Intermittent parylene vacuum coating device and method thereof

Abstract

The invention provides an intermittent parylene vacuum coating device and a method thereof, the intermittent parylene vacuum coating device emphatically improves a deposition system, and a hexagonal splitter plate is arranged in a deposition cavity and at a position opposite to an air inlet. In the actual application process, a parylene active monomer from a cracking heating system enters the deposition cavity from the air inlet and impacts on the hexagonal splitter plate to achieve uniform diffusion in all directions, and the film thickness uniformity of parylene vacuum coating is improved.

Description

Technical Field

[0001] This invention relates to the field of Pyrelin vacuum coating technology, specifically to an intermittent Pyrelin vacuum coating apparatus and method. Background Art

[0002] Parylene is a novel conformal coating material developed and applied by Union Carbide Co. in the mid-1960s in the United States. It is a polymer of paraxylene. Based on different molecular structures, it can be classified into N-type, C-type, D-type, F-type, etc. Currently, industrial parylene vacuum coating typically involves three steps: heating and sublimating solid parylene dimers into gas in a vacuum environment; decomposing the gas into active monomers; and spontaneously polymerizing the active monomers on the substrate surface to form a polymer film (without the need for additional catalysts or plasma excitation).

[0003] Perelin nanofilm is a transparent and dense polymer with advantages such as water and oxygen barrier, acid and alkali resistance, insulation, self-lubrication, and biocompatibility. Due to its excellent physical and electrical properties, it is widely used in products requiring high reliability and protection, such as waterproofing military circuit boards and implantable pacemakers.

[0004] However, the existing intermittent perylene vacuum coating equipment still suffers from uneven film thickness, requiring further research and improvement. Summary of the Invention

[0005] In view of the problems existing in the prior art, the present invention provides an intermittent pyrelin vacuum coating apparatus and method. The intermittent pyrelin vacuum coating apparatus focuses on improving the deposition system by setting a hexagonal flow divider plate inside the deposition chamber, directly opposite the air inlet. In practical applications, the pyrelin active monomers from the pyrolysis heating system enter the deposition chamber from the air inlet and impact the hexagonal flow divider plate to achieve uniform diffusion in all directions, which helps to improve the uniformity of the pyrelin vacuum coating thickness.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] One objective of this invention is to provide an intermittent pyrene vacuum coating apparatus, comprising a vaporization heating system, a pyrolysis heating system, and a deposition system connected in series; the intermittent pyrene vacuum coating apparatus further comprises a vacuum system, a tail gas treatment system, and a control system; the vacuum system is connected to the deposition system and is used to provide a vacuum environment; the tail gas treatment system is used to collect and treat the tail gas discharged from the vacuum system; the control system is used to monitor and control the vaporization heating system, the pyrolysis heating system, the deposition system, the vacuum system, and the tail gas treatment system respectively; wherein, the deposition system includes a deposition chamber, with at least one air inlet on the side of the deposition chamber; inside the deposition chamber, a hexagonal flow divider is provided opposite the air inlet.

[0008] As a preferred technical solution of the present invention, two air inlets are opened on the side of the deposition cavity, and the two air inlets are located at the same projection position and respectively correspond to the upper and lower parts of the deposition cavity.

[0009] As a preferred technical solution of the present invention, a conical groove is provided on the side of the deposition cavity, and the conical groove is located in the middle of the two air inlets to reduce air intake turbulence.

[0010] As a preferred embodiment of the present invention, the hexagonal manifold is axially symmetrical along the vertical direction, the length of the short side of the hexagonal manifold is 1.5-2.5 times the diameter of the air inlet, and the length of the long side of the hexagonal manifold is 3-5 times the diameter of the air inlet.

[0011] As a preferred embodiment of the present invention, the distance between the hexagonal flow divider and the sidewall of the deposition cavity is 30-50 mm.

[0012] As a preferred technical solution of the present invention, an air inlet diversion box is provided outside the deposition chamber at the location of the air inlet; the air inlet diversion box and the side wall of the deposition chamber form an air inlet buffer chamber, and the air inlet diversion box has an air inlet and is connected to the air inlet pipeline from the pyrolysis heating system.

[0013] As a preferred embodiment of the present invention, the gasification heating system includes an automatic inlet / outlet device; under the control of the control system, the automatic inlet / outlet device is used to control whether the gasifier performs gasification heating.

[0014] As a preferred embodiment of the present invention, at least one air outlet is provided on the side of the deposition chamber, and the vacuum system is connected to the deposition system through the air outlet; the air outlet is arranged opposite to the air inlet.

[0015] As a preferred embodiment of the present invention, three air outlets are provided on the side of the deposition chamber, and the pipeline after the three air outlets merge is connected to the vacuum system; the three air outlets are located at the same projection position and respectively correspond to the upper, middle and lower parts of the deposition chamber.

[0016] The second objective of this invention is to provide an intermittent phenelzine vacuum coating method, employing the intermittent phenelzine vacuum coating apparatus described in the first objective, wherein the intermittent phenelzine vacuum coating method includes:

[0017] The sample to be coated is placed in the deposition chamber of the deposition system, and the phenelzine solid raw material is placed in the gasification heating system. Under the vacuum environment provided by the vacuum system, the phenelzine solid raw material is gasified and heated by the gasification heating system to generate raw material gas. The raw material gas enters the pyrolysis heating system and is pyrolyzed into active monomers. The active monomers enter the deposition system and spontaneously polymerize on the surface of the sample to be coated, completing the phenelzine vacuum coating. The exhaust gas treatment system is used to collect and treat the exhaust gas discharged from the vacuum system. The control system is used to monitor and control the gasification heating system, the pyrolysis heating system, the deposition system, the vacuum system, and the exhaust gas treatment system respectively. The active monomers enter the deposition chamber from at least one inlet and impact the hexagonal flow divider plate to achieve uniform diffusion in all directions.

[0018] Compared with existing technical solutions, the present invention has at least the following beneficial effects:

[0019] The intermittent pyrene vacuum coating apparatus of this invention focuses on improving the deposition system. A hexagonal flow divider is installed inside the deposition chamber, directly opposite the air inlet. In practical applications, the pyrene active monomers from the pyrolysis heating system enter the deposition chamber through the air inlet and impact the hexagonal flow divider, achieving uniform diffusion in all directions. This helps improve the uniformity of the pyrene vacuum coating thickness. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of an intermittent perylene vacuum coating apparatus according to a specific embodiment of the present invention.

[0021] Figure 2 This is a structural diagram of the air intake splitter box shown from the outside of the deposition chamber in a specific embodiment of the present invention.

[0022] Figure 3 This is an exploded view of the air intake splitter box and hexagonal splitter plate from the inside of the deposition chamber, according to a specific embodiment of the present invention.

[0023] Figure 4 yes Figure 2 and Figure 3A schematic diagram of the structure of the hexagonal flow divider.

[0024] Figure 5 This is a schematic diagram of a combined splitter plate arranged opposite the two air inlets in a specific embodiment of the present invention.

[0025] Figure 6 This is a cross-sectional schematic diagram of a specific embodiment of the present invention, showing a tapered groove.

[0026] Figure 7 This is a schematic diagram of the automatic inlet / outlet device and gasifier in a specific embodiment of the present invention.

[0027] In the diagram: 1-Gasification heating system; 2-Pyrolysis heating system; 3-Deposition system; 4-Vacuum system; 5-Tail gas treatment system; 6-Control system; 100-Hexagonal flow divider; 200-Inlet flow divider box; 300-Automatic inlet / outlet device; 400-Gasification furnace. Detailed Implementation

[0028] The technical solution of the present invention will be further described below with reference to the accompanying drawings and through specific implementation methods.

[0029] To better illustrate the present invention and facilitate understanding of its technical solutions, typical but non-limiting embodiments of the present invention are as follows:

[0030] One specific embodiment of the present invention provides an intermittent pyrene vacuum coating apparatus. Please refer to [link to relevant documentation]. Figure 1 The intermittent pyrene vacuum coating apparatus includes a gasification heating system 1, a pyrolysis heating system 2, and a deposition system 3 connected in series. The apparatus also includes a vacuum system 4, a tail gas treatment system 5, and a control system 6. The vacuum system 4 is connected to the deposition system 3 and provides a vacuum environment. The tail gas treatment system 5 collects and treats the tail gas discharged from the vacuum system 4. The control system 6 monitors and controls the gasification heating system 1, the pyrolysis heating system 2, the deposition system 3, the vacuum system 4, and the tail gas treatment system 5. The deposition system 3 includes a deposition chamber with at least one air inlet on its side. Inside the deposition chamber, opposite the air inlet, a hexagonal flow divider is positioned.

[0031] The intermittent pyrene vacuum coating apparatus of this invention focuses on improving the deposition system. A hexagonal flow divider is installed inside the deposition chamber, directly opposite the air inlet. In practical applications, the pyrene active monomers from the pyrolysis heating system enter the deposition chamber through the air inlet and impact the hexagonal flow divider, achieving uniform diffusion in all directions. This helps improve the uniformity of the pyrene vacuum coating thickness.

[0032] It should be noted that the intermittent Pyrelin vacuum coating apparatus of this invention can also be equipped with an activation subsystem as needed. The activation subsystem can enhance the compatibility of the thermal protection material with the vacuum coating material, particularly enhancing the adhesion of the coating layer to the material surface. The activation subsystem includes a coupling agent vapor deposition device and / or a plasma cleaning device. The cavity size of the activation subsystem should meet the processing requirements of the largest workpiece. The coupling agent solves the interface compatibility problem through chemical bonding and is suitable for inert / smooth substrates. Plasma enhances surface activity through physical / chemical activation and is suitable for high cleanliness or complex structural requirements. In actual processes, a single or combined solution needs to be selected based on the substrate material and coating performance requirements (such as abrasion resistance and water resistance).

[0033] In one specific implementation, two air inlets are provided on the side of the deposition chamber, with the two air inlets located at the same projection position and corresponding to the upper and lower parts of the deposition chamber, respectively.

[0034] As a specific implementation, a conical groove is provided on the side of the deposition chamber, and the conical groove is located in the middle of the two air inlets to reduce air intake turbulence.

[0035] It should be noted that if two air inlets are opened on the side of the deposition chamber, hexagonal diverter plates are not set separately. Instead, a combined diverter plate is set inside the deposition chamber, directly opposite the two air inlets. The combined diverter plate is in the shape of two hexagons joined together, with the upper and lower hexagons joined by overlapping their short sides. That is, the hexagonal diverter plate corresponding to one air inlet is fixedly connected to the side wall of the deposition chamber at both the upper and lower ends. The combined diverter plate corresponding to the two air inlets is also fixedly connected to the side wall of the deposition chamber at both the upper and lower ends. Furthermore, when the airflow from the two air inlets meets and turbulence occurs at the middle position of the two air inlets, the preferably set conical groove can effectively reduce the airflow turbulence.

[0036] In one specific implementation, the hexagonal diffuser is axially symmetrical along the vertical direction. The sides at the top and bottom are the shorter sides, and the four sides on the sides are of equal length and are the longer sides. The length of the shorter side of the hexagonal diffuser is 1.5-2.5 times the diameter of the air inlet, for example, 1.5, 1.6, 1.7, 1.8, 1.9, 2, 2.1, 2.2, 2.3, 2.4, or 2.5 times. The length of the longer side of the hexagonal diffuser is 3-5 times the diameter of the air inlet, for example, 3, 3.1, 3.3, 3.5, 3.7, 3.8, 4, 4.2, 4.4, 4.6, 4.8, or 5 times.

[0037] In one specific implementation, the distance between the hexagonal flow divider and the sidewall of the deposition chamber is 30-50 mm, such as 30 mm, 31 mm, 33 mm, 35 mm, 36 mm, 38 mm, 40 mm, 42 mm, 44 mm, 46 mm, 48 mm or 50 mm.

[0038] As a specific implementation, an air inlet diversion box is provided outside the deposition chamber at the location of the air inlet; the air inlet diversion box and the side wall of the deposition chamber form an air inlet buffer chamber, and the air inlet diversion box has an air inlet and is connected to the air inlet pipeline from the pyrolysis heating system.

[0039] It should be noted that by setting up an air inlet split box, the present invention allows the active monomers of pyrolysis heating system to first enter the corresponding air inlet buffer chamber of the air inlet split box for buffering, and then enter the interior of the deposition chamber through the air inlet on the side of the deposition chamber, and finally impact the hexagonal split plate to achieve uniform diffusion in all directions, which helps to improve the uniformity of the film thickness of pyrolysis vacuum deposition.

[0040] In one specific implementation, the gasification heating system includes an automatic inlet / outlet device; under the control of the control system, the automatic inlet / outlet device is used to control whether the gasifier performs gasification heating.

[0041] It should be noted that the automatic inlet / outlet device mainly includes a slide rail that can move the gasifier in and out. Because the vacuum chamber must not have any residual coating gas molecules after the Parylene vacuum coating is completed, to ensure this, on the one hand, the automatic inlet / outlet device enables the gasifier to move, removing the heating element to prevent heat from causing material evaporation; on the other hand, after the vacuum coating is completed, the control system's program is set to delay the vacuuming time (e.g., 10 minutes) to extract and filter out excess molecules.

[0042] The automatic loading and unloading device of the vaporization heating system in this invention adopts a movable design structure. On the one hand, while evacuating, the heating part of the vaporization section can be moved out from the quartz glass tube and the heating function can be turned on to the first stage heating temperature to preheat the heater in advance. This way, when the vacuum degree reaches the coating vacuum and the deposition process begins, there is no need to wait for heating, saving time. On the other hand, continuous production can be realized. After the previous batch of products has been coated, the vaporization section heater can be moved out. After the next batch of workpieces is loaded, the vaporization section heater still maintains the temperature required for raw material vaporization, and the deposition process can be completed directly, realizing continuous production without interruption.

[0043] In one specific implementation, at least one air outlet is provided on the side of the deposition chamber, and the vacuum system is connected to the deposition system through the air outlet; the air outlet is arranged opposite to the air inlet.

[0044] In one specific implementation, three air outlets are provided on the side of the deposition chamber, and the pipeline after the three air outlets merge is connected to the vacuum system; the three air outlets are located at the same projection position and correspond to the upper, middle and lower parts of the deposition chamber, respectively.

[0045] Another specific embodiment of the present invention provides an intermittent phenelzine vacuum coating method, employing the aforementioned intermittent phenelzine vacuum coating apparatus, the intermittent phenelzine vacuum coating method comprising:

[0046] The sample to be coated is placed in the deposition chamber of the deposition system, and the phenelzine solid raw material is placed in the gasification heating system. Under the vacuum environment provided by the vacuum system, the phenelzine solid raw material is gasified and heated by the gasification heating system to generate raw material gas. The raw material gas enters the pyrolysis heating system and is pyrolyzed into active monomers. The active monomers enter the deposition system and spontaneously polymerize on the surface of the sample to be coated, completing the phenelzine vacuum coating. The exhaust gas treatment system is used to collect and treat the exhaust gas discharged from the vacuum system. The control system is used to monitor and control the gasification heating system, the pyrolysis heating system, the deposition system, the vacuum system, and the exhaust gas treatment system respectively. The active monomers enter the deposition chamber from at least one inlet and impact the hexagonal flow divider plate to achieve uniform diffusion in all directions.

[0047] It should be noted that the intermittent phenelzine vacuum coating apparatus of this invention is used to form a phenelzine polymer coating on the surface of the sample to be coated. The prepared phenelzine protective film is thin enough to achieve a controllable film thickness of 0.1-100 μm without affecting the product's lightweight and wave transmission performance. Furthermore, it can generate a uniform and perfectly conformal protective film on the surface of samples with complex shapes. In addition, using the intermittent phenelzine vacuum coating apparatus of this invention ensures a clean and environmentally friendly coating process, without causing other pollution to the product. It can be performed at room temperature or lower temperatures, and is solvent-free, preventing secondary damage to the product. The film is dense, has good adhesion to the substrate, and the film production process has good repeatability.

[0048] Intermittent phenelzine vacuum coating using the intermittent phenelzine vacuum coating apparatus described in this invention allows for process adjustments to ensure film thickness uniformity based on the size and shape of the coated product. These adjustments are made by modifying the position and opening size of the flow distribution structure at the hexagonal flow divider at the air inlet. Two air inlets are located on the side of the deposition chamber. If the hexagonal flow divider (combined flow divider), the automatic inlet / outlet device of the gasifier, and the conical groove are all present, the film thickness uniformity meets the ±3% requirement. If the automatic inlet / outlet device of the gasifier is omitted, the film thickness uniformity of some samples may increase to approximately 5%. If the conical groove is omitted, the film thickness uniformity decreases, still meeting the ±5% requirement. If the hexagonal flow divider (combined flow divider) is omitted, the film thickness uniformity decreases significantly, only meeting the ±10% requirement.

[0049] Taking the example of opening an air inlet on the side of the deposition chamber, Figure 2 The diagram shows the configuration of the air intake splitter box as viewed from the outside of the deposition chamber. Figure 3 An exploded view of the inlet splitter box and hexagonal splitter plate, shown from the inside of the deposition chamber, is presented. Figure 4 It shows Figure 2 and Figure 3 The schematic diagram of the hexagonal diffuser plate shows that: the short sides of the upper and lower ends of the hexagonal diffuser plate 100 are respectively provided with a positioning hole, and the intake diffuser box 200 is rectangular, with the two short sides of the intake diffuser box 200 corresponding to the short sides of the upper and lower ends of the hexagonal diffuser plate 100.

[0050] In contrast, two air inlets are opened on the side of the deposition chamber. Figure 5 The diagram shows a combined flow divider positioned opposite the two air inlets. It can be seen that the combined flow divider is shaped like two hexagons joined together, with their short sides overlapping. Specifically, the hexagonal flow divider corresponding to one air inlet is fixedly connected to the sidewalls of the deposition chamber at both its upper and lower ends. Similarly, the combined flow dividers corresponding to both air inlets are also fixedly connected to the sidewalls of the deposition chamber at both its upper and lower ends. Furthermore, a conical groove is provided on the side of the deposition chamber, located in the middle of the two air inlets, to reduce airflow turbulence. Figure 6 A cross-sectional schematic diagram with a conical groove is shown. The arrows represent the flow direction of the pyrolysis heating system's active monomers. The conical groove can reduce intake turbulence.

[0051] As a specific implementation method, an automatic inlet / outlet device is installed in the gasification heating system, such as... Figure 7As shown, the automatic entry and exit device 300 mainly includes a slide rail that can move the gasifier 400 in and out. Under the control of the control system, the automatic entry and exit device 300 is used to control whether the gasifier 400 performs gasification heating.

[0052] The sample to be coated is placed on the product rack inside the deposition chamber. To meet the product's requirements for coating uniformity, a rotatable product rack is provided, which can drive the sample to be coated on the product rack to rotate in the deposition chamber. The corresponding tooling and motion subsystem mainly includes clamping tooling, vacuum sealing device, external motor drive mechanism, etc. The motion mechanism adopts a magnetic fluid sealing structure to avoid the polymer from affecting the function of the motion mechanism.

[0053] The exhaust gas treatment system complies with the local emission standard "Integrated Emission Standard for Air Pollutants" (DB11 / 501-2017) and is equipped with a multi-stage activated carbon adsorption exhaust gas treatment system and a 15m high exhaust pipe; the noise level meets the relevant requirements of Class 1 standard in the "Emission Standard for Environmental Noise at the Boundary of Industrial Enterprises" (GB12348-2008). For example, with the help of a centrifugal fan, the collected exhaust gas is sequentially passed through a high-temperature resistant coarse filter, an activated carbon filter, a medium-efficiency filter, and a high-efficiency filter to achieve exhaust gas purification, and finally discharged to a height of more than 15 meters.

[0054] The internal temperature of the deposition chamber is controlled between 0-30℃. Water circulation and insulation can be enhanced. The water circulator has both heating and cooling functions to maintain a stable and constant temperature. Water cooling circulation is also added to the surface of the chamber. Water circulation pipes are arranged in both the main body and the chamber door, enabling integrated hot and cold circulation to maintain a constant temperature.

[0055] The intermittent Piriton vacuum coating apparatus of this invention features audible and visual alarm functions, automatic and manual emergency stop functions, equipment operation logs and alarm records, water and power failure protection functions, over-temperature alarm functions for the evaporator and pyrolysis furnace, vacuum environment pressure failure alarm functions, door interlock switch functions, over-voltage, under-voltage, over-current protection, and short-circuit protection functions. If a fault alarm occurs during the deposition process, the corresponding color bar will change color and an alarm will sound; the audible and visual equipment will emit a warning sound and flash, and the equipment emergency stop button and three-color indicator lights will activate.

[0056] The present invention has been illustrated with the above embodiments to illustrate its detailed structural features. However, the present invention is not limited to the above detailed structural features, that is, it does not mean that the present invention must rely on the above detailed structural features to be implemented. Those skilled in the art should understand that any improvements to the present invention, equivalent substitutions for the components used in the present invention, additions of auxiliary components, and selection of specific methods, etc., all fall within the protection scope and disclosure scope of the present invention.

[0057] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present invention, various simple modifications can be made to the technical solution of the present invention, and these simple modifications all fall within the protection scope of the present invention.

[0058] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not describe the various possible combinations separately.

[0059] Furthermore, various different embodiments of the present invention can be combined in any way, as long as they do not violate the spirit of the present invention, they should also be regarded as the content disclosed by the present invention.

Claims

1. An intermittent Pyrelin vacuum coating apparatus, characterized in that, The intermittent pyrene vacuum coating apparatus includes a gasification heating system, a pyrolysis heating system, and a deposition system connected in series. The apparatus also includes a vacuum system, a tail gas treatment system, and a control system. The vacuum system is connected to the deposition system and provides a vacuum environment. The tail gas treatment system collects and treats the tail gas discharged from the vacuum system. The control system monitors and controls the gasification heating system, the pyrolysis heating system, the deposition system, the vacuum system, and the tail gas treatment system. The deposition system includes a deposition chamber with at least one air inlet on the side of the deposition chamber; inside the deposition chamber, a hexagonal flow divider is provided opposite the air inlet.

2. The intermittent Pyrelin vacuum coating apparatus according to claim 1, characterized in that, Two air inlets are provided on the side of the deposition chamber, and the two air inlets are located at the same projection position and correspond to the upper and lower parts of the deposition chamber, respectively.

3. The intermittent Pyrelin vacuum coating apparatus according to claim 2, characterized in that, A conical groove is provided on the side of the deposition chamber, and the conical groove is located in the middle of the two air inlets to reduce air intake turbulence.

4. The intermittent Pyrelin vacuum coating apparatus according to claim 1 or 2, characterized in that, The hexagonal manifold is axially symmetrical along the vertical direction. The length of the short side of the hexagonal manifold is 1.5-2.5 times the diameter of the air inlet, and the length of the long side of the hexagonal manifold is 3-5 times the diameter of the air inlet.

5. The intermittent Pyrelin vacuum coating apparatus according to claim 1 or 2, characterized in that, The distance between the hexagonal flow divider and the sidewall of the deposition chamber is 30-50 mm.

6. The intermittent Pyrelin vacuum coating apparatus according to claim 1 or 2, characterized in that, Outside the deposition chamber, an air inlet diversion box is provided at the location of the air inlet; the air inlet diversion box and the side wall of the deposition chamber form an air inlet buffer chamber, and the air inlet diversion box has an air inlet and is connected to the air inlet pipeline from the pyrolysis heating system.

7. The intermittent Pyrelin vacuum coating apparatus according to claim 1 or 2, characterized in that, The gasification heating system includes an automatic inlet / outlet device; under the control of the control system, the automatic inlet / outlet device is used to control whether the gasifier performs gasification heating.

8. The intermittent Pyrelin vacuum coating apparatus according to claim 1 or 2, characterized in that, At least one air outlet is provided on the side of the deposition chamber, and the vacuum system is connected to the deposition system through the air outlet; the air outlet is arranged opposite to the air inlet.

9. The intermittent Pyrelin vacuum coating apparatus according to claim 8, characterized in that, Three air outlets are provided on the side of the deposition chamber, and the pipeline after the three air outlets merge is connected to the vacuum system; the three air outlets are located at the same projection position and correspond to the upper, middle and lower parts of the deposition chamber, respectively.

10. A method for intermittent phenelzine vacuum deposition, characterized in that, The intermittent pyrene vacuum coating apparatus according to any one of claims 1-9, wherein the intermittent pyrene vacuum coating method comprises: The sample to be coated is placed in the deposition chamber of the deposition system, and the solid raw material of phenelzine is placed in the gasification heating system. Under the vacuum environment provided by the vacuum system, the solid raw material of phenelzine is gasified and heated by the gasification heating system to generate raw material gas. The raw material gas enters the pyrolysis heating system and is pyrolyzed into active monomers. The active monomers enter the deposition system and spontaneously polymerize on the surface of the sample to be coated, thus completing the vacuum coating of phenelzine. The exhaust gas treatment system is used to collect and treat the exhaust gas discharged from the vacuum system; the control system is used to monitor and control the gasification heating system, the pyrolysis heating system, the deposition system, the vacuum system, and the exhaust gas treatment system respectively. The active monomer enters the deposition chamber through at least one air inlet and impacts the hexagonal flow divider plate to achieve uniform diffusion in all directions.

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