Radio frequency power supply system and radio frequency power supply based on LC-Balun mixed structure

Abstract

The invention discloses a radio frequency power supply system and a radio frequency power supply based on an LC-Balun mixed structure, and belongs to the technical field of radio frequency power supplies, the radio frequency power supply system comprises a power divider, an LC phase shifter and a combiner, the power divider and the combiner are both provided with impedance matching transformers, and the impedance matching transformers are transmission line transformer Balums; lC phase shifters are arranged between any two adjacent power dividers and between any two adjacent combiners; and the transmission line transformer Balun and the LC phase shifter form a balanced power amplifier architecture of an LC-Balun mixed structure. The radio frequency power supply system solves many potential problems of a radio frequency power supply in the prior art, and achieves the effects of effectively suppressing oscillation, being simpler in structure, smaller in size, easy to debug and beneficial to reducing cost.

Description

Technical Field

[0001] This invention belongs to the field of radio frequency power supply technology, and specifically relates to a radio frequency power supply system and radio frequency power supply based on an LC-balun hybrid structure. Background Technology

[0002] High-power radio frequency (RF) power supplies are widely used in semiconductor process equipment, such as RF magnetron sputtering, chemical vapor deposition, reactive ion etching, and coating. These RF power supplies typically require power outputs of several kilowatts or more, with an output impedance usually around 50Ω. Commonly used MOSFETs (single or paired) have limited output capabilities, making it difficult to achieve several kilowatts of power. Therefore, high-power RF power supplies typically use a driver circuit to generate sufficient energy, which is then distributed to each MOSFET for amplification. Finally, a combiner circuit combines the hundreds of watts of power generated by each RF power amplifier into a total output of several kilowatts.

[0003] Existing RF power supply circuit architectures use lumped components for impedance matching, power distribution, and combining. This limits the operating bandwidth and makes them prone to self-oscillation. Furthermore, oscillations may also occur after cascading subsequent lumped component power combining circuits. Therefore, the current RF power supply circuit structure consists of a lumped component matching drive circuit, a lumped component power divider circuit, a main power amplifier circuit, and a lumped component combining circuit that is cascaded to output kilowatt-level power. During the entire circuit debugging process, unexpected oscillations may occur at each stage of the circuit and after cascading subsequent stages.

[0004] Meanwhile, existing RF power divider and combiner circuits use many LC lumped components, making it difficult to adjust the consistency of signal amplitude and phase at each port in practical applications. The decrease in Q value at high frequencies also leads to a decrease in efficiency, resulting in high temperatures of devices and local circuits and unstable power output. Furthermore, multi-band applications require redesigning and debugging all LC parameters, which is highly complex.

[0005] Some existing RF power supplies also use a balanced power amplifier architecture, or an orthogonal coupler structure, which can achieve 90-degree phase shift and power division functions. The circuit structure is simple, but in practical applications, the circuit not only needs to adjust the LC to ensure that the power division is consistent and the phase meets the requirements, but also has a narrow bandwidth, making it difficult to meet the basic ±5% frequency sweep function process requirements of RF power supplies. Alternatively, a quarter-wavelength line can be used to achieve a 90-degree phase shift, but for RF power supplies, the quarter-wavelength line is too long, and the corresponding quarter-wavelength line length is different at different frequencies, which is also difficult to meet the power supply process requirements.

[0006] In summary, existing RF power supply structures suffer from potential oscillation problems. Furthermore, the use of numerous LC components leads to a complex overall structure that is difficult to debug, and may require the use of longer transmission lines, further complicating the overall structure and resulting in increased power supply size and cost. Summary of the Invention

[0007] The purpose of this invention is to provide a radio frequency power supply system and radio frequency power supply based on an LC-balun hybrid structure, which solves many potential problems of existing radio frequency power supplies and achieves the effects of effectively suppressing oscillation, simpler structure and smaller size, easier debugging and cost reduction.

[0008] In a first aspect, the present invention provides a radio frequency power supply system based on an LC-balun hybrid structure, comprising a power divider, an LC phase shifter, and a combiner. Both the power divider and the combiner are provided with impedance matching transformers, which are transmission line transformer baluns. The LC phase shifter is provided between any two adjacent power dividers and any two adjacent combiners. The transmission line transformer balun and the LC phase shifter constitute a balanced power amplifier architecture with an LC-balun hybrid structure.

[0009] The RF power supply system based on an LC-balun hybrid structure provided by this invention combines a transmission line transformer balun with an LC phase shifter to form an LC-balun hybrid structure. Since the transmission line transformer balun provides impedance transformation over a wide bandwidth, it overcomes the traditional method of matching with fixed impedance, facilitating debugging while reducing power supply size and saving space. The entire architecture effectively suppresses self-oscillation in the RF power supply circuit, reduces harmonics, and improves the efficiency, linearity, stability, fault tolerance, and anti-interference capability of the RF power supply, while reducing the debugging complexity of various RF power supplies.

[0010] Furthermore, the power divider includes a 1-to-2 circuit; the combiner includes a 2-to-1 circuit; both the 1-to-2 circuit and the 2-to-1 circuit include a first transmission line transformer balun, a second transmission line transformer balun, a first resistor, a first capacitor, and a second capacitor. In this configuration, one end of the core of the first transmission line transformer balun coaxial cable serves as a first port; the other end of the core of the first transmission line transformer balun coaxial cable serves as a second port and is simultaneously connected to the first end of the first resistor and the first end of the first capacitor; the second end of the first capacitor is grounded; one end of the sheath of the first transmission line transformer balun coaxial cable is connected to one end of the core of the second transmission line transformer balun coaxial cable; the other end of the sheath of the first transmission line transformer balun coaxial cable is grounded; the other end of the core of the second transmission line transformer balun coaxial cable serves as a third port and is simultaneously connected to the second end of the first resistor and the first end of the second capacitor; the second end of the second capacitor is grounded; and the outer conductors of all ports are grounded.

[0011] This specific power divider / combiner structure, together with the transmission line transformer balun and LC phase shifter in the system, can further improve the balance of the entire RF power supply system, increase the circuit bandwidth, and help solve potential oscillation problems, while providing more reliable impedance transformation function over a wide bandwidth.

[0012] Furthermore, the power divider also includes a 1-to-4 circuit; the combiner also includes a 4-to-1 circuit; both the 1-to-4 circuit and the 4-to-1 circuit include a third transmission line transformer balun, a fourth transmission line transformer balun, a fifth transmission line transformer balun, a sixth transmission line transformer balun, a second resistor, a third resistor, a fourth resistor, a fifth resistor, a third capacitor, a fourth capacitor, a fifth capacitor, and a sixth capacitor. In this configuration, one end of the core of the third transmission line transformer balun coaxial cable serves as the fifth port and is connected to the first end of the third capacitor; the second end of the third capacitor is grounded; the other end of the core of the third transmission line transformer balun coaxial cable is simultaneously connected to one end of the sheath of the fourth transmission line transformer balun coaxial cable, the first end of the second resistor, and the first end of the fifth resistor; one end of the sheath of the third transmission line transformer balun coaxial cable serves as the fourth port and is simultaneously connected to the other end of the sheath of the fourth transmission line transformer balun coaxial cable, one end of the sheath of the fifth transmission line transformer balun coaxial cable, and one end of the sheath of the sixth transmission line transformer balun coaxial cable; the other end of the sheath of the third transmission line transformer balun coaxial cable is simultaneously connected to one end of the core of the sixth transmission line transformer balun coaxial cable, the second end of the fourth resistor, and the second end of the fifth resistor; the fourth transmission line transformer... One end of the coaxial cable core of the fourth transmission line transformer is used as the sixth port and connected to the first end of the fourth capacitor; the second end of the fourth capacitor is grounded; the other end of the coaxial cable core of the fourth transmission line transformer is simultaneously connected to the other end of the coaxial cable sheath of the fifth transmission line transformer, the second end of the second resistor, and the first end of the third resistor; one end of the coaxial cable core of the fifth transmission line transformer is used as the seventh port and connected to the first end of the fifth capacitor; the second end of the fifth capacitor is grounded; the other end of the coaxial cable core of the fifth transmission line transformer is simultaneously connected to the other end of the coaxial cable sheath of the sixth transmission line transformer, the second end of the third resistor, and the first end of the fourth resistor; the other end of the coaxial cable core of the sixth transmission line transformer is used as the eighth port and connected to the first end of the sixth capacitor; the second end of the sixth capacitor is grounded; the outer conductors of all ports are grounded.

[0013] This solution, combined with the existing LC-balun hybrid structure, effectively solves the technical problem of requiring higher power output while maintaining the advantages of the original structure.

[0014] Furthermore, the LC phase shifter includes an LC phase shifting circuit; the second port and the third port are respectively connected to a corresponding LC phase shifting circuit to form two branches; one branch's LC phase shifting circuit adopts a π-type circuit structure, and the other branch's LC phase shifting circuit adopts a T-type circuit structure.

[0015] Using these two different basic LC circuit structures provides design flexibility, allowing the desired phase shift angle to be achieved by adjusting component parameters.

[0016] Furthermore, the phase shift angle of the LC phase shift circuit using a π-type circuit structure and the phase shift angle of the LC phase shift circuit using a T-type circuit structure satisfy the following conditions: ; ; in, This represents the absolute value of the phase shift angle of an LC phase shift circuit employing a T-type circuit structure. This represents the absolute value of the phase shift angle of an LC phase-shifting circuit employing a π-type circuit structure.

[0017] Furthermore, the LC phase-shifting circuit with a π-type circuit structure includes a seventh capacitor, an eighth capacitor, and a first inductor; Wherein, the first end of the first inductor serves as the ninth port and is connected to the first end of the seventh capacitor; the second end of the seventh capacitor is grounded; the second end of the first inductor serves as the tenth port and is connected to the first end of the eighth capacitor; the second end of the eighth capacitor is grounded; the outer conductors of all ports are grounded.

[0018] Furthermore, the seventh capacitor and the eighth capacitor have the same capacitance value.

[0019] Furthermore, the LC phase-shifting circuit with a T-type circuit structure includes a ninth capacitor, a tenth capacitor, and a second inductor; Wherein, the first end of the second inductor is connected to both the second end of the ninth capacitor and the first end of the tenth capacitor; the second end of the second inductor is grounded; the first end of the ninth capacitor serves as the eleventh port; the second end of the tenth capacitor serves as the twelfth port; and the outer conductors of all ports are grounded.

[0020] Furthermore, the ninth capacitor and the tenth capacitor have the same capacitance value.

[0021] Secondly, the present invention provides a radio frequency power supply, including the radio frequency power supply system based on the LC-balun hybrid structure described above.

[0022] As can be seen from the above, the RF power supply system based on the LC-balun hybrid structure provided by this invention reduces the number of LC lumped components by using a transmission line transformer balun, thereby reducing the difficulty and complexity of debugging. The overall structure is simple and small in size, which is beneficial to reducing costs. In addition, it can effectively solve the potential oscillation problem in the RF power supply through various means. At the same time, the overall power supply architecture of the balanced power amplifier with the LC-balun hybrid structure can improve the stability, linearity and fault tolerance of the RF power supply, meet the frequency sweep range of the RF power supply sweep function, reduce device temperature and improve power efficiency, and also facilitate the debugging of multiple frequency bands and multiple RF power supplies.

[0023] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing embodiments of the invention. The objects and other advantages of the invention may be realized and obtained by means of the structures particularly pointed out in the written description and the accompanying drawings. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of a radio frequency power supply system based on an LC-balun hybrid structure provided in an embodiment of the present invention.

[0025] Figure 2 The circuit diagrams for the one-to-two circuit and the two-to-one circuit in the embodiments of the present invention are shown.

[0026] Figure 3 The circuit diagrams for the four-in-one circuit and the four-in-one circuit in the embodiments of the present invention are shown.

[0027] Figure 4 This is a circuit diagram of an LC phase-shifting circuit using a π-type circuit structure in an embodiment of the present invention.

[0028] Figure 5 This is a circuit diagram of an LC phase-shifting circuit with a T-shaped circuit structure in an embodiment of the present invention.

[0029] Label Explanation: 110. One-to-two splitter circuit; 120. One-to-four splitter circuit; 210. Two-in-one circuit; 220. Four-in-one circuit; 310. LC phase-shifting circuit with π-type circuit structure; 320. LC phase-shifting circuit with T-type circuit structure; 400. Impedance transformer; TR1. First transmission line transformer balun; TR2. Second transmission line transformer balun; R1. First resistor; C1. First capacitor; C2. Second capacitor; INT1. First port; INT2. Second port; INT3. Third port; TR3. Third transmission line transformer balun; TR4. Fourth transmission line transformer balun; TR5. Fifth transmission line transformer balun; TR 6. Sixth transmission line transformer balun; R2, second resistor; R3, third resistor; R4, fourth resistor; R5, fifth resistor; C3, third capacitor; C4, fourth capacitor; C5, fifth capacitor; C6, sixth capacitor; INT4, fourth port; INT5, fifth port; INT6, sixth port; INT7, seventh port; INT8, eighth port; C7, seventh capacitor; C8, eighth capacitor; L1, first inductor; INT9, ninth port; INT10, tenth port; C9, ninth capacitor; C10, tenth capacitor; L2, second inductor; INT11, eleventh port; INT12, twelfth port. Detailed Implementation

[0030] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0031] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of the stated features. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0032] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows for communication; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0033] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0034] The following disclosure provides many different embodiments or examples for implementing various structures of the invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the invention. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0035] Reference Appendix Figure 1 This invention provides an RF power supply system based on an LC-balun hybrid structure, including a power divider, an LC phase shifter, and a combiner. Both the power divider and the combiner are equipped with impedance matching transformers, which are transmission line transformer baluns. An LC phase shifter is placed between any two adjacent power dividers and any two adjacent combiners. The transmission line transformer balun and the LC phase shifter constitute a balanced power amplifier architecture with an LC-balun hybrid structure. Compared to the traditional architecture that only uses LC power dividers, LC phase shifters, and LC combiners, the LC-balun hybrid structure can improve the balance of each port and increase the circuit bandwidth. Furthermore, since each LC component (inductor and capacitor) in the traditional architecture needs to be adjusted to achieve impedance matching, the adjustment process is difficult. The LC-balun hybrid structure significantly reduces the number of LC components, thus reducing the difficulty and complexity of the debugging process. It can effectively solve potential oscillation problems in RF power supplies through various means. Moreover, the transmission line transformer balun can provide impedance transformation functions over a wide frequency range, thus breaking through the traditional method of matching with fixed impedance, facilitating debugging, reducing power supply size, and saving space.

[0036] For example, traditional architectures include LC Wilkinson power dividers, LC phase-shifting circuits, and LC Wilkinson combiners. All of these LCs are 50R systems and are narrowband (narrow frequency band) RF power supplies ranging from 2MHz to 60MHz. The LC parameters in all these circuits need to be readjusted and debugged. In actual testing, it is difficult to achieve consistent balance across the four ports during the debugging process of circuits like LC Wilkinson 1-to-4 power dividers. Under high power, localized high temperatures may occur, and the debugging time and results are not ideal. Furthermore, the lower the frequency, the larger the required inductance value; at frequencies such as 2MHz and 13.56MHz, the inductance is very large and occupies a lot of space.

[0037] The architecture of the transmission line transformer balun power divider, LC phase shifting circuit, and transmission line transformer balun combiner in this application is not limited to the 50R system. The 1-to-2 and 1-to-4 transmission line transformer baluns are both broadband, and in actual testing, they require almost no adjustment. The balance of the four ports is very good. Moreover, for several RF power supplies in the 2M-60M range, this hybrid structure only requires changing the parameters of the LC phase shifting circuit (and at this time, the L parameter will be much smaller than the L parameter of the original 50R system; the inductance of the 25R system is half the inductance of the 50R system, and the inductance of the 12.5R system is one-quarter the inductance of the 50R system).

[0038] A transmission line transformer (CRT) balun is a transformer that utilizes the transmission line principle to achieve impedance transformation and conversion between balanced and unbalanced signals. It can be implemented using transmission lines such as coaxial cable, twisted pair, or microstrip line wound on a magnetic core. It provides impedance transformation over a wide bandwidth and enables connection between balanced and unbalanced ports. A hybrid LC-balun balanced power amplifier architecture refers to a system structure that combines a CRT balun with an LC phase shifter. This structure differs from structures containing only LC elements or only transmission line elements. It is used to achieve power distribution, phase adjustment, and power combining of signals in the radio frequency band, while improving system performance and simplifying debugging.

[0039] The core innovation of this application lies in constructing a balanced power amplifier architecture with an LC-balun hybrid structure by combining a transmission line transformer balun with an LC phase shifter. The system is decomposed into a broadband base layer using a balun structure and an LC tuning layer with adjustable RF power supplies across multiple frequency bands. This effectively suppresses self-oscillation in the RF power supply circuit, reduces RF power supply harmonics, and improves the efficiency, linearity, stability, fault tolerance, and anti-interference capability of the RF power supply, while reducing the debugging complexity of multiple RF power supplies. Furthermore, it solves the problems of limited bandwidth, complex debugging, susceptibility to oscillation, and increased size inherent in RF power supply architectures, achieving the effects of improved port balance, increased circuit bandwidth, reduced debugging difficulty, resolution of oscillation problems, reduced power supply size, and space saving.

[0040] Specifically, the RF band signal is input to the power divider, which uses a transmission line transformer (PLT) balun for impedance matching and power distribution, splitting the signal into multiple paths. Each path's signal undergoes phase adjustment via an LC phase shifter to ensure the phase of each path meets requirements before combining. The phase-adjusted signal then enters the combiner, which also uses a PLT balun for impedance matching and power combining, merging the multiple paths into a single output signal. The PLT balun provides wideband impedance transformation capability, while the LC phase shifter provides phase control. This structure enables wideband power distribution and combining, reduces the number of LC components and optimizes matching methods, lowers debugging difficulty, improves system stability and port balance, and suppresses oscillation phenomena.

[0041] Through the above solution, this application solves the oscillation problem in the RF power supply system, reduces the debugging difficulty and complexity of the circuit, improves the port balance, increases the circuit operating bandwidth, breaks through the limitation of fixed impedance matching, reduces the power supply size, and saves space.

[0042] In some embodiments, reference is made to the appendix. Figure 2 The power divider includes a 1-to-2 circuit 110; the combiner includes a 2-to-1 circuit 210; both the 1-to-2 circuit 110 and the 2-to-1 circuit 210 include a first transmission line transformer balun TR1, a second transmission line transformer balun TR2, a first resistor R1, a first capacitor C1, and a second capacitor C2; TR1 and TR2 use transmission lines of equal length and can be wound on the same magnetic ring to reduce space and improve balance; R1 is a balancing resistor used to ensure the matching degree of each port and the isolation between each port; C1 and C2 are phase compensation capacitors used to compensate for phase drift in the high-frequency band, ensuring phase balance and consistency of each port, improving signal synthesis efficiency. At the same time, the use of capacitor compensation eliminates the need for additional transmission line segments, further saving space compared to traditional quarter-wavelength lines or transformer-equal-length line compensation schemes, improving the compactness of the power supply structure. If different capacitors are connected to the circuit through a PIN switch, dynamic frequency band switching can also be supported, improving the reconfigurability of the circuit; In this configuration, one end of the coaxial cable core of the first transmission line transformer TR1 serves as the first port INT1; the other end of the coaxial cable core of the first transmission line transformer TR1 serves as the second port INT2 and is simultaneously connected to the first end of the first resistor R1 and the first end of the first capacitor C1; the second end of the first capacitor C1 is grounded; one end of the coaxial cable sheath of the first transmission line transformer TR1 is connected to one end of the coaxial cable core of the second transmission line transformer TR2; the other end of the coaxial cable sheath of the first transmission line transformer TR1 is grounded; the other end of the coaxial cable core of the second transmission line transformer TR2 serves as the third port INT3 and is simultaneously connected to the second end of the first resistor R1 and the first end of the second capacitor C2; the second end of the second capacitor C2 is grounded; the outer conductors of all ports are grounded (the ports are similar to coaxial cable connectors, which are SMA RF coaxial connectors, with an inner conductor (similar to the coaxial cable core) and an outer conductor (similar to the coaxial cable sheath)).

[0043] A transmission line transformer (balun) is a device that uses the transmission line principle to achieve impedance transformation and balanced / unbalanced switching. It can be implemented using coaxial cable wound on a magnetic core or a coreless structure. A balancing resistor is a resistive element connected at a specific location in a circuit to absorb unbalanced signals or reflect energy; it can be implemented using chip resistors, leaded resistors, etc. A phase compensation capacitor is a capacitive element connected at a specific location in a circuit to adjust the phase of a signal; it can be implemented using chip capacitors, variable capacitors, etc. A 1-to-2 splitter circuit is a circuit structure that distributes one input signal into two output signals. A 2-to-1 combiner circuit is a circuit structure that combines two input signals into one output signal.

[0044] This solution defines the specific circuit structure of the power divider (1-to-2) and combiner (2-to-1), including two transmission line transformer baluns (TR1, TR2), one balancing resistor (R1), and two phase compensation capacitors (C1, C2) and their specific connection methods. The aim is to further optimize the performance of the power divider and combiner, and address issues related to port matching, isolation, high-frequency phase consistency, and structural compactness. Specifically, one end of the coaxial cable core of the first transmission line transformer balun TR1 serves as the first port INT1, and the other end serves as the second port INT2, simultaneously connecting the first end of the first resistor R1 and the first end of the first capacitor C1. The second end of the first capacitor C1 is grounded. One end of the coaxial cable sheath of TR1 is connected to one end of the coaxial cable core of the second transmission line transformer balun TR2, and the other end of the TR1 coaxial cable sheath is grounded. The other end of the coaxial cable core of TR2 serves as the third port INT3, simultaneously connecting the second end of the first resistor R1 and the first end of the second capacitor C2. The second end of the second capacitor C2 is grounded. The outer conductors of all ports are grounded. This specific connection method defines the circuit topology, allowing TR1 and TR2 to function as transmission line transformer baluns. R1 is connected between INT2 and INT3 for balance and isolation, while C1 and C2 are connected between INT2 and INT3 and ground for phase compensation. When used as a power divider, the signal is input from INT1, and through the transformation and distribution of TR1 and TR2, two signals are output from INT2 and INT3. When used as a combiner, the signal is input from INT2 and INT3, and through the combining effect of TR1 and TR2, one signal is output from INT1. Using transmission lines of equal length TR1 and TR2, wound on the same magnetic ring, reduces the space occupied by the circuit. Furthermore, the symmetry of the physical structure helps improve the circuit's balance. The first resistor R1 acts as a balancing resistor, ensuring the matching degree and isolation between the ports. The first capacitor C1 and the second capacitor C2 act as phase compensation capacitors, used to compensate for phase drift in the high-frequency band, thereby ensuring phase balance and consistency at each port. This positively impacts the signal combining efficiency of the combiner. Using capacitors for phase compensation, compared to traditional long-line compensation schemes such as quarter-wavelength lines or transformers, eliminates the need for additional transmission line segments, significantly saving space and improving the compactness of the power supply structure. This specific power divider / combiner structure, together with the transmission line transformer balun and LC phase shifter in the system, further enhances the balance of the entire RF power supply system, increases circuit bandwidth, helps resolve potential oscillation problems, and provides more reliable impedance transformation over a wide bandwidth.

[0045] Specifically, a first transmission line transformer balun TR1 and a second transmission line transformer balun TR2 can be formed by winding a coaxial cable on a toroidal ferrite core. The first resistor R1 can be a surface-mount resistor. The first capacitor C1 and the second capacitor C2 can also be surface-mount capacitors. The first port INT1, the second port INT2, and the third port INT3 can be led out via connectors or pads and connected to ground. The entire circuit can be integrated onto a single printed circuit board. When used as a power divider, the RF signal is input to the first port, divided by the circuit, and output from the second and third ports. When used as a combiner, two RF signals are input to the second and third ports respectively, combined by the circuit, and output from the first port. To support dynamic frequency band switching, multiple capacitors of different capacitance values ​​can be connected in parallel at the positions of the first and second capacitors, and selectively connected to the circuit via PIN switches.

[0046] This specific power divider / combiner circuit structure, through the use of transmission line transformer baluns, balancing resistors, and phase compensation capacitors, along with their specific connection methods, effectively improves the matching and isolation between ports, achieving good phase balance and consistency at high frequencies, thereby enhancing the efficiency of signal distribution and combining. Simultaneously, the use of capacitors for phase compensation avoids the use of long transmission line segments, helping to reduce circuit size and improve the compactness of the power supply structure. Furthermore, by configuring switchable capacitors, the circuit can support operation at different frequency bands, enhancing its reconfigurability. These improvements further optimize the performance of power dividers and combiners based on transmission line transformer baluns, addressing the shortcomings of traditional structures in terms of port performance and structural compactness.

[0047] In some embodiments, reference is made to the appendix. Figure 3The power divider also includes a 1-to-4 circuit 120; the combiner also includes a 4-to-1 circuit 220; both the 1-to-4 circuit 120 and the 4-to-1 circuit 220 include a third transmission line transformer balun TR3, a fourth transmission line transformer balun TR4, a fifth transmission line transformer balun TR5, a sixth transmission line transformer balun TR6, a second resistor R2, a third resistor R3, a fourth resistor R4, a fifth resistor R5, a third capacitor C3, a fourth capacitor C4, a fifth capacitor C5, and a sixth capacitor C6; TR3-TR6 use transmission lines of equal length and can be wound on the same magnetic ring to reduce space. R2-R5 are balancing resistors used to ensure the matching degree of each port and the isolation between each port; C3-C6 are phase compensation capacitors used to compensate for phase drift in the high-frequency band, ensuring phase balance and consistency of each port, improving signal synthesis efficiency. At the same time, the use of capacitor compensation eliminates the need for additional transmission lines, further saving space compared to traditional long-line compensation schemes such as quarter-wavelength lines or transformers, and improving the compactness of the power supply structure. If different capacitors are connected to the circuit through a PIN switch, dynamic frequency band switching can also be supported, improving the reconfigurability of the circuit. In this configuration, one end of the coaxial cable core of the third transmission line transformer TR3 serves as the fifth port INT5 and is connected to the first end of the third capacitor C3; the second end of the third capacitor C3 is grounded; the other end of the coaxial cable core of the third transmission line transformer TR3 is simultaneously connected to one end of the coaxial cable sheath of the fourth transmission line transformer TR4, the first end of the second resistor R2, and the first end of the fifth resistor R5; one end of the coaxial cable sheath of the third transmission line transformer TR3 serves as the fourth port INT4 and is simultaneously connected to the other end of the coaxial cable sheath of the fourth transmission line transformer TR4, one end of the coaxial cable sheath of the fifth transmission line transformer TR5, and one end of the coaxial cable sheath of the sixth transmission line transformer TR6; the other end of the coaxial cable sheath of the third transmission line transformer TR3 is simultaneously connected to one end of the coaxial cable core of the sixth transmission line transformer TR6, the second end of the fourth resistor R4, and the second end of the fifth resistor R5; the fourth transmission line transformer TR3... One end of the TR4 coaxial cable core serves as the sixth port INT6 and is connected to the first end of the fourth capacitor C4; the second end of the fourth capacitor C4 is grounded; the other end of the TR4 coaxial cable core of the fourth transmission line transformer balun is simultaneously connected to the other end of the TR5 coaxial cable sheath of the fifth transmission line transformer balun, the second end of the second resistor R2, and the first end of the third resistor R3; one end of the TR5 coaxial cable core of the fifth transmission line transformer balun serves as the seventh port INT7 and is connected to the first end of the fifth capacitor C5; the second end of the fifth capacitor C5 is grounded; the other end of the TR5 coaxial cable core of the fifth transmission line transformer balun is simultaneously connected to the other end of the TR6 coaxial cable sheath of the sixth transmission line transformer balun, the second end of the third resistor R3, and the first end of the fourth resistor R4; the other end of the TR6 coaxial cable core of the sixth transmission line transformer balun serves as the eighth port INT8 and is connected to the first end of the sixth capacitor C6; the second end of the sixth capacitor C6 is grounded; the outer conductors of all ports are grounded.

[0048] The third transmission line transformer balun (TR3) to the sixth transmission line transformer balun (TR6) are the core transmission line transformer baluns constituting this four-way distribution / combining circuit. Based on transmission line theory, they perform signal distribution or combination and impedance transformation functions, and can be implemented using coaxial cable wound on a magnetic core. The second resistor (R2) to the fifth resistor (R5) are balancing resistors connected between specific nodes of the baluns to absorb reflected signals, maintain circuit balance, and improve isolation between ports. The third capacitor (C3) to the sixth capacitor (C6) are phase compensation capacitors connected between the output port or internal node and ground. They are used to fine-tune the phase of signals at high frequencies, ensuring phase consistency during combination and thus improving combination efficiency. These components and their specific connections together constitute the circuit structure capable of four-way power distribution or combination.

[0049] This application's solution expands the power processing capability of an existing RF power supply system based on an LC-balun hybrid structure by adding a 1-to-4 splitter circuit and a 4-in-1 circuit. In the power divider, the RF input signal enters from the fourth port INT4 and is distributed through a network consisting of the third transmission line transformer balun TR3, the fourth transmission line transformer balun TR4, the fifth transmission line transformer balun TR5, and the sixth transmission line transformer balun TR6. This network utilizes the characteristics of the transmission line transformer baluns to effectively distribute the input signal to the four output ports: the fifth port INT5, the sixth port INT6, the seventh port INT7, and the eighth port INT8. During the distribution process, resistors R2 to R5 act as balancing resistors, absorbing reflections and coupling signals between ports to ensure the matching degree and mutual isolation of each output port, reducing signal interference. Capacitors C3 to C6 act as phase compensation capacitors, compensating for potential phase deviations in the high-frequency band after distribution, ensuring phase consistency of each signal. In the combiner, the circuit structure operates in reverse. Four signals input from ports INT5 (5th port), INT6 (6th port), INT7 (7th port), and INT8 (8th port) are combined using the same transmission line transformer balun network, balancing resistors, and phase compensation capacitors. The combined signal is then output at port INT4. The balancing resistors and phase compensation capacitors also play a crucial role in this process, ensuring combining efficiency and port performance. This 1-to-4 / 4-to-1 circuit inherits the advantages of the LC-balun hybrid structure, such as wide bandwidth and a relatively simplified debugging process. Furthermore, by employing capacitors for phase compensation, it avoids the lengthy transmission lines found in traditional solutions, improving circuit compactness. By integrating this four-way distribution / combining circuit into the RF power supply system, more power amplifier units can be driven, and the multi-amplified signals can be combined, significantly increasing the total output power of the RF power supply to meet the demands of high-power applications. This solution, combined with existing LC-balun hybrid structures, effectively addresses the technical challenges of requiring higher power output while maintaining the advantages of the original structure.

[0050] In one specific implementation, the 1-to-4 and 4-in-1 circuits can be built on a printed circuit board (PCB). The third transmission line transformer balun TR3 to the sixth transmission line transformer balun TR6 can be formed using coaxial cable wound on a toroidal ferrite core. The second resistor R2 to the fifth resistor R5 can be surface-mount balancing resistors. The third capacitor C3 to the sixth capacitor C6 can be surface-mount ceramic capacitors. These components are soldered onto the PCB according to the connection relationships described in the above embodiments. For example, the fourth port INT4 can be an SMA connector for connecting input or output signals. The fifth port INT5 to the eighth port INT8 can also be SMA connectors for connecting to subsequent amplification units or receiving signals from amplification units. All ground connections are connected to the ground plane of the PCB. The equal-length transmission lines of the transmission line transformer baluns can be implemented using coaxial cable segments of the same length, tightly wound on the same magnetic ring to ensure good coupling and balance. The values ​​of the balancing resistors and phase compensation capacitors are selected according to the operating frequency and impedance matching requirements.

[0051] By employing this 1-to-4 splitter and 4-to-1 circuit, this application can distribute the RF signal to four channels for amplification and then combine the amplified signals, thereby significantly improving the total output power of the RF power supply and meeting the needs of applications requiring higher power output. Simultaneously, this circuit structure inherits the advantages of the LC-balun hybrid structure, such as wide bandwidth, high balance, and ease of debugging. Furthermore, the use of capacitors for phase compensation improves the circuit's compactness and saves space. The balancing resistors ensure the matching and isolation of each port, reducing mutual interference between signals. The phase compensation capacitors ensure phase consistency during multi-signal synthesis, improving synthesis efficiency. In addition, by switching different capacitors via PIN switches, this circuit can also support dynamic frequency band switching, improving the circuit's reconfigurability and flexibility.

[0052] This application proposes two types of RF power distribution (1-to-2, 1-to-4) and combining (2-in-1, 4-in-1) circuits with phase compensation. These circuits can achieve equal power distribution and good port matching within a wide frequency range of commonly used RF power supplies. The amplitude and phase consistency of each port are good, providing equal and sufficient energy to the subsequent power amplifier to meet the power requirements of the RF power supply. This improves the overall temperature uniformity of the RF power supply, thereby improving the efficiency and stability of the power supply.

[0053] In some embodiments, reference is made to the appendix. Figure 1The LC phase shifter includes an LC phase shift circuit; the second port INT2 and the third port INT3 are respectively connected to a corresponding LC phase shift circuit, forming two branches; one branch's LC phase shift circuit adopts a π-type circuit structure, and the other branch's LC phase shift circuit adopts a T-type circuit structure; since a transmission line transformer balun is used for impedance transformation, the impedance of the phase shift circuit does not need to be matched with a fixed output impedance. For example, if the output impedance of a traditional RF power supply is 50Ω, the impedance of a traditional phase shift circuit needs to be matched with 50Ω. However, this application uses a transmission line transformer balun for impedance transformation, which can reduce the matching impedance to 12.5Ω. Therefore, the impedance of the phase shift circuit only needs to be matched with 12.5Ω. Compared with the traditional 50Ω impedance phase shift circuit, the inductance parameter of the 12.5Ω impedance phase shift circuit is one-quarter of the inductance parameter of the traditional 50Ω system circuit with the same phase shift angle. This greatly reduces the inductor size under high power conditions, further saving power supply space and cost.

[0054] This solution addresses the issues of large component size, impacting system compactness and cost, in traditional phase-shifting circuits by specifically defining the circuit structure of the LC phase shifter and utilizing the impedance transformation characteristics of the transmission line transformer balun. The LC phase shifter includes an LC phase-shifting circuit, the specific circuit unit that implements the signal phase-shifting function. Connecting the second port INT2 and the third port INT3 of the power divider output to the corresponding LC phase-shifting circuits creates two independent phase-shifting branches, providing a foundation for subsequent signal processing. One branch uses a π-type LC phase-shifting circuit structure, while the other uses a T-type structure. These two different basic LC circuit structures offer design flexibility, allowing for adjustment of component parameters to achieve the desired phase shift angle. More importantly, this solution utilizes the impedance transformation function of the transmission line transformer balun, eliminating the need for impedance matching of the phase-shifting circuit to a fixed 50Ω output impedance, as is required with traditional RF power supplies. Through the balun's impedance transformation, the required matching impedance for the phase-shifting circuit can be reduced to 12.5Ω. According to the principle of LC phase-shifting circuits, for the same phase shift angle, a lower matching impedance requires a smaller inductance value. Reducing the matching impedance from 50Ω to 12.5Ω (one-quarter) results in a corresponding reduction in the inductance parameter of the phase-shifting circuit to one-quarter of the inductance parameter of a conventional 50Ω system with the same phase-shifting angle. In high-power applications, a smaller inductance value means that smaller inductor components can be used, which significantly reduces component size, thereby saving overall power supply space and lowering costs. This complements the approach of reducing the size of the power divider / combiner through baluns, jointly achieving a more compact power supply structure and optimized cost.

[0055] Specifically, for example, the structure of the RF power supply circuit is a 1-to-2 circuit that divides the output circuit into two branches. Each branch is connected in sequence to an LC phase shift circuit, a 1-to-4 circuit, and a 4-to-1 circuit. Then, the 2-to-1 circuit combines the two circuits. Finally, the output impedance is changed again through an impedance transformer 400 (which can also be a transmission line transformer).

[0056] The input impedance of the 25Ω pre-drive circuit is fed into a 1-to-2 splitter circuit. The circuit then uses a transmission line transformer (PLC) in the splitter circuit to transform the 25Ω input impedance into a 12.5Ω output impedance. Next, it undergoes phase shifting via an LC phase-shifting circuit. Then, it passes through a transmission line transformer (PLC) in a 1-to-4 splitter circuit to transform the 12.5Ω input impedance into a 50Ω output impedance. After signal amplification, the input impedance is again transformed through a transmission line transformer (PLC) in a 4-to-1 circuit to transform the 50Ω input impedance into a 12.5Ω output impedance. This is followed by another phase shifting via an LC phase-shifting circuit, and then through a transmission line transformer (PLC) in a 2-to-1 circuit to transform the 12.5Ω input impedance into a 25Ω output impedance. Finally, an impedance converter transforms the 25Ω input impedance into a 50Ω output impedance, which is then output to the power supply.

[0057] By utilizing the impedance transformation capability of the transmission line transformer balun, the matching impedance of the LC phase-shifting circuit is reduced from the traditional 50Ω to 12.5Ω. This significantly reduces the inductance required to achieve the same phase shift angle, allowing the use of smaller inductors. This greatly reduces the size of the LC phase shifter, effectively saving overall space in the RF power supply system and lowering component costs. Combined with the effect of using a balun to reduce the size of the power divider and combiner, this further improves the compactness and cost-effectiveness of the entire power supply system, solving the problem of large LC phase shifter component size in traditional solutions that affects system compactness and cost.

[0058] The phase-shifting circuit in the balanced power amplifier architecture proposed in this application has a precise and stable phase-shifting angle within a certain frequency range. Furthermore, the circuit ensures that the amplitudes of the two signals of the balanced power amplifier are balanced, while also exhibiting physical symmetry, cancellation of parasitic effects, and strong anti-interference capability.

[0059] In some embodiments, the phase shift angle of the LC phase shift circuit 310 with a π-type circuit structure and the phase shift angle of the LC phase shift circuit 320 with a T-type circuit structure satisfy the following conditions: ; ; in, This represents the absolute value of the phase shift angle of the LC phase shift circuit 320, which employs a T-type circuit structure. This is the absolute value of the phase shift angle of the LC phase shift circuit 310, which employs a π-type circuit structure.

[0060] This solution limits the phase shift angle of the LC phase shift circuit using a π-type circuit structure. Phase shift angle compared to LC phase shift circuits with T-type circuit structure The relationship between them, i.e. At the same time, it is limited Less than 90 degrees. In RF power supply systems based on a hybrid LC-balun structure, the power divider splits the signal into two paths, which then pass through π-type and T-type LC phase-shifting circuits, respectively. By precisely setting the phase-shifting angles of these two circuits to satisfy the specific relationship mentioned above, the required phase difference between the two phase-shifted signals can be ensured. This precise phase control is crucial for subsequent balanced amplification or power combining, effectively solving problems such as decreased power combining efficiency and reduced port isolation caused by signal phase mismatch, thereby optimizing the performance of the entire RF power supply system. A temperature less than 90 degrees helps ensure the implementation characteristics or operational stability of the π-type phase-shifting circuit.

[0061] This solution ensures a specific relationship between the phase shift angles introduced by the LC phase shift circuits employing π-type and T-type circuit structures. This allows the system to precisely control the relative phase difference between the two phase-shifted signals. By accurately setting this relative phase, the signal phase matching requirements of subsequent circuits can be met, such as the specific phase difference requirements of balanced amplifiers or power combiners. This effectively avoids problems such as reduced power combining efficiency and deteriorated port isolation caused by signal phase mismatch. Therefore, this solution improves the overall performance and operational stability of the RF power supply system. Limiting the phase shift angle of the π-type phase shift circuit also contributes to the stable implementation of the circuit.

[0062] In some embodiments, reference is made to the appendix. Figure 4 The LC phase-shifting circuit 310, which adopts a π-type circuit structure, includes a seventh capacitor C7, an eighth capacitor C8, and a first inductor L1. Among them, the first end of the first inductor L1 serves as the ninth port INT9 and is connected to the first end of the seventh capacitor C7; the second end of the seventh capacitor C7 is grounded; the second end of the first inductor L1 serves as the tenth port INT10 and is connected to the first end of the eighth capacitor C8; the second end of the eighth capacitor C8 is grounded; the outer conductors of all ports are grounded.

[0063] This connection method constitutes a π-type LC circuit topology, where inductor L1 is a series branch and capacitors C7 and C8 are parallel branches. The phase shift angle of the circuit can be controlled by adjusting the parameters of inductor L1 and capacitors C7 and C8. In the entire RF power supply system, this π-type phase shift circuit works in conjunction with a T-type phase shift circuit to achieve the required total phase shift angle, such as 90 degrees. Simultaneously, because the system uses a transmission line transformer balun for impedance transformation, the operating impedance of the phase shift circuit can be designed to be much lower than that of a traditional 50Ω system, for example, 12.5Ω. Under this low impedance environment, the inductor value required to achieve the same phase shift angle is reduced. The specific π-type circuit structure provided in this solution makes it possible to design and achieve the required phase shift angle under low impedance, thus supporting the technical route of reducing inductor size by reducing impedance, which in turn helps to reduce the overall size of the power supply and lower costs. The clearly defined component composition and connection method also provide a foundation for circuit design, manufacturing, and debugging, ensuring circuit performance and reliability.

[0064] In some embodiments, the seventh capacitor C7 and the eighth capacitor C8 have the same capacitance value.

[0065] In some embodiments, reference is made to the appendix. Figure 5 The LC phase-shifting circuit 320, which adopts a T-type circuit structure, includes a ninth capacitor C9, a tenth capacitor C10, and a second inductor L2. The first end of the second inductor L2 is connected to the second end of the ninth capacitor C9 and the first end of the tenth capacitor C10; the second end of the second inductor L2 is grounded; the first end of the ninth capacitor C9 serves as the eleventh port INT11; the second end of the tenth capacitor C10 serves as the twelfth port INT12; and the outer conductors of all ports are grounded.

[0066] Through the aforementioned component composition and connection method, this solution provides a specific T-type LC phase-shifting circuit structure. The signal can be input from port 11 (INT11), pass through capacitor C9 (ninth capacitor), then through inductor L2, and finally through capacitor C10 to output from port 12 (INT12). Inductor L2 is connected to the series branch of the signal path, with its other end grounded. Capacitors C9 and C10 are connected between the two sides of the signal path and ground, forming a T-shaped structure. This specific connection method determines the circuit's impedance and phase-shifting characteristics, enabling a specific phase-shifting function. This specific circuit structure, combined with the defined phase-shifting angle, further improves the design of the LC phase shifter. Incorporating the design principle of reducing impedance, this specific T-type phase-shifting circuit structure helps to achieve a compact, efficient, and easy-to-tune LC phase shifter. By using a transmission line transformer balun for impedance transformation, the matching impedance can be reduced. As a result, the impedance of the phase-shifting circuit only needs to be matched with a lower impedance. Compared with the high impedance of the traditional phase-shifting circuit, the inductance parameter of the lower impedance phase-shifting circuit is one-quarter of the inductance parameter of the traditional system circuit with the same phase shift angle. This greatly reduces the inductor size in high-power applications, further saving power supply space and cost.

[0067] In some embodiments, the ninth capacitor C9 and the tenth capacitor C10 have the same capacitance value.

[0068] The present invention provides a radio frequency power supply, including the radio frequency power supply system based on the LC-balun hybrid structure in the above embodiments.

[0069] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0070] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all fall within the scope of protection of the present invention.

Claims

1. A radio frequency power supply system based on an LC-balun hybrid structure, comprising a power divider, an LC phase shifter, and a combiner, characterized in that, Both the power divider and the combiner are equipped with impedance matching transformers, which are transmission line transformer baluns; the LC phase shifter is provided between any two adjacent power dividers and any two adjacent combiners; the transmission line transformer balun and the LC phase shifter constitute a balanced power amplifier architecture with an LC-balun hybrid structure.

2. The RF power supply system based on the LC-balun hybrid structure according to claim 1, characterized in that, The power divider includes a 1-to-2 circuit (110); the combiner includes a 2-to-1 circuit (210); both the 1-to-2 circuit (110) and the 2-to-1 circuit (210) include a first transmission line transformer balun TR1, a second transmission line transformer balun TR2, a first resistor R1, a first capacitor C1, and a second capacitor C2. In this configuration, one end of the coaxial cable core of the first transmission line transformer balun TR1 serves as the first port INT1; the other end of the coaxial cable core of the first transmission line transformer balun TR1 serves as the second port INT2 and is simultaneously connected to the first end of the first resistor R1 and the first end of the first capacitor C1; the second end of the first capacitor C1 is grounded; one end of the sheath of the first transmission line transformer balun TR1 is connected to one end of the coaxial cable core of the second transmission line transformer balun TR2; the other end of the sheath of the first transmission line transformer balun TR1 is grounded; the other end of the coaxial cable core of the second transmission line transformer balun TR2 serves as the third port INT3 and is simultaneously connected to the second end of the first resistor R1 and the first end of the second capacitor C2; the second end of the second capacitor C2 is grounded; and the outer conductors of all ports are grounded.

3. The RF power supply system based on the LC-balun hybrid structure according to claim 2, characterized in that, The power divider also includes a 1-to-4 circuit (120); the combiner also includes a 4-to-1 circuit (220); both the 1-to-4 circuit (120) and the 4-to-1 circuit (220) include a third transmission line transformer balun TR3, a fourth transmission line transformer balun TR4, a fifth transmission line transformer balun TR5, a sixth transmission line transformer balun TR6, a second resistor R2, a third resistor R3, a fourth resistor R4, a fifth resistor R5, a third capacitor C3, a fourth capacitor C4, a fifth capacitor C5, and a sixth capacitor C6; In this configuration, one end of the coaxial cable core of the third transmission line transformer balun TR3 serves as the fifth port INT5 and is connected to the first end of the third capacitor C3; the second end of the third capacitor C3 is grounded; the other end of the coaxial cable core of the third transmission line transformer balun TR3 is simultaneously connected to one end of the coaxial cable sheath of the fourth transmission line transformer balun TR4, the first end of the second resistor R2, and the first end of the fifth resistor R5; one end of the coaxial cable sheath of the third transmission line transformer balun TR3 serves as the fourth port INT4 and is simultaneously connected to the other end of the coaxial cable sheath of the fourth transmission line transformer balun TR4, one end of the coaxial cable sheath of the fifth transmission line transformer balun TR5, and one end of the coaxial cable sheath of the sixth transmission line transformer balun TR6; the other end of the coaxial cable sheath of the third transmission line transformer balun TR3 is simultaneously connected to one end of the coaxial cable core of the sixth transmission line transformer balun TR6, the second end of the fourth resistor R4, and the second end of the fifth resistor R5; the fourth transmission line transformer balun TR3 serves as the fifth port INT4 and is connected to the first end of the fourth transmission line transformer balun TR6, the second end of the fourth resistor R4, and the second end of the fifth resistor R5; the fourth transmission line transformer balun TR3 serves as the fourth port INT4 and is connected to the first end of the fourth transmission line transformer balun TR4, the second end of the fourth resistor R4, and the second end of the fifth resistor R5; the fourth transmission line transformer balun TR3 serves as the fourth port INT4 and is connected to the first end of the fourth transmission line transformer balun TR3. One end of the TR4 coaxial cable core serves as the sixth port INT6 and is connected to the first end of the fourth capacitor C4; the second end of the fourth capacitor C4 is grounded; the other end of the fourth transmission line transformer balun TR4 coaxial cable core is simultaneously connected to the other end of the fifth transmission line transformer balun TR5 coaxial cable sheath, the second end of the second resistor R2, and the first end of the third resistor R3; one end of the fifth transmission line transformer balun TR5 coaxial cable core serves as the seventh port INT7 and is connected to the first end of the fifth capacitor C5; the second end of the fifth capacitor C5 is grounded; the other end of the fifth transmission line transformer balun TR5 coaxial cable core is simultaneously connected to the other end of the sixth transmission line transformer balun TR6 coaxial cable sheath, the second end of the third resistor R3, and the first end of the fourth resistor R4; the other end of the sixth transmission line transformer balun TR6 coaxial cable core serves as the eighth port INT8 and is connected to the first end of the sixth capacitor C6; the second end of the sixth capacitor C6 is grounded; the outer conductors of all ports are grounded.

4. The RF power supply system based on the LC-balun hybrid structure according to claim 3, characterized in that, The LC phase shifter includes an LC phase shift circuit; the second port INT2 and the third port INT3 are respectively connected to a corresponding LC phase shift circuit to form two branches; one branch's LC phase shift circuit adopts a π-type circuit structure, and the other branch's LC phase shift circuit adopts a T-type circuit structure.

5. The RF power supply system based on the LC-balun hybrid structure according to claim 4, characterized in that, The phase shift angle of the LC phase shift circuit (310) with a π-type circuit structure and the phase shift angle of the LC phase shift circuit (320) with a T-type circuit structure satisfy the following conditions: ； ； in, This represents the absolute value of the phase shift angle of the LC phase shift circuit (320) with a T-type circuit structure. The absolute value of the phase shift angle of the LC phase shift circuit (310) with a π-type circuit structure.

6. The RF power supply system based on the LC-balun hybrid structure according to claim 5, characterized in that, The LC phase-shifting circuit (310) with a π-type circuit structure includes a seventh capacitor C7, an eighth capacitor C8, and a first inductor L1; Wherein, the first end of the first inductor L1 serves as the ninth port INT9 and is connected to the first end of the seventh capacitor C7; the second end of the seventh capacitor C7 is grounded; the second end of the first inductor L1 serves as the tenth port INT10 and is connected to the first end of the eighth capacitor C8; the second end of the eighth capacitor C8 is grounded; the outer conductors of all ports are grounded.

7. The RF power supply system based on the LC-balun hybrid structure according to claim 6, characterized in that, The seventh capacitor C7 and the eighth capacitor C8 have the same capacitance value.

8. The RF power supply system based on the LC-balun hybrid structure according to claim 5, characterized in that, The LC phase-shifting circuit (320) with a T-type circuit structure includes a ninth capacitor C9, a tenth capacitor C10, and a second inductor L2; Wherein, the first end of the second inductor L2 is connected to both the second end of the ninth capacitor C9 and the first end of the tenth capacitor C10; the second end of the second inductor L2 is grounded; the first end of the ninth capacitor C9 serves as the eleventh port INT11; the second end of the tenth capacitor C10 serves as the twelfth port INT12; the outer conductors of all ports are grounded.

9. The RF power supply system based on the LC-balun hybrid structure according to claim 8, characterized in that, The ninth capacitor C9 and the tenth capacitor C10 have the same capacitance value.

10. A radio frequency power supply, characterized in that, Including the RF power supply system based on the LC-balun hybrid structure as described in any one of claims 1-9.

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