General EMO circuit for semiconductor
The general-purpose EMO circuit for semiconductors, through modular design and hierarchical protection mechanism, solves the problem of chaotic hardware integration in traditional wiring methods, reduces failure rate and improves fault location efficiency, and meets the high safety requirements of semiconductor equipment.
Patent Information
- Application Number
- CN202511061972.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-31
- Publication Date
- 2025-11-04
AI Technical Summary
The wiring of emergency stop circuits in traditional semiconductor equipment is complex and can easily lead to chaotic hardware integration, resulting in a high probability of failure and low efficiency in troubleshooting.
The modular semiconductor general-purpose EMO circuit includes a control unit and a signal acquisition unit. It uses two-stage series-connected Pilz safety relays and an emergency stop button, and achieves graded protection and automatic fault cut-off through signal processing circuitry.
It reduces the probability of failures caused by wiring errors and hardware integration chaos, improves fault location efficiency, and meets the high safety requirements of semiconductor equipment.
Smart Images
Figure CN120896088A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of semiconductor, in particular to a kind of semiconductor general EMO circuit. BACKGROUND
[0002] In the field of semiconductor equipment, the traditional emergency stop (EMO) circuit is mostly realized by wiring using terminal block, safety relay, EMO button and smoke sensor.
[0003] This traditional wiring mode has obvious technical difficulties:
[0004] The wiring is complex during equipment production, and traditional wiring needs to be connected manually point by point to hundreds of nodes. 24V control signal and 220V strong current loop are mixed, which leads to chaotic hardware integration, and is easy to cause problems such as polarity reverse connection, cable mismatch, etc. Once a problem occurs, it needs to be disassembled layer by layer to detect the terminal block, which seriously affects the production efficiency. SUMMARY
[0005] The purpose of the present application is to improve the problem of high failure probability caused by chaotic hardware integration in the prior art.
[0006] To achieve the above purpose, the technical scheme adopted by the present application is as follows: a kind of semiconductor general EMO circuit, comprising a control unit and a signal acquisition unit.
[0007] The signal acquisition unit includes an emergency stop button, the control unit includes a main contactor, and at least two levels of safety relays in series, the emergency stop button is connected in series in the power supply circuit of the first level safety relay and the second level safety relay.
[0008] The second level safety relay and the main contactor are connected in series and connected to the power supply circuit. When the second level safety relay is attracted, the main contactor power supply circuit is turned on, and the auxiliary contact of the main contactor is attracted to control the strong current supply of the electrical components in the semiconductor equipment.
[0009] The signal acquisition unit also includes a state control button, and the state control button includes a first button for connecting with the first level safety relay and a second button for connecting with the second level safety relay.
[0010] The signal processing circuit of the control unit is connected with the environment monitoring sensor interface, the equipment state monitoring interface and the power supply circuit of the first and second level safety relays respectively. When the environment monitoring sensor interface or the equipment state monitoring interface feedbacks abnormity, the signal processing circuit outputs low level signal to cut off the power supply circuit of the first or second level safety relay.
[0011] When the emergency stop button is triggered, or the signal processing circuit detects an abnormal signal, the first or second level safety relay is powered off, disconnecting the main contactor power supply loop to cut off the strong current loop.
[0012] The two-level safety relay is two Pyle safety relays, i.e., the first level safety relay and the second level safety relay form the core element of hierarchical control
[0013] The emergency stop button of the signal acquisition unit in the scheme is connected in series in the power supply loop of the two-level safety relay, directly affecting the power supply of the first level safety relay when triggered, and the first button and the second button in the state control button control the attraction of the first level and the second level safety relay, respectively, the signal processing circuit of the control unit receives the signals of the environmental monitoring sensor interface and the equipment state monitoring interface in real time, and outputs a low level to cut off the power supply of the safety relay if an abnormal feedback is received, the two-level safety relay is connected in series to form hierarchical control, the first level controls the power supply of the second level, and the second level controls the power supply of the main contactor, and in normal operation, the second level safety relay is attracted to connect the main contactor power supply loop, and the strong current supply is controlled through the auxiliary contact of the main contactor, and in an abnormal state, the safety relay is powered off to disconnect the main contactor power supply loop, thereby achieving strong current cut-off.
[0014] The beneficial effects of the present application are: through the modular design of the control unit and the signal acquisition unit, the traditional terminal row wiring is replaced, the probability of wrong connection is greatly reduced, and the installation, debugging and later maintenance are facilitated, the probability of failure caused by hardware integration confusion is reduced, and the linkage of the signal processing circuit and the sensor interface can accurately locate the abnormal signal to a specific sensor, compared with the full loop checking in the traditional wiring mode, the fault positioning efficiency is improved, and the problem of high probability of failure caused by hardware integration confusion in the traditional wiring mode in the prior art is solved.
[0015] In addition, the hierarchical protection mechanism of the two-level safety relay in series and the series design of the emergency stop button make the semiconductor equipment have "buffered" abnormal detection before use, the power supply loop can be cut off layer by layer in an abnormal state, and "one-key emergency stop" is realized, and the automatic protection function of the signal processing circuit can meet the high safety requirement of the semiconductor equipment.
[0016] Further, in the embodiment of the present application, the two-level safety relay is a Pyle safety relay, the normally open contact of the first level safety relay controls the power supply loop of the second level safety relay, and the normally open contact of the second level safety relay controls the power supply loop of the main contactor, forming a hierarchical protection mechanism.
[0017] Further, in the embodiment of the present application, the emergency stop button is a red stop button, and the normally closed contact thereof is connected in series in the power supply loop of the first level safety relay, and when triggered, the power supply loop is cut off.
[0018] Further, in the embodiment of the present application, the first button is an orange lighted button, and the second button is a green lighted button.
[0019] The orange lighted button comprises a button body and an internal orange indicator light, and the green lighted button comprises a button body and an internal green indicator light.
[0020] The contact of the orange lighted button is connected in series with the power supply circuit of the first level safety relay, and the contact of the green lighted button is connected in series with the power supply circuit of the second level safety relay, and the internal indicator light is connected in parallel with the contact of the corresponding button.
[0021] Further, in the embodiment of the present application, the signal acquisition unit further comprises a function expansion interface for connecting an expansion module.
[0022] Further, in the embodiment of the present application, the control unit further comprises a redundant protection relay connected in series with the power supply circuit of the first level safety relay and the second level safety relay.
[0023] Further, in the embodiment of the present application, the signal processing circuit is connected with an environment monitoring sensor interface, including but not limited to a smoke sensor interface and a temperature sensor interface, for receiving an environment signal fed back by an environment monitoring sensor.
[0024] The signal processing circuit is connected with a device state monitoring interface, including but not limited to a current sensor interface and a voltage sensor interface, for receiving a semiconductor device operation signal fed back by a device state monitoring sensor.
[0025] Further, in the embodiment of the present application, the device state monitoring interface comprises a door switch sensor interface for transmitting a box door closed signal of a semiconductor device, outputting a high level signal when the box door is closed, and outputting a low level signal when the box door is opened to cut off the power supply circuit of the first level safety relay or the second level safety relay, thereby cutting off the power supply circuit of the main contactor.
[0026] Further, in the embodiment of the present application, the device state monitoring interface comprises a door interlock bypass interface.
[0027] Further, in the embodiment of the present application, the control unit and the signal acquisition unit adopt a PCB mounting form, the control unit is provided with a plug or a socket for connecting a direct current power supply and a control signal, a diode for overvoltage protection, and a capacitor for filtering and stabilizing voltage. BRIEF DESCRIPTION OF DRAWINGS
[0028] Figure 1 The flow chart of the semiconductor universal EMO circuit in the embodiment of the present application.
[0029] Figure 2 The figure is a principle diagram of the main EMO board in the semiconductor general EMO circuit of the embodiment of the present application.
[0030] Figure 3 The figure is a principle diagram of the main EMO board in the semiconductor general EMO circuit of the embodiment of the present application.
[0031] Figure 4 The figure is a principle diagram of the main EMO board in the semiconductor general EMO circuit of the embodiment of the present application. DETAILED DESCRIPTION
[0032] In order to make the purpose, technical scheme of the present application clear, complete and the advantages more clear and obvious, the following will be further described in detail in combination with the drawings. It should be understood that the specific embodiments described herein are part of the embodiments of the present application, not all embodiments, and are only used to explain the embodiments of the present application, and do not limit the embodiments of the present application. All other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.
[0033] In the description of the present application, it should be noted that the terms "center", "middle", "upper", "lower", "left", "right", "inner", "outer", "top", "bottom", "side", "vertical", "horizontal" and the like indicate the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation of the present application. In addition, the terms "one", "first", "second", "third", "fourth", "fifth", "sixth" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance.
[0034] In the description of the present application, it should be noted that unless otherwise specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral connection; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0035] For the purpose of simplicity and illustration, the principles of the embodiments are described mainly by referring to examples. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the embodiments. It will be apparent, however, to one ordinarily skilled in the art that the embodiments can be practiced without the specific details and that numerous implementation choices may be made. In some instances, well-known structures utilized in semiconductor general EMO circuits are not described in detail in order to avoid unnecessarily obscuring the embodiments. In addition, all embodiments can be used in conjunction with each other.
[0036] Embodiment 1:
[0037] It should be noted that the drawings of the specification should be understood as part of the content of the specification, and the structural shapes, connection relationships, fitting relationships, and positional relationships that can be unambiguously obtained from the drawings should be understood as part of the content of the specification.
[0038] A semiconductor general EMO circuit, as shown in Figure 1 , Figure 2 , Figure 3 , includes a control unit and a signal acquisition unit. The control unit of the semiconductor general EMO circuit includes a main EMO board, and the signal acquisition unit includes a secondary EMO board.
[0039] The main EMO board and the secondary EMO board are in the form of PCB installation, and the two PCBs can be installed at any position. Generally, the main EMO board is installed on the first floor of the factory building, and the secondary EMO board is installed on the second floor of the factory building. The use of the PCB mode not only greatly reduces the wiring time, but also improves the correctness of the wiring. More importantly, the secondary EMO board has an expansion plug, which can be combined with an expansion EMO board to be installed and combined at will according to actual needs, which provides great convenience for later maintenance and upgrading. In theory, through this way, an unlimited number of EMOs can be expanded, which is particularly suitable for dangerous operation occasions with linkage relationship between multiple machines and multiple EMOs, and fully embodies the flexibility and scalability of the circuit design.
[0040] The main EMO board serves as the logic control core of the entire circuit, and integrates at least two levels of safety relays (SR1, SR2), main contactors (MH1, MH2), and various signal interfaces.
[0041] In terms of signal interfaces of the main EMO board, the KF2EDGVM series socket is used to access 24V DC power supply and transmit control signals, and the interface of the second level safety relay SR2 with the model LZ4XV-3.5-210P is used to connect the AC cabinet door switch, control the cabinet door switch, and monitor the state of the semiconductor equipment.
[0042] The auxiliary EMO board is installed on the operating panel or the semiconductor device in a conspicuous position, and the extension plug J1 is short-circuited at pins 1-3, 2-4 and 7-8 without expansion requirement to maintain the circuit passage.
[0043] The second level safety relay SR2 is connected in series with the main contactor (MH1, MH2) and then connected to the power supply circuit. When the second level safety relay SR2 is attracted, the main contactor (MH1, MH2) is turned on to supply the power supply circuit, and the auxiliary contact of the main contactor (MH1, MH2) is attracted to control the supply of strong current to the electrical components in the semiconductor device.
[0044] Specifically, the main contactor (MH1, MH2) has a rated voltage of 24V DC and is used to control the on-off of the strong current circuit (AC power input interface CN1). The auxiliary contact (model P7SA-10P) of the main contactor is used to feed back the state of the main contactor and transmit it to the status indicator lamp or the monitoring system. The main contactor is used to turn on 220V AC to drive the electrical components of the semiconductor device.
[0045] Specifically, the two level safety relays are two Pyle safety relays, i.e., the first level safety relay SR1 and the second level safety relay SR2 form the core elements of the hierarchical control. The normally open contact of the first level safety relay SR1 controls the power supply circuit of the second level safety relay SR2, and the normally open contact of the second level safety relay SR2 controls the power supply circuit of the main contactor (MH1, MH2), forming a hierarchical protection mechanism to ensure that only when both the two level safety relays (SR1, SR2) are normally attracted can the 220V strong current be turned on.
[0046] The signal acquisition unit also includes a state control button integrated in the auxiliary EMO board. The state control button includes a first button for connecting with the first level safety relay and a second button for connecting with the second level safety relay.
[0047] Specifically, the first button is an orange light button, and the second button is a green light button. The orange light button is used to trigger the safety relay logic. When pressed, its contact is turned on and the internal indicator light is lit. The normally closed contact of the red stop button is connected in series in the power supply circuit of the two level safety relays. When pressed, the circuit is immediately cut off, and a waterproof and dustproof design is adopted. The green light button is used to activate the power-on of the main contactor. When pressed, a signal is sent to the main EMO board and the indicator light is lit.
[0048] The signal processing circuit of the main EMO board of the control unit is connected with the environmental monitoring sensor interface (CN2) of the auxiliary EMO board, the status control button interface (CN3) of the auxiliary EMO board, and the main contactor (MH1, MH2) of the auxiliary EMO board. Figure 2 、 Figure 3 and Figure 4The shown smoke interface, EMO interface, device state monitoring interface (the device state monitoring interface can be configured in the second level safety relay SR2 of model LZ4XV-3.5-210P) and the power supply loop connection of the first and second level safety relays (SR1, SR2), when the environmental monitoring sensor interface or the device state monitoring interface feeds back an abnormality, the signal processing circuit outputs a low-level signal to cut off the power supply loop of the first or second level safety relay (SR1, SR2).
[0049] Specifically, the EMO interface refers to the EMO1 and EMO2 interfaces of the main EMO board and the EMO1-5 interface of the auxiliary EMO board, and the EMO interface is generally provided with an EMO button, and the EMO button more refers to the button of the machine.
[0050] The smoke interface refers to the smoke1-2 interface of the main EMO board and the smoke1-4 interface of the auxiliary EMO board, and the smoke interface is generally provided with a smoke sensor.
[0051] Specifically, the J11 of the main EMO board is plugged into the J10 of the auxiliary EMO board, and the J1 of the main EMO board is plugged into the J3 of the auxiliary EMO board to receive the signals of the buttons on the EMO interface and the smoke sensor on the smoke1-4 interface.
[0052] Specifically, the input of the first level safety relay SR1 is the normally closed contact of the state control button connected in series with it, and when all the EMO interfaces are normal, that is, the normally closed contacts are in the closed state, the input of the first level safety relay SR1 meets the condition. At this time, the first button connected to the auxiliary EMO board, that is, the orange button with a lamp, is pressed, and the three contacts of the first level safety relay SR1 can be closed. The first contact is connected to the orange lamp, and when the contact is closed, the orange lamp is lit, indicating that the circuit is powered on; the second contact is connected to the PLC to collect signals and transmit the working state signals of the circuit to the PLC control system; the third contact is connected to the coil of the second level safety relay SR2 through the emergency stop button, that is, the red stop button (normally closed) to supply power.
[0053] The input of the second level safety relay SR2 can be simply understood as that all the environmental monitoring interfaces (the smoke1-2 of the main EMO board and the smoke1-4 of the auxiliary EMO board are generally provided with a smoke sensor) are normal, and when the smoke sensor is abnormal, the normally closed contact will be disconnected.
[0054] When the emergency stop button is triggered or the signal processing circuit detects an abnormal signal, the first or second level safety relay (SR1, SR2) is powered off, the power supply loop of the main contactor (MH1, MH2) is disconnected, and the strong current loop is cut off.
[0055] Before power on, the main and auxiliary EMO boards should be strictly checked for whether the plug-in interface is firm, and the tool is used to check whether the cable is short-circuited or open-circuited, and it is confirmed that the short-circuit state of the auxiliary EMO board expansion plug is correct. At this time, all the devices connected to the EMO interface should be in a normal state, that is, the EMO related buttons are not triggered, and the normally closed contact remains closed. When the smoke sensor is normal, the normally closed contact conducts 24V power supply to the first stage safety relay, but the door switch should be in a closed state or bypassed through the door interlock bypass interface Bypass to ensure that the door interlock signal path is normal.
[0056] The emergency stop button of the signal acquisition unit of the scheme is connected in series in the power supply circuit of the two-stage safety relay, and directly affects the power supply of the first stage safety relay when triggered. The first button and the second button in the state control button control the attraction of the first stage and the second stage safety relay respectively. The signal processing circuit of the control unit receives the signals of the environmental monitoring sensor interface and the device state monitoring interface in real time. If the feedback is abnormal, a low-level signal is output to cut off the power supply of the safety relay. The two-stage safety relay is connected in series to form a hierarchical control, the first stage controls the power supply of the second stage, and the second stage controls the power supply of the main contactor. When working normally, the second stage safety relay is attracted to connect the power supply circuit of the main contactor, and the main contactor auxiliary contact controls the power supply of the strong current. When abnormal, the safety relay is powered off to disconnect the power supply circuit of the main contactor, and the strong current is cut off.
[0057] In the working step, the main EMO board and the auxiliary EMO board are plugged in by default. Specifically, J11 of the main EMO board is plugged into J10 of the auxiliary EMO board, and J1 of the main EMO board is plugged into J3 of the auxiliary EMO board. Through these plug-in interfaces, a 24V power supply, a 0V common terminal and a signal transmission path are formed, so that the main and auxiliary boards can supply power and transmit signals to each other and work cooperatively.
[0058] The 24V power supply is connected through the KF2EDGVM-3.81-4P socket on the main EMO board, filtered and stabilized by the SMBJ28 diode and the 0.1 μF capacitor on the main EMO board, and directly connected to the positive pole of the coil of the first stage safety relay SR1. The negative pole of the coil of the first stage safety relay SR1 forms a loop through the 0VUp common terminal, and the orange indicator light is on, directly prompting the operator that the orange button with light has been activated.
[0059] The other way of the 24V power supply is supplied to the auxiliary EMO board through the KF2EDGSVMG-3.81-8P(J1) interface after passing through Smoke1 and Smoke2 on the main EMO board. The smoke sensor of the Smoke1-4 interface of the auxiliary EMO board does not detect smoke, and the output end is connected to the 24VUp. The signals of the door switch DoorSW1 and DoorSW2 interface are conducted due to the closing of the box door and transmit high-level signals to the signal processing circuit of the main EMO board. At this time, the semiconductor device enters an initial standby state.
[0060] The operator presses the orange light button of the auxiliary EMO board, the internal contact of the button changes from off to on, the indicator light is on, and the 24VUp power flows into the first level safety relay SR1 of the main EMO board through the contact of the orange light button of the auxiliary EMO board, and the first level safety relay SR1 is energized and attracted, and the normally open contact is closed to provide a path for the power supply circuit of the second level safety relay SR2, and the semiconductor device is still in standby state.
[0061] Then, the operator presses the green light button of the auxiliary EMO board, the contact of the button is on and the indicator light is on, and the 24VUp power flows into the second level safety relay SR2 through the contact of the green light button of the auxiliary EMO board, and the second level safety relay SR2 is energized and attracted, and the normally open contact is closed to connect the power supply circuit of the main contactor (MH1, MH2), and the 24VUp power drives the main contactor to be attracted, and after the main contact is closed, the 220V alternating current is connected to the electrical components of the semiconductor device such as the AC cabinet and the control cabinet, and the normal power-on is completed, and at the same time, the auxiliary contact of the main contactor acts to output a 24V signal to the EMOTriggered interface of the main EMO board, and the indicator light is on to indicate that the semiconductor device is in a safe working state.
[0062] When the operator finds that the semiconductor device is abnormal and presses the red stop button of the auxiliary EMO board or the button of any EMO interface, the normally closed contact of the red stop button is disconnected or the button signal of the EMO interface is transmitted to the main EMO board, the power supply circuit of the first level safety relay of the main EMO board is cut off, the second level relay is de-energized and released, the normally open contact is disconnected, the main contactor is de-energized, the 220V strong current is cut off, and the semiconductor device is emergency stopped.
[0063] If the smoke sensor of the Smoke1-4 interface of the auxiliary EMO board detects smoke, the output end of the Smoke1-4 interface changes from on to off, and outputs a low level signal to the signal processing circuit of the main EMO board, and then cuts off the power supply circuit of the first level safety relay, and the second level safety relay and the main contactor are de-energized in turn, and the strong current circuit is disconnected.
[0064] If the doors of the AC cabinet, the control cabinet and the like are opened, the DoorSW1-2 interface signal changes from on to off, and transmits a low level signal to the main EMO board, and the two level safety relays of the main EMO board are de-energized to cut off the power supply circuit of the main contactor, and if the operator enables the door interlock bypass of the auxiliary EMO board, the door opening signal is bypassed, and the semiconductor device can continue to run, but the main EMO board can issue an audible and visual alarm to prompt the risk.
[0065] If the first level or second level safety relay has contact sticking, the OMRON safety relay HF115F / 024-2ZS4 of the main EMO board detects the abnormal power supply state, and its internal logic triggers to cut off the safety relay control circuit, and forcibly de-energizes the main contactor to prevent the semiconductor device from being mis-powered.
[0066] The advantage of the present application is that, through the modular design of the control unit and the signal acquisition unit, instead of the traditional terminal row wiring, the installation worker only needs to plug in the corresponding EMO button, greatly reducing the probability of misconnection, and facilitating installation, debugging and later maintenance, reducing the probability of failure caused by hardware integration chaos, and the linkage of the signal processing circuit and the sensor interface can accurately locate the abnormal signal to the specific sensor, compared with the full loop troubleshooting in the traditional wiring method, the fault positioning efficiency is improved, and the problem of high failure probability caused by hardware integration chaos in the traditional wiring method in the prior art is improved.
[0067] In addition, the hierarchical protection mechanism of the two-stage safety relay in series and the series design of the emergency stop button make the semiconductor equipment have "buffered" abnormal detection before use, which can cut off the power supply circuit layer by layer when an abnormality occurs, realize "one-key emergency stop", and cooperate with the automatic protection function of the signal processing circuit to meet the high safety requirement of the semiconductor equipment.
[0068] Specifically, the orange light button includes a button body and an internal orange indicator light, and the green light button includes a button body and an internal green indicator light.
[0069] The contact of the orange light button is connected in series with the power supply circuit of the first-stage safety relay, and the contact of the green light button is connected in series with the power supply circuit of the second-stage safety relay, and the internal indicator light is connected in parallel with the contact of the corresponding button.
[0070] Specifically, the control unit further includes a redundant protection relay connected in series in the power supply circuit of the first-stage safety relay and the second-stage safety relay. The redundant protection relay is an Omron safety relay (HF115F / 024-2ZS4), which is connected in series in the power supply circuit of the two-stage safety relays as a redundant protection element, and can cut off the power supply circuit to prevent abnormal power-on of the semiconductor equipment when the PIRZ safety relay, i.e. the two-stage safety relays, has a contact sticking fault.
[0071] Specifically, the signal processing circuit connected environmental monitoring sensor interface includes but is not limited to a smoke sensor interface and a temperature sensor interface for receiving environmental signals fed back by environmental monitoring sensors.
[0072] More specifically, the device state monitoring interface includes the above-mentioned DoorSW1-2 interface, which is a door switch sensor interface for transmitting a box door closed signal of the semiconductor equipment. When the box door is closed, a high-level signal is transmitted, and when the box door is opened, a low-level signal is output to cut off the power supply circuit of the first-stage or second-stage safety relay, thereby disconnecting the power supply circuit of the main contactor.
[0073] More specifically, the equipment state monitoring interface can further include a door interlock bypass interface Bypass for temporarily bypassing the door switch sensor detection and triggering an audible and visual alarm.
[0074] When the door interlock bypass interface Bypass is not enabled, the door switch sensor closure turns on the signal, and the door switch sensor opening turns off the signal to shut down the equipment; if the door interlock bypass interface Bypass is enabled, the main EMO board will trigger an alarm at this time, but the semiconductor equipment can continue to operate.
[0075] Specifically, the control unit and the signal acquisition unit adopt a PCB mounting form, the control unit is provided with a plug or socket for accessing a direct current power supply and a control signal, and a diode for overvoltage protection and a capacitor for filtering and stabilizing voltage.
[0076] Specifically, the base integrated on the main EMO board can be inserted into the safety relay SR3 in series between the door switch DoorSW1 / 2 or the door interlock bypass interface Bypass and the second stage safety relay SR2, the coil power supply interface of which is "24VUp" and "0VUp", and the input signal comes from the door switch or the door interlock bypass interface Bypass signal. When the door switch is closed or the bypass is turned on, the coil of the base-insertable safety relay SR3 obtains 24V power supply, and the internal normally open contact is closed to provide a path for the subsequent circuit (such as the main contactor coil). The base-insertable safety relay SR3 is the last stage relay of the EMO safety circuit, and its action state directly affects whether the strong current of the equipment is turned on, which is a key link of "safety condition verification".
[0077] Embodiment 2:
[0078] A semiconductor general-purpose EMO circuit, as shown in Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 The signal acquisition unit includes a function expansion interface for connecting an expansion module for expanding the EMO board, and the function expansion interface is provided with an expansion plug J1 for the secondary EMO board. The semiconductor general-purpose EMO circuit of this embodiment has the same characteristics and technical effects as the semiconductor general-purpose EMO circuit of embodiment 1.
[0079] The expansion EMO board is an optional module for expanding the safety signal acquisition point, and is suitable for multiple machines, multiple area dangerous operation scenes. The signal is transmitted through the ZX-5557-4,2-2-4PZZ interface, and the G6K-2F-Y-TRDC24 relay on the board is used to amplify the expansion signal to ensure the stability of long-distance transmission, and the door interlock bypass interface Bypass cooperates with the secondary EMO board to support multi-area bypass operation.
[0080] The KF2EDGSVMG3.5-2*2P expansion plug of the auxiliary EMO board can be connected to the ZX-5557 interface of the expansion EMO board through a shielded cable, the shielded layer of the cable is grounded to reduce electromagnetic interference, the 24V power supply of the expansion board is transmitted by the auxiliary EMO board through the same cable, and the G6K-2F-Y-TRDC24 relay is powered and attracted. The normally closed contact of the EMO1-3 button of the expansion board is connected in series with the red stop button of the auxiliary EMO board in the power supply loop of the first stage safety relay of the main EMO board, forming an "or" logic, and either button pressed can cut off the loop.
[0081] The working state is that J11 of the main EMO board is plugged into J10 of the auxiliary EMO board, J1 of the main EMO board is plugged into J3 of the auxiliary EMO board, the plug J1 of the auxiliary EMO board is plugged into the J3 plug of the expansion EMO board, and the normally closed contact of the EMO button connected to the machine button of the auxiliary EMO interface is connected in series with the normally closed contact of the EMO button connected to all expansion board EMO interfaces; the smoke sensor signal loop is connected in series by the normally closed contact of the smoke sensor connected to the EMO interface of the main EMO board, the auxiliary EMO board and the expansion EMO board. Through these plug-in interfaces, 24V power supply, 0V common terminal and signal transmission path are formed to realize cooperative work.
[0082] The 24V power supply is connected to the KF2EDGVM-3.81-4P socket on the main EMO board, filtered and stabilized by the SMBJ28 diode and 0.1 μF capacitor on the main EMO board, and connected to the positive electrode of the coil of the first stage safety relay SR1. The negative electrode of the coil of the first stage safety relay SR1 forms a loop through the 0VUp common terminal, and the orange indicator light is on, directly prompting the operator that the orange button with light has been activated.
[0083] The other way of 24V power supply signal passes through Smoke1 and Smoke2 on the main EMO board, and then passes through the KF2EDGSVMG-3.81-8P interface to supply power to the auxiliary EMO board and the expansion EMO board. At this time, when the smoke sensor of the Smoke interface does not detect smoke, the Smoke interface is turned on, and the output 24V power supply and the 0VUP of the Omron safety relay HF115F / 024-2ZS4 form a loop. The smoke sensor interface of the EMO1-3 interface and the Smoke1-3 interface of the expansion EMO board is not abnormal, the signal is transmitted to the auxiliary EMO board through the ZX-5557 interface and then aggregated to the main EMO board, and the door switch (DoorSW1-2) signal interface is turned on and transmits a high-level signal to the signal processing circuit of the main EMO board due to the closure of the box door. At this time, the semiconductor device enters the initial standby state.
[0084] The operator presses the orange light button of the secondary EMO board, the internal contact of the button changes from off to on, the indicator light is on, and the 24VUp power flows into the first level safety relay SR1 of the primary EMO board through the contact of the orange light button of the secondary EMO board, and the first level safety relay SR1 is energized and attracted, the normally open contact is closed, and a path is provided for the power supply circuit of the second level safety relay SR2, and the semiconductor device is still in the standby state. At this time, the buttons of all EMO interfaces are normal, and when a button of a certain EMO interface is pressed, the first level safety relay SR1 is de-energized.
[0085] Then, the operator presses the green light button of the secondary EMO board, the contact is on and the indicator light is on, and the 24VUp power flows into the second level safety relay SR2 through the contact of the green light button of the secondary EMO board, and the second level safety relay SR2 is energized and attracted, the normally open contact is closed, and the power supply circuit of the main contactor (MH1, MH2) is connected, the 24VUp power drives the main contactor to be attracted, and after the main contact is closed, the 220V alternating current is connected to the electrical components of the semiconductor device such as the AC cabinet and the control cabinet, and the normal power-on is completed, and at the same time, the auxiliary contact of the main contactor acts, outputs a 24V signal to the EMOTriggered interface of the primary EMO board, and the indicator light is on to indicate that the semiconductor device is in a safe working state.
[0086] When the operator finds that the semiconductor device is abnormal and presses the red stop button of the secondary EMO board or any EMO button of the expansion EMO board, the normally closed contact of the red stop button of the secondary EMO board is disconnected or the signal of the EMO button of the expansion board is transmitted to the primary EMO board through the ZX-5557 interface and the secondary EMO board, the power supply circuit of the first level safety relay of the primary EMO board is cut off, and then the second level safety relay is released due to the loss of power supply, the main contactor loses power, the 220V strong current is cut off, and the semiconductor device is shut down urgently.
[0087] If the smoke sensor of the secondary EMO board Smoke1-4 or the expansion board Smoke1-3 interface detects smoke, the output end changes from on to off, outputs a low level to the signal processing circuit of the primary EMO board, and then cuts off the power supply circuit of the first level safety relay, and the second level safety relay and the main contactor are sequentially de-energized, the strong current circuit is disconnected, and at the same time, the primary EMO board triggers the audible and light alarm.
[0088] If the door of the AC cabinet, the control cabinet and the like is opened, the DoorSW1-2 interface signal changes from on to off, and transmits a low level signal to the primary EMO board, the two level safety relays of the primary EMO board lose power, the power supply circuit of the main contactor is cut off, and if the operator enables the door interlock bypass of the secondary EMO board, the door opening signal is bypassed, and the semiconductor device can continue to run, but the primary EMO board can issue an audible and light alarm to prompt the risk.
[0089] If the first or second level safety relay has a contact sticking, the Omron safety relay HF115F / 024-2ZS4 of the main EMO board detects an abnormal power supply state, triggers the internal logic, cuts off the safety relay control loop, and forces the main contactor to lose power, preventing the semiconductor device from being powered on by mistake.
[0090] Specifically, the sensors of the Smoke interface of the expansion board are connected in series with the sensors of the Smoke interface of the secondary EMO board to the signal processing circuit of the main EMO board, forming an "and" logic, that is, any sensor detecting smoke (contact opening) will cause the signal to be interrupted, triggering the protection action of cutting off the power supply circuit of the Pyle safety relay. Taking the multi-machine scene of a semiconductor production line as an example, the main EMO board and the secondary EMO board can be installed at any position. Usually, the main EMO board is installed in the central control cabinet on the first floor of the factory building, and the secondary EMO board is installed in the operating area on the second floor of the factory building. The expansion board is installed near each machine. When the EMO button of the expansion board near a certain machine is pressed, the signal is transmitted to the secondary EMO board and then to the main EMO board through the shielded cable, cutting off the power of all machines, realizing regional linkage shutdown, and preventing fault propagation.
[0091] Specifically, intermittent shutdown of semiconductor equipment caused by poor door switch contact can be improved by connecting double-contact door switches in series; when the expansion EMO board signal attenuates, the G6K-2F-Y-TR relay can amplify the signal to ensure stable transmission.
[0092] Specifically, the EMO circuit adopts a PCB installation form, which reduces the error rate of traditional terminal block wiring, and the two-stage safety relay and the redundant Omron safety relay form a triple protection, meeting the SEMIS2 safety standard and satisfying the SIL2 safety integrity level. The expansion interface of the secondary EMO board supports theoretically unlimited EMO expansion, especially suitable for dangerous operation occasions with multiple machines and multiple EMO configurations that have linkage relationships. The modular design allows flexible adjustment of the installation position, and the shielding cable and electrical isolation design enhance the anti-interference ability, making it suitable for the complex environment of a semiconductor plant.
[0093] Although the above describes the specific embodiments of the present application in detail, so that those skilled in the art can understand the present application, the present application is not limited to the scope of the specific embodiments, and for those skilled in the art, as long as various changes are within the spirit and scope of the present application defined and determined by the appended claims, all inventions utilizing the concept of the present application are within the scope of protection.
Claims
1. A general-purpose semiconductor EMO circuit, characterized in that, Includes a control unit and a signal acquisition unit; The signal acquisition unit includes an emergency stop button, the control unit includes a main contactor, and includes at least two safety relays connected in series. The emergency stop button is connected in series in the power supply circuit of the first-level safety relay and the second-level safety relay. The second-stage safety relay is connected in series with the main contactor and then connected to the power supply circuit. When the second-stage safety relay is energized, the power supply circuit of the main contactor is turned on, and the power supply to the electrical components in the semiconductor device is controlled by the energization of the auxiliary contacts of the main contactor. The signal acquisition unit also includes a status control button, which includes a first button for connecting to a first-level safety relay and a second button for connecting to a second-level safety relay. The signal processing circuit of the control unit is connected to the environmental monitoring sensor interface, the equipment status monitoring interface, and the power supply circuit of the first and second level safety relays, respectively. When the environmental monitoring sensor interface or the equipment status monitoring interface reports an abnormality, the signal processing circuit outputs a low-level signal to cut off the power supply circuit of the first or second level safety relay. When the emergency stop button is triggered, or the signal processing circuit detects an abnormal signal, the first or second level safety relay is de-energized, disconnecting the main contactor power supply circuit to cut off the high-voltage circuit.
2. The general-purpose semiconductor EMO circuit according to claim 1, characterized in that, The two-stage safety relays are Pilz safety relays. The normally open contact of the first-stage safety relay controls the power supply circuit of the second-stage safety relay, and the normally open contact of the second-stage safety relay controls the power supply circuit of the main contactor, forming a graded protection mechanism.
3. The general-purpose semiconductor EMO circuit according to claim 1, characterized in that, The emergency stop button is a red normally closed button, and its normally closed contact is connected in series in the power supply circuit of the first-stage safety relay, cutting off the power supply circuit when triggered.
4. The general-purpose semiconductor EMO circuit according to claim 1, characterized in that, The first button is an orange illuminated button, and the second button is a green illuminated button; The orange illuminated button includes a button body and a built-in orange indicator light; the green illuminated button includes a button body and a built-in green indicator light. The contacts of the orange illuminated button are connected in series with the power supply circuit of the first-level safety relay, the contacts of the green illuminated button are connected in series with the power supply circuit of the second-level safety relay, and the built-in indicator light is connected in parallel with the contacts of the corresponding button.
5. The general-purpose semiconductor EMO circuit according to claim 1, characterized in that, The signal acquisition unit also includes a function expansion interface, which is used to connect to an expansion module.
6. The general-purpose semiconductor EMO circuit according to claim 1, characterized in that, The control unit also includes a redundant protection relay, which is connected in series in the power supply circuit of the first-level safety relay and the second-level safety relay.
7. The general-purpose semiconductor EMO circuit according to claim 1, characterized in that, The environmental monitoring sensor interface connected to the signal processing circuit includes, but is not limited to, a smoke sensor interface and a temperature sensor interface, for receiving environmental signals fed back by the environmental monitoring sensor. The signal processing circuit is connected to a device status monitoring interface, including but not limited to a current sensor interface and a voltage sensor interface, for receiving semiconductor device operation signals fed back by the device status monitoring sensors.
8. The general-purpose semiconductor EMO circuit according to claim 7, characterized in that, The equipment status monitoring interface includes a door switch sensor interface, which is used to transmit the door closure signal of the semiconductor equipment. When the door is closed, a high-level signal is transmitted, and when the door is open, a low-level signal is output to cut off the power supply circuit of the first or second level safety relay, thereby disconnecting the power supply circuit of the main contactor.
9. The general-purpose semiconductor EMO circuit according to claim 8, characterized in that, The equipment status monitoring interface includes a door interlock bypass interface.
10. The general-purpose semiconductor EMO circuit according to claim 1, characterized in that, The control unit and signal acquisition unit are mounted on a PCB. The control unit is equipped with a plug or socket for connecting DC power and control signals, as well as a diode for overvoltage protection and a capacitor for filtering and voltage regulation.