Multifunctional integrated multi-stage blade coating device

Abstract

The invention discloses a multifunctional integrated multi-stage blade coating device which comprises a multi-stage blade head, a heating vibration source, a vertical connecting rod, a transverse connecting rod, a liquid supplementing device and a driving block. When a substrate is subjected to blade coating, the blade coating gaps can be gradually reduced by the multiple stages of blade heads, so that the height of a meniscus at the front end of the blade is gradually reduced, a smaller and more stable liquid level height difference is formed between the meniscus and a liquid film at the rear end of the blade, and the liquid film thickness fluctuation caused by the change of the liquid level height difference before and after the blade in the blade coating process is reduced; and a more uniform photoresist film with an ideal thickness is obtained. According to the heating vibration source, temperature control over the base scraper head and real-time control over the vibration mode state of the scraper can be achieved. The bottom area of the scraper can be controlled to form a high-temperature environment by heating the scraper head, so that the viscosity of a high-viscosity solution is reduced, and the solution can be uniformly spread below the scraper. By controlling the vibration mode of the vibrator in the heating vibration source, the bottom of the scraper can be controlled to realize complex motion trails such as sinusoidal waveform and the like.

Description

Technical Field

[0001] This invention relates to the field of precision coating technology, and in particular to a multi-functional integrated multi-stage blade coating device. Background Technology

[0002] Doctor blading, as a classic coating technology, has advantages such as simple equipment structure, high solution utilization, controllable coating process, and applicability to large-size or high aspect ratio substrates. It is widely used for uniformly coating liquids or slurries (such as photoresist films, inks, adhesives, electrode pastes, functional coatings, etc.) onto the surface of substrates (such as quartz substrates, paper, films, metal foils, battery electrodes, optical films, etc.).

[0003] The basic principle of blade coating is to use a flat-edged blade to scrape across the moving substrate surface at a set gap (distance between the blade and the substrate) and angle, removing excess coating solution and leaving a uniform coating of a predetermined thickness. Compared to wet coating methods such as spin coating, this method has a simpler instrument structure, better process controllability, and better adaptability to substrate size and shape. Furthermore, by controlling the initial amount of solution applied, it can reduce the amount of solution scraped off the substrate, greatly improving solution utilization.

[0004] However, with the ever-increasing demands for coating quality in modern industry, especially in fields such as high-performance battery electrode coating, optical functional thin film preparation, and high-precision electronic material coating, the inherent limitations of traditional blade coating technology are becoming increasingly apparent. In traditional blade coating, the core parameters affecting coating quality usually need to be set before coating, lacking the ability to quickly respond to transient changes such as periodic microstructural changes in the substrate and film fluctuations during the coating process. This results in high defect rates, significant material waste, and limited production efficiency. Furthermore, traditional blades themselves lack heating or cooling functions, making it impossible to actively maintain or regulate the temperature stability of the solution in the coating area. This is particularly limiting in applications requiring specific temperature windows (such as high temperatures to reduce the viscosity of high-viscosity solutions or low temperatures to prevent excessive solvent evaporation). During the coating process, traditional doctor blades are greatly limited in terms of solution consumption and replenishment. It is difficult to achieve precise and real-time replenishment or control of the solution in the three-phase contact area of ​​doctor blade-substrate-solution, and it is impossible to form a stable meniscus, resulting in poor film coating effect. On the other hand, the direct liquid delivery method of slot coating will cause fluctuations and air bubble entrapment in the three-phase line area of ​​the coating center, and at the same time, it will cause the solution leveling problem caused by the blockage of the slot.

[0005] In light of this, designing a multifunctional blade coating device capable of adapting to various coating scenarios and providing real-time adjustments to challenges such as film morphology control, temperature regulation, liquid film leveling performance regulation, and solution consumption replenishment has become a critical issue that the film coating industry urgently needs to address. This not only requires the device to improve the uniformity and interface stability of blade coating in its structural design, but also necessitates integrating multiple control functions into the blade body and achieving real-time monitoring and dynamic intervention of the coating process to significantly improve coating quality, stability, and efficiency, meeting the increasingly stringent requirements of high-end manufacturing. Summary of the Invention

[0006] To address the aforementioned problems in the existing technology, this invention aims to design a multifunctional integrated multi-stage blade coating device that can perform real-time, active, and multi-parameter coordinated control in the core working area of ​​the blade coating (near the contact area between the blade and the substrate).

[0007] To achieve the above objectives, the technical solution of the present invention is as follows: a multi-functional integrated multi-stage doctor blade coating device, comprising a multi-stage doctor blade head, a heating vibration source, a vertical connecting rod, a horizontal connecting rod, a liquid replenishment device, and a drive block; The left and right ends of the multi-stage scraper head are fixedly connected to the lower ends of the vertical connecting rods on the left and right sides, respectively; the left and right ends of the drive block are connected to the upper ends of the vertical connecting rods on the left and right sides, respectively; the drive block is connected to the drive device through a transmission mechanism and drives the multi-stage scraper head to move back and forth; the heating vibration source is installed on the upper side of the multi-stage scraper head through a heat transfer pad; the left and right sides of the liquid replenishment device are fixedly connected to the vertical connecting rods on the left and right sides through their respective horizontal connecting rods, and the liquid replenishment device is located in front of the multi-stage scraper head.

[0008] Furthermore, the heating vibration source is connected to the control system via a data cable to control the vibration state of the internal oscillator and the temperature of the embedded micro heating element; the liquid replenishment device is connected to the hydraulic pump via a hose, and the hydraulic pump is connected to the control system to control the liquid replenishment speed and pressure; the drive block is connected to the servo motor via a lead screw, and the servo motor is connected to the control system to control the coating speed of the multi-stage scraper head; the substrate is placed on the lifting platform, and the lifting platform is connected to the control system to adjust and control the coating gap between the multi-stage scraper head and the substrate.

[0009] The servo motor, hydraulic pump, and lifting platform are all fixed on the frame. The lifting platform adjusts the gap between the multi-stage scraper heads and the substrate during the initial stage of scraping. The drive block moves linearly in the horizontal direction relative to the lifting platform, driving the entire device to perform scraping operations on the substrate.

[0010] Furthermore, the left and right sides of the heating source are connected to the vertical connecting rods on the left and right sides respectively via their respective flexible gaskets and clamping screws, and the upper left and right sides of the heating source are connected to the transverse suspension rods on the inner side of the vertical connecting rods on the left and right sides respectively via their respective flexible gaskets and clamping screws.

[0011] Furthermore, the left and right ends of the drive block are respectively installed in the rectangular holes at the upper ends of the vertical connecting rods on the left and right sides through their respective damping springs, damping adjustment plates, and damping adjustment rods; there are multiple damping springs arranged around the drive block, and the front, rear, and lower sides of the drive block are respectively connected to the front, rear, and lower sides of the rectangular holes through their respective damping adjustment plates and damping springs, and the upper side of the drive block is connected to the upper side of the rectangular hole in sequence through a damping adjustment plate, a damping spring, a flexible pad, and a damping adjustment rod, and the damping adjustment rod passes through the upper wall of the rectangular hole through a threaded connection.

[0012] Furthermore, the two ends of the drive block are slidably connected to the frame and move along the front-rear direction of the frame.

[0013] Furthermore, the lower end of the multi-stage scraper head has multiple blades arranged side by side in the front-to-back direction, and the lower edges of the multiple blades decrease sequentially from front to back, forming a progressively smaller scraping gap during scraping.

[0014] Furthermore, the multi-stage scraper head has at least three blades, and the shape of the blades includes trapezoidal, rectangular, triangular, semi-circular, and crescent-shaped, which can be selected according to different process requirements.

[0015] Furthermore, the upper part of the multi-stage scraper head is provided with inverted trapezoidal protrusions on both sides, and the lower part of the vertical connecting rod is provided with an inverted trapezoidal groove, with the inverted trapezoidal protrusions inserted into the inverted trapezoidal groove.

[0016] Furthermore, a rectangular groove is provided on the upper part of the multi-stage scraper head for installing a heating vibration source; When the heating source is powered on, it drives the internal oscillator to vibrate vertically and raises the temperature of the embedded micro heating element, which then heats the multi-stage scraper head through the heat transfer pad. The heat transfer pad is located between the heating vibration source and the multi-stage scraper head.

[0017] Furthermore, the left and right sides of the fluid replenishment device are respectively fixedly connected to the horizontal connecting rods on the left and right sides by connecting screws, and the horizontal connecting rods are connected to the vertical connecting rods by connecting screws.

[0018] The fluid replenishment device has two fluid inlets at the upper end and a fluid inlet bend at the lower end. The tip of the fluid inlet bend is flush with the bottom of the multi-stage scraper head, which is 1 mm above the bottom.

[0019] Furthermore, the drive block has cuboid protrusions at both ends, and circular grooves around the protrusions for mounting damping springs; The lower side of the damping adjustment plate has a circular groove that contacts the upper end of the damping spring on the upper side of the drive block, applying a clamping force to the damping spring. The upper end of the damping adjustment rod has an ear-shaped structure for easy rotation, and the lower end has a threaded structure. It is installed in the threaded hole at the upper end of the vertical connecting rod to apply a clamping force to the damping adjustment plate.

[0020] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. When the substrate is coated with a squeegee according to the present invention, the multi-stage squeegee head can reduce the squeegee gap step by step, thereby reducing the height of the meniscus at the front end of the squeegee step by step, forming a smaller and more stable liquid surface height difference with the liquid film at the rear end of the squeegee, reducing the fluctuation of liquid film thickness caused by the change of liquid surface height difference before and after the squeegee during the squeegee process, and obtaining a more uniform and ideal thickness photoresist film.

[0021] 2. This invention, through the heating vibration source arranged above the multi-stage scraper head, can achieve real-time control of the temperature of the substrate scraper head and the vibration mode of the scraper. Heating the scraper head can control the formation of a high-temperature environment in the bottom area of ​​the scraper, reducing the viscosity of high-viscosity solutions and facilitating the uniform spreading of the solution under the scraper.

[0022] 3. By controlling the vibration mode of the oscillator inside the heating source, the present invention can drive the scraper to vibrate in the vertical direction. Combined with the forward movement of the scraper driven by the motor, the bottom of the scraper can be controlled to achieve complex motion trajectories such as sine waves. Thus, when scraping a substrate with periodic microstructures, the liquid film above the microstructure is removed by matching the blade tip trajectory with the changes in the microstructure.

[0023] 4. This invention addresses the issue of periodic environmental influences or wavy liquid film defects during coating of flat substrates. By programmatically controlling the vibration mode of the vibration source, the scraper gap is adjusted in real-time during processing to counteract the periodic fluctuations of the liquid film and correct wavy defects. Simultaneously, the damping adjustment structures on both sides of the drive block allow for manual adjustment of the scraper amplitude, reducing the impact of scraper vibration on the upper drive block and motor.

[0024] 5. This invention utilizes the curved nozzle structure at the bottom of the replenishing device to achieve precise liquid delivery to the meniscus of the doctor blade during the coating process. By controlling the liquid flow rate at the upper end of the replenishing device to adapt to different coating speeds, a stable solution pressure at the coating front end is obtained, avoiding solution consumption and pressure reduction that leads to film thinning during coating. Compared to slot coating, replenishing the meniscus of the doctor blade front end avoids fluctuations and air bubble entrapment in the coating center three-phase line region caused by direct liquid delivery. Furthermore, the problem of delayed solution leveling caused by slot blockage in slot coating can be buffered by precise liquid distribution at the meniscus of the doctor blade front end, allowing sufficient time for the solution to self-level through diffusion before coating, resulting in a more uniform liquid distribution effect. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the overall structure of the present invention (assembly drawing); Figure 2 This is an exploded view showing the structure of all the parts in this invention. Figure 3 This is a schematic diagram showing the variation of the scraping gap at the bottom of the three-stage scraper head; Figure 4 A schematic diagram illustrating how the movement trajectory of the bottom of a single-stage scraper head is altered to scrape a microstructured substrate using a heating vibration source. Figure 5 This diagram illustrates the precise replenishment of fluid to the meniscus at the tip of the scraper using a fluid replenishment device.

[0026] In the diagram: 1-Multi-stage scraper head; 2-Heat transfer pad; 3-Heating vibration source; 3a-Embedded micro heating element; 3b-Internal oscillator; 3c-External wire; 4-Vertical connecting rod; 5-Horizontal connecting rod; 6-Liquid replenishment device; 6a-Liquid injection elbow; 6b-Liquid injection inlet; 7-Clamping screw; 8-Flexible pad; 9-Connecting screw; 10-Drive block; 11-Damping spring; 12-Damping adjustment plate; 13-Damping adjustment rod; 14-Coating solution; 15-Substrate; 16-Lead screw; 17-Servo motor; 18-Lifting platform; 19-Hydraulic pump. Detailed Implementation

[0027] The present invention will now be further described with reference to the accompanying drawings.

[0028] like Figure 1-5 As shown, a multi-functional integrated multi-stage doctor blade coating device includes a multi-stage doctor blade head 1, a heat transfer pad 2, a heating vibration source 3, a vertical connecting rod 4, a horizontal connecting rod 5, a liquid replenishment device 6, a clamping screw 7, a flexible pad 8, a connecting screw 9, a drive block 10, a damping spring 11, a damping adjustment plate 12, and a damping adjustment rod 13.

[0029] The heat transfer pad 2 is located above the multi-stage scraper head 1, and the heating vibration source 3 is located above the heat transfer pad 2; the vertical connecting rod 4 is located above the multi-stage scraper head 1 and on both sides of the heating vibration source 3, and the horizontal connecting rod 5 is located on both sides of the vertical connecting rod 4; the clamping screw 7 is located on both sides and above the heating vibration source 3, and the liquid replenishment device 5 is located between the front side of the multi-stage scraper head 1 and the horizontal connecting rod 4; the driving block 10 is located above the heating vibration source 3 and between the vertical connecting rod; the damping spring 11 is distributed around the slider in the circular grooves on both sides of the driving block 10, and the damping adjustment plate 12 is located above the damping spring 11 on both sides above the driving block 10; the damping adjustment rod 13 passes through the rectangular hole structure on the vertical connecting rod 4 and presses on the damping adjustment plate 11.

[0030] Furthermore, the multi-stage scraper head 1 has three conventional scraper head shapes arranged side by side along the scraping direction and whose dimensions increase sequentially in the vertical direction, thereby gradually reducing the scraping gap during scraping. The multi-stage scraper head 1 includes, but is not limited to, three scraper head shapes, and can be used to prepare various types of scraper heads from single-stage to multi-stage. The scraper head shapes include, but are not limited to, trapezoidal, rectangular, triangular, semi-circular, crescent-shaped, etc., which can be replaced according to different process requirements. Furthermore, inverted trapezoidal protrusions are provided on both sides above the multi-stage scraper head 1 for installing vertical connecting rods 4, which are connected by splicing. The vertical connecting rod 4 is divided into left and right parts, and an inverted trapezoidal groove is provided at the bottom for connecting with the multi-stage scraper head 1.

[0031] Furthermore, a rectangular groove is provided between the two trapezoidal protrusions above the multi-stage scraper head 1 for placing the heating vibration source 3; The heating source 3 is powered by the external wire 3c above, which drives the internal vibrator 3b to vibrate vertically and heats the embedded micro heating element 3a, which in turn heats the multi-stage scraper head 1 through the heat transfer pad 2. The heat transfer pad 2 is located between the heating source 3 and the multi-stage scraper head 1.

[0032] Furthermore, the vertical connecting rod 4 has a cuboid boss in the middle section, and threaded holes are drilled on the boss and the side of the vertical connecting rod 4 for installing clamping screws 7 and connecting screws 9. The clamping screw 7 passes through the vertical connecting rod 4 and applies clamping force to the top and left and right sides of the heating source 3 through the threaded hole; The transverse connecting rod 5 is drilled with threaded holes and is installed on both sides of the vertical connecting rod 4 and both sides of the liquid replenishment device 6 by connecting screws 9. The liquid replenishment device 6 can be disassembled and assembled according to coating requirements. The fluid replenishment device 6 has threaded holes on its side and is installed between two transverse connecting rods 5 by connecting screws 9.

[0033] Furthermore, the upper end of the liquid replenishment device 6 has two liquid injection inlets 6b, and the lower end has a liquid injection bend 6a. The tip of the liquid injection bend 6a is flush with the bottom of the multi-stage scraper head 1, which is 1 mm above the bottom. Furthermore, the upper end of the vertical connecting rod 4 has a rectangular hole structure with a circular groove on the hole wall for positioning the damping spring 11, and a threaded hole at the top for installing the damping adjustment rod 13; The drive block 10 has a threaded hole in the center and is connected to the servo motor 17 through the lead screw 16, serving as the drive component of the entire device.

[0034] Furthermore, the drive block 10 has cuboid protrusions on both sides, and circular grooves around the protrusions for positioning the damping spring 11; The damping spring 11 is installed in a circular groove on the inner side of the rectangular hole of the vertical connecting rod 4 and on the outer side of the protrusions on both sides of the drive block 10, and is distributed in a circumferential manner. The damping adjustment plate 12 has a circular groove at its lower part, which is installed above the upper damping spring 11 to apply a clamping force to the vertical damping spring 11; The upper end of the damping adjustment rod 13 has an ear-shaped structure for easy rotation operation, and the lower end has a threaded structure. It is installed in the threaded hole above the vertical connecting rod 4 to apply a clamping force to the damping adjustment plate 12. The flexible pad 8 is located between the bottom of the clamping screw and the heating source 3, and between the bottom of the damping adjustment rod 13 and the damping adjustment plate 12, to prevent damage to the heating source 3 and the damping adjustment plate 12, and to provide greater friction.

[0035] The operating mode of this invention is as follows: First, select the appropriate size and number of stages of the multi-stage scraper head 1 according to the characteristics of the coating solution 14 and the process requirements. Place the heat transfer pad 2 in the rectangular groove above the multi-stage scraper head 1, and place the heating source 3 above the heat transfer pad 2. Install two vertical connecting rods 4 through the inverted trapezoidal protrusions on the left and right sides of the multi-stage scraper head 1, and fit the rectangular holes at the upper ends of the vertical connecting rods 4 onto both ends of the drive block 10. Pass the clamping screws 7 through the threaded holes in the rectangular bosses at the lower and middle sections of the vertical connecting rods 4, thereby pressing the heating source 3 onto the heat transfer pad 2 for positioning. Place a flexible pad 8 between the clamping screws 7 and the heating source 3 to prevent excessive clamping force from damaging the outer shell of the heating source 3. Place the transverse connecting rod 5 on both sides of the vertical connecting rod 4, aligning it with the corresponding threaded holes, and position it using the connecting screw 9. Place the replenishing device 6 at the front end of the multi-stage scraper head 1, ensuring that the tip of the injection elbow 6a is flush with the bottom of the multi-stage scraper head 1, slightly above it. Fix the replenishing device 6 between the transverse connecting rods 5 using the connecting screw 9. Place a damping adjustment plate 12 in the upper gap between the rectangular hole at the upper end of the drive block 10 and the vertical connecting rod 4. Place a damping spring 11 between the damping adjustment plate 12, the drive block 10, and the corresponding circular groove in the rectangular hole at the upper end of the vertical connecting rod 4, so that the damping spring 11 generates an initial clamping force. The damping adjustment rod 13 passes through the threaded hole at the upper end of the vertical connecting rod 4, applying clamping force to the damping adjustment plate 12. Place a flexible gasket 8 between the damping adjustment rod 13 and the damping adjustment plate 12 to prevent excessive clamping force from damaging the damping adjustment plate 12.

[0036] After assembling the entire device, adjust the position of the drive block 10 according to the coating requirements to ensure that the bottom of the multi-stage doctor blade head 1 and the substrate 15 maintain a suitable gap and horizontal relative position. The embedded micro heating element 3a is heated via an external wire 3c to heat the multi-stage doctor blade head 1, while simultaneously controlling the internal vibrator 3b to vibrate vertically, causing the multi-stage doctor blade head 1 to vibrate vertically. Rotate the damping adjustment rod 13 to adjust the doctor blade amplitude (rotating downwards increases damping and decreases amplitude; rotating upwards decreases damping and increases amplitude).

[0037] After adjusting the overall device position, the vibration signal of the internal oscillator 3b is set through the control program, including vibration period, amplitude, and phase, to meet process requirements. Simultaneously, the coating solution 14 is transmitted through the liquid inlet 6b at the upper end of the liquid replenishment device 6 to the liquid inlet nozzle 6a, forming an initial meniscus at the front end of the multi-stage doctor blade head 1. The servo motor 17 drives the block 10 forward, thereby propelling the multi-stage doctor blade head 1 forward along the coating direction, initiating the coating process. During the coating process, the coating status and film formation effect can be monitored in real time using sensors or high-speed cameras. The vibration state of the internal oscillator 3b is adjusted in real time through program feedback to achieve better coating results.

[0038] Finally, after the coating is completed, the squeegee leaves the substrate 15, the hydraulic pump 19 and servo motor 17 are turned off, the vibration program ends, and the film is allowed to dry before the final film quality is checked.

[0039] As described above, those skilled in the art can make various other corresponding changes and modifications based on the technical solutions and concepts of this invention, and all such changes and modifications should fall within the protection scope of the claims of this invention.

Claims

1. A multi-functional integrated multi-stage blade coating device, characterized in that: It includes a multi-stage scraper head (1), a heating vibration source (3), a vertical connecting rod (4), a horizontal connecting rod (5), a liquid replenishment device (6), and a drive block (10). The left and right ends of the multi-stage scraper head (1) are fixedly connected to the lower ends of the vertical connecting rods (4) on the left and right sides respectively. The left and right ends of the drive block (10) are connected to the upper ends of the vertical connecting rods (4) on the left and right sides respectively. The drive block (10) is connected to the drive device through the transmission mechanism and drives the multi-stage scraper head (1) to move back and forth. The heating vibration source (3) is installed on the upper side of the multi-stage scraper head (1) through the heat transfer pad (2). The left and right sides of the liquid replenishment device (6) are fixedly connected to the vertical connecting rods (4) on the left and right sides respectively through their respective horizontal connecting rods (5). The liquid replenishment device (6) is located in front of the multi-stage scraper head (1).

2. The multi-functional integrated multi-stage blade coating device according to claim 1, characterized in that: The heating source (3) is connected to the control system via a data line to control the vibration state of the internal oscillator (3b) and the temperature of the embedded micro heating element (3a); the liquid replenishment device (6) is connected to the hydraulic pump (19) via a hose, and the hydraulic pump (19) is connected to the control system to control the liquid replenishment speed and pressure; the drive block (10) is connected to the servo motor (17) via a lead screw (16), and the servo motor (17) is connected to the control system to control the scraping speed of the multi-stage scraper head (1); the substrate (15) is placed on the lifting platform (18), and the lifting platform (18) is connected to the control system to adjust and control the scraping gap between the multi-stage scraper head (1) and the substrate (15); The servo motor (17), hydraulic pump (19), and lifting platform (18) are all fixed on the frame. The lifting platform (18) adjusts the gap between the multi-stage scraper head (1) and the substrate (15) in the initial stage of scraping. The drive block (10) moves in a straight line in the horizontal direction relative to the lifting platform (18), driving the entire device to perform scraping operation on the substrate (15).

3. The multi-functional integrated multi-stage blade coating device according to claim 1, characterized in that: The left and right sides of the heating source (3) are connected to the vertical connecting rods (4) on the left and right sides respectively via their respective flexible pads (8) and clamping screws (7). The upper left and right sides of the heating source (3) are connected to the transverse suspension rods inside the vertical connecting rods (4) on the left and right sides respectively via their respective flexible pads (8) and clamping screws (7).

4. The multi-functional integrated multi-stage blade coating device according to claim 1, characterized in that: The left and right ends of the drive block (10) are respectively installed in the rectangular holes at the upper ends of the vertical connecting rods (4) on the left and right sides through their respective damping springs (11), damping adjustment plates (12) and damping adjustment rods (13); there are multiple damping springs (11) arranged around the drive block (10); the front, rear and lower sides of the drive block (10) are respectively connected to the front, rear and lower sides of the rectangular holes through their respective damping adjustment plates (12) and damping springs (11); the upper side of the drive block (10) is connected to the upper side of the rectangular holes in sequence through the damping adjustment plates (12), damping springs (11), flexible pads (8) and damping adjustment rods (13); the damping adjustment rods (13) pass through the upper wall of the rectangular holes by means of threaded connection.

5. The multi-functional integrated multi-stage blade coating device according to claim 1, characterized in that: The two ends of the drive block (10) are slidably connected to the frame and move along the front and rear direction of the frame.

6. The multi-functional integrated multi-stage blade coating device according to claim 1, characterized in that: The multi-stage scraper head (1) has multiple blades at its lower end. The multiple blades are arranged side by side in the front-to-back direction, and the lower edges of the multiple blades decrease sequentially from front to back, forming a progressively smaller scraping gap during scraping. The multi-stage scraper head (1) has at least three blades, and the shape of the blades includes trapezoidal, rectangular, triangular, semi-circular and crescent-shaped, which are selected according to different process requirements.

7. The multi-functional integrated multi-stage blade coating device according to claim 1, characterized in that: The upper sides of the multi-stage scraper head (1) are provided with inverted trapezoidal protrusions, and the lower part of the vertical connecting rod (4) is provided with an inverted trapezoidal groove, and the inverted trapezoidal protrusions are inserted into the inverted trapezoidal groove.

8. The multi-functional integrated multi-stage blade coating device according to claim 1, characterized in that: The upper part of the multi-stage scraper head (1) is provided with a rectangular groove for installing the heating vibration source (3); After the heating source (3) is powered on, it drives the internal oscillator (3b) to vibrate in the vertical direction and raises the temperature of the embedded micro heating element (3a), which heats the multi-stage scraper head (1) through the heat transfer pad (2); The heat transfer pad (2) is located between the heating source (3) and the multi-stage scraper head (1).

9. The multi-functional integrated multi-stage blade coating device according to claim 1, characterized in that: The left and right sides of the fluid replenishment device (6) are fixedly connected to the horizontal connecting rods (5) on the left and right sides respectively by connecting screws (9), and the horizontal connecting rods (5) are connected to the vertical connecting rods (4) by connecting screws (9). The replenishing device (6) has two injection inlets (6b) at the upper end and an injection bend (6a) at the lower end. The tip of the injection bend (6a) is flush with the bottom of the multi-stage scraper head (1) by 1 mm.

10. The multi-functional integrated multi-stage blade coating device according to claim 1, characterized in that: The drive block (10) has cuboid protrusions at both ends and circular grooves around the protrusions for mounting damping springs (11). The damping adjustment plate (12) has a circular groove on its lower side, which contacts the upper end of the damping spring (11) on the upper side of the drive block (10) and applies a clamping force to the damping spring (11). The upper end of the damping adjustment rod (13) has an ear-shaped structure for easy rotation operation, and the lower end has a threaded structure. It is installed in the threaded hole at the upper end of the vertical connecting rod (4) to apply a clamping force to the damping adjustment plate (12).

Images