Numerical aperture measurement method, device and system

Abstract

The embodiment of the invention provides a numerical aperture measurement method, device and system. The method comprises the steps that displacement and power values of a to-be-measured optical element at multiple displacement points are obtained, the multiple displacement points are position points to which the to-be-measured optical element moves based on a preset step length, the preset step length is smaller than or equal to a preset value, and the preset value is determined according to the light spot diameter of the to-be-measured optical element; the moving direction of the to-be-measured optical element is parallel to the light beam emitting direction of the laser, the power value is the power value of the light beam received by the to-be-measured optical element at the corresponding displacement point, fitting calculation is carried out according to the displacement amount and the power value of the plurality of displacement points, and the target numerical aperture of the to-be-measured optical element is determined. According to the method provided by the embodiment of the invention, the power values of the plurality of displacement points are collected based on small-step multi-step movement, and then the target numerical aperture of the optical element to be measured is accurately calculated through the fitting algorithm, so that the precision is improved by 4 times, and real-time interruption is supported.

Description

Technical Field

[0001] This application relates to the field of optical measurement technology, and in particular to a numerical aperture measurement method, device and system. Background Technology

[0002] Numerical aperture (NA) is a key parameter of optical components (such as lenses and optical fibers), which directly affects the resolution, light flux, and focusing ability of optical systems.

[0003] In related technologies, a single measurement with a fixed displacement can be used; however, it cannot accurately capture 95% of the power points, resulting in a large error. Summary of the Invention

[0004] This application provides a numerical aperture measurement method, device, and system to improve the accuracy of numerical aperture measurement.

[0005] In a first aspect, embodiments of this application provide a numerical aperture measurement method, applied to a first device, the method comprising:

[0006] The displacement and power values ​​of the optical element under test at at least two displacement points are obtained; the at least two displacement points are the positions to which the optical element under test moves based on a preset step size; the preset step size is less than or equal to a preset value; the preset value is determined based on the spot diameter of the optical element under test; the direction of movement of the optical element under test is parallel to the direction of the laser beam emitted by the laser; the power value is the power value of the beam received by the optical element under test at the corresponding displacement point.

[0007] The target numerical aperture of the optical element under test is determined by fitting calculations based on the displacement and power values ​​of at least two displacement points.

[0008] In one possible design, determining the target numerical aperture of the optical element under test by fitting the displacement and power values ​​of at least two displacement points includes:

[0009] Determine a first neighboring point and a second neighboring point corresponding to the 95% power value from at least two of the displacement points;

[0010] Linear interpolation is performed on the first and second nearest points to determine the displacement and numerical aperture corresponding to the 95% power value;

[0011] Determine the numerical aperture corresponding to at least two displacement points based on the displacement of at least two displacement points;

[0012] The target numerical aperture of the optical element under test is obtained by fitting and calculating the numerical aperture corresponding to at least two displacement points and the numerical aperture corresponding to the 95% power value.

[0013] In one possible design, the power value is determined by at least one of the following methods:

[0014] Obtained by measurement using the power meter;

[0015] For each displacement point, the applied current value of the laser corresponding to the displacement point is obtained, and the power value of the displacement point is determined based on the applied current value.

[0016] In one possible design, determining the power value at the displacement point based on the applied current value includes:

[0017] Determine the voltage compensation value of the applied current;

[0018] The power value of the displacement point is determined based on the voltage compensation value and the applied current value.

[0019] In one possible design, the method further includes:

[0020] The distance the input is moved;

[0021] The corresponding number of pulses is determined based on the travel distance;

[0022] If the number of pulses is greater than a preset threshold, then the number of pulses is set to the preset threshold.

[0023] The bytes corresponding to the pulse count are split to obtain the first byte and the second byte;

[0024] A third movement instruction is generated based on the first byte and the second byte, and the third movement instruction is sent to the second device so that the second device controls the optical element under test to move according to the third movement instruction.

[0025] Secondly, embodiments of this application provide a numerical aperture measurement method applied to a second device, the method comprising:

[0026] The optical element under test is controlled to move to at least two displacement points based on a preset step size; the direction of movement of the optical element under test is parallel to the direction of the laser beam emitted by the laser.

[0027] The displacement values ​​of at least two of the displacement points are sent to the first device.

[0028] In one possible design, controlling the optical element under test to move to at least two displacement points based on a preset step size includes:

[0029] For each movement, after controlling the optical element under test to move to the displacement point corresponding to the current movement and before starting the next movement, a preset time is waited.

[0030] In one possible design, the method further includes:

[0031] In response to receiving a first limit signal, the first movement command is blocked and the second movement command is enabled; the first limit signal is used to indicate that the limit position has been reached during movement along the first direction; the first movement command is used to indicate movement along the first direction; the first movement command is used to indicate movement along the second direction; the second direction is the opposite of the first direction.

[0032] And / or,

[0033] In response to receiving the second limit signal, the second movement command is blocked, and the first movement command is enabled.

[0034] Thirdly, embodiments of this application provide a first device, comprising:

[0035] The acquisition module is used to acquire the displacement and power value of the optical element under test at at least two displacement points; the at least two displacement points are the positions to which the optical element under test moves based on a preset step size; the preset step size is less than or equal to a preset value; the moving direction of the optical element under test is parallel to the direction of the laser beam emitted by the laser; the power value is the power value of the beam received by the optical element under test at the corresponding displacement point.

[0036] The determination module is used to perform fitting calculations based on the displacement and power values ​​of at least two displacement points to determine the target numerical aperture of the optical element under test.

[0037] Fourthly, embodiments of this application provide a second device, comprising:

[0038] The control module is used to control the optical element under test to move to at least two displacement points based on a preset step size; the direction of movement of the optical element under test is parallel to the direction of the laser beam emitted by the laser.

[0039] A sending module is used to send the displacement amounts of at least two of the displacement points to a first device.

[0040] Fifthly, embodiments of this application provide a first device, comprising: at least one processor and a memory;

[0041] The memory stores computer-executed instructions;

[0042] The at least one processor executes computer execution instructions stored in the memory, causing the at least one processor to perform the method described in the first aspect above and various possible designs of the first aspect.

[0043] Sixthly, embodiments of this application provide a second device, comprising: at least one processor and a memory;

[0044] The memory stores computer-executed instructions;

[0045] The at least one processor executes the computer execution instructions stored in the memory, causing the at least one processor to perform the method described in the second aspect above and various possible designs of the second aspect.

[0046] In a seventh aspect, embodiments of this application provide a numerical aperture measurement system, comprising: a first device as described in the first aspect and various possible designs of the first aspect, a second device as described in the second aspect and various possible designs of the second aspect, a photoelectric limit switch, a drive module, and an optical platform;

[0047] The first device is used to acquire the displacement and power values ​​of the optical element under test at at least two displacement points; the at least two displacement points are positions to which the optical element under test moves based on a preset step size; the preset step size is less than or equal to a preset value; the moving direction of the optical element under test is parallel to the direction of the laser beam emitted by the laser; the power value is the power value of the beam received by the optical element under test at the corresponding displacement point; and the target numerical aperture of the optical element under test is determined by fitting calculation based on the displacement and power values ​​of the at least two displacement points.

[0048] The second device is used to control the optical element under test to move to at least two displacement points based on a preset step size; the moving direction of the optical element under test is parallel to the direction of the laser beam emitted; and the displacement of the at least two displacement points is sent to the first device.

[0049] The optical platform is used to mount the optical component to be tested;

[0050] The drive module is connected to the second device and the optical platform, and is used to drive the optical platform to move under the control of the second device;

[0051] The photoelectric limit switch is connected to the second device and is used to send a limit signal to the second device when the optical platform moves to the limit position.

[0052] Eighthly, embodiments of this application provide a computer-readable storage medium storing computer-executable instructions, which, when executed by a processor, implement the method described in the first aspect above and various possible designs of the first aspect.

[0053] Ninthly, embodiments of this application provide a computer program product, including a computer program that, when executed by a processor, implements the method described in the first aspect above and various possible designs of the first aspect.

[0054] This embodiment provides a numerical aperture measurement method, device, and system. The method includes acquiring the displacement and power values ​​of an optical element under test (OAT) at multiple displacement points. These displacement points are positions reached by the OAT based on a preset step size, where the preset step size is less than or equal to a preset value determined based on the spot diameter of the OAT. The movement direction of the OAT is parallel to the direction of the laser beam emitted by the laser. The power value is the power of the beam received by the OAT at the corresponding displacement point. The target numerical aperture of the OAT is determined by fitting and calculating the displacement and power values ​​at multiple displacement points. The method provided in this embodiment, by acquiring the power values ​​at multiple displacement points through multi-step movement with small step sizes, and then accurately calculating the target numerical aperture of the OAT using a fitting algorithm, achieves a 4-fold improvement in accuracy and supports real-time interruption. Attached Figure Description

[0055] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0056] Figure 1 This is a schematic diagram illustrating an application scenario of the numerical aperture measurement method provided in the embodiments of this application;

[0057] Figure 2 A flowchart illustrating the numerical aperture measurement method provided in the embodiments of this application. Figure 1 ;

[0058] Figure 3 A schematic diagram illustrating the movement direction of the optical element under test provided in an embodiment of this application;

[0059] Figure 4 A schematic diagram of the displacement-equivalent power curve provided in the embodiments of this application;

[0060] Figure 5 A flowchart illustrating the multi-step fitting operation provided in an embodiment of this application;

[0061] Figure 6 A flowchart illustrating the byte-splitting-based communication method provided in this application embodiment;

[0062] Figure 7 A flowchart illustrating the numerical aperture measurement method provided in the embodiments of this application. Figure 2 ;

[0063] Figure 8 A schematic diagram illustrating the principle of the limiting logic provided in the embodiments of this application;

[0064] Figure 9 A schematic diagram of the structure of the first device provided in the embodiments of this application;

[0065] Figure 10 This is a schematic diagram of the structure of the second device provided in an embodiment of this application;

[0066] Figure 11 This is a schematic diagram of the hardware structure of the electronic device provided in the embodiments of this application.

[0067] The accompanying drawings illustrate specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concept of this application to those skilled in the art through reference to particular embodiments. Detailed Implementation

[0068] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0069] It should be noted that the numerical aperture measurement method, equipment and system provided in this application can be used in the field of optical measurement technology, or in any field other than optical measurement technology. The application fields of the numerical aperture measurement method, equipment and system provided in this application are not limited.

[0070] Numerical aperture (NA) is a key parameter of optical components (such as lenses and optical fibers), which directly affects the resolution, light flux, and focusing ability of optical systems.

[0071] In related technologies, single-measurement with fixed displacement cannot accurately capture 95% of the power points, resulting in significant errors.

[0072] To address the aforementioned technical problems, the inventors of this application have discovered that multiple movements with small step sizes can be performed for multi-step fitting, resulting in a more accurate numerical aperture. Based on this, embodiments of this application provide a numerical aperture measurement method.

[0073] Figure 1 This is a schematic diagram illustrating an application scenario of the numerical aperture measurement method provided in the embodiments of this application. For example... Figure 1 As shown, the first device can be a host computer, and the second device can be a programmable logic controller (PLC). The host computer is connected to the PLC, the PLC is connected to the drive module (including servo drivers and servo motors), and the drive module is connected to the optical platform. The host computer and the PLC can communicate with each other, for example, via RS485.

[0074] In the specific implementation process, the optical platform carries the optical element under test. The host computer sends a start measurement command to the PLC. The PLC responds to the measurement command by controlling the drive module, which drives the optical platform to move the optical element under test based on a preset step size. The direction of movement is parallel to the direction of the laser beam emitted by the laser. During the movement, each step size reaches a displacement point, and the corresponding power value and displacement amount are collected at the displacement point. After moving multiple steps, the power values ​​and displacement amounts of multiple displacement points are collected. The power values ​​and displacement amounts of multiple displacement points are fitted and calculated to determine the target numerical aperture of the optical element under test. The method provided in this application embodiment, by moving in multiple steps with small step sizes and collecting the power values ​​of multiple displacement points, and then using a fitting algorithm, accurately calculates the target numerical aperture of the optical element under test, thereby improving the accuracy by 4 times and supporting real-time interruption.

[0075] It should be noted that, Figure 1 The schematic diagram shown is merely an example. The numerical aperture measurement method and scenario described in the embodiments of this application are intended to more clearly illustrate the technical solutions of the embodiments of this application and do not constitute a limitation on the technical solutions provided in the embodiments of this application. As those skilled in the art will know, with the evolution of the system and the emergence of new business scenarios, the technical solutions provided in the embodiments of this application are also applicable to similar technical problems.

[0076] The technical solutions of this application will be described in detail below with specific embodiments. The following specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described again in some embodiments.

[0077] Figure 2 A flowchart illustrating the numerical aperture measurement method provided in the embodiments of this application. Figure 1 .like Figure 2 As shown, the method includes:

[0078] 201. Obtain the displacement and power values ​​of the optical element under test (DUT) at multiple displacement points. These displacement points are the positions to which the DUT moves based on a preset step size. The preset step size is less than a preset value, which is determined based on the spot diameter of the DUT. The direction of movement of the DUT is parallel to the direction of the laser beam emitted by the laser. The power value is the power of the beam received by the DUT at the corresponding displacement point.

[0079] The optical element under test can be the optical fiber of a laser pump source.

[0080] The execution subject in this embodiment can be a terminal device, such as... Figure 1 The host computer shown.

[0081] In this embodiment, the preset value can be less than or equal to 0.007 mm and greater than or equal to 0.004 mm, for example, 0.005 mm. This preset value can be determined comprehensively based on the spot diameter and numerical aperture measurement accuracy requirements of the optical system, specifically satisfying the following relationship: preset value ≤ spot diameter × target relative error tolerance. The preset value of the step size is determined using the following formula.

[0082] Preset value = k × D × ε

[0083] Where: D is the spot diameter of the optical system (which can be measured experimentally), ε is the target relative error tolerance (e.g., 1%), and k is the safety factor (usually taken as 0.1-0.5).

[0084] For example, if the optical system has a 7mm spot diameter and the measurement accuracy requirement is ±0.005, the preset value can be obtained using the formula: ≤ spot diameter × 0.1%. This ensures that there are sufficient sampling points within each spot area to achieve accurate capture of 95% of the power points. The step size determination method in this embodiment employs optical characteristic adaptation, which is fundamentally different from existing schemes for numerical aperture measurement based on operator experience or inherent mechanical system parameters, making it more scientific and objective.

[0085] For example, such as Figure 3As shown, the laser beam emitted by the laser is directed towards the optical element under test (ODT) and then absorbed by a laser absorption device (e.g., an optical power meter probe). During the test, the ODT moves in a direction parallel to the direction of the laser beam. The ODT moves in preset step sizes (e.g., 0.05 mm), stopping after each preset step for data acquisition (the host computer obtains the displacement and power value at that point), ultimately obtaining data from multiple displacement points. In some embodiments, to improve measurement efficiency, the ODT can be moved to near the 100% power point first and then moved back, allowing it to pass the 95% power point more quickly. When the laser absorption device is an optical power meter probe, the probe can absorb the laser beam whether the optical power meter is functioning normally and can measure optical power or not.

[0086] In some embodiments, the power value is obtained by measuring with a power meter. In this application embodiment, directly measuring the power value of the optical element under test at each displacement point using a power meter can obtain high-precision, traceable experimental data, significantly improving measurement efficiency and automation, while avoiding indirect calculation errors and enhancing the consistency and reliability of the results.

[0087] Specifically, when a power meter is available, the power value of the optical element under test at each displacement point can be measured using the power meter.

[0088] In some embodiments, considering the possibility of a power meter malfunction or the absence of a power meter, the equivalent power value can be calculated using the applied current of the laser. Specifically, obtaining the power values ​​at multiple displacement points may include: for each displacement point, obtaining the applied current value of the laser corresponding to that displacement point, and determining the power value of the displacement point based on the applied current value.

[0089] Specifically, to address potential power meter malfunctions during actual measurements, or situations where a power meter is unavailable at the measurement site, a scheme for obtaining the equivalent power value of the laser's applied current can serve as an effective supplement or alternative to direct power measurement. In this embodiment, the stable correspondence between the laser's output optical power and its driving current (i.e., the applied current) is primarily utilized, and the relative change in optical power is indirectly calculated by monitoring changes in the current.

[0090] In practical applications, during numerical aperture measurement, when it is necessary to obtain the power value of the optical element under test at various displacement points, the following operations can be performed: For each displacement point, the control system simultaneously records the applied current value to the laser while acquiring the displacement. Subsequently, based on a pre-established current-power mapping relationship, the applied current value is converted into the corresponding equivalent power value.

[0091] The principle behind this power value determination method is as follows: For the laser pump source fiber used as the optical element under test, its emitted optical power is positively correlated with the driving current (applied current) of the pump source within the laser's operating range. When the fiber under test moves along the beam direction, the received optical power changes, and this change directly reflects the change in the driving current required to maintain a specific laser state. Therefore, there is a definite mapping relationship between the change in displacement point, the change in power value, and the change in applied current value. By collecting the applied current sequence at different displacement points, a similar... Figure 4 The displacement-equivalent power curve shown is highly consistent with the curve obtained by direct measurement using a power meter in terms of shape and key feature points (such as the 95% power point), thus enabling its use in subsequent numerical aperture fitting calculations.

[0092] In this embodiment, by calculating the equivalent power value by applying current through a laser when the power meter is unavailable, it can effectively cope with equipment failure or resource-constrained scenarios, ensure the continuity of the measurement process and data integrity, reduce dependence on external dedicated instruments, and improve the robustness and applicability of the method.

[0093] In some embodiments, voltage compensation can be incorporated to improve the accuracy of the equivalent power value. Specifically, determining the power value at the displacement point based on the applied current value may include: determining the voltage compensation value of the applied current; and determining the power value at the displacement point based on the voltage compensation value and the applied current value.

[0094] Specifically, to further improve the accuracy and reliability of calculating the equivalent power value through the applied current, a voltage compensation mechanism can be introduced. This mechanism aims to eliminate or reduce the systematic error caused by fluctuations in the laser supply voltage on the measured drive current, thereby obtaining equivalent power data that more accurately reflects changes in actual optical power.

[0095] In the specific implementation process, firstly, the voltage compensation value corresponding to the applied current value can be determined. This voltage compensation value can be calculated based on the deviation between the operating voltage at both ends of the laser and its rated operating voltage, as monitored in real time, or it can be obtained from a compensation model or lookup table that reflects the relationship between current, voltage, and power, established in advance through calibration experiments. Then, the voltage compensation value can be combined with the acquired applied current value for calculation.

[0096] For example, in one possible implementation, a compensation formula based on the definition of electrical power can be used. Specifically, the equivalent power value (P_eq) can be calculated using the formula P_eq = k×V×I, where V is the laser operating voltage acquired at the displacement point, I is the applied current value, and k is a calibration coefficient determined in advance through calibration. The essence of this formula is to map the electrical power consumed by the laser (V×I) to optical power through a fixed efficiency coefficient k, thereby directly compensating for the influence of operating voltage fluctuations on the calculation results, achieving a simple and effective solution.

[0097] In another feasible approach, a reference-point-based normalized compensation algorithm can be employed to eliminate systematic absolute errors. This algorithm first selects a reference displacement point (e.g., the point of maximum optical power) and records its reference voltage (V_ref), reference current (I_ref), and reference power value (P_ref). For any displacement point to be determined, its equivalent power value (P_eq) is determined by the formula P_eq = P_ref × ((V × I) / (V_ref × I_ref)). This method performs relative measurement by calculating the ratio of the current point's electrical power to the reference point's electrical power, effectively suppressing errors caused by common factors such as power supply drift and further improving the relative accuracy of the measurement.

[0098] In another feasible approach, for applications requiring extremely high precision, a lookup table and interpolation algorithm based on pre-stored characteristic curves can be employed. Specifically, the laser can be precisely calibrated in the laboratory beforehand, establishing a data table showing the correspondence between applied current (I) and output optical power (P) under different operating voltages (V_i). During actual measurement, the system acquires the voltage value V and current value I in real time. By consulting this data table, it finds two calibration voltage points V_m and V_n adjacent to the current voltage V, and uses the current-power relationship curves corresponding to these two voltage points to calculate the precise equivalent power value under the current (V, I) combination using linear interpolation or higher-order interpolation algorithms. This method can effectively compensate for the complex nonlinear relationship between voltage and current, achieving optimal compensation results.

[0099] In this embodiment of the application, by introducing a voltage compensation value into the current calculation, the power deviation caused by the laser's internal resistance and power supply fluctuations can be effectively corrected, significantly improving the calculation accuracy of the equivalent power and ensuring that reliable data close to direct measurement can still be obtained even without a power meter.

[0100] 202. Based on the displacement and power values ​​of multiple displacement points, the target numerical aperture of the optical element under test is determined by fitting calculation.

[0101] Specifically, after collecting the displacement and power values ​​at multiple displacement points, the data from multiple displacement points can be fitted to calculate the target numerical aperture of the optical element under test.

[0102] For example, the numerical aperture NA corresponding to each displacement point can be calculated based on the following formula (1).

[0103] (1)

[0104] Where NA is the numerical aperture; r is the receiver radius, for example, 7 mm; offset is the initial position offset, for example, 8 mm; and x is the displacement.

[0105] In some embodiments, determining the target numerical aperture of the optical element under test by fitting calculations based on the displacement and power values ​​of multiple displacement points may include: determining a first neighboring point and a second neighboring point corresponding to the 95% power value from multiple displacement points; performing linear interpolation on the first neighboring point and the second neighboring point to determine the displacement and numerical aperture corresponding to the 95% power value; determining the numerical aperture corresponding to each of the multiple displacement points based on the displacement of the multiple displacement points; and fitting calculations between the numerical apertures corresponding to the multiple displacement points and the numerical aperture corresponding to the 95% power value to obtain the target numerical aperture of the optical element under test.

[0106] Specifically, firstly, from the collected displacement point data, two neighboring points corresponding to the 95% power value are identified, denoted as the first neighboring point and the second neighboring point. By performing linear interpolation calculations on the displacement and power values ​​of these two neighboring points, the theoretical displacement (D_95) corresponding to the 95% power value can be accurately determined. Based on optical principles, this displacement D_95 can be directly used to calculate the numerical aperture (NA_95) corresponding to the 95% power point. Secondly, according to the definition formula of optical numerical aperture, the individual numerical aperture value corresponding to each of the multiple displacement points is calculated, thereby obtaining a numerical aperture data sequence.

[0107] Furthermore, in order to obtain a more stable and interference-resistant final result, the system performs fitting calculations on the data sequence obtained above. Specifically, the fitting objects are the individual numerical aperture values ​​corresponding to each displacement point and the numerical aperture value (NA_95) corresponding to the critical 95% power point.

[0108] In this embodiment, by using 95% power value interpolation for positioning and combining full data point fitting to calculate the numerical aperture, the interference of single-point measurement error can be effectively reduced, and the measurement accuracy and robustness of key parameters of optical components (such as numerical aperture) can be significantly improved. At the same time, this method has both clear physical meaning and algorithmic feasibility.

[0109] For example, such as Figure 5 As shown, you can first collect the 100% power value. 100 Based on 100% power value. 100 Calculate the 95% power threshold. 95 =Power 100 ×95%. Initialization parameters: Step size is the preset step size (e.g., 0.005 mm), displacement is 0. After initialization, i.e., after reset, the motor in the drive module drives the optical element under test to move to the left (the direction of movement is parallel to the direction of the beam) by one step, and waits for a preset time (e.g., 2000 milliseconds) to allow the power to stabilize. Then, the current power P is acquired, the displacement is updated to x = x + step, and it is determined whether the current power is less than Power. 95 If so, record the sampling point (i.e., the displacement point): Previous point: Current point: Then, the precise displacement of the 95% power point can be calculated using linear interpolation, and the corresponding NA can be determined based on the calculated precise displacement. Furthermore, the target numerical aperture of the optical element under test can be obtained by fitting multiple displacement points and the NA of the 95% power point.

[0110] The numerical aperture measurement method provided in this embodiment collects the power values ​​of multiple displacement points based on multi-step movement with small step size, and then accurately calculates the target numerical aperture of the optical element under test through a fitting algorithm, thereby improving the accuracy by 4 times and supporting real-time interruption.

[0111] In some embodiments, to improve communication stability, byte splitting can be used during communication between the host computer and the controller (e.g., a PLC). Specifically, the method further includes: receiving the input movement distance; determining the corresponding number of pulses based on the movement distance; if the number of pulses is greater than a preset threshold, setting the number of pulses to the preset threshold; splitting the bytes corresponding to the number of pulses to obtain a first byte and a second byte; generating a third movement instruction based on the first byte and the second byte; and sending the third movement instruction to a second device so that the second device controls the optical element under test to move according to the third movement instruction.

[0112] Specifically, the host computer receives the target movement distance input by the user or set by the program, and calculates the number of pulses required to drive the servo motor based on the correspondence between this distance and the system pulse equivalent. If the calculated number of pulses exceeds a preset threshold that a single instruction can accommodate (this threshold is determined by the communication protocol, such as the maximum value that a single byte can represent), an excessively large instruction that may exceed the protocol range or be prone to errors will not be sent directly. Instead, the number of pulses will be forcibly limited to the preset threshold. Furthermore, in order to completely transmit the original movement distance information, the system will split the data byte representing the limited number of pulses. For example, a 16-bit pulse number data will be split into a high 8-bit first byte and a low 8-bit second byte. Subsequently, the host computer, according to the communication protocol rules, encapsulates these two bytes into a new third movement instruction containing the split data and sends it to the second device (i.e., the PLC). After receiving the third movement instruction, the PLC can recognize that this is a split instruction, recombine the first and second bytes to restore the original number of pulses, and then precisely control the drive module based on this number of pulses to move the optical element under test a specified distance.

[0113] In this embodiment of the application, by employing byte splitting and pulse number limiting mechanisms in the communication protocol to process large displacement commands, data overflow or truncation errors can be effectively avoided, significantly enhancing the stability and reliability of long-distance movement command transmission between the host computer and the controller, and ensuring the precise execution of motion control.

[0114] For example, such as Figure 6 As shown, the host computer receives the input distance d from the user and calculates the number of pulses based on the distance d: pulses = d / 0.0005, where pulses is the number of pulses, d is the input distance, and 0.0005 is the preset step size. If pulses is greater than 65535, it is limited to 65535; if pulses is less than 0, it is limited to 0; if it is greater than 0 and less than 65535, the original value is retained, and the bytes are then split into high and low bytes. After splitting, the high and low bytes are converted to hexadecimal, padded with leading zeros, and a movement command is generated based on the split bytes and sent to the controller.

[0115] It should be noted that when the controller sends signals to the host computer, byte splitting can also be performed, which will not be elaborated here.

[0116] Figure 7 A flowchart illustrating the numerical aperture measurement method provided in the embodiments of this application. Figure 2 .like Figure 7 As shown, the method includes:

[0117] 701. Control the optical element under test to move to multiple displacement points based on a preset step size; the moving direction of the optical element under test is parallel to the direction of the laser beam emitted.

[0118] The execution entity in this embodiment can be a controller, for example... Figure 1 The PLC shown.

[0119] Specifically, the controller can control the drive module to drive the optical platform to move, thereby causing the optical component under test to move.

[0120] In this embodiment, the preset step size is less than or equal to a preset value, which can be less than or equal to 0.007 mm and greater than or equal to 0.004 mm, for example, 0.005 mm.

[0121] In some embodiments, controlling the optical element under test to move to multiple displacement points based on a preset step size may include: for each movement, after controlling the optical element under test to move to the displacement point corresponding to the current movement and before starting the next movement, waiting for a preset time.

[0122] Specifically, after each controlled optical element under test moves to a target displacement point based on a preset step size, the system does not immediately initiate the next movement. Instead, it actively waits for a preset duration before executing the next movement command. The main functions of this waiting mechanism are: First, it provides sufficient stabilization time for mechanical moving parts (such as precision displacement stages), allowing them to completely eliminate minor overshoots or vibrations caused by inertia, friction, etc., thereby ensuring that the optical element under test can accurately stop and stabilize at the target displacement point. Second, this mechanism provides the necessary response and stabilization time for the optical system and the electrical measurement system. The displacement of the optical element causes changes in the optical path, and the optical power meter or current / voltage acquisition module needs a certain amount of time to output a stable reading. Inserting a waiting period can effectively avoid acquiring transient error data before the system has stabilized, thus ensuring the accuracy and reliability of the power value or equivalent power value used for subsequent fitting calculations.

[0123] In this embodiment, by introducing a waiting mechanism of a preset duration after each movement to the displacement point, the measurement error caused by mechanical vibration or system response lag can be effectively eliminated, ensuring that the system is in a stable state when data is acquired, thereby significantly improving the accuracy and repeatability of power measurement results.

[0124] Specifically, waiting a preset time after moving to the displacement point can stabilize the power and facilitate accurate power value acquisition.

[0125] In some embodiments, to prevent manual restarting required due to false limit switch triggering, the photoelectric limit switch can be configured to 100% clear the PLC's AL006 alarm. The method may further include: in response to receiving a first limit signal, blocking a first movement command and enabling a second movement command; the first limit signal indicates reaching a limit position during movement along a first direction; the first movement command indicates movement along the first direction; the first movement command indicates movement along a second direction; the second direction is opposite to the first direction; and / or, in response to receiving a second limit signal, blocking the second movement command and enabling the first movement command. In this embodiment, by configuring the photoelectric limit switch to automatically clear the PLC alarm and intelligently block trigger direction commands and enable reverse movement commands, it can ensure that the equipment can safely exit the limit state without manual intervention after triggering the limit, significantly improving the automation and reliability of continuous system operation and effectively avoiding production interruptions.

[0126] Specifically, photoelectric limit switches can be set at both ends of the movement direction. When the optical element under test moves to the limit position of the first end, the corresponding photoelectric limit switch is triggered, so that it can only move in the opposite direction to the second end. When the optical element under test moves to the limit position of the second end, the corresponding photoelectric limit switch is triggered, so that it can only move in the opposite direction to the first end.

[0127] For example, such as Figure 8 As shown, taking the first end as the left end and the second end as the right end as an example, the left end is set with a left limit and the right end is set with a right limit. When the left limit is triggered, the left shift command is blocked and the right shift is allowed. When the right limit is triggered, the right shift command is blocked and the left shift is allowed.

[0128] 702. Send the displacement values ​​of multiple displacement points to the host computer.

[0129] Specifically, after the controller moves the optical element under test to the displacement point, it can send the displacement amount to the host computer. During communication, signal transmission can be performed using byte-by-byte splitting. See the above embodiment for details. Figure 6 The description of the illustrated embodiments will not be repeated here.

[0130] The numerical aperture measurement method provided in this embodiment obtains the displacement and power values ​​of multiple displacement points by controlling the optical element under test to move based on a preset step size, which facilitates the determination of the target numerical aperture of the optical element under test through multi-step fitting.

[0131] Figure 9 This is a schematic diagram of the structure of the first device provided in an embodiment of this application. Figure 9 As shown, the first device 90 includes: an acquisition module 901 and a determination module 902.

[0132] The acquisition module 901 is used to acquire the displacement and power values ​​of the optical element under test at multiple displacement points; the multiple displacement points are the positions to which the optical element under test moves based on a preset step size; the preset step size is less than or equal to a preset value; the moving direction of the optical element under test is parallel to the direction of the laser beam emitted by the laser; the power value is the power value of the beam received by the optical element under test at the corresponding displacement point.

[0133] The determination module 902 is used to perform fitting calculations based on the displacement and power values ​​of multiple displacement points to determine the target numerical aperture of the optical element under test.

[0134] In some embodiments, the determining module 902 is specifically used to: determine a first neighboring point and a second neighboring point corresponding to the 95% power value from a plurality of displacement points; perform linear interpolation on the first neighboring point and the second neighboring point to determine the displacement amount and numerical aperture corresponding to the 95% power value; determine the numerical aperture corresponding to the plurality of displacement points respectively based on the displacement amount of the plurality of displacement points; and perform fitting calculation on the numerical aperture corresponding to the plurality of displacement points and the numerical aperture corresponding to the 95% power value to obtain the target numerical aperture of the optical element under test.

[0135] In some embodiments, the power value is obtained by measuring with a power meter.

[0136] In some embodiments, the acquisition module 901 is specifically used to: acquire the applied current value of the laser corresponding to each displacement point, and determine the power value of the displacement point based on the applied current value.

[0137] In some embodiments, the acquisition module 901 is specifically used to: determine the voltage compensation value of the applied current; and determine the power value of the displacement point based on the voltage compensation value and the applied current value.

[0138] In some embodiments, the acquisition module 901 is further configured to: receive the input moving distance; determine the corresponding number of pulses based on the moving distance; if the number of pulses is greater than a preset threshold, set the number of pulses to the preset threshold; split the bytes corresponding to the number of pulses to obtain a first byte and a second byte; generate a third moving instruction based on the first byte and the second byte, and send the third moving instruction to the second device so that the second device controls the optical element under test to move according to the third moving instruction.

[0139] The numerical aperture measurement device provided in this application collects power values ​​at multiple displacement points by moving in multiple steps with small step sizes, and then accurately calculates the target numerical aperture of the optical element under test through a fitting algorithm, thereby improving the accuracy by 4 times and supporting real-time interruption.

[0140] The first device provided in this application embodiment can be used to execute the above-mentioned method embodiment in which the execution subject is the first device. Its implementation principle and technical effect are similar, and will not be repeated here.

[0141] Figure 10 This is a schematic diagram of the structure of the second device provided in an embodiment of this application. Figure 10 As shown, the second device 100 includes a control module 1001 and a transmission module 1002.

[0142] The control module 1001 is used to control the optical element under test to move to multiple displacement points based on a preset step size; the moving direction of the optical element under test is parallel to the direction of the laser beam emitted by the laser.

[0143] The sending module 1002 is used to send the displacement of multiple displacement points to the first device.

[0144] The numerical aperture measuring device provided in this application obtains the displacement and power values ​​of multiple displacement points by controlling the optical element under test to move based on a preset step size, which facilitates the determination of the target numerical aperture of the optical element under test through multi-step fitting.

[0145] In some embodiments, the control module 1001 is specifically configured to: for each movement, wait for a preset time after moving to the corresponding displacement point and before starting the next movement.

[0146] In some embodiments, the control module 1001 is further configured to: in response to receiving a first limit signal, block a first movement command and enable a second movement command; the first limit signal is used to indicate that a limit position has been reached during movement along a first direction; the first movement command is used to indicate movement along the first direction; the first movement command is used to indicate movement along a second direction; the second direction is opposite to the first direction; and / or, in response to receiving a second limit signal, block the second movement command and enable the first movement command.

[0147] The second device provided in this application embodiment can be used to execute the above-mentioned method embodiment in which the execution subject is the second device. Its implementation principle and technical effect are similar, and will not be repeated here.

[0148] It should be noted that in the above embodiments, "multiple" refers to two or more, that is, two or more.

[0149] Figure 11 A schematic diagram of the structure of the electronic device provided in this application. Figure 11As shown, the electronic device 110 provided in this embodiment includes at least one processor 1101 and a memory 1102. Optionally, the electronic device 110 further includes a communication component 1103. The processor 1101, memory 1102, and communication component 1103 are connected via a bus. The electronic device 110 can be a first device executing the method of the embodiment where the first device is the execution subject, or it can be a second device executing the method of the embodiment where the second device is the execution subject.

[0150] In a specific implementation, at least one processor 1101 executes computer execution instructions stored in memory 1102, causing at least one processor 1101 to perform the above-described method.

[0151] The specific implementation process of processor 1101 can be found in the above method embodiments, and its implementation principle and technical effect are similar. It will not be repeated here.

[0152] In the above embodiments, it should be understood that the processor can be a Central Processing Unit (CPU), or other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), etc. The general-purpose processor can be a microprocessor or any conventional processor. The steps of the method disclosed in this invention can be directly implemented by a hardware processor, or implemented by a combination of hardware and software modules within the processor.

[0153] The memory may include random access memory (RAM) and may also include non-volatile memory (NVM), such as at least one disk storage device.

[0154] The bus can be an Industry Standard Architecture (ISA) bus, a Peripheral Component Interconnect (PCI) bus, or an Extended Industry Standard Architecture (EISA) bus, etc. Buses can be categorized as address buses, data buses, control buses, etc. For ease of illustration, the buses shown in the accompanying drawings are not limited to a single bus or a single type of bus.

[0155] This application also provides a numerical aperture measurement system, including: a first device and a second device as described in the above embodiments.

[0156] In some embodiments, the system further includes: a photoelectric limit switch, a drive module, and an optical platform; the optical platform is used to load the optical element under test; the drive module is connected to the second device and the optical platform and is used to drive the optical platform to move under the control of the second device; the photoelectric limit switch is connected to the second device and is used to send a limit signal to the second device when the optical platform moves to the limit position.

[0157] This application also provides a computer program product, including a computer program that, when executed by a processor, implements the above-described method.

[0158] This application also provides a computer-readable storage medium storing computer-executable instructions, which, when executed by a processor, implement the above-described method.

[0159] The aforementioned readable storage medium can be implemented by any type of volatile or non-volatile storage device or a combination thereof, such as static random access memory (SRAM), electrically erasable programmable read-only memory (EEPROM), erasable programmable read-only memory (EPROM), programmable read-only memory (PROM), read-only memory (ROM), magnetic storage, flash memory, magnetic disk, or optical disk. The readable storage medium can be any available medium accessible to a general-purpose or special-purpose computer.

[0160] An exemplary readable storage medium is coupled to a processor, enabling the processor to read information from and write information to the readable storage medium. Of course, the readable storage medium can also be a component of the processor. The processor and the readable storage medium can reside in an Application Specific Integrated Circuit (ASIC). Alternatively, the processor and the readable storage medium can exist as discrete components in the device.

[0161] The division of units is merely a logical functional division; in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be indirect coupling or communication connection through some interfaces, devices, or units, and may be electrical, mechanical, or other forms.

[0162] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0163] In addition, the functional units in the various embodiments of the present invention can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.

[0164] If a function is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this invention, or the part that contributes to the prior art, or a part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods of the various embodiments of this invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0165] Those skilled in the art will understand that all or part of the steps of the above-described method embodiments can be implemented by hardware related to program instructions. The aforementioned program can be stored in a computer-readable storage medium. When executed, the program performs the steps of the above-described method embodiments; and the aforementioned storage medium includes various media capable of storing program code, such as ROM, RAM, magnetic disks, or optical disks.

[0166] Finally, it should be noted that other embodiments of the invention will readily occur to those skilled in the art upon consideration of the specification and practice of the invention disclosed herein. This invention is intended to cover any variations, uses, or adaptations of the invention that follow the general principles of the invention and include common knowledge or customary techniques in the art not disclosed herein, and is not limited to the precise structures described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of the invention is limited only by the appended claims.

Claims

1. A numerical aperture measurement method, characterized in that, Applied to a first device, the method includes: The displacement and power values ​​of the optical element under test at at least two displacement points are obtained; the at least two displacement points are the positions to which the optical element under test moves based on a preset step size; the preset step size is less than or equal to a preset value; the preset value is determined based on the spot diameter of the optical element under test; the direction of movement of the optical element under test is parallel to the direction of the laser beam emitted by the laser; the power value is the power value of the beam received by the optical element under test at the corresponding displacement point. The target numerical aperture of the optical element under test is determined by fitting calculations based on the displacement and power values ​​of at least two displacement points.

2. The method according to claim 1, characterized in that, The step of determining the target numerical aperture of the optical element under test by fitting the displacement and power values ​​of at least two displacement points includes: Determine a first neighboring point and a second neighboring point corresponding to the 95% power value from at least two of the displacement points; Linear interpolation is performed on the first and second nearest points to determine the displacement and numerical aperture corresponding to the 95% power value; Determine the numerical aperture corresponding to at least two displacement points based on the displacement of at least two displacement points; The target numerical aperture of the optical element under test is obtained by fitting and calculating the numerical aperture corresponding to at least two displacement points and the numerical aperture corresponding to the 95% power value.

3. The method according to claim 1, characterized in that, The power value is determined by at least one of the following methods: Obtained by measurement with a power meter; For each displacement point, the applied current value of the laser corresponding to the displacement point is obtained, and the power value of the displacement point is determined based on the applied current value.

4. The method according to claim 3, characterized in that, Determining the power value of the displacement point based on the applied current value includes: Determine the voltage compensation value for the applied current; The power value of the displacement point is determined based on the voltage compensation value and the applied current value.

5. The method according to any one of claims 1-4, characterized in that, The method further includes: The distance the input is moved; The corresponding number of pulses is determined based on the travel distance; If the number of pulses is greater than a preset threshold, then the number of pulses is set to the preset threshold. The bytes corresponding to the pulse count are split to obtain the first byte and the second byte; A third movement instruction is generated based on the first byte and the second byte, and the third movement instruction is sent to the second device so that the second device controls the optical element under test to move according to the third movement instruction.

6. A numerical aperture measurement method, characterized in that, Applied to a second device, the method includes: The optical element under test is controlled to move to at least two displacement points based on a preset step size; the direction of movement of the optical element under test is parallel to the direction of the laser beam emitted by the laser. The displacement values ​​of at least two of the displacement points are sent to the first device.

7. The method according to claim 6, characterized in that, The control of the optical element under test to move to at least two displacement points based on a preset step size includes: For each movement, after controlling the optical element under test to move to the displacement point corresponding to the current movement and before starting the next movement, a preset time is waited.

8. The method according to claim 6, characterized in that, The method further includes: In response to receiving a first limit signal, the first movement command is blocked and the second movement command is enabled; the first limit signal is used to indicate that the limit position has been reached during movement along the first direction; the first movement command is used to indicate movement along the first direction; the first movement command is used to indicate movement along the second direction; the second direction is the opposite of the first direction. And / or, In response to receiving the second limit signal, the second movement command is blocked, and the first movement command is enabled.

9. A first device, characterized in that, include: The acquisition module is used to acquire the displacement and power value of the optical element under test at at least two displacement points. At least two of the displacement points are the positions to which the optical element under test has moved based on a preset step size; The preset step size is less than or equal to a preset value; the moving direction of the optical element under test is parallel to the direction of the laser beam emitted by the laser; the power value is the power value of the beam received by the optical element under test at the corresponding displacement point. The determination module is used to perform fitting calculations based on the displacement and power values ​​of at least two displacement points to determine the target numerical aperture of the optical element under test.

10. A second device, characterized in that, include: The control module is used to control the optical element under test to move to at least two displacement points based on a preset step size; The direction of movement of the optical element under test is parallel to the direction of the laser beam emitted by the laser. A sending module is used to send the displacement amounts of at least two of the displacement points to a first device.

11. A numerical aperture measurement system, characterized in that, include: First equipment, second equipment, photoelectric limit switch, drive module and optical platform; The first device is used to acquire the displacement and power value of the optical element under test at at least two displacement points; the at least two displacement points are the positions to which the optical element under test moves based on a preset step size; The preset step size is less than or equal to a preset value; the moving direction of the optical element under test is parallel to the direction of the laser beam emitted by the laser; the power value is the power value of the beam received by the optical element under test at the corresponding displacement point; the target numerical aperture of the optical element under test is determined by fitting calculation based on the displacement and power values ​​of at least two displacement points. The second device is used to control the optical element under test to move to at least two displacement points based on a preset step size; the direction of movement of the optical element under test is parallel to the direction of the laser beam emitted by the laser. Send the displacement amounts of at least two of the displacement points to the first device; The optical platform is used to mount the optical component to be tested; The drive module is connected to the second device and the optical platform, and is used to drive the optical platform to move under the control of the second device; The photoelectric limit switch is connected to the second device and is used to send a limit signal to the second device when the optical platform moves to the limit position.

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