Arrangement of nano-precision short stroke table for actuation

Abstract

A system for aligning four or more dies relative to a substrate. The system includes four or more stage modules for aligning four or more dies relative to a substrate. The alignment is performed with an alignment accuracy of sub-50 nanometers in which four or more table modules are actuated in the X-direction, the Y-direction and / or the [theta] Z-direction. Movement in the Z-direction, [theta] X-direction and / or [theta] Y-direction is actively or passively bundled, wherein passive bundling is effected by a flexible member and / or a liquid film. In addition, the actuation is carried out by a piezoelectric and / or electromagnetic method.

Description

Cross Reference to Related Applications

[0001] This application claims priority to U.S. Provisional Patent Application Serial No. 63 / 449,357, filed March 2, 2023, entitled “Nano-Precise Short-Stroke Stages,” the contents of which are incorporated herein in their entirety by this reference. TECHNICAL FIELD

[0002] The present application relates generally to short-stroke wafer stage systems, and more particularly to a nano-precise short-stroke stage for actuation. BACKGROUND

[0003] Currently, sub-nanometer level motion performance for short-stroke stages carrying substrates is achieved through 6 degrees of freedom (DoF) actuation and metrology. Due to actuator efficiency and rigid body motion control optimization, the moving mass of previous stages can remain relatively constant over time. However, analysis of throughput improvement schemes suggests that this trend will no longer hold, primarily due to electromagnetic and power amplifier limitations. To meet future productivity and overlay requirements, the moving mass must be significantly reduced. Significant moving mass reduction will be required to extend existing 300 mm technology, especially for future generation technology to achieve 450 mm. Although the potential technology transfer is still uncertain and the International Roadmap Committee has not yet changed the generation target of the substrate technology, evaluating the standard and productivity improvement schemes of two generations of technology is still considered important. For the 450 mm technology generation, the development of stages and overlay systems is a key issue for 32 nanometer technology nodes and higher technology nodes.

[0004] However, there is currently no device that achieves the precision required for short-stroke stages to address these issues. Specifically, there is currently no device that achieves a nano-precise short-stroke stage for actuation. SUMMARY

[0005] In embodiments of the present application, a system for aligning and bonding four or more dies relative to a substrate includes four or more stage modules for alignment of the four or more dies relative to the substrate. The alignment is performed with an alignment precision of sub-50 nanometers, where the four or more stage modules are actuated in one or more of the X, Y, and Θ Z directions.

[0006] The foregoing has outlined rather generally the features and technical advantages of one or more embodiments of the present application in order that the detailed description that follows can be better understood. Additional features and advantages will be described hereinafter which can form the subject of the claims of the application. BRIEF DESCRIPTION OF DRAWINGS

[0007] The application can be better understood with reference to the following drawings and description. The components in the figures are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the application. In the drawings:

[0008] Figure 1 A short stroke table array for precision alignment and bonding of two or more, four or more, five or more, six or more, eight or more, ten or more, twelve or more, fifteen or more, twenty or more, thirty or more, fifty or more, or one hundred or more dies relative to one substrate or a corresponding number of substrates is shown in accordance with embodiments of the present application;

[0009] Figure 2 A top view of a positioning table schematic is shown in accordance with embodiments of the present application;

[0010] Figure 3 A front cross sectional view of a positioning table schematic is shown in accordance with embodiments of the present application;

[0011] Figure 4A An in-plane flexure mechanism is shown in accordance with embodiments of the present application;

[0012] Figure 4B A single crab leg motion direction allowed is shown in accordance with embodiments of the present application;

[0013] Figure 5A An in-plane flexure mechanism is shown in accordance with embodiments of the present application;

[0014] Figure 5B A single cross flexure element motion direction is shown in accordance with embodiments of the present application, including directions through an intermediate body;

[0015] Figure 6A A double parallelogram structure in series to provide motion in direction X and direction Y is shown in accordance with embodiments of the present application, with significant motion range in both directions;

[0016] Figure 6B A double parallelogram element structure is shown in accordance with embodiments of the present application;

[0017] Figure 7A A flexure unit connected to a mover is shown in accordance with embodiments of the present application;

[0018] Figure 7B illustrating a flexure unit according to embodiments of the application, Figure 7A illustrating a structure of the flexure unit shown;

[0019] Figure 8A illustrating a flexure unit according to embodiments of the application, arranged in series along orthogonal directions to allow movement of a mover in two directions;

[0020] Figure 8B illustrating a flexure unit according to embodiments of the application, Figure 8A illustrating a structure of the flexure unit shown;

[0021] Figure 9A illustrating an actuator according to embodiments of the application, attached along an axis out of the plane of a mover;

[0022] Figure 9B illustrating an actuator according to embodiments of the application, attached along an axis orthogonal to the axis of desired movement of a mover;

[0023] Figure 10A illustrating a dual slider out-of-plane mechanism according to embodiments of the application;

[0024] Figure 10B illustrating a top view of a dual slider out-of-plane mechanism according to embodiments of the application;

[0025] Figure 10C illustrating a side view of a dual slider out-of-plane mechanism according to embodiments of the application;

[0026] Figure 10D illustrating another side view of a dual slider out-of-plane mechanism according to embodiments of the application;

[0027] Figure 10E illustrating an additional side view of a dual slider out-of-plane mechanism according to embodiments of the application, Figure 10D illustrating a top view of a dual slider out-of-plane mechanism according to embodiments of the application;

[0028] Figure 10F illustrating a top view of a dual slider out-of-plane mechanism according to embodiments of the application, Figure 10D illustrating a top view of a dual slider out-of-plane mechanism according to embodiments of the application;

[0029] Figure 11A illustrating an out-of-plane flexure mechanism according to embodiments of the application;

[0030] Figure 11B illustrating a front view of an out-of-plane flexure mechanism according to embodiments of the application;

[0031] Figure 11C illustrating a top view of an out-of-plane flexure mechanism according to embodiments of the application, Figure 11B illustrating a top view of an out-of-plane flexure mechanism according to embodiments of the application;

[0032] Figure 11DA side view of the out-of-plane flexure mechanism shown in the front view according to embodiments of the application. Figure 11B A side view of the out-of-plane flexure mechanism shown in the front view according to embodiments of the application.

[0033] Figure 11E A side view of the out-of-plane flexure mechanism shown in the front view according to embodiments of the application.

[0034] Figure 11F A top view of the out-of-plane flexure mechanism shown in the front view according to embodiments of the application.

[0035] Figure 11G A structure of a flexure unit according to embodiments of the application, in the form of a single flexure;

[0036] Figure 11H A structure of a flexure unit according to embodiments of the application, in the form of a parallelogram structure;

[0037] Figure 11I A structure of a flexure unit according to embodiments of the application, in the form of a double parallelogram structure;

[0038] Figure 12A An exemplary out-of-plane flexure mechanism according to embodiments of the application, in which the flexure diverges from an input block to two separate output blocks;

[0039] Figure 12B An alternative embodiment of an out-of-plane flexure mechanism according to embodiments of the application, in which the flexure diverges from an input block to a single output block;

[0040] Figure 13A An out-of-plane flexure linear mechanism according to embodiments of the application;

[0041] Figure 13B A structure of a flexure unit according to embodiments of the application, in the form of a single flexure, used in a Figure 13A linear mechanism according to embodiments of the application;

[0042] Figure 13C A structure of a flexure unit according to embodiments of the application, in the form of a parallelogram structure, used in a Figure 13A linear mechanism according to embodiments of the application;

[0043] Figure 13D A structure of a flexure unit according to embodiments of the application, in the form of a double parallelogram structure, used in a Figure 13A linear mechanism according to embodiments of the application;

[0044] Figure 14 A lever out-of-plane mechanism according to embodiments of the application;

[0045] Figure 15A A top view of a bundled flexure unit and stator according to embodiments of the application;

[0046] Figure 15B A front cross-sectional view of a flexure unit and stator according to embodiments of the application is shown;

[0047] Figure 15C A front cross-sectional view of a flexure unit and stator according to embodiments of the application is shown;

[0048] Figure 16A A schematic diagram of a mechanism according to embodiments of the application utilizing a passive flexure mechanism in combination with an actuator actuated in vertical motion is shown;

[0049] Figure 16B A schematic diagram of a mechanism according to embodiments of the application utilizing a passive flexure mechanism in combination with an actuator actuated in horizontal motion is shown;

[0050] Figure 17A A side view of a passive flexure mechanism according to embodiments of the application is shown;

[0051] Figure 17B A front view of a passive flexure mechanism according to embodiments of the application is shown; Figure 17A A front view of a passive flexure mechanism according to embodiments of the application is shown;

[0052] Figure 18A A front view of a passive flexure mechanism according to embodiments of the application is shown;

[0053] Figure 18B A top view of a passive flexure mechanism according to embodiments of the application is shown; Figure 18A A top view of a passive flexure mechanism according to embodiments of the application is shown;

[0054] Figure 18C An enlarged version of a flexure unit of a passive flexure mechanism according to embodiments of the application is shown; Figure 18A An enlarged version of a flexure unit of a passive flexure mechanism according to embodiments of the application is shown;

[0055] Figure 19A A side view of a passive flexure mechanism utilizing a hinged flexure according to embodiments of the application is shown;

[0056] Figure 19B A front view of a passive flexure mechanism utilizing a hinged flexure according to embodiments of the application is shown;

[0057] Figure 20A A thermal action performed by a power light emitting diode (LED) according to embodiments of the application is shown;

[0058] Figure 20B A thermal action performed by a passively controlled heat exchanger according to embodiments of the application is shown;

[0059] Figure 21A An architecture for mounting an actuator according to embodiments of the application is shown;

[0060] Figure 21B An alternative architecture for mounting an actuator is shown in accordance with embodiments of the application;

[0061] Figure 21C Another alternative architecture for mounting an actuator is shown in accordance with embodiments of the application;

[0062] Figure 22A An actuator-worktable adapter set-up architecture is shown in accordance with embodiments of the application;

[0063] Figure 22B An alternative actuator-worktable adapter set-up architecture is shown in accordance with embodiments of the application;

[0064] Figure 22C Another alternative actuator-worktable adapter set-up architecture is shown in accordance with embodiments of the application;

[0065] Figure 23A A mechanism for θ Z actuation is shown in accordance with embodiments of the application;

[0066] Figure 23B Linear springs are shown in accordance with embodiments of the application;

[0067] Figure 23C Torsional springs are shown in accordance with embodiments of the application;

[0068] Figure 24A Stability of an actuator without in-plane clamping flexure units for stabilizing the actuator is shown in accordance with embodiments of the application;

[0069] Figure 24B Stability of an actuator with in-plane clamping flexure units for stabilizing the actuator is shown in accordance with embodiments of the application;

[0070] Figure 25A A mover connected to an output block of an out-of-plane flexure mechanism is shown in accordance with embodiments of the application;

[0071] Figure 25B A layout of a mover with flexure for stabilizing an actuator is shown in accordance with embodiments of the application;

[0072] Figure 25C A corresponding schematic of an actuator-worktable adapter is shown in accordance with embodiments of the application;

[0073] Figure 25D A clamping flexure unit in a single flexure is shown in accordance with embodiments of the application;

[0074] Figure 25E A flexure-holding unit in a parallelogram structure according to embodiments of the application is shown;

[0075] Figure 25F A flexure-holding unit in a double parallelogram structure according to embodiments of the application is shown;

[0076] Figure 25G A cross-sectional view of a flexure-holding unit according to embodiments of the application is shown;

[0077] Figure 26 A flexure and a liquid-carrying adapter according to embodiments of the application are shown;

[0078] Figure 27 A nanometer-precision positioning stage based on a commutator planar motor according to embodiments of the application is shown;

[0079] Figure 28A shows a top view of magnetic field lines coming out of plane from a magnet array according to embodiments of the application;

[0080] Figure 28B A top view of magnetic field lines going into the plane from a magnet array according to embodiments of the application is shown;

[0081] Figure 29A shows a top view of a magnet array in a first configuration in which north and south poles alternate facing the winding array according to embodiments of the application;

[0082] Figure 29B A top view of a magnet array in a second configuration in which north and south poles alternate facing the winding array according to embodiments of the application is shown;

[0083] Figure 30 A top view of a magnet array configured with north and south poles alternating facing the winding array according to embodiments of the application is shown;

[0084] Figure 31A shows a top view of a magnet array in a first configuration in which a one-dimensional Halbach array according to embodiments of the application is shown;

[0085] Figure 31B A top view of a magnet array in a second configuration in which a one-dimensional Halbach array according to embodiments of the application is shown;

[0086] Figure 32 A top view of a magnet array in a two-dimensional Halbach array according to embodiments of the application is shown;

[0087] Figure 33AA winding array according to embodiments of the application is shown, wherein each winding of the winding array is a planar spiral;

[0088] Reference is made to Figure 33B , Figure 33B A magnetic field generated by a current carrying winding according to embodiments of the application is shown;

[0089] Figure 34A A winding array according to embodiments of the application is shown, wherein each winding of the winding array is a helix;

[0090] Figure 34B A winding array according to embodiments of the application is shown, Figure 34A A cross section of the winding array shown;

[0091] Figure 34C An elevation cross section of a winding according to embodiments of the application is shown;

[0092] Figure 34D An inverted rear view cross section of a winding according to embodiments of the application is shown;

[0093] Figure 34E A layer by layer manufacturing process of a helical winding according to embodiments of the application is shown;

[0094] Figure 35A A winding array according to embodiments of the application is shown, wherein each winding of the winding array is a closed polygon with sharp or rounded corners;

[0095] Figure 35B An elevation view of a winding array according to embodiments of the application is shown, Figure 35A

[0096] Figure 36A A winding element according to embodiments of the application is shown, grouped into sets and the sets are arranged orthogonal to each other;

[0097] Figure 36B A winding element according to embodiments of the application is shown, stacked in different planes with different orientations;

[0098] Figure 37 A flow chart of a method of manufacturing a magnet array according to embodiments of the application is shown;

[0099] Figures 38A to 38D A cross section view of a magnet array manufactured using the steps described in Figure 37

[0100] Figure 39A A top view of a non-commutated sub-plane motor (electromagnetic) actuation according to embodiments of the application is shown; ​​

[0101] Figure 39B A front view showing non-commutating sub-plane motor (electromagnetic) based actuation according to embodiments of the present application is shown;

[0102] Figure 40 A setting of exemplary windings and magnets according to embodiments of the present application is shown;

[0103] Figure 41A A top view showing copper traces forming a square spiral winding structure according to embodiments of the present application is shown;

[0104] Figure 41B A front view showing copper traces forming a square spiral winding structure according to embodiments of the present application is shown;

[0105] Figure 41C A bottom view showing copper traces forming a square spiral winding structure according to embodiments of the present application is shown; and

[0106] Figure 41D A resulting square spiral winding structure according to embodiments of the present application is shown. DETAILED DESCRIPTION

[0107] As noted above, currently, sub-nanometer motion performance for short stroke stages carrying substrates is achieved through 6 degrees of freedom (DoF) actuation and metrology. Due to actuator efficiency and rigid body motion control optimization, the moving mass of previous stages can be kept relatively constant over time. However, analysis of throughput improvement schemes shows that this trend will no longer hold, primarily due to electromagnetic and power amplifier limitations. To meet future productivity and overlay requirements, the moving mass must be substantially reduced. Substantial moving mass reduction will be required to extend the existing 300 mm technology, especially for future generation technology to 450 mm. Although the potential technology transfer is still uncertain and the International Roadmap Committee has not yet changed the target of the substrate technology generation, evaluating the standard and productivity improvement schemes of two generations of technology is still considered important. For the 450 mm technology generation, the development of stages and overlay systems is a key issue for the 32 nm technology node and higher technology nodes.

[0108] However, there are currently no devices that achieve the precision required for short stroke stages to address these issues. In particular, there are currently no devices that achieve nanometer precision short stroke stages for actuation.

[0109] The principles of the present application provide devices for setting up nanometer precision short stroke stages to achieve actuation with sub-50 nanometer precision along X, Y, and / or Θ Z with active or passive control along Θ X , Θ Y , and Z, as discussed further below.

[0110] Reference will now be made in detail to the drawings, which are provided as illustrative examples of the disclosure. Figure 1 An array of short-stroke stages is shown for precision alignment and bonding of two or more, four or more, five or more, six or more, eight or more, ten or more, twelve or more, fifteen or more, twenty or more, thirty or more, fifty or more, or one hundred or more dies relative to one substrate or a corresponding number of substrates in accordance with embodiments of the present application.

[0111] As Figure 1 shown, Figure 1 An array of short-stroke stages 105 mounted on X-Y positioning stage 101 B is shown with carrier wafer 102 located on X-Y positioning stage 101 A. Further, as Figure 1 shown, product dies / substrates 103 are located on carrier wafer 102 with gap fill material 104 interspersed between product dies / substrates 103.

[0112] Additionally, as Figure 1 shown, short-stroke stage modules 105 are located beneath X-Y positioning stage 101 B. In one embodiment, chucking modules 106 are attached to short-stroke stage modules 105, where chucking modules 106 are used to hold dies 107.

[0113] It is noted that Figure 1 the schematic dimensions are not drawn to scale and that the alignment of the dies to the substrate is not drawn to scale. In one embodiment, the alignment is performed with sub-50 nm alignment precision.

[0114] Further, Figure 1 An approach is shown for aligning one or more dies 107 individually to product dies / substrates 103 using one or more short-stroke stage modules 105, where product dies / substrates 103 are disposed on carrier wafer 102 with gap fill material 104 (e.g., silicon oxide) interspersed between individual product dies 103. In one embodiment, the stage setup presents two components: (1) the bearing interface between the stator and mover of the stage; and (2) the actuation strategy for the central mover motion. The bearing interface and actuation strategy allow for control of the X, Y, Θ Z , Z, Θ X , and Θ Yone of 3 or more combinations, 4 or more combinations, 5 or more combinations, 6 or more combinations, 7 or more combinations, 8 or more combinations, 9 or more combinations, or 10 or more combinations of the directions.

[0115] In one embodiment, one or more of the following carrier methods are used: (1) flexure; and (2) flexure + liquid film.

[0116] In one embodiment, one or more of the following actuation strategies are employed: (1) flexure-based actuation; (2) planar motor-based actuation - commutator; and (3) planar motor-based actuation - non-commutator. It should be noted that as used herein, planar motor-based actuation refers to electromagnetic actuation. These short-stroke stages are compact, and exemplary form factors thereof in the XY plane include 20 mm x 20 mm, 10 mm x 10 mm, and 5 mm x 5 mm.

[0117] It should be noted that as used herein, the term "ground body" refers to a rigid body that is mechanically grounded (not electrically grounded), unless otherwise specified.

[0118] Reference is now made to Figure 2 , Figure 2 FIG. 1 shows a top view of a positioning stage schematic, according to embodiments of the application.

[0119] As shown in Figure 2 , a top view of positioning stage 200 includes mover 201 and actuators actuated along directions 202, as well as flexure 203 and ground body / stator 204. In addition, positioning stage 200 includes optional metrology hardware 205.

[0120] Reference is now made to Figure 3 , Figure 3 FIG. 2 shows a front cross-sectional view of a positioning stage schematic, according to embodiments of the application.

[0121] As shown in Figure 3 , a front cross-sectional view of positioning stage 200 includes holding module 106.

[0122] Reference is made to Figure 2 and Figure 3 , flexure-based stages actuated along X, Y, and Θ Z stages supported along Z, Θ X , and Θ Y , actively or passively align one or more substrates 103 relative to one or more substrates / templates / sheets / fabricated substrates with nanometer or smaller dimensional precision. Figure 2 and Figure 3A general schematic of a worktable 200 is shown, where flexures 203 are provided as load transfer interfaces to connect the central mover / worktable 201 to the ground (stator) 204, so that the movement of the mover / worktable 201 is flexible in the desired directions and rigid in the other directions.

[0123] In one embodiment, one or more of the following components are provided to achieve the desired functionality and performance of the positioning table: (1) in-plane flexures; (2) out-of-plane flexures; (3) passive flexures; (4) actuators; and (5) flexures to prevent parasitic motion, where the in-plane flexures, out-of-plane flexures, passive flexures, and flexures to prevent parasitic motion are collectively shown as element 203 in Figure 2 and Figure 3 .

[0124] The in-plane flexures serve as load transfer interfaces between the ground (stator) 204 and the mover 201. These flexures provide flexibility in the in-plane directions, i.e., X, Y, and Θ Z , while constraining the mover 201 in the other three directions, i.e., Θ X , Θ Y , and Z. The out-of-plane flexures are used to transfer motion from the actuators actuated in direction 202, which are in-plane or out-of-plane arranged according to the overall size and form factor requirements of the worktable, which are determined by the worktable application, to the mover 201. The passive flexures are flexures used to provide flexibility of the worktable in Θ X , Θ Y , and Z.

[0125] It should be noted that the in-plane flexures constitute the load transfer interfaces. The present application also presents other flexures and mechanisms to ensure that the flexures function properly as load transfer interfaces, and that the other flexures and mechanisms are applicable to all other load transfer interfaces.

[0126] The in-plane flexure mechanisms are discussed below. As used herein, in-plane flexures refer to flexure elements provided to enable precise movement of the central worktable / mover 201 along the in-plane axes, i.e., X, Y, and Θ Z .

[0127] Referring to Figure 4A , Figure 4A An in-plane flexure mechanism 400 according to an embodiment of the present application is shown.

[0128] In one embodiment, the in-plane flexure mechanism 400 corresponds to a single flexure unit called "crab leg" which consists of two flexures 203 arranged in series and orthogonally to allow motion in two directions, which in this case correspond to the X and Y directions.

[0129] Furthermore, Figure 4A An in-plane flexure mechanism is shown to allow the mover 201 to have flexibility in the in-plane degrees of freedom, i.e. X, Y and Θ Z In one embodiment, there is one or more crab legs 401 along each of the two in-plane axes, with the number of crab legs 401 along the two axes being equal.

[0130] Reference is now made to Figure 4B , Figure 4B The directions of motion allowed by a single crab leg 401 according to embodiments of the application are shown.

[0131] As used herein, "crab leg" 401 refers to a set of orthogonal flexures 203 arranged in series, such as flexures 203' and 203", which allow motion in one direction in-plane and constrain motion in the orthogonal direction in-plane. Flexure 203' is a flexure orthogonal to the axis, in that the axis of its length is orthogonal to the axis of motion. Similarly, flexure 203" is referred to as a "flexure along the axis".

[0132] Reference is now made to Figure 4A and Figure 4B In one embodiment, there is one or more crab legs 401 along each of the two in-plane axes, with the number of crab legs 401 along the two axes being different.

[0133] In one embodiment, the length, width and height of the two flexures 203 of a single crab leg 401, such as flexures 203' and 203", are equal, which makes the stiffness imparted by the single crab leg 401 the same regardless of the axis along which the single crab leg 401 is arranged. If the number of crab legs 401 along the two in-plane axes is equal, the stiffness along the two axes is the same and the structure is symmetric.

[0134] In one embodiment, the length, width and height of the two flexures 203 of a single crab leg 401, such as flexures 203' and 203", are varied according to the required stiffness and range of motion in a certain direction. Exemplary dimensions of these flexures 203 are shown in Table 1.

[0135] Reference is now made to Figure 5A , Figure 5A An in-plane flexure mechanism 500 according to embodiments of the application is shown.

[0136] As shown in Figure 5A , the in-plane flexure mechanism 500 includes cross flexure elements 501 connected to the central stage / actor 201. Further, as shown in Figure 5A , the cross flexure elements 501 include ground bodies 204.

[0137] In one embodiment, each cross flexure element 501 provides motion in a certain direction, and by appropriately combining these cross flexure elements 501 arranged in a certain way, motion in a desired direction can be achieved. In one embodiment, there is one or more cross flexure elements 501 that provide motion to the central stage / actor 201 as needed.

[0138] Reference is now made to Figure 5B , Figure 5B which shows the direction of motion of a single cross flexure element 501 according to embodiments of the application, including the direction of the intermediate body 502 threaded therethrough.

[0139] As shown in Figure 5B , in one embodiment, the cross flexure element 501 is symmetric about the axis of the flexure 203 labeled #1, i.e., the flexure 203 labeled #2 is the same size as the flexure 203 labeled #5, the flexure 203 labeled #3 is the same size as the flexure 203 labeled #6, and the flexure 203 labeled #4 is the same size as the flexure 203 labeled #7.

[0140] In one embodiment, the cross flexure element 501 is asymmetric about the axis of the flexure 203 labeled #1, in which one or more of the pairs of flexures, i.e., the flexures 203 labeled #2 and #5, the flexures 203 labeled #3 and #6, and the flexures 203 labeled #4 and #7, are different in size. These sizes are set so that the desired direction of motion and range of motion are achieved while satisfying the stiffness constraints / requirements.

[0141] In one embodiment, one or more flexures 203, e.g., the flexures 203 labeled #3 and #6, are rigid bodies.

[0142] In one embodiment, one or more cross flexure elements 501 are connected so that the angle between the flexure 203 labeled #1 of the cross flexure element 501 and the edge of the central stage / actor 201 at the point of contact, hereinafter referred to as the "contact angle," is between 0° and 180°, including the two end angles of 0° and 180°.

[0143] In one embodiment, all of the cross flexure elements 501 present in the mechanism 500 have the same contact angle.

[0144] In one embodiment, one or more cross-flexible elements 501 present in the mechanism 500 have different contact angles to achieve the desired stiffness and movement along an axis.

[0145] Now for reference Figure 6A , Figure 6A A series of parallelogram structures 601 are shown according to an embodiment of this application to provide movement along directions X and Y, wherein there is a significant range of movement in both directions.

[0146] also, Figure 6A An exemplary in-plane mechanism 600 is shown. In one embodiment, one or more double parallelogram elements 601 are provided attached to a central worktable / mover 201 along two axes. These double parallelogram elements 601 have their own double parallelograms, which provide movement along orthogonal axes.

[0147] In one embodiment, the same number of double parallelogram elements 601 are provided along each in-plane axis of the central worktable / mover 201. If each flexible element 203 in all elements is the same size, the mechanism 600 provides stiffness and range of motion that are symmetrical about the two in-plane axes.

[0148] Now for reference Figure 6B , Figure 6B The structure of the double parallelogram element 601 according to an embodiment of this application is shown.

[0149] like Figure 6B As shown, the double parallelogram element 601 includes double parallelograms 602 connected by an intermediate body 603. The two double parallelograms 602 together constitute the double parallelogram element 601.

[0150] In one embodiment, in element 601, the flexible elements 203 labeled #1 and #2 are the same size as the flexible elements 203 labeled #3 and #4, and the flexible elements 203 labeled #3 and #4 are the same size as the flexible elements 203 labeled #7 and #8. This provides consistent stiffness and range of motion along both axes of element 601. In one embodiment, the flexible elements 203 labeled #3 and #4 are connected by an intermediate body 604. In one embodiment, the flexible elements 203 labeled #5 and #6 are connected by an intermediate body 605.

[0151] In one embodiment, in element 601, the dimensions of flexible members 203 labeled #1 and #2 are the same as those of flexible members 203 labeled #3 and #4, and the dimensions of flexible members 203 labeled #3 and #4 are different from those of flexible members 203 labeled #7 and #8. These dimensions are determined based on the required stiffness and range of motion of each axis of element 601.

[0152] In one embodiment, in element 601, the dimensions of flexible members 203 labeled #1 and #2 are different from the dimensions of flexible members 203 labeled #3 and #4, and the dimensions of flexible members 203 labeled #3 and #4 are the same as or different from the dimensions of flexible members 203 labeled #7 and #8. These dimensions are determined based on the required stiffness and range of motion of each axis of element 601.

[0153] In one embodiment, all the double parallelogram elements 601 attached to the central worktable / mover 201 are the same size, which provides symmetry in stiffness and range of motion along the two in-plane axes.

[0154] In one embodiment, one or more double parallelogram elements 601 attached to the central worktable / mover 201 have different dimensions. These dimensions are determined based on the overall stiffness and range of motion required for the mechanism 600 along two in-plane axes.

[0155] Now for reference Figure 7A , Figure 7A A flexible unit 701 connected to a mover 201 is shown according to an embodiment of this application.

[0156] like Figure 7A As shown, the flexible element 701 allows movement along two orthogonal directions. By attaching one or more of these flexible elements 701 to the mover 201, the flexible element 701 can have movement along the X, Y, and θ directions. Z The movement.

[0157] In addition, in one embodiment, one or more flexible units 701 are provided attached to the central worktable / mover 201 to enable the mover to move along an in-plane axis.

[0158] Now for reference Figure 7B , Figure 7B The embodiments of this application are shown. Figure 7A The structure of the flexible element 701 shown is illustrated.

[0159] In one embodiment, the flexible unit 701 includes a flexible element 203 attached to the central worktable / mover 201. In another embodiment, the flexible unit 701 includes a parallelogram structure 702 or a double parallelogram structure connected by an intermediate body 703, such as... Figure 7B As shown.

[0160] In one embodiment, all flexible units 701 have a parallelogram structure 702 (flexible elements 203 labeled #2 and #3) between the intermediate body 703 and the ground body 204. The dimensions of the flexible element 203 of the parallelogram structure 702 are the same as those of the flexible element 203 labeled #1.

[0161] In one embodiment, all flexible elements 701 have a double parallelogram structure between the intermediate body 703 and the ground body 204. The dimensions of these flexible elements 701 are related to the stiffness and range of motion required to achieve table movement along the structure.

[0162] In one embodiment, at least one or more flexible units 701 have a parallelogram structure 702 between the intermediate body 703 and the ground body 204, and at least one or more flexible units 701 have a double parallelogram structure between the intermediate body 703 and the ground body 204.

[0163] In one embodiment, all flexible units 701 are structurally similar, and all flexible elements 203 in all modules have the same dimensions.

[0164] In one embodiment, all flexible elements 701 are structurally similar, but the dimensions of the flexible elements 203 within these flexible elements 701 differ. These dimensions are related to the overall stiffness requirements for the movement of the mover along different axes.

[0165] Now for reference Figure 8A , Figure 8A A flexible unit 701 arranged in series along an orthogonal direction is shown according to an embodiment of this application to allow the mover 201 to move in two directions.

[0166] like Figure 8A As shown, one or more of the flexible units 701 attached to the mover 201 provide flexibility along the X, Y and θ axes. Z Directional actuation.

[0167] In one embodiment, such as Figure 8A One or more flexible units 701 shown are attached to the mover 201 and constitute a load transfer device for the mover 201.

[0168] Now for reference Figure 8B , Figure 8B The embodiments of this application are shown. Figure 8A The structure of the flexible element 701 shown is illustrated.

[0169] In one embodiment, the flexure unit 701 is composed of two flexures 203, which are orthogonal to each other in the X-Y plane in series, and thus provide flexibility in two directions (X direction 801 and Y direction 802). The dimensions of the two flexures 203 are independent of each other and are determined according to the stiffness and range of motion requirements.

[0170] In one embodiment, the respective flexure 203 of one or more flexure units 701 has different dimensions between the flexure units 701.

[0171] Reference is now made to Figure 9A and Figure 9B , Figure 9A An actuator 901 is shown attached along an axis out of the plane of the mover 201, in accordance with an embodiment of the present application. Figure 9B An actuator 901 is shown attached along an axis orthogonal to the desired axis of motion of the mover 201, in accordance with an embodiment of the present application.

[0172] Figure 9A and Figure 9B An architecture 900 is shown that allows for the mounting of actuators (e.g., actuator 901) away from the actuation point of the mover (e.g., mover 201), such that the flexure 203 for the in-plane mechanism and the positioning sensor can be efficiently routed.

[0173] In addition, the architecture 900 includes an out-of-plane flexure 902, which is a flexure that is provided for transmitting motion (see element along direction 903) from a plurality of actuators 901 that are adapted to axes that are different from the axis of the desired motion of the mover along direction 904, as shown. Figures 9A to 9B The out-of-plane flexure 902 has an input block that is directly connected to the actuators 901. In addition, in one embodiment, the out-of-plane flexure 902 has an output block that is directly connected to the central stage / mover 201. The input block receives motion along direction 903 from the actuators 901, and the motion along direction 903 is transmitted through the flexure mechanism to the output block, which directly transmits motion along direction 904 to the central stage / mover 201.

[0174] Reference is now made to Figures 10A to 10F , Figure 10A A dual-slider out-of-plane mechanism 1000 is shown, in accordance with an embodiment of the present application, which is a flexure equivalent of a rigid-body dual-slider. In one embodiment, the dual-slider out-of-plane mechanism 1000 receives input motion from an actuator routed along the Z direction, and translates the motion to the mover (e.g., mover 201) along the X or Y direction, depending on the orientation of the mechanism relative to the mover.

[0175] Figure 10BA top view of the dual-slider out-of-plane mechanism 1000 according to embodiments of the application is shown.

[0176] Figure 10C A side view of the dual-slider out-of-plane mechanism 1000 according to embodiments of the application is shown.

[0177] Figure 10D Another side view of the dual-slider out-of-plane mechanism 1000 according to embodiments of the application is shown.

[0178] Figure 10E An additional side view of the dual-slider out-of-plane mechanism 1000 according to embodiments of the application is shown. Figure 10D

[0179] Furthermore, Figure 10F An additional side view of the dual-slider out-of-plane mechanism 1000 according to embodiments of the application is shown. Figure 10D A top view of the dual-slider out-of-plane mechanism 1000 according to embodiments of the application is shown.

[0180] For Figures 10A to 10F , Figures 11A to 11I , Figures 13A to 13D , Figure 14 , Figures 16A to 16B , Figure 18C and Figures 19A to 19B , the identifier of the flexure 203 is denoted by flexure identifier 1001. For Figures 10A to 10F , Figures 11A to 11I , Figures 13A to 13D , Figure 14 , Figures 16A to 16B , Figure 18C and Figures 19A to 19B , the identifier of the body is denoted by body identifier 1002. Furthermore, for Figures 10A to 10F , Figures 11A to 11I , Figures 13A to 13D , Figure 14 , Figures 16A to 16B , Figure 18C and Figures 19A to 19B , the rigid body is denoted by rigid body identifier 1003.

[0181] In one embodiment, the flexure 203 identified as #19 acts as the primary link in the mechanism 1000 that transmits motion from body #2 to body #3. The motion of body #2 is along the direction of actuator 901, whereas the motion of body #3 is along the desired motion direction of the mover 201.

[0182] ​In one embodiment, the input block of mechanism 1000 is body #1, where any combination of flexures 203 identified as #1, #2, #3, and #4 assist body #1 in moving in a straight line and constrain the movement of body #1 in other directions. Flexure 203 identified as #17, which is a hinged flexure, helps minimize the transfer of concomitant motion from body #1 to body #2.

[0183] In one embodiment, body #2 is attached to flexure 203 identified as #19 to transfer motion to body #3 and to any combination of flexures 203 identified as #5, #6, #7, and #8, which constrain the movement of body #2 in all directions except Figures 10A to 10F those shown.

[0184] In one embodiment, body #3 is attached to flexure 203 identified as #19 to receive motion from body #2 and also to any combination of flexures 203 identified as #9, #10, #11, and #12, which constrain the movement of body #3 in all directions except Figures 10A to 10F those shown.

[0185] In one embodiment, body #4 acts as an output block with any combination of flexures 203 identified as #13, #14, #15, and #16. Flexure 203 identified as #18, which is a hinged flexure, helps minimize the transfer of concomitant motion from body #3 to body #4.

[0186] In one embodiment, body #4 is directly connected to the mover 201 of the worktable or connected to the mover 201 of the worktable through an intermediate connection.

[0187] In one embodiment, the actuator 901 is directly connected to body #2, which is the input block.

[0188] In one embodiment, body #3 is directly connected to the mover 201, in which case body #3 is the output block.

[0189] In one embodiment, the angle a, which is the angle between flexure 203 identified as #19 and the normal to the plane of the mover (shown as the dashed axis 1004), is between 0° and 90°, inclusive. Figure 10A

[0190] In one embodiment, one or more sets of binding flexures 203 (flexure (1, 2, 3, 4), flexure (5, 6, 7, 8), flexure (9, 10, 11, 12), and flexure (13, 14, 15, 16)) are used in any combination to bind the motion of the respective bodies according to the stiffness requirements. The dimensions and stiffness of these flexures 203 are related to the motion range requirements.​

[0191] refer to Figures 11A to 11I , Figure 11A An out-of-plane flexible mechanism 1100 according to an embodiment of this application is shown.

[0192] Figure 11B A front view of an out-of-plane flexible mechanism 1100 according to an embodiment of this application is shown.

[0193] Figure 11C The embodiments of this application are shown. Figure 11B The top view of the out-of-plane flexible mechanism 1100 shown in the front view.

[0194] Figure 11D The embodiments of this application are shown. Figure 11B The side view of the out-of-plane flexible mechanism 1100 shown in the front view.

[0195] Figure 11E A side view of an out-of-plane flexible mechanism 1100 according to an embodiment of this application is shown.

[0196] Figure 11F A top view of an out-of-plane flexible mechanism 1100 according to an embodiment of this application is shown.

[0197] Figure 11G The structure of a flexible unit 701, which is a single flexible element, according to an embodiment of this application is shown.

[0198] Figure 11H The structure of a flexible unit 701 with a parallelogram shape according to an embodiment of this application is shown.

[0199] Figure 11I The structure of the flexible unit 701, which has a double parallelogram structure, is shown according to an embodiment of this application.

[0200] In addition, such as Figures 11A to 11I As shown, the flexible elements 203, labeled #1 to #16, are "holding" flexible units 701. As described above, the structure of this holding flexible unit 701 has different forms, such as... Figures 11G to 11I As shown.

[0201] In one embodiment, the out-of-plane flexible mechanism 1100 receives input motion from an actuator 901 arranged along the Z direction, and translates the motion to the actuator 201 along the X or Y direction depending on the orientation of the mechanism 1100 relative to the actuator 201.

[0202] In one embodiment, body #1 is attached to actuator 901 and thus body #1 acts as an input block. Body #1 is attached to any combination of the bundle flexure units #1, #2, #3, and #4. The structure of these bundle flexure units can be a single flexure, a parallelogram structure, or a double parallelogram structure, respectively, as shown in Figures 11G to 11I The structure and dimensions of these bundle flexure units 701 are independent of each other and are set according to the stiffness and range of motion requirements of mechanism 1100.

[0203] In one embodiment, body #2 transfers its motion to body #3, which acts as an intermediate link to transfer motion orthogonally. Body #2 is connected to ground 204 through any combination of the bundle flexure units #5, #6, #7, and #8. The structure and dimensions of bundle flexure units #5, #6, #7, and #8 are independent of each other and are determined according to the stiffness and range of motion requirements.

[0204] In one embodiment, flexure hinge #17 acts as an adapter between body #1 and body #2 to minimize parasitics in the transfer of motion from body #1 to body #2 and to minimize shear forces transferred to the actuator due to slight rotation of body #2.

[0205] In one embodiment, body #4 receives motion from body #3 along the axis of the desired motion of central stage / mover 201. Body #3 is connected to any combination of the bundle flexure units #9, #10, #11, and #12. The structure and dimensions of bundle flexure units #9, #10, #11, and #12 are independent of each other and are determined according to the stiffness and range of motion requirements.

[0206] In one embodiment, flexure hinge #18 receives motion from body #4 and transfers the motion forward to the structure attached to flexure hinge #18. This hinge acts as an adapter to minimize the transfer of parasitic motion due to slight rotation of body #4.

[0207] In one embodiment, body #5 receives motion from flexure hinge #18 and transfers the motion to flexure hinge #19.

[0208] In one embodiment, flexure hinge #19 receives motion from body #5 and transfers the motion to body #6. This hinge acts as an adapter to minimize the transfer of parasitics from body #5 to body #6 due to slight rotation of body #6.

[0209] In one embodiment, body #6 is directly connected to the mover 201, thus body #6 acts as an output block. Body #6 is connected to any combination of the holding flexures #13, #14, #15, and #16. The structure and dimensions of the holding flexures #13, #14, #15, and #16 are independent of each other and are determined according to stiffness and range of motion requirements.

[0210] It should be noted that, Figure 11C The top view of body #2, shown with flexures #5, #6, #7, and #8, is similar to the top view of body #1. Furthermore, it should be noted that, Figure 11E The side view of body #3, shown with flexures #9, #10, #11, and #12, is similar to the top view of body #1.

[0211] Figure 12A An exemplary out-of-plane flexure mechanism 1200 according to embodiments of the application is shown, in which flexures 203 are routed from an input block to two independent output blocks. Figure 12B An alternative embodiment of an out-of-plane flexure mechanism 1200 according to embodiments of the application is shown, in which flexures 203 are routed from an input block to a single output block.

[0212] Referring to Figures 12A to 12B , the out-of-plane flexure mechanism 1200 receives input motion from an actuator 901 disposed along the Z direction, and translates the motion to the mover 201 along the X or Y direction, depending on the orientation of the mechanism 1200 relative to the mover 201.

[0213] In one embodiment, as Figure 12A shown, flexures 203 are routed from an input block 1201 to two independent bodies, each of which acts as an output block 1202, which is connected to the central stage / mover 201.

[0214] In one embodiment, as Figure 12A shown, the angle a ranges between 0° and 90°, inclusive.

[0215] In one embodiment, multiple flexures 203 are routed from an input block 1201 to a single output block 1202, parallel to each other, as Figure 12B shown.

[0216] In one embodiment, as Figure 12B shown, the angle b ranges between 0° and 90°, inclusive.

[0217] In one embodiment, the dimensions of the flexures 203 and the angles between the flexures 203 and their respective originating bodies are independent and are determined according to stiffness and range of motion requirements.

[0218] Figure 13A An out-of-plane flexible linear mechanism 1300 according to an embodiment of the application is shown.

[0219] Reference is made to Figure 13A In one embodiment, Block #1 is connected to actuator 901, thus Block #1 acts as an input block 1201.

[0220] In one embodiment, Body #2 acts as a rigid link actuated by input block 1201. When Body #2 receives motion from input block 1201, Body #2 is able to effect rotation through hinges #1 and #2.

[0221] In one embodiment, Hinge #3 receives rotational motion from Body #2 and transmits this motion to Body #3.

[0222] In one embodiment, Body #3 acts as an intermediate link and Body #3 is able to effect rotation through hinges #3, #4 and #6.

[0223] In one embodiment, Body #4 acts as an intermediate link between Body #3 and ground 204 and is hinged at two locations at hinges #4 and #6, which enables Body #4 to rotate. The role of Body #4 is to constrain the motion of Body #3 such that a desired rotational movement is provided at hinge #6, which can subsequently be converted to linear motion in a desired direction.

[0224] In one embodiment, Body #5 receives motion from Body #3 through hinge #6. The motion of Body #5 in a linear direction is effected by the beam flexure 203 labeled #7 and #8, which can be combined to form a flexure unit 701, which can be configured as a single flexure, a parallelogram structure or a double parallelogram structure, respectively, as Figures 13B to 13D shown. Figure 13B An out-of-plane lever mechanism 1400 according to an embodiment of the application is shown. Figure 13A Figure 13C An out-of-plane lever mechanism 1400 according to an embodiment of the application is shown. Figure 13A Figure 13D An out-of-plane lever mechanism 1400 according to an embodiment of the application is shown. Figure 13A Reference is made to

[0225] , Figure 14 , Figure 14 An out-of-plane lever mechanism 1400 according to an embodiment of the application is shown.

[0226] ​​In one embodiment, lever out-of-plane mechanism 1400 receives input motion from actuator 901 laid along the X or Y direction, and translates the motion to mover 201 along the X or Y direction, depending on the orientation of mechanism 1400 relative to mover 201.

[0227] In one embodiment, mechanism 1400 is a flexible version of a type-1 lever. In one embodiment, body #2 acts as a type-1 lever.

[0228] In one embodiment, the effort side of the lever is attached to body #1 through joint #1. In this case, body #1 acts as the input block 1201 of mechanism 1400.

[0229] In one embodiment, the load side of the lever is attached to body #3 through joint #3, in which case body #3 acts as the output block 1202 of mechanism 1400.

[0230] In one embodiment, body #3 is attached to the binding flexure 203 labeled #4 and / or #5, which can be combined to form a flexure unit 701, which can be configured as a single flexure, a parallelogram structure, or a double parallelogram structure, respectively, as shown in Figures 13B to 13D By employing this structure, the rotational motion transmitted from body #2 to body #3 is minimized. Furthermore, by employing this structure, body #3 is able to transmit linear motion to the central stage / mover 201.

[0231] Reference is now made to Figures 15A to 15C , Figure 15A showing a top view of the binding flexure unit 701 and the stator according to embodiments of the present application. FIG. 15B showing a front cross-sectional view of the binding flexure unit 701 and the stator according to embodiments of the present application. FIG. 15C showing a side cross-sectional view of the binding flexure unit 701 and the stator according to embodiments of the present application.

[0232] In one embodiment, as shown in FIGS. 15A-15C the in-plane arrangement of the binding flexure unit 701 eliminates the parasitic motion of the output block 1202 of the out-of-plane flexure mechanism described above. Furthermore, this arrangement enables efficient connection between the mover 201, the in-plane mechanism, and the out-of-plane mechanism.

[0233] In one embodiment, as shown in FIGS. 15A-15CAs shown, the binding flexure units 701 of the out-of-plane flexure mechanisms 1100, 1200 are attached to the stator wall 1501. In one embodiment, the stator wall 1501 and the binding flexure units 701 are grounded with respect to the mover 201, and thus, the units 701 are disposed between the mover 201 and the stator wall 1501, facilitating efficient routing of the flexure 203.

[0234] In one embodiment, the output block 1202 of the out-of-plane flexure mechanisms 1100, 1200 is disposed on top of the flexure binding units 701, which are disposed between the stator wall 1501 and the mover 201 of the worktable.

[0235] In one embodiment, the binding flexure units 701 are single flexure units, parallelogram structures, or double parallelogram structures. The structure and flexure size of these units 701 are independent of each other and are set according to stiffness and range of motion requirements.

[0236] It is now appropriate to discuss passive flexures. Referring to FIGS. 16A-16B , FIG. 16A A schematic diagram of a mechanism 1600 that utilizes a passive flexure mechanism 1601 in combination with an actuator (e.g., actuator 901) that actuates in vertical motion is shown, according to embodiments of the application. FIG. 16B A schematic diagram of a mechanism 1600 that utilizes a passive flexure mechanism 1601 in combination with an actuator (e.g., actuator 901) that actuates in horizontal motion is shown, according to embodiments of the application.

[0237] As FIGS. 16A-16B shown, the passive flexure mechanism 1601 on top of the holding module 106 is set up to provide the mover 201 with flexibility in Z, Θ X and Θ Y . The passive flexure mechanism 1601 is set up to not actively control / actuate in these directions. Thus, it is referred to herein as a "passive" flexure mechanism 1601.

[0238] In one embodiment, the worktable / mover 201 is actuated in X, Y and Θ Z but not actively actuated in the other three degrees of freedom. Thus, for example, the passive flexure mechanism 1601 is set up to increase the compliance in Z, Θ X and Θ Y so that the worktable / mover 201 can experience Z, Θ Z and Θ X and Θ Yexternal forces in the directions. Since the passive flexure mechanism 1601 is only used to support the worktable / actor 201 to bear external forces, the flexure members of the passive flexure mechanism 1601 are not actuated, and thus are named as "passive" flexure members.

[0239] Reference is now made to FIGS. 17A-17B , FIG. 17A shows a side view of the passive flexure mechanism 1601 according to embodiments of the application. FIG. 17B shows a front view of the passive flexure mechanism 1601 according to embodiments of the application, FIG. 17A as shown.

[0240] As shown in FIGS. 17A-17B , the passive flexure mechanism 1601 provides flexibility in the directions of θ X and θ Y using flexure hinges.

[0241] In one embodiment, body #1 is connected to the central worktable / actor 201, and on the other side, to body #2 through flexible hinges #1 and #2, as shown in FIG. 17B . These hinges provide flexibility in the direction of θ X to body #2.

[0242] In one embodiment, body #2 is connected to body #3 through two flexible hinges #3 and #4, as shown in FIG. 17A . These hinges provide flexibility in the direction of θ Y to body #3.

[0243] In one embodiment, body #3 is connected to the holding module 106. Thus, the holding module 106 has flexibility in the directions of θ X and θ Y , which can resist external forces acting on the die without interfering with the operation of the central worktable / actor 201.

[0244] Reference is now made to FIG. 18A , FIG. 18A shows a front view of the passive flexure mechanism 1601 according to embodiments of the application.

[0245] In one embodiment, the passive flexure mechanism 1601 is configured in a manner that allows flexibility in the Z direction to be achieved. In one embodiment, three flexure units 701 (labeled 701A to 701C) are configured in a group, which allows the passive flexure mechanism 1601 to have flexibility in the Z direction.

[0246] In one embodiment, FIG. 18A the assembled, grouped three flexure units 701 (labeled 701A to 701C in FIG. 18A ) collectively achieve flexibility in the directions of Z, θ X and θY The flexibility. Depending on the external force acting on the carrying module 106, these units will be displaced accordingly along the Z direction.

[0247] FIG. 18B The embodiments of this application are shown. FIG. 18A The top view of the passive flexible mechanism 1601 shown.

[0248] FIG. 18C The embodiments of this application are shown. FIG. 18A The passive flexible mechanism 1601 shown is an enlarged version of the flexible unit 701A. FIG. 18C The top and front views of the flexible unit 701A are shown.

[0249] Now for reference FIG. 19A and FIG. 19B , FIG. 19A A side view of a passive flexible mechanism 1601 utilizing a hinged flexible member according to an embodiment of this application is shown. FIG. 19B A front view of a passive flexible mechanism 1601 utilizing a hinged flexible member according to an embodiment of this application is shown.

[0250] In one embodiment, body #1 is attached to the central worktable / mover 201, such as FIGS. 19A-19B As shown. On the other side of the main body #1, a two-degree-of-freedom flexible hinge is provided ( FIGS. 19A-19B As shown in hinge #1, this two-degree-of-freedom flexible hinge can provide a θ-axis range. X and θ Y Its flexibility.

[0251] In one embodiment, flexible hinge #1 is attached to body #2, which serves as an intermediate body between flexible hinge #1 and flexible elements 203 labeled #2 and #3, such as FIG. 19B As shown. Body #2 also serves as a grounding element for the flexible element 203, marked #2 and #3.

[0252] In one embodiment, flexible members 203, labeled #2 and #3, are connected to body #3, and body #3 is constrained by flexible members 203, labeled #2 and #3, which constrain the degrees of freedom of body #3 in all directions other than one direction, namely the Z direction.

[0253] like FIGS. 9A-9B As shown, multiple actuators 901 are arranged along the Z-axis, or along the X-axis or Y-axis, but their planes are offset from the plane of the central worktable / mover 201 by a certain distance. This arrangement of multiple actuators 901 provides sufficient space to accommodate complex and densely arranged in-plane flexible mechanisms with a small footprint along the XY plane.

[0254] In one embodiment, the one or more actuators 901 are piezoelectric actuators (PZTs). PZTs have nanometer-scale actuation precision, which can achieve nanometer-scale stage actuation precision.

[0255] In one embodiment, the one or more actuators 901 are voice coil motors (VCMs). VCMs have nanometer-scale actuation precision and can exert high actuation force. With precise current control, VCMs can precisely actuate the flexure mechanism, and thus the central stage / translator 201 can be actuated with nanometer-scale precision.

[0256] Reference is now made to FIGS. 20A-20B , FIG. 20A shows the thermal action by a power light emitting diode (LED) 2001 according to embodiments of the application. FIG. 20B shows the thermal action by an actively controlled heat exchanger 2002 according to embodiments of the application.

[0257] In one embodiment, the one or more actuators 901 are thermal actuators. These actuators are structures made of materials with high thermal expansion coefficients. A heat source such as a high-power LED 2001 or a heat exchanger 2002 can be used to expand / contract the actuation rod 2003, as FIGS. 20A-20B shown. Due to the effect of expansion / contraction, the actuation rod 2003 exerts a force on the out-of-plane flexure mechanism, which actuates the central stage / translator 201. The heat exchanger 2002 can be a convection-based heat exchanger, a radiation-based heat exchanger, or a convection and radiation-based heat exchanger.

[0258] Reference is now made to FIG. 20B , the windings 2004 in the heat exchanger 2002 represent higher temperature, and the actuation rod 2003 is in an expanded state; while the windings 2005 represent lower temperature, and the actuation rod 2003 is in a contracted state.

[0259] In one embodiment, the one or more actuators 901 are direct current (DC) linear motors.

[0260] In one embodiment, the one or more actuators 901 are screw-drive-based actuators with rotary motors as actuators.

[0261] Reference is now made to FIGS. 21A-21C , FIG. 21A shows an architecture for mounting the actuators 901 according to embodiments of the application.FIG. 21B An alternative architecture for mounting actuator 901 according to an embodiment of this application is shown. FIG. 21C This illustrates an alternative architecture for mounting actuator 901 according to an embodiment of this application.

[0262] FIGS. 21A-21C The architecture shown for mounting the actuator 901 allows the necessary in-plane flexible mechanisms 400, 500 to have a compact footprint.

[0263] In one embodiment, one or more actuators 901 are arranged along the Z-axis, such as FIG. 21A As shown. In one embodiment, the out-of-plane flexible mechanisms 1100 and 1200 convert the motion of the actuator along the Z-axis into the movement of the worktable along the X-axis or Y-axis.

[0264] In one embodiment, one or more actuators 901 are arranged along the X-axis or Y-axis, but in a plane offset from the driven plane. In one embodiment, out-of-plane flexible mechanisms 1100, 1200 transmit the motion of the actuators 901 in the offset plane to the driven plane.

[0265] In one embodiment, one or more actuators 901 are arranged such that the movement of one or more actuators 901 is within the plane of the mover 201. The advantage of this arrangement is that it reduces the number of parts in the assembly and minimizes the possible accompanying effects introduced by the out-of-plane flexible mechanisms 1100, 1200.

[0266] Now for reference FIGS. 22A-22C , FIG. 22A An actuator-table adapter configuration architecture according to an embodiment of this application is shown. FIG. 22B An alternative actuator-table adapter setup architecture according to an embodiment of this application is shown. FIG. 22C This paper illustrates an alternative actuator-table adapter configuration architecture according to an embodiment of this application.

[0267] like FIGS. 22A-22C As shown, the actuator-table adapter 2201 applies force (in other words, imparts motion) to the table to achieve motion in the desired direction.

[0268] In one embodiment, two actuator-table adapters 2201 are used for actuation in the X direction, and one actuator-table adapter 2201 is used for actuation in the Y direction, such as... FIG. 22A As shown. Additionally, the two actuator-table adapters 2201 along the X direction can also provide those along the θ direction. Z The actuation of the two adapters 2201 is different in magnitude and / or direction.

[0269] In one embodiment, such asFIG. 22B As shown, on each of the four sides of the mover 201, there is an actuator-table adapter 2201 attached to the mover 201. Each adapter 2201 is offset by a certain distance from the center of the edge of the mover 201 to which it is connected. By setting up appropriate system kinematics, the desired motion can be achieved along all three desired axes, namely X, Y, and θ. Z .

[0270] In one embodiment, two actuator-table adapters 2201 are connected to one edge of the mover 201 for actuation in the X direction, and the same arrangement is connected to orthogonal edges for actuation in the Y direction, as shown below. FIG. 22C As shown. By applying appropriate actuating force and direction via these actuator-table adapters, it is possible to achieve actuation along the X, Y, and θ axes. Z The required activation.

[0271] like FIGS. 22A-22C As shown, the actuator-table adapter 2201 can be arranged in multiple configurations along different in-plane directions. These adapters 2201 are mechanisms that are rigidly connected to the central table / mover 201.

[0272] refer to FIG. 23A , FIG. 23A This illustrates an embodiment of the present application for θ Z The mechanism that initiates the action.

[0273] In one embodiment, by applying a rotary table connected in series with the XY table, the rotation along θ is achieved. Z The triggering action. FIG. 23A An example configuration of this tandem mechanism is shown. In one embodiment, one or more table-to-ground adapters 2301 are attached to the central table / mover 201 at the edge of the central table / mover 201. The element dimensions of each table-to-ground adapter 2301 can be independent of each other and configured according to the stiffness requirements of the application.

[0274] In one embodiment, the workbench-to-ground adapter 2301 comprises one or more springs 2302, such as linear springs 2302', to provide restoring forces in the direction opposite to the force applied by the actuator-to-workbench adapter 2201. According to embodiments of this application, FIG. 23B A diagram of spring 2302 corresponding to linear spring 2302' is provided.

[0275] One or more of these springs 2302 are helical tension springs, helical compression springs, leaf springs, or flexures 203. According to embodiments of the application, FIG. 23C A diagram of a spring 2302 corresponding to a torsion spring 2302" is provided.

[0276] Referring to FIGS. 23A-23C In one embodiment, one or more actuator-stage adapters 2201 are included to apply actuation forces as FIGS. 23A-23C indicated. Since these forces are offset from the center of mass of the mover, these forces create a torque in the Z direction, actuating the stage in the Θ Z direction. These actuator-stage adapters 2201 can be the output block (e.g., output block 1202) of an out-of-plane flexure mechanism (e.g., out-of-plane flexure mechanisms 1100, 1200), or if the actuators 901 are collocated in the same plane as the mover 102, the actuator-stage adapters 2201 can be the actuators 901 themselves.

[0277] In one embodiment, the stage-ground adapter 2301 is composed of a torsion spring 2302", as FIG. 23C indicated, with its axis in the Z direction. In this arrangement, the torsion spring 2302" provides a restoring / torquing force in the Z direction.

[0278] In one embodiment, one or more stage-ground adapters 2301 with one or more linear springs 2302' are collocated with the stage-ground adapter 2301 with the torsion spring 2302".

[0279] Referring to FIG. 24A and FIG. 24B , FIG. 24A Stability of an actuator without an in-plane tethered flexure unit to stabilize the actuator is shown according to embodiments of the application. FIG. 24B Stability of an actuator with an in-plane tethered flexure unit to stabilize the actuator is shown according to embodiments of the application.

[0280] In one embodiment, in-plane bracing flexure units 701 (structurally similar to flexure units 701) are attached to the output blocks 1202 (output blocks 1202 as actuator-stage adapter 2201) of the out-of-plane mechanisms (e.g., out-of-plane mechanisms 1100, 1200) such that the out-of-plane mechanisms have flexibility in the direction orthogonal to their actuation direction. This is to protect the out-of-plane mechanism assemblies from the forces acting on these mechanisms when the movers 201 are actuated in the direction orthogonal to their actuation direction. For example, the output blocks 1202 labeled #2 and #4 actuate the movers 201 in the X direction, and when the output blocks 1202 labeled #2 and #4 are actuated, forces act on the output blocks 1202 labeled #1 and #3, which can damage the corresponding out-of-plane mechanism assemblies, as shown. FIG. 24B As shown, FIG. 24B The bracing flexure units 701 absorb these forces, and the out-of-plane mechanism assemblies corresponding to the output blocks 1202 labeled #1 and #3 remain intact, as shown.

[0281] As shown, FIG. 24A When there is no in-plane bracing flexure unit for stabilizing the actuator, the output blocks 1202 labeled #1 and #3 deform due to the forces, as shown. FIG. 24A

[0282] Further, as shown, FIGS. 24A-24B When the movers 201 are actuated in the X direction, the movers 201 move towards the X direction.

[0283] Additionally, FIGS. 24A-24B It is shown that when the stage 201 is actuated in the X direction, the forces in the Y direction (see elements in direction 2401) acting on the actuator-stage adapter 2201.

[0284] As shown, FIGS. 24A-24B If the stage is actuated in the X direction (for example), the actuator-stage adapter 2201 will experience forces in the Y direction, which, in the absence of in-plane bracing flexure units (e.g., bracing flexure units 701) for stabilizing the actuator, can be transmitted to the individual components of the out-of-plane flexure mechanisms (e.g., out-of-plane flexure mechanisms 1100, 1200), and eventually to the actuator (e.g., actuator 901). These forces can even cause mechanical failure of the individual components of the out-of-plane flexure mechanisms (e.g., out-of-plane flexure mechanisms 1100, 1200). However, if these bracing flexure mechanisms (e.g., bracing flexure units 701) are present, these flexure units 203 provide flexibility in the direction of mover actuation, absorb the forces generated by the actuation of the movers, and prevent the transmission of these forces to the sensitive components of the out-of-plane mechanisms.

[0285] Referring to FIG. 25A ,​FIG. 25A A mover (e.g., mover 201) connected to an output block 1202 of an out-of-plane flexure mechanism (e.g., out-of-plane flexure mechanisms 1100, 1200) is shown in accordance with embodiments of the present application. Further, FIG. 25A A direction of motion of the output block 1202 of the out-of-plane flexure mechanism is shown (see element along direction 2501).

[0286] FIG. 25B A layout of a mover 201 with flexures 203 for stabilizing the actuator is shown in accordance with embodiments of the present application.

[0287] FIG. 25C A corresponding schematic of an actuator-stage adapter 2201 is shown in accordance with embodiments of the present application.

[0288] Additionally, the braced flexure units 701 of the mover 201 can correspond to FIGS. 25D-25F one of the three different structures shown. FIG. 25D A braced flexure unit 701 in the form of a single flexure is shown in accordance with embodiments of the present application. FIG. 25E A braced flexure unit 701 in the form of a parallelogram structure is shown in accordance with embodiments of the present application. FIG. 25F A braced flexure unit 701 in the form of a double parallelogram structure is shown in accordance with embodiments of the present application. The structure and flexure size of the braced flexure units 701 are independent of each other and are set according to the stiffness and motion range requirements of the mechanism. Since these flexure units 701 are connected to the central stage / mover 201, FIGS. 25D-25F The ground body 204 shown represents the connection to the central stage / mover 201.

[0289] FIG. 25G A cross-sectional view of a braced flexure unit 701 is shown in accordance with embodiments of the present application.

[0290] Reference is made to FIG. 26 , FIG. 26 A flexure and liquid transmission adapter is shown in accordance with embodiments of the present application.

[0291] FIG. 26 A schematic of an example setup employing a stage with transmission-type flexures + liquid is shown. In one embodiment, a mover 201 is attached to one or more in-plane flexure mechanisms (e.g., in-plane flexure mechanisms 400, 500) described above. These flexures 203 provide bracing for the mover 201 in the Z direction and have flexibility in the X, Y, and Θ Z directions.

[0292] In one embodiment, the stator 2601 is above or below the mover 201 to provide a surface for depositing a liquid film. The liquid film has an appropriate thickness so as to have strong capillary forces to keep the two surfaces around it, the stator 2601 and the mover 201, bonded. The advantage of this film is that it can hold the mover 201 relative to the stator 2601 in the Z direction while providing extremely high flexibility in the X and Y directions. In addition, the film provides resistance to the concomitant motion of the mover 201 in the X , θ Y and Z. This helps to reduce actuation errors of the stage and thus significantly improves accuracy.

[0293] In one embodiment, the holding module 106 is used to hold the die 107 attached to the mover 201, where the other side of the mover 201 is in contact with the liquid film of the liquid layer 2602, which is located between the mover 201 and the stator 2601.

[0294] In one embodiment, a liquid layer 2602 is provided between the die 107 and the substrate 102, which also has strong capillary forces to keep the surfaces of the die 107 and the substrate 102 bonded. In one embodiment, the liquid layer 2602 provides the same function, i.e. to hold the mover 201 in the Z direction and to prevent the concomitant motion of the die 107 (and ultimately the mover 201) relative to the substrate 102 in the X , θ Y and Z.

[0295] In one embodiment, the liquid layer 2602 provides holding in the Z, θ X and θ Y directions, which helps to prevent the concomitant motion of the mover 201 from being transmitted to the die 107 and at the same time protects the mover 201 from external forces acting on the die 107.

[0296] Different actuation strategies will be discussed below. In particular, actuation architectures developed for use in conjunction with the aforementioned load transfer adapter will be described below. The setup of these actuation architectures takes into account the spatial constraints, structural stiffness, motion range requirements, nanoscale precision, and resistance to concomitant motion caused by the load transfer adapter.

[0297] One type of actuation strategy is to utilize flexure-based actuation, which has been discussed previously. For example, exemplary architectures for deploying actuators 901 or actuator-stage adapters 2201 with in-plane flexures 203 have been discussed previously. In addition, exemplary orientations and arrangements of actuator-stage adapters 2201 have been discussed previously. Finally, additional mechanisms required to prevent harmful forces from work stage actuation from being transmitted to multiple actuators 901 deployed for movement orthogonal to the actuation direction at any given time have been discussed previously.

[0298] Another type of actuation strategy is commutator- plane motor-based actuation, as discussed below in connection with FIG. 27

[0299] FIG. 27 A nanometer precision positioning stage based on commutator-plane motors is shown in accordance with embodiments of the present application.

[0300] As FIG. 27 shown, the holding module 106 includes a magnetic array holding plate 2701 that holds an array of permanent magnets 2702. In addition, FIG. 27 A thermally stable PCB (printed circuit board) 2703 with inductive elements 2704 is shown. Additionally, FIG. 27 A liquid film 2705 (for interfacing) between a plurality of glass substrates 2706 is shown. In one embodiment, the liquid film 2705 is water. In addition, FIG. 27 Magnetic field interaction 2707 between the inductive elements 2704 and the array of permanent magnets 2702 is shown.

[0301] In one embodiment, the winding array and the array of magnets 2702 generate electromagnetic and magnetic fields that interact to generate actuation forces. Precise control of the current flowing through the windings can enable precise control of the actuation forces, thereby enabling precise control of actuation along the X, Y, and Θ Z

[0302] In one embodiment, FIG. 28B The arrangement of the nanometer precision positioning stage based on planar motors is shown in accordance with embodiments of the present application. The arrangement is based on electromagnetic actuation of the movers 201, which provides precise positioning of the stage.

[0303] In one embodiment, a plurality of inductive elements 2704 are arranged in a planar fashion, and an appropriate amount of current is passed through the elements to generate magnetic fields around the elements. On offset and parallel planes, the array of permanent magnets is arranged such that its magnetic field interacts with the electromagnetic fields of the inductive elements 2704 (see element 2707), and a resultant force is generated that can be used to actuate a plane that is free to move with respect to a mechanically grounded plane.​​

[0304] In one embodiment, the body with the inductive element 2704 is the mover 201 and the body with the magnet array is the stator 2601.

[0305] In one embodiment, the body with the magnet array 2702 is the mover 201 and the body with the inductive element 2704 is the stator 2601.

[0306] In one embodiment, the setup of a planar motor based positioning stage includes one or more of the following components / subsystems: magnet array 2702, winding array, control architecture, and magnet array fabrication.

[0307] The magnet array 2702 is discussed below. Reference is now made to FIGS. 28A to FIG. 28B FIG. 28A shows a top view of magnetic field lines coming out of plane from a magnet array 2702, in accordance with an embodiment of the application. FIG. 28B FIG. 28B shows a top view of magnetic field lines going into the plane from a magnet array 2702, in accordance with an embodiment of the application.

[0308] As shown in FIGS. 28A to FIG. 28B , the magnets 2801 are arranged in a unidirectional manner, where all the north or south poles of the magnets 2801 are facing the winding array.

[0309] Further, FIGS. 28A to FIG. 28B show an exemplary layout of an array of permanent magnets 2801. In this setup, all the magnets 2801 in the array are oriented in a similar manner. In one embodiment, all the magnets 2801 are arranged such that when viewed from above, the magnetic field lines emanating from the magnets are pointing out of the plane, as shown in FIG. 28A.

[0310] In one embodiment, all the magnets 2801 are arranged such that when viewed from above, the magnetic field lines emanating from the magnets 2801 are pointing into the plane, as shown in FIG. 29B .

[0311] In one embodiment, the spacing of the magnet array of magnets 2801 in the X and Y directions is related to the pole pitch requirements of the overall mechanism for actuation, including the relationship to the winding array, winding layout, control architecture, and magnet array fabrication.

[0312] Reference is now made to FIGS. 29A to FIG. 29B FIG. 29A shows a top view of an array of magnets 2801 in a first arrangement, where the north and south poles alternate facing the winding array, in accordance with an embodiment of the application. FIG. 29BA top view of an array of magnets 2801 according to embodiments of the application is shown, in a second setting in which the north and south poles alternate facing the winding array.

[0313] As shown in FIG. 29A through FIG. 30 the alternation of north and south poles is only in one direction, either along the X direction or the Y direction.

[0314] In one embodiment, the polarity of the magnets 2801 alternates in one direction, while remaining constant in the other direction (the other of the X and Y directions). This results in a Z-magnetic field that alternates in the direction in which the magnet polarity alternates.

[0315] In one embodiment, the polarity of the magnets 2801 in the array is the same along the X axis, but alternates along the Y axis.

[0316] In one embodiment, the polarity of the magnets 2801 in the array is the same along the Y axis, but alternates along the X axis.

[0317] In one embodiment, the spacing of the magnets 2801 in the array along the X and Y directions is related to the precision requirements and winding array structure.

[0318] Reference is now made to FIG. 30 , FIG. 30 is a top view of magnets 2801 according to embodiments of the application, arranged such that the north and south poles alternate facing the winding array.

[0319] In one embodiment, the alternation is in both directions, the X direction and the Y direction.

[0320] Furthermore, FIG. 31B A top view of an array of magnets 2801 according to embodiments of the application is shown, in a second setting in which the north and south poles alternate facing the winding array.

[0321] Reference is now made to FIGS. 31A through FIG. 31B FIG. 31A shows a top view of an array of magnets 2801 according to embodiments of the application, in a first setting as a one-dimensional Halbach array. FIG. 32 A top view of an array of magnets 2801 according to embodiments of the application is shown, in a second setting in which the north and south poles alternate facing the winding array.

[0322] In one embodiment, the magnets 2801 are arranged such that when viewed from the side, the magnetic field lines appear to turn along the axis. This arrangement is called a Halbach array. This array enhances the magnetic field strength of the array of magnets 2801 on one side of the array plane and reduces the magnetic field strength on the other side. The stronger side faces the direction in which the windings are located so that the magnetic field strength of the magnets 2801 can be most effectively utilized to produce a relatively large actuation force in the windings with a relatively small current.

[0323] In one embodiment, the Halbach array is formed along one axis of the X or Y, while the array is the same or alternating along the other axis.

[0324] FIG. 32 A top view of an array of magnets 2801 in a two-dimensional Halbach array is shown, in accordance with an embodiment of the application.

[0325] Reference is made to FIG. 33A In one embodiment, the Halbach array is formed along the X and Y axes. With this arrangement, the stronger side of the array of magnets 2801 is further enhanced, which enables a larger actuation force to be produced.

[0326] The winding array in the setup of a planar motor-based positioning stage is discussed below.

[0327] Reference is made to FIG. 33A , FIG. 33A A winding array 3300 is shown, in accordance with an embodiment of the application, in which each winding 3301 of the winding array 3300 is a planar spiral.

[0328] In addition, as FIG. 33B shown, the winding array 3300 is mounted on a thermally stable PCB (printed circuit board, PCB) 3302.

[0329] Reference is made to FIG. 33B , FIG. 34A A magnetic field 3303 produced by a current-carrying winding 3301 is shown, in accordance with an embodiment of the application.

[0330] In one embodiment, each winding 3301 is fabricated by depositing several copper spirals on a planar surface. These spirals produce a magnetic field 3303 when carrying current, which can interact with the magnetic field of a magnet array to produce an actuation force. In one embodiment, the size of each spiral of the winding 3301 and the spacing of the spiral winding array 3300 are arranged taking into account the load, the required actuation precision, the magnet array, and the current-carrying capability of the copper traces.

[0331] Reference is now made to FIG. 34A , FIG. 34AA winding array 3300 is shown according to embodiments of the application, where each winding 3401 of the winding array 3300 is a spiral.

[0332] In one embodiment, FIG. 34B The winding 3401 is shown as a spiral. The spiral circumference is the circumference of the cross section of the winding 3401.

[0333] Reference is made to FIG. 34B , FIG. 34A A perspective view of a winding array 3300 is shown according to embodiments of the application. FIGS. 34C-34D A cross section of the winding array 3300 is shown.

[0334] Reference is made to FIG. 34C , FIG. 34D A front view cross section of a winding 3401 is shown according to embodiments of the application. FIGS. 34C-34D A back view cross section of a winding 3401 is shown according to embodiments of the application.

[0335] In FIG. 34E the cross section view, it can be seen that the copper trace 3402 of the winding extends in the PCB (printed circuit board) 3302. Due to practical manufacturing considerations, a perfect spiral can not be feasible. Therefore, the copper trace 3402 changes plane in a stepwise manner at certain locations designated for a particular plane. Due to the different change points of the copper trace 3402 on each plane, two or more turns of the copper trace 3402 do not overlap.

[0336] In one embodiment, the change point of the plane of the copper trace 3402 of each wire group is an arbitrary location along the spiral circumference.

[0337] Reference is made to FIG. 34E , FIG. 35A A layer by layer manufacturing of a spiral winding 3401 is shown according to embodiments of the application.

[0338] In one embodiment, the spiral geometry is cut into multiple layers 3403 and is manufactured by a layer by layer deposition of copper 3404 on each layer, resulting in a spiral shape.

[0339] In one embodiment, the shape of the spiral circumference is an arbitrary two dimensional closed polygon.

[0340] Reference is made to FIG. 35A , FIG. 35B A winding array 3300 is shown according to embodiments of the application, where each winding 3501 of the winding array 3300 is a closed polygon with sharp or rounded corners.

[0341] Reference is made to FIG. 35B , FIG. 35A A perspective view of a winding array 3300 is shown according to embodiments of the application. FIG. 36A ​

[0342] Reference is now made to FIG. 36A , FIG. 36A Each winding element 3601 is shown grouped in sets and the sets are arranged orthogonally to each other, according to embodiments of the present application.

[0343] FIG. 36B A plurality of patterns of winding array 3602 of winding elements 3601 are shown. In one embodiment, one or more individual winding elements 3601 are closed polygons with sharp or rounded corners.

[0344] In one embodiment, two or more individual winding elements 3601 are grouped in sets with the same orientation and arranged orthogonally to the plurality of sets around them. This facilitates the creation of the desired magnetic field pattern, thereby actuating the mover 201 in the desired manner.

[0345] Reference is now made to FIG. 36B , FIG. 34D Each winding element 3601 is shown stacked in different planes with different orientations, according to embodiments of the present application.

[0346] In one embodiment, each winding element 3601 is grouped in one layer (e.g. layer #3 represented by 3603) with the same orientation, and two or more layers (e.g. layer #1 represented by 3604 and layer #2 represented by 3605) of each winding element 3601 with different orientations are stacked together. As the layers gradually move away from the surface of the magnet array, the thickness of the copper traces (e.g. copper traces 3402 shown) of the individual winding elements 3601 gradually increases, as the winding needs to carry more current to generate the actuation force. FIG. 37

[0347] The control architecture in the setup of a planar motor based positioning stage is discussed below.

[0348] The control architecture of a planar motor describes the way the current flowing through each winding (e.g. windings 3301, 3401, 3501, 3601) of a winding array (e.g. winding array 3300) is controlled. This is related to the magnet size, magnet pitch, winding array layout, precision requirements and commutation algorithm.

[0349] In one embodiment, each winding (e.g. windings 3301, 3401, 3501, 3601) is modeled independently and the current flowing through each winding (e.g. windings 3301, 3401, 3501, 3601) is calculated separately, i.e. each winding has a separate phase. This provides flexibility for the actuation of the mover (e.g. mover 201) along the in-plane and out-of-plane axes. ​

[0350] In one embodiment, in terms of current control, two or more windings (e.g., windings 3301, 3401, 3501, 3601) are grouped together, i.e., multiple windings are at the same phase. This provides an advantage that the number of controllers / drivers for overall control of the table is significantly reduced. This also reduces the amount of computation and the work load of the controller.

[0351] The fabrication of the magnet array in the setup of the planar motor based positioning table is discussed below.

[0352] In one embodiment, the magnets (e.g., magnets 2801) are large enough to be assembled manually along the desired orientation.

[0353] In one embodiment, special jigs are prepared to load multiple magnets (e.g., multiple magnets 2801) along the pre-set orientation, and to place the multiple magnets together on a substrate to achieve the desired magnet orientation, especially for Halbach array.

[0354] FIGS. 38A-38D is a flowchart of a method 3700 of fabricating a magnet (e.g., magnet 2801) array according to embodiments of the application. FIG. 37 shows a cross-sectional view of fabricating a magnet (e.g., magnet 2801) array using the steps described in FIG. 37

[0355] Referring to FIGS. 38A-38D in conjunction with FIG. 38A At step 3701, high ferromagnetic material 3801 (e.g., cobalt, nickel, iron, gadolinium, neodymium, steel, magnetite, etc.) is patterned on two different substrates 3802A, 3802B, as shown in FIG. 38A

[0356] In one embodiment, the magnets are very small and cannot be assembled directly. Therefore, the high ferromagnetic material 3801 is patterned on two substrates, e.g., substrates 3802A and 3802B, as shown in FIGS. 38A-38B The patterns on the two substrates 3802A and 3802B are complementary so that when assembled together, they form a single array.

[0357] At step 3702, the ferromagnetic material 3801 is magnetized by a strong magnetic field 3804 (magnet 3803) in the same direction, as shown in FIG. 38C In other words, the patterns on both substrates 3802A and 3802B are exposed to the high strength magnetic field 3804 to magnetize the pillars.

[0358] ​​At step 3703, one of the two substrates, e.g., substrate 3802B, is inverted and the magnets 3803 are assembled on the non-inverted substrate, e.g., substrate 3802A, which forms a magnet array 3805 with alternating polarity, as shown in FIG. 38D This magnet array 3805 is formed due to the combination of the complementary patterns on substrates 3802A and 3802B, which forms a magnet array 3805 with alternating polarity. In one embodiment, substrate 3802B is inverted and the magnetized posts are adhered to substrate 3802A using an adhesive.

[0359] At step 3704, the inverted substrate, e.g., substrate 3802B, is removed, as shown in FIGS. 39A-39B

[0360] Non-commutator planar motor (electromagnetic) based actuation is discussed below.

[0361] Reference is now made to FIG. 39A , FIG. 39B showing a top view of non-commutator planar motor (electromagnetic) based actuation according to embodiments of the application. FIGS. 39A-39B showing a front view of non-commutator planar motor (electromagnetic) based actuation according to embodiments of the application.

[0362] As shown in FIGS. 39A-39B , the inductive elements 2704, which include windings (e.g., windings 3301, 3401, 3501, 3601), interact with the magnets 2801 to produce an actuation force. Since the magnets 2801 do not interact with multiple windings, commutation algorithms are not required.

[0363] FIG. 40 showing a schematic diagram of central table / mover 201 non-commutated planar motor (electromagnetic) based actuation. In one embodiment, the one or more in-plane flexure mechanisms (e.g., in-plane flexure mechanisms 400, 500) can be any of the in-plane flexure mechanisms described herein.

[0364] In one embodiment, one or more permanent magnets 2801 are provided attached to the mover 201.

[0365] In one embodiment, one or more inductive elements 2704 are provided in alignment with the permanent magnets 2801. Current is passed through these inductive elements 2704 and the resulting magnetic field 3901 interacts with the permanent magnets 2801, which produces a movement force acting on the mover 201 and thus actuation of the mover.

[0366] ​In one embodiment, one or more inductive elements 2704 are windings (e.g., windings 3301, 3401, 3501, 3601) as described above. The current carrying windings can generate a magnetic field that interacts with the permanent magnet 2801 to produce the desired actuation force. In one embodiment, the axis of the windings (e.g., windings 3301, 3401, 3501, 3601) coincides with the corresponding pole axis of the magnet.

[0367] FIGS. 39A-39B An exemplary winding (e.g., windings 3301, 3401, 3501, 3601) and magnet (e.g., 2801) arrangement according to embodiments of the application is shown.

[0368] In one embodiment, the windings (e.g., windings 3301, 3401, 3501, 3601) of the inductive elements 2704 are arranged in an orthogonal direction compared to the windings shown. FIG. 40

[0369] In one embodiment, as shown, the conductors 4001 are attached to the inductive elements 2704, the conductors 4001 interact with the magnetic field of the windings and cause the magnetic field of the windings to bend and extend (see 4002) so that the resulting magnetic field can interact with the permanent magnet 2801 to achieve the desired actuation. This orientation improves the packing efficiency of the windings. FIGS. 41A-41D In one embodiment, the conductors 4001 interact with the magnetic field generated by the windings (e.g., windings 3301, 3401, 3501, 3601) of the inductive elements 2704, which causes the magnetic field to bend and extend so that the magnetic field can interact with the permanent magnet 2801 in an orthogonal direction to produce the actuation force. In one embodiment, the axis of the windings (e.g., windings 3301, 3401, 3501, 3601) does not coincide with the corresponding pole axis of the magnet. The manufacture of windings for non-rectilinear planar motor actuation mechanisms is discussed below.

[0370] Referring now to

[0371] , FIG. 41A ,A top view of copper traces 3402 that form a square spiral winding structure 4101 according to embodiments of the application is shown. FIG. 41B A front view of copper traces 3402 that form a square spiral winding structure 4101 according to embodiments of the application is shown. FIG. 41C A bottom view of copper traces 3402 that form a square spiral winding structure 4101 according to embodiments of the application is shown. FIG. 41D A square spiral winding structure 4101 according to embodiments of the application is shown. FIGS. 41A-41D

[0372] ​ ​A schematic diagram showing an example winding structure and fabrication technique. In one embodiment, one or both of the top and bottom layers of the winding have copper traces 3402 that are re-routed in-plane to obtain multiple turns, which forms a winding such as a square spiral winding structure 4101. Current flowing through the resulting winding structure 4101 can generate an induced magnetic field that can interact with a permanent magnet (e.g., permanent magnet 2801) and generate an actuation force as desired.

[0373] In one embodiment, the square spiral winding structure 4101 is fabricated using MEMS (micro-electro-mechanical systems) fabrication techniques.

[0374] A metrology method to obtain position feedback for a precise closed loop control architecture is discussed below.

[0375] In one embodiment, one or more sensors or sensing systems are involved for sensing the position of the worktable along the X, Y and Θ Z directions.

[0376] In one embodiment, the one or more sensors are capacitive sensors. In one embodiment, the one or more capacitive sensors have a capacitive probe attached to the mover (e.g., mover 201). In one embodiment, the one or more capacitive sensors have a capacitive probe attached to the stator (e.g., stator 2601).

[0377] In one embodiment, the one or more sensors are laser sensors. In one embodiment, the optical sensor has a light emitting probe that emits light of a certain wavelength in a certain direction. In one embodiment, there is a read-head that collects light reflected from the surface on which the light beam from the light emitting probe is projected. The time lag of the reflected light gives the distance of the light from the surface from the laser sensor. In one embodiment, the laser sensor is on the mover (e.g., mover 201) and projects the light beam on the surface of the stator (e.g., stator 2601). In one embodiment, the laser sensor is on the stator (e.g., stator 2601) and projects the light on the surface of the mover (e.g., mover 201).

[0378] In one embodiment, one or more sensing systems are interferometry-based systems. In one embodiment, one or more microscopes are provided that emit light on a substrate carried by the stage and receive images. In one embodiment, the substrate and template have a plurality of alignment marks that overlap and form fringe patterns that can be observed from the microscope images. These fringe patterns represent the relative alignment error between the substrate and template, which is used as feedback for the short-stroke stage, and the stage is actuated in a closed-loop manner to eliminate the alignment error.

[0379] In one embodiment, piezoelectric actuators are used to achieve actuation in one or more of the X, Y, and θ Z directions. In-plane flexure mechanisms (e.g., in-plane flexure mechanisms 400, 500) are used to achieve motion in one or more of the X, Y, and θ Z directions, and passively constrain one or more of the Z, θ X and θ Y directions. Out-of-plane flexures (e.g., flexure 203) are used to transfer motion of the actuators to the movers (e.g., mover 201).

[0380] In one embodiment, piezoelectric actuators are used to achieve actuation in one or more of the X, Y, and θ Z directions, where out-of-plane flexure mechanisms (e.g., out-of-plane flexure mechanisms 1100, 1200) transfer motion of the actuators (e.g., actuators 901) to the movers (e.g., mover 201), and in-plane flexure mechanisms (e.g., in-plane flexure mechanisms 400, 500) achieve motion in one or more of the X, Y, and θ Z directions. In-plane flexures (e.g., flexure 203) and liquid films (e.g., liquid film 2705) are used to achieve passive constraint in one or more of the Z, θ X and θ Y directions.

[0381] In one embodiment, actuation based on non-commutating sub-plane motors is used to achieve actuation in one or more of the X, Y, and θ Z directions. In-plane flexure mechanisms (e.g., in-plane flexure mechanisms 400, 500) and liquid films (e.g., liquid film 2705) are used to provide passive constraint in one or more of the Z, θ X and θ Y directions.

[0382] In one embodiment, actuation based on commutating sub-plane motors is used to achieve actuation in one or more of the X, Y, and θ Zactuation in one or more of the X, Y, and θ X directions, and passive holding in one or more of the Z, θ Y directions, through in-plane flexure mechanisms (e.g., in-plane flexure mechanisms 400, 500) and / or liquid films (e.g., liquid film 2705).

[0383] In one embodiment, actuation in one or more of the X, Y, and θ Z directions is obtained using commutator plane motor based actuation, and passive holding in one or more of the Z, θ X and θ Y directions is provided through flexible control implemented commutation algorithms for mover levitation in the Z direction.

[0384] In summary, the principles of the present application provide apparatuses to set nanometer precision short stroke stages for actuation in one or more of the X, Y, and / or θ Z directions with sub-50 nm precision and active or passive control in the θ X , θ Y and Z directions.

[0385] The description of the various embodiments of the application is presented for purposes of illustration and description, and is not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The terminology used herein was chosen to best explain the principles of the embodiments, the practical application, or technical improvement over technologies found in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.

Claims

1. A system for aligning and bonding four or more dies relative to a substrate, the system comprising: Four or more stage modules for aligning the four or more dies relative to the substrate, wherein the alignment is performed with a sub-50 nm alignment accuracy, wherein the four or more stage modules are aligned along the X, Y, and θ directions. Z Actuation in one or more of the directions.

2. The system according to claim 1, wherein the actuation is achieved by piezoelectric and / or electromagnetic methods.

3. The system according to claim 1, wherein along the Z direction, θ X Direction and θ Y Movement in one or more directions is passively restrained.

4. The system according to claim 1, further comprising: In-plane flexible mechanism, wherein along the X direction, the Y direction and the θ direction Z The actuation in one or more of the directions is achieved by the in-plane flexible mechanism comprising one or more intersecting flexible elements.

5. The system of claim 1, wherein the components are used along the X direction, the Y direction, and the θ direction. Z The actuated motion in one or more directions is transmitted from multiple actuators via one or more dual-slider out-of-plane mechanisms.

6. The system of claim 1, wherein the components are used along the X direction, the Y direction, and the θ direction. Z The actuated motion in one or more directions is transmitted from multiple actuators via one or more lever-type out-of-plane mechanisms.

7. The system according to claim 3, further comprising: Used along the Z direction, the θ X Direction and the stated θ Y The passively restrained mechanism in one or more directions consists of a two-degree-of-freedom flexible hinge connected in series with a sheet-like flexible element.

8. The system according to claim 1, further comprising: One or more thermal actuators, wherein along the X direction, the Y direction and the θ direction Z The actuation in one or more of the directions is achieved by the one or more thermal actuators.

9. The system according to claim 1, further comprising: Multiple actuators, implemented by the multiple actuators along the X direction, the Y direction, and the θ direction. Z The actuation in one or more of the directions is arranged along the X-axis and / or Y-axis.

10. The system according to claim 1, further comprising: Multiple actuators, implemented by the multiple actuators along the X direction, the Y direction, and the θ direction. Z The actuation in one or more of the directions is arranged along the Z-axis.

11. The system according to claim 1, further comprising: One or more actuator-table adapters, via which the actuator-table adapters achieve the following along the X direction, the Y direction, and the θ direction. Z Movement in one or more directions is protected by a mechanism for stabilizing the actuator.

12. The system of claim 3, wherein the passive restraint is achieved by a liquid film, wherein the liquid film is between the stator surface and the mover surface.

13. The system of claim 3, wherein the passive holding is achieved by a liquid film, wherein the liquid film is between the stator die and the substrate.

14. The system of claim 1, wherein along the X direction, the Y direction, and the θ direction... Z The actuation in one or more of the directions is achieved by actuation based on a commutator planar motor having helical windings manufactured in a layer-by-layer manner.

15. The system of claim 1, wherein along the X direction, the Y direction, and the θ direction... Z The actuation in one or more of the directions is achieved by actuation based on a non-rectifier subplanar motor.

16. The system of claim 1, wherein along the X direction, the Y direction, and the θ direction... Z The actuation in one or more of the directions is achieved using windings, via actuation based on a non-rectifier planar motor, wherein the axis of the windings coincides with the corresponding magnet pole axis.

17. The system of claim 1, wherein along the X direction, the Y direction, and the θ direction... Z The actuation in one or more of the directions is achieved using windings, via actuation based on a non-rectifier planar motor, wherein the axis of the windings does not coincide with the corresponding magnet pole axis, and wherein the conductor is used to bend the magnetic field to interact with the magnetic field of the permanent magnet.

18. The system of claim 1, wherein along the X direction, the Y direction, and the θ direction... Z The actuation in one or more of the directions is achieved using windings, via actuation based on a non-rectifier planar motor, wherein the windings are square helical elements manufactured in a layer-by-layer manner.

19. The system of claim 3, wherein the passive restraint is achieved by a liquid film, wherein the liquid film is water.

20. The system according to claim 1, further comprising: A retaining flexible member extending from the stator, wherein the retaining flexible member is attached to the output block of the out-of-plane flexible mechanism to achieve [something] along the X direction, the Y direction, and the θ direction. Z The actuation of the direction.

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