Solar cell silicon wafer correction device

Abstract

The invention discloses a solar cell silicon wafer correction device in the technical field of semiconductor production and manufacturing, the solar cell silicon wafer correction device comprises a limiting conveying mechanism, two groups of torsion conveying mechanisms and a driving piece, the limiting conveying mechanism is installed at the center of the top of an equipment support, and a conveying groove used for limiting deviation of the side edge of a silicon wafer is formed in the top of the limiting conveying mechanism; the two torsion conveying mechanisms are arranged on the two sides of the limiting conveying mechanism, adjusting pieces used for controlling the torsion angles of the top faces of the torsion conveying mechanisms are installed on the equipment support, and the torsion conveying mechanisms can control the inclination angles of silicon wafers on the tops of the torsion conveying mechanisms in the conveying process. The problems that in the prior art, in the conveying and overturning process of silicon wafers, collision damage is caused by equipment matching errors, precise side edge alignment cannot be achieved, the follow-up process precision is affected, and the production efficiency is low are solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor production and manufacturing, and particularly relates to a solar cell silicon wafer correcting device. BACKGROUND

[0002] In the manufacturing process of solar cells, the transportation and flipping of silicon wafers are crucial links. As the basic material of solar cells, silicon wafers need to go through multiple process steps such as texturing, diffusion, etching, coating, and screen printing in the entire production process. Between these processes, the silicon wafers need to be accurately transported and flipped to ensure that each process step can be performed on the correct side of the silicon wafer. For example, in the texturing process, one side of the silicon wafer needs to be accurately aligned with the reaction tank to ensure the accurate formation of the surface structure; and in the back etching process, the silicon wafer may need to be flipped to etch the other side to form the required electrode structure. Therefore, the transportation and flipping of silicon wafers not only affect the production efficiency, but also directly relate to the quality and performance of semiconductor devices.

[0003] Most existing silicon wafer flipping is achieved by rotating the rotating frame in cooperation with the conveying belt. This flipping method requires the silicon wafer to be transferred between devices, and the rotation speed and angle of the rotating structure also need to be accurately controlled. The cooperation between devices is prone to errors, which can cause the silicon wafer to collide with the device during flipping adjustment. In addition, in the process of silicon wafer transportation, side alignment is an important step to ensure the smooth progress of subsequent automated processes. However, the existing flipping device is not convenient for automatic correction of the silicon wafer, and often cannot achieve precise side alignment, which affects the accuracy of subsequent processing and is not conducive to people's use. Therefore, the present application provides a solar cell silicon wafer correcting device to solve the problems raised in the background art. SUMMARY

[0004] The present application aims to provide a solar cell silicon wafer correcting device to solve the problems of collision damage caused by device cooperation errors, inability to achieve precise side alignment affecting subsequent process accuracy, and low production efficiency in the prior art.

[0005] To achieve the above-mentioned purpose, the present application provides the following technical solution: a solar cell silicon wafer correcting device, comprising: A limiting transportation mechanism is installed at the top center of the equipment support, and the top of the limiting transportation mechanism is formed with a transportation groove for limiting the side offset of the silicon wafer. Two groups of torsion conveying mechanisms are arranged on both sides of the limiting conveying mechanism, and an adjusting piece for controlling the torsion angle of the top surface of the torsion conveying mechanism is mounted on the equipment support. The torsion conveying mechanism can control the inclination angle of the top silicon wafer during conveying. When the torsion angle of the top surface of one of the two groups of torsion conveying mechanisms is greater than 100°, it is used to turn over the top silicon wafer to the other side of the torsion conveying mechanism during conveying. A driving piece for controlling the synchronous operation of the limiting conveying mechanism and the two groups of torsion conveying mechanisms is mounted on the equipment support.

[0006] As a further description of the above technical solution: Two groups of tension adjusting mechanisms are mounted on the equipment support and correspond to the torsion conveying mechanisms one by one.

[0007] As a further description of the above technical solution: The limiting conveying mechanism includes two groups of transmission rollers connected with the driving piece, and the outside of the two groups of transmission rollers is sleeved with a limiting conveying belt. A plurality of groups of holding frames are fixedly installed on the equipment support and are arranged at equal intervals. Two groups of limiting rollers for turning in the inside of the top surface of the limiting conveying belt on both sides are rotatably installed on the holding frames. The inside of the top surface of the limiting conveying belt is turned in to form a conveying groove for accommodating the side edge of the silicon wafer.

[0008] As a further description of the above technical solution: Two groups of auxiliary rollers are rotatably installed on the equipment support, and the bottom of the two groups of auxiliary rollers abuts against the inside of the limiting conveying belt.

[0009] As a further description of the above technical solution: The torsion conveying mechanism includes two groups of transmission rollers connected with the driving piece, and the outside of the two groups of transmission rollers is sleeved with a torsion conveying belt connected with the tension adjusting mechanism. The side surface of the two groups of holding frames is rotatably installed with a support rod connected with the adjusting piece. The support rod is rotatably installed with a torsion roller for abutting against the torsion conveying belt.

[0010] As a further description of the above technical solution: The torsion conveying mechanism includes three groups of transmission rollers corresponding to each other in pairs. A group of torsion conveying belts is arranged between the corresponding two transmission rollers. Three groups of torsion rollers corresponding to the torsion conveying belts are arranged on each group of support rods.

[0011] As a further description of the above technical solution: The adjusting piece includes two groups of auxiliary rods welded on the equipment support and a group of adjusting screws rotatably installed. A moving rod is threadedly connected to the adjusting screw. The two groups of auxiliary rods slide through the moving rod. The top of the moving rod is connected with a frame plate through two groups of articulated connecting rods. The frame plate is fixedly connected with the end of the two groups of support rods on the same side. One end of the adjusting screw extending to the outside of the equipment support is fixedly installed with a turntable.

[0012] As the further description of the above technical scheme: the tension adjusting mechanism comprises two groups of cross rods fixedly installed on the equipment support, a plurality of groups of vertical rods are slidably installed on the inside of the two groups of cross rods, one group of support frames is fixedly installed at the bottom end of each two groups of vertical rods, and one group of limiting baffle plates is fixedly installed at the top end of the support frame; a tension roller abutting against the inner side of the bottom of the torsion transmission belt is rotatably installed in the inside of the support frame; and a spring is installed between the top of the support frame and the cross rod and is sleeved on the outer circle of the vertical rod.

[0013] As the further description of the above technical scheme: the driving member comprises a servo motor fixedly installed on one side of the equipment support and two groups of rotating rods rotatably installed in the equipment support, one end of one group of the rotating rods is fixedly connected with the output end of the servo motor, and the center of the rotating rod is fixedly connected with the center of the transmission drum and the transmission roller.

[0014] As the further description of the above technical scheme: the driving member further comprises a first sprocket fixedly installed at the end of each group of the rotating rods, a fixed plate for supporting the connecting column is fixedly installed on the equipment support, the connecting column is rotatably connected with the fixed plate, two groups of second sprockets corresponding to the first sprockets are fixedly installed on the connecting column, and the corresponding first sprocket and the second sprocket are connected through a chain.

[0015] Compared with the prior art, the present application has the following beneficial effects: The torsion transmission belt and the limiting transmission belt are provided for conveying the solar cell silicon wafer. The solar cell silicon wafer is controlled by the torsion transmission belt to be inclined and then returned to the horizontal state for conveying. The silicon wafer that is not placed in line can be placed in the conveying groove at the top center of the limiting transmission belt after being inclined. The side of the silicon wafer can be automatically aligned during conveying, so as to ensure the accuracy of subsequent processing of the silicon wafer. The torsion transmission belt can be adjusted to control the turning of the silicon wafer during conveying. The full-automatic turning and alignment of the silicon wafer during conveying are realized by the correcting device. The turning requirement of the silicon wafer at different processing stages is met. The adjustment efficiency and safety of the silicon wafer are high. The tension adjusting mechanism for adjusting the torsion transmission belt is further provided. The stability and reliability of the device operation can be effectively improved. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a schematic view of the overall structure of the present application; Figure 2 It is a bottom view of the overall structure of the present application; Figure 3 It is a schematic view of the present application without the limiting transmission belt and the torsion transmission belt structure; Figure 4 It is a side view of the present application without the limiting transmission belt and the torsion transmission belt structure; Figure 5 isometric view of the present application without the limiting conveying belt and the twisting conveying belt structure; Figure 6 cross-sectional view of the present application without the limiting conveying belt and the twisting conveying belt structure; Figure 7 isometric view of the present application without the limiting conveying belt and the twisting conveying belt structure; Figure 3 enlarged view of A in the present application; Figure 8 enlarged view of B in the present application. Figure 6

[0017] Legend: 10, equipment support; 11, conveying groove; 12, auxiliary roller; 20, limiting conveying mechanism; 201, transmission roller; 202, limiting conveying belt; 203, retaining frame; 204, limiting roller; 30, twisting conveying mechanism; 301, transmission roller; 302, twisting conveying belt; 303, support rod; 304, twisting roller; 40, adjusting member; 401, auxiliary rod; 402, adjusting screw; 403, moving rod; 404, connecting rod; 405, frame plate; 406, rotary disc; 50, driving member; 501, servo motor; 502, rotating rod; 503, first sprocket; 504, connecting column; 505, fixed plate; 506, second sprocket; 507, chain; 60, tension adjusting mechanism; 601, horizontal rod; 602, vertical rod; 603, support frame; 604, limiting baffle; 605, tension roller; 606, spring. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0019] Please refer to Figures 1-8 ​The embodiment of the present application is a solar cell silicon wafer correcting device, which comprises a limiting conveying mechanism 20, two groups of torsion conveying mechanisms 30 and a driving member 50. The limiting conveying mechanism 20 is installed at the top center of the equipment support 10, and is used to convey the side edge of the silicon wafer. The top of the limiting conveying mechanism 20 is formed with a conveying groove 11 for limiting the side edge deviation of the silicon wafer. The two groups of torsion conveying mechanisms 30 are arranged on the two sides of the limiting conveying mechanism 20. The equipment support 10 is installed with an adjusting member 40 for controlling the torsion angle of the top surface of the torsion conveying mechanism 30. The torsion conveying mechanism 30 can control the inclination angle of the silicon wafer on the top during the conveying process. When the torsion angle of the top surface of one group of torsion conveying mechanisms 30 is greater than 100°, it is used to turn over the top silicon wafer during the conveying process to the other group of torsion conveying mechanisms 30. The driving member 50 is installed on the equipment support 10, and is used to control the synchronous operation of the limiting conveying mechanism 20 and the two groups of torsion conveying mechanisms 30.

[0020] The solar cell silicon wafer correcting device can be arranged on the conveying line of the solar cell silicon wafer production, and is used to realize the side edge correction and turning over during the silicon wafer transfer process. The silicon wafer to be transferred is conveyed from the front end of the device to the limiting conveying mechanism 20 and the torsion conveying mechanism 30. The silicon wafer placed on one side of the torsion conveying mechanism 30 is placed on the top of the limiting conveying mechanism 20. The driving member 50 drives the limiting conveying mechanism 20 and the torsion conveying mechanism 30 to convey the silicon wafer forward. The torsion conveying mechanism 30 on the top surface is turned over during the conveying process of the silicon wafer, and can gradually adjust the silicon wafer from horizontal placement to inclination, and then gradually adjust the silicon wafer from the inclined state to horizontal placement.

[0021] The torsion conveying mechanism 30 can adjust the silicon wafer on the top to be inclined during the conveying process. When the silicon wafer is gradually moved to the inclined state, the side edge of the silicon wafer can be supported in the conveying groove 11 formed at the top center of the limiting conveying mechanism 20. The silicon wafer with the side edge completely fitted in the inner wall of the conveying groove 11 is gradually adjusted to the horizontal state. The device finally conveys the adjusted solar cell silicon wafer to the corresponding processing equipment. After the silicon wafer is conveyed by the correcting device, the side edge of the silicon wafer can be accurately corrected and aligned, which facilitates to ensure the accuracy of subsequent processing of the silicon wafer. When the silicon wafer is conveyed from the torsion conveying mechanism 30 with the top surface torsion angle greater than 100°, the conveyed silicon wafer can be turned over to the other side of the torsion conveying mechanism 30. After the silicon wafer is turned over, the silicon wafer is gradually adjusted to the horizontal state by the torsion conveying mechanism 30, so that the device efficiently completes the turning over and side edge correction during the conveying process of the silicon wafer, and the protection effect of the silicon wafer during the adjustment process is good, and the silicon wafer is not easy to be damaged.

[0022] Further, the solar cell silicon wafer correcting device further comprises two sets of tension adjusting mechanisms 60 installed on the equipment support 10 and corresponding to the torsion conveying mechanism 30, the tension adjusting mechanisms 60 are used for automatically adjusting the tension degree of the torsion conveying mechanism 30, the operator can adjust the torsion angle of the top surface of the torsion conveying mechanism 30 through the adjusting piece 40, so as to facilitate the device to realize different functions and adapt to silicon wafers of different sizes, and the flexibility of the device is improved; when the operator adjusts the torsion conveying mechanism 30 through the adjusting piece 40, the tension adjusting mechanism 60 provides elastic support for the torsion conveying mechanism 30, so as to facilitate the torsion conveying mechanism 30 to always maintain sufficient running tension in various states, and ensure the normal and efficient operation of the correcting device.

[0023] In one embodiment, referring to Figures 1-8 Specifically, the limiting conveying mechanism 20 comprises two sets of transmission drums 201 connected with the driving piece 50, the outside of the two sets of transmission drums 201 is sleeved with a limiting conveying belt 202, a plurality of groups of holding frames 203 arranged at equal intervals are fixedly installed on the equipment support 10, two sets of limiting drums 204 for turning inwards the top surface of the limiting conveying belt 202 on both sides are rotatably installed on the holding frames 203, and the top surface of the limiting conveying belt 202 on both sides is turned inwards to form conveying grooves 11 for accommodating the side edges of the silicon wafers.

[0024] The driving piece 50 can drive the two sets of transmission drums 201 to rotate, the two sets of rotating transmission drums 201 can drive the limiting conveying belt 202 installed on the outer ring to transmit, the plurality of groups of holding frames 203 and limiting drums 204 arranged between the two sets of transmission drums 201 can be used for folding the limiting conveying belt 202 on the top, and the two corresponding inclined limiting drums 204 can bend the limiting conveying belt 202 on the top to form the conveying grooves 11, the conveying grooves 11 are convenient for placing the inclined side edges of the silicon wafers, the holding frames 203 can be fixedly installed on the equipment support 10 through bolts, so as to facilitate subsequent maintenance, further, the equipment support 10 is rotatably installed with two sets of auxiliary drums 12, the bottom of the two sets of auxiliary drums 12 abuts against the inner side of the limiting conveying belt 202, the two sets of auxiliary drums 12 extend the limiting conveying belt 202 downward, which can facilitate providing installation space for the holding frames 203 and the limiting drums 204, and also facilitate improving the stability of the limiting conveying belt 202.

[0025] Specifically, the torsion conveying mechanism 30 comprises two groups of transmission rollers 301 connected with the driving member 50, outer sleeves of the two groups of transmission rollers 301 are sleeved with torsion conveying belts 302 connected with the tension adjusting mechanism 60, side surfaces of the two groups of holding frames 203 are rotatably provided with support rods 303 connected with the adjusting member 40, the support rods 303 are hingedly connected with the holding frames 203 at end portions, the support rods 303 are rotatably provided with torsion rollers 304 for abutting against the torsion conveying belts 302, the torsion rollers 304 are rotatably connected with the support rods 303 through bearings, and the rotatable connections of other components of the device can also be realized through bearings, wherein the torsion conveying mechanism 30 comprises three groups of transmission rollers 301 corresponding to each other in pairs, a group of torsion conveying belts 302 is arranged between the corresponding two transmission rollers 301, and three groups of torsion rollers 304 corresponding to the torsion conveying belts 302 are arranged on each group of support rods 303.

[0026] The driving member 50 is operated to drive the transmission rollers 301 to rotate, the corresponding two transmission rollers 301 can drive the torsion conveying belts 302 mounted on outer rings thereof to rotate, the torsion rollers 304 connected with the adjusting member 40 are used for controlling torsion angles of the torsion conveying belts 302, the torsion conveying belts 302 can drive the torsion rollers 304 abutting against inner rings thereof to rotate in the conveying process, the torsion rollers 304 are also beneficial to improving stability of the torsion conveying belts 302, and the top portions of the limiting conveying belts 202 and the torsion conveying belts 302 are used for placing and conveying the silicon wafer, one side of the limiting conveying belt 202 is provided with three groups of torsion conveying belts 302 arranged at intervals, each group of torsion conveying belts 302 adopts a relatively narrow conveying belt, so that high stability of the torsion conveying belts 302 after torsion adjustment is conveniently ensured, the limiting conveying belts 202 and the torsion conveying belts 302 can be made of a flexible material with a relatively small surface friction coefficient, so that efficient correction and adjustment of the silicon wafer during conveying on the conveying belts are conveniently realized, and the limiting conveying belts 202 and the torsion conveying belts 302 have a certain thickness, so that the conveying belts can be prevented from falling off from corresponding rollers or rollers when being folded.

[0027] On the basis of the above embodiment, reference is made to Figures 1-6 Specifically, the adjusting member 40 comprises two groups of auxiliary rods 401 welded on the equipment support 10 and a group of adjusting screw rods 402 rotatably arranged, the adjusting screw rods 402 are threadedly connected with a moving rod 403, the two groups of auxiliary rods 401 are slidably penetrated through the moving rod 403, the top portion of the moving rod 403 is connected with a frame plate 405 through two groups of hinged connecting rods 404, the frame plate 405 is fixedly connected with end portions of the two groups of support rods 303 on the same side, and one end of the adjusting screw rod 402 extending to the outside of the equipment support 10 is fixedly provided with a rotating disc 406.

[0028] The operator can drive the adjusting screw 402 to rotate through the turntable 406, the adjusting screw 402 can drive the moving rod 403 to slide on the two groups of auxiliary rods 401 through threaded connection, the moving rod 403 can drive the frame plate 405 to overturn through the two groups of hinged connecting rods 404, the frame plate 405 can drive the support rod 303 to rotate with the hinge point as the support, the support rod 303 can drive the multiple groups of torsion rollers 304 installed outside to rotate and adjust, the torsion roller 304 can drive the torsion conveyor belt 302 sleeved outside to twist and adjust, the two groups of torsion conveying mechanisms 30 on the correcting device can be adjusted through the separate adjusting piece 40, and the adjusting piece 40 can also adjust the torsion conveyor belt 302 to the non-torsion normal use state, so that the device is used for normal transmission of the two groups of silicon wafers.

[0029] Referring to Figures 1-8 Specifically, the tension adjusting mechanism 60 comprises two groups of horizontal rods 601 fixedly installed on the equipment support 10, a plurality of vertical rods 602 are slidably installed inside the two groups of horizontal rods 601, one group of support frames 603 is fixedly installed at the bottom end of each two groups of vertical rods 602, one group of limiting baffle plates 604 is fixedly installed at the top end, the tension roller 605 abutting against the inner side of the torsion conveyor belt 302 is rotatably installed inside the support frame 603, and the spring 606 sleeved outside the vertical rod 602 is installed between the top of the support frame 603 and the horizontal rod 601.

[0030] The inner circle of each group of torsion conveyor belts 302 is provided with two groups of tension rollers 605, and the torsion conveyor belt 302 transmission can also drive the tension roller 605 to rotate, when the torsion conveyor belt 302 is adjusted or relaxed after a long time of use, the spring 606 can drive the tension roller 605 to move up and down through the support frame 603, the support frame 603 drives the vertical rod 602 to move up and down inside the horizontal rod 601, the vertical rod 602 can provide support and limiting for the tension roller 605 at the bottom end, the limiting baffle plate 604 provided at the top end of the vertical rod 602 can limit the activity space, the torsion conveyor belt 302 can automatically adjust the tension, thereby reducing the downtime of the device caused by the tension problem, and can also be dynamically adjusted according to different working conditions (such as torsion change, environmental temperature change, etc.), so as to ensure that the conveyor belt is always in the best working state, and the horizontal rod 601 can be fixedly installed on the equipment support 10 through bolts, which is beneficial to subsequent replacement of damaged components.

[0031] In one embodiment, referring to Figures 1-6Specifically, the driving member 50 comprises a servo motor 501 fixedly installed on one side of the equipment support 10 and two groups of rotating rods 502 rotatably installed in the equipment support 10, one end of one group of the rotating rods 502 is fixedly connected with an output end of the servo motor 501, the rotating rods 502 are fixedly connected with centers of the transmission roller 201 and the transmission roller 301, further, the driving member 50 further comprises first sprockets 503 fixedly installed on the two groups of the rotating rods 502, the equipment support 10 is fixedly installed with a fixed plate 505 for supporting a connecting column 504, the connecting column 504 is rotatably connected with the fixed plate 505 through a bearing, the connecting column 504 is fixedly installed with two groups of second sprockets 506 corresponding to the first sprockets 503, the corresponding first sprockets 503 and the second sprockets 506 are drivingly connected through chains 507.

[0032] The servo motor 501 is started, the servo motor 501 can drive the rotating rod 502 fixedly connected with an output end to rotate, the rotating rod 502 can drive the transmission roller 201 and the transmission roller 301 fixedly installed on the outer ring to synchronously rotate, the transmission roller 201 and the transmission roller 301 have the same diameter, can make the limiting conveying belt 202 and the torsion conveying belt 302 run at the same speed, the rotating rod 502 connected with the servo motor 501 can drive the first sprocket 503 at the end to rotate when rotating, the above-mentioned first sprocket 503 drives the corresponding second sprocket 506 to rotate through the chain 507, the above-mentioned second sprocket 506 can drive the connecting column 504 and the other group of the second sprocket 506, so as to drive the other group of the first sprocket 503, the rotating rod 502, the transmission roller 201 and the transmission roller 301 on the correcting device to rotate, the transmission roller 201 and the transmission roller 301 at both ends of the conveying belt synchronously rotate, can ensure the normal and efficient operation of the device.

[0033] The contents not described in detail in the description belong to the prior art known by the person skilled in the art.

[0034] Although the present application is described in detail with reference to the foregoing embodiments, the person skilled in the art can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features, any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A solar cell silicon wafer correction device, characterized by, The utility model relates to a kind of equipment for the transport of silicon wafer, including: Limiting conveying mechanism (20) is installed at the top center of equipment support (10), the top of the limiting conveying mechanism (20) is formed with conveying groove (11) for limiting silicon wafer side edge deviation; Two groups of torsion conveying mechanism (30) are arranged at the two sides of limiting conveying mechanism (20), adjusting member (40) for controlling the torsion angle of the top surface of torsion conveying mechanism (30) is installed on the equipment support (10), the torsion conveying mechanism (30) can control the inclination angle of the top silicon wafer in the conveying process, the torsion angle of the top surface of one group of the torsion conveying mechanism (30) is greater than 100 °, it is used to turn over the top silicon wafer in the conveying process to the torsion conveying mechanism (30) on the other side, drive member (50) for controlling the synchronous operation of limiting conveying mechanism (20) and two groups of torsion conveying mechanism (30) is installed on the equipment support (10).

2. The solar cell silicon wafer correction device of claim 1, wherein: Also including: Two groups of tension adjusting mechanism (60) are installed on the equipment support (10) and correspond to torsion conveying mechanism (30).

3. The solar cell silicon wafer correction device of claim 2, wherein: The limiting conveying mechanism (20) includes two groups of transmission cylinders (201) connected with drive member (50), the outer part of two groups of transmission cylinders (201) is sleeved with limiting conveying belt (202), a plurality of equidistantly arranged retaining frames (203) are fixedly installed on the equipment support (10), two groups of limiting cylinders (204) for turning in the top surface of limiting conveying belt (202) two sides are rotatably installed on the retaining frame (203), and conveying groove (11) for accommodating the side edge of silicon wafer is formed by turning in the top surface of limiting conveying belt (202) two sides.

4. The solar cell silicon wafer correction device of claim 3, wherein: Two groups of auxiliary cylinders (12) are rotatably installed on the equipment support (10), and the bottom of two groups of auxiliary cylinders (12) abuts the inner side of limiting conveying belt (202).

5. The device according to claim 3, wherein the device is characterized by: The torsion conveying mechanism (30) includes two groups of transmission rollers (301) connected with drive member (50), the outer part of two groups of transmission rollers (301) is sleeved with torsion conveying belt (302) connected with tension adjusting mechanism (60), the side surface of two groups of retaining frames (203) is rotatably installed with support rod (303) connected with adjusting member (40), and torsion roller (304) for abutting torsion conveying belt (302) is rotatably installed on the support rod (303).

6. The solar cell silicon wafer correction device of claim 5, wherein: The torsion conveying mechanism (30) includes three groups of transmission rollers (301) corresponding to each other in pairs, corresponding two transmission rollers (301) are provided with a group of torsion conveying belt (302) between, and three groups of torsion rollers (304) corresponding to torsion conveying belt (302) are provided on each group of support rod (303).

7. The device according to claim 5, wherein the device is characterized by: The adjusting part (40) comprises two groups of auxiliary rods (401) welded on the equipment support (10) and a group of adjusting screw rods (402) rotatably installed, a moving rod (403) is threadedly connected on the adjusting screw rod (402), the two groups of auxiliary rods (401) slide through the moving rod (403), the top of the moving rod (403) is connected with a shelf plate (405) through two groups of hinged connecting rods (404), the shelf plate (405) is fixedly connected with the end portions of the two groups of supporting rods (303) on the same side, and one end of the adjusting screw rod (402) extending to the outside of the equipment support (10) is fixedly installed with a rotating disc (406).

8. The solar cell silicon wafer correction device of claim 6, wherein: The tension adjusting mechanism (60) comprises two groups of cross rods (601) fixedly installed on the equipment support (10), a plurality of groups of vertical rods (602) are slidably installed on the interiors of the two groups of cross rods (601) from top to bottom, one group of supporting frames (603) is fixedly installed at the bottom ends of every two groups of vertical rods (602), one group of limiting baffle plates (604) is fixedly installed at the top ends, a tension roller (605) abutting against the inner side of the torsion conveying belt (302) is rotatably installed in the interior of the supporting frame (603), and a spring (606) sleeved on the outer circle of the vertical rod (602) is installed between the top of the supporting frame (603) and the cross rod (601).

9. The apparatus according to claim 1, wherein the apparatus is characterized by: The driving part (50) comprises a servo motor (501) fixedly installed on one side of the equipment support (10) and two groups of rotating rods (502) rotatably installed in the equipment support (10), the end portion of one group of rotating rods (502) is fixedly connected with the output end of the servo motor (501), and the rotating rods (502) are fixedly connected with the centers of the transmission drum (201) and the transmission roller (301).

10. The apparatus according to claim 9, wherein the apparatus is characterized by: The driving part (50) further comprises first chain wheels (503) fixedly installed at the end portions of the two groups of rotating rods (502), a fixed plate (505) for supporting a connecting column (504) is fixedly installed on the equipment support (10), the connecting column (504) is rotatably connected with the fixed plate (505), two groups of second chain wheels (506) corresponding to the first chain wheels (503) are fixedly installed on the connecting column (504), and the corresponding first chain wheels (503) and second chain wheels (506) are drivingly connected through chains (507).

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