High-precision concrete vibration reduction table and vibration reduction table construction method

Abstract

The invention discloses a high-precision concrete vibration reduction table and a vibration reduction table construction method.The high-precision concrete vibration reduction table is characterized in that a first vibration reduction layer is arranged on the upper side of a vibration reduction base in an embedded mode; the bearing base is anchored on the position, corresponding to the first vibration reduction layer, of the vibration reduction base, and a second vibration reduction layer is arranged on the upper side of the bearing base in an embedded mode; and the equipment base is embedded in the position, corresponding to the second vibration reduction layer, of the bearing base, and the equipment base is filled with damping anti-vibration quartz sand. By arranging the vibration reduction base, the bearing base and the equipment base which are formed by stacking the vibration reduction layers at intervals, vibration is resisted through inertia of the different bases, impact energy is absorbed through the vibration reduction layers, the different inherent frequencies of the multiple bases can avoid the frequency of equipment operation and environment vibration, the resonance condition is prevented, and the service life of the equipment is prolonged. The damping device can adapt to various high-precision production devices, does not need to be adjusted in the using process, and can resist external environment interference.

Description

Technical Field

[0001] This invention relates to the field of vibration reduction technology for high-precision production equipment, and in particular to a high-precision concrete vibration reduction table and a method for constructing the vibration reduction table. Background Technology

[0002] For high-precision production equipment such as lithography production lines, semiconductor manufacturing, optical inspection, and scientific research experiments, the vibration requirements of the working environment are extremely high. Even the slightest vibration can lead to increased measurement errors, deviations in experimental results, and even affect the normal operation and service life of the instruments. Furthermore, with the continuous development of high-precision instruments and equipment and the increasing complexity of application scenarios, the requirements for the accuracy, stability, and adaptability of vibration damping tables are also constantly increasing. Therefore, when arranging high-precision equipment, it is necessary to set up foundation support that can effectively isolate complex vibration interference.

[0003] In existing technologies, such as CN119356234A-Vibration damping devices, workpiece stage systems, and lithography equipment, the main way to improve equipment stability is by setting a balancing mass block at the bottom of the equipment to improve dynamic stability. However, this vibration damping method has strong limitations. It needs to be repeatedly adjusted for different types of production activities and is easily affected by external environmental interference.

[0004] Therefore, existing technologies still need to be improved and developed. Summary of the Invention

[0005] To address the limitations of existing technologies that improve dynamic stability by setting balancing mass blocks at the bottom of equipment, the need for targeted adjustments for different production activities, and the susceptibility of vibration reduction effects to external environmental interference, this invention provides a high-precision concrete vibration damping table and a method for constructing the vibration damping table.

[0006] The present invention is achieved through the following technical solutions:

[0007] A high-precision concrete vibration damping table, wherein the high-precision concrete vibration damping table comprises:

[0008] A vibration damping base, wherein a first vibration damping layer is fitted into the upper side of the vibration damping base;

[0009] A bearing base is anchored on the vibration damping base at a position corresponding to the first vibration damping layer, and a second vibration damping layer is fitted on the upper side of the bearing base;

[0010] The equipment base is fitted onto the bearing base at a position corresponding to the second vibration damping layer, and the interior of the equipment base is filled with damping and vibration-damping quartz sand.

[0011] The first damping layer includes a vibration damping pad and a damping membrane that are fixedly attached to each other, and the structure of the second damping layer is the same as that of the first damping layer.

[0012] The high-precision concrete vibration damping table, wherein the first vibration damping layer is disposed at the center position on the upper side of the vibration damping base, and a plurality of anchor piles are uniformly disposed on the vibration damping base along the vertical direction, and the plurality of anchor piles penetrate the first vibration damping layer and are anchored to the bearing base;

[0013] An adhesive layer is provided at the positions corresponding to the anchor piles in the vibration damping base. The adhesive layer is circumferentially wrapped around the anchor piles and located inside the vibration damping base.

[0014] The high-precision concrete vibration damping table, wherein the bearing base includes a first foundation groove and a second foundation groove;

[0015] The first foundation groove is anchored on the vibration damping base. A first mounting groove is provided at the center of the upper side of the first foundation groove, and the second vibration damping layer is disposed in the first mounting groove.

[0016] The second base platform is fitted into the first mounting groove. A second mounting groove is provided at the center of the upper side of the second base platform. The second mounting groove is provided with the second vibration damping layer. The second mounting groove is used to support the equipment base.

[0017] The high-precision concrete vibration damping table, wherein the vibration damping base, the bearing base, and the equipment base are components made of concrete material;

[0018] The vibration damping base, the load-bearing base, and the equipment base are all equipped with steel cages.

[0019] The vibration damping pad is a rubber pad, and the damping membrane is a PVC damping membrane.

[0020] The high-precision concrete vibration damping table, wherein the equipment base is provided with an anti-corrosion layer, and the anti-corrosion layer is applied to the upper side of the equipment base after being smoothed out;

[0021] Angle steel is provided around the side of the equipment base, and the anti-corrosion layer is used to wrap the angle steel after surface grinding.

[0022] The anti-corrosion layer is a two-layer cloth and five-layer epoxy coating; the flatness of the anti-corrosion layer is ±2mm.

[0023] A method for constructing a vibration damping table, wherein the method includes:

[0024] A vibration damping base is poured in a predetermined area, and a first vibration damping layer is laid on the upper side of the poured vibration damping base.

[0025] A bearing base is cast on the bearing base at the position corresponding to the first vibration damping layer. A second vibration damping layer is then fitted and laid on the upper side of the cast bearing base. The first vibration damping layer includes a vibration damping pad and a damping membrane. The vibration damping pad and the damping membrane are prefabricated and fixedly attached. The second vibration damping layer has the same structure as the first vibration damping layer.

[0026] The equipment base is cast on the bearing base at the position corresponding to the second vibration damping layer, and damping and vibration-damping quartz sand is poured into the dried equipment base.

[0027] The method for constructing a vibration damping platform, wherein the step of casting a vibration damping base in a predetermined area includes:

[0028] Determine the installation area on the upper side of the vibration damping base, and reserve several assembly holes in the installation area when casting the vibration damping base;

[0029] After the vibration damping base is cured, several anchor piles are inserted vertically into the assembly hole, and an adhesive layer is injected into the assembly hole. The adhesive layer wraps around the outside of the anchor pile corresponding to the position of the vibration damping base.

[0030] The first vibration damping layer is laid on the installation area, and a plurality of the anchor piles penetrate the first vibration damping layer.

[0031] The method for constructing a vibration damping platform, wherein the step of casting a bearing base on the vibration damping base at a position corresponding to the first vibration damping layer includes:

[0032] A first foundation trench is poured in the installation area. The first foundation trench is anchored to a plurality of anchor piles. When pouring the first foundation trench, a first installation groove is formed on the upper side of the first foundation trench, and the second vibration damping layer is embedded and laid in the first installation groove.

[0033] A second foundation trench is poured above the first mounting trench. During the pouring of the second foundation trench, a second mounting trench is formed on the upper side of the second foundation trench, and the second vibration damping layer is embedded and laid in the second mounting trench.

[0034] Angle steel is provided around the side of the equipment base, and the surface of the angle steel is ground.

[0035] An anti-corrosion layer is provided on the upper side of the equipment base, and the anti-corrosion layer covers the angle steel and the upper side of the equipment base;

[0036] The anti-corrosion layer is flattened, and the flatness of the anti-corrosion layer is ±2mm.

[0037] The beneficial effects of this invention are as follows: This invention consists of a vibration-damping base, a load-bearing base, and an equipment base, which are composed of vibration-damping layers stacked at intervals. It utilizes the inertia of different bases to resist vibration and absorbs impact energy through the vibration-damping layers. The different natural frequencies of the multiple bases can avoid the frequencies of equipment operation and environmental vibration, preventing resonance and thus achieving the effect of vibration reduction for production equipment. This invention can be adapted to a variety of high-precision production equipment, requires no adjustment during use, and can resist external environmental interference. Attached Figure Description

[0038] Figure 1 This is an exploded view of the high-precision concrete vibration damping table of the present invention;

[0039] Figure 2 This is a three-dimensional structural schematic diagram of the high-precision concrete vibration damping table of the present invention;

[0040] Figure 3 This is a flowchart of the manufacturing method of the high-precision concrete vibration damping table of the present invention.

[0041] exist Figures 1 to 3 In the middle: 100, vibration damping base; 110, first vibration damping layer; 130, anchor pile; 131, adhesive layer; 200, bearing base; 210, first foundation platform; 211, first mounting slot; 220, second foundation platform; 221, second mounting slot; 230, second vibration damping layer; 300, equipment base; 310, anti-corrosion layer; 320, angle steel. Detailed Implementation

[0042] To make the objectives, technical solutions, and effects of this invention clearer and more explicit, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

[0043] It should be noted that if the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0044] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0045] In existing technologies, such as CN119356234A-Vibration damping devices, workpiece stage systems, and lithography equipment, the main way to improve equipment stability is by setting a balancing mass block at the bottom of the equipment to improve dynamic stability. However, this vibration damping method has strong limitations. It needs to be repeatedly adjusted for different types of production activities and is easily affected by external environmental interference.

[0046] To address the aforementioned problems in the prior art, the present invention provides a high-precision concrete vibration damping table, such as... Figure 1 As shown, the high-precision concrete vibration damping platform includes: a vibration damping base 100, on which a first vibration damping layer 110 is fitted; a bearing base 200, which is anchored on the vibration damping base 100 at a position corresponding to the first vibration damping layer 110, and on which a second vibration damping layer 230 is fitted; and an equipment base 300, which is fitted on the bearing base 200 at a position corresponding to the second vibration damping layer 230, and whose interior is filled with damping and vibration-damping quartz sand.

[0047] This invention utilizes a vibration-damping base 100, a load-bearing base 200, and an equipment base 300, which are stacked with vibration-damping layers at intervals. By using the inertia of different bases to resist vibration and absorbing impact energy through the vibration-damping layers, the different natural frequencies of the multiple bases can avoid the frequencies of equipment operation and environmental vibration, preventing resonance and thus achieving the effect of vibration reduction for production equipment. This invention is compatible with a variety of high-precision production equipment, requires no adjustment during use, and can resist external environmental interference.

[0048] In the above embodiments, such as Figure 1 and Figure 2As shown, the main body of the high-precision concrete vibration damping table of the present invention consists of a vibration damping base 100, a bearing base 200, and an equipment base 300. The vibration damping base 100 is set on the ground (or below the ground to form the ground surface), serving as the foundation of the entire vibration damping table and providing strong and stable support to ensure the overall stability of the vibration damping table under various complex working conditions. The bearing base 200 is anchored above the vibration damping base 100 to disperse and absorb the stress generated during equipment vibration, thereby reducing the vibration amplitude. The equipment base 300 is located above the bearing base 200 and is used to install production equipment, serving to fix the equipment and transmit the equipment's vibration force.

[0049] In actual installation, the length and width dimensions of the equipment base 300 are smaller than those of the bearing base 200, and the length and width dimensions of the bearing base 200 are smaller than those of the vibration damping base 100. During installation, the equipment base 300 is installed at the center of the bearing base 200, which is then positioned at the center of the vibration damping base 100, forming a pyramid-shaped layered structure. A first vibration damping layer 110 is fitted onto the upper side of the vibration damping base 100, and the bearing base 200 is positioned at the location of the first vibration damping layer 110. A second vibration damping layer 230 is also installed above the bearing base 200, and the equipment base 300 is positioned at the location of the second vibration damping layer 230. In the specific setup, the first damping layer 110 and the second damping layer 230 are made of elastic damping material (detailed below). Therefore, the damping base 100, the bearing base 200 and the equipment base 300 after construction do not form a rigid connection, but an elastic connection. Since the length and width of the damping base 100, the bearing base 200 and the equipment base 300 are different, there are differences in weight. Therefore, static stability can be achieved. Static stability refers to the ability of the vibration table to remain stable under static self-weight load (such as the self-weight of the vibration table and the self-weight of the equipment). The concrete base with its own mass forms an inertial barrier, which effectively offsets and attenuates high and low frequency vibrations within the high and low frequency range.

[0050] The above-mentioned structural design effectively avoids resonance generated by the base during equipment operation. At the same time, the first damping layer 110 and the second damping layer 230, made of elastic damping material, also achieve the functions of vibration reduction and buffering. When subjected to vibration, the mechanical energy is converted into heat energy and dissipated through its own deformation, thereby weakening the transmission of vibration. Through the cooperation between the above structures, the dynamic stability performance of the high-precision concrete vibration damping table is improved, that is, the ability to maintain stability under dynamic loads or external vibration interference. It can absorb stress and significantly reduce the amplitude for both external influences (ground vibration) and equipment influences (vibrations generated during equipment production), thereby ensuring the accuracy requirements during the production of high-precision equipment.

[0051] Meanwhile, in the above embodiment, the equipment base 300 is also filled with damping and vibration-damping quartz sand. The working principle of damping quartz sand (usually referring to a damping device or structure filled with quartz sand) is mainly based on the friction, collision and energy dissipation between particles. It achieves the vibration reduction effect by absorbing and consuming vibration energy. The specific principle of its vibration reduction is as follows:

[0052] Firstly, it dissipates energy through particle friction: Quartz sand is composed of a large number of hard, fine particles. When subjected to vibration or impact, these particles slide, roll, and collide relative to each other. The frictional force on the particle surface and the mechanical energy generated by the collision are converted into heat energy and dissipated, thus consuming vibration energy and weakening vibration transmission. Secondly, it hinders vibration propagation: The filled quartz sand can change the stiffness and damping characteristics of the vibration system. When vibration waves pass through the quartz sand particle layer, they are dispersed, reflected, and attenuated due to the interaction between the particles, reducing the efficiency of vibration transmission to the external structure. Thirdly, it can buffer impact loads: When subjected to instantaneous impact, quartz sand particles absorb impact energy through deformation methods such as compression and misalignment, prolonging the impact time and mitigating the direct impact on equipment or structures.

[0053] With the above-described structural configuration, this invention utilizes the inertia of different bases to resist vibration by setting up a vibration-damping base 100, a bearing base 200, and an equipment base 300 with vibration-damping layers stacked at intervals. The vibration-damping layers absorb impact energy, and the different natural frequencies of the multiple bases can avoid the frequencies of equipment operation and environmental vibration, preventing resonance and thus achieving the effect of vibration reduction for production equipment. This invention is adaptable to a variety of high-precision production equipment, requires no adjustment during use, and can resist external environmental interference.

[0054] In one specific embodiment of the present invention, the aforementioned bearing base 200 may include multiple layers in actual installation. The multi-layered bearing base 200, in addition to supporting the upper equipment base 300, also serves to dynamically eliminate stress through the multiple second damping layers 230. In one specific embodiment, as... Figure 1 and Figure 2 As shown, the aforementioned bearing base 200 specifically includes a first base groove platform and a second base groove platform 220. The first base groove platform 210 is anchored on the aforementioned vibration damping base 100. A first mounting groove 211 is provided at the center of the upper side of the first base groove platform 210, and a second vibration damping layer 230 is provided inside the first mounting groove 211. Correspondingly, the second base groove platform 220 is fitted into the first mounting groove 211 and presses the second vibration damping layer 230 inside the first mounting groove 211. After being limited by the first mounting groove 211, the second base groove platform 220 can maintain the limiting connection with the first base groove platform 210 on the one hand, and on the other hand, when affected by vibration, it can fully transfer the stress to the second vibration damping layer 230 to achieve the reduction of the corresponding force.

[0055] A second mounting groove 221 is provided at the center of the upper side of the second base platform 220. A second vibration damping layer 230 is also provided within the second mounting groove 221. During actual installation, the equipment base 300 is fitted into the second mounting groove 221, and the second vibration damping layer 230 within the second mounting groove 221 is pressed together. The equipment base 300, after being limited by the second mounting groove 221, can maintain its limiting connection with the second base platform 220. Furthermore, when subjected to vibration, it can fully transfer stress to the second vibration damping layer 230, thereby further reducing stress. In practical applications, the specific number of layers of the bearing base 200 is not limited. Depending on the needs of high-precision equipment, those skilled in the art can configure it to have one or more layers; this application does not impose any limitation on this.

[0056] Furthermore, such as Figure 1 As shown, the first vibration damping layer 110 is located at the center of the upper side of the vibration damping base 100. In actual installation, several anchor piles 130 are also uniformly arranged vertically on the vibration damping base 100. The anchor piles 130 can be arranged in multiple ring patterns at 360 degrees to cope with vibration stress in various directions. Several anchor piles 130 penetrate the first vibration damping layer 110 and are anchored to the above-mentioned bearing base 200. The setting of anchor piles 130 not only enhances the connection strength between the vibration damping base 100 and the bearing base 200, but also makes the entire structure more stable.

[0057] More specifically, such as Figure 1 As shown, an adhesive layer 131 is also provided at the locations of several anchor piles 130 within the vibration damping base 100. The adhesive layer 131 is circumferentially wrapped around the anchor piles 130 and located inside the vibration damping base 100 by grouting. The adhesive layer 131 ensures that after the anchor piles 130 are fixedly connected to the bearing base 200, they can form a stable connection by engaging and limiting the anchor piles 130 with the vibration damping base 100, without forming a direct connection. Thus, the adhesive layer 131 elastically disperses the stress transmitted by the anchor piles 130, achieving dynamic stress dispersion rather than rigid stress absorption. This structural design can transfer the weight of the high-precision concrete vibration damping platform and the equipment on the platform, as well as the impact force generated by vibration, to the foundation through anchor bolts, dispersing stress, preventing excessive local stress on the vibration damping platform and thus improving its service life.

[0058] On the other hand, the installation of the adhesive layer 131 at the anchor pile 130 can enhance the vibration resistance of the high-precision concrete vibration damping platform. When encountering strong external vibrations such as ground vibration, the anchor bolt can limit the swaying amplitude of the vibration damping platform, reduce its relative displacement with the foundation, improve the overall vibration resistance of the vibration damping system, and protect the precision equipment on the platform.

[0059] In the above embodiments, the vibration damping base 100, the load-bearing base 200, and the equipment base 300 are all made of concrete, specifically high-precision concrete with a strength grade of C40 and a permeability grade of P8. In addition, a steel cage is provided inside the vibration damping base 100, the load-bearing base 200, and the equipment base 300 to improve the structural strength of each of the vibration damping base 100, the load-bearing base 200, and the equipment base 300.

[0060] In actual construction, the aforementioned vibration damping base 100 is specifically installed inside the ground, while the load-bearing base 200 and equipment base 300 are located above the ground. The entire structure is built on a floor with vibration damping requirements reaching VC-C level, and the ground load-bearing requirement is above 10T / ㎡. Reinforcing cages are also installed inside the vibration damping base 100, load-bearing base 200, and equipment base 300 to form the internal skeleton of the base, thereby improving load and structural strength. The strength grade of the reinforcing steel is HRB400. The permissible value levels of the reinforced concrete vibration damping base 100, load-bearing base 200, and equipment base 300 are VC-A, VC-B, VC-C, VC-D, VC-E, and VC-F levels.

[0061] In the above embodiments, the first damping layer 110 and the second damping layer 230 have the same structure, both specifically made of a fixedly attached anti-vibration pad and a damping pad, wherein the anti-vibration pad is a rubber pad and the damping film is a PVC damping film. The anti-vibration pad utilizes the viscoelastic properties of the rubber material to achieve vibration reduction and buffering. Its working principle is mainly based on the following aspects: First, viscoelastic energy dissipation: Rubber is a viscoelastic material, possessing both elasticity (capable of storing deformation energy generated under external force) and viscosity (capable of dissipating energy through intermolecular friction). When external vibration or impact is transmitted to the rubber pad, the rubber deforms, and the internal molecular chains rub and entangle with each other, converting mechanical energy into heat energy and dissipating it, thereby weakening the transmission of vibration. Second, changing the vibration frequency: The damping rubber pad can change the natural vibration frequency of the system, allowing the system to avoid the resonant frequency range and preventing the resonance amplification of vibration, thus playing a vibration isolation role. Third, buffering impact loads: When subjected to instantaneous impact, the rubber pad absorbs the impact energy through its own elastic deformation, prolongs the impact time, reduces the impact acceleration, and thus reduces the damage to the equipment or structure.

[0062] PVC damping pads are a type of pad material with damping properties, made primarily of polyvinyl chloride (PVC) and containing plasticizers, fillers, and other additives. They possess good chemical stability and are not easily altered with other substances, thus providing protection for vibration damping pads. Simultaneously, damping pads effectively absorb and dissipate vibration energy to reduce resonance. Furthermore, PVC material has a certain degree of weather resistance, maintaining its performance under various environmental conditions, thereby extending its service life.

[0063] Furthermore, in another possible embodiment of the invention, such as Figure 1 and Figure 2 As shown, to protect the equipment base 300 and prevent damage to the upper layer of the equipment base 300 due to usage time, external environment, etc., which would reduce the fixing strength of the high-precision production equipment, an anti-corrosion layer 310 is also provided on the equipment base 300 in this embodiment. The anti-corrosion layer 310 is flattened and covered on the upper side of the equipment base 300. Specifically, the anti-corrosion layer 310 is a two-layer five-coat epoxy coating and a polyurethane coating. The two-layer five-coat epoxy coating is an anti-corrosion coating composed of epoxy resin and glass fiber cloth. It has excellent resistance to acid, alkali, salt, chemical solvents, oil corrosion, etc.; it has good adhesion to the substrate, strong wear resistance, impact resistance, low water permeability, strong adhesion, and high water pressure resistance, which can effectively protect the equipment base 300.

[0064] After applying a two-layer, five-coat epoxy coating to the upper side of the equipment base 300, a polyurethane coating can be further applied to achieve better vibration absorption. Polyurethane, short for polyurethane foam, is a high-molecular-weight material with excellent mechanical properties, formed by the condensation reaction of polyols and polyisocyanates. Polyurethane primarily has a thermoplastic linear structure, offering better stability, chemical resistance, resilience, and mechanical properties than PVC foam, with less compression deformation. It also provides good thermal insulation, sound insulation, vibration resistance, and anti-toxic properties. Its elastomer properties fall between those of plastics and rubber; it is oil-resistant, wear-resistant, low-temperature resistant, aging-resistant, has high hardness, and is elastic, enabling it to absorb vibration stress while coping with various unexpected situations that may occur during production.

[0065] In actual installation, the anti-corrosion layer 310 should be flattened, and the flatness of the anti-corrosion layer 310 should be controlled within ±2mm to ensure the stability of the installation of high-precision production equipment.

[0066] In addition, angle steel 320 is also provided around the side of the equipment base 300. The angle steel 320 is 60*60*8. It is used to form a rim on the side of the equipment base 300. On the one hand, it protects the equipment base 300. On the other hand, it can improve the overall integrity of the equipment base 300 during the vibration reduction process.

[0067] Based on the above embodiments, the present invention also provides a method for constructing a vibration damping table, such as... Figure 3 As shown, the specific process of constructing this vibration damping table is as follows:

[0068] S10. Cast a vibration damping base in a predetermined area, and lay a first vibration damping layer on the upper side of the cast vibration damping base.

[0069] S20. Cast a bearing base on the vibration damping base at the position corresponding to the first vibration damping layer, and embed and lay a second vibration damping layer on the upper side of the cast bearing base; the first vibration damping layer includes a vibration damping pad and a damping membrane, the vibration damping pad and the damping membrane are prefabricated and fixedly attached, and the second vibration damping layer has the same structure as the first vibration damping layer;

[0070] S30. Cast the equipment base on the bearing base at the position corresponding to the second vibration damping layer, and fill the dried equipment base with damping and vibration-damping quartz sand.

[0071] In this embodiment, as Figure 1 As shown, in this invention, the vibration damping base is installed on or below a high-strength ground. Specific requirements for the ground include achieving a vibration damping level of VC-C and a load-bearing capacity of 10T / m. 2 This requirement can be achieved by compacting the ground foundation; this application does not restrict the installation method. The vibration damping base is formed by casting and serves as the foundation of the entire vibration damping platform, providing stable support and ensuring the overall stability of the platform under various complex working conditions. The load-bearing base is anchored above the vibration damping base to disperse and absorb the stress generated by equipment vibration, thereby reducing the vibration amplitude. The equipment base is located above the load-bearing base and is actually used to install production equipment, serving to fix the equipment and transmit its vibration force. In actual installation, a first damping layer is provided on the upper side of the vibration damping base. This first damping layer is made of elastic material and is used to absorb the stress between the vibration damping base and the load-bearing base. A second damping layer is provided on the load-bearing base to absorb the stress between the load-bearing base and the equipment base.

[0072] In this embodiment, the length and width dimensions of the equipment base are smaller than those of the bearing base, which in turn are smaller than those of the vibration damping base, forming a pyramid-like layered structure. The first damping layer is fitted onto the upper side of the vibration damping base, and the second damping layer is fitted onto the upper side of the bearing base. The groove-shaped structure formed at the fitting points serves to limit the upper base and ensure uniform contact in all directions, thereby absorbing stress in all directions. With this structural configuration, an elastic connection is formed between the vibration damping base, the bearing base, and the equipment base. On one hand, the vibration damping platform remains stable under static self-weight loads (including the weight of the damping platform and the equipment itself), forming multiple inertial barriers to effectively offset and attenuate high and low frequency vibrations. On the other hand, it improves the overall dynamic stability of the vibration damping platform (including ground vibrations and vibrations generated during equipment production), achieving stress absorption and significantly reducing amplitude. Simultaneously, the different weights of the bases effectively prevent resonance, ensuring the accuracy requirements of high-precision equipment production.

[0073] In addition, after the concrete is cured and completely dried, damping and vibration-damping quartz sand is poured into the interior of the equipment base. The working principle of damping quartz sand (usually referring to damping devices or structures filled with quartz sand) is mainly based on the friction, collision and energy dissipation between particles. It achieves the vibration reduction effect by absorbing and consuming vibration energy. Its vibration reduction principle includes converting mechanical energy into heat energy through the friction of particles, dispersing, reflecting and attenuating through the interaction between particles, and absorbing the impact energy through deformation such as compression and misalignment when subjected to instantaneous impact to achieve the vibration reduction function.

[0074] The vibration damping table set up by the above method has the functions of absorbing stress dynamically and statically and reducing vibration amplitude. It can form a vibration damping table structure that can maintain support and vibration damping functions for a long time. It is used as an installation foundation for high-precision production equipment and to achieve vibration damping effect for high-precision production equipment. At the same time, the vibration damping table has a wide range of applications and can meet the needs of high-precision production equipment such as lithography production lines, semiconductor manufacturing, optical inspection and scientific research experiments, and does not require adaptation and adjustment when the equipment switches production modes.

[0075] Furthermore, the aforementioned casting of a vibration-damping base in the predetermined area includes:

[0076] S11. Determine the installation area on the upper side of the vibration damping base, and reserve several assembly holes in the installation area when casting the vibration damping base;

[0077] S12. After the vibration damping base is cured, a number of anchor piles are inserted vertically into the assembly hole, and an adhesive layer is injected into the assembly hole. The adhesive layer wraps around the outside of the anchor piles, corresponding to the position of the vibration damping base.

[0078] S13. The first vibration damping layer is laid on the installation area, and a plurality of the anchor piles penetrate the first vibration damping layer.

[0079] In this embodiment, as Figure 1As shown, since the bearing base is located above the vibration damping base, in order to limit the position of the bearing base and improve the overall stability of the vibration damping platform, in this embodiment, after determining the installation area on the upper side of the vibration damping base, anchor piles are also set on the vibration damping base to fix the bearing base. Specifically, an installation area is determined on the upper side of the vibration damping base, which is the actual installation position of the bearing base. When pouring the vibration damping base, several assembly holes are reserved in the installation area. The diameter of the assembly holes should be larger than the diameter of the anchor piles. After the vibration damping base is cured, the assembly holes are formed. Then, anchor piles are inserted vertically into the assembly holes, and an adhesive layer is poured into the assembly holes. After being poured into the assembly hole and cured over a certain period of time, the anchor pile is fixed while also possessing a certain degree of elasticity. This allows for fixed positioning in the vertical direction and elastic positioning in the horizontal direction, thus enabling the bearing base to be firmly fixed to the vibration damping base in an elastic connection. In this embodiment, the adhesive layer circumferentially wraps around the outer side of the anchor pile corresponding to the position of the vibration damping base. This allows for stress absorption in various directions, achieving dynamic stress dispersion rather than rigid stress absorption. This structural design can transfer the weight of the high-precision concrete vibration damping platform and the equipment on the platform, as well as the impact force generated by vibration, to the foundation through the anchor bolts, dispersing stress, preventing excessive local stress on the vibration damping platform and thus improving its service life.

[0080] On the other hand, the adhesive layer at the anchor pile can enhance the vibration resistance of the high-precision concrete vibration damping platform. When encountering strong external vibrations such as ground vibration, the anchor bolts can limit the swaying amplitude of the vibration damping platform, reduce its relative displacement with the foundation, improve the overall vibration resistance of the vibration damping system, and protect the precision equipment on the platform.

[0081] After the installation of the anchor piles is completed, the first vibration damping layer is laid on the installation area, and several anchor piles penetrate the first vibration damping layer and are anchored to the bearing base. This ensures that the connection between the vibration damping base and the bearing base at the anchor piles also has elastic vibration damping performance in the vertical direction. The installation of anchor piles not only enhances the connection strength between the vibration damping base and the bearing base, but also makes the entire structure more stable.

[0082] Furthermore, the aforementioned casting of a bearing base on the vibration-damping base at the position corresponding to the first vibration-damping layer includes:

[0083] S21. A first foundation trench is poured in the installation area. The first foundation trench is anchored to a plurality of anchor piles. When pouring the first foundation trench, a first installation groove is formed on the upper side of the first foundation trench, and the second vibration damping layer is embedded and laid in the first installation groove.

[0084] S22. A second foundation trench is poured above the first mounting trench. When pouring the second foundation trench, a second mounting trench is formed on the upper side of the second foundation trench, and the second vibration damping layer is embedded and laid in the second mounting trench.

[0085] In this embodiment, the bearing base may include multiple layers when actually set up. In addition to supporting the equipment base above, the multi-layered bearing base also serves to dynamically eliminate stress through multiple second damping layers.

[0086] In the specific embodiments described above, such as Figure 1 and Figure 2 As shown, the process of casting the bearing base on the installation area of ​​the vibration damping base is divided into two steps. First, a first foundation trench is cast at the position corresponding to the first vibration damping layer in the installation area. The first foundation trench corresponds to the upper end of the aforementioned anchor piles, and the anchor piles are cast into the first foundation trench to form a stable connection. At the same time, during the casting process, a first installation groove needs to be reserved on the upper side of the first foundation trench. The first installation groove is used to provide installation and limiting space for the second foundation trench. After the first foundation trench dries and cures, the second vibration damping layer is laid in the first foundation trench.

[0087] Then, a second foundation platform is poured at the location of the first mounting groove. The length and width of the second foundation platform are adapted to the first mounting groove so that the dried and cured second foundation platform is fitted into the first mounting groove. At the same time, the second foundation platform and the first foundation platform are elastically connected through the second damping layer. When subjected to vibration, the stress can be fully transferred to the second damping layer to reduce the corresponding force.

[0088] In the above embodiments, the first and second damping layers have essentially the same structure, both specifically made of fixedly bonded anti-vibration pads and damping pads. The anti-vibration pads are rubber pads, and the damping membrane is a PVC damping membrane. The rubber pads utilize the viscoelastic properties of the rubber material to achieve vibration reduction and buffering, dissipating energy through viscoelasticity and changing the vibration frequency while buffering impact loads. The PVC damping membrane is a pad material with damping properties, made primarily of polyvinyl chloride (PVC) with added plasticizers, fillers, and other components. It effectively absorbs and dissipates vibration energy to reduce resonance. Furthermore, PVC material has a certain degree of weather resistance, maintaining its performance under different environmental conditions, thereby extending its service life.

[0089] In the above embodiments, the vibration damping base, the first foundation trough, the second foundation trough, and the equipment base are connected by the first and second vibration damping layers to form an elastic connection. Since the vibration damping base, the first foundation trough, the second foundation trough, and the equipment base have different length and width dimensions, their weights differ, thus achieving static stability, i.e., the ability to maintain stability under self-weight load, forming multiple inertial barriers to offset high and low frequency vibrations. On the other hand, the first and second vibration damping layers also play a role in vibration damping and buffering. When subjected to vibration, they can convert mechanical energy into heat energy through their own deformation and dissipate it, thereby weakening the transmission of vibration and achieving a dynamic stability effect. They can absorb stress and significantly reduce amplitude in response to both external influences (ground vibration) and equipment influences (vibrations generated during equipment production), thereby ensuring the accuracy requirements of high-precision equipment production.

[0090] In the specific implementation of the above embodiments, when casting the vibration damping base, bearing base and equipment base, the corresponding steel cages for the vibration damping base, bearing base and equipment base should be pre-set and the supporting templates should be set to improve the load capacity, structural strength and auxiliary casting of the vibration damping table. The strength grade of the steel bars is HRB400. The allowable value level of the vibration damping base, bearing base and equipment base made of reinforced concrete is VC-A, VC-B, VC-C, VC-D, VC-E and VC-F, which meet the usage requirements of various types of high-precision production equipment.

[0091] Following the above-mentioned filling of the dried equipment base with damping and vibration-damping quartz sand, the following is also included:

[0092] S31. Angle steel is provided around the side of the equipment base, and the surface of the angle steel is ground.

[0093] S32. An anti-corrosion layer is provided on the upper side of the equipment base, and the anti-corrosion layer covers the angle steel and the upper side of the equipment base;

[0094] S33. The anti-corrosion layer is flattened, and the flatness of the anti-corrosion layer is ±2mm.

[0095] In this embodiment, a grouting port is reserved on the platform of the equipment base during the pouring of the equipment base. After the equipment base is poured and cured, damping and vibration-damping quartz sand is poured into the equipment base. Angle steel with a model of 60*60*8 is also set around the side of the equipment base to form a rim on the side of the equipment base. This serves to protect the equipment base and improve the overall integrity of the equipment base during the vibration reduction process.

[0096] Subsequently, an anti-corrosion layer is installed on the upper side of the equipment base. This layer covers the angle steel and is installed on the upper side of the base. Specifically, the anti-corrosion layer consists of a two-layer epoxy coating and a polyurethane coating. The two-layer epoxy coating is an anti-corrosion coating composed of epoxy resin and fiberglass cloth, which has excellent resistance to acid, alkali, salt, chemical solvents, and oil corrosion. It has good adhesion to the substrate, strong wear resistance, impact resistance, low water permeability, strong adhesion, and high water pressure resistance, thus providing effective protection for the equipment base. After the two-layer epoxy coating is installed on the upper side of the equipment base, a polyurethane coating can be further installed to achieve better vibration absorption. Polyurethane, short for polyurethane foam, is a polymer material with excellent mechanical properties formed by the condensation reaction of polyols and polyisocyanates. Polyurethane mainly has a thermoplastic linear structure, which has better stability, chemical resistance, resilience, and mechanical properties than PVC foam, and has less compression deformation. It also has good heat insulation, sound insulation, vibration resistance, and anti-toxic properties. Elastomers have properties between plastics and rubber, and are oil-resistant, wear-resistant, low-temperature resistant, aging-resistant, high in hardness, and elastic. They can absorb vibration stress while coping with various unexpected situations that may occur during the production process.

[0097] Furthermore, the anti-corrosion layer should be leveled, and the flatness of the anti-corrosion layer should be controlled within ±2mm to ensure the stability of the installation of high-precision production equipment.

[0098] The vibration damping table constructed by the above method consists of vibration damping bases, load-bearing bases, and equipment bases with vibration damping layers stacked at intervals. It uses the inertia of different bases to resist vibration and absorbs impact energy through the vibration damping layers. The different natural frequencies of multiple bases can avoid the frequencies of equipment operation and environmental vibration, preventing resonance and thus achieving the effect of vibration reduction for production equipment. This invention can be adapted to a variety of high-precision production equipment, requires no adjustment during use, and can resist external environmental interference.

[0099] It should be understood that the application of the present invention is not limited to the examples above. Those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. A high-precision concrete vibration damping table, characterized in that, The high-precision concrete vibration damping table includes: A vibration damping base, wherein a first vibration damping layer is fitted into the upper side of the vibration damping base; A bearing base is anchored on the vibration damping base at a position corresponding to the first vibration damping layer, and a second vibration damping layer is fitted on the upper side of the bearing base; The equipment base is fitted onto the bearing base at a position corresponding to the second vibration damping layer, and the interior of the equipment base is filled with damping and vibration-damping quartz sand. The first damping layer includes a vibration damping pad and a damping membrane that are fixedly attached to each other, and the structure of the second damping layer is the same as that of the first damping layer.

2. The high-precision concrete vibration damping table according to claim 1, characterized in that, The first vibration damping layer is disposed at the center of the upper side of the vibration damping base. A plurality of anchor piles are uniformly arranged on the vibration damping base along the vertical direction. The plurality of anchor piles penetrate the first vibration damping layer and are anchored to the bearing base. An adhesive layer is provided at the positions corresponding to the anchor piles in the vibration damping base. The adhesive layer is circumferentially wrapped around the anchor piles and located inside the vibration damping base.

3. The high-precision concrete vibration damping table according to claim 1, characterized in that, The bearing base includes a first foundation groove and a second foundation groove; The first foundation groove is anchored on the vibration damping base. A first mounting groove is provided at the center of the upper side of the first foundation groove, and the second vibration damping layer is disposed in the first mounting groove. The second base platform is fitted into the first mounting groove. A second mounting groove is provided at the center of the upper side of the second base platform. The second mounting groove is provided with the second vibration damping layer. The second mounting groove is used to support the equipment base.

4. The high-precision concrete vibration damping table according to claim 1, characterized in that, The vibration damping base, the load-bearing base, and the equipment base are components made of concrete. The vibration damping base, the load-bearing base, and the equipment base are all equipped with steel cages. The vibration damping pad is a rubber pad, and the damping membrane is a PVC damping membrane.

5. The high-precision concrete vibration damping table according to claim 1, characterized in that, The equipment base is provided with an anti-corrosion layer, which is applied to the upper side of the equipment base after being smoothed out. Angle steel is provided around the side of the equipment base, and the anti-corrosion layer is used to wrap the angle steel after surface grinding. The anti-corrosion layer is a two-layer cloth five-coat epoxy coating and a polyurethane coating; the flatness of the anti-corrosion layer is ±2mm.

6. A method for constructing a vibration damping table, characterized in that, The method for constructing the vibration damping table includes: A vibration damping base is poured in a predetermined area, and a first vibration damping layer is laid on the upper side of the poured vibration damping base. A bearing base is cast on the bearing base at the position corresponding to the first vibration damping layer. A second vibration damping layer is then fitted and laid on the upper side of the cast bearing base. The first vibration damping layer includes a vibration damping pad and a damping membrane. The vibration damping pad and the damping membrane are prefabricated and fixedly attached. The second vibration damping layer has the same structure as the first vibration damping layer. The equipment base is cast on the bearing base at the position corresponding to the second vibration damping layer, and damping and vibration-damping quartz sand is poured into the dried equipment base.

7. The method for constructing a vibration damping table according to claim 6, characterized in that, The process of casting the vibration-damping base in the predetermined area includes: Determine the installation area on the upper side of the vibration damping base, and reserve several assembly holes in the installation area when casting the vibration damping base; After the vibration damping base is cured, several anchor piles are inserted vertically into the assembly hole, and an adhesive layer is injected into the assembly hole. The adhesive layer wraps around the outside of the anchor pile corresponding to the position of the vibration damping base. The first vibration damping layer is laid on the installation area, and a plurality of the anchor piles penetrate the first vibration damping layer.

8. The method for constructing a vibration damping table according to claim 7, characterized in that, The step of casting a bearing base on the vibration-damping base at the position corresponding to the first vibration-damping layer includes: A first foundation trench is poured in the installation area. The first foundation trench is anchored to a plurality of anchor piles. When pouring the first foundation trench, a first installation groove is formed on the upper side of the first foundation trench, and the second vibration damping layer is embedded and laid in the first installation groove. A second foundation trench is poured above the first mounting trench. During the pouring of the second foundation trench, a second mounting trench is formed on the upper side of the second foundation trench, and the second vibration damping layer is embedded and laid in the second mounting trench.

9. The method for constructing a vibration damping table according to claim 6, characterized in that, When casting the vibration damping base, the bearing base and the equipment base, respectively, steel cages corresponding to the vibration damping base, the bearing base and the equipment base are pre-set and support templates are set.

10. The method for constructing a vibration damping table according to claim 6, characterized in that, The process of filling the dried equipment base with damping and vibration-damping quartz sand further includes: Angle steel is provided around the side of the equipment base, and the surface of the angle steel is ground. An anti-corrosion layer is provided on the upper side of the equipment base, and the anti-corrosion layer covers the angle steel and the upper side of the equipment base; The anti-corrosion layer is flattened, and the flatness of the anti-corrosion layer is ±2mm.

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