Tank container for transporting electronic-grade acid

Abstract

The invention relates to an electronic-grade acid transportation tank container. The electronic-grade acid transportation tank container comprises a frame and a tank body, a safety valve and a gas collection tank are arranged on the tank body, the safety valve comprises a shell and a valve element, the valve element comprises a horizontal part installed on the shell in a guiding mode and a vertical part matched with the tank body in a guiding and sealing mode, and a pressure relief channel penetrating through the lower end of the vertical part and one side of the horizontal part is formed in the valve element. A disc spring is arranged on the lower side of the valve element, a buffering box is arranged on the upper side of the valve element, buffering liquid is arranged in the buffering box, first magnets arranged in pairs at intervals are arranged between the upper side of the buffering box and the shell, the magnetic poles of the opposite sides of the two first magnets are opposite, and a rotating shaft is rotationally installed at the upper end of the shell. By means of innovative designs such as magnetic buffering, worm and gear transmission self-locking and magnetic drive gas circulation, accurate control over high-pressure discharge in the electronic-grade acid transportation process, harmless treatment of waste gas and high reliability of the system are achieved, meanwhile, maintenance convenience and long-period economy are both considered, and the device is suitable for high-risk liquid transportation scenes.

Description

Technical Field

[0001] This invention belongs to the field of electronic-grade acid transportation technology, specifically relating to an electronic-grade acid transportation tank container. Background Technology

[0002] Electronic-grade hydrofluoric acid is an important chemical substance commonly used in semiconductor manufacturing, primarily for large-scale integrated circuits, as a cleaning and etching agent. It is an ultra-clean, high-purity reagent and a widely used wet electronic chemical in chip manufacturing processes, finding applications in microelectronics industries such as large-scale integrated circuits, LED displays, flat panel displays, and crystalline silicon solar cells. Particularly during silicon wafer processing, insoluble solid particles or metal ions can cause short circuits; electronic-grade hydrofluoric acid effectively removes impurities from the wafers, making the containers used for transporting it crucial.

[0003] Electronic-grade hydrofluoric acid is commonly transported in tank container trucks, which are lined with PTFE material. The safety valve is a crucial component of the tank container; its main function is to relieve pressure when the internal pressure exceeds a permissible level and close the valve when the pressure drops to a specified value, thus protecting the tank container. Current safety valves respond using a combination of a rupture disc and a spring. If the rupture disc ruptures, the container must be stopped for replacement. During transport, the hydrofluoric acid sloshes within the tank container, potentially causing multiple pressure increases and requiring repeated rupture disc replacements, significantly reducing transport efficiency. Furthermore, the hydrogen fluoride gas released from the safety valve directly into the air can damage the surrounding environment. Summary of the Invention

[0004] To address the aforementioned technical problems, this invention provides an electronic-grade acid transport tank container.

[0005] The technical solution of the present invention for an electronic-grade acid transport tank container is as follows:

[0006] An electronic-grade acid transport tank container includes a frame and a tank body. The tank body is equipped with a safety valve and a gas collection box. The safety valve includes a housing and a valve core. The valve core includes a horizontal portion that is guided and installed with the housing, and a vertical portion that is guided and sealed with the tank body. The valve core has a pressure relief channel penetrating the lower end of the vertical portion and one side of the horizontal portion. A disc spring is provided on the lower side of the valve core, and a buffer box is provided on the upper side. The buffer box contains a buffer solution. Pairs of spaced first magnets are provided between the upper side of the buffer box and the housing, with opposite magnetic poles on opposite sides of the two first magnets. The housing... A rotating shaft is rotatably mounted on the upper end, and the lower end of the rotating shaft is guided and sealed into the buffer box. The lower end of the rotating shaft is provided with agitating blades, and the upper end of the rotating shaft is provided with a first worm gear. A first worm gear meshing with the first worm gear is rotatably mounted on the housing. One end of the first worm gear is provided with a first gear. The buffer box is provided with a connecting rod, and the connecting rod is provided with a first rack that matches the first gear. A baffle that blocks the valve core upwards is provided inside the housing. The housing is provided with a through hole that communicates with the pressure relief channel when the valve core is blocked by the baffle. The gas collection box is connected to the through hole through a connecting pipe.

[0007] Furthermore, the diameter of the first worm gear is larger than the diameter of the first worm, and the diameter of the first worm is larger than the diameter of the first gear.

[0008] Furthermore, the valve core is provided with a control valve for controlling the opening and closing of the pressure relief channel. The valve stem of the control valve extends out of the upper side of the valve core, and the outer wall of the valve stem is provided with a fixing key. The valve core is provided with a second rack. A second worm gear with a rotation axis extending horizontally is rotatably mounted on the upper side of the baffle. One end of the second worm gear is fixedly connected to a second gear that matches the second rack. The baffle is provided with a second worm wheel that matches the second worm gear. The second worm wheel is rotatably mounted on the baffle via a hollow shaft. The lower end of the hollow shaft penetrates the lower side of the baffle. The inner wall of the hollow shaft has a keyway that matches the fixing key of the valve stem, so that the valve stem can rotate with the hollow shaft after it is fixed to the hollow shaft.

[0009] Furthermore, the upper side of the gas collection box is provided with an exhaust box and a water tank. The exhaust box is provided with a partition that divides the interior of the box into an upper cavity and a lower cavity. The box is provided with a through hole communicating with the upper cavity. The box is provided with an air inlet communicating with the lower cavity and the gas collection box. The air inlet is provided with an air inlet one-way valve. The box is provided with an air outlet communicating with the lower cavity. The air outlet is provided with a flexible hose communicating with the water tank. The air outlet is provided with an air outlet one-way valve. The exhaust box is provided with a drive mechanism for driving the partition to move up and down.

[0010] Furthermore, the hose is connected to the upper side of the water tank, and the water tank is provided with an inlet pipe and an outlet pipe, each with a cap.

[0011] Furthermore, the drive mechanism includes a third worm, a first bevel gear, a second bevel gear, and a gearbox. The third worm is rotatably mounted on the housing and meshes with the first worm gear. The first bevel gear is fixedly connected to one end of the third worm. The gearbox is fixedly connected to the housing. The second bevel gear is fixedly connected to the output shaft end of the gearbox and meshes with the first bevel gear. A connecting shaft horizontally disposed on the upper side of the exhaust box is fixedly connected to the output shaft end of the gearbox. A second magnet and a third magnet arranged symmetrically on the upper side are fixedly connected to the connecting shaft. The magnetic poles of the second magnet and the third magnet are opposite on their outward-facing sides. A fourth magnet is fixedly connected to the upper side of the partition.

[0012] Furthermore, the exhaust box is provided with guide rods arranged vertically, the partition plate is provided with guide holes that cooperate with the guide rods for guidance and sealing, and a return spring is fitted on the guide rod. The two ends of the return spring are fixedly connected to the partition plate and the exhaust box, respectively.

[0013] Furthermore, the connecting pipe is provided with a corrugated pipe section, and the stirring blade is provided with a number of liquid passage holes.

[0014] This invention provides an electronic-grade acid transport tank container, which has the following advantages compared to existing technologies:

[0015] The electronic-grade acid transport tank container of this invention provides double buffering during valve core operation through a combination of paired first magnets and disc springs, significantly reducing impact vibration, extending valve life, and ensuring a smooth and controllable depressurization process. A worm gear drive is employed, utilizing its self-locking characteristic to prevent accidental valve core reset or loosening, improving the accuracy and reliability of depressurization. The alternating magnetic poles of the second and third magnets on the connecting shaft and the fourth magnet on the partition drive the partition to reciprocate, achieving continuous compression and discharge of gas within the exhaust box. Combined with the acid-base neutralization function of the water tank, this effectively treats harmful gases and avoids environmental pollution. One-way valves at the inlet and outlet ensure unidirectional gas flow and prevent backflow; the corrugated section of the connecting pipe absorbs vibration, improving system stability. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the internal structure of the electronic-grade acid transport tank container of the present invention;

[0017] Figure 2 This is a schematic diagram of the internal structure of the equipment box in the electronic-grade acid transport tank container of the present invention;

[0018] Figure 3 This is a partial structural diagram of the equipment box in the electronic-grade acid transport tank container of the present invention;

[0019] Figure 4 yes Figure 3 Enlarged view of point A in the middle;

[0020] Figure 5 yes Figure 3 Enlarged view of point B in the middle;

[0021] Figure 6 yes Figure 3 Enlarged view of point C in the middle;

[0022] Figure 7 yes Figure 3 Enlarged view of point D in the middle;

[0023] In the diagram: 1. Frame; 2. Tank body; 3. Walking platform; 4. Fixed rod; 5. Equipment box; 6. Safety valve; 7. Gas collection box; 8. Exhaust box; 9. Water tank; 10. Gearbox; 11. Connecting pipe; 12. Manhole; 13. Shell; 14. Fixed flange; 15. Sealing gasket; 16. Valve core; 17. Disc spring; 18. Pressure relief channel; 19. Buffer tank; 20. Rotating shaft; 21. Agitator blade; 22. Liquid passage hole; 23. First magnet; 24. First worm gear; 25. First worm; 26. First gear; 27. Connecting rod; 28. First rack; 29. ​​Stop 30. Plate; 31. Control valve; 32. Valve stem; 33. Second rack; 34. Second worm gear; 35. Hollow shaft; 36. Second worm; 37. Second gear; 38. Through hole; 39. Third worm; 40. First bevel gear; 41. Second bevel gear; 42. Connecting shaft; 43. Second magnet; 44. Third magnet; 45. Upper cavity; 46. Lower cavity; 47. Perforation; 48. Partition plate; 49. Fourth magnet; 50. Inlet check valve; 51. Outlet check valve; 52. Hose; 53. Guide rod; 54. Return spring; 55. Inlet pipe; 56. Outlet pipe. Detailed Implementation

[0024] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments:

[0025] Specific embodiments of the electronic-grade acid transport tank container of the present invention are as follows: Figures 1 to 7 As shown, the system includes a frame 1 and a tank 2, with the tank 2 fixedly connected within the frame 1. A walking platform 3, located on the upper side of the tank 2, is fixedly connected to the upper end of the frame 1, and the walking platform 3 is fixedly connected to the frame 1 via a fixing rod 4. An equipment box 5 is fixedly connected to the upper side of the frame 1, and the lower end of the equipment box 5 is sealed and fixedly connected to the outer wall of the tank 2. The outer wall of the equipment box 5 is fixedly connected to the frame 1 via the fixing rod 4. A door is rotatably installed at the upper end of the equipment box 5, and a locking structure is installed between the door and the equipment box 5. A manhole 12, a gas collection box 7, an exhaust box 8, a water tank 9, and a safety valve 6 are installed on the box inside the equipment box 5.

[0026] Safety valve 6 includes a housing 13 and a valve core 16. The valve core 16 is integrally formed by a horizontal part and a vertical part. The horizontal part is horizontally guided and connected to the housing 13 via a sliding groove, and the vertical part is vertically guided and sealed to the top of the tank 2 via a sealing ring. The valve core 16 has an L-shaped channel inside, with the lower end of the vertical part as the inlet and one side of the horizontal part as the outlet. The lower end of the housing 13 has a fixing flange 14, which is fixed to the tank 2 by bolts. A sealing gasket 15 is installed between the fixing flange 14 and the tank 2. A disc spring 17 is installed below the valve core 16, and a buffer box 19 is fixed above it. The buffer box 19 is filled with buffer solution. Two pairs of first magnets 23 are installed between the top of the buffer box 19 and the housing 13. The magnetic poles of each pair of magnets face opposite directions, and the magnets reduce the impact of the valve core 16 through magnetic repulsion. A rotating shaft 20 is rotatably mounted on the upper end of the housing 13 via a bearing. The rotation axis of the rotating shaft 20 extends vertically. The lower end of the rotating shaft 20 extends into the buffer tank 19 and is fixedly connected to an agitator blade 21. Multiple liquid passage holes 22 are formed on the agitator blade 21 to promote buffer flow. A sealing bushing is provided between the rotating shaft 20 and the housing 13. A first worm gear 24 is fixedly connected to the upper end of the rotating shaft 20. A first worm 25 is rotatably mounted on the side wall of the housing 13. The rotation axis of the first worm 25 extends horizontally, and the first worm 25 meshes with the first worm gear 24. A first gear 26 is fixedly connected to one end of the first worm 25. A connecting rod 27 is fixedly connected to the outer side wall of the buffer tank 19, and a first rack 28 that meshes with the first gear 26 is fixedly connected to the end of the connecting rod 27.

[0027] A through hole 37 is formed on the side wall of the housing 13, and a baffle 29 located above the through hole 37 is fixedly connected to the inner wall of the housing 13. When the valve core 16 moves upward and abuts against the baffle 29, the outlet of the pressure relief channel 18 is aligned with the through hole 37, and the gas enters the connecting pipe 11 through the through hole 37. The middle section of the connecting pipe 11 is provided with a corrugated pipe section, and the end is connected to the gas collection box 7.

[0028] A control valve 30, which controls the opening and closing of the pressure relief channel 18, is mounted on the valve core 16. The valve stem 31 of the control valve 30 extends out from the upper side of the valve core 16. A fixing key is located on the outer wall of the valve stem 31. A second worm gear 35 is mounted above the baffle 29 via a bearing. One end of the second worm gear 35 is fixedly connected to a second gear 36, which meshes with a second rack 32 fixedly connected to one side of the upper side of the valve core 16. A second worm wheel 33 is rotatably mounted on the baffle 29 via a hollow shaft 34. The second worm wheel 33 meshes with the second worm gear 35. The lower end of the hollow shaft 34 extends to the bottom of the baffle 29. The inner wall of the hollow shaft 34 has a keyway that mates with the fixing key of the valve stem 31. Rotating the second worm gear 35 drives the valve stem 31 to rotate, thereby opening and closing the control valve 30.

[0029] The exhaust box 8 has a partition 47 that divides the interior into an upper cavity 44 and a lower cavity 45. The box has a through hole 46 communicating with the upper cavity 44, an air inlet communicating with the lower cavity 45 and the air collection box 7, and an air inlet with an air inlet check valve 49. The box also has an air outlet communicating with the lower cavity 45, a flexible hose 51 communicating with the water tank 9, and an air outlet check valve 50. The exhaust box 8 has a drive mechanism for moving the partition 47 up and down. The flexible hose 51 communicates with the upper side of the water tank 9. The water tank 9 has an inlet pipe 54 and an outlet pipe 55, each with a cap. The drive mechanism includes a third worm gear 38, a first bevel gear 39, a second bevel gear 40, and a gearbox 10. The third worm gear 38 is rotatably mounted on the housing 13 and meshes with the first worm wheel 24. The first bevel gear 39 is fixedly connected to one end of the third worm gear 38. The gearbox 10 is fixedly connected to the housing 13. The second bevel gear 40 is fixedly connected to the output shaft end of the gearbox 10 and meshes with the first bevel gear 39. A connecting shaft 41 horizontally positioned on the upper side of the exhaust box 8 is fixedly connected to the output shaft end of the gearbox 10. A second magnet 42 and a third magnet 43, symmetrically arranged vertically, are fixedly connected to the connecting shaft 41. The magnetic poles of the second magnet 42 and the third magnet 43 face opposite directions. A fourth magnet 48 is fixedly connected to the upper side of the partition plate 47. The exhaust box 8 has vertically arranged guide rods 52. The partition plate 47 has guide holes that guide and seal with the guide rods 52. A return spring 53 is fitted on the guide rods 52. The two ends of the return spring 53 are fixedly connected to the partition plate 47 and the exhaust box 8, respectively.

[0030] When the electronic-grade acid transport tank container of the present invention is used, if overpressure occurs inside the tank 2 due to temperature changes or chemical reactions, the safety valve 6 automatically activates to release pressure. Specifically, the pressure inside the tank pushes the vertical part of the valve core 16 upward, and drives the horizontal part upward. After the horizontal part of the valve core 16 stops with the baffle 29, the pressure relief channel 18 inside the valve core 16 aligns with the through hole 37 on the housing 13. During the upward movement of the valve core 16, the connecting rod 27 fixed on the buffer box 19 drives the first rack 28 to move, driving the first gear 26 and the first worm 25 to rotate. The first worm 25 drives the first worm wheel 24 and the rotating shaft 20 to rotate. The stirring blade 21 at the end of the rotating shaft 20 stirs the buffer solution, causing the valve core 16 to slowly rise and rise to the position where it stops with the baffle 29 when the pressure inside the tank 2 is high enough. At the same time, the first magnet 23 between the buffer box 19 and the housing 13 reduces the impact of the valve core 16 through magnetic repulsion. After the valve core 16 moves upward to a certain height, the second rack 32 meshes with the second gear 36, and the keyway on the inner wall of the hollow shaft 34 engages with the fixed key of the valve stem 31. The second gear 36 drives the second worm 35 and the second worm wheel 33 to rotate. The rotation of the worm wheel in the hollow shaft 34 causes the valve stem 31 to rotate, opening the control valve 30. The pressure relief channel 18 connects to the connecting pipe 11, and hydrogen fluoride gas enters the gas collection box 7. After the pressure in the tank 2 is relieved, the valve core 16 moves downward under the magnetic repulsion of the first magnet 23 and the tension of the disc spring 17. During the downward movement, the hollow shaft 34 rotates in the opposite direction, causing the valve stem 31 to rotate in the opposite direction, closing the control valve 30. During the upward and downward movement of the valve core 16, the third worm 38 rotates with the first worm wheel 24, driving the first bevel gear 39 to mesh with the second bevel gear 40. The output shaft of the gearbox 10 rotates, and after acceleration by the gearbox 10, the output shaft speed of the gearbox 10 increases significantly. The output shaft of the gearbox 10 drives the connecting shaft 41 to rotate. The second magnet 42 and the third magnet 43 on the connecting shaft 41 rotate, and their alternating magnetic poles interact with the fourth magnet 48 on the partition 47, forcing the partition 47 to reciprocate up and down along the guide rod 52. When the partition 47 moves downward, the volume of the lower cavity 45 decreases, the inlet check valve 49 closes, and the outlet check valve 50 opens, allowing gas to enter the water tank 9 via the hose 51. When the partition 47 moves upward, the return spring 53 rebounds, the volume of the lower cavity 45 increases, and the inlet check valve 49 opens to replenish gas, forming a continuous gas treatment cycle. The water tank 9 maintains its liquid level through the inlet pipe 54 and the outlet pipe 55, allowing the dissolved acidic gas to be safely discharged.

[0031] The electronic-grade acid transport tank container of this invention provides double buffering when the valve core 16 is activated by a combination of paired first magnets 23 and disc springs 17, significantly reducing impact vibration, extending valve life, and ensuring a smooth and controllable depressurization process. A worm gear drive is employed, utilizing its self-locking characteristic to prevent accidental reset or loosening of the valve core 16, improving the accuracy and reliability of the depressurization action. The alternating magnetic poles of the second magnet 42 and third magnet 43 on the connecting shaft 41 and the fourth magnet 48 on the partition 47 drive the partition 47 to reciprocate, achieving continuous compression and discharge of gas in the exhaust box 8. Combined with the acid-base neutralization function of the water tank 9, this effectively treats harmful gases and avoids environmental pollution. One-way valves at the inlet and outlet ensure unidirectional gas flow and prevent backflow; the corrugated section of the connecting pipe 11 absorbs vibration, improving system stability.

[0032] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A tank container for transporting electronic-grade acid, characterized in that, The system includes a frame and a tank. The tank is equipped with a safety valve and a gas collection box. The safety valve includes a housing and a valve core. The valve core includes a horizontal portion that is guided and installed with the housing, and a vertical portion that is guided and sealed with the tank body. The valve core has a pressure relief channel penetrating the lower end of the vertical portion and one side of the horizontal portion. A disc spring is located on the lower side of the valve core, and a buffer box is located on the upper side. The buffer box contains a buffer solution. Pairs of spaced first magnets are located between the upper side of the buffer box and the housing, with opposite magnetic poles on opposite sides. A rotatable device is mounted on the upper end of the housing. A rotating shaft is inserted into a buffer box with its lower end guided and sealed. The lower end of the rotating shaft is equipped with a stirring blade, and the upper end of the rotating shaft is equipped with a first worm gear. A first worm gear meshing with the first worm gear is rotatably mounted on the housing. One end of the first worm gear is equipped with a first gear. The buffer box is equipped with a connecting rod, and the connecting rod is equipped with a first rack that matches the first gear. The housing is equipped with a baffle that blocks the valve core upwards. The housing is equipped with a through hole that communicates with the pressure relief channel when the valve core is blocked by the baffle. The gas collection box is connected to the through hole through a connecting pipe.

2. The electronic-grade acid transport tank container according to claim 1, characterized in that, The diameter of the first worm gear is larger than the diameter of the first worm, and the diameter of the first worm is larger than the diameter of the first gear.

3. The electronic-grade acid transport tank container according to claim 1, characterized in that, The valve core is equipped with a control valve that controls the opening and closing of the pressure relief channel. The valve stem of the control valve extends out of the upper side of the valve core. The outer wall of the valve stem is equipped with a fixing key. The valve core is equipped with a second rack. A second worm gear with a rotation axis extending horizontally is rotatably mounted on the upper side of the baffle. One end of the second worm gear is fixedly connected to a second gear that matches the second rack. The baffle is equipped with a second worm wheel that matches the second worm gear. The second worm wheel is rotatably mounted on the baffle via a hollow shaft. The lower end of the hollow shaft passes through the lower side of the baffle. The inner wall of the hollow shaft has a keyway that matches the fixing key of the valve stem, so that the valve stem can rotate with the hollow shaft after it is fixed to the hollow shaft.

4. The electronic-grade acid transport tank container according to claim 3, characterized in that, The upper side of the gas collection box is provided with an exhaust box and a water tank. The exhaust box is provided with a partition that divides the interior of the box into an upper cavity and a lower cavity. The box is provided with a through hole communicating with the upper cavity. The box is provided with an air inlet communicating with the lower cavity and the gas collection box. The air inlet is provided with an air inlet one-way valve. The box is provided with an air outlet communicating with the lower cavity. The air outlet is provided with a flexible hose communicating with the water tank. The air outlet is provided with an air outlet one-way valve. The exhaust box is provided with a drive mechanism that drives the partition to move up and down.

5. The electronic-grade acid transport tank container according to claim 4, characterized in that, The hose is connected to the upper side of the water tank, and the water tank is provided with an inlet pipe and an outlet pipe, and the inlet pipe and the outlet pipe are respectively provided with pipe caps.

6. The electronic-grade acid transport tank container according to claim 4, characterized in that, The drive mechanism includes a third worm, a first bevel gear, a second bevel gear, and a gearbox. The third worm is rotatably mounted on the housing and meshes with the first worm gear. The first bevel gear is fixedly connected to one end of the third worm. The gearbox is fixedly connected to the housing. The second bevel gear is fixedly connected to the output shaft end of the gearbox and meshes with the first bevel gear. A connecting shaft horizontally positioned on the upper side of the exhaust box is fixedly connected to the output shaft end of the gearbox. A second magnet and a third magnet, symmetrically arranged vertically, are fixedly connected to the connecting shaft. The magnetic poles of the second magnet and the third magnet face outwards with opposite magnetic poles. A fourth magnet is fixedly connected to the upper side of the partition.

7. The electronic-grade acid transport tank container according to claim 6, characterized in that, The exhaust box is provided with guide rods arranged vertically. The partition plate is provided with guide holes that cooperate with the guide rods for guidance and sealing. A return spring is fitted on the guide rod. The two ends of the return spring are fixedly connected to the partition plate and the exhaust box, respectively.

8. The electronic-grade acid transport tank container according to claim 1, characterized in that, The connecting pipe is provided with a corrugated pipe section, and the stirring blade is provided with a number of liquid passage holes.

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