A nitrogen plasma cleaning machine and a cleaning method

Abstract

The application relates to a nitrogen plasma cleaning machine and a cleaning method, which comprise a nitrogen plasma cleaning machine body, the inner part of which is respectively provided with a chamber wall cleaning mechanism and an auxiliary cleaning mechanism; the auxiliary cleaning mechanism is cooperated with a first screw rod, a transmission rack, a transmission gear, a connecting rod and a bearing plate and the like, a motor is driven to drive a sliding support to stably slide along a guide rail, the transmission rack is engaged with the transmission gear to drive the connecting rod to overturn the bearing plate, the most upper layer and the most lower layer of glass sheets and the middle layer of glass sheets can be cyclically and interchangeably positioned, the self-weight limiting action provided by a counterweight limiting block guarantees the stable barycenter of the bearing plate in the overturning process, the glass sheets are prevented from shaking or deviating during the position changing, the reliability and the safety of the overturning action are remarkably improved, and the mechanism effectively overcomes the problem that the cleaning effect of the upper and lower layers of glass sheets is poor due to uneven plasma distribution in the existing nitrogen plasma cleaning equipment.

Description

Technical Field

[0001] This invention relates to the field of cleaning equipment technology, and in particular to a nitrogen plasma cleaner and cleaning method. Background Technology

[0002] With the continuous development of modern electronic devices, optical components, and semiconductor manufacturing processes, the cleanliness requirements for the surfaces of precision substrates such as glass slides, wafers, and optical lenses are becoming increasingly stringent. Nitrogen plasma cleaning, as a highly efficient, low-temperature, and chemical-residue-free surface cleaning and activation method, has been widely used in various fields such as optoelectronic components, chip packaging, and display panel production. Existing nitrogen plasma cleaning devices typically employ a vacuum chamber structure. After evacuation, high-purity nitrogen is introduced, and a low-temperature nitrogen plasma is generated under the action of a high-frequency electric field. The active particles in the plasma physically bombard and chemically react with the glass slide surface, thereby achieving the effects of removing floating dust, removing minor organic impurities, and improving surface affinity.

[0003] In practice, some problems still exist:

[0004] In traditional multi-layer stacked plasma cleaning equipment, glass slides are often stacked horizontally on a tray for batch processing to improve production efficiency. However, due to the characteristics of plasma density distribution within the cavity, glass slides in the middle layer are usually located in the area with the most stable plasma action and the highest density of active particles, resulting in better cleaning. On the other hand, glass slides in the top and bottom layers are often near the edge of the cavity or in areas of airflow disturbance, and are affected by insufficient plasma density and uneven flow field distribution, often resulting in incomplete cleaning and residual dust on the surface. Therefore, in order to ensure overall cleanliness, some companies often choose to forgo placing glass slides in the upper and lower layers or add extra cleaning time, which undoubtedly reduces the space utilization and production efficiency of the equipment.

[0005] During long-term operation of plasma cleaning equipment, tiny particles, contaminants, or decomposition residues that have been peeled off can easily accumulate on the inner wall and corner gaps of the cavity. If these residues are not cleaned in time, they will not only cause secondary pollution to the subsequent glass slide cleaning, but may also affect the discharge stability of the plasma, thereby affecting the cleaning effect and product consistency. At present, most plasma cleaning devices lack effective automatic cleaning functions for the inner wall, and usually require operators to open the cover and wipe it manually after periodic shutdowns. This not only increases the workload of equipment maintenance and downtime, but also makes it difficult to ensure the thoroughness and consistency of cleaning. Summary of the Invention

[0006] To address the aforementioned problems in the prior art, this invention provides a nitrogen plasma cleaning machine and cleaning method, which solves the problems of insufficient cleaning effect of upper and lower glass slides, poor cleaning of upper and lower layers when multiple layers are stacked, and difficulty in automatically cleaning impurities deposited on the cavity wall.

[0007] To achieve the above objectives, the main technical solution adopted by the present invention is as follows:

[0008] A nitrogen plasma cleaner and cleaning method are disclosed, comprising a nitrogen plasma cleaner body, wherein the interior of the nitrogen plasma cleaner body is provided with a chamber wall cleaning mechanism and an auxiliary cleaning mechanism.

[0009] An auxiliary cleaning mechanism includes a transmission rack, a transmission gear, a connecting plate, a counterweight limiting block, a connecting rod, and a bearing plate. Two counterweight limiting blocks are fixedly connected to the bottom ends of the two bearing plates. A connecting rod is rotatably connected between the two counterweight limiting blocks. A connecting plate is rotatably connected to one end of two adjacent connecting rods. A transmission gear is fixedly connected to the outer side of the connecting plate, and the inner side of the transmission gear meshes with the transmission rack.

[0010] The silo wall cleaning mechanism includes a reset spring rod, a push plate, and a cleaning brush. The cleaning brush is engaged with the outer side of the push plate, and the free end of the reset spring rod is fixedly connected to the inner side of the push plate.

[0011] The inner wall of the nitrogen plasma cleaner body is provided with a cleaning chamber, and a sealing door is hinged to the outer side of the cleaning chamber. A guide rail is fixedly connected to the inner wall of the cleaning chamber, and the bottom end of the guide rail is fixedly connected to the inner wall of the cleaning chamber. A motor is fixedly connected to the bottom end of the guide rail.

[0012] The output end of the motor passes through the cleaning chamber and is fixedly connected to an extension rod. A first lead screw is fixedly connected to the top of the extension rod, and a slide rod is fixedly connected to the inner wall of the guide rail. A sliding support is threadedly connected to the middle of the first lead screw.

[0013] The bottom end of the sliding support is slidably connected to the outer wall of the slide rod, one end of the first lead screw is fixedly connected to an output rod, the transmission rack is fixedly connected to the outside of the sliding support, and the connecting plate is rotatably connected to the outside of the guide rail.

[0014] The inner wall of the support plate is slidably connected to a tray, the inner wall of the cleaning chamber is fixedly connected to a protective box, the bottom of the inner wall of the protective box is rotatably connected to a first bevel gear, and one side of the inner wall of the protective box is rotatably connected to a second bevel gear. The bottom of the first bevel gear is fixedly connected to the top of the output rod.

[0015] A drive shaft is fixedly connected to the inner side of the second bevel gear. One end of the drive shaft passes through the protective box and is fixedly connected to a second lead screw.

[0016] A limiting plate is fixedly connected to the outer side of the second lead screw, and the limiting plate is fixedly connected to the inner wall of the top of the cleaning chamber.

[0017] The second lead screw has a connecting frame threaded to its middle section, and the connecting frame is slidably connected to the inner wall of the cleaning chamber.

[0018] One end of the reset spring rod is fixedly connected to the outside of the connecting frame. The cleaning brush is attached to the inner wall of the cleaning chamber. A fixed base is fixedly connected to the bottom of the nitrogen plasma cleaner body. Two extension plates are fixedly connected to the inner wall of the cleaning chamber. Limiting rubber balls are fixedly connected to the inner sides of the two extension plates. A contact rubber ball is fixedly connected to the inner wall of the push plate. The inner side of the contact rubber ball is attached to the outer side of the limiting rubber ball.

[0019] A nitrogen plasma cleaning method includes the following steps:

[0020] S1: Place the glass slides to be cleaned horizontally on the multi-layer tray inside the cleaning chamber, ensuring that the surface of the glass slides is flat and exposed to the plasma cleaning area.

[0021] S2: Start the nitrogen plasma cleaner. By evacuating the vacuum and filling it with high-purity nitrogen, a stable low-temperature plasma atmosphere is formed inside the cleaning chamber. The plasma bombards the surface of the glass slide evenly to decompose floating dust and light organic matter.

[0022] S3: Start the motor to drive the first lead screw to rotate. The lead screw drives the sliding support to move along the guide rail. At the same time, the transmission rack connected to the sliding support drives the transmission gear to rotate. The transmission gear drives the connecting plate and the connecting rod to move together, thereby causing the bearing plate to flip. This causes the glass slides located at the top and bottom layers to flip to the middle layer position, and receive the cleaning of the optimal plasma area in sequence.

[0023] S4: During the flipping and repositioning process of the support plate, the counterweight limiting block maintains the stability of the support plate through gravity, ensuring that the glass slide remains in a flat position throughout the flipping and moving process.

[0024] S5: During slide cleaning, the remaining driving force of the motor continues to be used to drive the first bevel gear to rotate through the output rod. The first bevel gear drives the second bevel gear and the transmission shaft to rotate through meshing, causing the second lead screw connected to the transmission shaft to rotate. This drives the threaded connecting frame to move along the guide rail on the inner wall of the cleaning chamber. The connecting frame drives the reset spring rod to push the cleaning brush to adhere to and brush the inner wall of the cleaning chamber, brushing off the floating dust and debris remaining on the chamber wall to the bottom of the chamber for recycling.

[0025] The beneficial effects of this invention are:

[0026] 1. In this invention, the auxiliary cleaning mechanism, through the cooperation of a first lead screw, transmission rack, transmission gear, connecting rod, and bearing plate, uses a motor to drive the sliding support to slide smoothly along the guide rail. Simultaneously, the transmission rack meshes with the transmission gear, driving the connecting rod to rotate the bearing plate. This allows for the cyclical exchange of positions between the top and bottom glass slides and the middle glass slides. The self-weight limiting action provided by the counterweight limiting block ensures the stability of the bearing plate's center of gravity during rotation, preventing the glass slides from wobbling or shifting during the rotation. This significantly improves the reliability and safety of the rotation action. This mechanism has… This invention effectively overcomes the problem of poor cleaning effect on upper and lower glass slides caused by uneven plasma distribution in existing nitrogen plasma cleaning equipment. It allows all glass slides to undergo sufficient plasma activation and dust removal within the optimal cleaning area, thereby improving the surface cleanliness and production yield of the glass slides. Compared with traditional single-layer cleaning or fixed stacking methods, this invention can significantly save equipment cavity space, increase the single-pass throughput of the equipment, meet the needs of continuous and batch production, reduce the frequency of manual operation, and achieve simultaneous improvement in cleaning uniformity and automation level. It has strong promotion and application value.

[0027] 2. In this invention, the cleaning mechanism for the inner wall of the chamber fully utilizes the residual kinetic energy after the motor's flipping and repositioning action, eliminating the need for an additional independent power source to drive the chamber wall cleaning device to operate stably. This mechanism uses a lead screw to drive the connecting frame to move along the guide rail. The connecting frame maintains contact with the cleaning brush via a return spring rod, ensuring the cleaning brush is in close contact with the inner wall of the cleaning chamber. As the cleaning brush slides along the chamber wall, the push plate moves with the connecting frame, continuously contacting and compressing the contact rubber ball and the limiting rubber ball. During this compression deformation, minute elastic displacements and repeated rebounds are generated, creating periodic vibrations. This vibration effect disperses fine deposits on the inner wall of the cleaning chamber. The dust particles and impurities removed after cleaning can naturally fall to the bottom of the chamber for collection, facilitating subsequent discharge or cleaning. This avoids secondary pollution caused by dust accumulation inside the chamber or interference with plasma discharge. Compared with existing manual wiping methods, this mechanism can automatically maintain the cleanliness of the inner wall without affecting normal cleaning operations, extending the continuous operating time of the equipment, reducing maintenance manpower and downtime costs, and maintaining the long-term stability of the internal environment of the plasma cleaning chamber. This further ensures the consistency of cleaning quality and product yield of the glass slide surface. The chamber wall cleaning mechanism of this invention has a compact structure, reliable operation, and high degree of automation, and has good industrial applicability and scalability. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of the present invention;

[0029] Figure 2 This is a cross-sectional view of the cleaning chamber portion of the present invention;

[0030] Figure 3 For the present invention Figure 2 Enlarged view of point A in the middle;

[0031] Figure 4 This is a schematic diagram of the bottom structure of the support plate of the present invention;

[0032] Figure 5 For the present invention Figure 4 Enlarged view at point B in the middle;

[0033] Figure 6 This is an exploded view of the guide rail portion of the present invention;

[0034] Figure 7 For the present invention Figure 6 Enlarged view at point C;

[0035] Figure 8 For the present invention Figure 6 Enlarged view at point D;

[0036] Figure 9 This is a schematic diagram of the extension plate portion of the present invention.

[0037] The components include: 1. Nitrogen plasma cleaner body; 2. Cleaning chamber; 3. Sealed door; 4. Fixed base; 5. Tray; 6. Chamber wall cleaning mechanism; 601. Connecting frame; 602. Limiting plate; 603. Push plate; 604. Cleaning brush; 605. Return spring rod; 606. First bevel gear; 607. Second lead screw; 608. Protective box; 609. Second bevel gear; 610. Drive shaft; 611. Extension plate; 612. Limiting rubber ball; 613. Contact rubber ball; 7. Auxiliary cleaning mechanism; 701. Bearing plate; 702. Counterweight limiting block; 703. Drive gear; 704. Guide rail; 705. Connecting rod; 706. Connecting plate; 707. Motor; 708. Drive rack; 709. Sliding support; 710. First lead screw; 711. Slide rod; 712. Output rod; 713. Extension rod. Detailed Implementation

[0038] To better explain and facilitate understanding of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0039] Please refer to Figures 1 to 9 As shown, a nitrogen plasma cleaner and cleaning method of the present invention includes a nitrogen plasma cleaner body 1, and the interior of the nitrogen plasma cleaner body 1 is respectively provided with a chamber wall cleaning mechanism 6 and an auxiliary cleaning mechanism 7.

[0040] The auxiliary cleaning mechanism 7 includes a transmission rack 708, a transmission gear 703, a connecting plate 706, a counterweight limiting block 702, a connecting rod 705, and a bearing plate 701. The bottom ends of the two bearing plates 701 are fixedly connected to two counterweight limiting blocks 702. The two counterweight limiting blocks 702 are rotatably connected to each other. One end of each of the two adjacent connecting rods 705 is rotatably connected to a connecting plate 706. The outer side of the connecting plate 706 is fixedly connected to a transmission gear 703. The inner side of the transmission gear 703 meshes with the transmission rack 708.

[0041] The cleaning mechanism 6 includes a reset spring rod 605, a push plate 603, and a cleaning brush 604. The cleaning brush 604 is engaged with the outer side of the push plate 603, and the free end of the reset spring rod 605 is fixedly connected to the inner side of the push plate 603. In actual implementation, the auxiliary cleaning mechanism 7 drives the first lead screw 710 to rotate via the motor 707. The first lead screw 710 drives the sliding support 709 to translate along the guide rail 704. The sliding support 709 drives the transmission rack 708 to mesh with the transmission gear 703. The transmission gear 703 drives the connecting plate 706 and the connecting rod 705 to rotate the carrier plate 701, realizing the exchange of positions between the top and bottom glass slides. This ensures that all glass slides can enter the plasma active zone for thorough cleaning. First, the glass slide stacking position is positioned, then the lead screw is activated to switch layers according to the number of layers, and then the carrier plate 701 is rotated according to the preset logic to complete the exchange. The beneficial effect is that it enables the alternating rotation and cleaning of multiple glass slides in a limited space, avoiding insufficient cleaning of the top and bottom layers, improving overall uniformity, and reducing repetitive operations. To improve cleaning efficiency, the residual kinetic energy of the same motor 707 is used to drive the output rod 712 to rotate the first bevel gear 606. The first bevel gear 606 meshes with the second bevel gear 609 and the transmission shaft 610 to rotate. The transmission shaft 610 is connected to the second lead screw 607. The lead screw drives the connecting frame 601 to slide along the guide rail 704. The connecting frame 601 pushes the cleaning brush 604 to brush against the inner wall of the cleaning chamber 2 through the reset spring rod 605. After the glass slide is flipped and cleaned, the power is immediately switched to drive the brush to slide along the wall surface, brushing back and forth to remove residual dust and attachments on the chamber wall. The beneficial effect is that the chamber wall cleaning is completed automatically without adding an additional power structure, avoiding dust accumulation on the inner wall from affecting the uniformity of plasma discharge and extending the equipment maintenance cycle.

[0042] It should be noted that: each support plate 701 has two symmetrically arranged counterweight limiting blocks 702 at its bottom. One end of the counterweight limiting block 702 is a weight, and the other end is a limiting and buffering structure. When the support plate 701 is rotated to a specific angle under the transmission gear 703, it contacts the inner wall end face of the cleaning chamber 2, forming a mechanical stop to prevent over-rotation. At the same time, the weight maintains the stable posture of the support plate 701 before and after rotation through gravity, ensuring that the glass slide remains horizontal and flat during the rotation process, avoiding displacement or falling off due to shaking or excessively rapid rotation. This is achieved without relying on electronic sensors and Under the premise of braking system, the combination of geometric limit and gravity counterweight is used to realize the integrated control of flip limit, flip buffer and attitude stability. The mass of the counterweight limit block 702 is matched with the force state of the support plate 701 during the flipping process. The center of gravity of the counterweight limit block 702 is located on the lower side of the rotation axis of the support plate 701. Its gravitational torque is dynamically balanced with the flipping inertia moment formed by the total mass of the tray 5 and the glass slide through structural design, thereby ensuring that the flipping process is smooth and the end is automatically limited, avoiding rapid flipping or glass slide displacement or slippage due to inertia.

[0043] Optionally, the inner wall of the nitrogen plasma cleaner body 1 is provided with a cleaning chamber 2, and a sealing door 3 is hinged to the outer side of the cleaning chamber 2. A guide rail 704 is fixedly connected to the inner wall of the cleaning chamber 2, and the bottom end of the guide rail 704 is fixedly connected to the inner wall of the cleaning chamber 2. A motor 707 is fixedly connected to the bottom end of the guide rail 704. In actual implementation, the inner wall of the nitrogen plasma cleaner body 1 is provided with a cleaning chamber 2, and a sealing door 3 is hinged to the outer side of the cleaning chamber 2 for opening and closing. The guide rail 704 is fixedly connected to the inner wall of the cleaning chamber 2, and the bottom end of the guide rail 704 is installed on the inner wall of the cleaning chamber 2 and fixedly connected to the motor 707. The actual operation steps are as follows: the operator places the glass slide to be cleaned into the cleaning chamber 2 through the sealing door 3 and adjusts it to the corresponding position of the guide rail 704 and the tray 5, then closes the sealing door 3 to ensure internal vacuum sealing. Subsequently, the guide rail 704 restricts the linear movement trajectory of the sliding support 709 and assists the tray 5 in switching positions. The beneficial effect is to ensure good cavity sealing and accurate and stable flipping action to prevent leakage.

[0044] Optionally, the output end of the motor 707 passes through the cleaning chamber 2 and is fixedly connected to an extension rod 713. The top end of the extension rod 713 is fixedly connected to a first lead screw 710, and the inner wall of the guide rail 704 is fixedly connected to a slide rod 711. The middle part of the first lead screw 710 is threadedly connected to a sliding support 709. In actual implementation, the output end of motor 707 passes through cleaning chamber 2 and is fixedly connected to extension rod 713. The top of extension rod 713 is fixed to first lead screw 710, and slide rod 711 is fixed to the inner wall of guide rail 704. The middle of first lead screw 710 is threadedly connected to sliding support 709. The actual operation steps are as follows: after the operator starts motor 707, it drives extension rod 713 and first lead screw 710 to rotate. The rotation of lead screw drives sliding support 709 to move smoothly along guide rail 704 and slide rod 711 through threaded pair. At the same time, sliding support 709 can further drive the subsequent flipping component to move. The beneficial effect is that the rotational power of motor 707 is converted into the smooth linear motion of sliding support 709 to ensure smooth layer switching during flipping and avoid jamming.

[0045] Optionally, the bottom end of the sliding support 709 is slidably connected to the outer wall of the slide rod 711, one end of the first lead screw 710 is fixedly connected to the output rod 712, the transmission rack 708 is fixedly connected to the outer side of the sliding support 709, and the connecting plate 706 is rotatably connected to the outer side of the guide rail 704. In actual implementation, the bottom end of the sliding support 709 is fitted with the outer wall of the slide rod 711, one end of the lead screw is fixed to the output rod 712, and the transmission rack 708 is fixed to the outside of the sliding support 709 and is rotatably connected to the outside of the guide rail 704. The actual operation steps are as follows: the lead screw rotates to drive the sliding support 709 to move smoothly back and forth under the guidance of the slide rod 711. At the same time, the transmission rack 708 moves with the sliding support 709 and meshes with the transmission gear 703 to drive the transmission gear 703 to rotate. The transmission gear 703 then drives the connecting plate 706 and the connecting rod 705 to move, realizing the flipping and layer exchange of the bearing plate 701. The beneficial effect is that the simple rack and pinion linkage mechanism ensures reliable power transmission, high synchronization of action, and smooth flipping.

[0046] Optionally, a tray 5 is slidably connected to the inner wall of the support plate 701, a protective box 608 is fixedly connected to the inner wall of the cleaning chamber 2, a first bevel gear 606 is rotatably connected to the bottom end of the inner wall of the protective box 608, a second bevel gear 609 is rotatably connected to one side of the inner wall of the protective box 608, and the bottom end of the first bevel gear 606 is fixedly connected to the top end of the output rod 712. In actual implementation, a detachable tray 5 is slidably connected to the inner wall of the bearing plate 701 for stacking glass slides. A protective box 608 is fixed to the inner wall of the cleaning chamber 2. The bottom of the protective box 608 is rotatably connected to the first bevel gear 606, and the side is rotatably connected to the second bevel gear 609. The bottom of the first bevel gear 606 is fixed to the top of the output rod 712. The actual operation steps are as follows: After the flipping operation is completed, the output rod 712 continues to drive the first bevel gear 606 to rotate. The first bevel gear 606 meshes with and drives the second bevel gear 609 to drive the transmission shaft 610 and the second lead screw 607 to rotate, providing power for the chamber wall cleaning mechanism. The beneficial effect is that the same power system is cleverly used to complete the flipping and chamber wall brushing actions, reducing the complexity of the system.

[0047] Optionally, a drive shaft 610 is fixedly connected to the inner side of the second bevel gear 609. One end of the drive shaft 610 passes through the protective box 608 and is fixedly connected to a second lead screw 607. In actual implementation, the drive shaft 610 is fixedly connected to the inner side of the second bevel gear 609. The drive shaft 610 passes through the protective box 608 and one end is fixed to the second lead screw 607. The actual operation steps are as follows: after the first bevel gear 606 drives the second bevel gear 609 to rotate, the second bevel gear 609 then drives the drive shaft 610 and the second lead screw 607 to rotate, causing the connecting frame 601 to translate along the guide rail 704, thereby driving the cleaning brush 604 to brush along the chamber wall. The beneficial effects are that it ensures efficient power transmission and a compact spatial layout, and the brushing action and flipping action can be switched flexibly with a high degree of automation.

[0048] Optionally, a limiting plate 602 is fixedly connected to the outer side of the second lead screw 607, and the limiting plate 602 is fixedly connected to the inner wall of the top of the cleaning chamber 2. In actual implementation, the limiting plate 602 fixed to the outer side of the second lead screw 607 is used to limit the maximum displacement of the connecting frame 601. The limiting plate 602 is fixedly connected to the inner wall of the top of the cleaning chamber 2. The operation steps are as follows: the second lead screw 607 rotates to drive the connecting frame 601 to move along the guide rail 704. When the connecting frame 601 moves to the set endpoint, the limiting plate 602 provides a limit to avoid excessive sliding, which may cause interference or damage to the mechanism. The beneficial effect is to ensure that the cleaning brush 604 is positioned in a controlled manner when brushing the cavity wall, and that the brushing range is accurate and effective, thus protecting the safety of the mechanism.

[0049] Optionally, a connecting frame 601 is threadedly connected to the middle of the second lead screw 607, and the connecting frame 601 is slidably connected to the inner wall of the cleaning chamber 2. In actual implementation, the connecting frame 601 is threadedly connected to the middle of the second lead screw 607, and the connecting frame 601 is slidably connected to the inner wall of the cleaning chamber 2. The operation steps are as follows: when the second lead screw 607 rotates, it drives the connecting frame 601 to slide back and forth along the guide rail 704 through the threaded pair. The connecting frame 601 drives the reset spring rod 605 and the cleaning brush 604 to move back and forth synchronously. The beneficial effects are that the brushing action is stable and continuous with a large coverage area, the cleaning effect is more thorough, and the frequency of manual maintenance is reduced.

[0050] Optionally, one end of the reset spring rod 605 is fixedly connected to the outside of the connecting frame 601, the cleaning brush 604 is attached to the inner wall of the cleaning chamber 2, a fixed base 4 is fixedly connected to the bottom of the nitrogen plasma cleaner body 1, two extension plates 611 are fixedly connected to the inner wall of the cleaning chamber 2, and a limiting rubber ball 612 is fixedly connected to the inner side of each of the two extension plates 611. A contact rubber ball 613 is fixedly connected to the inner wall of the push plate 603, and the inner side of the contact rubber ball 613 is attached to the outer side of the limiting rubber ball 612. In actual implementation, one end of the reset spring rod 605 is fixed to the outside of the connecting frame 601, and the cleaning brush 604 is in close contact with the inner wall of the cleaning chamber 2. The operation steps are as follows: the connecting frame 601 drives the reset spring rod 605 to push the cleaning brush 604 forward to press it against the chamber wall. During the back-and-forth sliding process, the spring provides a continuous contact force to ensure that the bristles are in full contact with the wall surface. The beneficial effects are that the automatic brushing intensity is uniform, effectively removing floating dust and residue from the chamber wall, improving the cleanliness of the inside of the cleaning chamber 2, and ensuring stable plasma discharge effect.

[0051] Optionally, a nitrogen plasma cleaning method includes the following steps:

[0052] S1: Place the glass slides to be cleaned horizontally on the multi-layer tray 5 inside the cleaning chamber 2, ensuring that the surface of the glass slides is flat and exposed to the plasma cleaning area.

[0053] S2: Start the nitrogen plasma cleaner body 1. By evacuating and filling with high-purity nitrogen, a stable low-temperature plasma atmosphere is formed inside the cleaning chamber 2. The plasma bombards the surface of the glass slide evenly to decompose floating dust and light organic matter.

[0054] S3: Start motor 707 drives first lead screw 710 to rotate. First lead screw 710 drives sliding support 709 to translate along guide rail 704. At the same time, through transmission rack 708 connected to sliding support 709, transmission gear 703 is driven to rotate. Transmission gear 703 drives connecting plate 706 and connecting rod 705 to rotate together, thereby driving bearing plate 701 to flip, so that the glass slides located at the top and bottom layers are flipped to the middle layer position, and are successively cleaned by the best plasma area.

[0055] S4: During the flipping and repositioning process of the support plate 701, the counterweight limiting block 702 maintains the stability of the support plate 701 through gravity, ensuring that the glass slide remains in a flat position during the flipping and moving process.

[0056] S5: During slide cleaning, the remaining driving force of motor 707 is used to drive the first bevel gear 606 to rotate through output rod 712. The first bevel gear 606 drives the second bevel gear 609 and transmission shaft 610 to rotate through meshing, causing the second lead screw 607 connected to the transmission shaft 610 to rotate. This causes the threaded connecting frame 601 to move along the guide rail 704 on the inner wall of the cleaning chamber 2. The connecting frame 601 drives the reset spring rod 605 to push the cleaning brush 604 to adhere to and brush the inner wall of the cleaning chamber 2, brushing off the floating dust and debris remaining on the chamber wall to the bottom of the chamber for recycling. In actual implementation, step S1 involves placing and leveling the multi-layer glass slide tray 5. Step S2 involves evacuating and filling with high-purity nitrogen to create a low-temperature plasma atmosphere that activates the glass slide surface. Step S3 involves motor 707 driving the first lead screw 710, which in turn drives the sliding support 709 to rotate the flipping assembly, achieving uniform cleaning by exchanging the positions of the upper and lower glass slides with the middle layer. Step S4 involves counterweight limiting block 702 ensuring stable flipping and keeping the glass slides horizontal to prevent displacement. Step S5 involves using the remaining driving force of motor 707 to rotate the first bevel gear 606, transmission shaft 610, and second lead screw 607, causing the connecting frame 601 and cleaning brush 604 to brush back and forth against the wall of the cleaning chamber 2, removing and collecting floating dust. It is evident that a single motor 707 can simultaneously complete flipping cleaning and automatic cleaning of the chamber wall, ensuring a compact device with high cleaning efficiency and convenient subsequent maintenance.

[0057] Working Principle: A first lead screw 710 driven by a motor 707 is used. The first lead screw 710, through threaded engagement with a sliding support 709, drives a transmission rack 708 to slide linearly along a guide rail 704. The transmission rack 708 meshes with a transmission gear 703. When the transmission gear 703 rotates, it synchronously drives the connecting plate 706, connecting rod 705, and other rotating structures. Through the linkage between the connecting rod 705 and the bearing plate 701, the bearing plate 701 can be flipped and repositioned. During the flipping process, the counterweight limiting block 702 at the bottom of the bearing plate 701 plays a role in limiting its own weight and stabilizing its center of gravity, ensuring that the bearing plate 701 is always subjected to uniform force before and after flipping. This prevents the slide from shifting or slipping due to rapid flipping or inertial impact, thus ensuring the slide remains stable throughout the entire cleaning cycle. Finally, in a flat and stable state, this mechanism can flip the top and bottom glass slides to the area with the most suitable plasma concentration in the middle layer, allowing them to fully receive the bombardment and reaction of plasma active particles, achieving the same cleaning effect as the middle layer glass slides. This effectively overcomes the shortcomings of insufficient cleaning of edge layer glass slides in traditional single-layer or fixed-layer structures. Simultaneously, this flipping operation can be automatically cyclical according to a set program, requiring no manual intervention, significantly improving the space utilization and overall cleaning uniformity of the plasma cleaning device, ensuring consistent product quality during mass production. It has the advantages of convenient operation and stable cleaning effect. The set chamber wall cleaning mechanism 6 is used to remove fine dust and decomposition residues accumulated on the inner wall and corners of the cleaning chamber 2 due to long-term use. The mechanism fully utilizes the remaining kinetic energy of the motor 707 before it stops rotating after the drive tray 5 is flipped and repositioned. This energy is transmitted through the output rod 712 to the first bevel gear 606. The first bevel gear 606 meshes with the second bevel gear 609 on one side of the inner wall of the cleaning chamber 2, driving the drive shaft 610 and the second lead screw 607 fixed on the drive shaft 610 to rotate synchronously. The second lead screw 607, through a threaded connection, drives the connecting frame 601 to move along the guide rail 704 of the cleaning chamber 2. Simultaneously, the connecting frame 601 maintains a tight fit with the cleaning brush 604 through the return spring rod 605, causing the cleaning brush 604 to slide and brush against the inner wall of the cleaning chamber 2. During the brushing process, as the cleaning brush 604 slides along the chamber wall, the push plate 603 moves with the connecting frame 601, contacting the rubber ball 6. The 13 component continuously contacts and compresses the limiting rubber ball 612, generating minute elastic displacements and repeated rebounds during the compression deformation process, forming periodic vibrations. This vibration effect disperses fine deposits or dust particles on the inner wall of the cleaning chamber 2, enhancing the brushing ability of the cleaning brush 604, thereby further improving the cleaning efficiency and thoroughness of the inner wall. It can promptly scrape off the dust and fine debris adhering to the inner wall and guide them to the collection area at the bottom of the cleaning chamber 2 for subsequent vacuuming or periodic slag removal, ensuring that the inner wall remains clean for a long time. The chamber wall cleaning mechanism 6 shares a drive source with the flipping and repositioning mechanism, which not only saves energy and space, but also avoids complex multi-motor 707 control through the flexible cooperation of connecting rods and springs, making maintenance simple and highly reliable.This structure effectively reduces the risk of secondary contamination and discharge instability caused by internal wall fouling, extends equipment maintenance cycles, and further improves the consistency of plasma cleaning results and production continuity.

[0058] The above description shows and illustrates the basic principles, main features, and advantages of the present invention. Standard parts used in the present invention can be purchased from the market, and irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts, and equipment adopt conventional models in the prior art, and the circuit connection adopts conventional connection methods in the prior art, which will not be described in detail here.

[0059] The above description is merely an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent modifications made based on the content of the present invention specification and drawings, or direct or indirect applications in related technical fields, are similarly included within the patent protection scope of the present invention.

Claims

1. A nitrogen plasma cleaner, comprising a nitrogen plasma cleaner body (1), characterized in that: The nitrogen plasma cleaner body (1) is equipped with a chamber wall cleaning mechanism (6) and an auxiliary cleaning mechanism (7) inside. An auxiliary cleaning mechanism (7) includes a transmission rack (708), a transmission gear (703), a connecting plate (706), a counterweight limiting block (702), a connecting rod (705), and a bearing plate (701). The bottom ends of the two bearing plates (701) are fixedly connected to two counterweight limiting blocks (702). A connecting rod (705) is rotatably connected between the two counterweight limiting blocks (702). One end of each of the two adjacent connecting rods (705) is rotatably connected to a connecting plate (706). A transmission gear (703) is fixedly connected to the outer side of the connecting plate (706). The inner side of the transmission gear (703) meshes with the transmission rack (708). The cleaning mechanism (6) for the warehouse wall includes a reset spring rod (605), a push plate (603) and a cleaning brush (604). The cleaning brush (604) is engaged with the outer side of the push plate (603), and the free end of the reset spring rod (605) is fixedly connected to the inner side of the push plate (603).

2. The nitrogen plasma cleaner according to claim 1, characterized in that: The inner wall of the nitrogen plasma cleaner body (1) is provided with a cleaning chamber (2), and a sealing door (3) is hinged to the outer side of the cleaning chamber (2). A guide rail (704) is fixedly connected to the inner wall of the cleaning chamber (2), and the bottom end of the guide rail (704) is fixedly connected to the inner wall of the cleaning chamber (2). A motor (707) is fixedly connected to the bottom end of the guide rail (704).

3. The nitrogen plasma cleaner according to claim 2, characterized in that: The output end of the motor (707) passes through the cleaning chamber (2) and is fixedly connected to an extension rod (713). The top end of the extension rod (713) is fixedly connected to a first lead screw (710). The inner wall of the guide rail (704) is fixedly connected to a slide rod (711). The middle part of the first lead screw (710) is threadedly connected to a sliding support (709).

4. A nitrogen plasma cleaner according to claim 3, characterized in that: The bottom end of the sliding support (709) is slidably connected to the outer wall of the slide rod (711), one end of the first lead screw (710) is fixedly connected to the output rod (712), the transmission rack (708) is fixedly connected to the outside of the sliding support (709), and the connecting plate (706) is rotatably connected to the outside of the guide rail (704).

5. A nitrogen plasma cleaner according to claim 4, characterized in that: The inner wall of the support plate (701) is slidably connected to a tray (5), the inner wall of the cleaning chamber (2) is fixedly connected to a protective box (608), the bottom end of the inner wall of the protective box (608) is rotatably connected to a first bevel gear (606), one side of the inner wall of the protective box (608) is rotatably connected to a second bevel gear (609), and the bottom end of the first bevel gear (606) is fixedly connected to the top end of the output rod (712).

6. A nitrogen plasma cleaner according to claim 5, characterized in that: The inner side of the second bevel gear (609) is fixedly connected to a drive shaft (610), one end of which passes through the protective box (608) and is fixedly connected to a second lead screw (607).

7. A nitrogen plasma cleaner according to claim 6, characterized in that: A limiting plate (602) is fixedly connected to the outer side of the second lead screw (607), and the limiting plate (602) is fixedly connected to the inner wall at the top of the cleaning chamber (2).

8. A nitrogen plasma cleaner according to claim 7, characterized in that: The second lead screw (607) is threadedly connected to a connecting frame (601) at its middle part, and the connecting frame (601) is slidably connected to the inner wall of the cleaning chamber (2).

9. A nitrogen plasma cleaner according to claim 8, characterized in that: One end of the reset spring rod (605) is fixedly connected to the outside of the connecting frame (601). The cleaning brush (604) is attached to the inner wall of the cleaning chamber (2). The bottom end of the nitrogen plasma cleaner body (1) is fixedly connected to a fixed base (4). The inner wall of the cleaning chamber (2) is fixedly connected to two extension plates (611). The inner sides of the two extension plates (611) are fixedly connected to limit rubber balls (612). The inner wall of the push plate (603) is fixedly connected to a contact rubber ball (613). The inner side of the contact rubber ball (613) is attached to the outer side of the limit rubber ball (612).

10. A nitrogen plasma cleaning method, characterized in that: The cleaning machine described in claim 9 is applied to the following steps: S1: Place the glass slides to be cleaned horizontally on the multi-layer tray (5) in the cleaning chamber (2) to ensure that the surface of the glass slides is flat and exposed to the plasma cleaning area; S2: Start the nitrogen plasma cleaner body (1), and by evacuating and filling with high-purity nitrogen, a stable low-temperature plasma atmosphere is formed inside the cleaning chamber (2). The plasma bombards the surface of the glass slide evenly to decompose floating dust and slight organic matter. S3: Start the motor (707) to drive the first lead screw (710) to rotate. The lead screw drives the sliding support (709) to translate along the guide rail (704). At the same time, the transmission rack (708) connected to the sliding support (709) drives the transmission gear (703) to rotate. The transmission gear (703) drives the connecting plate (706) and the connecting rod (705) to move together, thereby driving the bearing plate (701) to flip, so that the glass slides located at the top and bottom layers flip to the middle layer position, and receive the cleaning of the best plasma area in sequence. S4: During the flipping and repositioning process of the support plate (701), the counterweight limiting block (702) maintains the stability of the support plate (701) through gravity, ensuring that the glass slide remains in a flat state during the flipping and moving process; S5: During the glass slide cleaning, the remaining driving force of the motor (707) is used to drive the first bevel gear (606) to rotate through the output rod (712). The first bevel gear (606) drives the second bevel gear (609) and the transmission shaft (610) to rotate through meshing, causing the second lead screw (607) connected to the transmission shaft (610) to rotate. This causes the threaded connecting frame (601) to move along the guide rail (704) on the inner wall of the cleaning chamber (2). The connecting frame (601) drives the reset spring rod (605) to push the cleaning brush (604) to adhere to and brush the inner wall of the cleaning chamber (2), brushing the floating dust and debris remaining on the chamber wall to the bottom of the chamber for recycling.

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