Laser output window and laser equipment

Abstract

The invention provides a laser output window and laser equipment. The laser output window comprises a bottom plate, a pressing plate and a composite lens, wherein the bottom plate and the pressing plate are arranged in a butt joint mode and jointly form a light hole, and the composite lens is arranged between the bottom plate and the pressing plate. At least part of the light hole exposes the composite lens, a first magnetic attraction part is embedded in one side, close to the pressing plate, of the bottom plate, a second magnetic attraction part is embedded in one side, close to the bottom plate, of the pressing plate, and the first magnetic attraction part and the second magnetic attraction part are oppositely attracted or reversely released, so that the composite lens is movably clamped by the bottom plate and the pressing plate; wherein the composite lens comprises a high-transmittance substrate layer, an anti-laser-damage layer and an anti-static layer which are arranged in sequence, and the high-transmittance substrate layer is arranged on one side close to the bottom plate. According to the invention, the disassembly and assembly time of the composite lens is shortened, and the composite lens can be used for a long time without being replaced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of laser, in particular to a laser output window and a laser device. BACKGROUND

[0002] A laser (Light Amplification by Stimulated Emission of Radiation) is a device that produces a high-intensity, high-directional, high-monochromatic and high-coherent light wave by amplifying a light signal through stimulated emission. Lasers are widely used in different fields, for example, in industrial scenarios for precise cutting and welding of materials such as metals, plastics and ceramics, and in medical scenarios as laser knives and dental treatments.

[0003] The existing laser has many problems in actual application. The laser damage threshold of the traditional glass lens material is low (for example, the laser damage threshold of BK7 glass is 5 J / cm 2 ), and the transmittance will decrease due to laser damage after a period of use, so the lens needs to be replaced, which is costly. In the industrial processing field, the nanoscale carbonized particles (particle size 50-200 nm) generated by polymer ablation increase the laser scattering loss, which causes the transmittance of the protective sheet to decrease rapidly, resulting in the need to replace the protective sheet in a short period of time, which is costly. At the same time, the traditional protective sheet needs to be replaced during downtime, which is time-consuming, and the protective sheet is removed for a long time, which causes dust particles in the air to enter the optical path chamber formed by the laser, causing pollution.

[0004] Therefore, it is necessary to improve the existing laser to solve the above problems.

[0005] It should be noted that the above introduction to the background art is only for the convenience of clearly and completely describing the technical solutions of the present application, and for the convenience of understanding by those skilled in the art. The above technical solutions cannot be considered as known to those skilled in the art merely because they are described in the background art section of the present application.

[0006] SUMMARY

[0007] The present application aims to solve the problem that the existing laser protective sheet has a rapid decrease in transmittance due to the generation of nanoscale carbonized particles and a low laser damage threshold, and the problem that replacing the laser protective sheet takes a long time, causing dust particles to enter the optical path chamber and causing pollution.

[0008] To achieve the above-mentioned purpose, the present application provides a laser output window, comprising: a bottom plate and a pressing plate which are arranged in abutment and form a light transmission hole, and a composite lens arranged between the bottom plate and the pressing plate.

[0009] The light transmission hole at least partially exposes the composite lens, the bottom plate is embedded with a first magnetic member near one side of the pressing plate, the pressing plate is embedded with a second magnetic member near one side of the bottom plate, the first magnetic member and the second magnetic member are oppositely attracted or reversely unattracted, so that the bottom plate and the pressing plate are switched between the docking state and the separated state to hold the composite lens movably by the bottom plate and the pressing plate.

[0010] The composite lens comprises a high-transmittance substrate layer, a laser damage resistant layer and an anti-static layer arranged in sequence, and the high-transmittance substrate layer is arranged on the side close to the bottom plate.

[0011] As a further improvement of the present application,

[0012] The laser damage threshold of the laser damage resistant layer is greater than the laser damage thresholds of the high-transmittance substrate layer and the anti-static layer.

[0013] The light transmittance of the high-transmittance substrate layer is greater than the light transmittances of the laser damage resistant layer and the anti-static layer.

[0014] The thickness of the high-transmittance substrate layer is greater than the thicknesses of the laser damage resistant layer and the anti-static layer.

[0015] The surface resistance of the anti-static layer is greater than the surface resistances of the laser damage resistant layer and the high-transmittance substrate layer.

[0016] As a further improvement of the present application, the composite lens further comprises a protective layer arranged on the side of the high-transmittance substrate layer away from the laser damage resistant layer.

[0017] The laser damage threshold of the laser damage resistant layer is greater than the laser damage threshold of the protective layer, the light transmittance of the high-transmittance substrate layer is greater than the light transmittance of the protective layer, the thickness of the high-transmittance substrate layer is greater than the thickness of the protective layer, the surface resistance of the anti-static layer is greater than the surface resistance of the protective layer, and the hardness of the protective layer is greater than the hardness of the high-transmittance substrate layer.

[0018] As a further improvement of the present application, the protective layer comprises an aluminum nitride hard film or an aluminum oxynitride hard film.

[0019] The thickness of the protective layer is 200-400 nm.

[0020] The Vickers hardness of the protective layer is 1600-2000.

[0021] As a further improvement of the present application, the high-transmittance substrate layer comprises calcium fluoride, fused quartz or sapphire.

[0022] And / or, the high-transmittance substrate layer has a thickness of 1-3 mm;

[0023] And / or, the high-transmittance substrate layer has a transmittance of 85-99% for laser with wavelength of 193-532 nm;

[0024] And / or, the anti-laser-damage layer comprises a diamond film;

[0025] And / or, the anti-laser-damage layer has a thickness of 100 nm;

[0026] And / or, the anti-laser-damage layer has a thermal conductivity of 1800-2100 W / m·K;

[0027] And / or, the anti-laser-damage layer has a laser-damage threshold of >10 J / cm2;

[0028] And / or, the anti-static layer comprises a diamond-like carbon conductive film;

[0029] And / or, the anti-static layer has a thickness of 100 nm.

[0030] As a further improvement of the present application, the anti-static layer has a surface resistance of <10 Ω / sq.

[0031] By so doing, the energy loss of the laser device due to laser scattering caused by static adsorption of particles can be effectively prevented, and the energy loss of the laser device can be improved.

[0032] As a further improvement of the present application, the laser output window further comprises a sealing ring arranged around the edge of the composite lens;

[0033] The bottom plate and the pressing plate are provided with a first receiving groove and a second receiving groove for accommodating the composite lens and the sealing ring, respectively.

[0034] As a further improvement of the present application,

[0035] The first receiving groove is arranged on the bottom plate, and the second receiving groove is arranged at the joint of the bottom plate and the pressing plate.

[0036] Alternatively, the first receiving groove is arranged on the pressing plate, and the second receiving groove is arranged at the joint of the bottom plate and the pressing plate.

[0037] Alternatively, the first receiving groove is arranged at the joint of the bottom plate and the pressing plate, and the second receiving groove is arranged on the bottom plate and / or the pressing plate.

[0038] As a further improvement of the present application, the laser output window further comprises a magnetic separator longitudinally extending into the joint of the bottom plate and the pressing plate, and the magnetic separator is used to separate the bottom plate and the pressing plate.

[0039] Based on the same inventive concept, the application also discloses a laser device, comprising a laser and the laser output window as described in any one of the preceding items arranged at the light outlet of the laser.

[0040] As a further improvement of the application, the laser output window is provided with a mounting hole for the locking member to pass through, so that the pressing plate in the laser output window can be detachably assembled at the light outlet of the laser.

[0041] Compared with the prior art, the application has the following beneficial effects:

[0042] The laser output window comprises a bottom plate, a pressing plate and a composite lens arranged between the bottom plate and the pressing plate, the bottom plate and the pressing plate are arranged in abutment and form a light transmission hole; the side of the bottom plate close to the pressing plate is embedded with a first magnetic attraction member, and the side of the pressing plate close to the bottom plate is embedded with a second magnetic attraction member. The first magnetic attraction member and the second magnetic attraction member are oppositely attracted to realize the abutment of the bottom plate and the pressing plate, and the composite lens is clamped by the bottom plate and the pressing plate. The first magnetic attraction member and the second magnetic attraction member are oppositely released to realize the reverse separation of the bottom plate and the pressing plate, and the composite lens is released by the bottom plate and the pressing plate. By such arrangement, the composite lens can be replaced conveniently, the problem that the replacement of the laser protective sheet in the prior art takes a long time and causes dust particles to enter the inside of the light path chamber to cause pollution is solved, the replacement time of the composite lens is shortened to within seconds under the premise of ensuring positioning accuracy, the use efficiency of the laser device is improved, and secondary pollution to the inside of the laser device is avoided. At the same time, the composite lens comprises a high-transmittance substrate layer, an anti-laser damage layer and an anti-static layer. When laser is transmitted to the composite lens, it first passes through the anti-static layer, then passes through the anti-laser damage layer, and finally passes through the high-transmittance substrate layer. The transmittance of the high-transmittance substrate layer is high, the laser damage threshold of the anti-laser damage layer is high and the thermal conductivity is high, so that the transmittance decrease caused by laser damage is reduced. Therefore, the high-transmittance substrate layer and the anti-laser damage layer not only ensure good laser transmittance, but also can be used for a long time without replacing the composite lens. Moreover, due to the possibility of nanoscale carbonized particles caused by polymer ablation in industrial processing, the anti-static layer can effectively prevent the laser energy loss caused by static adsorption particles. BRIEF DESCRIPTION OF DRAWINGS

[0043] Figure 1 is a top view of the laser output window shown in the application on one side of the pressing plate;

[0044] Figure 2 is a sectional view shown in A-A direction in the application; Figure 1

[0045] Figure 3 is a top view of the bottom plate;

[0046] ​Figure 4 is a top view of the pressing plate;

[0047] Figure 5 is a sectional view of the composite lens. DETAILED DESCRIPTION

[0048] The present application will be described in detail below with reference to the embodiments shown in the drawings, but it should be noted that these embodiments are not limiting of the present application, and equivalent transformations or substitutions of function, method, or structure made by those of ordinary skill in the art based on these embodiments are within the scope of the present application.

[0049] In conjunction with the drawings Figures 1 to 5 The present application shows a specific embodiment of a laser output window 10. The laser output window 10 is arranged at the light outlet of a laser (not shown) to ensure safe use of the laser.

[0050] As shown in Figures 1 to 4 , the laser output window 10 includes a bottom plate 11, a pressing plate 12, and a composite lens 13. The bottom plate 11 and the pressing plate 12 are arranged in abutment and form a light transmission hole 20. The composite lens 13 is arranged between the bottom plate 11 and the pressing plate 12, and the light transmission hole 20 at least partially exposes the composite lens 13.

[0051] The side of the bottom plate 11 close to the pressing plate 12 is embedded with a first magnetic member 111, and the side of the pressing plate 12 close to the bottom plate 11 is embedded with a second magnetic member 121. Specifically, the first magnetic member 111 and the second magnetic member 121 are oppositely attracted, so that the bottom plate 11 and the pressing plate 12 are in an abutted state. The first magnetic member 111 and the second magnetic member 121 are oppositely released from attraction, so that the bottom plate 11 and the pressing plate 12 are in a separated state. By arranging the first magnetic member 111 and the second magnetic member 121, the composite lens 13 can be clamped by the bottom plate 11 and the pressing plate 12.

[0052] Further, as shown in Figure 5 , the composite lens 13 includes a high-transmittance substrate layer 132, a laser damage resistant layer 133, and an anti-static layer 134 arranged in sequence. The anti-static layer 134 is arranged on the side close to the bottom plate 11, i.e., the anti-static layer 134, the laser damage resistant layer 133, and the high-transmittance substrate layer 132 are arranged in sequence in the light outlet direction of the laser.

[0053] In the application, the first magnetic suction member 111 and the second magnetic suction member 121 are arranged on the opposite sides of the bottom plate 11 and the pressing plate 12 respectively, the bottom plate 11 and the pressing plate 12 are butted against each other by the opposite suction of the first magnetic suction member 111 and the second magnetic suction member 121, the composite lens 13 is clamped by the bottom plate 11 and the pressing plate 12, the first magnetic suction member 111 and the second magnetic suction member 121 are released in reverse, the bottom plate 11 and the pressing plate 12 are separated in reverse, and the composite lens 13 is released by the bottom plate 11 and the pressing plate 12. By such arrangement, the composite lens 13 is convenient to replace, the problem that dust particles enter the inside of the light path chamber to cause pollution due to the long time consumption in replacing the laser protection sheet in the prior art is solved, the replacement time of the composite lens 13 is shortened to within seconds under the premise of ensuring positioning accuracy, the use efficiency of the laser equipment is improved, and secondary pollution is not caused in the laser equipment.

[0054] Meanwhile, the composite lens 13 comprises a high-transmittance substrate layer 132, an anti-laser-damage layer 133 and an anti-static layer 134, when laser is transmitted to the composite lens 13, the laser first passes through the anti-static layer 134, then passes through the anti-laser-damage layer 133, and finally passes through the high-transmittance substrate layer 132. The high-transmittance substrate layer 132 has high light transmittance, the anti-laser-damage layer 133 has high laser damage threshold and high thermal conductivity, and the transmittance decrease caused by laser damage is reduced, so that the high-transmittance substrate layer 132 and the anti-laser-damage layer 133 not only ensure good laser transmittance, but also can be used for a long time without replacing the composite lens 13; and because industrial processing may cause nanoscale carbonized particles due to polymer ablation to cause ultraviolet light scattering loss, by arranging the anti-static layer 134, the energy loss of the laser caused by laser scattering due to electrostatic adsorption of particles can be effectively prevented, and the problem of rapid decrease of light transmittance caused by the problems such as formation of adhesion layer on the surface of the existing laser protection sheet, generation of nanoscale carbonized particles and spattering of slag during use is finally solved.

[0055] It should be noted that the opposite suction refers to that the first magnetic suction member 111 moves in the direction close to the second magnetic suction member 121, and the second magnetic suction member 121 moves in the direction close to the first magnetic suction member 111, so that the first magnetic suction member 111 and the second magnetic suction member 121 are adsorbed due to magnetic force; the reverse release of suction refers to that the first magnetic suction member 111 moves in the direction away from the second magnetic suction member 121, and the second magnetic suction member 121 moves in the direction away from the first magnetic suction member 111, so that the magnetic force connection between the first magnetic suction member 111 and the second magnetic suction member 121 is disconnected to release the suction.

[0056] Meanwhile, the light transmission hole 20 at least partially exposes the composite lens 13, i.e., the light transmission hole 20 can partially expose the composite lens 13 or completely expose the composite lens 13, and the cross-sectional area of the light transmission hole 20 is greater than or equal to the cross-sectional area of the composite lens 13. If the light transmission hole 20 partially exposes the composite lens 13, the composite lens 13 can be directly accommodated in the first accommodating groove 112 described below; if the light transmission hole 20 completely exposes the composite lens 13, the composite lens 13 can be clamped by a fixing member (not shown) and the fixing member can be accommodated in the first accommodating groove 112 described below, which is not specifically limited in the embodiment.

[0057] Preferably, the first magnetic attraction member 111 and the second magnetic attraction member 121 are attracted and released along the optical axis formed by the laser, and the composite lens 13 is perpendicular to the optical axis formed by the laser.

[0058] Optionally, the first magnetic attraction member 111 and the second magnetic attraction member 121 can form an attraction state based on non-physical contact.

[0059] Preferably, the positioning accuracy of the bottom plate 11 and the pressing plate 12 reaches ±0.01 mm.

[0060] The aforementioned optical path chamber (not shown) is formed inside the laser device, and when the laser and the laser output window 10 are assembled, the optical path chamber inside is shielded; when the composite lens 13 is replaced, the optical path chamber inside is exposed, and at this time, dust particles can enter the optical path chamber through the light transmission hole 20 and cause pollution. Therefore, the magnetic attraction quick-release composite lens 13 in the application can quickly replace the composite lens 13, avoiding the entry of dust particles into the optical path chamber and causing pollution.

[0061] In an embodiment, the surface resistance of the anti-static layer 134 is less than 10 Ω / sq. By so arranging, the energy loss of the laser caused by the scattering of laser due to the static adsorption of particles can be effectively prevented, which helps to improve the energy loss of the laser device.

[0062] In an embodiment, the surface resistance of the anti-static layer 134 is less than 10 Ω / sq. By so arranging, the energy loss of the laser caused by the scattering of laser due to the static adsorption of particles can be effectively prevented, which helps to improve the energy loss of the laser device. Figure 5 As shown, the composite lens 13 further comprises a protective layer 131 arranged on the side of the high-transmittance substrate layer 132 away from the laser damage-resistant layer 133. After the laser passes through the high-transmittance substrate layer 132, it passes through the protective layer 131, so that the protective layer 131 plays a role in protecting the high-transmittance substrate layer 132, which can effectively resist the problem of molten slag splashing caused by metal processing.

[0063] Furthermore, the laser damage threshold of the anti-laser damage layer 133 is greater than the laser damage threshold of the protective layer 131, the transmittance of the high-transmittance substrate layer 132 is greater than the transmittance of the protective layer 131, the thickness of the high-transmittance substrate layer 132 is greater than the thickness of the protective layer 131, the surface resistance of the anti-static layer 134 is greater than the surface resistance of the protective layer 131, and the hardness of the protective layer 131 is greater than the hardness of the high-transmittance substrate layer 132.

[0064] Furthermore, the protective layer 131 includes an aluminum nitride hard film or an aluminum oxynitride hard film, and / or the thickness of the protective layer 131 is 200-400 nm (for example, 200 nm, 220 nm, 240 nm, 260 nm, 280 nm, 300 nm, 320 nm, 340 nm, 360 nm, 380 nm or 400 nm), and / or the Vickers hardness of the protective layer 131 is 1600-2000 (for example, 1600, 1700, 1750, 1800, 1850, 1900 or 2000).

[0065] In one embodiment, the laser damage threshold of the anti-laser damage layer 133 is greater than the laser damage threshold of the high-transmittance substrate layer 132 and the anti-static layer 134; and / or, the transmittance of the high-transmittance substrate layer 132 is greater than the transmittance of the anti-laser damage layer 133 and the anti-static layer 134; and / or, the thickness of the high-transmittance substrate layer 132 is greater than the thickness of the anti-laser damage layer 133 and the anti-static layer 134; and / or, the surface resistance of the anti-static layer 134 is greater than the surface resistance of the anti-laser damage layer 133 and the high-transmittance substrate layer 132.

[0066] Furthermore, the high-transmittance substrate layer 132 includes calcium fluoride, fused quartz or sapphire; and / or the thickness of the high-transmittance substrate layer 132 is 1-3 mm (for example, 1 mm, 1.2 mm, 1.5 mm, 1.8 mm, 2 mm, 2.4 mm, 2.7 mm or 3 mm); and / or the transmittance of the high-transmittance substrate layer 132 to laser light with a wavelength of 193-532 nm (for example, 193 nm, 200 nm, 250 nm, 300 nm, 350 nm, 400 nm, 450 nm, 500 nm or 532 nm) is greater than 85-99% (for example, 85%, 88%, 92%, 95% or 99%).

[0067] Further, the anti-laser damage layer 133 includes a diamond film; and / or the thickness of the anti-laser damage layer 133 is 100 nm; and / or the thermal conductivity of the anti-laser damage layer 133 is 1800-2100 W / m·K (for example, 1800 W / m·K, 1900 W / m·K, 2000 W / m·K or 2100 W / m·K); and / or the laser damage threshold of the anti-laser damage layer 133 is greater than 10 J / cm2.

[0068] Further, the anti-static layer 134 comprises a diamond-like carbon conductive film; and / or, the thickness of the anti-static layer 134 is 100 nm.

[0069] In one embodiment, the laser output window 10 further comprises a magnetic separator 15 longitudinally extending into the joint of the bottom plate 11 and the pressing plate 12, and the magnetic separator 15 is configured to separate the bottom plate 11 and the pressing plate 12. Figure 2 As shown, the laser output window 10 further comprises a sealing ring 14 arranged around the edge of the composite lens 13, and the bottom plate 11 and the pressing plate 12 are provided with a first receiving groove 112 and a second receiving groove 122 for accommodating the composite lens 13 and the sealing ring 14, respectively.

[0070] By arranging the sealing ring 14, the position of the composite lens 13 can be fixed, and the sealing ring 14 can also play a role in dustproof.

[0071] It should be noted that the specific positions of the first receiving groove 112 and the second receiving groove 122 are not limited, and the specific number of the sealing ring 14 is not limited.

[0072] If the sealing ring 14 is configured as one, in one embodiment, the first receiving groove 112 is arranged on the bottom plate 11, and the second receiving groove 122 is arranged at the joint of the bottom plate 11 and the pressing plate 12; in another embodiment, the first receiving groove 112 is arranged on the pressing plate 12, and the second receiving groove 122 is arranged at the joint of the bottom plate 11 and the pressing plate 12; in another embodiment, the first receiving groove 112 is arranged at the joint of the bottom plate 11 and the pressing plate 12, and the second receiving groove 122 is arranged on the bottom plate 11; in another embodiment, the first receiving groove 112 is arranged at the joint of the bottom plate 11 and the pressing plate 12, and the second receiving groove 122 is arranged on the pressing plate 12.

[0073] If the sealing ring 14 is configured as two, two sealing rings 14 can be arranged around the two side edges of the composite lens 13, respectively, and in one embodiment, the first receiving groove 112 is arranged at the joint of the bottom plate 11 and the pressing plate 12, and the second receiving groove 122 is arranged at the joint of the bottom plate 11 and the pressing plate 12.

[0074] In one embodiment, the laser output window 10 further comprises a magnetic separator 15 longitudinally extending into the joint of the bottom plate 11 and the pressing plate 12, and the magnetic separator 15 is configured to separate the bottom plate 11 and the pressing plate 12. Figure 2 and Figure 5 As shown, the laser output window 10 further comprises a magnetic separator 15 longitudinally extending into the joint of the bottom plate 11 and the pressing plate 12, and the magnetic separator 15 is configured to separate the bottom plate 11 and the pressing plate 12. The magnetic separator 15 can be configured as one or more, and the specific number is not limited in the embodiment. By twisting the magnetic separator 15, the bottom plate 11 and the pressing plate 12 can be quickly separated, so as to further shorten the replacement time of the composite lens 13.

[0075] Based on the same inventive concept, the application further discloses a laser device (not shown), which comprises a laser (not shown) and a laser output window 10 arranged at the light outlet of the laser.

[0076] Ginseng Figure 1 and Figure 3 As shown, the laser output window 10 is provided with a mounting hole 16 for a locking member (not shown, such as a bolt and a nut) to pass through, so that the pressure plate 12 in the laser output window 10 can be detachably assembled at the light outlet of the laser for easy disassembly and installation.

[0077] In summary, in the present application, the composite lens 13 adopts a sandwich design, with a high-transmittance substrate layer 132 as the base layer, and on the basis of the base layer, different materials are added to its upper and lower surfaces, so that the entire composite lens 13 can maintain light transmittance for a long time without decreasing, and its service life is greatly increased.

[0078] In addition, by adopting the solution provided in this application, core problems such as passive protection, low efficiency and poor adaptability of the protective sheet contained in traditional lasers are solved. First, due to the use of gradient material design, the protective layer 131 can effectively resist the problem of slag splash caused by metal processing; second, since the laser damage threshold of traditional protective sheet materials is low, after a period of use, the transmittance will decrease due to laser damage, and the protective sheet needs to be replaced. However, the present application uses a high-transmittance substrate layer 132 plus an anti-laser damage layer 133, which not only ensures good laser transmittance, but also has a high laser damage threshold itself, which can be used for a long time without replacement; third, since industrial processing may cause nano-scale carbonized shells produced by polymer ablation to cause ultraviolet light scattering loss, the anti-static layer 134 of the present application can make the surface resistance less than 10Ω / sq, effectively preventing electrostatic adsorption particles from causing laser scattering, thereby causing energy loss of the laser equipment; fourth, traditional protective sheets require downtime for replacement, which is time-consuming. In addition, the long time to remove the protective sheet can cause dust particles in the air to enter the optical path cavity of the laser and cause contamination. The magnetic quick-release solution provided by the present application shortens the replacement time to less than seconds while ensuring positioning accuracy, thereby improving the use efficiency of the laser equipment and preventing secondary contamination inside the laser equipment.

[0079] The series of detailed descriptions listed above are only specific descriptions of feasible implementation methods of this application. They are not intended to limit the scope of protection of this application. Any equivalent implementation methods or changes that do not deviate from the technical spirit of this application should be included in the scope of protection of this application.

[0080] It will be apparent to those skilled in the art that the application is not limited to the details of the above-exemplified embodiments and that the present application can be implemented in other particular forms without departing from the spirit or essential characteristics thereof. The presently disclosed embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the application being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. No feature of the application is to be construed as limiting in any aspect of the application.

[0081] Furthermore, it should be understood that although the description is made on embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.

Claims

1. A laser output window, characterized in that: include: A bottom plate and a pressure plate that are butt-jointed and together form a light-transmitting hole, and a composite lens disposed between the bottom plate and the pressure plate; The light-transmitting hole at least partially exposes the composite lens. A first magnetic member is embedded on a side of the bottom plate close to the pressure plate, and a second magnetic member is embedded on a side of the pressure plate close to the bottom plate. The first magnetic member and the second magnetic member are attracted to each other or released from attraction in opposite directions, so that the bottom plate and the pressure plate can movably clamp the composite lens. The composite lens comprises: a high-transmittance substrate layer, a laser damage resistance layer and an anti-static layer which are arranged in sequence, and the anti-static layer is arranged on a side close to the bottom plate.

2. The laser output window according to claim 1, characterized in that: The laser damage threshold of the anti-laser damage layer is greater than the laser damage thresholds of the high-transmittance substrate layer and the anti-static layer; And / or, the light transmittance of the high-transmittance substrate layer is greater than the light transmittance of the laser damage resistant layer and the antistatic layer; And / or, the thickness of the high light-transmittance substrate layer is greater than the thickness of the laser damage resistance layer and the antistatic layer; And / or, the surface resistance of the antistatic layer is greater than the surface resistance of the laser damage resistant layer and the high light transmittance substrate layer.

3. The laser output window according to claim 1, wherein: The composite lens further comprises: a protective layer disposed on a side of the high light transmittance substrate layer away from the laser damage resistant layer; Among them, the laser damage threshold of the anti-laser damage layer is greater than the laser damage threshold of the protective layer, the transmittance of the high-transmittance substrate layer is greater than the transmittance of the protective layer, the thickness of the high-transmittance substrate layer is greater than the thickness of the protective layer, the surface resistance of the antistatic layer is greater than the surface resistance of the protective layer, and the hardness of the protective layer is greater than the hardness of the high-transmittance substrate layer.

4. The laser output window according to claim 3, characterized in that: The protective layer includes an aluminum nitride hard film or an aluminum oxynitride hard film; And / or, the thickness of the protective layer is 200-400 nm; And / or, the Vickers hardness of the protective layer is 1600-2000.

5. The laser output window according to claim 1, wherein: The highly transparent substrate layer comprises calcium fluoride, fused quartz or sapphire; And / or, the thickness of the high light transmittance substrate layer is 1-3 mm; And / or, the light transmittance of the high-transmittance substrate layer to laser light with a wavelength of 193-532 nm is greater than 85-99%; And / or, the laser damage resistant layer comprises a diamond film; And / or, the thickness of the laser damage resistant layer is 100 nm; and / or, the thermal conductivity of the laser damage resistant layer is 1800-2100 W / m·K; and / or, the laser damage threshold of the laser damage resistant layer is greater than 10 J / cm2; And / or, the antistatic layer includes a diamond-like carbon conductive film; And / or, the antistatic layer has a thickness of 100 nm.

6. The laser output window according to claim 1, wherein: The laser output window further comprises: a sealing ring arranged around the edge of the composite lens; The bottom plate and the pressing plate are provided with a first receiving groove and a second receiving groove for accommodating the composite lens and the sealing ring respectively.

7. The laser output window according to claim 6, characterized in that: The first receiving groove is provided on the bottom plate, and the second receiving groove is provided at the joint between the bottom plate and the pressure plate; Alternatively, the first receiving groove is provided on the pressing plate, and the second receiving groove is provided at the joint between the bottom plate and the pressing plate; Alternatively, the first receiving groove is provided at the joint between the bottom plate and the pressing plate, and the second receiving groove is provided at the bottom plate and / or the pressing plate.

8. The laser output window according to claim 1, wherein: The laser output window further comprises: a magnetic separator longitudinally extending into the joint of the bottom plate and the pressure plate; the magnetic separator is used to separate the bottom plate and the pressure plate.

9. A laser device, characterized in that: include: A laser and a laser output window according to any one of claims 1 to 8, arranged at the light outlet of the laser.

10. The laser device according to claim 9, characterized in that The laser output window is provided with a mounting hole for a locking member to pass through, so that the pressing plate in the laser output window can be detachably assembled at the light outlet of the laser.

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