Dust collection device and laser processing equipment applying dust collection device

Abstract

The invention provides a dust collection device which comprises a dust collection main machine used for generating negative pressure gas; the pipeline is connected with the dust collection main machine, and negative pressure gas passes through the pipeline; the dust collecting cover is connected with the pipeline and comprises a hollow body and an eave part, the interior of the hollow body is communicated with the interior of the pipeline, the pipeline is located on the rear side of the hollow body, the eave part extends forwards from the top of the front side of the hollow body, so that a receiving notch is formed by the eave part and the front side of the hollow body, and the eave part is provided with a window facing the receiving notch; and the first window is connected with the eave part of the dust collection cover and comprises a first lens module positioned at the window. Therefore, dust spraying can be reduced, dust can be effectively sucked and removed, pollution is reduced, and the problem that a known dust suction device is prone to dust spraying and pollution is solved. The invention further provides laser processing equipment using the dust collection device.

Description

TECHNICAL FIELD

[0001] The present invention relates to semiconductor processing, and, in particular, to a dust collection device and a laser processing equipment using the same. BACKGROUND

[0002] In semiconductor or panel processing, laser is often used to remove or cut materials. Under the melting action of laser, the materials are quickly carbonized or pulverized and splashed to the surrounding environment, thus, dirt is left on the surface of the product after laser processing, and cleaning process is needed to maintain the cleanliness of the product.

[0003] Generally, the product is moved to the cleaning process after laser processing, thus, the dirt left on the surface of the product increases and is easily adhered to the product, which increases the difficulty of cleaning or easily scratches the product.

[0004] Known dust collection devices have the problem of incomplete covering of the product, and dust is still easily splashed, thus, improvement is needed. SUMMARY

[0005] In view of the above, the present invention provides a dust collection device and a laser processing equipment using the same, which can more effectively remove dust to reduce dirt and easily maintain and replace the lens to reduce the loss of laser light energy.

[0006] To achieve the above-mentioned purpose, the dust collection device comprises a dust collection main machine for generating a negative pressure gas; a pipeline connected to the dust collection main machine and internally provided for the negative pressure gas to pass through; a dust collection cover connected to the pipeline and comprising a hollow body and an eave portion, the hollow body is internally communicated with the inside of the pipeline, the pipeline is located at the rear side of the hollow body, the eave portion extends forward from the top of the front side of the hollow body, so that the eave portion and the front side of the hollow body form a receiving recess, the eave portion has a window facing the receiving recess; and a first window connected to the eave portion of the dust collection cover and comprising a first lens module located at the window.

[0007] By matching the product to be processed with the eave portion and the receiving recess, the splashing of dust can be reduced, the dust can be more effectively removed to reduce dirt and reduce the loss of laser light energy; by connecting the dust collection cover with the first window, maintenance and lens replacement are easy; thus, the purpose of the present invention is achieved.

[0008] Preferably, the first window comprises a first window sill and a first pipe joint, the first lens module is connected to the first window sill and located at the top surface of the first window sill, a first gas passage towards the first lens module is formed between the bottom surface of the first window sill and the eave portion, and the first pipe joint is connected to the first window sill to provide a positive pressure gas to the first gas passage. Thus, the dust is blown away by the jet.

[0009] Preferably, the dust cover includes a receiving portion extending forwardly from a bottom of the front side of the hollow body and spaced apart from the eave portion such that the receiving recess is formed between the eave portion, the receiving portion and the front side of the hollow body.

[0010] Preferably, the eave portion includes a top plate located at a top edge of the front side of the hollow body and a ring wall connecting the top plate and two side edges of the hollow body, the receiving portion has a connecting plate located at a bottom edge of the front side of the hollow body and a step wall connecting the connecting plate and two side edges of the front side of the hollow body, the step wall has two first step surfaces located between the two side edges of the front side of the hollow body and a second step surface higher than the second step surface.

[0011] Preferably, the dust suction device further has a second window, wherein the receiving portion has a through opening facing the window, the second window is connected to the receiving portion and includes a second lens module located at the through opening.

[0012] Preferably, the second window includes a second window sill connected to the second lens module and located at a bottom surface of the second window sill, a top surface of the second window sill and the receiving portion form a second gas passage toward the second lens module, and a second pipe joint connected to the second window sill to provide a positive pressure gas to the second gas passage. Thus, dust is blown away by the gas jet.

[0013] To achieve the above object, a laser processing apparatus includes a machine table, a rotary table disposed on the machine table and used to carry and rotate a product, a laser device disposed on the machine table and used to generate a laser beam, and a dust suction device as described disposed on the machine table, wherein the rotary table and part of the product are located in the receiving recess, and the laser beam passes through the first lens module of the first window to act on the product.

[0014] Preferably, the laser device is further used to generate another laser beam, wherein the other laser beam passes through the second lens module of the second window of the dust suction device as described to act on the product. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 FIG. 1 is a schematic configuration diagram of a laser processing apparatus according to a preferred embodiment of the present application;

[0016] Figure 2 FIG. 2 is an assembled perspective view of a dust suction device according to a preferred embodiment of the present application;

[0017] Figure 3 FIG. 3 is a front assembled sectional view of the dust suction device according to a preferred embodiment of the present application;

[0018] Figure 4 FIG. 7 is an exploded perspective view of a dust collection device according to a preferred embodiment of the present application;

[0019] Figure 5 FIG. 8 is another exploded perspective view of a dust collection device according to a preferred embodiment of the present application;

[0020] Figure 6 FIG. 9 is still another exploded perspective view of a dust collection device according to a preferred embodiment of the present application;

[0021] Figure 7 FIG. 10 is yet another exploded perspective view of a dust collection device according to a preferred embodiment of the present application;

[0022] Figure 8 FIG. 11 is a perspective view of a dust collection cover according to a preferred embodiment of the present application;

[0023] Figure 9 FIG. 12 is a perspective view of a first window sill according to a preferred embodiment of the present application;

[0024] Figure 10 FIG. 13 is a perspective view of a second window sill according to a preferred embodiment of the present application;

[0025] In the drawings:

[0026] 100: laser processing apparatus

[0027] 10: machine table

[0028] 30: rotary table

[0029] 50: laser device

[0030] 51: laser beam

[0031] 70: dust collection device

[0032] 71: dust collection main body

[0033] 73: pipe line

[0034] 75: dust collection cover

[0035] 751: hollow body

[0036] 753: eave portion

[0037] 7531: top plate

[0038] 7533: ring wall

[0039] 7535: window

[0040] 755: receiving recess

[0041] 757: receiving portion

[0042] 7571: connecting plate

[0043] 7573: step wall

[0044] 75731: first step surface

[0045] 75733: second step surface

[0046] 7575: through opening

[0047] 77: first window

[0048] 771: first window sill

[0049] 7711: first cover receiving portion

[0050] 7712: first window aperture

[0051] 7713: first suction groove

[0052] 7714: first suction port

[0053] 7715: first pipe receiving portion

[0054] 773: first lens module

[0055] 7731: first lens frame

[0056] 7732: first lens

[0057] 775: first pipe joint

[0058] 79: second window

[0059] 791: second window sill

[0060] 7911: second cover receiving portion

[0061] 7912: second window aperture

[0062] 7913: second suction groove

[0063] 7914: second suction port

[0064] 7915: second pipe receiving portion

[0065] 793: second lens module

[0066] 7931: second lens frame

[0067] 7932: second lens

[0068] 795: second pipe joint

[0069] 90: product

[0070] C1: first gas passage

[0071] C2: second gas passage. DETAILED DESCRIPTION

[0072] The structure, method, and technical effects of the present application will be described in detail below with reference to the embodiments and drawings, so as to fully understand the purposes, technologies, schemes, and effects of the present application. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict.

[0073] Unless otherwise specified, when a certain technical feature is referred to as being "fixed", "arranged", or "connected" to another feature, it can be directly fixed, connected to the other feature, or indirectly fixed, arranged, or connected to the other feature. In addition, the directional descriptions such as up, down, left, right, top, bottom, etc. used in the present application are only relative to the positional relationship between the components of the present application in the drawings.

[0074] Although the terms first, second, third, etc. can be used in the present application to describe various technical features, these technical features should not be limited to these terms. These terms are only used to distinguish technical features of the same type from each other. For example, without departing from the scope of the present disclosure, the first technical feature can also be referred to as the second technical feature, and similarly, the second technical feature can also be referred to as the first technical feature.

[0075] As shown in Figure 1 , the laser processing apparatus 100 of the present application includes a machine table 10, a rotating table 30, a laser device 50, and a dust collection device 70.

[0076] As shown in Figure 1 , the rotating table 30 is arranged on the machine table 10 and is used to carry a product 90 and drive the product 90 to rotate.

[0077] As shown in Figure 1 , the laser device 50 is arranged on the machine table 10 and is used to generate two laser beams 51. In other embodiments, the laser device 50 can also generate only one laser beam 51, and is not limited to two laser beams 51.

[0078] The dust collection device 70 includes a dust collection main machine 71, a pipeline 73, a dust collection cover 75, a first window 77, and a second window 79.

[0079] The dust collection main machine 71 is arranged on the machine table 10 and is used to generate a negative pressure gas.

[0080] As shown in Figure 1 and Figure 2 , the pipeline 73 is connected to the dust collection main machine 71 and is internally used for the negative pressure gas to pass through.

[0081] The dust cover 75 connects the pipeline 73 and includes a hollow body 751, an eave 753, a receiving notch 755, and a receiving portion 757.

[0082] The hollow body 751 communicates with the interior of the pipeline 73, and the pipeline 73 is located at the rear side of the hollow body 751.

[0083] As shown in FIG. 7, the eave 753 includes a top plate 7531, a ring wall 7533, and a window 7535. The top plate 7531 is located at the top edge of the front side of the hollow body 751, the ring wall 7533 connects the top plate 7531 and the two side edges of the hollow body 751, and the window 7535 faces the receiving notch 755. Figure 8

[0084] As shown in FIG. 8, the receiving portion 757 extends forward from the bottom of the front side of the hollow body 751 and is spaced apart from the eave 753 so that the receiving notch 755 is formed between the eave 753, the receiving portion 757, and the front side of the hollow body 751. Figure 8

[0085] As shown in FIG. 9, the receiving portion 757 has a connecting plate 7571, a stepped wall 7573, and a through opening 7575. The connecting plate 7571 is located at the bottom edge of the front side of the hollow body 751, the stepped wall 7573 connects the connecting plate 7571 and the two side edges of the front side of the hollow body 751, the stepped wall 7573 has two first step surfaces 75731 and a second step surface 75733, the two first step surfaces 75731 are located between the two side edges of the front side of the hollow body 751 and the second step surface 75733, and the two first step surfaces 75731 are higher than the second step surface 75733, and the through opening 7575 faces the window 7535. Figure 8

[0086] As shown in FIG. 10, the first window 77 connects the eave 753 of the dust cover 75, and the first window 77 includes a first window sill 771, a first lens module 773, and a first pipe joint 775. The first window sill 771 connects the eave 753, the first lens module 773 connects the first window sill 771 and is located at the top surface of the first window sill 771, is located at the window 7535, a first gas passage C1 is formed between the bottom surface of the first window sill 771 and the eave 753 towards the first lens module 773, and the first pipe joint 775 connects the first window sill 771 to provide a positive pressure gas to the first gas passage C1. Figures 3 to 8

[0087] Figure 6 Figure 7 As shown in FIG. 11, the first lens module 773 has a first lens frame 7731 and a first lens 7732. The first lens frame 7731 connects the first window sill 771, and the first lens 7732 is installed in the first lens frame 7731. The first lens 7732 is a high-transmittance lens for a laser wavelength band.

[0088] ​​​​​​As shown in Figure 9 , the first window sill 771 includes a first cover portion 7711, a first window hole 7712, a first suction groove 7713, a plurality of first suction ports 7714, and a first pipe connection portion 7715. The first cover portion 7711 is fixed to the top plate 7531 by a plurality of bolts, the first window hole 7712 corresponds to the window 7535, the first suction groove 7713 is arc-shaped, the first suction ports 7714 connect the first window hole 7712 and the first suction groove 7713, and the first pipe connection portion 7715 connects the first suction groove 7713 and penetrates the upper portion. The first suction groove 7713, the first suction ports 7714, and the first pipe connection portion 7715 form a first gas passage C1, as shown in Figure 3 .

[0089] As shown in Figure 1 , the rotary table 30 and the product 90 are located in the receiving recess 755, and the laser beam 51 passes through the first lens module 773 of the first window 77 to act on the product 90.

[0090] As shown in Figures 3 to 8 , the second window 79 is connected to the receiving portion 757 and includes a second window sill 791, a second lens module 793, and a second pipe joint 795. The second window sill 791 is connected to the receiving portion 757, the second lens module 793 is connected to the second window sill 791 and located at the bottom surface of the second window sill 791, and is located in the through hole 7575. A second gas passage C2 is formed between the top surface of the second window sill 791 and the receiving portion 757 and faces the second lens module 793, and the second pipe joint 795 is connected to the second window sill 791 to provide a positive pressure gas to the second gas passage C2.

[0091] As shown in Figure 6 and Figure 7 , the second lens module 793 has a second frame 7931 and a second lens 7932, the second frame 7931 is connected to the second window sill 791, and the second lens 7932 is installed in the second frame 7931. The second lens 7932 is a high-transmittance lens for laser wavelengths.

[0092] As shown in Figure 10 , the second window sill 791 includes a second cover portion 7911, a second window hole 7912, a second suction groove 7913, a plurality of second suction ports 7914, and a second pipe connection portion 7915. The second cover portion 7911 is fixed to the connecting plate 7571 by a plurality of bolts, the second window hole 7912 corresponds to the through hole 7575, the second suction groove 7913 is arc-shaped, the second suction ports 7914 connect the second window hole 7912 and the second suction groove 7913, and the second pipe connection portion 7915 connects the second suction groove 7913 and penetrates the lower portion. The second suction groove 7913, the second suction ports 7914, and the second pipe connection portion 7915 form the second gas passage C2.

[0093] Wherein, the other laser beam 51 of the laser device 50 passes through the second lens module 793 of the second window 79 to act on the product 90 to remove the excess material on the product 90.

[0094] By covering the product 90 with the eave 753 and the product 90 with the receiving portion 757, and matching the product 90 with the receiving recess 755, dust is not easy to be dispersed and is easy to be sucked, which can increase the dust collection effect, and dust is less likely to adhere to the first lens 7732 and the second lens 7932, thereby reducing the loss of laser light energy. By the locking type of the first window 77 and the locking type of the second window 79, maintenance and lens replacement can be easily performed. Therefore, the purpose of the present application is achieved.

[0095] In addition, by matching the air blower with the first pipe joint 775 and the first gas passage C1, and matching the air blower with the second pipe joint 795 and the second gas passage C2, dust can be blown away by air, and the surface of the first lens 7732 and the second lens 7932 can be reduced.

[0096] And by the laser waveband high-transmittance lens of the first lens 7732 and the second lens 7932, the loss of laser light energy can also be reduced.

[0097] In addition to the above embodiments, the present application can also be implemented as follows, which can still achieve the purpose of the present application.

[0098] For example, the dust collection device 70 can achieve the purpose of the present application as long as it includes the dust collection cover 75 and the first window 77, and is not limited to the above-mentioned second window 79. And wherein the eave 753 extends forward from the top of the front side of the hollow body 751, so that the eave 753 and the front side of the hollow body 751 form the receiving recess 755.

[0099] Or, the eave 753 is not limited to be above the dust collection cover 75, but can also be on each side or below the dust collection cover 75.

[0100] Or, the receiving portion 757 is not limited to be below the dust collection cover 75, but can also be on each side or above the dust collection cover 75. That is, the receiving portion 757 is located in the other direction of the eave 753.

[0101] In addition, the first lens frame 7731 is not limited to be installed on the first window hole 7712 of the first window sill 771 as mentioned above, but can also be installed on other parts of the first window sill 771; and the second lens frame 7931 is not limited to be installed on the second window hole 7912 of the second window sill 791 as mentioned above, but can also be installed on other parts of the second window sill 791.

[0102] Or, the first mirror frame 7731 is not limited to be installed on the first window sill 771 as described above, but can be integrally formed on the first window sill 771; in other words, the first mirror 7732 is installed on the first window sill 771.

[0103] Or, the second mirror frame 7931 is not limited to be installed on the second window sill 791 as described above, but can be integrally formed on the second window sill 791; in other words, the second mirror 7932 is installed on the second window sill 791.

Claims

1. A vacuuming device, characterized in that: Include: A vacuum cleaner main unit is used to generate a negative pressure gas; A pipeline connects to the vacuum cleaner unit and is used inside to allow the negative pressure gas to pass through; A dust collection hood, connected to the pipeline, includes a hollow body and an eaves, the interior of the hollow body communicating with the interior of the pipeline, the pipeline being located on the rear side of the hollow body, the eaves extending forward from the top of the front side of the hollow body such that the eaves and the front side of the hollow body form a receiving recess, the eaves having a window facing the receiving recess; and A first window is connected to the eaves of the dust collection hood and includes a first lens module located in the window.

2. The vacuum cleaner as described in claim 1, characterized in that: in, The first window includes a first window sill and a first pipe connector. The first lens module is connected to the first window sill and is located on the top surface of the first window sill. A first gas channel is formed between the bottom surface of the first window sill and the eaves, facing the first lens module. The first pipe connector is connected to the first window sill to provide positive pressure gas to the first gas channel.

3. The vacuum cleaner as described in claim 1, characterized in that: in, The dust collection hood includes a receiving portion that extends forward from the bottom front side of the hollow body and faces the eaves at intervals so that the receiving notch is formed between the eaves, the receiving portion and the front side of the hollow body.

4. The vacuum cleaner as described in claim 3, characterized in that: in, The eaves includes a top plate and a ring wall. The top plate is located at the top edge of the front side of the hollow body. The ring wall connects the top plate and the two sides of the hollow body. The receiving part has a connecting plate and a stepped wall. The connecting plate is located at the bottom edge of the front side of the hollow body. The stepped wall connects the connecting plate and the two sides of the front side of the hollow body. The stepped wall has two first stepped surfaces and a second stepped surface. The two first stepped surfaces are located between the two sides of the front side of the hollow body and the second stepped surface, and are higher than the second stepped surface.

5. The vacuuming device as described in claim 3, characterized in that: It also has a second window, wherein the receiving part has a port facing the window, the second window is connected to the receiving part, and includes a second lens module located in the port.

6. The vacuum cleaner as described in claim 5, characterized in that: in, The second window includes a second window sill and a second pipe connector. The second lens module is connected to the second window sill and is located on the bottom surface of the second window sill. A second gas channel is formed between the top surface of the second window sill and the receiving part, facing the second lens module. The second pipe connector is connected to the second window sill to provide a positive pressure gas to the second gas channel.

7. A laser processing device, characterized in that: include: One machine; A rotary table is set on the machine platform and is used to support and rotate a product; A laser device, mounted on the machine platform, is used to generate a laser beam; and A vacuuming device as described in any one of claims 1 to 4, disposed on the machine base, wherein the rotating table and part of the product are located within the receiving recess, and the laser beam passes through the first lens module of the first window to act on the product.

8. The laser processing equipment as described in claim 7, characterized in that: in, The laser device is also used to generate another laser beam, which passes through the second lens module of the second window of the vacuuming device as described in claim 5 or 6, to act on the product.

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