High-temperature source furnace for molecular beam epitaxy equipment
By designing a high-temperature source furnace structure that includes a crucible, heating assembly components, and tungsten heating wire, the problem of short circuits in self-supporting source furnaces was solved, achieving high-temperature stability and large-capacity evaporation while reducing costs.
Patent Information
- Application Number
- CN202511073254.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-01
- Publication Date
- 2025-10-31
AI Technical Summary
Existing self-supporting high-temperature source furnaces are prone to short circuits due to external factors, and high-temperature evaporation devices are expensive.
A high-temperature source furnace structure was designed, comprising a crucible, a heating assembly, an adjusting tungsten rod, an adjusting eccentric shaft, a support base, a molybdenum electrode ring, a molybdenum electrode rod, a support rod, an electrode flange seat, and a tungsten heating wire. The combination of the tungsten heating wire and the molybdenum electrode ring, along with insulation protection and eccentric shaft adjustment, achieves stable support and heating of the crucible.
The thermal stability and crucible capacity of the high-temperature source furnace have been improved, enabling the evaporation of low vapor pressure refractory materials under ultra-high vacuum, replacing electron beam evaporation sources and reducing costs.
Smart Images
Figure CN120866931A_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the technical field of molecular beam epitaxy equipment, specifically a high-temperature source furnace for molecular beam epitaxy equipment. Background Technology
[0002] In molecular beam epitaxy (MBE) applications, in addition to common group III-V and II-VI elements, it is often necessary to evaporate materials with low vapor pressure and high melting points, such as Sc and Ti. Common high-temperature evaporation devices are e-book evaporation sources, but these are expensive.
[0003] The self-supporting filament heating structure of the high-temperature source furnace that is currently available is easily affected by external factors and short circuits can occur. Summary of the Invention
[0004] In view of the above-mentioned problems of existing "self-supporting" source furnaces, the purpose of this invention is to provide a high-temperature source furnace for molecular beam epitaxy equipment.
[0005] The objective of this invention is achieved through the following technical solution:
[0006] This invention includes a crucible, a heating assembly, an adjusting tungsten rod, an adjusting eccentric shaft, a support base, a molybdenum electrode ring, a molybdenum electrode rod, a support rod, an electrode flange seat, and a tungsten heating wire. The heating assembly is mounted on one side of the support base, and the other side of the support base is connected to a flange seat in the electrode flange seat via a support rod. The crucible is installed within the heating assembly. An adjusting eccentric shaft is rotatably mounted on the support base. One end of the adjusting tungsten rod passes through the heating assembly and abuts against the crucible, while the other end abuts against the eccentric portion of the adjusting eccentric shaft. Rotating the adjusting eccentric shaft allows the crucible to move axially relative to the heating assembly. The heating assembly contains... Multiple tungsten heating wires are evenly arranged around the circumference of the crucible. There are two molybdenum electrode rings, which serve as positive and negative electrodes respectively. The two molybdenum electrode rings are insulated from the support base and insulated from the support rod. The two ends of each tungsten heating wire are connected to the two molybdenum electrode rings, which serve as positive and negative electrodes respectively. The electrode flange includes a flange base, an electrode feed passage, a thermocouple feed passage, and a small flange connector. One end of the small flange connector and the electrode feed passage are fixedly connected to the flange base, and the other end of the small flange connector is fixedly connected to the thermocouple feed passage. The two molybdenum electrode rings, which serve as positive and negative electrodes, are connected to the electrode feed passage through molybdenum electrode rods. The heating assembly is equipped with a thermocouple connected to the thermocouple feed passage.
[0007] The heating assembly includes tungsten support discs, tungsten support cylinders, support rod holders, support rods, and insulation layers. Multiple tungsten support discs and cylinders are alternately connected. The crucible is located within each tungsten support disc, and each tungsten support disc provides radial support to the crucible. Each tungsten heating wire is located between the crucible and the tungsten support cylinder. Each tungsten support disc and cylinder is covered with an insulation layer and mounted on the support rod holder. The support rod holder is connected to the support base via the support rod.
[0008] The insulation layer includes an upper insulation layer, a side insulation layer, and a lower insulation layer, all of which are multi-layered structures. The lower insulation layer is installed on the support rod bracket. The tungsten support cylinder and the tungsten support disc are installed sequentially on the lower insulation layer. The side insulation layer covers the tungsten support cylinder, the tungsten support disc, and the lower insulation layer. The upper insulation layer is installed at one end of the side insulation layer, and the support rod bracket is located at the other end of the side insulation layer.
[0009] The side insulation layer is made of tantalum, with the outermost layer being a tantalum cover; the two upper insulation layers closest to the heating zone are tungsten insulation layers, followed by multiple tantalum insulation layers and a PBN sheet for support from the inside out; the lower insulation layer is located inside the heating assembly, with each layer being made of tungsten, and the bottom layer being a PBN sheet for support.
[0010] One end of the adjusting tungsten rod passes through the central hole of each layer of the lower insulation layer, one end of the thermocouple rests on the layer of the lower insulation layer closest to the heating zone and near the bottom of the crucible, and the other end of the thermocouple is connected to the thermocouple feedthrough via a thermocouple terminal.
[0011] The tungsten support disc is annular, and the outer diameter of the crucible is less than or equal to the inner diameter of the tungsten support disc. Multiple circular holes are evenly distributed along the circumference of the tungsten support disc. The upper end of each tungsten heating wire rests on the uppermost tungsten support disc, and the lower end of each tungsten heating wire passes through two adjacent circular holes and is fastened to the two molybdenum electrode rings, which serve as the positive and negative electrodes, by tightening screws.
[0012] The two molybdenum electrode rings, serving as the positive and negative electrodes, are located on the side of the support seat facing the electrode flange seat. One end of the support rod passes through the molybdenum electrode ring and the support seat, and is locked by a through-hole screw. The other end of the support rod is connected to a support rod seat fixed on the flange seat. Any two adjacent components among the molybdenum electrode ring, support seat, support rod, and through-hole screw are insulated and protected by an insulating pad and / or an insulating tube.
[0013] Insulating pads are provided between the molybdenum electrode ring and the stop at one end of the support rod, between two adjacent molybdenum electrode rings, between the molybdenum electrode ring and the support base, and between the support base and the through-hole screw. An insulating tube is provided on the outside of the part of the support rod located inside the molybdenum electrode ring and the support base.
[0014] The adjusting eccentric shaft has an eccentric section, the axial center line of which is parallel to the axial center line of the rest of the shaft.
[0015] The tungsten heating wire is divided into a heating zone with high resistance and improved heating efficiency, and a non-heating conductive zone with low resistance and low heat generation. The heating zone is made of a spiral wound fine tungsten wire, and the non-heating conductive zone is made of a single thick tungsten wire.
[0016] The advantages and positive effects of this invention are as follows:
[0017] 1. The high-temperature source furnace of the present invention has the advantages of high thermal stability, large crucible capacity, and easy maintenance.
[0018] 2. The present invention is designed to reach a maximum temperature of 2000℃ in an ultra-high vacuum environment, which can effectively evaporate low vapor pressure and refractory materials, such as Sc and Ti, and can replace existing electron beam evaporation sources, thus saving costs significantly. Attached Figure Description
[0019] Figure 1 This is an axial sectional view of the entire invention;
[0020] Figure 2 This is an axial sectional view of the heating assembly assembly of the present invention;
[0021] Figure 3 This is a schematic diagram of the electrode flange seat of the present invention;
[0022] Figure 4 This is a schematic diagram of the tungsten heating wire of the present invention;
[0023] Figure 5 This is the circuit schematic diagram of the present invention;
[0024] Figure 6 This is a schematic diagram of the structure of the adjusting eccentric shaft of the present invention;
[0025] Wherein: 1 is crucible, 2 is heating assembly, 201 is upper insulation layer, 202 is thermocouple, 203 is side insulation layer, 204 is support disc, 205 is tungsten support cylinder, 206 is lower insulation layer, 207 is support rod bracket, 208 is support rod, 3 is adjusting tungsten rod, 4 is adjusting eccentric shaft, 401 is eccentric part, 5 is support seat, 6 is tightening screw, 7 is molybdenum electrode ring, 8 is molybdenum electrode rod, 9 is clamp, 10 is support rod, 11 is electrode flange seat, 1101 is flange seat, 1102 is electrode feedthrough, 1103 is support rod seat, 1104 is thermocouple feedthrough, 1105 is small flange connector, 12 is insulating gasket, 13 is insulating tube, 14 is through-hole screw, 15 is tungsten heating wire, and 16 is thermocouple terminal. Detailed Implementation
[0026] The invention will now be described in further detail with reference to the accompanying drawings.
[0027] like Figures 1-4 As shown, the present invention includes a crucible 1, a heating assembly 2, an adjusting tungsten rod 3, an adjusting eccentric shaft 4, a support base 5, a molybdenum electrode ring 7, a molybdenum electrode rod 8, a support rod 10, an electrode flange seat 11, and tungsten heating wires 15. The heating assembly 2 is mounted on one side of the support base 5, and the other side of the support base 5 is connected to the flange seat 1101 in the electrode flange seat 11 via the support rod 10. The crucible 1 is installed in the heating assembly 2. The adjusting eccentric shaft 4 is rotatably mounted on the support base 5. One end of the adjusting tungsten rod 3 passes through the heating assembly 2 and abuts against the crucible 1. The other end of the adjusting tungsten rod 3 abuts against the eccentric part 401 on the adjusting eccentric shaft 4. Rotating the adjusting eccentric shaft 4 allows the crucible 1 to move axially relative to the heating assembly 2. Multiple tungsten heating wires 15 are evenly arranged circumferentially around the crucible 1 within the heating assembly 2. The molybdenum electrode ring 7, molybdenum electrode rod 8, support rod 10, electrode flange seat 11, and tungsten heating wires 15 are also present. There are two rings 7, which serve as positive and negative electrodes respectively. The two molybdenum electrode rings 7 are insulated from the support base 5 and insulated from the support rod 10. The two ends of each tungsten heating wire 15 are connected to the two molybdenum electrode rings 7, which serve as positive and negative electrodes respectively. The electrode flange seat 11 includes a flange seat 1101, an electrode feed passage 1102, a support rod seat 1103, a thermocouple feed passage 1104, and a small flange connector 1105. One end of the small flange connector 1105, the electrode feed passage 1102, and the support rod seat 1103 are welded to the flange seat 1101 to meet the leakage rate requirements of ultra-high vacuum. The other end of the small flange connector 1105 is fixedly connected to the thermocouple feed passage 1104. The two molybdenum electrode rings 7, which serve as positive and negative electrodes, are connected to the electrode feed passage 1102 through two molybdenum electrode rods 8 and clamped by a clamp 9. The heating assembly 2 is provided with a thermocouple 202 connected to the thermocouple feed passage 1104.
[0028] The heating assembly 2 in this embodiment includes tungsten support discs 204, tungsten support cylinders 205, support rod supports 207, support rods 208, and a heat insulation layer. There are multiple tungsten support discs 204 and tungsten support cylinders 205, which are connected alternately. The crucible 1 is located inside each tungsten support disc 204, and each tungsten support disc 204 provides radial support to the crucible 1. The material of the crucible 1 in this embodiment is not limited to tungsten, molybdenum, tantalum, etc., but is determined by the source material to be evaporated. When the required temperature is below 1500℃, even a PBN (pyrolytic boron nitride) crucible can be used. In this case, the high-temperature source furnace can be used as a regular beam source furnace, which has wide applicability.
[0029] Each tungsten heating wire 15 is located between the crucible 1 and the tungsten support cylinder 205, and is evenly distributed around the crucible 1, providing uniform heating from the side. Unlike the traditional bottom heating method, this heating method allows the crucible 1 to have a larger capacity. Each tungsten support disc 204 and the tungsten support cylinder 205 are covered with an insulation layer and are mounted on the support rod bracket 207. The support rod bracket 207 is connected to the support base 5 through the support rod 208.
[0030] In this embodiment, there are three tungsten support discs 204 and tungsten support cylinders 205, which are connected sequentially along the axial direction. The tungsten support discs 204 and tungsten support cylinders 205 have a certain thickness (0.5 mm in this embodiment) to provide support. The tungsten support discs 204 in this embodiment are annular, and the outer diameter of the crucible 1 is less than or equal to the inner diameter of the tungsten support discs 204, so that they can be installed as a whole inside the heating assembly 2. Multiple circular holes 209 are evenly opened on the tungsten support discs 204 along the circumferential direction. The upper end of each tungsten heating wire 15 rests on the uppermost tungsten support disc 204, and the lower end of each tungsten heating wire 15 passes through two adjacent circular holes 209 and is fastened to the two molybdenum electrode rings 7, which serve as positive and negative electrodes, by tightening screws 6. In this embodiment, the molybdenum electrode ring 7 is circular. The molybdenum electrode ring 7 has axial holes for connecting to the molybdenum electrode rod 8, the support rod 10, and the tungsten heating wire 15, and radial holes for threaded connection to the tightening screw 6. The holes for connecting to the tungsten heating wire 15 and the threaded holes are interconnected. In this embodiment, the tungsten heating wire 15 is fixed by placing its upper end on two adjacent circular holes on the uppermost tungsten support disc 204, and its lower end being tightened and fixed to the two molybdenum electrode rings 7 by the tightening screw 6. This design differs from the commonly used self-supporting filament heating structures of the present invention, which offer greater stability.
[0031] The insulation layer in this embodiment includes an upper insulation layer 201, a side insulation layer 203, and a lower insulation layer 206, all of which are multi-layered structures. The lower insulation layer 206 is installed on the support rod bracket 207. The tungsten support cylinder 205 and the tungsten support disc 204 are installed sequentially on the lower insulation layer 206. The side insulation layer 203 covers the periphery of the tungsten support cylinder 205, the tungsten support disc 204, and the lower insulation layer 206. The upper insulation layer 201 is installed at the stop at one end of the side insulation layer 203, and the support rod bracket 207 is located at the other end of the side insulation layer 203. In this embodiment, the side insulation layer 203 is made of tantalum, with ten insulation layers. The outermost layer is a 0.2mm tantalum cover, which serves both as insulation and support. The upper insulation layer 201 has two tungsten insulation layers near the heating zone, followed by multiple layers (five in this embodiment) of tantalum insulation layers and a PBN sheet for support from the inside out. The lower insulation layer 206, located inside the heating assembly 2, has eight layers (eight in this embodiment) of tungsten, with a PBN sheet at the bottom for support. The tantalum insulation layers are installed sequentially using smooth insulation layers and insulation layers with fine bumps, creating multiple narrow gaps between adjacent insulation layers to enhance the insulation effect.
[0032] In this embodiment, the three tungsten support discs 204 provide radial support, while the adjusting tungsten rod 3 provides axial support. One end of the adjusting tungsten rod 3 passes through the central holes of each layer of the lower insulation layer 206, and the adjusting tungsten rod 3 is supported by the adjusting eccentric shaft 4. In this embodiment, the support base 5 is disc-shaped, with a boss extending axially towards the heating assembly 2 in the middle. The adjusting eccentric shaft 4 is rotatably mounted on the boss via bearings. Figure 6 As shown, the adjusting eccentric shaft 4 in this embodiment has an eccentric part 401. The axial center line of the eccentric part 401 is parallel to the axial center line of the rest of the part. The adjusting tungsten rod 3 can be adjusted up and down by rotating the adjusting eccentric shaft 4, thereby adjusting the height of the crucible 1. Therefore, the lip of the crucible 1 can be positioned by the user to obtain the best performance.
[0033] In this embodiment, one end of thermocouple 202 rests on the layer closest to the heating zone of the lower insulation layer 206, near the bottom of the crucible 1. The other end of thermocouple 202 is connected to thermocouple feedthrough 1104 via thermocouple terminal 16 to achieve temperature monitoring. The thermocouple 202 in this embodiment uses a WRe5% / WRe26% (Type C) bare wire thermocouple, with a maximum temperature measurement limit of 2300℃. Furthermore, the temperature measured by the thermocouple point is close to the bottom of the crucible 1, allowing for accurate and repeatable temperature monitoring. The thermocouple 202 rests on the layer closest to the heating zone of the lower insulation layer 206. Each insulation layer and PBN sheet of the lower insulation layer 206 has pre-drilled through holes, and the thermocouple passes through the support base 5 and thermocouple feedthrough 1104, connected via thermocouple terminal 16. The middle section of thermocouple 202 passes through a ceramic tube or ceramic bead to avoid short circuits with other components that could affect temperature measurement accuracy.
[0034] In this embodiment, the heating assembly 2 is mounted on four corresponding holes in the support base 5 using four support rods 208 on the support rod bracket 207. Two molybdenum electrode rings 7, serving as positive and negative electrodes, are located on the side of the support base 5 facing the electrode flange seat 11. In this embodiment, there are four support rods 10. One end of each support rod 10 passes through the molybdenum electrode rings 7 and the support base 5, and is locked in place by through-hole screws 14. The other ends of the four support rods 10 are correspondingly mounted on four support rod seats 1103 welded to the flange seat 1101. The molybdenum electrode rings 7... Any two adjacent components among the support base 5, support rod 10, and through-hole screw 14 are insulated and protected by insulating pads 12 and / or insulating tubes 13, so that the electrode flange seat 11 is not energized and the risk of electric shock is reduced. Specifically, insulating pads 12 are provided between the molybdenum electrode ring 7 and the stop at one end of the support rod 10, between two adjacent molybdenum electrode rings 7, between the molybdenum electrode ring 7 and the support base 5, and between the support base 5 and the through-hole screw 14. An insulating tube 13 is provided on the outside of the part of the support rod 10 located inside the molybdenum electrode ring 7 and the support base 5.
[0035] In this embodiment, the tungsten heating wire 15 adopts a dual-section structure, divided into a heating zone 1501 and a non-heated conductive zone 1502. The heating zone 1501 is made of a spirally wound thin tungsten wire, which has a higher resistance and effectively improves heating efficiency. The non-heated conductive zone 1502 is made of a single, thicker tungsten wire, which has a lower resistance, generates less heat, and avoids unnecessary power loss. The highest design temperature of the high-temperature furnace in this embodiment is 2000℃, while the melting point of tungsten is above 3400℃, avoiding damage to the heating wire from prolonged high-temperature heating. At the same time, tungsten wire has high heating efficiency and can quickly increase the temperature of the heating wire; therefore, the tungsten heating wire 15 is used for heating.
[0036] In this embodiment, the heating zone of the heating assembly 2 does not contain insulating ceramic materials such as PBN, because the high temperature of 2000℃ will cause most ceramics to become semiconductors, and PBN will also decompose significantly, affecting the use of the high-temperature source furnace. Therefore, the use of insulating ceramic materials such as PBN is limited to areas where the source furnace temperature is relatively low. For example, in this embodiment, the upper insulation layer 201 and the lower insulation layer 206 both use PBN sheets to provide support in the high-temperature heating zone.
[0037] like Figure 5 As shown, the current flows through electrode feed 1102—molybdenum electrode rod 8—molybdenum electrode ring 7—tungsten heating wire 15—molybdenum electrode ring 7—molybdenum electrode rod 8—electrode feed 1102 to form a complete circuit. The entire circuit formed by a single set of tungsten heating wires 15 is connected in series, and the current is the same. Greater heat is generated in the heating zone 1501 of the tungsten heating wire 15, which has a spiral structure. The heating assembly 2 is regarded as an independent conductor with the same potential everywhere and no potential difference. It is approximately regarded as no heat is generated.
[0038] In this embodiment, the tungsten heating wire 15 and thermocouple 208 are designed to be easy to replace. Each set of tungsten heating wires 15 is tightened and fixed to the two molybdenum electrode rings 7 by tightening screws 6. When repairing or replacing the tungsten heating wire 15, simply remove the upper insulation layer 201 and the crucible 1, and loosen the corresponding tightening screws 6 to complete the replacement of the tungsten heating wire 15. Similarly, simply loosen the thermocouple terminal 16 to complete the replacement of the thermocouple 208.
[0039] The above description is merely an embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, extensions, etc., made within the spirit and principles of the present invention are included within the scope of protection of the present invention.
Claims
1. A high-temperature source furnace for molecular beam epitaxy equipment, characterized in that: The assembly includes a crucible (1), a heating assembly (2), an adjusting tungsten rod (3), an adjusting eccentric shaft (4), a support base (5), a molybdenum electrode ring (7), a molybdenum electrode rod (8), a support rod (10), an electrode flange seat (11), and a tungsten heating wire (15). The heating assembly (2) is installed on one side of the support base (5), and the other side of the support base (5) is connected to the flange seat (1101) in the electrode flange seat (11) via the support rod (10). The crucible (1) is installed in the heating assembly (2). The adjusting eccentric shaft (4) is rotatably mounted on the support base (5). One end of the adjusting tungsten rod (3) passes through the heating assembly (2) and abuts against the crucible (1). The other end of the adjusting tungsten rod (3) abuts against the eccentric part (401) on the adjusting eccentric shaft (4). The crucible (1) moves axially relative to the heating assembly (2) by rotating the adjusting eccentric shaft (4). The heating assembly (2) is located inside the crucible (1) outside the heating assembly (2). A plurality of tungsten heating wires (15) are uniformly arranged along the circumference. There are two molybdenum electrode rings (7), which serve as positive and negative electrodes respectively. The two molybdenum electrode rings (7) are insulated from the support base (5) and insulated from the support rod (10). The two ends of each tungsten heating wire (15) are connected to the two molybdenum electrode rings (7) that serve as positive and negative electrodes respectively. The electrode flange seat (11) includes a flange seat (1101), an electrode feed passage (1102), a thermocouple feed passage (1104), and a small A flange connector (1105) is provided, one end of which and the electrode feed passage (1102) are fixedly connected to the flange seat (1101), and the other end of which is fixedly connected to the thermocouple feed passage (1104). The two molybdenum electrode rings (7), which serve as positive and negative electrodes, are connected to the electrode feed passage (1102) through molybdenum electrode rods (8). The heating assembly (2) is provided with a thermocouple (202) connected to the thermocouple feed passage (1104).
2. The high-temperature source furnace for molecular beam epitaxy equipment according to claim 1, characterized in that: The heating assembly (2) includes a tungsten support disc (204), a tungsten support cylinder (205), a support rod holder (207), a support rod (208), and a heat insulation layer. There are multiple tungsten support discs (204) and tungsten support cylinders (205) connected alternately. The crucible (1) is located inside each tungsten support disc (204), and each tungsten support disc (204) provides radial support to the crucible (1). Each tungsten heating wire (15) is located between the crucible (1) and the tungsten support cylinder (205). Each tungsten support disc (204) and tungsten support cylinder (205) is covered with a heat insulation layer and installed on the support rod holder (207). The support rod holder (207) is connected to the support base (5) through the support rod (208).
3. The high-temperature source furnace for molecular beam epitaxy equipment according to claim 2, characterized in that: The insulation layer includes an upper insulation layer (201), a side insulation layer (203), and a lower insulation layer (206), all of which are multi-layered structures. The lower insulation layer (206) is installed on the support rod bracket (207). The tungsten support cylinder (205) and the tungsten support disc (204) are installed sequentially on the lower insulation layer (206). The side insulation layer (203) covers the periphery of the tungsten support cylinder (205), the tungsten support disc (204), and the lower insulation layer (206). The upper insulation layer (201) is installed at one end of the side insulation layer (203), and the support rod bracket (207) is located at the other end of the side insulation layer (203).
4. The high-temperature source furnace for molecular beam epitaxy equipment according to claim 3, characterized in that: The side insulation layer (203) is made of tantalum, and the outermost layer is a tantalum cover; the upper insulation layer (201) has two layers of tungsten insulation layers near the heating zone, and then from the inside out, there are multiple layers of tantalum insulation layers and a PBN sheet that provides support; the lower insulation layer (206) is located inside the heating assembly (2), and each layer is made of tungsten, with a PBN sheet that provides support at the bottom.
5. The high-temperature source furnace for molecular beam epitaxy equipment according to claim 3, characterized in that: One end of the adjusting tungsten rod (3) passes through the central hole of each layer of the lower insulation layer (206), one end of the thermocouple (202) rests on the layer of the lower insulation layer (206) closest to the heating zone and close to the bottom of the crucible (1), and the other end of the thermocouple (202) is connected to the thermocouple feedthrough (1104) through the thermocouple terminal (16).
6. The high-temperature source furnace for molecular beam epitaxy equipment according to claim 2, characterized in that: The tungsten support disc (204) is annular, and the outer diameter of the crucible (1) is less than or equal to the inner diameter of the tungsten support disc (204). Multiple circular holes (209) are uniformly opened along the circumferential direction on the tungsten support disc (204). The upper end of each tungsten heating wire (15) rests on the uppermost tungsten support disc (204), and the lower end of each tungsten heating wire (15) passes through two adjacent circular holes (209) and is fastened to the two molybdenum electrode rings (7) that serve as positive and negative electrodes by tightening screws (6).
7. The high-temperature source furnace for molecular beam epitaxy equipment according to claim 1, characterized in that: The two molybdenum electrode rings (7), which serve as the positive and negative electrodes, are located on the side of the support base (5) facing the electrode flange seat (11). One end of the support rod (10) passes through the molybdenum electrode ring (7) and the support base (5) and is locked by a through-hole screw (14). The other end of the support rod (10) is connected to the support rod seat (1103) fixed on the flange seat (1101). Any two adjacent parts of the molybdenum electrode ring (7), the support base (5), the support rod (10), and the through-hole screw (14) are insulated and protected by an insulating pad (12) and / or an insulating tube (13).
8. The high-temperature source furnace for molecular beam epitaxy equipment according to claim 7, characterized in that: Insulating pads (12) are provided between the molybdenum electrode ring (7) and the stop at one end of the support rod (10), between two adjacent molybdenum electrode rings (7), between the molybdenum electrode ring (7) and the support seat (5), and between the support seat (5) and the through-hole screw (14). An insulating tube (13) is provided on the outside of the part of the support rod (10) located inside the molybdenum electrode ring (7) and the support seat (5).
9. The high-temperature source furnace for molecular beam epitaxy equipment according to claim 1, characterized in that: The adjusting eccentric shaft (4) has an eccentric section (401) whose axial center line is parallel to the axial center line of the rest of the shaft.
10. The high-temperature source furnace for molecular beam epitaxy equipment according to claim 1, characterized in that: The tungsten heating wire (15) is divided into a heating zone (1501) with high resistance and improved heating efficiency, and a non-heating conductive zone (1502) with low resistance and low heat generation. The heating zone (1501) is made of a spiral wound fine tungsten wire, and the non-heating conductive zone (1502) is made of a single thick tungsten wire.