Cryogenic pump

Abstract

This invention relates to the field of fusion equipment technology and discloses a cryogenic pump, comprising: a housing having an inlet end and a mounting end arranged axially opposite each other, a cavity within the housing, an inlet at the inlet end, and a disassembly / removal port at the mounting end, both communicating with the cavity; an adsorption assembly detachably connected to the mounting end, the adsorption assembly covering the disassembly / removal port, the adsorption assembly being at least partially located within the cavity; a cold shield disposed between the adsorption assembly and the housing; a radiation baffle disposed between the cold shield and the adsorption assembly; a cooling pipe passing through the mounting end, the cooling pipe being connected to the cold shield and the radiation baffle; and a valve movably connected to the housing, the valve being able to cover the inlet, and the valve being suitable for being driven by a driving device outside the cavity. The cryogenic pump of this invention has a large adsorption area for its adsorption assembly, resulting in good adsorption effect and long service life.

Description

Technical Field

[0001] This invention relates to the field of fusion equipment technology, specifically to a cryogenic pump. Background Technology

[0002] Fusion devices generate some impurity gases during operation, which mainly include hydrogen isotope gases, helium, and other impurity gases. Cryogenic pumps are a type of cryogenic condensation adsorption pump. Due to their lack of rotating parts, they can be used to extract and adsorb the aforementioned impurity gases from the fusion device.

[0003] Cryogenic pumps in related technologies typically have a valve at the inlet. Inside the pump is a valve stem connected to the valve. The valve stem drives the valve to move axially along the pump to control the valve's closure and the inlet's opening. For example, when the cryogenic pump malfunctions or the adsorption assembly needs replacement, the valve stem can be used to close the inlet, allowing for pump replacement and maintenance without shutting down the nuclear reactor. However, the valve stem occupies most of the internal space of the pump, and the adsorption assembly is distributed circumferentially along the valve stem, limiting the adsorption area and resulting in poor adsorption performance. Furthermore, the adsorption effect is further reduced when the adsorption assembly is impacted by impurity gases, leading to frequent replacement of the adsorption assembly. Summary of the Invention

[0004] The purpose of this invention is to provide a cryogenic pump to solve the problems of small adsorption area, poor adsorption effect, and frequent replacement of adsorption components in the prior art.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0006] A cryogenic pump includes: a housing having an inlet end and a mounting end disposed opposite to each other in its axial direction, the housing having a cavity, the inlet end having an inlet port, and the mounting end having a disassembly port, both the inlet port and the disassembly port communicating with the cavity; an adsorption assembly detachably connected to the mounting end, the adsorption assembly covering the disassembly port, the adsorption assembly being at least partially located within the cavity; a cold shield disposed between the adsorption assembly and the housing; a radiation baffle disposed between the cold shield and the adsorption assembly; a cooling pipe passing through the mounting end, the cooling pipe being connected to the cold shield and the radiation baffle; and a valve movably connected to the housing, the valve being capable of covering the inlet port, the valve being adapted to be driven by a driving device outside the cavity.

[0007] According to the above technical means, under normal operation of the cryogenic pump, driven by the drive device outside the chamber, the valve moves relative to the inlet to open the inlet. Impurity gases generated by the fusion device enter the chamber through the inlet and are cooled by the cold shield, radiation baffle, and cooling pipe, reducing the thermal load on the adsorption assembly. Furthermore, the adsorption assembly can absorb at least one of the hydrogen isotope gas, helium, and other impurity gases. Due to the rebound effect of the radiation baffle, the impurity gases can come into greater contact with the adsorption assembly, improving its adsorption effect. Since the drive device for the valve is located outside the chamber, there is a larger volume within the chamber for arranging the adsorption assembly. This increases the adsorption area of ​​the assembly, improving its adsorption effect. The assembly can withstand greater impact from impurity gases, extending its service life, increasing its replacement cycle, and reducing the frequency of replacement. The inlet end does not require a valve head to cooperate with the valve, improving the flow conductance at the inlet and thus increasing the effective pumping speed of the cryogenic pump. In addition, when the adsorption assembly needs to be repaired or replaced, the drive device drives the valve to seal the air inlet. At this time, no impurity gas enters the cavity. Then, the adsorption assembly is disassembled from the mounting end, and the part of the adsorption assembly inserted into the cavity is pulled out from the disassembly port. After that, the repaired or new adsorption assembly is inserted into the cavity from the disassembly port, the adsorption assembly is fixed to the mounting end, and then the drive device drives the valve to move, opening the air inlet. In this way, the adsorption assembly can be repaired or replaced without stopping the reactor.

[0008] Furthermore, the air inlet end is provided with multiple air inlets, which are spaced apart circumferentially along the adsorption component; there are multiple valves, which correspond one-to-one with each of the multiple air inlets, and / or, the air inlets are located radially between the adsorption component and the cold screen at the air inlet end.

[0009] Based on the aforementioned technical methods, by distributing multiple air inlets circumferentially, the total area of ​​the multiple air inlets is increased, which helps to increase flow conduction and improve pumping speed. By sealing multiple air inlets with multiple valves, the number of air inlets opened can be adjusted according to the amount of impurity gas, so as to better match the working rhythm between the fusion device and the cryogenic pump, thereby reducing energy consumption while ensuring pumping speed.

[0010] Furthermore, the cryogenic pump also includes: a flow guide, disposed on the side of the air inlet facing away from the cavity, the cross-sectional area of ​​the flow guide gradually decreasing in the direction away from the air inlet, and a plurality of air inlets being arranged circumferentially at intervals along the flow guide.

[0011] Based on the above technical means, on the one hand, the impurity gas can be diverted and guided to multiple air inlets more evenly, thereby improving the uniformity of air intake in the cavity. On the other hand, the temperature of the guide component is lower than that of the impurity gas, which can pre-cool the impurity gas and reduce the cooling pressure on the cold screen, adsorption components and radiation baffle.

[0012] Furthermore, the cryogenic pump also includes a connecting rod connected between the air inlet and the guide member, wherein the cross-sectional area of ​​the connecting rod is smaller than the area of ​​the guide member facing the air inlet.

[0013] Based on the above technical means, on the one hand, the heat exchange efficiency between the guide and the air inlet can be reduced, and the influence of the guide on the temperature of the outer shell can be avoided, which is conducive to maintaining a low temperature environment in the cavity. On the other hand, the guide can contact the impurity gas first, which is conducive to improving the diversion effect of the impurity gas and further improving the uniformity of air intake in the cavity.

[0014] Furthermore, the adsorption assembly includes: a mounting component detachably connected to the mounting end, the mounting component covering the disassembly port; a cooling return pipe passing through the mounting component, the cooling return pipe extending axially along the cryogenic pump; a plurality of adsorption plates spaced apart circumferentially along the cooling return pipe, the adsorption plates being connected to the outer circumferential surface of the cooling return pipe; and a cooling inlet pipe passing through the mounting component, the plurality of adsorption plates being connected to the cooling inlet pipe, the end of the cooling inlet pipe near the air inlet end communicating with the end of the cooling return pipe near the air inlet end.

[0015] Based on the above technical means, multiple adsorption plates are arranged at intervals along the circumference of the cooling return pipe. The adsorption plates can capture impurity gases in all directions, thereby improving the pumping speed of the cryogenic pump. Furthermore, the cooling return pipe and the cooling inlet pipe can form a complete cooling flow path. Both the cooling return pipe and the cooling inlet pipe can exchange heat with the adsorption plates, which is beneficial to keep the adsorption plates at a low temperature with high working efficiency and improve adsorption efficiency.

[0016] Furthermore, the cooling inlet pipe includes: a plurality of main inlet pipes, spaced apart circumferentially along the cooling return pipe, the main inlet pipes passing through the mounting component; a first ring pipe, communicating with the plurality of main inlet pipes; a plurality of first branch inlet pipes, connected one-to-one with the plurality of adsorption plates, the ends of the plurality of first branch inlet pipes near the mounting end being connected to the first ring pipe; a second ring pipe, communicating with the ends of the plurality of first branch inlet pipes near the air inlet end; and a plurality of return pipes, spaced apart circumferentially along the cooling return pipe, the return pipes communicating between the second ring pipe and the cooling return pipe.

[0017] Based on the aforementioned technical means, the large number of main inlet pipes improves the efficiency of cooling medium inflow. Furthermore, by setting up a first ring pipe, the cooling medium flow distribution within the multiple first branch inlet pipes becomes more uniform, which helps ensure that the temperatures of the multiple adsorption plates are approximately the same, and that the adsorption effect of each adsorption plate is at its optimal state. The second ring pipe and multiple return pipes ensure that the cooling medium flow rate within the multiple return pipes is approximately the same, thereby improving the return efficiency of the cooling medium.

[0018] Furthermore, the cooling inlet pipe also includes: a third ring pipe, which is connected to multiple main inlet pipes; and multiple second branch inlet pipes, which are connected between the third ring pipe and the first ring pipe, wherein the number of second branch inlet pipes is greater than the number of main inlet pipes and less than the number of first branch inlet pipes.

[0019] The above-mentioned technical means are beneficial to improving the uniformity of the cooling medium inside multiple first inlet pipes.

[0020] Furthermore, the cryogenic pump also includes: a support rod connected to one end of the adsorption assembly near the air inlet; and an insulating support sleeved on the support rod, wherein the air inlet is provided with a support groove, the insulating support is located in the support groove, and the insulating support abuts against the inner wall surface of the support groove.

[0021] According to the above technical means, the support rod can fix the relative position between the adsorption component and the air inlet end. The two axial ends of the adsorption component are positioned with the outer shell through the support rod and the mounting parts, respectively, reducing the probability of the adsorption component shaking in the cavity, thereby reducing the probability of damage and leakage of the cooling inlet pipe and the cooling return pipe.

[0022] Furthermore, the thermal insulation support is provided with multiple through holes.

[0023] Based on the above technical means, the heat transfer efficiency of the insulation support can be reduced, thereby reducing the heat exchange between the shell and the support rod, achieving the purpose of reducing heat transfer to the adsorption component, and ensuring the low-temperature adsorption effect of the adsorption component.

[0024] Furthermore, the thermal insulation support has multiple support protrusions, which are spaced apart circumferentially along the thermal insulation support and abut against the inner wall of the support groove.

[0025] Based on the above technical means, not only can the positioning reliability between the thermal insulation support and the shell be guaranteed, and the thermal insulation support be prevented from shaking in the support groove, but the contact area between the thermal insulation support and the shell can also be reduced, and the heat exchange between the shell and the support rod can be reduced, thereby reducing the heat transfer to the adsorption component and ensuring the low-temperature adsorption effect of the adsorption component.

[0026] Furthermore, the radiation baffle gradually approaches the air inlet end from the inside to the outside along the radial direction of the cryogenic pump.

[0027] According to the above-mentioned technical means, after the gas entering the cavity from the air inlet collides with the radiation baffle, it is easily bounced onto the adsorption component, thereby improving the adsorption component's effect on adsorbing the impurity gas discharged from the fusion device.

[0028] Furthermore, the radiation baffle surrounds the adsorption component.

[0029] Increasing the volume of the radiation baffle, based on the aforementioned technical means, is beneficial for its cooling effect on impurity gases.

[0030] Furthermore, the radiation baffle is provided with multiple through holes.

[0031] The above-mentioned technical means facilitate the flow of gas molecules within the cavity, making it easier for gas molecules to pass through the radiation baffle and be captured by the adsorption component.

[0032] Furthermore, there are multiple radiation baffles, which are spaced apart along the axial direction of the adsorption assembly.

[0033] Based on the above technical means, the impurity gas exchanges heat with multiple radiant baffles during the flow process, which is beneficial to fully cool the impurity gas and improve the cooling efficiency. Attached Figure Description

[0034] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0035] Figure 1 This is one of the structural schematic diagrams of the cryogenic pump in the embodiments of the present invention.

[0036] Figure 2 yes Figure 1 A cross-sectional view along line AA.

[0037] Figure 3 This is the second schematic diagram of the structure of the cryogenic pump in this embodiment of the invention.

[0038] Figure 4 This is a cross-sectional view of the outer shell, cold shield, and radiation baffle in an embodiment of the present invention.

[0039] Figure 5 This is a schematic diagram showing the connection between the outer shell and the thermal insulation support in an embodiment of the present invention.

[0040] Figure 6 This is a schematic diagram showing the connection between the outer shell and the radiation baffle in an embodiment of the present invention.

[0041] Figure 7 This is one of the structural schematic diagrams of the adsorption component in the embodiments of the present invention.

[0042] Figure 8 This is the second schematic diagram of the adsorption component in an embodiment of the present invention.

[0043] Figure 9 This is a schematic diagram of the structure of the thermal insulation support member in an embodiment of the present invention.

[0044] Explanation of reference numerals in the attached figures:

[0045] 1. Cryogenic pump;

[0046] 100. Outer casing; 110. Air inlet end; 111. Air inlet port; 112. Support groove; 120. Mounting end; 121. Disassembly / removal port; 122. Exhaust pipe; 130. Cavity;

[0047] 200. Adsorption assembly; 210. Mounting component; 220. Cooling return pipe; 230. Adsorption plate; 240. Cooling inlet pipe; 241. Main inlet pipe; 242. First ring pipe; 243. First branch inlet pipe; 244. Second ring pipe; 245. Return pipe; 246. Third ring pipe; 247. Second branch inlet pipe;

[0048] 300, cold screen;

[0049] 400. Radiation baffle; 410. Through hole;

[0050] 500. Cooling pipe;

[0051] 600. Support rod;

[0052] 700. Airflow guide;

[0053] 800, connecting rod;

[0054] 900, Thermal insulation support; 910, Through hole; 920, Support protrusion. Detailed Implementation

[0055] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0056] The embodiments of the present invention will be described below with reference to the accompanying drawings and preferred embodiments. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be understood that the preferred embodiments are only for illustrating the present invention and not for limiting the scope of protection of the present invention.

[0057] It should be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of the present invention. Therefore, the drawings only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0058] The following is combined Figures 1 to 9 The following describes embodiments of the present invention.

[0059] This invention provides a cryogenic pump 1, which includes a housing 100, an adsorption component 200, a cold shield 300, a radiation baffle 400, a cooling pipe 500, and a valve (not shown in the figure).

[0060] The housing 100 has an air inlet end 110 and a mounting end 120 arranged opposite each other in its axial direction. A cavity 130 is provided inside the housing 100. The air inlet end 110 has an air inlet 111, and the mounting end 120 has a disassembly port 121. Both the air inlet 111 and the disassembly port 121 communicate with the cavity 130. An adsorption assembly 200 is detachably connected to the mounting end 120, and the adsorption assembly 200 covers the disassembly port 121. The adsorption assembly 200 is at least partially located within the cavity 130. A cooling screen 300 is disposed between the adsorption assembly 200 and the housing 100. A radiation baffle 400 is disposed between the cooling screen 300 and the adsorption assembly 200. A cooling pipe 500 passes through the mounting end 120 and is connected to the cooling screen 300 and the radiation baffle 400. A valve is movably connected to the housing 100, and the valve can cover the air inlet 111. The valve is adapted to be driven by a drive device outside the cavity 130.

[0061] For example, the inlet 110 can be connected to the divertor window of the fusion reactor. The outer casing 100 can be made of stainless steel and serves as the outermost structural support for the cryogenic pump 1. The outer casing 100 can also act as a vacuum container to isolate the gas. The cold shield 300 can be made of oxygen-free copper, and its outer surface can be plated with bright nickel. The bright nickel plating is mainly to reflect the thermal radiation of the outer casing 100. The interior of the cold shield 300 can be blackened to absorb thermal radiation and reduce the probability of thermal radiation being reflected to the adsorption component 200 and the radiation baffle 400. The cold shield 300 as a whole provides a thermal shielding effect. When impurity gas comes into contact with the cold shield 300, the cold shield 300 can cool the impurity gas to condense water vapor, increasing the vacuum effect inside the outer casing 100 and optimizing the gas isolation effect.

[0062] A heat-insulating support block (not shown in the figure) may be provided between the cold screen 300 and the outer shell 100. The heat-insulating support block may be made of heat-insulating material to reduce heat exchange between the cold screen 300 and the outer shell 100. The heat-insulating support block can fix the relative position between the cold screen 300 and the outer shell 100, prevent the cold screen 300 from shaking inside the outer shell 100, and prevent the displacement of the cold screen 300 from causing deformation and leakage of the cooling pipe 500. The outer peripheral surface of the cold screen 300 may be provided with a groove, and the heat-insulating support block is inserted into the groove. The heat-insulating support block and the groove may be interference-fitted. The heat-insulating support block and the cold screen 300 may be installed into the outer shell 100 simultaneously.

[0063] The radiation baffle 400 can also be made of oxygen-free copper. The outer surface of the radiation baffle 400 can be plated with bright nickel. On the one hand, it is to reflect the heat radiation of the outer shell 100 and the cold screen 300 and play a heat shielding role. On the other hand, the radiation baffle 400 can pre-cool the impurity gas.

[0064] Cooling pipe 500 can be connected to cold valve box. Cooling medium with a temperature of 80K can be introduced into cooling pipe 500. Cooling medium can be helium. Cooling pipe 500 can cool cold screen 300 and radiation baffle 400. Cooling pipe 500 can be welded to cold screen 300 and radiation baffle 400 to improve the heat conduction efficiency between cooling pipe 500 and cold screen 300 and radiation baffle 400.

[0065] In this embodiment of the invention, under normal operation of the cryogenic pump 1, driven by the drive device outside the cavity 130, the valve moves relative to the air inlet 111 so that the air inlet 111 opens, and the impurity gas generated by the fusion device enters the cavity 130 through the air inlet 111. The impurity gas is cooled down by the cold screen 300, the radiation baffle 400 and the cooling pipe 500, thereby reducing the heat load of the adsorption component 200.

[0066] Furthermore, the adsorption component 200 can absorb at least one of the hydrogen isotope gas, helium, and other impurity gases. Due to the rebound effect of the radiation baffle 400, the impurity gas can come into more contact with the adsorption component 200, improving its adsorption effect. Since the drive device for the valve is located outside the cavity 130, the cavity 130 has a larger volume for arranging the adsorption component 200. This increases the adsorption area of ​​the adsorption component 200, improving its adsorption effect. The adsorption component 200 can withstand greater impact from impurity gases, extending its service life, increasing its replacement cycle, and reducing the frequency of replacement. The inlet 110 does not require a valve head to cooperate with the valve, improving the flow conductance at the inlet 111 and thus increasing the effective pumping speed of the cryogenic pump 1.

[0067] In addition, when the adsorption component 200 needs repair or replacement, the drive device drives the valve to seal the inlet 111. At this time, no impurity gas enters the cavity 130. Then, the adsorption component 200 is disassembled from the mounting end 120, and the part of the adsorption component 200 inserted into the cavity 130 is pulled out from the disassembly port 121. After that, the repaired or new adsorption component 200 is inserted into the cavity 130 from the disassembly port 121, and the adsorption component 200 and the mounting end 120 are fixed. Then, the drive device drives the valve to move, and the inlet 111 is opened. In this way, the adsorption component 200 can be repaired or replaced without stopping the reactor, so as to ensure that the cryogenic pump 1 can maintain a large pumping speed. Moreover, it is not necessary to replace the entire cryogenic pump 1, only the adsorption component 200 needs to be replaced, which can reduce maintenance costs and improve economic efficiency.

[0068] In some embodiments, such as Figure 6 As shown, the air inlet end 110 is provided with multiple air inlets 111, which are arranged around the adsorption assembly 200, that is, the multiple air inlets 111 are spaced apart circumferentially along the adsorption assembly 200. There are multiple valves, each corresponding to one of the multiple air inlets 111. Each valve can be controlled independently; one, several, or all of the multiple air inlets 111 can be open. The number of air inlets 111 can be eight.

[0069] By distributing multiple air inlets 111 circumferentially, the total area of ​​the multiple air inlets 111 is increased, which is beneficial to increase flow conduction and improve pumping speed. In this embodiment of the invention, the number of air inlets 111 that are open can be adjusted according to the amount of impurity gas, so that the working rhythm between the fusion device and the cryogenic pump 1 is better matched, thereby reducing energy consumption while ensuring pumping speed.

[0070] Specifically, the air inlet 111 is located radially between the adsorption component 200 and the cooling screen 300 at the air inlet end 110. In this way, the impurity gas mainly flows through the radiation baffle 400. The radiation baffle 400 can pre-cool the impurity gas on the one hand, and reflect the impurity gas back to the adsorption component 200 on the other hand, ensuring the adsorption efficiency of the adsorption component 200 for the impurity gas and reducing the heat load of the adsorption component 200.

[0071] Furthermore, such as Figure 1 , Figure 2 and Figure 4 As shown, the cryogenic pump 1 also includes a flow guide 700, which is located on the side of the air inlet 110 facing away from the cavity 130. The cross-sectional area of ​​the flow guide 700 gradually decreases in the direction away from the air inlet 110. Multiple air inlets 111 are arranged around the flow guide 700, and the multiple air inlets 111 are spaced apart circumferentially along the flow guide 700. The flow guide 700 can be made of a high-temperature resistant, rigid material, such as stainless steel. Furthermore, the flow guide 700 can be conical or frustum-shaped, or other shapes that meet the requirements.

[0072] By setting the flow guide 700, on the one hand, the impurity gas can be diverted and guided to multiple air inlets 111 more evenly, improving the uniformity of air intake in the cavity 130. On the other hand, the temperature of the flow guide 700 is lower than that of the impurity gas, so the impurity gas can be pre-cooled before entering the cavity 130, thereby reducing the cooling pressure of the cold shield 300, adsorption component 200 and radiation baffle 400 on the impurity gas, thereby reducing the working pressure of the compressor connected to the cryogenic pump 1 and improving the working efficiency of the entire system.

[0073] Specifically, the cryogenic pump 1 also includes a connecting rod 800, which connects the inlet end 110 and the guide member 700. The cross-sectional area of ​​the connecting rod 800 is smaller than the area of ​​the guide member 700 on the side facing the inlet end 110.

[0074] By setting the connecting rod 800, on the one hand, the heat exchange efficiency between the guide component 700 and the air inlet 110 can be reduced, and the influence of the guide component 700 on the temperature of the outer shell 100 can be avoided, which is conducive to maintaining a low temperature environment in the cavity 130. On the other hand, the guide component 700 can contact the impurity gas first, which is conducive to improving the diversion effect of the impurity gas and further improving the uniformity of air intake in the cavity 130.

[0075] In some embodiments, such as Figure 7 and Figure 8 As shown, the adsorption assembly 200 includes a mounting component 210, a cooling return pipe 220, multiple adsorption plates 230, and a cooling inlet pipe 240.

[0076] Mounting member 210 is detachably connected to mounting end 120, and mounting member 210 covers disassembly port 121. Cooling return pipe 220 passes through mounting member 210 and extends axially along cryogenic pump 1. Multiple adsorption plates 230 are spaced apart circumferentially along cooling return pipe 220, and adsorption plates 230 are connected to the outer circumferential surface of cooling return pipe 220. Cooling inlet pipe 240 passes through mounting member 210, and multiple adsorption plates 230 are all connected to cooling inlet pipe 240. The end of cooling inlet pipe 240 near air inlet end 110 is connected to the end of cooling return pipe 220 near air inlet end 110.

[0077] Specifically, the mounting component 210 can be a flange, which abuts against the side of the mounting end 120 facing away from the cavity 130. The flange and the mounting end 120 are connected by threaded fasteners such as bolts, screws or nuts, for example, by using a knife-edge flange seal to isolate the external environment from the environment inside the cavity 130 and ensure the vacuum effect inside the cryogenic pump 1.

[0078] The adsorption plate 230 extends along the axial direction of the cooling return pipe 220. The adsorption plate 230 can be a straight plate or a curved plate that is bent circumferentially along the cooling return pipe 220, thereby increasing the volume of the adsorption plate 230 and thus improving the adsorption efficiency of the adsorption plate 230 in adsorbing impurity gases.

[0079] The adsorption plate 230 may include a stainless steel substrate and activated carbon. The activated carbon is disposed on the surface of the stainless steel substrate. The stainless steel substrate is connected to the cooling return pipe 220, for example, by welding the stainless steel substrate to the cooling return pipe 220. The activated carbon may be coconut shell activated carbon, which is mainly used to adsorb helium molecules and unreacted fuel gases in impurity gases under low temperature regulation.

[0080] The cooling return pipe 220 is welded to the stainless steel substrate, and the cooling inlet pipe 240 is welded to the side of the adsorption plate 230 opposite to the cooling return pipe 220, or the cooling inlet pipe 240 is welded to the side of the adsorption plate 230 in the thickness direction.

[0081] Cooling medium with a temperature of approximately 4.2K can be introduced into the cooling return pipe 220 and the cooling inlet pipe 240. The cooling medium can be helium. The cooling inlet pipe 240 can be used to introduce liquid helium at 4.2K, and the cooling return pipe 220 is used to discharge liquid helium.

[0082] The adsorption assembly 200 is constructed as a single unit. The mounting component 210, cooling return pipe 220, multiple adsorption plates 230, and cooling inlet pipe 240 move synchronously. The adsorption assembly 200 can be disassembled and replaced as a whole. When it is necessary to repair or replace the adsorption assembly 200, the mounting component 210 is separated from the mounting end 120, and then the adsorption assembly 200 can be taken out from the disassembly port 121. Repair and replacement are convenient. Furthermore, the mounting component 210 is used to cover the disassembly port 121, eliminating the need for additional parts to cover the disassembly port 121 and reducing the number of parts.

[0083] It should be noted that when disassembling the adsorption assembly 200, the cooling return pipe 220 and cooling inlet pipe 240 must first be disconnected from the external cooling medium supply device, then the mounting part 210 must be disassembled, and finally the entire adsorption assembly 200 must be removed from the housing 100.

[0084] Multiple adsorption plates 230 are arranged circumferentially along the cooling return pipe 220. The adsorption plates 230 can capture impurity gases from all directions, improving the pumping speed of the cryogenic pump 1. The cooling return pipe 220 and the cooling inlet pipe 240 can form a complete cooling flow path, and both the cooling return pipe 220 and the cooling inlet pipe 240 can exchange heat with the adsorption plates 230, which helps to keep the adsorption plates 230 at a low temperature with high working efficiency, thereby improving adsorption efficiency. There can be 24 adsorption plates 230.

[0085] Furthermore, such as Figure 7 and Figure 8 As shown, the cooling inlet pipe 240 includes multiple main inlet pipes 241, a first ring pipe 242, multiple first branch inlet pipes 243, a second ring pipe 244, and multiple return pipes 245.

[0086] Multiple main inlet pipes 241 are spaced apart circumferentially along the cooling return pipe 220, and the main inlet pipes 241 pass through the mounting component 210. A first ring pipe 242 communicates with the multiple main inlet pipes 241, and multiple first branch inlet pipes 243 are connected one-to-one with multiple adsorption plates 230. The ends of the multiple first branch inlet pipes 243 near the mounting end 120 are all connected to the first ring pipe 242. A second ring pipe 244 communicates with the ends of the multiple first branch inlet pipes 243 near the air inlet end 110. Multiple return pipes 245 are spaced apart circumferentially along the cooling return pipe 220, and the return pipes 245 connect between the second ring pipe 244 and the cooling return pipe 220.

[0087] For example, there can be two main inlet pipes 241, and the central axes of the cooling return pipe 220 and the mounting component 210 can be aligned. The first annular pipe 242 extends circumferentially along the cooling inlet pipe 240 in a ring structure. There can be 24 first branch inlet pipes 243 and 24 adsorption plates 230. The second annular pipe 244 extends circumferentially along the cooling inlet pipe 240 in a ring structure, and there can be 4 return pipes 245, which can be arranged around the support rod 600 described below. The inner diameters of the main inlet pipe 241, the first annular pipe 242, the first branch inlet pipe 243, and the return pipe 245 can all be smaller than the inner diameter of the return pipe 245.

[0088] In this way, the number of main inlet pipes 241 is large, which can improve the efficiency of cooling medium inflow. Furthermore, by setting the first ring pipe 242, the flow distribution of cooling medium in multiple first branch inlet pipes 243 can be made more uniform, which is beneficial to ensure that the temperature of multiple adsorption plates 230 is roughly the same and that the adsorption effect of each adsorption plate 230 is in a better state.

[0089] By setting a second ring pipe 244 and multiple return pipes 245, the flow rate of the cooling medium in the multiple return pipes 245 can be kept approximately the same, thereby improving the return efficiency of the cooling medium and further ensuring that the adsorption plate 230 is in a low temperature state, thus optimizing the adsorption effect of the adsorption plate 230.

[0090] Furthermore, the cooling inlet pipe 240 also includes a third ring pipe 246 and a plurality of second branch inlet pipes 247. The third ring pipe 246 is connected to a plurality of main inlet pipes 241, and the plurality of second branch inlet pipes 247 are connected between the third ring pipe 246 and the first ring pipe 242. The number of second branch inlet pipes 247 is greater than the number of main inlet pipes 241, and the number of second branch inlet pipes 247 is less than the number of first branch inlet pipes 243.

[0091] There can be four second branch inlet pipes 247. This helps to improve the uniformity of the cooling medium inside the multiple first branch inlet pipes 243.

[0092] In some embodiments, such as Figure 2 , Figure 4 , Figure 5 and Figure 9 As shown, the cryogenic pump 1 also includes a support rod 600 and an insulating support 900. The support rod 600 is connected to one end of the adsorption assembly 200 near the inlet end 110. The insulating support 900 is sleeved on the support rod 600. The inlet end 110 is provided with a support groove 112. The insulating support 900 is located in the support groove 112 and abuts against the inner wall surface of the support groove 112.

[0093] The thermal insulation support component 900 is made of thermal insulation material. Furthermore, the support rod 600 can be connected to the cooling return pipe 220, for example, by welding or snap-fitting to form an integrated structure. The support rod 600 and the adsorption assembly 200 can move synchronously, allowing for simultaneous installation and disassembly, thus improving production and maintenance efficiency.

[0094] By setting up an insulating support 900 to support the support rod 600, the relative position between the adsorption assembly 200 and the air inlet 110 can be fixed. The two axial ends of the adsorption assembly 200 are positioned with the outer shell 100 by the support rod 600 and the mounting part 210, respectively. This can reduce the probability of the adsorption assembly 200 shaking in the cavity 130 and reduce the probability of damage and leakage of the cooling inlet pipe 240 and the cooling return pipe 220.

[0095] Furthermore, such as Figure 9 As shown, the thermal insulation support 900 has multiple through holes 910. This reduces the heat transfer capacity of the thermal insulation support 900, thereby reducing the heat exchange between the outer shell 100 and the support rod 600, achieving the purpose of reducing heat transfer to the adsorption assembly 200, and ensuring the low-temperature adsorption effect of the adsorption assembly 200.

[0096] Furthermore, such as Figure 9 As shown, the thermal insulation support 900 has a plurality of support protrusions 920, which are spaced apart along the circumference of the thermal insulation support 900, and the plurality of support protrusions 920 abut against the inner wall surface of the support groove 112.

[0097] For example, the thermal insulation support 900 can be primarily annular, with multiple support protrusions 920 on its outer circumference; or the outer contour of the thermal insulation support 900 can be a regular polygon, such as a regular hexagon, regular pentagon, rectangle, or equilateral triangle, with the vertices of the polygon serving as support protrusions 920. Of course, the thermal insulation support 900 can also be other deformed forms, such as irregular shapes, without limitation.

[0098] By setting multiple support protrusions 920, not only can the positioning reliability between the thermal insulation support 900 and the outer shell 100 be guaranteed, and the thermal insulation support 900 be prevented from shaking in the support groove 112, but the contact area between the thermal insulation support 900 and the outer shell 100 can also be reduced, and the heat exchange between the outer shell 100 and the support rod 600 can be reduced, thereby reducing the heat transfer to the adsorption component 200 and ensuring the low-temperature adsorption effect of the adsorption component 200.

[0099] In some embodiments, such as Figure 2 and Figure 4As shown, the radiation baffle 400 gradually approaches the air inlet end 110 from the inside to the outside along the radial direction of the cryogenic pump 1. That is, the radiation baffle 400 gradually approaches the air inlet end 110 from its inner circumferential surface to its outer circumferential surface, and the outer circumferential surface of the radiation baffle 400 is closer to the air inlet end 110 than the inner circumferential surface of the radiation baffle 400.

[0100] For example, the two sides of the radiation baffle 400 in the thickness direction can be parallel planes, and the angle between the radiation baffle 400 and the axial direction of the cryogenic pump 1 can be 45°. Alternatively, the two sides of the radiation baffle 400 in the thickness direction can be parallel curved surfaces to ensure that the thickness of the radiation baffle 400 is uniform. Of course, the radiation baffle 400 can also be other structures that meet the requirements, and there are no restrictions here.

[0101] The gas entering the cavity 130 from the air inlet 111 is easily bounced off the radiation baffle 400 and onto the adsorption component 200, thereby improving the adsorption component 200's effect on adsorbing impurity gases discharged from the fusion device.

[0102] In some embodiments, such as Figure 2 and Figure 4 As shown, the radiation baffle 400 surrounds the adsorption component 200. That is, the radiation baffle 400 is constructed as a ring structure. Increasing the volume of the radiation baffle 400 not only improves the cooling effect of the radiation baffle 400 on the impurity gas, but also helps the radiation baffle 400 to reflect the impurity gas back onto the adsorption component 200.

[0103] In other embodiments, there can be multiple radiation baffles 400, which are arranged at intervals along the circumference of the adsorption assembly 200. While ensuring that the total volume of the radiation baffles 400 meets the requirements, the volume of a single radiation baffle 400 can be reduced, the processing difficulty of the radiation baffles 400 can be reduced, and the production efficiency can be improved. It can also avoid shaking caused by excessive weight of the radiation baffles 400, and reduce the probability of damage to the cooling pipe 500.

[0104] In some embodiments, such as Figure 2 and Figure 4 As shown, the radiation baffle 400 is provided with multiple through holes 410. This facilitates the flow of impurity gas within the cavity 130, making it easier for the impurity gas to pass through the radiation baffle 400 and be captured by the adsorption assembly 200.

[0105] In addition, the radiation baffle 400 can be spaced apart from the adsorption component 200 and the cold screen 300, which can also leave a flow channel for the impurity gas, which is conducive to the flow of the impurity gas in the cavity 130.

[0106] Furthermore, such as Figure 2 and Figure 4As shown, there are multiple radiation baffles 400, which are spaced apart along the axial direction of the adsorption assembly 200. This allows the impurity gas to exchange heat with the multiple radiation baffles 400 during flow, which facilitates thorough cooling of the impurity gas and improves cooling efficiency.

[0107] In addition, multiple radiation baffles 400 are provided, each of which has the ability to reflect impurity gas onto the adsorption component 200, thereby improving the adsorption effect of the adsorption component 200 on adsorbing impurity gas.

[0108] The working process of cryogenic pump 1 is described below with reference to the accompanying drawings:

[0109] The mounting end 120 can be connected to an exhaust pipe 122, which is connected to the cavity 130.

[0110] First, the cryogenic pump 1 is placed in an external container, creating a vacuum environment inside the external container, and the cooling pipe 500 is connected to the cold valve box.

[0111] Then, 80K cryogenic helium gas is introduced into the cooling pipe 500 to cool the cold screen 300 and the radiation baffle 400. The cold screen 300 and the radiation baffle 400 reach the predetermined temperature of 4.2K, and the cooled helium gas flows out from the cooling pipe 500.

[0112] Next, 4.2K cryogenic liquid helium is introduced into the cooling inlet pipe 240 to cool the adsorption plate 230, and the cooled helium flows out from the cooling return pipe 220.

[0113] Finally, the drive unit moves the valve to open the air inlet 111 for air extraction.

[0114] When the pumping performance of the cryogenic pump 1 decreases and maintenance is required, the drive device drives the valve to move, seals the air inlet 111, and regenerates the cryogenic pump 1. Once it returns to room temperature, the pipes connected to the cooling inlet pipe 240 and cooling return pipe 220 are disconnected via remote operation, and the connection structure between the mounting component 210 and the mounting end 120 is removed. The adsorption component 200 is then extracted and replaced. At this time, the regenerated and desorbed gas is discharged from the cavity 130 through the exhaust pipe 122.

[0115] The above embodiments are merely preferred embodiments provided to fully illustrate the present invention, and the scope of protection of the present invention is not limited thereto. Equivalent substitutions or modifications made by those skilled in the art based on the present invention are all within the scope of protection of the present invention.

[0116] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A cryogenic pump, characterized by, The application relates to a low-temperature pump (1), which comprises the following parts: an outer shell (100) with an air inlet end (110) and a mounting end (120) arranged oppositely in the axial direction, wherein a cavity (130) is arranged in the outer shell (100), the air inlet end (110) is provided with an air inlet (111), the mounting end (120) is provided with a dismounting opening (121), and the air inlet (111) and the dismounting opening (121) are both communicated with the cavity (130); an adsorption assembly (200) which is detachably connected with the mounting end (120), the adsorption assembly (200) covers the dismounting opening (121), and the adsorption assembly (200) is at least partially arranged in the cavity (130); a cold shield (300) arranged between the adsorption assembly (200) and the outer shell (100); a radiation baffle (400) arranged between the cold shield (300) and the adsorption assembly (200); a cooling pipe (500) arranged in the mounting end (120), wherein the cooling pipe (500) is connected with the cold shield (300) and the radiation baffle (400); a valve movably connected with the outer shell (100), wherein the valve can cover the air inlet (111), and the valve is suitable for being driven by a driving device arranged outside the cavity (130); the adsorption assembly (200) comprises a plurality of adsorption plates (230), a cooling return pipe (220) and a cooling inlet pipe (240), the cooling return pipe (220) extends along the axial direction of the low-temperature pump (1), a plurality of the adsorption plates (230) are arranged at intervals along the circumferential direction of the cooling return pipe (220), and the adsorption plates (230) are connected with the outer circumferential surface of the cooling return pipe (220); the cooling inlet pipe (240) comprises a plurality of main inlet pipes (241), a first ring pipe (242), a plurality of first branch inlet pipes (243), a second ring pipe (244) and a plurality of return pipes (245), a plurality of the main inlet pipes (241) are arranged at intervals along the circumferential direction of the cooling return pipe (220), the first ring pipe (242) is communicated with the plurality of main inlet pipes (241), a plurality of the first branch inlet pipes (243) are connected with the plurality of adsorption plates (230) one by one, one end of each of the plurality of first branch inlet pipes (243) close to the mounting end (120) is connected with the first ring pipe (242), the second ring pipe (244) is communicated with one end of each of the plurality of first branch inlet pipes (243) close to the air inlet end (110), and a plurality of the return pipes (245) are arranged at intervals along the circumferential direction of the cooling return pipe (220), and the return pipes (245) are communicated between the second ring pipe (244) and the cooling return pipe (220).

2. The cryopump of claim 1, wherein, the air inlet end (110) is provided with a plurality of air inlets (111), and the plurality of air inlets (111) are arranged at intervals along the circumferential direction of the adsorption assembly (200). The valve is multiple, and the multiple valves correspondingly cover the multiple air inlets (111), and / or the air inlets (111) are located between the adsorption assembly (200) and the cold shield (300) in the radial direction of the air inlet end (110).

3. A cryopump as claimed in claim 2, characterised in that, Further comprising: A flow guide (700) is arranged on the side of the air inlet end (110) away from the cavity (130), the cross-sectional area of the flow guide (700) gradually decreases in the direction away from the air inlet end (110), and the multiple air inlets (111) are arranged along the circumference of the flow guide (700).

4. A cryopump as set forth in claim 3, characterized by Further comprising: A connecting rod (800) is connected between the air inlet end (110) and the flow guide (700), and the cross-sectional area of the connecting rod (800) is smaller than the area of the side of the flow guide (700) facing the air inlet end (110).

5. A cryopump as claimed in any of claims 1 to 4, characterised in that, The adsorption assembly (200) further comprises: A mounting member (210) is detachably connected with the mounting end (120), the mounting member (210) covers the dismounting opening (121), and the cooling return pipe (220) and the main inlet pipe (241) are arranged in the mounting member (210).

6. A cryopump as set forth in claim 5, characterized by The cooling inlet pipe (240) further comprises: A third ring pipe (246) is in communication with the multiple main inlet pipes (241); Multiple second branch inlet pipes (247) are in communication between the third ring pipe (246) and the first ring pipe (242), the number of the second branch inlet pipes (247) is greater than the number of the main inlet pipes (241) and less than the number of the first branch inlet pipes (243).

7. A cryopump as set forth in any of claims 1-4 including, Further comprising: A support rod (600) is connected with one end of the adsorption assembly (200) close to the air inlet end (110); An insulating support member (900) is sleeved on the support rod (600), the air inlet end (110) is provided with a support groove (112), the insulating support member (900) is located in the support groove (112), and the insulating support member (900) abuts against the inner wall surface of the support groove (112).

8. A cryopump as claimed in claim 7, characterised in that, The insulating support member (900) is provided with multiple through holes (910); And / or, the insulating support member (900) has multiple support protrusions (920), the multiple support protrusions (920) are arranged along the circumference of the insulating support member (900), and the multiple support protrusions (920) abut against the inner wall surface of the support groove (112).

9. A cryopump as set forth in any of claims 1-4 including, The radiation baffle (400) gradually approaches the air inlet end (110) from inside to outside in the radial direction of the cryogenic pump (1); And / or, the radiation baffle (400) surrounds the adsorption assembly (200); And / or, the radiation baffle (400) is provided with multiple through holes (410); And / or, the radiation baffle (400) is multiple, and the multiple radiation baffles (400) are arranged along the axial direction of the adsorption assembly (200).

Images