A grinding machine for the inner arc surface of quartz tubes

Abstract

This invention discloses a grinding machine for the inner arc surface of quartz tubes, relating to the field of grinding equipment technology. It includes a three-axis adjustment mechanism, with a fixed plate fixedly connected to the adjustment end of the mechanism. A grinding mechanism is fixedly connected to the side of the fixed plate, and a fixed mechanism is installed on one side of the grinding mechanism. It also includes a coolant cooling mechanism, a dry ice cooling mechanism, and a detection mechanism. In this invention, coolant is supplied to the pipe connecting frame via a supply assembly and a first connecting pipe. The coolant is then sprayed and cooled by multiple nozzles evenly distributed around the grinding mechanism. A reciprocating mechanism drives the nozzles to swing, further expanding the cooling coverage. If the coolant cooling mechanism alone cannot meet the requirements, the dry ice cooling mechanism supplies dry ice to the spraying pipe assembly via a dry ice spray assembly and a second connecting pipe for auxiliary cooling. This dual cooling system effectively solves the problem of insufficient coverage in existing single cooling methods, promptly dissipating localized high temperatures and preventing deformation of the quartz tube due to uneven thermal stress.

Description

Technical Field

[0001] This invention relates to the field of grinding equipment technology, specifically a grinding machine for the inner arc surface of quartz tubes. Background Technology

[0002] Quartz tubes, due to their high hardness, high purity, and brittleness, are widely used in precision fields such as semiconductors, photovoltaics, and optics. Their inner curved surfaces must meet extremely high requirements for surface cleanliness, dimensional accuracy, and shape adaptability. If burrs, scratches, or dimensional deviations exist, it can easily lead to a decrease in the yield of end products or unstable processes. Quartz tube inner curved surface grinding machines, as specialized precision equipment specifically designed to solve these processing pain points, have become a key guarantee for supporting the downstream precision manufacturing industry to achieve high-performance applications of quartz components.

[0003] For example, CN118848704B discloses a grinding device and method for the inner arc surface of quartz tubes, including a grinding table. A lifting component is installed at the upper rear of the grinding table, and a triangular shell is installed at the lower front end of the lifting component. Multiple grinding rods are rotatably mounted in a circular array on the outer surface of the triangular shell. One end of the grinding rod extends into the interior of the triangular shell. A second servo motor is installed in the middle of the front end of the lifting component. The output end of the second servo motor rotates through the interior of the triangular shell. Gears are coaxially embedded in the output end of the second servo motor and one end of the grinding rod.

[0004] However, in existing technologies, the main component of quartz tubes is SiO2, which is an atomic crystal with strong interatomic covalent bonds and small vibration amplitude. Its thermal conductivity depends on intense phonon scattering, resulting in poor thermal conductivity. When grinding the inner arc surface of quartz tubes with large inner diameters, the friction between the diamond grinding head and the tube wall easily generates local high temperatures. The cooling systems of existing quartz tube inner arc surface grinding machines are mostly single water cooling or air cooling. These cooling methods are limited by the complex structure of the inner arc surface and cannot accurately cover the friction-generated area, nor can they timely and evenly dissipate local heat. This heat dissipation shortcoming directly leads to the risk of thermal damage. On the one hand, it can cause the quartz tube to deform due to uneven distribution of internal thermal stress, affecting the dimensional accuracy of the tube. On the other hand, it can cause an oxide layer to form on the surface of the quartz tube, destroying its high-purity characteristics. Especially in the semiconductor field, the oxide layer and high temperature may introduce additional impurities, interfering with impurity control in semiconductor processes, thereby reducing wafer processing yield and affecting the quality of end products. Summary of the Invention

[0005] The purpose of this invention is to provide a grinding machine for the inner arc surface of quartz tubes to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a quartz tube inner bore arc surface grinding machine, comprising a three-axis adjustment mechanism, a fixed plate fixedly connected to the adjustment end of the three-axis adjustment mechanism, a grinding mechanism fixedly connected to the side of the fixed plate, a fixed mechanism installed on one side of the grinding mechanism, and further comprising a coolant cooling mechanism, a dry ice cooling mechanism, and a detection mechanism. The coolant cooling mechanism includes a first connecting pipe installed on the upper part of a liquid supply assembly, a pipe connecting frame installed at the end of the first connecting pipe, multiple nozzles installed at the bottom of the pipe connecting frame, the multiple nozzles being evenly distributed around the grinding mechanism, a reciprocating mechanism for driving the nozzles to swing installed on the surface of the grinding mechanism, and a dry ice cooling mechanism including a dry ice spray assembly, a second connecting pipe installed on the surface of the dry ice spray assembly, a spray pipe assembly installed at the end of the second connecting pipe, a detection mechanism installed inside the spray pipe assembly, and the end of the grinding mechanism located inside the detection mechanism.

[0007] Preferably, the three-axis adjustment mechanism includes a Y-axis moving component, an X-axis moving component mounted on the upper part of the Y-axis moving component, a Z-axis moving component mounted on the side of the X-axis moving component, and a fixing plate fixedly connected to the side of the Z-axis moving component.

[0008] Preferably, the side of the fixed plate is fixedly connected to the grinding mechanism. The grinding mechanism includes a first fixed frame, a drive component is fixedly connected to the bottom of the first fixed frame, a retractable support component is installed on the surface of the drive component, and the drive component is used to drive the retractable support component to unfold or retract. A guide wheel is rotatably connected to the surface of the retractable support component, and a second fixed frame is fixedly connected to the end of the retractable support component. A grinding component is installed at the bottom of the second fixed frame.

[0009] Preferably, the grinding assembly includes a first servo motor, the output end of which is fixedly connected to a mounting bracket, and the bottom of the mounting bracket is threadedly connected to a grinding head.

[0010] Preferably, the testing mechanism includes a first fixed ring, on which multiple temperature monitoring instruments are mounted, and the multiple temperature monitoring instruments are evenly distributed on the surface of the first fixed ring.

[0011] Preferably, a third fixing frame is fixedly connected to the side of the first fixing frame, the bottom of the third fixing frame is fixedly connected to the spray pipe assembly, and the third fixing frame is fixedly connected to the first fixing ring.

[0012] Preferably, the reciprocating mechanism includes a mounting plate, a first spring, an annular slide rail, a fixing block, and a second spring. The mounting plate is fixedly connected to the side of the mounting frame, and a telescopic rod is fixedly connected to the upper part of the mounting plate. A wedge block is fixedly connected to the upper part of the telescopic rod. One end of the first spring is fixedly connected to the mounting plate, and the first spring is fixedly connected to the bottom of the wedge block. The annular slide rail is fixedly connected to the side of the second fixing frame, and an arc-shaped slider is slidably connected inside the annular slide rail. The upper surface of the wedge block is in contact with the lower surface of one end of the arc-shaped slider. The fixing block is fixedly connected to the inside of the annular slide rail, and a second fixing ring is fixedly connected to the surface of the fixing block. The arc-shaped slider is slidably connected to the second fixing ring. One end of the second spring is fixedly connected to the arc-shaped slider, and the other end of the second spring is fixedly connected to the fixing block. The nozzle is fixedly connected to the side of the arc-shaped slider.

[0013] Preferably, the fixing mechanism includes a strip slide rail and a second servo motor. A strip slider is slidably connected inside the strip slide rail, and the second servo motor is fixedly connected to the upper part of the strip slide rail. A lead screw is fixedly connected to the output end of the second servo motor, and the lead screw is threadedly connected to the strip slider. A third servo motor is fixedly connected to the side of the strip slider, and a clamp is fixedly connected to the output end of the third servo motor.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] 1. In this invention, the position of the grinding mechanism can be precisely adjusted through the three-axis adjustment mechanism to ensure that the grinding head and the quartz tube are in a concentric position. With the expansion and contraction function of the retractable support assembly in the grinding mechanism, it can be adapted to the processing of quartz tubes with large inner diameters, improving equipment compatibility. Multiple temperature monitors in the detection mechanism can monitor the temperature at the grinding point in real time, providing a basis for cooling control. When the temperature is too high, the coolant cooling mechanism supplies coolant to the pipe connecting frame through the supply assembly and the first connecting pipe. The coolant is then sprayed through multiple nozzles evenly distributed around the grinding mechanism to cool down. The reciprocating mechanism drives the nozzles to swing to further expand the cooling coverage. If the coolant cooling mechanism alone cannot meet the requirements, the dry ice cooling mechanism supplies dry ice to the spraying pipe assembly through the dry ice spray assembly and the second connecting pipe to assist in cooling. The dual cooling system effectively solves the problem of insufficient coverage of the existing single cooling method, can timely remove local high temperature, avoid deformation of the quartz tube due to uneven thermal stress, and prevent the formation of an oxide layer on the surface, ensuring its high purity characteristics and reducing impurity interference in the semiconductor field.

[0016] 2. In this invention, the mounting plate rotates synchronously with the mounting frame, providing stable power input to the mechanism; the telescopic rod, in conjunction with the first spring, allows the wedge block to flexibly fit the bottom of the arc-shaped slider and adapt to its sliding process; the wedge block, through the sliding cooperation between the wedge surface and the arc-shaped slider, converts the rotational motion into the sliding of the arc-shaped slider within the annular slide rail, which ensures the stability of the arc-shaped slider's motion trajectory; the fixed block and the second fixed ring limit and guide the arc-shaped slider; the second spring provides a reset force after the wedge block passes, driving the arc-shaped slider and the nozzle fixed thereto to reset, realizing the reciprocating oscillation of the nozzle. This structure allows the nozzle to reciprocate stably inside the quartz tube, significantly expanding the coolant spray range, ensuring that the coolant evenly covers the polishing area, effectively solving the problem of uneven cooling from a single fixed nozzle, improving cooling efficiency, avoiding thermal deformation or oxide layer formation of the quartz tube caused by local high temperatures, and ensuring processing quality;

[0017] 3. In this invention, during grinding, the drive assembly adjusts the unfolding angle of the retractable support assembly, causing the guide wheel to fit against the inner wall of the quartz tube, effectively ensuring the stability of the grinding head during operation and reducing processing errors. In the fixing mechanism, the second servo motor drives the lead screw to rotate, driving the strip slider to slide along the strip rail, which can flexibly adjust the height of the third servo motor and the fixture to achieve clamping and fixing of quartz tubes of different lengths. Furthermore, the third servo motor can drive the fixture to rotate, so that both ends of the quartz tube can be fully ground by the grinding mechanism, avoiding the problem of insufficient processing of the bottom end of the inner hole caused by single-end grinding, and comprehensively improving processing quality and efficiency. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of a quartz tube inner bore arc surface grinding machine according to the present invention. Figure 1 ;

[0019] Figure 2 This is a three-dimensional structural diagram of a quartz tube inner bore arc surface grinding machine according to the present invention. Figure 2 ;

[0020] Figure 3 This is a top view schematic diagram of a quartz tube inner hole arc surface grinding machine tool according to the present invention;

[0021] Figure 4 This is a three-dimensional structural diagram of the detection mechanism in a quartz tube inner hole arc surface grinding machine tool according to the present invention;

[0022] Figure 5 This is a side view of the grinding mechanism in a quartz tube inner bore arc surface grinding machine according to the present invention.

[0023] Figure 6 This is a cross-sectional three-dimensional structural diagram of the annular slide rail in a quartz tube inner bore arc surface grinding machine according to the present invention.

[0024] Figure 7 This is a three-dimensional structural diagram of the fixing mechanism in a quartz tube inner bore arc surface grinding machine according to the present invention.

[0025] In the diagram: 1. Three-axis adjustment mechanism; 11. Y-axis moving assembly; 12. X-axis moving assembly; 13. Z-axis moving assembly; 2. Fixing plate; 3. Grinding mechanism; 31. First fixing bracket; 32. Drive assembly; 33. Retractable support bracket assembly; 34. Guide wheel; 35. Second fixing bracket; 36. First servo motor; 37. Mounting bracket; 38. Grinding head; 4. Coolant cooling mechanism; 41. Coolant supply assembly; 42. First connecting pipe; 43. Pipe connecting bracket; 44. Nozzle; 5. Dry ice cooling mechanism; 51. Dry ice spray assembly; 52. No. 2 connecting pipe; 53. Spraying pipe assembly; 6. Fixing mechanism; 61. Strip slide rail; 62. Strip slider; 63. No. 2 servo motor; 64. Lead screw; 65. No. 3 servo motor; 66. Clamp; 7. No. 3 fixing frame; 8. Detection mechanism; 81. No. 1 fixing ring; 82. Temperature monitor; 9. Reciprocating mechanism; 91. Mounting plate; 92. Telescopic rod; 93. No. 1 spring; 94. Wedge block; 95. Circular slide rail; 96. Arc slider; 97. Fixing block; 98. No. 2 fixing ring; 99. No. 2 spring. Detailed Implementation

[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] Example 1: Refer to Figures 1-7 As shown: A quartz tube inner hole arc surface grinding machine includes a three-axis adjustment mechanism 1, a fixed plate 2 is fixedly connected to the adjustment end of the three-axis adjustment mechanism 1, a grinding mechanism 3 is fixedly connected to the side of the fixed plate 2, a fixed mechanism 6 is installed on one side of the grinding mechanism 3, and also includes a coolant cooling mechanism 4, a dry ice cooling mechanism 5 and a detection mechanism 8. The coolant cooling mechanism 4 includes a liquid supply component 41 with a first connecting pipe 42 installed on the upper part, a pipe connecting frame 43 installed at the end of the first connecting pipe 42, and multiple nozzles 44 installed at the bottom of the pipe connecting frame 43. The multiple nozzles 44 are evenly distributed around the grinding mechanism 3, and a reciprocating mechanism 9 for driving the nozzles 44 to swing is installed on the surface of the grinding mechanism 3. The dry ice cooling mechanism 5 includes a dry ice spray component 51, a second connecting pipe 52 is installed on the surface of the dry ice spray component 51, a spray pipe component 53 is installed at the end of the second connecting pipe 52, and a detection mechanism 8 is installed inside the spray pipe component 53. The end of the grinding mechanism 3 is located inside the detection mechanism 8.

[0028] The three-axis adjustment mechanism 1 includes a Y-axis moving component 11, an X-axis moving component 12 mounted on the upper part of the Y-axis moving component 11, a Z-axis moving component 13 mounted on the side of the X-axis moving component 12, a fixed plate 2 fixedly connected to the side of the Z-axis moving component 13, and a grinding mechanism 3 fixedly connected to the side of the fixed plate 2. The grinding mechanism 3 includes a first fixed frame 31, a drive component 32 fixedly connected to the bottom of the first fixed frame 31, a retractable support component 33 mounted on the surface of the drive component 32, and the drive component 32 is used to drive the retractable support component 33 to expand or retract. A guide wheel 34 is rotatably connected to the surface of the retractable support component 33, and a second fixed frame 35 is fixedly connected to the end of the retractable support component 33. A grinding component is mounted at the bottom of the second fixed frame 35. The grinding component includes a first servo motor 36, a mounting frame 37 fixedly connected to the output end of the first servo motor 36, and a grinding head 38 threadedly connected to the bottom of the mounting frame 37.

[0029] The testing mechanism 8 includes a first fixing ring 81, on which multiple temperature monitors 82 are mounted. The multiple temperature monitors 82 are evenly distributed on the surface of the first fixing ring 81. A third fixing frame 7 is fixedly connected to the side of the first fixing frame 31. The bottom of the third fixing frame 7 is fixedly connected to the spray pipe assembly 53, and the third fixing frame 7 is fixedly connected to the first fixing ring 81.

[0030] In this invention, the quartz tube to be polished is clamped and fixed by clamp 66. Based on the fixed position of the quartz tube, the position of the polishing mechanism 3 is adjusted by the three-axis adjustment mechanism 1 to ensure that the polishing head 38 is concentric with the quartz tube. The height of the polishing mechanism 3 is adjusted by the Z-axis moving component 13. Simultaneously, the mounting bracket 37 and the polishing head 38 are rotated by the first servo motor 36, thereby polishing the inner hole of the quartz tube. During the polishing process, the temperature monitoring instrument 8... 2. During the grinding process, the temperature of the grinding area of ​​the quartz tube is monitored. When the temperature of the grinding area is too high, coolant is supplied to the pipe connection frame 43 through the liquid supply component 41 and the first connecting pipe 42. Finally, the coolant is sprayed onto the grinding area through the nozzle 44 to cool it down. When the independent coolant cooling mechanism 4 cannot meet the cooling requirements, the dry ice required for cooling is supplied to the spraying pipe component 53 through the dry ice spray component 51 and the second connecting pipe 52 to uniformly and fully cool the quartz tube.

[0031] The three-axis adjustment mechanism 1 can precisely adjust the position of the grinding mechanism 3, ensuring that the grinding head 38 and the quartz tube are in a concentric position. Combined with the unfolding and retracting function of the retractable support assembly 33 in the grinding mechanism 3, it can adapt to the processing of quartz tubes with large inner diameters, improving equipment compatibility. The multiple temperature monitors 82 of the detection mechanism 8 can monitor the temperature at the grinding point in real time, providing a basis for cooling control. When the temperature is too high, the coolant cooling mechanism 4 supplies coolant to the pipe connection frame 43 through the coolant supply assembly 41 and the first connecting pipe 42, and then distributes the coolant evenly across the four axes of the grinding mechanism 3. The nozzle 44 sprays water to cool the quartz tube, and the reciprocating mechanism 9 drives the nozzle 44 to swing to further expand the cooling coverage. If the cooling liquid cooling mechanism 4 alone cannot meet the needs, the dry ice cooling mechanism 5 supplies dry ice to the spraying pipe assembly 53 through the dry ice spray assembly 51 and the second connecting pipe 52 to assist in cooling. The dual cooling system effectively solves the problem of insufficient coverage of the existing single cooling method, can timely remove local high temperature, avoid deformation of the quartz tube due to uneven thermal stress, and prevent the formation of an oxide layer on the surface, ensuring its high purity characteristics and reducing impurity interference in the semiconductor field.

[0032] Example 2: According to Figure 1 , Figure 2 , Figure 5 and Figure 6 As shown, the reciprocating mechanism 9 includes a mounting plate 91, a first spring 93, an annular slide rail 95, a fixing block 97, and a second spring 99. The mounting plate 91 is fixedly connected to the side of the mounting frame 37, and a telescopic rod 92 is fixedly connected to the upper part of the mounting plate 91. A wedge block 94 is fixedly connected to the upper part of the telescopic rod 92. One end of the first spring 93 is fixedly connected to the mounting plate 91, and the first spring 93 is fixedly connected to the bottom of the wedge block 94. The annular slide rail 95 is fixedly connected to the side of the second fixing frame 35, and the annular slide rail 99 is fixedly connected to the side of the mounting frame 37. An arc-shaped slider 96 is slidably connected inside the slide rail 95. The upper surface of the wedge block 94 is in contact with the lower surface of one end of the arc-shaped slider 96. The fixing block 97 is fixedly connected to the inside of the annular slide rail 95, and a second fixing ring 98 is fixedly connected to the surface of the fixing block 97. The arc-shaped slider 96 is slidably connected to the second fixing ring 98. One end of the second spring 99 is fixedly connected to the arc-shaped slider 96, and the other end of the second spring 99 is fixedly connected to the fixing block 97. The nozzle 44 is fixedly connected to the side of the arc-shaped slider 96.

[0033] In this invention, when the coolant cooling mechanism 4 cools the polished area of ​​the quartz tube, the first servo motor 36 drives the mounting bracket 37 to rotate and the mounting plate 91 to rotate. At this time, the telescopic rod 92 drives the wedge block 94 to rotate. During the process of the wedge surface of the wedge block 94 sliding along the bottom of the arc slider 96, the arc slider 96 will slide inside the annular slide rail 95 under the action of friction. At this time, the telescopic rod 92 and the first spring 93 are compressed, and the second spring 99 is stretched. Under the sliding action of the arc slider 96, the nozzle 44 is driven to swing inside the quartz tube to ensure that the coolant is sprayed evenly on the polished area. When the wedge block 94 passes the surface of the arc slider 96, the second spring 99 returns to its original shape, thereby driving the arc slider 96 and the nozzle 44 to reset, so that the nozzle 44 can reciprocate stably to perform uniform cooling operation on the high temperature area.

[0034] Mounting plate 91 rotates synchronously with mounting bracket 37, providing stable power input to the mechanism. Telescopic rod 92, in conjunction with spring 93, allows wedge block 94 to flexibly conform to the bottom of arc-shaped slider 96 and adapt to its sliding process. Through the sliding engagement of the wedge-shaped surface with the arc-shaped slider 96, wedge block 94 converts rotational motion into sliding motion of the arc-shaped slider 96 within the annular slide rail 95, ensuring stable movement of the arc-shaped slider 96. Fixed block 97 and second fixed ring 98 limit and guide the arc-shaped slider 96. Spring 99 provides a restoring force after wedge block 94 passes, driving the arc-shaped slider 96 and the fixed nozzle 44 to reset, achieving reciprocating oscillation of nozzle 44. This structure allows nozzle 44 to reciprocate stably inside the quartz tube, significantly expanding the coolant spray range, ensuring uniform coolant coverage of the polished area, effectively solving the problem of uneven cooling from a single fixed nozzle 44, improving cooling efficiency, avoiding thermal deformation or oxide layer formation in the quartz tube due to localized high temperatures, and ensuring processing quality.

[0035] Example 3: According to Figure 1 , Figure 2 and Figure 7 As shown, the fixing mechanism 6 includes a strip slide rail 61 and a second servo motor 63. A strip slider 62 is slidably connected inside the strip slide rail 61. The second servo motor 63 is fixedly connected to the upper part of the strip slide rail 61. A lead screw 64 is fixedly connected to the output end of the second servo motor 63, and the lead screw 64 is threadedly connected to the strip slider 62. A third servo motor 65 is fixedly connected to the side of the strip slider 62, and a clamp 66 is fixedly connected to the output end of the third servo motor 65.

[0036] In this invention, a grinding head 38 is selected to match the inner diameter of the quartz tube. The grinding head 38 is threadedly connected to the mounting bracket 37 for easy installation. When the Z-axis moving assembly 13 drives the first fixing bracket 31 downward, as the grinding head 38 gradually penetrates into the quartz tube, the unfolding angle of the retractable bracket assembly 33 is adjusted by the drive assembly 32 to make the guide wheel 34 fit against the inner wall of the quartz tube, thereby ensuring the stability of the grinding head 38 during the grinding process. The second servo motor 63 drives the lead screw 64 to rotate. The movement causes the strip slider 62 to slide along the strip slide rail 61, thereby adjusting the height of the No. 3 servo motor 65 and the clamp 66. This allows the clamp 66 to hold and fix quartz tubes of different lengths. After grinding one end of the quartz tube, the No. 3 servo motor 65 can drive the clamp 66 to flip, thus flipping the quartz tube. Then, the grinding mechanism 3 can fully grind the other end of the quartz tube, avoiding grinding from one end to the other, which would prevent the bottom of the inner hole of the quartz tube from being fully ground.

[0037] The threaded connection between the grinding head 38 and the mounting bracket 37 facilitates quick disassembly and replacement of the appropriate grinding head 38 according to the inner diameter of the quartz tube, improving equipment adaptability. During grinding, the drive assembly 32 adjusts the unfolding angle of the retractable bracket assembly 33, allowing the guide wheel 34 to fit against the inner wall of the quartz tube, effectively ensuring the stability of the grinding head 38 during operation and reducing processing errors. In the fixing mechanism 6, the second servo motor 63 drives the lead screw 64 to rotate, driving the strip slider 62 to slide along the strip rail 61, which can flexibly adjust the height of the third servo motor 65 and the clamp 66 to achieve clamping and fixing of quartz tubes of different lengths. Furthermore, the third servo motor 65 can drive the clamp 66 to rotate, allowing both ends of the quartz tube to be fully ground by the grinding mechanism 3, avoiding the problem of insufficient processing at the bottom of the inner hole caused by single-end grinding, and comprehensively improving processing quality and efficiency.

[0038] The device's operation and working principle are as follows: The quartz tube to be polished is clamped and fixed by clamp 66. Based on the fixed position of the quartz tube, the position of the polishing mechanism 3 is adjusted via the three-axis adjustment mechanism 1 to ensure the polishing head 38 is concentric with the quartz tube. The height of the polishing mechanism 3 is adjusted via the Z-axis moving component 13. Simultaneously, the first servo motor 36 drives the mounting bracket 37 and the polishing head 38 to rotate, thereby polishing the inner hole of the quartz tube. During the polishing process, temperature control is used to control the grinding process. The monitor 82 monitors the temperature of the quartz tube during the grinding process. When the temperature of the grinding area is too high, coolant is supplied to the pipe connection frame 43 through the liquid supply component 41 and the first connecting pipe 42. Finally, the coolant is sprayed onto the grinding area through the nozzle 44 to cool it down. When the independent coolant cooling mechanism 4 cannot meet the cooling requirements, dry ice is supplied to the spraying pipe component 53 through the dry ice spray component 51 and the second connecting pipe 52 to cool the quartz tube evenly and fully.

[0039] When the coolant cooling mechanism 4 cools the polished area of ​​the quartz tube, the first servo motor 36 drives the mounting bracket 37 to rotate and the mounting plate 91 to rotate. At this time, the telescopic rod 92 drives the wedge block 94 to rotate. As the wedge surface of the wedge block 94 slides along the bottom of the arc slider 96, the arc slider 96 will slide inside the annular slide rail 95 under the action of friction. At this time, the telescopic rod 92 and the first spring 93 are compressed, and the second spring 99 is stretched. Under the sliding action of the arc slider 96, the nozzle 44 is driven to swing inside the quartz tube to ensure that the coolant is sprayed evenly on the polished area. When the wedge block 94 passes the surface of the arc slider 96, the second spring 99 returns to its original shape, thereby driving the arc slider 96 and the nozzle 44 to reset, so that the nozzle 44 can reciprocate stably to perform uniform cooling operation on the high temperature area.

[0040] A grinding head 38 is selected to match the inner diameter of the quartz tube. The grinding head 38 is threadedly connected to the mounting bracket 37 for easy installation. When the Z-axis moving assembly 13 drives the first fixing bracket 31 downward, as the grinding head 38 gradually penetrates into the quartz tube, the unfolding angle of the retractable bracket assembly 33 is adjusted by the drive assembly 32 to make the guide wheel 34 fit against the inner wall of the quartz tube, thus ensuring the stability of the grinding head 38 during the grinding process. The second servo motor 63 drives the lead screw 64 to rotate. This causes the strip slider 62 to slide along the strip rail 61, thereby adjusting the height of the servo motor 65 and the clamp 66. This allows the clamp 66 to hold and fix quartz tubes of different lengths. After grinding one end of the quartz tube, the servo motor 65 can drive the clamp 66 to flip, thus flipping the quartz tube. Then, the grinding mechanism 3 can fully grind the other end of the quartz tube, avoiding grinding from one end to the other, which would prevent the bottom of the inner hole of the quartz tube from being fully ground.

[0041] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A grinding machine for the inner arc surface of a quartz tube, comprising a three-axis adjustment mechanism (1), wherein a fixing plate (2) is fixedly connected to the adjustment end of the three-axis adjustment mechanism (1), a grinding mechanism (3) is fixedly connected to the side of the fixing plate (2), and a fixing mechanism (6) is installed on one side of the grinding mechanism (3), characterized in that: Also include cooling liquid cooling mechanism (4), dry ice cooling mechanism (5) and detection mechanism (8), the cooling liquid cooling mechanism (4) includes liquid supply assembly (41) upper installation one connecting pipe (42), the end of the one connecting pipe (42) is installed with pipe connecting frame (43), the bottom of the pipe connecting frame (43) is installed with a plurality of nozzles (44), a plurality of the nozzles (44) are evenly distributed around the polishing mechanism (3), the surface of the polishing mechanism (3) is installed for driving the nozzle (44) oscillation reciprocating mechanism (9), the dry ice cooling mechanism (5) includes dry ice injection assembly (51), the surface of the dry ice injection assembly (51) is installed with two connecting pipes (52), the end of the two connecting pipes (52) is installed with a spraying pipe assembly (53), the inside of the spraying pipe assembly (53) is installed with a detection mechanism (8), the end of the polishing mechanism (3) is located inside the detection mechanism (8); The fixed plate (2) side is fixedly connected with the polishing mechanism (3), the polishing mechanism (3) includes a first fixed frame (31), the bottom of the first fixed frame (31) is fixedly connected with a driving assembly (32), the surface of the driving assembly (32) is installed with a retractable support assembly (33), and the driving assembly (32) is used to drive the retractable support assembly (33) to expand or shrink, the surface of the retractable support assembly (33) is rotatably connected with a guide wheel (34), and the end of the retractable support assembly (33) is fixedly connected with a second fixed frame (35), the bottom of the second fixed frame (35) is installed with a polishing assembly; The reciprocating mechanism (9) includes a mounting plate (91), a first spring (93), an annular slide rail (95), a fixed block (97) and a second spring (99), the mounting plate (91) is fixedly connected with the side of the mounting frame (37), and the upper part of the mounting plate (91) is fixedly connected with a telescopic rod (92), the upper part of the telescopic rod (92) is fixedly connected with a wedge-shaped block (94), one end of the first spring (93) is fixedly connected with the mounting plate (91), and the first spring (93) is fixedly connected with the bottom of the wedge-shaped block (94), the annular slide rail (95) is fixedly connected with the side of the second fixed frame (35), and the annular slide rail (95) is slidably connected with an arc-shaped sliding block (96) inside, the upper surface of the wedge-shaped block (94) is attached to the lower surface of one end of the arc-shaped sliding block (96), the fixed block (97) is fixedly connected with the inside of the annular slide rail (95), and the surface of the fixed block (97) is fixedly connected with a second fixed ring (98), the arc-shaped sliding block (96) is slidably connected with the second fixed ring (98), one end of the second spring (99) is fixedly connected with the arc-shaped sliding block (96), and the other end of the second spring (99) is fixedly connected with the fixed block (97), the nozzle (44) is fixedly connected with the side of the arc-shaped sliding block (96).

2. The polishing machine for polishing the inner arc surface of the quartz tube according to claim 1, wherein: The three-axis adjusting mechanism (1) comprises a Y-axis moving assembly (11), an X-axis moving assembly (12) is installed on the upper portion of the Y-axis moving assembly (11), a Z-axis moving assembly (13) is installed on the side surface of the X-axis moving assembly (12), and a fixed plate (2) is fixedly connected to the side surface of the Z-axis moving assembly (13).

3. The polishing machine for polishing the inner arc surface of the quartz tube according to claim 1, wherein: The polishing assembly comprises a first servo motor (36), an installation frame (37) is fixedly connected to the output end of the first servo motor (36), and a polishing head (38) is screw-connected to the bottom of the installation frame (37).

4. The polishing machine for polishing the inner arc surface of the quartz tube according to claim 1, wherein: The detection mechanism (8) comprises a first fixed ring (81), a plurality of temperature monitors (82) are installed on the surface of the first fixed ring (81), and the temperature monitors (82) are uniformly distributed on the surface of the first fixed ring (81).

5. The polishing machine for polishing the inner arc surface of the quartz tube according to claim 1, wherein: The side surface of the first fixed frame (31) is fixedly connected with a third fixed frame (7), the bottom of the third fixed frame (7) is fixedly connected with the spraying pipeline assembly (53), and the third fixed frame (7) is fixedly connected with the first fixed ring (81).

6. The polishing machine for polishing the inner arc surface of the quartz tube according to claim 1, wherein: The fixing mechanism (6) comprises a strip-shaped sliding rail (61) and a second servo motor (63), a strip-shaped sliding block (62) is slidably connected in the strip-shaped sliding rail (61), the second servo motor (63) is fixedly connected with the upper portion of the strip-shaped sliding rail (61), the output end of the second servo motor (63) is fixedly connected with a lead screw (64), the lead screw (64) is screw-connected with the strip-shaped sliding block (62), the side surface of the strip-shaped sliding block (62) is fixedly connected with a third servo motor (65), and the output end of the third servo motor (65) is fixedly connected with a clamp (66).

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