Micro-nano machining sample tracking method and micro-nano machining device unlocking method

Abstract

The present application provides a micro-nano processing sample tracking method and a micro-nano processing equipment unlocking method, which comprises: when a sample to be processed enters a micro-nano processing platform, a sample ID is given to the sample to be processed; at least two sample codes are added to the surface of the sample to be processed according to the sample ID, and the sample codes added to the surface of the sample to be processed are all expressed as the same sample ID; user identity information corresponding to the sample to be processed and equipment reservation information corresponding to the user identity information are obtained; a mapping relationship is constructed by the sample ID, the user identity information and the equipment reservation information; before the sample to be processed enters any processing equipment for micro-nano processing, the sample codes on the surface of the sample to be processed are identified; and the corresponding equipment reservation information is retrieved according to the sample ID corresponding to the sample code.

Description

Technical Field

[0001] This invention relates to the field of sample tracking, specifically to a method for tracking micro-nano fabricated samples and a method for unlocking micro-nano fabrication equipment. Background Technology

[0002] As business volume grows, micro-nano fabrication platforms need to process a large number of samples daily. The micro-nano fabrication process for each sample may differ, as may the acceptance requirements. To achieve sample tracking on the micro-nano fabrication platform, most existing technologies involve attaching specific markers to the samples for identification or tracking. However, these markers are prone to loss, dirt, or missing items during sample processing, hindering end-to-end sample tracking within the micro-nano fabrication platform.

[0003] In addition, in existing micro-nano fabrication platforms, once a user obtains access to the equipment, they can use that access to process any sample. This lax management of access may lead to chaos in sample processing management. For example, users may use their access to process samples that have not been reserved for the equipment, which could easily conflict with reserved access. Summary of the Invention

[0004] Based on this, the present invention provides a micro / nano fabrication sample tracking method and a micro / nano fabrication equipment unlocking method. At least two sample codes are set on each micro / nano fabrication sample, enabling tracking of the micro / nano fabrication sample throughout the entire micro / nano fabrication process. This also avoids the defect of sample identification being impossible due to dirt or damage to the sample codes during micro / nano fabrication. Furthermore, the equipment unlocking method based on this sample tracking method calls the equipment reservation information corresponding to the sample to be processed. The equipment reservation information must be completely consistent with the information of the currently operating processing equipment before the processing equipment can be unlocked, preventing the abuse of user equipment processing permissions and avoiding the possibility of processing incorrect samples.

[0005] In a first aspect, the present invention provides a method for tracking micro / nano-fabricated samples, wherein the method is applied to a micro / nano-fabricated platform, the micro / nano-fabricated platform comprising a plurality of micro / nano-fabricated devices, including:

[0006] When the sample to be processed enters the micro-nano processing platform, a sample ID is assigned to the sample to be processed, and at least two sample codes are added to the surface of the sample to be processed according to the sample ID. All the sample codes added to the surface of the sample to be processed represent the same sample ID.

[0007] Obtain the user identity information corresponding to the sample to be processed, and the equipment reservation information corresponding to the user identity information;

[0008] Establish a mapping relationship between the sample ID, user identity information, and device reservation information;

[0009] Before the sample to be processed enters any processing equipment for micro-nano processing, the sample code on the surface of the sample to be processed is identified;

[0010] Retrieve the corresponding equipment reservation information based on the sample ID corresponding to the sample code.

[0011] Furthermore, the sample encoding can be represented in the form of QR codes, barcodes, and digital codes;

[0012] The sample code on the surface of the sample to be processed includes a primary code and a backup code.

[0013] Furthermore, the equipment reservation information includes the equipment reservation time period, the reserved equipment ID, and the processing technology information to be performed by the reserved equipment.

[0014] Furthermore, the step of identifying the sample code on the surface of the sample before it enters any processing equipment for micro / nano processing specifically involves:

[0015] Before the sample to be processed enters any processing equipment for micro-nano processing, the main code on the surface of the sample to be processed is identified.

[0016] If the primary code on the surface of the sample to be processed is used to identify the first sample ID, the backup code on the surface of the sample to be processed is used to identify the second sample ID.

[0017] If the first sample ID and the second sample ID are inconsistent, retrieve the user identity information recorded in the previous processing stage for the first sample ID and the second sample ID;

[0018] If the user identity information recorded in the previous processing stage of the first sample ID is consistent with the reservation user identity information corresponding to the current processing equipment in the equipment reservation information, the first sample ID shall be recorded as the sample ID.

[0019] If the user identity information recorded in the previous processing stage for the first sample ID is inconsistent with the reservation user identity information corresponding to the current processing equipment in the equipment reservation information, and the user identity information recorded in the previous processing stage for the second sample ID is consistent with the reservation user identity information corresponding to the current processing equipment in the equipment reservation information, then the second sample ID shall be recorded as the sample ID.

[0020] Furthermore, the micro-nano fabrication sample tracking method also includes: if the user identity information recorded by the first sample ID in the previous processing stage is inconsistent with the reservation user identity information corresponding to the current processing equipment in the equipment reservation information, and the user identity information recorded by the second sample ID in the previous processing stage is also inconsistent with the reservation user identity information corresponding to the current processing equipment in the equipment reservation information, a prompt message indicating unclear sample identity information is generated and sent to the user.

[0021] Furthermore, the micro-nano fabrication sample tracking method further includes: if the first sample ID is consistent with the second sample ID, and the main code and the backup code have different representations, then the first sample ID is recorded as the sample ID.

[0022] Furthermore, the micro-nano fabrication sample tracking method also includes: if the main code on the surface of the sample to be processed cannot be used to obtain the sample ID, identifying the backup code on the surface of the sample to be processed, obtaining the second sample ID based on the backup code, retrieving the user identity information recorded by the second sample ID in the previous processing stage, and if the user identity information recorded by the second sample ID in the previous processing stage is consistent with the reservation user identity corresponding to the current processing equipment in the equipment reservation information, recording the second sample ID as the sample ID.

[0023] Secondly, the present invention also provides a method for unlocking a micro / nano fabrication device, comprising:

[0024] The equipment reservation information for the sample to be processed is obtained according to the micro-nano fabrication sample tracking method as described in any of the first aspects;

[0025] If the equipment reservation information matches the micro / nano processing operation to be performed on the sample to be processed, the processing equipment is unlocked, and the processing parameters of the processing equipment in the equipment reservation information are sent to the processing equipment so that the processing equipment can perform micro / nano processing on the sample to be processed according to the processing parameters in the equipment reservation information.

[0026] Furthermore, if the equipment reservation information matches the micro / nano fabrication operation required for the sample to be processed, the processing equipment is unlocked, specifically as follows:

[0027] If the equipment reservation time period in the equipment reservation information is consistent with the time period when the sample to be processed needs to perform micro-nano processing operations, the reserved equipment ID in the equipment reservation information is consistent with the equipment ID when the sample to be processed needs to perform micro-nano processing operations, and the processing technology information that the reserved equipment needs to perform is consistent with the micro-nano processing technology information that the sample to be processed needs to perform, then the processing equipment is unlocked.

[0028] If the equipment reservation time period in the equipment reservation information is inconsistent with the time period when the sample to be processed needs to perform micro-nano processing operations, or if the reserved equipment ID in the equipment reservation information is inconsistent with the equipment ID when the sample to be processed needs to perform micro-nano processing operations, or if the processing technology information to be performed by the reserved equipment in the equipment reservation information is consistent with the micro-nano processing technology information to be performed by the sample to be processed, a prompt message indicating that the equipment reservation information is inconsistent will be generated.

[0029] Furthermore, the micro-nano fabrication equipment unlocking method also includes: obtaining the micro-nano fabrication record performed by the fabrication equipment on the sample to be processed, and uploading the micro-nano fabrication record to the database using the sample ID corresponding to the sample to be processed as an index.

[0030] Furthermore, the micro-nano fabrication record includes micro-nano fabrication process steps and corresponding process parameters.

[0031] Thirdly, the present invention also provides a micro / nano-fabrication sample tracking device, which is applied to a micro / nano-fabrication platform, the micro / nano-fabrication platform comprising a plurality of micro / nano-fabrication devices, including:

[0032] The sample coding module is used to assign a sample ID to the sample to be processed when it enters the micro-nano processing platform, and add at least two sample codes to the surface of the sample to be processed according to the sample ID. All the sample codes added to the surface of the sample to be processed represent the same sample ID.

[0033] The auxiliary information acquisition module is used to acquire the user identity information corresponding to the sample to be processed, and the equipment reservation information corresponding to the user identity information;

[0034] The information binding module is used to construct a mapping relationship between the sample ID, user identity information, and device reservation information;

[0035] The coding and recognition module is used to identify the sample code on the surface of the sample before it enters any processing equipment for micro-nano processing.

[0036] The reservation information retrieval module is used to retrieve the corresponding equipment reservation information based on the sample ID corresponding to the sample code.

[0037] Fourthly, the present invention also provides a micro / nano fabrication equipment unlocking device, comprising:

[0038] The reservation information acquisition module is used to obtain equipment reservation information for the sample to be processed according to the micro-nano fabrication sample tracking method as described in any of the first aspects.

[0039] The device unlocking module is used to unlock the processing device if the device reservation information is consistent with the micro-nano processing operation to be performed on the sample to be processed, and to send the processing parameter information of the processing device in the device reservation information to the processing device so that the processing device can perform micro-nano processing on the sample to be processed according to the processing parameter information in the device reservation information.

[0040] Fifthly, the present invention also provides a computer-readable storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, implements the steps of the micro / nano fabrication sample tracking method described in any one of the first aspects or the sample processing equipment control method described in any one of the second aspects.

[0041] In a sixth aspect, the present invention also provides a computer device, including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to perform the micro / nano fabrication sample tracking method described in any one of the first aspects or the sample processing equipment control method described in any one of the second aspects.

[0042] The beneficial effects of adopting the above technical solution are as follows: In this embodiment, the micro / nano fabrication sample tracking method and the micro / nano fabrication equipment unlocking method set at least two sample codes on each micro / nano fabrication sample. These two sample codes serve as the primary code and the backup code, respectively, preventing the sample code from being missing or lost during the micro / nano fabrication process. This enables full-process tracking of the micro / nano fabrication sample, and the two sample codes can be mutually verified, avoiding the defect of sample identification errors caused by dirt or damage to the sample code during micro / nano fabrication. Furthermore, the equipment unlocking method based on this sample tracking method calls the equipment reservation information corresponding to the sample to be processed. The equipment reservation information must be completely consistent with the information of the currently operating processing equipment before the processing equipment can be unlocked, preventing the abuse of user equipment processing permissions and avoiding the possibility of processing incorrect samples. Attached Figure Description

[0043] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0044] Figure 1 This is a schematic diagram of a micro / nano-fabricated sample tracking method in one embodiment of this application;

[0045] Figure 2 This is a schematic diagram of a micro / nano-fabricated sample tracking device in one embodiment of this application. Detailed Implementation

[0046] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. To further illustrate the present invention, the accompanying drawings will be provided below. Figure 1 The present invention provides a detailed description of the micro-nano fabrication sample tracking method and the micro-nano fabrication equipment unlocking method.

[0047] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "first," "second," and similar terms used in this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms "an," "a," or "the" do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms "comprising" or "including" mean that the preceding element or object encompasses the elements or objects listed after the word and their equivalents, without excluding other elements or objects. The terms "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up," "down," "left," "right," etc., are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0048] The identification and tracking of laboratory samples is a crucial aspect of laboratory management. Assigning unique identifiers or authentication codes to samples entering the laboratory enables the tracking of their complete lifecycle within the laboratory, including procurement, warehousing, lending, and return. However, current sample tracking within micro / nano fabrication platforms largely relies on labels affixed to the samples. These labels are prone to loss, contamination, or missing items during sample processing, hindering end-to-end sample tracking within the micro / nano fabrication platform.

[0049] This invention provides an application scenario for a micro / nano fabrication sample tracking method. This application scenario includes the terminal device provided in the embodiment. The terminal device includes, but is not limited to, smartphones and computer devices. The computer device can be at least one of a desktop computer, portable computer, laptop computer, mainframe computer, tablet computer, etc. The terminal device identifies the sample code on the surface of the sample to be processed, obtaining device reservation information bound to the sample ID. (See attached...) Figure 1 The diagram shows a micro / nano fabrication sample tracking method. For details, please refer to the embodiments of the micro / nano fabrication sample tracking method.

[0050] The micro / nano fabrication sample tracking method provided in this embodiment is applied to a micro / nano fabrication platform, which includes several micro / nano fabrication devices, sample coding devices, sample coding recognition devices, and the aforementioned terminal devices. The micro / nano fabrication devices include one or more processing devices for multiple process stages such as photolithography, etching, deposition, polishing, and encapsulation, used to complete each micro / nano fabrication process step of the sample. The sample coding device can be configured as a laser coding device, adding specific sample codes to the sample surface using a laser. The sample coding recognition device can be located at the sample placement port of each micro / nano fabrication device, or it can be configured as one or more mobile sample coding recognition devices. Before the micro / nano fabrication device senses the need to operate on the sample, the mobile sample coding recognition device moves to the front end of the sample placement port of the micro / nano fabrication device to recognize the sample code. It should be noted that, regardless of the sample coding and identification device used, it must contain at least a high-resolution process camera, a processor module, and a communication module. The high-resolution process camera is used to acquire the sample coding on the surface of the sample to be processed. The processor module is used to identify the acquired sample coding according to a preset model to obtain the specific sample ID. The communication module is used to send the acquired sample coding image information and the identified sample ID to the terminal device to execute the micro-nano fabrication sample tracking method provided in this embodiment. It should also be noted that the micro-nano fabrication platform provided in this embodiment also has a database at the terminal device to store the micro-nano fabrication records of each sample throughout its complete lifecycle on the micro-nano fabrication platform, as well as the mapping relationship between sample IDs and user identity information. Furthermore, the micro-nano fabrication platform provided in this embodiment is also connected to an equipment reservation system, allowing retrieval of specific equipment reservation information using user identity information or equipment ID as an index. When using user identity information as an index, the retrieved information is the equipment reserved by that user; when using equipment ID as an index, the retrieved information is all reservation information for that equipment.

[0051] Step S100: When the sample to be processed enters the micro-nano processing platform, a sample ID is assigned to the sample to be processed, and at least two sample codes are added to the surface of the sample to be processed according to the sample ID. The sample codes added to the surface of the sample to be processed all represent the same sample ID.

[0052] In this embodiment, the sample ID is the identification code of the sample to be processed within the micro-nano processing platform. This identification code is unique and can be represented by a preset format of numerical code. For example, the format of the sample ID can be determined according to the order in which the sample to be processed enters the micro-nano processing platform, or according to the processing order of the sample to be processed on the micro-nano processing platform on the same day, or it can be combined with factors such as user identity information, date, sample specifications, and sample materials to create the sample ID.

[0053] Furthermore, considering the possibility of obstruction or contamination of sample codes during micro / nano fabrication processes, and to improve the accuracy of sample ID identification during these processes, this embodiment adds at least two sample codes to the surface of the sample to be processed. These sample codes can be represented in the form of QR codes, barcodes, or numerical codes. The two sample codes can have the same representation, such as both being QR codes, barcodes, or numerical codes. Alternatively, they can use different representations, such as any combination of QR codes, barcodes, and numerical codes. It should be noted that regardless of whether the two sample codes have the same representation, the identified sample codes are essentially the same, both pointing to the same sample ID. For example, if sample a has QR code b and barcode c added, QR code b and barcode c will identify the same sample ID.

[0054] In this embodiment, to better distinguish between the two sample codes, the sample codes on the surface of the processed sample are divided into a primary code and a backup code. The primary code has a higher priority than the backup code. When the sample code recognition device recognizes both the primary code and the backup code on the sample surface, it prioritizes recognizing the sample ID represented by the primary code. The priority of the above codes is divided according to their representation format: QR codes have a higher priority than numeric codes, and numeric codes have a higher priority than barcodes. That is, when both QR codes and numeric codes are selected to represent the sample ID, the QR code is used as the primary code and the numeric code is used as the backup code. When two identical QR codes are selected to represent the sample ID, one of the QR codes is arbitrarily selected as the primary code and the other as the backup code.

[0055] Step S200: Obtain the user identity information corresponding to the sample to be processed, and the equipment reservation information corresponding to the user identity information.

[0056] Specifically, in this embodiment, the micro-nano fabrication platform is also equipped with a UWB (Ultra Wide Band) monitoring device. When the sample coding device adds a sample code to the surface of the sample to be processed, the UWB monitoring device can be used to identify the UWB tag information carried by the user of the sample coding device, thereby determining the user identity information corresponding to the sample to be processed. The micro-nano fabrication platform can also be equipped with a monitoring device, which can also detect and identify user identity feature information through a monitoring camera, thereby determining the user identity information of the user of the sample coding device.

[0057] Furthermore, for any processing device or sample marking device within the micro-nano fabrication platform, if a sample to be processed and the user's identity information operating the device are detected at the same or near-the same time, there is a one-to-one mapping relationship between the sample to be processed and the user's identity information. Therefore, when the sample ID of the sample to be processed is detected, the user's identity information operating the processing device or sample marking device at that time can be obtained. After determining the user's identity information, a reservation retrieval command can be sent to the device reservation system using the user's identity information as an index to retrieve the user's device reservation information for the current time period. The device reservation information includes the device reservation time period, the reserved device ID, and the processing technology information to be performed by the reserved device. In this embodiment, the time period for retrieving the user's device reservation information can be within one hour, three hours, or one day, etc.

[0058] Step S300: Construct a mapping relationship between the sample ID, user identity information, and device reservation information.

[0059] Through the operations described in step S200, the sample ID, user identity information, and equipment reservation information are in a one-to-one correspondence. In special cases, a user may have multiple sample processing tasks on a given day, and these tasks may all involve the operation of the same processing equipment. In such cases, multiple sample IDs may correspond to the same user identity information, and one user identity information may correspond to multiple equipment reservations for the same equipment. In this situation, the sample ID corresponding to the sample to be processed by the user at the current moment and the unique equipment reservation information of the processing equipment can be accurately identified by shortening the retrieval time period (e.g., shortening the time period to 30 minutes).

[0060] Step S400: Before the sample to be processed enters any processing equipment for micro-nano processing, the sample code on the surface of the sample to be processed is identified.

[0061] The above step S400, which involves identifying the sample code before processing the sample on any processing equipment, specifically involves:

[0062] Step S401: Before the sample to be processed enters any processing equipment for micro-nano processing, the main code on the surface of the sample to be processed is identified.

[0063] Specifically, based on the priority settings for the above-mentioned sample coding formats, the main coding of the surface to be processed is identified as follows: when the surface to be processed has a sample coding in the form of a QR code, the sample coding in the form of a QR code is identified first; when the surface to be processed does not have a sample coding in the form of a QR code, but has a sample coding in the form of a digital code, the sample coding in the form of a digital code is identified; when the surface to be processed does not have a sample coding in the form of a QR code or a digital code, the sample coding in the form of any barcode is identified.

[0064] Step S402: If the main code of the surface of the sample to be processed is used to obtain the first sample ID, the backup code of the surface of the sample to be processed is used to obtain the second sample ID.

[0065] This embodiment illustrates the case where the surface of the sample to be processed has one primary code and one backup code. When the surface of the sample to be processed has one primary code and multiple backup codes, any one backup code is randomly selected as the backup code for executing the micro / nano-processed sample tracking method of this embodiment. Alternatively, the consistency between the primary code and multiple backup codes can be compared based on the principle of this embodiment, which will not be elaborated here. To improve the accuracy of sample identification during micro / nano-processing and to avoid sample ID identification errors caused by contamination or interference from tiny particles during sample processing, when both the primary code and backup codes can identify the specific sample ID, a consistency comparison is performed on the sample IDs identified by the two codes to avoid errors in the identification of a single sample code.

[0066] Step S403: If the first sample ID and the second sample ID are inconsistent, retrieve the user identity information recorded in the previous processing stage for the first sample ID and the second sample ID.

[0067] Specifically, when the first sample ID and the second sample ID are inconsistent, it indicates that at least one sample code was contaminated during the micro-nano fabrication process, resulting in an incorrect sample ID identification. Since both sample IDs are recorded in the database at this time, it is difficult to distinguish which one is the accurate sample ID based solely on the two sample IDs. Therefore, this embodiment introduces the user identity information recorded in the previous processing stage for both sample IDs to assist in verifying the accuracy of the sample IDs.

[0068] Step S404: If the user identity information recorded in the previous processing stage for the first sample ID is consistent with the reservation user identity information corresponding to the current processing equipment in the equipment reservation information, the first sample ID is recorded as the sample ID.

[0069] Specifically, since the representation priority of the first sample ID is higher than that of the second sample ID, the higher or lower the representation priority also implies the degree of difficulty in tampering with the representation of the sample code. The higher the representation priority, the lower the tampering, which means that the possibility of being tampered with during the micro-nano fabrication process is lower. Therefore, in order to improve the verification efficiency, the first sample ID is verified first when introducing information from the previous processing stage to assist in the verification process.

[0070] Since the sample ID is bound to the user identity information during the sample coding stage when the sample enters the micro-nano fabrication platform, and the sample ID has only one unique corresponding user identity information, this embodiment can trace the user identity information to determine whether the sample ID is correct in order to verify whether the sample ID is correct. Considering the uncertainty of the sample ID in the current processing stage, the correct user identity information corresponding to the sample ID can be obtained by tracing the user identity information recorded in the previous processing stage. Each processing device in the micro-nano fabrication platform requires a user reservation before it can be used. If the user identity information determined in the previous processing stage is consistent with the reserved user identity information corresponding to the current processing device, it means that the sample ID is accurate, reliable and has not been tampered with. At this time, the first sample ID identified can be directly recorded as the sample ID, and there is no need to verify the second sample ID.

[0071] Step S405: If the user identity information recorded by the first sample ID in the previous processing stage is inconsistent with the reservation user identity information corresponding to the current processing equipment in the equipment reservation information, and the user identity information recorded by the second sample ID in the previous processing stage is consistent with the reservation user identity information corresponding to the current processing equipment in the equipment reservation information, then the second sample ID is recorded as the sample ID.

[0072] Specifically, based on the above analysis, if the user identity information determined by the first sample ID in the previous processing stage is inconsistent with the reservation user identity information corresponding to the current processing equipment, it indicates that the main code has been tampered with during the micro-nano processing. At this time, the user identity information determined by the second sample ID in the previous processing stage can be compared with the reservation user identity information corresponding to the current processing equipment. If the two are consistent, the backup code has not been tampered with. In this case, the second sample ID is used as the standard and recorded as the sample ID.

[0073] Step S406: If the user identity information recorded by the first sample ID in the previous processing stage is inconsistent with the reservation user identity information corresponding to the current processing equipment in the equipment reservation information, and the user identity information recorded by the second sample ID in the previous processing stage is also inconsistent with the reservation user identity information corresponding to the current processing equipment in the equipment reservation information, a prompt message indicating unclear sample identity information is generated and sent to the user.

[0074] Specifically, when the user identity information recorded in the previous processing stage for the first sample ID and the second sample ID is inconsistent with the identity of the reserved user corresponding to the current processing equipment, it indicates that both the main code and the backup code have been contaminated during the micro-nano processing, resulting in the tampering of the coding information. At this time, the sample ID that needs to enter the processing equipment cannot be determined, so it is necessary to generate a prompt message that the sample identity is unclear and send it to the user for processing.

[0075] Furthermore, if an accurate sample ID cannot be obtained from all the sample coding information on the surface of the sample to be processed, the sample coding on the surface of the sample to be processed can be erased, and step S100 can be repeated to add the sample coding.

[0076] Step S407: If the first sample ID is the same as the second sample ID, and the main code and the backup code have different representations, then the first sample ID is recorded as the sample ID.

[0077] Specifically, when the first sample ID is the same as the second sample ID, and the main code and the backup code use different formats (e.g., the main code is a QR code and the backup code is a digital code, or the main code is a digital code and the backup code is a barcode, or the main code is a QR code and the backup code is a barcode), it can be assumed that the sample code on the surface of the sample to be processed is not contaminated and there is no possibility of sample code tampering. In this case, the specific sample ID can be recorded directly.

[0078] Additionally, when the first sample ID and the second sample ID are identical, and the primary and backup codes use the same format (e.g., both are QR codes, both are numerical codes, both are barcodes), verification information needs to be generated based on the process of the previous processing step of the sample to be processed. This information is used to remind the user whether to accept the identical sample ID. For example, if the probability of the previous processing step of the sample obscuring the sample code due to tiny particles is extremely low, and the first and second sample IDs are completely identical, the identified sample ID has high credibility. In this case, simple verification information can be sent to the user, such as entering the user's identity information for subsequent verification. Conversely, if the probability of the previous processing step of the sample obscuring the sample code is high, and the first and second sample IDs are completely identical, the identified sample ID has low credibility. In this case, detailed verification information can be sent to the user, including the process of the previous processing step of the sample.

[0079] Step S408: If the main code on the surface of the sample to be processed cannot be used to obtain the sample ID, identify the backup code on the surface of the sample to be processed, obtain the second sample ID based on the backup code, retrieve the user identity information recorded in the previous processing stage for the second sample ID, and if the user identity information recorded in the previous processing stage for the second sample ID is consistent with the reservation user identity corresponding to the current processing equipment in the equipment reservation information, record the second sample ID as the sample ID.

[0080] Specifically, when the primary code cannot identify the sample ID, the backup code is used to identify the sample ID. However, determining the sample ID solely based on the backup code cannot verify whether the backup code has been obscured by dirt during the micro-nano fabrication process, leading to tampering with the sample code. In this case, it is necessary to verify the user identity information determined in the previous processing stage. If the user identity information in the previous processing stage is consistent with the reservation user identity of the current processing equipment, it indicates that the sample code has not been tampered with. In this case, the second sample ID identified by the backup code is used as the sample ID.

[0081] In addition, if the user identity information recorded in the previous processing stage for the second sample ID is inconsistent with the reservation user identity corresponding to the current processing equipment, an unclear sample identity prompt message will be generated and sent to the user.

[0082] In addition, regarding steps S403-S406 above, considering that some darkened laboratories or fully automated operation laboratories may have areas where users do not enter the sample processing stage, if the first sample ID and the second sample ID are inconsistent, and other information is needed to assist in verifying the accuracy of the sample ID, the processing steps recorded in the previous processing stage for the sample ID can be combined to retrieve the equipment reservation record. The equipment reservation record can be compared with the current processing equipment. If the current processing equipment is not in the equipment reservation record corresponding to the sample ID, it means that the sample ID has been contaminated, resulting in a sample ID identification error. Specifically, the following steps are included:

[0083] If the first sample ID and the second sample ID are inconsistent, retrieve the equipment reservation information corresponding to the first sample ID and the second sample ID;

[0084] If the first equipment reservation information corresponding to the first sample ID includes the current processing equipment, the first sample ID shall be recorded as the sample ID;

[0085] If the first equipment reservation information corresponding to the first sample ID does not include the current processing equipment, but the second equipment reservation information corresponding to the second sample ID includes the current processing equipment, then the second sample ID shall be recorded as the sample ID.

[0086] If the first equipment reservation information corresponding to the first sample ID does not include the current processing equipment, and the second equipment reservation information corresponding to the second sample ID also does not include the current processing equipment, a prompt message indicating unclear sample identity information is generated and sent to the user.

[0087] It should be noted that the comparison of whether the equipment reservation information includes the current processing equipment in this embodiment has a certain time sensitivity. That is, whether the first equipment reservation information includes the current processing equipment refers to whether the equipment reservation information within the preset time range corresponding to the current moment includes the current processing equipment. The preset time range is determined based on the specific equipment reservation cycle or equipment operation time cycle of the micro-nano processing platform. For example, if the current processing equipment for the sample is lithography machine 001, and within the preset time range corresponding to the current moment (such as one hour before or after the current moment), the equipment reservation information corresponding to the first sample ID does not include lithography machine 001, it means that the first sample ID may have been tampered with at this time.

[0088] Based on the above settings, this embodiment can determine whether the sample ID is likely to be tampered with by using the equipment reservation information corresponding to the sample ID when the user does not participate in the sample processing stage, thereby achieving accurate verification of the sample ID. At the same time, after verifying that the sample ID is accurate, the current processing equipment can be unlocked by using the equipment reservation information corresponding to the correct sample ID.

[0089] Step S500: Retrieve the corresponding equipment reservation information based on the sample ID corresponding to the sample code.

[0090] Specifically, after determining the sample ID corresponding to the sample code, the specific equipment reservation information for the sample to be processed can be retrieved based on the mapping relationship between the sample ID, user identity information, and equipment reservation information. In this embodiment, the equipment reservation information includes, but is not limited to, the reserved equipment ID, the reserved time period, and the micro / nano fabrication process information to be performed by the reserved equipment.

[0091] In addition, in order to achieve full lifecycle monitoring and recording of samples processed by the micro-nano fabrication platform, after determining the sample ID corresponding to the sample code, not only can the corresponding equipment reservation information be retrieved for the micro-nano fabrication process of the sample, but also all the parameter information of the micro-nano fabrication process can be recorded during the micro-nano fabrication stage of the sample, which is convenient for subsequent traceability of the micro-nano fabrication process of the sample.

[0092] Based on this, the micro-nano fabrication sample tracking method provided in this embodiment sets two sample codes on the sample surface. The two sample codes verify each other. By verifying and identifying the two sample codes, the accuracy and efficiency of identifying the identity information of micro-nano fabricated samples are improved. This is far superior to retrieving other information (such as user identity information, the time when the sample enters the micro-nano fabrication platform, etc.) to determine or verify the identity information of micro-nano fabricated samples. This allows the sample tracking method on the micro-nano fabrication platform to be implemented with the highest efficiency, shortens the time spent determining the sample identity information, and enables the sample to flow within the micro-nano fabrication platform with higher efficiency.

[0093] Furthermore, considering that the micro-nano fabrication platform cannot verify the user's equipment reservation information one by one before processing each sample on each processing device, or that it is necessary to obtain real-time user identity information and then retrieve the specific equipment reservation information to verify with the user and equipment during the process of determining the user's access to the processing device, or that the sample confusion during the processing of multiple samples by the user leads to errors in the micro-nano fabrication process, this embodiment proposes an embodiment of the micro-nano fabrication device unlocking method based on the above-mentioned micro-nano fabrication sample tracking method, as follows:

[0094] Step S600: Obtain equipment reservation information for the sample to be processed.

[0095] Step S700: If the equipment reservation information is consistent with the micro-nano processing operation to be performed on the sample to be processed, unlock the processing equipment and send the processing parameter information of the processing equipment in the equipment reservation information to the processing equipment so that the processing equipment can perform micro-nano processing on the sample to be processed according to the processing parameter information in the equipment reservation information.

[0096] In step S700, if the equipment reservation information matches the micro / nano fabrication operation required for the sample to be processed, the processing equipment is unlocked. Specifically:

[0097] Step S701: If the equipment reservation time period in the equipment reservation information is consistent with the time period when the sample to be processed needs to perform micro-nano processing operations, the equipment ID in the equipment reservation information is consistent with the equipment ID when the sample to be processed needs to perform micro-nano processing operations, and the processing technology information that the reserved equipment needs to perform is consistent with the micro-nano processing technology information when the sample to be processed needs to perform micro-nano processing operations, then unlock the processing equipment.

[0098] Step S702: If the equipment reservation time period in the equipment reservation information is inconsistent with the time period when the sample to be processed needs to perform micro-nano processing operations, or the reserved equipment ID in the equipment reservation information is inconsistent with the equipment ID when the sample to be processed needs to perform micro-nano processing operations, or the processing technology information that the reserved equipment needs to perform in the equipment reservation information is consistent with the micro-nano processing technology information that the sample to be processed needs to perform, a prompt message indicating inconsistent equipment reservation information is generated.

[0099] For example, if the equipment reservation information retrieved based on the equipment ID shows a reservation time slot of "September 18th, 9:00-12:00", the reserved equipment ID is "lithography machine 001", and the processing information to be performed by the reserved equipment is "immerse in solution A for five minutes, then perform operation B for three minutes, repeat n times"; then if the processing equipment "lithography machine 001" receives the micro-nano processing operation to be performed on the sample to be processed as "immerse in solution A for five minutes, then perform operation B for three minutes, repeat n times", and the current time is "September 18th, 9:00-12:00", the two are completely consistent, and the processing equipment can be unlocked; however, if the processing equipment "lithography machine 001" receives the micro-nano processing operation to be performed on the sample to be processed as "immerse in solution A for five minutes, then perform operation B for three minutes, repeat n times", but the current time is "September 17th, 9:00", the reservation time slot is inconsistent with the time slot for the micro-nano processing operation to be performed on the sample to be processed, and the equipment cannot be unlocked to perform the micro-nano processing operation.

[0100] Step S800: Obtain the micro-nano processing record performed by the processing equipment on the sample to be processed, and upload the micro-nano processing record to the database using the sample ID corresponding to the sample to be processed as the index.

[0101] The micro / nano fabrication record includes the micro / nano fabrication process steps and corresponding process parameters. For example, when the sample to be processed enters the lithography machine 001 to perform a specific lithography process, which includes cleaning, resist coating, exposure, development, drying, etching, and resist removal, the micro / nano fabrication record needs to record not only the processing steps performed on the sample but also the specific process parameters for each step. For example, in the cleaning step, the cleaning solvent and cleaning time; in the resist coating step, the photoresist specifications, amount of photoresist, spin coating speed, and spin coating duration; in the exposure step, the light intensity, distance between the light source and the sample, and exposure time; in the development step, the developer specifications and developer temperature; in the drying step, the temperature and airflow; in the etching step, the etching rate, gas specifications, and gas flow rate; and in the resist removal step, the resist remover. Recording these micro / nano fabrication process steps and corresponding process parameters facilitates subsequent traceability of sample processing stages and process optimization.

[0102] Based on the micro-nano processing equipment unlocking method provided in this embodiment, the corresponding equipment reservation information is retrieved using the sample ID of the sample to be processed, thereby determining whether the sample to be processed is the sample that the current processing equipment needs to operate on. Only when the equipment reservation information corresponding to the sample ID is completely consistent with the micro-nano processing operation that needs to be performed can the sample to be processed be operated on, thereby avoiding the situation where sample confusion leads to errors in micro-nano processing operations, reducing unnecessary sample consumption, and improving the accuracy of micro-nano processing.

[0103] It should be understood that, although attached Figure 1 The steps in the flowchart are shown sequentially according to the arrows, but these steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified in this document, there is no strict order requirement for the execution of these steps, and they can be executed in other orders. Furthermore, [the following is a list of steps]. Figure 1 At least some of the steps in the process may include multiple sub-steps or sub-stages. These sub-steps or stages are not necessarily completed at the same time, but can be executed at different times. The execution order of these sub-steps or stages is not necessarily sequential, but can be executed in turn or alternately with other steps or at least some of the sub-steps or stages of other steps.

[0104] The above-described embodiments of the present invention detail a method for tracking micro / nano-fabrication samples and a method for unlocking micro / nano-fabrication equipment. Since the methods disclosed in this invention can be implemented using various types of devices, the present invention also discloses a micro / nano-fabrication sample tracking device and a micro / nano-fabrication equipment unlocking device, in conjunction with the appendix... Figure 2 The following are specific embodiments for detailed explanation.

[0105] The sample coding module 901 is used to assign a sample ID to the sample to be processed when the sample to be processed enters the micro-nano processing platform, and add at least two sample codes to the surface of the sample to be processed according to the sample ID, wherein the sample codes added to the surface of the sample to be processed all represent the same sample ID.

[0106] The auxiliary information acquisition module 902 is used to acquire the user identity information corresponding to the sample to be processed, and the equipment reservation information corresponding to the user identity information;

[0107] The information binding module 903 is used to construct a mapping relationship between the sample ID, user identity information and equipment reservation information;

[0108] The coding and identification module 904 is used to identify the sample code on the surface of the sample before it enters any processing equipment for micro-nano processing.

[0109] The reservation information retrieval module 905 is used to retrieve the corresponding equipment reservation information based on the sample ID corresponding to the sample code.

[0110] The reservation information acquisition module 1001 is used to obtain the equipment reservation information of the sample to be processed according to the above-mentioned micro-nano fabrication sample tracking method.

[0111] The device unlocking module 1002 is used to unlock the processing device if the device reservation information is consistent with the micro-nano processing operation to be performed on the sample to be processed, and send the processing parameter information of the processing device in the device reservation information to the processing device so that the processing device can perform micro-nano processing on the sample to be processed according to the processing parameter information in the device reservation information.

[0112] For details regarding the micro / nano fabrication sample tracking device and the micro / nano fabrication equipment unlocking device, please refer to the above description of the method limitations; they will not be repeated here. Each module in the aforementioned device can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in the processor of the terminal device in hardware form or independent of it, or stored in the memory of the terminal device in software form, so that the processor can call and execute the corresponding operations of each module.

[0113] In one embodiment, the present invention also provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the above-described micro / nano-fabrication sample tracking method or sample processing equipment control method.

[0114] The computer-readable storage medium may be an electronic storage device such as flash memory, EEPROM (Electrically Erasable Programmable Read-Only Memory), EPROM (Erasable Programmable Read-Only Memory), hard disk, or ROM. Optionally, the computer-readable storage medium includes a non-transitory computer-readable storage medium. The computer-readable storage medium has storage space for program code that performs any of the method steps described above. This program code can be read from or written to one or more computer program products, and the program code may be compressed in an appropriate form.

[0115] In one embodiment, the present invention provides a computer device including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to perform the above-described micro / nano fabrication sample tracking method or sample fabrication equipment control method.

[0116] The computer device includes a memory, a processor, and one or more computer programs, wherein the one or more computer programs can be stored in the memory and configured to be executed by one or more processors, and the one or more application programs are configured to perform the above-described micro / nano fabrication sample tracking method or sample fabrication equipment control method.

[0117] A processor may include one or more processing cores. The processor connects to various parts of the computer device using various interfaces and lines, and performs various functions and processes data by running or executing instructions, programs, code sets, or instruction sets stored in memory, and by calling data stored in memory. Optionally, the processor may be implemented using at least one hardware form of Digital Signal Processing (DSP), Field-Programmable Gate Array (FPGA), or Programmable Logic Array (PLA). The processor may integrate one or a combination of several of the following: Central Processing Unit (CPU), Graphics Processing Unit (GPU), and modem. The CPU primarily handles the operating system, user interface, and applications; the GPU is responsible for rendering and drawing the displayed content; and the modem handles wireless communication. It is understood that the modem may also be implemented separately as a communication chip, without being integrated into the processor.

[0118] The memory may include random access memory (RAM) or read-only memory (ROM). The memory can be used to store instructions, programs, code, code sets, or instruction sets. The memory may include a program storage area and a data storage area. The program storage area may store instructions for implementing an operating system, instructions for implementing at least one function (such as touch functionality, sound playback functionality, image playback functionality, etc.), and instructions for implementing the various method embodiments described above. The data storage area may also store data created by the terminal device during use.

[0119] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for tracking micro / nano-fabricated samples, wherein the method is applied to a micro / nano-fabricated platform, the micro / nano-fabricated platform comprising a plurality of micro / nano-fabricated devices, characterized in that, The method comprises the following steps: When a sample to be processed enters a micro-nano processing platform, a sample ID is given to the sample to be processed, at least two sample codes are added to the surface of the sample to be processed according to the sample ID, the sample codes added to the surface of the sample to be processed are all expressed as the same sample ID, and the sample codes on the surface of the sample to be processed include a main code and a backup code; Obtaining user identity information corresponding to the sample to be processed and device reservation information corresponding to the user identity information; Constructing a mapping relationship among the sample ID, the user identity information and the device reservation information; Before the sample to be processed enters any processing device for micro-nano processing, the sample codes on the surface of the sample to be processed are identified; According to the sample ID corresponding to the sample code, the corresponding device reservation information is called; The step of identifying the sample codes on the surface of the sample to be processed before the sample to be processed enters any processing device for micro-nano processing specifically comprises the following steps: Before the sample to be processed enters any processing device for micro-nano processing, the main code on the surface of the sample to be processed is identified; If the first sample ID is obtained by identifying the main code on the surface of the sample to be processed, the second sample ID is obtained by identifying the backup code on the surface of the sample to be processed; If the first sample ID is inconsistent with the second sample ID, the user identity information recorded in the previous processing link of the first sample ID and the second sample ID is called; If the user identity information recorded in the previous processing link of the first sample ID is consistent with the reservation user identity information corresponding to the current processing device in the device reservation information, the first sample ID is recorded as the sample ID; If the user identity information recorded in the previous processing link of the first sample ID is inconsistent with the reservation user identity information corresponding to the current processing device in the device reservation information, and the user identity information recorded in the previous processing link of the second sample ID is consistent with the reservation user identity information corresponding to the current processing device in the device reservation information, the second sample ID is recorded as the sample ID.

2. The micro- and nanofabricated sample tracking method of claim 1, wherein, The expression mode of the sample code includes a two-dimensional code, a bar code and a digital code.

3. The micro- and nanofabricated sample tracking method of claim 2, wherein, The device reservation information includes a device reservation period, a reservation device ID and processing process information required to be performed by the reservation device.

4. The micro- and nanofabricated sample tracking method of claim 3, wherein, The method further comprises the following steps: If the user identity information recorded in the previous processing link of the first sample ID is inconsistent with the reservation user identity information corresponding to the current processing device in the device reservation information, and the user identity information recorded in the previous processing link of the second sample ID is also inconsistent with the reservation user identity information corresponding to the current processing device in the device reservation information, prompt information indicating that the sample identity information is unclear is generated and sent to the user.

5. The micro- and nanofabricated sample tracking method of claim 3, wherein, The method further comprises the following steps: If the first sample ID is consistent with the second sample ID, and the expression forms of the main code and the backup code are inconsistent, the first sample ID is recorded as the sample ID.

6. The micro- and nanofabricated sample tracking method of claim 3, wherein, The method further comprises the following steps: If the main code on the surface of the sample to be processed cannot identify the sample ID, a backup code on the surface of the sample to be processed is identified, a second sample ID is obtained according to the backup code, user identity information recorded in a previous processing link of the second sample ID is called, and if the user identity information recorded in the previous processing link of the second sample ID is consistent with the reserved user identity corresponding to the current processing equipment in the equipment reservation information, the second sample ID is recorded as the sample ID.

7. A method for unlocking a micro-nano processing device, characterized in that, Comprise: Obtaining equipment reservation information of the sample to be processed according to the micro-nano processing sample tracking method of any one of claims 1-6; If the equipment reservation information is consistent with the micro-nano processing operation to be performed on the sample to be processed, the processing equipment is unlocked, and the processing parameter information of the processing equipment in the equipment reservation information is sent to the processing equipment, so that the processing equipment performs micro-nano processing on the sample to be processed according to the processing parameter information in the equipment reservation information.

8. The micro-nano processing apparatus unlocking method according to claim 7, wherein If the equipment reservation information is consistent with the micro-nano processing operation to be performed on the sample to be processed, the processing equipment is unlocked, and the processing parameter information of the processing equipment in the equipment reservation information is sent to the processing equipment, so that the processing equipment performs micro-nano processing on the sample to be processed according to the processing parameter information in the equipment reservation information. If the equipment reservation information is consistent with the micro-nano processing operation to be performed on the sample to be processed, the processing equipment is unlocked, and the processing parameter information of the processing equipment in the equipment reservation information is sent to the processing equipment, so that the processing equipment performs micro-nano processing on the sample to be processed according to the processing parameter information in the equipment reservation information. Further comprise:

9. The micro-nano processing apparatus unlocking method of claim 7, wherein, Obtaining micro-nano processing records of the processing equipment on the sample to be processed, and uploading the micro-nano processing records to the database with the sample ID corresponding to the sample to be processed as the index. The micro-nano processing record comprises a micro-nano processing process link and corresponding process parameters.

10. The micro-nano processing apparatus unlocking method of claim 9, wherein, Comprise:

11. A micro / nano-fabrication sample tracking device, wherein the micro / nano-fabrication sample tracking device is applied to a micro / nano-fabrication platform, the micro / nano-fabrication platform comprising a plurality of micro / nano-fabrication devices, characterized in that, A sample coding module is configured to assign a sample ID to the sample to be processed when the sample to be processed enters the micro-nano processing platform, and add at least two sample codes on the surface of the sample to be processed according to the sample ID, wherein the sample codes added on the surface of the sample to be processed all represent the same sample ID, and the sample codes on the surface of the sample to be processed include a main code and a backup code; An auxiliary information acquisition module is configured to obtain user identity information corresponding to the sample to be processed, and equipment reservation information corresponding to the user identity information; An information binding module is configured to construct a mapping relationship among the sample ID, the user identity information, and the equipment reservation information; A code identification module is configured to identify the sample codes on the surface of the sample to be processed before the sample to be processed enters any processing equipment for micro-nano processing. ​ The reservation information retrieval module is configured to retrieve corresponding device reservation information according to the sample ID corresponding to the sample code. Before the sample to be processed enters any processing device for micro-nano processing, the sample code on the surface of the sample to be processed is identified, specifically: Before the sample to be processed enters any processing device for micro-nano processing, the primary code on the surface of the sample to be processed is identified. If the primary code on the surface of the sample to be processed is identified as a first sample ID, the standby code on the surface of the sample to be processed is identified as a second sample ID. If the first sample ID and the second sample ID are inconsistent, the user identity information recorded in the previous processing link for the first sample ID and the second sample ID is retrieved. If the user identity information recorded in the previous processing link for the first sample ID is consistent with the reservation user identity information corresponding to the current processing device in the device reservation information, the first sample ID is recorded as the sample ID. If the user identity information recorded in the previous processing link for the first sample ID is inconsistent with the reservation user identity information corresponding to the current processing device in the device reservation information, the user identity information recorded in the previous processing link for the second sample ID is consistent with the reservation user identity information corresponding to the current processing device in the device reservation information, and the second sample ID is recorded as the sample ID.

12. A micro-nano processing device unlocking apparatus, characterized in that, It comprises: The reservation information acquisition module is configured to obtain the device reservation information of the sample to be processed according to the micro-nano processing sample tracking method of any one of claims 1-6. The device unlocking module is configured to, if the device reservation information is consistent with the micro-nano processing operation to be performed on the sample to be processed, unlock the processing device, and send the processing parameter information of the processing device in the device reservation information to the processing device, so that the processing device performs micro-nano processing on the sample to be processed according to the processing parameter information in the device reservation information.

13. A computer readable storage medium having stored thereon a computer program, characterized in that, The computer program is executed by the processor to realize the steps of the micro-nano processing sample tracking method of any one of claims 1-6 or the micro-nano processing device unlocking method of any one of claims 7-10.

14. A computer device comprising a memory and a processor, the memory storing a computer program, characterized in that, The processor executes the computer program to execute the micro-nano processing sample tracking method of any one of claims 1-6 or the micro-nano processing device unlocking method of any one of claims 7-10.

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