Vibration reduction system and method and semiconductor manufacturing equipment

Abstract

The invention relates to a vibration reduction system and method and semiconductor manufacturing equipment. The system comprises a bottom plate, a top plate and a vibration reduction supporting assembly, wherein the bottom plate and the top plate are oppositely arranged in a spaced mode, and the vibration reduction supporting assembly is arranged between the bottom plate and the top plate. The vibration reduction supporting assembly comprises a plurality of supporting legs, a plurality of slave cases, a master case, a plurality of valves and a plurality of actuators. The supporting legs are used for supporting the top plate; the plurality of slave cases are used for respectively acquiring vibration data of the plurality of supporting legs; the main case is used for integrating the vibration data of the multiple supporting legs, determining the overall vibration data of the vibration reduction system and sending the overall vibration data to each slave case; each slave case is further used for determining a vibration reduction correction instruction of each supporting leg according to the overall vibration data and the vibration data; the plurality of actuators are used for carrying out vibration reduction adjustment on each supporting leg according to the vibration reduction correction instruction; for any large moving table top, vibration reduction can be carried out on any single point according to needs.

Description

Technical Field

[0001] This invention relates to the field of vibration reduction technology, and more specifically to a vibration reduction system, method, and semiconductor manufacturing equipment. Background Technology

[0002] In fields such as high-precision manufacturing, aerospace, and precision instruments, the extreme requirements for equipment accuracy, stability, and safety mean that even minor vibrations can lead to product quality degradation, measurement errors, or operational risks. This places higher and more stringent demands on vibration reduction control systems. To address these challenges, high-performance active vibration reduction control systems have emerged. By integrating advanced sensors, control algorithms, and actuators, these systems actively monitor and counteract vibration disturbances in real time, significantly improving the overall reliability, efficiency, and adaptability of the system.

[0003] However, high-performance active vibration control systems are mainly designed for miniaturized equipment and focus more on scenarios where a single controller processes signals and a small amount of vibration damper output. As a result, they cannot effectively meet the complex application requirements such as large moving platforms, high load-bearing capacity, and high output.

[0004] Therefore, existing technologies cannot adequately address the vibration reduction requirements of large motion platforms. Summary of the Invention

[0005] This invention provides a vibration reduction system, method, and semiconductor manufacturing equipment, aiming to solve the problem that existing technologies cannot adequately meet the vibration reduction requirements of large-motion platforms.

[0006] To address the aforementioned technical problems, the embodiments of the present invention provide the following technical solutions: A vibration damping system includes a base plate and a top plate arranged at a relative distance from each other, and a vibration damping support assembly disposed between the base plate and the top plate; The vibration damping support assembly includes multiple support legs, multiple slave chassis, a main chassis, multiple valves, and multiple actuators. Each support leg is fixedly connected to the top plate, and each support leg is connected to a slave chassis, a valve, and an actuator. The main chassis is signal-connected to the multiple slave chassis, and each actuator is signal-connected to the corresponding slave chassis. The plurality of support legs are used to support the top plate; The plurality of slave chassis are used to acquire vibration data of the plurality of support legs respectively; The main unit is used to integrate the vibration data of the multiple support legs and determine the overall vibration data of the vibration reduction system, and send the overall vibration data to each slave unit. Each slave chassis is also used to determine vibration reduction correction instructions for each support leg based on the overall vibration data and the vibration data; The plurality of actuators are used to adjust the vibration reduction of each support leg according to the vibration reduction correction command.

[0007] Optionally, the main control chassis includes a first-level control chassis and multiple second-level control chassis; Each second-level control chassis is connected to a preset number of slave chassis, and each second-level control chassis is used to acquire the average vibration data of the corresponding preset number of slave chassis; The first-level control box is connected to the plurality of second-level control boxes via signals, and is used to calculate the overall vibration data based on the plurality of average vibration data from the plurality of second-level control boxes.

[0008] Optionally, the actuator includes at least one of an external voice coil motor, a vibration damping voice coil motor, and a valve regulator; the vibration damping correction command also includes at least one of an external voice coil correction command, a vibration damping voice coil correction command, and a valve opening adjustment command. The main unit is also used to acquire the vibration data change value of each support leg, and when the vibration data change value is greater than a preset change threshold, output the external voice coil correction command to the external voice coil motor, and / or output the vibration damping voice coil correction command to the vibration damping voice coil motor, and / or output the valve opening adjustment command to the valve regulator.

[0009] Optionally, the actuator includes an external voice coil motor and a vibration-damping voice coil motor; the vibration-damping correction command also includes an external voice coil correction command and a vibration-damping voice coil correction command. The main unit also includes a current displacement characteristic acquisition module, which is used to acquire the current displacement characteristic curve of the external voice coil motor in real time and compare the current displacement characteristic curve with a preset motor rated load curve and a displacement threshold. When the current displacement characteristic curve exceeds the preset motor rated load curve and / or exceeds the displacement threshold, the vibration damping voice coil correction command is output to the vibration damping voice coil motor; otherwise, the external voice coil correction command is output to the external voice coil motor.

[0010] Optionally, the vibration reduction system further includes an environmental data acquisition module connected to the main unit, used to acquire environmental vibration data of the vibration reduction system; The main unit is also used to determine the overall vibration data based on the environmental vibration data and the vibration data of the multiple support legs.

[0011] Optionally, the slave chassis includes a target acquisition module and a correction algorithm module; The target acquisition module is used to determine the target vibration of the slave chassis based on the overall vibration data. The correction algorithm module is used to calculate the difference between the target vibration and the vibration data of the slave chassis, determine the vibration offset of each support leg, and generate the vibration reduction correction command based on the vibration offset.

[0012] Optionally, the target vibration includes at least one of the following: overall vibration data itself, typed target vibration data, and target data calculated by adjusting the overall vibration data; The step of adjusting and calculating the target data from the overall vibration data specifically includes: The overall vibration data and the vibration data of each slave chassis are calculated collaboratively using a proportional-integral-derivative adjustment algorithm to determine the vibration data value corresponding to the minimum vibration correction value as the target data.

[0013] Optionally, the main chassis and the plurality of slave chassis are connected by optical communication via an Ethernet switch; The Ethernet switch includes a fiber optic switch or a hybrid optoelectronic switch.

[0014] A vibration reduction method, comprising: Acquire vibration data from multiple support legs; The vibration data of the multiple support legs are integrated to determine the overall vibration data of the vibration reduction system; Based on the overall vibration data and the vibration data of each support leg, determine the vibration reduction correction command for each support leg; The vibration reduction adjustment is performed on each support leg according to the vibration reduction correction command.

[0015] A semiconductor manufacturing apparatus includes a memory and a processor. The memory stores a computer program that, when executed by the processor, causes the processor to perform the following steps: Acquire vibration data from multiple support legs; The vibration data of the multiple support legs are integrated to determine the overall vibration data of the vibration reduction system; Based on the overall vibration data and the vibration data of each support leg, determine the vibration reduction correction command for each support leg; The vibration reduction adjustment is performed on each support leg according to the vibration reduction correction command.

[0016] The beneficial effects of this application are as follows: By configuring an independent slave chassis, valve, and actuator for each support leg, since each support leg corresponds to a point position on the top plate, real-time detection and independent adjustment of the single-point vibration (vibration change) of the top plate are realized. This avoids the impact of single-point failure on the overall system and improves the targeting of local vibration reduction. Therefore, for any large moving platform, vibration reduction can be applied to any single point as needed. At the same time, since the main chassis integrates the vibration data of all support legs to generate the overall vibration data and feeds the vibration data back to each slave chassis, the adjustment command of each support leg can take into account both local dynamics and the overall vibration state of the system. This avoids overall instability caused by isolated adjustment, achieves the unity of local independent control and global collaborative optimization, and improves the overall stability of the vibration reduction system. Attached Figure Description

[0017] The technical solution and other beneficial effects of this application will become apparent from the following detailed description of specific embodiments in conjunction with the accompanying drawings.

[0018] Figure 1 This is a three-dimensional structural schematic diagram of an embodiment of the vibration reduction system provided in this application; Figure 2 This is a front view structural schematic diagram of an embodiment of the vibration reduction system provided in this application; Figure 3 This is a schematic flowchart of one embodiment of the vibration reduction method provided by the present invention. Detailed Implementation

[0019] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0020] In the description of this application, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "a plurality of" means two or more, unless otherwise explicitly specified.

[0021] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0022] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0023] The following disclosure provides many different embodiments or examples for implementing different structures of this application. To simplify the disclosure, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the scope of this application. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, various specific examples of processes and materials are provided in this application, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0024] The following detailed description is based on specific embodiments. It should be noted that the sequence numbers of the following embodiments are not intended to limit the preferred order of the embodiments.

[0025] Please see Figures 1 to 2 , Figure 1 This is a three-dimensional structural schematic diagram of an embodiment of the vibration reduction system provided in this application. Figure 2 This is a front view structural schematic diagram of an embodiment of the vibration reduction system provided in this application. Figures 1 to 2 As shown, the vibration damping system includes a base plate 10 and a top plate 20 arranged at relative intervals, and a vibration damping support assembly 30 disposed between the base plate 10 and the top plate 20. The vibration damping support assembly 30 includes multiple support legs 310, multiple slave housings 320, a main housing (not shown), multiple valves 330, and multiple actuators 340. Each support leg 310 is fixedly connected to the top plate 20, and each support leg 310 is connected to a slave housing 320, a valve 330, and an actuator 340, respectively. The main housing is signal-connected to the multiple slave housings 320, and each actuator 340 is connected to a corresponding... The system is connected to the slave chassis 320 via signal connection; multiple support legs 310 are used to support the top plate 20; multiple slave chassis 320 are used to acquire vibration data of multiple support legs 310 respectively; the main chassis is used to integrate the vibration data of multiple support legs 310 and determine the overall vibration data of the vibration reduction system, and send the overall vibration data to each slave chassis 320; each slave chassis 320 is also used to determine the vibration reduction correction command for each support leg 310 based on the overall vibration data and the vibration data; multiple actuators 340 are used to adjust the vibration reduction of each support leg 310 according to the vibration reduction correction command.

[0026] It should be noted that the support leg 310 can be a component with telescopic properties such as a hydraulic cylinder, a pneumatic cylinder, or an elastic support column. Each support leg 310 is fixedly connected to the top plate 20. Its specific form is not limited to the structure shown in the figure, as long as it can support the top plate 20 and adjust its height.

[0027] The chassis 320 can be installed on the side or bottom of the support leg 310 to facilitate the real-time acquisition of dynamic data during the movement of the support leg 310.

[0028] The main unit communicates with the slave unit 320 via wired or wireless means to achieve real-time and coordinated control of the overall status of the vibration reduction system.

[0029] Adjusting the opening of each valve 330 can change the internal pressure or flow rate of the support leg 310, thereby dynamically adjusting the stiffness and damping characteristics of the support leg 310 to adapt to changes in external excitation. That is, by adjusting the opening of the valve 330, precise control of the internal pressure or flow rate of the support leg 310 can be achieved, thereby adjusting the mechanical characteristics of the support leg 310 and optimizing the vibration reduction effect.

[0030] The actuator 340 is either an electric actuator 340 or a hydraulic actuator 340, which has a fast response capability and can complete the valve opening adjustment of 330 in milliseconds, thereby realizing the real-time control of the vibration reduction system.

[0031] Vibration data specifically includes one or more of acceleration, velocity, and displacement data, without limitation.

[0032] The overall vibration data is obtained by comprehensively analyzing and calculating the vibration data of each support leg 310, which reflects the overall motion state and dynamic response characteristics of the vibration reduction system.

[0033] In this embodiment, by configuring an independent slave chassis 320, valve 330, and actuator 340 for each support leg 310, since each support leg 310 corresponds to a point position on the top plate 20, real-time detection and independent adjustment of single-point vibration changes on the top plate 20 are achieved. This avoids single-point failures affecting the overall system and improves the targeting of local vibration reduction. Therefore, for any large-scale moving platform, vibration reduction can be applied to any single point as needed. At the same time, since the main chassis integrates the vibration data of all support legs 310 to generate overall vibration data, and feeds the overall vibration data back to each slave chassis 320, the adjustment command of each support leg 310 can simultaneously take into account both local dynamics and the overall vibration state of the system, avoiding overall instability caused by isolated adjustments. This achieves the unity of local independent control and global collaborative optimization, improving the overall stability of the vibration reduction system.

[0034] Furthermore, for complex application scenarios such as large motion platforms, high load-bearing capacity, and high output requirements, the number of slave chassis 320 may be multiple. However, the computing power of the main chassis is limited. In particular, data from multiple slave chassis 320 as peer data may lead to excessive data coupling. Therefore, the main chassis is configured to include a first-level control chassis and multiple second-level control chassis. Each second-level control chassis is connected to one or more slave chassis 320 of a preset number, and each second-level control chassis is used to acquire the average vibration data of the preset number of slave chassis 320. The first-level control chassis is connected to the multiple second-level control chassis for signal connection, and is used to determine the overall vibration data based on the multiple average vibration data of the multiple second-level control chassis.

[0035] It should be noted that the main control chassis adopts a hierarchical structure. The second-level control chassis pre-processes the data from chassis 320 (calculating average vibration data) for a preset number of connected components locally before uploading the simplified average data to the first-level control chassis. Compared to the first-level control chassis directly processing all raw data, this significantly reduces the data processing load on the first-level control chassis (from "N raw data points" to "M average vibration data points," generally N >> M), lowering the computational burden on the first-level control chassis and making overall data processing more efficient and response faster.

[0036] Furthermore, the aforementioned hierarchical structure offers excellent scalability. When the scale of the vibration damping system expands or the number of chassis 320 increases, only the number of second-level control chassis needs to be increased accordingly. This eliminates the need for large-scale upgrades or reconstructions of the first-level control chassis, thereby reducing system maintenance costs and technical complexity. Simultaneously, by delegating data processing tasks to each second-level control chassis, not only is the overall response efficiency of the vibration damping system improved, but its fault tolerance is also enhanced. Even if one second-level control chassis fails, the remaining components can continue operating, ensuring the continuous and stable operation of the vibration damping system under complex working conditions.

[0037] In summary, by using hierarchical averaging, the overall vibration data integrates the average motion state of each group, which avoids redundant interference from the original data and preserves the motion characteristics of each region. This allows the first level to more accurately judge the overall vibration trend of the system and improves the adaptability and control accuracy of the vibration reduction system to complex dynamic vibration scenarios.

[0038] Furthermore, since the vibration direction of the vibration reduction system is generally consistent, in order to improve the feedback speed of the vibration reduction system, the second-level control chassis also includes a vibration compensation module, which is used to compensate and correct the vibration data of multiple slave chassis 320 based on the average vibration data of multiple slave chassis 320 with a preset number of data.

[0039] It should be noted that the vibration compensation module uses the "average vibration data of multiple slave chassis 320s" as a benchmark. This effectively reduces the excessive dispersion of vibration data caused by hardware differences (such as sensor accuracy, transmission mechanism wear), environmental interference (such as temperature, vibration), or individual errors (such as initial calibration deviation) in a single slave chassis 320. This makes the actual operating parameters of each slave chassis 320 closer to the unified standard required for overall coordination, reducing the impact of individual differences on the overall system operation. Through compensation correction based on average vibration data, vibration data deviating from a reasonable range can be corrected, making the feedback data of each slave chassis 320 closer to the actual physical motion state. This provides a more reliable decision-making basis for the upper-level control logic and reduces control command deviations caused by data distortion.

[0040] In one specific embodiment, when the vibration interference in a local area is strong, the second-level control chassis can respond quickly based on its own data without waiting for the global decision of the first-level control chassis, thereby improving the real-time performance and robustness of the entire vibration reduction system.

[0041] In summary, in this embodiment, the vibration compensation module directly completes the compensation and correction of vibration data, allowing the first-level control chassis to better focus on overall task planning (such as trajectory planning and cycle control).

[0042] In one specific embodiment, the actuator 340 includes at least one of an external voice coil motor, a vibration damping voice coil motor, and a valve regulator; the vibration damping correction command also includes at least one of an external voice coil correction command, a vibration damping voice coil correction command, and a valve opening adjustment command; the main unit is also used to acquire the vibration data change value of each support leg 310, and when the vibration data change value is greater than a preset change threshold, output an external voice coil correction command to the external voice coil motor, and / or output a vibration damping voice coil correction command to the vibration damping voice coil motor, and / or output a valve opening adjustment command to the valve regulator.

[0043] It should be noted that the actuator 340 is a device that converts input energy (such as electrical energy, hydraulic energy, pneumatic energy, etc.) into mechanical motion or physical effects. Its core function is to drive mechanical parts to complete specific actions according to the instructions of the control system.

[0044] An external voice coil motor (VCM) consists of a permanent magnet, a coil (voice coil), and a spring guiding mechanism. It is a special direct-drive motor based on electromagnetic principles and is named for its working principle, which is similar to the voice coil structure in a loudspeaker.

[0045] A vibration-damping voice coil motor is an active vibration control device designed based on the principle of voice coil motors. Its core function is to dynamically counteract external vibration interference by generating reverse force or motion in real time, thereby improving the stability of precision equipment.

[0046] Correspondingly, the main unit acquires vibration data changes in real time and compares them with preset thresholds. Since the preset thresholds represent the sensitivity boundary of the vibration damping system to vibration disturbances, when the change value exceeds this boundary, the system determines that the current disturbance belongs to a large-amplitude vibration scenario requiring rapid response. At this time, the external voice coil motor is activated for large-range, high-thrust dynamic compensation to quickly suppress the vibration amplitude. When the change value does not exceed the preset threshold, it is determined to be a steady-state or micro-amplitude disturbance, and the vibration damping voice coil motor is activated for fine adjustment to achieve high-precision vibration suppression. Through this hierarchical control strategy, the intensity level of vibration disturbances is automatically determined, and corresponding correction commands are output. This enables automatic matching of the optimal correction method according to actual working conditions, improving the real-time performance, accuracy, and automation level of vibration damping control.

[0047] Furthermore, although external voice coil motors and vibration-damping voice coil motors both belong to the voice coil motor technology system, their control precision differs. External voice coil motors are more suitable for handling scenarios with large changes in vibration data (such as rapid dynamic disturbances and large-amplitude vibrations), utilizing their potential for rapid response and high thrust / long stroke characteristics to quickly suppress large vibrations. Vibration-damping voice coil motors are suitable for scenarios with smaller changes in value (such as steady-state disturbances and small vibrations), achieving high-precision vibration reduction through fine adjustment to ensure the smoothness of the system in a stable state.

[0048] To better leverage the performance advantages of the two motors and ensure their synergistic effect in vibration control, the actuator includes an external voice coil motor and a vibration-damping voice coil motor. The vibration-damping correction commands also include external voice coil correction commands and vibration-damping voice coil correction commands. The main unit also includes a current-displacement characteristic acquisition module, which acquires the current-displacement characteristic curve of the external voice coil motor in real time and compares it with a preset motor rated load curve and displacement threshold. When the current-displacement characteristic curve exceeds the preset motor rated load curve and / or exceeds the displacement threshold, a vibration-damping voice coil correction command is output to the vibration-damping voice coil motor; otherwise, an external voice coil correction command is output to the external voice coil motor.

[0049] The current-displacement characteristic curve is a dynamic curve describing the relationship between the input current and the mechanical displacement of an external voice coil motor. It reflects the current-displacement relationship of the motor under different operating conditions and indicates whether the motor is operating within its rated load range. For example, when the displacement increases, the current demand may increase non-linearly. If the curve exceeds the preset rated load curve of the motor, it indicates that the motor is overloaded.

[0050] In this embodiment, the actuator 340 is decomposed into a damping voice coil motor and an external voice coil motor, corresponding to two types of correction commands (external voice coil correction command and damping voice coil correction command). The main unit can adaptively select the appropriate voice coil motor for correction based on the degree of change in the vibration data of the support leg 310, better leveraging the performance advantages of each motor and improving correction efficiency and accuracy. Specifically, by using the current-displacement characteristic curve of the external voice coil motor as a basis, and dynamically comparing it with the preset rated load curve and displacement threshold, the system can accurately select the output of external voice coil correction command or damping voice coil correction command based on the actual working state (normal / overload) of the external motor. Under normal operating conditions, the external voice coil correction command is used first (adapting to conventional vibration damping requirements, with a more direct and efficient response); under abnormal operating conditions, the system switches to the damping voice coil correction command to achieve "on-demand adjustment," avoiding ineffective energy consumption and improving the overall system response efficiency.

[0051] To improve the accuracy of vibration data, the vibration reduction system also includes an environmental data acquisition module, which is connected to the main unit and is used to collect environmental vibration data of the vibration reduction system. The main unit is also used to determine the overall vibration data based on the environmental vibration data and the vibration data of multiple support legs 310.

[0052] It should be noted that the environmental vibration data reflects the information of the interference sources of the external environment on the vibration reduction system (such as ground vibration, external equipment vibration, etc.); the vibration data of multiple support legs 310 reflects the real-time response status of the vibration reduction system itself (such as the movement speed and displacement of the support legs 310, etc.); by integrating external environmental interference in the process of determining the overall vibration data, the influence of environmental interference factors on the vibration data of the support legs 310 is effectively eliminated, so that the overall vibration data can more comprehensively and accurately reflect the real movement of the vibration reduction system.

[0053] In summary, this embodiment achieves dynamic perception of changes in the vibration characteristics of the external environment (such as fluctuations in vibration frequency and amplitude) by collecting environmental vibration data in real time, thereby enhancing the adaptability of the vibration reduction system to environmental changes.

[0054] Furthermore, the slave chassis 320 includes a target acquisition module and a correction algorithm module; wherein, the target acquisition module is used to determine the target vibration of the slave chassis 320 based on the overall vibration data; the correction algorithm module is used to perform difference calculation on the target vibration and the vibration data of the slave chassis 320, determine the vibration offset of each support leg 310, and generate vibration reduction correction instructions based on the vibration offset.

[0055] Specifically, the target vibration includes at least one of the following: the overall vibration data itself, the input target vibration data, and the target data obtained by adjusting the overall vibration data; wherein, the step of adjusting the overall vibration data to obtain the target data specifically includes: performing collaborative calculation on the overall vibration data and the vibration data of each slave chassis 320 using a proportional-integral-derivative adjustment algorithm to determine the vibration data value corresponding to the minimum vibration correction value as the target data.

[0056] It should be noted that the target vibration of the slave chassis 320 is determined based on the overall vibration data, which avoids the incoordination between the independently controlled slave chassis 320 and the overall movement; the vibration offset of the support leg 310 is directly obtained through difference calculation and a correction command is generated, which realizes the real-time reduction of the deviation between the actual vibration and the target value and improves the vibration reduction control accuracy of a single slave chassis 320.

[0057] The vibration correction amount refers to the sum of the absolute values ​​of all vibration changes in the chassis 320. Determining the vibration data value corresponding to the minimum vibration correction amount is the target data, which can reduce the adjustment range of the support leg 310. On the one hand, it reduces unnecessary energy consumption, and on the other hand, it avoids system overshoot or oscillation caused by large correction amounts, so that the support leg 310 of the chassis 320 can quickly converge to the target state, thus improving the dynamic stability of the vibration reduction system.

[0058] By using a proportional-integral-derivative (PID) control algorithm to collaboratively calculate the overall vibration data and the vibration data of each slave chassis 320, the target vibration is determined. This achieves the coupling of the overall system state with the individual state of each slave chassis 320, avoiding local vibration interference caused by ignoring the overall system coordination when a single slave chassis 320 is controlled independently. It ensures that the actions of multiple slave chassis 320 are consistent with the overall vibration reduction requirements, thereby improving the synergistic effect of system-level vibration reduction.

[0059] In summary, this embodiment can significantly improve the control accuracy, coordination, and stability of the vibration reduction system by accurately determining and dynamically correcting the target vibration of the chassis 320.

[0060] Furthermore, it should be emphasized that, in order to ensure the real-time nature of data interaction, the main chassis and multiple slave chassis 320 are connected by optical communication via Ethernet switches; the Ethernet switches include fiber optic switches or hybrid optical-electric switches.

[0061] After obtaining the vibration reduction system, the present invention also provides a vibration reduction method, please refer to [link to relevant documentation]. Figure 3 , Figure 3 This is a schematic flowchart of an embodiment of the vibration reduction method provided by the present invention, including: S301: Acquire vibration data from multiple support legs; S302: Integrate the vibration data of multiple support legs to determine the overall vibration data of the vibration reduction system; S303: Based on the overall vibration data and the vibration data of each support leg, determine the vibration reduction correction command for each support leg; S304: Adjust the vibration reduction of each support leg according to the vibration reduction correction command.

[0062] It should be noted that the vibration reduction correction command is a specific control command for each support leg obtained by comparing and analyzing the overall expected vibration reduction state of the vibration reduction system (characterized by the overall vibration data) with the current actual motion state of each support leg (characterized by the vibration data of each support leg). The vibration reduction correction command can guide each support leg to adjust its own speed and displacement to match the overall vibration reduction requirements of the system. Finally, the opening of the drive valve is adaptively adjusted to regulate the motion state of the support leg (such as speed and displacement) and achieve the overall vibration reduction effect.

[0063] In this embodiment, data-driven overall optimization and local adaptive correction improve the coordination and accuracy of the vibration reduction system, ensuring more stable vibration reduction effect, more precise control, and more reliable operation.

[0064] This application also provides a semiconductor manufacturing apparatus, including a memory and a processor. The memory stores a computer program, and when the computer program is executed by the processor, the processor performs the following steps: acquiring vibration data of multiple support legs; integrating the vibration data of the multiple support legs to determine the overall vibration data of the vibration reduction system; determining a vibration reduction correction instruction for each support leg based on the overall vibration data and the vibration data of each support leg; and adjusting the vibration reduction of each support leg according to the vibration reduction correction instruction.

[0065] It should be noted that the vibration reduction system provided in this application embodiment, due to the vibration reduction support component provided in this application embodiment, can achieve the beneficial effects that any vibration reduction system provided in this application embodiment can achieve, as detailed in the preceding embodiments, and will not be repeated here.

[0066] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A vibration reduction system, characterized in that, It includes a bottom plate and a top plate that are spaced apart from each other, and a vibration damping support assembly disposed between the bottom plate and the top plate; The vibration damping support assembly includes multiple support legs, multiple slave chassis, a main chassis, multiple valves, and multiple actuators. Each support leg is fixedly connected to the top plate, and each support leg is connected to a slave chassis, a valve, and an actuator. The main chassis is signal-connected to the multiple slave chassis, and each actuator is signal-connected to the corresponding slave chassis. The plurality of support legs are used to support the top plate; The plurality of slave chassis are used to acquire vibration data of the plurality of support legs respectively; The main unit is used to integrate the vibration data of the multiple support legs and determine the overall vibration data of the vibration reduction system, and send the overall vibration data to each slave unit. Each slave chassis is also used to determine vibration reduction correction instructions for each support leg based on the overall vibration data and the vibration data; The plurality of actuators are used to adjust the vibration reduction of each support leg according to the vibration reduction correction command.

2. The vibration reduction system according to claim 1, characterized in that, The main control chassis includes a first-level control chassis and multiple second-level control chassis; Each second-level control chassis is connected to a preset number of slave chassis, and each second-level control chassis is used to acquire the average vibration data of the corresponding preset number of slave chassis; The first-level control box is connected to the plurality of second-level control boxes via signals, and is used to calculate the overall vibration data based on the plurality of average vibration data from the plurality of second-level control boxes.

3. The vibration reduction system according to claim 1, characterized in that, The actuator includes at least one of an external voice coil motor, a vibration damping voice coil motor, and a valve regulator; the vibration damping correction command also includes at least one of an external voice coil correction command, a vibration damping voice coil correction command, and a valve opening adjustment command. The main unit is also used to acquire the vibration data change value of each support leg, and when the vibration data change value is greater than a preset change threshold, output the external voice coil correction command to the external voice coil motor, and / or output the vibration damping voice coil correction command to the vibration damping voice coil motor, and / or output the valve opening adjustment command to the valve regulator.

4. The vibration reduction system according to claim 1, characterized in that, The actuator includes an external voice coil motor and a vibration damping voice coil motor; the vibration damping correction command also includes an external voice coil correction command and a vibration damping voice coil correction command. The main unit also includes a current displacement characteristic acquisition module, which is used to acquire the current displacement characteristic curve of the external voice coil motor in real time and compare the current displacement characteristic curve with a preset motor rated load curve and a displacement threshold. When the current displacement characteristic curve exceeds the preset motor rated load curve and / or exceeds the displacement threshold, the vibration damping voice coil correction command is output to the vibration damping voice coil motor; otherwise, the external voice coil correction command is output to the external voice coil motor.

5. The vibration reduction system according to claim 1, characterized in that, The vibration reduction system also includes an environmental data acquisition module, which is connected to the main unit and is used to acquire environmental vibration data of the vibration reduction system. The main unit is also used to determine the overall vibration data based on the environmental vibration data and the vibration data of the multiple support legs.

6. The vibration reduction system according to claim 1, characterized in that, The slave device includes a target acquisition module and a correction algorithm module; The target acquisition module is used to determine the target vibration of the slave chassis based on the overall vibration data. The correction algorithm module is used to calculate the difference between the target vibration and the vibration data of the slave chassis, determine the vibration offset of each support leg, and generate the vibration reduction correction command based on the vibration offset.

7. The vibration reduction system according to claim 6, characterized in that, The target vibration includes at least one of the following: the overall vibration data itself, the entered target vibration data, and the target data obtained by adjusting and calculating the overall vibration data; The step of adjusting and calculating the target data from the overall vibration data specifically includes: The overall vibration data and the vibration data of each slave chassis are calculated collaboratively using a proportional-integral-derivative adjustment algorithm to determine the vibration data value corresponding to the minimum vibration correction value as the target data.

8. The vibration reduction system according to claim 1, characterized in that, The main chassis and the plurality of slave chassis are connected by optical communication via an Ethernet switch; The Ethernet switch includes a fiber optic switch or a hybrid optoelectronic switch.

9. A vibration reduction method, characterized in that, Applied to the vibration reduction system as described in any one of claims 1-8, comprising: Acquire vibration data from multiple support legs; The vibration data of the multiple support legs are integrated to determine the overall vibration data of the vibration reduction system; Based on the overall vibration data and the vibration data of each support leg, determine the vibration reduction correction command for each support leg; The vibration reduction adjustment is performed on each support leg according to the vibration reduction correction command.

10. A semiconductor manufacturing apparatus, characterized in that, It includes a memory and a processor, wherein the memory stores a computer program, and when the computer program is executed by the processor, the processor causes the processor to perform the following steps: Acquire vibration data from multiple support legs; The vibration data of the multiple support legs are integrated to determine the overall vibration data of the vibration reduction system; Based on the overall vibration data and the vibration data of each support leg, determine the vibration reduction correction command for each support leg; The vibration reduction adjustment is performed on each support leg according to the vibration reduction correction command.

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