Fluid control device for semiconductor processes

Abstract

The embodiment of the present specification provides a kind of fluid control device for semiconductor process, including valve body and valve stem, the first end of the valve stem is inserted into the inside of the valve body for installing valve plate, the valve stem is used to drive valve plate rotation to carry out flow control to medium passing, the device further includes limiting component, the opposite first force and second force of the limiting component are respectively applied to the end of the valve stem inserted into the inside of the valve body and the area of the valve stem passing out of the valve body, to make the axial center alignment state between the valve stem and the valve plate be kept.By setting limiting component, the opposite first force and second force of the limiting component are respectively applied to the end of the valve stem inserted into the inside of the valve body and the part of the valve stem outside the valve body, under the action of first force and second force, axial pre-tightening of valve stem can be realized, guarantee the axial center alignment state between the valve stem and the valve plate be kept.

Description

TECHNICAL FIELD

[0001] The present specification relates to the technical field of semiconductor process, in particular to a fluid control device for semiconductor process. BACKGROUND

[0002] In the process of semiconductor process, the valve is often used to control the flow of fluid in many scenes, and the rotating shaft part is generally used to control the valve. In order to ensure the normal work of the rotating shaft part, three fixed constraints and one auxiliary constraint must be provided.

[0003] The valve used in semiconductor equipment is small in size, and in order to prevent leakage, sliding bearing is often used at the lower end of the valve rod instead of rolling bearing. The sliding bearing can only provide radial constraint, in order to solve this problem, a pair of butterfly springs are usually added at the upper end of the shaft to provide axial pre-tightening for the valve rod.

[0004] The axial dimension of the pair of butterfly springs is less than 1mm, and the pre-tightening space provided by the pair of butterfly springs is very small. Therefore, the size of the valve rod and the valve body and other related parts must be very precise, that is, the precision of the system is very high. At the same time, the operation skill of the assembler is also required to be high, which not only increases the production cost, but also brings difficulties to the convenience of production. SUMMARY

[0005] Therefore, the present specification provides a fluid control device for semiconductor process, which comprises a limiting assembly. The limiting assembly respectively applies a first action force and a second action force to the end of the valve rod inserted into the valve body and the area of the valve rod outside the valve body. Under the action of the first action force and the second action force, the axial pre-tightening of the valve rod can be realized, and the axial center alignment between the valve rod and the valve plate can be ensured, so as to facilitate the accurate control of the fluid medium.

[0006] The present specification provides the following technical scheme: a fluid control device for semiconductor process, comprising a valve body and a valve rod, the first end of the valve rod is inserted into the valve body for installing a valve plate, the valve rod is used to drive the valve plate to rotate to control the flow of medium,

[0007] The device further comprises a limiting assembly, the limiting assembly respectively applies a first action force and a second action force to the end of the valve rod inserted into the valve body and the area of the valve rod outside the valve body, so that the valve rod and the valve plate are kept in axial center alignment.

[0008] Preferably, the first action force is an elastic action force applied by the corresponding end of the valve rod along the length direction of the valve rod; and / or,

[0009] The second force is a pushing force applied to the valve stem in a direction along its length and extending towards the inside of the valve body.

[0010] Preferably, the limiting assembly comprises a first limiting part for applying the first force and a second limiting part for applying the second force,

[0011] The first limiting part comprises an elastic member arranged between the end of the valve stem and the valve body,

[0012] The second limiting part comprises a first limiting boss connected to the area of the valve stem passing through the valve body and a limiting member abutting against the first limiting boss from above.

[0013] Preferably, the upper cover of the valve body is inwardly recessed to form a receiving groove, the valve stem passes through the receiving groove, the limiting member comprises a bearing member sleeved on the valve stem and located in the receiving groove, the first limiting boss is arranged corresponding to the rotating inner ring of the bearing member, and the bearing member and the valve stem and the upper cover form a sealing space for mounting a sealing assembly.

[0014] Preferably, the first limiting part further comprises a pad and a supporting member, opposite sides of the supporting member abut against the elastic member and the pad respectively, the pad abuts against the first end of the valve stem, and the side of the supporting member close to the pad is formed with a smooth circular arc contact surface.

[0015] Preferably, the elastic member is a spring, the supporting member is extended towards the end close to the spring to form a positioning column, the spring is at least partially sleeved outside the positioning column and abuts against the lower end surface of the supporting member, the supporting member is extended towards the pad to form a supporting column, and the top of the supporting column is formed with a smooth circular arc contact surface abutting against the pad.

[0016] Preferably, the valve stem comprises a main body part and a driving part, the first end of the main body part extends into the inside of the valve body and the second end extends to the outside of the valve body, the second end of the main body part is connected with the first end of the driving part through a connecting member, and the second end of the driving part is connected with an actuator to make the main body part and the driving part rotate synchronously.

[0017] The limiting assembly applies the first force and the second force to the two ends of the main body part respectively.

[0018] Preferably, the main body part and the driving part are connected for synchronous rotation through the connecting member, the first limiting boss is formed on the outer peripheral surface of the second end of the main body part, and the bearing member is a first rolling bearing.

[0019] Preferably, the limiting member further comprises a second rolling bearing sleeved on the end portion axial region of the driving portion close to the main body portion, the outer periphery of the driving portion extends outward to form a second limiting boss, the second limiting boss abuts against the top surface of the inner ring of the second rolling bearing, and the first rolling bearing and the second rolling bearing are clamped with an annular pad therebetween, the annular pad is arranged corresponding to the outer rings of the first rolling bearing and the second rolling bearing, so that the first rolling bearing and the second rolling bearing are kept in the abutting state with the first limiting boss and the second limiting boss respectively.

[0020] Preferably, the end faces of the driving portion and the main body portion are respectively formed with a first connecting groove and a second connecting groove, and the two connecting grooves are arranged in a cross shape along the axial direction, the connecting member comprises a first connecting portion matched with the first connecting groove and a second connecting portion matched with the second connecting groove, the orthographic projections of the first connecting portion and the second connecting portion are arranged perpendicular to each other, the first connecting portion and the first connecting groove are kept in engagement, and the second connecting portion and the second connecting groove are kept in precise fit.

[0021] Preferably, the device further comprises a bracket sleeved on the driving portion and fixedly connected with the upper cover, the bracket is used for mounting a heat sink, and the bracket is recessed inward to form an auxiliary limiting boss abutting against the top surface of the outer ring of the second rolling bearing.

[0022] Preferably, the top surface of the bracket is formed with a mounting surface for mounting an actuator, the housing of the actuator is fixedly connected with the bracket, one end of the housing towards the bracket is penetrated by the driving portion, the device further comprises a third rolling bearing arranged at the end portion of the driving portion close to the actuator, and the inner side wall of the housing is formed with a third limiting boss abutting against the bottom surface of the outer ring of the third rolling bearing.

[0023] Compared with the prior art, the above at least one technical scheme adopted by the embodiments of the present application can achieve at least the following beneficial effects:

[0024] By arranging the limiting assembly, the limiting assembly respectively applies the first action force and the second action force in opposite directions to the end portion of the valve rod extending into the valve body and the valve rod part outside the valve body, and under the action of the first action force and the second action force, the axial pre-tightening of the valve rod can be realized, the axial center alignment state between the valve rod and the valve plate is ensured, and therefore the accurate control of the fluid medium is facilitated; the precision requirements of the valve rod and the valve body are low, and the assembly operation is relatively simple. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0026] Figure 1 is a structural schematic diagram of a fluid control device for semiconductor process provided by the present application;

[0027] Figure 2 is a structural schematic diagram of a limiting assembly of the fluid control device for semiconductor process provided by the present application;

[0028] Figure 3 is a structural schematic diagram of a first limiting part of the fluid control device for semiconductor process provided by the present application;

[0029] Figure 4 is a structural schematic diagram of a connection between a driving part and a main body part of the fluid control device for semiconductor process provided by the present application;

[0030] Figure 5 is a structural schematic diagram of a connecting piece of the fluid control device for semiconductor process provided by the present application.

[0031] In the drawings, 1, valve body; 2, valve rod; 21, main body part; 211, second connecting groove; 22, driving part; 221, first connecting groove; 3, valve plate; 4, limiting assembly; 41, first limiting part; 411, elastic member; 412, supporting member; 4121, positioning column; 4122, supporting column; 413, pad; 42, second limiting part; 421, first limiting boss; 422, first rolling bearing; 43, second rolling bearing; 44, second limiting boss; 45, annular pad; 5, accommodating groove; 6, sealing assembly; 7, accommodating groove; 8, connecting piece; 81, first connecting part; 82, second connecting part; 9, actuator; 10, bracket; 11, heat sink; 12, auxiliary limiting boss; 13, third limiting boss; 14, third rolling bearing. DETAILED DESCRIPTION

[0032] The embodiments of the present application will be described in detail below with reference to the drawings.

[0033] The following detailed description is presented in order to describe the aspects of the application and it is not intended that this application be limited to the details of construction, layout, or process steps described. The following detailed description includes specific details in order to provide a thorough understanding of the various concepts described herein. However, various alternatives, modifications, and equivalents can be used. It should be appreciated that the aspects described herein can be implemented in a wide variety of ways and that the certain of the detailed examples are for illustrative purposes only.

[0034] It is to be understood that the aspects described below are merely examples of the aspects described in the appended claims. As such, the following detailed description is not limiting of the aspects described in the appended claims.

[0035] It is also to be understood that the following description is only one example of the aspects described in the appended claims. Certain aspects described below can be modified or combined in various ways, or can be omitted, without departing from the scope of the application as defined in the appended claims.

[0036] Furthermore, in the following description, numerous specific details are set forth in order to provide a thorough understanding of the examples. However, it will be apparent to one of ordinary skill in the art that the aspects described herein can be practiced without these specific details.

[0037] For the shaft parts of the rotary motion, in order to ensure its normal stable work, it is theoretically required to build a specific constraint system. Specifically, it is required to be equipped with three fixed constraints and one auxiliary constraint (pre-tightening). Among them, two radial constraints are realized by setting radial fixed bearings at both ends of the shaft, so as to effectively prevent the shaft from radial jumping during operation; one axial constraint and one axial auxiliary constraint (pre-tightening) act together, set a fixed constraint at any one end of the shaft to prevent axial movement, and implement axial pre-tightening at the other end.

[0038] Currently, the common methods for constraining rotary shaft components mainly rely on rolling bearings and sliding bearings. Rolling bearings have a unique advantage: a single rolling bearing can provide both radial and axial constraints, offering comprehensive support for the stable operation of the shaft. However, sliding bearings have a relatively limited function, providing only radial constraints and exhibiting significant shortcomings in axial constraints.

[0039] Taking the valve stem of a common butterfly valve as an example, as a typical rotary shaft component, radial constraints are usually provided at both ends of the valve stem, and the implementation method can be rolling bearings or sliding bearings. For axial constraints, the inner ring of a rolling bearing is generally used to block the shoulder on the valve stem, thereby limiting the axial position of the valve stem.

[0040] However, the situation is more complex in the field of butterfly valves used in semiconductor equipment. Due to the extremely stringent dimensional requirements of semiconductor equipment and the need to prevent leaks and other critical issues, rolling bearings are often unsuitable for the lower end of the valve stem in these butterfly valves; instead, sliding bearings are used. However, as mentioned earlier, sliding bearings can only provide radial restraint and cannot meet the requirements for axial restraint. To solve this problem, the current method is to add a pair of butterfly springs to the upper end of the shaft to apply axial preload to the valve stem.

[0041] However, this existing implementation method has many drawbacks. The axial dimension of a pair of butterfly springs combined is less than 1mm, providing extremely limited preload space. This requires that the dimensions of a series of related components, such as the valve stem and valve body, meet extremely high precision standards, posing a severe challenge to the accuracy of the entire system. At the same time, it also places high demands on the operational skills of assembly workers during the assembly process. This not only directly leads to a significant increase in production costs but also greatly affects the convenience of production, causing many problems in actual production.

[0042] The technical solutions provided by the various embodiments of this application are described below with reference to the accompanying drawings.

[0043] like Figure 1 As shown, a fluid control device for semiconductor processes includes a valve body 1 and a valve stem 2. The first end of the valve stem 2 extends into the valve body 1 for mounting a valve plate 3. The valve stem 2 is used to drive the valve plate 3 to rotate in order to control the flow rate of the medium flowing through it.

[0044] The device also includes a limiting component 4, which applies a first force and a second force in opposite directions to the end of the valve stem 2 inserted into the valve body 1 and the area of ​​the valve stem 2 protruding from the valve body 1, respectively, so as to keep the valve stem 2 and the valve plate 3 in an axially aligned state.

[0045] By setting the limiting assembly 4, the limiting assembly 4 respectively applies the opposite first action force and the second action force to the end of the valve rod 2 extending into the valve body 1 and the part of the valve rod 2 outside the valve body 1, under the action of the first action force and the second action force, the axial pre-tightening of the valve rod 2 can be realized, the axial center alignment state between the valve rod 2 and the valve plate 3 is ensured, the axial movement and / or deviation of the valve rod 2 in the rotating process is reduced, the flow of the medium in the rotating process of the valve plate 3 can be more accurately controlled, and the control precision and stability of the fluid control device are improved. At the same time, the stable axial position relationship reduces the wear between the valve rod 2 and the valve body 1 and other components, prolongs the service life of the device, and thus improves the quality of the finished product as a whole.

[0046] It should be noted that the limiting assembly 4 includes two parts, the first part is arranged inside the valve body 1, and the first action force along the axial direction of the valve rod 2 is applied to the end of the valve rod 2 extending into the valve body 1, and the second part is arranged outside the valve body 1, and the second action force opposite to the second action force is applied to the valve rod 2 outside the valve body 1, and the first action force and the second action force cooperate to realize the axial pre-tightening of the valve rod 2.

[0047] As shown in Figures 1-3 In some embodiments, the first action force is an elastic force applied by the corresponding end of the valve rod 2 along the length direction of the valve rod 2, and / or the second action force is a pushing force applied to the valve rod 2 along its length and extending towards the inside of the valve body 1. The first part of the limiting assembly 4 forms the first action force by applying an elastic force along the length direction of the valve rod 2 to the first end of the valve rod 2, and the first action force has a tendency to always push the valve rod 2 upward. At the same time, due to the existence of the first action force, the second part of the limiting assembly 4 will apply a second action force to the valve rod 2 in the opposite direction of the first action force, and the first action force and the second action force jointly constrain the valve rod 2, so as to ensure that the valve rod 2 and the valve plate 3 maintain the axial center alignment state.

[0048] It should be noted that since the first action force is an elastic force, it has a certain elastic deformation range and can adapt to valve rods 2 and related components with certain size errors, so the precision requirement of the fluid control device can be greatly reduced, and assembly personnel do not need to perform complex fine operations to control the size of the pre-tightening force.

[0049] As shown in Figures 1-3As shown, in some embodiments, the limiting component 4 includes a first limiting part 41 for applying the first force and a second limiting part 42 for applying the second force. The first limiting part 41 includes an elastic member 411 pressed between the end of the valve stem 2 and the valve body 1. The second limiting part 42 includes a first limiting boss 421 connected to the area where the valve stem 2 extends out of the valve body 1 and a limiting member pressing against the first limiting boss 421 from above. By applying the first force and the second force to the valve stem 2 through the first limiting part 41 and the second limiting part 42 respectively, the axial preload of the valve stem 2 is achieved. The specific process of the first limiting part 41 and the second limiting part 42 generating the first force and the second force will be described below:

[0050] The first limiting part 41 includes an elastic element 411 pressed between the end of the valve stem 2 and the valve body 1. When the valve stem 2 is in the installed state, the elastic element 411 is compressed between the end of the valve stem 2 and the valve body 1. Since the elastic element 411 has elastic deformation characteristics, an elastic restoring force is generated along the length direction of the valve stem 2, thereby forming the first force.

[0051] The second limiting part 42 consists of a first limiting boss 421 connected to the area where the valve stem 2 passes through the valve body 1 and a limiting member pressing against the first limiting boss 421. The first limiting boss 421 is fixed at the part where the valve stem 2 passes through the valve body 1. The limiting member presses against the first limiting boss 421 from above. When the valve stem 2 has an axial tendency to move in the direction of the first limiting boss 421, the limiting member will give the first limiting boss 421 a reverse force, thereby forming a second force.

[0052] like Figures 1-2 As shown, in some embodiments, the upper cover of the valve body 1 is recessed inward to form a receiving groove 5, the valve stem 2 protrudes from the receiving groove 5, the limiting member includes a bearing member sleeved on the valve stem 2 and located in the receiving groove 5, the first limiting boss 421 is correspondingly provided with the rotating inner ring of the bearing member, and a sealing space for installing the sealing assembly 6 is formed between the bearing member, the valve stem 2 and the upper cover.

[0053] The upper cover of the valve body 1 is inwardly recessed to form a containing groove 5, the valve stem 2 passes out of the containing groove 5, the bearing part of the limiting part is sleeved on the valve stem 2 and located in the containing groove 5, the first limiting boss 421 is arranged corresponding to the rotating inner ring of the bearing part, when the valve stem 2 has an axial movement tendency, the first limiting boss 421 will interact with the rotating inner ring of the bearing part, when the valve stem 2 has an axial movement tendency, the first limiting boss 421 will push the rotating inner ring of the bearing part upward, and the outer ring of the bearing part has a constraint relationship with the containing groove 5, thereby limiting the excessive axial movement of the valve stem 2. When the valve stem 2 drives the valve plate 3 to rotate, the rotating inner ring of the bearing part rotates together with the valve stem 2, and the outer ring is relatively static, and the relative movement ensures the smoothness of the rotation of the valve stem 2.

[0054] The bearing part, the valve stem 2 and the upper cover form a sealing space for installing the sealing assembly 6, the sealing assembly 6 is installed in the sealing space, the sealing assembly 6 can adopt the form of a sealing ring and the like, and is tightly fitted on the surface of the valve stem 2 and the upper cover under the action of pressure, thereby forming an effective seal and preventing the medium in the valve body 1 from leaking from the connection between the valve stem 2 and the upper cover.

[0055] As shown in Figures 1-3 In some embodiments, the first limiting part 41 further comprises a pad 413 and a supporting part 412, the opposite sides of the supporting part 412 are respectively in abutment with the elastic part 411 and the pad 413, the pad 413 is in abutment with the first end of the valve stem 2, and the side of the supporting part 412 close to the pad 413 is formed with a smooth circular arc contact surface. When the elastic part 411 is subjected to a force transmitted from the first end of the valve stem 2 or an elastic restoring force due to its own pre-tightening, the force will first act on the supporting part 412, the supporting part 412 as an intermediate force transmission part has its opposite sides in abutment with the elastic part 411 and the pad 413, and can uniformly transmit the force generated by the elastic part 411 to the pad 413, the pad 413 is directly in abutment with the first end of the valve stem 2, and then transmits the force to the valve stem 2.

[0056] The side of the supporting part 412 close to the pad 413 is formed with a smooth circular arc contact surface, when the supporting part 412 transmits the force generated by the elastic part 411 to the pad 413, since the contact surface is smooth and circular arc-shaped, the force can be more uniformly distributed on the contact surface, avoiding stress concentration to cause wear of the contact surface, thereby avoiding the generation of friction particles, meeting the requirements of the semiconductor process environment.

[0057] The pad 413 can play a role of buffering and protection, on the one hand, it can disperse the force transmitted by the supporting part 412, reduce the direct impact of the force on the first end of the valve stem 2, and protect the end of the valve stem 2 from being damaged, on the other hand, the pad 413 can be adapted according to the shape and surface condition of the first end of the valve stem 2, increase the contact area, and improve the stability and reliability of force transmission.

[0058] In addition, the support 412 and the pad 413 may be made of non-metallic materials.

[0059] like Figures 1-3 As shown, in some embodiments, the elastic element 411 is a spring, and the support member 412 extends towards the end near the spring to form a positioning post 4121. The spring is at least partially sleeved on the outside of the positioning post 4121 and abuts against the lower end face of the support member 412. The support member 412 extends towards the end near the pad 413 to form a support post 4122, and the top of the support post 4122 has a smooth arcuate contact surface that abuts against the pad 413. The positioning post 4121, formed by the support member 412 extending towards the end near the spring, allows the spring to be at least partially sleeved on the outside of the positioning post 4121 during installation. During installation, the positioning post 4121 guides the spring to be accurately installed in the designated position, preventing the spring from shifting during installation or use and ensuring that the center of the spring is aligned with the center of the support member 412. The support member 412 extends towards the pad 413 to form a support column 4122. The top of the support column 4122 forms a smooth arc contact surface that abuts against the pad 413. When the support member 412 is subjected to a force transmitted from the spring, this force will be transmitted to the pad 413 through the support column 4122. The design of the smooth arc contact surface makes the contact between the support column 4122 and the pad 413 smoother and reduces the friction of the contact surface.

[0060] It should be noted that the spring, support member 412, and pad 413 together constitute a complete first limiting part 41. The spring provides elastic force, the support member 412 acts as a force transmission bridge, the support column 4122 accurately transmits the force to the pad 413, and the pad 413 then directly contacts the valve stem 2 to achieve axial limiting of the valve stem 2. During the entire working process, the various components cooperate with each other to ensure that the valve stem 2 moves within the specified axial range.

[0061] It should also be noted that, in a preferred embodiment, a receiving groove 7 can be formed in the bottom wall of the valve body 1, and the spring is at least partially received in the receiving groove 7. By setting the receiving groove 7, it is convenient to position the spring during installation, avoid the spring from shifting, and ensure that the center of the spring is aligned with the center of the valve stem 2.

[0062] like Figures 1-2 and Figure 4As shown in some embodiments, the valve stem 2 comprises a main body part 21 and a driving part 22, the first end of the main body part 21 extends into the valve body 1 and the second end extends out of the valve body 1, the second end of the main body part 21 is connected with the first end of the driving part 22 through a connecting piece 8, and the second end of the driving part 22 is connected with an actuator 9 to make the main body part 21 and the driving part 22 rotate synchronously, and the limiting assembly 4 applies the first force and the second force to the two ends of the main body part 21 respectively. The valve stem 2 is designed in sections, i.e. the main body part 21 extending into the valve body 1 and the driving part 22 arranged outside the valve body 1, the limiting assembly 4 applies the first force and the second force to the two ends of the main body part 21 to realize the axial pre-tightening of the main body part 21, the valve plate 3 is installed on the main body part 21 inside the valve body 1 to ensure that the main body part 21 and the valve plate 3 keep in the axial centering state, and the first end of the driving part 22 is connected with the second end of the main body part 21 through the connecting piece 8, when it is needed to rotate the valve plate 3, the actuator 9 drives the driving part 22 to rotate, the driving part 22 drives the main body part 21 to rotate synchronously through the connecting piece 8, and the valve plate 3 rotates synchronously with the main body part 21.

[0063] It should be noted that the valve stem 2 is designed in sections, the main body part 21 (the part extending into the valve body 1) can be made of high corrosion-resistant material, while the driving part 22 (the part outside the valve body 1) can be made of material with lower cost and lower corrosion-resistant requirement, the main body part 21 and the driving part 22 can be processed respectively, the processing precision is easier to be ensured, the processing amount is correspondingly reduced, and thus the processing cost is reduced. Meanwhile, the sectional design of the valve stem 2 is more flexible, and the material, length and other parameters of the main body part 21 and the driving part 22 can be adjusted according to actual needs to adapt to the requirements of different semiconductor process procedures.

[0064] As shown in some embodiments, Figures 1-2 and Figure 4 As shown in some embodiments, the synchronous rotation connection between the main body part 21 and the driving part 22 is realized through the connecting piece 8, the first limiting boss 421 is formed on the outer circumferential surface of the second end of the main body part 21, and the bearing piece is a first rolling bearing 422. The synchronous rotation connection between the main body part 21 and the driving part 22 realized through the connecting piece 8 can ensure that the rotation power generated by the actuator 9 is accurately and reliably transmitted to the main body part 21 of the valve stem 2, and thus the valve plate 3 is accurately actuated, the first limiting boss 421 is formed on the outer circumferential surface of the second end of the main body part 21, the first limiting boss 421 abuts against the outer ring of the first rolling bearing 422, the first limiting boss 421 is limited by the first rolling bearing 422, and thus the axial limitation of the main body part 21 is realized.

[0065] As shown in some embodiments, Figures 1-2 and Figure 4As shown, in some embodiments, the limiting member further includes a second rolling bearing 43 sleeved on the drive part 22 near the end axial region of the main body part 21. A second limiting boss 44 extends outward from the outer periphery of the drive part 22, abutting against the top surface of the inner ring of the second rolling bearing 43. An annular pad 45 is sandwiched between the first rolling bearing 422 and the second rolling bearing 43, corresponding to the outer rings of the first rolling bearing 422 and the second rolling bearing 43, so that the first rolling bearing 422 and the second rolling bearing 43 maintain abutment with the first limiting boss 421 and the second limiting boss 44, respectively. The second rolling bearing 43 is sleeved on the drive part 22 near the end axial region of the main body part 21, and the second rolling bearing 43 and the first rolling bearing 422 together support and limit the valve stem 2. The outer periphery of the drive unit 22 extends outward to form a second limiting boss 44. The second limiting boss 44 abuts against the top surface of the inner ring of the second rolling bearing 43. In the axial direction of the valve stem 2, the second limiting boss 44 provides a fixed limiting point for the second rolling bearing 43. When the valve stem 2 is subjected to axial force, the second limiting boss 44 can prevent the second rolling bearing 43 from moving axially away from the main body 21, thereby ensuring the correct position of the second rolling bearing 43 on the drive unit 22 and further ensuring the axial stability of the entire valve stem 2.

[0066] By setting an annular pad 45 between the first rolling bearing 422 and the second rolling bearing 43, a certain space is provided between the first rolling bearing 422 and the second rolling bearing 43, which facilitates the installation of the connector 8. The axial distance between the first rolling bearing 422 and the second rolling bearing 43 can be precisely adjusted by adjusting the thickness of the annular pad 45, ensuring that the outer rings of the first rolling bearing 422 and the second rolling bearing 43 maintain rigid contact with the end faces of the first limiting boss 421 and the second limiting boss 44. At the same time, the annular pad 45 ensures that the outer rings of the bearings are fully fitted with the limiting platforms, further ensuring the coaxiality of the main body 21 and the valve plate 3.

[0067] like Figures 1-2 and Figures 4-5 As shown, in some embodiments, a first connecting groove 221 and a second connecting groove 211 are respectively formed on the end faces where the drive part 22 and the main body part 21 are connected, and the two connecting grooves are arranged in a cross shape along the axial direction. The connector 8 includes a first connecting part 81 that matches the first connecting groove 221 and a second connecting part 82 that matches the second connecting groove 211. The orthographic projections of the first connecting part 81 and the second connecting part 82 are arranged perpendicular to each other. The first connecting part 81 and the first connecting groove 221 are kept in a fitting connection, and the second connecting part 82 and the second connecting groove 211 are kept in a precise fit connection.

[0068] A first connecting groove 221 and a second connecting groove 211 are formed on the end faces of the drive part 22 and the main body part 21 respectively for connection. The first connecting groove 221 and the second connecting groove 211 are distributed in a cross shape along the axial direction. This specific design can ensure the accurate installation and stable connection of the connector 8.

[0069] Viewed from the orthographic projection angle, the first connecting part 81 and the second connecting part 82 are arranged perpendicularly to each other. This perpendicular relationship corresponds to the cross-shaped layout of the first connecting groove 221 and the second connecting groove 211, allowing the connector 8 to be precisely embedded into the corresponding connecting groove. The first connecting part 81 and the first connecting groove 221 maintain a fitted connection with a preset gap between their axial positions, allowing the first connecting part 81 to accurately fit within the first connecting groove 221. At the same time, the second connecting part 82 and the second connecting groove 211 maintain a precise fit connection, further enhancing the connection strength and stability between the connector 8 and the drive part 22 and the main body 21, ensuring that there will be no loosening or displacement during operation, thereby guaranteeing the synchronous rotation of the drive part 22 and the main body 21.

[0070] like Figure 1 As shown, in some embodiments, the device further includes a bracket 10 sleeved on the drive unit 22 and fixedly connected to the upper cover. The bracket 10 is used to install the radiator 11. The bracket 10 is recessed inward to form an auxiliary limiting boss 12 that abuts against the top surface of the outer ring of the second rolling bearing 43. When the valve body 1 is used in a high-temperature environment (or the temperature of the medium flowing through the valve body 1 is high), the radiator 11 is generally required for heat dissipation. By fixing the bracket 10 to the upper cover, the radiator 11 can be installed on the bracket 10. At the same time, the bracket 10 is recessed inward to form the auxiliary limiting boss 12. The auxiliary limiting boss 12 abuts against the top surface of the outer ring of the second rolling bearing 43. The auxiliary limiting boss 12 can limit the movement of the second rolling bearing 43 away from the first rolling bearing 422, thus ensuring the stable operation of the drive unit 22.

[0071] like Figure 1 As shown, in some embodiments, the top surface of the bracket 10 is formed with a mounting surface for mounting the actuator 9. The housing of the actuator 9 is fixedly connected to the bracket 10. The end of the housing facing the bracket 10 is penetrated by the drive part 22. The device also includes a third rolling bearing 14 disposed at the end of the drive part 22 near the actuator 9. A third limiting boss 13 is formed on the inner sidewall of the housing. The third limiting boss 13 abuts against the bottom surface of the outer ring of the third rolling bearing 14.

[0072] By forming a mounting surface on the top of the bracket 10, the housing of the actuator 9 can be mounted on the mounting surface, thereby achieving fixed connection with the bracket 10, the driving part 22 is connected with the actuator 9 through the housing, and the actuator 9 can drive the driving part 22 to rotate, thereby achieving adjustment of the opening angle of the valve plate 3.

[0073] A third rolling bearing 14 is arranged at the end of the driving part 22 close to the actuator 9, which can axially limit the driving part 22, and ensure the axial alignment of the driving part 22 with the output end of the actuator 9. A third limiting boss 13 is formed on the inner side wall of the housing of the actuator 9, which abuts against the bottom surface of the outer ring of the third rolling bearing 14, thereby limiting the displacement of the third rolling bearing 14 in the direction perpendicular to the axial direction, preventing the third rolling bearing 14 from moving axially during operation due to force, ensuring the relative position accuracy between the driving part 22 and the actuator 9, and making the power transmission more stable and reliable.

[0074] The same or similar parts among the various embodiments in the specification can be referred to each other, and each embodiment focuses on the difference from other embodiments. In particular, for the method embodiments described later, since they are corresponding to the system, the description is relatively simple, and the relevant parts can be referred to the part of the system embodiment.

[0075] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of changes or replacements within the technical range disclosed in the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A fluid control device for semiconductor process, comprising a valve body and a valve stem, a first end of the valve stem extending into the valve body for mounting a valve plate, the valve stem being used to drive the valve plate to rotate to control the flow of the medium passing through, characterized in that, the device further comprises a limiting assembly, the limiting assembly respectively applying a first force and a second force to the end of the valve stem extending into the valve body and the area of the valve stem extending out of the valve body, so as to keep the axial center alignment between the valve stem and the valve plate; the first force is an elastic force applied by the corresponding end of the valve stem along the length direction of the valve stem; and / or the second force is a pushing force applied to the valve stem along the length direction and extending towards the inside of the valve body; the limiting assembly comprises a first limiting part for applying the first force and a second limiting part for applying the second force, the first limiting part comprises an elastic member pressed between the end of the valve stem and the valve body, and the second limiting part comprises a first limiting boss connected to the area of the valve stem extending out of the valve body and a limiting member abutting against the first limiting boss above the first limiting boss; the first limiting part further comprises a pad and a supporting member, opposite sides of the supporting member respectively abutting against the elastic member and the pad, the pad abutting against the first end of the valve stem, and a smooth circular arc contact surface being formed on the side of the supporting member close to the pad; the valve stem comprises a main body part and a driving part, first and second connecting grooves being respectively formed on the end face of the driving part and the main body part connected to the driving part, the two connecting grooves being arranged in a cross shape along the axial direction, the main body part being connected to the driving part through a connecting member, the connecting member comprising a first connecting part matched with the first connecting groove and a second connecting part matched with the second connecting groove, the first and second connecting parts being arranged in a perpendicular manner in the orthographic projection, the first connecting part being in engagement connection with the first connecting groove, and the second connecting part being in precise fit connection with the second connecting groove; the upper cover of the valve body is inwardly recessed to form a containing groove, the valve stem extending out of the containing groove, the limiting member comprising a bearing member sleeved on the valve stem and located in the containing groove, the first limiting boss being arranged corresponding to the rotating inner ring of the bearing member, and the bearing member forming a sealing space for mounting a sealing assembly between the valve stem and the upper cover. The elastic member is a spring, a positioning column being formed on the end of the supporting member close to the spring, the spring being at least partially sleeved outside the positioning column and abutting against the lower end face of the supporting member, and a supporting column being formed on the end of the supporting member close to the pad, the top of the supporting column being formed with the smooth circular arc contact surface to abut against the pad. ​ ​ ​ ​ 2. The fluid control device for semiconductor processes according to claim 1, wherein ​ 3. The fluid control device for semiconductor processes according to claim 1, wherein ​ 4. The fluid control device for semiconductor processes according to claim 2, wherein The first end of the main body part extends into the valve body and the second end extends out of the valve body, the second end of the main body part is connected with the first end of the driving part through a connecting piece, and the second end of the driving part is connected with an actuator to make the main body part and the driving part rotate synchronously, The limiting assembly applies the first force and the second force to the two ends of the main body part respectively.

5. The fluid control device for semiconductor processes according to claim 4, wherein The first limiting boss is formed on the outer circumferential surface of the second end of the main body part, and the bearing part is a first rolling bearing, The limiting part further comprises a second rolling bearing sleeved on the driving part and close to the end part axial area of the main body part, the outer periphery of the driving part extends outward to form a second limiting boss, the second limiting boss abuts against the top surface of the inner ring of the second rolling bearing, and the first rolling bearing and the second rolling bearing are clamped with an annular gasket therebetween, the annular gasket is arranged corresponding to the outer rings of the first rolling bearing and the second rolling bearing, so that the first rolling bearing and the second rolling bearing are kept in the abutting state with the first limiting boss and the second limiting boss respectively.

6. The fluid control device for semiconductor processes according to claim 5, wherein The device further comprises a bracket sleeved on the driving part and fixedly connected with the upper cover, the bracket is used for mounting a heat sink, and the bracket is recessed inward to form an auxiliary limiting boss abutting against the top surface of the outer ring of the second rolling bearing.

7. The fluid control device for semiconductor processes according to claim 6, wherein The top surface of the bracket is formed with a mounting surface for mounting an actuator, the housing of the actuator is fixedly connected with the bracket, one end of the housing towards the bracket is penetrated by the driving part, the device further comprises a third rolling bearing arranged on the driving part close to the end part of the actuator, a third limiting boss is formed on the inner side wall of the housing, and the third limiting boss abuts against the bottom surface of the outer ring of the third rolling bearing.

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