Sectional type radio frequency coil

Abstract

The invention provides a sectional type radio frequency coil. The sectional type radio frequency coil comprises an inner coil and an outer coil, the cross section area of the inner coil is larger than that of the outer coil, and at least one notch is formed in the inner coil and penetrates through the inner coil in the height direction; and the outer coil is arranged corresponding to the notch, is wrapped outside the inner coil, is connected with the inner coil where the notch is located, and comprises two free ends. The device has a voltage shielding function, and the physical bombardment degree of plasma on the process chamber is reduced.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of plasma, and particularly relates to a segmented radio frequency coil. BACKGROUND

[0002] As shown in the prior art, a target material source gas is ionized to generate plasma by a traditional radio frequency coil through radio frequency induction, and the essence is to continuously accelerate electrons by a high-frequency electromagnetic field, cause collision ionization, and finally form self-sustaining plasma. Figure 1

[0003] However, the following defects exist: the traditional radio frequency coil design has no electric field shielding effect, resulting in a high degree of physical bombardment of the inner wall of the process chamber by the plasma. SUMMARY

[0004] The present application aims to provide a segmented radio frequency coil with voltage shielding function. The technical scheme adopted is as follows: A segmented radio frequency coil comprises an inner coil and an outer coil. The inner coil has a cross-sectional area greater than that of the outer coil, and at least one notch is formed in the inner coil, which penetrates the inner coil in the height direction. The outer coil is arranged corresponding to the notch, wrapped around the outer portion of the inner coil and connected to the inner coil at the notch, and comprises two free ends, and the radio frequency power is applied between the free ends of all outer coils.

[0005] Preferably, the number of notches is two to divide the inner coil into two independent coils A5 and B2, and the one end of coil A5 and coil B2 form notch one, and the other end of coil A5 and coil B2 form notch two. The outer coil comprises: Segment six 6 and segment three 3, one end of the segment six 6 is connected with the coil A5 and arranged close to the notch one, and the other end is a free end, and the other end wraps the coil B2 in the circumferential direction and in the counterclockwise direction; one end of the segment three 3 is connected with the coil B2 and arranged close to the notch one, and the other end is a free end, and the other end wraps the coil A5 in the circumferential direction and in the clockwise direction. Segment four 4 and segment one 1, one end of the segment four 4 is connected with the coil A5 and arranged close to the notch two, and the other end is a free end, and the other end wraps the coil B2 in the circumferential direction and in the clockwise direction; one end of the segment one 1 is connected with the coil B2 and arranged close to the notch two, and the other end is a free end, and the other end wraps the coil A5 in the circumferential direction and in the counterclockwise direction.

[0006] ​Preferably, the number of the gaps is one to divide the inner coil 7 into coil A and coil B, one end of the coil A is connected with coil B with the gap therebetween, and the other end is connected with coil B; The outer coil comprises a first section 8 and a second section 9. The first section 8 has one end connected with coil A and arranged close to the gap, and the other end is a free end, and the other end wraps around the inner coil 7 in the circumferential direction and in the clockwise direction and extends to the gap. The second section 9 has one end connected with coil B and arranged close to the gap, and the other end is a free end, and the other end wraps around the inner coil 7 in the circumferential direction and in the counterclockwise direction and extends to the gap.

[0007] Preferably, the inner coil is wrapped outside the process chamber.

[0008] Preferably, the inner coil is arc-shaped.

[0009] Preferably, the gap comprises a vertical gap one, a horizontal gap and a vertical gap two connected in sequence.

[0010] Compared with the prior art, the advantages of the present application are: 1. It has voltage shielding function, which reduces the capacitive coupling inside the cavity.

[0011] 2. It reduces the physical bombardment of plasma on the quartz or ceramic barrel, thereby prolonging the service life of the process chamber (quartz or ceramic barrel), and also reducing the generation of particles in the cavity and reducing the capacitive coupling. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 is a position relationship diagram of a traditional radio frequency coil and a process chamber; Figure 2 is a position relationship diagram of a radio frequency coil and a process chamber in Example 1; Figure 3 is Figure 2 is a state diagram formed after rotating 90 degrees clockwise; Figure 4 is Figure 3 is a top view; Figure 5 is a voltage distribution diagram on the segmented radio frequency coil after applying a radio frequency power in Example 1; Figure 6 is a position relationship diagram of a radio frequency coil and a process chamber in Example 2; Figure 7 is Figure 6 is a top view; Figure 8 is Figure 6 is a front view; Figure 9 A voltage distribution diagram on the segmented RF coil after applying the RF power in Example 2.

[0013] Wherein, 1 - segment one, 2 - coil B, 3 - segment three, 4 - segment four, 5 - coil A, 6 - segment six, 7 - inner coil, 8 - first segment, 9 - second segment. DETAILED DESCRIPTION

[0014] The segmented RF coil of the present application will be described in more detail below with reference to the accompanying drawings, in which the preferred embodiments of the present application are shown, it should be understood that those skilled in the art can modify the present application described herein while still achieving the advantageous effects of the present application. Therefore, the following description should be understood as a broad knowledge to those skilled in the art, and not as a limitation on the present application.

[0015] A segmented RF coil, comprising: an inner coil and an outer coil; The inner coil has a cross-sectional area greater than that of the outer coil, and at least one notch is formed on the inner coil, the notch extending through the inner coil in the height direction; The outer coil is arranged corresponding to the notch, wrapped around the outer portion of the inner coil and connected to the inner coil at the notch, and includes two free ends, and the RF power is applied between all the free ends of the outer coil.

[0016] According to the prior art, the RF sensor, the RF power supply and the matcher capable of performing impedance matching operation or output frequency matching operation on the high frequency power are connected between all the free ends to apply the RF power between all the free ends.

[0017] Example 1 In this embodiment, the number of notches is 2. The notches have the same structure.

[0018] The notch includes: a vertical notch one, a horizontal notch and a vertical notch two connected in sequence.

[0019] As Figures 2-4 The inner coil is divided into two independent coil A5 and coil B2, a notch one is formed between one end of coil A5 and coil B2, and a notch two is formed between the other end of coil A5 and coil B2.

[0020] The inner coil is arc-shaped.

[0021] The outer coil includes: Segment six 6 and segment three 3, the free end between the application of radio frequency power supply, segment six 6 one end with coil A5 is connected and is close to the gap one place setting, its other end is free end, its other end along the circumferential direction and along the counterclockwise direction package coil B2;Segment three 3 one end with coil B2 is connected and is close to the gap one place setting, its other end is free end, its other end along the circumferential direction and along the clockwise direction package coil A5; Segment four 4 and segment one 1, the free end between the application of radio frequency power supply, segment four 4 one end with coil A5 is connected (welding or threaded connection or through rivet connection) and is close to the gap two place setting, its other end is free end, its other end along the circumferential direction and along the clockwise direction package coil B2;Segment one 1 one end with coil B2 is connected and is close to the gap two place setting, its other end is free end, its other end along the circumferential direction and along the counterclockwise direction package coil A5.

[0022] In use, the inner coil is wrapped around the outside of the process chamber. The inner coil is supported and fixed by the insulating support.

[0023] As shown in Figure 5 , the voltage distribution after the application of radio frequency power supply. Among them, the X axis coordinate is the coil position, and the Y axis coordinate is the voltage value.

[0024] Among them, about the voltage distribution: in the design stage, additional instruments will be used for measurement, and in the subsequent use stage, detection and monitoring will be carried out.

[0025] The distribution is a sine wave, which is divided into 6 segments, as shown by the numbers, corresponding to the 6 segments of the radio frequency coil designed in this embodiment. That is, the voltage 1, 3, 4, 6 segments, in turn, are the voltages of segment one 1, segment three 3, segment four 4, segment six 6; the voltage 2, 5 segments, in turn, are the voltages of coil A5, coil B2.

[0026] It can be seen that the voltage 2 and 5 segments are the lowest (the corresponding electric field is also low), and the voltage 1, 3, 4, 6 segments are high (the corresponding electric field is also high), but the voltage 1, 3, 4, 6 segments are shielded by the coil A5 and coil B2 segments.

[0027] That is, the voltage corresponding to the coil A5 and coil B2 is low, and the voltage of the segment one 1, segment three 3, segment four 4, segment six 6 of the outer coil is high. However, the voltage of the segment one 1, segment three 3, segment four 4, segment six 6 is shielded by the inner coil coil A5 and coil B2.

[0028] "The voltage of segment one 1, segment three 3, segment four 4, segment six 6 is shielded by coil A5 and coil B2" means that the voltage at the inner coil is lower than the voltage at the outer coil, so it is equivalent to the inner coil shielding part of the voltage of the outer coil.

[0029] But the magnetic field generated by segment one 1, segment three 3, segment four 4, segment six 6 will not be isolated by the inner coil (coil A5 and coil B2).

[0030] Example 2 In this embodiment, the number of the notch is 1.

[0031] like Figures 6-8 As shown, the inner coil 7 is divided into coil A and coil B, a gap is formed between one end of coil A and coil B, and the other end of coil A is connected to coil B; The outer coil includes: segment 1 8 and segment 2 9; Segment 1 8, one end of which is connected to the coil A and is disposed near the notch, and the other end of which is a free end, which wraps around the inner coil 7 along the circumferential direction and in the clockwise direction and extends to the notch; Segment No. 2 9 has one end connected to coil B and disposed close to the notch, and the other end is a free end, which wraps around the inner coil 7 in a circumferential direction and counterclockwise and extends to the notch.

[0032] like Figure 9 As shown, the voltage distribution after the coil is applied with radio frequency is a part of the sine wave. The sine wave is divided into three segments, as shown by the numbers, corresponding to the three segments of the coil in this embodiment.

[0033] It can be seen that the voltage of the inner coil 7 is the lowest (the corresponding electric field is also relatively low), and the voltage of segments 8 and 9 (the corresponding electric fields are also relatively high), but segments 8 and 9 are shielded by the inner coil 7 designed in this case.

[0034] However, the magnetic fields generated by the first segment 8 and the first segment 9 are not isolated by the inner coil 7 .

[0035] In summary, the present invention uses the coil itself (the wider part, whose voltage is lower), that is, the inner coil to shield the strong electric field brought by the coil (the thinner part, whose voltage is higher), thereby reducing the degree of plasma bombardment on the quartz barrel or ceramic barrel, extending the life of the quartz barrel or ceramic barrel, reducing particulate matter in the cavity, and reducing capacitive coupling of the plasma.

[0036] Since the RF voltage formed by the RF power supply remains unchanged compared to the prior art, RF induction can be performed.

[0037] The above description is merely a preferred embodiment of the present invention and does not limit the present invention in any way. Any person skilled in the art who, without departing from the scope of the present invention, makes any equivalent substitution, modification, or other changes to the technical solution and technical content disclosed in the present invention shall be deemed to be within the scope of the present invention and still fall within the scope of protection of the present invention.

Claims

1. A segmented radio frequency coil, characterized by, The utility model relates to a coil structure for plasma display panel (PDP) and a manufacturing method thereof, and belongs to the technical field of PDP. The coil structure comprises: An inner coil and an outer coil; The inner coil has a cross-sectional area greater than that of the outer coil, and at least one gap is formed in the inner coil along a height direction; 2. The segmented radio frequency coil of claim 1, wherein, The outer coil is arranged corresponding to the gap, wrapped around the outer portion of the inner coil and connected to the inner coil where the gap is located, and comprises two free ends. The number of the gap is two, so as to divide the inner coil into two independent coils A (5) and coil B (2), and a first gap is formed between one end of the coil A (5) and the coil B (2), and a second gap is formed between the other end of the coil A (5) and the coil B (2). The outer coil comprises: A sixth section (6) and a third section (3), one end of the sixth section (6) is connected to the coil A (5) and arranged close to the first gap, and the other end is a free end, and the other end wraps around the coil B (2) along a circumferential direction and in a counterclockwise direction; one end of the third section (3) is connected to the coil B (2) and arranged close to the first gap, and the other end is a free end, and the other end wraps around the coil A (5) along a circumferential direction and in a clockwise direction; 3. The segmented radio frequency coil of claim 1, wherein, A fourth section (4) and a first section (1), one end of the fourth section (4) is connected to the coil A (5) and arranged close to the second gap, and the other end is a free end, and the other end wraps around the coil B (2) along a circumferential direction and in a clockwise direction; one end of the first section (1) is connected to the coil B (2) and arranged close to the second gap, and the other end is a free end, and the other end wraps around the coil A (5) along a circumferential direction and in a counterclockwise direction. The number of the gap is one, so as to divide the inner coil (7) into coil A and coil B, and a gap is formed between one end of the coil A and the coil B, and the other end is connected to the coil B; The outer coil comprises: A first section (8) and a second section (9); 4. The segmented radio frequency coil of claim 1, wherein, The first section (8) has one end connected to the coil A and arranged close to the gap, and the other end is a free end, and the other end wraps around the inner coil (7) along a circumferential direction and in a clockwise direction and extends to the gap; 5. The segmented radio frequency coil of claim 1, wherein, The second section (9) has one end connected to the coil B and arranged close to the gap, and the other end is a free end, and the other end wraps around the inner coil (7) along a circumferential direction and in a counterclockwise direction and extends to the gap.

6. The segmented radio frequency coil of claim 1, wherein, The inner coil is wrapped around the outside of a process chamber. The inner coil is arc-shaped. The gap comprises a vertical gap one, a horizontal gap and a vertical gap two connected in sequence. The utility model relates to a coil structure for plasma display panel (PDP) and a manufacturing method thereof, and belongs to the technical field of PDP.

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