Piezoelectric ceramic driving-based fast steering mirror driving structure and control method

Abstract

The invention discloses a fast reflecting mirror driving structure based on piezoelectric ceramic driving and a control method. The structure comprises a mirror surface supporting frame, a flexible threaded supporting rod, a reset plate spring, an adapter plate, a displacement amplification hinge, a wedge-shaped pre-tightening block, a bonding strain sheet piezoelectric driver, a mounting seat and a bottom cover plate. The mirror surface support frame is used for mounting a reflecting lens; the reset plate spring is placed on the bottom face of the mirror face supporting frame, penetrates through the flexible threaded supporting rod and then is fastened through a nut. One end of the flexible threaded supporting rod acts on the adapter plate; the displacement amplification hinge is internally provided with a bonding strain sheet piezoelectric actuator; the displacement amplification hinge is asymmetrically arranged in the mounting hole position of the mounting seat, the moving end of the displacement amplification hinge is fastened with the adapter plate through a bolt, and the displacement amplification hinge is used for providing multi-degree-of-freedom micro-displacement drive and realizing high-precision elastic support; and the reset plate spring is connected with the mounting seat through a bolt and is used for keeping X and Y axes and resetting at a zero point during movement. The device is compact in structure, small in appearance size, light in weight and high in stability and reliability.

Description

Technical Field

[0001] The present invention relates to the technical field of piezoelectric ceramics, and in particular to a fast-reflecting mirror driving structure and a control method based on piezoelectric ceramic driving. Background Art

[0002] 1. Principle of piezoelectric effect

[0003] Stacked piezoelectric ceramics are a special type of piezoelectric material, composed of multiple stacked piezoelectric ceramic sheets. They exhibit excellent electromechanical coupling properties. Applying pressure to the surface of a piezoelectric material generates an electric charge, known as the direct piezoelectric effect, also known as the generator or sensor effect, converting mechanical energy into electrical energy. Conversely, applying a certain voltage causes the inverse piezoelectric effect to change the length of the material. This actuator effect converts electrical energy into mechanical energy. This characteristic can be exploited to measure the displacement and output force of piezoelectric ceramics.

[0004] 2. Structural characteristics of piezoelectric ceramic fast mirror

[0005] The piezoelectric ceramic fast-reflecting mirror is an optical control system that uses the inverse piezoelectric effect of piezoelectric ceramics to achieve high-precision, fast angular deflection. The ceramic is installed in a displacement-amplifying flexible hinge, which reverses the output displacement direction of the piezoelectric ceramic and amplifies the output displacement. The flexible hinge can provide elastic support, allowing slight deflection of the mirror while avoiding mechanical friction and hysteresis.

[0006] 3. Piezoelectric ceramic fast mirror movement mode

[0007] For single-axis deflection, one pair of actuators extends and the other pair shortens, causing the mirror to rotate around its axis. This deflection is performed along the XY axis.

[0008] Dual-axis deflection independently controls multiple sets of drivers to achieve two-dimensional angle adjustment.

[0009] The deflection angle is typically measured in milliradians (mrad), with a resolution down to microradians (μrad).

[0010] Problems with existing technologies: Fast-reflection mirrors driven by traditional voice coil or servo motors suffer from slow response speeds (typically >1ms), significant mechanical hysteresis, and bulky design. Electromagnetic drive is susceptible to electromagnetic interference, and high-precision control requires complex feedback systems. Existing piezoelectric ceramic drive solutions suffer from fatigue-prone hinge structures and severe multi-degree-of-freedom coupling. Summary of the Invention

[0011] The technical problem to be solved by the present invention is to provide a fast-reflecting mirror drive structure and control method based on piezoelectric ceramic drive to achieve fast response and high-frequency compensation. Traditional mechanical mirrors have large inertia and slow response, making it difficult to cope with high-frequency vibrations or rapid dynamic deviations. The piezoelectric ceramic driver utilizes the inverse piezoelectric effect (electric field → deformation) to achieve microsecond response, significantly improving the system bandwidth (usually reaching hundreds of Hz or even kHz), suitable for real-time compensation of beam jitter or platform vibration. Nanoscale positioning accuracy: The micro-deformation resolution of piezoelectric ceramics can reach sub-nanometer level. Combined with closed-loop control technology (strain gauge feedback), the mirror can achieve ultra-precision angle adjustment (μrad level), meeting the requirements of high-resolution imaging or precision machining. Compact structure and frictionless drive: The piezoelectric ceramic driver does not require traditional mechanical transmission components (such as gears and bearings). It has a simple and compact structure and is free of friction and wear problems, which improves reliability and lifespan, making it suitable for systems with limited space or long life requirements. It is applied in scenarios such as laser communication, adaptive optics, precision tracking, line of sight stabilization, and micro-scanning.

[0012] In order to solve the above technical problems, the first aspect of the embodiment of the present invention discloses a fast mirror drive structure based on piezoelectric ceramic drive, which includes a mirror support frame, a flexible threaded support rod, a reset leaf spring, an adapter plate, a displacement amplification hinge, a wedge-shaped preload block, a piezoelectric driver with a bonded strain gauge, a mounting seat and a bottom cover plate;

[0013] The mirror support frame is used to install the reflective lens;

[0014] The reset leaf spring is placed on the bottom surface of the mirror support frame and inserted into the flexible threaded support rod and then fastened with a nut;

[0015] One end of the flexible threaded support rod acts on the adapter plate;

[0016] A piezoelectric driver bonded with a strain gauge and two wedge-shaped preload blocks are installed inside the displacement amplification hinge. The oblique edges of the two wedge-shaped preload blocks are in contact with each other. The right-angled edge of one wedge-shaped preload block acts on the piezoelectric driver, and the right-angled edge of the other wedge-shaped preload block acts on the displacement amplification hinge.

[0017] The wedge-shaped preload block adjusts the contact preload force between the piezoelectric actuator and the displacement amplification hinge;

[0018] The displacement amplification hinge is asymmetrically arranged in the mounting hole of the mounting base;

[0019] The displacement amplification hinge moving end and the adapter plate are fastened with bolts to provide multi-degree-of-freedom micro-displacement drive and achieve high-precision elastic support;

[0020] The reset leaf spring is connected to the mounting base with bolts and is used to maintain the XY axes and reset the zero point during movement;

[0021] The bottom cover plate is installed in coordination with the mounting base;

[0022] The strain gauge of the piezoelectric driver is bonded to the strain gauge, which is used to detect the ceramic displacement in real time and control the deflection angle of the lens. The control circuit adjusts the driving voltage of the piezoelectric driver in a closed loop according to the feedback signal of the strain gauge;

[0023] The upper and lower ends of the flexible threaded support rod are fastened with nuts, and four reset leaf springs made of stainless steel elastic material are installed on the threaded end surface above the flexible threaded support rod, and the upper side of the reset leaf spring is fixed to the lens bracket.

[0024] As an optional embodiment, in the first aspect of the embodiment of the present invention, the bonded strain gauge piezoelectric driver is a laminated piezoelectric ceramic with a driving voltage range of 0-150V and a displacement resolution better than 10μrad, and is installed in a displacement amplification hinge.

[0025] As an optional implementation, in the first aspect of the embodiment of the present invention, the displacement amplification hinge adopts a double parallel four-bar structure, which is directional deformable and meets the requirements of stiffness for use.

[0026] As an optional implementation, in the first aspect of the embodiment of the present invention, the displacement amplifying hinge is fixedly assembled with the adapter plate and the flexible threaded support rod and then arranged in a staggered manner in the mounting holes of the mounting seat.

[0027] As an optional implementation, in the first aspect of the embodiment of the present invention, the displacement amplification hinge can change the displacement direction of the bonded strain gauge piezoelectric driver and increase the motion stroke;

[0028] The adapter plate can change the staggered arrangement displacement to enlarge the hinge placement angle, and extend inward to reduce the mirror support frame hole position, and enlarge the displacement to increase the lens deflection angle;

[0029] The cylindrical structure in the middle of the flexible threaded support rod is used to meet the requirements of decoupled motion.

[0030] As an optional embodiment, in the first aspect of the embodiment of the present invention, a strain gauge is pasted on the bonded strain gauge piezoelectric driver, and the strain gauge senses the deformation of the bonded strain gauge piezoelectric driver to measure the actual change in the motion process and the rotation angle of the main reflector.

[0031] As an optional implementation, in the first aspect of the embodiment of the present invention, there are four flexible threaded support rods, adapter plates, displacement amplification hinges, and bonded strain gauge piezoelectric drivers, and the center of the displacement amplification hinge hole coincides with the XY axis.

[0032] A second aspect of an embodiment of the present invention discloses a method for controlling a fast-reflection mirror drive based on piezoelectric ceramic drive, the method comprising:

[0033] Taking the X-axis forward deflection at a certain angle as an example, the control method is as follows: after the controller is powered on, the MCU first reads the sensor feedback voltage value and converts it into an angle value, using the current feedback value as the zero point. When the controller receives the X-axis forward deflection command sent by the host computer or the operation screen, it controls the X1 and X2 piezoelectric ceramics to extend and shorten respectively according to the feedback value, controlling the deflection surface to deflect forward with the X-axis as the centerline. The PID closed loop is performed in real time based on the sensor feedback value. When the preset angle value is reached, the piezoelectric ceramic drive voltage maintains the current angle, and the system is always in a closed loop state.

[0034] The same applies to the X-axis reverse deflection or Y-axis forward and reverse deflection operations.

[0035] Compared with the prior art, the embodiments of the present invention have the following beneficial effects:

[0036] This invention provides a piezoelectric ceramic-driven fast-reflection mirror drive structure and control method. By optimizing the rigidity of the flexible mechanism and implementing real-time compensation for multiple parameters, it achieves submicroradian pointing accuracy, making it suitable for high-end applications such as satellite laser communications. The invention boasts a compact structure, small dimensions, and lightweight. Its unique internal structural arrangement reduces the size of the mirror, enabling high-precision beam control, rapid response, and high stability and reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0038] Figure 1 This is a schematic diagram of a fast-reflecting mirror driving structure based on piezoelectric ceramic drive disclosed in an embodiment of the present invention;

[0039] Figure 2 This is a schematic diagram of the appearance of a piezoelectric ceramic-driven fast-reflecting mirror disclosed in an embodiment of the present invention;

[0040] Figure 3 Schematic diagram of the displacement amplifying flexible hinge structure disclosed in an embodiment of the present invention;

[0041] Figure 4 is a flow chart of a control system disclosed in an embodiment of the present invention;

[0042] Figure 5 It is a schematic diagram of a control system disclosed in an embodiment of the present invention. DETAILED DESCRIPTION

[0043] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts shall fall within the scope of protection of the present invention.

[0044] The terms "first," "second," and so on, in the description and claims of the present invention and the accompanying drawings are used to distinguish between different objects, not to describe a specific order. Furthermore, the terms "including," "having," and any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, apparatus, product, or device comprising a series of steps or elements is not limited to the listed steps or elements but may optionally include steps or elements not listed, or may optionally include other steps or elements inherent to the process, method, product, or device.

[0045] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present invention. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute a separate or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0046] The present invention discloses a piezoelectric ceramic-driven fast-reflecting mirror drive structure and control method. The structure includes a mirror support frame, a flexible threaded support rod, a reset leaf spring, an adapter plate, a displacement amplification hinge, a wedge-shaped preload block, a bonded strain gauge piezoelectric driver, a mounting seat, and a bottom cover plate. The mirror support frame is used to mount a reflective lens. The reset leaf spring is placed on the bottom surface of the mirror support frame and inserted into the flexible threaded support rod and then fastened with a nut. One end of the flexible threaded support rod acts on the adapter plate. The bonded strain gauge piezoelectric driver is installed inside the displacement amplification hinge. The displacement amplification hinge is asymmetrically arranged in the mounting hole of the mounting seat. The moving end and the adapter plate are fastened with bolts to provide multi-degree-of-freedom micro-displacement drive and achieve high-precision elastic support. The reset leaf spring is connected to the mounting seat with bolts and is used to maintain and reset the XY axes to zero during movement. The present invention has a compact structure, small dimensions, light weight, and high stability and reliability. Detailed descriptions are given below.

[0047] Example 1

[0048] See also Figure 1 , Figure 1 This is a schematic diagram of a fast mirror drive structure based on piezoelectric ceramic drive disclosed in an embodiment of the present invention. Figure 1The described fast mirror driving structure based on piezoelectric ceramic drive is applied to the field of piezoelectric ceramic technology, and the embodiments of the present invention do not limit it. Figure 1 As shown, the piezoelectric ceramic-driven fast mirror driving structure includes a mirror support frame, a flexible threaded support rod, a reset leaf spring, an adapter plate, a displacement amplification hinge, a wedge-shaped preload block, a bonded strain gauge piezoelectric driver, a mounting seat and a bottom cover plate;

[0049] The mirror support frame is used to install the reflective lens;

[0050] The reset leaf spring is placed on the bottom surface of the mirror support frame and inserted into the flexible threaded support rod and then fastened with a nut;

[0051] One end of the flexible threaded support rod acts on the adapter plate;

[0052] A piezoelectric driver bonded with a strain gauge and two wedge-shaped preload blocks are installed inside the displacement amplification hinge. The oblique edges of the two wedge-shaped preload blocks are in contact with each other. The right-angled edge of one wedge-shaped preload block acts on the piezoelectric driver, and the right-angled edge of the other wedge-shaped preload block acts on the displacement amplification hinge.

[0053] The wedge-shaped preload block adjusts the contact preload force between the piezoelectric actuator and the displacement amplification hinge;

[0054] The displacement amplification hinge is asymmetrically arranged in the mounting hole of the mounting base;

[0055] The displacement amplification hinge moving end and the adapter plate are fastened with bolts to provide multi-degree-of-freedom micro-displacement drive and achieve high-precision elastic support;

[0056] The reset leaf spring is connected to the mounting base with bolts and is used to maintain the XY axes and reset the zero point during movement;

[0057] The bottom cover plate is installed in coordination with the mounting base;

[0058] The strain gauge of the piezoelectric driver is bonded to the strain gauge, which is used to detect the ceramic displacement in real time and control the deflection angle of the lens. The control circuit adjusts the driving voltage of the piezoelectric driver in a closed loop according to the feedback signal of the strain gauge;

[0059] The upper and lower ends of the flexible threaded support rod are fastened with nuts, and four reset leaf springs made of stainless steel elastic material are installed on the threaded end surface above the flexible threaded support rod, and the upper side of the reset leaf spring is fixed to the lens bracket.

[0060] Optionally, the bonded strain gauge piezoelectric driver is a laminated piezoelectric ceramic with a driving voltage range of 0-150V and a displacement resolution greater than 10μrad, and is installed in a displacement amplification hinge.

[0061] Optionally, the displacement amplification hinge adopts a double parallel four-link structure, which is directional deformable and meets the requirements of stiffness for use.

[0062] Optionally, after the displacement amplifying hinge is fixedly assembled with the adapter plate and the flexible threaded support rod, it is arranged in a staggered manner in the mounting holes of the mounting seat.

[0063] Optionally, the displacement amplification hinge can change the displacement direction of the bonded strain gauge piezoelectric driver and increase the motion stroke;

[0064] The adapter plate can change the staggered arrangement displacement to enlarge the hinge placement angle, and extend inward to reduce the mirror support frame hole position, and enlarge the displacement to increase the lens deflection angle;

[0065] The cylindrical structure in the middle of the flexible threaded support rod is used to meet the requirements of decoupled motion.

[0066] Optionally, a strain gauge is attached to the bonded strain gauge piezoelectric driver, and the strain gauge senses the deformation of the bonded strain gauge piezoelectric driver to measure the actual motion process change and calibrate the rotation angle of the main reflector.

[0067] Optionally, there are four flexible threaded support rods, adapter plates, displacement amplifying hinges, and bonded strain gauge piezoelectric drivers, and the center of the matching hole of the displacement amplifying hinge coincides with the XY axis.

[0068] Example 2

[0069] This embodiment discloses a method for controlling a fast-reflection mirror drive based on piezoelectric ceramic drive, the method comprising:

[0070] Taking the X-axis forward deflection at a certain angle as an example, the control method is as follows: after the controller is turned on, the MCU (microcontroller unit) first reads the sensor feedback voltage value and converts it into an angle value, and uses the current feedback value as the zero point. When the controller receives the X-axis forward deflection instruction sent by the host computer or the operation screen, it controls the X1 piezoelectric ceramic and the X2 piezoelectric ceramic to extend and shorten respectively according to the feedback value, controls the deflection surface to deflect forward with the X-axis as the center line, and performs a PID (proportional-integral-differential) closed loop in real time according to the sensor feedback value. When the preset angle value is reached, the piezoelectric ceramic drive voltage maintains the current angle, and the system is always in a closed loop state.

[0071] The same applies to the X-axis reverse deflection or Y-axis forward and reverse deflection operations.

[0072] It can be seen that the present invention can achieve fast response and high-frequency compensation. Traditional mechanical mirrors have large inertia and slow response, making it difficult to cope with high-frequency vibrations or rapid dynamic deviations. The piezoelectric ceramic driver uses the inverse piezoelectric effect (electric field → deformation) to achieve microsecond response, significantly improving the system bandwidth (usually hundreds of Hz or even kHz), which is suitable for real-time compensation of beam jitter or platform vibration. Nanoscale positioning accuracy, the micro-deformation resolution of piezoelectric ceramics can reach sub-nanometer level. Combined with closed-loop control technology (strain gauge feedback), the mirror can achieve ultra-precision angle adjustment (μrad level) to meet the requirements of high-resolution imaging or precision machining. Compact structure and frictionless drive, the piezoelectric ceramic driver does not require traditional mechanical transmission components (such as gears and bearings), has a simple and compact structure, and no friction and wear problems, which improves reliability and life, and is suitable for systems with limited space or long life requirements. It is used in scenarios such as laser communication, adaptive optics, precision tracking, line of sight stabilization, and micro-scanning.

[0073] Example 3

[0074] The core structure of the piezoelectric ceramic fast reflector in this embodiment is detailed in Figure 1 It consists of a piezoelectric ceramic driver, a flexible hinge mechanism, a lens base, a mounting seat, and an outer shell. Figure 2 This is a schematic diagram of the appearance of a fast-reflecting mirror based on piezoelectric ceramic drive disclosed in an embodiment of the present invention;

[0075] Piezoelectric ceramic driver: It uses multi-layer stacked PZT and cooperates with a special wedge-shaped pre-tightening block to solve the problem of nonlinear displacement output.

[0076] Flexible hinge mechanism: displacement amplification flexible hinge (see Figure 3 ), the material is titanium alloy, the stress distribution is optimized through finite element analysis, and a staggered arrangement is adopted to reduce the size of the lens base through conversion so that smaller lenses can be installed and the secondary displacement amplification increases the lens deflection angle.

[0077] Lens base: Ultra-lightweight design ensures structural strength while reducing the weight of the output end.

[0078] The internal hinges adopt an asymmetric staggered structural layout to reduce the overall size and optimize space.

[0079] The independent flexible threaded support rod decouples the XY direction and facilitates the adjustment of the lens height.

[0080] There are two control modes: open-loop control, which is driven directly by the input voltage and has low cost but the accuracy is affected by the nonlinearity of the ceramic; closed-loop control, which corrects the position in real time through feedback from the strain gauge sensor to overcome hysteresis and creep.

[0081] Performance indicators

[0082] Open loop stroke 11mrad, closed loop stroke 10mrad

[0083] Resolution 10μrad

[0084] Resonant frequency 1800HZ

[0085] After adding the reflector load, the resonant frequency is 790HZ

[0086] Voltage range: -20~150V

[0087] Working environment: -55℃~65℃

[0088] Displacement hysteresis: ±15%

[0089] The interaction between the structures

[0090] Four displacement amplifying hinges are ceramic bonded to the strain gauges, and four displacement amplifying hinges are connected to the mounting base ( Figure 1 Serial No. 8) is fixed with bolts, and the four displacement amplification hinges are installed at the moving end with adapter plates ( Figure 1 No. 4), the flexible threaded support rod is connected to the top of the adapter plate ( Figure 1 No. 2) The upper and lower ends of the flexible threaded support rod are fastened with nuts. Four reset leaf springs made of stainless steel elastic material are installed on the threaded end surface above the flexible threaded support rod. The upper side of the reset leaf spring is fixed to the lens bracket.

[0091] 1. Assembly steps:

[0092] The PZT actuator (model DMDTH-050520) was glued to the displacement amplification hinge by epoxy resin.

[0093] Adjust the wedge-shaped preload block to apply 10% preload force to the ceramic.

[0094] Install the remaining mechanical parts.

[0095] The laser collimator calibrates the initial position of the mirror.

[0096] 2. Control parameters:

[0097] The DC sampling drive frequency is 1Hz, the voltage is 150V, the lens swing angle is 5.03mrad, and the total stroke is 10.06mrad.

[0098] Fast mirror power driver

[0099] The dedicated driver for piezoelectric ceramic loads adopts digital control mode and is internally controlled by a high-speed microprocessor, resulting in fast response.

[0100] Built-in USB and RS232 communication interfaces, millisecond-level communication command response speed.

[0101] The easy-to-install form factor can be flexibly placed on a desktop, optical table or integrated into a control cabinet.

[0102] 16-bit voltage output and sensor feedback resolution can accurately control the output at the millivolt level.

[0103] The output voltage range is -20 to +150V and is suitable for a variety of piezoelectric loads.

[0104] The output stability and linearity are better than 0.1%, suitable for high-precision control.

[0105] The ripple noise is less than 5mV and the output voltage resolution is 5mV.

[0106] Single-channel high current output, capable of driving large sudden loads for a long time

[0107] Output voltage is transmitted back, and the output can be remotely monitored to see if it is normal

[0108] The drive output non-attenuation bandwidth is up to 10Khz (actual use needs to consider the load size).

[0109] High-speed serial communication, the response time from host computer command to output is less than 1ms.

[0110] Supports digital servo control and can choose from a variety of sensor types.

[0111] The sensor voltage resolution can reach below 2mV, which facilitates precise control.

[0112] External sensor debugging interface allows for on-site debugging.

[0113] Provide OEM customized services, and flexibly customize communication / output interfaces and sensor types.

[0114] The device embodiments described above are merely illustrative. Modules described as separate components may or may not be physically separate, and components shown as modules may or may not be physical modules, i.e., they may be located in one place or distributed across multiple network modules. Some or all of the modules may be selected based on actual needs to achieve the objectives of the present embodiment. Persons of ordinary skill in the art will be able to understand and implement the present invention without inventive effort.

[0115] Finally, it should be noted that the piezoelectric ceramic-driven fast-reflector drive structure and control method disclosed in the embodiments of the present invention are merely preferred embodiments of the present invention, and are intended only to illustrate the technical solutions of the present invention, rather than to limit them. Although the present invention has been described in detail with reference to the aforementioned embodiments, it should be understood by those skilled in the art that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features thereof may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A fast mirror drive structure based on piezoelectric ceramic drive, characterized in that: The structure includes a mirror support frame, a flexible threaded support rod, a reset leaf spring, an adapter plate, a displacement amplification hinge, a wedge-shaped preload block, a bonded strain gauge piezoelectric driver, a mounting seat and a bottom cover plate; The mirror support frame is used to install the reflective lens; The reset leaf spring is placed on the bottom surface of the mirror support frame and inserted into the flexible threaded support rod and then fastened with a nut; One end of the flexible threaded support rod acts on the adapter plate; A piezoelectric driver bonded with a strain gauge and two wedge-shaped preload blocks are installed inside the displacement amplification hinge. The oblique edges of the two wedge-shaped preload blocks are in contact with each other. The right-angled edge of one wedge-shaped preload block acts on the piezoelectric driver, and the right-angled edge of the other wedge-shaped preload block acts on the displacement amplification hinge. The wedge-shaped preload block adjusts the contact preload force between the piezoelectric actuator and the displacement amplification hinge; The displacement amplification hinge is asymmetrically arranged in the mounting hole of the mounting base; The displacement amplification hinge moving end and the adapter plate are fastened with bolts to provide multi-degree-of-freedom micro-displacement drive and achieve high-precision elastic support; The reset leaf spring is connected to the mounting base with bolts and is used to maintain the XY axes and reset the zero point during movement; The bottom cover plate is installed in coordination with the mounting base; The strain gauge of the piezoelectric driver is bonded to the strain gauge, which is used to detect the ceramic displacement in real time and control the deflection angle of the lens. The control circuit adjusts the driving voltage of the piezoelectric driver in a closed loop according to the feedback signal of the strain gauge; The upper and lower ends of the flexible threaded support rod are fastened with nuts, and four reset leaf springs made of stainless steel elastic material are installed on the threaded end surface above the flexible threaded support rod, and the upper side of the reset leaf spring is fixed to the lens bracket.

2. The fast-reflection mirror driving structure based on piezoelectric ceramic driving according to claim 1, characterized in that: The bonded strain gauge piezoelectric driver is a laminated piezoelectric ceramic with a driving voltage range of 0-150V and a displacement resolution greater than 10μrad, and is installed in a displacement amplification hinge.

3. The fast mirror driving structure based on piezoelectric ceramic driving according to claim 1, characterized in that: The displacement amplification hinge adopts a double parallel four-link structure, which has directional deformation and meets the requirements of stiffness in use.

4. The fast-reflection mirror driving structure based on piezoelectric ceramic driving according to claim 1, characterized in that: After the displacement amplifying hinge is fixedly assembled with the adapter plate and the flexible threaded support rod, it is arranged in a staggered manner in the mounting holes of the mounting seat.

5. The fast-reflection mirror driving structure based on piezoelectric ceramic driving according to claim 1, characterized in that: The displacement amplifying hinge can change the displacement direction of the bonded strain gauge piezoelectric driver and increase the motion stroke; The adapter plate can change the staggered arrangement displacement to enlarge the hinge placement angle, and extend inward to reduce the mirror support frame hole position, and enlarge the displacement to increase the lens deflection angle; The cylindrical structure in the middle of the flexible threaded support rod is used to meet the requirements of decoupled motion.

6. The fast-reflection mirror driving structure based on piezoelectric ceramic driving according to claim 1, characterized in that: The bonded strain gauge piezoelectric driver is pasted with a strain gauge, and the strain gauge senses the deformation of the bonded strain gauge piezoelectric driver through the strain gauge, which is used to measure the actual motion process change and mark the rotation angle of the main reflector.

7. The fast mirror driving structure based on piezoelectric ceramic driving according to claim 1, characterized in that: There are four pieces in total, namely, the flexible threaded support rod, the adapter plate, the displacement amplifying hinge, and the bonded strain gauge piezoelectric driver. The center of the matching hole of the displacement amplifying hinge coincides with the XY axis.

8. A method for controlling a fast-reflection mirror drive based on piezoelectric ceramic drive, applicable to the fast-reflection mirror drive structure based on piezoelectric ceramic drive according to any one of claims 1 to 6, characterized in that: The method comprises: Taking the X-axis forward deflection at a certain angle as an example, the control method is as follows: after the controller is powered on, the MCU first reads the sensor feedback voltage value and converts it into an angle value, using the current feedback value as the zero point. When the controller receives the X-axis forward deflection command sent by the host computer or the operation screen, it controls the X1 and X2 piezoelectric ceramics to extend and shorten respectively according to the feedback value, controlling the deflection surface to deflect forward with the X-axis as the centerline. The PID closed loop is performed in real time based on the sensor feedback value. When the preset angle value is reached, the piezoelectric ceramic drive voltage maintains the current angle, and the system is always in a closed loop state. The same applies to the X-axis reverse deflection or the Y-axis forward and reverse deflection operations.

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