Chuck with coaxial high-pressure and hollowing functions for defect positioning

Abstract

The invention relates to the technical field of defect positioning, and particularly discloses a coaxial high-pressure and hollow-out chuck for defect positioning, which comprises a bottom shell, the bottom shell comprises two connecting blocks and a circular support, the connecting blocks are connected with the circular support, first notches are formed in the connecting blocks, first through grooves are formed in the periphery of the circular support, and the first through grooves are communicated with the first through grooves; a rotary adjusting knob is arranged on the first notch and is connected with the driving gear; the scale mechanism comprises a driven gear and a scale mark block, the driven gear is connected with the scale mark block, the driven gear is meshed with the driving gear, and the driving gear drives the driven gear to rotate; the limiting separation blade is inserted into the first through groove, the limiting separation blade is connected with the scale mark block, and the limiting separation blade slides in the first through groove; and the multifunctional chuck is used for clamping the tested piece. The defects that in the prior art, a chuck lacks an accurate positioning means and is prone to being interfered by external current are overcome.

Description

Technical Field

[0001] This invention relates to the field of defect localization, and particularly to a coaxial high-voltage chuck with hollowing-out functions for defect localization. Its main application is as a coaxial high-voltage chuck integrating theta rotation and hollowing-out functions for defect localization in thermal & InGaAs EMMI, Obirch & TIVA chips used in EFA (Electronic Failure Analysis) chip failure analysis. Background Technology

[0002] As semiconductor process nodes advance to the nanometer scale (e.g., 5nm, 3nm), microscopic defects (such as short circuits in metal lines, transistor leakage, and broken vias) have an increasingly significant impact on yield, necessitating high-precision positioning technology. This is particularly evident in the field of chip failure analysis (EFA), where it is widely used in chucks for defect positioning of multi-pin chips in thermal & InGaAs EMMI and Obirch & TIVA.

[0003] In existing technologies, coaxial high-pressure chucks, coaxial atmospheric pressure chucks, and hollow-function chucks are divided into three independent chucks. Each time a different function is used, a complex operation of switching between them is required. This results in the inability to guarantee the original accuracy and flatness errors during each switch, and also greatly increases the operation time and risk. Therefore, it is necessary to develop a chuck that can combine the three functions into one and integrate theta rotation, thereby solving and avoiding the accuracy and flatness errors caused by switching, and improving the accuracy of defect location and the consistency of data comparison for customers. Summary of the Invention

[0004] (a) Technical problems to be solved

[0005] The problem this invention aims to solve is to provide a coaxial high-pressure and hollowing-out chuck for defect location, overcoming the limitations of existing chucks in ensuring the accuracy of defect location and the consistency of data comparison caused by the inability to guarantee the original precision and flatness errors.

[0006] (II) Technical Solution

[0007] To solve the aforementioned technical problem, a first aspect of the present invention provides a coaxial high-pressure and hollowing-out chuck for defect location, comprising:

[0008] The bottom shell includes two connecting blocks and a circular bracket. The two connecting blocks are respectively connected to both ends of the circular bracket. One of the connecting blocks has a first slot. The center of the circular bracket is hollow. A first through slot is formed around the periphery of the circular bracket. The first through slot is at a 50-degree angle with the axis of the circular bracket as the center. A rotary knob is provided on the first slot. The rotary knob is connected to a drive gear. The drive gear is located at the bottom end of the connecting block.

[0009] A scale mechanism, comprising a driven gear and a scale block, wherein the driven gear is connected to the scale block and meshes with the driving gear, the driving gear drives the driven gear to rotate, the scale mechanism is slidably connected to the interior of the circular bracket, and the scale block has an angle mark near the first slot, the angle mark range being ±25 degrees;

[0010] A limiting stop plate is inserted into the first through groove, the limiting stop plate is connected to the scale block, and the limiting stop plate slides in the first through groove;

[0011] A multi-functional chuck, wherein a second through groove is provided at the center of the multi-functional chuck, and two clamping blocks are provided on the second through groove, the two clamping blocks being respectively positioned opposite each other at the second through groove.

[0012] As described above, the chuck with defect positioning and hollowing functions may optionally have a first protrusion on the inner wall of the circular bracket, a second groove on the scale block, the second groove being slidably connected to the first protrusion, and the scale mechanism rotating on the circular bracket.

[0013] As described above, the chuck with defect location and cutout functions may optionally have a second protrusion on the inner side of the scale block, and the multi-functional chuck is connected to the second protrusion by bolts.

[0014] As described above, the chuck with defect location and cutout functions may optionally have a ceramic gasket between the second protrusion and the multifunctional chuck, the ceramic gasket being used to isolate current.

[0015] As described above, the chuck with defect positioning and hollowing functions can optionally have the driving gear, the driven gear, the scale block, and the multi-functional chuck coaxial.

[0016] As described above, the chuck with defect location and cutout functions may optionally have a chuck cover plate for fixing the multifunctional chuck.

[0017] As described above, the chuck with defect positioning and hollowing functions can optionally have two connecting blocks connected to a column connecting plate, the column connecting plate connected to a lower base plate, and the column connecting plate perpendicularly connected to the lower base plate.

[0018] As described above, the chuck with defect location and cutout functions may optionally have an insulating pad between the column connecting plate and the bottom plate.

[0019] As described above, the chuck with defect positioning and hollowing functions may optionally have a connecting groove on the lower base plate.

[0020] (III) Beneficial Effects

[0021] The present invention provides a coaxial high-pressure and hollowing-out chuck for defect location, which has the following beneficial effects:

[0022] (1) This invention drives the active gear to rotate via a rotary knob located in the first slot. The active gear drives the passive gear to rotate, thereby controlling the rotation of the scale mechanism and the multi-functional chuck. The test specimen rotates accordingly. The scale mechanism also has a scale for the rotation angle. When the test specimen rotates via the rotary knob, the experimenter can read the rotation angle through the scale. The first slot is provided on the bottom shell. By using a limiting baffle set in the first slot, the rotation angle of the test specimen can be controlled within ±25 degrees. This design can precisely control the rotation angle of the test specimen, ensuring that the test specimen is tested while being precisely controlled, thus improving the accuracy of positioning.

[0023] (2) By setting ceramic pads and insulating pads, the present invention avoids the influence of current on the adjustment angle, improves the adjustment accuracy, and avoids interference during the detection process. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a perspective view of a coaxial high-pressure and hollowing-out chuck for defect location according to the present invention.

[0026] Figure 2 This is a top view of a coaxial high-pressure and hollowing-out chuck for defect location according to the present invention;

[0027] Figure 3 This is a second perspective view of a coaxial high-pressure and hollowing-out chuck for defect location according to the present invention.

[0028] Figure 4 This is a third perspective view of a coaxial high-pressure and hollowing-out chuck for defect location according to the present invention.

[0029] Figure 5 This is a cross-sectional view of a coaxial high-pressure and hollowing-out chuck for defect location according to the present invention.

[0030] Figure 6 for Figure 5 A partial schematic diagram of A in the middle;

[0031] Figure 7 This is an exploded view of a coaxial high-pressure and hollowed-out chuck for defect location according to the present invention.

[0032] The component names corresponding to the various reference numerals in the figure are as follows: 1. Bottom shell; 11. Connecting block; 12. Circular bracket; 13. First slot; 14. First through slot; 15. Rotary knob; 16. Driving gear; 17. First protrusion; 18. Second slot; 2. Scale mechanism; 21. Driven gear; 22. Scale block; 23. Second protrusion; 3. Limiting stop; 4. Multifunctional chuck; 41. Second through slot; 42. Clamping block; 5. Ceramic gasket; 6. Chuck cover plate; 7. Column connecting plate; 8. Lower base plate; 9. Insulating pad; 91. Connecting groove. Detailed Implementation

[0033] The present application will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0034] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0035] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0036] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0037] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0038] The technical solutions provided by the various embodiments of this application are described below with reference to the accompanying drawings.

[0039] See Figures 1 to 7 This invention provides a coaxial high-pressure and perforation chuck for defect location, comprising: a base shell 1, a scale mechanism 2, a limiting baffle, and a multi-functional chuck 4. The base shell 1 provides support for the invention, the scale mechanism 2 is connected to the base shell 1, the limiting baffle restricts the rotation angle of the scale mechanism 2, and the multi-functional chuck 4 holds the test piece. After the multi-functional chuck 4 fixes the test piece, rotating the scale mechanism 2 allows for precise rotation of the test piece and reading of the rotation angle, thus enabling more reasonable and efficient operation of the test piece from all angles.

[0040] exist Figures 1 to 7 In an optional embodiment, the bottom shell 1 includes two connecting blocks 11 and a circular bracket 12. The connecting blocks 11 are used for convenient connection in this invention, and the circular bracket 12 is used to provide support for other components.

[0041] Furthermore, the two connecting blocks 11 are respectively connected to the two ends of the circular bracket 12. One of the connecting blocks 11 has a first slot 13. The center of the circular bracket 12 is hollow. A first through slot 14 is formed around the periphery of the circular bracket 12. The first through slot 14 is at a 50-degree angle with the axis of the circular bracket 12. The first through slot 14 is used to accommodate the limiting baffle 3, thereby providing a limiting function for the present invention.

[0042] It should be noted that a rotary knob 15 is provided on the first slot 13, and the rotary knob 15 is connected to the drive gear 16, which is located at the bottom of the connecting block 11. Therefore, the drive gear 16 can be driven to rotate by rotating the rotary knob 15.

[0043] exist Figures 1 to 7In one of the optional embodiments, the scale mechanism 2 includes a driven gear 21 and a scale block 22. The driven gear 21 is connected to the scale block, and the driven gear 21 and the driving gear 16 are located on the same horizontal plane. When an experimenter rotates the rotary knob 15, the driving gear 16 rotates, and the driven gear 21 rotates under the drive of the driving gear 16, thereby driving the scale mechanism 2 to rotate.

[0044] Furthermore, the driven gear 21 meshes with the driving gear 16, and the driving gear 16 drives the driven gear 21 to rotate. The scale mechanism 2 is slidably connected to the inside of the circular bracket 12. The scale block 22 has an angle mark near the first slot 13, and the angle mark range is ±25 degrees. The operator can read the rotation angle by observing the displayed reading of the angle mark.

[0045] Furthermore, the inner wall of the circular support 12 has a first protrusion 17, and the scale block 22 is provided with a second groove 18. The second groove 18 is slidably connected to the first protrusion 17, and the scale mechanism 2 rotates on the circular support 12. The connection between the first protrusion 17 and the second groove 18 can also fix the scale mechanism 2, ensuring that the scale mechanism 2 does not fall off.

[0046] exist Figures 1 to 7 In an optional embodiment, a second through groove 41 is provided at the center of the multi-functional chuck 4, and two clamping blocks 42 are provided on the second through groove 41, which are respectively arranged opposite to each other at the second through groove 41. The test piece can be clamped by the clamping blocks 42 at the second through groove 41, thereby completing the fixation.

[0047] Furthermore, the inner side of the scale block 22 has a second protrusion 23, and the multi-functional chuck 4 is connected to the second protrusion 23 by bolts, thereby completing the connection between the multi-functional chuck 4 and the scale mechanism 2.

[0048] Furthermore, a ceramic gasket 5 is provided between the second protrusion 23 and the multi-functional chuck 4. The ceramic gasket 5 is used to isolate current. This design prevents the current from affecting the scale mechanism 2 during use, thus avoiding errors.

[0049] exist Figures 1 to 7 In an optional embodiment, the limiting baffle 3 is inserted into the first through groove 14, the limiting baffle 3 is connected to the scale block 22, and the limiting baffle 3 slides in the first through groove 14.

[0050] Furthermore, the driving gear 16, the driven gear 21, the scale block 22, and the multi-functional chuck 4 are coaxial.

[0051] Furthermore, the multi-functional chuck 4 has a chuck cover plate 6 for fixing the multi-functional chuck 4. The chuck cover plate 6 can fix the whole invention and prevent the multi-functional chuck 4 from falling off.

[0052] Furthermore, the two connecting blocks 11 are respectively connected to the column connecting plate 7, the column connecting plate 7 is connected to the lower base plate 8, and the column connecting plate 7 is perpendicularly connected to the lower base plate 8.

[0053] Meanwhile, an insulating pad 9 is provided between the column connecting plate 7 and the lower base plate 8. The insulating pad 9 can prevent current from passing through the column connecting plate 7 and thus affecting the operation of the device, thereby improving accuracy.

[0054] Furthermore, the lower base plate 8 has a connecting groove 91, which allows those skilled in the art to fix the invention in any suitable position.

[0055] The same or similar parts between the various embodiments in this specification can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments.

[0056] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A coaxial high-pressure and hollowing-out chuck for defect location, characterized in that, include: The bottom shell (1) includes two connecting blocks (11) and a circular bracket (12). The two connecting blocks (11) are respectively connected to the two ends of the circular bracket (12). One of the connecting blocks (11) has a first slot (13). The center of the circular bracket (12) is hollow. The periphery of the circular bracket (12) has a first through slot (14). The first through slot (14) is 50 degrees with the axis of the circular bracket (12) as the center. A rotary knob (15) is provided on the first slot (13). The rotary knob (15) is connected to the drive gear (16). The drive gear (16) is located at the bottom end of the connecting block (11). The scale mechanism (2) includes a driven gear (21) and a scale block (22). The driven gear (21) is connected to the scale block (22). The driven gear (21) meshes with the driving gear (16). The driving gear (16) drives the driven gear (21) to rotate. The scale mechanism (2) is slidably connected to the inside of the circular bracket (12). The scale block (22) has an angle mark near the first slot (13). The angle mark range is ±25 degrees. A limiting baffle (3) is inserted into the first through groove (14), the limiting baffle (3) is connected to the scale block (22), and the limiting baffle (3) slides in the first through groove (14); A multi-functional chuck (4) has a second through groove (41) at its center. Two clamping blocks (42) are provided on the second through groove (41) and are respectively positioned opposite each other at the second through groove (41).

2. The chuck with defect positioning and hollowing functions as described in claim 1, characterized in that, The inner wall of the circular bracket (12) has a first protrusion (17), and the scale block (22) is provided with a second slot (18). The second slot (18) is slidably connected to the first protrusion (17), and the scale mechanism (2) rotates on the circular bracket (12).

3. The chuck with defect positioning and hollowing functions as described in claim 1, characterized in that, The inner side of the scale block (22) has a second protrusion (23), and the multi-functional chuck (4) is connected to the second protrusion (23) by bolts.

4. The chuck with defect positioning and hollowing functions as described in claim 3, characterized in that, A ceramic gasket (5) is provided between the second protrusion (23) and the multi-functional chuck (4), the ceramic gasket (5) being used to isolate current.

5. The chuck with defect positioning and hollowing functions as described in claim 1, characterized in that, The driving gear (16), the driven gear (21), the scale block (22), and the multi-functional chuck (4) are coaxial.

6. The chuck with defect positioning and hollowing functions as described in claim 1, characterized in that, The multi-functional chuck (4) has a chuck cover plate (6) for fixing the multi-functional chuck (4).

7. The chuck with defect positioning and hollowing functions as described in claim 1, characterized in that, The two connecting blocks (11) are respectively connected to the column connecting plate (7), the column connecting plate (7) is connected to the bottom plate (8), and the column connecting plate (7) is perpendicularly connected to the bottom plate (8).

8. The chuck with defect positioning and hollowing functions as described in claim 7, characterized in that, An insulating pad (9) is provided between the column connecting plate (7) and the bottom plate (8).

9. The chuck with defect positioning and hollowing functions as described in claim 7, characterized in that, The lower base plate (8) has a connecting groove (91).

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