, characterized in that: Slide rods are arranged on both sides of the supporting plate, and a slide groove matching the slide rods is opened in the middle of the inclined surface of the triangular plate.

4. The graphite boat for improving high frequency according to claim 2, characterized in that: A mounting groove is provided on the side of the mounting plate, and both ends of the connecting rod are installed through bearing seats, and the bearing seats are movably installed on the inner wall of the mounting groove.

5. The graphite boat for improving high frequency according to claim 1, characterized in that: The length of the boat piece is greater than 1200 mm, the length of a single section of the boat piece is 200-300 mm, the width of the boat piece is 150-200 mm, and the thickness is 10-15 mm.

6. The graphite boat for improving high frequency according to claim 1, characterized in that: The graphite boat comprises a ceramic rod, and the mounting plate, the first boat plate and the second boat plate are sleeved on the ceramic rod for fixation.

7. The graphite boat for improving high frequency according to claim 5, characterized in that: Pads are provided at both ends of the connection between the first boat piece and the second boat piece, and the pads are movably sleeved on the ceramic rod; The pad is made of graphite-ceramic laminated composite material, with 1mm high-purity graphite layers on both surfaces and a 6mm porous silicon carbide ceramic middle layer.

8. The graphite boat for improving high frequency according to claim 1, characterized in that: Limiting plates are installed on both sides of the top surface of the supporting plate.

9. The graphite boat for improving high frequency according to claim 1, characterized in that: The mounting base is elastically connected to the support plate through a plurality of springs.

10. The graphite boat for improving high frequency according to claim 9, characterized in that: The inner ring of the spring is provided with a telescopic rod, and the two ends of the telescopic rod are fixedly connected to the bottom surface of the support plate and the bottom surface of the mounting plate respectively.

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