Fan rotor and manufacturing method thereof

Micro-sized fan blades are formed on the annular disk through an etching process, which solves the problem of dense blade configuration in a small space of existing centrifugal fans and realizes a low-noise and high-efficiency fan rotor design.

CN120845386APending Publication Date: 2025-10-28DELTA ELECTRONICS INC(CN)
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Patent Information

Application Number
CN202410512236.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-04-26
Publication Date
2025-10-28

AI Technical Summary

Technical Problem

The lower limit of the blade size of existing centrifugal fans cannot meet the narrow space and dense blade configuration requirements of electronic products, resulting in noise problems.

Method used

An etching process is used to form micro-sized fan blades on the annular disk. The fan blade thickness is between 0.03mm and 0.1mm, the groove width is 0.2mm, and the fan blade height is between 0.05mm and 0.2mm. The opening is configured in the groove to increase the air intake and balance the pressure difference.

Benefits of technology

It realizes dense fan blade configuration in a small space, reduces noise, and improves the efficiency and noise performance of the fan rotor.

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Abstract

The invention provides a fan rotor and a manufacturing method thereof. The fan rotor comprises an annular disc and a plurality of fan blades. The fan blades and the annular disc are integrally formed in an etching mode, the fan blades are arranged on the annular disc in a radial mode, the thickness of each fan blade ranges from 0.03 mm to 0.1 mm, a channel is formed between each fan blade and another adjacent fan blade, and the minimum width of the channel is 0.2 mm.
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Description

Technical Field

[0001] This disclosure relates to fan rotors, and more particularly to a centrifugal fan rotor with micro-sized fan blades. Background Technology

[0002] Current centrifugal fans are prone to generating significant noise due to the frequency harmonics of the blades. By using a dense blade configuration, the workload of individual blades can be reduced. Because there are more blades, the harmonics are dispersed in the higher frequency range, thereby reducing blade surge noise.

[0003] However, most impellers today are made by plastic injection molding, metal stamping, or casting. The lower limit of the size of the products that can be obtained by the current manufacturing methods cannot meet the needs of the small space and dense blade configuration in current electronic products.

[0004] In view of this, the inventor has devoted himself to researching and applying theoretical principles to address the aforementioned problems in the prior art, which is the target of the inventor's improvement. Summary of the Invention

[0005] The purpose of this disclosure is to provide a centrifugal fan rotor with a densely arranged micro-sized fan blade and a method for etching it.

[0006] This disclosure provides a fan rotor comprising an annular disk and a plurality of fan blades. The fan blades and the annular disk are integrally formed by etching, and the fan blades are arranged radially on the annular disk. The thickness of each fan blade is between 0.03 mm and 0.1 mm, and a channel is formed between each fan blade and an adjacent fan blade, the minimum width of which is 0.2 mm.

[0007] In one embodiment of this disclosure, the annular disk has multiple openings, each of which is disposed in a channel.

[0008] In one embodiment of this disclosure, the height of each fan blade is between 0.05 mm and 0.2 mm.

[0009] In one embodiment of this disclosure, the height of each fan blade relative to the annular disk is uniform.

[0010] In one embodiment of this disclosure, fan blades are respectively disposed on both sides of the annular disk.

[0011] In one embodiment of this disclosure, the fan blades are disposed on one side of the annular disk.

[0012] In one embodiment of this disclosure, the fan rotor further includes a hub, which is disposed at the center of an annular disk. The outer edge of the hub is provided with a plurality of external lugs, and the inner edge of the annular disk is provided with a plurality of connecting holes corresponding to each external lug. Each external lug is respectively connected to the corresponding connecting hole.

[0013] This disclosure also provides a fan rotor comprising a hub and a plurality of impellers. The impellers are disposed on the hub and are stacked and spaced apart. Each impeller includes an annular disk and a plurality of fan blades. In each impeller, the fan blades and the annular disk are integrally formed by etching, and the fan blades are arranged radially on the annular disk. The thickness of each fan blade is between 0.03 mm and 0.1 mm. A channel is formed between each fan blade and an adjacent fan blade, and the minimum width of the channel is 0.2 mm.

[0014] In one embodiment of this disclosure, the annular disk has multiple openings, each of which is disposed in a channel.

[0015] In one embodiment of this disclosure, the height of each fan blade is between 0.05 mm and 0.2 mm.

[0016] In one embodiment of this disclosure, the height of each fan blade relative to the annular disk is uniform.

[0017] In one embodiment of this disclosure, fan blades are respectively disposed on both sides of the annular disk.

[0018] In one embodiment of this disclosure, the fan blades are disposed on one side of the annular disk.

[0019] In one embodiment of this disclosure, the outer edge of the hub is provided with a plurality of external lugs, which are stacked along the axial direction of the hub and dispersed along the circumference of the hub. The inner edge of each annular disc is provided with a plurality of internal lugs corresponding to each external lug, and each external lug is connected to the corresponding internal lug.

[0020] This disclosure also provides a method for manufacturing a fan rotor, comprising: providing an annular sheet; depositing a photoresist on the surface of the annular sheet to define a predetermined shape of a plurality of fan blades; etching the annular sheet to remove portions of the annular sheet from which the photoresist is not deposited to form an annular disk and the aforementioned fan blades, wherein the fan blades are disposed on the annular disk; and removing the photoresist. The fan blades are arranged radially, with each fan blade having a thickness between 0.03 mm and 0.1 mm, and a minimum spacing between the fan blades of 0.2 mm.

[0021] In one embodiment of this disclosure, an etched annular sheet is used to form a plurality of openings through the annular sheet, and each opening is disposed between two adjacent fan blades.

[0022] In one embodiment of this disclosure, both sides of the annular sheet are etched to form fan blades on both sides of the annular disk.

[0023] In one embodiment of this disclosure, one side of an annular disk is etched to form fan blades.

[0024] In one embodiment of this disclosure, the height of each fan blade is between 0.05 mm and 0.2 mm.

[0025] The method for manufacturing a fan rotor disclosed herein forms fan blades by etching, thus enabling the production of fan rotors with densely arranged micro-sized fan blades. Attached Figure Description

[0026] Figure 1 This is a three-dimensional exploded view of the fan rotor of the first embodiment of this disclosure.

[0027] Figure 2 This is a three-dimensional schematic diagram of the fan rotor of the first embodiment of this disclosure.

[0028] Figure 3 for Figure 2 A magnified view of a portion of the image.

[0029] Figure 4 This is a side view of the fan rotor of the first embodiment of this disclosure.

[0030] Figure 5 for Figure 4 A magnified view of a portion of the image.

[0031] Figure 6 A schematic diagram of the opening in the first embodiment.

[0032] Figure 7 This is a three-dimensional exploded view of the fan rotor of the second embodiment of this disclosure.

[0033] Figure 8 This is a perspective view of the fan rotor of the second embodiment of this disclosure.

[0034] Figure 9 for Figure 8 A magnified view of a portion of the image.

[0035] Figure 10 This is a side view of the fan rotor of the second embodiment of this disclosure.

[0036] Figure 11 for Figure 10 A magnified view of a portion of the image.

[0037] Figure 12 A schematic diagram of the opening in the second embodiment.

[0038] Figure 13 This is a three-dimensional exploded view of the fan rotor of the third embodiment of this disclosure.

[0039] Figure 14 This is a perspective view of the fan rotor of the third embodiment of this disclosure.

[0040] Figure 15 for Figure 14 A magnified view of a portion of the image.

[0041] Figure 16 This is a side view of the fan rotor of the third embodiment of this disclosure.

[0042] Figure 17 for Figure 16 A magnified view of a portion of the image.

[0043] Figure 18 This is a flowchart of the method for manufacturing the fan rotor disclosed herein.

[0044] Figures 19 to 20 This is a schematic diagram illustrating the steps of the manufacturing method of the fan rotor disclosed herein.

[0045] The attached figures are labeled as follows:

[0046] 10: Ring-shaped sheet

[0047] 20: Photoresist

[0048] 100, 100a: Wheel hub

[0049] 111, 111b, 111c, 111d: Protruding ears

[0050] 200, 200a, 200b, 200c, 200d: Impeller

[0051] 201, 201a, 201b, 201c, 201d: Connecting holes

[0052] 202: Through-hole

[0053] 210, 210a, 210b, 210c, 210d: Annular disks

[0054] 211b, 211c, 211d: Inwardly protruding ear

[0055] 220, 220a, 220b, 220c, 220d: Fan blades

[0056] 221, 221a, 221b, 221c, 221d: Channels

[0057] W, Wa, Wb, Wc, Wd: Width

[0058] T,Ta,Tb,Tc,Td,Te: Thickness

[0059] H,Ha,Hb,Hc,Hd: Height Detailed Implementation

[0060] In the description of this disclosure, it should be understood that the terms "front side", "rear side", "left side", "right side", "front end", "rear end", "end", "longitudinal", "lateral", "vertical", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure.

[0061] Unless otherwise defined, terms such as "substantially" and "approximately" are used to describe and narrate small changes. When used in connection with an event or situation, these terms may include the exact moment the event or situation occurred, or an approximate point in time. For example, when used in connection with a numerical value, these terms may include a range of variation less than or equal to ±10% of that value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%.

[0062] The detailed description and technical content of this disclosure will be explained below in conjunction with the accompanying drawings. However, the accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this disclosure.

[0063] See Figures 1 to 5 The first embodiment of this disclosure provides a fan rotor, which includes at least one impeller 200. The impeller 200 includes an annular disk 210 and a plurality of fan blades 220. The fan blades 220 are integrally formed on the annular disk 210 and are arranged radially. In this embodiment, all fan blades 220 are commonly disposed on one side of the annular disk 210, and the other side of the annular disk 210 is a plane.

[0064] Each fan blade 220 is defined with a thickness T and a height H, wherein the thickness T is parallel to the annular disk 210, and the height H is perpendicular to the annular disk 210. In this embodiment, the thickness T of each fan blade 220 is uniform along the longitudinal direction of the fan blade 220 and is between 0.03 mm and 0.1 mm, but this disclosure is not limited thereto; for example, the thickness T of the fan blade 220 may also vary along the longitudinal direction of the fan blade 220. In this embodiment, the height H of each fan blade 220 relative to the annular disk 210 is uniform and is between 0.05 mm and 0.2 mm. In this embodiment, the distance between each fan blade 220 and the adjacent fan blade 220 is greater than 0.2 mm. Specifically, a channel 221 is formed between each fan blade 220 and the adjacent fan blade 220. The channel 221 is defined with a width W (i.e. the aforementioned distance). The width W is parallel to the annular disk 210 and the width W may be different at different positions in the longitudinal direction of the channel 221, but the minimum width W of the channel 221 is 0.2 mm.

[0065] In this embodiment, the fan rotor also includes a hub 100, which is located at the center of the impeller 200. Specifically, the outer edge of the hub 100 is provided with a plurality of external lugs 111, and the inner edge of the annular disk 210 is provided with a plurality of connecting holes 201 corresponding to each external lug 111. Each external lug 111 is connected to the corresponding connecting hole 201 to position the hub 100 at the center of the annular disk 210.

[0066] See Figure 6 In this embodiment, multiple ports 202 can also be provided on the annular disk 210 to connect the two sides of the annular disk 210, and each port 202 is respectively arranged in each channel 221 to increase the air intake of each fan blade 220 and balance the pressure difference between the two sides of the fan rotor.

[0067] See Figures 7 to 11 The second embodiment of this disclosure provides a fan rotor, which includes at least one impeller 200a. The impeller 200a includes an annular disk 210a and a plurality of fan blades 220a. The fan blades 220a are integrally formed on the annular disk 210a and are arranged radially. In this embodiment, the fan blades 220a are respectively disposed on both sides of the annular disk 210a so that the fan rotor can be air-intaken from both sides.

[0068] Each fan blade 220a is defined with a thickness Ta and a height Ha. The thickness Ta is parallel to the annular disk 210a, and the height Ha is perpendicular to the annular disk 210a. In this embodiment, the thickness Ta of each fan blade 220a is uniform along the longitudinal direction of the fan blade 220a and is between 0.03 mm and 0.1 mm. However, this disclosure is not limited to this; for example, the thickness T of the fan blade 220a may also vary along the longitudinal direction of the fan blade 220a. In this embodiment, the height Ha of each fan blade 220a relative to the annular disk 210a is uniform and is between 0.05 mm and 0.2 mm. In this embodiment, the distance between each fan blade 220a and the adjacent fan blade 220a is greater than 0.2mm. Specifically, a channel 221a is formed between each fan blade 220a and the adjacent fan blade 220a. The channel 221a is defined with a width Wa (i.e., the aforementioned distance). The width Wa is parallel to the annular disk 210a and the width Wa may be different at different positions in the longitudinal direction of the channel 221a, but the minimum width Wa of the channel 221a is 0.2mm.

[0069] In this embodiment, the fan rotor also includes a hub 100, which is located at the center of the impeller 200. Specifically, the outer edge of the hub 100a is provided with a plurality of external lugs 111, and the inner edge of the annular disk 210a is provided with a plurality of connecting holes 201a corresponding to each external lug 111. Each external lug 111 is connected to the corresponding connecting hole 201a to position the hub 100 at the center of the annular disk 210a.

[0070] See Figure 12 In this embodiment, multiple ports 202 can also be provided on the annular disk 210a to connect the two sides of the annular disk 210a, and each port 202 is respectively arranged in each channel 221a to connect the fan blades 220 on both sides of the annular disk 210a, thereby increasing the air intake of each fan blade 220a and balancing the pressure difference on both sides of the fan rotor.

[0071] See Figures 13 to 17 The third embodiment of this disclosure provides a fan rotor, which includes a hub 100a and a plurality of impellers 200b, 200c, and 200d. The impellers 200b, 200c, and 200d are disposed on the hub 100a such that the hub 100a is located at the center of each impeller 200b, 200c, and 200d, and the impellers 200b, 200c, and 200d are stacked and spaced apart.

[0072] In this embodiment, each impeller 200b, 200c, 200d includes an annular disk 210b, 210c, 210d and multiple fan blades 220b, 220c, 220d. In each impeller 200b, 200c, 200d, the fan blades 220b, 220c, 220d are integrally formed on the annular disk 210b, 210c, 210d and are arranged radially. In this embodiment, the fan blades 220b, 220c, 220d are respectively disposed on both sides of the annular disk 210b, 210c, 210d so that the fan rotor can be air-intaken from both sides.

[0073] Each fan blade 220b, 220c, 220d is defined with a thickness Tb, Tc, Td and a height Hb, Hc, Hd, respectively. The thicknesses Tb, Tc, Td are parallel to the annular disks 210b, 210c, 210d, and the heights Hb, Hc, Hd are perpendicular to the annular disks 210b, 210c, 210d. In this embodiment, the thicknesses Tb, Tc, Td of each fan blade 220b, 220c, 220d are uniform along the longitudinal direction of the fan blades 220b, 220c, 220d and are between 0.03 mm and 0.1 mm. However, this disclosure is not limited to this. For example, the thicknesses Tb, Tc, Td of the fan blades 220b, 220c, 220d may also vary along the longitudinal direction of the fan blades 220b, 220c, 220d. In this embodiment, the heights Hb, Hc, and Hd of each blade 220b, 220c, and 220d relative to the annular disks 210b, 210c, and 210d are uniform and range from 0.05 mm to 0.2 mm. In this embodiment, the distance between each fan blade 220b, 220c, 220d and its adjacent fan blade 220b, 220c, 220d is greater than 0.2mm. Specifically, a channel 221b, 221c, 221d is formed between each fan blade 220b, 220c, 220d and its adjacent fan blade 220b, 220c, 220d. The channel 221b, 221c, 221d is defined with a width Wb, Wc, Wd (i.e., the aforementioned distance). The width Wb, Wc, Wd is parallel to the annular disk 210b, 210c, 210d. Moreover, the width Wb, Wc, Wd may be different at different positions in the longitudinal direction of the channel 221b, 221c, 221d, but the minimum width Wb, Wc, Wd of the channel 221b, 221c, 221d is 0.2mm.

[0074] In this embodiment, the outer edge of the hub 100a is provided with a plurality of external lugs 111b, 111c, 111d. The external lugs 111b, 111c, 111d are stacked along the axial direction of the hub 100a and dispersed along the circumference of the hub 100a. The inner edge of each annular disk 210b, 210c, 210d is provided with a plurality of internal lugs 211b, 211c, 211d corresponding to each external lug 111b, 111c, 111d. Each external lug 111b, 111c, 111d is connected to its corresponding internal lug 211b, 211c, 211d. Specifically, each internal lug 211b, 211c, 211d is provided with a connecting hole 201b, 201c, 201d for connecting to the corresponding external lug 111b, 111c, 111d. Therefore, when assembling each impeller 200b, 200c, 200d in sequence, the inner lug 211b of one impeller 200b can bypass the outer lugs 111c, 111d of the other impellers 200c, 200d and be assembled to its corresponding outer lug 111b, thus facilitating the assembly of multiple impellers 200b, 200c, 200d.

[0075] In this embodiment, multiple openings (not shown) can also be provided on the annular disks 210b, 210c, 210d to connect the two sides of the annular disks 210b, 210c, 210d. Moreover, each opening is respectively arranged in each channel 221b, 221c, 221d to connect the fan blades 220b, 220c, 220d on both sides of the annular disks 210b, 210c, 210d, thereby increasing the air intake of each fan blade 220b, 220c, 220d and balancing the pressure difference on both sides of the fan rotor.

[0076] See Figure 18 This disclosure further provides a method for manufacturing a fan rotor, which is used to produce the fan rotors described in the foregoing embodiments. The method for manufacturing the fan rotor in this embodiment includes the steps described above.

[0077] To make such Figures 1 to 6 The fan rotor of the first embodiment shown is an example. First, refer to... Figure 18 and Figure 19 In step a, an annular sheet 10 is provided. The annular sheet 10 can be made of plastic or metal, and in this embodiment, the thickness Te of the annular sheet 10 is greater than 0.1 mm. The annular sheet 10 referred to here is not the annular disk 210 referred to in the previous embodiments.

[0078] See Figure 18 and Figure 19 Following step a, in step b, a photoresist 20 is applied to the surface of the annular sheet 10 to define the predetermined shape of the plurality of fan blades 220.

[0079] See Figure 18 and Figure 20 Following step b, in step c, the annular sheet 10 is etched to remove the portion of the annular sheet 10 on which the photoresist 20 is not applied. Specifically, after the annular sheet 10 is etched, the aforementioned annular disk 210 is formed, and the portion of the annular sheet that is blocked by the light 10 and not etched forms a plurality of the aforementioned fan blades 220, which are arranged radially.

[0080] All fan blades 220 can be arranged together on one side of the annular disk 210, i.e., the other side of the annular disk 210 is a plane. Or it can be as follows: Figures 7 to 12 The fan rotor of the second embodiment shown has fan blades 220a respectively disposed on both sides of the annular disk 210a.

[0081] Specifically, production such as Figures 1 to 6 In the fan rotor of the first embodiment shown, one side of the annular plate 10 is etched so that all the fan blades 220 are arranged together on one side of the annular disk 210. Alternatively, it can be fabricated as follows: Figures 7 to 12 When the fan rotor of the second embodiment is shown, the two sides of the annular sheet 10 are etched respectively to form fan blades 220a on the two sides of the annular disk 210.

[0082] See Figure 20 Each fan blade 220 produced in the aforementioned steps has a thickness T and a height H, with the thickness T parallel to the annular disk 210 and the height H perpendicular to the annular disk 210. In this embodiment, the thickness T of each fan blade 220 is uniform along the longitudinal direction of the fan blade 220 and is between 0.03 mm and 0.1 mm, but this disclosure is not limited to this; for example, the thickness T of the fan blade 220 may also vary along the longitudinal direction of the fan blade 220. In this embodiment, the height H of each fan blade 220 relative to the annular disk 210 is uniform and is between 0.05 mm and 0.2 mm. In this embodiment, the distance between each fan blade 220 and another adjacent fan blade 220 is greater than 0.2 mm.

[0083] Specifically, each fan blade 220 and its adjacent fan blade 220 form a channel 221 through the aforementioned etching. The channel 221 is defined with a width W (i.e. the aforementioned spacing), which is parallel to the annular disk 210. The width W may be different at different positions in the longitudinal direction of the channel 221, but the minimum width W of the channel 221 is 0.2 mm.

[0084] See Figure 18 and Figure 6 Following step c, the photoresist 20 is removed in step d to complete the fan rotor.

[0085] In this embodiment, when etching the annular sheet 10, multiple openings 202 can be formed in the annular disk 210 by penetrating a portion of the annular sheet 10. Each opening 202 is respectively arranged between two adjacent fan blades 220. That is, after etching to form each channel 221, the etching is carried out twice, or the etching is carried out at the same time as etching to form each channel 221.

[0086] The method for manufacturing a fan rotor disclosed herein forms fan blades by etching, thus enabling the production of fan rotors with densely arranged micro-sized fan blades.

[0087] The above description is only a preferred embodiment of the present invention and is not intended to limit the patent scope of the present invention. Other equivalent variations that utilize the patent spirit of the present invention should all fall within the patent scope of the present invention.

Claims

1. A fan rotor, comprising: A ring-shaped disk; and Multiple fan blades are integrally formed by etching, and the multiple fan blades are arranged radially on the annular disk. The thickness of each fan blade is between 0.03 mm and 0.1 mm. Each fan blade forms a channel with an adjacent fan blade, and the minimum width of the channel is 0.2 mm.

2. The fan rotor as claimed in claim 1, wherein the annular disk has a plurality of openings, each of the openings being disposed in each of the channels.

3. The fan rotor as claimed in claim 1, wherein the height of each fan blade is between 0.05 mm and 0.2 mm.

4. The fan rotor of claim 1, wherein the height of each fan blade relative to the annular disk is uniform.

5. The fan rotor as claimed in claim 1, wherein the plurality of fan blades are respectively disposed on both sides of the annular disk.

6. The fan rotor of claim 1, wherein the plurality of said fan blades are disposed on one side of the annular disk.

7. The fan rotor as claimed in claim 1 further includes a hub disposed at the center of the annular disk, the outer edge of the hub being provided with a plurality of external lugs, the inner edge of the annular disk being provided with a plurality of connecting holes corresponding to each of the external lugs, and each of the external lugs being respectively connected to the corresponding connecting holes.

8. A fan rotor comprising: One wheel hub; and Multiple impellers are disposed on the hub, and the multiple impellers are stacked and spaced apart. Each impeller includes an annular disk and multiple blades. In each impeller, the multiple blades and the annular disk are integrally formed by etching, and the multiple blades are arranged radially on the annular disk. The thickness of each blade is between 0.03 mm and 0.1 mm. A channel is formed between each blade and an adjacent blade, and the minimum width of the channel is 0.2 mm.

9. The fan rotor of claim 7, wherein the annular disk has a plurality of openings, each of the openings being disposed in each of the channels.

10. The fan rotor of claim 7, wherein the height of each fan blade is between 0.05 mm and 0.2 mm.

11. The fan rotor of claim 7, wherein the height of each fan blade relative to the annular disk is uniform.

12. The fan rotor of claim 7, wherein the plurality of fan blades are respectively disposed on both sides of the annular disk.

13. The fan rotor of claim 7, wherein the plurality of said fan blades are disposed on one side of the annular disk.

14. The fan rotor as claimed in claim 7, wherein the outer edge of the hub is provided with a plurality of external lugs, the plurality of external lugs are stacked along the axial direction of the hub and dispersed along the circumferential direction of the hub, the inner edge of each annular disc is provided with a plurality of internal lugs corresponding to each of the external lugs, and each of the external lugs is respectively connected to the corresponding internal lugs.

15. A method for manufacturing a fan rotor, comprising: a) Provide a ring-shaped sheet; b) A photoresist is applied to the surface of the annular sheet to define the predetermined shape of multiple fan blades; c) Etching the annular substrate to remove the portion of the annular substrate not covered with the photoresist to form an annular disk and a plurality of fan blades, wherein the plurality of fan blades are disposed on the annular disk, wherein the plurality of fan blades are arranged radially, the minimum spacing between the plurality of fan blades is 0.2 mm, and the thickness of each fan blade is between 0.03 mm and 0.1 mm; and d) Remove the photoresist.

16. The method of manufacturing a fan rotor as claimed in claim 15, wherein the annular sheet is etched through the annular disk to form a plurality of openings, each of the openings being disposed between two adjacent fan blades.

17. The method of manufacturing a fan rotor as claimed in claim 15, wherein both sides of the annular sheet are etched to form a plurality of the fan blades on both sides of the annular disk.

18. The method of manufacturing a fan rotor as claimed in claim 15, wherein one side of the annular sheet is etched to form a plurality of the fan blades.

19. The method of manufacturing a fan rotor as claimed in claim 15, wherein the height of each fan blade is between 0.05 mm and 0.2 mm.