Sampling compensation circuit, voltage sampling device and radio frequency power supply equipment

Abstract

The invention provides a sampling compensation circuit, a voltage sampling device and radio frequency power supply equipment, and relates to the technical field of power electronics, the sampling compensation circuit is used for compensating a sampling voltage value obtained by a voltage sampling circuit, the voltage sampling circuit at least comprises a sampling diode, the sampling diode is used for rectifying a to-be-detected alternating current signal, and the to-be-detected alternating current signal is sent to the sampling compensation circuit. Therefore, a sampling voltage signal is obtained. The sampling compensation circuit comprises a voltage drop acquisition unit and a sampling compensation unit. The first input end and the second input end of the voltage drop obtaining unit are used for being connected with the first end and the second end of the sampling diode respectively, and the voltage drop obtaining unit is used for obtaining a voltage difference signal. The sampling compensation unit is used for acquiring a sampling voltage signal output by the second end of the sampling diode and a voltage difference signal output by the first output end of the voltage drop acquisition unit, and compensating the sampling voltage signal according to the voltage difference signal to obtain a corrected sampling signal. According to the invention, a more accurate sampling voltage value can be obtained.

Description

Technical Field

[0001] This application relates to the field of power electronics technology, and in particular to a sampling compensation circuit, a voltage sampling device, and a radio frequency power supply device. Background Technology

[0002] Currently, in the field of power electronics, voltage sampling is widely used in various power electronic devices. When sampling AC signals, diodes are often used. However, there is a voltage drop across the diode, which causes the obtained sampled voltage value to deviate from the actual AC signal voltage value. Therefore, how to compensate for the voltage drop across the diode to obtain a more accurate sampled voltage value has become a problem that needs to be considered. Summary of the Invention

[0003] This application provides a sampling compensation circuit, a voltage sampling device, and an RF power supply device, which can obtain more accurate sampling voltage values.

[0004] In a first aspect, a sampling compensation circuit is provided. This circuit compensates for a sampled voltage value obtained by a voltage sampling circuit. The voltage sampling circuit includes at least a sampling input terminal, a sampling output terminal, and a sampling diode. The sampling input terminal is used to input a test AC signal. A first terminal of the sampling diode is connected to the sampling input terminal. The sampling diode rectifies the test AC signal to obtain a sampled voltage signal, which is then output through a second terminal. The sampling compensation circuit includes a voltage drop acquisition unit and a sampling compensation unit. The voltage drop acquisition unit includes a first input terminal, a second input terminal, and a first output terminal. The first and second input terminals are respectively connected to the first and second terminals of the sampling diode. The voltage drop acquisition unit acquires a voltage difference signal reflecting the voltage difference between the first and second terminals of the sampling diode based on the voltage signals input to the first and second input terminals, and outputs the voltage difference signal through the first output terminal. The sampling compensation unit is connected to the first output terminal of the voltage drop acquisition unit and the second terminal of the sampling diode, and is also connected to the sampling output terminal. The sampling compensation unit is used to acquire the sampling voltage signal output from the second terminal of the sampling diode and the voltage difference signal output from the first output terminal of the voltage drop acquisition unit, and to compensate the sampling voltage signal according to the voltage difference signal to obtain a corrected sampling signal, and then output the corrected sampling signal through the sampling output terminal.

[0005] In one possible implementation, the voltage sampling circuit further includes an isolation unit connected between a first input terminal of the voltage drop acquisition unit and a first terminal of the sampling diode, and / or connected between a second input terminal of the voltage drop acquisition unit and a second terminal of the sampling diode. The isolation unit is used to isolate the first input terminal of the voltage drop acquisition unit from the first terminal of the sampling diode, and / or to isolate the second input terminal of the voltage drop acquisition unit from the second terminal of the sampling diode.

[0006] In one possible implementation, the voltage sampling circuit further includes a filtering unit connected between the sampling compensation unit and the sampling output terminal. The filtering unit is used to filter the corrected sampling signal output by the sampling compensation unit.

[0007] In one possible implementation, the voltage sampling circuit further includes a feedforward unit connected to the first output terminal of the voltage drop acquisition unit and the sampling input terminal, and connected to the first terminal of the sampling diode. The feedforward unit is used to compensate the AC signal under test based on the voltage difference signal to obtain a compensated AC signal under test. The sampling diode is used to rectify the compensated AC signal under test to obtain the sampled voltage signal.

[0008] In one possible implementation, the feedforward unit includes a first arithmetic module. Two input terminals of the first arithmetic module are connected to the first output terminal of the voltage drop acquisition unit and the sampling input terminal, respectively. The output terminal of the first arithmetic module is connected to the first terminal of the sampling diode. The first arithmetic module is used to perform an addition operation on the voltage difference signal and the AC signal under test to obtain the compensated AC signal under test.

[0009] In one possible implementation, the feedforward unit is further connected to the second terminal of the sampling diode, and the feedforward unit also includes a first comparison module and a processing module. One input terminal of the first comparison module is connected to the second terminal of the sampling diode, and the other input terminal of the first comparison module is used to input a preset AC signal. The first comparison module is used to compare the sampled voltage signal with the preset AC signal to obtain a comparison result signal. The trigger terminal of the processing module is connected to the output terminal of the first comparison module, the input terminal of the processing module is connected to the first output terminal of the voltage drop acquisition unit, and the output terminal of the processing module is connected to one input terminal of the first arithmetic module. The processing module is used to multiply the voltage difference signal with a first coefficient signal or a second coefficient signal according to the level of the comparison result signal to obtain a modulated voltage difference signal. The first arithmetic module is used to add the modulated voltage difference signal to the AC signal under test to obtain the compensated AC signal under test.

[0010] In one possible implementation, the voltage drop acquisition unit includes a first differential module. The two input terminals of the first differential module are respectively the first input terminal and the second input terminal of the voltage drop acquisition unit, and the output terminal of the first differential module is the first output terminal of the voltage drop acquisition unit. The first differential module is used to acquire a voltage difference signal reflecting the voltage difference between the first and second terminals of the sampling diode based on the voltage signals input to the first and second input terminals, respectively.

[0011] In one possible implementation, the sampling compensation unit includes a second arithmetic module. Two input terminals of the second arithmetic module are respectively connected to the first output terminal of the voltage drop acquisition unit and the second terminal of the sampling diode. The output terminal of the second arithmetic module is connected to the sampling output terminal. Specifically, the second arithmetic module receives the sampling voltage signal output from the second terminal of the sampling diode and the voltage difference signal output from the first output terminal of the voltage drop acquisition unit, and performs an addition operation on the voltage difference signal and the sampling voltage signal to obtain the corrected sampling signal.

[0012] Secondly, a voltage sampling device is also provided, comprising a voltage sampling circuit and a sampling compensation circuit. The sampling compensation circuit compensates for the sampled voltage value obtained by the voltage sampling circuit. The voltage sampling circuit includes at least a sampling input terminal, a sampling output terminal, and a sampling diode. The sampling input terminal is used to input a test AC signal. The first terminal of the sampling diode is connected to the sampling input terminal. The sampling diode rectifies the test AC signal to obtain a sampled voltage signal, which is then output through the second terminal of the sampling diode. The sampling compensation circuit includes a voltage drop acquisition unit and a sampling compensation unit. The voltage drop acquisition unit includes a first input terminal, a second input terminal, and a first output terminal. The first and second input terminals of the voltage drop acquisition unit are respectively connected to the first and second terminals of the sampling diode. The voltage drop acquisition unit acquires a voltage difference signal reflecting the voltage difference between the first and second terminals of the sampling diode based on the voltage signals input to the first and second input terminals, and outputs the voltage difference signal through the first output terminal. The sampling compensation unit is connected to the first output terminal of the voltage drop acquisition unit and the second terminal of the sampling diode, and is also connected to the sampling output terminal. The sampling compensation unit is used to acquire the sampling voltage signal output from the second terminal of the sampling diode and the voltage difference signal output from the first output terminal of the voltage drop acquisition unit, and to compensate the sampling voltage signal according to the voltage difference signal to obtain a corrected sampling signal, and then output the corrected sampling signal through the sampling output terminal.

[0013] Thirdly, an radio frequency (RF) power supply device is also provided, comprising an RF power supply unit and a voltage sampling unit. The voltage sampling unit includes a voltage sampling circuit and a sampling compensation circuit.

[0014] The sampling compensation circuit, voltage sampling device, and RF power supply equipment of this application obtain a voltage difference signal reflecting the voltage difference between the first and second terminals of the sampling diode by configuring a voltage drop acquisition unit, thereby obtaining the voltage drop value of the sampling diode. Then, by configuring a sampling compensation unit, the sampling voltage signal obtained by the sampling diode is compensated according to the voltage difference signal to obtain a corrected sampling signal, thereby realizing the compensation of the sampling voltage signal. Finally, the corrected sampling signal is output through the sampling output terminal. The corrected sampling signal can more accurately reflect the voltage value of the AC signal under test. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the background art, the accompanying drawings used in the embodiments of this application or the background art will be described below.

[0016] Figure 1This is a schematic diagram of the sampling compensation circuit in some embodiments of this application.

[0017] Figure 2 This is another schematic diagram of the sampling compensation circuit in some embodiments of this application.

[0018] Figure 3 This is yet another schematic diagram of the sampling compensation circuit in some embodiments of this application.

[0019] Figure 4 The following is a circuit diagram illustrating the feedforward unit of the sampling compensation circuit in some embodiments of this application.

[0020] Figure 5 The circuit diagrams illustrating the voltage drop acquisition unit of the sampling compensation circuit are shown in some embodiments of this application.

[0021] Figure 6 The following is a circuit diagram illustrating the sampling compensation unit of the sampling compensation circuit in some embodiments of this application.

[0022] Figure 7 This is a schematic diagram of a voltage sampling device in some embodiments of this application.

[0023] Figure 8 This is a schematic diagram of a radio frequency power supply device in some embodiments of this application.

[0024] Explanation of reference numerals in the attached figures: 10, sampling compensation circuit; 110, voltage drop acquisition unit; 120, sampling compensation unit; 130, isolation unit; 140, filtering unit; 150, feedforward unit; 151, first arithmetic module; 152, first comparison module; 153, processing module; 111, first differential module; 121, second arithmetic module; VS1, voltage difference signal; SS2, correction sampling signal; AC2, preset AC signal; CS1, comparison result signal; 20, voltage sampling circuit; 210, sampling input terminal; 220, sampling output terminal; D1, sampling diode; AC1, AC signal to be measured; SS1, sampling voltage signal; 30, voltage sampling device; 40, RF power supply device; 1000, RF power supply equipment. Detailed Implementation

[0025] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0026] In the description of the embodiments of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0027] Hereinafter, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of embodiments of this application, unless otherwise stated, "a plurality of" means two or more.

[0028] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion, such that a process, method, system, product, or server that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such processes, methods, products, or devices.

[0029] Please see Figure 1 , Figure 1 This is a schematic diagram of the sampling compensation circuit in some embodiments of this application. For example... Figure 1As shown, this application provides a sampling compensation circuit 10, which is used to compensate the sampled voltage value obtained by the voltage sampling circuit 20. The voltage sampling circuit 20 includes at least a sampling input terminal 210, a sampling output terminal 220, and a sampling diode D1. The sampling input terminal 210 is used to input the AC signal AC1 to be measured. The first terminal of the sampling diode D1 is connected to the sampling input terminal 210, and the sampling diode D1 is used to rectify the AC signal AC1 to obtain a sampled voltage signal SS1, which is output through the second terminal of the sampling diode D1. The sampling compensation circuit 10 includes a voltage drop acquisition unit 110 and a sampling compensation unit 120. The voltage drop acquisition unit 110 includes a first input terminal, a second input terminal, and a first output terminal. The first and second input terminals of the voltage drop acquisition unit 110 are respectively connected to the first and second terminals of the sampling diode D1. The voltage drop acquisition unit 110 is used to acquire a voltage difference signal VS1 reflecting the voltage difference between the first and second terminals of the sampling diode D1 based on the voltage signals input to the first and second input terminals, and outputs the voltage difference signal VS1 through the first output terminal. The sampling compensation unit 120 is connected to the first output terminal of the voltage drop acquisition unit 110 and the second terminal of the sampling diode D1, and is connected to the sampling output terminal 220. The sampling compensation unit 120 is used to acquire the sampling voltage signal SS1 output from the second terminal of the sampling diode D1 and the voltage difference signal VS1 output from the first output terminal of the voltage drop acquisition unit 110, and compensates the sampling voltage signal SS1 based on the voltage difference signal VS1 to obtain a corrected sampling signal SS2, and then outputs the corrected sampling signal SS2 through the sampling output terminal 220.

[0030] Therefore, the sampling compensation circuit 10 described above in this application obtains the voltage difference signal VS1, which reflects the voltage difference between the first and second terminals of the sampling diode D1, by configuring the voltage drop acquisition unit 110, thereby obtaining the voltage drop value of the sampling diode D1. Then, by configuring the sampling compensation unit 120, the sampling voltage signal SS1 obtained by the sampling diode D1 is compensated according to the voltage difference signal VS1, thereby obtaining the corrected sampling signal SS2, thus realizing the compensation of the sampling voltage signal SS1. Then, the corrected sampling signal SS2 is output through the sampling output terminal 220. The corrected sampling signal SS2 can more accurately reflect the voltage value of the AC signal AC1 to be measured.

[0031] In some embodiments, the sampling input terminal 210 can be connected to the transmission path of the AC signal AC1 under test to input the AC signal AC1 under test. The AC signal AC1 under test can be a radio frequency signal, and its power value can be greater than or equal to a preset power value. For example, the preset power value can be 1kW, 1.5kW, 2kW, etc.

[0032] In some embodiments, the first terminal of the sampling diode D1 can be the positive terminal of the sampling diode D1, and the second terminal of the sampling diode D1 can be the negative terminal of the sampling diode D1.

[0033] In some embodiments, the voltage sampling circuit 20 may further include a filter capacitor connected between the second terminal of the sampling diode D1 and ground. The filter capacitor is used to filter the sampled voltage signal SS1 to obtain a filtered sampled voltage signal SS1. Correspondingly, the sampling compensation unit 120 is used to compensate the filtered sampled voltage signal SS1 according to the voltage difference signal VS1 to obtain a corrected sampled signal SS2, and then outputs the corrected sampled signal SS2 through the sampling output terminal 220. Thus, the corrected sampled signal SS2 can be obtained in a more stable state.

[0034] In some embodiments, the voltage drop acquisition unit 110 can obtain the voltage values ​​of the first and second terminals of the sampling diode D1 by sampling the voltage signals input to the first and second input terminals respectively, and then obtain the voltage difference signal VS1 reflecting the voltage difference between the first and second terminals of the sampling diode D1 through logical operations. Alternatively, the voltage difference signal VS1 reflecting the voltage difference between the first and second terminals of the sampling diode D1 can be obtained directly based on the voltage signals input to the first and second input terminals respectively.

[0035] Furthermore, the first input terminal of the voltage drop acquisition unit 110 can be connected to the first terminal of the sampling diode D1 through the connection point between the sampling input terminal 210 and the first terminal of the sampling diode D1, and the second input terminal of the voltage drop acquisition unit 110 can be connected to the second terminal of the sampling diode D1 through the connection point between the second terminal of the sampling diode D1 and the sampling output terminal 220.

[0036] Furthermore, the connection point between the sampling input terminal 210 and the first terminal of the sampling diode D1 can be the first sampling point, and the connection point between the second terminal of the sampling diode D1 and the sampling output terminal 220 can be the second sampling point.

[0037] Please see Figure 2 , Figure 2 This is another schematic diagram of the sampling compensation circuit in some embodiments of this application. For example... Figure 2As shown, the voltage sampling circuit 20 further includes an isolation unit 130, which is connected between the first input terminal of the voltage drop acquisition unit 110 and the first terminal of the sampling diode D1, and / or between the second input terminal of the voltage drop acquisition unit 110 and the second terminal of the sampling diode D1. The isolation unit 130 is used to isolate the first input terminal of the voltage drop acquisition unit 110 from the first terminal of the sampling diode D1, and / or to isolate the second input terminal of the voltage drop acquisition unit 110 from the second terminal of the sampling diode D1.

[0038] Therefore, the sampling compensation circuit 10 described above in this application, by configuring the isolation unit 130, can effectively avoid the transmission disturbance of the AC signal AC1 under test when the power value of the AC signal AC1 under test is large, especially when the power value of the AC signal AC1 under test is greater than or equal to the preset power value, thereby reducing the adverse effects on the voltage drop value acquisition process of the sampling diode D1.

[0039] In some embodiments, the isolation unit 130 may include at least one high-pass filter, each high-pass filter being connected between the first input terminal of the voltage drop acquisition unit 110 and the first terminal of the sampling diode D1, or each high-pass filter being connected between the second input terminal of the voltage drop acquisition unit 110 and the second terminal of the sampling diode D1.

[0040] like Figure 2 As shown, the voltage sampling circuit 20 also includes a filtering unit 140, which is connected between the sampling compensation unit 120 and the sampling output terminal 220. The filtering unit 140 is used to filter the correction sampling signal SS2 output by the sampling compensation unit 120.

[0041] Therefore, the sampling compensation circuit 10 described above in this application, by configuring the filtering unit 140 to filter the corrected sampling signal SS2 output by the sampling compensation unit 120, can avoid the error caused by the disturbance of the corrected sampling signal SS2 and further improve the accuracy of the corrected sampling signal SS2.

[0042] In some embodiments, the filtering unit 140 may include a low-pass filter connected between the sampling compensation unit 120 and the sampling output terminal 220.

[0043] Please see Figure 3 , Figure 3 This is yet another schematic diagram of the sampling compensation circuit in some embodiments of this application. For example... Figure 3As shown, the voltage sampling circuit 20 also includes a feedforward unit 150, which is connected to the first output terminal and the sampling input terminal 210 of the voltage drop acquisition unit 110, and is also connected to the first terminal of the sampling diode D1. The feedforward unit 150 is used to compensate the AC signal AC1 under test based on the voltage difference signal VS1 to obtain the compensated AC signal AC1 under test. The sampling diode D1 is used to rectify the compensated AC signal AC1 under test to obtain the sampling voltage signal SS1.

[0044] Therefore, the sampling compensation circuit 10 described above in this application, by configuring the feedforward unit 150 to cooperate with the sampling compensation unit 120, can perform compensation at both the first and second ends of the sampling diode D1, thereby improving the stability of voltage drop compensation.

[0045] Please refer to the following: Figure 4 , Figure 4 The following are circuit diagrams illustrating the feedforward unit of the sampling compensation circuit in some embodiments of this application. For example... Figure 3 , Figure 4 As shown, the feedforward unit 150 includes a first arithmetic module 151. The two input terminals of the first arithmetic module 151 are connected to the first output terminal of the voltage drop acquisition unit 110 and the sampling input terminal 210, respectively. The output terminal of the first arithmetic module 151 is connected to the first terminal of the sampling diode D1. The first arithmetic module 151 is used to perform an addition operation on the voltage difference signal VS1 and the AC signal AC1 to be measured, to obtain the compensated AC signal AC1 to be measured.

[0046] Therefore, the sampling compensation circuit 10 described above in this application performs an addition operation on the voltage difference signal VS1 and the AC signal AC1 to be measured by configuring the first arithmetic module 151 to compensate at the first end of the sampling diode D1, thereby pre-compensating the voltage drop of the sampling diode D1.

[0047] In some embodiments, the first arithmetic module 151 may include an adder.

[0048] like Figure 3 , Figure 4As shown, the feedforward unit 150 is also connected to the second terminal of the sampling diode D1, and the feedforward unit 150 further includes a first comparison module 152 and a processing module 153. One input terminal of the first comparison module 152 is connected to the second terminal of the sampling diode D1, and the other input terminal of the first comparison module 152 is used to input a preset AC signal AC2. The first comparison module 152 is used to compare the sampled voltage signal SS1 with the preset AC signal AC2 to obtain a comparison result signal CS1. The trigger terminal of the processing module 153 is connected to the output terminal of the first comparison module 152, the input terminal of the processing module 153 is connected to the first output terminal of the voltage drop acquisition unit 110, and the output terminal of the processing module 153 is connected to one input terminal of the first arithmetic module 151. The processing module 153 is used to multiply the voltage difference signal VS1 with the first coefficient signal or the second coefficient signal according to the level of the comparison result signal CS1 to obtain the modulated voltage difference signal VS1. The first arithmetic module 151 is used to perform an addition operation on the modulated voltage difference signal VS1 and the AC signal AC1 to be measured, so as to obtain the compensated AC signal AC1 to be measured.

[0049] Therefore, the sampling compensation circuit 10 described above in this application, based on the fact that the voltage drop value of the sampling diode D1 is different when the power of the AC signal AC1 under test is different, and the voltage drop value change of the sampling diode D1 is not a uniform curve, in order to provide more accurate feedforward compensation, first compares the sampled voltage signal SS1 with the preset AC signal AC2 to determine whether to use the first coefficient signal or the second coefficient signal to modulate the voltage difference signal VS1, so as to obtain a better feedforward compensation effect and balance the additional voltage drop caused by the feedforward compensation.

[0050] Furthermore, the output of the first arithmetic module 151 can be connected to the first sampling point to connect to the first end of the sampling diode D1, and one of the inputs of the first comparison module 152 can be connected to the second sampling point and the sampling compensation unit 120 to connect to the second end of the sampling diode D1.

[0051] In some embodiments, the voltage value of the preset AC signal AC2 can be set according to specific needs. For example, the voltage value of the preset AC signal AC2 can be set according to the voltage drop change curve of the sampling diode D1. Furthermore, the voltage value of the preset AC signal AC2 can be within a first range of the voltage drop change rate of the sampling diode D1.

[0052] In some embodiments, both the first coefficient signal and the second coefficient signal can be greater than a constant 1, and the first coefficient signal can be less than the second coefficient signal. Setting either the first or second coefficient signal can directly and completely compensate for the voltage drop of the sampling diode D1 during feedforward compensation, thus requiring only a minor correction by the sampling compensation unit 120. Alternatively, it can over-compensate for the voltage drop of the sampling diode D1 during feedforward compensation, requiring a larger correction by the sampling compensation unit 120. This avoids errors caused by insufficient sampling accuracy and increases the accuracy of sampling compensation.

[0053] In some embodiments, when the sampled voltage signal SS1 is greater than the preset AC signal AC2, the level of the comparison result signal CS1 is high, and when the sampled voltage signal SS1 is less than the preset AC signal AC2, the level of the comparison result signal CS1 is low. The processing module 153 is used to multiply the voltage difference signal VS1 with the first coefficient signal when the level of the comparison result signal CS1 is low, and to multiply the voltage difference signal VS1 with the second coefficient signal when the level of the comparison result signal CS1 is high, so as to obtain the modulated voltage difference signal VS1.

[0054] In some embodiments, the first comparison module 152 may include an operational amplifier.

[0055] In some embodiments, the processing module 153 may include one or more of a multiplier and a processor. The processor may be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), application-specific integrated circuit (ASIC), field-programmable gate array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, or other logic control devices. It may also be a microprocessor such as a micro control unit (MCU).

[0056] Please see Figure 5 , Figure 5 The following are circuit diagrams illustrating the voltage drop acquisition unit of the sampling compensation circuit in some embodiments of this application. Figure 5As shown, the voltage drop acquisition unit 110 includes a first differential module 111. The two input terminals of the first differential module 111 are the first input terminal and the second input terminal of the voltage drop acquisition unit 110, respectively, and the output terminal of the first differential module 111 is the first output terminal of the voltage drop acquisition unit 110. The first differential module 111 is used to acquire a voltage difference signal VS1 reflecting the voltage difference between the first and second terminals of the sampling diode D1 based on the voltage signals input to the first and second input terminals, respectively.

[0057] Therefore, the sampling compensation circuit 10 described above in this application, by setting the first differential module 111, can directly obtain the voltage difference signal VS1 reflecting the voltage difference between the first and second terminals of the sampling diode D1 based on the voltage signals input to the first input terminal and the second input terminal respectively.

[0058] Please see Figure 6 , Figure 6 The following are circuit diagrams illustrating the sampling compensation unit of the sampling compensation circuit in some embodiments of this application. For example... Figure 6 As shown, the sampling compensation unit 120 includes a second arithmetic module 121. The two input terminals of the second arithmetic module 121 are respectively connected to the first output terminal of the voltage drop acquisition unit 110 and the second terminal of the sampling diode D1. The output terminal of the second arithmetic module 121 is connected to the sampling output terminal 220. Specifically, the second arithmetic module 121 receives the sampling voltage signal SS1 output from the second terminal of the sampling diode D1 and the voltage difference signal VS1 output from the first output terminal of the voltage drop acquisition unit 110, and performs an addition operation on the voltage difference signal VS1 and the sampling voltage signal SS1 to obtain the corrected sampling signal SS2.

[0059] Therefore, the sampling compensation circuit 10 described above in this application, by setting the second arithmetic module 121, can realize voltage drop compensation for the sampling voltage signal SS1, and sum the voltage difference signal VS1 with the sampling voltage signal SS1 to obtain the corrected sampling signal SS2.

[0060] Furthermore, one of the input terminals of the second arithmetic module 121 can be connected to the first output terminal of the voltage drop acquisition unit 110, and the other input terminal of the second arithmetic module 121 can be connected to the second sampling point to connect to the second terminal of the sampling diode D1.

[0061] In some embodiments, the second arithmetic module 121 may include an adder.

[0062] Specifically, the logical operation between one signal and another signal mentioned above can be to perform a logical operation between the values ​​of one signal and another signal at the same time to obtain other signals.

[0063] The sampling compensation circuit 10 of this application, through the above structure and by adopting multiple compensation methods, can realize the compensation of the sampling voltage signal SS1, and the corrected sampling signal SS2 can more accurately reflect the voltage value of the AC signal AC1 under test.

[0064] Please see Figure 7 , Figure 7 This is a schematic diagram of a voltage sampling device in some embodiments of this application. For example... Figure 7 As shown, this application also provides a voltage sampling device 30, which includes a voltage sampling circuit 20 and a sampling compensation circuit 10 in any of the foregoing embodiments.

[0065] Please refer to it again. Figure 1 .like Figure 1 As shown, the sampling compensation circuit 10 is used to compensate the sampled voltage value obtained by the voltage sampling circuit 20. The voltage sampling circuit 20 includes at least a sampling input terminal 210, a sampling output terminal 220, and a sampling diode D1. The sampling input terminal 210 is used to input the AC signal AC1 to be measured. The first terminal of the sampling diode D1 is connected to the sampling input terminal 210. The sampling diode D1 is used to rectify the AC signal AC1 to obtain a sampled voltage signal SS1, which is then output through the second terminal of the sampling diode D1. The sampling compensation circuit 10 includes a voltage drop acquisition unit 110 and a sampling compensation unit 120. The voltage drop acquisition unit 110 includes a first input terminal, a second input terminal, and a first output terminal. The first and second input terminals of the voltage drop acquisition unit 110 are respectively connected to the first and second terminals of the sampling diode D1. The voltage drop acquisition unit 110 is used to acquire a voltage difference signal VS1 reflecting the voltage difference between the first and second terminals of the sampling diode D1 based on the voltage signals input to the first and second input terminals, respectively, and outputs the voltage difference signal VS1 through the first output terminal. The sampling compensation unit 120 is connected to the first output terminal of the voltage drop acquisition unit 110 and the second terminal of the sampling diode D1, and is connected to the sampling output terminal 220. The sampling compensation unit 120 is used to acquire the sampling voltage signal SS1 output from the second terminal of the sampling diode D1 and the voltage difference signal VS1 output from the first output terminal of the voltage drop acquisition unit 110, and to compensate the sampling voltage signal SS1 according to the voltage difference signal VS1 to obtain the corrected sampling signal SS2, and then output the corrected sampling signal SS2 through the sampling output terminal 220.

[0066] For a more detailed description of the sampling compensation circuit 10, please refer to the relevant content of the sampling compensation circuit 10 in any of the foregoing embodiments, which will not be repeated here.

[0067] The sampling compensation circuit 10 and voltage sampling device 30 of this application, through the above structure and by adopting multiple compensation methods, can realize the compensation of the sampled voltage signal SS1, and the corrected sampled signal SS2 can more accurately reflect the voltage value of the AC signal AC1 to be measured.

[0068] Please see Figure 8 , Figure 8 This is a schematic diagram of a radio frequency power supply device in some embodiments of this application. For example... Figure 8 As shown, this application also provides an RF power supply device 1000, which includes an RF power supply unit 40 and a voltage sampling device 30 in any of the foregoing embodiments.

[0069] Please refer to it again. Figure 1 .like Figure 1 As shown, the voltage sampling device 30 includes a voltage sampling circuit 20 and a sampling compensation circuit 10.

[0070] For a more detailed description of the voltage sampling device 30, please refer to the relevant content of the voltage sampling device 30 in any of the foregoing embodiments, which will not be repeated here.

[0071] In some embodiments, the radio frequency power supply device 40 is used to output the AC signal AC1 to be tested.

[0072] The sampling compensation circuit 10, voltage sampling device 30, and radio frequency power supply device 1000 of this application, through the above structure and by adopting multiple compensation methods, can realize the compensation of the sampled voltage signal SS1, and the corrected sampled signal SS2 can more accurately reflect the voltage value of the AC signal AC1 under test.

[0073] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Where there is no conflict, the embodiments and features in the embodiments of this application can be combined with each other. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A sampling compensation circuit, characterized in that, This is used to compensate for the sampled voltage value obtained by the voltage sampling circuit. The voltage sampling circuit includes at least a sampling input terminal, a sampling output terminal, and a sampling diode. The sampling input terminal is used to input the AC signal to be measured. The first terminal of the sampling diode is connected to the sampling input terminal. The sampling diode is used to rectify the AC signal to be measured to obtain a sampled voltage signal and output it through the second terminal of the sampling diode. The sampling compensation circuit includes: A voltage drop acquisition unit includes a first input terminal, a second input terminal, and a first output terminal. The first input terminal and the second input terminal of the voltage drop acquisition unit are respectively connected to the first terminal and the second terminal of the sampling diode. The voltage drop acquisition unit is used to acquire a voltage difference signal reflecting the voltage difference between the first terminal and the second terminal of the sampling diode based on the voltage signals input to the first input terminal and the second input terminal respectively, and output the voltage difference signal through the first output terminal. A sampling compensation unit is connected to the first output terminal of the voltage drop acquisition unit and the second terminal of the sampling diode, and is also connected to the sampling output terminal. The sampling compensation unit is used to acquire the sampling voltage signal output from the second terminal of the sampling diode and the voltage difference signal output from the first output terminal of the voltage drop acquisition unit, and to compensate the sampling voltage signal according to the voltage difference signal to obtain a corrected sampling signal, and then output the corrected sampling signal through the sampling output terminal.

2. The sampling compensation circuit according to claim 1, characterized in that, The voltage sampling circuit further includes an isolation unit, which is connected between the first input terminal of the voltage drop acquisition unit and the first terminal of the sampling diode, and / or connected between the second input terminal of the voltage drop acquisition unit and the second terminal of the sampling diode; The isolation unit is used to isolate the first input terminal of the voltage drop acquisition unit from the first terminal of the sampling diode, and / or to isolate the second input terminal of the voltage drop acquisition unit from the second terminal of the sampling diode.

3. The sampling compensation circuit according to claim 1, characterized in that, The voltage sampling circuit further includes a filtering unit, which is connected between the sampling compensation unit and the sampling output terminal; The filtering unit is used to filter the corrected sampling signal output by the sampling compensation unit.

4. The sampling compensation circuit according to claim 1, characterized in that, The voltage sampling circuit further includes a feedforward unit, which is connected to the first output terminal of the voltage drop acquisition unit and the sampling input terminal, and is also connected to the first terminal of the sampling diode. The feedforward unit is used to compensate the AC signal under test according to the voltage difference signal to obtain the compensated AC signal under test, and the sampling diode is used to rectify the compensated AC signal under test to obtain the sampling voltage signal.

5. The sampling compensation circuit according to claim 4, characterized in that, The feedforward unit includes a first arithmetic module. The two input terminals of the first arithmetic module are respectively connected to the first output terminal of the voltage drop acquisition unit and the sampling input terminal. The output terminal of the first arithmetic module is connected to the first terminal of the sampling diode. The first arithmetic module is used to perform an addition operation on the voltage difference signal and the AC signal to be measured to obtain the compensated AC signal to be measured.

6. The sampling compensation circuit according to claim 5, characterized in that, The feedforward unit is also connected to the second terminal of the sampling diode, and the feedforward unit further includes a first comparison module and a processing module; One of the input terminals of the first comparison module is connected to the second terminal of the sampling diode, and the other input terminal of the first comparison module is used to input a preset AC signal. The first comparison module is used to compare the sampled voltage signal with the preset AC signal to obtain a comparison result signal. The trigger terminal of the processing module is connected to the output terminal of the first comparison module, the input terminal of the processing module is connected to the first output terminal of the voltage drop acquisition unit, and the output terminal of the processing module is connected to one of the input terminals of the first arithmetic module. The processing module is used to perform a multiplication operation on the voltage difference signal and the first coefficient signal or the second coefficient signal according to the level of the comparison result signal to obtain the modulated voltage difference signal. The first arithmetic module is used to perform an addition operation on the modulated voltage difference signal and the AC signal to be measured to obtain the compensated AC signal to be measured.

7. The sampling compensation circuit according to claim 1, characterized in that, The voltage drop acquisition unit includes a first differential module, the two input terminals of the first differential module are the first input terminal and the second input terminal of the voltage drop acquisition unit, and the output terminal of the first differential module is the first output terminal of the voltage drop acquisition unit. The first differential module is used to obtain the voltage difference signal reflecting the voltage difference between the first and second terminals of the sampling diode based on the voltage signals input to the first and second input terminals respectively.

8. The sampling compensation circuit according to claim 1, characterized in that, The sampling compensation unit includes a second arithmetic module. The two input terminals of the second arithmetic module are respectively connected to the first output terminal of the voltage drop acquisition unit and the second terminal of the sampling diode. The output terminal of the second arithmetic module is connected to the sampling output terminal. The second arithmetic module is used to receive the sampling voltage signal output from the second terminal of the sampling diode and the voltage difference signal output from the first output terminal of the voltage drop acquisition unit, and to perform an addition operation on the voltage difference signal and the sampling voltage signal to obtain the correction sampling signal.

9. A voltage sampling device, characterized in that, It includes a voltage sampling circuit and a sampling compensation circuit as described in any one of claims 1-8.

10. A radio frequency power supply device, characterized in that, It includes a radio frequency power supply device and a voltage sampling device as described in claim 9.

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