Novel laser liquid port distance automatic adjusting device

Abstract

The invention relates to the technical field of semiconductors. A novel laser liquid port distance automatic adjusting device comprises a mounting base, the mounting base comprises a first mounting plate which is horizontally arranged, and a height adjusting bolt is mounted on the first mounting plate; the installation base further comprises an adjusting frame which is installed on the first installation plate and can be arranged front and back and left and right, and the adjusting frame is detachably installed on the first installation plate. The X-axis adjusting sliding table is used for adjusting laser in the left-right direction, the X-axis adjusting sliding table is installed on the adjusting frame, and an L-shaped support is installed on a rotating table of the X-axis adjusting sliding table; the device further comprises a Z-axis adjusting sliding table used for adjusting the laser in the front-back direction, the Z-axis adjusting sliding table is installed on the inner side of the L-shaped support, and a fifth installation plate is installed on a rotating table of the Z-axis adjusting sliding table. The device further comprises a laser measuring instrument, and the laser measuring instrument is installed on the fifth installation plate. The laser position is automatically adjusted, so that the distance from the bottom of the graphite screen to the silicon liquid level is better measured.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, specifically to a laser ranging device. Background Technology

[0002] During the semiconductor crystal pulling process, it is necessary to automatically control the distance between the bottom of the graphite screen and the silicon liquid surface. This distance can be controlled in real time according to the growth process requirements.

[0003] Because the crystal growth furnace is relatively high, it is impossible to adjust the position of the laser on the liquid surface manually. Working at height is also quite dangerous. In order to solve this problem, it is urgent to design and develop a new type of automatic laser liquid outlet distance adjustment device that can automatically adjust the laser position in the operating position, so as to better measure the distance from the bottom of the graphite screen to the silicon liquid surface. Summary of the Invention

[0004] To address the problems existing in the prior art, the present invention provides a novel automatic laser liquid nozzle distance adjustment device to solve at least one of the above technical problems.

[0005] To achieve the above objectives, the present invention provides a novel automatic laser liquid nozzle distance adjustment device, characterized in that it includes a mounting base, the mounting base including a horizontally arranged first mounting plate, and a height adjustment bolt mounted on the first mounting plate;

[0006] The mounting base also includes an adjustable bracket that is mounted on the first mounting plate and can move forward, backward, left, and right. The adjustable bracket is detachably mounted on the first mounting plate.

[0007] It also includes an X-axis adjustment slide for adjusting the laser in the left and right direction. The X-axis adjustment slide is mounted on the adjustment frame, and an L-shaped bracket is mounted on the rotating platform of the X-axis adjustment slide.

[0008] It also includes a Z-axis adjustment slide for adjusting the laser's forward and backward direction. The Z-axis adjustment slide is installed on the inner side of the L-shaped bracket, and a fifth mounting plate is installed on the rotating platform of the Z-axis adjustment slide.

[0009] It also includes a laser measuring instrument, which is mounted on the fifth mounting plate.

[0010] This invention enables automatic adjustment of the laser position, thereby enabling better measurement of the distance from the bottom of the graphite screen to the silicon liquid surface.

[0011] More preferably, the adjustment frame includes a second mounting plate and a third mounting plate;

[0012] The second mounting plate and the third mounting plate are provided with oblong holes that are perpendicular to each other in the length direction;

[0013] The second mounting plate is connected to the first mounting plate by screws passing through the oblong holes in the second mounting plate;

[0014] The third mounting plate is connected to the second mounting plate by screws passing through the oblong holes in the third mounting plate;

[0015] The third mounting plate is fixedly connected to a vertically arranged support base plate;

[0016] The X-axis adjustment slide is mounted on the support base plate.

[0017] More preferably, two sixth mounting plates are installed on both sides of the first mounting plate, with the first mounting plate located between the two sixth mounting plates.

[0018] More preferably, the first mounting plate, the second mounting plate, and the third mounting plate are stacked sequentially along the thickness direction.

[0019] More preferably, a first sensing block is mounted on the L-shaped bracket;

[0020] A first limit switch support plate is mounted on the support base plate, and a first photoelectric switch and a second photoelectric switch for sensing the first sensing block are mounted on the first limit switch support plate.

[0021] More preferably, the first sensing block includes a vertically arranged mounting portion and a trigger portion;

[0022] The mounting part is detachably connected to the L-shaped bracket;

[0023] The triggering part includes a tapered gradient part and a narrow side part connected in sequence, and the tapered gradient part is fixedly connected to the mounting part.

[0024] More preferably, a second sensing block is mounted on the fifth mounting plate;

[0025] The L-shaped bracket is equipped with a second limit switch support plate, and the second limit switch support plate is equipped with a third photoelectric switch and a fourth photoelectric switch for sensing the second sensing block.

[0026] More preferably, the first mounting plate is equipped with a height adjustment bolt, and the height adjustment bolt is threaded with two nuts that clamp both sides of the first mounting plate.

[0027] This allows for the adjustment of the position of the first mounting plate on the height adjustment bolt, thereby achieving height adjustment.

[0028] A further preferred embodiment of the assembly method for a novel automatic laser nozzle distance adjustment device includes the following steps:

[0029] Step 1: Install the second mounting plate onto the first mounting plate using M6*25 socket head cap screws, M6 spring washers, and M6 flat washers; install the two sixth mounting plates onto the first mounting plate using M4*20, M4 spring washers, M4 flat washers, and M4 nuts.

[0030] Step 2: Install the third mounting plate onto the second mounting plate using M4*25 socket head cap screws, M4 spring washers, and M4 flat washers.

[0031] Step 3: Install the X-axis adjusting slide onto the third mounting plate using M6*16 internal hex countersunk screws;

[0032] Step 4: Install the L-shaped bracket onto the rotary table of the X-axis adjustment slide using M5*12 socket head cap screws, M5 spring washers, and M5 flat washers.

[0033] Step 5: Install the Z-axis adjusting slide onto the L-shaped bracket using M4*12 socket head cap screws, M4 spring washers, and M4 flat washers. Make sure the screws are tightened.

[0034] Step 6: Install the fifth mounting plate onto the rotary table of the Z-axis adjusting slide using M5*12 socket head cap screws, M5 spring washers, and M5 flat washers.

[0035] Step 7: Install the laser measuring instrument onto the fifth mounting plate using M5*12 socket head cap screws, M5 spring washers, and M5 flat washers;

[0036] Step 8: Install the first limit switch and the second limit switch onto the first limit switch support plate using M3*6 hex socket screws. Then, use M4*12 countersunk hex socket screws, M4 spring washers, and M4 flat washers to install them together onto the support base plate fixed on the third mounting plate. Tighten the screws securely.

[0037] Step 9: Install the first sensing block onto the L-shaped bracket using M4*12 socket head cap screws, M4 spring washers, and M4 flat washers, and lock it securely.

[0038] Step 10: Install the third and fourth limit switches onto the second limit switch support plate using M3*6 hex socket screws, and then install them onto the L-shaped bracket together using M4*12 countersunk hex socket screws, M4 spring washers, and M4 flat washers, ensuring the screws are securely tightened.

[0039] Step 11: Install the second sensor block onto the fifth mounting plate using M4*12 socket head cap screws, M4 spring washers, and M4 flat washers, and lock it securely.

[0040] Step 12: Install the height adjustment bolts and nuts onto the first mounting plate, and adjust the vertical distance as needed.

[0041] Compared with the prior art, the beneficial effects of the present invention are:

[0042] A novel automatic laser nozzle distance adjustment device is available, which can automatically adjust the laser position in the operating position to better measure the distance from the bottom of the graphite screen to the silicon liquid surface. This adjustment mechanism requires high adjustment angle and precision, and the assembly of the processed parts requires precision. To achieve this structural goal, a high-precision reducer and servo motor are used for control.

[0043] This device automatically adjusts the laser projection onto the molten silicon surface and finds a stable measurement point. The X-axis adjustment slide allows for left-right adjustment of the laser; the Z-axis adjustment slide allows for vertical forward-backward adjustment. Hexagonal head bolts and nuts are used to adjust the height of the laser measuring instrument. After all adjustments are complete, secure everything to ensure the stability of subsequent measurements. Attached Figure Description

[0044] Figure 1 This is a schematic diagram of a specific embodiment 1 of the present invention;

[0045] Figure 2 This is a schematic diagram of a structure from another perspective of a specific embodiment 1 of the present invention;

[0046] Figure 3 This is a schematic diagram of a structure from another perspective of a specific embodiment 1 of the present invention;

[0047] Figure 4 This is a schematic diagram of a structure from another perspective of a specific embodiment 1 of the present invention.

[0048] 1. First mounting plate; 2. Second mounting plate; 3. Third mounting plate; 4. X-axis adjusting slide; 5. Z-axis adjusting slide; 6. L-shaped bracket; 7. Laser measuring instrument; 8. Fifth mounting plate; 9. Nut; 10. Height adjusting bolt; 11. Sixth mounting plate; 12. First sensing block; 13. First limit switch support plate; 14. First photoelectric switch; 15. Second photoelectric switch; 16. Second limit switch support plate. Detailed Implementation

[0049] The present invention will now be further described with reference to the accompanying drawings.

[0050] See Figures 1 to 4Specific Embodiment 1: A novel automatic laser nozzle distance adjustment device includes a mounting base, which includes a horizontally arranged first mounting plate 1, on which height adjustment bolts 10 are mounted; the mounting base also includes an adjustable frame mounted on the first mounting plate 1, which is detachably mounted on the first mounting plate 1; it also includes an X-axis adjusting slide 4 for adjusting the laser in the left-right direction, which is mounted on the adjusting frame, and an L-shaped bracket 6 is mounted on the rotating platform of the X-axis adjusting slide 4; it also includes a Z-axis adjusting slide 5 for adjusting the laser in the front-back direction, which is mounted on the inner side of the L-shaped bracket 6, and a fifth mounting plate 8 is mounted on the rotating platform of the Z-axis adjusting slide 5; and it also includes a laser measuring instrument 7, which is mounted on the fifth mounting plate 8. This invention achieves automatic adjustment of the laser position, thereby better measuring the distance from the bottom of the graphite screen to the silicon liquid surface.

[0051] The rotation center axes of the X-axis adjusting slide 4 and the Z-axis adjusting slide 5 are both perpendicular to the detection direction of the laser measuring instrument 7.

[0052] The height adjustment bolt 10 is used to install on the top plate of the crystal growth furnace.

[0053] A circular hole is provided in the center of the first mounting plate. The laser measuring instrument's detection direction is towards the circular hole.

[0054] The adjustment frame includes a second mounting plate 2 and a third mounting plate 3; the second mounting plate 2 and the third mounting plate 3 have oblong holes perpendicular to each other in the length direction; the second mounting plate 2 is connected to the first mounting plate 1 by screws passing through the oblong holes in the second mounting plate 2; the third mounting plate 3 is connected to the second mounting plate 2 by screws passing through the oblong holes in the third mounting plate 3; a vertically arranged support base plate is fixedly connected to the third mounting plate 3; an X-axis adjustment slide 4 is mounted on the support base plate. A reinforcing plate is provided at the connection between the third mounting plate and the support base plate.

[0055] Two sixth mounting plates 11 are mounted on both sides of the first mounting plate 1, with the first mounting plate 1 located between the two sixth mounting plates 11. The first mounting plate 1, the second mounting plate 2, and the third mounting plate 3 are stacked sequentially along the thickness direction.

[0056] A first sensing block 12 is mounted on an L-shaped bracket 6; a first limit switch support plate 13 is mounted on a support base plate, and a first photoelectric switch 14 and a second photoelectric switch 15 for sensing the first sensing block 12 are mounted on the first limit switch support plate. The first sensing block 12 includes a vertically arranged mounting part and an actuating part; the mounting part is detachably connected to the L-shaped bracket 6; the actuating part includes a tapered gradient part and a narrow side part connected in sequence, and the tapered gradient part is fixedly connected to the mounting part. The first photoelectric switch 14 and the second photoelectric switch 15 are slot-type photoelectric sensors. The narrow side part is used to pass through the groove of the slot-type photoelectric sensor. The first sensing block 12 is arranged adjacent to the rotary table of the X-axis adjustment slide 4.

[0057] A second sensing block is mounted on the fifth mounting plate 8; a second limit switch support plate 16 is mounted on the L-shaped bracket 6, and a third photoelectric switch and a fourth photoelectric switch for sensing the second sensing block are mounted on the second limit switch support plate. The third and fourth photoelectric switches are slot-type photoelectric sensors. The second sensing block includes a vertically arranged mounting part and an actuating part; the mounting part is detachably connected to the fifth mounting plate 8; the actuating part includes a tapered gradient part and a narrow side part connected in sequence, and the tapered gradient part is fixedly connected to the mounting part. The narrow side part is used to pass through the groove of the slot-type photoelectric sensor. The second sensing block is arranged adjacent to the rotary table of the Z-axis adjustment slide 5.

[0058] A height adjusting bolt 10 is installed on the first mounting plate 1, and two nuts 9 are threaded onto the height adjusting bolt 10, which clamp onto both sides of the first mounting plate 1. This allows the position of the first mounting plate 1 on the height adjusting bolt 10 to be adjusted, thereby achieving height adjustment.

[0059] An assembly method for a novel automatic laser nozzle distance adjustment device includes the following steps:

[0060] Step 1: Install the second mounting plate 2 onto the first mounting plate 1 using M6*25 socket head cap screws, M6 elastic washers, and M6 flat washers; install the two sixth mounting plates 11 onto the first mounting plate 1 using M4*20, M4 elastic washers, M4 flat washers, and M4 nuts.

[0061] Step 2: Install the third mounting plate 3 onto the second mounting plate 2 using M4*25 socket head cap screws, M4 elastic washers, and M4 flat washers;

[0062] Step 3: Install the X-axis adjusting slide 4 onto the third mounting plate 3 using M6*16 internal hex countersunk screws;

[0063] Step 4: Install the L-shaped bracket 6 onto the rotary table of the X-axis adjusting slide 4 using M5*12 socket head cap screws, M5 spring washers, and M5 flat washers.

[0064] Step 5: Install the Z-axis adjusting slide 5 onto the L-shaped bracket 6 using M4*12 socket head cap screws, M4 spring washers, and M4 flat washers. Make sure the screws are tightened.

[0065] Step 6: Install the fifth mounting plate 8 onto the rotary table of the Z-axis adjusting slide 5 using M5*12 socket head cap screws, M5 spring washers, and M5 flat washers.

[0066] Step 7: Install the laser measuring instrument 7 onto the fifth mounting plate 8 using M5*12 socket head cap screws, M5 spring washers, and M5 flat washers;

[0067] Step 8: Install the first limit switch and the second limit switch onto the first limit switch support plate 13 using M3*6 hex socket screws. Then, install them together onto the support base plate fixed on the third mounting plate 3 using M4*12 countersunk hex socket screws, M4 spring washers, and M4 flat washers. Tighten the screws securely.

[0068] Step nine: Install the first sensing block 12 onto the L-shaped bracket 6 using M4*12 internal hex countersunk screws, M4 spring washers, and M4 flat washers, and lock it securely.

[0069] Step 10: Install the third and fourth limit switches onto the second limit switch support plate 16 using M3*6 hex socket screws, and then install them onto the L-shaped bracket 6 together using M4*12 countersunk hex socket screws, M4 spring washers, and M4 flat washers, and tighten the screws securely.

[0070] Step 11: Install the second sensing block onto the fifth mounting plate 8 using M4*12 socket head cap screws, M4 spring washers, and M4 flat washers, and lock it securely.

[0071] Step 12: Install the height adjustment bolt 10 and nut 9 onto the first mounting plate 1, and adjust the vertical distance as needed.

[0072] The above are merely preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A novel automatic laser nozzle distance adjustment device, characterized in that, The mounting base includes a horizontally arranged first mounting plate, on which height adjustment bolts are mounted. The mounting base also includes an adjustable bracket that is mounted on the first mounting plate and can move forward, backward, left, and right. The adjustable bracket is detachably mounted on the first mounting plate. It also includes an X-axis adjustment slide for adjusting the laser in the left and right direction. The X-axis adjustment slide is mounted on the adjustment frame, and an L-shaped bracket is mounted on the rotating platform of the X-axis adjustment slide. It also includes a Z-axis adjustment slide for adjusting the laser's forward and backward direction. The Z-axis adjustment slide is installed on the inner side of the L-shaped bracket, and a fifth mounting plate is installed on the rotating platform of the Z-axis adjustment slide. It also includes a laser measuring instrument, which is mounted on the fifth mounting plate.

2. The novel automatic laser nozzle distance adjustment device according to claim 1, characterized in that: The adjustment frame includes a second mounting plate and a third mounting plate; The second mounting plate and the third mounting plate are provided with oblong holes that are perpendicular to each other in the length direction; The second mounting plate is connected to the first mounting plate by screws passing through the oblong holes in the second mounting plate; The third mounting plate is connected to the second mounting plate by screws passing through the oblong holes in the third mounting plate; The third mounting plate is fixedly connected to a vertically arranged support base plate; The X-axis adjustment slide is mounted on the support base plate.

3. The novel automatic laser nozzle distance adjustment device according to claim 2, characterized in that: Two sixth mounting plates are installed on both sides of the first mounting plate, with the first mounting plate located between the two sixth mounting plates.

4. The novel automatic laser nozzle distance adjustment device according to claim 2, characterized in that: The first mounting plate, the second mounting plate, and the third mounting plate are stacked sequentially along the thickness direction.

5. The novel automatic laser nozzle distance adjustment device according to claim 2, characterized in that: The L-shaped bracket is equipped with a first sensing block; A first limit switch support plate is mounted on the support base plate, and a first photoelectric switch and a second photoelectric switch for sensing the first sensing block are mounted on the first limit switch support plate.

6. The novel automatic laser nozzle distance adjustment device according to claim 5, characterized in that: The first sensing block includes a vertically arranged mounting part and a touch part; The mounting part is detachably connected to the L-shaped bracket; The triggering part includes a tapered gradient part and a narrow side part connected in sequence, and the tapered gradient part is fixedly connected to the mounting part.

7. The novel automatic laser nozzle distance adjustment device according to claim 6, characterized in that: The first and second photoelectric switches are slot-type photoelectric sensors; The narrow side is used to pass through the groove of the slotted photoelectric sensor.

8. The novel automatic laser nozzle distance adjustment device according to claim 1, characterized in that: A second sensing block is mounted on the fifth mounting plate; The L-shaped bracket is equipped with a second limit switch support plate, and the second limit switch support plate is equipped with a third photoelectric switch and a fourth photoelectric switch for sensing the second sensing block.

9. The novel automatic laser nozzle distance adjustment device according to claim 1, characterized in that: The first mounting plate is equipped with a height adjustment bolt, and the height adjustment bolt is threaded with two nuts that clamp onto both sides of the first mounting plate.

10. The novel automatic laser nozzle distance adjustment device according to claim 1, characterized in that: The assembly method of the novel automatic laser nozzle distance adjustment device includes the following steps: Step 1: Install the second mounting plate onto the first mounting plate using M6*25 socket head cap screws, M6 spring washers, and M6 flat washers; install the two sixth mounting plates onto the first mounting plate using M4*20, M4 spring washers, M4 flat washers, and M4 nuts. Step 2: Install the third mounting plate onto the second mounting plate using M4*25 socket head cap screws, M4 spring washers, and M4 flat washers. Step 3: Install the X-axis adjusting slide onto the third mounting plate using M6*16 internal hex countersunk screws; Step 4: Install the L-shaped bracket onto the rotary table of the X-axis adjustment slide using M5*12 socket head cap screws, M5 spring washers, and M5 flat washers. Step 5: Install the Z-axis adjusting slide onto the L-shaped bracket using M4*12 socket head cap screws, M4 spring washers, and M4 flat washers. Make sure the screws are tightened.

11. Step Six: Install the fifth mounting plate onto the rotary table of the Z-axis adjusting slide using M5*12 socket head cap screws, M5 spring washers, and M5 flat washers; Step 7: Install the laser measuring instrument onto the fifth mounting plate using M5*12 socket head cap screws, M5 spring washers, and M5 flat washers; Step 8: Install the first limit switch and the second limit switch onto the first limit switch support plate using M3*6 hex socket screws. Then, use M4*12 countersunk hex socket screws, M4 spring washers, and M4 flat washers to install them together onto the support base plate fixed on the third mounting plate. Tighten the screws securely. Step 9: Install the first sensing block onto the L-shaped bracket using M4*12 socket head cap screws, M4 spring washers, and M4 flat washers, and lock it securely. Step 10: Install the third and fourth limit switches onto the second limit switch support plate using M3*6 hex socket screws, and then install them onto the L-shaped bracket together using M4*12 countersunk hex socket screws, M4 spring washers, and M4 flat washers, ensuring the screws are securely tightened. Step 11: Install the second sensor block onto the fifth mounting plate using M4*12 socket head cap screws, M4 spring washers, and M4 flat washers, and lock it securely.

12. Step twelve: Install the height adjustment bolts and nuts onto the first mounting plate, and adjust the vertical distance as needed.

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