Porous perfluoroether conductive elastomer as well as preparation method and application thereof

Abstract

The invention relates to the technical field of fluorine-containing elastomers, in particular to a porous perfluoroether conductive elastomer and a preparation method and application thereof.The porous perfluoroether conductive elastomer is prepared from, by weight, 100 parts of perfluoroether rubber, 0.5-10 parts of modified functional conductive filler, 3-10 parts of ionic liquid, 1-5 parts of foaming agent, 1-3 parts of vulcanizing agent, 1-3 parts of vulcanization accelerator and 0.1-2 parts of silane coupling agent; the modified functional conductive filler is obtained by performing surface carboxylation treatment on a functional conductive filler. The volume resistivity of the prepared porous perfluoroether conductive elastomer is less than or equal to 1.5 omega.cm; the electromagnetic shielding effectiveness is not less than 60dB at 10GHz, and the dynamic sealing material can be widely applied to dynamic sealing of semiconductor equipment.

Description

Technical Field

[0001] This invention relates to the field of fluorinated elastomer technology, specifically to a porous perfluoroether conductive elastomer, its preparation method, and its application. Background Technology

[0002] Conductive elastomers are a class of composite materials that combine conductivity and elasticity. They are typically composed of an elastic matrix such as silicone, polyurethane, or fluororubber, combined with conductive fillers such as metal particles, carbon materials, and conductive polymers. In semiconductor devices, their unique properties make them widely used in several key areas, including electromagnetic shielding (EMI shielding), electrostatic discharge (ESD) protection, precision connections and contacts, sensors, and actuators. As semiconductor processes evolve towards smaller processes (below 2nm) and higher integration levels, higher demands are placed on these materials' resistance to extreme environments and their multifunctional integration capabilities. In critical processes such as photolithography, etching, and deposition, the sealing components of the equipment must not only withstand extreme chemical corrosion and high-temperature, high-pressure environments, but also possess excellent conductivity to eliminate static electricity accumulation, while providing efficient electromagnetic shielding (EMI shielding) capabilities to prevent device performance degradation caused by high-frequency signal interference.

[0003] Due to the harsh process environment in semiconductor manufacturing, the elastomer matrix is ​​generally made of more temperature- and corrosion-resistant fluororubber (FKM) or perfluoroether rubber (FFKM). The highly symmetrical distribution of fluorine atoms in their molecular chains causes local dipole moments to cancel each other out in three-dimensional space, resulting in an overall non-polar characteristic and high volume resistivity. This makes them prone to static charge accumulation, threatening the reliability of sensitive electronic components. Existing solutions often improve conductivity by adding conductive fillers such as conductive carbon black or metal particles. For example, Chinese patent application CN109385068A provides a conductive or electrostatically conductive thermoplastic elastomer. This material exhibits stable electrostatic conductivity and is easy to process. However, the high proportion of filler added significantly reduces the material's mechanical flexibility and fatigue resistance, making it difficult to meet the long-term stability requirements of high-precision sealing interfaces. Furthermore, semiconductor processes must avoid metal contamination. In addition, the shielding effectiveness (SE) of traditional dense conductive elastomers against high-frequency electromagnetic waves is limited, making it difficult to cope with high-frequency interference generated by high-density integrated circuits. Summary of the Invention

[0004] To address the problems in the prior art, the first aspect of this invention provides a porous perfluoroether conductive elastomer, wherein the raw materials for preparation, by weight, include 100 parts of perfluoroether rubber, 0.5-10 parts of modified functional conductive filler, 3-10 parts of ionic liquid, 1-5 parts of foaming agent, 1-3 parts of vulcanizing agent, 1-3 parts of vulcanization accelerator, and 0.1-2 parts of silane coupling agent;

[0005] The modified functional conductive filler is obtained by surface carboxylation treatment of the functional conductive filler.

[0006] In one embodiment, the functional conductive filler includes one or more of graphene, conductive carbon black, and carbon nanotubes.

[0007] In one embodiment, the surface carboxylation treatment method includes:

[0008] The functional conductive filler was immersed in a mixture of concentrated nitric acid and concentrated sulfuric acid and ultrasonically treated at 80°C for 2-6 hours. After centrifugation and washing until neutral, it was vacuum dried to complete the surface carboxylation treatment.

[0009] In one embodiment, the surface carboxyl group density of the modified functional conductive filler is ≥0.8 mmol / g.

[0010] In one embodiment, the volume ratio of concentrated nitric acid to concentrated sulfuric acid is 3:1.

[0011] In one embodiment, the ultrasonic treatment conditions are: 40 kHz, 300 W; the vacuum drying conditions are: 80 °C, 12 h.

[0012] In one embodiment, the carbon nanotube is a multi-walled carbon nanotube.

[0013] In this invention, carbon nanotubes undergo surface carboxylation treatment. Firstly, the perfluoroether rubber (FFKM) matrix is ​​a non-polar material, while multi-walled carbon nanotubes (MWCNTs) themselves have strong surface inertness and are prone to agglomeration without treatment, making uniform dispersion in the non-polar matrix difficult. The carboxyl groups (-COOH) and other polar functional groups introduced after carboxylation enhance the interfacial interactions between MWCNTs and the matrix and other components, such as ionic liquids, reducing agglomeration and ensuring the formation of a continuous conductive network within the elastomer, thus guaranteeing conductivity. Secondly, the carboxyl groups (-COOH) generated by carboxylation can undergo a condensation reaction with silane coupling agents (APTES), allowing APTES to be grafted onto the MWCNT surface and form amino (-NH2) terminals. These amino groups can interact electrostatically with anions in the ionic liquid, such as [TFSI]. - By combining these methods, the ionic liquid is chemically anchored, preventing leakage during use and thus maintaining the long-term stable electrical and mechanical properties of the material.

[0014] In one embodiment, the ionic liquid is selected from at least one of 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide salt and N-n-butyl-N-methylpyrrolidine bis(trifluoromethanesulfonyl)imide salt.

[0015] In one embodiment, the foaming agent includes one or more of azodicarbonamide, diphenylsulfonyl hydrazine ether, N,N'-dinitrospentamethylenetetramine, or silicon nitride.

[0016] In one embodiment, the vulcanizing agent comprises 2,5-dimethyl-2,5-bis-(tert-butylperoxy)hexane, and the vulcanization accelerator comprises triallyl isocyanurate.

[0017] In one embodiment, the silane coupling agent comprises 3-aminopropyltriethoxysilane.

[0018] A second aspect of the present invention provides a method for preparing a porous perfluoroether conductive elastomer, comprising at least the following steps:

[0019] S1. Modified functional conductive filler, 50wt% ionic liquid and perfluoroether rubber are mixed and then foamed and crosslinked with foaming agent and crosslinking agent to form a porous elastomer through molding foaming and secondary vulcanization.

[0020] S2. The porous elastomer is vacuum impregnated in the remaining ionic liquid and then immersed in an ethanol solution containing a silane coupling agent for 2-6 hours. After drying, the porous perfluoroether conductive elastomer is obtained.

[0021] In one embodiment, the molding foaming process is divided into three stages:

[0022] Phase 1: Preheat at 160-180℃ for 5-10 minutes; Phase 2: Increase temperature to 190-220℃, pressurize to 10MPa and maintain for 10-20 minutes; Phase 3: Depressurize to atmospheric pressure and cool to room temperature.

[0023] In one embodiment, the secondary vulcanization conditions are: heating to 250°C and holding at that temperature for 5 hours.

[0024] In one embodiment, the vacuum impregnation conditions are: vacuum degree ≤ 1 kPa, impregnation time 1-4 h; and heat treatment temperature ≤ 100 °C after impregnation.

[0025] This invention produces a porous elastomer with a three-dimensional interconnected pore structure formed through molding foaming and secondary vulcanization. Vacuum-assisted filling utilizes negative pressure to drive the ionic liquid to fully penetrate into the micropores, avoiding air residue that could hinder filling. Post-impregnation heat treatment at ≤100℃ reduces the viscosity of the ionic liquid, further improving filling efficiency. The ionic liquid, acting as a "flexible ionic conductive pathway," synergizes with the "rigid conductive framework" formed by MWCNTs, ensuring a volume resistivity ≤1.5Ω·cm while reducing the amount of conductive filler required, thus solving the mechanical property degradation problem caused by traditional high-proportion fillers.

[0026] In one embodiment, the mass concentration of the silane coupling agent in the ethanol solution is 0.5-2 wt%; the reaction temperature is 50-80°C, and the reaction time is 2-6 h.

[0027] In one embodiment, the drying process includes: vacuum drying at 60°C for 2 hours followed by treatment at 80°C and atmospheric pressure for 1 hour.

[0028] In this invention, vacuum drying at 60°C for 2 hours removes free APTES and ethanol solvent, avoiding high temperature damage to the ionic liquid structure; treatment at 80°C and atmospheric pressure for 1 hour accelerates the formation of covalent bonds between the silane coupling agent and MWCNT, while the ionic liquid remains stable.

[0029] In this invention, 3-aminopropyltriethoxysilane (APTES) is used as a silane coupling agent, which can simultaneously improve the interfacial compatibility between MWCNT and FFKM matrix, ionic liquid and porous structure, reduce interfacial defects, improve the mechanical strength and fatigue resistance of the material, and ensure that it maintains a stable seal during frequent thermal cycling of semiconductor devices.

[0030] A third aspect of the present invention provides an application of a porous perfluoroether conductive elastomer in a semiconductor device sealing assembly.

[0031] In one embodiment, the semiconductor device sealing assembly includes, but is not limited to, a wafer transfer robotic arm sealing ring, a plasma etching cavity seal, or a radio frequency signal shielding gasket.

[0032] This invention provides another application of porous perfluoroether conductive elastomers, which are used in flexible electronic devices.

[0033] In one embodiment, the flexible electronic device uses the porous perfluoroether conductive elastomer as an electromagnetic shielding layer or a stretchable electrode.

[0034] Beneficial effects

[0035] 1. This invention provides a porous perfluoroether conductive elastomer, using perfluoroether rubber as the matrix material and employing directional foaming technology to construct a controllable three-dimensional interconnected channel structure, forming a composite conductive system of "rigid conductive framework / flexible ion-conducting pathway". The perfluoro backbone endows the material with excellent resistance to plasma corrosion and wide-temperature stability, while the porous structure significantly improves the interfacial deformation adaptability while reducing the material density, ensuring stable sealing during frequent thermal cycling of semiconductor devices, and enhancing electromagnetic wave attenuation through multiple reflection-absorption effects.

[0036] 2. This invention introduces polar functional groups such as carboxyl groups (-COOH) by surface carboxylation treatment of carbon nanotubes, which can enhance the interfacial interaction between MWCNTs and the matrix and other components, such as ionic liquids, reduce agglomeration, ensure that they form a continuous conductive network in the elastomer, and guarantee conductivity.

[0037] 3. In this invention, the foamed porous elastomer is vacuum impregnated with an ionic liquid and then immersed in an ethanol solution containing a silane coupling agent. This allows the ionic liquid to fully penetrate into the micropores, improving the filling efficiency. Simultaneously, the silane coupling agent condenses with the carboxyl groups on the MWCNT surface to form -NH2 terminals, which are then released through the [TFSI] in the ionic liquid. - The electrostatic interaction with -NH2 enables the chemical anchoring of the ionic liquid, preventing leakage during use and thus maintaining the long-term stable electrical and mechanical properties of the material.

[0038] 4. The porous perfluoroether conductive elastomer prepared by this invention has a volume resistivity ≤1.5Ω·cm and an electromagnetic shielding effectiveness ≥60dB@10GHz.

[0039] 5. The porous perfluoroether conductive elastomer material provided by this invention can be widely used in the dynamic sealing of semiconductor equipment, such as key components like wafer transfer robotic arm buffer pads and radio frequency cavity seals, to achieve integrated functions of sealing, conductivity, and electromagnetic shielding, effectively reducing equipment failure rates. At the same time, it simplifies the assembly complexity of multi-layer shielding structures in traditional designs, which aligns with the technological trend of high reliability and miniaturization in semiconductor equipment. Detailed Implementation

[0040] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to embodiments. It should be understood that the specific embodiments described herein are only for explaining the invention and are not intended to limit the invention. Experimental methods not specifying specific conditions in the embodiments were performed under conventional conditions or conditions recommended by the manufacturer. Reagents or instruments whose manufacturers are not specified are all commercially available conventional products.

[0041] The perfluoroether rubber is designated as PFR94 and is sourced from Silco.

[0042] The multi-walled carbon nanotubes have the CAS number 308068-56-6 and are from Xiamen Kaina Graphene Technology Co., Ltd.

[0043] The conductive carbon black is model ECP-600JD and comes from Noron Chemicals (Ningbo) Co., Ltd.

[0044] The 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide salt has the CAS number 174899-82-2 and comes from Zhejiang Lande Energy Technology Development Co., Ltd.

[0045] The N-n-butyl-N-methylpyrrolidine bis(trifluoromethanesulfonyl)imide salt has the CAS number 223437-11-4 and comes from Zhejiang Lande Energy Technology Development Co., Ltd.

[0046] The azodicarbonamide has the CAS number 10465-78-8 and is from Adamas.

[0047] The 2,5-dimethyl-2,5-bis-(tert-butylperoxy)hexane has the CAS number 78-63-7 and is from Aladdin.

[0048] The triallyl isocyanurate has the CAS number 1025-15-6 and is from Aladdin.

[0049] The 3-aminopropyltriethoxysilane has the CAS number 919-30-2 and is from Tokyo Chemical Industry Co., Ltd.

[0050] Example 1

[0051] The first aspect of this example provides a porous perfluoroether conductive elastomer, which, by weight, is prepared from 100 parts of perfluoroether rubber, 2 parts of modified functional conductive filler, 10 parts of ionic liquid, 2 parts of foaming agent, 1.5 parts of vulcanizing agent, 3 parts of vulcanization accelerator and 1 part of silane coupling agent.

[0052] The modified functional conductive filler is obtained by surface carboxylation treatment of the functional conductive filler.

[0053] The functional conductive filler is a multi-walled carbon nanotube.

[0054] The surface carboxylation treatment method is as follows:

[0055] The functional conductive filler was immersed in a mixture of concentrated nitric acid and concentrated sulfuric acid in a volume ratio of 3:1, and ultrasonically treated at 80℃, 40kHz, and 300W for 4 hours. After centrifugation and washing until neutral, it was vacuum dried at 80℃ for 12 hours to complete the surface carboxylation treatment.

[0056] The ionic liquid is 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide salt.

[0057] The foaming agent is azodicarbonamide.

[0058] The vulcanizing agent is 2,5-dimethyl-2,5-bis-(tert-butylperoxy)hexane, and the vulcanization accelerator is triallyl isocyanurate.

[0059] The silane coupling agent is 3-aminopropyltriethoxysilane.

[0060] The second aspect of this example provides a method for preparing a porous perfluoroether conductive elastomer, including the following steps:

[0061] S1. Modified functional conductive filler, 50wt% ionic liquid and perfluoroether rubber are mixed and then foamed and crosslinked with foaming agent and crosslinking agent to form a porous elastomer through molding foaming and secondary vulcanization.

[0062] S2. The porous elastomer is vacuum impregnated in the remaining ionic liquid and then immersed in an ethanol solution containing a silane coupling agent for 2-6 hours. After drying, the porous perfluoroether conductive elastomer is obtained.

[0063] The molding foaming process is divided into three stages:

[0064] Phase 1: Preheat at 160℃ for 5 minutes; Phase 2: Increase temperature to 210℃, pressurize to 10MPa and hold for 10 minutes; Phase 3: Depressurize to atmospheric pressure and cool to room temperature.

[0065] The secondary vulcanization conditions are: heating to 250℃ and holding at that temperature for 5 hours.

[0066] The vacuum impregnation conditions are: vacuum degree 0.5 kPa, impregnation time 2 h; and heat treatment temperature after impregnation 60 °C.

[0067] The silane coupling agent in the ethanol solution has a mass concentration of 1 wt%; the reaction temperature is 60℃ and the reaction time is 4 h.

[0068] The drying process includes: vacuum drying at 60°C for 2 hours, followed by treatment at 80°C and normal pressure for 1 hour.

[0069] The third aspect of this example provides an application of a porous perfluoroether conductive elastomer in a semiconductor device sealing assembly.

[0070] This example provides another application of porous perfluoroether conductive elastomers in flexible electronic devices.

[0071] The flexible electronic device uses the porous perfluoroether conductive elastomer as an electromagnetic shielding layer.

[0072] Example 2

[0073] The first aspect of this example provides a porous perfluoroether conductive elastomer, which, by weight, is prepared from 100 parts of perfluoroether rubber, 2 parts of modified functional conductive filler, 10 parts of ionic liquid, 2 parts of foaming agent, 1.5 parts of vulcanizing agent, 3 parts of vulcanization accelerator and 1 part of silane coupling agent.

[0074] The modified functional conductive filler is obtained by surface carboxylation treatment of the functional conductive filler.

[0075] The functional conductive filler is a multi-walled carbon nanotube.

[0076] The surface carboxylation treatment method is as follows:

[0077] The functional conductive filler was immersed in a mixture of concentrated nitric acid and concentrated sulfuric acid in a volume ratio of 3:1, and ultrasonically treated at 80℃, 40kHz, and 300W for 4 hours. After centrifugation and washing until neutral, it was vacuum dried at 80℃ for 12 hours to complete the surface carboxylation treatment.

[0078] The ionic liquid is N-n-butyl-N-methylpyrrolidine bis(trifluoromethanesulfonyl)imide salt.

[0079] The foaming agent is azodicarbonamide.

[0080] The vulcanizing agent is 2,5-dimethyl-2,5-bis-(tert-butylperoxy)hexane, and the vulcanization accelerator is triallyl isocyanurate.

[0081] The silane coupling agent is 3-aminopropyltriethoxysilane.

[0082] The second aspect of this example provides a method for preparing a porous perfluoroether conductive elastomer, including the following steps:

[0083] S1. Modified functional conductive filler, 50wt% ionic liquid and perfluoroether rubber are mixed and then foamed and crosslinked with foaming agent and crosslinking agent to form a porous elastomer through molding foaming and secondary vulcanization.

[0084] S2. The porous elastomer is vacuum impregnated in the remaining ionic liquid and then immersed in an ethanol solution containing a silane coupling agent for 2-6 hours. After drying, the porous perfluoroether conductive elastomer is obtained.

[0085] The molding foaming process is divided into three stages:

[0086] Phase 1: Preheat at 160℃ for 5 minutes; Phase 2: Increase temperature to 210℃, pressurize to 10MPa and hold for 10 minutes; Phase 3: Depressurize to atmospheric pressure and cool to room temperature.

[0087] The secondary vulcanization conditions are: heating to 250℃ and holding at that temperature for 5 hours.

[0088] The vacuum impregnation conditions are: vacuum degree 0.5 kPa, impregnation time 2 h; and heat treatment temperature after impregnation 60 °C.

[0089] The silane coupling agent in the ethanol solution has a mass concentration of 1 wt%; the reaction temperature is 60℃ and the reaction time is 4 h.

[0090] The drying process includes: vacuum drying at 60°C for 2 hours, followed by treatment at 80°C and normal pressure for 1 hour.

[0091] The third aspect of this example provides an application of a porous perfluoroether conductive elastomer in a semiconductor device sealing assembly.

[0092] This example provides another application of porous perfluoroether conductive elastomers in flexible electronic devices.

[0093] The flexible electronic device uses the porous perfluoroether conductive elastomer as an electromagnetic shielding layer.

[0094] Comparative Example 1

[0095] The specific implementation method of this example is the same as that of Example 1, except that, according to the weight parts, the raw materials include 100 parts of perfluoroether rubber, 10 parts of ionic liquid, 2 parts of foaming agent, 1.5 parts of vulcanizing agent and 3 parts of vulcanization accelerator.

[0096] Comparative Example 2

[0097] The specific implementation method of this example is the same as that of Example 1, except that, according to the weight parts, the raw materials include 100 parts of perfluoroether rubber, 2 parts of modified functional conductive filler, 2 parts of foaming agent, 1.5 parts of vulcanizing agent and 3 parts of vulcanization accelerator.

[0098] Comparative Example 3

[0099] The specific implementation method of this example is the same as that of Example 1, except that, according to the weight parts, the raw materials include 100 parts of perfluoroether rubber, 10 parts of modified functional conductive filler, 4 parts of ionic liquid, 1.5 parts of vulcanizing agent, 3 parts of vulcanization accelerator and 1 part of silane coupling agent.

[0100] The modified functional conductive filler is obtained by surface carboxylation treatment of the functional conductive filler.

[0101] The functional conductive filler is composed of multi-walled carbon nanotubes and conductive carbon black in a mass ratio of 1:4.

[0102] The ionic liquid is N-n-butyl-N-methylpyrrolidine bis(trifluoromethanesulfonyl)imide salt.

[0103] Comparative Example 4

[0104] The specific implementation method of this example is the same as that of Example 1, except that, according to the weight parts, the raw materials include 100 parts of perfluoroether rubber, 10 parts of modified functional conductive filler, 2 parts of foaming agent, 1.5 parts of vulcanizing agent and 3 parts of vulcanization accelerator.

[0105] The modified functional conductive filler is obtained by surface carboxylation treatment of the functional conductive filler.

[0106] The functional conductive filler is composed of multi-walled carbon nanotubes and conductive carbon black in a mass ratio of 1:4.

[0107] Comparative Example 5

[0108] The specific implementation method of this example is the same as that of Example 1, except that, according to the weight parts, the raw materials include 100 parts of perfluoroether rubber, 10 parts of unmodified functional conductive filler, 6 parts of ionic liquid, 2 parts of foaming agent, 1.5 parts of vulcanizing agent and 3 parts of vulcanization accelerator.

[0109] The ionic liquid is 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide salt.

[0110] The unmodified functional conductive filler is conductive carbon black.

[0111] Performance testing

[0112] The tensile strength, elongation at break, volume resistivity (tested with reference to ASTM D4496), foaming rate, and electromagnetic shielding effectiveness of each embodiment and comparative example were tested, and the test results are shown in Table 1.

[0113] in ρ is the material density. ρ_unfoamed is the material density before foaming, measured by the water displacement method (ASTM D792). ρ_foamed is the material density after foaming. The foamed material is cut into regular cubes (10×10×10mm), weighed, and the bulk density is calculated.

[0114] Table 1

[0115]

[0116] As can be seen from the test results in Table 1, the porous perfluoroether conductive elastomer prepared in this application has advantages over the comparative example, with a volume resistivity ≤1.5Ω·cm and electromagnetic shielding effectiveness ≥60dB@10GHz, and can be widely used in dynamic sealing of semiconductor equipment.

Claims

1. A porous perfluoroether conductive elastomer, characterized in that, The raw materials for preparation, by weight, include 100 parts of perfluoroether rubber, 0.5-10 parts of modified functional conductive filler, 3-10 parts of ionic liquid, 1-5 parts of foaming agent, 1-3 parts of vulcanizing agent, 1-3 parts of vulcanization accelerator and 0.1-2 parts of silane coupling agent. The modified functional conductive filler is obtained by surface carboxylation treatment of the functional conductive filler.

2. The porous perfluoroether conductive elastomer according to claim 1, characterized in that, The functional conductive filler includes one or more of graphene, conductive carbon black, and carbon nanotubes.

3. The porous perfluoroether conductive elastomer according to claim 2, characterized in that, The surface carboxylation treatment method includes: The functional conductive filler was immersed in a mixture of concentrated nitric acid and concentrated sulfuric acid and ultrasonically treated at 80°C for 2-6 hours. After centrifugation and washing until neutral, it was vacuum dried to complete the surface carboxylation treatment.

4. The porous perfluoroether conductive elastomer according to claim 1, characterized in that, The ionic liquid is selected from at least one of 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide salt and N-n-butyl-N-methylpyrrolidine bis(trifluoromethanesulfonyl)imide salt.

5. A method for preparing a porous perfluoroether conductive elastomer according to any one of claims 1-4, characterized in that, At least the following steps are included: S1. Modified functional conductive filler, 50wt% ionic liquid and perfluoroether rubber are mixed and then foamed and crosslinked with foaming agent and crosslinking agent to form a porous elastomer through molding foaming and secondary vulcanization. S2. The porous elastomer is vacuum impregnated in the remaining ionic liquid and then immersed in an ethanol solution containing a silane coupling agent for 2-6 hours. After drying, the porous perfluoroether conductive elastomer is obtained.

6. The method for preparing the porous perfluoroether conductive elastomer according to claim 5, characterized in that, The molding foaming process is divided into three stages: Phase 1: Preheat at 160-180℃ for 5-10 minutes; Phase 2: Increase temperature to 190-220℃, pressurize to 10MPa and maintain for 10-20 minutes; Phase 3: Depressurize to atmospheric pressure and cool to room temperature.

7. The method for preparing the porous perfluoroether conductive elastomer according to claim 5, characterized in that, The conditions for vacuum impregnation are: vacuum degree ≤ 1 kPa, impregnation time 1-4 h; heat treatment temperature after impregnation ≤ 100℃.

8. An application of the porous perfluoroether conductive elastomer according to any one of claims 1-4, characterized in that, The porous perfluoroether conductive elastomer is used in the sealing components of semiconductor devices.

9. An application of the porous perfluoroether conductive elastomer according to any one of claims 1-4, characterized in that, The porous perfluoroether conductive elastomer is used in flexible electronic devices.

10. The application of the porous perfluoroether conductive elastomer according to claim 9, characterized in that, The flexible electronic device uses the porous perfluoroether conductive elastomer described in any one of claims 1-4 as an electromagnetic shielding layer or a stretchable electrode.

Images