A drying apparatus for forming a silicon carbide boat and a processing method

Abstract

The application discloses a drying equipment for forming silicon carbide crystal boats and a processing method, relates to the technical field of silicon carbide crystal boat production, and comprises a drying mechanism and a drying box installed on the outer side of the drying mechanism. The inside of the drying mechanism is provided with a rotary drying mechanism, one side of the rotary drying mechanism is provided with a drying mesh cylinder, the drying mechanism comprises a first rotary sleeve, the outer side of the first rotary sleeve is symmetrically provided with bottom drying mesh plates, the top of the bottom drying mesh plates is placed with silicon carbide ceramic crystal boats, the outer side of one side bottom drying mesh plate is rotationally connected with a top arc-shaped mesh cover, and the first rotary sleeve is rotationally connected with a rotating connecting rod. Under the action of the counterweight sliding block, the rotary drying mechanism can not only rotate the bottom drying mesh plates and the top arc-shaped mesh cover, but also keep the bottom drying mesh plates and the silicon carbide ceramic crystal boats in a horizontal state at all times, so that the silicon carbide ceramic crystal boats with soft texture can be preliminarily dried and shaped.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of silicon carbide boat production, in particular to a drying equipment for forming a silicon carbide boat and a processing method. BACKGROUND

[0002] The silicon carbide boat is also called a silicon carbide boat (silicon carbide ceramic boat). The silicon carbide ceramic boat is an important component in the wafer production process and has strong high-temperature resistance. In the production process of the silicon carbide ceramic boat, the silicon carbide ceramic boat needs to be dried after demolding to remove the moisture in the silicon carbide ceramic boat to prevent stress deformation due to water evaporation during high-temperature sintering. Since the unsintered silicon carbide ceramic boat is soft, it cannot be clamped. When the silicon carbide ceramic boat is directly placed in the drying device for drying, the moisture at the bottom of the silicon carbide ceramic boat cannot be timely discharged due to the blockage of the drying device, and the accumulated moisture at the bottom of the silicon carbide ceramic boat affects the uniformity of the heating of the silicon carbide ceramic boat, thereby reducing the quality of the silicon carbide ceramic boat after drying. The silicon carbide ceramic boat is made of silicon carbide, and the drying of silicon carbide needs special attention to temperature and humidity. Since silicon carbide is a high-temperature resistant material, and its internal structure is relatively tight, it is difficult for moisture to evaporate. If the temperature is too high, the crystal structure of silicon carbide will change, affecting its performance. If the humidity is too high, the moisture cannot be evaporated, affecting the drying effect.

[0003] Publication No. CN117824316B discloses a drying device for preparing a silicon carbide ceramic boat. The first sliding plate slides up and down during drying to replace the air outlet position on the lower side of the boat. The first sliding plate and the adjacent first fixed plate are alternately supported to make the boat dry evenly during drying, prevent affecting the product quality, and prevent the arc block from contacting the boat to affect the drying of the boat. The arc block is used to limit the position of the boat, prevent the boat from being positioned at the fixed position, and automatically separate the arc block from the boat during drying to prevent the arc block from contacting the boat and affecting the drying of the boat. The square hole is used to dry the hole on the boat, and the heat and moisture in the hole on the boat cannot be quickly discharged, preventing the water vapor from being retained in the hole on the boat, causing uneven heating in the hole on the boat, and affecting the quality of the boat. However, the patent still has the following problems in actual use:

[0004] The silicon carbide ceramic boat preparation drying device utilizes the up-down sliding of the first sliding plate to replace the air outlet position on the lower side of the boat, and the first sliding plate and the adjacent first fixed plate are alternately supported, so that the boat is uniformly dried during drying. However, the unsintered silicon carbide ceramic boat is soft, and the surface of the silicon carbide ceramic boat may be deformed or damaged during the alternate support, thereby affecting the drying quality of the silicon carbide ceramic boat. In addition, the silicon carbide ceramic boat is placed on the net frame during drying in the prior art, and the net frame and the silicon carbide ceramic boat need a certain contact area for support, so that the support part of the silicon carbide ceramic boat cannot be dried, thereby causing uneven drying of the silicon carbide ceramic boat. In addition, the silicon carbide ceramic boat can be turned over after preliminary drying and shaping, but the drying equipment needs to be opened during turning, which causes heat loss and affects the drying efficiency of the silicon carbide ceramic boat.

[0005] Therefore, a silicon carbide boat forming drying equipment and processing method are provided to solve the above problems. SUMMARY

[0006] The purpose of the present application is to provide a silicon carbide boat forming drying equipment and processing method to solve the above problems. The unsintered silicon carbide ceramic boat is soft, and the surface of the silicon carbide ceramic boat may be deformed or damaged during the alternate support, thereby affecting the drying quality of the silicon carbide ceramic boat. In addition, the silicon carbide ceramic boat is placed on the net frame during drying in the prior art, and the net frame and the silicon carbide ceramic boat need a certain contact area for support, so that the support part of the silicon carbide ceramic boat cannot be dried, thereby causing uneven drying of the silicon carbide ceramic boat.

[0007] To achieve the above purpose, the present application provides the following technical scheme: a silicon carbide boat forming drying equipment and processing method, comprising a drying mechanism, and a drying box installed on the outside of the drying mechanism;

[0008] The inside of the drying mechanism is provided with a rotating drying mechanism, and one side of the rotating drying mechanism is provided with a drying net cylinder;

[0009] Further comprising:

[0010] The drying mechanism comprises a first rotating sleeve, and a bottom drying net plate is symmetrically installed on the outside of the first rotating sleeve, and a silicon carbide ceramic boat is placed on the top of the bottom drying net plate;

[0011] The outside of one side of the bottom drying net plate is rotatably connected with a top arc-shaped net cover, and a magnetic block is fixedly installed at the end of the top arc-shaped net cover;

[0012] The magnetic block is magnetically connected with the bottom drying net plate, and two symmetrical counterweight supports are arranged inside the top arc-shaped net cover.

[0013] Preferably, arc-shaped sliding grooves are symmetrically arranged inside the two counterweight supports, counterweight sliding blocks are slidably connected inside the arc-shaped sliding grooves, limit discs are fixedly installed on the outer sides of the counterweight sliding blocks, the limit discs are slidably connected with the counterweight supports, and drying supports are fixedly installed on both sides of the drying box.

[0014] By adopting the above technical scheme, the top arc-shaped net cover can be opened, and the silicon carbide ceramic boat can be placed on the top of the bottom drying net plate. Under the action of the counterweight sliding blocks inside the counterweight supports, the bottom drying net plate can be kept horizontal.

[0015] Preferably, support frames are fixedly installed at the bottoms of the two drying supports, support legs are fixedly installed at the bottoms of the support frames, a worm gear protective cover is fixedly installed on the outer side of one of the drying supports, rotating supports are symmetrically installed on the inner side of the drying support close to the worm gear protective cover, and first rotating motors are fixedly installed at the tops of the rotating supports.

[0016] By adopting the above technical scheme, the drying supports and the drying box can be supported by the support frames and the support legs.

[0017] Preferably, a rotating worm is fixedly connected to the output end of the first rotating motor, a rotating worm gear is meshingly connected to one side of the rotating worm, the rotating worm gear is rotatably connected with the drying support and the worm gear protective cover, a rotating connecting sleeve is fixedly installed on one side of the rotating worm gear, and a second rotating motor is fixedly installed on the outer side of the rotating worm gear.

[0018] By adopting the above technical scheme, the rotating worm is driven to rotate by starting the first rotating motor, and the rotating worm gear is driven to rotate by the meshing connection between the rotating worm and the rotating worm gear.

[0019] Preferably, a rotating connecting shaft is fixedly connected to the output end of the second rotating motor, the rotating connecting shaft is fixedly connected with the drying net cylinder, a first fixed support is fixedly installed on one side of the rotating connecting sleeve, a plurality of rotating connecting rods are fixedly connected to one side of the first fixed support, a second fixed support is fixedly installed on the side of the rotating connecting rod away from the first fixed support, and a connecting sleeve is fixedly installed inside the second fixed support.

[0020] By adopting the above technical scheme, the first fixed support, the rotating connecting rods and the second fixed support are driven to rotate under the action of the rotating connecting rods.

[0021] Preferably, the outer side of the first and second fixed supports is fixedly installed with a supporting ring, the first rotating sleeve is rotationally connected with a rotating connecting rod, the inside of the drying box is slidably connected with a sliding baffle, the bottom side of the sliding baffle is fixedly installed with an arc-shaped limiting plate, and the side of the sliding baffle away from the arc-shaped limiting plate is fixedly installed with a pull handle.

[0022] By adopting the above technical scheme, the bottom drying net plate and the top arc-shaped net cover can be rotated under the action of the counterweight sliding block, and the bottom drying net plate and the silicon carbide ceramic crystal boat can always be kept in a horizontal state, so that the soft silicon carbide ceramic crystal boat can be preliminarily dried and shaped.

[0023] Preferably, the two sides of the drying box are symmetrically rotationally connected with connecting hinges, the outer sides of the two connecting hinges are rotationally connected with a box door, the outer side of the box door is fixedly installed with a second handle, the inside of the drying box is fixedly installed with heating rods around, and the top center of the drying box is fixedly installed with a dehumidification valve.

[0024] By adopting the above technical scheme, the outer side of the silicon carbide ceramic crystal boat can be quickly dried by the heating rods around the inside of the drying box, and the drying uniformity of the silicon carbide ceramic crystal boat can be improved by rotating.

[0025] Preferably, the rotating drying mechanism comprises a drying device, the outer side of the drying device is fixedly installed with a heat dissipation frame, the inside of the heat dissipation frame is fixedly installed with a heat dissipation fan, the side of the drying device away from the heat dissipation frame is fixedly installed with a connecting elbow, and the end of the connecting elbow is rotationally connected with a connecting rotating sleeve.

[0026] By adopting the above technical scheme, the heat dissipation frame and the heat dissipation fan can be used to dissipate heat from the drying device, thereby prolonging the service life of the drying device.

[0027] Preferably, the connecting rotating sleeve is rotationally connected with a connecting sleeve, the end of the connecting rotating sleeve is rotationally connected with a drying net cylinder, the inside of the drying net cylinder is provided with an air outlet hole, and the outer side of the drying net cylinder is fixedly installed with a plurality of spiral air deflectors.

[0028] By adopting the above technical scheme, the hot air required for drying is generated by the drying equipment, is transmitted into the inside of the drying mesh cylinder through the connecting elbow and the connecting rotating sleeve, is sprayed out through the air outlet holes in the inside of the drying mesh cylinder, and under the action of the spiral air guide plate, the drying hot air can be guided to be sprayed out in a spiral manner, the second rotating motor is started to drive the rotating connecting shaft and the drying mesh cylinder to rotate, the drying mesh cylinder drives the spiral air guide plate to rotate, differential motion is generated by controlling the second rotating motor and the first rotating motor, and the spiral hot air can be uniformly blown to the surface of the silicon carbide ceramic crystal boat, and the drying uniformity of the silicon carbide ceramic crystal boat is further improved.

[0029] Compared with the prior art, the beneficial effects of the present application are that the drying equipment for forming silicon carbide crystal boats and the processing method utilize the rotating connection of the first rotating sleeve and the rotating connecting rod, and under the action of the counterweight sliding block, the bottom drying mesh plate and the top arc-shaped mesh cover can be rotated, the bottom drying mesh plate and the silicon carbide ceramic crystal boat can always be kept in a horizontal state, the silicon carbide ceramic crystal boat with soft texture can be preliminarily dried and shaped, differential motion is generated by controlling the second rotating motor and the first rotating motor, the spiral hot air can be uniformly blown to the surface of the silicon carbide ceramic crystal boat, and the drying uniformity of the silicon carbide ceramic crystal boat is further improved, and the specific contents are as follows:

[0030] 1. By setting the drying mechanism not only can take advantage of the characteristics of the magnetic block and the bottom drying net plate magnetic attraction connection, can open the top arc-shaped net cover, and put the silicon carbide ceramic boat into the top of the bottom drying net plate, under the action of the counterweight slider inside the counterweight support, the bottom drying net plate remains horizontal, start the first rotating motor drive rotating worm rotation, take advantage of the meshing connection between the rotating worm and the rotating worm wheel, make the rotating worm wheel drive the rotating connecting sleeve and the first fixed support rotate, under the action of the rotating connecting rod, make the first fixed support drive the rotating connecting rod and the second fixed support rotate, take advantage of the rotating connection between the first rotating sleeve and the rotating connecting rod, at the same time under the action of the counterweight slider, not only can realize the rotation of the bottom drying net plate and the top arc-shaped net cover, but also can make the bottom drying net plate and the silicon carbide ceramic boat always keep horizontal state, facilitate the preliminary drying and shaping of the soft silicon carbide ceramic boat, at the same time, the heating rod around the inside of the drying box can quickly dry the outside of the silicon carbide ceramic boat, at the same time, through the rotating mode, the drying uniformity of the silicon carbide ceramic boat can be improved, when the silicon carbide ceramic boat is preliminarily dried and shaped, by pushing the pull handle to drive the sliding baffle and the arc-shaped limiting plate to move, the sliding baffle and the arc-shaped limiting plate are pushed to the bottom of the bottom drying net plate on one side, when the bottom drying net plate rotates to the top of the sliding baffle, under the action of the sliding baffle, make the bottom drying net plate drive the first rotating sleeve and the top arc-shaped net cover rotate, under the action of the arc-shaped sliding groove, make the counterweight slider slide to the middle of the counterweight support, so that the top arc-shaped net cover can be stably rotated to the bottom of the bottom drying net plate and always kept at the bottom of the bottom drying net plate, so as to realize the automatic turning of the silicon carbide ceramic boat, by reducing the rotation of the first rotating motor, the slow turning of the silicon carbide ceramic boat can be realized, which is convenient for the safety protection of the silicon carbide ceramic boat, avoids the phenomenon that the silicon carbide ceramic boat is turned too fast and damaged by collision, affects the drying effect of the silicon carbide ceramic boat, by turning the silicon carbide ceramic boat, the part of the bottom of the silicon carbide ceramic boat contacting with the bottom drying net plate can be dried, so as to realize the drying uniformity of the bottom drying net plate, by setting the box door, the silicon carbide ceramic boat can be quickly taken and placed, by using the dehumidification valve, the water vapor generated during drying can be quickly discharged, avoids the humidity in the drying box is too large, so as to affect the drying effect of the silicon carbide ceramic boat;

[0031] 2. By setting the rotating drying mechanism, not only can the drying equipment generate the hot air required for drying, but also through the connection of the elbow and the connection of the rotating sleeve into the inside of the drying mesh cylinder, the hot air in the inside of the drying mesh cylinder is sprayed out through the air outlet holes, under the action of the spiral air guide plate, the drying hot air can be guided to be sprayed out in a spiral manner, by starting the second rotating motor to drive the rotating connecting shaft and the drying mesh cylinder to rotate, at the same time, the drying mesh cylinder drives the spiral air guide plate to rotate, by controlling the second rotating motor and the first rotating motor to generate differential motion, the spiral hot air can be uniformly blown to the surface of the silicon carbide ceramic boat, further improving the drying uniformity of the silicon carbide ceramic boat, and by using the heat dissipation frame and the heat dissipation fan, the drying equipment can be cooled, thereby improving the service life of the drying equipment. BRIEF DESCRIPTION OF DRAWINGS

[0032] Figure 1 It is a whole three-dimensional structure schematic diagram of the application;

[0033] Figure 2 It is a three-dimensional structure schematic diagram of the drying mechanism in the application;

[0034] Figure 3 It is a three-dimensional structure schematic diagram of the drying box in the application;

[0035] Figure 4 It is a three-dimensional structure schematic diagram of the support ring in the application;

[0036] Figure 5 It is a three-dimensional structure schematic diagram of the rotating worm in the application;

[0037] Figure 6 It is a three-dimensional structure schematic diagram of the rotating connecting rod in the application;

[0038] Figure 7 It is a three-dimensional structure schematic diagram of the top arc-shaped mesh cover in the expanded state in the application;

[0039] Figure 8 It is a three-dimensional structure schematic diagram of the counterweight support in the application;

[0040] Figure 9 It is a three-dimensional structure schematic diagram of the sliding baffle in the application;

[0041] Figure 10 It is a three-dimensional structure schematic diagram of the rotating drying mechanism in the application;

[0042] Figure 11 It is a three-dimensional structure schematic diagram of the spiral air guide plate in the application.

[0043] In the figure: 1, drying mechanism; 101, drying box; 102, drying support; 103, support frame; 104, support leg; 105, worm protection cover; 106, rotating support; 107, first rotating motor; 108, rotating worm; 109, rotating worm gear; 110, rotating connecting sleeve; 111, second rotating motor; 112, rotating connecting shaft; 113, first fixed support; 114, rotating connecting rod; 115, second fixed support; 116, support ring; 117, first rotating sleeve; 118, bottom drying mesh plate; 119, silicon carbide ceramic boat; 120, top arc-shaped mesh cover; 121, magnetic block; 122, counterweight support; 123, arc-shaped sliding groove; 124, counterweight sliding block; 125, limiting disc; 126, sliding baffle; 127, arc-shaped limiting plate; 128, pull handle; 129, connecting hinge; 130, box door; 131, second handle; 132, heating rod; 133, dehumidification valve; 134, connecting sleeve; 2, rotating drying mechanism; 201, drying equipment; 202, heat dissipation frame; 203, heat dissipation fan; 204, connecting elbow; 205, connecting rotating sleeve; 206, drying mesh cylinder; 207, air outlet hole; 208, spiral air guide plate. DETAILED DESCRIPTION

[0044] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0045] Please refer to Figures 1-7The application provides a technical scheme: a drying equipment for forming a silicon carbide crystal boat and a processing method, which comprises a drying mechanism 1 and a drying box 101 installed on the outer side of the drying mechanism 1. The inside of the drying mechanism 1 is provided with a rotating drying mechanism 2, one side of the rotating drying mechanism 2 is provided with a drying mesh cylinder 206, the drying mechanism 1 comprises a first rotating sleeve 117, the outer side of the first rotating sleeve 117 is symmetrically provided with a bottom drying mesh plate 118, the top of the bottom drying mesh plate 118 is placed with a silicon carbide ceramic crystal boat 119, one side of the bottom drying mesh plate 118 is rotatably connected with a top arc-shaped mesh cover 120, the end of the top arc-shaped mesh cover 120 is fixedly installed with a magnetic suction block 121, the magnetic suction block 121 is magnetically connected with the bottom drying mesh plate 118, the inside of the top arc-shaped mesh cover 120 is symmetrically provided with a counterweight support 122, arc-shaped sliding grooves 123 are symmetrically formed in the inside of the two counterweight supports 122, counterweight sliding blocks 124 are slidably connected in the inside of the arc-shaped sliding grooves 123, limit discs 125 are fixedly installed on the outer side of the counterweight sliding blocks 124, the limit discs 125 are slidably connected with the counterweight supports 122, the top arc-shaped mesh cover 120 can be opened by the magnetic suction block 121 magnetically connected with the bottom drying mesh plate 118, and the silicon carbide ceramic crystal boat 119 can be placed on the top of the bottom drying mesh plate 118, the bottom drying mesh plate 118 can be kept horizontal under the action of the counterweight sliding blocks 124 in the counterweight supports 122, the rotating worm 108 is driven to rotate by starting the first rotating motor 107, the rotating worm 108 and the rotating worm wheel 109 are meshedly connected, the rotating worm wheel 109 drives the rotating connecting sleeve 110 and the first fixed support 113 to rotate, the first fixed support 113 drives the rotating connecting rod 114 and the second fixed support 115 to rotate under the action of the rotating connecting rod 114, the first rotating sleeve 117 and the rotating connecting rod 114 are rotatably connected, and the bottom drying mesh plate 118 and the top arc-shaped mesh cover 120 can be rotated and kept horizontal at the same time under the action of the counterweight sliding blocks 124, so that the silicon carbide ceramic crystal boat with soft texture can be preliminarily dried and shaped.

[0046] Please refer to Figures 2-9The two sides of the drying box 101 are fixedly provided with drying supports 102, the bottoms of the two drying supports 102 are fixedly provided with support frames 103, the bottoms of the support frames 103 are fixedly provided with support legs 104, the outer side of the drying support 102 on one side is fixedly provided with a worm gear protective cover 105, the inner side of the drying support 102 close to the worm gear protective cover 105 is symmetrically provided with rotating supports 106, the top of the rotating support 106 is fixedly provided with a first rotating motor 107, the output end of the first rotating motor 107 is fixedly connected with a rotating worm 108, one side of the rotating worm 108 is meshedly connected with a rotating worm gear 109, the rotating worm gear 109 is rotationally connected with the drying support 102 and the worm gear protective cover 105, one side of the rotating worm gear 109 is fixedly provided with a rotating connecting sleeve 110, the outer side of the rotating worm gear 109 is fixedly provided with a second rotating motor 111, the output end of the second rotating motor 111 is fixedly connected with a rotating connecting shaft 112, the rotating connecting shaft 112 is fixedly connected with the drying mesh cylinder 206, one side of the rotating connecting sleeve 110 is fixedly provided with a first fixed support 113, one side of the first fixed support 113 is fixedly connected with a plurality of rotating connecting rods 114, one side of the rotating connecting rod 114 away from the first fixed support 113 is fixedly provided with a second fixed support 115, the inside of the second fixed support 115 is fixedly provided with a connecting sleeve 134, the outer sides of the first fixed support 113 and the second fixed support 115 are fixedly provided with support rings 116, a first rotating sleeve 117 is rotationally connected with the rotating connecting rod 114, one side of the inside of the drying box 101 is slidably connected with a sliding baffle 126, one side of the bottom of the sliding baffle 126 is fixedly provided with an arc-shaped limiting plate 127, one side of the sliding baffle 126 away from the arc-shaped limiting plate 127 is fixedly provided with a pulling handle 128, the two sides of the drying box 101 are symmetrically rotationally connected with connecting hinges 129, the outer sides of the two connecting hinges 129 are rotationally connected with a box door 130, the outer side of the box door 130 is fixedly provided with a second handle 131, the inside of the drying box 101 is fixedly provided with heating rods 132 around, a dehumidification valve 133 is fixedly provided at the top center position of the drying box 101, the heating rods 132 around the inside of the drying box 101 can be used to quickly dry the outside of the silicon carbide ceramic crystal boat 119, meanwhile, the drying uniformity of the silicon carbide ceramic crystal boat 119 can be improved through the rotating mode, when the silicon carbide ceramic crystal boat is preliminarily dried and shaped, the sliding baffle 126 and the arc-shaped limiting plate 127 are moved by pushing the pulling handle 128, the sliding baffle 126 and the arc-shaped limiting plate 127 are pushed to the bottom of the bottom drying mesh plate 118 on one side, when the bottom drying mesh plate 118 is rotated to the top of the sliding baffle 126, the bottom drying mesh plate 118 drives the first rotating sleeve 117 and the top arc-shaped mesh cover 120 to rotate under the action of the sliding baffle 126, the counterweight sliding block 124 slides to the middle of the counterweight support 122 under the action of the arc-shaped sliding groove 123, so that the top arc-shaped mesh cover 120 can be stably rotated to the bottom of the bottom drying mesh plate 118,And always keep at the bottom of the bottom drying net plate 118, so that the automatic turning of the silicon carbide ceramic boat 119, by reducing the rotation of the first rotating motor 107, can realize the slow turning of the silicon carbide ceramic boat 119, facilitate the safety protection of the silicon carbide ceramic boat 119, avoid the phenomenon of silicon carbide ceramic boat 119 collision damage caused by too fast turning, affect the drying effect of the silicon carbide ceramic boat 119, through the turning of the silicon carbide ceramic boat 119, the bottom of the silicon carbide ceramic boat 119 can be dried, so as to realize the drying uniformity of the bottom drying net plate 118, through the setting of the door 130, the silicon carbide ceramic boat 119 can be quickly taken and placed, the dehumidification valve 133 can quickly exhaust the water vapor generated in the drying process, avoid the humidity in the drying box 101, so as to affect the drying effect of the silicon carbide ceramic boat 119.

[0047] Please refer to Figure 1 、 Figures 10-11 , the rotating drying mechanism 2 includes drying equipment 201, the outer side of the drying equipment 201 is fixedly installed with a heat dissipation frame 202, the inside of the heat dissipation frame 202 is fixedly installed with a heat dissipation fan 203, the side of the drying equipment 201 away from the heat dissipation frame 202 is fixedly installed with a connecting elbow pipe 204, the end of the connecting elbow pipe 204 is rotatably connected with a connecting rotating sleeve 205, the connecting rotating sleeve 205 is rotatably connected with the connecting sleeve 134, the end of the connecting rotating sleeve 205 is rotatably connected with a drying net cylinder 206, the inside of the drying net cylinder 206 is provided with an air outlet hole 207, the outside of the drying net cylinder 206 is fixedly installed with a plurality of spiral air guide plates 208, the drying equipment 201 generates hot air required for drying, and is transmitted into the inside of the drying net cylinder 206 through the connecting elbow pipe 204 and the connecting rotating sleeve 205, and is sprayed out through the air outlet hole 207 in the drying net cylinder 206. Under the action of the spiral air guide plate 208, the drying hot air can be guided to be sprayed out in a spiral manner, the second rotating motor 111 is started to drive the rotating connecting shaft 112 and the drying net cylinder 206 to rotate, at the same time, the drying net cylinder 206 drives the spiral air guide plate 208 to rotate, the second rotating motor 111 and the first rotating motor 107 are controlled to produce differential motion, the spiral hot air can be uniformly blown to the surface of the silicon carbide ceramic boat 119, the drying uniformity of the silicon carbide ceramic boat 119 is further improved, and the heat dissipation frame 202 and the heat dissipation fan 203 can dissipate heat for the drying equipment 201, thereby prolonging the service life of the drying equipment 201.

[0048] Working principle: before using the drying equipment for forming silicon carbide boat and the processing method, the overall situation of the device needs to be checked to determine whether it can work normally, according to Figure 1 - Figure 11As shown, first, by the magnetic attraction block 121 and the bottom drying net plate 118 magnetic attraction connection characteristics, can be opened to the top arc-shaped net cover 120, and the silicon carbide ceramic boat 119 into the bottom drying net plate 118 top, under the action of the counterweight slide block 124 inside the counterweight support 122, the bottom drying net plate 118 remains horizontal, start the first rotating motor 107 drive rotating worm 108 rotation, by the meshing connection characteristics between the rotating worm 108 and the rotating worm wheel 109, the rotating worm wheel 109 drive rotating connecting sleeve 110 and the first fixed support 113 rotation, under the action of the rotating connecting rod 114, the first fixed support 113 drive rotating connecting rod 114 and the second fixed support 115 rotation, by the first rotating sleeve 117 and rotating connecting rod 114 rotating connection characteristics, under the action of the counterweight slide block 124, not only can realize the rotation of the bottom drying net plate 118 and the top arc-shaped net cover 120, but also can make the bottom drying net plate 118 and the silicon carbide ceramic boat 119 always keep horizontal state, convenient for the preliminary drying and shaping of the soft texture of silicon carbide ceramic boat, at the same time, the heating rod 132 around the inside of the drying box 101 can quickly dry the outside of the silicon carbide ceramic boat 119, and the rotating mode can improve the drying uniformity of the silicon carbide ceramic boat 119.

[0049] Secondly, after the silicon carbide ceramic boat is preliminarily dried and shaped, the sliding baffle 126 and the arc-shaped limiting plate 127 are moved by pushing the pulling handle 128, and the sliding baffle 126 and the arc-shaped limiting plate 127 are pushed to the bottom of the bottom drying mesh plate 118 on one side. When the bottom drying mesh plate 118 rotates to the top of the sliding baffle 126, the bottom drying mesh plate 118 drives the first rotating sleeve 117 and the top arc-shaped mesh cover 120 to rotate under the action of the sliding baffle 126. Under the action of the arc-shaped sliding groove 123, the counterweight sliding block 124 slides to the middle of the counterweight support 122, so that the top arc-shaped mesh cover 120 can be stably rotated to the bottom of the bottom drying mesh plate 118 and always kept at the bottom of the bottom drying mesh plate 118, thereby realizing automatic turning of the silicon carbide ceramic boat 119. By reducing the rotation of the first rotating motor 107, the silicon carbide ceramic boat 119 can be slowly turned over, which is convenient for safety protection of the silicon carbide ceramic boat 119, avoids the phenomenon that the silicon carbide ceramic boat 119 is damaged due to too fast turning over, affects the drying effect of the silicon carbide ceramic boat 119, and realizes uniform drying of the bottom drying mesh plate 118 by turning over the silicon carbide ceramic boat 119. By setting the box door 130, the silicon carbide ceramic boat 119 can be quickly taken and placed, and by using the dehumidification valve 133, the water vapor generated during drying can be quickly discharged, so that the humidity in the drying box 101 is not too high, thereby affecting the drying effect of the silicon carbide ceramic boat 119.

[0050] Finally, the drying equipment 201 generates hot air required for drying, and the hot air is transmitted into the inside of the drying mesh cylinder 206 through the connecting elbow 204 and the connecting rotating sleeve 205, and is sprayed out through the air outlet holes 207 in the inside of the drying mesh cylinder 206. Under the action of the spiral air guide plate 208, the drying hot air can be guided in a spiral manner. By starting the second rotating motor 111 to drive the rotating connecting shaft 112 and the drying mesh cylinder 206 to rotate, and at the same time the drying mesh cylinder 206 drives the spiral air guide plate 208 to rotate, the second rotating motor 111 and the first rotating motor 107 are controlled to generate differential motion, so that the spiral hot air can be uniformly blown to the surface of the silicon carbide ceramic boat 119, further improving the drying uniformity of the silicon carbide ceramic boat 119. By using the heat dissipation frame 202 and the heat dissipation fan 203, the drying equipment 201 can be cooled, thereby improving the service life of the drying equipment 201.

[0051] Although the present application has been described in detail with reference to the foregoing embodiments, the technical solutions recorded in the foregoing embodiments can be modified, or some of the technical features can be replaced by equivalent features, by those skilled in the art, any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A drying device for forming silicon carbide crystal boats, comprising a drying mechanism (1) and a drying box (101) installed outside the drying mechanism (1). The drying mechanism (1) is equipped with a rotating drying mechanism (2) inside, and a drying mesh cylinder (206) is provided on one side of the rotating drying mechanism (2). Its features are, Also includes: The drying mechanism (1) includes a first rotating sleeve (117), and a bottom drying mesh plate (118) is symmetrically installed on the outer side of the first rotating sleeve (117). A silicon carbide ceramic crystal boat (119) is placed on the top of the bottom drying mesh plate (118). Among them, a top arc-shaped mesh cover (120) is rotatably connected to the outer side of the bottom drying mesh plate (118) on one side, and a magnetic block (121) is fixedly installed at the end of the top arc-shaped mesh cover (120). Among them, the magnetic block (121) is magnetically connected to the bottom drying mesh plate (118), and the top arc-shaped mesh cover (120) is symmetrically equipped with counterweight brackets (122) on both sides inside. The two counterweight supports (122) are symmetrically provided with arc-shaped sliding grooves (123) inside. The counterweight slider (124) is slidably connected inside the arc-shaped sliding grooves (123). A limiting plate (125) is fixedly installed on the outside of the counterweight slider (124). The limiting plate (125) is slidably connected to the counterweight support (122). Drying supports (102) are fixedly installed on both sides of the drying oven (101). A support frame (103) is fixedly installed at the bottom of the two drying racks (102), and a support leg (104) is fixedly installed at the bottom of the support frame (103). A worm gear guard (105) is fixedly installed on the outer side of one of the drying racks (102). A rotating bracket (106) is symmetrically installed on the inner side of the drying rack (102) near the worm gear guard (105). A first rotating motor (107) is fixedly installed on the top of the rotating bracket (106). The output end of the first rotating motor (107) is fixedly connected to a rotating worm (108), and a rotating worm wheel (109) is meshed with one side of the rotating worm (108). The rotating worm wheel (109) is rotatably connected to the drying bracket (102) and the worm wheel protective cover (105). A rotating connecting sleeve (110) is fixedly installed on one side of the rotating worm wheel (109), and a second rotating motor (111) is fixedly installed on the outside of the rotating worm wheel (109). The output end of the second rotating motor (111) is fixedly connected to a rotating connecting shaft (112), the rotating connecting shaft (112) is fixedly connected to the drying mesh cylinder (206), a first fixed bracket (113) is fixedly installed on one side of the rotating connecting sleeve (110), a plurality of rotating connecting rods (114) are fixedly connected on one side of the first fixed bracket (113), a second fixed bracket (115) is fixedly installed on the side of the rotating connecting rod (114) away from the first fixed bracket (113), and a connecting sleeve (134) is fixedly installed inside the second fixed bracket (115). Support rings (116) are fixedly installed on the outer sides of the first fixed bracket (113) and the second fixed bracket (115). The first rotating sleeve (117) is rotatably connected to the rotating connecting rod (114). A sliding baffle (126) is slidably connected to one side of the inside of the drying oven (101). An arc-shaped limiting plate (127) is fixedly installed on one side of the bottom of the sliding baffle (126). A pull handle (128) is fixedly installed on the side of the sliding baffle (126) away from the arc-shaped limiting plate (127).

2. The drying equipment for silicon carbide boat forming according to claim 1, characterized in that: The drying chamber (101) is symmetrically connected to two hinges (129) on both sides. The two hinges (129) are connected to a door (130) on the outside. A second handle (131) is fixedly installed on the outside of the door (130). A heating rod (132) is fixedly installed around the inside of the drying chamber (101). A dehumidifying valve (133) is fixedly installed at the center of the top of the drying chamber (101).

3. The drying equipment for silicon carbide boat forming according to claim 2, characterized in that: The rotating drying mechanism (2) includes a drying device (201), a heat dissipation frame (202) is fixedly installed on the outside of the drying device (201), a heat dissipation fan (203) is fixedly installed inside the heat dissipation frame (202), a connecting bend (204) is fixedly installed on the side of the drying device (201) away from the heat dissipation frame (202), and a connecting rotating sleeve (205) is rotatably connected to the end of the connecting bend (204).

4. The drying equipment for silicon carbide boat forming according to claim 3, characterized in that: The connecting rotating sleeve (205) is rotatably connected to the connecting sleeve (134). The end of the connecting rotating sleeve (205) is rotatably connected to the drying mesh cylinder (206). The drying mesh cylinder (206) has an air outlet (207) inside. Several spiral air guide plates (208) are fixedly installed on the outside of the drying mesh cylinder (206).

5. A processing method for a drying equipment for forming silicon carbide crystal boats, comprising using the drying equipment for forming silicon carbide crystal boats as described in claim 4, characterized in that, The processing steps are as follows: Step 1: Utilizing the magnetic attraction between the magnetic block (121) and the bottom drying mesh plate (118), the top arc-shaped mesh cover (120) can be opened, and the silicon carbide ceramic crystal boat (119) can be placed on top of the bottom drying mesh plate (118). Under the action of the counterweight slider (124) inside the counterweight bracket (122), the bottom drying mesh plate (118) is kept horizontal. The first rotating motor (107) is started to drive the rotating worm (108) to rotate. Utilizing the meshing connection between the rotating worm (108) and the rotating worm wheel (109), the rotating worm wheel (109) drives the rotating connecting sleeve (110) and the first fixed bracket (113) to rotate. Under the rotation of the connecting rod (114) Under the action, the first fixed bracket (113) drives the rotating connecting rod (114) and the second fixed bracket (115) to rotate. Taking advantage of the characteristic of the first rotating sleeve (117) and the rotating connecting rod (114) being rotated, and under the action of the counterweight slider (124), the bottom drying mesh plate (118) and the top arc-shaped mesh cover (120) can be rotated. At the same time, the bottom drying mesh plate (118) and the silicon carbide ceramic crystal boat (119) can always be kept in a horizontal state, and the soft silicon carbide ceramic crystal boat can be preliminarily dried and shaped. At the same time, the heating rods (132) around the inside of the drying box (101) can quickly dry the outside of the silicon carbide ceramic crystal boat (119). Step 2: After the silicon carbide ceramic boat has undergone preliminary drying and shaping, the sliding baffle (126) and the arc-shaped limiting plate (127) are moved by pushing the pull handle (128). The sliding baffle (126) and the arc-shaped limiting plate (127) are pushed to the bottom of the bottom drying mesh plate (118) on one side. When the bottom drying mesh plate (118) rotates to the top of the sliding baffle (126), the bottom drying mesh plate (118) drives the first rotating sleeve (117) and the top arc-shaped mesh cover (120) to rotate under the action of the arc-shaped sliding groove (123). Under the action of the arc-shaped sliding groove (123), the counterweight slider (124) slides to the middle of the counterweight support (122), thereby stabilizing the top arc-shaped mesh cover (120). The machine rotates to the bottom of the bottom drying screen (118) and remains at the bottom of the bottom drying screen (118) to achieve automatic flipping of the silicon carbide ceramic crystal boat (119). By reducing the rotation of the first rotating motor (107), the silicon carbide ceramic crystal boat (119) can be slowly flipped. By flipping the silicon carbide ceramic crystal boat (119), the part of the bottom of the silicon carbide ceramic crystal boat (119) in contact with the bottom drying screen (118) can be dried, and the drying uniformity of the bottom drying screen (118) can be achieved. The box door (130) facilitates quick picking and placing of the silicon carbide ceramic crystal boat (119). The dehumidification valve (133) can quickly discharge the water vapor generated during drying. Step 3: The drying equipment (201) generates the hot air required for drying and transmits it into the drying screen cylinder (206) through the connecting bend pipe (204) and the connecting rotating sleeve (205). The hot air is sprayed out through the air outlet (207) inside the drying screen cylinder (206). Under the action of the spiral guide plate (208), the hot air can be guided so that the hot air can be sprayed out in a spiral manner. By starting the second rotating motor (111), the rotating connecting shaft (112) and the drying screen cylinder (206) are driven to rotate. At the same time, the drying screen cylinder (206) drives the spiral guide plate (208) to rotate. By controlling the differential motion between the second rotating motor (111) and the first rotating motor (107), the spiral hot air can be evenly blown to the surface of the silicon carbide ceramic boat (119). The heat dissipation frame (202) and the heat dissipation fan (203) can dissipate heat from the drying equipment (201).

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