Micro-operation control method for chemical tweezers based on multi-sensor fusion regulation

Abstract

The invention discloses a chemical tweezers micro-operation control method based on multi-sensor fusion regulation and control. The invention relates to a chemical tweezers micro-operation control method based on multi-sensor fusion regulation and control. The invention aims to solve the problems of unstable pickup, inaccurate release and easy damage to an operation object when the metal micro-component is operated by the existing micro-operation method. According to the method, chemical tweezers are formed through electrochemical deposition so as to stably pick up the metal micro-component, and deposited metal is removed through electrolysis so as to complete accurate release. In the operation process, the microscopic vision technology is adopted to provide precise vision guidance and chemical tweezers surface morphology observation, and meanwhile, the micro-current signal detection technology is combined to monitor the forming and dissolving state of the chemical tweezers and the contact condition of the chemical tweezers and an operation object in real time, so that precise control over the whole operation process is achieved. The method is suitable for micro-operation and micro-assembly of metal micro-components.

Description

TECHNICAL FIELD

[0001] The present application relates to a chemical tweezers micro-operation control method based on multi-sensor fusion regulation. BACKGROUND

[0002] With the rapid development of information technology, instrument science and mechanical systems are accelerating towards miniaturization and intelligentization. Micro pressure sensors, micro displacement sensors, micro accelerometers and other micro electronic devices have been widely used in many fields. This trend not only promotes the progress of micro operation technology, but also puts forward higher requirements for it, which needs to meet the high-precision operation and assembly requirements of smaller components and more complex structures.

[0003] In the process of micro operation of metal micro components, due to their extremely small size, significant size effect, surface / interface effect, quantum effect and multi-field coupling effect, the operation difficulty is greatly increased. The existing micro operation methods mainly include clamping type, vacuum adsorption type, adhesion force driving type and acoustic tweezers, optical tweezers, magnetic tweezers and other technologies, but they have the following limitations: first, most methods rely on large-area contact between mechanical operation tools and objects, which is limited by the strength of metal micro components, and is easily damaged by excessive operation force; second, in the actual assembly scene of micro-scale functional devices, the components to be operated are often in a complex environment of multiple components, and the operation space is limited, so the existing methods are difficult to balance the stability and success rate of operation; third, in the core operation link, especially in the stable picking and accurate release of metal micro components, there are still theoretical bottlenecks and technical shortcomings, which cannot meet the needs of high-precision micro assembly.

[0004] Therefore, it has become a key issue to be urgently broken through in the current micro operation field to develop a new type of metal micro component operation method that uses tools smaller than the operation object to achieve efficient and low-damage micro operation, and to solve the problems of unstable picking, inaccurate release and easy damage to the operation object in the existing technology, which is the core demand. SUMMARY

[0005] The present application is to solve the problems of unstable picking, inaccurate release and easy damage to the operation object in the existing micro operation method when operating metal micro components, and provides a chemical tweezers micro-operation control method based on multi-sensor fusion regulation.

[0006] The application discloses a chemical tweezers micro-operation control method based on multi-sensor fusion regulation, realizes stable pickup of a metal micro-component by chemical tweezers through an electrochemical deposition method, removes deposited metal formed during pickup through electrolysis, provides visual guidance by using microscopic visual technology during the operation of the chemical tweezers, simultaneously monitors the forming and dissolving conditions of the chemical tweezers during operation and the contact state of the chemical tweezers and the metal micro-component by using micro-current signal detection technology, constructs a chemical tweezers operation experimental platform based on multi-sensor fusion to realize accurate control of the whole operation process, and the chemical tweezers refer to a firm chemical bond connector formed between a pipette nozzle and a metal micro-component through an electrochemical reaction.

[0007] The application has the following beneficial effects:

[0008] The method improves the operation precision and efficiency of the metal micro-component, solves the problems of unstable pickup, inaccurate release and easy damage to the operation object during operation of the metal micro-component by the existing micro-operation method, realizes the integration of the operation and detection processes, and promotes the development of the micro-operation technology. For the operation object, the metal micro-component is a micro-copper wire with a radius of 40 microns and a length of 600 microns, the operation tool is a micro-pipette with a nozzle radius of 10 microns, the pickup time is 180 seconds, the release time is 220 seconds, and the operation object is not damaged after operation. The experimental results prove the feasibility and high efficiency of the metal micro-component operation method based on the chemical tweezers. During the operation process, the multi-sensor fusion based on microscopic vision and micro-current realizes high-precision operation of the chemical tweezers. BRIEF DESCRIPTION OF DRAWINGS

[0009] Figure 1 FIG. 1 is a structural schematic diagram of a chemical tweezers operation experimental platform based on multi-sensor fusion;

[0010] Figure 2 FIG. 2 is a process schematic diagram of a chemical tweezers micro-operation control method based on multi-sensor fusion regulation;

[0011] Figure 3 FIG. 3 is a physical diagram of a chemical tweezers operation experimental platform based on multi-sensor fusion;

[0012] Figure 4 FIG. 4 is a schematic diagram of an operation process of a chemical tweezers operation experimental platform based on multi-sensor fusion in an embodiment;

[0013] Figure 5 FIG. 5 is a schematic diagram of an operation process of a chemical tweezers operation experimental platform based on multi-sensor fusion in an embodiment 1 group;

[0014] Figure 6 FIG. 6 is a schematic diagram of an operation process of a chemical tweezers operation experimental platform based on multi-sensor fusion in an embodiment 2 group;

[0015] Figure 7Figure 3 is a schematic diagram of the operation process of the multi-sensor fusion-based chemical tweezers operation experimental platform of Example 3;

[0016] Figure 8 Figure 4 is a circuit current diagram of the operation process. DETAILED DESCRIPTION

[0017] Specific implementation one: a chemical tweezers micro-operation control method based on multi-sensor fusion regulation in the embodiment, the chemical tweezers realizes stable pickup of metal micro components through electrochemical deposition, and the deposited metal formed during pickup is removed by electrolysis; during the operation of the chemical tweezers, microscopic vision technology is used to provide visual guidance, and micro-current signal detection technology is used to monitor the formation and dissolution of the chemical tweezers during operation, as well as the contact state of the chemical tweezers and the metal micro components in real time, so as to build a multi-sensor fusion-based chemical tweezers operation experimental platform to accurately control the entire operation process; the chemical tweezers refers to a firm chemical bond connector formed between the nozzle of a pipette and a metal micro component through electrochemical reaction.

[0018] In this embodiment, the chemical tweezers is formed by electrochemical deposition to realize pickup. Metal ions are deposited through reduction reaction in the electrochemical reaction, and the same-element metal bond connector is formed between the nozzle of the pipette and the metal micro component. The atomic-level chemical bonding force is much greater than the surface force interference, ensuring stable and controllable connection strength. Microscopic vision is used to monitor the formation of the chemical tweezers in real time, and micro-current detection is used to feedback the stability of the deposition process. The deposition voltage and time are regulated and controlled by the fusion of the two, avoiding pickup failure caused by insufficient or excessive deposition.

[0019] In this embodiment, the chemical tweezers is dissolved by electrolysis to realize release. After applying a reverse voltage, the deposited metal of the chemical tweezers is converted into metal cations in the electrolyte through electrolytic reaction, and the chemical tweezers is completely converted from a "solid connector" to a "liquid ion", realizing zero mechanical force dissociation and avoiding position disturbance caused by mechanical unloading. Micro-current signals reflect the electrolysis progress in real time, and microscopic vision is used to observe the disappearance state of the chemical tweezers, so as to accurately control the release time and ensure that the component is stably separated from the target position. After dissolution, only the capillary force of the electrolyte is left, and the adhesion between the metal micro component and the substrate (preset to be greater than the capillary force) ensures the final separation and eliminates the risk of "adhesion".

[0020] In this embodiment, low damage is realized through micro-scale chemical action and low contact design. The nozzle of the pipette and the component realize "soft contact" through the meniscus of the electrolyte, and the capillary force only acts on the tip of the nozzle, with a contact area smaller than the existing tools by 1-2 orders of magnitude, avoiding mechanical extrusion damage. Electrochemical deposition / electrolysis process realizes connection and dissociation through ion migration, without mechanical force transmission. Only chemical reaction is driven by electric field, and the stress impact on the component surface can be ignored. The electrolyte is a salt solution of the same element as the component, and there is no foreign matter left after the electrolyte residue is volatilized, avoiding chemical corrosion damage.

[0021] Specific implementation two: the difference between this embodiment and specific implementation one is that the method specifically comprises the following steps:

[0022] Step one: use microscopic visual algorithm to identify and locate the pipette nozzle and the metal micro-objects, obtain the positional deviation between the two, and feed the positional deviation back to the motion controller, which controls the pipette nozzle to move stably to the surface of the metal micro-objects;

[0023] Step two: the electrolyte in the pipette forms a meniscus between the pipette nozzle and the metal micro-objects under the action of capillary force, so that the two achieve "soft contact"; under the action of an external voltage, a reduction reaction occurs between the pipette nozzle and the metal micro-objects, and metal ions are deposited from the surface of the metal micro-objects in the meniscus and gradually deposited inside the pipette nozzle, forming a chemical tweezer;

[0024] Step three: use an electrometer to detect the micro-current in real time during the operation, determine whether the chemical tweezer and the metal micro-objects form effective contact by detecting whether there is current in the operation loop, and monitor the quality of the formation and dissolution of the chemical tweezer by combining the fluctuation of the micro-current and the surface morphology of the chemical tweezer observed by microscopic vision;

[0025] Step four: after a sufficient deposition time, a firm chemical tweezer is formed, which connects the metal micro-objects and the pipette as a whole, and the micro-motion platform is controlled to move the operation tool to realize the picking up of the metal micro-objects by the chemical tweezer, and the metal micro-objects are transferred to the specified position by controlling the micro-motion platform;

[0026] Step five: when releasing, the metal micro-objects are placed at the specified position by the motion controller, a reverse voltage is applied, and the deposited metal generated during picking up is electrolyzed to convert the chemical tweezer into electrolyte; after complete electrolysis, the chemical tweezer is removed, the pipette nozzle is separated from the surface of the metal micro-objects, and the release is successfully completed. Other steps and parameters are the same as in specific implementation one.

[0027] After the chemical tweezer in this embodiment is removed, only the capillary force generated by the electrolyte exists between the pipette nozzle and the metal micro-objects, relying on the adhesion between the metal micro-objects and the substrate.

[0028] Specific implementation three: the difference between this embodiment and specific implementation one is that the chemical tweezer operation experimental platform based on multi-sensor fusion is composed of a micro-object operation platform, a micro-operation motion system, a microscopic visual target recognition and positioning system, and a micro-current detection system. Other steps and parameters are the same as in specific implementation one.

[0029] The embodiment can also develop a human-computer interaction interface with image acquisition, micro-operation target recognition and positioning, current detection and micro-motion control by using the MFC library, realize automatic recognition of micro-operation objects and operation tools and positioning of operation points, and control the micro-motion platform to automatically move the end of the operation tool to the operation position of the operation object.

[0030] Specific embodiment four: The difference between this embodiment and specific embodiment three is that the micro-object operation platform is composed of a vibration isolation table, a horizontal object table and a pipette support. The vibration isolation table is arranged at the bottom of all micro-operation devices. The horizontal object table can provide pitch adjustment of ±5°, tilt adjustment and rotation adjustment of ±10°. The pipette support is used to clamp and fix the operation tool. Other steps and parameters are the same as those in specific embodiment three.

[0031] In this embodiment, the vibration isolation table is placed at the bottom of all micro-operation devices, which can prevent the operation process from being affected by external environmental vibration and mechanical vibration.

[0032] Specific embodiment five: The difference between this embodiment and specific embodiment three is that the micro-operation motion system is composed of a micro-motion platform combined with coarse adjustment and fine adjustment and a matching motion controller, which is responsible for completing the motion control task of the operation tool during the picking, transferring and releasing of the micro-operation object. Other steps and parameters are the same as those in specific embodiment three.

[0033] Specific embodiment six: The difference between this embodiment and specific embodiment three is that the microscopic visual target recognition and positioning system is composed of two high-resolution CMOS cameras placed orthogonally, a microscope lens and a light source. The system collects images of the operation object and the operation tool from horizontal and vertical angles, and realizes recognition and positioning of the operation object and the operation tool through corresponding image algorithms. Other steps and parameters are the same as those in specific embodiment three.

[0034] Specific embodiment seven: The difference between this embodiment and specific embodiment three is that the micro-current detection system is composed of a voltage source and an electrometer. The voltage source is used to provide voltage for the micro-zone electrochemical metal deposition and electrolysis process. The electrometer is used to detect the loop current in the electrochemical operation process of the metal micro-component. Other steps and parameters are the same as those in specific embodiment three.

[0035] Specific embodiment eight: The difference between this embodiment and specific embodiment one is that in the metal deposition process, the rear port of the pipette is inserted into a metal wire with the same element as the cations in the electrolyte as the anode, and the metal operation object on the surface of the silicon substrate is used as the cathode. After applying a voltage of 0.25V, metal ions in the electrolyte in the micro-pipette are transferred to the cathode, reduced and deposited on the surface of the operation object, and gradually extended to the inside of the pipette nozzle to form a chemical tweezers. Other steps and parameters are the same as those in specific embodiment one.

[0036] Specific embodiment nine: the difference between this embodiment and specific embodiment one is that: in the metal electrolysis process, a -0.04V reverse voltage is applied, at this time the metal deposited in the pipette acts as the anode, and the metal wire inserted into the back port of the pipette acts as the cathode. The deposited metal in the pipette is electrolyzed, and the solid metal is converted into metal cations and transferred to the electrolyte, and the chemical tweezers are dissolved and removed. Other steps and parameters are the same as specific embodiment one.

[0037] Specific embodiment ten: the difference between this embodiment and specific embodiment one is that: the radius of the pipette nozzle is one fourth of the radius of the metal microstructure, and the electrolyte is a salt solution of the metal microstructure, which contains metal ions of the same metal element as the metal microstructure. Other steps and parameters are the same as specific embodiment one.

[0038] The beneficial effects of the present application are verified by the following examples:

[0039] Example: A chemical tweezers micro-operation control method based on multi-sensor fusion control adopts a multi-sensor fusion-based chemical tweezers operation experimental platform to realize accurate control of the entire operation process; the multi-sensor fusion-based chemical tweezers operation experimental platform is composed of a micro-object operation platform, a micro-operation motion system, a microscopic visual target recognition and positioning system, and a micro-current detection system; the micro-object operation platform is composed of a vibration isolation table (100BM-10, Minus k, USA), a horizontal stage (TTR001, Thorlabs, USA), and a pipette holder (UPN-20, Narishige, Japan); the vibration isolation table is set at the bottom of all micro-operation devices, the horizontal stage can provide ±5° pitch, tilt, and ±10° rotation adjustment, and the pipette holder is used to clamp and fix the operation tool; the micro-operation motion system is composed of a micro-motion platform combined with coarse and fine adjustment and a matching motion controller, which is responsible for the motion control task of the operation tool during the pickup, transfer, and release of the micro-operation object; the microscopic visual target recognition and positioning system is composed of two high-resolution CMOS cameras placed orthogonally, a microscope lens, and a light source, which acquires images of the operation object and the operation tool from horizontal and vertical angles, and realizes recognition and positioning of the operation object and the operation tool through corresponding image algorithms; the micro-current detection system is composed of a voltage source and an electrometer, the voltage source is used to provide voltage for the micro-area electrochemical metal deposition and electrolysis process, and the electrometer is used to detect the loop current during the electrochemical operation of the metal microstructure;

[0040] The control method specifically includes the following steps:

[0041] Step one: the operation object metal micro-component is a micro-copper wire with a radius of 40 microns and a length of 600 microns, and the operation tool is a micro-pipette with a nozzle radius of 10 microns, and the pipette is filled with a copper sulfate solution with a concentration of 0.5 mol / L; the micro-vision algorithm is used to identify and locate the pipette nozzle and the operation object metal micro-component, and the positional deviation between the two is obtained, which is fed back to the motion controller, and the motion controller controls the stable movement of the pipette nozzle to the surface of the metal micro-component;

[0042] Step two: the electrolyte in the pipette forms a meniscus between the pipette nozzle and the metal micro-component under the action of capillary force, so that the two achieve "soft contact"; under the action of an external voltage, a reduction reaction occurs between the pipette nozzle and the metal micro-component, and metal ions are deposited from the surface of the metal micro-component to the inside of the pipette nozzle, and during the metal deposition process, the rear port of the pipette is inserted into a metal wire with the same element as the cations in the electrolyte as an anode, and the metal operation object on the surface of the silicon substrate as a cathode, and after applying a voltage of 0.25V, metal ions in the electrolyte in the micro-pipette are transferred to the cathode and reduced and deposited on the surface of the operation object metal, and gradually extend to the inside of the pipette nozzle, forming a chemical tweezers;

[0043] Step three: the electrometer is used to detect the micro-current in the operation process in real time, and by detecting whether there is current in the operation loop, it is judged whether the chemical tweezers and the metal micro-component form effective contact, and at the same time, the quality of the formation and dissolution of the chemical tweezers is monitored by combining the fluctuation of the micro-current and the surface morphology of the chemical tweezers observed by the micro-vision;

[0044] Step four: after a sufficient deposition time, a firm chemical tweezers is formed, which connects the metal micro-component and the pipette into a whole, and by controlling the movement of the micro-motion platform, the chemical tweezers can pick up the metal micro-component, and by controlling the micro-motion platform, the metal micro-component can be transferred to a specified position;

[0045] Step five: when releasing, the metal micro-component is placed at a specified position by the motion controller, and the deposited metal during picking is electrolyzed, and during the metal electrolysis process, a reverse voltage of-0.04V is applied, at this time the deposited metal in the pipette acts as an anode and the metal wire inserted into the rear port of the pipette acts as a cathode, and the deposited metal in the pipette is electrolyzed, and the solid metal is converted into metal cations and transferred to the electrolyte, so that the chemical tweezers is converted into the electrolyte; after 325s of complete electrolysis, the chemical tweezers is removed, and only the capillary force generated by the electrolyte connects the pipette nozzle and the metal micro-component, at this time the motion controller controls the operation tool to move upward, and the operation tool nozzle can smoothly separate from the surface of the metal micro-component by relying on the adhesion between the metal micro-component and the substrate, successfully realizing the release of the metal micro-component by the chemical tweezers.

[0046] The electrodeposition and electrolysis process between the pipette nozzle and the metal microstructure in this embodiment follows the basic principles of traditional metal deposition and electrolysis, but is limited to a narrow microzone in the nozzle rather than a macroscopic electrolyte environment, so it is called microzone electrochemical metal deposition and electrolysis.

[0047] Metal deposition (chemical tweezers formation): A metal wire of the same element as the cations in the electrolyte is used as the anode (inserted into the rear port of the pipette), and the metal microstructure on the surface of the silicon substrate is used as the cathode; when the pipette nozzle approaches the surface of the metal microstructure, a meniscus is formed between the nozzle and the structure under the action of capillary force; after a positive voltage is applied, metal ions migrate to the cathode (the surface of the metal microstructure) through the electrolyte, a reduction reaction occurs, and gradually deposits, eventually extending into the interior of the pipette nozzle, forming a chemical tweezers connecting the two;

[0048] Metal electrolysis (chemical tweezers dissolution): a reverse voltage is applied during the release phase, at which time the deposited metal in the pipette acts as the anode, and the original anode metal wire becomes the cathode; under the action of the voltage, the deposited metal undergoes an oxidation reaction, converting from a solid state to metal cations in the electrolyte, and the chemical tweezers gradually dissolve and are removed.

[0049] Pick-up process: the pipette nozzle and the metal microstructure are positioned with the aid of a microscopic vision system, the nozzle is moved to the surface of the structure by a motion controller, and a meniscus is formed to achieve "soft contact" using capillary force; the electrodeposition process is started, and the microcurrent in the loop is detected in real time by an electrometer: the presence of current indicates effective contact; if the current fluctuates smoothly and microscopic vision observes a smooth chemical tweezers surface, it is determined that the deposition quality is good;

[0050] After deposition to a preset time, the chemical tweezers firmly connect the structure and the pipette, and the pick-up and transfer are completed by a micro-motion platform;

[0051] Release process: after moving the structure to the target position, a reverse voltage is applied to start electrolysis, and the dissolution state of the chemical tweezers is monitored by microcurrent fluctuation and microscopic vision; after complete electrolysis, the chemical tweezers are converted into electrolyte, and the nozzle and the structure are only weakly connected by capillary force; relying on the adhesion between the structure and the substrate, the nozzle is successfully detached, achieving precise release.

[0052] Operating tool and electrolyte: the radius of the pipette nozzle is 1 / 4 of the radius of the structure, the contact area is small, and damage can be reduced; the electrolyte is selected to be a salt solution of the same element as the structure, avoiding corrosion of the structure by residual liquid, and the residual liquid can be removed by short-time evaporation.

[0053] Microscopic vision provides real-time visual guidance and surface morphology observation, microcurrent detection provides feedback on contact state and electrochemical process quality, and the two work together to achieve precise control of the entire operation process, ensuring the stability of chemical tweezers formation and dissolution.

[0054] The operation object metal micro-component of the embodiment is a micro-copper wire with a radius of 40 microns and a length of 600 microns, the operation tool is a micro-pipette with a nozzle radius of 10 microns, the pickup time is 180 seconds, the release time is 220 seconds, and the operation object has no damage after operation. The experimental results prove the feasibility and high efficiency of the metal micro-component operation method based on the chemical tweezers. During the operation process, based on the fusion of micro-vision and micro-current multi-sensing, high-precision operation of the chemical tweezers is realized.

[0055] Figure 8 The operation loop current diagram during the operation process; A-H respectively represent the current corresponding to different stages of the operation process: A, the initial state, the operation tool and the operation object are not in contact, and the current is 0; B, the operation tool and the operation object start to contact, the loop current changes suddenly from 0 to 200nA, C, the chemical tweezers forming stage, D, the chemical tweezers are shaped and the operation tool is moved, the operation object is picked up and separated from the operation base, at this time the loop is disconnected and the current becomes 0; E, the operation tool moves with the operation object, F, the opposite electrolysis voltage is applied, the operation object is placed in the specified position of the operation base, starts to contact, and the loop current recovers from 0 to-150nA, G, the chemical tweezers electrolysis process, H, the chemical tweezers electrolysis is complete, the operation tool is moved and the operation object is released, and the loop current changes from-150 to 0.

[0056] According to the embodiment, experiments are carried out on different nozzle radii, different radii and lengths of metal micro-components, and the data shown in Table 1 are obtained.

[0057]

Claims

1. A method for controlling chemical tweezers micromanipulation based on multi-sensor fusion modulation, characterized in that: The chemical tweezers is used to realize stable pickup of the metal microstructure by electrochemical deposition, and the deposited metal formed during pickup is removed by electrolysis; during the operation of the chemical tweezers, microscopic visual technology is used to provide visual guidance, and micro-current signal detection technology is used to monitor the forming and dissolving state of the chemical tweezers during operation, as well as the contact state of the chemical tweezers and the metal microstructure, so as to realize accurate control of the whole operation process by constructing a chemical tweezers operation experiment platform based on multi-sensor fusion; the chemical tweezers refers to a firm chemical bond connector formed between the nozzle of a pipette and the metal microstructure through electrochemical reaction. 2.The chemical tweezers micro-operation control method based on multi-sensor fusion regulation according to claim 1, wherein: The method specifically comprises the following steps: Step one: microscopic visual algorithms are used to identify and locate the nozzle of the pipette and the metal microstructure of the operation object, and the positional deviation of the two is obtained, which is fed back to the motion controller, and the motion controller controls the stable movement of the nozzle of the pipette to the surface of the metal microstructure; Step two: the electrolyte in the pipette forms a meniscus between the nozzle of the pipette and the metal microstructure under the action of capillary force, so that the two achieve "soft contact"; under the action of an external voltage, a reduction reaction occurs between the nozzle of the pipette and the metal microstructure, metal ions are deposited from the surface of the metal microstructure in the meniscus, and gradually deposited into the inside of the nozzle of the pipette, forming a chemical tweezers; Step three: the micro-current during operation is detected in real time by using an electrometer, whether the chemical tweezers and the metal microstructure form effective contact is judged by detecting whether there is current in the operation loop, and the quality of the forming and dissolving of the chemical tweezers is monitored by combining the fluctuation of the micro-current and the surface morphology of the chemical tweezers observed by the microscopic vision; Step four: after a sufficient deposition time, a firm chemical tweezers is formed, which connects the metal microstructure and the pipette as a whole, the pickup of the metal microstructure by the chemical tweezers is realized by controlling the movement of the micro-motion platform to move the operation tool, and the metal microstructure is transferred to a specified position by controlling the micro-motion platform; Step five: during the release operation, the metal microstructure is placed at a specified position by the motion controller, a reverse voltage is applied, the deposited metal generated during pickup is electrolyzed, the chemical tweezers is converted into electrolyte, and after complete electrolysis, the chemical tweezers is removed, the nozzle of the pipette is separated from the surface of the metal microstructure, and the release is successfully completed. 3.The chemical tweezers micro-operation control method based on multi-sensor fusion regulation according to claim 1, characterized in that: The chemical tweezers operation experiment platform based on multi-sensor fusion is composed of a micro-object operation platform, a micro-operation motion system, a microscopic visual target identification and positioning system, and a micro-current detection system.

4. The chemical tweezers micro-operation control method based on multi-sensor fusion regulation according to claim 3, characterized in that: The micro-object operation platform is composed of a vibration isolation table, a horizontal stage, and a pipette support, the vibration isolation table is arranged at the bottom of all micro-operation devices, the horizontal stage can provide pitch adjustment of ±5°, tilt adjustment of ±5°, and rotation adjustment of ±10°, and the pipette support is used to clamp and fix the operation tool.

5. The chemical tweezers micro-operation control method based on multi-sensor fusion regulation according to claim 3, characterized in that: The micro-operation motion system is composed of a micro-motion platform combining coarse adjustment and fine adjustment and a matching motion controller, which is responsible for the motion control of the operation tool during the pickup, transfer, and release of the micro-operation object.

6. The chemical tweezers micro-operation control method based on multi-sensor fusion regulation according to claim 3, characterized in that: The microscopic visual target recognition and positioning system is composed of two high-resolution CMOS cameras, a microscope lens and a light source, which are placed orthogonally. The system can collect images of the operating object and the operating tool from two different angles, and can recognize and position the operating object and the operating tool through corresponding image algorithms.

7. The chemical tweezers micro-operation control method based on multi-sensor fusion regulation according to claim 3, characterized in that: The micro-current detection system is composed of a voltage source and an electrometer. The voltage source is used to provide voltage for the micro-area electrochemical metal deposition and electrolysis process, and the electrometer is used to detect the loop current in the electrochemical operation process of the metal micro-component.

8. The chemical tweezers micro-operation control method based on multi-sensor fusion regulation according to claim 1, characterized in that: During the metal deposition process, the back port of the micropipette is inserted into a metal wire as an anode, which is made of the same element as the cations in the electrolyte. The metal operating object on the silicon substrate surface is used as a cathode. After applying a voltage of 0.25 V, metal ions in the electrolyte in the micropipette are transferred to the cathode, reduced and deposited on the surface of the operating object, and gradually extended to the inside of the micropipette nozzle, forming a chemical tweezers.

9. The chemical tweezers micro-operation control method based on multi-sensor fusion regulation according to claim 1, characterized in that: During the metal electrolysis process, a reverse voltage of-0.04 V is applied. At this time, the deposited metal in the micropipette acts as an anode, and the metal wire inserted into the back port of the micropipette acts as a cathode. The deposited metal in the micropipette is electrolyzed, and the solid metal is converted into metal cations and transferred to the electrolyte. The chemical tweezers are dissolved and removed.

10. The chemical tweezers micro-operation control method based on multi-sensor fusion regulation according to claim 1, characterized in that: The radius of the micropipette nozzle is one-fourth of the radius of the metal micro-component, and the electrolyte is a salt solution of the metal micro-component, which contains metal ions of the same metal element as the metal micro-component.

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