Mask plate assembly and evaporation device

Abstract

The invention provides a mask plate assembly and an evaporation device. The mask plate assembly provided by the invention comprises a supporting mask plate and a plurality of metal mask plates. The supporting mask plate is provided with a plurality of openings arranged at intervals. The metal mask plates are arranged on the supporting mask plate side by side in the first direction, each metal mask plate is arranged in the second direction, a first gap is formed between every two adjacent metal mask plates, one metal mask plate at least covers one opening, and an included angle is formed between the first direction and the second direction. The plurality of shielding pieces are connected with the supporting mask plate, and at least one shielding piece is arranged in the first gap.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of display device preparation, and particularly relates to a mask plate assembly and an evaporation device. BACKGROUND

[0002] In an organic light-emitting diode (OLED) display panel, an organic light-emitting layer is usually formed by using an evaporation process. A mask plate assembly plays an important role in the evaporation process, and the mask plate assembly includes a support mask plate (F-Mask) and a metal mask plate (FMM) used to define a red-green-blue (RGB) sub-pixel layer in the evaporation process to ensure that the material is evaporated at a specified position.

[0003] In the related art, a magnetic plate with strong magnetism is placed above a substrate during evaporation, and the mask plate assembly is adsorbed by magnetic force control to make the metal mask plate and the substrate closely adhere to each other. However, since there is a gap between adjacent metal mask plates, the support mask plate will arch up from the gap under the action of magnetic field adsorption, resulting in that the metal mask plate and the substrate do not closely adhere to each other, and adverse conditions such as color mixing and color coordinate deviation are easily generated. SUMMARY

[0004] The application aims to at least improve the technical problem that the metal mask plate and the substrate do not closely adhere to each other, and adverse conditions such as color mixing and color coordinate deviation are easily generated. To this end, the application provides a mask plate assembly and an evaporation device.

[0005] In a first aspect, an embodiment of the application provides a mask plate assembly, comprising:

[0006] a support mask plate having a plurality of openings arranged at intervals;

[0007] a plurality of metal mask plates arranged side by side along a first direction on the support mask plate, and each metal mask plate is arranged along a second direction, and there is a first gap between two adjacent metal mask plates, and one metal mask plate covers at least one opening, and the first direction and the second direction are arranged at an angle;

[0008] a plurality of shielding pieces connected to the support mask plate, and at least one shielding piece is arranged in the first gap.

[0009] In the mask plate assembly provided by the embodiment of the application, at least one shielding piece is arranged in the first gap and connected to the support mask plate, that is, the first gap is shielded by the shielding piece. Therefore, under the action of magnetic field adsorption, the support mask plate is difficult to arch up from the first gap, so that the metal mask plate can closely adhere to the substrate as much as possible, thereby improving adverse conditions such as color mixing and color coordinate deviation.

[0010] In some embodiments, the support mask plate comprises an outer frame, a plurality of support pieces and a plurality of magnetic cover pieces, the plurality of support pieces are arranged side by side along the first direction in the outer frame, each of the support pieces is provided with at least one opening, and the magnetic cover pieces are arranged on the adjacent two metal mask plates or the adjacent two support pieces, and the magnetic cover pieces are connected with the corresponding shielding pieces.

[0011] In some embodiments, along the third direction, the projection of the magnetic cover piece on a reference plane covers the projection of the corresponding first gap on the reference plane, wherein the reference plane is parallel to the plane in which the first direction and the second direction lie, and the third direction is perpendicular to the first direction and the second direction.

[0012] In some embodiments, the magnetic cover piece is arranged between the corresponding adjacent two support pieces, and the magnetic cover piece overlaps the corresponding adjacent two metal mask plates.

[0013] In some embodiments, along the third direction, the height of the shielding piece is 80% to 95% of the height of the first gap.

[0014] In some embodiments, the magnetic cover piece is arranged on the side of the support piece away from the metal mask plate, and the magnetic cover piece overlaps the corresponding adjacent two support pieces, and each of the adjacent two support pieces has a second gap, and the shielding piece is arranged in the first gap and the second gap.

[0015] In some embodiments, along the third direction, the height of the shielding piece is 80% to 95% of the total height of the first gap and the second gap.

[0016] In some embodiments, along the second direction, both sides of the outer frame have fixing grooves, and the magnetic cover piece is arranged in the fixing grooves.

[0017] In some embodiments, along the second direction, the connection position of the support piece and the outer frame is different from the connection position of the corresponding metal mask plate and the outer frame.

[0018] In some embodiments, the outer frame has a hollow part, the support piece comprises a first support section and two second support sections, the two second support sections are arranged at both ends of the first support section along the second direction, the thickness of the second support section is smaller than the thickness of the first support section, the first support section is connected to the inner wall of the hollow part, and the second support section overlaps the outer surface of the outer frame.

[0019] In some embodiments, the first support section is welded to the inner wall of the hollow portion, and along the third direction, a first welding point between the first support section and the inner wall of the hollow portion is located on a side of the first support section away from the metal mask plate.

[0020] In some embodiments, the metal mask plate has an avoiding groove, and the corresponding support member is arranged in the avoiding groove.

[0021] In some embodiments, the metal mask plate is welded to the outer frame, and along the third direction, a second welding point between the metal mask plate and the outer frame is located on a side of the metal mask plate away from the outer frame.

[0022] In a second aspect, the present application provides a deposition device, comprising a deposition source, a magnetic plate and the mask plate assembly as described above, wherein the deposition source is arranged on a side of the mask plate assembly away from a substrate to be deposited, and the magnetic plate is arranged on an edge of a side of the substrate to be deposited away from the mask plate assembly.

[0023] The deposition device provided in the second aspect has the same beneficial effects as the mask plate assembly provided in the first aspect, which will not be repeated here. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0025] Figure 1 A structural schematic diagram of a mask plate assembly in the related art is shown.

[0026] Figure 2 A partial cross-sectional view of Figure 1 is shown.

[0027] Figure 3 A partial cross-sectional view of the mask plate assembly in Figure 1 in a magnetic field environment is shown.

[0028] Figure 4 A cross-sectional view of the mask plate assembly in the embodiments of the present application is shown.

[0029] Figure 5 A structural schematic diagram of a support member in Figure 4 is shown.

[0030] Figure 6 A cross-sectional view of the mask plate assembly in the embodiments of the present application from another perspective Figure 1 is shown.

[0031] Figure 7 A partial cross-sectional view of the mask plate assembly in the magnetic field environment is shown. Figure 6 A partial cross-sectional view of the mask plate assembly in the magnetic field environment is shown.

[0032] Figure 8 A cross-sectional view of the mask plate assembly in another perspective in the embodiment of the present application is shown. Figure 2 .

[0033] Figure 9 A partial cross-sectional view of the mask plate assembly in the magnetic field environment is shown. Figure 8 A partial cross-sectional view of the mask plate assembly in the magnetic field environment is shown.

[0034] Figure 10 A partial cross-sectional view of the outer frame in the embodiment of the present application is shown. Figure 4 A partial cross-sectional view of the outer frame in the embodiment of the present application is shown.

[0035] Reference signs:

[0036] 100'-supporting mask plate, 200'-metal mask plate;

[0037] 10-mask plate assembly, 20-substrate, 100-supporting mask plate, 110-outer frame, 111-hollow portion, 112-fixing groove, 120-supporting piece, 121-opening, 122-second gap, 123-first supporting section, 124-second supporting section, 125-first welding spot, 130-magnetic cover, 200-metal mask plate, 210-first gap, 220-avoiding groove, 230-second welding spot, 300-shielding piece, X-first direction, Y-second direction, Z-third direction. DETAILED DESCRIPTION

[0038] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0039] It should be noted that all directional indications in the embodiments of the present application are only used to explain the relative position relationship, movement condition and the like between components in a certain posture, and if the certain posture changes, the directional indications also change accordingly.

[0040] In the present application, unless otherwise explicitly specified and limited, the terms "connection", "fixation" and the like should be understood in a broad sense, for example, "fixation" can be fixed connection, or detachable connection, or integral; can be mechanical connection, or electrical connection; can be directly connected, or indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0041] In addition, in the present application, the description such as "first", "second" and the like is only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second" can be explicitly or implicitly included at least one of the features. In addition, the technical solutions of various embodiments can be combined with each other, but it must be based on the fact that a person of ordinary skill in the art can realize it, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, nor within the scope of protection required by the present application.

[0042] The light-emitting layer of the OLED display device is mainly obtained by mask evaporation method, in which the light-emitting material is evaporated on the substrate. A metal mask plate such as a fine metal mask plate is set in front of the substrate as a shielding layer, and the organic light-emitting pixels are respectively evaporated into the corresponding unit pixels of the panel through the mask plate openings. Figure 1 The mask plate assembly includes a support mask plate 100' (F-Mask) and a plurality of metal mask plates 200' (FMM). The plurality of metal mask plates 200' are arranged side by side on the support mask plate 100'. The mask plate assembly is used to define the red, green and blue (RGB) sub-pixel layer during the evaporation process, and to ensure that the material is evaporated at the specified position.

[0043] In the related art, the evaporation device is placed inside a chamber with a vacuum environment, and the evaporation source is placed below the mask plate assembly, and the substrate is placed above the mask plate assembly, so that the substrate is tightly attached to the metal mask plate 200' in the mask plate assembly. Generally, a magnetic plate with strong magnetism is placed above the substrate during evaporation, and the mask plate assembly is adsorbed by magnetic force control, so that the metal mask plate 200' and the substrate are tightly attached together.

[0044] Please refer to Figures 1-3Under the magnetic field adsorption, the metal mask plate 200' will slightly arch towards the direction of the substrate, and due to the gap between the adjacent metal mask plates 200', the support mask plate 100' will also arch from the gap under the magnetic field adsorption, so that the support mask plate 100' cannot flatten the metal mask plate 200' on the substrate, resulting in that the metal mask plate 200' is not tightly attached to the substrate, and adverse conditions such as color mixing and color coordinate deviation are prone to occur.

[0045] In order to improve the problems in the related art to some extent, the mask plate assembly and the evaporation device provided by the embodiments of the present application can make the metal mask plate as closely attached to the substrate as possible, thereby improving adverse conditions such as color mixing and color coordinate deviation.

[0046] The present application will be described below in conjunction with the drawings and specific embodiments:

[0047] Please refer to Figures 4-9 The embodiments of the present application provide a mask plate assembly 10, which can make the metal mask plate 200 as closely attached to the substrate 20 as possible, thereby improving adverse conditions such as color mixing and color coordinate deviation

[0048] Please refer to Figure 4 and Figure 6 In the embodiments of the present application, the mask plate assembly 10 includes a support mask plate 100 and a plurality of metal mask plates 200. The support mask plate 100 has a plurality of spaced openings 121. The plurality of metal mask plates 200 are arranged side by side along a first direction X on the support mask plate 100, and each metal mask plate 200 is arranged along a second direction Y, and there is a first gap 210 between the two adjacent metal mask plates 200. One metal mask plate 200 covers at least one opening 121, and the first direction X and the second direction Y are arranged at an angle. A plurality of shielding members 300 are connected to the support mask plate 100, and at least one shielding member 300 is arranged in the first gap 210.

[0049] The support mask plate 100 is used to support a plurality of metal mask plates 200, and the metal mask plate 200 has a plurality of pixel-level evaporation holes. The support mask plate 100 has a plurality of spaced openings 121, and one metal mask plate 200 covers at least one opening 121, i.e. one metal mask plate 200 can cover one, two or more openings 121, and there are a plurality of evaporation holes in one opening 121.

[0050] The first direction X and the second direction Y are arranged at an angle, i.e. the first direction X and the second direction Y can be arranged at any angle. In the following embodiments of the present application, the first direction X and the second direction Y are perpendicular to each other, and the second direction Y is the stretching direction of the metal mask plate 200, which is used as an example to illustrate the mask plate assembly 10 of the present application.

[0051] The plurality of metal mask plates 200 are arranged at intervals along the first direction X, and each two adjacent metal mask plates 200 have a first gap 210 therebetween, that is, each two adjacent metal mask plates 200 have a first gap 210 therebetween along the first direction X, and the first gap 210 extends along the second direction Y. At least one shielding piece 300 is arranged in each first gap 210, that is, one, two or more shielding pieces 300 can be arranged in the first gap 210. Since the first gap 210 extends along the second direction Y, when one shielding piece 300 is arranged in the first gap 210, the shielding piece 300 as a whole can be a strip-shaped structure matching the first gap 210, and when two or more shielding pieces 300 are arranged in the first gap 210, the shielding pieces 300 can be a multi-segment structure arranged at intervals along the second direction Y, which is not limited.

[0052] The support mask plate 100 and the metal mask plate 200 are both made of a magnetic material, and the shielding piece 300 can be made of a magnetic material or a non-magnetic material. Optionally, the shielding piece 300 can be made of PI or other organic materials or Al, Cu or other non-magnetic materials, and the shielding piece 300 and the support mask plate 100 can be connected by bonding, welding or other methods.

[0053] The shielding piece 300 is arranged in the first gap 210, which can be understood as that the shielding piece 300 fills at least part of the first gap 210, and the shielding piece 300 is arranged side by side with the plurality of metal mask plates 200. Please refer to Figure 7 In this way, under the magnetic field adsorption, when the metal mask plate 200 contacts the substrate 20, the shielding piece 300 also contacts the substrate 20 at substantially the same time, so that there is almost no gap between the substrate 20 and the mask plate assembly 10, and thus the support mask plate 100 cannot be arched out of the first gap 210, and can maintain a relatively flat state to flatten the metal mask plate 200, thereby greatly reducing the arching amplitude of the metal mask plate 200, so that the metal mask plate 200 can be closely attached to the substrate 20, and the adverse conditions such as color mixing and color coordinate deviation are improved.

[0054] It should be noted that in the case that the shielding piece 300 is a magnetic material, under the magnetic field adsorption, the shielding piece 300 can be adsorbed by itself to contact the substrate 20, and in the case that the shielding piece 300 is a non-magnetic material, since the shielding piece 300 is connected to the support mask plate 100, the shielding piece 300 can be driven by the support mask plate 100 to contact the substrate 20.

[0055] Please refer to Figures 4-6In some embodiments, the support mask plate 100 comprises an outer frame 110, a plurality of support pieces 120 and a plurality of magnetic cover pieces 130, the plurality of support pieces 120 are arranged side by side along the first direction X in the outer frame 110, each support piece 120 is provided with at least one opening 121, and the magnetic cover piece 130 is lapped on the adjacent two metal mask plates 200 or the adjacent two support pieces 120, and the magnetic cover piece 130 is connected with the corresponding shielding piece 300.

[0056] The outer frame 110 has a hollow part 111, the plurality of support pieces 120 and the plurality of metal mask plates 200 are arranged one by one, and the adjacent two support pieces 120 also have a gap, each support piece 120 is arranged across the hollow part 111 along the second direction Y, and both ends of each support piece 120 and each metal mask plate 200 along the second direction Y are connected to the outer frame 110. Each support piece 120 is provided with at least one opening 121, and optionally, each support piece 120 is provided with two openings 121, and the two openings 121 are arranged along the second direction Y, and the metal mask plate 200 covers the two openings 121 of the corresponding support piece 120.

[0057] The magnetic cover piece 130 is also in the shape of a long strip, and both ends of the magnetic cover piece 130 along the second direction Y are also connected to the outer frame 110. The plurality of magnetic cover pieces 130 and the plurality of shielding pieces 300 are arranged one by one, and the magnetic cover piece 130 is connected with the corresponding shielding piece 300. Since the shielding piece 300 is arranged in the first gap 210 between the adjacent two metal mask plates 200, the plurality of support pieces 120 and the plurality of metal mask plates 200 are arranged one by one, and therefore the magnetic cover piece 130 is also arranged at the adjacent position of the adjacent two support pieces 120, that is, the plurality of support pieces 120 are arranged at the adjacent position of each adjacent two support pieces 120, and the magnetic cover piece 130 is lapped on the corresponding adjacent two support pieces 120 or the corresponding adjacent two metal mask plates 200.

[0058] The magnetic cover piece 130 is made of a magnetic material, such as iron, cobalt, nickel, etc., so that under the action of magnetic field adsorption, the unconstrained part of the magnetic cover piece 130 will move towards the substrate 20, thereby driving the shielding piece 300 to contact the substrate 20, and since the magnetic cover piece 130 is lapped on the corresponding adjacent two support pieces 120 or the corresponding adjacent two metal mask plates 200, the magnetic cover piece 130 can flatten the metal mask plate 200 through the support piece 120 or directly flatten the metal mask plate 200, so that the metal mask plate 200 is tightly attached to the substrate 20.

[0059] It can be understood that the area of the metal mask plate 200 covered by the support 120 cannot pass through the area of the light-emitting material, and the opening 121 on the support 120 can define an effective evaporation area. If the support 120 also plays a flattening role, the support 120 may be slightly deformed under the action of the magnetic field, resulting in a larger edge error of the effective evaporation area. In the embodiment of the present application, the support 120 is used to define the effective evaporation area, and the magnetic cover 130 is used to flatten the metal mask plate 200, so as to reduce the edge error of the effective evaporation area and improve the evaporation effect.

[0060] In addition, under the action of the magnetic field, only the part of the support 120 that is not constrained (i.e., the part not connected to the outer frame 110) can move towards the substrate 20. In the related art, the support 120 has a rectangular grid structure as a whole, and has connection points with the outer frame 110 in the first direction X and the second direction Y, that is, the support 120 is constrained in the first direction X and the second direction Y. Under the action of the magnetic field, the support 120 has low degrees of freedom and small activity amplitude, and has poor flattening effect on the metal mask plate 200. In the embodiment of the present application, the magnetic cover 130 is in a strip shape and is constrained only in the second direction Y, so that the degrees of freedom are increased, the activity amplitude is large, and the flattening effect on the metal mask plate 200 is better, so that the metal mask plate 200 can be more closely attached to the substrate 20.

[0061] In some embodiments, along the third direction Z, the projection of the magnetic cover 130 on the reference plane covers the projection of the corresponding first gap 210 on the reference plane, wherein the reference plane is parallel to the plane in which the first direction X and the second direction Y are located, and the third direction Z is perpendicular to the first direction X and the second direction Y.

[0062] Along the third direction Z, the projection of the magnetic cover 130 on the reference plane covers the projection of the corresponding first gap 210 on the reference plane, that is, in the first direction X, the width of the magnetic cover 130 is greater than the width of the first gap 210, and the two ends of the magnetic cover 130 extend out of the first gap 210. In this way, the two ends of the magnetic cover 130 can be lapped on the corresponding adjacent two metal mask plates 200, so that under the action of the magnetic field, the two ends of the magnetic cover 130 can flatten the corresponding adjacent two metal mask plates 200, greatly reducing the arching amplitude of the metal mask plate 200. Of course, the two ends of the magnetic cover 130 can also be lapped on the corresponding adjacent two supports 120, that is, the magnetic cover 130 can transmit force to the metal mask plate 200 through the support 120 to flatten the corresponding adjacent two metal mask plates 200.

[0063] Please refer to Figure 6 and Figure 7In some embodiments, the magnetic cover 130 is arranged between the corresponding adjacent two supports 120, and the magnetic cover 130 is overlapped on the corresponding adjacent two metal mask plates 200.

[0064] The magnetic cover 130 is arranged between the corresponding adjacent two supports 120, that is, the gap between the adjacent two supports 120 is greater than the first gap 210, and the width of the support 120 is less than the width of the metal mask plate 200. Since the magnetic cover 130 is arranged between the corresponding adjacent two supports 120, the two ends of the magnetic cover 130 can be directly overlapped on the corresponding adjacent two metal mask plates 200, so that under the magnetic field adsorption, the two ends of the magnetic cover 130 can flatten the corresponding adjacent two metal mask plates 200, greatly reducing the arching amplitude of the metal mask plate 200.

[0065] Please refer to Figure 6 In some embodiments, along the third direction Z, the height of the shielding piece 300 is 80% to 95% of the height of the first gap 210.

[0066] That is, the height of the shielding piece 300 is approximately flush with the height of the first gap 210, so that when the metal mask plate 200 contacts the substrate 20, the shielding piece 300 also contacts the substrate 20 at approximately the same time, so as to avoid the magnetic cover 130 arching from the first gap 210 as much as possible. However, considering the manufacturing error in practice, the design height of the shielding piece 300 needs to be slightly lower than the design height of the first gap 210, so as to avoid the height of the shielding piece 300 being higher than the height of the first gap 210 in practice as much as possible, which leads to the situation that the metal mask plate 200 cannot be tightly attached to the substrate 20. Therefore, along the third direction Z, the height of the shielding piece 300 is 80% to 95% of the height of the first gap 210.

[0067] In some embodiments, along the first direction X, the width of the shielding piece 300 can be 50% to 90% of the width of the first gap 210, that is, the width of the shielding piece 300 is less than the width of the first gap 210, so as to avoid interference between the shielding piece 300 and the corresponding adjacent two metal mask plates 200 as much as possible.

[0068] Please refer to Figure 8 and Figure 9 In some embodiments, the magnetic cover 130 is arranged on the side of the support 120 away from the metal mask plate 200, and the magnetic cover 130 is overlapped on the corresponding adjacent two supports 120, each adjacent two supports 120 has a second gap 122, and the shielding piece 300 is arranged in the first gap 210 and the second gap 122.

[0069] In some embodiments, the width of the support 120 is greater than or equal to the width of the metal mask plate 200, the first gap 210 is less than or equal to the second gap 122, and the magnetic cover 130 is disposed on the side of the support 120 away from the metal mask plate 200. Therefore, the shielding member 300 needs to be disposed in both the first gap 210 and the second gap 122, and the magnetic cover 130 overlaps the corresponding adjacent two supports 120. Please refer to Figure 9 In some embodiments, the magnetic cover 130 can transmit force to the metal mask plate 200 through the support 120 to flatten the corresponding adjacent two metal mask plates 200.

[0070] Please refer to Figure 8 In some embodiments, along the third direction Z, the height of the shielding member 300 is 80% to 95% of the total height of the first gap 210 and the second gap 122.

[0071] Similarly, the height of the shielding member 300 is approximately flush with the total height of the first gap 210 and the second gap 122, so that the metal mask plate 200 contacts the substrate 20 at approximately the same time as the shielding member 300 contacts the substrate 20, so as to avoid the magnetic cover 130 from arching out of the first gap 210 as much as possible. However, considering the manufacturing error in practice, the designed height of the shielding member 300 needs to be slightly lower than the designed total height of the first gap 210 and the second gap 122, so as to avoid the height of the shielding member 300 being higher than the total height of the first gap 210 and the second gap 122 in practice, which causes the metal mask plate 200 to fail to be tightly attached to the substrate 20. Therefore, along the third direction Z, the height of the shielding member 300 is 80% to 95% of the total height of the first gap 210 and the second gap 122.

[0072] Please refer to Figure 10 In some embodiments, along the second direction Y, the two sides of the outer frame 110 have a fixed groove 112, and the magnetic cover 130 is disposed in the fixed groove 112.

[0073] The support 120 and the metal mask plate 200 are connected to the outer surface of the outer frame 110 at both ends along the second direction Y, wherein the outer surface of the outer frame 110 is the surface of one side of the outer frame 110 along the third direction Z. Since the magnetic cover 130 is also connected to the outer frame 110 at both ends along the second direction Y, and along the third direction Z, the magnetic cover 130 is arranged on the side of the support 120 away from the metal mask plate 200, in order to enable the support 120 and the metal mask plate 200 to contact and be connected to the outer surface of the outer frame 110, the outer frame 110 is provided with a fixing groove 112 on both sides along the second direction Y, the fixing groove 112 is recessed on the outer surface of the outer frame 110, and the two ends of the magnetic cover 130 are arranged in the two fixing grooves 112 respectively, so that the support 120 and the metal mask plate 200 can contact the outer surface of the outer frame 110. Of course, each magnetic cover 130 corresponds to two fixing grooves 112 arranged oppositely along the second direction Y, and the two ends of each magnetic cover 130 are arranged in the corresponding two fixing grooves 112 respectively.

[0074] In some embodiments, the connection position of the support 120 to the outer frame 110 along the second direction Y is different from the connection position of the corresponding metal mask plate 200 to the outer frame 110.

[0075] Along the third direction Z, the depth of the fixing groove 112 is 110% to 160% of the height of the magnetic cover 130, that is, the depth of the fixing groove 112 needs to be slightly larger than the height of the magnetic cover 130, so as to avoid the magnetic cover 130 protruding from the outer surface of the outer frame 110 as much as possible, which causes the support 120 and the metal mask plate 200 to fail to contact the outer surface of the outer frame 110, and affects the connection of the support 120 and the metal mask plate 200 to the outer frame 110.

[0076] Since the positions of the support 120 and the corresponding metal mask plate 200 along the first direction X are substantially the same, and the two ends of the support 120 and the corresponding metal mask plate 200 are connected to the outer surface of the outer frame 110 along the second direction Y, in order to avoid the connection of the support 120 to the outer frame 110 and the connection of the corresponding metal mask plate 200 to the outer frame 110 interfering with each other, causing inconvenience in connection, the connection position of the support 120 to the outer frame 110 along the second direction Y is different from the connection position of the corresponding metal mask plate 200 to the outer frame 110. Since part of the metal mask plate 200 is located on the side of the support 120 away from the outer frame 110 along the third direction Z, the connection position of the support 120 to the outer frame 110 along the second direction Y can be arranged close to the hollow part 111, and the connection position of the metal mask plate 200 to the outer frame 110 along the second direction Y can be arranged away from the hollow part 111.

[0077] Please refer to Figure 4In some embodiments, the outer frame 110 has a hollow portion 111, the support 120 includes a first support section 123 and two second support sections 124, the two second support sections 124 are respectively arranged at two ends of the first support section 123 along the second direction Y, the thickness of the second support sections 124 is less than the thickness of the first support section 123, the first support section 123 is connected to the inner wall of the hollow portion 111, and the second support sections 124 are overlapped on the outer surface of the outer frame 110.

[0078] The opening 121 is arranged on the first support section 123, the thickness of the second support sections 124 is less than the thickness of the first support section 123, thus the first support section 123 and the second support sections 124 form a stepped structure, the stepped surface of the stepped structure is respectively matched with the inner wall of the hollow portion 111 and the outer surface of the outer frame 110, and the first support section 123 is connected to the inner wall of the hollow portion 111, thereby realizing the fixed installation of the support 120 on the outer frame 110.

[0079] In some embodiments, the first support section 123 is welded to the inner wall of the hollow portion 111, and along the third direction Z, the first welding point 125 between the first support section 123 and the inner wall of the hollow portion 111 is located on the side of the first support section 123 away from the metal mask plate 200.

[0080] Since the first support section 123 is in contact with the metal mask plate 200, the first welding point 125 between the first support section 123 and the inner wall of the hollow portion 111 is located on the side of the first support section 123 away from the metal mask plate 200, so that the first welding point 125 does not affect the matching of the first support section 123 and the metal mask plate 200, thereby reducing the influence on the matching of the metal mask plate 200 and the substrate 20.

[0081] In some embodiments, the metal mask plate 200 has an avoiding groove 220, and the corresponding support 120 is arranged in the avoiding groove 220.

[0082] The avoiding groove 220 is arranged on the side of the metal mask plate 200 close to the outer frame 110, and the corresponding support 120 is arranged in the avoiding groove 220, so that the connection of the support 120 and the outer frame 110 and the connection of the corresponding metal mask plate 200 and the outer frame 110 do not interfere with each other. The second support section 124 is arranged between the groove bottom of the avoiding groove 220 and the outer surface of the outer frame 110, and the height between the groove bottom of the avoiding groove 220 and the outer surface of the outer frame 110 is greater than or equal to the thickness of the second support section 124, so as to ensure that the metal mask plate 200 can contact the outer surface of the outer frame 110 as much as possible, so that the metal mask plate 200 is stably connected on the outer frame 110. Optionally, the height between the groove bottom of the avoiding groove 220 and the outer surface of the outer frame 110 is 100% to 130% of the thickness of the second support section 124.

[0083] In some embodiments, the metal mask plate 200 is welded to the outer frame 110, and along the third direction Z, the second welding point 230 of the metal mask plate 200 and the outer frame 110 is located at the edge of the side of the metal mask plate 200 away from the outer frame 110.

[0084] The second welding point 230 is located at the side of the metal mask plate 200 away from the outer frame 110, which is convenient for welding. In this embodiment, the welding point is located at the edge of the side of the metal mask plate 200 away from the outer frame 110, that is, the second welding point 230 is located at the edge or the region close to the edge of the side of the metal mask plate 200 away from the outer frame 110. Since the edge of the metal mask plate 200 does not abut the substrate 20 during the evaporation process, the second welding point 230 can be located at the edge of the metal mask plate 200.

[0085] Based on the same inventive concept, the present application also provides an evaporation device, which comprises an evaporation source, a magnetic plate and the mask plate assembly 10. The evaporation source is arranged at the side of the mask plate assembly 10 away from the substrate 20 to be evaporated. The magnetic plate is arranged at the side of the substrate 20 to be evaporated away from the mask plate assembly 10.

[0086] Since the evaporation device provided by the present application comprises the mask plate assembly 10 of the above technical solution, the evaporation device provided by the present application has all the beneficial effects of the mask plate assembly 10 described above, which will not be repeated here.

[0087] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example" or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in the present application.

Claims

1. A mask assembly, characterized in that, include: The support mask template has multiple spaced openings; Multiple metal mask templates are arranged side by side on the supporting mask template along a first direction, and each metal mask template is arranged along a second direction. There is a first gap between two adjacent metal mask templates. Each metal mask template covers at least one opening. The first direction and the second direction are arranged at an angle. Multiple shielding components are connected to the supporting mask template, and at least one of the shielding components is provided within the first gap.

2. The mask assembly according to claim 1, characterized in that, The support mask template includes an outer frame, multiple support members, and multiple magnetic covering members. The multiple support members are arranged side by side on the outer frame along the first direction, and each support member has at least one opening. The magnetic covering member overlaps with two adjacent metal mask templates or two adjacent support members, and the magnetic covering member is connected to the corresponding shielding member.

3. The mask assembly according to claim 2, characterized in that, Along a third direction, the projection of the magnetic cover on the reference plane covers the projection of the corresponding first gap on the reference plane, wherein the reference plane is a plane parallel to the first direction and the second direction, and the third direction is perpendicular to the first direction and the second direction.

4. The mask assembly according to claim 3, characterized in that, The magnetic cover is disposed between two adjacent support members and overlaps with two adjacent metal mask templates.

5. The mask assembly according to claim 4, characterized in that, Along the third direction, the height of the shielding member is 80% to 95% of the height of the first gap.

6. The mask assembly according to claim 3, characterized in that, The magnetic cover is disposed on the side of the support member away from the metal mask template, and the magnetic cover overlaps with two adjacent support members. There is a second gap between each pair of adjacent support members, and the shielding member is disposed within the first gap and the second gap.

7. The mask assembly according to claim 6, characterized in that, Along the third direction, the height of the shield is 80% to 95% of the total height of the first gap and the second gap.

8. The mask assembly according to claim 6, characterized in that, Along the second direction, the outer frame has fixing grooves on both sides, and the magnetic cover is disposed in the fixing groove.

9. The mask assembly according to claim 2, characterized in that, Along the second direction, the connection position between the support member and the outer frame is different from the connection position between the corresponding metal mask template and the outer frame.

10. The mask assembly according to claim 9, characterized in that, The outer frame has a hollow portion, and the support member includes a first support section and two second support sections. The two second support sections are respectively disposed at both ends of the first support section along a second direction. The thickness of the second support section is less than the thickness of the first support section. The first support section is connected to the inner wall of the hollow portion, and the second support section overlaps the outer surface of the outer frame.

11. The mask assembly according to claim 10, characterized in that, The first support segment is welded to the inner wall of the hollow part, and along the third direction, the first weld point between the first support segment and the inner wall of the hollow part is located on the side of the first support segment away from the metal mask.

12. The mask assembly according to claim 9, characterized in that, The metal mask template has a clearance groove, and the corresponding support member is disposed in the clearance groove.

13. The mask assembly according to claim 12, characterized in that, The metal mask is welded to the outer frame, and along a third direction, the second weld point between the metal mask and the outer frame is located on the side of the metal mask away from the outer frame.

14. A vapor deposition apparatus, characterized in that, The vapor deposition apparatus includes a vapor deposition source, a magnetic plate, and a mask assembly as described in any one of claims 1 to 13, wherein the vapor deposition source is disposed on the side of the mask assembly away from the substrate to be vapor deposited, and the magnetic plate is disposed on the edge of the substrate to be vapor deposited on the side away from the mask assembly.

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