Device management method and device based on multi-system linkage, storage medium and equipment

Abstract

The application provides a device management method and device based on multi-system linkage, a device management device, a storage medium and a device. The device management method is applied to a device management system. The device management system comprises a procurement subsystem, a work order subsystem, a warehouse subsystem, a device monitoring subsystem and a device data acquisition subsystem. The device data acquisition subsystem comprises an RPA module, an image acquisition module, a crawler acquisition module and a log file acquisition module. The device management method comprises the following steps: the RPA module calls at least one of the image acquisition module, the crawler acquisition module and the log file acquisition module according to a device data acquisition strategy to respectively acquire device management information in the procurement subsystem, the work order subsystem, the warehouse subsystem and the device monitoring subsystem; the device management information is uniformly processed to obtain platform device management information; and the platform device management information is sent to a device state evaluation model to obtain platform device comprehensive information.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of device management, in particular to a device management method and device based on multi-system linkage, a storage medium and a device. BACKGROUND

[0002] The existing semiconductor processing factory is provided with semiconductor processing equipment and plant equipment purchased in different periods, the intelligent degree of each device is different, and the data formats of each semiconductor processing equipment and plant equipment are different, and the data between the devices does not exist connectivity. With the continuous advancement of the intelligence of the semiconductor processing factory, only part of the devices in the semiconductor processing factory have intelligent processing and data transmission, however, for other devices with lower intelligent degree or weaker data processing capability, an additional device data acquisition intelligent system needs to be carried. In addition, the carried data acquisition intelligent system not only needs high funds, but also may not be synchronized or exported due to the data limitation of the semiconductor equipment. In addition to the above-mentioned manner in the prior art, an API interface or an IoT interface is also used to acquire the data of the devices in the semiconductor processing factory, however, the data limitation problem of part of the semiconductor equipment still cannot be broken through. The conventional device management in the semiconductor processing factory arranges each type of device data, maintenance, personnel, etc. in different industrial software, and needs to open different software at the same time when calling data, and the data is in an isolated state, which cannot be quickly integrated and refined. SUMMARY

[0003] Therefore, the present application provides a device management method and device based on multi-system linkage, a storage medium, which is suitable for multi-system devices with different data opening modes and opening degrees, uses RPA to call the data acquisition module most suitable for the current device according to different strategies, accurately acquires the device state information of multi-system linkage without introducing too many modules or data external interfaces, reduces the data acquisition cost of multi-system devices, improves the compatibility of multi-system device management, and improves the applicability of multi-system device management.

[0004] In a first aspect, the present application provides a device management method based on multi-system linkage, which is applied to a device management system. The device management system includes a procurement subsystem, a work order subsystem, a warehouse subsystem, a device monitoring subsystem and a device data acquisition subsystem. The device data acquisition subsystem is in communication connection with the procurement subsystem, the work order subsystem, the warehouse subsystem and the device monitoring subsystem. The device data acquisition subsystem includes an RPA module, an image acquisition module, a crawler acquisition module and a log file acquisition module. The RPA module calls at least one of the image acquisition module, the crawler acquisition module and the log file acquisition module according to a device data acquisition strategy. The device management method includes:

[0005] The RPA module calls at least one of the image acquisition module, the crawler acquisition module and the log file acquisition module according to the equipment data acquisition strategy to acquire the equipment management information in the procurement subsystem, the work order subsystem, the warehouse subsystem and the equipment monitoring subsystem respectively;

[0006] The equipment management information is uniformly processed to obtain platform equipment management information;

[0007] The platform equipment management information is sent to an equipment state evaluation model to obtain platform equipment comprehensive information.

[0008] Further, the equipment management information includes equipment static data, equipment operation data, equipment work order records and equipment spare parts inventory.

[0009] Further, the RPA module calls at least one of the image acquisition module, the crawler acquisition module and the log file acquisition module according to the equipment data acquisition strategy to acquire the equipment management information in the procurement subsystem, the work order subsystem, the warehouse subsystem and the equipment monitoring subsystem, specifically:

[0010] The RPA module calls the image acquisition module to acquire the equipment static data of the procurement subsystem according to a preset first frequency;

[0011] The RPA module calls the log file acquisition module to acquire the equipment work order records of the work order subsystem according to a preset second frequency;

[0012] The RPA module calls at least one of the crawler acquisition module, the log file acquisition module and the image acquisition module to acquire the equipment spare parts inventory of the warehouse subsystem according to a preset third frequency;

[0013] The RPA module calls at least one of the crawler acquisition module, the log file acquisition module and the image acquisition module to acquire the equipment operation data of the equipment monitoring subsystem according to a preset fourth frequency.

[0014] Further, the RPA module calls at least one of the crawler acquisition module, the log file acquisition module and the image acquisition module to acquire the equipment spare parts inventory of the warehouse subsystem according to a preset third frequency, specifically:

[0015] The RPA module detects whether the central processing equipment of the warehouse subsystem is provided with an API interface, a database interface or a standard industrial protocol, and if the central processing equipment is provided with the API interface, the database interface or the standard industrial protocol, the log file acquisition module is called according to the preset third frequency to obtain the equipment spare parts inventory of the warehouse subsystem through the API interface, the database interface or the standard industrial protocol, which is recorded as first equipment spare parts inventory information;

[0016] If the first equipment spare parts inventory information is incomplete, or the central processing device of the storage subsystem is not provided with an API interface, a database interface, and a standard industrial protocol, and the RPA module detects that the central processing device of the storage subsystem is in a Web system in an intranet or an extranet, the RPA module calls a second equipment spare parts inventory information collection module at a preset third frequency to collect the second equipment spare parts inventory information by using a crawler;

[0017] If the second equipment spare parts inventory information is incomplete, or the integrated information of the first equipment spare parts inventory information and the second equipment spare parts inventory information is incomplete, or the crawler collection module fails to be called, and the RPA module detects that the central processing device of the storage subsystem is provided with a page capture interface, the RPA module calls an image collection module at a preset third frequency to obtain a central control page of the central processing device of the storage subsystem through the page capture interface, and obtains third equipment spare parts inventory information according to the central control page;

[0018] If the third equipment spare parts inventory information is incomplete, or the integrated information of the first equipment spare parts inventory information, the second equipment spare parts inventory information, and the third equipment spare parts inventory information is incomplete, or the central processing device of the storage subsystem is not provided with a page capture interface, the RPA module calls a camera closest to the storage subsystem in the image collection module to capture the management device of the storage subsystem or all spare parts inventory information in the storage subsystem, and obtains fourth equipment spare parts inventory information according to image information captured by the camera;

[0019] The first equipment spare parts inventory information, the second equipment spare parts inventory information, the third equipment spare parts inventory information, and the fourth equipment spare parts inventory information are integrated to obtain equipment spare parts inventory.

[0020] Further, the RPA module calls at least one of the crawler collection module, the log file collection module, and the image collection module at a preset fourth frequency to collect equipment running data of the equipment monitoring subsystem, and specifically:

[0021] The RPA module detects whether the central processing device of the equipment monitoring subsystem is provided with an API interface, a database interface, or a standard industrial protocol, and if the central processing device is provided with the API interface, the database interface, or the standard industrial protocol, the log file collection module is called at a preset fourth frequency to obtain the equipment running data of the equipment monitoring subsystem through the API interface, the database interface, or the standard industrial protocol, which is recorded as first equipment running data;

[0022] If the first equipment operation data is incomplete, or the central processing device of the equipment monitoring subsystem is not provided with an API interface, a database interface, and a standard industrial protocol, and the RPA module detects that the central processing device of the equipment monitoring subsystem is in a Web system in an intranet or an extranet, the RPA module calls a second equipment operation data collection module at a preset fourth frequency to collect second equipment operation data;

[0023] If the second equipment operation data is incomplete, or the integrated data of the first equipment operation data and the second equipment operation data is incomplete, or the second equipment operation data collection module fails to be called, and the RPA module detects that the central processing device of the equipment monitoring subsystem is provided with a page interception interface, the RPA module calls an image collection module at a preset fourth frequency to obtain a central control page of the central processing device of the equipment monitoring subsystem through the page interception interface, and obtains third equipment operation data according to the central control page;

[0024] If the third equipment operation information is incomplete, or the integrated data of the first equipment operation data, the second equipment operation data, and the third equipment operation data is incomplete, or the central processing device of the equipment monitoring subsystem is not provided with a page interception interface, the RPA module calls a camera closest to a device monitoring screen of the equipment monitoring subsystem in the image collection module to capture the device monitoring screen, and obtains fourth equipment operation data according to the image of the device monitoring screen captured by the camera;

[0025] The first equipment operation data, the second equipment operation data, the third equipment operation data, and the fourth equipment operation data are integrated to obtain equipment operation data.

[0026] Further, the platform equipment management information is sent to a device state evaluation model to obtain platform equipment comprehensive information, and specifically:

[0027] The device state evaluation model includes a device health analysis model, a device fault early warning model, a device life prediction model, and a device maintenance monitoring model.

[0028] The platform equipment management information is sent to the device health analysis model to obtain a device health value.

[0029] The platform equipment management information is sent to the device fault early warning model to obtain a device fault early warning value.

[0030] The platform equipment management information is sent to the device life prediction model to obtain a device life value.

[0031] The platform equipment management information is sent to the device maintenance monitoring model to obtain a device maintenance early warning value.

[0032] Integrate the device health value, device failure early warning value, device life value and device maintenance early warning value to obtain platform device comprehensive information.

[0033] Further, the device management method based on multi-system linkage further comprises:

[0034] Determine a device optimization work order according to the platform device comprehensive information, and send the device optimization work order to a work order subsystem for maintenance of the device to be optimized.

[0035] Specifically, determining the device optimization work order according to the platform device comprehensive information comprises:

[0036] The platform device comprehensive information comprises a device health value, a device failure early warning value, a device life value and a device maintenance early warning value.

[0037] If the device health value is lower than a first threshold value or the device failure early warning value is higher than a second threshold value, send the collected device information to a device failure analysis model to generate a device failure work order.

[0038] If the device life value is lower than a third threshold value, generate a preventive maintenance work order in combination with the collected device information.

[0039] If the device maintenance early warning value is lower than a fourth threshold value, generate a device maintenance work order in combination with the collected device information.

[0040] Send the device failure work order, preventive maintenance work order or device maintenance work order to the work order subsystem for maintenance of the device to be optimized.

[0041] Further, the device management method based on multi-system linkage further comprises:

[0042] After the device to be optimized is maintained, re-collect device management information in the procurement subsystem, work order subsystem, warehouse subsystem and device monitoring subsystem.

[0043] Uniformly process the re-collected device management information to obtain updated platform device management information.

[0044] Send the updated platform device management information to a device state evaluation model to obtain updated platform device comprehensive information.

[0045] In a second aspect, the present application also provides a device management apparatus based on multi-system linkage, which is applied to a device management system, the device management system comprising a procurement subsystem, a work order subsystem, a warehousing subsystem, a device monitoring subsystem and a device data acquisition subsystem, the device data acquisition subsystem being in communication connection with the procurement subsystem, the work order subsystem, the warehousing subsystem and the device monitoring subsystem, the device data acquisition subsystem comprising an RPA module, an image acquisition module, a crawler acquisition module and a log file acquisition module, the RPA module calling at least one of the image acquisition module, the crawler acquisition module and the log file acquisition module according to a device data acquisition strategy; the device management apparatus comprising:

[0046] a device information acquisition module configured to acquire device management information in the procurement subsystem, the work order subsystem, the warehousing subsystem and the device monitoring subsystem by the RPA module calling at least one of the image acquisition module, the crawler acquisition module and the log file acquisition module according to the device data acquisition strategy;

[0047] a device information integration module configured to uniformly process the device management information to obtain platform device management information;

[0048] a device state evaluation module configured to send the platform device management information to a device state evaluation model to obtain platform device comprehensive information.

[0049] In a third aspect, the present application also provides a computer readable storage medium having a computer program stored thereon, the computer program being executed by a processor to implement the steps of any one of the device management methods based on multi-system linkage in the first aspect.

[0050] In a fourth aspect, the present application also provides a computer device comprising a memory and a processor, the memory storing a computer program, the processor executing the computer program to execute any one of the device management methods based on multi-system linkage in the first aspect.

[0051] The above technical solution has the following beneficial effects: the embodiment is suitable for multi-system devices with different data opening modes and opening degrees, and utilizes RPA to call a data acquisition module most suitable for the current device according to different strategies, so that the device state information of the multi-system linkage is accurately acquired without introducing a module or a data external interface, the data acquisition cost of the multi-system device is reduced, the compatibility of the multi-system device management is improved, and the applicability of the multi-system device management is improved. BRIEF DESCRIPTION OF DRAWINGS

[0052] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiment or prior art description will be briefly introduced as follows.

[0053] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiment or prior art description will be briefly introduced as follows.Figure 1 Figure 1 is a schematic diagram of a device management method based on multi-system linkage according to an embodiment of the present application;

[0054] Figure 2 Figure 2 is a schematic diagram of a device management system according to an embodiment of the present application;

[0055] Figure 3 Figure 3 is a schematic diagram of a device management apparatus based on multi-system linkage according to an embodiment of the present application. DETAILED DESCRIPTION

[0056] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application. In order to describe the present application in more detail, the device management method, apparatus, storage medium and device based on multi-system linkage provided by the present application will be described in detail below with reference to the drawings.

[0057] Unless otherwise defined, technical terms or scientific terms used in the present application should be understood as having the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terms “first”, “second” and similar terms used in the present application do not represent any order, number or importance, but are only used to distinguish different components. Similarly, the terms “one”, “an” or “the” and similar terms do not represent a quantity limitation, but represent the existence of at least one. The terms “include” or “contain” and similar terms mean that the elements or objects appearing before the word “include” or “contain” and the like encompass the elements or objects listed after the word “include” or “contain” and the like and their equivalents, without excluding other elements or objects. The terms “connect” or “connected” and similar terms are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. The terms “up”, “down”, “left”, “right” and the like are only used to represent relative positional relationships, and when the absolute positions of the described objects change, the relative positional relationships can also change accordingly.

[0058] In a typical semiconductor factory area, the business system covers multiple fields, including wafer manufacturing (FAB) production, administrative office, data center operation, security protection, factory management and operation and maintenance control, and other core blocks. From the system deployment architecture, the service end of various business systems is centrally deployed in the data center, and the client is scattered in other functional areas in the factory area other than the data center according to the business scene demand.

[0059] Given the close integration of processes in semiconductor manufacturing, the mutual influence between these processes has become the biggest obstacle to process stability. The relatively independent manual parameter adjustment methods between processes not only reduce product operating efficiency but also decrease the accuracy of parameter adjustments. Accompanying this close influence of process parameters is the problem that existing equipment management systems distribute various equipment data, maintenance personnel, and data across different industrial software. Retrieving data requires opening different software simultaneously, resulting in data silos that cannot be quickly integrated and refined, hindering the development of intelligent and automated management of the semiconductor manufacturing process.

[0060] The existing semiconductor processing plant contains semiconductor processing equipment and plant maintenance equipment purchased at different times. The level of intelligence of each piece of equipment varies, and the data formats of each piece of semiconductor processing equipment and plant maintenance equipment are different, and there is no data connectivity between the equipment.

[0061] To address the aforementioned issues, this invention proposes a device management method based on multi-system linkage. For multi-system devices with different data opening methods and degrees of openness, the method calls the data acquisition module most suitable for the current device according to different strategies. Without introducing other modules or external data interfaces, it accurately collects the device status information of multi-system linkage, reduces the data acquisition cost of multi-system devices, improves the compatibility of multi-system device management, and enhances the applicability of multi-system device management.

[0062] This embodiment provides an application scenario for a device management method based on multi-system linkage. This application scenario includes the terminal devices provided in the embodiment, which include, but are not limited to, smartphones and computer devices. The computer device can be at least one of desktop computers, portable computers, laptop computers, mainframe computers, tablet computers, etc. The terminal device uses a preset device data acquisition strategy to call different acquisition modules to collect and integrate data from the devices within the semiconductor micro-nano fabrication platform, and analyzes the collected device management information to determine the operating status of each device within the platform. (See attached...) Figure 1 The device management method based on multi-system linkage shown is described above. For details, please refer to the embodiment of the device management method based on multi-system linkage.

[0063] This embodiment of the device management method based on multi-system linkage is applied to the device management system, combined with the appendix Figure 2 The diagram shown is of an equipment management system, which includes a procurement subsystem 100, a work order subsystem 200, a warehousing subsystem 300, an equipment monitoring subsystem 400, and an equipment data acquisition subsystem 500. The equipment data acquisition subsystem 500 is communicatively connected to the procurement subsystem 100, the work order subsystem 200, the warehousing subsystem 300, and the equipment monitoring subsystem 400, respectively.

[0064] The procurement subsystem 100 is used to record the equipment static data in the procurement stage, such as the equipment name, the equipment model, the equipment manufacturer, the equipment warranty period, the equipment accessory information, the equipment installation and commissioning time, etc. It should be noted that the equipment static data in the procurement subsystem can be recorded by using the digitized equipment procurement records, or by using the equipment procurement documents (including the equipment procurement documents, the equipment procurement contract scanned documents, and the equipment procurement invoice pictures).

[0065] The work order subsystem 200 is used to record the work order records in the equipment operation stage, such as the equipment maintenance information and the equipment maintenance records. It should be noted that the work order records in the work order subsystem can be recorded by using the digitized equipment maintenance records and the equipment repair records, or by using the scanned documents or pictures of the equipment maintenance work orders or the equipment repair work orders.

[0066] The warehouse subsystem 300 is used to record the spare parts information related to the equipment in the semiconductor micro-nano processing platform, such as the spare parts name, the spare parts number, the spare parts inventory, and the spare parts storage location information. The spare parts information of the warehouse subsystem can be recorded in the form of the digitized spare parts list, or by using the images in the spare parts storage range. The equipment monitoring subsystem 400 is used to record the equipment operation data in the semiconductor micro-nano processing platform, such as the equipment real-time state information and the equipment alarm information. The equipment monitoring subsystem can be recorded in the form of the equipment monitoring central control platform, or by using the equipment alarm information or normal operation information received by the equipment monitoring subsystem.

[0067] The device data collection subsystem 500 comprises an RPA module 501, an image collection module 502, a crawler collection module 503, and a log file collection module 504. The RPA module 501 calls at least one of the image collection module 502, the crawler collection module 503, and the log file collection module 504 according to a device data collection strategy. The RPA (Robotic Process Automation) module can automatically perform repetitive and rule-based tasks by simulating the interaction process between the staff and the software system. The image collection module 502 comprises two modes of device control interface screenshot and camera shooting. For a device provided with a device control interface, the device and related operating parameters can be clearly and comprehensively obtained through the screenshot of the control interface. The screenshot of the control interface only needs to be combined with image recognition technology to read the operating parameters of the device. For a device without a device control interface, a device monitoring camera or a camera carried by an inspection robot can shoot a picture showing the related operating parameters of the device at a preset time, and then the image recognition technology is combined to obtain the operating parameters of the device. The crawler collection module 503 collects the operating parameters of the devices in the semiconductor micro-nano processing platform according to a preset rule. The log file collection module 504 obtains the operating data of the devices in the semiconductor micro-nano processing platform by directly reading the device Log / SCADA log file.

[0068] Based on the above device management system, the device management method based on multi-system linkage comprises the following steps:

[0069] Step S1, the RPA module calls at least one of the image collection module, the crawler collection module, and the log file collection module according to a device data collection strategy to collect device management information in the procurement subsystem, the work order subsystem, the warehouse subsystem, and the device monitoring subsystem, respectively.

[0070] Specifically, the device management information of the embodiment comprises device static data, device operating data, device work order record, and device spare part inventory. The device static data comprises but is not limited to device name, device model, device manufacturer, device agent, device warranty, device warranty period, device procurement price, device accessory information, and device installation and use date. The device operating data comprises but is not limited to device name, device number, device location, device real-time operating parameter, and device alarm information. The device work order record comprises but is not limited to device maintenance work order and device maintenance work order. The device maintenance work order records device fault description information, device fault measure, device downtime, and device spare part replacement record. The device spare part inventory comprises but is not limited to device spare part name, device spare part number, device spare part inventory, and device spare part storage location information.

[0071] The specific data acquisition strategy set according to different subsystems collected in the above step S1 is as follows. It should be noted that the first frequency, the second frequency, the third frequency and the fourth frequency described below are used to define the data acquisition time period of different subsystems, which can be adjusted according to the data timeliness requirements of different subsystems of the actual semiconductor micro-nano processing platform.

[0072] Step S11, the RPA module calls the image acquisition module to collect the equipment static data of the procurement subsystem at a preset first frequency.

[0073] The specific information of the procurement subsystem in the semiconductor micro-nano processing platform is recorded in the form of a PDF format document, such as an invoice picture, etc. Therefore, in the process of collecting the equipment static data of the procurement subsystem, an image acquisition module (such as the image acquisition module of an inspection robot, a scanner connected to a processor, etc.) can be called to export the image information or PDF document related to the equipment procurement, and then the key text part of the image or PDF document is parsed by using a character recognition technology, so as to obtain the equipment static data.

[0074] Step S12, the RPA module calls the log file acquisition module to collect the equipment work order record of the work order subsystem at a preset second frequency.

[0075] The work order subsystem on the semiconductor micro-nano processing platform is recorded in the form of a single log, a table, or a log file. Therefore, in the process of collecting the equipment work order record of the work order subsystem, a log file acquisition module is called to collect the specific equipment work order record, and the information such as the in-out field information, installation information, maintenance information, maintenance information and scrap information of the equipment is determined by grabbing various logs, tables and other equipment-related information.

[0076] Step S13, the RPA module calls at least one of the crawler acquisition module, the log file acquisition module and the image acquisition module to collect the equipment spare parts inventory of the warehouse subsystem at a preset third frequency.

[0077] The warehouse subsystem on the semiconductor micro-nano processing platform is recorded in the form of a document, and a monitoring camera is also arranged in the warehouse range to record the spare parts in-out situation of the warehouse. Therefore, the collection method of the equipment spare parts inventory of the warehouse subsystem includes the following steps:

[0078] Step S131, the RPA module detects whether the central processing device of the warehouse subsystem is provided with an API interface, a database interface or a standard industrial protocol. If the central processing device is provided with an API interface, a database interface or a standard industrial protocol, the log file acquisition module is called at a preset third frequency to obtain the equipment spare parts inventory of the warehouse subsystem through the API interface, the database interface or the standard industrial protocol, which is recorded as the first equipment spare parts inventory information.

[0079] The standard industrial protocol includes, but is not limited to, OPC UA / DA protocol, MQTT protocol, and Modbus protocol.

[0080] In step S132, if the first equipment spare part inventory information is incomplete, or the central processing device of the storage subsystem is not provided with an API interface, a database interface, and a standard industrial protocol, and the RPA module detects that the central processing device of the storage subsystem is in a Web system in an intranet or an extranet, the RPA module calls a crawler collection module to collect second equipment spare part inventory information at a preset third frequency.

[0081] The Web system includes, but is not limited to, an ERP, an MES, or an energy management system.

[0082] In step S133, if the second equipment spare part inventory information is incomplete, or the integrated information of the first equipment spare part inventory information and the second equipment spare part inventory information is incomplete, or the crawler collection module fails to be called, and the RPA module detects that the central processing device of the storage subsystem is provided with a page capture interface, the RPA module calls an image collection module to obtain a central control page of the central processing device of the storage subsystem through the page capture interface, and obtains third equipment spare part inventory information according to the central control page.

[0083] In this embodiment, the data region can be accurately captured to reduce costs and improve the speed of data extraction.

[0084] In step S134, if the third equipment spare part inventory information is incomplete, or the integrated information of the first equipment spare part inventory information, the second equipment spare part inventory information, and the third equipment spare part inventory information is incomplete, or the central processing device of the storage subsystem is not provided with a page capture interface, the RPA module calls an image collection module to capture the management device of the storage subsystem or all spare part inventory information in the storage subsystem by using a camera closest to the storage subsystem, and obtains fourth equipment spare part inventory information according to image information captured by the camera.

[0085] In step S135, the first equipment spare part inventory information, the second equipment spare part inventory information, the third equipment spare part inventory information, and the fourth equipment spare part inventory information are integrated to obtain equipment spare part inventory.

[0086] In the embodiment, the priority setting of the four device spare parts inventory information collection methods is based on the comprehensive consideration of the cost and time of data collection. When the most efficient or best collection method cannot obtain the device spare parts inventory of the semiconductor micro-nano processing platform, the selection requirement of the collection method is gradually reduced until the complete device spare parts inventory of the semiconductor micro-nano processing platform is obtained. Through this setting, the modification of old systems or the calling of other collection modules can be reduced, and the data collection efficiency of old systems can be improved.

[0087] In the embodiment, considering that the log file collection module can quickly determine the device spare parts inventory of the warehouse subsystem, other collection modules need to combine other technologies to obtain the device spare parts inventory, so the log file collection module is preferred to obtain the device spare parts inventory. However, the device spare parts inventory record has a fixed format, such as “spare part name-spare part number-spare part inventory-spare part location-spare part corresponding device”, and the log file does not necessarily record complete data or the data is not updated in time. In this case, other data collection methods (such as the crawler collection module and the image collection module) can be used for supplementation to improve the completeness of data collection.

[0088] Further, in the embodiment, the device spare parts inventory has a fixed format. If any item of the collected initial device spare parts inventory information is empty, the initial device spare parts inventory information is incomplete. At this time, the crawler collection module or the image collection module is called to collect the missing inventory information according to the identified empty data attribute until there is no empty data in the collected device spare parts inventory information. At this time, the initial device spare parts inventory information and all the missing inventory information are integrated to obtain the complete device spare parts inventory.

[0089] In step S14, the RPA module calls at least one of the crawler collection module, the log file collection module and the image collection module to collect the device running data of the device monitoring subsystem at a preset fourth frequency.

[0090] The device monitoring subsystem on the semiconductor micro-nano processing platform has multiple recording methods, such as device inspection records of inspection logs, device running images taken by inspection robots, device running parameters recorded on device control screens, or device running record documents, etc. Therefore, different methods can be selected for collection during device running data collection, specifically:

[0091] Step S141, the RPA module detects whether the central processing device of the device monitoring subsystem is provided with an API interface, a database interface or a standard industrial protocol, and if the central processing device is provided with an API interface, a database interface or a standard industrial protocol, the log file collection module is called at a preset fourth frequency to obtain the device running data of the device monitoring subsystem through the API interface, the database interface or the standard industrial protocol, which is recorded as first device running data.

[0092] Step S142, if the first device running data is incomplete or the central processing device of the device monitoring subsystem is not provided with an API interface, a database interface and a standard industrial protocol, and the RPA module detects that the central processing device of the device monitoring subsystem is in a Web system of an intranet or an extranet, the RPA module calls the crawler collection module to collect second device running data at a preset fourth frequency.

[0093] Step S143, if the second device running data is incomplete, or the integrated data of the first device running data and the second device running data is incomplete, or the calling of the crawler collection module fails, and the RPA module detects that the central processing device of the device monitoring subsystem is provided with a page interception interface, the RPA module calls the image collection module to obtain the central control page of the central processing device of the device monitoring subsystem through the page interception interface at a preset fourth frequency, and obtains third device running data according to the central control page.

[0094] Step S144, if the third device running information is incomplete, or the integrated data of the first device running data, the second device running data and the third device running data is incomplete, or the central processing device of the device monitoring subsystem is not provided with a page interception interface, the RPA module calls the image collection module to capture the device monitoring screen by the camera closest to the device monitoring screen of the device monitoring subsystem, and obtains fourth device running data according to the image of the device monitoring screen captured by the camera.

[0095] In step S144, the fourth device running data captured by the camera includes not only the image of the device monitoring screen, but also physical instrument panels, digital display screens, indicator light states and other devices without any data interface.

[0096] Step S145, the first device running data, the second device running data, the third device running data and the fourth device running data are integrated to obtain device running data.

[0097] In the embodiment, considering that the log file collection module can quickly determine the equipment running parameters of the equipment monitoring subsystem, other collection modules need to combine other technologies to obtain the equipment running parameters, so the log file collection module is used to obtain the equipment running parameters first, and then the requirements of the collection mode are gradually reduced according to the interfaces or devices that need to be adjusted according to other equipment running parameter collection modes. Through the setting, the reconstruction of the old system or the calling of other collection modules can be minimized, and the data collection efficiency of the old system can be improved. However, the recording of the equipment running parameters has a fixed format, such as "equipment name-equipment number-equipment location, equipment real-time running state-equipment alarm information". Since the log file does not necessarily record complete data or the data is not updated in time, other data collection modes (such as the crawler collection module and the image collection module) can be used for supplement to improve the completeness of data collection.

[0098] Further, in the embodiment, the equipment running parameters have a fixed format. If any item of the initial equipment running data is empty, the initial equipment running data is incomplete. At this time, the crawler collection module or the image collection module is called to collect the missing information according to the data properties that are empty, until there is no empty data in the collected equipment spare parts inventory information. At this time, the initial equipment running data and all missing information are integrated to obtain complete equipment running data.

[0099] In step S2, the equipment management information is uniformly processed to obtain platform equipment management information.

[0100] Specifically, considering that the collected equipment management information has inconsistent formats, the collected equipment management information is uniformly processed to obtain platform equipment management information. The platform equipment management information includes equipment static data in a preset first format, equipment running data in a preset second format, equipment work order records in a preset third format, and equipment spare parts inventory in a preset fourth format.

[0101] The device static data in the first format at least includes device name, device model, manufacturer name, supplier / agent name, warranty service provider name, and warranty duration; the device running data in the second format at least includes device name, device model, device location code, device alarm ID, device alarm information, device alarm timestamp, and device alarm level; the device work order record in the third format at least includes device name, device model, device installation and commissioning date, device work order ID, device work order event type, device work order start time and device work order end time, device downtime, device fault code, and device treatment measure; and the device spare parts inventory in the fourth format at least includes device name, device model, device spare parts ID, device spare parts type, device spare parts inventory quantity, device spare parts storage location, device spare parts free shelf life, and device spare parts expected life.

[0102] In the embodiment, the device name is recorded in the form of a string, and can also be recorded by means of a unique identifier. The device alarm timestamp, device installation and commissioning date, device work order start time and device work order end time, and device spare parts expected life related to time can all be recorded in a standard time format. The device alarm information and device treatment measure can be recorded in natural language. The device alarm level is recorded by means of a designated alarm level, such as emergency and warning.

[0103] In step S3, the platform device management information is sent to a device state evaluation model to obtain platform device comprehensive information.

[0104] Specifically, the device state evaluation model includes a device health analysis model, a device fault early warning model, a device life prediction model, and a device maintenance monitoring model.

[0105] In step S31, the platform device management information is sent to the device health analysis model to obtain a device health value.

[0106] The device health analysis model is essentially a deep learning network model, which can determine a specific device health value according to the platform device management information (especially the device running data and device work order record). The higher the device health value, the better the device running state.

[0107] In step S32, the platform device management information is sent to the device fault early warning model to obtain a device fault early warning value.

[0108] The device failure early warning model is essentially a neural network model with data prediction properties, which can predict whether the device will fail by platform device management information (especially device static data, device running data and device work order records), and obtain a specific device failure early warning value. The higher the device failure early warning value, the greater the probability of device failure.

[0109] In step S33, the platform device management information is sent to the device life prediction model to obtain a device life value.

[0110] The device life prediction model is essentially a neural network model with prediction properties, which can predict the life value of the device according to platform device management information (especially device static data, device running data and device work order records). The higher the device life value, the longer the device can be used.

[0111] In step S34, the platform device management information is sent to the device maintenance monitoring model to obtain a device maintenance early warning value.

[0112] The device maintenance monitoring model is essentially a deep learning network model, which is used to predict whether the device is due for maintenance and whether the spare parts inventory supports the recent maintenance work order according to platform device management information (especially device running data, device work order records and device spare parts inventory). The higher the device maintenance early warning value, the more urgent the device needs to be maintained.

[0113] In step S35, the device health value, device failure early warning value, device life value and device maintenance early warning value are integrated to obtain platform device comprehensive information.

[0114] In step S4, a device optimization work order is determined according to the platform device comprehensive information, and the device optimization work order is sent to the work order subsystem to maintain the device to be optimized.

[0115] The device optimization work order is determined according to the platform device comprehensive information, specifically:

[0116] In step S41, the platform device comprehensive information includes device health value, device failure early warning value, device life value and device maintenance early warning value.

[0117] In step S42, if the device health value is lower than a first threshold value, or the device failure early warning value is higher than a second threshold value, the collected device information is sent to a device failure analysis model to generate a device failure work order.

[0118] The first threshold value is a health value threshold value set according to a specific device, and when the device health value is lower than the first threshold value, it indicates that the device is in an unhealthy running state, and there may be a device failure condition. The second threshold value is a failure warning threshold value set according to a specific device, and when the device failure warning value is higher than the second threshold value, it indicates that the device has a failure warning condition.

[0119] In step S43, if the device life value is lower than the third threshold value, a preventive maintenance work order is generated in combination with the collected device information.

[0120] The third threshold value is a residual life threshold value set according to a specific device, which can be determined with reference to the recommended use time of the device. When the device life value is lower than the third threshold value, it indicates that the device may be unstable or scrapped, and at this time, a preventive maintenance work order needs to be generated in combination with the specific situation to ensure the normal operation of the device before the expiration of the warranty.

[0121] In step S44, if the device maintenance warning value is lower than the fourth threshold value, a device maintenance work order is generated in combination with the collected device information.

[0122] The fourth threshold value is a device maintenance reference value specified for the device. When the device maintenance warning value is lower than the fourth threshold value, the device has a maintenance requirement, and at this time, a device maintenance work order can be generated in combination with the specific requirement.

[0123] In step S45, the device failure work order, preventive maintenance work order or device maintenance work order is sent to a work order subsystem for maintenance of the to-be-optimized device.

[0124] Further, the device management method based on multi-system linkage provided in the embodiment further comprises:

[0125] After the to-be-optimized device is maintained, the device management information in the procurement subsystem, the work order subsystem, the warehouse subsystem and the device monitoring subsystem is re-collected;

[0126] The re-collected device management information is uniformly processed to obtain updated platform device management information;

[0127] The updated platform device management information is sent to a device state evaluation model to obtain updated platform device comprehensive information.

[0128] The device management method based on multi-system linkage provided in the embodiment introduces RPA and combines different collection strategies to mobilize corresponding collection modules to adapt to the situation that data between multiple system devices are incompatible or inconsistent in format, thereby avoiding the defects of large modification and high cost of traditional API integration, and being particularly suitable for the modification scene of old equipment systems or mixed new and old equipment systems in semiconductor micro-nano processing.

[0129] It should be understood that although the steps in the flowcharts are shown in a sequential order, the steps are not necessarily performed in the order shown by the arrows. Unless otherwise specified herein, the steps can be performed in other orders. Moreover, the steps in the flowcharts can include multiple sub-steps or sub-phases, which are not necessarily performed at the same time, but can be performed at different times, and the order of the sub-steps or sub-phases is not necessarily sequential, but can be performed in rotation or alternation with other steps or sub-steps or sub-phases of other steps. Figure 1 Figure 1

[0130] The above embodiments of the present disclosure are described in detail based on the device management method based on multi-system linkage. The above method of the present disclosure can be implemented in various forms of devices, and therefore the present disclosure further discloses a device management apparatus based on multi-system linkage. The device management apparatus based on multi-system linkage is shown in the accompanying drawings, and specific embodiments are described in detail below. Figure 3

[0131] The device information collection module 601 is configured to collect device management information in the procurement subsystem, the work order subsystem, the warehouse subsystem and the device monitoring subsystem by calling at least one of the image collection module, the crawler collection module and the log file collection module according to a device data collection strategy.

[0132] The device information integration module 602 is configured to uniformly process the device management information to obtain platform device management information.

[0133] The device state evaluation module 603 is configured to send the platform device management information to a device state evaluation model to obtain platform device comprehensive information.

[0134] The device management apparatus based on multi-system linkage can refer to the above description of the method, and will not be described here. Each module in the above apparatus can be implemented by software, hardware or a combination thereof. Each module can be embedded in or independent of the processor of the terminal device in hardware form, or stored in the memory of the terminal device in software form, so as to be called and executed by the processor to perform the operations corresponding to each module.

[0135] In one embodiment, the present disclosure further provides a computer readable storage medium having a computer program stored thereon, wherein the computer program is executed by a processor to implement the steps of the above device management method based on multi-system linkage.

[0136] ​​​The computer readable storage medium can be an electronic storage including a flash memory, an EEPROM (Electrically Erasable Programmable Read-Only Memory), an EPROM (Erasable Programmable Read-Only Memory), a hard disk, or a ROM. Alternatively, the computer readable storage medium includes a non-transitory computer readable medium. The computer readable storage medium has a storage space for storing program codes for performing any of the above method steps. The program codes can be read from or written to one or more computer program products in an appropriate form.

[0137] In one embodiment, the present application provides a computer device comprising a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to perform the above device management method based on multi-system linkage.

[0138] The computer device comprises a memory, a processor, and one or more computer programs, wherein the one or more computer programs can be stored in the memory and configured to be executed by the one or more processors, and the one or more application programs are configured to perform the above device management method based on multi-system linkage.

[0139] The processor can include one or more processing cores. The processor connects various parts within the entire computer device through various interfaces and lines, performs various functions of the computer device and processes data by running or executing instructions, programs, code sets or instruction sets stored in the memory, and calling data stored in the memory. Alternatively, the processor can be implemented in at least one of a hardware form of a Digital Signal Processing (DSP), a Field-Programmable Gate Array (FPGA), and a Programmable Logic Array (PLA). The processor can integrate a combination of one or more of a Central Processing Unit (CPU), a Graphics Processing Unit (GPU) for reporting and verifying embedded data, and a modem. Among them, the CPU mainly processes operating systems, user interfaces, and application programs, etc.; the GPU is responsible for rendering and drawing display content; and the modem is used for processing wireless communication. It can be understood that the above-mentioned modem can also not be integrated into the processor, but can be realized by a separate communication chip.

[0140] The memory can include a random access memory (RAM) and can also include a read-only memory (ROM). The memory can be used to store instructions, programs, codes, code sets, or instruction sets. The memory can include a program storage area and a data storage area, wherein the program storage area can store instructions for implementing an operating system, instructions for implementing at least one function (such as a touch function, a sound playing function, an image playing function, etc.), instructions for implementing the above-mentioned various method embodiments, etc. The data storage area can also store data created by the terminal device in use, etc.

[0141] The above embodiments are only used to illustrate the technical solutions of the present application, rather than limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A device management method based on multi-system linkage, the device management method being applied to a device management system, characterized by, The device management system comprises a procurement subsystem, a work order subsystem, a warehouse subsystem, a device monitoring subsystem and a device data acquisition subsystem, the device data acquisition subsystem is in communication connection with the procurement subsystem, the work order subsystem, the warehouse subsystem and the device monitoring subsystem, the device data acquisition subsystem comprises an RPA module, an image acquisition module, a crawler acquisition module and a log file acquisition module, the RPA module calls at least one of the image acquisition module, the crawler acquisition module and the log file acquisition module according to a device data acquisition strategy; the device management method comprises: The RPA module calls at least one of the image acquisition module, the crawler acquisition module and the log file acquisition module according to a device data acquisition strategy to acquire device management information in the procurement subsystem, the work order subsystem, the warehouse subsystem and the device monitoring subsystem respectively; The device management information is uniformly processed to obtain platform device management information; The platform device management information is sent to a device state evaluation model to obtain platform device comprehensive information; The RPA module calls at least one of the image acquisition module, the crawler acquisition module and the log file acquisition module according to a device data acquisition strategy to acquire device management information in the procurement subsystem, the work order subsystem, the warehouse subsystem and the device monitoring subsystem respectively, specifically: The RPA module calls the image acquisition module to acquire device static data of the procurement subsystem at a preset first frequency; The RPA module calls the log file acquisition module to acquire device work order records of the work order subsystem at a preset second frequency; The RPA module calls at least one of the crawler acquisition module, the log file acquisition module and the image acquisition module to acquire device spare part inventory of the warehouse subsystem at a preset third frequency; The RPA module calls at least one of the crawler acquisition module, the log file acquisition module and the image acquisition module to acquire device running data of the device monitoring subsystem at a preset fourth frequency; The RPA module calls at least one of the crawler acquisition module, the log file acquisition module and the image acquisition module to acquire device spare part inventory of the warehouse subsystem at a preset third frequency, specifically: The RPA module detects whether the central processing device of the warehouse subsystem is provided with an API interface, a database interface or a standard industrial protocol, if the central processing device is provided with the API interface, the database interface or the standard industrial protocol, the log file acquisition module is called at the preset third frequency to obtain the device spare part inventory of the warehouse subsystem through the API interface, the database interface or the standard industrial protocol, which is recorded as first device spare part inventory information; If the first device spare part inventory information is incomplete or the central processing device of the warehouse subsystem is not provided with the API interface, the database interface and the standard industrial protocol, and the RPA module detects that the central processing device of the warehouse subsystem is in a Web system of an intranet or an extranet, the RPA module calls the crawler acquisition module to acquire second device spare part inventory information at the preset third frequency; If the second equipment spare parts inventory information is incomplete, or the integrated information of the first equipment spare parts inventory information and the second equipment spare parts inventory information is incomplete, or the crawler collection module fails to retrieve, and the RPA module detects that the central processing device of the warehouse subsystem is provided with a page interception interface, the RPA module retrieves the image collection module at a preset third frequency to obtain the central control page of the central processing device of the warehouse subsystem through the page interception interface, and obtains third equipment spare parts inventory information according to the central control page; If the third equipment spare parts inventory information is incomplete, or the integrated information of the first equipment spare parts inventory information, the second equipment spare parts inventory information and the third equipment spare parts inventory information is incomplete, or the central processing device of the warehouse subsystem is not provided with a page interception interface, the RPA module retrieves the image collection module to capture the management device of the warehouse subsystem or all spare parts inventory information in the warehouse subsystem, and obtains fourth equipment spare parts inventory information according to the image information captured by the camera. The first equipment spare parts inventory information, the second equipment spare parts inventory information, the third equipment spare parts inventory information and the fourth equipment spare parts inventory information are integrated to obtain equipment spare parts inventory. The equipment spare parts inventory is provided with a fixed format, if any data in the collected equipment inventory information is empty, the equipment spare parts inventory information is incomplete, at this time, the crawler collection module or the image collection module is retrieved to collect missing data in combination with the data properties that are empty, until there is no any data empty in the collected equipment spare parts inventory information. The RPA module calls at least one of the crawler collection module, the log file collection module and the image collection module to collect equipment running data of the equipment monitoring subsystem at a preset fourth frequency, specifically: The RPA module detects whether the central processing device of the equipment monitoring subsystem is provided with an API interface, a database interface or a standard industrial protocol, if the central processing device is provided with an API interface, a database interface or a standard industrial protocol, the log file collection module is retrieved at a preset fourth frequency to obtain the equipment running data of the equipment monitoring subsystem through the API interface, the database interface or the standard industrial protocol, which is recorded as first equipment running data. If the first equipment running data is incomplete or the central processing device of the equipment monitoring subsystem is not provided with an API interface, a database interface and a standard industrial protocol, and the RPA module detects that the central processing device of the equipment monitoring subsystem is in a Web system in an intranet or an extranet, the RPA module retrieves the crawler collection module at a preset fourth frequency to collect second equipment running data. If the second device operation data is incomplete, or the integrated data of the first device operation data and the second device operation data is incomplete, or the crawler collection module fails to call, and the RPA module detects that the central processing device of the device monitoring subsystem is provided with a page interception interface, the RPA module calls the image collection module to obtain the central control page of the central processing device of the device monitoring subsystem through the page interception interface at a preset fourth frequency, and obtains third device operation data according to the central control page; If the third device operation data is incomplete, or the integrated data of the first device operation data, the second device operation data and the third device operation data is incomplete, or the central processing device of the device monitoring subsystem is not provided with a page interception interface, the RPA module calls the camera closest to the device monitoring screen of the device monitoring subsystem in the image collection module to capture the device monitoring screen, and obtains fourth device operation data according to the image of the device monitoring screen captured by the camera; The first device operation data, the second device operation data, the third device operation data and the fourth device operation data are integrated to obtain device operation data. The device operation data is provided with a fixed format, if any item of the collected device operation data is empty, the device operation data is incomplete, at this time, the crawler collection module or the image collection module is called to collect the missing data in combination with the empty data attribute until there is no any item of the collected device operation parameter that is empty.

2. The multi-system linkage-based device management method according to Claim 1, wherein The device management information includes device static data, device operation data, device work order record and device spare parts inventory.

3. The multi-system linkage-based device management method according to Claim 1, wherein The platform device management information is sent to the device state evaluation model to obtain platform device comprehensive information, specifically: The device state evaluation model includes a device health analysis model, a device fault early warning model, a device life prediction model and a device maintenance monitoring model; The platform device management information is sent to the device health analysis model to obtain a device health value; The platform device management information is sent to the device fault early warning model to obtain a device fault early warning value; The platform device management information is sent to the device life prediction model to obtain a device life value; The platform device management information is sent to the device maintenance monitoring model to obtain a device maintenance early warning value; The device health value, the device fault early warning value, the device life value and the device maintenance early warning value are integrated to obtain platform device comprehensive information.

4. The multi-system linkage-based device management method according to Claim 3, wherein Further comprising: According to the platform device comprehensive information, a device optimization work order is determined, and the device optimization work order is sent to the work order subsystem for maintenance of the device to be optimized.

5. The multi-system linkage-based device management method according to Claim 4, wherein The device optimization work order is determined according to the platform device comprehensive information, specifically: The platform device comprehensive information includes a device health value, a device fault early warning value, a device life value and a device maintenance early warning value; If the device health value is lower than a first threshold value, or the device fault early warning value is higher than a second threshold value, the collected device information is sent to the device fault analysis model to generate a device fault work order; If the equipment life value is lower than a third threshold value, a preventive maintenance work order is generated in combination with the collected equipment information; If the equipment maintenance early warning value is lower than a fourth threshold value, an equipment maintenance work order is generated in combination with the collected equipment information; The equipment failure work order, the preventive maintenance work order or the equipment maintenance work order is sent to a work order subsystem for maintenance of the equipment to be optimized.

6. The multi-system linkage-based device management method according to Claim 5, wherein Further comprising: After the equipment to be optimized is maintained, the equipment management information in the procurement subsystem, the work order subsystem, the warehouse subsystem and the equipment monitoring subsystem is re-collected; The re-collected equipment management information is uniformly processed to obtain updated platform equipment management information; The updated platform equipment management information is sent to an equipment state evaluation model to obtain updated platform equipment comprehensive information.

7. A multi-system linkage-based device management apparatus applied to a device management system, characterized by comprising: The equipment management system comprises a procurement subsystem, a work order subsystem, a warehouse subsystem, an equipment monitoring subsystem and an equipment data collection subsystem, the equipment data collection subsystem is in communication connection with the procurement subsystem, the work order subsystem, the warehouse subsystem and the equipment monitoring subsystem, the equipment data collection subsystem comprises an RPA module, an image collection module, a crawler collection module and a log file collection module, the RPA module calls at least one of the image collection module, the crawler collection module and the log file collection module according to an equipment data collection strategy; the equipment management device comprises: An equipment information collection module for collecting equipment management information in the procurement subsystem, the work order subsystem, the warehouse subsystem and the equipment monitoring subsystem by the RPA module calling at least one of the image collection module, the crawler collection module and the log file collection module according to an equipment data collection strategy; An equipment information integration module for uniformly processing the equipment management information to obtain platform equipment management information; An equipment state evaluation module for sending the platform equipment management information to an equipment state evaluation model to obtain platform equipment comprehensive information; The RPA module collects equipment management information in the procurement subsystem, the work order subsystem, the warehouse subsystem and the equipment monitoring subsystem by calling at least one of the image collection module, the crawler collection module and the log file collection module according to an equipment data collection strategy, specifically: The RPA module calls the image collection module to collect equipment static data of the procurement subsystem at a preset first frequency; The RPA module calls the log file collection module to collect equipment work order records of the work order subsystem at a preset second frequency; The RPA module calls at least one of the crawler collection module, the log file collection module and the image collection module to collect equipment spare parts inventory of the warehouse subsystem at a preset third frequency; The RPA module calls at least one of the crawler collection module, the log file collection module and the image collection module to collect equipment running data of the equipment monitoring subsystem at a preset fourth frequency; The RPA module calls at least one of the crawler collection module, the log file collection module and the image collection module to collect equipment spare parts inventory of the warehouse subsystem at a preset third frequency, specifically: The RPA module detects whether the central processing device of the warehouse subsystem is provided with an API interface, a database interface or a standard industrial protocol. If the central processing device is provided with an API interface, a database interface or a standard industrial protocol, a log file collection module is called at a preset third frequency to obtain the spare parts inventory of the warehouse subsystem through the API interface, the database interface or the standard industrial protocol, which is recorded as first spare parts inventory information. If the first spare parts inventory information is incomplete or the central processing device of the warehouse subsystem is not provided with an API interface, a database interface or a standard industrial protocol, and the RPA module detects that the central processing device of the warehouse subsystem is in a Web system of an intranet or an extranet, the RPA module calls a crawler collection module at a preset third frequency to collect second spare parts inventory information. If the second spare parts inventory information is incomplete, or the integration information of the first spare parts inventory information and the second spare parts inventory information is incomplete, or the crawler collection module fails to be called, and the RPA module detects that the central processing device of the warehouse subsystem is provided with a page interception interface, the RPA module calls an image collection module at a preset third frequency to obtain a central control page of the central processing device of the warehouse subsystem through the page interception interface, and obtains third spare parts inventory information according to the central control page. If the third spare parts inventory information is incomplete, or the integration information of the first spare parts inventory information, the second spare parts inventory information and the third spare parts inventory information is incomplete, or the central processing device of the warehouse subsystem is not provided with a page interception interface, the RPA module calls an image collection module to capture the management device of the warehouse subsystem or all spare parts inventory information in the warehouse subsystem through a camera closest to the warehouse subsystem, and obtains fourth spare parts inventory information according to the image information captured by the camera. The first spare parts inventory information, the second spare parts inventory information, the third spare parts inventory information and the fourth spare parts inventory information are integrated to obtain spare parts inventory. The spare parts inventory is provided with a fixed format. If any data in the collected device inventory information is empty, the device spare parts inventory information is incomplete. At this time, the crawler collection module or the image collection module is called to collect the missing data in combination with the data properties that are empty, until there is no any data that is empty in the collected device spare parts inventory information. The RPA module calls at least one of the crawler collection module, the log file collection module and the image collection module at a preset fourth frequency to collect device running data of the device monitoring subsystem. Specifically, The RPA module detects whether the central processing device of the device monitoring subsystem is provided with an API interface, a database interface or a standard industrial protocol. If the central processing device is provided with an API interface, a database interface or a standard industrial protocol, a log file collection module is called at a preset fourth frequency to obtain the device running data of the device monitoring subsystem through the API interface, the database interface or the standard industrial protocol, which is recorded as first device running data. If the first equipment operation data is incomplete, or the central processing device of the equipment monitoring subsystem is not provided with an API interface, a database interface, and a standard industrial protocol, and the RPA module detects that the central processing device of the equipment monitoring subsystem is in a Web system in an intranet or an extranet, the RPA module calls a crawler collection module to collect second equipment operation data at a preset fourth frequency; If the second equipment operation data is incomplete, or the integrated data of the first equipment operation data and the second equipment operation data is incomplete, or the crawler collection module fails to be called, and the RPA module detects that the central processing device of the equipment monitoring subsystem is provided with a page interception interface, the RPA module calls an image collection module to obtain a central control page of the central processing device of the equipment monitoring subsystem through the page interception interface at a preset fourth frequency, and obtains third equipment operation data according to the central control page; If the third equipment operation data is incomplete, or the integrated data of the first equipment operation data, the second equipment operation data, and the third equipment operation data is incomplete, or the central processing device of the equipment monitoring subsystem is not provided with a page interception interface, the RPA module calls a camera closest to an equipment monitoring screen of the equipment monitoring subsystem in the image collection module to capture the equipment monitoring screen, and obtains fourth equipment operation data according to the image of the equipment monitoring screen captured by the camera. The first equipment operation data, the second equipment operation data, the third equipment operation data, and the fourth equipment operation data are integrated to obtain equipment operation data. The equipment operation data is provided with a fixed format, if any data in the collected equipment operation data is empty, the equipment operation data is incomplete, at this time, the missing data is collected by calling the crawler collection module or the image collection module in combination with the data attribute that is empty, until there is no any data empty in the collected equipment operation parameter.

8. A computer-readable storage medium having stored thereon a computer program, characterized in that, The computer program is executed by the processor to realize the steps of the equipment management method based on multi-system linkage in any one of claims 1-6. 9.A computer device, comprising a memory and a processor, wherein the memory stores a computer program, and the computer device is configured to perform the method according to any one of claims 1-8 when the computer program is executed by the processor. The processor executes the computer program to execute the equipment management method based on multi-system linkage in any one of claims 1-6.

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