Non-linear friction compensation method and device for low-torque servo module

Abstract

The invention relates to a non-linear friction compensation method and system for a low-torque servo module, and the method comprises the following steps: testing the low-torque servo module through friction testing equipment under different working conditions, recording parameters related to friction, and generating friction characteristic data; performing friction nonlinear component identification on the friction characteristic data to obtain a friction nonlinear component identifier; performing friction non-linear source positioning on the low-torque servo module through the friction non-linear component identifier to obtain a friction non-linear source position; making a friction compensation strategy for the low-torque servo module based on the friction nonlinear source position to obtain the friction compensation strategy; and performing nonlinear friction compensation operation on the low-torque servo module based on the friction compensation strategy to obtain a compensated low-torque servo module, and solving the technical problem that a traditional friction compensation strategy is often based on a simple friction model and cannot accurately describe nonlinear change of friction in actual operation.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of electric machines, in particular to a low-torque servo module nonlinear friction compensation method and device. BACKGROUND

[0002] In the process of modern industrial automation, low-torque servo modules are widely used in various precision equipment, such as semiconductor manufacturing, medical devices, precision instruments, etc. Their performance directly affects the precision and stability of the equipment. However, the problem of nonlinear friction has always plagued low-torque servo modules and has become a key factor limiting their performance improvement.

[0003] Nonlinear friction can cause low-torque servo modules to exhibit phenomena such as crawling, jittering, and positioning deviation during operation. In semiconductor manufacturing, the photolithography process requires high positioning accuracy, and small deviations caused by nonlinear friction can lead to chip manufacturing failures, significantly increasing production costs. In the medical device field, such as surgical robot operation, control errors caused by nonlinear friction can affect surgical precision and cause serious harm to patients.

[0004] Existing research on low-torque servo modules has paid attention to the friction problem to some extent, but most methods are difficult to effectively deal with nonlinear friction under complex working conditions. Traditional friction compensation strategies are often based on simple friction models and cannot accurately describe the nonlinear changes of friction in actual operation, resulting in poor compensation effect. At the same time, insufficient research on friction characteristics under different working conditions makes the compensation strategy lack sufficient adaptability and robustness. SUMMARY

[0005] The main purpose of the present application is to provide a low-torque servo module nonlinear friction compensation method, which solves the technical problem that traditional friction compensation strategies are often based on simple friction models and cannot accurately describe the nonlinear changes of friction in actual operation.

[0006] To achieve the above purpose, the present application provides a low-torque servo module nonlinear friction compensation method, comprising the following steps: Under different working conditions, test the low-torque servo module using a pre-set friction test device and record parameters related to friction to generate friction characteristic data; Identify the nonlinear components of the friction from the friction characteristic data to obtain a friction nonlinear component identifier; Locate the nonlinear friction source of the low-torque servo module using the friction nonlinear component identifier to obtain the nonlinear friction source position; Develop a friction compensation strategy for the low-torque servo module based on the nonlinear friction source position to obtain the friction compensation strategy; Compensate the low-torque servo module based on the friction compensation strategy to obtain a compensated low-torque servo module.

[0007] Further, the friction nonlinear component identification based on the friction characteristic data comprises: Perform frequency domain decomposition processing on the friction characteristic data to obtain a friction characteristic frequency domain component set, and perform dynamic characteristic analysis on the low-torque servo module based on the friction characteristic frequency domain component set to obtain friction dynamic characteristic parameters; Map the friction state of the low-torque servo module based on the friction dynamic characteristic parameters to obtain a friction state feature vector; Extract nonlinear features of the friction state feature vector to obtain a friction nonlinear feature set; Perform multi-dimensional coupling analysis on the friction nonlinear feature set to obtain a friction nonlinear coupling relationship graph; Classify the friction characteristics of the low-torque servo module based on the friction nonlinear coupling relationship graph to obtain the friction nonlinear component identification, wherein the friction nonlinear component identification includes static nonlinear components, dynamic nonlinear components, and mixed nonlinear components.

[0008] Further, the friction nonlinear source positioning of the low-torque servo module based on the friction nonlinear component identification comprises: Perform friction source component correlation analysis on the low-torque servo module based on the friction nonlinear component identification to obtain a friction source component correlation matrix, and perform correlation component screening on the low-torque servo module based on the friction source component correlation matrix to obtain a correlation component set; Perform component working environment analysis on the low-torque servo module based on the correlation component set to obtain a component working environment parameter set; Based on the component working environment parameter set, evaluate the environmental impact of the low-torque servo module to obtain an environmental impact evaluation result; Through the environmental impact evaluation result, troubleshoot potential friction sources of the low-torque servo module to obtain a potential friction source list, and perform friction source characteristic detection on the low-torque servo module based on the potential friction source list to obtain friction source characteristic data; Based on the friction source characteristic data, the low-torque servo module is subjected to friction nonlinear source positioning to obtain a friction nonlinear source position.

[0009] Further, the friction compensation strategy for the low-torque servo module based on the friction nonlinear source position comprises: performing friction source structure analysis on the low-torque servo module based on the friction nonlinear source position, to obtain a friction source structure feature set; performing structure influence analysis on the low-torque servo module based on the friction source structure feature set, to obtain a structure influence evaluation result; determining a friction compensation direction of the low-torque servo module based on the structure influence evaluation result, and performing compensation mode screening on the low-torque servo module based on the friction compensation direction, to obtain a compensation mode candidate set; calculating a compensation cost benefit of the low-torque servo module through the compensation mode candidate set; determining an optimal compensation mode of the low-torque servo module in a preset compensation mode database based on the compensation cost benefit; formulating a friction compensation strategy of the low-torque servo module based on the optimal compensation mode.

[0010] Further, the determining of the friction compensation direction of the low-torque servo module based on the structure influence evaluation result comprises: performing friction influence factor weight analysis on the low-torque servo module based on the structure influence evaluation result, to obtain a friction influence factor weight set, and performing key factor screening on the low-torque servo module based on the friction influence factor weight set, to obtain a key friction influence factor set; performing compensation direction tendency analysis on the low-torque servo module based on the key friction influence factor set, to obtain a compensation direction tendency set, and performing compensation direction preliminary setting on the low-torque servo module based on the compensation direction tendency set, to obtain a compensation direction preliminary set; performing compensation direction comprehensive adjustment on the low-torque servo module through the compensation direction preliminary set, to obtain a friction compensation direction set.

[0011] Further, the performing of the compensation direction tendency analysis on the low-torque servo module based on the key friction influence factor set, to obtain a compensation direction tendency set, comprises: performing factor-friction relationship analysis on the low-torque servo module based on the key friction influence factor set, to obtain a factor-friction relationship graph, and performing friction trend analysis on the low-torque servo module based on the factor-friction relationship graph, to obtain a friction trend analysis result; preliminarily determining a compensation tendency of the low-torque servo module based on the friction trend analysis result; performing tendency adjustment factor analysis on the low-torque servo module based on the compensation tendency, to obtain a tendency adjustment factor set; performing compensation direction tendency construction on the low-torque servo module through the tendency adjustment factor set, to obtain a compensation direction tendency set.

[0012] Further, the low-torque servo module is subjected to nonlinear friction compensation operation based on the friction compensation strategy, to obtain a compensated low-torque servo module, comprising: The low-torque servo module is subjected to compensation operation pre-planning based on the friction compensation strategy, to obtain a compensation operation pre-planning set, and the operation risk of the compensation operation pre-planning set is evaluated, to obtain a pre-planning risk evaluation result; The low-torque servo module is subjected to risk response strategy formulation based on the pre-planning risk evaluation result, to obtain a risk response strategy set; The low-torque servo module is subjected to response strategy effectiveness analysis based on the risk response strategy set, to obtain a response strategy effectiveness evaluation result; The low-torque servo module is subjected to compensation operation optimization adjustment through the response strategy effectiveness evaluation result, to obtain an optimized compensation operation set, and the low-torque servo module is subjected to operation feasibility analysis based on the optimized compensation operation set, to obtain an operation feasibility evaluation result; The low-torque servo module is subjected to nonlinear friction compensation operation based on the operation feasibility evaluation result, to obtain a compensated low-torque servo module.

[0013] The application further provides a low-torque servo module nonlinear friction compensation device, comprising: A test module is configured to test a low-torque servo module under different working conditions by using a preset friction test device and record parameters related to friction, to generate friction characteristic data; An identification module is configured to identify a friction nonlinear component of the friction characteristic data, to obtain a friction nonlinear component identifier; A positioning module is configured to position a friction nonlinear source of the low-torque servo module through the friction nonlinear component identifier, to obtain a friction nonlinear source position; A formulation module is configured to formulate a friction compensation strategy for the low-torque servo module based on the friction nonlinear source position, to obtain a friction compensation strategy; A compensation module is configured to perform nonlinear friction compensation operation on the low-torque servo module based on the friction compensation strategy, to obtain a compensated low-torque servo module.

[0014] The application further provides a computer device, comprising a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to realize the steps of the method according to any one of the above.

[0015] The application further provides a computer readable storage medium, which stores a computer program, and the computer program is executed by a processor to realize the steps of the method according to any one of the above.

[0016] The application provides a low-torque servo module nonlinear friction compensation method, including the following steps: under different working conditions, using a friction test device to test a low-torque servo module and record parameters related to friction, generating friction characteristic data; identifying the nonlinear friction component of the friction characteristic data, obtaining a nonlinear friction component identification; positioning the nonlinear friction source of the low-torque servo module through the nonlinear friction component identification, obtaining a nonlinear friction source position; formulating a friction compensation strategy for the low-torque servo module based on the nonlinear friction source position, obtaining a friction compensation strategy; performing nonlinear friction compensation on the low-torque servo module based on the friction compensation strategy, obtaining a compensated low-torque servo module, solving the technical problem that traditional friction compensation strategies are often based on simple friction models and cannot accurately describe the nonlinear changes of friction in actual operation. The nonlinear friction source of the low-torque servo module is positioned through the nonlinear friction component identification, and the nonlinear friction source position is obtained. This accurate positioning technology can quickly lock the specific position of the nonlinear friction, changing the previous blind compensation method, making the compensation operation more targeted, and greatly improving the compensation efficiency and effect. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 is a step schematic diagram of a low-torque servo module nonlinear friction compensation method in an embodiment of the application; Figure 2 is a structural block diagram of a low-torque servo module nonlinear friction compensation system in an embodiment of the application; Figure 3 is a structural schematic block diagram of a computer device in an embodiment of the application.

[0018] The purpose of the application, functional characteristics and advantages will be further described with reference to the drawings. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical scheme and advantages of the application clearer, the application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the application and do not limit the application.

[0020] As shown in Figure 1 , the Figure 1 is a step schematic diagram of a low-torque servo module nonlinear friction compensation method in an embodiment of the application; In an embodiment of the application, a low-torque servo module nonlinear friction compensation method is provided, including the following steps: Step S1, under different working conditions, the low-torque servo module is tested by a preset friction test device, and friction-related parameters are recorded to generate friction characteristic data.

[0021] Specifically, in practical applications, the low-torque servo module will be in a variety of different working conditions, for example, in semiconductor manufacturing, the wafer lithography link has strict requirements on the running speed, load size and environmental temperature of the servo module; in the field of medical devices, when the surgical robot operates, the servo module needs to run under different action modes and human tissue resistance. In order to accurately obtain the friction of the low-torque servo module under these complex working conditions, a preset friction test device is used for testing. This device can accurately monitor and record friction-related parameters such as friction force, friction speed, friction temperature, etc. Through continuous and comprehensive monitoring and recording, these parameters are integrated and analyzed to finally generate friction characteristic data. These data reflect the friction characteristics of the low-torque servo module under different working conditions in detail, providing a wealth of reliable basis for subsequent in-depth research and optimization. For example, in the wafer lithography process of semiconductor manufacturing, the preset friction test device can record various friction parameters of the servo module in a clean room at a specific temperature environment when the servo module moves the wafer at different speeds and carries different weights of wafers (corresponding to different loads), and then generate friction characteristic data to analyze the friction of the servo module under this working condition and lay a data foundation for improving the lithography precision.

[0022] Step S2, identifying the friction nonlinear component of the friction characteristic data to obtain friction nonlinear component identification.

[0023] Specifically, after obtaining the friction characteristic data of the low-torque servo module, since the friction in actual operation often contains linear and nonlinear components, and these components have different effects on the performance of the servo module, it is necessary to identify the friction nonlinear component of the friction characteristic data. By using specific signal processing algorithms and mathematical models, the friction characteristic data is analyzed in depth, and the friction component showing nonlinear characteristics is extracted from a large amount of data information. For example, in the wafer lithography link of semiconductor manufacturing, when the servo module drives the wafer to move precisely, the friction characteristic data may contain nonlinear friction information caused by factors such as micro-uneven surface of the guide rail, uneven distribution of lubricating oil, etc. Using analysis methods based on Fourier transform or wavelet transform, the part of the data that shows nonlinear change trend and does not conform to the linear law is identified, and thus the friction nonlinear component identification is obtained. These identifications clearly mark the characteristics and distribution of the friction nonlinear component in the data, like giving the friction nonlinear component a special "label", providing key basis for subsequent positioning of the friction nonlinear source of the low-torque servo module and formulating accurate compensation strategies, helping to improve the precision and stability of wafer lithography and avoid chip manufacturing errors caused by nonlinear friction.

[0024] Step S3, locating the friction nonlinearity source of the low-torque servo module through the friction nonlinearity component identification, to obtain the friction nonlinearity source position.

[0025] Specifically, after obtaining the friction nonlinearity component identification, the key clue for exploring the root cause of the friction nonlinearity is obtained. The low-torque servo module has a complex structure, and different components may generate nonlinear friction during operation, so it is necessary to analyze it in depth according to the friction nonlinearity component identification. By establishing a physical model of the servo module and combining the friction nonlinearity characteristics presented by the identification, the friction characteristic data is associated and compared with the working state of each component of the module. Taking wafer lithography in semiconductor manufacturing as an example, the servo module is composed of a motor, a transmission mechanism, a guide rail and other components. After obtaining the friction nonlinearity component identification, according to the characteristics such as the time point and frequency of the nonlinear friction in the identification, it is analyzed whether the motor operation is abnormal, whether the gear meshing of the transmission mechanism is accurate, and whether the guide rail surface is worn, etc. If it is found that the nonlinear friction characteristics in the identification are highly consistent with the guide rail motion cycle, it can be initially judged that the guide rail may be the friction nonlinearity source. Through further detection and verification, the friction nonlinearity source position is finally accurately determined, thereby providing an accurate direction for formulating an effective friction compensation strategy, and ensuring the stable operation and high-precision positioning of the servo module in the wafer lithography process.

[0026] Step S4, formulating a friction compensation strategy for the low-torque servo module based on the friction nonlinearity source position, to obtain the friction compensation strategy.

[0027] Specifically, after the friction nonlinearity source position of the low-torque servo module is determined, the key stage of formulating a friction compensation strategy is entered. Since different friction nonlinearity source positions mean different causes and mechanisms of nonlinear friction, it is necessary to "treat the disease according to the symptoms", and design a compensation strategy in combination with the working principle and structural characteristics of the low-torque servo module. Taking wafer lithography in semiconductor manufacturing as an example, if it is found through positioning that the friction nonlinearity source position is in the guide rail, it may be due to the change of the surface roughness of the guide rail or insufficient lubrication causing nonlinear friction, so compensation strategies such as replacing the guide rail with a more precise and smoother surface, optimizing the lubrication system, increasing the lubrication frequency and adjusting the type of lubricating oil can be formulated. If the friction nonlinearity source position is in the transmission gear, it may be caused by gear wear or improper meshing gap, so compensation strategies such as replacing the worn gear, adjusting the gear installation accuracy or using a flexible gear can be formulated. By fully considering the specific situation of the friction nonlinearity source position and comprehensively using mechanical structure optimization, control algorithm adjustment and other means, a set of friction compensation strategies suitable for the low-torque servo module is finally obtained, so as to reduce the influence of nonlinear friction on the precision of wafer lithography and ensure the stable and accurate operation of the servo module.

[0028] Step S5, performing a nonlinear friction compensation operation on the low-torque servo module based on the friction compensation strategy, to obtain a compensated low-torque servo module.

[0029] Specifically, after the friction compensation strategy is completed, the strategy needs to be put into practice, and the low-torque servo module needs to be compensated for nonlinear friction. According to the specific methods and measures determined in the compensation strategy, the servo module is gradually adjusted and optimized. In the wafer lithography scene of semiconductor manufacturing, if the compensation strategy is to replace a more precise guide rail, the original guide rail needs to be disassembled first, and a new high-precision guide rail needs to be installed and accurately calibrated and debugged to ensure the installation precision and smooth operation of the guide rail. If the compensation strategy is to optimize the lubrication system, the lubrication pipeline needs to be modified, a new lubrication control device needs to be installed, and reasonable lubrication parameters need to be set to automatically adjust the lubrication amount and lubrication time according to the running state of the servo module. During implementation, the running state of the low-torque servo module needs to be monitored in real time, and relevant parameters are collected again through the pre-set friction test equipment to determine whether the compensation operation achieves the desired effect. If not, the compensation strategy needs to be fine-tuned and the compensation operation needs to be continued. After repeated adjustment and optimization, the compensated low-torque servo module is finally obtained, effectively reducing the impact of nonlinear friction on wafer lithography precision, improving the stability and precision of the servo module operation, and ensuring high-quality production of semiconductor manufacturing.

[0030] In specific embodiments, the friction nonlinear component identification based on the friction characteristic data comprises: performing frequency domain decomposition processing on the friction characteristic data to obtain a set of friction characteristic frequency domain components, and performing dynamic characteristic analysis on the low-torque servo module based on the set of friction characteristic frequency domain components to obtain friction dynamic characteristic parameters; performing friction state mapping on the low-torque servo module based on the friction dynamic characteristic parameters to obtain a friction state feature vector; extracting nonlinear features of the friction state feature vector to obtain a set of friction nonlinear features; performing multi-dimensional coupling analysis on the set of friction nonlinear features to obtain a friction nonlinear coupling relationship graph; classifying the friction characteristics of the low-torque servo module based on the friction nonlinear coupling relationship graph to obtain the friction nonlinear component identification, wherein the friction nonlinear component identification includes static nonlinear components, dynamic nonlinear components, and mixed nonlinear components.

[0031] Specifically, in the operation process of the low-torque servo module, the friction characteristic data contains rich information, and identifying the friction nonlinear components from the friction characteristic data is a key step to realize accurate friction compensation. Specifically, the friction characteristic data needs to be processed by frequency domain decomposition first. The reason for frequency domain decomposition is that the complex and irregular friction data in the time domain can more clearly show its internal frequency composition characteristics after conversion to the frequency domain. Through professional data processing algorithms, the friction characteristic data is decomposed into a series of friction characteristic frequency component sets. These component sets are like different frequency segments of the friction characteristic data, and each segment corresponds to the friction performance of the servo module at different frequencies during operation. Based on the friction characteristic frequency component set, a comprehensive dynamic characteristic analysis of the low-torque servo module can be performed, such as analyzing the vibration and response speed of the servo module at different frequencies, and then obtaining friction dynamic characteristic parameters such as frequency response amplitude and phase difference. Taking wafer lithography in semiconductor manufacturing as an example, assuming that the friction characteristic data collected when the servo module moves the wafer is decomposed by frequency domain, it is found that there are multiple frequency components such as 10Hz, 20Hz and 50Hz, among which the amplitude of the 10Hz component is larger. Through dynamic characteristic analysis, it can be known that the vibration of the servo module at 10Hz frequency is more obvious, and the amplitude, phase difference and other parameters at this frequency constitute the friction dynamic characteristic parameters, which provide a quantitative basis for subsequent analysis. After obtaining the friction dynamic characteristic parameters, the next step is to map the friction state of the low-torque servo module based on these parameters. Friction state mapping is the process of converting friction dynamic characteristic parameters into a friction state feature vector that can directly reflect the friction state of the servo module. This feature vector can be understood as a kind of “digital description” of the friction state of the servo module, which integrates the information of multiple friction dynamic characteristic parameters. For example, the amplitude, phase difference and other parameters at 10Hz, 20Hz and 50Hz frequencies mentioned above are combined to form a multi-dimensional friction state feature vector. Then the nonlinear features of the friction state feature vector are extracted, and through specific algorithms and analysis methods, the features that do not conform to the linear rule and show nonlinear change trend are found out, and then the friction nonlinear feature set is obtained. In the wafer lithography scenario, it may be found that the amplitude at 10Hz frequency in the friction state feature vector does not change linearly over time, but suddenly increases or decreases, and this nonlinear change feature will be included in the friction nonlinear feature set. When the friction nonlinear feature set is obtained, in order to better understand the relationship between these nonlinear features and their influence on the friction characteristics of the servo module, multidimensional coupling analysis is needed. Multidimensional coupling analysis is to study the mutual relationship and mechanism of friction nonlinear features from multiple angles and levels, and through this analysis, a friction nonlinear coupling relationship map can be drawn.The map is like a "friction nonlinear relationship map", which clearly shows the correlation degree and influence mode of various nonlinear characteristics. For example, it can be seen in the map that the nonlinear change of the amplitude at 10Hz frequency and the nonlinear change of the phase difference at 50Hz frequency have certain correlation. When the 10Hz amplitude increases, the 50Hz phase difference will also change accordingly. Based on this friction nonlinear coupling relationship map, the friction characteristics of the low-torque servo module can be scientifically classified, so as to obtain the friction nonlinear component identification, which includes static nonlinear component, dynamic nonlinear component and mixed nonlinear component. For example, if it is found in the map that some nonlinear characteristics do not change significantly with time and operating state, and the nonlinear relationship remains relatively stable, the friction component corresponding to this kind of characteristics can be classified as static nonlinear component; if the nonlinear characteristics change significantly with the dynamic factors such as the running speed and load of the servo module, they belong to dynamic nonlinear component; and the part with static and dynamic nonlinear characteristics is classified as mixed nonlinear component. Through a series of interlocking analysis and processing, the accurate friction nonlinear component identification is finally obtained, which provides a solid foundation for subsequent positioning of friction nonlinear source and formulating effective friction compensation strategy, ensuring that the low-torque servo module can operate stably and accurately in high-precision application scenarios such as wafer lithography, reducing errors and adverse effects caused by nonlinear friction.

[0032] In specific embodiments, the friction nonlinear source positioning of the low-torque servo module based on the friction nonlinear component identification comprises: Based on the friction nonlinear component identification, a friction source component correlation analysis is performed on the low-torque servo module to obtain a friction source component correlation matrix, and based on the friction source component correlation matrix, a correlation component screening is performed on the low-torque servo module to obtain a correlation component set; Based on the correlation component set, a component working environment analysis is performed on the low-torque servo module to obtain a component working environment parameter set; Based on the component working environment parameter set, an environmental impact of the low-torque servo module is evaluated to obtain an environmental impact evaluation result; Through the environmental impact evaluation result, a potential friction source of the low-torque servo module is investigated to obtain a potential friction source list, and based on the potential friction source list, a friction source characteristic detection is performed on the low-torque servo module to obtain friction source characteristic data; Based on the friction source characteristic data, a friction nonlinear source positioning of the low-torque servo module is performed to obtain a friction nonlinear source position.

[0033] Specifically, in the operation process of the low-torque servo module, the nonlinear friction will have a significant impact on its performance, and accurately locating the position of the nonlinear friction source is the core prerequisite to solve this problem. Based on the obtained identification of the nonlinear friction component, first, the friction source component correlation analysis of the low-torque servo module needs to be carried out. The low-torque servo module is composed of many components, such as motors, transmission gears, guide rails, bearings, etc. The friction characteristics of different components are different, and there is a specific correlation with the identification of the nonlinear friction component. By analyzing the working state, motion form and their contribution to the overall friction of each component during the operation of the module, a friction source component correlation matrix is established. This matrix can be understood as a "correlation account book" that records the correlation between each component and different nonlinear friction component identifications. The higher the numerical value, the closer the correlation. For example, in the wafer lithography scene of semiconductor manufacturing, assuming that the nonlinear friction component identification collected during the operation of the servo module shows that there is a nonlinear characteristic related to high-frequency vibration, it is found through analysis that the high-speed operation of the transmission gear is potentially related to this high-frequency vibration. In the friction source component correlation matrix, the correlation value of the transmission gear with the high-frequency vibration related identification may reach 0.8 (assuming the full value is 1), while the correlation values of other components are relatively low. Based on this friction source component correlation matrix, the components of the low-torque servo module can be screened for correlation components, and the components with high correlation values can be selected to form a correlation component set. This narrows the scope of the nonlinear friction source and improves the positioning efficiency. After obtaining the correlation component set, the working environment of the components of the low-torque servo module needs to be analyzed based on the set. The working environment of the components has an important influence on the friction characteristics they produce. Different temperature, humidity, load size, running speed and other environmental factors may cause changes in the friction state of the components. By monitoring and recording the working environment information of each component in the correlation component set during actual operation, such as the temperature change range of the guide rail during operation and the load size fluctuation of the transmission gear, a component working environment parameter set is formed. For example, in the wafer lithography process, it is recorded that the temperature of the guide rail rises from 25°C to 35°C after 2 hours of continuous operation, and the friction characteristics are different at different temperatures; the load borne by the transmission gear fluctuates between 5N and 15N when driving the wafer to perform different precision lithography operations. These temperature, load and other parameters together constitute the component working environment parameter set, providing detailed data support for further analysis. Based on the component working environment parameter set, the environmental impact of the low-torque servo module can be evaluated, and the environmental impact evaluation result is obtained. In the evaluation process, the influence degree and law of different environmental parameters on the friction characteristics of the correlation components are analyzed, and it is judged which environmental factors are the potential causes of nonlinear friction.For example, through analysis, it is found that when the guide rail temperature exceeds 30℃, the viscosity of the lubricating oil on the surface of the guide rail decreases significantly, resulting in unstable friction coefficient and an increased probability of nonlinear friction by 30%; when the load exceeds 10N, the contact stress between the tooth surfaces of the transmission gear changes nonlinearly, thereby causing nonlinear friction. According to these analysis results, an environmental impact assessment result is formed to clearly determine the friction risk status of each associated component under different working environments. With the environmental impact assessment result, potential friction sources of the low-torque servo module can be investigated, and a list of potential friction sources is obtained. In combination with the high-risk situations found in the environmental impact assessment, components that are likely to cause nonlinear friction and their corresponding environmental conditions are listed in the list of potential friction sources. For example, the guide rail when the temperature exceeds 30℃ and the transmission gear when the load exceeds 10N are listed in the list of potential friction sources. Based on the list of potential friction sources, the friction source characteristics of the low-torque servo module are detected, and through further testing and monitoring means, detailed friction characteristic data of these potential friction sources in actual operation are obtained, such as the friction force curve over time, the frequency and amplitude of friction vibration, etc. For example, the guide rail listed in the list is continuously monitored, and it is found that the friction force gradually fluctuates from the initial 2N, and when the temperature reaches 35℃, the friction force fluctuation range reaches 1.5N-2.5N. These data are the friction source characteristic data. Finally, based on the friction source characteristic data, the nonlinear friction source of the low-torque servo module is located. By comparing the friction source characteristic data with the friction nonlinear component identification, the matching degree and internal relationship between the two are analyzed to accurately determine the specific components and positions that cause nonlinear friction. For example, if the friction source characteristic data shows that the friction vibration frequency and amplitude change characteristics of the transmission gear in a certain period of time are highly consistent with the high-frequency vibration related characteristics in the previously obtained friction nonlinear component identification, it can be determined that the transmission gear is the nonlinear friction source under this working condition, and thus the nonlinear friction source position is obtained. Through this series of rigorous and systematic analysis and detection process, the nonlinear friction source position can be quickly and accurately located in the complex low-torque servo module, which lays a solid foundation for formulating targeted friction compensation strategies and ensures the stable and accurate operation of the servo module in high-precision application scenarios such as wafer lithography.

[0034] In specific embodiments, the friction compensation strategy for the low-torque servo module based on the nonlinear friction source position is formulated, and a friction compensation strategy is obtained, including: The friction source structure of the low-torque servo module is analyzed based on the nonlinear friction source position, and a set of friction source structure characteristics is obtained; The structure impact analysis of the low-torque servo module is performed based on the set of friction source structure characteristics, and a structure impact assessment result is obtained; Based on the structure influence evaluation result, a friction compensation direction of the low-torque servo module is determined, and a compensation mode screening of the low-torque servo module is performed based on the friction compensation direction to obtain a compensation mode candidate set; A compensation cost benefit of the low-torque servo module is calculated through the compensation mode candidate set; Based on the compensation cost benefit, a preferred compensation mode of the low-torque servo module is determined in a preset compensation mode database; Based on the preferred compensation mode, a friction compensation strategy of the low-torque servo module is formulated.

[0035] Specifically, in the process of solving the nonlinear friction problem of the low-torque servo module, when the location of the nonlinear friction source is determined, formulating a friction compensation strategy is a key step, which is related to whether the performance of the module can be effectively improved. Based on the location of the nonlinear friction source, the first step is to analyze the structure of the friction source of the low-torque servo module. Taking the wafer lithography scene in semiconductor manufacturing as an example, if the nonlinear friction source is located in the transmission gear, then the structural details of the transmission gear need to be studied in depth, including the number of teeth, module, tooth shape, material properties, installation method, etc. These structural information related to friction generation is summarized to obtain the friction source structure feature set. For example, the transmission gear has 30 teeth, a module of 2, uses an involute tooth shape, and is made of alloy steel, which is connected to the shaft through a key. These specific parameters constitute the friction source structure feature set, which is the basis for subsequent analysis. After obtaining the friction source structure feature set, the structural influence of the low-torque servo module is analyzed based on it. Different structural features have different degrees of influence on the generation and characteristics of friction. By analyzing the internal relationship between each structural feature and nonlinear friction, the influence degree and mode of each structural feature on friction are evaluated, and the structural influence evaluation result is obtained. For example, it is found through analysis that the tooth shape accuracy of the transmission gear has a significant impact on friction. If there is a 0.01mm error in the tooth shape, it will cause uneven force during gear meshing at high speed, resulting in a 20% increase in friction force fluctuation amplitude. The hardness of the gear material also affects friction. When the material hardness is 10% lower than the standard value, the gear surface wear is aggravated, and the friction force increases by 15%. These analysis results constitute the structural influence evaluation result, which clearly presents the influence degree of each structural feature on nonlinear friction, providing an important basis for subsequent decision-making. Based on the structural influence evaluation result, the friction compensation direction of the low-torque servo module can be determined. According to the structural features that have a greater impact on friction shown in the evaluation result, it is clear that the compensation should be started from the direction of optimizing structural design, replacing materials, or improving installation process, etc. For example, if the evaluation result shows that the tooth shape error and material hardness have the most significant impact on friction, then the friction compensation direction can be determined as improving the tooth shape accuracy and replacing the appropriate material. Based on the determined friction compensation direction, the compensation method selection of the low-torque servo module is carried out, and the methods that meet the compensation direction are selected from the numerous possible compensation methods to form the compensation method candidate set. In the above case, improving the tooth shape accuracy can be achieved by using more precise machining equipment or optimizing the machining process, and replacing the material can choose alloy steel with higher hardness and better wear resistance, which constitutes the compensation method candidate set. After obtaining the compensation method candidate set, the compensation cost-benefit of the low-torque servo module is calculated. The calculation of compensation cost-benefit needs to consider the costs required to implement each compensation method, including equipment purchase cost, material cost, labor cost, time cost, etc., as well as the benefits brought by the compensation method, such as the reduction amplitude of friction force, the improvement degree of module running accuracy, the extension length of equipment service life, etc.For example, using more precise processing equipment to improve the precision of the tooth profile, the equipment procurement cost is 500,000 yuan, which is expected to reduce the friction by 30%, improve the running accuracy of the module by 25%, and extend the service life of the equipment by 2 years; while the cost of replacing the material is 200,000 yuan, which can reduce the friction by 20%, improve the running accuracy of the module by 15%, and extend the service life of the equipment by 1 year. By comparing these data, the cost-effectiveness of each compensation method is quantified. Based on the compensation cost-effectiveness, the preferred compensation method of the low-torque servo module is determined in the preset compensation method database. A large number of different compensation methods and their corresponding cost-effectiveness data and actual application cases are stored in the preset compensation method database. The cost-effectiveness data of the calculated compensation method candidate set is compared and analyzed with the data in the database, and the cost-effectiveness of the compensation method is selected. For example, if the running accuracy of the module is extremely high in the wafer lithography scene, although the cost of using more precise processing equipment is higher, it can bring greater benefit improvement, and after comprehensive consideration, this method may be determined as the preferred compensation method. Finally, the friction compensation strategy of the low-torque servo module is formulated based on the preferred compensation method. The specific steps, operation process, quality control standards, etc. of implementing the preferred compensation method are planned in detail. If the preferred compensation method is to use more precise processing equipment to improve the precision of the tooth profile, the friction compensation strategy needs to specify the procurement time and model of the equipment, the setting of the processing process parameters, the quality detection nodes and standards in the processing process, and the installation and debugging steps after processing, etc. to ensure the operability and effectiveness of the compensation strategy, thereby reducing the nonlinear friction of the low-torque servo module and improving its running performance and reliability in high-precision application scenarios such as wafer lithography.

[0036] In specific embodiments, the friction compensation direction of the low-torque servo module is determined based on the structure influence evaluation result, comprising: Based on the structure influence evaluation result, the low-torque servo module is analyzed for friction influence factor weight to obtain a friction influence factor weight set, and the low-torque servo module is screened for key factors based on the friction influence factor weight set to obtain a key friction influence factor set; Based on the key friction influence factor set, the low-torque servo module is analyzed for compensation direction tendency to obtain a compensation direction tendency set, and the low-torque servo module is preliminarily set for compensation direction based on the compensation direction tendency set to obtain a preliminary compensation direction set; The low-torque servo module is comprehensively adjusted for compensation direction through the preliminary compensation direction set to obtain a friction compensation direction set.

[0037] Specifically, in the process of developing a nonlinear friction compensation strategy for a low-torque servo module, determining a set of friction compensation directions based on the results of structural influence assessment is an important link. First, based on the results of structural influence assessment, the weight of the friction influencing factors of the low-torque servo module is analyzed. Taking the wafer lithography scene in semiconductor manufacturing as an example, if it is determined that the position of the nonlinear friction source is in the guide rail, the structural influence assessment results may include factors such as guide rail surface roughness, guide rail material hardness, guide rail installation gap, and other factors that affect friction. In order to determine the relative importance of these factors on friction, each factor needs to be assigned a corresponding weight, thereby obtaining a set of friction influencing factor weights. Through analysis of a large amount of experimental data and actual operating conditions, it is assumed that the weight of the guide rail surface roughness on friction is 0.4, the weight of the guide rail material hardness is 0.3, and the weight of the guide rail installation gap is 0.3. These weight values constitute the set of friction influencing factor weights. Based on this weight set, the key factors of the low-torque servo module are screened, and the factors with higher weights and more significant impact on friction are selected to form a set of key friction influencing factors. In the above example, since the guide rail surface roughness has the highest weight, it is included in the set of key friction influencing factors and becomes the focus of attention. After obtaining the set of key friction influencing factors, the compensation direction tendency of the low-torque servo module is analyzed based on the set. Each key friction influencing factor corresponds to multiple potential compensation directions, and the adaptability and effectiveness between these factors and different compensation directions are analyzed to obtain a set of compensation direction tendencies. For example, for the key factor of guide rail surface roughness, possible compensation directions include using more precise machining processes to reduce roughness, adding surface polishing treatment procedures, using surface coating technology to improve surface properties, etc. Through simulation analysis and reference to past cases, it is found that using more precise machining processes can reduce surface roughness by 40%, adding surface polishing treatment procedures can reduce it by 30%, and using surface coating technology can reduce it by 25%. Based on these data, it is determined that the tendency of using more precise machining processes is the highest, with a tendency of 0.6, the tendency of adding surface polishing treatment procedures is 0.3, and the tendency of using surface coating technology is 0.1. These tendency data constitute the set of compensation direction tendencies. Based on this tendency set, the compensation direction of the low-torque servo module is preliminarily set, and the compensation direction with a higher tendency is first included in the preliminary set of compensation directions. In this example, using more precise machining processes and adding surface polishing treatment procedures are preliminarily set as compensation directions, forming the preliminary set of compensation directions. After obtaining the preliminary set of compensation directions, it is necessary to adjust the compensation direction of the low-torque servo module comprehensively. This is because the preliminary set of compensation directions may have mutual influences, cost-benefit imbalances, or conflicts with the operation of other components of the module in actual implementation. Therefore, factors such as the overall structure of the module, operating conditions, cost budget, and maintenance difficulty need to be considered to optimize and adjust the compensation directions in the preliminary set.For example, although the effect of reducing the guide rail surface roughness by using a more precise machining process is significant, the equipment procurement cost is as high as 800,000 yuan, and the installation and debugging period is long; while the cost of increasing the surface polishing process is only 200,000 yuan, and it can be completed in a short time. At the same time, if the module running environment has special requirements for polishing materials, the adaptability also needs to be considered. Considering these factors, the compensation direction may be finally determined to increase the surface polishing process mainly, and use appropriate surface coating technology as a supplement to form the final friction compensation direction set. This friction compensation direction set fully considers various actual situations, and can provide accurate and feasible direction guidance for subsequent formulation of specific friction compensation strategies, ensuring that the nonlinear friction problem of the low-torque servo module is effectively solved in high-precision application scenarios such as wafer lithography, and improving the running accuracy and stability of the module.

[0038] In specific embodiments, the compensation direction tendency analysis of the low-torque servo module based on the key friction influencing factor set obtains a compensation direction tendency set, including: Based on the key friction influencing factor set, the factor-friction relationship of the low-torque servo module is analyzed to obtain a factor-friction relationship graph, and based on the factor-friction relationship graph, a friction trend analysis of the low-torque servo module is performed to obtain a friction trend analysis result; Based on the friction trend analysis result, the compensation tendency of the low-torque servo module is preliminarily determined; Based on the compensation tendency, the tendency adjustment factor analysis of the low-torque servo module is performed to obtain a tendency adjustment factor set; Through the tendency adjustment factor set, the compensation direction tendency of the low-torque servo module is constructed to obtain a compensation direction tendency set.

[0039] Specifically, in the nonlinear friction compensation strategy making of the low-torque servo module, the compensation direction tendency analysis is carried out based on the key friction influencing factor set, and then the compensation direction tendency set is obtained, which is the key step to ensure the effectiveness of the compensation strategy. First, based on the key friction influencing factor set, the factor-friction relationship of the low-torque servo module is analyzed. Taking the wafer lithography scene in semiconductor manufacturing as an example, if the key friction influencing factor set includes factors such as guide rail surface roughness and guide rail installation gap, the factor-friction relationship analysis is to deeply study the internal relationship between these factors and friction. Through a large amount of experimental data collection and actual operation monitoring, the change of friction between the guide rail and the slider under different surface roughness and installation gap is recorded. Assuming that when the guide rail surface roughness increases from Ra0.8μm to Ra1.6μm, the friction increases from 5N to 8N; when the installation gap increases from 0.02mm to 0.05mm, the friction fluctuation range expands from ±0.5N to ±1.2N. These data are integrated and analyzed to draw a factor-friction relationship graph. This graph is like a detailed "friction influencing map", which intuitively shows the correlation and change trend between the key friction influencing factors and the friction. Based on the factor-friction relationship graph, the friction trend analysis of the low-torque servo module is carried out. By observing the trend and law of the data in the graph, the future development trend of the friction under different factor changes is predicted, and the friction trend analysis result is obtained. For example, from the graph, it can be seen that with the increase of the guide rail service time, the surface roughness will gradually increase. According to the current change trend, it is predicted that after 500 hours of operation, the surface roughness will reach Ra2.0μm, at which time the friction force may further rise to 10N, and the instability of the friction will also increase, which is the friction trend analysis result. Based on the friction trend analysis result, the compensation tendency of the low-torque servo module can be preliminarily determined. According to the predicted friction development trend, it is judged that which way of compensation can most effectively improve the friction condition. In the above example, since the increase of the surface roughness is the main reason for the rise and instability of the friction, and the future trend shows that the situation will further deteriorate, so the preliminary compensation tendency is determined as reducing the surface roughness of the guide rail. It can be considered to use processing methods such as grinding and polishing, or replace the guide rail with better surface quality, which is the preliminary compensation tendency judgment based on the friction trend. After obtaining the preliminary compensation tendency, the tendency adjustment factor analysis of the low-torque servo module is carried out based on it. In practical applications, the compensation tendency cannot be determined only according to the friction trend, but also needs to consider many other factors, which together constitute the tendency adjustment factor set.In the wafer lithography scene, the inclination adjustment factors can include cost factors, the cost of grinding processing to reduce the surface roughness is 30,000 yuan per guide rail, and the cost of replacing a new guide rail is as high as 80,000 yuan; time factors, grinding processing needs to be stopped for 2 days, and replacing the guide rail needs to be stopped for 3 days; and factors affecting the existing production process, replacing the guide rail can require readjusting the installation accuracy of the equipment, affecting the production progress of wafer lithography. These factors such as cost, time, and production process impact are integrated to form an inclination adjustment factor set. Finally, the low-torque servo module is compensated for the direction inclination by the inclination adjustment factor set. By comprehensively considering the friction trend analysis results and the inclination adjustment factor set, the advantages and disadvantages of various compensation methods are weighed, and the inclination degree of each compensation direction is determined, so as to obtain the compensation direction inclination set. For example, although replacing a new guide rail can more thoroughly solve the surface roughness problem, the cost is too high and the downtime is long; while the grinding processing has lower cost and shorter downtime, although the effect may be slightly inferior, but after comprehensive consideration, the inclination degree of grinding processing is set to 0.7, and the inclination degree of replacing a new guide rail is set to 0.3, which constitutes the compensation direction inclination set. This set provides a quantitative and comprehensive basis for further determining the compensation direction and formulating a complete friction compensation strategy, ensuring that the low-torque servo module can select the most suitable compensation direction in high-precision application scenarios such as wafer lithography, effectively reducing the negative impact of nonlinear friction, and improving the running performance and reliability of the module.

[0040] In specific embodiments, the nonlinear friction compensation operation is performed on the low-torque servo module based on the friction compensation strategy to obtain a compensated low-torque servo module, including: Based on the friction compensation strategy, a compensation operation pre-planning is performed on the low-torque servo module to obtain a compensation operation pre-planning set, and an operation risk of the compensation operation pre-planning set is evaluated to obtain a pre-planning risk evaluation result; Based on the pre-planning risk evaluation result, a risk response strategy is developed for the low-torque servo module to obtain a risk response strategy set; Based on the risk response strategy set, an effectiveness analysis of the response strategy is performed on the low-torque servo module to obtain an effectiveness evaluation result of the response strategy; Based on the response strategy effectiveness evaluation result, an optimized compensation operation set is obtained by optimizing and adjusting the compensation operation of the low-torque servo module, and based on the optimized compensation operation set, an operation feasibility analysis is performed on the low-torque servo module to obtain an operation feasibility evaluation result; Based on the operation feasibility evaluation result, a nonlinear friction compensation operation is performed on the low-torque servo module to obtain a compensated low-torque servo module.

[0041] Specifically, in the nonlinear friction compensation practice of the low-torque servo module, the actual operation according to the friction compensation strategy and the compensated module need to go through a series of rigorous and systematic processes. First, the low-torque servo module is compensated according to the compensation strategy. For example, if the compensation strategy is to replace the high-precision guide rail to reduce the nonlinear friction in the wafer lithography scene of semiconductor manufacturing, the compensation operation pre-planning needs to plan the whole process of replacing the guide rail, including the steps of disassembling the old guide rail, the installation sequence of the new guide rail, the tools needed during installation, the estimated time spent at each stage, and so on. These planning contents are summarized to form the compensation operation pre-planning set. Assuming that the pre-planning sets the time for disassembling the old guide rail to 2 hours, the time for installing the new guide rail to 3 hours, and the time for debugging to 1.5 hours, the whole replacement process is estimated to take 6.5 hours. Then, the operation risk of the compensation operation pre-planning set is evaluated. Considering that the wafer lithography equipment has extremely high requirements for environmental cleanliness, dust may enter during the guide rail replacement process, causing wafer contamination. Meanwhile, if the operation is not proper during disassembly and installation, other components of the servo module may be damaged. After analysis, it is found that the dust contamination risk probability is 30%, and the component damage risk probability is 20%. These risk evaluation data constitute the pre-planning risk evaluation result. Based on the pre-planning risk evaluation result, the risk response strategy for the low-torque servo module is developed. For the risks evaluated above, corresponding solutions are developed. For the dust contamination risk, the strategy of local isolation of the operation area during guide rail replacement, use of dust-free equipment and tools, and arrangement of environmental monitoring by a dedicated person can be developed. For the component damage risk, the strategy of precise marking and protection of related components before disassembly and installation, and arrangement of operation by experienced technicians can be developed. These strategies are integrated to obtain the risk response strategy set, which ensures that the risk can be effectively reduced in subsequent operations. Then, the effectiveness of the risk response strategy set for the low-torque servo module is analyzed. By simulating the operation or referring to similar cases, the ability of each risk response strategy to reduce the risk in actual application is evaluated, and the effectiveness evaluation result of the response strategy is obtained. For example, through simulation verification, the dustproof strategy of local isolation and dust-free equipment and tools can reduce the dust contamination risk probability from 30% to 10%. The anti-damage strategy operated by experienced technicians can reduce the component damage risk probability from 20% to 5%, which reflects the effectiveness of the response strategy. The compensation operation of the low-torque servo module is optimized and adjusted based on the effectiveness evaluation result of the response strategy. Based on the effectiveness evaluation data, the compensation operation pre-planning set and the risk response strategy set are optimized. For example, if it is found that the local isolation measure consumes a lot of time during the implementation of the dustproof strategy, affecting the overall operation progress, a more efficient quick isolation device can be used to shorten the isolation time from 1 hour to 0.5 hour, thereby forming the optimized compensation operation set.Afterwards, the low-torque servo module is analyzed for operation feasibility based on the optimized compensation operation set, considering factors such as personnel allocation, equipment conditions, time limit in actual operation, and evaluating whether the optimized operation scheme is feasible. Assuming that the number of existing technical personnel can meet the operation requirements, the equipment conditions are also suitable for the use of the rapid isolation device, and the total operation time of 7 hours after optimization is still within the range of downtime allowed by the production plan, thus obtaining the operation feasibility evaluation result as feasible. Finally, the low-torque servo module is compensated for nonlinear friction based on the operation feasibility evaluation result. According to the process and requirements of the optimized compensation operation set, the guide rail replacement work is orderly carried out during the downtime of the wafer lithography equipment, the risk response strategy is strictly implemented, and various indicators in the operation process are monitored in real time. After completing the compensation operation, the low-torque servo module is tested again. If the test result shows that the nonlinear friction is reduced from 8N to 3N, and the module running stability and wafer lithography precision are both significantly improved, then the low-torque servo module after compensation is successfully obtained, the nonlinear friction problem is effectively solved, and the high precision and high efficiency of the semiconductor manufacturing process are ensured.

[0042] The above describes the low-torque servo module nonlinear friction compensation method in the embodiment of the application. The following describes the low-torque servo module nonlinear friction compensation device in the embodiment of the application. Please refer to Figure 2 An embodiment of the low-torque servo module nonlinear friction compensation device in the embodiment of the application includes: The test module 21 is configured to test the low-torque servo module under different working conditions by using a preset friction test device and record parameters related to friction to generate friction characteristic data. The identification module 22 is configured to identify the nonlinear friction component of the friction characteristic data to obtain a nonlinear friction component identifier. The positioning module 23 is configured to position the nonlinear friction source of the low-torque servo module based on the nonlinear friction component identifier to obtain a nonlinear friction source position. The formulation module 24 is configured to formulate a friction compensation strategy for the low-torque servo module based on the nonlinear friction source position to obtain the friction compensation strategy. The compensation module 25 is configured to compensate for the nonlinear friction of the low-torque servo module based on the friction compensation strategy to obtain the low-torque servo module after compensation.

[0043] In this embodiment, the specific implementation of each unit in the above device embodiment is described in the above method embodiment, which will not be described here.

[0044] Refer to Figure 3 In the embodiment of the application, a computer device is also provided, and the internal structure of the computer device can be as Figure 3The computer device includes a processor, a memory, a display screen, an input device, a network interface and a database connected through a system bus. The processor of the computer device is configured to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, a computer program and a database. The internal memory provides an environment for the operating system and the computer program in the non-volatile storage medium. The database of the computer device is configured to store corresponding data in the embodiment. The network interface of the computer device is configured to communicate with an external terminal through a network connection. The computer program is executed by the processor to implement the above method.

[0045] Those skilled in the art can understand that, Figure 3 The structure shown in the embodiment is only a block diagram of part of the structure related to the scheme of the present application, and does not constitute a limitation on the computer device to which the scheme of the present application is applied.

[0046] The embodiment of the present application also provides a computer readable storage medium, which stores a computer program. The computer program is executed by the processor to implement the above method. It can be understood that the computer readable storage medium in the embodiment can be a volatile readable storage medium or a non-volatile readable storage medium.

[0047] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiment method can be completed by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer readable storage medium. When the computer program is executed, it can include the processes of the above-mentioned embodiment method. Any reference to the memory, storage, database or other medium provided by the present application and used in the embodiment can include non-volatile and / or volatile memory. The non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM) or flash memory. The volatile memory can include random access memory (RAM) or external cache memory. As an illustration but not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (SSRSDRAM), enhanced SDRAM (ESDRAM), synchronous link (Synchlink) DRAM (SLDRAM), Rambus direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM) and memory bus dynamic RAM, etc.

[0048] It is to be understood that the terminology "including", "comprising", or any other variation thereof, is intended to cover a non-exclusive inclusion such that process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus. An element proceeded by "comprises a... " does not, without more constraints, exclude the presence of additional identical elements in the process, method, article, or apparatus that comprises the element.

[0049] The above description is merely the preferred embodiments of the present application, and is not intended to limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made according to the content of the present application specification and drawings, or directly or indirectly applied to other related technical fields, is also included in the patent protection scope of the present application.

Claims

1. A low torque servo module nonlinear friction compensation method, characterized in that: The following steps are involved: Under different working conditions, the low-torque servo module is tested using the preset friction test equipment and friction-related parameters are recorded to generate friction characteristic data; performing friction nonlinear component identification on the friction characteristic data to obtain a friction nonlinear component identifier; Positioning the friction nonlinear source of the low torque servo module using the friction nonlinear component identifier to obtain a position of the friction nonlinear source; Formulating a friction compensation strategy for the low-torque servo module based on the position of the friction nonlinear source to obtain a friction compensation strategy; A nonlinear friction compensation operation is performed on the low-torque servo module based on the friction compensation strategy to obtain a compensated low-torque servo module.

2. The low torque servo module nonlinear friction compensation method according to claim 1, characterized in that: The performing friction nonlinear component identification on the friction characteristic data to obtain a friction nonlinear component identifier includes: Performing frequency domain decomposition processing on the friction characteristic data to obtain a friction characteristic frequency domain component set, and performing dynamic characteristic analysis on the low torque servo module based on the friction characteristic frequency domain component set to obtain friction dynamic characteristic parameters; Performing friction state mapping on the low torque servo module based on the friction dynamic characteristic parameters to obtain a friction state feature vector; Extracting nonlinear characteristics of the friction state characteristic vector to obtain a friction nonlinear characteristic set; Performing a multi-dimensional coupling analysis on the friction nonlinear feature set to obtain a friction nonlinear coupling relationship map; Based on the friction nonlinear coupling relationship map, the friction characteristics of the low torque servo module are classified to obtain the friction nonlinear component identification, wherein the friction nonlinear component identification includes a static nonlinear component, a dynamic nonlinear component and a mixed nonlinear component.

3. The low torque servo module nonlinear friction compensation method according to claim 1, characterized in that: The performing friction nonlinear source positioning on the low torque servo module by using the friction nonlinear component identifier to obtain the friction nonlinear source position includes: performing a friction source component association analysis on the low-torque servo module based on the friction nonlinear component identifier to obtain a friction source component association matrix, and screening associated components of the low-torque servo module based on the friction source component association matrix to obtain an associated component set; Performing component working environment analysis on the low-torque servo module based on the associated component set to obtain a component working environment parameter set; Based on the component working environment parameter set, evaluating the environmental impact of the low-torque servo module to obtain an environmental impact assessment result; Based on the environmental impact assessment results, potential friction sources of the low-torque servo module are checked to obtain a potential friction source list, and friction source characteristics of the low-torque servo module are detected based on the potential friction source list to obtain friction source characteristic data; The friction nonlinear source positioning of the low torque servo module is performed based on the friction source characteristic data to obtain the friction nonlinear source position.

4. The low torque servo module nonlinear friction compensation method according to claim 1, characterized in that: The friction compensation strategy is formulated for the low torque servo module based on the position of the friction nonlinear source to obtain the friction compensation strategy, including: Performing friction source structure analysis on the low torque servo module based on the position of the friction nonlinear source to obtain a friction source structure feature set; performing a structural impact analysis on the low-torque servo module based on the friction source structural feature set to obtain a structural impact assessment result; determining a friction compensation direction of the low-torque servo module based on the structural impact assessment result, and screening compensation methods for the low-torque servo module based on the friction compensation direction to obtain a candidate set of compensation methods; Calculating the compensation cost-effectiveness of the low-torque servo module using the compensation method candidate set; Based on the compensation cost-effectiveness, determining a preferred compensation method for the low-torque servo module in a preset compensation method database; A friction compensation strategy for the low-torque servo module is formulated based on the preferred compensation method.

5. The low torque servo module nonlinear friction compensation method according to claim 4, characterized in that: Determining the friction compensation direction of the low-torque servo module based on the structural impact assessment result includes: performing a friction influencing factor weight analysis on the low-torque servo module based on the structural impact assessment result to obtain a friction influencing factor weight set, and performing a key factor screening on the low-torque servo module based on the friction influencing factor weight set to obtain a key friction influencing factor set; performing a compensation direction tendency analysis on the low-torque servo module based on the key friction influencing factor set to obtain a compensation direction tendency set, and performing a preliminary compensation direction setting on the low-torque servo module based on the compensation direction tendency set to obtain a preliminary compensation direction set; The compensation direction of the low torque servo module is comprehensively adjusted based on the preliminary set of compensation directions to obtain a friction compensation direction set.

6. The low torque servo module nonlinear friction compensation method according to claim 5, characterized in that: The performing compensation direction tendency analysis on the low torque servo module based on the key friction influencing factor set to obtain a compensation direction tendency set includes: Performing a factor-friction relationship analysis on the low-torque servo module based on the key friction influencing factor set to obtain a factor-friction relationship map, and performing a friction trend analysis on the low-torque servo module based on the factor-friction relationship map to obtain a friction trend analysis result; Based on the friction trend analysis results, preliminarily determining the compensation tendency of the low-torque servo module; performing a tendency adjustment factor analysis on the low torque servo module based on the compensation tendency to obtain a tendency adjustment factor set; The compensation direction tendency of the low torque servo module is constructed by using the tendency adjustment factor set to obtain a compensation direction tendency set.

7. The low torque servo module nonlinear friction compensation method according to claim 1, characterized in that: The nonlinear friction compensation operation is performed on the low-torque servo module based on the friction compensation strategy to obtain a compensated low-torque servo module, including: Performing pre-planning of compensation operations on the low-torque servo module based on the friction compensation strategy to obtain a pre-planning set of compensation operations, and evaluating operational risks of the pre-planning set of compensation operations to obtain a pre-planning risk evaluation result; Formulate a risk response strategy for the low-torque servo module based on the pre-planned risk assessment result to obtain a risk response strategy set; performing a response strategy effectiveness analysis on the low-torque servo module based on the risk response strategy set to obtain a response strategy effectiveness evaluation result; performing compensation operation optimization adjustment on the low-torque servo module according to the effectiveness evaluation result of the response strategy to obtain an optimized compensation operation set, and performing an operation feasibility analysis on the low-torque servo module based on the optimized compensation operation set to obtain an operation feasibility evaluation result; A nonlinear friction compensation operation is performed on the low-torque servo module based on the operation feasibility evaluation result to obtain a compensated low-torque servo module.

8. A low torque servo module nonlinear friction compensation device, characterized in that: include: A test module is used to test the low-torque servo module under different working conditions using a preset friction test device and record friction-related parameters to generate friction characteristic data; an identification module, configured to identify friction nonlinear components of the friction characteristic data to obtain a friction nonlinear component identifier; a positioning module, configured to locate the friction nonlinear source of the low torque servo module by using the friction nonlinear component identifier to obtain a position of the friction nonlinear source; a formulation module, configured to formulate a friction compensation strategy for the low-torque servo module based on the position of the friction nonlinear source to obtain a friction compensation strategy; The compensation module is configured to perform a nonlinear friction compensation operation on the low-torque servo module based on the friction compensation strategy to obtain a compensated low-torque servo module.

9. A computer device comprising a memory and a processor, wherein a computer program is stored in the memory, wherein: When the processor executes the computer program, the steps of the method according to any one of claims 1 to 7 are implemented.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the method according to any one of claims 1 to 7 are implemented.

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