MRAM (Magnetic Random Access Memory) detection method of objective lens integrating optical angle resolution and high numerical aperture

Abstract

The invention relates to an MRAM (Magnetic Random Access Memory) detection method of an objective lens integrating optical angle resolution and a high numerical aperture, and belongs to the technical field of memory detection. The method comprises the following steps: (1) system preparation; (2) sample preparation; (3) optical angle resolution observation; (4) collecting optical signals; (5) optical detector and signal processing; and (6) result analysis and evaluation. According to the invention, an optical angle resolution technology is utilized, and an objective lens system with a high numerical aperture is combined, so that high-resolution observation and analysis of the MRAM unit can be realized, and information such as a microstructure, a magnetization state and magnetic characteristics of the MRAM unit can be obtained by using a proper optical detector and a signal processing technology.

Description

Technical Field

[0001] The invention relates to an MRAM detection method integrating optical angle resolution and a high numerical aperture objective lens, belonging to the technical field of memory detection. Background Art

[0002] The MRAM (magnetoresistive random access memory) detection method integrating optical angle resolution and high numerical aperture objective lens is a new detection method that combines optical angle resolution technology and high numerical aperture objective lens.

[0003] MRAM is a new type of non-volatile memory with advantages such as high-speed read and write, low power consumption and good reliability. It is based on magnetic random access memory cells and uses the magnetization state of magnetic materials to store data. Compared with traditional memory technologies (such as DRAM and flash memory), MRAM has higher data storage density and longer data retention time, so it has broad application prospects in many fields.

[0004] However, the reliability and performance evaluation of MRAM are important issues in manufacturing and application. During the manufacturing process, MRAM cells need to be tested and characterized to ensure that they work properly. In application, MRAM performance evaluation is also required to verify the correctness and stability of its read and write operations.

[0005] Traditional MRAM testing methods typically use electrical testing techniques, such as resistance measurement and current-voltage characteristic analysis. However, these electrical testing methods typically only provide limited information and lack sufficient resolution to directly observe and analyze the microstructure and magnetic properties of MRAM cells. Moreover, traditional electrical testing methods require direct contact with the MRAM cells, which may damage them and affect performance and reliability.

[0006] Therefore, a more efficient and accurate MRAM detection method is needed to meet the needs of high-resolution characterization and performance evaluation of MRAM cells. Summary of the Invention

[0007] To address the shortcomings of the existing technology, the present invention provides an MRAM detection method that integrates optical angular resolution and a high numerical aperture objective lens. By utilizing optical angular resolution technology, combined with an objective lens system with a high numerical aperture, high-resolution observation and analysis of MRAM cells can be achieved. By using appropriate optical detectors and signal processing technologies, information such as the microstructure, magnetization state, and magnetic properties of the MRAM cells can be obtained.

[0008] The technical solutions of the present invention are as follows:

[0009] An MRAM detection method integrating optical angle resolution and a high numerical aperture objective lens, comprising the following steps:

[0010] (1) System preparation;

[0011] (2) Sample preparation;

[0012] (3) Optical angle resolution observation;

[0013] (4) Optical signal collection;

[0014] (5) Optical detector and signal processing;

[0015] (6) Result analysis and evaluation.

[0016] According to the present application, in step (1), the system preparation is as follows: first, prepare a set of optical angle resolution system, including optical angle resolution device suitable for MRAM cell observation, high numerical aperture objective system and optical detector, to ensure the stability and accuracy of the optical system, wherein:

[0017] The optical angle resolution device includes the following in sequence:

[0018] Light source module for emitting light onto the sample;

[0019] Optical lens system for focusing the emitted light onto the sample;

[0020] Optical angle resolution module for collecting reflected or transmitted light signals;

[0021] High numerical aperture objective system for amplifying and focusing the light signals;

[0022] Optical detector for receiving and converting the light signals into electrical signals;

[0023] Signal processing module for processing and analyzing the electrical signals, measuring and obtaining the magnetization intensity, magnetization direction and other parameters of the MRAM cell.

[0024] According to the present application, in step (2), the sample preparation is as follows: placing the MRAM sample to be detected in the detection area, the sample can be a single MRAM cell or a chip containing multiple MRAM cells.

[0025] According to the present application, in step (3), the optical angle resolution observation is as follows: through the optical angle resolution device, the light is irradiated onto the MRAM sample, and the reflected or transmitted light signals are collected. The optical angle resolution technology utilizes the scattering and interference principle of light, and can realize high-resolution observation of microstructures.

[0026] According to the application, preferably, in step (4), the light signal collection is performed by a high numerical aperture objective system focusing the reflected or transmitted light signal and collecting more light signal, the high numerical aperture objective system has a large numerical aperture, which can improve the resolution capability of the system and the collection efficiency of the light signal.

[0027] According to the application, preferably, in step (5), the optical detector and signal processing are performed by receiving and converting the light signal into an electrical signal by the optical detector, and then processing and analyzing the electrical signal using signal processing techniques, including measuring various parameters of the MRAM cell, such as magnetization intensity and magnetization direction.

[0028] According to the application, preferably, in step (6), the result analysis and evaluation are performed by analyzing the microstructure and magnetic properties of the MRAM cell based on the results of the optical angular resolution observation and signal processing, and by measuring and analyzing the parameters, more accurate and comprehensive information of the MRAM cell can be obtained, and its performance and reliability can be evaluated.

[0029] Design concept:

[0030] High-resolution observation and analysis: By using optical angular resolution technology and high numerical aperture objective system, high-resolution observation and analysis of MRAM cell can be realized, which can provide more detailed and accurate microstructure and magnetic property information compared with traditional electrical testing methods.

[0031] Comprehensive information acquisition: Combined with optical detector and signal processing technology, various parameters of MRAM cell can be measured and acquired, such as magnetization intensity, magnetization direction, etc., which makes the performance evaluation of MRAM cell more comprehensive and multi-dimensional.

[0032] Non-contact and non-destructive detection: The non-contact and non-destructive detection method of optical angular resolution technology avoids the damage risk caused by direct contact with MRAM cell, ensuring its integrity and performance stability.

[0033] The application has the following advantages:

[0034] 1. Optical angular resolution technology: It has high spatial resolution and can realize high-resolution observation and analysis of the microstructure and magnetic properties of MRAM cell, which can provide more detailed and accurate information compared with traditional electrical testing methods.

[0035] 2. High numerical aperture objective system: It has a large numerical aperture and can collect more light signal, improving the resolution capability of the optical system. By using high numerical aperture objective, the resolution of observation and analysis of MRAM cell can be further improved, and more abundant image information can be obtained.

[0036] 3. Optical probe and signal processing technology: By selecting appropriate optical probes and using advanced signal processing technology, various parameters of MRAM cells can be measured, such as magnetization strength, magnetization direction, etc., so that more comprehensive, multi-dimensional MRAM cell information can be obtained, and the accuracy of performance evaluation can be improved.

[0037] 4. Non-contact and non-destructive detection: The optical angle resolution technology used in the present application is a non-contact and non-destructive detection method, which does not require direct contact with the MRAM cell, avoiding the damage risk that may be caused by traditional electrical testing methods, and ensuring the integrity and performance stability of the MRAM cell. BRIEF DESCRIPTION OF DRAWINGS

[0038] Figure 1 The present application is compared with the detection effect of existing electrical testing, wherein, Figure 1 (a) is the detection effect diagram of existing electrical testing; Figure 1 (b) is the detection effect diagram of the present application. DETAILED DESCRIPTION

[0039] The present application will be further described below by examples and in conjunction with the drawings, but is not limited thereto.

[0040] Example 1:

[0041] The present embodiment provides a MRAM detection method integrating optical angle resolution and high numerical aperture objective lens, the steps are as follows:

[0042] (1) System preparation, first, prepare a set of optical angle resolution system, including optical angle resolution device suitable for MRAM cell observation, high numerical aperture objective lens system and optical probe, ensure the stability and accuracy of optical system, wherein:

[0043] The optical angle resolution device includes the following in sequence:

[0044] Light source module, for emitting light to the sample;

[0045] Optical lens system, for focusing the emitted light on the sample;

[0046] Optical angle resolution module, for collecting reflected or transmitted light signals;

[0047] High numerical aperture objective lens system, for amplifying and focusing the light signals;

[0048] Optical probe, for receiving and converting the light signals into electrical signals;

[0049] Signal processing module, for processing and analyzing the electrical signals, measuring and obtaining the magnetization strength, magnetization direction and other parameters of the MRAM cell.

[0050] (2) Sample preparation, place the MRAM sample to be tested in the detection area, the sample can be a single MRAM cell or a chip containing multiple MRAM cells.

[0051] (3) Optical angle resolution observation, through the optical angle resolution device, the light is irradiated to the MRAM sample, and the reflected or transmitted light signal is collected. The optical angle resolution technology uses the scattering and interference principle of light, which can realize high-resolution observation of microstructure.

[0052] (4) Light signal collection, the reflected or transmitted light signal is focused by the high numerical aperture objective lens system, and more light signals are collected. The high numerical aperture objective lens system has a large numerical aperture, which can improve the resolution ability of the system and the collection efficiency of the light signal.

[0053] (5) Optical detector and signal processing, the optical detector receives and converts the light signal into an electrical signal, and then the signal processing technology is used to process and analyze the electrical signal, including measuring various parameters of the MRAM cell, such as magnetization intensity and magnetization direction, etc.

[0054] (6) Result analysis and evaluation: according to the results of optical angle resolution observation and signal processing, the microstructure and magnetic properties of the MRAM cell are analyzed. Through the measurement and analysis of parameters, more accurate and comprehensive MRAM cell information can be obtained, and its performance and reliability can be evaluated.

[0055] Key points of this embodiment:

[0056] Comprehensive application technology: through the comprehensive application of optical angle resolution technology, high numerical aperture objective lens system and optical detector and signal processing technology, high-resolution observation and analysis of MRAM cell are realized. The innovation and uniqueness of this comprehensive application technology is one of the key points of this embodiment.

[0057] Non-contact and non-destructive detection method: the optical angle resolution technology used in this embodiment is a non-contact and non-destructive detection method, which does not need to directly contact the MRAM cell, avoiding the damage risk caused by traditional electrical testing method. The innovation and practicality of this non-contact and non-destructive detection method is one of the key points of this embodiment.

[0058] High-resolution observation and comprehensive parameter measurement: this embodiment combines optical angle resolution technology and high numerical aperture objective lens system to realize high-resolution observation and comprehensive parameter measurement of MRAM cell. The innovation and practicality of this technology, which can provide more detailed and accurate microstructure and magnetic property information, is one of the key points of this embodiment.

[0059] The above descriptions are merely embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A method of MRAM detection integrating optical angular resolution and high numerical aperture objective, characterized in that, The steps are as follows: (1) System preparation; (2) Sample preparation; (3) Optical angle resolution observation; (4) Light signal collection; (5) Optical detector and signal processing; (6) Result analysis and evaluation.

2. The MRAM detection method of claim 1 integrated with an optical angular resolving and high numerical aperture objective, wherein, In step (1), system preparation is as follows: first, prepare a set of optical angle resolution system, including optical angle resolution device suitable for MRAM cell observation, high numerical aperture objective system and optical detector, wherein: The optical angle resolution device includes the following in sequence: A light source module for emitting light onto the sample; An optical lens system for focusing the emitted light onto the sample; An optical angle resolution module for collecting reflected or transmitted light signals; A high numerical aperture objective system for amplifying and focusing the light signals; An optical detector for receiving and converting the light signals into electrical signals; A signal processing module for processing and analyzing the electrical signals, measuring and obtaining the magnetization intensity, magnetization direction and other parameters of the MRAM cell.

3. The MRAM detection method of claim 2, wherein the integrated optical angular resolution and high numerical aperture objective lens is characterized by, In step (2), sample preparation is as follows: place the MRAM sample to be detected in the detection area, the sample can be a single MRAM cell or a chip containing multiple MRAM cells.

4. The MRAM detection method of claim 3, wherein the integrated optical angular resolution and high numerical aperture objective lens is characterized by, In step (3), optical angle resolution observation is as follows: through the optical angle resolution device, the light is irradiated onto the MRAM sample, and the reflected or transmitted light signals are collected.

5. The MRAM detection method of claim 4, wherein the integrated optical angular resolution and high numerical aperture objective lens is characterized by a numerical aperture of 0.7 or greater, a working distance of 0.5 mm or less, and a field of view of 0.5 mm or greater. In step (4), light signal collection is as follows: the high numerical aperture objective system focuses the reflected or transmitted light signals through the high numerical aperture objective system and collects more light signals.

6. The MRAM detection method of claim 5, wherein the integrated optical angular resolution and high numerical aperture objective lens is characterized by a numerical aperture of 0.7 or greater, a working distance of 0.5 mm or less, and a field of view of 0.5 mm or greater. In step (5), optical detector and signal processing is as follows: the optical detector receives and converts the light signals into electrical signals, and then processes and analyzes the electrical signals, including measuring various parameters of the MRAM cell.

7. The MRAM detection method of claim 6 integrated with an optical angular resolving and high numerical aperture objective, wherein, In step (6), result analysis and evaluation is as follows: according to the results of optical angle resolution observation and signal processing, the microstructure and magnetic properties of the MRAM cell are analyzed.

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