Automatic etching factor detection equipment

By designing an automatic etching factor detection device and adopting a vertical laser detection and automatic conveying system, the problems of low efficiency and insufficient accuracy of traditional detection methods have been solved, achieving efficient and accurate etching factor detection and improving production quality and efficiency.

CN120926877APending Publication Date: 2025-11-11JIANGSU FERROTEC SEMICON TECH CO LTD
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Patent Information

Application Number
CN202511080228.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-08-04
Publication Date
2025-11-11

AI Technical Summary

Technical Problem

In existing technologies, the etching factor detection efficiency is low and the accuracy is insufficient, which cannot meet the high precision requirements, resulting in insufficient substrate circuit accuracy and device reliability.

Method used

An automatic etching factor detection device was designed, which adopts a vertically installed laser detection system and an automatic conveying component, combined with a data processor for accurate detection and classification, thereby realizing automated production.

Benefits of technology

This improves the accuracy and efficiency of etching factor detection, ensures the testing quality of each product, reduces the number of defective products entering the market, and lowers production costs.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses etching factor automatic detection equipment, and relates to the technical field of etching factor detection.The etching factor automatic detection equipment comprises a base, a conveying assembly is arranged on the base, a mounting frame is mounted on the base, and a first detection mounting base and a second detection mounting base are mounted on the mounting frame; the first detection mounting base and the second detection mounting base are provided with laser emitters and laser receiving plates, the mounting frame is provided with a data processor, and the conveying assembly conveys a ceramic substrate to a detection position. The laser emitted by the laser emitter is reflected to the laser receiving plate through the substrate when passing through the lower part of the first detection mounting seat and the lower part of the second detection mounting seat, the data processor calculates the etching factor according to the laser receiving time, and compared with the traditional manual detection and camera capture detection, the detection precision and the production quality can be improved.
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Description

Technical Field

[0001] This invention relates to the field of etching factor detection technology, specifically an automatic etching factor detection device. Background Technology

[0002] With the explosive growth in demand for high-power-density electronic devices in fields such as new energy vehicles, 5G communications, and aerospace, copper-clad ceramic substrates (such as AMB / DBC substrates) have become the core material for third-generation semiconductor (SiC, GaN) packaging, and their market size continues to grow. According to Yole's forecast, the global ceramic substrate market size will exceed US$2.5 billion in 2025, and the quality of the etching process directly determines the accuracy of the substrate circuitry and the reliability of the devices.

[0003] Etch factor (EF) is a core indicator for measuring the quality of etching processes, defined as the ratio of etching depth to lateral etching amount (EF = Depth / Undercut). A high etch factor (EF ≥ 3) ensures line steepness, reduces current congestion, and improves module current carrying capacity and heat dissipation efficiency. However, as line width / spacing evolves to below 50μm, traditional manual inspection methods (such as metallographic microscopy sampling measurement) face two major challenges:

[0004] 1. Inefficient: Single-point inspection takes more than 2 minutes and is generally a sampling inspection, which cannot cover all products;

[0005] 2. Insufficient accuracy: The error of manual visual measurement is as high as ±15%, which cannot meet the automotive-grade AEC-Q101 standard (EF fluctuation < ±5%). Summary of the Invention

[0006] The purpose of this invention is to provide an automatic etching factor detection device to solve the problems raised in the prior art.

[0007] To achieve the above objectives, the present invention provides the following technical solution: The automatic etching factor detection device includes a base, a conveying assembly on the base, a mounting frame on the base, a module slide rail on the mounting frame, a first detection mounting seat on the mounting frame, a slider slidably mounted on the module slide rail, a second detection mounting seat mounted on the slider, a plurality of electric ball joints mounted on both the first and second detection mounting seats, a laser emitter mounted on the electric ball joints, and a laser receiving plate mounted on both the first and second detection mounting seats. The first and second detection mounting seats are installed perpendicularly to each other.

[0008] As a preferred technical solution, a data processor is installed on the mounting bracket, and both the laser emitter and the laser receiver are electrically connected to the data processor.

[0009] As a preferred technical solution, the conveying assembly includes a conveying component, a dual-shaft motor, a side mounting plate, a support plate, a transmission column, a gear mounting column, a conveying incomplete gear, and a conveying driven gear;

[0010] Two support plates are symmetrically mounted on the base, and the two support plates are connected by a conveyor. A dual-axis motor is mounted on the base and is located below the conveyor. Two side mounting plates are symmetrically mounted on the base and are located outside the conveyor. A transmission column is mounted on each of the two output shafts of the dual-axis motor, and a conveying incomplete gear is mounted on the transmission column. Gear mounting columns are mounted on both sides of the drive shaft of the conveyor, and a conveying driven gear is mounted on each of the two gear mounting columns. The conveying driven gear meshes with the conveying incomplete gear.

[0011] As a preferred technical solution, the conveying assembly further includes a partially positioned gear, a driven gear, an internally threaded column, a reciprocating screw, a positioning plate, and a transmission belt;

[0012] A partially positioned gear is mounted on the transmission column. An internally threaded column and a positioning driven gear are rotatably mounted on the side mounting plate. The positioning driven gear meshes with the partially positioned gear. The positioning driven gear is connected to the internally threaded column via a transmission belt. A reciprocating screw is slidably mounted inside the internally threaded column. A positioning plate is mounted on the side of the reciprocating screw near the conveying component.

[0013] As a preferred technical solution, both the incomplete conveying gear and the incomplete positioning gear have teeth on only half of their circumference, and the toothed halves of the incomplete conveying gear and the incomplete positioning gear are in relative positions.

[0014] As a preferred technical solution, the base is provided with a sorting component, the operation of which is controlled by a conveying driven gear.

[0015] As a preferred technical solution, the sorting component includes a guide plate, a side baffle, a collection frame, a sorting motor, a turntable, a connecting rod, and a stop block;

[0016] A guide plate is obliquely installed on the base, and the guide plate is close to the side of the conveyor away from the positioning plate. Two collection frames are symmetrically installed on the base, and the collection frames are located on both sides of the guide plate. Two side baffles are symmetrically installed on the guide plate. A sorting motor is installed on the guide plate. A turntable is installed on the output shaft of the sorting motor. A connecting rod is eccentrically installed on the turntable. The connecting rod is hinged to the turntable. A stop block is rotatably installed on the guide plate. The stop block is located between the turntable and the conveyor (1201). The stop block is hinged to one end of the connecting rod.

[0017] As a preferred technical solution, the sorting component further includes a sensor, a sensor is mounted on the gear mounting post, the sensor is electrically connected to the data processor, and the sorting motor is electrically connected to the data processor.

[0018] As a preferred technical solution, the sensor is electrically connected to the module slide rail.

[0019] Compared with the prior art, the beneficial effects of the present invention are:

[0020] 1. The substrate is inspected in two directions by vertically mounting the first inspection mount below and the second inspection mount, making the data more accurate. The etching factor is detected by using the reflection time of the laser. Compared with traditional manual inspection and camera capture inspection, it can improve the inspection accuracy and production quality.

[0021] 2. The conveying component transports the ceramic substrate to the detection position for continuous detection, achieving automation, improving detection efficiency, eliminating the need for random sampling, and controlling the etching results of each product to reduce the number of defective products entering the market.

[0022] 3. The sorting component classifies the substrates according to the test results, which facilitates the subsequent processing of unqualified substrates, eliminates the need for batch processing, reduces waste, and saves production costs. Attached Figure Description

[0023] Figure 1 This is a first-view structural diagram of the present invention;

[0024] Figure 2 This is a schematic diagram of the second perspective structure of the present invention;

[0025] Figure 3 This is a schematic diagram of the third-view structure of the present invention;

[0026] Figure 4 This is a first-view structural diagram of the present invention cut across.

[0027] Figure 5 This is a schematic diagram of the second-view structure cut across the present invention;

[0028] Figure 6 This is a schematic diagram of the third-view structure cut out from the present invention;

[0029] Figure 7 For the present invention Figure 5 A magnified structural diagram of point A in the middle.

[0030] In the diagram: 1. Base; 2. Mounting bracket; 3. Detection mounting post; 4. Module slide rail; 5. First detection mounting seat; 6. Slider; 7. Second detection mounting seat; 8. Electric ball joint; 9. Laser emitter; 10. Laser receiver board; 11. Data processor;

[0031] 12. Conveying assembly; 1201. Conveying component; 1202. Dual-shaft motor; 1203. Side mounting plate; 1204. Support plate; 1205. Drive column; 1206. Gear mounting column; 1207. Incomplete conveying gear; 1208. Incomplete positioning gear; 1209. Conveying driven gear; 1210. Positioning driven gear; 1211. Internal threaded column; 1212. Reciprocating screw; 1213. Positioning plate; 1214. Drive belt;

[0032] 13. Sorting components; 1301. Flow deflector; 1302. Side baffle; 1303. Collection box; 1304. Sorting motor; 1305. Turntable; 1306. Connecting rod; 1307. Stop block; 1308. Sensor. Detailed Implementation

[0033] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0034] Example: Figures 1-7 As shown, the present invention provides a technical solution for an automatic etching factor detection device, characterized in that: the automatic etching factor detection device includes a base 1, a conveying assembly 12 is provided on the base 1, a mounting frame 2 is installed on the base 1, a module slide rail 4 is installed on the mounting frame 2, a detection mounting column 3 is installed on the mounting frame 2, a first detection mounting seat 5 is installed on the detection mounting column 3, a slider 6 is slidably installed on the module slide rail 4, a second detection mounting seat 7 is installed on the slider 6, a plurality of electric ball joints 8 are installed on both the first detection mounting seat 5 and the second detection mounting seat 7, a laser emitter 9 is installed on the electric ball joints 8, and a laser receiving plate 10 is installed on both the first detection mounting seat 5 and the second detection mounting seat 7, and the first detection mounting seat 5 and the second detection mounting seat 7 are installed perpendicularly to each other.

[0035] The mounting bracket 2 is equipped with a data processor 11, and the laser emitter 9 and the laser receiver 10 are both electrically connected to the data processor 11.

[0036] Before inspecting the etched ceramic substrate, the laser emission angle of the laser emitter 9 is adjusted by the electric ball joint 8 to ensure that the reflected laser light falls onto the laser receiving plate 10. During inspection, the ceramic substrate is transported to the inspection position by the conveying assembly 12, passing under the first inspection mounting base 5 and the second inspection mounting base 7 respectively. At this time, the laser light emitted by the laser emitter 9 is reflected by the substrate and shines onto the laser receiving plate 10. The data processor 11 calculates the depth and width of the etched groove based on the laser reception time, thereby obtaining the etching factor. Since the etched groove is often not unidirectional, the substrate is inspected in two directions by vertically mounting the first inspection mounting base 5 and the second inspection mounting base 7, making the data more accurate. The etching factor is detected by using the laser reflection time, which can improve the inspection accuracy and production quality compared with traditional manual inspection and camera capture inspection.

[0037] like Figures 1-6 As shown, the conveying assembly 12 includes a conveying component 1201, a dual-axis motor 1202, a side mounting plate 1203, a support plate 1204, a transmission column 1205, a gear mounting column 1206, a conveying incomplete gear 1207, and a conveying driven gear 1209.

[0038] Two support plates 1204 are symmetrically mounted on the base 1, and the two support plates 1204 are connected by a conveyor 1201. A dual-axis motor 1202 is mounted on the base 1, and the dual-axis motor 1202 is located below the conveyor 1201. Two side mounting plates 1203 are symmetrically mounted on the base 1, and the side mounting plates 1203 are located outside the conveyor 1201. A transmission column 1205 is mounted on each of the two output shafts of the dual-axis motor 1202. A conveying incomplete gear 1207 is mounted on the transmission column 1205. Gear mounting columns 1206 are mounted on both sides of the drive shaft of the conveyor 1201. A conveying driven gear 1209 is mounted on each of the two gear mounting columns 1206. The conveying driven gear 1209 meshes with the conveying incomplete gear 1207.

[0039] When it is necessary to detect the etching factor of a ceramic substrate, the ceramic substrate is placed at the inlet end of the conveyor 1201, and the dual-axis motor 1202 is started. The output shaft of the dual-axis motor 1202 drives the incomplete conveying gear 1207 to rotate through the transmission column 1205. Since the driven conveying gear 1209 meshes with the incomplete conveying gear 1207, when the incomplete conveying gear 1207 rotates, it drives the conveyor 1201 to transport the ceramic substrate to the detection position for detection through the driven conveying gear 1209. This allows for continuous detection, automation, and improved detection efficiency. It eliminates the need for sampling inspection, allows control over the etching results of each product, and reduces the number of defective products entering the market.

[0040] The conveying assembly 12 also includes a partially positioned gear 1208, a driven gear 1210, an internally threaded column 1211, a reciprocating screw 1212, a positioning plate 1213, and a transmission belt 1214;

[0041] A partially positioned gear 1208 is mounted on the transmission column 1205. An internally threaded column 1211 and a positioning driven gear 1210 are rotatably mounted on the side mounting plate 1203. The positioning driven gear 1210 meshes with the partially positioned gear 1208. The positioning driven gear 1210 and the internally threaded column 1211 are connected by a transmission belt 1214. A reciprocating screw 1212 is slidably mounted inside the internally threaded column 1211. A positioning plate 1213 is mounted on the side of the reciprocating screw 1212 near the conveyor 1201.

[0042] When the dual-axis motor 1202 rotates, it drives the incomplete positioning gear 1208 to rotate via the transmission column 1205. Since the positioning driven gear 1210 meshes with the incomplete positioning gear 1208, the incomplete positioning gear 1208 drives the positioning driven gear 1210 to rotate. The positioning driven gear 1210 drives the internal threaded column 1211 to rotate synchronously via the transmission belt 1214. When the internal threaded column 1211 rotates, it drives the positioning plate 1213 to move back and forth via the reciprocating screw 1212. When the positioning plate 1213 moves away from the reciprocating screw 1212, it pushes the ceramic substrate toward the center position for positioning, which facilitates subsequent testing.

[0043] Both the incomplete conveying gear 1207 and the incomplete positioning gear 1208 have teeth on only half of their circumference, and the toothed halves of the incomplete conveying gear 1207 and the incomplete positioning gear 1208 are in relative positions.

[0044] Since the toothed half of the incomplete conveying gear 1207 and the incomplete positioning gear 1208 are in a relative position, when the incomplete conveying gear 1207 drives the conveying component 1201, the ceramic substrate is conveyed forward and passes through the first detection mounting seat 5 for the first detection. When the incomplete conveying gear 1207 does not drive the conveying component 1201, the ceramic substrate stops below the second detection mounting seat 7 for the second detection, completing the detection work. At the same time, the incomplete positioning gear 1208 starts to drive, driving the positioning plate 1213 to position the ceramic substrate, so that the entire detection process is carried out in an orderly manner.

[0045] like Figures 1-2 and Figures 4-6 As shown, a sorting component 13 is provided on the base 1, and the operation of the sorting component 13 is controlled by the conveying driven gear 1209.

[0046] The sorting component 13 includes a guide plate 1301, a side baffle 1302, a collection frame 1303, a sorting motor 1304, a turntable 1305, a connecting rod 1306, and a stop block 1307;

[0047] A guide plate 1301 is obliquely mounted on the base 1, the guide plate 1301 is close to the side of the conveyor 1201 away from the positioning plate 1213. Two collection frames 1303 are symmetrically mounted on the base 1, the collection frames 1303 are located on both sides of the guide plate 1301. Two side baffles 1302 are symmetrically mounted on the guide plate 1301. A sorting motor 1304 is mounted on the guide plate 1301. A turntable 1305 is mounted on the output shaft of the sorting motor 1304. A connecting rod 1306 is eccentrically mounted on the turntable 1305. The connecting rod 1306 is hinged to the turntable 1305. A stop block 1307 is rotatably mounted on the guide plate 1301. The stop block 1307 is located between the turntable 1305 and the conveyor 1201. The stop block 1307 is hinged to one end of the connecting rod 1306.

[0048] The sorting component 13 also includes a sensor 1308, which is mounted on the gear mounting post 1206. The sensor 1308 is electrically connected to the data processor 11, and the sorting motor 1304 is electrically connected to the data processor 11.

[0049] After the ceramic substrate has been inspected, it slides onto the guide plate 1301 as the conveyor 1201 rotates again. At this time, the sensor 1308 detects the rotation of the gear mounting column 1206 and sends an electrical signal to the data processor 11. The data processor 11 sends an electrical signal to the sorting motor 1304 according to the inspection result. When the inspection is qualified, the turntable 1305 is controlled to rotate forward. The turntable 1305 drives the stop 1307 to shift through the connecting rod 1306, so that the ceramic substrate slides to the collection box 1303 on one side. When the inspection is unqualified, the turntable 1305 is controlled to rotate in reverse, so that the ceramic substrate slides to the collection box 1303 on the other side. The substrate is sorted according to the inspection result, which facilitates the subsequent processing of unqualified substrates. Batch processing is not required, which reduces waste and saves production costs.

[0050] The sensor 1308 is electrically connected to the module slide rail 4.

[0051] When the substrate passes the first detection mounting base 5 and stops below the second detection mounting base 7, the sensor 1308 detects that the gear mounting column 1206 has stopped rotating and sends an electrical signal to control the slider 6 to drive the second detection mounting base 7 to slide, completing the second detection and ensuring the completion of the detection process.

[0052] Working principle of the invention:

[0053] Before inspecting the etched ceramic substrate, the laser emission angle of the laser emitter 9 is adjusted by the electric ball joint 8 to ensure that the reflected laser light falls onto the laser receiving plate 10. During inspection, the ceramic substrate is transported to the inspection position by the conveying assembly 12, passing under the first inspection mounting base 5 and the second inspection mounting base 7 respectively. At this time, the laser light emitted by the laser emitter 9 is reflected by the substrate and shines onto the laser receiving plate 10. The data processor 11 calculates the depth and width of the etched groove based on the laser reception time, thereby obtaining the etching factor. Since the etched groove is often not unidirectional, the substrate is inspected in two directions by vertically mounting the first inspection mounting base 5 and the second inspection mounting base 7, making the data more accurate. The etching factor is detected by using the laser reflection time, which can improve the inspection accuracy and production quality compared with traditional manual inspection and camera capture inspection.

[0054] When it is necessary to detect the etching factor of a ceramic substrate, the ceramic substrate is placed at the inlet end of the conveyor 1201, and the dual-axis motor 1202 is started. The output shaft of the dual-axis motor 1202 drives the incomplete conveying gear 1207 to rotate through the transmission column 1205. Since the driven conveying gear 1209 meshes with the incomplete conveying gear 1207, when the incomplete conveying gear 1207 rotates, it drives the conveyor 1201 to transport the ceramic substrate to the detection position for detection through the driven conveying gear 1209. This allows for continuous detection, automation, and improved detection efficiency. It eliminates the need for sampling inspection, allows control over the etching results of each product, and reduces the number of defective products entering the market.

[0055] When the dual-axis motor 1202 rotates, it drives the incomplete positioning gear 1208 to rotate via the transmission column 1205. Since the positioning driven gear 1210 meshes with the incomplete positioning gear 1208, the incomplete positioning gear 1208 drives the positioning driven gear 1210 to rotate. The positioning driven gear 1210 drives the internal threaded column 1211 to rotate synchronously via the transmission belt 1214. When the internal threaded column 1211 rotates, it drives the positioning plate 1213 to move back and forth via the reciprocating screw 1212. When the positioning plate 1213 moves away from the reciprocating screw 1212, it pushes the ceramic substrate toward the center position for positioning, which facilitates subsequent testing.

[0056] Since the toothed half of the incomplete conveying gear 1207 and the incomplete positioning gear 1208 are in a relative position, when the incomplete conveying gear 1207 drives the conveying component 1201, the ceramic substrate is conveyed forward and passes through the first detection mounting seat 5 for the first detection. When the incomplete conveying gear 1207 does not drive the conveying component 1201, the ceramic substrate stops below the second detection mounting seat 7 for the second detection, completing the detection work. At the same time, the incomplete positioning gear 1208 starts to drive, driving the positioning plate 1213 to position the ceramic substrate, so that the entire detection process is carried out in an orderly manner.

[0057] After the ceramic substrate has been inspected, it slides onto the guide plate 1301 as the conveyor 1201 rotates again. At this time, the sensor 1308 detects the rotation of the gear mounting column 1206 and sends an electrical signal to the data processor 11. The data processor 11 sends an electrical signal to the sorting motor 1304 according to the inspection result. When the inspection is qualified, the turntable 1305 is controlled to rotate forward. The turntable 1305 drives the stop 1307 to shift through the connecting rod 1306, so that the ceramic substrate slides to the collection box 1303 on one side. When the inspection is unqualified, the turntable 1305 is controlled to rotate in reverse, so that the ceramic substrate slides to the collection box 1303 on the other side. The substrate is sorted according to the inspection result, which facilitates the subsequent processing of unqualified substrates. Batch processing is not required, which reduces waste and saves production costs.

[0058] When the substrate passes the first detection mounting base 5 and stops below the second detection mounting base 7, the sensor 1308 detects that the gear mounting column 1206 has stopped rotating and sends an electrical signal to control the slider 6 to drive the second detection mounting base 7 to slide, completing the second detection and ensuring the completion of the detection process.

[0059] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. An automatic etching factor detection device, characterized in that: The automatic etching factor detection device includes a base (1), a conveying assembly (12) on the base (1), a mounting frame (2) on the base (1), a module slide rail (4) on the mounting frame (2), a detection mounting column (3) on the mounting frame (2), a first detection mounting seat (5) on the detection mounting column (3), a slider (6) slidably mounted on the module slide rail (4), a second detection mounting seat (7) on the slider (6), several electric ball joints (8) on both the first detection mounting seat (5) and the second detection mounting seat (7), a laser emitter (9) on the electric ball joints (8), and a laser receiving plate (10) on both the first detection mounting seat (5) and the second detection mounting seat (7). The first detection mounting seat (5) and the second detection mounting seat (7) are installed perpendicularly to each other.

2. The automatic etching factor detection device according to claim 1, characterized in that: The mounting bracket (2) is equipped with a data processor (11), and the laser emitter (9) and the laser receiver (10) are both electrically connected to the data processor (11).

3. The automatic etching factor detection device according to claim 1, characterized in that: The conveying assembly (12) includes a conveying component (1201), a dual-axis motor (1202), a side mounting plate (1203), a support plate (1204), a transmission column (1205), a gear mounting column (1206), a conveying incomplete gear (1207), and a conveying driven gear (1209); Two support plates (1204) are symmetrically installed on the base (1), and the two support plates (1204) are connected by a conveyor (1201). A dual-axis motor (1202) is installed on the base (1) and is located below the conveyor (1201). Two side mounting plates (1203) are symmetrically installed on the base (1) and are located outside the conveyor (1201). A transmission column (1205) is installed on each of the two output shafts of the dual-axis motor (1202), and a conveying incomplete gear (1207) is installed on the transmission column (1205). Gear mounting columns (1206) are installed on both sides of the drive shaft of the conveyor (1201), and a conveying driven gear (1209) is installed on each of the two gear mounting columns (1206). The conveying driven gear (1209) meshes with the conveying incomplete gear (1207).

4. The automatic etching factor detection device according to claim 3, characterized in that: The conveying assembly (12) also includes a partially positioned gear (1208), a driven gear (1210), an internally threaded column (1211), a reciprocating screw (1212), a positioning plate (1213), and a transmission belt (1214); A partially positioned gear (1208) is mounted on the transmission column (1205). An internally threaded column (1211) and a positioning driven gear (1210) are rotatably mounted on the side mounting plate (1203). The positioning driven gear (1210) meshes with the partially positioned gear (1208). The positioning driven gear (1210) and the internally threaded column (1211) are connected by a transmission belt (1214). A reciprocating screw (1212) is slidably mounted inside the internally threaded column (1211). A positioning plate (1213) is mounted on the side of the reciprocating screw (1212) near the conveyor (1201).

5. The automatic etching factor detection device according to claim 4, characterized in that: Both the incomplete conveying gear (1207) and the incomplete positioning gear (1208) have teeth on only half of their circumference, and the toothed halves of the incomplete conveying gear (1207) and the incomplete positioning gear (1208) are in relative positions.

6. The automatic etching factor detection device according to claim 3, characterized in that: A sorting component (13) is provided on the base (1), and the operation of the sorting component (13) is controlled by the conveying driven gear (1209).

7. The automatic etching factor detection device according to claim 6, characterized in that: The sorting component (13) includes a guide plate (1301), a side baffle (1302), a collection frame (1303), a sorting motor (1304), a turntable (1305), a connecting rod (1306), and a stop block (1307); A guide plate (1301) is obliquely installed on the base (1), the guide plate (1301) is close to the side of the conveyor (1201) away from the positioning plate (1213), two collection frames (1303) are symmetrically installed on the base (1), the collection frames (1303) are located on both sides of the guide plate (1301), two side baffles (1302) are symmetrically installed on the guide plate (1301), and a sorting motor (1304) is installed on the guide plate (1301). A turntable (1305) is mounted on the output shaft of the sorting motor (1304). A connecting rod (1306) is eccentrically mounted on the turntable (1305). The connecting rod (1306) is hinged to the turntable (1305). A stop block (1307) is rotatably mounted on the guide plate (1301). The stop block (1307) is located between the turntable (1305) and the conveyor (1201). The stop block (1307) is hinged to one end of the connecting rod (1306).

8. The automatic etching factor detection device according to claim 7, characterized in that: The sorting component (13) also includes a sensor (1308), which is mounted on the gear mounting post (1206). The sensor (1308) is electrically connected to the data processor (11), and the sorting motor (1304) is electrically connected to the data processor (11).

9. An automatic etching factor detection device according to claim 8, characterized in that: The sensor (1308) is electrically connected to the module slide rail (4).

Citation Information

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