Power supply circuit, power supply and equipment

Abstract

The embodiment of the invention provides a power supply circuit, a power supply and equipment. The power supply circuit comprises a power supply conversion unit, a resonance unit, a controllable switch unit and a control unit. The resonance unit is electrically connected with the output end of the power conversion unit. The control unit is electrically connected with the power conversion unit and the controllable switch unit. The control unit is used for controlling the power conversion unit and the controllable switch unit to be in a first state or a second state. The resonance unit comprises a first energy storage module and a second energy storage module electrically connected with the first energy storage module, and the second energy storage module is electrically connected with the output end of the power supply circuit. The controllable switch unit is electrically connected with the first energy storage module and the second energy storage module. The first energy storage module is used for storing energy when the controllable switch unit is in the first state. The controllable switch unit is used for short-circuiting the second energy storage module when the controllable switch unit is in the first state. And the second energy storage module is used for generating resonance with the first energy storage module in at least partial time period when the controllable switch unit is in the second state.

Description

Technical Field

[0001] This application relates to the field of power supply technology, specifically to a power supply circuit, power supply, and device. Background Technology

[0002] Power supplies are one of the core components of electrical equipment. Taking the plasma power supply in a DC magnetron sputtering system as an example, the stability of the power supply is a key factor determining the film quality and thickness consistency. The ignition process in the plasma power supply is particularly important; the length of the ignition delay directly affects the equipment's efficiency and the quality of the coated product. How to shorten the ignition delay and obtain the voltage required for ignition within a very short time has become an urgent technical challenge.

[0003] The power supply of existing magnetron sputtering systems has uncertain or excessive ignition delays, which leads to instability in the ignition process and the timing accuracy of individual process steps, ultimately resulting in instability and degradation in the quality of the coated products. Summary of the Invention

[0004] In view of this, this application provides a power supply circuit, power supply, and device to help solve the problems of unstable ignition delay and prolonged ignition time in the prior art.

[0005] In a first aspect, embodiments of this application provide a power supply circuit, including: a power conversion unit, a resonant unit, a controllable switching unit, and a control unit. The power conversion unit converts a received electrical signal into a target electrical signal. The resonant unit is electrically connected to the output terminal of the power conversion unit. The controllable switching unit includes a first state and a second state. The control unit is electrically connected to both the power conversion unit and the controllable switching unit, and is used to control the power conversion unit and the controllable switching unit to be in either the first or second state. The resonant unit includes: a first energy storage module electrically connected to it, and a second energy storage module electrically connected to the output terminal of the power supply circuit. The controllable switching unit is electrically connected to both the first and second energy storage modules. The first energy storage module stores energy when the controllable switching unit is in the first state. The controllable switching unit short-circuits the second energy storage module when it is in the first state. The second energy storage module resonates with the first energy storage module for at least a portion of the time when the controllable switching unit is in the second state.

[0006] The power supply circuit provided in this embodiment controls the state of the controllable switching unit through the control unit, realizing the energy storage and release of the first energy storage module and resonance with the second energy storage module. When the controllable switching unit is in the first state, the first energy storage module can receive the target electrical signal and store energy. During at least a portion of the time when the controllable unit is in the second state, the first and second energy storage modules resonate. At this time, the energy released by the first energy storage module is stored by the second energy storage module. In the initial stage of resonance, the second energy storage module stores energy very quickly, causing the voltage across the second energy storage module to rise rapidly, resulting in a very fast rise in the output voltage of the power supply circuit. Thus, the output voltage of the power supply reaches the target value in an extremely short time. Taking the target value as the ignition voltage as an example, the power supply circuit of this application can achieve ignition in a shorter time, shortening the ignition delay, thereby improving the quality and stability of the product.

[0007] In one implementation of the first aspect, a first energy storage module is used to store a first energy, which includes magnetic field energy. A second energy storage module is used to store a second energy, which includes electric field energy.

[0008] After receiving the target electrical signal, the first energy storage module converts the received electrical energy into magnetic field energy and stores it. Upon release, it converts the magnetic field energy back into electrical energy and transmits it to the second energy storage module, which stores the received electrical energy as electric field energy. The magnetic field energy can boost the voltage during the conversion process, allowing the second energy storage module to have a high voltage value in a short period of time. This scheme is simple to implement and helps reduce costs.

[0009] In one implementation of the first aspect, the first energy storage module includes an inductor. One end of the inductor is electrically connected to an output terminal of the power conversion unit, and the other end of the inductor is electrically connected to both the controllable switching unit and the second energy storage module.

[0010] Inductors can quickly convert received electrical energy into magnetic field energy. They also have a simple structure, are easy to implement, and have good energy storage performance. During the resonance phase, the voltage across the inductor can change in a stepwise manner, which allows the voltage of the second energy storage module to be greatly increased in an extremely short time, thereby achieving the technical goal of obtaining high voltage in a short period of time.

[0011] In one implementation of the first aspect, the second energy storage module includes an adjustable capacitor submodule, which includes at least two adjustable capacitor branches connected in parallel with each other. Each adjustable capacitor branch includes a capacitor and a control switch connected in series, and a limiting resistor connected in parallel with the control switch.

[0012] The capacitance value of the adjustable capacitor submodule can be adjusted by changing the control switch. This adjustable capacitance value allows the power supply circuit to have a wider operating range.

[0013] In one implementation of the first aspect, the second energy storage module includes a fixed capacitor submodule and an adjustable capacitor submodule, which are connected in parallel. The fixed capacitor submodule includes at least one fixed capacitor branch, and the fixed capacitor branch includes at least one capacitor. The adjustable capacitor submodule includes at least one adjustable capacitor branch, which includes: a capacitor and a control switch connected in series, and a limiting resistor connected in parallel with the control switch.

[0014] The fixed capacitor submodule has a fixed capacitance value, meaning it is always electrically connected to the output terminals of the power supply circuit. This fixed capacitor submodule provides the power supply circuit with a fundamental output capacitor, ensuring the stability of the output voltage. Meanwhile, the adjustable capacitor submodule's capacitance value can be adjusted via a control switch. This allows the capacitance value of the second energy storage module to be adjusted based on the fixed value, ultimately enabling the power supply circuit to have a wider operating range.

[0015] In one implementation of the first aspect, the control switch is controlled by a control unit.

[0016] The control switch, power conversion unit, and controllable switch unit are all controlled by a control unit, which concentrates the control on the control unit, reduces the complexity of control, and saves space in the control section of the power circuit.

[0017] In one implementation of the first aspect, the controllable switch unit includes at least one controllable switch, which is electrically connected to the control unit.

[0018] The controllable switch can be controlled by the control unit, which facilitates the switching of the state of the controllable switch unit.

[0019] In one implementation of the first aspect, an overvoltage protection unit is also included, which is connected in parallel with the second energy storage module.

[0020] The overvoltage protection unit can operate after the output voltage of the power supply circuit reaches a preset threshold, so that the output voltage is maintained in a stable state, thus avoiding the burnout of the back-end circuit or even safety accidents caused by excessive output voltage.

[0021] In one implementation of the first aspect, the overvoltage protection unit includes at least one transient voltage suppressor (TVS).

[0022] TVS diodes can break down when the output voltage reaches a preset threshold, thus clamping the output voltage within a safe range and improving the safety of the power supply circuit. Furthermore, TVS diodes offer advantages such as ease of implementation, integration, and significant voltage regulation.

[0023] In one implementation of the first aspect, the power conversion unit includes: an inverter module, a transformer module, and a rectifier module. The inverter module converts a received electrical signal into a first AC signal. The input terminal of the transformer module is electrically connected to the output terminal of the inverter module, and the transformer module outputs a second AC signal. The input terminal of the rectifier module is electrically connected to the output terminal of the transformer module, and the rectifier module rectifies the second AC signal into a target electrical signal.

[0024] The inverter module is used to invert the received electrical signal. The inverted electrical signal is coupled and transformed to the rectifier module via the transformer. The rectifier module then rectifies the signal to obtain the target electrical signal, so that the first energy storage module can store enough energy to meet subsequent needs.

[0025] In one implementation of the first aspect, the inverter module includes a full-bridge phase-shifting inverter submodule.

[0026] After the DC signal is processed by the full-bridge phase-shift inverter submodule, a stable AC signal can be obtained, and the soft-opening and soft-close of the switches in the full-bridge phase-shift inverter submodule can be realized, saving power consumption.

[0027] In one implementation of the first aspect, the rectifier module includes a full-bridge rectifier submodule.

[0028] The full-bridge rectifier submodule has a simple structure, is easy to implement, and has low power consumption.

[0029] Secondly, this application provides a power supply circuit control method for controlling a power supply circuit according to the first aspect or any implementation thereof. The control method includes:

[0030] The controllable switching unit is placed in the first state so that the first energy storage module can store energy.

[0031] The controllable switch is set to the second state so that the first energy storage module and the second energy storage module resonate.

[0032] Thirdly, this application also provides a power supply, which includes at least one power supply circuit of the first aspect or any implementation thereof.

[0033] Based on the power supply in the first aspect or any implementation thereof, an extremely high output voltage can be obtained in an extremely short time, thus making it suitable for devices that require instantaneous high voltage.

[0034] In one implementation of the third aspect, the power supply includes at least two power supply circuits, which are cascaded together. In two adjacent cascaded power supply circuits, the control unit of the power supply circuit in the earlier stage is electrically connected to the control unit of the power supply circuit in the later stage.

[0035] At least two power supply circuits cascaded together can realize a multi-output power supply, that is, the power supply can output at least two output voltages, thereby improving the practicality of the power supply.

[0036] Fourthly, this application also provides an apparatus, which includes a power supply circuit as described in the first aspect or any implementation of the first aspect, or the apparatus includes a power supply as described in the third aspect or any implementation of the third aspect.

[0037] The device implemented with a power supply circuit in the first aspect or any implementation thereof, or with a power supply in the third aspect or any implementation thereof, enables the device to have a very small time delay when instantaneous high voltage is required, thereby improving the overall performance of the device.

[0038] In one implementation of the fourth aspect, the device includes a plasma chamber, the electrodes of which are electrically connected to the output of a power supply circuit.

[0039] The plasma chamber can ionize and emit light under high voltage. The power supply circuit in the first aspect or any implementation of the first aspect or the power supply in the third aspect or any implementation of the third aspect can provide an ignition voltage to the plasma chamber. The ignition delay in the entire ignition process is very short, thereby improving the ionization efficiency and the stability and quality of the coated products.

[0040] Using the solution provided in this application embodiment, the control unit controls the controllable switch unit to be in a first state, at which time the first energy storage unit stores energy. During at least a portion of the time when the control unit controls the controllable switch unit to be in a second state, the first energy storage unit and the second energy storage unit resonate and release the stored energy into the second energy storage module. Under the action of resonance, the second energy storage module stores energy very quickly, thereby causing the voltage of the second energy storage module to rise rapidly, thus causing the output voltage of the power supply circuit to rise rapidly to the target voltage. Taking the target voltage as the plasma ignition voltage as an example, the power supply circuit provided in this application can effectively shorten the ignition delay and ensure the stability of the power supply circuit, so as to improve the quality and stability of the coated product. Attached Figure Description

[0041] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0042] Figure 1 This is a schematic diagram of a power supply based on LLC resonance.

[0043] Figure 2 A simplified resonant diagram of a power supply based on LLC resonance;

[0044] Figure 3 This is a schematic diagram of a gain based on LLC resonance;

[0045] Figure 4 This is a schematic diagram of a plasma luminescence process;

[0046] Figure 5 A schematic diagram of a power supply circuit provided in an embodiment of this application;

[0047] Figure 6 A schematic diagram of a power supply circuit provided in an embodiment of this application;

[0048] Figure 7 A schematic diagram of a power supply circuit provided in an embodiment of this application;

[0049] Figure 8 A schematic diagram of a power supply circuit provided in an embodiment of this application;

[0050] Figure 9 A schematic diagram of a power supply circuit provided in an embodiment of this application;

[0051] Figure 10 A schematic diagram of a power supply circuit provided in an embodiment of this application;

[0052] Figure 11 A schematic diagram of a power supply circuit provided in an embodiment of this application;

[0053] Figure 12 Provided for the embodiments of this application Figure 11 Simulation diagram of inductor current, capacitor current and output voltage;

[0054] Figure 13 This is a simulation diagram of the inductor current and output voltage of a power supply circuit based on an embodiment of this application;

[0055] Figure 14 This is a simulation diagram of the inductor current and output voltage of a power supply circuit based on an embodiment of this application;

[0056] Figure 15 A schematic diagram of a power supply circuit provided in an embodiment of this application;

[0057] Figure 16 A simulation diagram of the primary voltage, secondary voltage, and rectified DC voltage of a power supply circuit provided for an embodiment of this application;

[0058] Figure 17 A flowchart of a power supply circuit control method provided in an embodiment of this application;

[0059] Figure 18 A schematic diagram of a power supply provided for an embodiment of this application;

[0060] Figure 19 A schematic diagram of a power supply provided for an embodiment of this province / region;

[0061] Figure 20 This is a schematic diagram of the ignition timing control of a DC magnetron sputtering device provided in an embodiment of this application.

[0062] Label Explanation

[0063] 100. Power supply circuit; 110. Power conversion unit; 111. Inverter module; 112. Transformer module; 113. Rectifier module; 120. Resonant unit; 121. First energy storage module; 122. Second energy storage module; 1221. Adjustable capacitor sub-module; 1222. Fixed capacitor sub-module; 130. Controllable switch unit; 140. Control unit; 150. Overvoltage protection unit; 160. Load unit. Detailed Implementation

[0064] To better understand the technical solution of this application, the embodiments of this application will be described in detail below with reference to the accompanying drawings.

[0065] It should be understood that the described embodiments are merely some, not all, of the embodiments in this application. All other embodiments obtained by those skilled in the art based on the embodiments in this application without inventive effort are within the scope of protection of this application.

[0066] The terminology used in the embodiments of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. The singular forms “a,” “the,” and “the” used in the embodiments of this application and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise.

[0067] It should be understood that the term "and / or" used in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, the character " / " in this article generally indicates that the preceding and following related objects have an "or" relationship.

[0068] In related technologies, the power supply for DC magnetron sputtering includes two implementation methods:

[0069] One is like Figure 1 As shown, it is implemented using an LCC resonant circuit, a transformer, and a full-bridge rectifier circuit. A simplified diagram of its resonance is shown below. Figure 2 As shown, its gain is as follows Figure 3 As shown, where Figure 3 The Q value in the equation is the circuit quality factor. The plasma emission process is as follows: Figure 4 As shown. From Figure 4 As can be seen, ignition is triggered when the plasma chamber voltage reaches the ignition voltage. After successful ignition, the number of conductive ions in the chamber increases dramatically. This increased concentration of conductive ions further causes collisions between particles, thus further exciting the plasma's luminescence. At this point, the current in the chamber increases, and the voltage across the chamber decreases. Therefore, the plasma requires an extremely high ignition voltage, while the sustaining voltage after successful ignition can be appropriately reduced.

[0070] based on Figure 4 As shown, the plasma luminescence process is as follows:

[0071] When no ignition occurs and the circuit is at point A, the cavity is equivalent to a capacitor with a capacitance value of Cd = 700pF, which is negligible compared to the output capacitor Co = 50nF. At this point, the DC source output can be considered unloaded, and the circuit is equivalent to a series voltage divider consisting of Ls, Cs, and Cp. The output voltage is:

[0072]

[0073] Where F is the frequency ratio of the power-on frequency to the resonant frequency, and the power-on frequency is the operating frequency of switches S1-S4.

[0074] As shown in the formula above, controlling the start-up frequency allows for control of the ignition voltage. When the plasma gas enters the discharge transition region, the voltage begins to decrease, the current increases, and the gain curve decreases, reaching point B. As the voltage further decreases and the current increases, it enters the glow discharge region, reaching point C. The transition from point A to point C is smooth. In constant voltage mode regulation, the LCC circuit adjusts the frequency to make the system operate at point D; the constant power / constant current mode regulation is similar.

[0075] This implementation method can control the ignition voltage by controlling the power-on frequency. However, the power supply based on the LCC resonant circuit has a narrow load impedance adaptation range under full load output. When the power supply needs to adapt to a wider load range, it is necessary to modify the turns ratio of the primary and secondary coils of the transformer, which is quite cumbersome. At the same time, when the power supply is outputting under no-load, the circulating current on the primary side of the transformer is relatively high, which is not conducive to improving the power supply efficiency.

[0076] Another type of power supply for DC magnetron sputtering is based on a soft-start inverter circuit, transformer, and full-bridge rectifier circuit. To achieve soft-start of the switching transistors in the inverter and prevent excessive voltage in the transformer primary coil from causing circuit instability, a series inductor is connected in series with the primary coil. This leads to a voltage drop on the primary side of the transformer, resulting in a drop in the secondary output voltage and a severe duty cycle loss. The primary side of the transformer completes the charging and discharging of the equivalent parallel capacitor of the main switching transistor to achieve soft switching, but at the same time, the secondary side experiences duty cycle loss. Duty cycle loss is unavoidable in this topology, or it is the price paid for achieving ZVS (Zero-Voltage Switching). The larger the equivalent parallel capacitor of the switching transistor, the larger the corresponding resonant inductance, resulting in a longer commutation time and a greater duty cycle loss for the same load current. This is also a major factor limiting the increase in the switching frequency of ZVS phase-shifted full-bridge converters. The loss of duty cycle will cause the following problems: the current on the primary side of the transformer increases, the peak current of the switching transistor increases, and thus the loss of the switching transistor in the conducting state increases; the reverse voltage difference across the diode in the secondary rectifier circuit increases, so in order to ensure the normal operation of the circuit, the voltage rating of the diode needs to be increased accordingly. However, the selection of diodes with high voltage ratings will lead to an increase in voltage drop in the conducting state, which will lead to an increase in power consumption of the diode in the conducting state; the reduction of the secondary output voltage will lead to a slower ignition start-up speed, an increased ignition delay, and ultimately a significant negative impact on the entire process.

[0077] See also Figure 5 To address the aforementioned issues, this application provides a power supply circuit 100, a power supply, and a device.

[0078] This application provides a power supply circuit 100, including a power conversion unit 110, a resonant unit 120, a controllable switching unit 130, and a control unit 140. The power conversion unit 110 converts a received electrical signal into a target electrical signal. In one possible implementation, the power conversion unit 110 can be a DC-DC converter, where the received electrical signal can be a DC signal, and the target electrical signal can be a signal with a consistent direction but variable magnitude, such as a pulsating DC signal. The resonant unit 120 is electrically connected to the output terminal of the power conversion unit 110. The controllable switching unit 130 includes a first state and a second state. The control unit 140 is electrically connected to both the power conversion unit 110 and the controllable switching unit 130, and controls the power conversion unit 110 and the controllable switching unit 130 to be in either the first or second state. The resonant unit 120 includes a first energy storage module 121 and a second energy storage module 122. The first energy storage module 121 and the second energy storage module 122 are electrically connected to the power conversion unit 110. The second energy storage module 122 is electrically connected to the output terminal of the power circuit 100. The first energy storage module 121 and the second energy storage module 122 are also electrically connected to the power conversion unit. The controllable switch unit 130 is electrically connected to both the first energy storage module 121 and the second energy storage module 122. The first energy storage module 121 stores energy when the controllable switch unit 130 is in a first state. In one possible implementation, when the controllable switch unit 130 is in the first state, the first energy storage module 121, upon receiving a target electrical signal, converts the energy associated with the target electrical signal into energy that can be stored in the first energy storage module 121 and stores it. The controllable switch unit 130 short-circuits the second energy storage module 122 when the controllable switch unit 130 is in the first state. In one possible implementation, the controllable switch unit 130 is connected in parallel with the second energy storage module 122. When the controllable switch unit 130 is in the first state, the second energy storage module 122 is short-circuited. The second energy storage module 122 is used to resonate with the first energy storage module 121 for at least a portion of the time when the controllable switch unit 130 is in the second state. The resonance between the first energy storage module 121 and the second energy storage module 122 means that the energy stored in the first energy storage module 121 will be transferred to the second energy storage module 122. In the initial stage of resonance, this energy conversion is very fast, and the rapid increase in the energy stored in the second energy storage module 122 will cause the voltage across the second energy storage module 122 to rise rapidly, thus causing the output voltage of the power supply circuit 100 to rise rapidly.For example, the resonance between the first energy storage module 121 and the second energy storage module 122 begins at the moment when the controllable switching unit 130 switches from the first state to the second state. Therefore, in the initial stage of the switch from the first state to the second state, the energy of the first energy storage module 121 is quickly transferred to the second energy storage module 122, thereby realizing the rapid rise of the output voltage of the power supply circuit 100.

[0079] The power supply circuit 100 provided in this embodiment controls the state of the controllable switching unit 130 through the control unit 140, realizing the energy storage and release of the first energy storage module 121 and the resonance of the second energy storage module 122. When the controllable switching unit 130 is in the first state, the first energy storage module 121 can receive the target electrical signal and store energy. During at least a portion of the time when the controllable unit is in the second state, the first energy storage module 121 and the second energy storage module 122 resonate. At this time, the energy released by the first energy storage module 121 is stored by the second energy storage module 122. In the initial stage of resonance, the second energy storage module 122 stores energy very quickly, causing the voltage across the second energy storage module 122 to rise rapidly, thus making the output voltage of the power supply circuit 100 rise very quickly. Therefore, the output voltage of the power supply reaches the target value in an extremely short time. Taking the target value as the ignition voltage as an example, the power supply circuit 100 of this application can achieve ignition in a shorter time, shortening the ignition delay, thereby improving the quality and stability of the product.

[0080] It should be understood that the duration of resonance between the first energy storage module 121 and the second energy storage module 122 depends on various factors, including the parameters of the devices in the two modules and the control timing of the power conversion circuit. Therefore, when the first energy storage module 121 and the second energy storage module 122 resonate, the controllable switching unit 130 must be in the second state. However, even when the controllable switching unit 130 is in the second state, the first energy storage module 121 and the second energy storage module 122 may not always be resonating.

[0081] For example, in one possible implementation, the resonance between the first energy storage module 121 and the second energy storage module 122 begins at the moment when the controllable switching unit 130 switches from a first state to a second state, and the second state of the controllable switching unit 130 is maintained for a period of time. During the period when the controllable switching unit 130 is maintained in the second state, the power conversion circuit provides the target electrical signal to the first energy storage module 121. After the initial resonance, the first energy storage module 121 and the second energy storage module 122 are in a state of simultaneous energy storage, but this simultaneous energy storage process does not fall within the scope of resonance.

[0082] For example, in another possible implementation, when the controllable switching unit 130 is in the second state, the first energy storage module 121 and the second energy storage module 122 always maintain a resonant state. In another possible implementation, when the controllable switching unit 130 is in the second state, the first energy storage module 121 always releases energy to the second energy storage module 122.

[0083] In one embodiment of this application, the first state is an ON state and the second state is an OFF state. When the controllable switch unit 130 is in the ON state, the input terminal and the output terminal of the controllable switch unit 130 form a path for the signal carrier (e.g., the carrier of an electrical signal can be an electron or a hole) to flow through. When the controllable switch unit 130 is in the OFF state, the path for the signal carrier to flow between the input terminal and the output terminal of the controllable switch unit 130 is closed.

[0084] In one possible implementation, the first energy storage module 121 and the second energy storage module 122 are connected in series.

[0085] The first energy storage module 121 and the second energy storage module 122 can be connected in series to improve the energy storage speed of the first energy storage module 121, thereby shortening the energy storage time of the first energy storage module 121 and improving work efficiency.

[0086] In one embodiment of this application, a first energy storage module 121 is used to store a first energy, which includes magnetic field energy. A second energy storage module 122 is used to store a second energy, which includes electric field energy.

[0087] After receiving the target electrical signal, the first energy storage module 121 converts the received electrical energy into magnetic field energy through electromagnetic induction and stores it. When the first energy storage module 121 releases energy, it converts the magnetic field energy into electrical energy through electromagnetic induction and transmits it to the second energy storage module 122. The second energy storage module 122 accumulates the received charge, and this accumulated charge forms an electric field between the two polarities of the second energy storage module 122, storing it as electric field energy. That is, the second energy storage module 122 stores the received electrical energy as electric field energy. The electric field energy increases rapidly with the energy, causing the voltage between the two polarities of the second energy storage module 122 to rise rapidly. Therefore, in this embodiment, the magnetic field energy can boost the voltage during the conversion process, allowing the second energy storage module 122 to have a high voltage value in a short time. This solution is simple to implement and helps reduce costs.

[0088] See also Figure 6In one possible implementation, the first energy storage module 121 includes an inductor. One end of the inductor is electrically connected to one output terminal of the power conversion unit 110, and the other end of the inductor is electrically connected to both the controllable switching unit 130 and the second energy storage module 122. For example, the first end of the inductor is electrically connected to the first output terminal of the power conversion unit 110, the second end of the inductor is electrically connected to one end of the controllable switching unit 130 and one end of the second energy storage module 122, and the other ends of the second energy storage module 122 and the controllable switching unit 130 are electrically connected to the second output terminal of the power conversion unit 110. The second energy storage module 122 is connected in parallel with the controllable switching unit 130. That is, the inductor and the second energy storage module 122 are connected in series between the two output terminals of the power conversion unit 110.

[0089] Inductors can quickly convert received electrical energy into magnetic field energy. Inductors have a simple structure, are easy to implement, have good energy storage performance, and during the resonance phase, the voltage across the inductor can change in a stepwise manner, so that the voltage of the second energy storage module 122 can be greatly increased in an extremely short time, thereby achieving the technical goal of obtaining high voltage in a short time.

[0090] See also Figure 7 In one embodiment of this application, the second energy storage module 122 includes an adjustable capacitor submodule 1221, which includes at least two adjustable capacitor branches connected in parallel with each other. Each adjustable capacitor branch includes a capacitor and a control switch connected in series, and a limiting resistor connected in parallel with the control switch.

[0091] That is, in this embodiment, the adjustable capacitor branch includes: a capacitor, a control switch, and a limiting resistor. The capacitor and the control switch are connected in series, and the capacitor is also connected in series with the limiting resistor. The control switch and the limiting resistor are connected in parallel. In one possible implementation, the control unit 140 is electrically connected to the control switch, and the control switch is controlled by the control unit 140. The control switch can be a relay switch, a semiconductor switch, or other switching device that can be controlled by the control unit 140. For example, when the control switch is a relay switch, the control coil of the relay is electrically connected to the control unit 140, and the knife switch of the relay is connected in parallel with the limiting resistor. When the control switch is a semiconductor switch, the control terminal of the semiconductor switch is electrically connected to the control unit 140, the input terminal of the semiconductor switch is electrically connected to one end of the limiting resistor, and the output terminal of the semiconductor switch is electrically connected to the other end of the limiting resistor. The control switch, the power conversion unit 110, and the controllable switch unit 130 are all controlled by the control unit 140, which concentrates control in the control unit 140, reduces control complexity, and saves space in the control section of the power circuit 100.

[0092] In this circuit, the resistance of the limiting resistor is much larger than the capacitance of the capacitor. Therefore, when the control switch is off, the limiting resistor keeps the capacitor and its branch open. When the control switch is on, the limiting resistor is short-circuited, and the capacitor and its branch are considered to be conducting, allowing the capacitor to store energy normally. At this time, the capacitance value of the adjustable capacitor submodule 1221 can be adjusted by selecting the control switch to be on or by controlling the number of times the control switch is on, thus adjusting the capacitance value of the entire second energy storage module 122. The adjustable capacitance value of the second energy storage module 122 facilitates a rapid increase in the boost speed of the power supply circuit 100's output voltage and reduces output voltage ripple.

[0093] The capacitance value of the adjustable capacitor submodule 1221 can be adjusted, and the capacitance of the adjustable capacitor submodule 1221 can be adjusted by adjusting the control switch. The adjustable capacitance value of the adjustable capacitor submodule 1221 enables the power supply circuit 100 to have a better adaptability range.

[0094] In one implementation, the control switch can be controlled by an independent control circuit. That is, the control circuit for the control switch is independent of the control unit 140 used to control the controllable switch unit 130.

[0095] In one possible implementation, the adjustable capacitor branch also includes a series resistor. For example, the capacitor is electrically connected to one end of the first energy storage module, and the capacitor, series resistor, and limiting resistor are connected in series, with the series resistor positioned between the capacitor and the limiting resistor. The function of the series resistor is to limit current and protect the capacitor.

[0096] See also Figure 8 In one embodiment of this application, the second energy storage module 122 includes a fixed capacitor submodule 1222 and an adjustable capacitor submodule 1221. The fixed capacitor submodule 1222 and the adjustable capacitor submodule 1221 are connected in parallel. The fixed capacitor submodule 1222 includes at least one fixed capacitor branch, and the fixed capacitor branch includes at least one capacitor. The adjustable capacitor submodule 1221 includes at least one adjustable capacitor branch, and the adjustable capacitor branch includes: a capacitor and a control switch connected in series, and a limiting resistor connected in parallel with the control switch.

[0097] That is, in this embodiment, the adjustable capacitor branch includes: a capacitor, a control switch, and a limiting resistor. The capacitor and the control switch are connected in series, and the capacitor is also connected in series with the limiting resistor. The control switch and the limiting resistor are connected in parallel. In one possible implementation, the control unit 140 is electrically connected to the control switch, and the control switch is controlled by the control unit 140. The control switch can be a relay switch, a semiconductor switch, or other switching device that can be controlled by the control unit 140. For example, when the control switch is a relay switch, the control coil of the relay is electrically connected to the control unit 140, and the knife switch of the relay is connected in parallel with the limiting resistor. When the control switch is a semiconductor switch, the control terminal of the semiconductor switch is electrically connected to the control unit 140, the input terminal of the semiconductor switch is electrically connected to one end of the limiting resistor, and the output terminal of the semiconductor switch is electrically connected to the other end of the limiting resistor.

[0098] In this circuit, the resistance of the limiting resistor is much larger than the capacitance of the capacitor. Therefore, when the control switch is off, the limiting resistor keeps the capacitor and its branch open. When the control switch is on, the limiting resistor is short-circuited, and the capacitor and its branch are considered to be conducting, allowing the capacitor to store energy normally. At this time, the capacitance value of the adjustable capacitor submodule 1221 can be adjusted by selecting the control switch to be on or by controlling the number of times the control switch is on, thus adjusting the capacitance value of the entire second energy storage module 122. The adjustable capacitance value of the second energy storage module 122 facilitates a rapid increase in the boost speed of the power supply circuit 100's output voltage and reduces output voltage ripple.

[0099] The fixed capacitor submodule 1222 has a fixed capacitance value, meaning it is always electrically connected to the output terminals of the power supply circuit 100. The fixed capacitor submodule 1222 provides the power supply circuit 100 with a basic output capacitor, thus ensuring the stability of the power supply circuit 100's output voltage. Meanwhile, the adjustable capacitor submodule 1221's capacitance value is adjustable, which can be achieved by adjusting a control switch. This allows the capacitance value of the second energy storage module 122 to be adjustable based on the fixed capacitance value, ultimately enabling the power supply circuit 100 to have a better adaptability range.

[0100] In one possible implementation, the fixed capacitor branch includes at least one capacitor and at least one current-limiting resistor, which are connected in series. For example, when the fixed capacitor branch includes at least two capacitors and at least one current-limiting resistor, the at least two capacitors are connected in series and in series with the at least one current-limiting resistor. The current-limiting resistor protects the capacitors.

[0101] In one possible implementation, the fixed capacitor submodule 1222 includes at least two fixed capacitor branches connected in parallel with each other. Connecting at least two fixed capacitor branches in parallel increases the capacitance value of the fixed capacitor submodule while keeping the capacitance value of each fixed capacitor branch very small, thus facilitating implementation and saving costs.

[0102] In one possible implementation, the adjustable capacitor submodule 1221 includes at least two adjustable capacitor branches, which are connected in parallel with each other.

[0103] In one possible implementation, the control switch can be controlled by a separate control circuit. That is, the control circuit for the control switch is independent of the control unit 140 used to control the controllable switch unit 130.

[0104] In one possible implementation, the adjustable capacitor branch also includes a series resistor. For example, the capacitor is electrically connected to one end of the first energy storage module, and the capacitor, series resistor, and limiting resistor are connected in series, with the series resistor positioned between the capacitor and the limiting resistor. The function of the series resistor is to limit current and protect the capacitor.

[0105] In one embodiment of this application, the second energy storage module 122 includes a fixed capacitor submodule 1222.

[0106] Please see Figures 9 to 11 In one embodiment of this application, the controllable switch unit 130 includes at least one controllable switch, which is electrically connected to the control unit 140.

[0107] The controllable switch can be controlled by the control unit 140, thereby facilitating the switching of the state of the controllable switch unit 130.

[0108] like Figure 9 As shown, in one possible implementation, the controllable switching unit 130 includes a controllable switch connected in parallel with a limiting resistor. Figure 11 As shown, in another possible implementation, when the controllable switch unit 130 includes at least two controllable switches, the at least two controllable switches are connected in series. The series circuit of the at least two controllable switches is then connected in parallel with the second energy storage module 122.

[0109] Please see Figure 11 In one embodiment of this application, the power supply circuit 100 further includes an overvoltage protection unit 150, which is connected in parallel with the second energy storage module 122.

[0110] The overvoltage protection unit 150 can operate after the output voltage of the power supply circuit 100 reaches a preset threshold. For example, the overvoltage protection can be turned on after the output voltage of the power supply circuit 100 reaches the threshold voltage, so that the output voltage is maintained in a stable state, so as to avoid the burnout of the back-end circuit or even the occurrence of safety accidents due to excessive output voltage.

[0111] See also Figure 11 In one possible implementation, the overvoltage protection unit 150 includes at least one transient voltage suppressor (TVS).

[0112] TVS diodes can break down when the output voltage reaches a preset threshold, thus clamping the output voltage within a safe range and improving the safety factor of the power supply circuit by 100%. Furthermore, TVS diodes have advantages such as ease of implementation, convenient integration, and significant voltage regulation effect.

[0113] For example, the overvoltage protection unit 150 includes at least two transient voltage suppressor diodes connected in series. The series connection of at least two transient voltage suppressor diodes enables the maximum output voltage of the power supply circuit 100 to be limited to an integer multiple of the withstand voltage value of a single transient voltage suppressor diode.

[0114] See also Figure 10 In one embodiment of this application, the power conversion unit 110 includes an inverter module 111, a transformer module 112, and a rectifier module 113. The inverter module 111 converts a received electrical signal into a first AC signal. The input terminal of the transformer module 112 is electrically connected to the output terminal of the inverter module 111, and the transformer module 112 outputs a second AC signal. The input terminal of the rectifier module 113 is electrically connected to the output terminal of the transformer module 112, and the rectifier module 113 rectifies the second AC signal into a target electrical signal.

[0115] The inverter module 111 is used to invert the received electrical signal. The inverted electrical signal is coupled and transformed to the rectifier module 113 via the transformer. The rectifier module 113 then rectifies the signal to obtain the target electrical signal, so that the first energy storage module 121 can store enough energy to meet subsequent needs.

[0116] In one possible implementation, inverter module 111 includes a full-bridge phase-shifting inverter submodule.

[0117] After the DC signal is processed by the full-bridge phase-shift inverter submodule, a stable AC signal can be obtained, and the soft-opening and soft-close of the switches in the full-bridge phase-shift inverter submodule can be realized, saving power consumption.

[0118] In one possible implementation, rectifier module 113 includes a full-bridge rectifier submodule.

[0119] The full-bridge rectifier submodule has a simple structure, is easy to implement, and has low power consumption.

[0120] See also Figure 10 or Figure 11 In one embodiment of this application, the control unit 140 includes a controller. The controller is electrically connected to the semiconductor switch in the inverter module 111, the controllable switch in the controllable switch circuit, and the control switch in the adjustable capacitor submodule 1221, respectively. The controller is used to control the semiconductor switch in the inverter module 111, the controllable switch in the controllable switch unit 130, and the control switch in the adjustable capacitor submodule 1221. The semiconductor switch in the inverter module 111 can be a MOSFET switch. The controllable switch in the controllable switch unit 130 can be a semiconductor switch, such as a MOSFET switch. The control switch in the adjustable capacitor submodule 1221 is a relay switch or a semiconductor switch. It should be noted that, in one possible implementation, the adjustable capacitor submodule 1221 includes multiple control switches, among which at least one of a relay switch and a semiconductor switch is included.

[0121] See also Figure 11 In one embodiment of this application, the power supply circuit 100 further includes a load unit 160, which is electrically connected to the output terminal of the power supply circuit 100. In one possible implementation, the load unit 160 may include a load resistor.

[0122] Using the solution provided in this application embodiment, the control unit 140 controls the controllable switch unit 130 to be in a first state, at which time the first energy storage unit stores energy. During at least a portion of the time when the control unit 140 controls the controllable switch unit 130 to be in a second state, the first energy storage unit and the second energy storage unit resonate and release the stored energy into the second energy storage module 122. Under the action of resonance, the second energy storage module 122 stores energy very quickly, thereby causing the voltage of the second energy storage module 122 to rise rapidly, thereby causing the output voltage of the power supply circuit 100 to rise rapidly to the target voltage. Taking the target voltage as the plasma ignition voltage as an example, the power supply circuit 100 provided in this application can effectively shorten the ignition delay and ensure the stability of the power supply circuit 100, so as to improve the quality and stability of the coated product.

[0123] See also Figure 12 Switches Q5 and Q6 are turned off after 1.0ms. Figure 12It can be clearly seen that, using the power supply circuit 100 provided in the embodiment of the present invention, when the controllable switching unit 130 switches from the first state to the second state, the current of the inductor Lf will drop sharply, while the output voltage and the current of the output capacitor (the sum of the current of capacitor Cf and the current of capacitor Cf1) will rise sharply. Therefore, the voltage can be rapidly increased in a very short time to shorten the ignition delay.

[0124] See also Figure 13 Using the power supply circuit 100 provided in this embodiment of the invention, within a very short time (within a time period on the order of microseconds) during which the controllable switching unit 130 switches from the first state to the second state, such as... Figure 13 As shown in the simulation diagram of the solution provided in the embodiment of this application, it can be clearly seen that the output voltage of the power supply circuit 100 provided in the embodiment of this application can reach 1300V in 7us, and the voltage rise rate is about 185V / us.

[0125] See also Figure 14 Using the power circuit 100 provided in this application embodiment to simulate the ignition process, within a very short time (within a time period of microseconds) when the controllable switching unit 130 switches from the first state to the second state, the inductor Lf will form a very narrow current pulse, thereby enabling the output voltage to be instantly increased to a very large value (e.g., increased to 1650.9V), and the voltage will eventually stabilize at an output of 1500V.

[0126] like Figure 14 As shown, the power supply circuit 100 provided in this embodiment can maintain a voltage output of 1500V even during ignition delay or ignition failure. For the reason why this effect can be achieved, please refer to [link to relevant documentation]. Figure 15 and Figure 16 Specifically, in the power supply circuit 100 provided in this application embodiment, the transformer has an equivalent parallel capacitance, that is, the transformer has equivalent capacitances connected in parallel with both the primary and secondary sides of the transformer. The equivalent parallel capacitance of the transformer is as follows: Figure 15 As shown by the dashed line, the equivalent parallel capacitor on the secondary side of the transformer resonates with the inductor in the first energy storage module 121, causing significant voltage oscillations on the secondary side of the transformer. The peak value of these oscillations can approach twice the steady-state voltage. Taking a full-load output voltage of 1000V as an example, the peak output voltage of the power supply circuit 100 can reach 2000V, and this oscillating voltage peak will be equal to the rectified DC open-circuit voltage, meeting the ignition voltage requirement of 1500V. Therefore, the power supply circuit 100 provided in this embodiment can effectively ensure that the output voltage of the power supply circuit 100 reaches the ignition voltage and maintains high-voltage output. Similarly, the power supply circuit 100 provided in this embodiment can maintain high-voltage output even in the event of ignition failure or delay.

[0127] See also Figure 17 This application provides a power supply circuit control method for controlling a power supply circuit 100 in a first aspect or any implementation thereof. The control method for the power supply circuit 100 is implemented by a control device for the power supply circuit 100. The control method includes:

[0128] S100, the control unit 140 controls the controllable switch unit 130 to be in the first state so that the first energy storage module 121 can store energy.

[0129] The control unit 140 outputs a valid signal to the controllable switch unit 130 to put the controllable switch unit 130 into a first state, thereby electrically connecting the first energy storage module 121 to the two output terminals of the power conversion unit 110, thereby realizing rapid energy storage of the first energy storage module 121.

[0130] Step S100 also includes the control unit 140 controlling the power conversion circuit to output the target electrical signal. When the first energy storage module 121 receives the target electrical signal and the controllable switch unit 130 is in the first state, the first energy storage module 121 performs energy storage.

[0131] S200, the control unit 140 controls the controllable switch to the second state so that the first energy storage module 121 and the second energy storage module 122 resonate.

[0132] The control unit 140 outputs an invalid signal to the controllable switch unit 130 to put the controllable switch in the second state, thereby enabling the second energy storage module 122 and the first energy storage module 121 to resonate.

[0133] In one possible implementation, step S200 includes: the control unit further controls a control switch to adjust the capacitance value of the second energy storage module.

[0134] In step S200, the capacitance of the second energy storage module is adjusted by regulating the closing or closing of the control switch, so that the second energy storage module has a larger capacitance value, thereby improving the storage capacity of the second energy storage module and increasing the rise rate of the output voltage.

[0135] In one possible implementation, a power supply circuit control method further includes: step S300, whereby, when the output voltage meets a preset condition, the control unit controls a control switch to be in a conducting state to reduce the output ripple of the output voltage. In one possible implementation, the preset condition can be that the output voltage is greater than or equal to a threshold voltage, and the output ripple of the output voltage is greater than or equal to a set threshold. It should be noted that the above preset condition is merely illustrative and not limiting. In step S300, the control unit can select the control switch to be turned on or select the number of control switches to be turned on based on a preset adjustment standard.

[0136] See also Figure 18 This application also provides a power supply, which includes at least one power supply circuit 100 provided in any of the foregoing embodiments.

[0137] The power supply provided by any of the foregoing embodiments can achieve an extremely high output voltage in an extremely short time, thus making it suitable for devices that require instantaneous high voltage.

[0138] See also Figure 19 In one embodiment of this application, the power supply includes at least two power supply circuits 100. In two adjacent power supply circuits 100, the control unit 140 of the preceding power supply circuit 100 is electrically connected to the control unit 140 of the following power supply circuit 100. In one possible implementation, in the two adjacent power supply circuits 100, the control unit 140 of the preceding power supply circuit 100 outputs a synchronization signal to the control unit 140 of the following power supply circuit 100. The synchronization signal refers to a control signal that causes the at least two power supply circuits 100 to operate synchronously, that is, the at least two power supply circuits simultaneously output voltage.

[0139] At least two power supply circuits 100 can realize a multi-output power supply, that is, the power supply can output at least two output voltages. In one possible implementation, at least two output voltages are simultaneously applied to both ends of the same plasma chamber, which can further ensure a shorter ignition delay and ignition efficiency, thereby improving the practicality of the power supply.

[0140] This application also provides an apparatus, which includes the power supply circuit 100 provided in any of the embodiments, or the apparatus includes the power supply provided in any of the foregoing embodiments. The apparatus can be a DC magnetron sputtering apparatus, a medical device, a plasma cutting apparatus, etc.

[0141] The power supply circuit 100 provided in any of the foregoing embodiments or the power supply implemented in any of the foregoing embodiments enables the device to have a very small time delay when instantaneous high voltage is required, thereby improving the overall performance of the device.

[0142] In one embodiment of this application, the device includes a plasma chamber, the electrodes of which are electrically connected to the output terminal of a power supply circuit 100. For example, the first electrode of the plasma chamber is electrically connected to the first output terminal of the power supply circuit 100, and the second electrode of the plasma chamber is electrically connected to the second output terminal of the power supply circuit 100. In one possible implementation, the plasma chamber is a vacuum chamber.

[0143] The plasma chamber can ionize and emit light under high voltage. The power supply circuit 100 or the power supply provided in any of the foregoing embodiments can provide an ignition voltage to the plasma chamber. The ignition delay during the entire ignition process is very short, thereby improving the ionization efficiency and the stability and quality of the coated products.

[0144] See also Figure 20 , Figure 20 An ignition timing control diagram for the device is shown, where the strike signal is the ignition control signal. In one possible implementation, the rising edge of the strike signal serves as an instruction signal to initiate the ignition procedure; the plasma signal is used to characterize successful ignition, providing reference information for subsequent initiation of the coating procedure. Figure 20 As shown in the ignition control diagram, in this implementation, during stage 1, the inductor releases energy and the capacitor stores energy. After the inductor finishes releasing energy, the voltage still hasn't reached the preset voltage value (1500V ignition voltage). At this point, the primary side needs to continue supplying power to the output capacitor. Once the output voltage reaches the preset voltage value, it enters stage 3, the voltage closed-loop stage. In stage 3, a voltage closed loop can be formed by activating the voltage regulator circuit to ensure a stable output voltage of 1500V. Stage 2, between stage 1 and stage 3, is the open-loop waveform generation stage. In this stage, the output voltage is in an open-loop state, so the output voltage value will gradually increase.

[0145] In summary, during plasma chamber ignition, the output voltage of the power supply circuit 100 can reach the required ignition voltage within a short time, thus igniting the plasma. In the power supply circuit 100 provided in this embodiment, the transformer has an equivalent parallel capacitor—that is, the transformer has equivalent capacitors connected in parallel with both the primary and secondary sides. The equivalent parallel capacitor on the secondary side of the transformer resonates with the inductor in the first energy storage module 121, causing significant voltage oscillations on the secondary side of the transformer. The peak value of these oscillations can approach twice the steady-state voltage. Taking a full-load output voltage of 1000V as an example, the peak voltage of the power supply circuit 100 can reach 2000V, and this oscillating voltage peak will be equal to the rectified DC open-circuit voltage, meeting the ignition voltage requirement of 1500V. Therefore, the power supply circuit 100 provided in this embodiment can effectively ensure that the output voltage of the power supply circuit 100 reaches the ignition voltage and maintains a high-voltage output. Similarly, the power supply circuit 100 provided in the embodiments of this application can still maintain high voltage output when ignition fails or when there is a delay.

[0146] The same or similar parts between the various embodiments in this specification can be referred to mutually. In particular, the device embodiments and terminal embodiments are basically similar to the method embodiments, so the description is relatively simple, and the relevant parts can be referred to the description in the method embodiments.

Claims

1. A power supply circuit, characterized in that, include: A power conversion unit is used to convert the received electrical signal into a target electrical signal; The resonant unit is electrically connected to the output terminal of the power conversion unit. A controllable switch unit, wherein the controllable switch unit includes a first state and a second state; The control unit is electrically connected to the power conversion unit and the controllable switch unit respectively. The control unit is used to control the power conversion unit and to control the controllable switch unit to be in a first state or a second state. The resonant unit includes: a first energy storage module and a second energy storage module electrically connected thereto, wherein the second energy storage module is electrically connected to the output terminal of the power supply circuit; The controllable switch unit is electrically connected to the first energy storage module and the second energy storage module respectively. The first energy storage module is used to store energy when the controllable switch unit is in a first state. The controllable switch unit is used to short-circuit the second energy storage module when it is in the first state. The second energy storage module is used to resonate with the first energy storage module for at least a part of the time period when the controllable switch unit is in a second state.

2. The power supply circuit according to claim 1, characterized in that, The first energy storage module is used to store a first type of energy, which includes magnetic field energy; the second energy storage module is used to store a second type of energy, which includes electric field energy.

3. The power supply circuit according to claim 1 or 2, characterized in that, The second energy storage module includes an adjustable capacitor submodule, which includes at least two adjustable capacitor branches connected in parallel with each other. Each adjustable capacitor branch includes a capacitor and a control switch connected in series, and a limiting resistor connected in parallel with the control switch.

4. The power supply circuit according to claim 1, characterized in that, The second energy storage module includes a fixed capacitor submodule and an adjustable capacitor submodule. The fixed capacitor submodule and the adjustable capacitor submodule are connected in parallel. The fixed capacitor submodule includes at least one fixed capacitor branch, and the fixed capacitor branch includes at least one capacitor. The adjustable capacitor submodule includes at least one adjustable capacitor branch, which includes: a capacitor and a control switch connected in series, and a limiting resistor connected in parallel with the control switch.

5. The power supply circuit according to claim 4, characterized in that, The control switch is controlled by the control unit.

6. The power supply circuit according to claim 1, characterized in that, The controllable switch unit includes at least one controllable switch, which is electrically connected to the control unit.

7. The power supply circuit according to claim 1, characterized in that, It also includes an overvoltage protection unit, which is connected in parallel with the second energy storage module.

8. The power supply circuit according to claim 7, characterized in that, The overvoltage protection unit includes at least one transient voltage suppression diode.

9. A power supply, characterized in that, The power supply includes at least one power supply circuit as described in any one of claims 1-8.

10. The power supply according to claim 9, characterized in that, The power supply includes at least two power supply circuits, which are cascaded. In two adjacent cascaded power supply circuits, the control unit of the power supply circuit in the earlier stage is electrically connected to the control unit of the power supply circuit in the later stage.

11. A device, characterized in that, The device includes the power supply circuit according to any one of claims 1-8, or the device includes the power supply according to any one of claims 9-10.

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