Numerical aperture measurement method, apparatus, and system

Abstract

Embodiments of the present application provide a numerical aperture measurement method, device and system. The method comprises obtaining displacement amounts and power values of a to-be-measured optical element at a plurality of displacement points, the plurality of displacement points being position points to which the to-be-measured optical element moves based on a preset step length, the preset step length being less than or equal to a preset value, the preset value being determined according to a spot diameter of the to-be-measured optical element, a moving direction of the to-be-measured optical element being parallel to a direction of a laser beam emitted by a laser, the power value being a power value of the laser beam received by the to-be-measured optical element at a corresponding displacement point, and performing fitting calculation according to the displacement amounts and the power values of the plurality of displacement points to determine a target numerical aperture of the to-be-measured optical element. The method provided by the embodiments of the present application can collect power values of a plurality of displacement points by moving in small steps, and then accurately calculate the target numerical aperture of the to-be-measured optical element through a fitting algorithm, so that the accuracy is improved by 4 times, and real-time interruption is supported.

Description

TECHNICAL FIELD

[0001] Embodiments of the present application relate to the technical field of optical measurement, and in particular, to a numerical aperture measurement method, device and system. BACKGROUND

[0002] Numerical aperture (NA) is a key parameter of an optical element (such as a lens, an optical fiber, etc.), and directly affects the resolution, luminous flux and focusing ability of an optical system.

[0003] In the related art, fixed displacement single measurement can be used, however, the 95% power point cannot be accurately captured, and the error is large. SUMMARY

[0004] Embodiments of the present application provide a numerical aperture measurement method, device and system to improve the accuracy of numerical aperture measurement.

[0005] In a first aspect, embodiments of the present application provide a numerical aperture measurement method, applied to a first device, the method comprising:

[0006] obtaining displacement amounts and power values of a to-be-measured optical element at at least two displacement points; the at least two displacement points are position points to which the to-be-measured optical element moves based on a preset step length; the preset step length is less than or equal to a preset value; the preset value is determined according to a spot diameter of the to-be-measured optical element; a moving direction of the to-be-measured optical element is parallel to a direction of a laser beam emitted by a laser; the power value is a power value of a light beam received by the to-be-measured optical element at a corresponding displacement point;

[0007] performing fitting calculation according to the displacement amounts and the power values of the at least two displacement points to determine a target numerical aperture of the to-be-measured optical element.

[0008] In a possible design, the performing fitting calculation according to the displacement amounts and the power values of the at least two displacement points to determine the target numerical aperture of the to-be-measured optical element comprises:

[0009] determining, from the at least two displacement points, a first adjacent point and a second adjacent point corresponding to a 95% power value;

[0010] performing linear interpolation on the first adjacent point and the second adjacent point to determine a displacement amount and a numerical aperture corresponding to the 95% power value;

[0011] determining, according to the displacement amounts of the at least two displacement points, numerical apertures respectively corresponding to the at least two displacement points;

[0012] Fittingly calculate numerical aperture corresponding to each of the at least two displacement points and the numerical aperture corresponding to the 95% power value, to obtain a target numerical aperture of the optical element to be measured.

[0013] In a possible design, the power value is determined at least in one of the following ways:

[0014] Obtained through the power meter measurement;

[0015] For each displacement point, obtain the power-on current value of the laser corresponding to the displacement point, and determine the power value of the displacement point according to the power-on current value.

[0016] In a possible design, the determination of the power value of the displacement point according to the power-on current value comprises:

[0017] Determine the voltage compensation value of the power-on current;

[0018] Determine the power value of the displacement point according to the voltage compensation value and the power-on current value.

[0019] In a possible design, the method further comprises:

[0020] Receive the input moving distance;

[0021] Determine the corresponding pulse number according to the moving distance;

[0022] If the pulse number is greater than a preset threshold, set the pulse number to the preset threshold;

[0023] Split the byte corresponding to the pulse number to obtain a first byte and a second byte;

[0024] Generate a third moving instruction according to the first byte and the second byte, and send the third moving instruction to a second device, so that the second device controls the optical element to be measured to move according to the third moving instruction.

[0025] In a second aspect, the embodiments of the present application provide a numerical aperture measurement method, applied to a second device, and the method comprises:

[0026] Control the optical element to be measured to move to at least two displacement points based on a preset step length; the moving direction of the optical element to be measured is parallel to the direction of the laser beam emitted by the laser;

[0027] Send the displacement amount of the at least two displacement points to a first device.

[0028] In a possible design, the control of the optical element to be measured to move to at least two displacement points based on a preset step length comprises:

[0029] For each movement, after controlling the to-be-tested optical element to move to a displacement point corresponding to the current movement and before starting the next movement, a preset time length is waited.

[0030] In a possible design, the method further includes:

[0031] In response to receiving a first limit signal, the first movement instruction is shielded and the second movement instruction is enabled; the first limit signal is used to indicate that an extreme position is reached in the movement along the first direction; the first movement instruction is used to indicate the movement along the first direction; the second movement instruction is used to indicate the movement along a second direction; and the second direction is opposite to the first direction.

[0032] And / or,

[0033] In response to receiving a second limit signal, the second movement instruction is shielded and the first movement instruction is enabled.

[0034] In a third aspect, an embodiment of the present application provides a first device, including:

[0035] The acquisition module is configured to acquire displacement amounts and power values of a to-be-tested optical element at at least two displacement points; the at least two displacement points are position points to which the to-be-tested optical element moves based on a preset step length; the preset step length is less than or equal to a preset value; a movement direction of the to-be-tested optical element is parallel to a direction of a light beam emitted by a laser; and the power values are power values of the light beam received by the to-be-tested optical element at the corresponding displacement points.

[0036] The determination module is configured to perform fitting calculation according to the displacement amounts and the power values of the at least two displacement points, and determine a target numerical aperture of the to-be-tested optical element.

[0037] In a fourth aspect, an embodiment of the present application provides a second device, including:

[0038] The control module is configured to control a to-be-tested optical element to move to at least two displacement points based on a preset step length; and a movement direction of the to-be-tested optical element is parallel to a direction of a light beam emitted by a laser.

[0039] The sending module is configured to send displacement amounts of the at least two displacement points to a first device.

[0040] In a fifth aspect, an embodiment of the present application provides a first device, including at least one processor and a memory.

[0041] The memory stores computer execution instructions.

[0042] The at least one processor executes the computer-executable instructions stored in the memory, so that the at least one processor performs the method as described in the first aspect and various possible designs of the first aspect.

[0043] In a sixth aspect, an embodiment of the present application provides a second device, comprising: at least one processor and a memory;

[0044] The memory stores computer-executable instructions.

[0045] The at least one processor executes the computer-executable instructions stored in the memory, so that the at least one processor performs the method as described in the second aspect and various possible designs of the second aspect.

[0046] In a seventh aspect, an embodiment of the present application provides a numerical aperture measurement system, comprising: the first device as described in the first aspect and various possible designs of the first aspect, the second device as described in the second aspect and various possible designs of the second aspect, an optical limit switch, a driving module and an optical platform.

[0047] The first device is configured to acquire displacement amounts and power values of a to-be-measured optical element at at least two displacement points; the at least two displacement points are position points to which the to-be-measured optical element moves based on a preset step length; the preset step length is less than or equal to a preset value; a moving direction of the to-be-measured optical element is parallel to a direction of a laser beam emitted by a laser; the power values are power values of the laser beam received by the to-be-measured optical element at the corresponding displacement points; and a target numerical aperture of the to-be-measured optical element is determined by fitting calculation based on the displacement amounts and the power values of the at least two displacement points.

[0048] The second device is configured to control the to-be-measured optical element to move to the at least two displacement points based on the preset step length; the moving direction of the to-be-measured optical element is parallel to the direction of the laser beam emitted by the laser; and the displacement amounts of the at least two displacement points are sent to the first device.

[0049] The optical platform is configured to load the to-be-measured optical element.

[0050] The driving module is connected with the second device and the optical platform, and is configured to drive the optical platform to move under the control of the second device.

[0051] The optical limit switch is connected with the second device, and is configured to send a limit signal to the second device when the optical platform moves to a limit position.

[0052] Eighthly, embodiments of this application provide a computer-readable storage medium storing computer-executable instructions, which, when executed by a processor, implement the method described in the first aspect above and various possible designs of the first aspect.

[0053] Ninthly, embodiments of this application provide a computer program product, including a computer program that, when executed by a processor, implements the method described in the first aspect above and various possible designs of the first aspect.

[0054] This embodiment provides a numerical aperture measurement method, device, and system. The method includes acquiring the displacement and power values ​​of an optical element under test (OAT) at multiple displacement points. These displacement points are positions reached by the OAT based on a preset step size, where the preset step size is less than or equal to a preset value determined based on the spot diameter of the OAT. The movement direction of the OAT is parallel to the direction of the laser beam emitted by the laser. The power value is the power of the beam received by the OAT at the corresponding displacement point. The target numerical aperture of the OAT is determined by fitting and calculating the displacement and power values ​​at multiple displacement points. The method provided in this embodiment, by acquiring the power values ​​at multiple displacement points through multi-step movement with small step sizes, and then accurately calculating the target numerical aperture of the OAT using a fitting algorithm, achieves a 4-fold improvement in accuracy and supports real-time interruption. Attached Figure Description

[0055] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0056] Figure 1 This is a schematic diagram illustrating an application scenario of the numerical aperture measurement method provided in the embodiments of this application;

[0057] Figure 2 A flowchart illustrating the numerical aperture measurement method provided in the embodiments of this application. Figure 1 ;

[0058] Figure 3 A schematic diagram illustrating the movement direction of the optical element under test provided in an embodiment of this application;

[0059] Figure 4 A schematic diagram of the displacement-equivalent power curve provided in the embodiments of this application;

[0060] Figure 5 A flowchart illustrating the multi-step fitting operation provided in an embodiment of this application;

[0061] Figure 6 A flowchart illustrating the byte-splitting-based communication method provided in this application embodiment;

[0062] Figure 7 Flowchart of the numerical aperture measurement method provided for the embodiments of the present application Figure 2 ;

[0063] Figure 8 Principle diagram of the limiting logic provided for the embodiments of the present application

[0064] Figure 9 Structural diagram of the first device provided for the embodiments of the present application

[0065] Figure 10 Structural diagram of the second device provided for the embodiments of the present application

[0066] Figure 11 Hardware structural diagram of the electronic device provided for the embodiments of the present application.

[0067] The specific embodiments of the present application have been shown in the above-described drawings, and will be described in more detail hereinafter. These drawings and textual descriptions are not intended to limit the scope of the concept of the present application in any way, but to illustrate the concept of the present application to those skilled in the art by referring to specific embodiments. DETAILED DESCRIPTION

[0068] To make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without any creative work fall within the scope of protection of the present application.

[0069] It should be noted that the numerical aperture measurement method, device and system provided by the present application can be used in the field of optical measurement technology, and can also be used in any field other than the field of optical measurement technology. The application field of the numerical aperture measurement method, device and system provided by the present application is not limited.

[0070] Numerical aperture (NA) is a key parameter of optical elements (such as lenses, optical fibers, etc.), which directly affects the resolution, light flux and focusing ability of the optical system.

[0071] In the related art, fixed displacement single measurement is adopted, which cannot accurately capture the 95% power point and has a large error.

[0072] To solve the above technical problems, the inventors of the present application have found that the numerical aperture can be obtained more accurately by moving multiple times with small steps and performing multi-step fitting.

[0073] Figure 1 An application scenario of the numerical aperture measurement method provided by the embodiments of the present application is shown in FIG. Figure 1 As shown in FIG.

[0074] In the implementation process, the optical platform carries the optical element to be measured. The host computer sends a start measurement instruction to the PLC. The PLC controls the driving module in response to the measurement instruction. The driving module drives the optical platform to move the optical element to be measured based on a preset step length. The moving direction is parallel to the direction of the light beam emitted by the laser. During the movement, the power value and the displacement amount are collected at each displacement point reached by moving one step. After moving multiple steps, the power values and displacement amounts of multiple displacement points are collected. The power values and displacement amounts of multiple displacement points are fitted and calculated to determine the target numerical aperture of the optical element to be measured. The method provided by the embodiments of the present application moves multiple times based on small steps, collects the power values of multiple displacement points, and then accurately calculates the target numerical aperture of the optical element to be measured through a fitting algorithm, so that the accuracy is improved by 4 times, and real-time interruption is supported.

[0075] It should be noted that Figure 1 The scenario diagram shown in FIG.

[0076] The technical solutions of the present application will be described in detail below with specific embodiments. The following specific embodiments can be combined with each other. For the same or similar concepts or processes, some embodiments may not be described again.

[0077] Figure 2 The flowchart of the numerical aperture measurement method provided by the embodiments of the present application is shown in FIG. Figure 1 As shown in FIG. Figure 2 The method comprises the following steps.

[0078] 201, obtaining displacement amounts and power values of the to-be-tested optical element at a plurality of displacement points; the plurality of displacement points are position points to which the to-be-tested optical element moves based on a preset step length; the preset step length is less than a preset value; the preset value is determined according to a spot diameter of the to-be-tested optical element. A moving direction of the to-be-tested optical element is parallel to a direction of a laser beam emitted by the laser.

[0079] The to-be-tested optical element can be an optical fiber of a laser pumping source.

[0080] The execution subject of the embodiment can be a terminal device, for example Figure 1 The host computer shown in FIG. 1.

[0081] In the embodiment, the preset value can be less than or equal to 0.007 mm and greater than or equal to 0.004 mm, for example, 0.005 mm. The preset value can be obtained by comprehensively determining according to a spot diameter and a numerical aperture measurement accuracy requirement of an optical system, and specifically can satisfy the following relationship: preset value ≤ spot diameter × target relative error tolerance. The preset value of the step length is determined by using the following formula.

[0082] Preset value = k × D × ε

[0083] Wherein: D is the spot diameter of the optical system (which can be measured by experiment), ε is the target relative error tolerance (such as 1%), and k is the safety factor (usually 0.1-0.5).

[0084] For example, if the optical system has a 7mm spot diameter and the measurement accuracy requirement is ±0.005, the preset value ≤ spot diameter × 0.1% can be obtained by the formula, to ensure that there are enough sampling points in each spot range to achieve accurate capture of 95% power points. The step length determination method in the embodiment adopts optical characteristic adaptation, which is essentially different from the experience estimation based on the operator or the determination based on the inherent parameters of the mechanical system in the existing single displacement numerical aperture measurement scheme, and is more scientific and objective.

[0085] For example, as Figure 3As shown, the light beam emitted by the laser is directed to the optical element to be measured, and then absorbed by the laser absorption device (e.g. a power meter probe). During the test, the moving direction of the optical element to be measured is parallel to the direction of the light beam emitted by the laser. The optical element to be measured is moved based on a preset step length (e.g. 0.05 mm), and stops at each preset step length to collect data (the host computer obtains the displacement and power value at the displacement point), and finally obtains the collected data of multiple displacement points. In some embodiments, in order to improve the measurement efficiency, the optical element to be measured can be first moved to the vicinity of the 100% power point and then backed off, so that the 95% power point can be passed through relatively quickly. When the laser absorption device is a power meter probe, the power meter probe can absorb laser regardless of whether it can measure the optical power in the normal use of the power meter or cannot measure the optical power normally.

[0086] In some embodiments, the power value is obtained by a power meter. In the embodiments of the present application, the power value of the optical element to be measured at each displacement point is directly measured by the power meter, which can obtain high-precision, traceable experimental data, significantly improve the measurement efficiency and automation level, avoid indirect calculation errors, and enhance the consistency and reliability of the results.

[0087] Specifically, when the power meter is available, the power value of the optical element to be measured at each displacement point can be measured by the power meter.

[0088] In some embodiments, considering the possibility of power meter failure or the absence of a power meter, the equivalent power value can be calculated by the power-on current of the laser. Specifically, obtaining the power value of the multiple displacement points can include: for each displacement point, obtaining the power-on current value of the laser corresponding to the displacement point, and determining the power value of the displacement point according to the power-on current value.

[0089] Specifically, in order to cope with the possible power meter failure in the actual measurement process or the absence of a power meter in the measurement site, the equivalent power value acquisition scheme of the laser power-on current can be used as an effective supplement or replacement of direct power measurement. In this embodiment, the stable correspondence between the output optical power of the laser and its driving current (i.e. power-on current) is mainly used, and the relative change of the optical power is indirectly calculated by monitoring the current change.

[0090] In practical applications, during the numerical aperture measurement process, when the power value of the optical element to be measured at each displacement point needs to be obtained, the following operations can be performed: for each displacement point, the control system synchronously records the power-on current value applied to the laser at the same time of collecting the displacement value. Subsequently, according to the pre-established current-power mapping relationship, the power-on current value is converted into the corresponding equivalent power value.

[0091] The principle of the power value determination method is that for a laser pumped source optical fiber as a to-be-measured optical element, the output optical power thereof is positively correlated with the driving current (power-on current) of the pump source within the working range of the laser. When the to-be-measured optical fiber moves along the beam direction, the optical power received thereby changes, and this change directly reflects the change in the driving current required to maintain a specific laser state. Therefore, there is a certain mapping relationship among the change of the displacement point, the change of the power value, and the change of the power-on current value. By collecting the power-on current sequence at different displacement points, a displacement-equivalent power curve similar to that shown in FIG. 5 can be constructed, which has high consistency in shape and key feature points (such as the 95% power point) with the curve obtained by directly measuring using a power meter, and can be used for subsequent numerical aperture fitting calculation. Figure 4

[0092] In the embodiments of the present application, the equivalent power value is calculated by the power-on current of the laser when the power meter is unavailable, which can effectively cope with equipment failure or resource limited scenarios, guarantee the continuity and data integrity of the measurement process, reduce the dependence on external special instruments, and improve the robustness and applicability of the method.

[0093] In some embodiments, in order to improve the accuracy of the equivalent power value, voltage compensation can be added. Specifically, determining the power value of the displacement point according to the power-on current value can include: determining a voltage compensation value of the power-on current; and determining the power value of the displacement point according to the voltage compensation value and the power-on current value.

[0094] Specifically, in order to further improve the accuracy and reliability of calculating the equivalent power value by the power-on current, a voltage compensation mechanism can be introduced. This mechanism aims to eliminate or reduce the systematic error caused by the fluctuation of the supply voltage of the laser on the driving current measurement value, so as to obtain equivalent power data that can more truly reflect the actual change of optical power.

[0095] In the specific implementation process, first, a voltage compensation value corresponding to the power-on current value can be determined. This voltage compensation value can be calculated based on the deviation of the real-time monitored working voltage of the laser from the rated working voltage thereof, or can be obtained according to a compensation model or lookup table reflecting the current-voltage-power relationship established through a calibration experiment in advance. Further, the voltage compensation value and the collected power-on current value can be comprehensively operated.

[0096] ​For example, in one implementation, a compensation formula based on electrical power definition can be used. Specifically, an equivalent power value (P_eq) can be calculated by the formula P_eq = k x V x I, where V is the working voltage of the laser collected at the displacement point, I is the current value, and k is a calibration coefficient determined in advance through calibration. The essence of this formula is to map the electrical power (V x I) consumed by the laser to optical power through a fixed efficiency coefficient k, thereby directly compensating for the influence of working voltage fluctuations on the calculation result, which is simple and effective.

[0097] In another implementation, a reference point-based normalization compensation algorithm can be used to eliminate systematic absolute errors. In this algorithm, a reference displacement point (such as the maximum optical power point) is first selected, and its reference voltage (V_ref), reference current (I_ref), and reference power value (P_ref) are recorded. For any displacement point to be solved, its equivalent power value (P_eq) is determined by the formula P_eq = P_ref x ((V x I) / (V_ref x I_ref)). This method performs relative measurement by calculating the ratio of the current point electrical power to the reference point electrical power, which can effectively suppress errors caused by common factors such as power supply drift, further improving the relative accuracy of the measurement.

[0098] In yet another implementation, for high-precision application scenarios, a lookup table and interpolation algorithm based on pre-stored characteristic curves can also be used. Specifically, the laser can be finely calibrated in the laboratory in advance to establish a data table of the corresponding relationship between the current (I) and the output optical power (P) at different working voltages (V_i). During actual measurement, the system collects the voltage value V and the current value I in real time, queries the data table to find two calibration voltage points V_m and V_n adjacent to the current voltage V, and uses the current-power relationship curves corresponding to these two voltage points to calculate the accurate equivalent power value under the current (V, I) combination through linear interpolation or high-order interpolation algorithm. This method can fully compensate for the complex nonlinear relationship between voltage and current, achieving optimal compensation effect.

[0099] The embodiments of the present application can effectively correct the power deviation caused by the internal resistance of the laser and the supply voltage fluctuation by introducing a voltage compensation value in the current calculation, significantly improving the calculation accuracy of the equivalent power, and ensuring that reliable data close to direct measurement can be obtained under the condition of no power meter.

[0100] 202, fitting calculation is performed according to the displacement amounts and power values of the plurality of displacement points to determine a target numerical aperture of the optical element to be measured.

[0101] Specifically, after the displacement amounts and power values of the plurality of displacement points are collected, the data of the plurality of displacement points can be fitted, and then the target numerical aperture of the optical element to be measured is calculated.

[0102] For example, the numerical aperture NA corresponding to each displacement point can be calculated based on the following formula (1).

[0103] (1)

[0104] Wherein, NA is the numerical aperture; r is the receiving end radius, for example, it can be 7 mm; offset is the initial position offset, for example, it can be 8 mm; x is the displacement amount.

[0105] In some embodiments, the target numerical aperture of the optical element to be measured is determined by fitting calculation according to the displacement amounts and power values of the plurality of displacement points, which can include: determining a first adjacent point and a second adjacent point corresponding to the 95% power value from the plurality of displacement points; performing linear interpolation on the first adjacent point and the second adjacent point to determine the displacement amount and the numerical aperture corresponding to the 95% power value; determining the numerical aperture corresponding to each of the plurality of displacement points according to the displacement amounts of the plurality of displacement points; and performing fitting calculation on the numerical aperture corresponding to each of the plurality of displacement points and the numerical aperture corresponding to the 95% power value to obtain the target numerical aperture of the optical element to be measured.

[0106] Specifically, first, two adjacent points corresponding to the 95% power value are determined from the collected plurality of displacement point data, which are denoted as the first adjacent point and the second adjacent point. By performing linear interpolation calculation on the displacement amounts and power values of the two adjacent points, the theoretical displacement amount (D_95) corresponding to the 95% power value can be accurately determined. Based on optical principles, the displacement amount D_95 can be directly used to calculate the numerical aperture (NA_95) corresponding to the 95% power point. Secondly, according to the definition formula of the optical numerical aperture, the numerical aperture value corresponding to each of the plurality of displacement points is calculated respectively, thereby obtaining a numerical aperture data sequence.

[0107] Furthermore, in order to obtain a more stable and anti-interference final result, the system performs fitting calculation on the data sequence calculated above. The fitting objects are the single numerical aperture values corresponding to each displacement point and the numerical aperture value (NA_95) corresponding to the key 95% power point.

[0108] The embodiments of the present application can effectively reduce the interference of single-point measurement error, significantly improve the measurement accuracy and robustness of the results of the key parameters (such as the numerical aperture) of the optical element by using 95% power value interpolation positioning and combining full data point fitting calculation of the numerical aperture. At the same time, the method has clear physical meaning and algorithm realizability.

[0109] For example, asFigure 5 As shown, you can first collect the 100% power value. 100 Based on 100% power value. 100 Calculate the 95% power threshold. 95 =Power 100 ×95%. Initialization parameters: Step size is the preset step size (e.g., 0.005 mm), displacement is 0. After initialization, i.e., after reset, the motor in the drive module drives the optical element under test to move to the left (the direction of movement is parallel to the direction of the beam) by one step, and waits for a preset time (e.g., 2000 milliseconds) to allow the power to stabilize. Then, the current power P is acquired, the displacement is updated to x = x + step, and it is determined whether the current power is less than Power. 95 If so, record the sampling point (i.e., the displacement point): Previous point: Current point: Then, the precise displacement of the 95% power point can be calculated using linear interpolation, and the corresponding NA can be determined based on the calculated precise displacement. Furthermore, the target numerical aperture of the optical element under test can be obtained by fitting multiple displacement points and the NA of the 95% power point.

[0110] The numerical aperture measurement method provided in this embodiment collects the power values ​​of multiple displacement points based on multi-step movement with small step size, and then accurately calculates the target numerical aperture of the optical element under test through a fitting algorithm, thereby improving the accuracy by 4 times and supporting real-time interruption.

[0111] In some embodiments, to improve communication stability, byte splitting can be used during communication between the host computer and the controller (e.g., a PLC). Specifically, the method further includes: receiving the input movement distance; determining the corresponding number of pulses based on the movement distance; if the number of pulses is greater than a preset threshold, setting the number of pulses to the preset threshold; splitting the bytes corresponding to the number of pulses to obtain a first byte and a second byte; generating a third movement instruction based on the first byte and the second byte; and sending the third movement instruction to a second device so that the second device controls the optical element under test to move according to the third movement instruction.

[0112] Specifically, the host computer receives the target movement distance input by the user or set by the program, and calculates the number of pulses required to drive the servo motor based on the correspondence between this distance and the system pulse equivalent. If the calculated number of pulses exceeds a preset threshold that a single instruction can accommodate (this threshold is determined by the communication protocol, such as the maximum value that a single byte can represent), an excessively large instruction that may exceed the protocol range or be prone to errors will not be sent directly. Instead, the number of pulses will be forcibly limited to the preset threshold. Furthermore, in order to completely transmit the original movement distance information, the system will split the data byte representing the limited number of pulses. For example, a 16-bit pulse number data will be split into a high 8-bit first byte and a low 8-bit second byte. Subsequently, the host computer, according to the communication protocol rules, encapsulates these two bytes into a new third movement instruction containing the split data and sends it to the second device (i.e., the PLC). After receiving the third movement instruction, the PLC can recognize that this is a split instruction, recombine the first and second bytes to restore the original number of pulses, and then precisely control the drive module based on this number of pulses to move the optical element under test a specified distance.

[0113] In this embodiment of the application, by employing byte splitting and pulse number limiting mechanisms in the communication protocol to process large displacement commands, data overflow or truncation errors can be effectively avoided, significantly enhancing the stability and reliability of long-distance movement command transmission between the host computer and the controller, and ensuring the precise execution of motion control.

[0114] For example, such as Figure 6 As shown, the host computer receives the input distance d from the user and calculates the number of pulses based on the distance d: pulses = d / 0.0005, where pulses is the number of pulses, d is the input distance, and 0.0005 is the preset step size. If pulses is greater than 65535, it is limited to 65535; if pulses is less than 0, it is limited to 0; if it is greater than 0 and less than 65535, the original value is retained, and the bytes are then split into high and low bytes. After splitting, the high and low bytes are converted to hexadecimal, padded with leading zeros, and a movement command is generated based on the split bytes and sent to the controller.

[0115] It should be noted that when the controller sends signals to the host computer, byte splitting can also be performed, which will not be elaborated here.

[0116] Figure 7 A flowchart illustrating the numerical aperture measurement method provided in the embodiments of this application. Figure 2 .like Figure 7 As shown, the method includes:

[0117] 701、control the to-be-tested optical element to move to a plurality of displacement points based on a preset step length; a moving direction of the to-be-tested optical element is parallel to a direction of the laser beam emitted by the laser.

[0118] The execution subject of the embodiment can be a controller, for example Figure 1 a PLC as shown.

[0119] Specifically, the controller can control the driving module to drive the optical platform to move, so that the to-be-tested optical element moves.

[0120] In the embodiment, the preset step length is less than or equal to a preset value, the preset value can be less than or equal to 0.007 millimeters and greater than or equal to 0.004 millimeters, for example, 0.005 millimeters.

[0121] In some embodiments, the control of the to-be-tested optical element to move to a plurality of displacement points based on a preset step length can include: for each movement, after the to-be-tested optical element is controlled to move to a displacement point corresponding to the current movement and before the next movement is started, waiting for a preset time length.

[0122] Specifically, after the to-be-tested optical element is controlled to move to a target displacement point based on a preset step length each time, the system does not immediately initiate the next movement, but actively waits for a preset time length, and then starts to execute the next movement instruction after the time length ends. The main role of this waiting mechanism is: first, it provides sufficient stabilization time for mechanical moving components (such as precision displacement stages), so that they can completely eliminate small overshoots or vibrations caused by inertia, friction and other factors, thereby ensuring that the to-be-tested optical element can be accurately stopped and stabilized on the target displacement point. Secondly, this mechanism provides the necessary response and stabilization time for the optical system and the electrical measurement system. The displacement of the optical element will cause changes in the optical path, and the power meter or the current / voltage acquisition module needs a certain time to output stable readings. Inserting a waiting time can effectively avoid collecting transient error data due to the fact that the system has not yet stabilized, thereby ensuring the accuracy and reliability of the power values or equivalent power values used for subsequent fitting calculations.

[0123] In the embodiment of the application, by introducing the waiting mechanism of the preset time length after each movement to the displacement point, the measurement error caused by mechanical vibration or system response lag can be effectively eliminated, the system is ensured to be in a stable state during data acquisition, and the accuracy and repeatability of the power measurement result are significantly improved.

[0124] Specifically, waiting for a preset time length after moving to the displacement point can stabilize the power, facilitating accurate acquisition of the power value.

[0125] In some embodiments, to prevent manual restarting required due to false limit switch triggering, the photoelectric limit switch can be configured to 100% clear the PLC's AL006 alarm. The method may further include: in response to receiving a first limit signal, blocking a first movement command and enabling a second movement command; the first limit signal indicates reaching a limit position during movement along a first direction; the first movement command indicates movement along the first direction; the first movement command indicates movement along a second direction; the second direction is opposite to the first direction; and / or, in response to receiving a second limit signal, blocking the second movement command and enabling the first movement command. In this embodiment, by configuring the photoelectric limit switch to automatically clear the PLC alarm and intelligently block trigger direction commands and enable reverse movement commands, it can ensure that the equipment can safely exit the limit state without manual intervention after triggering the limit, significantly improving the automation and reliability of continuous system operation and effectively avoiding production interruptions.

[0126] Specifically, photoelectric limit switches can be set at both ends of the movement direction. When the optical element under test moves to the limit position of the first end, the corresponding photoelectric limit switch is triggered, so that it can only move in the opposite direction to the second end. When the optical element under test moves to the limit position of the second end, the corresponding photoelectric limit switch is triggered, so that it can only move in the opposite direction to the first end.

[0127] For example, such as Figure 8 As shown, taking the first end as the left end and the second end as the right end as an example, the left end is set with a left limit and the right end is set with a right limit. When the left limit is triggered, the left shift command is blocked and the right shift is allowed. When the right limit is triggered, the right shift command is blocked and the left shift is allowed.

[0128] 702. Send the displacement values ​​of multiple displacement points to the host computer.

[0129] Specifically, after the controller moves the optical element under test to the displacement point, it can send the displacement amount to the host computer. During communication, signal transmission can be performed using byte-by-byte splitting. See the above embodiment for details. Figure 6 The description of the illustrated embodiments will not be repeated here.

[0130] The numerical aperture measurement method provided in this embodiment obtains the displacement and power values ​​of multiple displacement points by controlling the optical element under test to move based on a preset step size, which facilitates the determination of the target numerical aperture of the optical element under test through multi-step fitting.

[0131] Figure 9 This is a schematic diagram of the structure of the first device provided in an embodiment of this application. Figure 9 As shown, the first device 90 includes: an acquisition module 901 and a determination module 902.

[0132] The acquisition module 901 is configured to acquire displacement amounts and power values of the to-be-tested optical element at a plurality of displacement points; the plurality of displacement points are position points to which the to-be-tested optical element moves based on a preset step length; the preset step length is less than or equal to a preset value; a moving direction of the to-be-tested optical element is parallel to a direction of a laser beam emitted by the laser; and the power value is a power value of the laser beam received by the to-be-tested optical element at a corresponding displacement point.

[0133] The determination module 902 is configured to perform fitting calculation according to the displacement amounts and the power values of the plurality of displacement points, to determine a target numerical aperture of the to-be-tested optical element.

[0134] In some embodiments, the determination module 902 is specifically configured to: determine, from the plurality of displacement points, a first adjacent point and a second adjacent point corresponding to the 95% power value; perform linear interpolation on the first adjacent point and the second adjacent point, to determine a displacement amount and a numerical aperture corresponding to the 95% power value; determine, according to the displacement amounts of the plurality of displacement points, numerical apertures respectively corresponding to the plurality of displacement points; and perform fitting calculation on the numerical apertures respectively corresponding to the plurality of displacement points and the numerical aperture corresponding to the 95% power value, to obtain the target numerical aperture of the to-be-tested optical element.

[0135] In some embodiments, the power value is obtained by measurement by using a power meter.

[0136] In some embodiments, the acquisition module 901 is specifically configured to: for each displacement point, acquire a power-on current value of the laser corresponding to the displacement point, and determine the power value of the displacement point according to the power-on current value.

[0137] In some embodiments, the acquisition module 901 is specifically configured to: determine a voltage compensation value of the power-on current; and determine the power value of the displacement point according to the voltage compensation value and the power-on current value.

[0138] In some embodiments, the acquisition module 901 is further configured to: receive an input moving distance; determine a corresponding pulse number according to the moving distance; if the pulse number is greater than a preset threshold, set the pulse number to the preset threshold; split a byte corresponding to the pulse number to obtain a first byte and a second byte; generate a third moving instruction according to the first byte and the second byte, and send the third moving instruction to the second device, so that the second device controls the to-be-tested optical element to move according to the third moving instruction.

[0139] The numerical aperture measurement device provided by the embodiments of the present application can improve the accuracy by 4 times and support real-time interruption, by moving based on a small step length, collecting power values of a plurality of displacement points, and then accurately calculating a target numerical aperture of the to-be-tested optical element by using a fitting algorithm.

[0140] The first device provided by the embodiments of the present application can be used to execute the method embodiments whose execution subject is the first device, and the implementation principles and technical effects are similar, which will not be described here again.

[0141] Figure 10 A structural diagram of a second device provided in an embodiment of the present application is shown in FIG. 1. As shown in the figure, the second device 100 includes a control module 1001 and a sending module 1002. Figure 10

[0142] The control module 1001 is configured to control the to-be-tested optical element to move to a plurality of displacement points based on preset step lengths, and the moving direction of the to-be-tested optical element is parallel to the direction of the laser beam.

[0143] The sending module 1002 is configured to send the displacement amounts of the plurality of displacement points to the first device.

[0144] The numerical aperture measuring device provided in the embodiment of the present application, by controlling the to-be-tested optical element to move based on preset step lengths, obtains the displacement amounts and power values of the plurality of displacement points, and facilitates determination of the target numerical aperture of the to-be-tested optical element through multi-step fitting.

[0145] In some embodiments, the control module 1001 is specifically configured to, for each movement, after moving to the corresponding displacement point and before starting the next movement, wait for a preset time length.

[0146] In some embodiments, the control module 1001 is further configured to, in response to receiving a first limit signal, mask the first movement instruction and enable the second movement instruction, the first limit signal is used to indicate that the limit position is reached during the movement in the first direction, the first movement instruction is used to indicate the movement in the first direction, the second movement instruction is used to indicate the movement in the second direction, and the second direction is opposite to the first direction, and / or, in response to receiving a second limit signal, mask the second movement instruction and enable the first movement instruction.

[0147] The second device provided in the embodiment of the present application can be used to execute the method embodiments whose execution subject is the second device, and the implementation principles and technical effects are similar, and thus the embodiment will not be described here.

[0148] It should be noted that in the above embodiments, the plurality of refers to two or more, i.e., two or more than two.

[0149] Figure 11 A structural diagram of an electronic device provided in the present application is shown in FIG. 1. As shown in the figure, the electronic device 100 includes a control module 1001 and a sending module 1002. Figure 11 ​As shown, the electronic device 110 provided in this embodiment includes at least one processor 1101 and a memory 1102. Optionally, the electronic device 110 further includes a communication component 1103. The processor 1101, the memory 1102 and the communication component 1103 are connected through a bus. The electronic device 110 can be the first device, and execute the method of the above embodiment in which the first device is the execution subject. The electronic device 110 can also be the second device, and execute the method of the above embodiment in which the second device is the execution subject.

[0150] In the implementation process, the at least one processor 1101 executes the computer execution instructions stored in the memory 1102, so that the at least one processor 1101 executes the above method.

[0151] The specific implementation process of the processor 1101 can refer to the above method embodiments, which have similar implementation principles and technical effects, and will not be described here in detail.

[0152] In the above embodiments, it should be understood that the processor can be a central processing unit (CPU), and can also be other general-purpose processors, digital signal processors (DSP), application specific integrated circuits (ASIC) and the like. The general-purpose processor can be a microprocessor or the processor can also be any conventional processor and the like. The steps of the method disclosed in the application can be directly embodied as execution completed by a hardware processor, or executed by a combination of hardware and software modules in the processor.

[0153] The memory can include a random access memory (RAM), and can also include a non-volatile memory (NVM), for example, at least one disk memory.

[0154] The bus can be an industry standard architecture (ISA) bus, a peripheral component (PCI) bus or an extended industry standard architecture (EISA) bus and the like. The bus can be divided into an address bus, a data bus, a control bus and the like. For the convenience of representation, the bus in the drawings of the present application does not mean only one bus or one type of bus.

[0155] The application further provides a numerical aperture measurement system, comprising the first device and the second device of the above-mentioned embodiments.

[0156] In some embodiments, the system further comprises an optical limit switch, a driving module and an optical platform; the optical platform is used for loading the optical element to be measured; the driving module is connected with the second device and the optical platform, and is used for driving the optical platform to move under the control of the second device; the optical limit switch is connected with the second device, and is used for sending a limit signal to the second device when the optical platform moves to a limit position.

[0157] The application further provides a computer program product, comprising a computer program, which, when executed by a processor, implements the above-mentioned method.

[0158] The application further provides a computer readable storage medium, wherein computer execution instructions are stored in the computer readable storage medium, and when a processor executes the computer execution instructions, the above-mentioned method is implemented.

[0159] The above-mentioned readable storage medium can be realized by any type of volatile or non-volatile storage device or a combination thereof, such as static random access memory (SRAM), electrically erasable programmable read-only memory (EEPROM), erasable programmable read-only memory (EPROM), programmable read-only memory (PROM), read-only memory (ROM), magnetic memory, flash memory, magnetic disk or optical disk. The readable storage medium can be any available medium that can be accessed by a general-purpose or special-purpose computer.

[0160] An exemplary readable storage medium is coupled to the processor, so that the processor can read information from the readable storage medium, and can write information to the readable storage medium. Of course, the readable storage medium can also be a component of the processor. The processor and the readable storage medium can be located in an application specific integrated circuit (ASIC). Of course, the processor and the readable storage medium can also exist as discrete components in the device.

[0161] The division of units is only a logical function division, and in actual implementation, another division mode can be used, for example, a plurality of units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the coupling or direct coupling or communication connection between the units or components shown or discussed can be indirect coupling or communication connection through some interfaces, devices or units, and can be electrical, mechanical or other forms.

[0162] The units described as separate components may or may not be physically separate, and the components displayed as units may or may not be physical units, i.e., may be located in one place, or may be distributed to multiple network units. Part or all of the units can be selected according to actual needs to achieve the purpose of the embodiment scheme.

[0163] In addition, each functional unit in various embodiments of the application can be integrated into one processing unit, or each unit can exist physically, or two or more units can be integrated into one unit.

[0164] If the function is realized in the form of a software function unit and sold or used as an independent product, it can be stored in a computer readable storage medium. Based on this understanding, the technical solutions of the application essentially or the part that contributes to the prior art or part of the technical solutions can be embodied in the form of a software product. The computer software product is stored in a storage medium and includes a number of instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the various embodiment methods of the application. The aforementioned storage medium includes: a U disk, a mobile hard disk, a read-only memory (ROM, Read-Only Memory), a random access memory (RAM, Random Access Memory), a magnetic disk or an optical disk, and various media that can store program codes.

[0165] Those skilled in the art can understand that all or part of the steps of the above-mentioned method embodiments can be completed by program instruction related hardware. The aforementioned program can be stored in a computer readable storage medium. The program executes to perform the steps of the above-mentioned method embodiments; and the aforementioned storage medium includes: ROM, RAM, magnetic disk or optical disk, and various media that can store program codes.

[0166] Finally, it should be noted that those skilled in the art, after considering the specification and practicing the application disclosed herein, will easily think of other embodiments of the application. The application is intended to cover any variations, uses, or adaptations of the application that follow the general principles of the application and include common knowledge or conventional technical means in the art that are not disclosed by the application, and is not limited to the precise structure described above and shown in the drawings, and various modifications and changes can be made without departing from the scope thereof. The scope of the application is only limited by the appended claims.

Claims

1. A numerical aperture measurement method, characterized by, The method applied to a first device comprises: acquiring displacement amounts and power values of a to-be-tested optical element at at least two displacement points; the at least two displacement points are position points to which the to-be-tested optical element moves based on a preset step length; the preset step length is less than or equal to a preset value; the preset value is determined according to a spot diameter of the to-be-tested optical element; a moving direction of the to-be-tested optical element is parallel to a direction of a laser beam emitted by a laser; the power values are power values of the laser beam received by the to-be-tested optical element at the corresponding displacement points; performing fitting calculation according to the displacement amounts and the power values of the at least two displacement points to determine a target numerical aperture of the to-be-tested optical element; the fitting calculation according to the displacement amounts and the power values of the at least two displacement points to determine the target numerical aperture of the to-be-tested optical element comprises: determining first and second adjacent points corresponding to a 95% power value from the at least two displacement points; performing linear interpolation on the first and second adjacent points to determine a displacement amount corresponding to the 95% power value and a numerical aperture; determining numerical apertures corresponding to the at least two displacement points respectively according to the displacement amounts of the at least two displacement points; performing fitting calculation on the numerical apertures corresponding to the at least two displacement points respectively and the numerical aperture corresponding to the 95% power value to obtain the target numerical aperture of the to-be-tested optical element.

2. The method of claim 1, wherein, the power values are determined at least in one of the following ways: obtained through power meter measurement; for each displacement point, acquiring a power-on current value of the laser corresponding to the displacement point, and determining the power value of the displacement point according to the power-on current value.

3. The method of claim 2, wherein, the determination of the power value of the displacement point according to the power-on current value comprises: determining a voltage compensation value of the power-on current; determining the power value of the displacement point according to the voltage compensation value and the power-on current value.

4. The method according to any one of claims 1 to 3, characterized in that, the method further comprises: receiving an input moving distance; determining a corresponding pulse number according to the moving distance; if the pulse number is greater than a preset threshold, setting the pulse number as the preset threshold; splitting a byte corresponding to the pulse number to obtain a first byte and a second byte; generating a third moving instruction according to the first byte and the second byte, and sending the third moving instruction to a second device to control the to-be-tested optical element to move according to the third moving instruction.

5. A numerical aperture measurement method, characterized by, the method applied to a second device comprises: controlling a to-be-tested optical element to move to at least two displacement points based on a preset step length; a moving direction of the to-be-tested optical element is parallel to a direction of a laser beam emitted by a laser; sending displacement amounts of the at least two displacement points to a first device as claimed in any one of claims 1-4.

6. The method of claim 5, wherein, the control of the to-be-tested optical element to move to the at least two displacement points based on the preset step length comprises: for each movement, after controlling the to-be-tested optical element to move to a displacement point corresponding to the current movement and before starting the next movement, waiting for a preset time length.

7. The method of claim 5, wherein, the method further comprises: In response to receiving a first limit signal, shielding a first movement instruction and enabling a second movement instruction; the first limit signal is used to indicate that a limit position is reached during movement in a first direction; the first movement instruction is used to indicate movement in the first direction; the first movement instruction is used to indicate movement in a second direction; the second direction is opposite to the first direction; And / or, In response to receiving a second limit signal, shielding the second movement instruction and enabling the first movement instruction.

8. A first device, comprising: The first device comprises: An acquisition module is configured to acquire displacement amounts and power values of the optical element to be measured at at least two displacement points; the at least two displacement points are position points to which the optical element to be measured moves based on a preset step length; the preset step length is less than or equal to a preset value; a moving direction of the optical element to be measured is parallel to a direction of a light beam emitted by a laser; the power values are power values of the light beam received by the optical element to be measured at the corresponding displacement points; A determination module is configured to perform fitting calculation based on the displacement amounts and the power values of the at least two displacement points to determine a target numerical aperture of the optical element to be measured.

9. A second device, comprising: The second device comprises: A control module is configured to control the optical element to be measured to move to at least two displacement points based on a preset step length; a moving direction of the optical element to be measured is parallel to a direction of a light beam emitted by a laser; A sending module is configured to send the displacement amounts of the at least two displacement points to the first device.

10. A numerical aperture measurement system characterized by, The first device, the second device, an optical limit switch, a driving module and an optical platform are provided; The first device is configured to acquire displacement amounts and power values of the optical element to be measured at at least two displacement points; the at least two displacement points are position points to which the optical element to be measured moves based on a preset step length; The preset step length is less than or equal to a preset value; a moving direction of the optical element to be measured is parallel to a direction of a light beam emitted by a laser; the power values are power values of the light beam received by the optical element to be measured at the corresponding displacement points; fitting calculation is performed based on the displacement amounts and the power values of the at least two displacement points to determine a target numerical aperture of the optical element to be measured; The second device is configured to control the optical element to be measured to move to at least two displacement points based on a preset step length; a moving direction of the optical element to be measured is parallel to a direction of a light beam emitted by a laser; The displacement amounts of the at least two displacement points are sent to the first device; The optical platform is configured to load the optical element to be measured; The driving module is connected with the second device and the optical platform and is configured to drive the optical platform to move under the control of the second device; The optical limit switch is connected with the second device and is configured to send a limit signal to the second device when the optical platform moves to a limit position. ​

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