Redundant graph filling method and device, equipment and storage medium
By identifying repeating patterns in chip layout design and selecting representative patterns for filling, the problem of time-consuming redundant filling is solved, achieving efficient chip production and device consistency.
Patent Information
- Application Number
- CN202410452078.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-15
- Publication Date
- 2025-10-21
AI Technical Summary
In the prior art, redundant filling in the chip layout design stage takes a long time, resulting in low production efficiency.
By receiving the chip layout to be processed, performing graphic retrieval to determine repeated graphics, selecting representative graphics to fill redundant graphics, and copying the filling pattern to all repeated graphics, and finally combining them into a finished filled layout.
It significantly reduces the time for filling redundant patterns, improves chip production efficiency, and ensures the consistency of the surrounding environment for identical structures or devices on the chip, thus avoiding process deviations.
Smart Images
Figure CN120823283A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of chip design, and in particular to a redundant pattern filling method, device, equipment and storage medium. Background Art
[0002] During the chip production design phase, redundant filling of parts of the layout is an essential step. Existing methods for filling redundant graphics mainly include rule-based redundant graphics filling methods and pane-based redundant graphics filling methods.
[0003] Among them, the rule-based redundant graphic filling method is based on the redundant graphic filling rules set by the process, such as the areas and distances that need to be avoided, filling as many redundant graphics as possible in the blank area, etc., and finally achieving uniform filling of the entire layout; while the pane-based redundant graphic filling method is to divide the entire layout into panes, and determine the filling scheme of the redundant graphics according to the initial graphic density of each pane and the density difference between adjacent panes, and finally obtain a density gradient and process-friendly layout.
[0004] However, no matter which of the above methods is adopted, the current layout redundancy filling step still occupies a large part of the chip layout design time, greatly reducing the chip production efficiency in the design step. Therefore, how to further reduce the redundant filling time in the chip layout design stage and improve chip production efficiency is an urgent problem to be solved by technical personnel in this field. Summary of the Invention
[0005] The purpose of the present invention is to provide a redundant pattern filling method, device, equipment and storage medium to solve the problem of long redundant filling time in the chip layout design stage and low chip production efficiency in the prior art.
[0006] To solve the above technical problems, the present invention provides a redundant graphic filling method, comprising:
[0007] Receive the chip layout to be processed;
[0008] Performing a pattern search on the chip layout to be processed to determine repeated patterns in the chip layout to be processed;
[0009] Determining a representative graphic corresponding to the repeated graphic;
[0010] Filling the representative graphic with redundant graphics to obtain a filling pattern;
[0011] Filling all repeated graphics with the filling pattern;
[0012] Removing the repeated pattern from the chip layout to be processed to obtain a remaining layout;
[0013] Filling the remaining layout with redundant graphics to obtain a remaining filled layout;
[0014] The remaining filled pattern is combined with the removed filled repeated pattern to obtain a finished filled pattern.
[0015] Optionally, in the redundant pattern filling method, determining a representative pattern corresponding to the repeated pattern includes:
[0016] One of the plurality of repeated patterns is determined as a representative pattern.
[0017] Optionally, in the redundant pattern filling method, performing pattern retrieval on the chip layout to be processed to determine repeated patterns in the chip layout to be processed includes:
[0018] Performing a pattern search on the chip layout to be processed to determine multiple groups of repeated patterns in the chip layout to be processed;
[0019] Accordingly, determining the representative graphic corresponding to the repeated graphic includes:
[0020] Determine the representative graphics corresponding to each group of repeated graphics;
[0021] Accordingly, the performing redundant graphic filling on the representative graphic to obtain a filling pattern includes:
[0022] Fill all representative graphics with redundant graphics to obtain a filling pattern corresponding to each representative graphic;
[0023] Correspondingly, filling all repeated patterns with the filling pattern includes:
[0024] The repeated graphics in the corresponding group are filled with the filling pattern.
[0025] Optionally, in the redundant graphic filling method, performing redundant graphic filling on the representative graphic to obtain a filling pattern includes:
[0026] The representative graphic is filled with redundant graphics based on rules and / or redundant graphics based on panes to obtain a filling pattern.
[0027] Optionally, in the redundant graphic filling method, performing rule-based redundant graphic filling and / or pane-based redundant graphic filling on the representative graphic to obtain a filling pattern includes:
[0028] Filling the representative graphic with redundant graphics based on rules to obtain a filling pattern;
[0029] After obtaining the finished filling layout, the method further includes:
[0030] Inspecting the pattern density and / or pattern gradient of the finished filled layout;
[0031] When the inspection result of the pattern density and / or pattern gradient of the finished filled layout is unqualified, performing pane-based redundant pattern filling on the representative pattern to obtain a refill pattern;
[0032] Filling all repeated patterns with the refill pattern to obtain a corrected fill pattern;
[0033] The remaining fill layout is combined with all the corrected fill patterns to obtain a final fill layout.
[0034] Optionally, in the redundant pattern filling method, after obtaining the filling pattern, the method further includes:
[0035] combining the fill pattern with the representative pattern to obtain a repeating unit pattern;
[0036] Correspondingly, filling all repeated patterns with the filling pattern includes:
[0037] Replacing all repeated patterns on the chip layout to be processed with the repeated unit patterns;
[0038] Accordingly, removing the repeated pattern from the chip layout to be processed to obtain a remaining layout includes:
[0039] Removing the repeating unit pattern from the chip layout to be processed to obtain a remaining layout;
[0040] Accordingly, the step of combining the remaining filled layout with the removed filled repeated patterns to obtain a finished filled layout includes:
[0041] The remaining filling pattern is combined with the removed repeating unit pattern to obtain a finished filling pattern.
[0042] Optionally, in the redundant graphic filling method, the graphic retrieval method includes at least one of pattern matching retrieval, repeated unit retrieval and hotspot retrieval.
[0043] A redundant pattern filling device, comprising:
[0044] A receiving module, used for receiving the chip layout to be processed;
[0045] A retrieval module, configured to perform pattern retrieval on the chip layout to be processed, and determine repeated patterns in the chip layout to be processed;
[0046] A representative module, configured to determine a representative pattern corresponding to the repeated pattern;
[0047] A first filling module is used to fill the representative graphic with redundant graphics to obtain a filling pattern;
[0048] A copy module, used to fill all repeated graphics with the filling pattern;
[0049] A removal module, configured to remove the repeated pattern from the chip layout to be processed to obtain a remaining layout;
[0050] A second filling module is used to fill the remaining layout with redundant patterns to obtain a remaining filled layout;
[0051] The combination module is used to combine the remaining filled layout with the removed filled repeated patterns to obtain a finished filled layout.
[0052] A redundant pattern filling device, comprising:
[0053] memory for storing computer programs;
[0054] A processor is configured to implement the steps of any of the above-described redundant graphic filling methods when executing the computer program.
[0055] A computer-readable storage medium stores a computer program, which, when executed by a processor, implements the steps of any of the above-mentioned redundant graphic filling methods.
[0056] The present invention provides a redundant graphic filling method, which comprises the following steps: receiving a chip layout to be processed; performing graphic retrieval on the chip layout to be processed to determine repeated graphics in the chip layout to be processed; determining a representative graphic corresponding to the repeated graphics; performing redundant graphic filling on the representative graphic to obtain a filling pattern; filling all repeated graphics with the filling pattern; removing the repeated graphics from the chip layout to be processed to obtain a remaining layout; performing redundant graphic filling on the remaining layout to obtain a remaining filled layout; and combining the remaining filled layout with the removed filled repeated graphics to obtain a finished filled layout. The present invention first retrieves repeated patterns in the chip layout to be processed through pattern retrieval. Since the repeated patterns themselves are all identical, it is no longer necessary to perform redundant pattern filling on all repeated patterns one by one. Instead, only the representative patterns corresponding to the repeated patterns need to be filled with redundant patterns. After that, only the filling pattern needs to be copied to each repeated pattern. This greatly shortens the time required for redundant pattern filling and improves chip production efficiency. In addition, the consistent filling patterns of all repeated patterns can ensure that the surrounding environment of the same structure or device on the chip is consistent, avoiding the process deviations frequently seen in other related technologies, thereby greatly improving device performance. The present invention also provides a redundant pattern filling device, equipment, and storage medium with the above-mentioned beneficial effects. BRIEF DESCRIPTION OF THE DRAWINGS
[0057] In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0058] Figure 1 A schematic flow chart of a specific implementation of the redundant graphic filling method provided by the present invention;
[0059] Figure 2 A schematic diagram of a redundant pattern filling process of a redundant pattern filling method in the prior art;
[0060] Figure 3 A process schematic diagram of a specific embodiment of the redundant pattern filling method provided by the present invention;
[0061] Figure 4 A schematic flow chart of another specific embodiment of the redundant graphic filling method provided by the present invention;
[0062] Figure 5 A flowchart of another specific embodiment of the redundant graphic filling method provided by the present invention;
[0063] Figure 6 A schematic structural diagram of a specific embodiment of the redundant pattern filling device provided by the present invention.
[0064] The figure includes 01-repeating pattern and 02-filling pattern. DETAILED DESCRIPTION
[0065] In order to enable those skilled in the art to better understand the present invention, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.
[0066] The core of the present invention is to provide a redundant graphics filling method, a flow chart of a specific implementation method is shown as follows: Figure 1 As shown, it is called specific implementation method one, including:
[0067] S101: Receive a chip layout to be processed.
[0068] The chip layout to be processed is a chip layout that needs to be filled with redundant patterns.
[0069] S102: Performing a pattern search on the chip layout to be processed to determine repeated patterns in the chip layout to be processed.
[0070] Specifically, the repeated patterns in this step include the case where there is only one group of repeated patterns or there are multiple groups of repeated patterns.
[0071] In addition, the graphic search method includes at least one of pattern matching search, repeating unit search, and hotspot search. The above search method takes up less computing power and has high search accuracy. Of course, other search methods can also be selected according to actual conditions, and the present invention is not limited here.
[0072] S103: Determine a representative pattern corresponding to the repeated pattern.
[0073] Continuing from the above, the representative graphics in this step refer to a specific group of representative graphics. If there are multiple groups of repeated graphics in the chip layout to be processed, each group of repeated graphics should have a corresponding representative graphics.
[0074] Wherein, determining the representative graphic corresponding to the repeated graphic includes:
[0075] One of the plurality of repeated patterns is determined as a representative pattern.
[0076] In this embodiment, since the repeating patterns themselves are identical, a single representative pattern is directly selected from the multiple repeating patterns. This representative pattern can be selected randomly, or the Nth (N is a preset value)th repeating pattern on the chip layout to be processed can be selected. This method of determining the representative pattern consumes less computing power and improves processing efficiency.
[0077] Of course, other methods for determining representative patterns can also be used, such as setting sampling points at the same position within multiple repeating patterns in the same group, taking a weighted average of the sampling points at the same position within multiple different repeating patterns within the same group, and using the resulting position information as the position information for the corresponding position of the corresponding representative pattern. This is because, while repeating patterns are theoretically identical, during the production design process, there may be slight deviations between repeating patterns within the same group at different positions. Therefore, using a weighted average of multiple repeating patterns to determine a representative pattern can further enhance the representativeness of the representative pattern and improve the accuracy of the subsequent fill pattern.
[0078] S104: Filling the representative graphic with redundant graphics to obtain a filling pattern.
[0079] The filling pattern refers to a partial graphic that fills the representative graphic, that is, a graphic generated during the redundant graphic filling process.
[0080] Furthermore, this step includes:
[0081] The representative graphic is filled with redundant graphics based on rules and / or redundant graphics based on panes to obtain a filling pattern.
[0082] The rule-based redundant graphic filling has excellent customization performance, strong adaptability, and strong versatility. The pane-based redundant graphic filling has excellent graphic density and graphic gradient. In actual production, the corresponding redundant graphic filling method can be selected according to actual needs. Of course, other undescribed filling methods can also be selected, and the present invention is not limited here.
[0083] S105: Fill all repeated patterns with the filling pattern.
[0084] Since the representative pattern is consistent with the repeated pattern, the fill pattern calculated in the previous step can also be used to fill the repeated pattern. Repeated patterns filled with the same fill pattern have good consistency, ensuring that the working environment of the structure and device is the same.
[0085] S106: removing the repeated pattern from the chip layout to be processed to obtain a remaining layout.
[0086] Since the filling of the repeated pattern has been completed in the above steps, the next step is to fill the portion of the chip layout to be processed except the repeated pattern with redundant patterns.
[0087] S107: Filling the remaining layout with redundant graphics to obtain a remaining filled layout.
[0088] Of course, the redundant pattern filling of the remaining layout in this step can also be rule-based redundant pattern filling and / or pane-based redundant pattern filling. Please refer to the above for details, and the present invention will not be repeated here.
[0089] S108: combining the remaining filled pattern with the removed filled repeated pattern to obtain a finished filled pattern.
[0090] Of course, the repeated patterns filled with the filling pattern need to be placed back to the positions where they were removed in this step.
[0091] The following is a variant of the first embodiment of the present invention corresponding to the case where there are multiple groups of repeated patterns. Specifically, the different steps of operation include:
[0092] The performing of graphic retrieval on the chip layout to be processed to determine repeated graphics in the chip layout to be processed includes:
[0093] A1: Performing a pattern search on the chip layout to be processed to determine multiple groups of repeated patterns in the chip layout to be processed.
[0094] The shapes of the repeated figures within each group are consistent, but the shapes of the repeated figures between different groups are different.
[0095] Accordingly, determining the representative graphic corresponding to the repeated graphic includes:
[0096] A2: Determine the representative shape corresponding to each set of repeated shapes.
[0097] The number of the representative patterns is the same as the number of the groups of the repeated patterns, and the representative patterns correspond to the groups of the repeated patterns one by one. The method for determining the representative pattern of each group of repeated patterns can be the same or different.
[0098] Accordingly, the performing redundant graphic filling on the representative graphic to obtain a filling pattern includes:
[0099] A3: Fill all representative figures with redundant figures to obtain a filling pattern corresponding to each representative figure.
[0100] Correspondingly, filling all repeated patterns with the filling pattern includes:
[0101] A4: Fill the repeated patterns in the corresponding group with the fill pattern.
[0102] Of course, the group of repeated patterns represented by the representative pattern should be filled with the filling pattern corresponding to the representative pattern. This specific embodiment specifically provides a processing method when the chip layout to be processed includes multiple repeated patterns, further broadening the scope of application of the present invention and improving its versatility.
[0103] Please refer to Figure 2 In the prior art, the entire surface of the chip layout to be processed is directly filled with redundant images. The filling pattern obtained in the repeated pattern is highly likely to be inconsistent, which leads to different electrical environments of the structural devices corresponding to the repeated pattern, resulting in poor consistency of the devices. In this application, the filling pattern in the representative pattern corresponding to the repeated pattern is copied, and the filling pattern is used to fill all the repeated patterns, such as Figure 3 As shown, thereby ensuring that the blood dot environment of each device corresponding to the repeated pattern is consistent ( Figure 2 、 Figure 3 01 represents the repeating pattern, and 02 represents the filling pattern. The filling pattern in the figure is framed by dotted lines and consists of multiple rectangular units. In actual production, it can also be a continuous integrated pattern. It can be selected according to actual conditions, and the present invention will not be repeated here).
[0104] The present invention provides a redundant graphic filling method, which comprises the following steps: receiving a chip layout to be processed; performing graphic retrieval on the chip layout to be processed to determine repeated graphics in the chip layout to be processed; determining a representative graphic corresponding to the repeated graphics; performing redundant graphic filling on the representative graphic to obtain a filling pattern; filling all repeated graphics with the filling pattern; removing the repeated graphics from the chip layout to be processed to obtain a remaining layout; performing redundant graphic filling on the remaining layout to obtain a remaining filled layout; and combining the remaining filled layout with the removed filled repeated graphics to obtain a finished filled layout. In the present invention, repeated graphics in the chip layout to be processed are first retrieved through graphic retrieval. Since the repeated graphics themselves are all the same graphics, it is no longer necessary to perform redundant graphic filling on all the repeated graphics one by one. Instead, it is only necessary to perform redundant graphic filling on the representative graphics corresponding to the repeated graphics. After that, it is only necessary to copy the filling pattern to each repeated graphic, which greatly shortens the time required for redundant graphic filling and improves chip production efficiency. In addition, the filling patterns of all repeated graphics are consistent, which can ensure that the surrounding environment of the same structure or device on the chip is consistent, avoiding the process deviations frequently occurring in other related technologies, thereby greatly improving device performance.
[0105] On the basis of the first embodiment, the redundant pattern filling process of the present invention is further improved to obtain the second embodiment, and the corresponding flow chart is as follows: Figure 4 Shown, including:
[0106] S201: Receive a chip layout to be processed.
[0107] S202: Performing a pattern search on the chip layout to be processed to determine repeated patterns in the chip layout to be processed.
[0108] S203: Determine a representative pattern corresponding to the repeated pattern.
[0109] S204: Filling the representative graphic with redundant graphics based on rules to obtain a filling pattern.
[0110] In this specific implementation, it is specifically defined that the filling of the representative graphics is based on redundant graphics filling based on rules. The redundant graphics filling based on rules can better adapt to the requirements of complex filling environments.
[0111] S205: Fill all repeated patterns with the filling pattern.
[0112] S206: removing the repeated pattern from the chip layout to be processed to obtain a remaining layout.
[0113] S207: Filling the remaining layout with redundant graphics to obtain a remaining filled layout.
[0114] S208: combining the remaining filled pattern with the removed filled repeated pattern to obtain a finished filled pattern.
[0115] S209: Checking the pattern density and / or pattern gradient of the finished filling layout.
[0116] Of course, if both the pattern density check and the pattern gradient check are performed, if either of the two checks fails, the following step S210 can be executed.
[0117] S210: When the inspection result of the pattern density and / or pattern gradient of the finished filling layout is unqualified, performing pane-based redundant pattern filling on the representative pattern to obtain a refill pattern.
[0118] S211: Fill all repeated patterns with the refill pattern to obtain a corrected fill pattern.
[0119] S212: combining the remaining fill layout with all the corrected fill patterns to obtain a final fill layout.
[0120] The final filling layout is the final filling layout.
[0121] The difference between this specific embodiment and the above specific embodiments is that this specific embodiment further checks the repeated graphics filled with rule-based redundant graphics, and performs corresponding processing when the inspection fails. The remaining steps are the same as the above specific embodiments and will not be elaborated here.
[0122] In this specific embodiment, a rule-based redundant pattern filling method with good applicability is first used to achieve a good redundant filling effect. After obtaining the finished filled layout, the finished filled layout is further inspected for pattern density and / or pattern gradient to verify whether the above two items meet the requirements, thereby ensuring the finished product yield in the actual production process of the subsequent chip. If the above two inspections fail, the repeated pattern is re-filled with a window pane-based redundant pattern to obtain a new filling pattern, namely the refill pattern. The refill pattern, the repeated pattern, and the remaining filled layout are combined, and the characteristics of the window pane-based redundant pattern filling pattern gradient and pattern density are utilized to obtain a new filling layout that meets the gradient density requirements, thereby improving the yield of the subsequent finished product and reducing the production difficulty.
[0123] On the basis of the first embodiment, another method for processing the repeated pattern is proposed, and the third embodiment is obtained, and its corresponding structural diagram is shown as follows: Figure 3 Shown, including:
[0124] S301: Receive a chip layout to be processed.
[0125] S302: Performing a pattern search on the chip layout to be processed to determine repeated patterns in the chip layout to be processed.
[0126] S303: Determine a representative graphic corresponding to the repeated graphic.
[0127] S304: Fill the representative graphic with redundant graphics to obtain a filling pattern.
[0128] S305: combining the filling pattern with the representative pattern to obtain a repeating unit pattern.
[0129] S306: replacing all repeated patterns on the chip layout to be processed with the repeated unit patterns.
[0130] S307: removing the repeating unit pattern from the chip layout to be processed to obtain a remaining layout.
[0131] S308: Fill the remaining layout with redundant graphics to obtain a remaining filled layout.
[0132] S309: combining the remaining filling pattern with the removed repeating unit pattern to obtain a finished filling plate.
[0133] The difference between this specific embodiment and the above specific embodiments is that the filling pattern and the representative graphic are combined in advance in this specific embodiment, and the remaining steps are the same as those in the above specific embodiments and will not be elaborated here.
[0134] In this specific embodiment, after obtaining the filling pattern, the repeated graphics are no longer filled one by one by using the filling pattern. Instead, the representative graphics (theoretically the same as the corresponding repeated graphics) are directly combined with the filling pattern to form the repeated unit graphics. The repeated unit graphics are then used to replace all the repeated graphics in the original chip layout to be processed, further improving the processing speed and achieving fast and efficient redundant graphics filling.
[0135] The following is an introduction to a redundant pattern filling device provided by an embodiment of the present invention. The redundant pattern filling device described below and the redundant pattern filling method described above can be referenced to each other.
[0136] Figure 4 The structural block diagram of the redundant pattern filling device provided by the embodiment of the present invention is shown in FIG. Figure 4 Redundant pattern filling means may include:
[0137] Receiving module 100, used for receiving the chip layout to be processed;
[0138] A retrieval module 200 is configured to perform pattern retrieval on the chip layout to be processed and determine repeated patterns in the chip layout to be processed;
[0139] A representative module 300 is used to determine a representative pattern corresponding to the repeated pattern;
[0140] A first filling module 400 is used to fill the representative graphic with redundant graphics to obtain a filling pattern;
[0141] A copy module 500, configured to fill all repeated patterns with the fill pattern;
[0142] A removal module 600 is configured to remove the repeated pattern from the chip layout to be processed to obtain a remaining layout;
[0143] A second filling module 700 is configured to fill the remaining layout with redundant patterns to obtain a remaining filled layout;
[0144] The combining module 800 is used to combine the remaining filled layout with the removed filled repeated patterns to obtain a finished filled layout.
[0145] As a preferred embodiment, the representative module 300 includes:
[0146] The selection unit is used to determine one of the multiple repeated patterns as a representative pattern.
[0147] As a preferred embodiment, the retrieval module 200 includes:
[0148] A multiple-group repetition determination unit, configured to perform pattern retrieval on the chip layout to be processed and determine multiple groups of repetitive patterns in the chip layout to be processed;
[0149] Accordingly, the representative module 300 includes:
[0150] A single group representative unit is used to determine the representative figure corresponding to each group of repeated figures;
[0151] Accordingly, the first filling module 400 includes:
[0152] A single group of filling units is used to perform redundant pattern filling on all representative graphics to obtain a filling pattern corresponding to each representative graphic;
[0153] Accordingly, the copy module 500 includes:
[0154] The single group copying unit is used to fill the repeated graphics in the corresponding group with the filling pattern.
[0155] As a preferred embodiment, the first filling module 400 includes:
[0156] The method filling unit is used to perform rule-based redundant graphic filling and / or pane-based redundant graphic filling on the representative graphic to obtain a filling pattern.
[0157] As a preferred embodiment, the first filling module 400 includes:
[0158] a rule filling unit, configured to fill the representative graphic with redundant graphics based on rules to obtain a filling pattern;
[0159] The combined module 800 further includes:
[0160] An inspection unit, configured to inspect the pattern density and / or pattern gradient of the finished filled layout;
[0161] a refilling unit, configured to perform pane-based redundant pattern filling on the representative pattern to obtain a refill pattern when an inspection result of the pattern density and / or pattern gradient of the finished filled layout fails to meet the standards;
[0162] a correction unit, configured to fill all repeated patterns with the refill pattern to obtain a corrected filling pattern;
[0163] The final version unit is used to combine the remaining filling layout with all the corrected filling patterns to obtain a final version filling layout.
[0164] As a preferred embodiment, the first filling module 400 further includes:
[0165] a repeating combination unit, configured to combine the fill pattern with the representative pattern to obtain a repeating unit pattern;
[0166] Accordingly, the copy module 500 includes:
[0167] A repeating and copying unit, used to replace all repeated patterns on the chip layout to be processed with the repeated unit pattern;
[0168] Accordingly, the removal module 600 includes:
[0169] a repeat removal unit, configured to remove the repeating unit pattern from the chip layout to be processed to obtain a remaining layout;
[0170] Accordingly, the combination module 800 includes:
[0171] The repeating combination unit is used to combine the remaining filling layout with the removed repeating unit pattern to obtain a finished filling layout.
[0172] A redundant graphic filling device provided by the present invention includes a receiving module 100 for receiving a chip layout to be processed; a retrieval module 200 for performing graphic retrieval on the chip layout to be processed and determining repeated graphics in the chip layout to be processed; a representative module 300 for determining a representative graphic corresponding to the repeated graphic; a first filling module 400 for performing redundant graphic filling on the representative graphic to obtain a filling pattern; a copying module 500 for filling all repeated graphics with the filling pattern; a removal module 600 for removing the repeated graphics from the chip layout to be processed and obtaining a remaining layout; a second filling module 700 for performing redundant graphic filling on the remaining layout and obtaining a remaining filled layout; and a combining module 800 for combining the remaining filled layout with the removed filled repeated graphics to obtain a finished filled layout. In the present invention, repeated graphics in the chip layout to be processed are first retrieved through graphic retrieval. Since the repeated graphics themselves are all the same graphics, it is no longer necessary to perform redundant graphic filling on all the repeated graphics one by one. Instead, it is only necessary to perform redundant graphic filling on the representative graphics corresponding to the repeated graphics. After that, it is only necessary to copy the filling pattern to each repeated graphic, which greatly shortens the time required for redundant graphic filling and improves chip production efficiency. In addition, the filling patterns of all repeated graphics are consistent, which can ensure that the surrounding environment of the same structure or device on the chip is consistent, avoiding the process deviations frequently occurring in other related technologies, thereby greatly improving device performance.
[0173] The redundant graphic filling device of this embodiment is used to implement the aforementioned redundant graphic filling method. Therefore, the specific implementation methods of the redundant graphic filling device can be seen in the embodiment part of the redundant graphic filling method in the previous text. For example, the receiving module 100, the retrieval module 200, the representative module 300, the first filling module 400, the copying module 500, the removal module 600, the second filling module 700, and the combination module 800 are respectively used to implement steps S101, S102, S103, S104, S105, S106, S107 and S108 in the aforementioned redundant graphic filling method. Therefore, its specific implementation methods can refer to the descriptions of the corresponding embodiments of each part and will not be repeated here.
[0174] The present invention also provides a redundant pattern filling device, comprising:
[0175] memory for storing computer programs;
[0176] A processor, configured to implement the steps of any of the above-described redundant pattern filling methods when executing the computer program. The present invention provides a redundant pattern filling method, comprising: receiving a chip layout to be processed; performing a pattern search on the chip layout to be processed to determine repeated patterns in the chip layout to be processed; determining a representative pattern corresponding to the repeated pattern; performing redundant pattern filling on the representative pattern to obtain a filling pattern; filling all repeated patterns with the filling pattern; removing the repeated patterns from the chip layout to be processed to obtain a remaining layout; performing redundant pattern filling on the remaining layout to obtain a remaining filled layout; and combining the remaining filled layout with the removed filled repeated patterns to obtain a finished filled layout. In the present invention, repeated graphics in the chip layout to be processed are first retrieved through graphic retrieval. Since the repeated graphics themselves are all the same graphics, it is no longer necessary to perform redundant graphic filling on all the repeated graphics one by one. Instead, it is only necessary to perform redundant graphic filling on the representative graphics corresponding to the repeated graphics. After that, it is only necessary to copy the filling pattern to each repeated graphic, which greatly shortens the time required for redundant graphic filling and improves chip production efficiency. In addition, the filling patterns of all repeated graphics are consistent, which can ensure that the surrounding environment of the same structure or device on the chip is consistent, avoiding the process deviations frequently occurring in other related technologies, thereby greatly improving device performance.
[0177] The present invention also provides a computer-readable storage medium having a computer program stored thereon, and when the computer program is executed by a processor, the steps of any of the above-described redundant graphic filling methods are implemented. The redundant graphic filling method provided by the present invention comprises receiving a chip layout to be processed; performing graphic retrieval on the chip layout to be processed to determine repeated graphics in the chip layout to be processed; determining a representative graphic corresponding to the repeated graphics; performing redundant graphic filling on the representative graphic to obtain a filling pattern; filling all repeated graphics with the filling pattern; removing the repeated graphics from the chip layout to be processed to obtain a remaining layout; performing redundant graphic filling on the remaining layout to obtain a remaining filled layout; and combining the remaining filled layout with the removed filled repeated graphics to obtain a finished filled layout. In the present invention, repeated graphics in the chip layout to be processed are first retrieved through graphic retrieval. Since the repeated graphics themselves are all the same graphics, it is no longer necessary to perform redundant graphic filling on all the repeated graphics one by one. Instead, it is only necessary to perform redundant graphic filling on the representative graphics corresponding to the repeated graphics. After that, it is only necessary to copy the filling pattern to each repeated graphic, which greatly shortens the time required for redundant graphic filling and improves chip production efficiency. In addition, the filling patterns of all repeated graphics are consistent, which can ensure that the surrounding environment of the same structure or device on the chip is consistent, avoiding the process deviations frequently occurring in other related technologies, thereby greatly improving device performance.
[0178] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from the other embodiments. Reference can be made to the descriptions of the identical or similar parts between the various embodiments. For the devices disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the descriptions are relatively simple, and the relevant parts can be referred to the descriptions of the methods.
[0179] It should be noted that, in this specification, relational terms such as first and second, etc. are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprises", "comprising" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprising a ..." does not exclude the presence of other identical elements in the process, method, article or device comprising the element.
[0180] Professionals may further appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of the two. In order to clearly illustrate the interchangeability of hardware and software, the above description has generally described the components and steps of each example according to their functions. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professionals and technicians may use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the present invention.
[0181] The steps of the methods or algorithms described in conjunction with the embodiments disclosed herein may be implemented directly using hardware, a software module executed by a processor, or a combination of the two. The software module may be placed in a random access memory (RAM), internal memory, read-only memory (ROM), electrically programmable ROM, electrically erasable programmable ROM, registers, a hard disk, a removable disk, a CD-ROM, or any other form of storage medium known in the art.
[0182] The above describes in detail the redundant graphic filling method, apparatus, device, and storage medium provided by the present invention. This article uses specific examples to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only intended to help understand the method and core concept of the present invention. It should be noted that those skilled in the art can make various improvements and modifications to the present invention without departing from the principles of the present invention, and such improvements and modifications also fall within the scope of protection of the claims of the present invention.
Claims
1. A redundant graphics filling method, characterized in that: include: Receive the chip layout to be processed; Performing a pattern search on the chip layout to be processed to determine repeated patterns in the chip layout to be processed; Determining a representative graphic corresponding to the repeated graphic; Filling the representative graphic with redundant graphics to obtain a filling pattern; Filling all repeated graphics with the filling pattern; Removing the repeated pattern from the chip layout to be processed to obtain a remaining layout; Filling the remaining layout with redundant graphics to obtain a remaining filled layout; The remaining filled pattern is combined with the removed filled repeated pattern to obtain a finished filled pattern.
2. The redundant pattern filling method according to claim 1, wherein: Determining the representative graphic corresponding to the repeated graphic includes: One of the plurality of repeated patterns is determined as a representative pattern.
3. The redundant pattern filling method according to claim 1, wherein: The performing of graphic retrieval on the chip layout to be processed to determine repeated graphics in the chip layout to be processed includes: Performing a pattern search on the chip layout to be processed to determine multiple groups of repeated patterns in the chip layout to be processed; Accordingly, determining the representative graphic corresponding to the repeated graphic includes: Determine the representative graphics corresponding to each group of repeated graphics; Accordingly, the performing redundant graphic filling on the representative graphic to obtain a filling pattern includes: Fill all representative graphics with redundant graphics to obtain a filling pattern corresponding to each representative graphic; Correspondingly, filling all repeated patterns with the filling pattern includes: The repeated graphics in the corresponding group are filled with the filling pattern.
4. The redundant pattern filling method according to claim 1, wherein: Filling the representative graphic with redundant graphics to obtain a filling pattern includes: The representative graphic is filled with redundant graphics based on rules and / or redundant graphics based on panes to obtain a filling pattern.
5. The redundant pattern filling method according to claim 4, wherein: The performing rule-based and / or pane-based redundant graphic filling on the representative graphic to obtain a filling pattern includes: Filling the representative graphic with redundant graphics based on rules to obtain a filling pattern; Accordingly, after obtaining the finished filling layout, the method further includes: Inspecting the pattern density and / or pattern gradient of the finished filled layout; When the inspection result of the pattern density and / or pattern gradient of the finished filled layout is unqualified, performing pane-based redundant pattern filling on the representative pattern to obtain a refill pattern; Filling all repeated patterns with the refill pattern to obtain a corrected fill pattern; The remaining fill layout is combined with all the corrected fill patterns to obtain a final fill layout.
6. The redundant pattern filling method according to claim 1, wherein: After obtaining the filling pattern, the method further includes: combining the fill pattern with the representative pattern to obtain a repeating unit pattern; Correspondingly, filling all repeated patterns with the filling pattern includes: Replacing all repeated patterns on the chip layout to be processed with the repeated unit patterns; Accordingly, removing the repeated pattern from the chip layout to be processed to obtain a remaining layout includes: Removing the repeating unit pattern from the chip layout to be processed to obtain a remaining layout; Accordingly, the step of combining the remaining filled layout with the removed filled repeated patterns to obtain a finished filled layout includes: The remaining filling pattern is combined with the removed repeating unit pattern to obtain a finished filling pattern.
7. The redundant pattern filling method according to claim 1, wherein: The graphic retrieval method includes at least one of pattern matching retrieval, repeating unit retrieval and hot spot retrieval.
8. A redundant pattern filling device, characterized in that: include: A receiving module, used for receiving the chip layout to be processed; A retrieval module, configured to perform pattern retrieval on the chip layout to be processed, and determine repeated patterns in the chip layout to be processed; A representative module, configured to determine a representative pattern corresponding to the repeated pattern; A first filling module is used to fill the representative graphic with redundant graphics to obtain a filling pattern; A copy module, used to fill all repeated graphics with the filling pattern; A removal module, configured to remove the repeated pattern from the chip layout to be processed to obtain a remaining layout; A second filling module is used to fill the remaining layout with redundant patterns to obtain a remaining filled layout; The combination module is used to combine the remaining filled layout with the removed filled repeated patterns to obtain a finished filled layout.
9. A redundant pattern filling device, characterized in that: include: memory for storing computer programs; A processor, configured to implement the steps of the redundant graphic filling method according to any one of claims 1 to 7 when executing the computer program.
10. A computer-readable storage medium, characterized in that The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the redundant graphic filling method according to any one of claims 1 to 7 are implemented.