Polishing quality detection method and system for surface of sliding seat

Abstract

The invention discloses a polishing quality detection method and system for the surface of a sliding seat, and relates to the technical field of polishing quality detection. The polishing quality detection method for the surface of the sliding seat comprises the following steps of effective judgment of rough polishing detection, effective judgment of fine polishing detection and polishing quality detection management. The rough polishing detection analysis result is obtained based on the rough polishing detection data, whether rough polishing quality detection optimization is carried out or not is judged, if yes, whether the sliding seat fine polishing quality detection judgment instruction is sent or not is judged after rough polishing quality detection optimization, and if not, the fine polishing detection analysis result is obtained based on the fine polishing detection data to quantitatively judge the effectiveness of fine polishing detection. Finally, whether fine polishing quality detection optimization is carried out or not is judged, more accurate polishing quality detection of the surface of the sliding seat is achieved, and the problem that in the prior art, due to insufficient correlation between rough polishing quality detection and fine polishing quality detection, polishing quality detection of the surface of the sliding seat is inaccurate is solved.

Description

Technical Field

[0001] This invention relates to the field of polishing quality inspection technology, and in particular to a method and system for polishing quality inspection of slide surface. Background Technology

[0002] The long-term operation of the slide and the ring guide rail requires withstanding complex working conditions, and the polishing quality of the slide surface directly determines its friction characteristics and durability. Furthermore, the sliding contact between the slide and the ring guide rail is a crucial friction process; therefore, polishing quality inspection effectively ensures low-friction, high-efficiency operation between the slide and the ring guide rail. Polishing quality inspection of the slide surface plays a vital role in the roughing and finishing polishing processes during production. Roughing quality inspection after roughing prevents errors from affecting subsequent processes, while finishing quality inspection after finishing ensures a smooth surface and good friction performance, contributing to improved overall slide quality during production. The main goal of the roughing process is to remove larger surface defects, oxide layers, and rough areas. Polishing quality inspection after roughing focuses on surface roughness and the extent to which large defects are removed. The finishing process involves meticulous polishing of the slide surface to achieve higher surface finish and precision requirements.

[0003] Current technology for inspecting the polishing quality of slide blocks after rough polishing involves first visually inspecting the surface using a magnifying glass or microscope to check for obvious defects such as scratches, pits, bubbles, and cracks. Next, a contact roughness meter is used to measure the surface roughness. Typically, the surface roughness after rough polishing is relatively high, requiring measurement to determine if it meets process requirements, i.e., whether it exceeds the allowable roughness range. If the polishing quality inspection of the slide block after rough polishing fails, rework is performed. If the polishing quality inspection of the slide block after rough polishing passes, it proceeds to the next process flow, the fine polishing stage. The surface quality requirements for fine polished slide blocks are higher, requiring more stringent quality inspection. Current technology for inspecting the polishing quality of slide blocks after fine polishing typically uses gloss meters, roughness meters, and laser scanners to assess the surface flatness, gloss, and microscopic defects of the slide block. Taking the smoothness test of the slide surface after fine polishing as an example, the probe of a gloss meter or other testing equipment is brought into contact with the slide surface, the instrument is started to measure and record the gloss value or roughness value at each measurement point, and the measurement results are used to determine whether the smoothness requirements are met. Finally, a polishing quality inspection report is generated based on the test results after rough polishing and fine polishing to realize the polishing quality inspection of the slide in the production process.

[0004] For example, Chinese patent application CN112123167A discloses a fully automated production line for single-sided polishing machines, which includes several single-sided polishing machines. The single-sided polishing machines are placed at equal intervals along the same straight direction and at the same height. Each single-sided polishing machine has a robotic arm on its lower central housing for gripping and transferring workpieces between the single-sided polishing machines, so as to ensure that each single-sided polishing machine performs a corresponding polishing process on the workpiece. Several single-sided polishing machines form a continuous polishing process on the workpiece along the transfer direction. Each single-sided polishing machine has a corresponding polishing liquid supply component connected to its rear liquid inlet / outlet. The rear liquid inlet / outlet of each single-sided polishing machine is also connected to a liquid system.

[0005] For example, Chinese invention patent CN116587148B discloses a polishing device and method for ball grooves of a slide block, comprising: a housing, an insert, an ejector, polishing rods, ball screws, guide balls, and limiting rods. By using ball screws located inside the polishing assembly, the force applied to the ejector is precisely controlled. This force ejects the ejector and transmits it to the polishing rods, pushing the four polishing rods against the four ball grooves of the slide block. Through the reaction force between the four polishing rods and the four ball grooves of the slide block, the force from the ball screws is adaptively adjusted and evenly distributed, ensuring a relatively constant force during polishing and ensuring that the four ball grooves receive the same polishing force. This helps maintain the consistency of the polishing effect and improves the quality of the slide block. Simultaneously, guide balls are used for guidance, thereby reducing the friction of the ejector during sliding while ensuring the sliding trajectory, further improving the polishing quality of the ball grooves in the slide block.

[0006] The above-mentioned technology has at least the following technical problems:

[0007] During the polishing quality inspection of the slide surface after rough polishing, the rough polishing process often results in varying surface roughness across different areas. If the polishing quality inspection of the slide is focused only on specific areas (such as the central or edge areas), these areas may not represent the overall surface condition. This fails to comprehensively reflect the slide surface quality and could mislead the assessment of the entire slide surface quality, leading to inaccurate polishing quality inspection results after rough polishing.

[0008] Another consideration is that inaccurate polishing quality testing of the slide after rough polishing can further lead to inaccurate polishing quality testing of the slide after fine polishing. Specifically, the surface roughness of the slide after rough polishing is a crucial indicator for evaluating the quality of the rough polishing. If there are errors in the roughness measurement during rough polishing quality testing (such as poor probe contact), the actual surface roughness will not match the test results, thus affecting the polishing quality testing of the slide after fine polishing. Furthermore, uneven probe contact in measuring instruments (such as gloss meters) can increase the volatility of quality measurement data after fine polishing or on the surface itself. The slide surface may experience significant vibration or errors due to unevenness, resulting in fluctuating quality measurement data (such as roughness and smoothness), increasing the instability of the quality measurement data. Summary of the Invention

[0009] To address the technical problem in existing technologies where inaccurate polishing quality detection of slide surface is caused by insufficient correlation between rough polishing quality detection and fine polishing quality detection, this invention provides a method and system for polishing quality detection of slide surface, the technical solution of which is as follows:

[0010] On the one hand, a method for polishing quality inspection of slide surface is provided. This method includes: acquiring rough polishing inspection data after a preset batch of slides undergoing rough polishing; obtaining rough polishing inspection analysis results based on the acquired rough polishing inspection data to quantitatively determine the effectiveness of the rough polishing inspection during the preset batch of slides' rough polishing quality inspection process; determining whether to optimize the rough polishing quality inspection based on the rough polishing inspection analysis results; if so, determining whether to send a slide fine polishing quality inspection judgment instruction after optimization; otherwise, directly obtaining a fine polishing inspection analysis result based on the acquired fine polishing inspection data after the preset batch of slides undergoing fine polishing process to quantitatively determine the effectiveness of the rough polishing quality inspection. The effectiveness of fine polishing inspection during the fine polishing quality inspection of a preset batch of slides is assessed. Coarse polishing quality inspection optimization refers to adjusting the sampling frequency and density of inspection points during the coarse polishing quality inspection of the preset batch of slides based on the coarse polishing inspection analysis results. Based on the obtained fine polishing inspection analysis results, it is determined whether fine polishing quality inspection optimization should be performed. If so, slide polishing quality inspection management is implemented after fine polishing quality inspection optimization; otherwise, slide polishing quality inspection management is performed directly. Fine polishing quality inspection optimization refers to adjusting the inspection equipment during the fine polishing quality inspection of the preset batch of slides based on the fine polishing inspection analysis results.

[0011] On the other hand, a polishing quality inspection system for slide surfaces is provided, including: a rough polishing inspection validity judgment module, a fine polishing inspection validity judgment module, and a polishing quality inspection management module; the rough polishing inspection validity judgment module is used to acquire rough polishing inspection data after a preset batch of slides has undergone rough polishing process, and obtain rough polishing inspection analysis results based on the acquired rough polishing inspection data to quantitatively judge the validity of the rough polishing inspection during the rough polishing quality inspection process of the preset batch of slides; the fine polishing inspection validity judgment module is used to determine whether to optimize the rough polishing quality inspection based on the rough polishing inspection analysis results, and if so, determine whether to send a slide fine polishing quality inspection judgment instruction after the rough polishing quality inspection optimization, otherwise directly based on the acquired rough polishing inspection data after the preset batch of slides has undergone fine polishing process. The fine polishing test data yields fine polishing test analysis results to quantitatively determine the effectiveness of fine polishing test in the fine polishing quality test process for a preset batch of slides. Coarse polishing quality test optimization means adjusting the sampling frequency and test point density during the coarse polishing quality test process for the preset batch of slides based on the coarse polishing test analysis results. The polishing quality test management module is used to determine whether to perform fine polishing quality test optimization based on the acquired fine polishing test analysis results. If so, slide polishing quality test management is performed after fine polishing quality test optimization; otherwise, slide polishing quality test management is performed directly. Fine polishing quality test optimization means adjusting the test equipment during the fine polishing quality test process for the preset batch of slides based on the fine polishing test analysis results.

[0012] The beneficial effects of the technical solutions provided in the embodiments of the present invention include at least the following:

[0013] 1. During the rough polishing and fine polishing quality inspection of the slide block in the production process, the uneven surface of the slide block after rough polishing can easily mislead the inspection of the overall rough polishing quality, leading to inaccurate rough polishing quality inspection. Furthermore, inaccurate rough polishing quality inspection makes it difficult to fully capture the surface characteristics of the slide block, further resulting in inaccurate fine polishing quality inspection, and consequently, inaccurate polishing quality inspection of the slide block surface. This invention uses the acquired rough polishing inspection data to obtain rough polishing inspection analysis results, which helps to more accurately determine the effectiveness of rough polishing quality inspection in the slide block process. Then, based on the rough polishing inspection analysis results, it is determined whether rough polishing quality inspection should be performed. Optimization helps improve the reliability of rough polishing test data during the rough polishing quality inspection of the slide surface, enabling more accurate rough polishing quality inspection of the slide surface. Finally, based on the obtained fine polishing test analysis results, it is determined whether to optimize the fine polishing quality inspection, thereby improving the accuracy of fine polishing test data during the fine polishing quality inspection of the slide surface. This helps to perform more accurate fine polishing quality inspection of the slide surface, and further enables the correlation analysis between rough polishing quality inspection and fine polishing quality inspection during the polishing quality inspection of the slide surface. This effectively solves the problem of inaccurate polishing quality inspection of the slide surface due to insufficient correlation between rough polishing quality inspection and fine polishing quality inspection.

[0014] 2. By determining whether the effective index of the rough polishing test is greater than the effective set value of the rough polishing test, the rough polishing test analysis result is obtained. When the rough polishing test analysis result is valid, the fine polishing test analysis result is obtained, and it is determined whether the interference data of the rough polishing process is within the corresponding preset interference range of the rough polishing process. This allows for the adjustment and setting of the initial test frequency for the next batch. The dynamic adjustment of the initial test frequency enables the rough polishing quality test of the slide surface to respond in real time with the rough polishing process. At the same time, when the rough polishing test analysis result is abnormal, it is determined whether to optimize the rough polishing quality test. During the rough polishing quality test of the slider surface after the rough polishing process, the optimized rough polishing quality test can more accurately capture the small defects or unevenness of the slide surface, avoid omissions in the rough polishing quality test, and thus improve the reliability of the rough polishing test data in the rough polishing process stage. This, in turn, improves the accuracy of the rough polishing quality test of the slide in the rough polishing process stage.

[0015] 3. By comparing the effective indicators of fine polishing inspection with the effective set values ​​of fine polishing inspection to obtain the fine polishing inspection analysis results, a more accurate judgment of the effectiveness of fine polishing inspection during the fine polishing quality inspection of the slide is achieved. Then, based on the obtained fine polishing inspection analysis results, it is determined whether to optimize the fine polishing quality inspection. Fine polishing quality inspection optimization helps to improve the inspection equipment's ability to capture details on the slide surface, effectively reducing the probability of missed detections and misjudgments during the fine polishing quality inspection of the slide, thereby improving the reliability of fine polishing inspection data and results during the fine polishing process of the slide. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 A flowchart illustrating a method for detecting the polishing quality of a slide surface, provided as an embodiment of the present invention;

[0018] Figure 2 This is one of the component quality inspection interface diagrams of a polishing quality inspection system for a slide surface provided in an embodiment of the present invention;

[0019] Figure 3 The following is an optimized flowchart of a rough polishing quality inspection method for a slide surface, provided in an embodiment of the present invention.

[0020] Figure 4 A flowchart illustrating the process of obtaining the fine polishing detection and analysis results of a polishing quality detection method for a slide surface provided in an embodiment of the present invention;

[0021] Figure 5 The second component quality inspection interface diagram of a polishing quality inspection system for a slide surface provided in an embodiment of the present invention;

[0022] Figure 6 This is a schematic diagram of a polishing quality inspection system for a slide surface provided in an embodiment of the present invention. Detailed Implementation

[0023] The technical solution of the present invention will now be described with reference to the accompanying drawings.

[0024] In embodiments of the present invention, words such as "exemplarily," "for example," etc., are used to indicate that something is an example, illustration, or description. Any embodiment or design described as "exemplary" in the present invention should not be construed as being more preferred or advantageous than other embodiments or designs. Specifically, the use of the word "exemplary" is intended to present the concept in a concrete manner. Furthermore, in embodiments of the present invention, the meaning expressed by "and / or" can be both, or either one.

[0025] In this embodiment of the invention, sometimes a subscript such as W1 may be written in a non-subscript form such as W1. When the difference is not emphasized, the meaning they express is the same.

[0026] This invention provides a method and system for detecting the polishing quality of a slide surface, solving the problem in the prior art where insufficient correlation between coarse polishing quality detection and fine polishing quality detection leads to inaccurate polishing quality detection of the slide surface. The method acquires coarse polishing detection data after a preset batch of slides undergoing coarse polishing, and obtains coarse polishing detection analysis results based on this data to quantitatively determine the effectiveness of coarse polishing detection in the preset batch of slides. Then, based on the coarse polishing detection analysis results, it determines whether to optimize the coarse polishing quality detection. If so, it determines whether to send a fine polishing quality detection judgment command after optimization; otherwise, it directly obtains fine polishing detection analysis results based on the acquired fine polishing detection data after the preset batch of slides undergoing fine polishing to quantitatively determine the effectiveness of fine polishing detection in the preset batch of slides. Finally, based on the acquired fine polishing detection analysis results, it determines whether to optimize the fine polishing quality detection. If so, it performs fine polishing quality detection optimization and then manages the slide polishing quality detection; otherwise, it directly manages the slide polishing quality detection, achieving more accurate polishing quality detection of the slide surface.

[0027] The technical solution in this invention aims to solve the problem of inaccurate polishing quality detection of the slide surface due to insufficient correlation between rough polishing quality detection and fine polishing quality detection. The overall approach is as follows:

[0028] The results of the coarse polishing test are analyzed to determine whether to optimize the coarse polishing quality test. If so, after the coarse polishing quality test optimization, it is determined whether to send a fine polishing quality test judgment command for the slide. Otherwise, fine polishing test data is obtained to get the fine polishing test analysis results. Finally, it is determined whether to optimize the fine polishing quality test, which improves the accuracy of polishing quality test of the slide surface.

[0029] To make the technical problems, technical solutions and advantages of the present invention clearer, a detailed description will be given below in conjunction with the accompanying drawings and specific embodiments.

[0030] like Figure 1The diagram shown is a flowchart of a polishing quality detection method for a slide surface provided by an embodiment of the present invention. (Refer to...) Figure 1 The method includes the following steps: effective judgment of coarse polishing detection, effective judgment of fine polishing detection, and polishing quality detection and management.

[0031] The effectiveness of the rough polishing inspection in the first step is determined as follows: First, rough polishing inspection data after the rough polishing process of a preset batch of slides is obtained. This data includes surface quality inspection data and surface defect inspection data. The surface quality inspection data includes surface roughness and surface hardness values. Surface roughness is obtained using a surface roughness meter, and surface hardness is obtained using a hardness tester. The surface defect inspection data includes the number and area of ​​surface defects. The number of surface defects is obtained using a surface defect detector, and the area is obtained using a scanning electron microscope. The rough polishing inspection data is de-unitized. Specifically, the surface quality inspection data helps ensure the friction performance and durability of the slide surface, while the surface defect inspection data reveals potential processing problems during the rough polishing process, helping to identify quality deviations or undesirable surface conditions. A single inspection data point may not provide sufficient information; by collecting data from multiple dimensions such as surface roughness and surface hardness values, a more comprehensive understanding of the rough polishing quality of the slide surface can be obtained. The collection of rough polishing test data helps to form a standardized rough polishing quality control system, ensuring that each batch of slides meets the corresponding rough polishing surface quality standards before leaving the factory, and enhancing the controllability of the rough polishing process stage in the production process.

[0032] like Figure 2 The image shown is one of the component quality inspection interface diagrams of a polishing quality inspection system for a slide surface provided in an embodiment of the present invention; by Figure 2 As can be seen, the navigation bar of the guide rail inspection system provided in this application embodiment includes a homepage, quality inspection, equipment management, data analysis, and system settings. The homepage includes a system overview, real-time monitoring, and performance trends. Quality inspection includes guide rail defect inspection, component quality inspection, batch inspection management, and inspection result analysis. Equipment management includes equipment status monitoring, equipment maintenance records, and equipment configuration management. Data analysis includes historical data analysis, trend analysis, and predictive analysis. Taking the component quality inspection interface as an example, this section allows selection of the current component type, the current component batch, and the component quality inspection type. When the current component type is a slide block and the component quality inspection type is rough polishing quality inspection, this interface includes a progress display of rough polishing surface quality inspection data acquisition and rough polishing surface defect inspection data acquisition, as well as a display of rough polishing inspection analysis results. Additionally, it provides rough polishing quality inspection optimization options for optimizing the inspection sampling frequency and inspection point density. Furthermore, this interface also allows viewing rough polishing inspection data.

[0033] Secondly, based on the acquired coarse polishing test data, coarse polishing test analysis results are obtained to quantitatively determine the effectiveness of coarse polishing test in the quality inspection process of the preset batch of slides; the specific steps for obtaining the coarse polishing test analysis results are as follows:

[0034] A1, obtains rough polishing test data during the rough polishing quality test of a preset batch of slides using the initial test frequency. The initial test frequency is set by professionals according to industry standards.

[0035] A2, based on the obtained negative correlation processing results of the rough polishing test data fluctuations, quantitatively evaluates the effectiveness of rough polishing testing in the quality testing process of a preset batch of slides, and obtains the effective index of rough polishing testing. The negative correlation processing results of the rough polishing test data fluctuations represent the results of negative correlation processing after calculating the standard deviation of the acquired rough polishing test data. This is used to measure the detection fluctuations of various categories of data in the rough polishing test data obtained by the preset batch of slides at the initial testing frequency, including the negative correlation processing results of surface roughness fluctuations, surface hardness value fluctuations, surface defect number fluctuations, and surface defect area fluctuations.

[0036] Specifically, the negative correlation processing result for surface roughness fluctuation represents the result of negatively correlated processing after calculating the standard deviation of the surface roughness obtained from the initial detection frequency. The negative correlation processing is the reciprocal operation. The negative correlation processing result for surface hardness value fluctuation represents the result of negatively correlated processing after calculating the standard deviation of the surface hardness value obtained from the initial detection frequency. The negative correlation processing result for surface defect number fluctuation represents the result of negatively correlated processing after calculating the standard deviation of the surface defect number obtained from the initial detection frequency. The negative correlation processing result for surface defect area fluctuation represents the result of negatively correlated processing after calculating the standard deviation of the surface defect area obtained from the initial detection frequency.

[0037] It should be noted that the effective index of rough polishing inspection represents the result of weighted coupling operation of the effective values ​​of surface quality inspection and surface defect inspection with the rough polishing inspection compensation factors obtained from the preset database. The weighted coupling operation is that the effective values ​​of surface quality inspection and surface defect inspection are multiplied and then added. The rough polishing inspection compensation factors are used to describe the degree of influence of the effective values ​​of surface quality inspection and surface defect inspection on the effective index of rough polishing inspection, including the quality inspection compensation factor and the defect inspection compensation factor.

[0038] Among them, the effective value of surface quality detection is used to measure the effectiveness of surface quality detection of the rough polished surface of the preset batch of slides. It is represented by the arithmetic mean of the results of negative correlation processing of surface roughness fluctuation and negative correlation processing of surface hardness value fluctuation. The effective value of surface defect detection is used to measure the effectiveness of surface defect detection of the rough polished surface of the preset batch of slides. It is represented by the arithmetic mean of the results of negative correlation processing of surface defect number fluctuation and negative correlation processing of surface defect area fluctuation.

[0039] It is important to understand that the effective indicators of rough polishing inspection include multiple parameters, and the correlation and mutual influence between these parameters are also considered. Specifically, as the effective values ​​of surface quality inspection and surface defect inspection increase, the effective indicators of rough polishing inspection also increase. Among them, surface roughness reflects the roughness of the micro-morphology of the slide surface. An increase in surface roughness may mean that there are more micro-defects or irregular textures on the surface. Surface irregularities or inhomogeneities may further lead to defects (such as cracks, bubbles, and tool marks). In addition, surfaces with higher surface roughness may lead to more localized stress concentrations, thereby increasing surface defects and reducing the effectiveness of polishing quality inspection of the slide block. That is, as the effective value of surface quality decreases, the effective value of surface defect detection also decreases, further reducing the effective index of rough polishing inspection. At the same time, the number of surface defects directly affects surface roughness. The more defects there are, the greater the surface unevenness, and the surface roughness usually increases. That is, as the effective value of surface defect detection decreases, the effective value of surface quality inspection decreases, and the effective index of rough polishing inspection also decreases. The parameters in the effective index of rough polishing inspection are interrelated and work together to quantitatively evaluate the effectiveness of rough polishing inspection in the process of rough polishing quality inspection of a preset batch of slide blocks.

[0040] A3 compares the effective index of coarse polishing test with the effective set value of coarse polishing test obtained from the preset database, and determines whether the effective index of coarse polishing test is greater than the effective set value of coarse polishing test. If so, the coarse polishing test analysis result is recorded as effective coarse polishing quality test; otherwise, the coarse polishing test analysis result is recorded as abnormal coarse polishing quality test. The coarse polishing test analysis result includes effective coarse polishing quality test and abnormal coarse polishing quality test.

[0041] Traditional rough polishing quality inspection typically relies on manual judgment, which can lead to significant subjective errors and inconsistencies. This invention uses a quantitative approach to assess the effectiveness of rough polishing inspection in the slide block quality inspection process. By standardizing inspection data and scientifically handling fluctuations, the effectiveness of rough polishing quality inspection for each batch of slide blocks is evaluated, avoiding the influence of human factors and ensuring the accuracy of the inspection. Furthermore, through multi-dimensional data processing, a more refined and detailed evaluation of the rough polishing quality can be achieved. Each data point provides a scientific basis for the stability of the rough polishing quality inspection, enabling the slide block rough polishing quality inspection to go beyond a simple pass / fail judgment and instead involve a more in-depth analysis.

[0042] Regarding the effectiveness judgment of the fine polishing inspection in the second step: Based on the analysis results of the coarse polishing inspection, determine whether to perform coarse polishing quality inspection optimization. The specific steps are as follows:

[0043] B1, if the coarse polishing test analysis result indicates that the coarse polishing quality test is valid, then no coarse polishing quality test optimization is performed; instead, a slide fine polishing quality test judgment command is sent and the fine polishing test analysis result is obtained. Wherein, if... Figure 4 The diagram shows a flowchart of the fine polishing inspection and analysis result acquisition process for a polishing quality inspection method for a slide surface provided by an embodiment of the present invention. The corresponding logic is as follows: Obtain the fine polishing-initialization inspection frequency; obtain fine polishing inspection data based on the fine polishing-initialization inspection frequency; obtain the fine polishing-surface quality inspection effective value and the fine polishing-surface defect inspection effective value based on the fine polishing inspection data, and then perform weighted coupling calculations to obtain the fine polishing inspection effective index; determine whether the fine polishing inspection effective index is greater than the fine polishing inspection effective set value. If yes, the corresponding fine polishing inspection and analysis result is considered to be fine polishing quality inspection effective; otherwise, the corresponding fine polishing inspection and analysis result is considered to be fine polishing quality inspection abnormal. The specific steps for obtaining the fine polishing inspection and analysis result are as follows:

[0044] B11. The effective indicators of rough polishing inspection and the rough polishing-fine polishing production cycle are input into the pre-built rough polishing-fine polishing inspection frequency mapping set in the preset database to obtain the fine polishing-initialization inspection frequency. The fine polishing inspection data after the fine polishing process of the preset batch slide is obtained using the fine polishing-initialization inspection frequency. The fine polishing inspection data includes the surface quality inspection data and the surface defect inspection data of fine polishing. Specifically, as the effective indicators of rough polishing inspection decrease, the fine polishing-initialization inspection frequency increases accordingly.

[0045] Specifically, the surface quality inspection data for fine polishing includes surface gloss and surface dimensional accuracy. Surface gloss is obtained using a gloss meter, and surface dimensional accuracy is obtained using a coordinate measuring machine. The surface defect inspection data for fine polishing includes the number of surface defects and the area of ​​surface defects. The number of surface defects is obtained using a surface defect detector, and the area of ​​surface defects is obtained using a scanning electron microscope.

[0046] B12, after calculating the standard deviation of the fine polishing test data, negative correlation processing is performed to obtain the negative correlation processing results of the fine polishing test data fluctuation. The negative correlation processing results of the fine polishing test data fluctuation include the negative correlation processing results of surface gloss fluctuation, the negative correlation processing results of surface dimensional accuracy fluctuation, the negative correlation processing results of fine polishing-surface defect number fluctuation, and the negative correlation processing results of fine polishing-surface defect area fluctuation.

[0047] B13, the effective value of fine polishing-surface quality detection is obtained by arithmetically averaging the results of negative correlation processing of surface gloss fluctuation and negative correlation processing of surface dimensional accuracy fluctuation. The effective value of fine polishing-surface defect detection is obtained by arithmetically averaging the results of negative correlation processing of fine polishing-surface defect quantity fluctuation and negative correlation processing of fine polishing-surface defect area fluctuation.

[0048] B14. The effective values ​​of fine polishing-surface quality detection and fine polishing-surface defect detection are weighted and coupled with the fine polishing detection compensation factors obtained from the preset database to obtain the effective index of fine polishing detection. The fine polishing detection compensation factors are used to describe the degree of influence of the effective values ​​of fine polishing-surface quality detection and fine polishing-surface defect detection on the effective index of fine polishing detection, including the fine polishing-quality detection compensation factor and the fine polishing-defect detection compensation factor.

[0049] It is important to understand that the effective indicators for fine polishing testing are used to quantify the effectiveness of fine polishing testing during the quality inspection of a preset batch of slides. These indicators include effective values ​​for fine polishing surface quality inspection and fine polishing surface defect inspection. As both effective values ​​increase, the effective indicators also increase. Furthermore, the parameters within the effective indicators are correlated; the effective values ​​for fine polishing surface quality inspection and fine polishing surface defect inspection also influence each other. Specifically, as the effective value for fine polishing surface quality inspection increases, the effective value for fine polishing surface defect inspection also increases, and consequently, the effective indicators also increase.

[0050] B15 compares the effective indicators of the polishing test with the effective set values ​​of the polishing test obtained from the preset database to obtain the polishing test analysis results. The polishing test analysis results include effective polishing quality test and abnormal polishing quality test. Effective polishing quality test means that the effective indicators of the polishing test are greater than the effective set values ​​of the polishing test, and abnormal polishing quality test means that the effective indicators of the polishing test are not greater than the effective set values ​​of the polishing test.

[0051] It should be added that, after sending the slide polishing quality inspection and judgment command and obtaining the polishing inspection and analysis results, the process also includes:

[0052] B111: Obtain rough polishing process interference data for the next batch of slides during the rough polishing process. The rough polishing process interference data includes the standard deviation of rough polishing-polishing pressure and the standard deviation of rough polishing-polishing speed. Obtain the rough polishing process interference data and rough polishing production cycle through PLC (Programmable Logic Controller).

[0053] B112 determines whether all rough polishing process interference data falls within the corresponding preset rough polishing process interference range obtained from the preset database. If so, it obtains the initial detection down-adjustment value and adjusts the initial detection frequency downwards; otherwise, it obtains the initial detection up-adjustment value and adjusts the initial detection frequency upwards. The preset rough polishing process interference range includes the preset polishing pressure fluctuation limit range and the preset polishing speed fluctuation limit range, which are set by professionals according to industry standards. When the rough polishing process fluctuates significantly, it usually means that the surface quality of the slide also fluctuates significantly. By increasing the detection frequency, rough polishing detection data can be obtained more frequently to more comprehensively capture surface quality problems caused by interference. Conversely, if the rough polishing process fluctuates less, it indicates that the polishing process is relatively stable, and the detection frequency can be appropriately reduced to save resources and improve efficiency, avoid over-detection, and reduce unnecessary resource waste.

[0054] The process of obtaining the initial detection downgrade value and setting the initial detection frequency downgrade is as follows: The result of the arithmetic average of the polishing pressure fluctuation deviation result and the polishing speed fluctuation deviation result is input together with the rough polishing production cycle into the initial detection downgrade mapping set already constructed in the preset database for mapping to obtain the initial mapping downgrade amount. The initial detection frequency is reduced step by step according to the initial mapping downgrade amount.

[0055] Specifically, the polishing pressure fluctuation deviation result represents the ratio of the absolute value of the difference between the rough polishing-polishing pressure standard deviation and the polishing pressure standard deviation reference value to the polishing pressure standard deviation reference value, used to reflect the relative deviation between the rough polishing-polishing pressure standard deviation and the polishing pressure standard deviation reference value; the polishing speed fluctuation deviation result represents the ratio of the absolute value of the difference between the rough polishing-polishing speed standard deviation and the polishing speed standard deviation reference value to the polishing speed standard deviation reference value, used to reflect the relative deviation between the rough polishing-polishing speed standard deviation and the polishing speed standard deviation reference value; the polishing pressure standard deviation reference value and the polishing speed standard deviation reference value are obtained from a preset database.

[0056] Specifically, the initial detection frequency is increased by obtaining the initial detection adjustment value. The result of the arithmetic average of the polishing pressure fluctuation deviation result and the polishing speed fluctuation deviation result is input together with the rough polishing production cycle into the preset database to the initial detection adjustment mapping set and the initial detection point adjustment mapping set. The initial mapping adjustment amount and the initial detection point adjustment amount are obtained respectively. The initial detection frequency is increased step by step according to the initial mapping adjustment amount, and the initial detection points are increased step by step according to the initial detection point adjustment amount.

[0057] B2. If the rough polishing test analysis result is abnormal, then determine whether the deviation of the effective rough polishing test index, which reflects the relative deviation between the effective set value and the effective rough polishing test index, is within the preset effective deviation limit range obtained from the preset database. If so, then perform rough polishing quality optimization; otherwise, mark the preset batch slide as an abnormal batch and send a batch rough polishing quality test failure prompt. The deviation of the effective rough polishing test index represents the result of the ratio of the difference between the effective set value and the effective rough polishing test index to the effective set value.

[0058] Among them, the optimization of rough polishing quality inspection means adjusting the sampling frequency and density of inspection points during the rough polishing quality inspection of a preset batch of slides based on the analysis results of the rough polishing inspection; such as Figure 3 The diagram shows an optimization flowchart for rough polishing quality detection of a polishing quality detection method for a slide surface provided by an embodiment of the present invention. The corresponding logic is as follows: Based on the deviation of the effective index of rough polishing detection, obtain the optimized value of the detection sampling frequency and the optimized value of the detection point density. Increase the initial detection sampling frequency according to the optimized value of the detection sampling frequency, and increase the initial detection point density according to the optimized value of the detection point density. Then, determine whether the re-acquired rough polishing detection analysis result is valid for rough polishing quality detection. If so, obtain the fine polishing detection data and fine polishing detection analysis result after the fine polishing process of the preset batch of slides. Otherwise, determine whether the re-acquired rough polishing detection data are all within the corresponding rough polishing detection quality limit range. If so, send a rough polishing quality detection verification success prompt and a slide fine polishing quality detection judgment instruction; otherwise, send a rough polishing quality detection failure prompt.

[0059] Specifically, the steps for optimizing the rough polishing quality inspection are as follows:

[0060] B21 inputs the deviation of the effective indicators of coarse polishing inspection into the linear regression model for optimizing the sampling frequency of coarse polishing inspection. The corresponding output is an optimized value for the sampling frequency of the initial inspection data during the coarse polishing quality inspection of a preset batch of slides. During the coarse polishing quality inspection process, if the collected coarse polishing inspection data is sparse or not updated in a timely manner, it is difficult to react promptly when problems occur. Increasing the initial sampling frequency of the coarse polishing inspection data during the coarse polishing quality inspection of the slides can help to capture potential deviations and quality problems in real time, thereby allowing for timely adjustments and preventing problems from accumulating to the fine polishing stage. For example, if some areas have excessively high or uneven roughness, increasing the sampling frequency can further ensure the accuracy of the coarse polishing quality inspection results.

[0061] B22 inputs the deviation of the effective indicators of rough polishing inspection into the linear regression model for optimizing the rough polishing-inspection point density. The corresponding output is an optimized inspection point density value used to improve the initial inspection point density during the rough polishing quality inspection of a preset batch of slides. Since the rough polishing process may result in localized surface inhomogeneities due to factors such as workpiece shape, polishing tool wear, or the processing environment, increasing the inspection point density helps to more accurately detect these areas of inhomogeneity. By inspecting the quality status of different areas on the slide surface, it is possible to determine if problems exist and make local adjustments, preventing uneven rough polishing quality from affecting the subsequent fine polishing effect. Simultaneously, the increased inspection point density signifies a more detailed analysis of the surface, enabling the detection of more potential minute defects (such as fine scratches, inhomogeneities, and micro-protrusions), contributing to a more comprehensive understanding of the rough polished surface condition and preventing the omission of surface quality issues.

[0062] It should be noted that the coarse-throw-detection sampling frequency optimization linear regression model and the coarse-throw-detection point density optimization linear regression model are pre-trained linear regression models used to fit the mapping relationship between the deviation of the effective index of coarse-throw detection and the corresponding optimized values ​​of detection sampling frequency and detection point density. The input of the linear regression model is the deviation of the effective index of coarse-throw detection. The coarse-throw-detection sampling frequency optimization linear regression model and the coarse-throw-detection point density optimization linear regression model are obtained by training the linear regression model using the least squares method through the scikit-learn framework.

[0063] B23. Reacquire the rough polishing test analysis results and determine whether the reacquired rough polishing test analysis results are valid for rough polishing quality testing. If so, acquire the fine polishing test data after the fine polishing process of the preset batch of slides and acquire the fine polishing test analysis results. Otherwise, perform rough polishing quality testing verification. The specific process for performing rough polishing quality testing verification is as follows: Reacquire the rough polishing test data and determine whether the reacquired rough polishing test data are all within the corresponding rough polishing test quality limit range obtained from the preset database. If so, send a rough polishing quality testing verification success prompt and a slide fine polishing quality testing judgment command; otherwise, send a rough polishing quality testing failure prompt, mark the preset batch of slides as an abnormal batch for rough polishing quality testing verification, and send a batch rough polishing quality testing verification failure prompt.

[0064] For the third step of polishing quality inspection management: based on the obtained fine polishing inspection analysis results, determine whether to perform fine polishing quality inspection optimization. The specific process is as follows:

[0065] C1. If the fine polishing test analysis result is valid, then fine polishing quality test optimization will not be performed. Instead, a slide polishing quality test management prompt will be sent to perform slide polishing quality test management. Slide polishing quality test management means storing and managing the polishing quality test process data, which includes rough polishing test data, fine polishing test data, rough polishing test analysis results, and fine polishing test analysis results.

[0066] In addition, it sends slide polishing quality inspection management prompts to manage the storage of polishing quality inspection process data, and then includes:

[0067] C11, obtain the fine polishing process interference data of the next batch of slides in the fine polishing process. The fine polishing process interference data includes the standard deviation of fine polishing-polishing fluid flow rate and the standard deviation of fine polishing-polishing pressure. The fine polishing process interference data is obtained through PLC (Programmable Logic Controller).

[0068] C12 determines whether all interference data of the fine polishing process are within the corresponding preset interference range of the fine polishing process obtained from the preset database. If so, the fine polishing-initialization detection frequency is lowered; otherwise, the fine polishing-initialization detection frequency is raised. The preset rough polishing process interference range includes the preset fine polishing-polishing fluid flow fluctuation limit range and the preset fine polishing-polishing pressure fluctuation limit range, which are set by professionals according to the standards in the field.

[0069] Specifically, the frequency of fine polishing-initialization testing is reduced by inputting the deviation of the effective indicators of fine polishing testing and the fine polishing production cycle into a pre-built fine polishing testing reduction mapping set in the preset database to obtain the fine polishing initialization testing reduction mapping value. The frequency of fine polishing-initialization testing is reduced step by step according to the fine polishing initialization testing reduction mapping value. As the deviation of the effective indicators of fine polishing testing increases, the fine polishing initialization testing reduction mapping value decreases accordingly.

[0070] Specifically, the adjustment setting for the fine polishing-initialization test frequency is as follows: the deviation degree of the fine polishing test effective index and the fine polishing production cycle are input together into the fine polishing test adjustment mapping set already constructed in the preset database to obtain the fine polishing initialization test adjustment mapping value. The fine polishing-initialization test frequency is increased step by step according to the fine polishing initialization test adjustment mapping value. As the deviation degree of the fine polishing test effective index increases, the fine polishing initialization test adjustment mapping value increases accordingly.

[0071] C2. If the fine polishing test analysis result is an abnormality in fine polishing quality, then determine whether the deviation degree of the fine polishing test effective index, which reflects the relative deviation between the fine polishing test effective set value and the fine polishing test effective index, is within the preset fine polishing effective deviation limit range obtained from the preset database. If so, then fine polishing quality optimization is performed; otherwise, the preset batch slide is marked as a batch with abnormal fine polishing quality and a batch fine polishing quality test failure prompt is sent. The deviation degree of the fine polishing test effective index represents the result of the ratio of the difference between the fine polishing test effective set value and the fine polishing test effective index to the fine polishing test effective set value.

[0072] Among them, the optimization of fine polishing quality inspection means adjusting the inspection equipment in the fine polishing quality inspection process of the preset batch slide based on the fine polishing inspection analysis results, including setting the fine polishing quality inspection scanning speed and setting the fine polishing quality inspection scanning focal length.

[0073] The fine polishing quality inspection scanning speed setting involves inputting the effective fine polishing inspection indicators, the effective fine polishing surface quality inspection values, and the slide surface curvature into a pre-built fine polishing scanning speed detection mapping set in a preset database. This mapping yields a fine polishing scanning speed mapping value. Based on this mapping value, the initial scanning speed of the fine polishing surface quality inspection equipment is gradually reduced, and the fine polishing inspection analysis results are re-acquired. When the scanning speed is too fast, some subtle defects may not be detected in time, especially on more complex surface structures. Lower scanning speeds provide more time for careful inspection of these areas, thus reducing the chance of missed defects. In the fine polishing process, subtle surface defects (such as micro-scratches, micro-particles, dents, etc.) are crucial for slide surface quality inspection. Reducing the initial scanning speed of the fine polishing surface quality inspection equipment helps capture these subtle defects and avoids missing surface quality issues of the slide due to excessively fast scanning.

[0074] The fine polishing quality inspection scanning focal length setting involves: inputting the effective fine polishing inspection indicators, the effective values ​​of fine polishing surface defect detection, and the curvature of the slide surface into a pre-built fine polishing scanning focal length detection mapping set in a preset database to obtain fine polishing scanning focal length mapping values. Based on these mapping values, the initial scanning focal length of the fine polishing surface defect detection equipment is gradually reduced, and the fine polishing inspection analysis results are reacquired. Reducing the scanning focal length helps focus on smaller surface areas, thereby improving the clarity of the scanned image. Especially when scanning details of the slide surface, reducing the focal length helps to more clearly capture minute defects, such as micro-cracks, scratches, or dents. Fine polishing processes typically require more meticulous surface treatment, and the surface may have minor irregularities. Reducing the scanning focal length makes it easier for the inspection equipment to detect these irregularities, thus improving the overall quality inspection effect.

[0075] like Figure 5 The diagram shown is a second component quality inspection interface of a polishing quality inspection system for a slide surface provided in an embodiment of the present invention. When the current component type being inspected is a slide and the component quality inspection type is fine polishing quality inspection, this interface includes a task progress display for acquiring fine polishing surface quality inspection data and acquiring fine polishing surface defect inspection data, as well as a display of fine polishing inspection analysis results. In addition, it also provides fine polishing quality inspection optimization options for setting the fine polishing quality inspection scanning speed and fine polishing quality inspection scanning focal length. Furthermore, this interface also allows viewing fine polishing inspection data.

[0076] like Figure 6The diagram shown is a structural schematic of a polishing quality inspection system for a slide surface provided in an embodiment of the present invention. The polishing quality inspection system for a slide surface provided in an embodiment of the present invention includes: a coarse polishing detection effective judgment module, a fine polishing detection effective judgment module, and a polishing quality inspection management module.

[0077] Specifically, the rough polishing detection effectiveness judgment module is used to obtain rough polishing detection data after the rough polishing process of a preset batch of slides, and to obtain rough polishing detection analysis results based on the obtained rough polishing detection data in order to quantitatively judge the effectiveness of rough polishing detection in the rough polishing quality detection process of the preset batch of slides.

[0078] The fine polishing detection effectiveness judgment module is used to determine whether to perform coarse polishing quality detection optimization based on the coarse polishing detection analysis results. If so, it determines whether to send a slide fine polishing quality detection judgment command after coarse polishing quality detection optimization. Otherwise, it directly obtains the fine polishing detection analysis results based on the fine polishing detection data after the fine polishing process of the preset batch of slides to quantitatively judge the effectiveness of fine polishing detection in the fine polishing quality detection process of the preset batch of slides. Coarse polishing quality detection optimization means adjusting the detection sampling frequency and detection point density in the coarse polishing quality detection process of the preset batch of slides in combination with the coarse polishing detection analysis results.

[0079] The polishing quality inspection management module is used to determine whether to perform fine polishing quality inspection optimization based on the obtained fine polishing inspection analysis results. If so, the slide polishing quality inspection management is performed after fine polishing quality inspection optimization. Otherwise, the slide polishing quality inspection management is performed directly. Fine polishing quality inspection optimization means adjusting the inspection equipment in the fine polishing quality inspection process of the preset batch of slides in combination with the fine polishing inspection analysis results.

[0080] By conducting more detailed quality inspection and analysis on the slide surface after rough polishing, potential errors caused by unevenness in the rough polished surface can be effectively identified, thus avoiding misjudgment of the overall rough polishing quality. This not only improves the accuracy of rough polishing quality inspection but also helps to accurately reflect the true surface condition of the slide. Furthermore, rough polishing quality inspection and fine polishing quality inspection are interrelated; optimization in the rough polishing stage directly affects the results of the fine polishing stage. By analyzing the correlation between rough polishing and fine polishing inspections, the inspection processes of both can be optimized, improving the reliability of the overall slide surface polishing quality inspection. Simultaneously, this invention, through specific optimization measures, makes the inspection results more accurate and reliable, thereby providing more feedback information to help adjust the polishing process in a timely manner, and thus more precisely control the polishing quality of the slide surface.

[0081] In summary, during the rough polishing and fine polishing quality inspection of the slide block in the production process of this invention, the uneven surface of the slide block after rough polishing can easily mislead the inspection of the overall rough polishing quality, leading to inaccurate rough polishing quality inspection. Furthermore, inaccurate rough polishing quality inspection makes it difficult to fully capture the surface characteristics of the slide block, further resulting in inaccurate fine polishing quality inspection, and consequently, inaccurate polishing quality inspection of the slide block surface. This invention, based on the acquired rough polishing inspection data, obtains rough polishing inspection analysis results, which helps to more accurately determine the effectiveness of rough polishing inspection during the slide block's rough polishing quality inspection process. Then, based on the rough polishing inspection analysis results, it is determined whether rough polishing should be performed. Quality inspection optimization helps improve the reliability of rough polishing inspection data during the rough polishing quality inspection of the slide surface, enabling more accurate rough polishing quality inspection of the slide surface. Finally, based on the obtained fine polishing inspection analysis results, it is determined whether to optimize the fine polishing quality inspection, thereby improving the accuracy of fine polishing inspection data during the fine polishing quality inspection of the slide surface. This helps to perform more accurate fine polishing quality inspection of the slide surface, and further enables the correlation analysis between rough polishing quality inspection and fine polishing quality inspection during the polishing quality inspection of the slide surface. This effectively solves the problem of inaccurate polishing quality inspection of the slide surface due to insufficient correlation between rough polishing quality inspection and fine polishing quality inspection.

[0082] Those skilled in the art will understand that embodiments of the present invention can be provided as methods, systems, or computer program products. Therefore, the present invention can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, the present invention can take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0083] This invention is described with reference to flowchart illustrations and / or block diagrams of systems, apparatus (systems), and computer program products according to embodiments of the invention. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, generate instructions for implementing the flowchart illustrations and / or block diagrams. Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0084] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0085] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0086] Although preferred embodiments of the invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the invention.

[0087] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

[0088] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A method for inspecting the polishing quality of a slide surface, characterized in that, Includes the following steps: Obtain rough polishing test data after the rough polishing process of a preset batch of slides, and obtain rough polishing test analysis results based on the obtained rough polishing test data to quantitatively judge the effectiveness of rough polishing test in the rough polishing quality test process of the preset batch of slides. Based on the coarse polishing test analysis results, it is determined whether to perform coarse polishing quality test optimization. If so, it is determined whether to send a slide fine polishing quality test judgment command after coarse polishing quality test optimization. Otherwise, the fine polishing test analysis results are obtained directly based on the fine polishing test data after the fine polishing process of the preset batch of slides to quantitatively judge the effectiveness of fine polishing test in the fine polishing quality test process of the preset batch of slides. The coarse polishing quality test optimization means adjusting the detection sampling frequency and detection point density in the coarse polishing quality test process of the preset batch of slides in combination with the coarse polishing test analysis results. Based on the obtained fine polishing test analysis results, it is determined whether to perform fine polishing quality test optimization. If so, slide polishing quality test management is performed after fine polishing quality test optimization. Otherwise, slide polishing quality test management is performed directly. The fine polishing quality test optimization means adjusting the testing equipment in the fine polishing quality test process of a preset batch of slides in combination with the fine polishing test analysis results.

2. The polishing quality inspection method for a slide surface according to claim 1, characterized in that, The specific steps for obtaining the coarse polishing test analysis results are as follows: The rough polishing test data during the rough polishing quality test of a preset batch of slides is obtained at an initial detection frequency. The rough polishing test data includes rough polishing surface quality test data and rough polishing surface defect test data. The surface quality detection data of the rough polishing includes surface roughness and surface hardness values, and the surface defect detection data of the rough polishing includes the number of surface defects and the area of ​​surface defects. Based on the negative correlation processing results of the obtained rough polishing test data fluctuations, the effectiveness of rough polishing test in the rough polishing quality test process of the preset batch slides is quantitatively evaluated, and the effective index of rough polishing test is obtained, which represents the result after weighted coupling operation of the effective value of surface quality test, the effective value of surface defect test, and the rough polishing test compensation factor obtained from the preset database. The negative correlation processing result of the rough polishing test data fluctuation is used to measure the detection fluctuation of various types of data in the rough polishing test data obtained by the preset batch slides with the initial detection frequency. The effective value of surface quality detection is used to measure the effectiveness of surface quality detection of the rough polished surface of the preset batch of slides, and the effective value of surface defect detection is used to measure the effectiveness of surface defect detection of the rough polished surface of the preset batch of slides. The rough polishing test compensation factor is used to describe the degree of influence of the effective value of surface quality test and the effective value of surface defect test on the effective index of rough polishing test. The effective index of coarse polishing test is compared with the effective set value of coarse polishing test obtained from the preset database. It is determined whether the effective index of coarse polishing test is greater than the effective set value of coarse polishing test. If so, the coarse polishing test analysis result is recorded as effective coarse polishing quality test; otherwise, the coarse polishing test analysis result is recorded as abnormal coarse polishing quality test. The results of the coarse polishing test analysis include those that show effective coarse polishing quality and those that show abnormal coarse polishing quality.

3. The polishing quality inspection method for a slide surface according to claim 2, characterized in that, The specific steps for determining whether to optimize the coarse polishing quality inspection based on the coarse polishing inspection analysis results are as follows: If the rough polishing test analysis result is valid, then no rough polishing quality test optimization will be performed. Instead, a slide fine polishing quality test judgment command will be sent and the fine polishing test analysis result will be obtained. If the rough polishing test analysis result is abnormal, then it is determined whether the deviation of the effective rough polishing test index, which reflects the relative deviation between the effective set value and the effective rough polishing test index, is within the preset effective deviation limit range obtained from the preset database. If so, the rough polishing quality test is optimized; otherwise, the preset batch slide is marked as an abnormal batch of rough polishing quality test and a batch rough polishing quality test failure prompt is sent.

4. The polishing quality inspection method for a slide surface according to claim 3, characterized in that, The process of sending the slide fine polishing quality detection and judgment command and obtaining the fine polishing detection analysis result further includes: Obtain rough polishing process interference data for the next batch of slides during the rough polishing process. The rough polishing process interference data includes the standard deviation of rough polishing-polishing pressure and the standard deviation of rough polishing-polishing rotation speed. Determine whether all the interference data of the rough polishing process are within the corresponding preset rough polishing process interference range obtained from the preset database. If so, obtain the initial detection down-adjustment value to adjust the initial detection frequency. Otherwise, obtain the initial detection up-adjustment value to adjust the initial detection frequency. The preset rough polishing process interference range includes the preset polishing pressure fluctuation limit range and the preset polishing speed fluctuation limit range. The specific process of obtaining the initial detection downgrade value and setting the initial detection frequency downgrade is as follows: the result of the arithmetic average of the polishing pressure fluctuation deviation result and the polishing speed fluctuation deviation result and the rough polishing production cycle are input together into the initial detection downgrade mapping set constructed in the preset database to obtain the initial mapping downgrade amount, and the initial detection frequency is reduced step by step according to the initial mapping downgrade amount. The polishing pressure fluctuation deviation result is used to reflect the relative deviation between the standard deviation of the rough polishing-polishing pressure and the reference value of the standard deviation of the polishing pressure; the polishing speed fluctuation deviation result is used to reflect the relative deviation between the standard deviation of the rough polishing-polishing speed and the reference value of the standard deviation of the polishing speed. The step of obtaining the initial detection adjustment value and adjusting the initial detection frequency is as follows: the result of the arithmetic average of the polishing pressure fluctuation deviation result and the polishing speed fluctuation deviation result is input together with the rough polishing production cycle into the preset database to the initial detection adjustment mapping set and the initial detection point adjustment mapping set that have been constructed. The initial mapping adjustment amount and the initial detection point adjustment amount are obtained respectively. The initial detection frequency is increased step by step according to the initial mapping adjustment amount, and the initial detection points are increased step by step according to the initial detection point adjustment amount.

5. The polishing quality inspection method for a slide surface according to claim 3, characterized in that, The specific steps for optimizing the coarse polishing quality inspection are as follows: The deviation of the effective index of coarse polishing detection is input into the linear regression model of coarse polishing-detection sampling frequency optimization, and the corresponding output is the detection sampling frequency optimization value used to improve the initial detection sampling frequency of coarse polishing detection data during the coarse polishing quality detection of preset batch slides. The deviation of the effective index of coarse polishing is input into the linear regression model of coarse polishing-detection point density optimization, and the corresponding output is the detection point density optimization value used to improve the initial detection point density of the preset batch slide during the coarse polishing quality detection process. Determine whether the re-acquired rough polishing test analysis results are valid for rough polishing quality testing. If so, obtain the fine polishing test data after the preset batch slide fine polishing process and obtain the fine polishing test analysis results. Otherwise, perform rough polishing quality testing verification. The specific process for performing coarse polishing quality testing and verification is as follows: determine whether the re-acquired coarse polishing test data are all within the coarse polishing test quality limit range obtained from the preset database. If so, send a coarse polishing quality testing and verification success prompt and a slide fine polishing quality testing judgment instruction; otherwise, send a coarse polishing quality testing failure prompt, mark the preset batch of slides as an abnormal batch of coarse polishing quality testing and send a batch coarse polishing quality testing and verification failure prompt.

6. The polishing quality inspection method for a slide surface according to claim 5, characterized in that, The specific steps for obtaining the fine polishing test and analysis results are as follows: The effective indicators of rough polishing inspection and the rough polishing-fine polishing production cycle are input together into the rough polishing-fine polishing inspection frequency mapping set constructed in the preset database to obtain the fine polishing-initialization inspection frequency. The fine polishing inspection data after the fine polishing process of the preset batch slide is obtained using the fine polishing-initialization inspection frequency. The fine polishing inspection data includes the surface quality inspection data and the surface defect inspection data of fine polishing. The surface quality inspection data of the fine polishing includes surface gloss and surface dimensional accuracy, and the surface defect inspection data of the fine polishing includes the number of fine polishing surface defects and the area of ​​fine polishing surface defects. After calculating the standard deviation of the fine polishing test data, negative correlation processing is performed to obtain the negative correlation processing result of the fine polishing test data fluctuation. The negative correlation processing result of the fine polishing test data fluctuation is used to measure the detection fluctuation of various categories of data in the fine polishing test data obtained by the preset batch slide at the fine polishing-initialization test frequency. The effective value of fine polishing-surface quality detection is obtained by arithmetically averaging the results of negative correlation processing of surface gloss fluctuation and negative correlation processing of surface dimensional accuracy fluctuation. The effective value of fine polishing-surface defect detection is obtained by arithmetically averaging the results of negative correlation processing of fine polishing-surface defect quantity fluctuation and negative correlation processing of fine polishing-surface defect area fluctuation. The effective value of fine polishing-surface quality detection is used to measure the effectiveness of the fine polishing surface quality detection of a preset batch of slides, and the effective value of fine polishing-surface defect detection is used to measure the effectiveness of the fine polishing surface defect detection of a preset batch of slides. The effective values ​​of fine polishing-surface quality detection and fine polishing-surface defect detection are weighted and coupled with the fine polishing detection compensation factor obtained from the preset database to obtain the effective index of fine polishing detection. The fine polishing inspection compensation factor is used to describe the degree of influence of the effective value of fine polishing-surface quality inspection and the effective value of fine polishing-surface defect inspection on the effective index of fine polishing inspection. The effective indicators of fine polishing inspection are compared with the effective set values ​​of fine polishing inspection obtained from the preset database to obtain the fine polishing inspection analysis results, which include the fine polishing quality inspection results being effective and the fine polishing quality inspection results being abnormal. The term "fine polishing quality detection valid" indicates that the fine polishing detection valid index is greater than the fine polishing detection valid set value, and the term "fine polishing quality detection abnormal" indicates that the fine polishing detection valid index is not ...

7. The polishing quality inspection method for a slide surface according to claim 6, characterized in that, The specific process for determining whether to perform fine polishing quality optimization based on the obtained fine polishing inspection and analysis results is as follows: If the fine polishing test analysis result is that the fine polishing quality test is valid, then no fine polishing quality test optimization will be performed. Instead, a slide polishing quality test management prompt will be sent to store and manage the polishing quality test process data. The polishing quality test process data includes rough polishing test data, fine polishing test data, rough polishing test analysis results, and fine polishing test analysis results. If the fine polishing test analysis result is an abnormal fine polishing quality test result, then it is determined whether the deviation of the fine polishing test effective index, which reflects the relative deviation between the fine polishing test effective set value and the fine polishing test effective index, is within the preset fine polishing effective deviation limit range obtained from the preset database. If so, fine polishing quality test optimization is performed; otherwise, the preset batch slide is marked as a batch with abnormal fine polishing quality test result and a batch fine polishing quality test failure prompt is sent.

8. A method for detecting the polishing quality of a slide surface according to claim 7, characterized in that, The step of sending a sliding block polishing quality inspection management prompt to store and manage polishing quality inspection process data also includes: Obtain the fine polishing process interference data for the next batch of slides during the fine polishing process. The fine polishing process interference data includes the standard deviation of the fine polishing fluid flow rate and the standard deviation of the fine polishing pressure. Determine whether all the interference data of the fine polishing process are within the corresponding preset fine polishing process interference range obtained from the preset database. If so, adjust the fine polishing-initialization detection frequency downward; otherwise, adjust the fine polishing-initialization detection frequency upward. The preset coarse polishing process interference range includes the preset fine polishing-polishing fluid flow fluctuation limit range and the preset fine polishing-polishing pressure fluctuation limit range. The setting for reducing the frequency of fine polishing-initialization detection is as follows: the deviation degree of the effective indicators of fine polishing detection and the fine polishing production cycle are input together into the fine polishing detection reduction mapping set constructed in the preset database to obtain the fine polishing initialization detection reduction mapping value, and the fine polishing-initialization detection frequency is reduced step by step according to the fine polishing initialization detection reduction mapping value. The process of increasing the frequency of fine polishing-initialization testing is as follows: the deviation degree of the effective indicators of fine polishing testing and the fine polishing production cycle are input together into the fine polishing testing upward adjustment mapping set constructed in the preset database to obtain the fine polishing initialization testing upward adjustment mapping value, and the fine polishing-initialization testing frequency is increased step by step according to the fine polishing initialization testing upward adjustment mapping value.

9. A method for detecting the polishing quality of a slide surface according to claim 7, characterized in that, The optimization of fine polishing quality inspection includes setting the fine polishing quality inspection scanning speed and setting the fine polishing quality inspection scanning focal length. The process of setting the fine polishing quality detection scanning speed is as follows: the fine polishing detection effective index, the fine polishing surface quality detection effective value and the slide surface curvature are input into the fine polishing scanning speed detection mapping set constructed in the preset database and mapped to obtain the fine polishing scanning speed mapping value. The initial scanning speed of the fine polishing surface quality detection equipment is gradually reduced according to the fine polishing scanning speed mapping value and the fine polishing detection analysis results are re-acquired. The process of setting the scanning focal length for fine polishing quality inspection is as follows: the effective indicators of fine polishing inspection, the effective values ​​of fine polishing-surface defect detection, and the curvature of the slide surface are input into the fine polishing scanning focal length detection mapping set already constructed in the preset database and mapped to obtain the fine polishing scanning focal length mapping value. Based on the fine polishing scanning focal length mapping value, the initial scanning focal length of the fine polishing surface defect detection equipment is gradually reduced and the fine polishing inspection analysis results are re-acquired.

10. A polishing quality inspection system for a slide surface, employing the polishing quality inspection method for a slide surface as described in any one of claims 1-9, characterized in that, include: The system includes a coarse polishing inspection validity judgment module, a fine polishing inspection validity judgment module, and a polishing quality inspection management module. The coarse polishing detection effectiveness judgment module is used to obtain coarse polishing detection data after the coarse polishing process of a preset batch of slides, and to obtain coarse polishing detection analysis results based on the obtained coarse polishing detection data in order to quantitatively judge the effectiveness of coarse polishing detection in the coarse polishing quality detection process of the preset batch of slides. The fine polishing detection effectiveness judgment module is used to determine whether to perform coarse polishing quality detection optimization based on the coarse polishing detection analysis results. If so, it determines whether to send a slide fine polishing quality detection judgment command after coarse polishing quality detection optimization. Otherwise, it directly obtains the fine polishing detection analysis results based on the fine polishing detection data after the fine polishing process of the preset batch of slides to quantitatively judge the effectiveness of fine polishing detection in the fine polishing quality detection process of the preset batch of slides. The coarse polishing quality detection optimization means adjusting the detection sampling frequency and detection point density in the coarse polishing quality detection process of the preset batch of slides in combination with the coarse polishing detection analysis results. The polishing quality inspection and management module is used to determine whether to perform fine polishing quality inspection optimization based on the obtained fine polishing inspection and analysis results. If so, the slide polishing quality inspection and management is performed after fine polishing quality inspection and optimization. Otherwise, the slide polishing quality inspection and management is performed directly. The fine polishing quality inspection optimization means adjusting the inspection equipment in the fine polishing quality inspection process of a preset batch of slides in combination with the fine polishing inspection and analysis results.

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