Temperature measuring structure and vertical furnace tube

Abstract

This application discloses a temperature measuring structure and a vertical furnace tube. The vertical furnace tube includes a base, a crystal boat, a furnace body, a lifting mechanism, multiple temperature measuring elements, multiple heating elements, and the aforementioned temperature measuring structure. The bottom of the crystal boat is connected to the base. The furnace body is adapted to accommodate the crystal boat and is detachably connected to it. When the crystal boat is detached from the furnace body, the lifting mechanism can drive the base to lift and lower, thereby lifting and lowering the crystal boat. The multiple heating elements heat the internal space of the furnace body. The temperature measuring structure can be connected to the base, allowing it to be driven by the lifting mechanism for lifting and lowering. The temperature measuring structure includes a calibration element with a preset length, at least partially located within the furnace body. During the lifting and lowering process of the temperature measuring structure, the calibration element can measure the temperature of the area between any two temperature measuring elements, and can also measure the temperature of the area between the lowest temperature measuring element and the bottom of the crystal boat. This design improves the detection accuracy of the temperature measuring structure and reduces its installation difficulty.

Description

Technical Field

[0001] This application relates to the field of vertical furnace tube technology, and more particularly to a temperature measuring structure and a vertical furnace tube. Background Technology

[0002] Silicon carbide vertical furnace tubes can undergo processes such as annealing and activation. Annealing can repair lattice damage, and activation can allow doped impurity atoms to enter lattice positions and exert electrical effects.

[0003] When silicon carbide vertical furnace tubes are used for the above processes, the internal temperature of the furnace body is relatively high, generally between 1200℃ and 2000℃. Therefore, the furnace body needs to be controlled by an infrared pyrometer. However, since the measurement position of the infrared pyrometer is usually not at the same point as the process position, it is necessary to use temperature measuring devices such as calibration thermocouples to calibrate the internal temperature of the furnace body and to test the temperature control accuracy of the constant temperature zone inside the furnace body.

[0004] In related technologies, for example, patent application CN113899221A discloses a temperature measurement method and device for the constant temperature zone of a vertical oxidation furnace. The temperature measurement device includes a support, a lifting mechanism, a thermocouple seat, and a thermocouple. The lifting mechanism is mounted on the support, and the thermocouple seat is located on the lifting mechanism. The thermocouple is vertically arranged and detachably mounted on the thermocouple seat at its bottom. The bottom of the oxidation furnace is provided with a thermocouple perforation through which the thermocouple can pass, thereby allowing the thermocouple to move vertically within the furnace chamber and measure the temperature value in real time to obtain continuous temperature data in the vertical direction of the furnace chamber, thereby improving the temperature uniformity of the entire furnace chamber.

[0005] However, the aforementioned patent application requires an independent lifting mechanism (i.e., the temperature measuring device is an external device independent of the oxidation furnace) to drive the calibration thermocouple to move up and down. An independent lifting mechanism makes it difficult to align the calibration thermocouple with the temperature measuring hole, and also complicates the installation of the calibration thermocouple. Furthermore, an independent lifting mechanism struggles to accurately correspond to the coordinates of the temperature measuring point, resulting in low temperature measurement accuracy. Summary of the Invention

[0006] To address the shortcomings of existing technologies, the purpose of this application is to provide a temperature measuring structure and a vertical furnace tube, which can improve the detection accuracy of the temperature measuring structure and reduce the installation difficulty of the temperature measuring structure.

[0007] In a first aspect, embodiments of this application provide a temperature measuring structure suitable for measuring the temperature of a vertical furnace tube. The temperature measuring structure can be connected to the base of the vertical furnace tube, so that the temperature measuring structure can be driven by the lifting mechanism of the vertical furnace tube to move up and down. The temperature measuring structure includes a temperature calibration element with a preset length. The temperature calibration element is at least partially located inside the furnace body of the vertical furnace tube. During the lifting and lowering process of the temperature measuring structure, the temperature calibration element can measure the temperature of the area between any two temperature measuring elements of the vertical furnace tube. The temperature calibration element can also measure the temperature of the area between the lowest temperature measuring element and the bottom of the crystal boat of the vertical furnace tube.

[0008] In one possible implementation, the temperature measuring structure includes: a base and a telescopic tube assembly, the base being detachably connected to the base of the vertical furnace tube; the two ends of the telescopic tube assembly being connected to the base and the crystal boat respectively, and fitted onto the temperature calibration component, the telescopic tube assembly being adapted to extend and retract with the temperature calibration component to close the space between the crystal boat and the base for accommodating the temperature calibration component.

[0009] In one possible implementation, the telescopic tube assembly includes a bellows and a fixing plate. The bellows includes a first corrugated portion, a second corrugated portion, and a rigid portion located between the first and second corrugated portions. The fixing plate is connected to the rigid portion. The temperature measuring structure includes a guide shaft, which is movably connected to the base and fixed to the fixing plate. The guide shaft is movable relative to the base in the lifting direction of the temperature calibration component to limit the movement offset of the bellows.

[0010] In one possible implementation, the temperature measuring structure includes a linear bearing housing connected to the base, and a guide shaft slidably connected within the linear bearing housing; two linear bearing housings and two guide shafts are provided, each guide shaft cooperating with a corresponding linear bearing housing, and the two guide shafts are respectively fixed to both ends of the fixed plate and located on both sides of the bellows.

[0011] In one possible implementation, the bellows has an upper flange and a lower flange at both ends. The upper flange is connected to the crystal boat. The temperature measuring structure also includes a support plate connected to the base. The support plate has an elongated mounting hole. The lower flange is rotatably connected to an elongated mounting component. The mounting component passes through the mounting hole and rotates to a fixed position. When the mounting component is in the fixed position, the maximum width direction of the mounting component is not parallel to the maximum width direction of the mounting hole.

[0012] In one possible implementation, the temperature measuring structure includes a first guide sleeve and a second guide sleeve. The first guide sleeve is located inside the first corrugated portion and the upper flange, and the second guide sleeve is located inside the second corrugated portion and the lower flange. Both the first guide sleeve and the second guide sleeve are fitted onto and contact the temperature calibration element to guide the temperature calibration element.

[0013] In one possible implementation, the temperature measuring structure includes a first clamp and a second clamp. The first clamp is engaged with the upper flange to secure the upper flange and the first guide sleeve; the second clamp is engaged with the lower flange to secure the lower flange and the second guide sleeve.

[0014] In one possible implementation, the temperature measuring structure includes a first sealing ring and a second sealing ring, the first sealing ring being located between the upper flange and the first clamp, and the second sealing ring being located between the lower flange and the second clamp.

[0015] In one possible implementation, the temperature calibration component includes a fixing part located below the base and a temperature measuring part passing through the first guide sleeve, the second guide sleeve, the crystal boat, and the furnace body. The temperature measuring part is provided with multiple temperature measuring points, which can measure the temperature of the area between any two temperature measuring components. The multiple temperature measuring points can also measure the temperature of the area between the lowest temperature measuring component and the bottom of the crystal boat. The fixing part is connected to the lower flange, and a sealing ring structure is provided at the connection between the two.

[0016] Secondly, embodiments of this application provide a vertical furnace tube, which includes a base, a crystal boat, a furnace body, a lifting mechanism, multiple temperature measuring elements, multiple heating elements, and the aforementioned temperature measuring structure; the bottom of the crystal boat is connected to the base; the furnace body is adapted to accommodate the crystal boat and is detachably connected to the crystal boat; when the crystal boat is detached from the furnace body, the lifting mechanism can drive the base to lift and lower to move the crystal boat; at least one temperature measuring element is located at the top of the furnace body, and at least one temperature measuring element is located on the side wall of the furnace body to measure the temperature inside the furnace body; multiple heating elements are installed at multiple positions inside the furnace body to heat the internal space of the furnace body.

[0017] The aforementioned temperature measuring structure and vertical furnace tube can connect the temperature measuring structure to the base, and the temperature measuring structure can be raised and lowered by a lifting mechanism. This eliminates the need for a separate lifting device to drive the temperature measuring structure, which facilitates the alignment of the calibration component with the temperature measuring hole. The existing lifting mechanism of the vertical furnace tube for feeding drives the movement of the temperature measuring structure, making the installation of the temperature measuring structure simpler and reducing the installation difficulty. In addition, the existing lifting mechanism of the vertical furnace tube for feeding can accurately correspond to the coordinate value of the temperature measuring point, thereby improving the temperature measuring accuracy, which in turn improves the detection accuracy of the calibration component. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of a vertical furnace tube provided in an embodiment of this application.

[0019] Figure 2 A cross-sectional view of a vertical furnace tube provided in an embodiment of this application.

[0020] Figure 3 This is an exploded view of the temperature measuring structure provided in an embodiment of this application.

[0021] Figure 4 This is a schematic diagram of the telescopic tube assembly and base of the temperature measuring structure provided in the embodiments of this application.

[0022] Figure 5 This is a schematic diagram of the lower flange and support plate of the temperature measuring structure provided in the embodiments of this application.

[0023] Figure 6 This is a schematic diagram of the bellows of the temperature measuring structure provided in the embodiment of this application in a stretched state.

[0024] Figure 7 This is a schematic diagram of the bellows of the temperature measuring structure provided in the embodiments of this application in a compressed state.

[0025] Figure 8 A flowchart of the temperature measurement method of the temperature measurement structure provided in the embodiments of this application.

[0026] Illustration:

[0027] 100. Vertical furnace tube; 11. Base; 12. Crystal boat; 121. Temperature measuring hole; 13. Furnace body; 14. Lifting mechanism; 141. Lifting guide rail; 142. Guide rail seat; 143. Screw; 144. Drive motor; 15. Temperature measuring element; 16. Heating element; 200. Temperature measuring structure; 21. Temperature calibration element; 211. Temperature measuring part; 212. Fixing part; 22. Base; 23. Telescopic tube assembly; 231. Corrugated pipe; 2311. First wave 2312. Corrugated section; 2313. Rigid section; 2314. Upper flange; 2315. Lower flange; 232. Fixing plate; 24. Guide shaft; 25. Linear bearing seat; 26. Support plate; 261. Mounting hole; 27. Mounting component; 291. First guide sleeve; 292. Second guide sleeve; 201. First clamp; 202. Second clamp; 203. First sealing ring; 204. Second sealing ring; 205. Sealing ring structure. Detailed Implementation

[0028] To enable those skilled in the art to better understand the present application, the technical solutions in specific embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings.

[0029] It should be noted that the terms "first," "second," and similar terms used in this application specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, "a" or "one," and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. "A plurality" or "several" indicates at least two. Unless otherwise stated, terms such as "front," "back," "left," "right," "lower," and / or "upper" are for illustrative purposes only and are not limited to a location or spatial orientation. Terms such as "comprising" or "including" indicate that the elements or objects preceding "comprising" encompass the elements or objects listed following "comprising" or "including" and their equivalents, and do not exclude other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect.

[0030] The singular forms “a,” “the,” and “the” used in this application specification and appended claims may also include one or more, unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used herein describes the relationship between related objects, indicating that three relationships may exist, for example, A and / or B, which can represent: A alone, A and B simultaneously, or B alone, where A and B can be singular or plural.

[0031] To clearly illustrate the technical solution of this application, the following are also defined: Figure 1 The left, right, top, and bottom are shown.

[0032] like Figure 1 and Figure 2 As shown, this application provides a vertical furnace tube 100, which includes a base 11, a wafer boat 12, a furnace body 13, a lifting mechanism 14, a temperature measuring element 15, and a heating element 16. The wafer boat 12 is adapted to carry wafers, and its bottom is connected to the base 11 so that the wafer boat 12 can be supported by the base 11.

[0033] The furnace body 13 is adapted to accommodate the crystal boat 12, allowing the wafers carried by the crystal boat 12 to undergo reaction within the furnace body 13. In this embodiment, the furnace body 13 can be detachably connected to the crystal boat 12. For example, when the crystal boat 12 is detached from the furnace body 13, the lifting mechanism 14 can drive the base 11 to rise and fall, thereby raising and lowering the crystal boat 12 to the position where the wafers are placed, thus achieving the loading of the wafers onto the crystal boat 12. When the crystal boat 12 is connected to the furnace body 13, a sealed reaction space can be formed between the crystal boat 12 and the furnace body 13, within which the wafers carried by the crystal boat 12 can undergo reaction.

[0034] Multiple temperature measuring elements 15 are provided. At least one temperature measuring element 15 is located at the top inside the furnace body 13 to detect the temperature at the top of the furnace body 13. At least one temperature measuring element 15 is located on the side wall inside the furnace body 13 to detect the temperature on the side of the furnace body 13. Thus, the temperature inside the furnace body 13 can be measured by multiple temperature measuring elements 15. In some embodiments, there are two temperature measuring elements 15 located on the side wall inside the furnace body 13, and the two temperature measuring elements 15 are arranged in a vertical direction. In some embodiments, the temperature measuring element 15 can be an infrared pyrometer.

[0035] Multiple heating elements 16 are provided, and these heating elements 16 can be installed at multiple locations inside the furnace body 13 to heat the internal space of the furnace body 13, thereby making the temperature inside the furnace body 13 more uniform. For example, the vertical furnace tube 100 of this application can independently control each heating element 16 based on the temperature detected by multiple temperature sensors 15, thereby ensuring that the temperature inside the furnace body 13 meets the reaction temperature of the wafer and that the temperature uniformity inside the furnace body 13 is high, thus forming a constant temperature zone inside the furnace body 13. In some embodiments, the heating element 16 can be a heater or other heat-generating component.

[0036] In some embodiments, the lifting mechanism 14 includes a lifting guide rail 141 and a guide rail seat 142. The guide rail seat 142 is connected to the furnace body 13 so that the guide rail seat 142 can be fixed. The lifting guide rail 141 is located within the guide rail seat 142 and can move relative to the guide rail seat 142, and the direction of movement is... Figure 1 The vertical direction shown refers to the lifting direction of the lifting mechanism 14. Figure 1 The vertical direction is shown. The base 11 is connected to the lifting guide rail 141 so that the lifting guide rail 141 can drive the base 11 to rise and fall, and drive the crystal boat 12 connected to the base 11 to rise and fall.

[0037] In some embodiments, two lifting guide rails 141 and two guide rail seats 142 are provided, with the two lifting guide rails 141 located on the left and right sides of the furnace body 13, and the two guide rail seats 142 also located on the left and right sides of the furnace body 13, thereby improving the lifting stability of the base 11 and the crystal boat 12.

[0038] In some embodiments, the lifting mechanism 14 may further include a screw 143 and a drive motor 144, wherein the drive motor 144 is connected to the screw 143 in a transmission manner, so that the drive motor 144 can drive the screw 143 to rotate. The lifting guide rail 141 is sleeved on the screw 143 and threadedly connected to the screw 143, so that the rotation of the screw 143 can drive the lifting guide rail 141 to move up and down, thereby realizing the lifting function of the lifting guide rail 141.

[0039] It should be noted that, due to the measurement intervals between the multiple temperature measuring elements 15, and also between the lowest temperature measuring element 15 and the bottom of the crystal boat 12, the internal temperature of the furnace body 13 cannot be obtained by the temperature measuring elements 15, either entirely or partially, within these measurement intervals. Furthermore, the accuracy of the internal temperature measurement of the furnace body 13 determines whether a constant temperature region can be formed inside the furnace body 13. Therefore, this application also provides a temperature measuring structure 200, which can detect the temperature within the aforementioned measurement intervals. By using the temperature measured by the temperature measuring structure 200 and the temperature measured by the temperature measuring elements 15, it is possible to determine whether a constant temperature region has been formed inside the furnace body 13, thereby improving the reaction stability and production quality of the wafer in the furnace body 13.

[0040] like Figure 2 and Figure 3 As shown, in one implementation, the temperature measuring structure 200 is suitable for measuring the temperature of a vertical furnace tube 100. In this application, since the crystal boat 12 is detachably connected to the base 11, for example, the crystal boat 12 and the base 11 can be detachably connected by bolts. Therefore, the crystal boat 12 can be separated from the base 11 and connected to the furnace body 13. At this time, the temperature measuring structure 200 can be connected to the base 11, so that the temperature measuring structure 200 can be driven by the lifting mechanism 14 to move up and down, thereby allowing the temperature measuring structure 200 to pass through the measurement interval between multiple temperature measuring elements 15, and to pass through the measurement interval between the lowest temperature measuring element 15 and the bottom of the crystal boat 12. This allows the temperature measuring structure 200 to detect the temperature within the aforementioned measurement interval, thereby improving the detection accuracy of the internal temperature of the furnace body 13.

[0041] Specifically, the temperature measuring structure 200 includes a temperature calibration element 21 with a preset length. The temperature calibration element 21 is at least partially located inside the furnace body 13. During the lifting and lowering process of the temperature measuring structure 200, the temperature calibration element 21 can measure the temperature of the area between any two temperature measuring elements 15. The temperature calibration element 21 can also measure the temperature of the area between the lowest temperature measuring element 15 and the bottom of the crystal boat 12.

[0042] In some embodiments, the temperature calibration element 21 may be a temperature calibration thermocouple.

[0043] In some embodiments, the preset length can be adjusted according to the height inside the furnace body 13. It is only necessary to enable the temperature calibration element 21 with the preset length to detect the temperature between any two temperature measuring elements 15 so as to satisfy the temperature detection at any position inside the furnace body 13.

[0044] It should be noted that the bottom of the crystal boat 12 has a temperature measuring hole 121 that can be sealed. The temperature calibration component 21 can enter the furnace body 13 through the temperature measuring hole 121 to detect the internal temperature of the furnace body 13.

[0045] With the above-described configuration, this application eliminates the need for a separate lifting device to drive the temperature measuring structure 200 to move up and down (i.e., lift), thus facilitating the alignment of the temperature calibration element 21 with the temperature measuring hole 121. Furthermore, the existing lifting mechanism 14 of the vertical furnace tube 100, used for loading, drives the temperature measuring structure 200, making its installation simpler and reducing installation difficulty. In addition, the existing lifting mechanism 14 of the vertical furnace tube 100 can accurately correspond to the coordinates of the temperature measuring point, thereby improving temperature measurement accuracy, which in turn improves the detection accuracy of the temperature calibration element 21.

[0046] As one implementation, since the furnace body 13 is in a high-temperature, low-pressure environment during the operation of the vertical furnace tube 100, and there are graphite components inside the furnace body 13, high airtightness is required during temperature calibration and measurement. Therefore, the temperature measurement structure 200 of this application includes a base 22 and a telescopic tube assembly 23. The base 22 is detachably connected to the base 11 and can support the telescopic tube assembly 23. The two ends of the telescopic tube assembly 23 are respectively connected to the base 22 and the crystal boat 12, and are sleeved on the temperature calibration component 21. The telescopic tube assembly 23 is adapted to extend and retract with the raising and lowering of the temperature calibration component 21 to close the space between the crystal boat 12 and the base 22 for accommodating the temperature calibration component 21. During the raising and lowering of the temperature calibration component 21, it needs to move up and down relative to the temperature measuring hole 121, so the telescopic tube assembly 23 can close the gap between the temperature calibration component 21 and the temperature measuring hole 121. With the above configuration, the portion of the temperature calibration element 21 located between the crystal boat 12 and the base 22 can be surrounded by the telescopic tube assembly 23, and can form a seal with the base 22 and the crystal boat 12, thereby improving the airtightness of the temperature calibration element 21 when measuring the internal temperature of the furnace body 13.

[0047] like Figure 2 , Figure 3 and Figure 4 As shown, in some embodiments, the telescopic tube assembly 23 includes a corrugated tube 231 and a fixing plate 232 connected to the corrugated tube 231. Specifically, the corrugated tube 231 includes a first corrugated portion 2311, a second corrugated portion 2312, and a rigid portion 2313 located between the first corrugated portion 2311 and the second corrugated portion 2312, and the fixing plate 232 is connected to the rigid portion 2313.

[0048] In this embodiment, both the first corrugated portion 2311 and the second corrugated portion 2312 are elastic, and the rigid portion 2313 can be made of a rigid material such as metal, so that the fixing plate 232 and the rigid portion 2313 can be rigidly connected to avoid the connection between the fixing plate 232 and the rigid portion 2313 from shifting.

[0049] Furthermore, the temperature measuring structure 200 includes a guide shaft 24, which is movably connected to the base 22 and fixed to the fixing plate 232. The guide shaft 24 can move relative to the base 22 along the lifting direction of the temperature calibration member 21 to limit the movement offset of the bellows 231. Specifically, the guide shaft 24 can limit the lateral offset of the fixing plate 232, and the fixing plate 232 is rigidly connected to the rigid part 2313. Therefore, the guide shaft 24 can limit the lateral offset of the bellows 231, which is beneficial to improving the expansion and contraction stability of the bellows 231.

[0050] In some embodiments, the temperature measuring structure 200 includes a linear bearing housing 25 connected to the base 22, and a guide shaft 24 slidably connected within the linear bearing housing 25. The linear bearing housing 25 can improve the movement accuracy of the guide shaft 24, that is, the linear bearing housing 25 can make the guide shaft 24 move along the axis of the linear bearing housing 25, thereby improving the movement accuracy of the bellows 231.

[0051] In some embodiments, two linear bearing seats 25 and two guide shafts 24 are provided, with each guide shaft 24 cooperating with a corresponding linear bearing seat 25. The two guide shafts 24 are respectively fixed to both ends of the fixing plate 232 and located on both sides of the bellows 231. Through the above arrangement, the lateral offset of the fixing plate 232 can be further limited, thereby further improving the movement accuracy of the bellows 231.

[0052] It should be noted that multiple linear bearing housings 25 and guide shafts 24 can be provided, and this application does not impose any restrictions.

[0053] like Figure 3 , Figure 4 and Figure 5 As shown, in one implementation, the bellows 231 has an upper flange 2314 and a lower flange 2315 at both ends. The upper flange 2314 is connected to the crystal boat 12. The temperature measuring structure 200 also includes a support plate 26 connected to the base 22. The support plate 26 has an elongated mounting hole 261. The lower flange 2315 is rotatably connected to an elongated mounting piece 27. The minimum width of the mounting piece 27 is equal to or less than the minimum width of the mounting hole 261. The maximum width of the mounting piece 27 is greater than the minimum width of the mounting hole 261. The mounting piece 27 passes through the mounting hole 261 and rotates to a fixed position. When the mounting piece 27 is in the fixed position, the maximum width direction of the mounting piece 27 is not parallel to the maximum width direction of the mounting hole 261.

[0054] In some embodiments, the mounting member 27 can be a rectangular block structure that is rotatably connected to the lower flange 2315. By rotating the mounting member 27, the length direction of the mounting member 27 is parallel to the length direction of the mounting hole 261, thereby enabling the mounting member 27 to engage with the mounting hole 261 to fix the position of the lower flange 2315.

[0055] It should be noted that the elongated mounting hole 261 allows the mounting component 27 to be adjusted in position along the length of the mounting hole 261, thereby allowing the center of the lower flange 2315 to offset from the center of the mounting hole 261. In this application, the lower flange 2315 is also sealed to the temperature calibration component 21 (described below). Therefore, through the above arrangement, the temperature calibration component 21 can be prevented from jamming or breaking due to bending moment.

[0056] In some embodiments, the arrangement of multiple linear bearing seats 25 and guide shafts 24 can make the up-and-down movement of the fixing plate 232 more precise, thereby making the extension and retraction of the bellows 231 and the lifting and lowering of the temperature calibration component 21 inside the bellows 231 more precise, and thus the temperature calibration component 21 can be prevented from jamming or breaking due to bending moment.

[0057] like Figure 3 and Figure 4 As shown, in one implementation, the temperature measuring structure 200 includes a first guide sleeve 291 and a second guide sleeve 292. The first guide sleeve 291 is located inside the first corrugated portion 2311 and the upper flange 2314, and the second guide sleeve 292 is located inside the second corrugated portion 2312 and the lower flange 2315. Both the first guide sleeve 291 and the second guide sleeve 292 are fitted onto and contact the temperature calibration component 21 to guide the temperature calibration component 21, thereby improving the lifting accuracy of the temperature calibration component 21 and making the alignment of the temperature calibration component 21 and the temperature measuring hole 121 more accurate, thus reducing the assembly difficulty of the temperature calibration component 21 and the temperature measuring hole 121.

[0058] In some embodiments, the first guide sleeve 291 abuts against the inner wall of the upper flange 2314, thereby allowing the first guide sleeve 291 to be positioned between the upper flange 2314 and the temperature calibration element 21, and to be in contact with both; simultaneously, the second guide sleeve 292 abuts against the inner wall of the lower flange 2315, thereby allowing the second guide sleeve 292 to be positioned between the lower flange 2315 and the temperature calibration element 21, and to be in contact with both. This configuration prevents the temperature calibration element 21 from shifting laterally during lifting, thus improving the stability of the lifting process and facilitating alignment between the temperature calibration element 21 and the measuring hole, reducing the installation difficulty of the temperature calibration element 21 and the measuring hole.

[0059] In this embodiment, the temperature measuring structure 200 includes a first clamp 201 and a second clamp 202. The first clamp 201 is clamped to the upper flange 2314 to clamp the upper flange 2314 and the first guide sleeve 291; the second clamp 202 is clamped to the lower flange 2315 to clamp the lower flange 2315 and the second guide sleeve 292.

[0060] In some embodiments, in order to improve the sealing performance of the upper flange 2314 and the lower flange 2315, the temperature measuring structure 200 of this application includes a first sealing ring 203 and a second sealing ring 204. The first sealing ring 203 is located between the upper flange 2314 and the first clamp 201, and the second sealing ring 204 is located between the lower flange 2315 and the second clamp 202. Thus, the sealing performance of the upper flange 2314 can be improved by the first sealing ring 203, and the sealing performance of the lower flange 2315 can be improved by the second sealing ring 204.

[0061] In this embodiment, the upper flange 2314 is connected to the crystal boat 12 via a flange interface.

[0062] like Figure 2 , Figure 3 and Figure 4 As shown, in one implementation, the temperature calibration element 21 includes a temperature measuring part 211 that passes through the first guide sleeve 291, the second guide sleeve 292, the crystal boat 12, and the furnace body 13. The temperature measuring part 211 has multiple temperature measuring points, which can measure the temperature of the area between any two temperature measuring elements 15. These points can also measure the temperature of the area between the lowest temperature measuring element 15 and the bottom of the crystal boat 12. The temperature measuring part 211 can pass through the temperature measuring hole 121 at the bottom of the crystal boat 12 and enter the crystal boat 12 and the furnace body 13.

[0063] In some embodiments, the number of temperature measuring points can be adjusted according to actual needs, thereby enabling temperature measurement at any location inside the furnace body 13.

[0064] As one implementation, the temperature calibration component 21 also includes a fixing part 212 located below the base 22. The fixing part 212 is connected to the lower flange 2315, and a sealing ring structure 205 is provided at the connection between the two, so that the fixing part 212 and the lower flange 2315 can be sealed through the sealing ring structure 205.

[0065] In summary, the temperature measuring structure 200 of this application can be driven to move by the existing lifting mechanism 14 of the vertical furnace tube 100, thereby simplifying the installation of the temperature measuring structure 200 and reducing the installation difficulty. It can also accurately correspond to the coordinate values ​​of the temperature measuring point, thus improving the temperature measuring accuracy, which in turn improves the detection accuracy of the temperature calibration component 21. Simultaneously, the guide shaft 24 and the fixing plate 232 allow for higher extension and contraction accuracy of the bellows 231, preventing lateral displacement and thus preventing the temperature calibration component 21 from jamming or breaking due to bending moment. Furthermore, the first guide sleeve 291 and the second guide sleeve 292 can also cooperate with the bellows 231 to further improve the lifting accuracy of the temperature calibration component 21.

[0066] In this application, during the rising process of the temperature calibration element 21, the bellows 231 can be stretched (see reference). Figure 6 During the descent of the temperature-regulating element 21, the bellows 231 can be compressed (see reference). Figure 7 This ensures that during the lifting and lowering of the temperature calibration component 21, the bellows 231 can always maintain the seal of the space where the temperature calibration component 21 is located, thereby improving the sealing performance of the temperature calibration component 21 during operation.

[0067] It should be noted that in this application, the connection between the guide shaft 24 and the fixed plate 232, the connection between the support plate 26 and the base 22, the connection between the linear bearing seat 25 and the base 22, and the connection between the base 22 and the base 11 can all be made by bolts, thereby improving the assembly efficiency between the above components.

[0068] In this application, the installation process of the temperature measuring structure 200 is as follows:

[0069] First, connect the crystal boat 12 to the furnace body 13 to fix the relative positions of the crystal boat 12 and the furnace body 13;

[0070] Secondly, the crystal boat 12 is separated from the base 11 so that the lifting mechanism 14 will not move the crystal boat 12 when it lifts and lowers the base 11.

[0071] Then, the temperature measuring part 211 of the temperature measuring structure 200 passes through the temperature measuring hole 121 at the bottom of the crystal boat 12 and enters the crystal boat 12 and the furnace body 13;

[0072] Finally, the temperature measuring structure 200 is connected to the base 11, so that when the lifting mechanism 14 lifts the base 11, it can lift the temperature measuring part 211 of the temperature measuring structure 200 within the furnace body 13.

[0073] Based on the installation process of the temperature measuring structure 200 described above, such as Figure 8 As shown, as one implementation, this application also provides a temperature measurement method for the temperature measuring structure 200, which includes the following steps:

[0074] S1. Connect the crystal boat 12 to the furnace body 13, and separate the crystal boat 12 from the base 11;

[0075] S2. Connect the temperature measuring structure 200 to the base 11 so that the temperature measuring structure 200 can be driven to rise and fall through the lifting mechanism 14;

[0076] S3. The temperature measuring structure 200 measures the temperature of the area between any two temperature measuring elements 15 during the lifting and lowering process, as well as the temperature of the area between the lowest temperature measuring element 15 and the bottom of the crystal boat 12.

[0077] With the above settings, the temperature measuring structure 200 can be moved by the original lifting mechanism 14 for feeding material in the vertical furnace tube 100, which makes the installation of the temperature measuring structure 200 easier and reduces the installation difficulty of the temperature measuring structure 200; and can accurately correspond to the coordinate value of the temperature measuring point, thereby improving the temperature measuring accuracy.

[0078] In some embodiments, the temperature measurement method further includes the following steps:

[0079] S4. Based on the measured temperature of the temperature measuring structure 200 and the temperature measuring element 15, control the working state of the heating element 16 so that a constant temperature zone is formed inside the furnace body 13.

[0080] It should be understood that those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. A temperature measuring structure (200) suitable for temperature measurement of vertical furnace tubes (100), Its features are, The temperature measuring structure (200) can be connected to the base (11) of the vertical furnace tube (100), so that the temperature measuring structure (200) can be driven by the lifting mechanism (14) of the vertical furnace tube (100) to be lifted and lowered. The temperature measuring structure (200) includes a temperature calibration element (21) with a preset length. The temperature calibration element (21) is at least partially located inside the furnace body (13) of the vertical furnace tube (100). During the lifting and lowering process of the temperature measuring structure (200), the temperature calibration element (21) can measure the temperature of the area between any two temperature measuring elements (15) of the vertical furnace tube (100). The temperature calibration element (21) can also measure the temperature of the area between the lowest temperature measuring element (15) and the bottom of the crystal boat (12) of the vertical furnace tube (100).

2. The temperature measuring structure (200) according to claim 1, characterized in that, The temperature measuring structure (200) includes: The base (22) is a detachable base (11) connected to the vertical furnace tube (100); The telescopic tube assembly (23) is connected at both ends to the base (22) and the crystal boat (12) respectively, and is sleeved on the temperature calibration member (21). The telescopic tube assembly (23) is adapted to extend and retract with the rise and fall of the temperature calibration member (21) to close the space between the crystal boat (12) and the base (22) for accommodating the temperature calibration member (21).

3. The temperature measuring structure (200) according to claim 2, characterized in that, The telescopic tube assembly (23) includes: A bellows (231) includes a first corrugated portion (2311), a second corrugated portion (2312), and a rigid portion (2313) located between the first corrugated portion (2311) and the second corrugated portion (2312); A fixing plate (232) is connected to the rigid part (2313); The temperature measuring structure (200) includes a guide shaft (24), which is movably connected to the base (22) and fixed to the fixing plate (232). The guide shaft (24) can move relative to the base (22) along the lifting direction of the temperature calibration member (21) to limit the movement offset of the bellows (231).

4. The temperature measuring structure (200) according to claim 3, characterized in that, The temperature measuring structure (200) includes a linear bearing seat (25) connected to the base (22), and the guide shaft (24) is slidably connected to the linear bearing seat (25); Two linear bearing seats (25) and two guide shafts (24) are provided. Each guide shaft (24) is matched with a corresponding linear bearing seat (25). The two guide shafts (24) are respectively fixed at both ends of the fixing plate (232) and located on both sides of the bellows (231).

5. The temperature measuring structure (200) according to claim 3, characterized in that, The corrugated pipe (231) is provided with an upper flange (2314) and a lower flange (2315) at both ends. The upper flange (2314) is connected to the crystal boat (12). The temperature measuring structure (200) also includes a support plate (26) connected to the base (22). The support plate (26) has an elongated mounting hole (261). The lower flange (2315) is rotatably connected to an elongated mounting component (27). The mounting component (27) passes through the mounting hole (261) and rotates to a fixed position. When the mounting component (27) is in the fixed position, the maximum width direction of the mounting component (27) is not parallel to the maximum width direction of the mounting hole (261).

6. The temperature measuring structure (200) according to claim 5, characterized in that, The temperature measuring structure (200) includes a first guide sleeve (291) and a second guide sleeve (292). The first guide sleeve (291) is located inside the first corrugated portion (2311) and the upper flange (2314), and the second guide sleeve (292) is located inside the second corrugated portion (2312) and the lower flange (2315). Both the first guide sleeve (291) and the second guide sleeve (292) are fitted onto and contact the temperature calibration element (21) to guide the temperature calibration element (21).

7. The temperature measuring structure (200) according to claim 6, characterized in that, The temperature measuring structure (200) includes a first clamp (201) and a second clamp (202). The first clamp (201) is engaged with the upper flange (2314) to secure the upper flange (2314) and the first guide sleeve (291). The second clamp (202) is engaged with the lower flange (2315) to secure the lower flange (2315) and the second guide sleeve (292).

8. The temperature measuring structure (200) according to claim 7, characterized in that, The temperature measuring structure (200) includes a first sealing ring (203) and a second sealing ring (204). The first sealing ring (203) is located between the upper flange (2314) and the first clamp (201), and the second sealing ring (204) is located between the lower flange (2315) and the second clamp (202).

9. The temperature measuring structure (200) according to claim 6, characterized in that, The temperature calibration component (21) includes a fixing part (212) located below the base (22) and a temperature measuring part (211) passing through the first guide sleeve (291), the second guide sleeve (292), the crystal boat (12) and the furnace body (13). The temperature measuring part (211) is provided with multiple temperature measuring points. The multiple temperature measuring points can measure the temperature of the area between any two temperature measuring components (15). The multiple temperature measuring points can also measure the temperature of the area between the lowest temperature measuring component (15) and the bottom of the crystal boat (12). The fixing part (212) is connected to the lower flange (2315), and a sealing ring structure (205) is provided at the connection between the two.

10. A vertical furnace tube (100), comprising: Base (11); Crystal boat (12), the bottom of which is connected to base (11); The furnace body (13) is adapted to accommodate the crystal boat (12) and is detachably connected to the crystal boat (12); The lifting mechanism (14) can drive the base (11) to lift and lower when the crystal boat (12) is disassembled from the furnace body (13) so as to drive the crystal boat (12) to lift and lower. Multiple temperature measuring elements (15), at least one of the temperature measuring elements (15) is located at the top inside the furnace body (13), and at least one of the temperature measuring elements (15) is located on the side wall inside the furnace body (13) to measure the temperature inside the furnace body (13); as well as Multiple heating elements (16) are installed at multiple locations inside the furnace body (13) to heat the internal space of the furnace body (13); Its features are, The vertical furnace tube (100) further includes a temperature measuring structure (200) as described in any one of claims 1 to 9.

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