A vacuum pumping device for a magnetron sputtering coater

Abstract

The application discloses a kind of vacuumizing equipment for magnetron sputtering coating machine, comprising: main unit, it includes coating machine body and fixedly connected in the support seat of coating machine body lower surface, the lower surface of the coating machine body is fixedly connected with L-shaped seat;The application utilizes cooling shaft stem, makes product be placed or directly be suspended with holding disc cooperation placing plate, so that equipment is rotated when working, and cooling shaft stem is driven by rotating motor, so that equipment is better for product surface in sputtering process Coating treatment, further, utilize the centrifugal force generated when equipment rotates, make U-shaped sliding plate move to outside in U-shaped frame, so that cleaning plate protrudes outward, and simultaneously utilize the elastic potential energy of buffer spring to offset the centrifugal force generated when equipment works, and further make the excessive displacement of placing T-shaped block, so that internal product and coating machine body are collided to a certain extent, so that equipment protection treatment is improved to a certain extent.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum pumping equipment structure for magnetron sputtering coating machine, and particularly relates to a vacuum pumping equipment for magnetron sputtering coating machine. BACKGROUND

[0002] In the technical field of magnetron sputtering coating, the coating machine as the core equipment directly affects the quality and efficiency of coating. The magnetron sputtering coating machine generates plasma by gas discharge under the control of a magnetic field in a high-vacuum environment, sputters atoms or molecules on the target material, and deposits them on the substrate surface to form a uniform and dense thin film.

[0003] The traditional vacuum pumping system of the magnetron sputtering coating machine usually adopts a single vacuum pump for continuous pumping. Although this method can achieve the basic function of vacuum pumping, it is difficult for the traditional vacuum pumping system to accurately control the vacuum degree inside the coating machine, especially when the vacuum degree needs to be quickly adjusted to adapt to different coating process requirements. In addition, a large amount of sputtering particles and gas impurities are generated during the coating process, which easily adhere to the inside of the coating machine and the vacuum pumping system, resulting in a decrease in equipment performance and the need for frequent cleaning and maintenance, thereby increasing operating costs. SUMMARY

[0004] This section aims to summarize some aspects of the embodiments of the present application and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the abstract and title of the specification to avoid obscuring the purpose of this section, abstract and title, and such simplifications or omissions cannot be used to limit the scope of the present application.

[0005] In view of the above problems of the prior art, the present application is proposed.

[0006] Therefore, the purpose of the present application is to provide a vacuum pumping equipment for magnetron sputtering coating machine, which is suitable for solving the problem that the traditional vacuum pumping system is difficult to accurately control the vacuum degree inside the coating machine, especially when the vacuum degree needs to be quickly adjusted to adapt to different coating process requirements.

[0007] To solve the above technical problems, the present application provides the following technical scheme: a vacuum pumping equipment for magnetron sputtering coating machine, the vacuum pumping equipment for magnetron sputtering coating machine comprising:

[0008] A main unit comprising a coating machine body and a support seat fixedly connected to the lower surface of the coating machine body, the lower surface of the coating machine body being fixedly connected with an L-shaped seat, and the lower surface of the L-shaped seat being fixedly connected with a pad rod;

[0009] The rotating placing unit comprises a magnet ring fixedly connected in the coating machine body and a shaft ring fixedly connected in the coating machine body, a cooling shaft rod is rotationally connected in the shaft ring, a first cooling groove is formed in the cooling shaft rod, and a leaf plate is fixedly connected to the outer surface of the cooling shaft rod.

[0010] The intermittent extraction unit comprises a partition plate fixedly connected in the coating machine body and a gas storage box fixedly connected to the upper surface of the L-shaped seat, the number of the partition plates is two groups, and the two groups of partition plates are symmetric about the center of the coating machine body, a servo motor is fixedly connected to one side of the partition plate through the machine base, a rotating groove is formed in one side of the partition plate, and a deflection groove is formed in the partition plate.

[0011] As a preferred scheme of the vacuum extraction equipment for the magnetron sputtering coating machine, the lower surface of the coating machine body is fixedly connected to a rotating motor through a machine base, a plurality of groups of symmetrical gas extraction pipes are fixedly connected to one side of the coating machine body, a rubber sealing frame is fixedly connected to one side of the coating machine body, a semicircular protective frame is fixedly connected to one side of the rubber sealing frame through a hinge, a guide pipe is fixedly connected to the upper surface of the cooling shaft rod, and one end of the guide pipe penetrates through the upper surface of the coating machine body.

[0012] As a preferred scheme of the vacuum extraction equipment for the magnetron sputtering coating machine, the leaf plate is fixedly connected to a containing disc through bolts, a second cooling groove is formed in the containing disc, and the first cooling groove and the second cooling groove are in communication with each other.

[0013] As a preferred scheme of the vacuum extraction equipment for the magnetron sputtering coating machine, the outer surface of the containing disc is clampedly connected to a bearing rod, the lower surface of the bearing rod is fixedly connected to a linking ring, the lower surface of the linking ring does not contact the inner surface of the semicircular protective frame, the upper surface of the containing disc is fixedly connected to a guide rail frame, a T-shaped block is slidingly connected in the guide rail frame, and the upper surface of the T-shaped block is fixedly connected to a placing plate.

[0014] As a preferred scheme of the vacuum extraction equipment for the magnetron sputtering coating machine, one end of the T-shaped block is fixedly connected to a return spring, the other end of the return spring is fixedly connected to one side of the inner surface of the guide rail frame, the inner surface of the semicircular protective frame is fixedly connected to a target material excitation plate, and one side of the target material excitation plate does not contact the rubber sealing frame.

[0015] As a preferred embodiment of the vacuuming device for a magnetron sputtering coating machine according to the present invention, wherein: a U-shaped frame is engaged with one side of the load-bearing rod, a U-shaped sliding plate is slidably connected inside the U-shaped frame, a plurality of buffer springs are fixedly connected between the U-shaped sliding plate and the U-shaped frame, a cleaning plate is engaged with the U-shaped sliding plate through an insert block, and an ion chamber is fixedly connected to the side of the coating machine body away from the semi-circular protective frame.

[0016] As a preferred embodiment of the vacuuming device for a magnetron sputtering coating machine according to the present invention, wherein: a filter screen is engaged and connected to the air extraction pipe near the inner surface of the coating machine body; a drive gear is fixedly connected to one end of the output shaft of the servo motor; and an arc-shaped toothed plate is engaged and connected to one side of the drive gear.

[0017] As a preferred embodiment of the vacuuming device for a magnetron sputtering coating machine according to the present invention, a first connecting rod is rotatably connected to the upper surface of the arc-shaped toothed plate, an adjusting block is rotatably connected to the end of the first connecting rod away from the arc-shaped toothed plate, and a second connecting rod is rotatably connected inside the adjusting block.

[0018] As a preferred embodiment of the vacuuming device for a magnetron sputtering coating machine according to the present invention, wherein: the other end of the second connecting rod is also fixedly connected to an adjusting block, and a compression spring is fixedly connected to one side of the adjusting block, and a fixing block is fixedly connected to one side of the partition plate.

[0019] As a preferred embodiment of the vacuuming device for a magnetron sputtering coating machine according to the present invention, wherein: one end of the compression spring is fixedly connected to the fixed block, a sealing plate is fixedly connected to both the arc-shaped toothed plate and the adjusting block, the sealing plate is rotatably connected to the rotating groove, and the arc-shaped toothed plate and the adjusting block are rotatably arranged in the deflection groove.

[0020] The beneficial effects of this invention are:

[0021] 1. The utility model discloses a cooling shaft, the ring of connection, the tray, the leaf plate, the first cooling groove, the load bar, the cleaning plate, the guide rail frame, the placing plate, the T -shaped block, the reset spring, the plug -in block, the buffer spring, the U -shaped sliding plate, the U -shaped frame and the second cooling groove make the tray cooperate the placing plate and place the product or directly carry out the suspension processing, make the equipment in the work, utilize the motor drive cooling shaft and rotate, make the equipment in the sputtering process better to product surface carries out the coating treatment, further, utilize the centrifugal force that the equipment rotates and produce, make U -shaped sliding plate in U -shaped frame and move to the outside, thereby make the cleaning plate and project outward, further make the cleaning plate to the inside surface of coating machine body carries out the cleaning treatment to a certain extent, further utilize the buffer spring and extrude under the action of centrifugal force, thereby make the equipment when stopping rotating can make U -shaped sliding plate and cleaning plate return to the original position fast, and simultaneously utilize the elastic potential energy of buffer spring and offset the centrifugal force that the equipment works, thereby make the placing T -shaped block and displace excessively, thereby prevent the inside product and coating machine body from colliding to a certain extent, thereby improve the protection treatment to equipment to a certain extent;

[0022] 2. The utility model discloses a gas storage box, the sealing plate, the partition plate, the servo motor, the drive gear, the arc toothed plate, the first link bar, the adjusting block, the second link bar, the extrusion spring, the fixed block, the deflection groove, the filter screen and the rotation groove make the gas storage box store argon, when the equipment is filled with gas, can quickly utilize the gas storage box and discharge filling to the equipment inside, further, utilize the partition plate and divide the inside space of coating machine body, in the preliminary process of extracting vacuum, the pressure in the unilateral region of partition plate is reduced, thereby after reducing to a certain extent, utilize the servo motor drive arc toothed plate and rotate, thereby drive the sealing plate and deflect, make both sides area intercommunication, thereby quickly utilize the pressure difference and export the internal air, thereby improve the working efficiency of equipment to a certain extent, and utilize the filter screen and filter the flowing air. ACCURATE DRAWINGS

[0023] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiment description, obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creating laborious work. Among them:

[0024] Figure 1 It is a whole structure schematic diagram of the vacuumizing equipment for the magnetron sputtering coating machine proposed by the present application;

[0025] Figure 2 It is a whole sectional structure schematic diagram of the vacuumizing equipment for the magnetron sputtering coating machine proposed by the present application;

[0026] Figure 3 A schematic diagram of the internal structure of a coating machine body of a vacuum pumping device for a magnetron sputtering coating machine according to the present application is shown in the figure.

[0027] Figure 4 A schematic diagram of the structure of a rotating placement unit of a vacuum pumping device for a magnetron sputtering coating machine according to the present application is shown in the figure.

[0028] Figure 5 A schematic diagram of the distribution structure of a first and second connecting rod of a vacuum pumping device for a magnetron sputtering coating machine according to the present application is shown in the figure.

[0029] Figure 6 A schematic diagram of the distribution structure of a partition plate of a vacuum pumping device for a magnetron sputtering coating machine according to the present application is shown in the figure.

[0030] Figure 7 A schematic diagram of the structure of a U-shaped frame of a vacuum pumping device for a magnetron sputtering coating machine according to the present application is shown in the figure.

[0031] BRIEF DESCRIPTION OF DRAWINGS: 100, main unit; 101, coating machine body; 102, rotating motor; 103, L-shaped seat; 104, semicircular protective frame; 105, rubber sealing frame; 106, support seat; 107, air extraction pipe; 108, lead-out pipe; 200, rotating placement unit; 201, magnetic ring; 202, shaft ring; 203, cooling shaft rod; 204, connecting ring; 205, target material excitation plate; 206, containing disc; 207, blade plate; 208, first cooling groove; 209, ion chamber; 210, load-bearing rod; 211, cleaning plate; 212, guide rail frame; 213, placement plate; 214, T-shaped block; 215, return spring; 216, insertion block; 217, buffer spring; 218, U-shaped sliding plate; 219, U-shaped frame; 220, second cooling groove; 300, intermittent extraction unit; 301, gas storage box; 302, sealing plate; 303, partition plate; 304, servo motor; 305, drive gear; 306, arc-shaped toothed plate; 307, first connecting rod; 308, adjusting block; 309, second connecting rod; 310, extrusion spring; 311, fixed block; 312, deflection groove; 313, filter screen; 314, rotating groove. DETAILED DESCRIPTION

[0032] In order to make the above-mentioned objects, features and advantages of the present application more apparent and comprehensible, the specific embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0033] In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, it will be appreciated that the present application can be practiced in a variety of ways beyond the specific details set forth herein, assuming that the fundamental underlying principles are maintained. It should also be appreciated that the present application is not limited to the embodiments described below which are presented for illustrative purposes only.

[0034] Second, the "one embodiment" or "an embodiment" referred to herein means a specific feature, structure, or characteristic under discussion. Thus, "one embodiment" does not mean a single embodiment nor is it to be taken individually or selectively as an embodiment independent of all other embodiments. Multiple embodiments can be described hereinafter, and in some instances individually from or in separate combinations of other embodiments, unless it is specified otherwise.

[0035] Third, the present application is described in detail below with reference to the accompanying drawings. To facilitate the discussion, the cross-sectional views of the device structure can be exaggerated in the interest of clarity, and the illustrative drawings are not drawn to scale. Moreover, the illustrative views presented herein are by way of example only and should not be taken as limiting the scope of the present application. In addition, three-dimensional spatial dimensions, including length, width, and depth, should be considered in actual fabrication.

[0036] Embodiment One

[0037] Reference Figure 1 - Figure 7 For one embodiment of the present application, a vacuum pumping device for a magnetron sputtering coating machine is provided, which includes a main unit 100, a rotating placement unit 200, and an intermittent pumping unit 300.

[0038] The main unit 100 includes a coating machine body 101 and a support seat 106 fixedly connected to the lower surface of the coating machine body 101. The lower surface of the coating machine body 101 is fixedly connected with an L-shaped seat 103, and the lower surface of the L-shaped seat 103 is fixedly connected with a pad rod.

[0039] The rotating placement unit 200 includes a magnetic ring 201 fixedly connected inside the coating machine body 101 and a shaft ring 202 fixedly connected inside the coating machine body 101. The shaft ring 202 is rotatably connected with a cooling shaft 203, the cooling shaft 203 is provided with a first cooling groove 208, and the outer surface of the cooling shaft 203 is fixedly connected with a leaf plate 207.

[0040] Finally, the intermittent pumping unit 300 includes a partition plate 303 fixedly connected inside the coating machine body 101 and a gas storage box 301 fixedly connected to the upper surface of the L-shaped seat 103. The number of partition plates 303 is two, and the two partition plates 303 are symmetrically arranged about the center of the coating machine body 101. The partition plate 303 is fixedly connected with a servo motor 304 on one side through a machine seat, and a rotating groove 314 is formed on one side of the partition plate 303. A deflection groove 312 is formed in the partition plate 303.

[0041] Further, the lower surface of the coating machine body 101 is fixedly connected with a rotating motor 102 through a machine base, one side of the coating machine body 101 is fixedly connected with a plurality of groups of symmetrically distributed exhaust pipes 107, one side of the coating machine body 101 is fixedly connected with a rubber sealing frame 105, one side of the rubber sealing frame 105 is fixedly connected with a semicircular protective frame 104 through a hinge, the upper surface of the cooling shaft 203 is fixedly connected with a lead-out pipe 108, one end of the lead-out pipe 108 penetrates through the upper surface of the coating machine body 101, wherein the gas in the equipment is simultaneously exhausted through the plurality of groups of symmetrically distributed exhaust pipes 107, and the rubber sealing frame 105 cooperates with the semicircular protective frame 104 to keep the equipment inside sufficiently sealed.

[0042] Further, the inner side of the leaf plate 207 is fixedly connected with a containing disc 206 through bolts, the containing disc 206 is provided with a second cooling groove 220, and the first cooling groove 208 and the second cooling groove 220 are in communication with each other, wherein the equipment has a certain degree of improvement in cooling effect through the plurality of groups of cooling grooves in communication with each other, so that the processing speed of the product is improved to a certain extent.

[0043] Further, the outer surface of the containing disc 206 is clampedly connected with a bearing rod 210, the lower surface of the bearing rod 210 is fixedly connected with a linking ring 204, the lower surface of the linking ring 204 is not in contact with the inner surface of the semicircular protective frame 104, the upper surface of the containing disc 206 is fixedly connected with a guide rail frame 212, the guide rail frame 212 is slidably connected with a T-shaped block 214, the upper surface of the T-shaped block 214 is fixedly connected with a placing plate 213, wherein the products that need to be sputtered can be placed through the plurality of groups of circumferentially distributed containing discs 206, and then the placing plate 213 can be quickly installed through the sliding mode of the T-shaped block 214 and the guide rail frame 212 when the products are installed, so that the installation effect of the products is improved to a certain extent.

[0044] Further, one end of the T-shaped block 214 is fixedly connected with a return spring 215, the other end of the return spring 215 is fixedly connected to one side of the inner surface of the guide rail frame 212, the inner surface of the semicircular protective frame 104 is fixedly connected with a target material excitation plate 205, and one side of the target material excitation plate 205 is not in contact with the rubber sealing frame 105, wherein the centrifugal force generated by the equipment during rotation is prevented from excessively offsetting outward on the containing disc 206 to a certain extent through the return spring 215, so that the equipment is prevented from colliding with the internal structure of the equipment.

[0045] Further, the load rod 210 is connected with the U-shaped frame 219 on one side, the U-shaped sliding plate 218 is connected with the U-shaped frame 219 in the U-shaped frame 219, the U-shaped sliding plate 218 and the U-shaped frame 219 are fixedly connected with a plurality of buffer springs 217, the cleaning plate 211 is connected with the U-shaped sliding plate 218 in the U-shaped sliding plate 218 through the insertion block 216, the ion chamber 209 is fixedly connected with the ion chamber 209 away from the semicircular protective frame 104 on one side of the coating machine body 101, wherein the U-shaped sliding plate 218 is slid outwardly in the U-shaped frame 219 by rotating the containing disc 206, and the cleaning plate 211 connected with the U-shaped sliding plate 218 is cleaned on the inner surface of the equipment.

[0046] Working principle:

[0047] The cooling shaft 203, the adapter ring 204, the containing disc 206, the leaf plate 207, the first cooling groove 208, the load rod 210, the cleaning plate 211, the guide rail frame 212, the placing plate 213, the T-shaped block 214, the reset spring 215, the insertion block 216, the buffer spring 217, the U-shaped sliding plate 218, the U-shaped frame 219 and the second cooling groove 220 are used to place the containing disc 206 in cooperation with the placing plate 213 or directly to hang the product, so that the equipment is driven by the rotating motor 102 to rotate the cooling shaft 203 when working, so that the equipment can better perform the coating treatment on the surface of the product during sputtering. Further, the centrifugal force generated when the equipment rotates makes the U-shaped sliding plate 218 move outwardly in the U-shaped frame 219, so that the cleaning plate 211 protrudes outwardly, and the cleaning plate 211 performs a certain degree of cleaning treatment on the inner surface of the coating machine body 101, thereby improving the maintenance effect of the equipment to a certain extent. Further, the buffer spring 217 is extruded under the action of the centrifugal force, so that the U-shaped sliding plate 218 and the cleaning plate 211 can quickly return to the original position when the equipment stops rotating, and the elastic potential energy of the buffer spring 217 is used to offset the centrifugal force generated when the equipment works, so that the T-shaped block 214 is prevented from being displaced excessively, thereby preventing the product inside from colliding with the coating machine body 101 to a certain extent, thereby improving the protection of the equipment to a certain extent;

[0048] The gas storage box 301, the sealing plate 302, the partition plate 303, the servo motor 304, the drive gear 305, the arc-shaped tooth plate 306, the first connecting rod 307, the adjusting block 308, the second connecting rod 309, the extrusion spring 310, the fixed block 311, the deflection groove 312, the filter screen 313 and the rotating groove 314 are used to store argon in the gas storage box 301, when the equipment is filled with gas, the gas storage box 301 can be used to quickly discharge and fill the equipment, further, the partition plate 303 is used to separate the space in the coating machine body 101, during the preliminary vacuum extraction process, the pressure in the single side area of the partition plate 303 is reduced, then the servo motor 304 is used to drive the arc-shaped tooth plate 306 to rotate, so as to drive the sealing plate 302 to deflect, so that the two side areas are connected, so that the internal air is quickly discharged to the outside by the pressure difference, so as to improve the working efficiency of the equipment to a certain extent, and the filter screen 313 is used to filter the flowing air.

[0049] Embodiment two

[0050] With reference to Figure 3 - Figure 6 The difference between the embodiment one and the embodiment two is that the filter screen 313 is connected to the inner surface of the coating machine body 101 near the exhaust pipe 107, the drive gear 305 is fixedly connected to one end of the output shaft of the servo motor 304, and the arc-shaped tooth plate 306 is meshingly connected to one side of the drive gear 305, wherein the filter screen 313 is used to filter the flowing air, and the servo motor 304 is used to drive the deflection and stirring of the partition plate 303.

[0051] Further, the upper surface of the arc-shaped tooth plate 306 is rotationally connected with a first connecting rod 307, the end of the first connecting rod 307 away from the arc-shaped tooth plate 306 is rotationally connected with an adjusting block 308, the adjusting block 308 is rotationally connected with a second connecting rod 309, the other end of the second connecting rod 309 is also fixedly connected with the adjusting block 308, one side of the adjusting block 308 is fixedly connected with a compression spring 310, one side of the partition plate 303 is fixedly connected with a fixed block 311, one end of the compression spring 310 is fixedly connected to the fixed block 311, the arc-shaped tooth plate 306 and the adjusting block 308 are both fixedly connected with a sealing plate 302, the sealing plate 302 is rotationally connected in a rotating groove 314, and the arc-shaped tooth plate 306 and the adjusting block 308 are rotationally arranged in a deflection groove 312. The interior space of the coating machine body 101 is separated by the partition plate 303, the pressure inside the single-side region of the partition plate 303 is reduced during the preliminary vacuum extraction process, then the arc-shaped tooth plate 306 is driven to rotate by the servo motor 304 after a certain degree of reduction, thereby driving the sealing plate 302 to deflect, so that the two side regions are connected, and the internal air is quickly discharged to the outside by the pressure difference, thereby improving the working efficiency of the equipment to a certain extent.

[0052] Working principle: first, before starting work, the workpiece to be coated is installed on the placing plate 213, the semicircular protective frame 104 is closed, and it is tightly attached to the rubber sealing frame 105, so as to ensure that the interior of the coating machine body 101 is in a sealed state;

[0053] Subsequently, the vacuum extraction process is started, a plurality of groups of air extraction pipes 107 are connected with the external vacuum pump system and start to work, at this time, the key intermittent extraction unit 300 starts to work: the servo motor 304 is started, the output shaft of the servo motor 304 drives the driving gear 305 to rotate, the driving gear 305 is engaged with the arc-shaped tooth plate 306, the arc-shaped tooth plate 306 drives the sealing plate 302 to rotate to a vertical state through a series of connecting rod mechanisms such as the first connecting rod 307, the adjusting block 308 and the second connecting rod 309, so as to divide the internal chamber of the coating machine body 101 into two independent and sealed intervals;

[0054] The vacuum pump preferentially extracts air from one of the two divided intervals through the air extraction pipe 107, since the initial volume is reduced by nearly half by the partition plate 303, the vacuum degree in this interval is rapidly improved, this process greatly shortens the time required to reach the initial high vacuum, and lays a foundation for subsequent rapid high vacuum, and the filter screen 313 clamped at the inlet of the air extraction pipe 107 can effectively filter large particles of sputtering impurities carried in the extracted gas, preventing them from entering the external vacuum pipeline system;

[0055] Thirdly, when the vacuum degree of the partitioned interval which is preferentially pumped reaches a predetermined value, the servo motor 304 is started again to drive the two sealing plates 302 to rotate reversely and synchronously through the gear and connecting rod mechanism, so that the two sealing plates 302 change from the vertical sealing state to the horizontal or inclined open state, and the two previously isolated intervals are instantaneously connected;

[0056] Due to the huge pressure difference between the two intervals, the gas in the interval which has not been pumped will rapidly flow to the interval which has been in a high vacuum state under the action of the pressure difference. The flow speed of the gas driven by the pressure difference is much higher than the speed of direct pumping by the vacuum pump, which realizes the "instant" evacuation of the remaining gas. The external vacuum pump system continues to work, and finally the entire coating chamber quickly reaches the extremely high vacuum state required by the process. By controlling the action timing of the servo motor 304, the pressure difference when the chamber is connected can be accurately controlled, so as to realize fine and rapid regulation and control of the final vacuum degree and its establishment process, and to flexibly adapt to the needs of different coating processes.

[0057] Then, after the high vacuum is established, process gas such as argon is introduced into the chamber. The gas can be stored in the gas storage box 301 and injected as needed. The target excitation plate 205 works to generate plasma, sputter target atoms, and deposit them on the rotating workpiece surface to form a thin film. The rotating motor 102 is started to drive the cooling shaft 203 to rotate, and the cooling shaft 203 drives the leaf plate 207 fixedly connected to the outer surface thereof and the containing disc 206 fixed to the leaf plate by bolts to rotate together. The workpiece rotates with it to ensure the uniformity of the coating. The cooling liquid circulates in the communication loop formed by the first cooling groove 208 and the second cooling groove 220 to effectively cool the containing disc 206 and the workpiece rotating at high speed, suppress thermal effects, and improve coating quality and processing speed.

[0058] The centrifugal force acts on the T-shaped block 214 under the placement plate 213, and the T-shaped block 214 has a tendency to slide outward along the guide rail frame 212. This tendency is balanced by the pulling force of the return spring 215, so as to stabilize the workpiece at a predetermined radius position for coating, preventing it from being excessively offset due to centrifugal force and colliding with the inner wall of the chamber.

[0059] The U-shaped sliding plate 218 is arranged in the U-shaped frame 219 fixed on the load-bearing rod 210, and a plurality of buffer springs 217 are connected between the U-shaped sliding plate 218 and the U-shaped frame 219. Under the action of centrifugal force, the U-shaped sliding plate 218 overcomes the elastic force of the buffer springs 217 and slides in the U-shaped frame 219 towards the cavity wall direction, drives the front end of the cleaning plate 211 to protrude outward by the clamping block 216, and makes the cleaning plate 211 contact or keep a small gap with the inner surface of the coating machine body 101. With the continuous rotation of the containing disc 206, the cleaning plate 211 can scrape or clean the inner wall of the cavity, and the sputtering particle impurities attached to the inner wall are removed in time. When the equipment stops running, the centrifugal force decreases, and the restoring force of the buffer spring 217 pushes the U-shaped sliding plate 218 and the cleaning plate 211 to retract to the original position, and the reset spring 215 also pulls the T-shaped block 214 and the placing plate 213 back to the center initial position. This design realizes automatic cleaning during operation and automatic reset when the equipment stops, greatly reduces the maintenance frequency and the pollution of the cavity.

[0060] Finally, after the coating process is completed, the process gas is stopped, the rotating motor 102 is stopped, the cavity is ventilated through the exhaust pipe 107, the vacuum is destroyed, the semicircular protective frame 104 is opened, and the workpiece completed with coating can be taken out.

[0061] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present application and are not limiting. Although the present application has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solutions of the present application can be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present application, and they should be covered in the scope of the claims of the present application.

Claims

1. A vacuum pumping device for a magnetron sputtering coating machine, characterized in that, The vacuum pumping equipment of the magnetron sputtering coating machine includes: The main unit (100) includes a coating machine body (101) and a support base (106) fixedly connected to the lower surface of the coating machine body (101). An L-shaped seat (103) is fixedly connected to the lower surface of the coating machine body (101), and a pad rod is fixedly connected to the lower surface of the L-shaped seat (103). A rotating motor (102) is fixedly connected to the lower surface of the coating machine body (101) through a base. The rotating placement unit (200) includes a magnetic ring (201) fixedly connected inside the coating machine body (101) and a collar (202) fixedly connected inside the coating machine body (101). A cooling shaft (203) is rotatably connected inside the collar (202). A first cooling groove (208) is formed inside the cooling shaft (203). A blade (207) is fixedly connected to the outer surface of the cooling shaft (203). A holding tray (206) is fixedly connected to the blade (207) by bolts. The holding tray (206) has a second cooling groove (220) inside, and the first cooling groove (208) and the second cooling groove (220) are interconnected. A load-bearing rod (210) is snapped onto the outer surface of the holding tray (206). A connecting ring (204) is fixedly connected to the lower surface of the load-bearing rod (210), and the lower surface of the connecting ring (204) does not contact the inner surface of the semi-circular protective frame (104). A guide rail frame (212) is fixedly connected to the upper surface of the holding tray (206). (212) A T-shaped block (214) is slidably connected inside. A placement plate (213) is fixedly connected to the upper surface of the T-shaped block (214). A return spring (215) is fixedly connected to one end of the T-shaped block (214). The other end of the return spring (215) is fixedly connected to one side of the inner surface of the guide rail frame (212). A target material excitation plate (205) is fixedly connected to the inner surface of the semi-circular protective frame (104). One side of the target material excitation plate (205) does not contact the rubber sealing frame (105). A U-shaped frame (219) is engaged with one side of the load-bearing rod (210). A U-shaped sliding plate (218) is slidably connected inside the U-shaped frame (219). Several buffer springs (217) are fixedly connected between the U-shaped sliding plate (218) and the U-shaped frame (219). A cleaning plate (211) is engaged with the U-shaped sliding plate (218) through a plug (216). An ion chamber (209) is fixedly connected to the side of the coating machine body (101) away from the semi-circular protective frame (104). The intermittent extraction unit (300) includes a partition plate (303) fixedly connected inside the coating machine body (101) and a gas storage box (301) fixedly connected to the upper surface of the L-shaped seat (103). There are two sets of partition plates (303), and both sets of partition plates (303) are symmetrical about the center of the coating machine body (101). A servo motor (304) is fixedly connected to one side of the partition plate (303) through the base. A rotating groove (314) is opened on one side of the partition plate (303). A deflection groove (312) is opened inside the partition plate (303). A sealing plate (302) is rotatably connected in the rotating groove (314).

2. The vacuum pumping device for a magnetron sputtering coating machine according to claim 1, characterized in that: Multiple sets of symmetrically distributed exhaust pipes (107) are fixedly connected to one side of the coating machine body (101). A rubber sealing frame (105) is fixedly connected to one side of the coating machine body (101). A semi-circular protective frame (104) is fixedly connected to one side of the rubber sealing frame (105) via a hinge. An outlet pipe (108) is fixedly connected to the upper surface of the cooling shaft (203). One end of the outlet pipe (108) penetrates the upper surface of the coating machine body (101).

3. The vacuum pumping device for a magnetron sputtering coating machine according to claim 2, characterized in that: The air extraction pipe (107) is fitted with a filter screen (313) near the inner surface of the coating machine body (101). One end of the output shaft of the servo motor (304) is fixedly connected to a drive gear (305). An arc-shaped toothed plate (306) is meshed with one side of the drive gear (305).

4. A vacuum pumping device for a magnetron sputtering coating machine according to claim 3, characterized in that: The upper surface of the arc-shaped toothed plate (306) is rotatably connected to a first connecting rod (307), and an adjusting block (308) is rotatably connected to the end of the first connecting rod (307) away from the arc-shaped toothed plate (306). A second connecting rod (309) is rotatably connected inside the adjusting block (308).

5. A vacuum pumping device for a magnetron sputtering coating machine according to claim 4, characterized in that: The other end of the second connecting rod (309) is also fixedly connected to an adjusting block (308), and a compression spring (310) is fixedly connected to one side of the adjusting block (308), and a fixing block (311) is fixedly connected to one side of the partition plate (303).

6. A vacuum pumping device for a magnetron sputtering coating machine according to claim 5, characterized in that: One end of the compression spring (310) is fixedly connected to the fixed block (311), and a sealing plate (302) is fixedly connected to both the arc-shaped toothed plate (306) and the adjusting block (308). The arc-shaped toothed plate (306) and the adjusting block (308) are rotatably arranged in the deflection groove (312).

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